TWI247165B - Method of manufacturing color filter with nanoparticles and nano holes - Google Patents

Abstract

The present invention discloses a manufacturing method of color filter by nanoparticle. There are two types of method: the first one is forming a layer of nanoparticles on a glass substrate by self-assembly method, then by using a gray level mask to form different diameter of nanoparticle area to be the transparent area of red, green and blue light. The second one is forming holes of three different hole diameter by using photolithography and etching or nano imprint technology, then a layer of metal is deposited on the surface of the fused silica substrate as well as in the side wall of the holes to form an array of hollow metallic wave guides to adjust the transparent coefficient, this forms the transparent area of red, green and blue for using as a color filter.

Description

1247 res V. INSTRUCTION DESCRIPTION (1) " 1 FIELD OF THE INVENTION The present invention relates to a method of fabricating a color filter, particularly a method of manufacturing a color filter for a liquid crystal display (LCD) or other flat panel display. Improved, the size of the particles of nano particles or nanopores control the passage of red, blue and green light to replace the original traditional red, blue and green resin filter 袓 ' ' method. 2. Prior art Liquid crystal display has now shown its advantages, replacing the huge image of the official. Whether it is TV, computer, mobile phone, PDA, etc., the display requires 11 thin, short and small flat-panel displays, and the filter is a liquid crystal display technology to manufacture color filters in a backward-to-light mode ( C〇i〇r Taking the first = Ben's as a batch of photoresist, firstly coating a red resin on the substrate, and then exposing and developing the resin; then coating the layer of green resin to expose it to the grease; Then, a layer of blue resin is applied, and the film is exposed and developed to form a red, green, and blue resin pattern, and a transparent conductive layer and a metal layer are formed, and then patterned by lithography.

1247165

V. INSTRUCTIONS (2) Use a negative photoresist, or use a mask or a photoresist to add dye. It also requires expensive equipment such as stepping machines, etc., which causes the production cost to be too high, and therefore requires an improved group of dyes, and does not use an expensive exposure film with high yield to reduce the rate to reduce the light source. The power of the wheel. 3. Summary of the Invention ‘No use of red, blue or green trees. Disadvantages are numerous steps, time-consuming to make, and the equipment for baking or other exposure equipment is economical, and its light transmittance is poor. The method of loading, without using a filter resin or optical device, in a small number of steps, making a book, increasing competitiveness, and increasing light transmission. The object of the present invention is to provide a method for preparing a color filter for assembling nano particles, using The polarized light effect of different shapes of nano particles forms a filter of red, blue and green primary colors, which increases the light transmittance to save the output power of the light source and save power. A second object of the present invention is to provide a method for producing a color filter of a nano-aperture array, which does not require the use of red, blue or green resin or dye patterns to reduce the manufacturing cost of the process. A further object of the present invention is to provide a method for fabricating a color filter of a nanopore array assembly, which utilizes a metal waveguide grating effect of a nanopore to select a transmission wavelength and an adjustment of the transmission intensity to form three primary colors of red, blue and green. filter

1247165 V. INSTRUCTIONS (3) --- Light sheet 'enhances its tooth permeability' to save the output power of the light source for power saving purposes. In order to achieve the above and other objects, and to improve the disadvantages of the prior art, the first aspect of the present invention proposes a method for preparing a color filter of nanoparticle assembly 'a nanoparticle having different particle sizes and shapes as a color filter. The red, blue, and green light-transmissive regions include at least the following steps: (a) forming a spherical nanoparticle on a quartz or glass substrate; (b) exposing the ultraviolet or visible light to a gray level mask. The light source forms a red light-transmissive region, a green light-transmitting region and a blue light-transmitting region of the nanoparticle on the substrate, and the nanoparticle in the completely transparent portion is grown into a continuous metal film to reflect the incident Light acts as a black substrate (b 1 ack metal). The second aspect of the present invention provides a method for fabricating a color filter of a nanopore array assembly, and a grating array of a metallic wave guide having a different aperture of a nanopore is used as a color filter red. The green, blue light-transmissive region includes at least the following steps: (a) fabricating a mask of different light paths to have an array pattern of blue light-transmitting effect regions, green light-transmitting effect regions, and red light-transmitting effect regions (b) coating the photoresist on the glass (g 1 ass) with a mask exposed and etched to form red-area holes, green-area holes, and blue-area holes of different apertures; (c) on the channel glass and the holes The inner sidewall is plated with a layer of metal to form a metal waveguide grating array.

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The second parent of the present invention proposes a nano-cavity array assembly of a side filter 4, and a metal wave guide grating array of different apertures is used as a color film. The red, green, and blue light-transmissive areas include at least the following steps: ") ~ making a nano-imprint (nano_imprint) 'make it have a blue light-transmitting effect ^ domain, a green light-transmitting effect region, a red light-transmitting effect region (b) heating the glass substrate, printing with a nano-die to form red, 'area holes, green area holes, and blue area holes; (c) on the glass and in the holes The sidewall is plated with a layer of metal to form a metal waveguide grating array. 4. Embodiments The content of the present invention can be disclosed by the following embodiments in conjunction with the related drawings. Please refer to FIG. 1 , which is in accordance with the present invention. A schematic diagram of the process of the nanoparticle-assembled filter grating array of one embodiment. First, a first spherical layer (a) is deposited on a quartz or glass substrate 2〇2, and a particle 204' nanoparticle is deposited. Gold particle Silver particles having a thickness of about 10 0 nm to 200 nm. Referring to Figure 1 (b), the nanoparticles are irradiated to different degrees by visible light or ultraviolet light 208 with a gray scale mask 2〇6. The time is about 5 to 20 minutes, because the light source 208 is irradiated on the nanoparticle 204 through the photoresists 112, 114 and 116 of different degrees. The light passing through the thinner photoresist 11 is stronger, so that the spherical nanoparticle is made below it. Particle volatilization

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V. DESCRIPTION OF THE INVENTION (5) Comparative = spherical or triangular column (PriSmS) nanoparticle 22. The weak light passes through the medium-thickness light-resistance 114. The light is more volatilized and aggregated to form the second largest spherical plant. The vertical particle size is centered at about 50 nm. The photon of the photon is the weakest, so that the spherical nanoparticle underneath only volatilizes: the particle size, the nanoparticle of the non-light/light barrier region, and the formation of a large particle or continuous nanoparticle film. Because of its reflection coefficient is very thin:: not Ϊ〗 (6) This is the formation of red, green, blue color filter ^,,, installed, such as brother 1 (c), (d); Figure (d) is a plan view of the filter. Can be used as a color filter for LCD or other flat panel displays. The production process is simple, and it is not necessary to use expensive exposure equipment such as a stepper, but a general alignment exposure apparatus can be used. And the steps are greatly reduced, saving people and significantly reducing costs. Please refer to Fig. 2, which is an assembled structural view of a filter grating array of nanoholes according to another embodiment of the present invention. Fig. 2(a) is a cross-sectional view, and Fig. 2(b) is a plan view. Holes 3〇4, 3〇6, 3〇8 of different apertures are engraved or printed on the glass substrate 302 by yellow lithography or a nano-imprint as a blue, green, and red filter grating. The hole diameter d of the blue grating 3〇4 is about 0.20 //m to 〇·25 //m; the diameter d of the green grating 306 is about 0 · 2 6 μ m to 〇 · 3 2 // m ; The hole diameter d of the grating 3 〇 8 is about 0.35 / / m to 0.45 / / Π 1. The thickness t of the glass 302 is such that t/d is greater than 5, and the sharpness of the cutoff frequency is made.

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5. The invention description (6) is 1.5, which should not be too large to avoid a decrease in light transmittance. To form a metal wave, J is high. The spacing between the center of the X-hole and the center of the adjacent cavity is such that the grid is deposited by sputtering, evaporation or chemical vapor deposition (CV)), and a layer of aluminum, silver or gold is deposited on the glass 302. The side wall inside the hole. For the metal of the other = two = wall hook, the chemical vapor deposition "good method ^. The thickness of this layer of metal should be greater than the penetration depth of this band, with = = can penetrate from the channel glass surface to form a miscellaneous In order to block the above ΐίί source through the channel glass, the thickness of the metal should be deposited at 140 (10) to a JJJ:: good 'but the price is high, so it is better to deposit - layer π w to increase the gold, can be light #夕;5益+,安姆 _cost. J line private good reflectivity, while at the same time can be reduced although the invention will be known to the people # # people will understand this can be disclosed in two cases 'know this skill is not out of this * The present invention is not to be construed as limiting the scope of the appended claims.

Page 13 1247165 Brief Description of the Drawings Fig. 1 is a schematic view showing the process of a filter grating array in which nanoparticles are assembled according to an embodiment of the present invention. Fig. 2 is an assembled structural view of a filter grating array of nanopores according to another embodiment of the present invention. (a) is a sectional view. (b) is a plan. DESCRIPTION OF REFERENCE NUMERALS 2 2 2 channel glass or glass substrate 2 0 4 spherical nanoparticle 2 0 6 gray scale mask 2 0 8 fluorescent ultraviolet light 2 2 0 spherical or triangular column nanoparticle 2 2 2 spherical nanoparticle 2 2 4 spherical nano particles 3 0 2 glass 3 04 blue grating 30 6 green grating 3 0 8 red grating

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Claims (1)

1247165 VI. Patent Application No. 1 · A method for preparing a color filter of nano particle assembly, wherein nano particles of different particle sizes and shapes are used as red, blue and green light-transmissive areas of a color filter, and at least include the following Step: (a) forming a layer of spherical nanoparticles on a quartz or glass substrate; (b) exposing the source of ultraviolet or visible light to a light source by a gray ievei mask to form a red transparent nanoparticle on the substrate. The light region, the green light-transmitting region, and the blue light-transmitting region, and the nano-particles in the completely light-transmissive portion are grown into a continuous metal film to reflect incident light as a black metal. 2. The method of preparing a color light film for nanoparticle assembly according to item 1 of the scope of the patent application, wherein the spherical nanoparticle is gold (Au). 3. The method of producing a color filter of nanoparticle assembly as claimed in claim 1 wherein the spherical nanoparticle is silver (Ag). 4. The method of preparing a color filter for nanoparticle assembly according to claim 1, wherein the spherical nanoparticle has a thickness of 16 〇 nm S2 〇〇 nni. 5 · The method of preparing a color filter for nanoparticle assembly according to claim 1 of the patent scope, wherein the ultraviolet light source is a conventional fluorescent ultraviolet light 〇 6 · a nano particle as claimed in claim 1 Assembled color filter Page 15.15 1247165 ', application of the patent range of clothing, wherein the exposure time is about 5 minutes to 20 minutes. The patent application range of the first item of nanoparticle assembly color filter is too half ^% of which red area nanoparticle particle size The largest, green area of the non-wood particles is centered, and the blue area has the smallest particle size. A method of manufacturing a color filter assembled by a nanopore array, forming a metallic wave guide p array as a color filter of red, green, and blue. The light transmission &amp; field includes at least the following steps: (a) fabricating a mask of different light paths to have an array pattern of blue light-transmitting effect products, green light-transmitting effect regions, and red light-transmitting effect regions And (b) coating the photoresist on the glass to expose and etch the mask to form red area holes, green area holes, and blue area holes of different apertures; (c) on the channel glass and in the holes The sidewalls are plated with a layer of metal to form a metal waveguide grating array. 9 · A method for fabricating a color filter assembled by a nanopore array, forming a grating array of metal waveguides with different apertures as a color filter of red, green, and blue The light transmissive area includes at least the following steps: (a) making a nano-imprint to make it blue Page 16 1247165 Light-transmissive effect area, green light-transmissive effect area array impression; aperture 'formation' (b) heating glass substrate, printed by nano-imprint to form different red area holes, green area holes, and blue Color Region Holes (c) A gold metal waveguide grating array is plated on the channel glass and in the sidewalls of the holes. </ RTI> A method for preparing a color f-light film assembled by a nanoparticle according to the eighth or ninth aspect of the patent application, wherein the diameter of the hole of the blue grating is about; ???, 11 or 9 of the patent application scope The method of preparing a color filter for assembling a nano particle, wherein the diameter of the hole of the green grating is about 〇26 to 0·32 // m. The method of manufacturing a color filter for nanoparticle assembly according to claim 8 or 9, wherein the diameter of the hole of the red grating is about 35·35 to 0·45 // m. 13. The method of producing a color filter or a light sheet for nanoparticle assembly according to claim 8 or 9 wherein the thickness t of the channel glass is t/d &gt; 5, where d is the diameter of the hole. 14·Color of nanoparticle assembly as claimed in item 8 or 9 of the patent application Page 17 1247165 VI. Method for applying the patent range filter, wherein the interval S between the centers of adjacent holes is such that the s/d is about 1 5 · The color of the nanoparticle assembly as in the 8th or 9th patent of the patent application The method of preparing a filter, wherein the thickness of the metal on the glass is greater than the penetration depth of the light, about 140 /zm or more 〇1 6 · The color of the nanoparticle assembly as in the 8th or 9th patent of the patent application The method for preparing a filter, wherein the metal on the side wall of the glass and the hole is gold (Au) 〇1 7 · The color filter of the nano particle assembly as claimed in claim 8 or 9 of the patent, wherein the glass The metal on the sidewalls in the upper and lower holes is silver (Ag). 18. The method of preparing a color filter for nanoparticle assembly according to claim 8 or 9, wherein the metal on the side wall of the glass and the hole is ... (1) ...