TW202603329A - A system for real-time measurement of thin film thickness using acoustic wave elements - Google Patents
A system for real-time measurement of thin film thickness using acoustic wave elementsInfo
- Publication number
- TW202603329A TW202603329A TW113124745A TW113124745A TW202603329A TW 202603329 A TW202603329 A TW 202603329A TW 113124745 A TW113124745 A TW 113124745A TW 113124745 A TW113124745 A TW 113124745A TW 202603329 A TW202603329 A TW 202603329A
- Authority
- TW
- Taiwan
- Prior art keywords
- film thickness
- acoustic wave
- real
- coordinate system
- thin film
- Prior art date
Links
Abstract
一種應用聲波元件即時量測薄膜厚度之系統，包含至少一具薄膜之載體，薄膜具一薄膜厚度；至少一聲波單元，設於載體之周側並實時偵測薄膜厚度的變化而產生一諧振頻率；一計算單元接收及處理聲波元件偵測產生的諧振頻率。計算單元由〔薄膜厚度-諧振頻率〕數值得至少一校正前膜厚頻率二維座標系，還由〔腔體溫度-諧振頻率〕數值得至少一溫度頻率代償二維座標系；計算單元再將校正前膜厚頻率二維座標系和溫度頻率代償二維座標系運算得一膜厚測量三維座標系，供測量時內插搜尋得到薄膜厚度，可實時偵測反饋薄膜厚度，準確率高，提高鍍膜良率。A system for real-time measurement of thin film thickness using an acoustic wave element includes at least one carrier having a thin film with a thickness; at least one acoustic wave element disposed around the periphery of the carrier and generating a resonant frequency by real-time detection of changes in the thin film thickness; and a computing unit receiving and processing the resonant frequency detected by the acoustic wave element. The calculation unit uses the [film thickness - resonant frequency] values to obtain at least one uncorrected film thickness frequency two-dimensional coordinate system, and also uses the [cavity temperature - resonant frequency] values to obtain at least one temperature frequency compensated two-dimensional coordinate system. The calculation unit then uses the uncorrected film thickness frequency two-dimensional coordinate system and the temperature frequency compensated two-dimensional coordinate system to calculate a film thickness measurement three-dimensional coordinate system, which is used for interpolation search to obtain the film thickness during measurement. It can detect and feedback the film thickness in real time, with high accuracy, and improve the coating yield.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW113124745A TWI878168B (en) | 2024-07-02 | 2024-07-02 | System for real-time measurement of film thickness using acoustic wave elements |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW113124745A TWI878168B (en) | 2024-07-02 | 2024-07-02 | System for real-time measurement of film thickness using acoustic wave elements |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TWI878168B TWI878168B (en) | 2025-03-21 |
| TW202603329A true TW202603329A (en) | 2026-01-16 |
Family
ID=95830759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW113124745A TWI878168B (en) | 2024-07-02 | 2024-07-02 | System for real-time measurement of film thickness using acoustic wave elements |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWI878168B (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101945723B1 (en) * | 2011-10-25 | 2019-02-11 | 삼성전자주식회사 | Film bulk acoustic resonator and fabrication method thereof |
| US20210184200A1 (en) * | 2019-12-11 | 2021-06-17 | GM Global Technology Operations LLC | Homogenous film coating of a particle |
| CN116054773A (en) * | 2022-12-09 | 2023-05-02 | 中国科学技术大学 | Bulk acoustic wave resonator and its preparation method |
| CN117498828B (en) * | 2023-12-06 | 2024-07-23 | 武汉敏声新技术有限公司 | A thin film bulk acoustic wave resonator and a method for preparing the same |
| CN117879523B (en) * | 2024-03-12 | 2024-08-02 | 华南理工大学 | Preparation system of tunable film bulk acoustic resonator |
-
2024
- 2024-07-02 TW TW113124745A patent/TWI878168B/en active
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