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TW277139B - - Google Patents

Info

Publication number
TW277139B
TW277139B TW083108049A TW83108049A TW277139B TW 277139 B TW277139 B TW 277139B TW 083108049 A TW083108049 A TW 083108049A TW 83108049 A TW83108049 A TW 83108049A TW 277139 B TW277139 B TW 277139B
Authority
TW
Taiwan
Application number
TW083108049A
Original Assignee
Hitachi Seisakusyo Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP23018793A external-priority patent/JP3265743B2/ja
Priority claimed from JP4828694A external-priority patent/JP3186008B2/ja
Application filed by Hitachi Seisakusyo Kk filed Critical Hitachi Seisakusyo Kk
Application granted granted Critical
Publication of TW277139B publication Critical patent/TW277139B/zh

Links

Classifications

    • H10P72/50—
    • H10P72/74—
    • H10P72/0434—
    • H10P72/72—
    • H10P72/722—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/23—Chucks or sockets with magnetic or electrostatic means
TW083108049A 1993-09-16 1994-09-01 TW277139B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP23018793A JP3265743B2 (ja) 1993-09-16 1993-09-16 基板保持方法及び基板保持装置
JP4828694A JP3186008B2 (ja) 1994-03-18 1994-03-18 ウエハ保持装置

Publications (1)

Publication Number Publication Date
TW277139B true TW277139B (zh) 1996-06-01

Family

ID=26388524

Family Applications (1)

Application Number Title Priority Date Filing Date
TW083108049A TW277139B (zh) 1993-09-16 1994-09-01

Country Status (5)

Country Link
US (8) US5792304A (zh)
EP (3) EP0644578B1 (zh)
KR (8) KR100290700B1 (zh)
DE (2) DE69429318T2 (zh)
TW (1) TW277139B (zh)

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Publication number Publication date
EP0921559B1 (en) 2004-07-14
US6221201B1 (en) 2001-04-24
KR100287552B1 (ko) 2001-04-16
DE69433903D1 (de) 2004-08-19
EP1119023A2 (en) 2001-07-25
KR100362995B1 (ko) 2002-11-29
US6048434A (en) 2000-04-11
US5792304A (en) 1998-08-11
KR100406692B1 (ko) 2003-11-21
KR100345207B1 (ko) 2002-07-24
DE69429318T2 (de) 2002-08-08
KR100325679B1 (ko) 2002-02-25
EP1119023A3 (en) 2006-06-07
US6217705B1 (en) 2001-04-17
EP0644578A2 (en) 1995-03-22
US6336991B1 (en) 2002-01-08
DE69429318D1 (de) 2002-01-17
DE69433903T2 (de) 2005-07-28
US5985035A (en) 1999-11-16
EP0644578B1 (en) 2001-12-05
KR100290700B1 (ko) 2001-10-24
EP0921559A3 (en) 1999-08-04
KR100454863B1 (ko) 2004-11-03
KR100406716B1 (ko) 2003-11-20
EP0921559A2 (en) 1999-06-09
KR950010014A (ko) 1995-04-26
US5906684A (en) 1999-05-25
US5961774A (en) 1999-10-05
EP0644578A3 (zh) 1995-04-19

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