TWD161030S - Substrate retaining ring - Google Patents

Abstract

[Item Usage]; This design provides a "substrate retaining ring", especially a novel design that is different from the commonly used shape in the industry. The substrate retaining ring described in this design is used in the grinding process of semiconductor manufacturing substrates, etc., to maintain the relative position of substrates such as wafers during grinding. ; [Design Description]; As shown in the attached figure, the appearance of the "substrate retaining ring" includes a circular frame and a plurality of arc-shaped guide sliding gain elements embedded in the outer circumference of the circular frame and a folded rubber ring; its creative feature lies in the multiplication of the visual effects of its overall parts, including:; If combined with the three-dimensional view, top view and A-A section partial enlarged view The annular frame body is provided with a horizontally inwardly concave annular recessed groove and an annular groove at a height position on the outer circumference thereof, wherein the inner edge of the folded rubber ring is embedded in the annular recessed groove, and each of the arc-shaped guide-sliding gain elements is embedded in the annular recessed groove in an annular parallel shape, and wherein the cross section of the folded rubber ring is roughly in the shape of an arc Z. shaped style; please also refer to the partial enlarged picture of the disassembled state of the arc-shaped guide slide gain element. The cross section of each arc-shaped guide slide gain element is roughly rectangular, and is embellished with a symmetrical upper and lower U-shaped ridge on one side of the top and bottom, and a U-shaped inlay is set at the relative position of the annular groove and the ridge to match the ridge to highlight the The unique style of the circular frame cross section; the base retaining ring formed by these visual features completely breaks away from the traditional design of existing products, making the overall structure have a unique aesthetic sense of multiple shapes and line decoration. It is indeed a novel and unique design. Therefore, it is extremely practical and beautiful, and extremely ingenious and changeable. Therefore, a design patent application is filed in accordance with the law. The one-dot chain line disclosed in the figure is used to define the local scope of the feature, and the one-dot chain line itself is not the part claimed in this case.