1245737 玖、發明說明： 【發明所屬 <技術領域】 發明領域 本發明係有關於製造設備之搬送系統，特別是有關於 5設置在清潔室内之半導體製品之製造設備等之搬送系統。' 發明背景 t Κ狀日日¢7板（符別是薄膜電晶 基板丄TFT基板)與半導體製品的製造設備中，係採用使用 :作:怨且該工作室係由具有同種功能之裝置 群：或…數個如此之裝置群之更大裝置群所構成。將 二出=Γ置於其中之裝載器/卸載器(具有卡£ 内：：Γ，配置於以間隔壁_ 15 20 稱為站臺。☆之群管理。該小室對於全體之搬送系 間搬送之:::知且生/線的構成，係在中央配置站臺(製程) 此時，儲料器具有作為對站臺:及各:：送之方式。 功能。 至門及站至間之搬送之緩衝之 式，—般稱土逋路）在兩側配置站臺之: 是將卡S搭栽於 料對各站臺之搬送，通' 進行。兩側站*;""向移動通過各避路内之搬送I $方式之特殊的情形係_於中央之站臺f 1245737 搬送之主觀，僅在單做置站 為單側站臺方弋 ^ 至之方式，而這種方式稱 至方式。站臺間搬送通 式相同的話，則料的長度❹=度若與兩側站臺方 儲料哭产 又，站堂的數目變少。 地板下搬=:=:製〜^ 頂部搬送之間之卡找合拿起=之構成中，該儲料器與 板下之卸貨口保持在儲料器内且：:來自習知頂部或地 吊車•為止敷設輸送帶，並==儲= 之方法來進行。 〃 H巾車進订傳遞 10 15 製程内搬、卩與頂雜送、及與 二=時’必須増加儲料器台數加以因 數不必要地增加。可迴避該問題之方法 ：：文獻=㈣車行走於1個之儲料11之方法(勤，參照專 另外’有以被稱為貫通站臺方式之方法作為工件室方 式之生產線之構成方法(例如，參照專利文獻2)。該 相對中央之站臺間搬送之主通路， _ ’、 之構成。該方式具有站臺的數、室：运路形成交叉 平又夕，由製程間之主搬谈 到站臺之裏側為止之距離較短之優點 、 (專利文獻1) 特開平7-179293號公報。 (專利文獻2) 美國專利第6,089,811號說明書。 在使多數吊車行走於上述丨個之儲料器之方法中，吊車 20 1245737 =負何雖可以分散，不過儲料”車的控制方法極為複 雜’因此綱嶋的成本增加、_^時增加之問題。 =:亦無法避免有可能因控制系之失控等而產生較大 而且’由於必須在2個吊車之間傳遞卡E，所以會 產生多餘的搬送。 10 15 卜在内搬以車進行與儲料器平行搬送之生 線之構成中’儲料H在兩側與搬送台車配合拿起時，△ =在單側與裝置配合拿起切，且與多數裝置配^ 起日禮送台車的行走長度將增加，使平均循環時間變長， f且可以搬送之裝置財I㈣，搬送台料1台有軌道 π車搬达台車(RGV)時，有搬送線數目增加之叫且 ^車為可崎走之無財搬^車(AGv)時，具有 車數增加之問題。 ^ 〇 另外’在上述之貫通站臺方式，在中央之站 之主通路中，迴路之歸路將形成沒有裝置配合拿=搬送 搬送。另外，每—製程之裝置之大小差變大，且因每錢 臺之不平衡，使空間效率降低。為了迴避此情形站 央將儲料器作成2列平行之中央儲料器方式，則具 中 的長度將不完整，無法確保必要之純之問題。抖器 本發明乃是黎於上述諸點而研發者，且其目 一種由於儲料器吊車與站升降機兩者可以與頂部搬送機= 配合拿起，故可降低設置於製造設備之儲料器的數目夕構 造設備的搬送系統。 製 【發明内容 20 1245737 發明概要 為了解決上述之埤, 靖’本發明提供一種製造設備之搬 5 10 15 达系統’包含:儲料器，係用以於配置成上下多數行之多 數架上保管藉製程間搬送機構搬送來之搬送物；第丨製 搬送機構，係可以在_料㈣沿著上下及該架之行 ’用以t別對該多數架移送該撤送物；第2製程内搬送機構 係二著用以排列配置並處理搬送物之多數褒置設置，且 Z對敲置移讀送物；及移_構，係設置於前述製程 ㈣機構與前述儲料器之間。又前述移載機構包含有： 7千移运機構’係構成可以在與前述製程間搬送機構之間 傳遞搬送物；及升降機構，係可以上下移送搬送物，且前 述水平料機義構成可叫料述^製糾搬送 及前述升降機構兩者之間傳遞搬送物。 右依據上述之發明，可相對製程間搬送機構對第2製 内搬送機構使用升降機構，以直接移送搬送物。從而 製程内搬送機構之負荷不會增大，藉第2製程内搬送機構可 、移^夕之搬运物’可以提高第2製程内搬送機構之運轉 :糟此可U使搬送系統全體的效率化且可以減低配 ;衣^°又備之第2製程内搬送機構之數目及儲料器的數 在上述之發日种，前述移栽機構具有用以暫時地保管 上勿=保s i每所，且可以藉前述升降機構將搬送物移送 、^保s %所。藉此’將搬送物暫時放置於保管場所，可 達成用以吸收與製程間搬送機構之間之搬送時點之偏差 20 I2.45737 之 5 10 15 20 緩衝功能。 在本發明之一實施例中，較佳地，前述製程間搬送機 冓為頂部搬送機構或地板下搬送機構，且前述第1製程内搬 适機構為儲料器吊車，並且前述第2製程内搬送機構為轨道 、、,C機構，又，前述水平移送機構係設置於前述製程間搬 ^機構與則述儲料器吊車之間之輸送帶，而前述升降機構 二可在與刚述輪送帶之間傳遞搬送物之升降機。 又轨垃地，前述輸送帶係水平地延伸於在與前述製 1搬运系統之間進行搬送物的傳遞之第丄位置，與在與前 料器吊車之間進行搬送物的傳遞之第2位置之間，又， d置:,:述第2位置之間，設置有可在與前述升 仃搬适物之傳遞之第3位置。 储料时卜本&明提供—種製造設備之搬送系統，包含： 第;、二= 管藉製程間搬送機賴^ 對該多數㈣送軸;Ti.ltr可以移動，用以分別 棑-置並用《處理椒送物及:數製=置送機且構’係沿著 置移送搬送物。又，右4、、 數衣置汉置，且可對該裝 構之間配置有前㉞數U儲㈣與前述第1製程内搬送機 述儲料器與前述第心二的一部份’且設置有用以在前 平概送機構。4叫送機叙㈣送搬送物之水 依據上述之發明，由於 側配置裝置，所以_ 弟2製程内搬送機構之兩之裝置，且可以提高第‘:内搬送機構可以配置更多内搬送機構之運轉率，並且可 91245737 发明 Description of the invention: [Technical field of invention] Field of the invention The present invention relates to a conveying system for manufacturing equipment, and more particularly to a conveying system for 5 semiconductor equipment manufacturing equipment installed in a clean room. '' Background of the invention t K-shaped sun-day ¢ 7 board (a thin film transistor substrate TFT substrate) and the manufacturing equipment of semiconductor products are used: for: grievance and the studio is a group of devices with the same function : Or ... a larger device group of several such device groups. The loader / unloader (with card £ :: Γ) in which two-out = Γ is placed, is called a platform with a partition wall _ 15 20. ☆ Group management. This small room is used for the entire transportation system. ::: The structure of the knowledge and health / line is configured in the central station (manufacturing process) At this time, the stocker has the function of the platform: and each :: delivery. Function. The door-to-door and station-to-room transfer buffer (Formally called Tutu Road): On both sides of the platform: the card S is planted on the material to the platforms, and it's carried out. Stations on both sides *; " " The special case of the I $ way to move through the avoidance lanes is _ at the central platform f 1245737 The subjective of the transfer, only the single-side station is a single-sided platform. ^ To the way, and this way is called the way. If the conveyance method between the platforms is the same, the length of the material ❹ = degree will be reduced if the materials are stored on both sides of the platform, and the number of stations will be reduced. Moving under the floor =: =: Machine ~ ^ In the composition of the card between the top and the pick up =, the stocker and the unloading port under the board are kept in the stocker and :: from the top or floor of the conventional Lay the conveyor belt up to the crane and install it in the same way. 〃 H towel cart order delivery 10 15 During the process, moving, 卩 and top miscellaneous delivery, and 二 = ’must increase the number of stockers to increase the factor unnecessarily. Methods to avoid this problem: Literature = Method of walking on one of the storage materials 11 (for reference, refer to the separate “There is a method called the through-platform method as a method of constructing the production line of the workpiece chamber method (for example, , Refer to Patent Document 2). The main path for transporting between relatively central platforms, _ ', is constituted. This method has the number of platforms and rooms: the transportation path forms a cross and a eve, and the main transfer between the processes refers to the platform (Patent Document 1) Japanese Unexamined Patent Application Publication No. 7-179293. (Patent Document 2) US Patent No. 6,089,811. A method for making most cranes walk on the above-mentioned stockers In the crane, 20 1245737 = Although the load can be dispersed, the storage method of the vehicle is extremely complicated. Therefore, the cost of the vehicle is increased, and the problem of _ ^ is increased. =: It is also impossible to avoid the possibility of out of control of the control system. It has a large size and 'the card E has to be transferred between two cranes, so extra transportation will occur. 10 15 In the structure of the production line where the truck is transported in parallel with the stocker, the storage H is stored. When picking up with the transport trolley on both sides, △ = pick up and cut with the equipment on one side, and with most equipment ^ The walking length of the gift trolley will increase on the first day, making the average cycle time longer, f and can When transporting equipment, it is necessary to transfer one platform with a track π car to the trolley (RGV). When there is an increase in the number of transfer lines and the car is a non-profitable car (AGv) that can be transported, it has a car. ^ 〇 In addition, in the above-mentioned through-platform method, in the main path of the central station, the return path of the loop will be formed without equipment cooperation = transportation. In addition, the size difference of each process device It is large, and the space efficiency is reduced due to the imbalance of each unit. In order to avoid this situation, the center of the station will make the stocker into two parallel central stockers, and the length in the tool will be incomplete. Pure problem. The shaker of the present invention is developed based on the above points, and one of the purposes is that both the stocker crane and the station lift can be picked up with the top conveyor, so it can be lowered in the manufacturing equipment. Number of stockers Equipment transfer system. [Summary of the invention 20 1245737 Summary of the invention In order to solve the above problem, Jing 'the present invention provides a manufacturing equipment transfer 5 10 15 access system' includes: a stocker, which is configured to be arranged in a majority row Most of the racks store the transported items that were transferred by the transfer mechanism between the process; the first transport mechanism can transfer the retreated items to the majority of the racks along the top and bottom and the rack's line. ; In the second process, the transfer mechanism is arranged for the arrangement and processing of the majority of the transfer material, and the Z pair is shifted to read the transfer material; and the transfer structure is provided in the aforementioned process mechanism and the aforementioned storage material The above-mentioned transfer mechanism includes: a 7,000-moving mechanism, which is configured to transfer objects to and from the above-mentioned inter-process transportation mechanism; and a lifting mechanism, which is capable of transferring the objects up and down, and the horizontal feeder. The meaning structure can be called the material delivery system and the above-mentioned lifting mechanism to transfer the conveyed objects. According to the invention described above, it is possible to directly use the lifting mechanism for the inter-process transport mechanism for the second-process transport mechanism to directly transfer the transported objects. Therefore, the load of the transport mechanism in the process will not increase, and the transport of the transport mechanism in the second process can be used to improve the operation of the transport mechanism in the second process. This can improve the efficiency of the entire transport system. And the number of transfer agencies and stockers in the second manufacturing process can be reduced. The number of the transfer agencies and the number of stockers is in the above-mentioned issue date. The aforementioned transplanting mechanism has a temporary storage mechanism. In addition, the aforementioned lifting mechanism can be used to transfer the conveyed materials and guarantee the s% place. By this means, the transported goods are temporarily placed in the storage place, and the buffering function can be achieved to absorb the deviation between the transport time point and the transporting mechanism between processes. 20 I2.45737 5 10 15 20 In an embodiment of the present invention, it is preferable that the transfer machine 冓 in the process is a top transfer mechanism or a under-floor transfer mechanism, and the transfer mechanism in the first process is a stocker crane, and in the second process, The transfer mechanism is the track, mechanism, and mechanism C. The horizontal transfer mechanism is a conveyor belt provided between the aforementioned process transfer mechanism and the stocker crane, and the aforementioned lifting mechanism can be transported in the same manner as described above. Elevator for conveying goods between belts. On the other hand, the conveyor belt is horizontally extended to the second position where the conveyance of the conveyance is performed between the conveyance system and the conveying system and the second position where the conveyance of the conveyance is performed between the conveyer and the front crane. In between, and d ::, the third position is provided between the second position and the third position which can be transferred with the lifting object. When storing materials, this & Ming provides a transfer system for manufacturing equipment, including: No., No. 2 = Pipe transfer machine in the borrowing process; ^ For the majority of feed shafts; Ti.ltr can be moved to separate 棑- Set and use "handle pepper delivery and: number system = placement machine and structure" is to move the delivery along the placement. In addition, the right and the right are placed on the right side, and a front part U storage part and a part of the stocker and the second part of the conveyer in the aforementioned first process may be arranged between the structures. It is also useful to provide an overview mechanism. According to the above-mentioned invention, the water of the conveying machine is called according to the above-mentioned invention. Due to the side arrangement device, the two devices of the conveying mechanism in the second process can be improved. The internal conveying mechanism can be equipped with more internal conveying mechanisms. Operating rate and can be 9
以削減第2製程内搬送機構的數目。 圖武簡單說明 第1圖為作為製造設備的一例之液晶顯 铁俤的配置構成之圖。 、置之4造 5 第2圖為第1圖之各儲料器與頂部搬送機槿 物之傳遞機構之圖。 筹之間之搬送 第3圖為依本發明設置卡匣站升降機之儲料器 第4圖為由中央之頂部搬 圖 _之構成圖。 心圖所顯示之卡 1〇 ^圖為在儲料ϋ的兩·置執道搬送機構之例之圖。 第6圖為依本發明改善第5圖所顯示之構成之構成例之 第7圖為具有第3圖所顯示之卡匣站之構成與組入第6 圖戶斤顯示之RGV移載用輸送帶之製造設備之配置構成之 15In order to reduce the number of transfer agencies in the second process. Brief Description of Drawings Fig. 1 is a diagram showing the arrangement and configuration of a liquid crystal display panel as an example of manufacturing equipment. 4. Make 4 made 5 Figure 2 is a diagram of the transfer mechanism of each storage container and the top conveyor in Figure 1. Transfer between chips Figure 3 is the stocker of the cassette station elevator according to the present invention. Figure 4 is the structure diagram of the central lifting figure _. The card shown in the heart chart 10 ^ is an example of a two-way transport mechanism in the storage bin. Fig. 6 is an example of improving the constitution shown in Fig. 5 according to the present invention. Fig. 7 is a diagram showing the constitution and assembly of the cassette station shown in Fig. 3 and the RGV transfer conveyance shown in Fig. 6 Configuration and configuration of belt manufacturing equipment 15
第8圖為適用本發明前之製造設備與適用本發明後之 製造設備之儲料器吊車與執道搬送機構(RGV)之運轉率之 圖。 第9圖為針對第8圖之構成例算出對搬送系統全體之投 20 貧金額之結果之圖。 I：實施方式3 較佳實施例之詳細說明 其次，隨著圖面針對本發明之實施形態加以說明。 首先，針對適用本發明前之製造設備之配置構成加以 10 1245737 說明。第1圖為作為製造設備的一例之液晶顯示裝置之製造 没備的配置構成之圖。在弟1圖所顯示之製造設備，進行形 成薄膜電晶體於液晶基板上之製程。 第1圖中，成膜裝置bl〜b4及ci〜c8係對2台之儲料器 5 AC排列配置。另外，沿著儲料器A設置軌道搬送機構 (RGV)Rb ’沿著儲料裔C设置2個軌道搬送機構(Rgv)Rc1、 Rc2。光蝕刻裝置dl〜d5、el〜e5、§1〜§5係分別沿著儲料Fig. 8 is a graph of the operating rates of the stocker crane and the road carrying mechanism (RGV) of the manufacturing equipment before the application of the present invention and the manufacturing equipment after the application of the present invention. FIG. 9 is a result of calculating the amount of money invested in the entire transportation system based on the configuration example in FIG. 8. I: Detailed description of the preferred embodiment of Embodiment 3 Next, the embodiment of the present invention will be described with reference to the drawings. First, the configuration of the manufacturing equipment before the application of the present invention will be described. Fig. 1 is a diagram showing an arrangement configuration of a liquid crystal display device as an example of manufacturing equipment. In the manufacturing equipment shown in Figure 1, the process of forming a thin film transistor on a liquid crystal substrate is performed. In Fig. 1, the film forming apparatuses bl to b4 and ci to c8 are arranged in a line with two stockers 5 AC. A rail conveyance mechanism (RGV) Rb 'is provided along the stocker A, and two rail conveyance mechanisms (Rgv) Rc1 and Rc2 are provided along the stocker C. The photo-etching devices dl ~ d5, el ~ e5, and §1 ~ §5 are respectively stored along the storage material.
Is D、E、G排列，在彼等之間設置著軌道搬送機構 (RGV)Rd、Re、Rg。 1〇 檢查裝置hi〜h6、il〜i6係沿著2台之儲料器設置， 在彼等之間設置著軌道搬送機構(RGV)Rh、Ri。餘刻裝置^ 〜j9、kl〜k9係分別沿著儲料器J、κ配置。在敍刻裝置^ 〜j9與儲料器J之間設置2個之軌道搬送機構(RGv)Rjl、Is D, E, and G are arranged, and a rail conveying mechanism (RGV) Rd, Re, and Rg are provided between them. 10. The inspection devices hi ~ h6 and il ~ i6 are installed along two stockers, and a rail transfer mechanism (RGV) Rh and Ri are provided between them. The remaining devices ^ ~ j9 and kl ~ k9 are respectively arranged along the stockers J and κ. There are two rail transport mechanisms (RGv) Rjl between the engraving device ^ ~ j9 and the stocker J,
Rj2’在蝕刻裝置kl〜k9與儲料器K之間設置2個之執道搬送 15 機構(RGV)Rkl、Rk2。 試驗裝置11〜118係沿著儲料器L配置，在彼等之間設置 著2個執道搬送機構(RGV)Rll、R12。 以上之儲料 ^§A、C、D、E、G、H、I、j、j^、l 甘 一端側連接中央之頂部搬送機構(LIM)MC，在頂部搬送機 20構Mc與設置於各儲料器内之搬送用吊車之間進行搬送物 (收容液晶基板之卡匣）的傳遞。由各儲料器透過沿著彼等設 置之軌道搬送機構(RGV)配送液晶基板。 第1圖所顯示裝置之配置構成，在中央之製程間搬送迴 路(頂部搬送機構MC)中，由於可以有效利用迴路之歸路， 1245737 所以可以以掛掣起 柱之站堂數之分配調整每一製程之裝置的 大小之不平種ΐ ο ΨΜ 、 卜，為了將儲料器配置成與站臺平行， 較少:::儲料器的長度，可以確保必要之架數。 5 10 Μ此上述之頂部搬送機構構成製程間搬送機構。另 , ；述之儲料器内之搬送用吊車構成第1製程内搬 ’執道搬送_麟)構成第2製程_送機構。 弟2圖為第1圖之各儲料器與頂部搬送機構之間之搬送 物之傳遞機構移載之圖。第2圖係由上方看儲料Hi的内部 之圖:中央之點線係表示儲料器吊車2之移動路。在第2圖 ”’、、例除了通常運轉之除料器吊車2之外，在端部配 置著預備之儲料器吊車2八1，儲料器 之儲料器者。 、、儲料ϋ吊車2與頂雜送機構之間之搬送物之傳遞，係 透過構成水平移送機構之2台之輸送帶3來進行。輸送帶3之 方係朝儲料以之搬人側，另外_方則為搬出側。輸送帶 3與儲枓為吊車2之間之搬送物之移載，係在移載位置4(第2 載位置）中進仃。另外，輸送帶3與頂部搬送機構MC之 般C物之移載，係在移載位置5(第丄之移載位置）中進 行。 2〇 第3圖係對應第2圖之圖，顯示依本發明設置構成移載 機構之相站1A之儲料器之圖。在第3圖所顯示之例，係不 设置預備吊車2Α，μ設置構成升降機構之站升降機6來替 代預備吊車2Α之構成。 站升降機6係升降搬送物（以下，稱卡匣）之機構，在移 12 1245737 載裝置7(第3之移載位置）中，在與輸送帶3之間可以進行卡 匣的傳遞。從而，由頂部搬送機構…匸移載至輪送帶3之卡 匣，可以傳遞於儲料器吊車2與站升降機6的兩方。另外， 相反的，可以由儲料器吊車2與站升降機6的兩方將卡匣六 5 給輸送帶3 ° 第4圖為由中央之頂部搬送機構側看第3圖所顯示之卡 匣站1A之構成圖。站升降機6係將搬送物移動至垂直方向之 升降機構，由卡匣輸送帶3接受搬送物，可以移送至机置於 輸送帶3的下側之移載位置8。移送至移載位置8之卡匣，平 行於儲料器1可以移載於所設置之軌道搬送機構之 RGV梭9。另外，反之也可以由RGV梭9將卡匣移送至移載 10 位置8 從而，不必使用儲料器吊車2，就可以透過輪送帶3與 站升降機6，將卡匣由頂部搬送機構1^(：：移送至尺〇从梭9。另 15外，反之，透過輸送帶3與站升降機6，可以將卡匣由RGV 梭9移送至頂部搬送機構Mc。透過輸送帶3與儲料器吊車2 之間之卡匣的傳遞，可以如迄今在移載位置4中進行。 也就是，針對在儲料器1沒有必要一時保管之卡匣，選 擇站升降機6直接移送至RGV梭9,保管於儲料器丨之卡匣選 2〇擇儲料器9移送至儲料器内之保管場所。藉此，不必使用卡 匣吊車2將由頂部搬送機構MC所移送之卡匣移送至^^乂梭 9由於可以搬送至各裝置，所以可以減低儲料器吊車2的 負荷。另外，由各裝置朝頂部搬送機構卡匣的移送， 也了以遠擇的使用儲料器2與站升降機6，可以減低儲料哭 13 1245737 吊車2的負荷。 又’顯示於_位置8的上方之姻呆管位置1〇，係在 切站1钟可以縣使相暫時地退避之位置。也就是， 错站升降機6可以將卡£移動至卡£保管位㈣。藉暫時地 將卡_管於卡E保管位㈣，可以達成調整儲料器吊車2 與軌道搬送機構⑽V)與頂部搬送機構⑽之間之卡_傳 遞之時點的偏差之緩衝功能。 其-人，針對儲料器1之卡厘站以與⑽乂梭9之間之卡匡 的傳遞加以說明。第5圖為如第1圖所顯示在儲料器i的兩側 10 設置執道搬送機構之例。 第5圖中，在儲料器i的兩側設置RGV梭的移動路徑之 RGV路徑15。RGV路徑15係相當於第！圖之軌道搬送機構 (RGV)Rcl、Rc2b等。裝置16沿著!^15路徑排列配置。裝 置16係相當於第1圖之成膜裝置、光蝕裝置、檢查裝置、蝕 15刻裝置、試驗裝置等。在第5圖所顯示之構成，在儲料器^ 的兩側分別配置RGV路徑15，在其外側排列配置著裝置i6。 在此，第6圖為依本發明改善第5圖所顯示之構成之構 成例。在第6圖所顯示之構成例，在儲料器丨的單側配置2列 裝置16 ’在裝置之列之間設置RGV路徑15。從而，尺⑽路 2〇 徑15由於由儲料器1離開，所以在彼等之間設置2台構成水 平搬送機構之RGV移載用輸送帶π。一台係由儲料器1朝 RGV梭9之移載用，一台係由rgV梭9朝儲料器1之移栽用。 在第5圖所顯示之構成，RGV梭9接近停止於儲料器又 之搬送口，藉RGV梭9的移載機構(機械手臂等）直接移在卡 14 1245737 匣。對於此，在第6圖所顯示之構成，儲料器1與RGV梭9 之間之卡E的移送，係透過RGV移載用輸送帶17進行。雖 k加RGV移載用輸送帶17，不過在第^圖所顯示之構成，對 於對裝置16設置2個之軌道搬送機構(RGV)，而在第6圖所顯 5不之構成對同數之裝置16只有一個軌道搬送機構(RGV)，可 以削減高價之軌道搬送機構(RGV)。 第7圖為具有上述第3圖所顯示之卡匣站1A之構成與組 入第6圖所顯不之RGV移載用輸送帶17之製造設備之配置 構成之圖。第7圖所顯示之例，係在第丨圖所顯示之製造設 1〇備之配置構成適用本發明改善之例。在第7圖中，在與第1 圖所顯示之構成零件相同之零件賦予相同符號，並省略其 說明。 在第7圖中’對儲料器C、D、Η設置第3圖所顯示之卡 匣站1Α。另外，對儲料器C、J、K、L設置第6圖所顯示RGV 15移載用輸送帶17。藉此，第1圖之2個之執道搬送機構 (RGV)Rcl、Rc2形成丨個之軌道搬送機構(RGV)Rc，2個之 軌道搬送機構（RGV)Ri、Rh形成1個之軌道搬送機構 (RGV)Rh，2個之轨道搬送機構⑽乂师、Rj2形成"固之軌 道搬送機構(RGV)Rj，2個之轨道搬送機構(RGV)Rkl、Rk2 20形成1個之軌道搬送機構(RGV)Rk，2個之軌道搬送機構 (RGV)Rll、R12形成丨個之軌道搬送機構(Rgv)R1，軌道搬 送機構(RGV)之數目由14台減少至9台，可以達成製造設備 的設置面積之較大之削減。另外，伴隨此，也可以大幅減 低製造設備成本。 15 1245737 例如’對於第1圖所顯示之製造設備之足跡為18〇111>< ’且设置面積為25200m2，而第7圖所顯示之製造設備 之足跡為l6〇X 140m且設置面積減少至22400m2，以面積而 言削減約30〇〇m2。 5 以上之效果，係設置具有站升降機6之卡匣站1A，且藉 攻置卡11移載輸送帶17,主要提高執道搬送機構(RGV)之運 轉率者。 第8圖為適用本發明前之製造設備與適用本發明後之 製造設備之儲料器吊車與軌道搬送機構(RGV)之運轉率之 10圖。第8圖中’針對不同製造設備的配置構成之A及B之2個 之構成例顯示運轉率。如由第8圖可以了解，適用本發明之 構成例A及B兩者都不改變吊車的平均運轉率，執道搬送機 構(RGV)的平均運轉率可以由12%提升至13%。 第9圖為針對第8圖之構成例a、B算出對搬送系統全體 15之投資金領之結果之圖。在適用本發明的情形，可以了解 構成例A、B都可以達成削減約2億元的投資金額。 如以上之說明，若依據本明改善構成站臺之儲料器與 執道搬送機構(RGV)及中央之搬送機構之間之搬送物之傳 遞機構，可以減低製造設備的設置面積，可以削減搬送系 20 統全體的投資金額。 又，在上述之實施例，雖針對頂部搬送機構作為中央 之製程間搬送機構加以說明，不過並不限制於此，亦可以 使用如地板上移動吊車之搬送機構、與藉行走於清潔室之 搬送車之地板下搬送機構等之種種之搬送機構。 16 1245737 另外，即使設置具有升降與移動之兩功能之吊車之小 型之儲料器來替代第3圖所顯示之站升降機6亦可。進_ 步，例如亦可以使用第2圖所顯示之預備吊車2A來替代站升 降機6。 5 發明之效果 如上述，若依據本發明，由頂部搬送機構對執道送機 構(RGV)可以使用站升降機直接移送卡匣。從而，不必增大 儲料器吊車的負荷，就可以藉執道搬送機構(RGV)移送較多 之搬送物。可以提高軌道搬送機構(RGV)的運轉率。藉此可 10 以達成搬送系統全體的效率化，可以減低配置於製造設備 之轨道搬送機構(RGV)的數目及儲料器的數目。另外，若依 據上述之發明，由於可以在執道搬送機構(RGV)的兩側配置 裝置，所以對於1個之軌道搬送機構(RGV)可以配置更多之 裝置’可以提高執道搬送機構(RGV)之運轉率，可以削減執 15道搬送機構(RGV)的數目。 【圖式簡單說明】 第1圖為作為製造設備的一例之液晶顯示裝置之製造 設備的配置構成之圖。 第2圖為第1圖之各儲料器與頂部搬送機構之間之搬送 20物之傳遞機構之圖。 第3圖為依本發明設置卡匣站升降機之儲料器之圖。 第4圖為由中央之頂部搬送機構側看第3圖所顯示之卡 E站之構成圖。 第5圖為在儲料器的兩側設置執道搬送機構之例之圖。 1245737 第6圖為依本發明改善第5圖所顯示之構成之構成例之 圖。 第7圖為具有第3圖所顯示之卡匣站之構成與組入第6 圖所顯示之RGV移載用輸送帶之製造設備之配置構成之 5 圖。 第8圖為適用本發明前之製造設備與適用本發明後之 製造設備之儲料器吊車與軌道搬送機構(RGV)之運轉率之 圖。 第9圖為針對第8圖之構成例算出對搬送系統全體之投 10 資金額之結果之圖。 【圖式之主要元件代表符號表】 1…儲料器 2…儲料器吊車 3…輸送帶 6···站升降機 10…卡匣保管位置 16…裝置 1A—^匣站 2A…預備吊車 4、5、7、8···移載位置 9-..RGV 梭 15--RGV 路徑 17…RGV移載用輸送帶 18Rj2 'is provided between the etching devices kl ~ k9 and the stocker K. Two conveying 15 mechanisms (RGV) Rkl and Rk2 are provided. The test equipments 11 to 118 are arranged along the stocker L, and two lane transfer mechanisms (RGV) R11 and R12 are provided between them. The above storage materials are ^ §A, C, D, E, G, H, I, j, j ^, l. One end side is connected to the central top transfer mechanism (LIM) MC. The conveyance cranes (cartridges containing liquid crystal substrates) are transferred between the conveyance cranes in each stocker. The liquid crystal substrates are distributed from each stocker through a rail transfer mechanism (RGV) provided along them. The configuration of the device shown in Figure 1. In the central process transfer circuit (top transfer mechanism MC), since the return path of the circuit can be effectively used, 1245737, each station can be adjusted by the distribution of the number of stations in the hanging column. The size of the device of a process is uneven. In order to arrange the stocker parallel to the platform, the length of the ::: stocker can ensure the necessary number of racks. 5 10 Μ The above-mentioned top transfer mechanism constitutes an inter-process transfer mechanism. In addition, the crane in the stocker described above constitutes the first-process transfer ′, and the second-process _ transfer mechanism is constituted by the “moving-in-transfer_lin). The second figure is a diagram of the transfer mechanism of the conveying mechanism between the stockers and the top conveying mechanism of the first figure. Fig. 2 is a view of the interior of the storage material Hi from above: the central dotted line indicates the moving path of the storage crane 2. In Fig. 2 "", the example is in addition to the normally-operated eliminator crane 2. At the end, a reserve hopper crane 281 and a hopper of the hopper are arranged. The transfer of the conveying material between the crane 2 and the top miscellaneous conveying mechanism is performed through two conveyor belts 3 constituting the horizontal conveying mechanism. The side of the conveyor belt 3 is moved to the side where the material is stored. It is the unloading side. The transfer of the conveyed material between the conveyor belt 3 and the crane 2 is carried in the transfer position 4 (second load position). In addition, the conveyor belt 3 and the top conveying mechanism MC are the same. The transfer of object C is carried out in transfer position 5 (the second transfer position). Figure 3 corresponds to Figure 2 and shows the phase of the phase station 1A which constitutes the transfer mechanism according to the present invention. The diagram of the stocker. In the example shown in FIG. 3, the auxiliary crane 2A is not provided, and μ is provided with a station elevator 6 constituting a lifting mechanism instead of the auxiliary crane 2A. The station elevator 6 is an elevator conveying object (hereinafter, referred to as Cassette) mechanism, which can be moved between the conveyor 12 and the conveyor 3 in the 121245737 loading device 7 (the third transferring position) Line cassette transfer. Therefore, the cassette transferred from the top conveying mechanism ... to the carousel 3 can be transferred to both the stocker crane 2 and the station lift 6. In addition, the opposite can be performed by the storage Both the crane 2 and the station lifter 6 feed the cassette 6 to the conveyor belt 3 ° Figure 4 shows the structure of the cassette station 1A shown in Figure 3 viewed from the central top conveying mechanism side. The station lifter 6 series The lifting mechanism that moves the conveyed material to the vertical direction, and the conveyed material is received by the cassette conveyor belt 3, and can be transferred to the transfer position 8 placed on the lower side of the conveyor 3. The cassette transferred to the transfer position 8 is parallel The stocker 1 can be transferred to the RGV shuttle 9 of the set rail transfer mechanism. In addition, the RGV shuttle 9 can also be used to transfer the cassette to the transfer 10 position 8 so that the stocker crane 2 is unnecessary. The cassettes can be transferred from the top conveying mechanism 1 ^ (:: to the ruler from the shuttle 9 through the carousel 3 and the station elevator 6. The other 15 and vice versa, the cassettes can be conveyed through the conveyor 3 and the station elevator 6. Transfer from the RGV shuttle 9 to the top conveying mechanism Mc. Through the conveyor belt 3 and the stocker crane 2 The transfer of the cassettes can be carried out in the transfer position 4 as before. That is, for the cassettes that are not necessary to be stored temporarily in the stocker 1, the selection station elevator 6 is directly transferred to the RGV shuttle 9 and stored in the stocker.丨 The cassette selection 20 is transferred to the storage place in the stocker 9. Therefore, it is not necessary to use the cassette crane 2 to transfer the cassette transferred by the top transfer mechanism MC to the ^^ 乂 shuttle 9 because It can be transferred to each device, so the load of the stocker crane 2 can be reduced. In addition, the transfer of the mechanism cassette from each device to the top can also use the stocker 2 and the station elevator 6 at a distance, which can reduce the storage cry. 13 1245737 The load of crane 2. It is also displayed at the position 10 of the marriage tube above the _ position 8, which is the position where the county can temporarily retreat at 1 minute from the cutting station. That is, the staggered lift 6 can move the card to the card storage position. By temporarily holding the card _ in the storage position of the card E, it is possible to achieve a buffer function for adjusting the deviation of the card _ transfer time between the stocker crane 2 and the track transfer mechanism 搬 V) and the top transfer mechanism ⑽. The person-to-person will explain the transfer of the Cali station between the stocker 1 and the shuttle between the shuttle 9 and the shuttle 9. Fig. 5 is an example in which a lane conveying mechanism is provided on both sides 10 of the stocker i as shown in Fig. 1. In Fig. 5, the RGV path 15 of the moving path of the RGV shuttle is provided on both sides of the stocker i. RGV path 15 series is equivalent to the first! Figure the rail transport mechanism (RGV) Rcl, Rc2b, etc. The devices 16 are arranged in a line along the! ^ 15 path. The device 16 is equivalent to the film forming device, photo-etching device, inspection device, etching device, test device, etc. shown in FIG. In the structure shown in FIG. 5, the RGV path 15 is arranged on each side of the stocker ^, and the device i6 is arranged on the outside thereof. Here, Fig. 6 is a configuration example in which the structure shown in Fig. 5 is improved according to the present invention. In the configuration example shown in Fig. 6, two rows of devices 16 'are arranged on one side of the stocker 丨 and an RGV path 15 is provided between the rows of devices. Therefore, since the ruler path 20 and the diameter 15 are separated by the stocker 1, two RGV transfer belts π constituting a horizontal transfer mechanism are installed between them. One is for transferring from the stocker 1 to the RGV shuttle 9, and one is for transferring from the rgV shuttle 9 to the stocker 1. In the structure shown in Figure 5, the RGV shuttle 9 is stopped at the stocker and the transfer port, and the RGV shuttle 9's transfer mechanism (robotic arm, etc.) is directly moved to the card 14 1245737 box. In this regard, in the configuration shown in FIG. 6, the card E is transferred between the stocker 1 and the RGV shuttle 9 via the RGV transfer belt 17. Although k is added with the RGV transfer belt 17, the configuration shown in FIG. 2 shows that two rail conveyance mechanisms (RGV) are provided for the device 16, and the number 5 shown in FIG. 6 has the same number. The device 16 has only one rail transport mechanism (RGV), which can reduce the expensive rail transport mechanism (RGV). Fig. 7 is a diagram showing the configuration of the cassette station 1A shown in the above Fig. 3 and the configuration of the manufacturing equipment incorporating the RGV transfer belt 17 shown in Fig. 6. The example shown in FIG. 7 is an example in which the configuration of the manufacturing equipment 10 shown in FIG. 丨 applies the improvement of the present invention. In Fig. 7, the same components as those shown in Fig. 1 are assigned the same reference numerals, and descriptions thereof are omitted. In Fig. 7 ', the magazine stations 1A shown in Fig. 3 are provided to the stockers C, D, and Η. In addition, the stockers C, J, K, and L are provided with the RGV 15 transfer belt 17 shown in FIG. 6. As a result, two of the road transport mechanisms (RGV) Rcl and Rc2 in FIG. 1 form one track transport mechanism (RGV) Rc, and two track transport mechanisms (RGV) Ri and Rh form one track transport. (RGV) Rh, two rail transport mechanisms, Rj2 formation " Solid rail transport mechanism (RGV) Rj, two rail transport mechanisms (RGV) Rkl, Rk2 20 to form one rail transport mechanism (RGV) Rk, two rail transport mechanisms (RGV) R11, R12 form one rail transport mechanism (Rgv) R1, and the number of rail transport mechanisms (RGV) is reduced from 14 to 9. Large reduction in installation area. In addition, along with this, it is possible to significantly reduce manufacturing equipment costs. 15 1245737 For example, 'The footprint of the manufacturing equipment shown in Figure 1 is 18〇111 > <' and the installation area is 25200m2, while the footprint of the manufacturing equipment shown in Figure 7 is 160 × 140m and the installation area is reduced to 22,400m2, about 30,000m2 reduction in area. The above 5 effects are those who set up a cassette station 1A with a station elevator 6 and transfer the conveyor belt 17 by attacking the card 11 to increase the operation rate of the RGV. Fig. 8 is a 10 diagram of the operating rates of the stocker crane and the rail transport mechanism (RGV) of the manufacturing equipment before the application of the present invention and the manufacturing equipment after the application of the present invention. Fig. 8 shows an example of the operation rate of the two configuration examples A and B for the arrangement configuration of different manufacturing equipment. As can be understood from Fig. 8, neither of the construction examples A and B to which the present invention is applied changes the average operation rate of the crane, and the average operation rate of the road handling mechanism (RGV) can be increased from 12% to 13%. Fig. 9 is a result of calculating the investment collars for the entire transport system 15 for the configuration examples a and B of Fig. 8. In the case where the present invention is applied, it can be understood that both of the construction examples A and B can achieve an investment amount reduction of about 200 million yuan. As described above, if the transfer mechanism of the conveying material between the stocker constituting the station, the conveying mechanism (RGV) and the central conveying mechanism according to the present invention is improved, the installation area of the manufacturing equipment can be reduced, and the conveying system can be reduced. 20 The total investment amount of the system. Moreover, in the above-mentioned embodiment, although the top conveyance mechanism is described as a central inter-process conveyance mechanism, it is not limited to this, and a conveyance mechanism such as a mobile crane on the floor, and conveyance by walking in a clean room may be used. Various transport mechanisms such as under-floor transport mechanisms of cars. 16 1245737 In addition, even if a small stocker with a crane with two functions of lifting and moving is provided instead of the station elevator 6 shown in FIG. Further, for example, the standby crane 2A shown in FIG. 2 may be used instead of the station elevator 6. 5 Effects of the Invention As described above, according to the present invention, the cassette can be directly transferred from the top conveying mechanism to the road conveying mechanism (RGV) using a station elevator. Therefore, it is not necessary to increase the load of the stocker crane, and it is possible to transfer a large number of conveyed objects by the road conveyance mechanism (RGV). It is possible to increase the operating rate of the rail transport mechanism (RGV). In this way, the efficiency of the entire transfer system can be achieved, and the number of rail transfer mechanisms (RGV) and the number of accumulators arranged in manufacturing equipment can be reduced. In addition, according to the above-mentioned invention, since devices can be arranged on both sides of the RGV, it is possible to arrange more devices for one RGV, and the RGV can be improved. ) Can reduce the number of RGVs. [Brief Description of the Drawings] Fig. 1 is a diagram showing an arrangement configuration of manufacturing equipment of a liquid crystal display device as an example of the manufacturing equipment. Fig. 2 is a diagram of a transfer mechanism for transferring 20 items between each stocker and the top transfer mechanism in Fig. 1. FIG. 3 is a diagram of a stocker of a cassette station elevator according to the present invention. Fig. 4 is a diagram showing the structure of the card E station shown in Fig. 3 as viewed from the center top conveying mechanism side. Fig. 5 is a diagram showing an example in which a lane conveying mechanism is provided on both sides of the stocker. 1245737 FIG. 6 is a diagram illustrating a configuration example in which the structure shown in FIG. 5 is improved according to the present invention. Fig. 7 is a diagram showing the configuration of the cassette station shown in Fig. 3 and the arrangement and configuration of the manufacturing equipment incorporating the RGV transfer belt shown in Fig. 6. Fig. 8 is a graph showing the operating rates of the stocker crane and the rail transport mechanism (RGV) of the manufacturing equipment before the application of the present invention and the manufacturing equipment after the application of the present invention. FIG. 9 is a result of calculating the investment amount of the entire transfer system for the configuration example of FIG. 8. [Representative symbol table of main components of the figure] 1 ... stocker 2 ... stocker crane 3 ... conveyor 6 ... station lift 10 ... carton storage position 16 ... device 1A-^ box station 2A ... prepared crane 4 , 5, 7, 8 ... Transfer position 9- .. RGV shuttle 15--RGV path 17 ... RGV transfer conveyor 18