12471 妝 6pifd〇c 九、發明說明： 【發明所屬之技術領域] 本發明是有關於-種平板顯示器等顯示 :部件r陷檢查裝置，更具體地說，是有關於= 隨查的兩分辨能力化與檢查時_高速化的改良。 【先前技術】 陷产|^置„示器等顯示裝置與濾色鏡等部件的缺 輕合器件)照相機賴 i i 檢查®像錢顯色_絲號進行 才攝’根據拍攝所得的圖像資料； 如，參照專利文獻1}。 丁开丨^双查的裝置（例 圖1是表示歷來的缺陷檢查裝置的 圖。这晨，檢查對象用平板顯示器作1子的、、，口構 檢查斜象！是液晶面板顯示器 顯示裝置，在整個表面顯示黑色“寺：:顯不器等平板 像。CCD (電荷耗合器件）照相機等摄二色顯示等顯示圖 的圖像進行相攝，將圖像信號輪出2，對所顯示 發生部3 ,像處理部4的控制像處理部4。信號 圖像的顯像信號。輯處 檢查對象顯示 出生成所定的顯示圖像信號所需 迷發生部3輸 間進行控制⑽時控制信號，同=示資料、顯示時 檢測黑點（來發光缺陷）、白點 ^晝面的拍攝圖像 顯示部5是_示或打印檢查結果=_缺陷）等顯示缺陷。 1不裔或打印機等。操 6pif.doc 行操作的部^或觸知面板等構成，是操作員對檢查裝置進 為了查出點缺陷(黑：查影部2而言’既有 2的照相機來進行的檢查，又有為了：：陷而需要高解 樣的缺陷雖然报大 '、、、，-出顯示不均勻那 對於輝度值具有高分辨能小的缺陷而需要 :-台照相機來進行這些檢==檢查。如果 :r高分辨能力的_，必須::=二 ==ί:不均勻之二== 才双查衣置（例如，參照專利文獻〕 【特許文獻1】 ^公開之特開勒，15號公報 日本補早期公開之仙平9〜丨q丨23 6號公報 3CCD日，在檢查衫色圖像時，—般是用攝影部2用 相機的檢查裝置。3CCD照相機可以—次獲得 可:)進！2)、B (藍）的圖像，由於沒有可動部，因此 -點。另外，R、G、β各像素是在空間的同 ”、、上拍攝的，所以檢查的精度也高。 但是’要獲得高解析度，3個CCD的位置配合是非 12471 攸 6pifdoc 常難的技術問題，因此迄今為止，30::0照相機只 200萬像素左右的解析度的。 μ 在對檢查對象的色彩不均勻、輝度不均句等空間頻率 較低的（大）缺陷進行檢查的情況下，與檢查訝=二解析 度相同、或者比其還低的3CCD照相機也可適用。但是， ίϊί示=I像素級別的缺陷進行檢查的場合:《抽 樣疋律’ &查用的_機的像素數必須是被檢測對象的像 素數的縱橫各兩倍，即總數為其4倍的像素數。 因此’要採用能實現檢查對象4倍以上 黑白CCD的、結構如圖2所示的攝影部。㈣㈣ 是表示歷來的缺陷檢查裝置的攝影部的— 的結構圖。 在圖2中，渡色鏡7a、7b、7c(7c在圖中 裝在濾色鏡輪8上，設置於攝影鏡頭1()與、 (CCD)9之間。通過該滹色镱鈐的鏟 掛入射5「「μ丄 轉選出—個濾色鏡， 對入射至CCD的光_的透過波絲圍進 =快門11的開閉，對人射至哪的光信號進行〇]^ 在對檢查對象(圖中未表示出）進行檢查時，檢杳對象 的圖像鏡頭1WCD9上成像，―在對^色鏡: Tb^c進订切換的同時，分別取得例如可 二色域的圖像。通過對芎3個圄德、隹 > 扣 、 在運管德仃钱圖像處理，或 ，便可以對1像素的級別上的圖像 w的色衫的w、輝度的不均勻或色彩的不均勻進行檢 I2471Q^06pifd〇c 測。 但疋’使用圖2所不的攝影部的歷來的缺陷檢查農置 在對彩色圖像進行雜檢鱗，必須在攝影部設置帶 機構的濾色鏡，因此機構複雜。 〜另外，拍攝時濾色鏡的轉動需要時間，而且在進 勻、輝度不均勻等靠近頻率較低的檢查時也必須使 因此為了獲得1幅彩色圖像的拍攝以 及攝影貧料的傳送需要重復3次。 .jb^ 耗費時間的問題。 a㈣，存在者檢查非常 【發明内容】 本發明是為了解決這類歷來 題而開發完成的，其目的是提"查:置存在的問 需要照相油躺濾色鏡轉動機檨種缺·錄置，其不 等待時間，同時能將高解咖 料的傳送限制在最低限度，雜像減與攝影資 為讓本發明之上述和复他 ^ 易懂，下文特舉触實施例，並^躲和優點能更明顯 明如下。 X配合所附圖式，作詳細說 【實施方式】 下面參照附圖，對本發明進 圖3繞示本發明的缺陷檢杳壯了^細說明。 圖。與前面的附圖中相_部=^卜個實施例的結構 說明。 刀用同一符號標示，省略其 1247 糧6_, 另外，這裏的檢查對象 遽色鏡等進行檢杳板顯示器為例，在對 進行昭明：’從濾色鏡的背後 在圖3中，檢查_二3信號進行拍攝。 色照相機21中，裝著3C Λ疋平板顯不器。在3CCD彩 在高解析度照相機23壯恥相機用的攝影鏡頭22。 頭24。3CCD彩色照相擤解析度照相機用的攝影鏡 使其能拍攝檢杳對象的〃向解析度照相機23的設置 一打豕的整個鲔 3咖彩色照相機 ：广 置得與檢查對象的中心線一致^斤度照相機23的光軸設 相機（在圖3中是高解析度昭相=不可能將任何—台照 在這種情況τ，可以騎影鏡卿)，=_t心線上。 點與連接CCD與顯示器的中心的 使传攝影鏡頭的主 實施=，是將_度照相機攝===在本 各知相機的攝影信號由圖像：：4移動的。 圖像處理部4a，向信號發生部‘:知，收、處理。 仏號所需的、對顯示資料、顯示=、所定的顯示圖像 信號，同時從對象晝面的拍攝二行控制的定時控制 陷）、白點（輝點缺陷）等顯點（未發光缺 彩。另外，還要對缺陷的位置、大叼蚪確定該缺陷的色 另外，該圖像處理部4a也可、、以及輝度等進行檢測。 收照相機信號的至少一台計算機構成由、、二由圖像輪入板接 這裏，在本實施例中，考唐 度為XGA (橫ι〇24χ縱768像疋""查對象20的解析 的情況。在彩色顯示器 I2471Q46p,d〇e 的情況下，：1像素中有RGB 3個顯示單位，但 組刪定義為i像素。 Μ將一 析情況下’高解析度照相機23最好為縱橫的解 3又像素疋被檢查的顯不器的兩倍略有餘的照相機，也 是說，最好是2150xl600像素左右的解析度的照相機。不 3CCD彩色照相機21應選擇解析度為與被檢查的顯示哭 =夕、略有餘裕的1075x800像素左右的3CCD彩色照相 檢杳如圖3所示龍進彳爾。這時，因為 }象舁向解析度照相機的定位誤差以及高解 刀 士：的攝影鏡頭的像差的關係’要使檢 :: 1析度則目_咖的4像素完全—致;^素與 ::一D彩色照相機的〗像素完全一= 置產生因了 =解，職與咖彩色照相機的像辛位 的情況下:即使對比度較高、缺陷數目較少 素位置產生了 ^ ^相機與3 C C D彩色照相機的像 的困難。輝=出輝點的位置與色彩也沒有太大 的情況下，高解ίΐ對比度較低、缺陷數目較多 置的整合就重要了 、相機與3CCD彩色照相機的像素位 二對像素位置的整合進行說明。 …不疋檢查對象的顯示區域的輝點缺陷的表示 I2471946pif.doc 列。輝點缺陷30是財黑色顯示時發生在檢查 顯不區域31的明亮的輝點的缺陷（輝點缺陷）。 的 如圖5所示，在檢查對象2〇中，將1像 點（標記），相隔例如10像素等的一定間隔顯示出决的輝 例。圖5綠示是在檢輯象的顯示區域顯示標志的表示 輝點32是顯示出來的輝點，輝點％ 5亥例中，可以相輝點缺陷存在於左起第3列與、&。在 間’上起第2行與第3行之間。用高解析度昭^目4列之 分進行拍攝的圖像示意圖，如圖6所示，^ ^該部 相機對該部分進行拍攝的®像示;in，如圖7所示办色照 ，6、圖7中的格子表示各照相機的沈^ 在圖6中，a、b、c、d各點是檢查 ^素。12471 Makeup 6pifd〇c IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a flat panel display and the like: a component r trap inspection device, and more specifically, a two-resolution capability with respect to the check Improvement and speeding up. [Prior Art] Trap||Set the display device and other components such as the display device and the color filter.) Camera 赖 ii Inspection о 钱 显 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Refer to the patent document 1}. The device of Ding Kaizheng double check (Example 1 is a figure which shows the conventional defect inspection apparatus. This morning, the inspection target uses a flat panel display as one, and the mouth structure check oblique image! It is a liquid crystal panel display device that displays a black "Temple:: a flat panel image such as a display device, a CCD (charge-accommodating device) camera, etc., and a picture of a display image such as a two-color display on the entire surface, and the image signal is displayed. The rounding 2 is applied to the display generating unit 3, the image processing unit 4 of the image processing unit 4, and the image signal of the signal image. The image of the image to be inspected indicates that the image generating unit 3 is required to generate a predetermined display image signal. When the control signal (10) is controlled, the same as the display data, the detection of the black dot (the luminescent defect), the white-pointed photographic image display portion 5 is the display defect, or the display defect is displayed. . 1 African or printer, etc. The operation of the 6pif.doc line operation or the tactile panel is the operator's inspection of the inspection device to detect a point defect (black: the inspection unit 2 has a 2 camera, and has In order to:: Defects that require high resolution, although large, ',,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, :r high resolution ability _, must::=two == ί: unevenness == 双 double check clothing (for example, refer to the patent literature) [patent literature 1] ^ published Tekale, 15 bulletin Japan's early publication of the syllabus 9~丨q丨23 6 3CCD day, when checking the color image of the shirt, it is generally the inspection device for the camera using the camera unit 2. The 3CCD camera can be obtained in one time: !2), B (blue) image, because there is no moving part, so - point. In addition, each pixel of R, G, and β is captured on the same space and space, so the accuracy of inspection is also high. However, to obtain high resolution, the positional matching of three CCDs is often difficult for 12471 攸6pifdoc. The problem is that the 30::0 camera has only a resolution of about 2 million pixels. μ In the case of checking for (large) defects with low spatial frequencies such as uneven color and unevenness of the inspection object. It is also applicable to a 3CCD camera that is the same as or lower than the resolution of the second resolution. However, the case where the defect of the I pixel level is checked: "Sampling Law" & The number of pixels must be twice the number of pixels of the object to be detected, that is, the total number of pixels is 4 times the total number. Therefore, it is necessary to use a photographic portion as shown in FIG. 2 which can realize a black-and-white CCD of 4 times or more of the inspection object. (4) (4) is a configuration diagram showing the photographing unit of the conventional defect inspection device. In Fig. 2, the color mirrors 7a, 7b, and 7c (7c are mounted on the color filter wheel 8 in the figure, and are provided on the photographing lens 1 (). Between, and (CCD) 9. Pass The shovel of the 镱钤 入射 入射 入射 入射 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 丄 丄 丄 透过 透过 透过 透过 透过 透过 透过 透过 透过 透过 透过 = = = = = = = = = = = = ^ ^ When the inspection object (not shown) is inspected, the image lens 1WCD9 of the inspection object is imaged, and - for example, the two-color domain is obtained while switching the color mirror: Tb^c. Image. By 芎 3 圄 隹, 隹 、 、 、 、 、 、 、 、 、 在 在 在 在 在 在 在 在 在 在 在 在 在 图像 图像 图像 图像 图像 图像 图像 图像 图像 图像 图像 图像 图像 图像 图像 图像 图像 图像 图像 图像 图像Or the unevenness of the color is detected by the I2471Q^06pifd〇c test. However, the use of the conventional flaw detection of the photographing unit shown in Fig. 2 is performed on the color image, and the tape must be placed in the photographing unit. Color filter, so the mechanism is complicated. ~ In addition, it takes time to rotate the color filter during shooting, and it must be made in the case of uniformity, uneven brightness, etc., which are close to the lower frequency, so that in order to obtain a color image and poor photography The transfer needs to be repeated 3 times. .jb^ Time consuming Problem (a), the existence of the inspection is very [invention] The present invention was developed in order to solve such a long-standing problem, the purpose of which is to mention "check: the existence of the problem requires the photographic oil lying color filter rotating machine" It does not wait for time, and at the same time can limit the transmission of high-resolution coffee to a minimum. The illusion reduction and photography resources make the above and the above-mentioned inventions of the present invention easy to understand, and the following examples are specifically touched and And the advantages can be more clearly described below. X is described in detail with reference to the drawings. [Embodiment] Referring now to the drawings, the invention will be described in detail with reference to the drawings of the present invention. In the drawings, the structure of the embodiment is described. The knife is marked with the same symbol, and the 1247 grain 6_ is omitted. In addition, the inspection object such as the stencil mirror is used as an example of the inspection panel display, and the pair is performed in the following: 'From the back of the color filter in Fig. 3, check _ 2 3 signal Take a picture. The color camera 21 is equipped with a 3C Λ疋 flat panel display. The 3CCD color is used in the high-resolution camera 23 to shame the camera lens 22 for the camera. Head 24. 3CCD color camera 摄影 度 照相机 照相机 照相机 照相机 照相机 照相机 照相机 照相机 照相机 照相机 照相机 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖 咖The optical axis of the camera 23 is set to the camera (in the case of Fig. 3, the high resolution is shown in the figure = it is impossible to put any - the picture is in this case τ, can ride the mirror), = _t heart line. The point is connected to the center of the CCD and the display. The main implementation of the photographic lens =, is the _ degree camera shot === The camera signal of the camera is moved by the image::4. The image processing unit 4a recognizes, receives, and processes the signal generation unit. The nickname requires the display data, the display =, the specified display image signal, and the timing control from the two planes of the object to be controlled, and the white point (glow point defect) and other spots (unlit In addition, the position of the defect and the color of the defect are determined, and the image processing unit 4a may detect the brightness, etc. at least one computer that receives the camera signal is composed of In this embodiment, the degree of analysis is XGA (cross 〇 24 χ 768 疋 quot & & & 查 查 查 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 在 在 在 在 在 在 在 在 在 彩色 彩色 彩色 彩色 彩色 彩色 彩色 彩色 彩色 彩色 彩色 彩色 彩色 彩色 彩色In the case, there are RGB 3 display units in 1 pixel, but the group deletion is defined as i pixels. Μ In the case of analysis, the high-resolution camera 23 is preferably a vertical and horizontal solution 3 and a pixel is checked. The camera with a little more than twice the size, that is, the camera with a resolution of about 2150xl600 pixels. The resolution of the 3CCD color camera 21 should be selected to be about 1075x800 pixels with the display being cried. 3CCD color photography As shown in Figure 3, Long Jin Muer. At this time, because of the positional error of the resolution camera and the aberration of the high resolution knife: the photographic lens, the relationship is to be checked: 4 pixels completely--; ^ and :: a D-color camera 〗 〖Pixel completely = set the cause = solution, the color of the camera and the color camera like the symplectic: even higher contrast, the number of defects The low position creates the difficulty of the image of the camera and the 3 CCD color camera. If the position and color of the glow point are not too large, the integration of the high resolution and the number of defects is large. It is important to explain the integration of the pixel position of the camera and the 3CCD color camera with respect to the pixel position. ...Is the display of the bright spot defect of the display area of the object I2471946pif.doc column. The highlight defect 30 occurs when the black display is displayed. The defect of the bright bright spot of the display area 31 (the bright spot defect) is inspected. As shown in FIG. 5, in the inspection object 2, one image dot (mark) is displayed at a predetermined interval of, for example, 10 pixels or the like. The example of the dynasty. Figure 5 green In the display area of the check image, the display of the mark indicates that the bright spot 32 is the displayed bright spot. In the case of the bright point %5, the visible spot defect exists in the third column from the left and the & Between the second line and the third line, the image of the image taken with the high resolution of the four columns is shown in Figure 6, ^ ^ The image of the part of the camera is shot ;in, as shown in Fig. 7, color, the grid in Fig. 7 indicates the sink of each camera. In Fig. 6, the points a, b, c, and d are inspection elements.
輝點，P點是輝點缺陷。A、B、c、D各~ 20頌示的 上顯示為間隔為ίο像素，大小為1像素，<日a =對象20 CCD上則為間隔為2〇像素，大小為4像^—疋=解析度 的像素位置不是—致的。 ’、另外，CCD _在圖7中，A卜B1、C1、D1各點是檢 不的輝點。Pl點是輝點缺陷的位置，但是在3Γρ 相機的圖像中不能明確地判定這是輝點 ^心色照 A'B'C'D各點與在檢查對象2〇上的況下’ 間隔約為U)像素，大小約為"象素。〜、樣’顯示為 ‘能 因為圖6與圖7是投影_，所叫果以離A 各點的相對位置求出圖6中的P點的位置，則就）、 1247曜06 pif.doc 以離Α卜B1、C1、d】 點的位置。這時，通過求出】相對位置求出圖7中的ρι 各點的位置就可以用1像 點的重心位置，圖6、圖7 便可以從3CCD彩色照相二下的分辨能力求出。這二策， 出的輝點缺_色彩。’像求出高解析度照相機測 具體的處理順序如下。 、 在圖6的圖像中，p的人香 上的座彳示表示。以該座为/ 乂鬲解析度照相機的Ccd 像的座標系是以左上為=(f，YP)。這裏，CCD上的圖 向，下方向為Y的正方向，、0)’。右方向為乂的正方 在圖6中，以口ABCD f素為單位的χΥ座標系。 =Γ)為單位正方形，A: 座標㈣，《二(= 厂 7 Ί r —I ^ -ΚGlow point, point P is a glow point defect. A, B, c, and D are displayed on the upper side as ίο pixels, and the size is 1 pixel. <day a = object 20 CCD is 2 pixels apart, and the size is 4 like ^-疋= The pixel position of the resolution is not the same. In addition, in Fig. 7, each point of A, B1, C1, and D1 is a bright spot that is not detected. The P1 point is the position of the bright spot defect, but it cannot be clearly determined in the image of the 3Γρ camera that this is the point of the glow point ^heart color A'B'C'D and the condition of the inspection object 2〇 Approximately U) pixels with a size of approximately "pixels. ~, the sample 'displayed as ' can be because Figure 6 and Figure 7 is the projection _, the result is the position of the P point in Figure 6 with the relative position from each point of A, then), 1247曜06 pif.doc Take the position of the point B1, C1, d]. At this time, the position of the center of gravity of one image can be obtained by obtaining the position of each point of ρι in Fig. 7 by obtaining the relative position, and Fig. 6 and Fig. 7 can be obtained from the resolution of the 3CCD color camera. These two strategies, the lack of highlights _ color. The processing sequence for determining the high-resolution camera is as follows. In the image of Fig. 6, the representation of the scent of p is indicated. The coordinate of the Ccd image of the camera with this seat as the / resolution camera is = (f, YP) on the upper left. Here, the direction on the CCD is the positive direction of Y in the downward direction, 0)'. The right direction is the square of 乂. In Figure 6, the sacral system is the unit of ABCD. =Γ) is the unit square, A: coordinates (four), "two (= factory 7 Ί r -I ^ -Κ
少I 座標系中的座標（ip，mp)可 輝點缺陷p的（1，η 以用（丨）式求出。The coordinates (ip, mp) in the less-zero coordinate system can be used to find the point defect p (1, η is obtained by the formula (丨).
上的^地’❹圖7關像中3咖彩色照相機的CCD 、不（X ί，y 1)與以口八118110〗為單位正方來， /1 m\ xl 少1 標系為（u ’ml)的關係。以求得的变换矩 |罕马κ〈则可以表示為 /1 Γ ΚΙ 将式（2)变形 12 2 .....(3 ) 12471收 06pif.doc x\ =丄 '11' 乂 ml 将二，的辉点缺陷的坐标(1 P，mp)代入式⑴， 则^以求出辉点缺陷的3CCD彩色照相机的⑽上的坐 乂日寸，在輝點缺陷與顯示的輝點重 可以附目鄰的另外的顯示輝點代用。月 多恥附圖，對此進行說明。 對象==的*是用高解析度照相機拍攝的，在檢查 像的例子；示：二 相機的CCD的丨像素。圖。七子表示3CCD彩色照 像素)顯示勒。目♦間騎(例如每隔10 與圖8相同的部分的圖i的‘ 照相機拍攝的這時 3CCD彩色照相機拍攝的與圖9相二。：U繪不用 的附圖。 6 °卩分的圖像的例子 分，是重疊的。顯示的輝點D幾乎在同一部 CCD上的座標進行判定的重疊可以通過 照相機與3CCD彩色照相機的像素 13 I2471Q46Pif.d〇c 通常使用的C3ABCD變更為[I1AEIG。 另外，4個顯示輝點的選擇並不限於DAEIG，只要缺 陷在像DBCHF那樣，由包圍著缺陷的4個點連接而成的 正方形中就可以。 還有，在對濾色鏡等部件進行缺陷檢查的情況下，要先 準備好在已知位置上印有標記的無色透明的膠片，將其與 滤色鏡重S ’攝影’進行同樣的缺陷檢查。 然後，再用3CCD照相機圖像對輝度不均勻、線缺 陷、色彩不均勻等進行檢查。 、 圖12緣示根據本實施例，對檢查時間進行模擬的結 果的附圖。 々這是對歷來例的檢測裝置用的照相機與本發明的缺 陷檢查裝置的攝影時間所作的比較。歷來例的檢查用昭 =結構是，用黑白344萬像素照相機，以及用刪濾 經二J同Γ台照相機進行缺陷檢查，以及彩色不均勻、 344又萬像圖像檢查。而本發明對缺陷檢查用黑白 用，;均勻、輝度不均勻的檢查則 中高作又疋為了進行檢查’必須進行10次拍攝，其 4幅圖後二51像與彩色51像至少各需要3幅，由於其餘的 短&行1此盡可能按時間能縮 像，拍攝7次里白在歷來例中，要拍攝3次彩色圖 拍攝3 -欠里2:圖像’而本發明是拍攝7次彩色圖像， …白圖像。照相機的資料傳送時鐘脈衝為 I2471^06pifd〇c 10MHz，可以進行平行資料傳送。曝光時間固定在i〇〇毫 秒0 ^ 其結果是，進行檢查所需的全部時間，歷來例是8390 笔秒L而本發明是2622毫秒，為歷來例的1/3以下。實際 亡，這還疋加上了圖像處理的時間在内的，由於圖像處理 守1大致〃、像素數成比例，所以歷來例與本發明的圖像處 理時間所占比率差不多是相同的。 另外在實施例中，是將高解析度照相機移開光轴使 用^但是也可以讓高解析度照相機在光軸上，而將3CCD 彩色照相機移開光軸使用。 日本實施例中’圖5的輝點顯示只是用於兩個 陷的輝度級別與顯示輝‘心 度的鮮使用輝點缺陷的輝度。因此，也可以作輝 比其解析度低：：==== 檢查的内容分別❹不_㈣目ς。組合’根掳 疵等缺陷檢查，以及色彩不均、=、於進行微小的瑕 陷檢^在—_雜檢查切常枝較大的缺 退有，在本實施例中，在檢杳 一所用的輝點’對兩個照相機的ccd的像素座=于人^ 整合’但是只要兩個助機的相對位置或檢 機的成像倍率沒有菸哇微几 ^ ^ ......相 檢杳的敕個_ μ x又，便可以在設置檢測裝置時被 v查的1_面上’對兩個照相機的像素座標進行整人， 固有資料保存起來’在進行檢鱗用 不止另生外產的要求：例如，在液晶顯示器的生產線 的—種產品，而是可以根據當時的需要，生 ί=:Γ度各不相同的液晶顯示面板的情況下 迅速地改變檢查區域的面積。 機陣列來1V現龍來技術的說财朗過的照相 认旱“％析度的情況下，必驗行下 ⑽日if擴大構成照相機陣列的各照相機之間的間隔t瓖 相機的視野多少有歧重；些，使得各照 城。另外，在久且此復盍顯不面板的全部顯示區 城，外在各知、相機上裝上變焦鏡頭 行ff，使其符合上述的條件。進行這樣的調= 總是需要許多時_。 目有關，知細手動調整 另外，在進行自動調整的情 χγζ平臺，以及自動隹口…、祁枝又必須有 低，^疋_本發明用高解析度 •，因此口㈣二 _析度照相機進行點缺陷檢 查口此”要將照相機推遠柷 了，沒有像制照相機_纏〜職距膽—下就可以 械皁歹!那樣的因增加了照相機的數目 16 I247l%〇6pifd〇c 而u成凋整複雜化的問題，不會增加調整時間。同樣地， 在準備自動調整的情況下，只要有一個平臺，一個焦距調 整機構就行了，所以費用也比採用照相機陣列便宜。 還有，檢查對象的液晶顯示器是有視野角特性的，為了 分離視野角特性引起的亮度不均勻與不均勻缺陷，必須使 得檢查不均勻的照相機的視野角與檢查點缺陷的照相機相 同。因此，檢查不均勻的照相機必須設置於照相機陣列的 中心轴上。 因此，在使用照相機陣列的情況下，要想將設置於較 鲁 遠位置的檢查不均勻用的照相機設置在顯示器的中心軸 上，而又不妨礙設置得離顯示器較近的照相機陣列的視野 疋相當困難的’但是在本發明中，如實施例所示，要將檢 查不均勻用的3CCD照相機設置在顯示器的中心轴上是非 常容易的。 另外’本發明並不限於上述實施例，還包括許多不超 出其本質範圍的變更與變形。 如上所述，採用本發明，可以取得如下的效果。 春 由於是用高解析度的照相機檢測微小的點缺陷，用低 解析度的彩色照相機確定該缺陷的色彩，因此結構簡單， 攝影時間短，能縮短檢查時間。 一退有，在檢查對象為液晶顯示器這樣有視野角特性的顯 不為的情況下，可以將照相機設置於檢查對象的中心軸 上’不X視野角特性的影響進行檢查。 再有，通過在檢查觀上設檢測位置用的標記，可以整 17 12471 收 06pif.doc 機拍攝的缺陷位置與低分辨能力的照 缺陷^卜置即使在標記與缺陷重疊的纽Τ，也可以測出 G有it過用已知的輝度來顯示檢測位 可以將該標記用作輝度的基準，求出輝點缺。便 =本發明較佳實補揭露如上，财並非 =本Μ，任何熟Μ技藝者，衫 ，當可作些許之更動與潤飾，因此本發日= 乾圍㊂視後附之申請料m_界定者鱗。 ”又 【圖式簡單說明】 •例 圖。【圖π緣示歷來的缺陷檢查裂置的一個例子的結構 子的結【=】緣示歷來的缺陷檢查裝置的攝影部的一個例 結構圖【圖3】1會示本發明的缺陷檢查裝置的—個實施例的 示例。【圖4】繪示是檢查對象的顯示區域的輝點缺陷的表 【圖5】繪示是在檢查對象的顯示區域顯示標志的表 的說明圖 :。6】繪示高解析度CCD的像素與輝點缺陷位置 圖7】緣示3CCD照相機的⑽的像素與輝點缺 12471 收06pifdoc 陷的位置的說明圖。 【圖8】繪示的是用高解析度照相機拍攝的，在檢查 對象上顯示全黑畫面的情況下的輝點缺陷的四周的圖像的 例子。 【圖9】繪示用低解析度3CCD彩色照相機拍攝的與 圖8大致相同的部分的圖像的例子的附圖。 【圖10】繪示用高解析度照相機拍攝的顯示標志時的 與圖8相同的部分的圖像的例子的附圖。 【圖11】繪示用3CCD彩色照相機拍攝的與圖9相同 的部分的圖像的例子的附圖。 【圖12】繪示根據本實施例對檢查時間進行模擬的結 果的附圖。 【主要元件符號說明】 1 :檢查對象 2 :攝影部（CCD照相機） 3 :信號發生部 4 :圖像處理部 5 ·顯不部 6 :操作部 7a :濾色鏡 7b ··滤色鏡 8 :濾色鏡輪On the top of the map, the CCD, not (X ί, y 1) and the mouth eight 118110 are the squares of the 3 coffee color camera, and the /1 m\ xl is less than 1 (u ' Ml) relationship. In order to obtain the transformation moment | Hanma κ < can be expressed as /1 Γ ΚΙ Deformation of equation (2) 12 2 ..... (3) 12471 received 06pif.doc x\ =丄'11' 乂ml will Second, the coordinates of the highlight defect (1 P, mp) are substituted into the equation (1), then the position of the (10) on the 3CCD color camera of the bright spot defect is obtained, and the highlight point and the displayed highlight point can be Additional display highlights attached to the neighbors. The month is more shameful, and this is explained. The object ==* is taken with a high-resolution camera, in the example of checking the image; shows: 丨 pixels of the CCD of the second camera. Figure. Seven sub-represents 3CCD color photo pixels) display.目 ♦ ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( The example is superimposed. The overlapping of the displayed highlight D on the coordinates of the same CCD can be changed to [I1AEIG by the C3ABCD normally used by the camera and the pixel 13 I2471Q46Pif.d〇c of the 3CCD color camera. The selection of the four display highlights is not limited to DAEIG, as long as the defect is in a square connected by four points surrounding the defect like DBCHF. Also, in the case of performing defect inspection on components such as a color filter. Next, prepare the colorless and transparent film with the mark printed at the known position, and perform the same defect inspection with the color filter S 'photography'. Then, the image is uneven with the 3CCD camera image. The line defect, the color unevenness, and the like are inspected. Fig. 12 is a view showing the result of simulating the inspection time according to the present embodiment. 々 This is a camera for the conventional example detection device. The comparison of the photographing time of the defect inspection device of the present invention is as follows: the black and white 3.44 megapixel camera is used for the inspection, and the defect inspection is performed by the smashing and filtering camera, and the color is uneven. 344 and 10,000 image inspection. However, the invention uses black and white for defect inspection; uniformity, uneven brightness inspection is high and 疋 for inspection. 'It must be taken 10 times, and the 4 images are followed by 2 51 images and Color 51 images need at least 3 frames each, because the rest of the short & line 1 can be reduced as much as possible according to time, shooting 7 times in the white case, to shoot 3 times color map shooting 3 - owed 2: Like the 'the invention is to shoot 7 color images, ... white image. The data transmission clock pulse of the camera is I2471^06pifd〇c 10MHz, which can carry out parallel data transmission. The exposure time is fixed at i〇〇 milliseconds 0 ^ Yes, all the time required for the inspection, the historical example is 8390 pen seconds L and the present invention is 2622 milliseconds, which is 1/3 or less of the historical example. Actually, this is also added to the time of image processing. Due to image processing守1 is roughly 〃, and the number of pixels is proportional, so the ratio of the image processing time of the conventional example to the present invention is almost the same. In the embodiment, the high-resolution camera is moved away from the optical axis, but it is also possible. Let the high-resolution camera be on the optical axis and move the 3CCD color camera away from the optical axis. In the Japanese embodiment, the bright-point display of Figure 5 is only for the fresh use of the two levels of luminance and display. The brightness of the bright spot defect. Therefore, it can also be used as the ratio of the resolution of the glow::==== The content of the check is not _(four). The combination of the defect inspection such as 'root and the color unevenness, =, In the case of a small defect detection, there is a large defect in the - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - ^ Integration 'but as long as the relative position of the two helpers or the imaging magnification of the inspection machine is not smoky ^ ^ ...... 相 _ _ _ 又 又 又 又 又 又 又 又 又 又 又 又 又V1_face's on the pixel coordinates of the two cameras, solid There is data to save it. 'There is no need to produce another product in the scale inspection: for example, in the production line of the liquid crystal display, but according to the needs of the time, the liquid crystal display can be different according to the needs of the time. In the case of a panel, the area of the inspection area is rapidly changed. The machine array comes to the 1V, the dragon is coming to the technology, and the photo is taken by the camera. In the case of the % resolution, the interval between the cameras that constitute the camera array is increased. Discrimination; some, so that each city. In addition, in the long-term and re-display all the display area of the panel, externally known, the camera is equipped with a zoom lens line ff, so that it meets the above conditions. The adjustment = always requires a lot of time _. The purpose of the related, careful manual adjustment In addition, in the automatic adjustment of the situation χ ζ platform, as well as automatic ... ..., 祁 又 又 must also have low, ^ 疋 _ the present invention with high resolution • Therefore, the mouth (four) two _ resolution camera to perform the point defect inspection port this "to push the camera far away, there is no camera like _ 〜 职 职 职 职 职 职 职 职 职 职 职 职 职 职 歹 歹 歹 歹 歹 歹 歹 歹 歹 歹 歹 歹 歹 歹 歹 歹 歹 歹 歹The number of 16 I247l% 〇6pifd〇c and the complexity of u become complicated, will not increase the adjustment time. Similarly, in the case of automatic adjustment, as long as there is a platform, a focal length adjustment mechanism is available, so the cost is also cheaper than using a camera array. Further, the liquid crystal display to be inspected has a viewing angle characteristic, and in order to separate the brightness unevenness and the unevenness defect caused by the viewing angle characteristics, it is necessary to make the viewing angle of the camera which is unevenly detected the same as that of the inspection point defect. Therefore, cameras that check for unevenness must be placed on the center axis of the camera array. Therefore, in the case of using the camera array, it is necessary to set the camera for detecting unevenness set at a relatively far position on the central axis of the display without hindering the field of view of the camera array disposed closer to the display. It is quite difficult 'But in the present invention, as shown in the embodiment, it is very easy to set the 3CCD camera for inspection unevenness on the central axis of the display. Further, the present invention is not limited to the above embodiments, and includes many modifications and variations that do not depart from the essential scope. As described above, according to the present invention, the following effects can be obtained. Spring Because a high-resolution camera detects small point defects and uses a low-resolution color camera to determine the color of the defect, the structure is simple, the shooting time is short, and the inspection time can be shortened. When the object to be inspected is displayed as a liquid crystal display, the camera can be placed on the central axis of the inspection object to check the influence of the X-view angle characteristic. Furthermore, by setting the mark for detecting the position on the inspection view, it is possible to receive the defect position photographed by the 06pif.doc machine and the defect of the low resolution capability in the whole 12 12471, even if the mark overlaps with the defect. It is detected that G has a known luminance to display the detection bit, and the marker can be used as a reference for luminance, and the luminance defect is obtained.便 = The preferred embodiment of the present invention is as above, the wealth is not = this, any skilled craftsman, shirt, when you can make some changes and retouching, so this day = dry three visions attached to the application material m_ Define the scales. [Brief description of the drawing] • Example diagram. [Fig. π indicates the structure of the conventional defect inspection crack. [=] The edge shows the example structure of the photographing unit of the conventional defect inspection device. Fig. 3] Fig. 3 shows an example of an embodiment of the defect inspection device of the present invention. [Fig. 4] is a table showing the highlight defect of the display area of the inspection object [Fig. 5] showing the display of the inspection object. Explanation of the table of the area display mark: .6] shows the pixel of the high-resolution CCD and the position of the bright spot defect. FIG. 7 is an explanatory view showing the position of the pixel of (10) of the 3CCD camera and the position of the bright spot of 12471 to receive the 06pifdoc. Fig. 8 is a view showing an example of an image of a periphery of a bright spot defect when a full black screen is displayed on an inspection object by a high-resolution camera. [Fig. 9] A low-resolution 3CCD is used. A drawing of an example of an image of a portion substantially the same as that of FIG. 8 taken by a color camera. FIG. 10 is a view showing an example of an image of the same portion as that of FIG. 8 when a display mark is captured by a high-resolution camera. Fig. 11 shows the use of 3CCD A drawing of an example of an image of the same portion as that of Fig. 9 taken by a color camera. Fig. 12 is a diagram showing the result of simulating the inspection time according to the present embodiment. [Explanation of main component symbols] 1: Inspection object 2 : Photographing unit (CCD camera) 3 : Signal generating unit 4 : Image processing unit 5 • Display unit 6 : Operation unit 7 a : Color filter 7 b · Color filter 8 : Color filter wheel
9 ： CCD I2471Q‘6pif.d· 11 :快門 20 :檢查對象 21 : 3CCD彩色照相機 22 :攝影鏡頭 23 :高解析度照相機 24 :攝影鏡頭 25 :中心線 30 :輝點缺陷 31 :顯示區域 32 :輝點（顯示輝點） 33 :輝點（輝點缺陷）9 : CCD I2471Q'6pif.d· 11 : Shutter 20 : Inspection object 21 : 3CCD color camera 22 : Photo lens 23 : High-resolution camera 24 : Photo lens 25 : Center line 30 : Glow point defect 31 : Display area 32 : Glow point (display highlight) 33 : Glow point (glow point defect)
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