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TW362137B - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
TW362137B
TW362137B TW087109061A TW87109061A TW362137B TW 362137 B TW362137 B TW 362137B TW 087109061 A TW087109061 A TW 087109061A TW 87109061 A TW87109061 A TW 87109061A TW 362137 B TW362137 B TW 362137B
Authority
TW
Taiwan
Prior art keywords
chamber
cooling water
communicates
conduit
inlet
Prior art date
Application number
TW087109061A
Other languages
English (en)
Inventor
Toshiyasu Hoshi
Masashi Yoshimura
Original Assignee
Taiko Kikai Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiko Kikai Ind Co Ltd filed Critical Taiko Kikai Ind Co Ltd
Application granted granted Critical
Publication of TW362137B publication Critical patent/TW362137B/zh

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28Safety arrangements; Monitoring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04Heating; Cooling; Heat insulation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
TW087109061A 1998-03-31 1998-06-08 Vacuum pump TW362137B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08753798A JP3831113B2 (ja) 1998-03-31 1998-03-31 真空ポンプ

Publications (1)

Publication Number Publication Date
TW362137B true TW362137B (en) 1999-06-21

Family

ID=13917744

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087109061A TW362137B (en) 1998-03-31 1998-06-08 Vacuum pump

Country Status (6)

Country Link
US (1) US6315535B1 (zh)
JP (1) JP3831113B2 (zh)
KR (1) KR100347228B1 (zh)
DE (1) DE19882987C2 (zh)
TW (1) TW362137B (zh)
WO (1) WO1999050561A1 (zh)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001271777A (ja) * 2000-03-27 2001-10-05 Toyota Autom Loom Works Ltd 真空ポンプにおける冷却装置
FR2810375B1 (fr) * 2000-06-15 2002-11-29 Cit Alcatel Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide
BE1013944A3 (nl) 2001-03-06 2003-01-14 Atlas Copco Airpower Nv Watergeinjecteerde schroefcompressor.
KR100424795B1 (ko) * 2001-08-09 2004-03-30 코웰정밀주식회사 자체순환 냉각시스템 진공펌프
DE10156179A1 (de) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Kühlung einer Schraubenvakuumpumpe
GB0510892D0 (en) * 2005-05-27 2005-07-06 Boc Group Plc Vacuum pump
DE102008049238A1 (de) * 2008-05-30 2009-12-03 Wabco Gmbh Vorrichtung zum Betreiben eines Hilfsaggregates eines Fahrzeuges, insbesondere Nutzfahrzeuges
KR101173168B1 (ko) * 2010-11-17 2012-08-16 데이비드 김 다단형 건식 진공펌프
KR101333056B1 (ko) 2012-01-20 2013-11-26 주식회사 코디박 냉각 기능을 갖는 모터 내장형 스크루 로터 타입 진공펌프
US10550841B2 (en) * 2015-02-25 2020-02-04 Hitachi Industrial Equipment Systems Co., Ltd. Oilless compressor
KR101712962B1 (ko) 2015-09-24 2017-03-07 이인철 냉각장치를 갖춘 진공펌프
DE102018130472A1 (de) * 2018-11-30 2020-06-04 Nidec Gpm Gmbh Schraubenspindelpumpe
JP2023541126A (ja) * 2020-09-02 2023-09-28 イートン インテリジェント パワー リミテッド 後輪駆動egrポンプ
JP7555870B2 (ja) 2021-03-29 2024-09-25 株式会社荏原製作所 真空ポンプ装置
FR3128745B1 (fr) * 2021-10-29 2025-07-11 Pfeiffer Vacuum Pompe à vide sèche
CN116428157B (zh) * 2023-04-13 2024-08-30 北京通嘉宏瑞科技有限公司 气体加热控制系统及气体加热控制方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61152992A (ja) 1984-12-26 1986-07-11 Hitachi Ltd スクリユ−流体機械
DE3867633D1 (de) * 1988-06-01 1992-02-20 Leybold Ag Verfahren zur ueberwachung einer oelgeschmierten vakuumpumpe.
JPH02149795A (ja) * 1988-11-30 1990-06-08 Hitachi Ltd 無給油式スクリュー圧縮機
JPH0440186U (zh) * 1990-03-17 1992-04-06
JPH0419385A (ja) 1990-05-14 1992-01-23 Anlet Co Ltd 圧縮ガス流配管内蔵型まゆ型2軸多段式真空ポンプの冷却装置
JPH0440186A (ja) 1990-06-06 1992-02-10 Fujitsu Ltd 静止画像伝送方法

Also Published As

Publication number Publication date
KR100347228B1 (ko) 2002-08-03
KR20010042294A (ko) 2001-05-25
DE19882987T1 (de) 2001-04-12
DE19882987C2 (de) 2002-11-07
JP3831113B2 (ja) 2006-10-11
US6315535B1 (en) 2001-11-13
WO1999050561A1 (en) 1999-10-07
JPH11280681A (ja) 1999-10-15

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Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent