TW327479U - Vacuum processing apparatus - Google Patents

Vacuum processing apparatus

Info

Publication number: TW327479U
Authority: TW; Taiwan
Prior art keywords: processing apparatus; vacuum processing; vacuum; processing
Prior art date: 1992-10-15

Application number

TW085212876U

Other languages

Chinese (zh)

Inventor

Masao Kubodera

Toshiyuki Kawaji

Masaki Narishima

Original Assignee

Tokyo Electron Co Ltd

Tel Varian Kk

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1992-10-15

Filing date

1993-11-02

Publication date

1998-02-21

1992-10-15 Priority claimed from JP30312992A external-priority patent/JP2997717B2/en

1993-04-28 Priority claimed from JP12521993A external-priority patent/JP3172331B2/en

1993-04-28 Priority claimed from JP12521893A external-priority patent/JP3151582B2/en

1993-11-02 Application filed by Tokyo Electron Co Ltd, Tel Varian Kk filed Critical Tokyo Electron Co Ltd

1998-02-21 Publication of TW327479U publication Critical patent/TW327479U/en

Classifications

- H10P72/50—

TW085212876U 1992-10-15 1993-11-02 Vacuum processing apparatus TW327479U (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
JP30312992A JP2997717B2 (en)	1992-10-15	1992-10-15	Vacuum processing equipment
JP12521993A JP3172331B2 (en)	1993-04-28	1993-04-28	Vacuum processing equipment
JP12521893A JP3151582B2 (en)	1993-04-28	1993-04-28	Vacuum processing equipment

Publications (1)

Publication Number	Publication Date
TW327479U true TW327479U (en)	1998-02-21

Family

ID=27315071

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW085212876U TW327479U (en)	1992-10-15	1993-11-02	Vacuum processing apparatus

Country Status (2)

Country	Link
KR (1)	KR100242534B1 (en)
TW (1)	TW327479U (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR100449273B1 (en) *	1997-08-26	2004-11-26	삼성전자주식회사	an apparatus and a method for semiconductor production
KR19990027324A (en)	1997-09-29	1999-04-15	윤종용	Multi-chamber system with wafer recognition system and wafer processing method using the same
JP3297416B2 (en) *	2000-02-28	2002-07-02	株式会社半導体先端テクノロジーズ	Resist ashing apparatus and wafer heating method
KR100440624B1 (en) *	2000-03-29	2004-07-15	주식회사 임젠	Method for Producing the Calciumlactate from Diluted Molasses or Vegetables-and Fruits-Wastes
KR20010044329A (en) *	2001-02-07	2001-06-05	김혜자	Preparation method of fermented liquid base and functional foods
US6852644B2 (en) *	2002-11-25	2005-02-08	The Boc Group, Inc.	Atmospheric robot handling equipment
KR100625337B1 (en) *	2004-12-28	2006-09-20	동부일렉트로닉스 주식회사	Semiconductor manufacturing equipment and semiconductor manufacturing method using the same
KR100776283B1 (en) *	2006-07-04	2007-11-13	세메스 주식회사	Stripping Process Equipment and Method

1993
- 1993-10-14 KR KR1019930021322A patent/KR100242534B1/en not_active Expired - Fee Related
- 1993-11-02 TW TW085212876U patent/TW327479U/en unknown

Also Published As

Publication number	Publication date
KR940010265A (en)	1994-05-24
KR100242534B1 (en)	2000-02-01

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