TW202409729A - Positive-type photosensitive resin composition, partition wall, and optical element - Google Patents
Positive-type photosensitive resin composition, partition wall, and optical element Download PDFInfo
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- H05B33/22—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of auxiliary dielectric or reflective layers
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Abstract
Description
本發明係關於一種正型感光性樹脂組合物、阻隔壁及光學元件。The present invention relates to a positive photosensitive resin composition, a barrier rib and an optical element.
用於作為光學元件之彩色濾光片或有機EL(Electro-Luminescence,電致發光)元件之像素部之阻隔壁已知有將感光性樹脂組合物塗佈於基板,並藉由光微影技術形成之方法。It is known that a photosensitive resin composition is coated on a substrate and used as a barrier rib in a pixel portion of an organic EL (Electro-Luminescence) element as a color filter or an organic EL (Electro-Luminescence) element. method of formation.
近年來,作為彩色濾光片或有機EL元件之像素部之製造方法,業界提出有利用噴墨法之低成本化製程。 例如,於彩色濾光片之製造中,藉由光微影法形成阻隔壁後,藉由噴墨法對由阻隔壁所圍成之開口部(點)噴射R(紅色)、G(綠色)、及B(藍色)之墨水並塗佈,而形成像素。 In recent years, the industry has proposed a low-cost process using the inkjet method as a method for manufacturing color filters or pixel portions of organic EL elements. For example, in the production of color filters, after the barrier ribs are formed by photolithography, R (red) and G (green) are sprayed on the openings (dots) surrounded by the barrier ribs by the inkjet method. , and B (blue) ink are applied to form pixels.
又,噴墨法中,必須防止相鄰之像素間之墨水之混色。因此,對阻隔壁要求排斥作為噴墨噴出液之包含水或有機溶劑之墨水的性質,即所謂撥墨性。另一方面,藉由噴墨法形成於像素之墨水層需要優異之膜厚均一性。因此,要求由阻隔壁所圍成之點(dot)對噴出液具有良好之潤濕性,即所謂親墨性。In addition, in the inkjet method, it is necessary to prevent color mixing of ink between adjacent pixels. Therefore, the barrier rib is required to have a property of repelling ink containing water or an organic solvent as an inkjet ejection liquid, that is, so-called ink repellency. On the other hand, the ink layer formed on the pixel by the inkjet method requires excellent film thickness uniformity. Therefore, it is required that the dots surrounded by the barrier ribs have good wettability to the ejection liquid, that is, so-called ink affinity.
為了使阻隔壁之表面成為撥墨性,業界開發出了於用以形成阻隔壁之感光性樹脂組合物中添加撥墨劑之技術。 又,正型感光性樹脂於顯影後之殘渣(以下,亦稱為「顯影殘渣」)較少之方面較負型感光性樹脂優異,有時可較佳地使用。 In order to make the surface of the barrier ribs ink-repellent, the industry has developed a technology for adding ink-repellent to the photosensitive resin composition used to form the barrier ribs. In addition, positive photosensitive resins are superior to negative photosensitive resins in that they have less residue after development (hereinafter also referred to as "development residue"), and are sometimes better used.
例如專利文獻1中記載有一種正型感光性樹脂組合物,其包含源自具有氟原子之聚矽氧烷之撥墨劑,且於電漿處理後、或UV(Ultra Violet,紫外線)臭氧處理後亦保持較高之撥水性、較高之撥液性。 [先前技術文獻] [專利文獻] For example, Patent Document 1 describes a positive photosensitive resin composition that contains an ink repellent derived from polysiloxane having fluorine atoms, and is subjected to plasma treatment or UV (Ultra Violet, ultraviolet) ozone treatment. It also maintains high water repellency and high liquid repellency. [Prior technical literature] [Patent Document]
專利文獻1:國際公開第2019/156000號Patent Document 1: International Publication No. 2019/156000
[發明所欲解決之問題][Problem to be solved by the invention]
然而,關於專利文獻1中所記載之正型感光性樹脂組合物,所獲得之硬化膜於顯影殘渣去除性、撥墨性之方面尚有改善之餘地。 又,要求於點內墨水均勻地擴散至阻隔壁邊緣(以下亦稱為「噴墨塗佈性」),關於專利文獻1中所記載之正型感光性樹脂組合物,所獲得之硬化膜於該方面亦有改善之餘地。 However, the cured film obtained by the positive photosensitive resin composition described in Patent Document 1 still has room for improvement in terms of development residue removal and ink repellency. In addition, it is required that the ink in the dot diffuses evenly to the edge of the barrier wall (hereinafter also referred to as "inkjet coating property"). The cured film obtained by the positive photosensitive resin composition described in Patent Document 1 also has room for improvement in this aspect.
本發明之目的在於提供一種可獲得撥墨性優異,顯影殘渣較少,噴墨塗佈性亦優異之硬化膜之正型感光性樹脂組合物。 [解決問題之技術手段] An object of the present invention is to provide a positive photosensitive resin composition capable of obtaining a cured film having excellent ink repellency, less development residue, and excellent inkjet coating properties. [Technical means to solve problems]
本發明係關於以下之正型感光性樹脂組合物。 [1]一種正型感光性樹脂組合物,其係包含鹼可溶性樹脂(A)、感光劑(B)及撥墨劑(C)者,且 上述撥墨劑(C)具有下述式(c)所表示之碳數2~40之一價基, R f1-O-R f2- (c) R f1:碳數1~6之聚氟烷基 R f2:於碳-碳原子間可具有醚性氧原子之聚氟伸烷基 其中,R f1-O-R f2-具有至少1個-O-CF 2-基。 [發明之效果] The present invention relates to the following positive photosensitive resin composition. [1] A positive photosensitive resin composition comprising an alkali-soluble resin (A), a photosensitive agent (B) and an ink repellent (C), wherein the ink repellent (C) has a monovalent group having 2 to 40 carbon atoms represented by the following formula (c): R f1 -OR f2 - (c) R f1 : a polyfluoroalkyl group having 1 to 6 carbon atoms R f2 : a polyfluoroalkyl group having an ethereal oxygen atom between carbon atoms, wherein R f1 -OR f2 - has at least one -O-CF 2 - group. [Effects of the invention]
根據本發明之正型感光性樹脂組合物,可獲得撥墨性優異,顯影殘渣較少,噴墨塗佈性亦優異之硬化膜。According to the positive photosensitive resin composition of the present invention, a hardened film having excellent ink repellency, less developing residue and excellent inkjet coating property can be obtained.
於本說明書中,將式(c-1)所表示之化合物稱為「化合物(c-1)」。其他化合物亦同樣。 本說明書中之「全部固形物成分」於正型感光性樹脂組合物所含之成分中,為阻隔壁形成成分,表示除了溶劑等因阻隔壁形成過程中之加熱等而揮發之揮發性成分以外之全部成分。全部固形物成分係以將正型感光性樹脂組合物於140℃下加熱24小時而去除溶劑所得之殘留物之形式測定。又,全部固形物成分亦可根據各成分之添加量來計算。 於本說明書中,將塗佈正型感光性樹脂組合物所得之膜稱為「塗膜」,將使其乾燥之狀態稱為「膜」,將進而使其硬化所獲得之膜稱為「硬化膜」。 In this specification, the compound represented by formula (c-1) is referred to as "compound (c-1)". The same applies to other compounds. The "total solid content" in this specification refers to the barrier rib forming components among the components contained in the positive photosensitive resin composition, and means all components except for the volatile components such as solvents that evaporate due to heating during the barrier rib formation process. The total solid content is measured in the form of the residue obtained by heating the positive photosensitive resin composition at 140°C for 24 hours and removing the solvent. In addition, the total solid content can also be calculated based on the amount of each component added. In this specification, the film obtained by coating the positive photosensitive resin composition is called a "coated film", the dried state is called a "film", and the film obtained by further curing is called a "cured film".
於本說明書中,阻隔壁之「表面」用作僅表示阻隔壁之上表面之用語。因此,阻隔壁之「表面」不包括阻隔壁之側面。 本說明書中之「墨水」係對進行乾燥硬化後,例如具有光學、電功能之液體進行統稱者,並不限定於一直以來使用之著色材料。又,注入上述墨水而形成之「像素」亦同樣地,用於表示經阻隔壁分隔之具有光學、電功能之分區。 本說明書中之「撥墨性」係指為了排斥上述墨水而適度地具有撥水性與撥油性兩者之性質,例如可藉由下述方法進行評價。 以下,說明本發明之實施方式。再者,於本說明書中,於並無特別說明之情形時,%表示質量%。 In this specification, the "surface" of the barrier rib is used as a term that only refers to the surface above the barrier rib. Therefore, the "surface" of the barrier wall does not include the side surfaces of the barrier wall. "Ink" in this specification refers to a general term for liquids that have been dried and hardened, such as optical and electrical functions, and is not limited to the coloring materials that have been used. In addition, "pixels" formed by injecting the above-mentioned ink are also used to represent partitions with optical and electrical functions separated by barrier ribs. "Ink repellency" in this specification refers to the property of having both water repellency and oil repellency moderately in order to repel the above-mentioned ink, and can be evaluated, for example, by the following method. Hereinafter, embodiments of the present invention will be described. In addition, in this specification, unless otherwise specified, % means mass %.
於本說明書中,重量平均分子量(Mw)意指藉由凝膠滲透層析法(GPC),將四氫呋喃作為流動相測定,且將標準聚苯乙烯作為基準進行換算所得之重量平均分子量。又,數量平均分子量(Mn)意指藉由同樣之GPC測定之數量平均分子量。In this specification, the weight average molecular weight (Mw) means the weight average molecular weight measured by gel permeation chromatography (GPC) using tetrahydrofuran as the mobile phase and converted with standard polystyrene as the reference. In addition, the number average molecular weight (Mn) means the number average molecular weight measured by the same GPC.
本發明之正型感光性樹脂組合物係包含鹼可溶性樹脂(A)、感光劑(B)及撥墨劑(C)者,且撥墨劑(C)具有下述式(c)所表示之碳數2~40之一價基。 R f1-O-R f2- (c) R f1:碳數1~6之聚氟烷基 R f2:於碳-碳原子間可具有醚性氧原子之聚氟伸烷基 其中,R f1-O-R f2-具有至少1個-O-CF 2-基。 藉由撥墨劑(C)具有聚氟醚結構,可獲得噴墨塗佈性、殘渣去除性、撥墨性優異之硬化膜。 The positive photosensitive resin composition of the present invention contains an alkali-soluble resin (A), a photosensitive agent (B) and an ink repellent agent (C), and the ink repellent agent (C) has the following formula (c): A monovalent base with a carbon number of 2 to 40. R f1 -OR f2 - (c) R f1 : Polyfluoroalkyl group having 1 to 6 carbon atoms R f2 : Polyfluoroalkylene group which may have etheric oxygen atoms between carbon-carbon atoms Among them, R f1 -OR f2 -Has at least 1 -O-CF 2 - group. Since the ink repellent agent (C) has a polyfluoroether structure, a cured film excellent in inkjet coating properties, residue removal properties, and ink repellency can be obtained.
[鹼可溶性樹脂(A)] 鹼可溶性樹脂(A)係溶解於顯影步驟中所使用之鹼之樹脂,且係成為像素部等中所使用之阻隔壁之主成分之樹脂。 鹼可溶性樹脂(A)藉由與下述感光劑(B)一併使用,而作為正型感光性樹脂組合物發揮功能。即,於正型感光性樹脂組合物中,於光微影法等曝光時,於曝光部感光劑(B)活化,增大對顯影液之溶解性。該曝光部於顯影時溶解於顯影液(通常為鹼性顯影液)中而被去除。未經光照射之部分(未曝光部分)成為阻隔壁。再者,鹼可溶性樹脂(A)因曝光前與感光劑(B)組合,故亦存在不溶於顯影液之樹脂。 [Alkali-soluble resin (A)] Alkali-soluble resin (A) is a resin that dissolves in the alkali used in the development step and is a resin that becomes the main component of the barrier wall used in the pixel part, etc. The alkali-soluble resin (A) functions as a positive photosensitive resin composition by being used together with the photosensitive agent (B) described below. That is, in the positive photosensitive resin composition, when exposed by photolithography, etc., the photosensitive agent (B) is activated in the exposed part, and the solubility in the developer is increased. The exposed part is dissolved in the developer (usually an alkaline developer) during development and is removed. The part that is not irradiated with light (unexposed part) becomes the barrier wall. Furthermore, since the alkali-soluble resin (A) is combined with the photosensitive agent (B) before exposure, there are also resins that are insoluble in the developer.
鹼可溶性樹脂(A)為了賦予鹼可溶性,較佳為於樹脂之結構單元中及/或其主鏈末端具有鹼可溶性基。鹼可溶性基係指藉由與鹼相互作用、或反應,而使於鹼溶液中之溶解性增加之官能基,具體而言,可例舉酸性基等。作為較佳之鹼可溶性基,可例舉:羧基、酚性羥基、磺酸基、硫醇基等。In order to impart alkali solubility to the alkali-soluble resin (A), it is preferred that the alkali-soluble group be present in the structural unit of the resin and/or at the end of its main chain. The alkali-soluble group refers to a functional group that increases the solubility in an alkaline solution by interacting or reacting with an alkali, and specifically, an acidic group can be cited. Preferred alkali-soluble groups include: a carboxyl group, a phenolic hydroxyl group, a sulfonic acid group, a thiol group, and the like.
作為本發明之正型感光性樹脂組合物中之鹼可溶性樹脂(A),可使用正型感光性樹脂組合物中所使用之公知之鹼可溶性樹脂。 作為鹼可溶性樹脂(A),較佳為丙烯酸系樹脂、聚醯亞胺樹脂、酚醛清漆型苯酚樹脂。 As the alkali-soluble resin (A) in the positive photosensitive resin composition of the present invention, a known alkali-soluble resin used in a positive photosensitive resin composition can be used. As the alkali-soluble resin (A), acrylic resin, polyimide resin, and novolac type phenol resin are preferred.
作為丙烯酸系樹脂,例如較佳為Tg較高之N取代順丁烯二醯亞胺、甲基丙烯酸苄酯、丙烯酸之共聚物、含有酚性羥基之丙烯酸系樹脂、具有磺醯胺基之丙烯酸系樹脂。作為具體例,示出有日本專利第6177495號公報、日本專利第5447384號公報、日本專利第4770985號公報、日本專利第4600477號公報、日本專利第5444749號公報、及國際公開第2019/156000號中所記載之鹼可溶性樹脂,但並不限定於該等。As the acrylic resin, for example, N-substituted maleimide with a high Tg, benzyl methacrylate, a copolymer of acrylic acid, an acrylic resin containing a phenolic hydroxyl group, and acrylic acid having a sulfonamide group are preferred. Made of resin. Specific examples include Japanese Patent No. 6177495, Japanese Patent No. 5447384, Japanese Patent No. 4770985, Japanese Patent No. 4600477, Japanese Patent No. 5444749, and International Publication No. 2019/156000. Alkali-soluble resins described in, but are not limited to these.
作為聚醯亞胺樹脂,較佳為聚醯亞胺樹脂、聚醯亞胺前驅物、或具有該等之2種以上之重複單元之共聚物。 作為聚醯亞胺樹脂,例如較佳為使四羧酸或四羧酸二酸酐、四羧酸二酯二醯氯等、與二胺或二異氰酸酯化合物、三甲基矽烷化二胺等反應所獲得之樹脂。該聚醯亞胺樹脂具有四羧酸殘基與二胺殘基。又,聚醯亞胺樹脂例如較佳為如下樹脂,其係藉由使四羧酸二酸酐與二胺反應,並使所獲得之聚醯亞胺前驅物之1種即聚醯胺酸藉由加熱處理進行脫水閉環所獲得。於該加熱處理時,亦可添加間二甲苯等與水共沸之溶劑。或者,聚醯亞胺樹脂較佳為如下樹脂,其係藉由添加羧酸酐或二環己基碳二醯亞胺等脫水縮合劑或三乙胺等鹼等作為閉環觸媒,並藉由化學熱處理進行脫水閉環所獲得。或者,亦可藉由如下方法獲得:添加弱酸性羧酸化合物,並於100℃以下之低溫下藉由加熱處理進行脫水閉環。 The polyimide resin is preferably a polyimide resin, a polyimide precursor, or a copolymer having two or more types of repeating units. The polyimide resin is preferably obtained by reacting tetracarboxylic acid, tetracarboxylic dianhydride, tetracarboxylic diester dicarboxylic acid chloride, etc., with a diamine or diisocyanate compound, trimethylsilylated diamine, etc. Obtained resin. The polyimide resin has tetracarboxylic acid residues and diamine residues. Moreover, the polyamide resin is preferably a resin obtained by reacting tetracarboxylic dianhydride and a diamine, and polyamide acid, which is one type of polyamide precursor, obtained by reacting it. Obtained by heat treatment for dehydration and closed loop. During the heat treatment, a solvent such as m-xylene that azeotropes with water may also be added. Alternatively, the polyimide resin is preferably a resin obtained by adding a dehydration condensation agent such as carboxylic anhydride or dicyclohexylcarbodiimide or an alkali such as triethylamine as a ring-closing catalyst and chemically heat-treated Obtained by dehydration and closed loop. Alternatively, it can also be obtained by adding a weakly acidic carboxylic acid compound and performing dehydration and ring-closure by heating at a low temperature of 100° C. or below.
作為聚醯亞胺前驅物,可例舉:聚醯胺酸、聚醯胺酸酯、聚醯胺酸醯胺、聚異醯亞胺等。例如,聚醯胺酸可使四羧酸或四羧酸二酸酐、四羧酸二酯二醯氯等與二胺或二異氰酸酯化合物、三甲基矽烷化二胺反應而獲得。聚醯亞胺例如可藉由如下方法獲得:藉由加熱或酸或鹼等化學處理,使藉由上述方法獲得之聚醯胺酸進行脫水閉環。Examples of the polyamide precursor include polyamide acid, polyamide ester, polyamide acid amide, and polyisoamide imide. For example, polyamic acid can be obtained by reacting tetracarboxylic acid, tetracarboxylic dianhydride, tetracarboxylic diester dicarboxylic acid chloride, etc. with a diamine, a diisocyanate compound, or trimethylsilylated diamine. Polyamide imide can be obtained, for example, by dehydrating and ring-closing the polyamide acid obtained by the above method through heating or chemical treatment with acid or alkali.
作為酚醛清漆型苯酚樹脂,較佳為未改性或改性酚醛清漆型苯酚樹脂,其係藉由添加酚類與醛類、進而視需要之各種改性劑進行聚縮合而製造。The novolak-type phenol resin is preferably an unmodified or modified novolak-type phenol resin, which is produced by adding phenols and aldehydes and optionally various modifiers to perform polycondensation.
作為用以製造酚醛清漆型苯酚樹脂之酚類,例如可例舉:苯酚、鄰甲酚、對甲酚、間甲酚等甲酚類;3,5-二甲苯酚、2,5-二甲苯酚、2,3-二甲苯酚、3,4-二甲苯酚等二甲苯酚類;2,3,4-三甲基苯酚、2,3,5-三甲基苯酚、2,4,5-三甲基苯酚、3,4,5-三甲基苯酚等三甲基苯酚類;2-第三丁基苯酚、3-第三丁基苯酚、4-第三丁基苯酚等第三丁基苯酚類;2-甲氧基苯酚、3-甲氧基苯酚、4-甲氧基苯酚、2,3-二甲氧基苯酚、2,5-二甲氧基苯酚、3,5-二甲氧基苯酚等甲氧基苯酚類;2-乙基苯酚、3-乙基苯酚、4-乙基苯酚、2,3-二乙基苯酚、3,5-二乙基苯酚、2,3,5-三乙基苯酚、3,4,5-三乙基苯酚等乙基苯酚類;鄰氯苯酚、間氯苯酚、對氯苯酚、2,3-二氯苯酚等氯苯酚類;間苯二酚、2-甲基間苯二酚、4-甲基間苯二酚、5-甲基間苯二酚等間苯二酚類;5-甲基鄰苯二酚等鄰苯二酚類;5-甲基鄰苯三酚等鄰苯三酚類;雙酚A、B、C、D、E、F等雙酚類;2,6-二羥甲基對甲酚等羥甲基化甲酚類;α-萘酚、β-萘酚等萘酚類等。該等可單獨使用一種,亦可併用兩種以上。Examples of phenols used to produce novolak-type phenol resin include: cresols such as phenol, o-cresol, p-cresol, and m-cresol; 3,5-xylenol, 2,5-xylenol Phenol, 2,3-xylenol, 3,4-xylenol and other xylenols; 2,3,4-trimethylphenol, 2,3,5-trimethylphenol, 2,4,5 -Trimethylphenols such as trimethylphenol and 3,4,5-trimethylphenol; tertiary butylphenols such as 2-tert-butylphenol, 3-tert-butylphenol and 4-tert-butylphenol Phenols; 2-methoxyphenol, 3-methoxyphenol, 4-methoxyphenol, 2,3-dimethoxyphenol, 2,5-dimethoxyphenol, 3,5-dimethoxyphenol Methoxyphenols such as methoxyphenol; 2-ethylphenol, 3-ethylphenol, 4-ethylphenol, 2,3-diethylphenol, 3,5-diethylphenol, 2,3 , ethylphenols such as 5-triethylphenol, 3,4,5-triethylphenol; chlorophenols such as o-chlorophenol, m-chlorophenol, p-chlorophenol, 2,3-dichlorophenol, etc.; m-phenylene Diphenols, 2-methylresorcinol, 4-methylresorcinol, 5-methylresorcinol and other resorcinols; 5-methylresorcinol and other catechols ; Pyrogallols such as 5-methylpyrogallol; Bisphenols A, B, C, D, E, F and other bisphenols; Hydroxymethylation of 2,6-dihydroxymethyl p-cresol, etc. Cresols; naphthols such as α-naphthol, β-naphthol, etc. One type of these may be used alone, or two or more types may be used in combination.
作為用以製造酚醛清漆型苯酚樹脂之醛類,可例舉:甲醛、多聚甲醛、三㗁烷、乙醛、丙醛、聚甲醛、三氯乙醛、糠醛、乙二醛、正丁醛、己醛、烯丙醛、苯甲醛、巴豆醛、丙烯醛、四甲醛、苯基乙醛、鄰甲苯甲醛、柳醛等。該等可單獨使用一種,亦可併用兩種以上。Examples of aldehydes used to produce novolac-type phenol resin include formaldehyde, paraformaldehyde, trioxane, acetaldehyde, propionaldehyde, polyformaldehyde, trichloroacetaldehyde, furfural, glyoxal, and n-butyraldehyde. , hexanal, allyl aldehyde, benzaldehyde, crotonaldehyde, acrolein, tetraformaldehyde, phenyl acetaldehyde, o-tolualdehyde, salicaldehyde, etc. One type of these may be used alone, or two or more types may be used in combination.
上述酚醛清漆型苯酚樹脂之中,從獲取容易性、金屬雜質較少等方面考慮,較佳為使用甲酚類、二甲苯酚類等作為酚類之酚醛清漆型苯酚樹脂等,尤佳為使用甲酚類之酚醛清漆型苯酚樹脂(以下,亦稱為「甲酚酚醛清漆樹脂」)。Among the above-mentioned novolak-type phenol resins, novolak-type phenol resins using cresols, xylenols, etc. as phenols are preferred from the viewpoints of ease of acquisition, low metal impurities, etc., and particularly preferred are those using novolak-type phenol resins. Cresol-based novolak-type phenol resin (hereinafter also referred to as "cresol novolak resin").
作為鹼可溶性樹脂(A),除了上述以外,還可例舉:多羥基苯乙烯、多鹵化羥基苯乙烯、N-(4-羥基苯基)甲基丙烯醯胺之共聚物、對苯二酚單甲基丙烯酸酯共聚物。又,亦可使用磺醯基醯亞胺系聚合物、含羧基之聚合物、胺基甲酸酯系樹脂等各種鹼可溶性高分子化合物。Examples of the alkali-soluble resin (A) include, in addition to the above, polyhydroxystyrene, polyhalogenated hydroxystyrene, copolymers of N-(4-hydroxyphenyl)methacrylamide, and hydroquinone. Monomethacrylate copolymer. In addition, various alkali-soluble polymer compounds such as sulfonyl imine polymers, carboxyl group-containing polymers, and urethane resins can also be used.
鹼可溶性樹脂(A)之質量平均分子量(Mw)較佳為處於500~20000之範圍內,進而較佳為處於3000~10000之範圍內,尤佳為處於3000~8000之範圍內。若質量平均分子量(Mw)在上述範圍,則對曝光後之顯影液之溶解性優異。The mass average molecular weight (Mw) of the alkali-soluble resin (A) is preferably in the range of 500 to 20,000, more preferably in the range of 3,000 to 10,000, and particularly preferably in the range of 3,000 to 8,000. If the mass average molecular weight (Mw) is within the above range, the solubility to the developer after exposure will be excellent.
本發明之正型感光性樹脂組合物中之鹼可溶性樹脂(A)可單獨使用一種,亦可併用兩種以上。 正型感光性樹脂組合物中之全部固形物成分中之鹼可溶性樹脂(A)之含量較佳為10~90質量%,尤佳為30~80質量%。若含量在上述範圍,則正型感光性樹脂組合物之顯影性變良好。 The alkali-soluble resin (A) in the positive photosensitive resin composition of the present invention may be used alone or in combination of two or more. The content of the alkali-soluble resin (A) in the total solid content of the positive photosensitive resin composition is preferably 10 to 90% by mass, and more preferably 30 to 80% by mass. If the content is within the above range, the developing property of the positive photosensitive resin composition becomes good.
[感光劑(B)] 作為本發明之正型感光性樹脂組合物中之感光劑(B),可使用正型感光性樹脂組合物中所使用之公知之感光劑。 作為感光劑(B),較佳為具有醌二疊氮基之化合物。作為具有醌二疊氮基之化合物,可使用與丙烯酸系樹脂、酚醛清漆型苯酚樹脂、聚醯亞胺、聚苯并㗁唑、聚醯胺醯亞胺、包含其等任一種前驅物及其等之聚合物之樹脂組合而使用的公知之具有醌二疊氮基之化合物。 [Photosensitive agent (B)] As the photosensitive agent (B) in the positive photosensitive resin composition of the present invention, a known photosensitive agent used in the positive photosensitive resin composition can be used. As the photosensitizer (B), a compound having a quinonediazide group is preferred. As the compound having a quinonediazide group, it is possible to use acrylic resin, novolak type phenol resin, polyamide imide, polybenzoethazole, polyamide amide imine, any precursor thereof, and the like. A well-known compound having a quinonediazide group is used in combination with polymer resins.
作為感光劑(B),可例舉能夠相互縮合之下述具有醌二疊氮基之化合物α與化合物β之完全縮合物或部分縮合物。As the photosensitizer (B), there can be exemplified a complete condensate or a partial condensate of the following compound α having a quinone diazide group and a compound β which are capable of condensing with each other.
化合物α具有能夠縮合反應之官能基。作為該能夠縮合反應之官能基,可例舉磺基、氯磺基等。作為化合物α,可例舉:苯醌二疊氮磺酸、萘醌二疊氮磺酸、蒽醌二疊氮磺酸等磺酸、該等之磺醯氯。作為磺醯氯,具體而言,可例舉:1,2-萘醌二疊氮-5-磺醯氯、1,2-萘醌二疊氮-4-磺醯氯、1,2-苯醌二疊氮-4-磺醯氯等。Compound α has a functional group capable of condensation reaction. Examples of the functional group capable of condensation reaction include sulfo group and chlorosulfo group. Examples of compound α include sulfonic acids such as benzoquinonediazidesulfonic acid, naphthoquinonediazidesulfonic acid, anthraquinonediazidesulfonic acid, and sulfonyl chlorides thereof. Specifically, examples of sulfonyl chloride include 1,2-naphthoquinonediazide-5-sulfonyl chloride, 1,2-naphthoquinonediazide-4-sulfonyl chloride, and 1,2-benzoquinonediazide-4-sulfonyl chloride.
化合物β具有能夠與化合物α進行縮合反應之官能基。作為該能夠縮合反應之官能基,可例舉羥基、胺基等,較佳為羥基。 作為化合物β,於所獲得之阻隔壁之耐熱性優異之方面,較佳為具有芳香環之化合物。於耐熱性及可導入較多之羥基之方面,該芳香族化合物中之芳香環數較佳為1~6個,尤佳為2~4個。 作為化合物β,尤佳為鍵結於芳香環之氫原子之至少1個經羥基取代之芳香族化合物。1分子中之羥基數較佳為1~10個,尤佳為2~4個。 作為化合物β之具體例,可例舉下述所示之化合物。 作為酚類之苯酚、4-甲基苯酚;作為多羥基二苯甲酮類之2,3,4-三羥基二苯甲酮、2,3,4,4'-四羥基二苯甲酮;作為三苯酚型化合物之三(4-羥基苯基)甲烷、1,1,1-三(4-羥基苯基)乙烷、1,1-雙(4-羥基苯基)-1-[α,α-二甲基-α-(4'-羥基苯基)苄基]乙烷、1,3,5-三(4-羥基苯基二甲基苄基)苯;作為雙酚型化合物之2,3,4-三羥基苯基-4'-羥基苯基甲烷、2-(3,4-二羥基苯基)-2-(3',4'-二羥基苯基)丙烷、2-(2,4-二羥基苯基)-2-(2',4'-二羥基苯基)丙烷、2-(2,3,4-三羥基苯基)-2-(4'-羥基苯基)丙烷;作為多核分支型化合物之1-[1,1-雙(4-羥基苯基)乙基]-4-[1',1'-雙(4'-羥基苯基)乙基]苯;作為縮合型酚化合物之2-雙[1,1-雙(4-羥基苯基環己基)]-2-雙[1',1'-雙(4'-羥基苯基環己基)]丙烷;1,1'-螺雙[1H-茚]-5,5',6,6'-四醇、2,4,4-三甲基-2-(2,4-二羥基苯基)-7-羥基苯并二氫吡喃、五環[19,3,1,1 3,7,1 9,13,1 15,19]二十八烷-1,3,5,7,9,11,13,15,17,19,21,23-十二烯-4,6,10,12,16,18,22,24-八醇。 Compound β has a functional group capable of undergoing a condensation reaction with compound α. Examples of the functional group capable of undergoing a condensation reaction include a hydroxyl group, an amino group, etc., and a hydroxyl group is preferred. As compound β, a compound having an aromatic ring is preferred in terms of excellent heat resistance of the barrier wall obtained. In terms of heat resistance and the ability to introduce more hydroxyl groups, the number of aromatic rings in the aromatic compound is preferably 1 to 6, and more preferably 2 to 4. As compound β, an aromatic compound in which at least one hydrogen atom bonded to the aromatic ring is substituted with a hydroxyl group is particularly preferred. The number of hydroxyl groups in one molecule is preferably 1 to 10, and more preferably 2 to 4. As specific examples of compound β, the compounds shown below can be cited. Phenol and 4-methylphenol as phenols; 2,3,4-trihydroxybenzophenone and 2,3,4,4'-tetrahydroxybenzophenone as polyhydroxybenzophenones; tris(4-hydroxyphenyl)methane, 1,1,1-tris(4-hydroxyphenyl)ethane, 1,1-bis(4-hydroxyphenyl)-1-[α,α-dimethyl-α-(4'-hydroxyphenyl)benzyl]ethane and 1,3,5-tris(4-hydroxyphenyldimethylbenzyl)benzene as triphenol compounds; 2,3,4-trihydroxyphenyl-4'-hydroxyphenylmethane, 2-(3,4-dihydroxyphenyl)-2-(3',4'-dihydroxyphenyl)propane and 2-(2,4-dihydroxyphenyl)- )-2-(2',4'-dihydroxyphenyl)propane, 2-(2,3,4-trihydroxyphenyl)-2-(4'-hydroxyphenyl)propane;1-[1,1-bis(4-hydroxyphenyl)ethyl]-4-[1',1'-bis(4'-hydroxyphenyl)ethyl]benzene as a multinuclear branched compound; 2-bis(4'-hydroxyphenyl)ethyl as a condensed phenol compound [1,1-Bis(4-hydroxyphenylcyclohexyl)]-2-bis[1',1'-bis(4'-hydroxyphenylcyclohexyl)]propane;1,1'-spirobi[1H-indene]-5,5',6,6'-tetrol, 2,4,4-trimethyl-2-(2,4-dihydroxyphenyl)-7-hydroxybenzodihydropyran, pentacyclic[19,3,1,1 3,7 ,1 9,13 ,1 15,19 ]octacosane-1,3,5,7,9,11,13,15,17,19,21,23-dodecene-4,6,10,12,16,18,22,24-octaol.
本發明之正型感光性樹脂組合物中之感光劑(B)可為1分子中之醌二疊氮基數不同之化合物的混合物,以感光劑(B)整體之平均值計,較佳為1分子中具有1~4個醌二疊氮基之化合物,尤佳為具有2.5~3個醌二疊氮基之化合物。The photosensitive agent (B) in the positive photosensitive resin composition of the present invention may be a mixture of compounds having different numbers of quinone diazide groups in one molecule. Based on the average value of the photosensitive agent (B) as a whole, a compound having 1 to 4 quinone diazide groups in one molecule is preferred, and a compound having 2.5 to 3 quinone diazide groups is particularly preferred.
本發明之正型感光性樹脂組合物中之全部固形物成分中之感光劑(B)的含量較佳為0.1~50質量%,尤佳為1.0~30質量%。若為上述範圍,則正型感光性樹脂組合物之顯影性優異。若未達下限值,則有時無法獲得作為感光性樹脂組合物之充分之感度,若超過上限值,則有成分析出之虞。The content of the photosensitive agent (B) in the total solid content of the positive photosensitive resin composition of the present invention is preferably 0.1 to 50 mass %, and particularly preferably 1.0 to 30 mass %. If it is the said range, the developability of a positive photosensitive resin composition will be excellent. If it is less than the lower limit, sufficient sensitivity as a photosensitive resin composition may not be obtained, and if it exceeds the upper limit, there is a risk of component precipitation.
[撥墨劑(C)] 本發明中之撥墨劑(C)具有下述式(c)所表示之碳數2~40之一價基(以下,亦記載為基(c))。 R f1-O-R f2- (c) R f1:碳數1~6之聚氟烷基 R f2:於碳-碳原子間可具有醚性氧原子之聚氟伸烷基 其中,R f1-O-R f2-具有至少1個-O-CF 2-基。 [Ink repellent agent (C)] The ink repellent agent (C) in the present invention has a monovalent group having 2 to 40 carbon atoms represented by the following formula (c) (hereinafter also referred to as group (c)). R f1 -OR f2 - (c) R f1 : Polyfluoroalkyl group having 1 to 6 carbon atoms R f2 : Polyfluoroalkylene group which may have etheric oxygen atoms between carbon-carbon atoms Among them, R f1 -OR f2 -Has at least 1 -O-CF 2 - group.
撥墨劑(C)具有於使用含有其之正型感光性樹脂組合物形成硬化膜之過程中移至表面之性質(表面轉移性)、及撥墨性。包含所獲得之硬化膜表面之上層部成為撥墨劑(C)密實地存在之層(以下,有時亦稱為「撥墨層」),且對硬化膜表面賦予撥墨性。 此處,作為撥墨劑(C),從提高撥墨性之觀點考慮,較佳為氟含量較多,從曝光後,於進行顯影時提高殘渣去除性之觀點考慮,較佳為氟含量較少。 藉由上述式(c)所表示之基係於末端具有氟烷基,且末端之氟烷基與氟伸烷基利用醚性氧原子連結之結構,撥墨劑(C)之表面轉移性較高,容易發揮出撥墨性。例如,當與和式(c)鏈長同等且氟含量同等之聚氟伸烷基相比之情形時,具有式(c)所表示之基者維持殘渣去除性,並且獲得撥墨性較高之撥墨劑。 The ink repellent (C) has the property of migrating to the surface during the process of forming a cured film using a positive photosensitive resin composition containing it (surface transfer property) and ink repellency. The upper layer of the surface of the obtained cured film becomes a layer in which the ink repellent (C) is densely present (hereinafter, sometimes referred to as an "ink repellent layer"), and the ink repellency is imparted to the surface of the cured film. Here, as the ink repellent (C), from the perspective of improving the ink repellency, it is preferred that the fluorine content is higher, and from the perspective of improving the removability of residues during development after exposure, it is preferred that the fluorine content is lower. The base represented by the above formula (c) has a fluoroalkyl group at the end, and the fluoroalkyl group at the end is connected to the fluoroalkylene group by an ether oxygen atom. The surface transferability of the ink repellent (C) is higher, and the ink repellency is easily exerted. For example, when compared with a polyfluoroalkylene group having the same chain length and the same fluorine content as the formula (c), the base represented by the formula (c) maintains the residue removal property and obtains an ink repellent with higher ink repellency.
式(c)所表示之基具有至少1個-O-CF 2-基。-O-CF 2-基中之氧原子為醚性氧原子,且該氧原子之另一鍵結鍵鍵結於碳原子。鍵結於-O-CF 2-所表示之基之左方之鍵結鍵(氧原子之鍵結鍵)的碳原子可為鍵結有2個氟原子之碳原子(即,CF 2),亦可為CH 2等鍵結有1個以上之氟原子以外之原子之碳原子。 具體而言,例如,-CF 2-O-CF 2-、CF 3-O-CF 2-、-CH 2-O-CF 2-、-CF(CF 3)-O-CF 2-等係具有-O-CF 2-基之基。 再者,-O-CF 2-基係與-CF 2-O-基同等之基,即僅化學式中之表達(原子之記載順序)不同之相同之基。因此,例如,-CF 2-O-CH 2-、-CF 2-O-CF(CF 3)-、CF 3-O-CH 2-等亦為具有-O-CF 2-基之基。 The group represented by formula (c) has at least one -O-CF 2 - group. The oxygen atom in the -O-CF 2 - group is an etheric oxygen atom, and the other bonding bond of the oxygen atom is bonded to a carbon atom. The carbon atom bonded to the left side of the group represented by -O-CF 2 - (bonding bond of the oxygen atom) may be a carbon atom bonded to two fluorine atoms (i.e., CF 2 ) or a carbon atom bonded to one or more atoms other than fluorine atoms such as CH 2. Specifically, for example, -CF 2 -O-CF 2 -, CF 3 -O-CF 2 -, -CH 2 -O-CF 2 -, -CF(CF 3 )-O-CF 2 -, etc. are groups having an -O-CF 2 - group. Furthermore, -O- CF2- is the same group as -CF2 -O-, that is, the same group that differs only in the expression (the order of atoms) in the chemical formula. Therefore, for example, -CF2 -O- CH2- , -CF2 -O-CF( CF3 )-, CF3 -O- CH2- , etc. are also groups having -O- CF2- .
作為R f1及R f2,從提高撥墨性之觀點考慮,較佳為所有氫原子經氟原子取代。即,作為R f1,較佳為碳數1~6之全氟烷基,作為R f2,較佳為於碳-碳原子間可具有醚性氧原子之全氟伸烷基。 As Rf1 and Rf2 , from the viewpoint of improving ink repellency, it is preferred that all hydrogen atoms are substituted by fluorine atoms. That is, as Rf1 , it is preferred to be a perfluoroalkyl group having 1 to 6 carbon atoms, and as Rf2 , it is preferred to be a perfluoroalkylene group which may have an ethereal oxygen atom between carbon atoms.
撥墨劑(C)中之氟原子之含有率較佳為1~45質量%。若撥墨劑(C)之氟原子之含有率為上述範圍之下限值以上,則可對硬化膜表面賦予良好之撥墨性,尤其是良好之墨水滾落性,若為上限值以下,則與正型感光性樹脂組合物中之其他成分之相溶性變良好。從賦予撥墨性之觀點考慮,撥墨劑(C)中之氟原子之含有率更佳為1.5質量%以上,尤佳為2質量%以上。再者,若撥墨劑(C)中之氟原子之含有率較高,則正型感光性樹脂組合物之儲存穩定性有時會降低。因此,撥墨劑(C)中之氟原子之含有率更佳為35質量%以下,尤佳為未達30質量%。即,撥墨劑(C)中之氟原子之含有率尤佳為2質量%以上且未達30質量%。The content of fluorine atoms in the ink repellent agent (C) is preferably 1 to 45% by mass. If the fluorine atom content of the ink repellent agent (C) is more than the lower limit of the above range, good ink repellency, especially good ink roll-off properties, can be imparted to the surface of the cured film. If it is less than the upper limit, , the compatibility with other components in the positive photosensitive resin composition becomes good. From the viewpoint of imparting ink repellency, the content of fluorine atoms in the ink repellent agent (C) is more preferably 1.5% by mass or more, and particularly preferably 2% by mass or more. Furthermore, if the content rate of fluorine atoms in the ink repellent agent (C) is high, the storage stability of the positive photosensitive resin composition may decrease. Therefore, the content rate of fluorine atoms in the ink repellent agent (C) is more preferably 35% by mass or less, and more preferably less than 30% by mass. That is, the content rate of fluorine atoms in the ink repellent agent (C) is particularly preferably 2 mass % or more and less than 30 mass %.
R f1為碳數1~6之聚氟烷基,較佳為碳數1~6之全氟烷基。R f1之碳數更佳為1~4,尤佳為1~3。作為R f1之結構,可例舉:直鏈結構、支鏈結構、環結構、及部分具有環之結構等,較佳為直鏈結構。作為R f1,尤佳為碳數1~3之直鏈全氟烷基。 R f1 is a polyfluoroalkyl group having 1 to 6 carbon atoms, preferably a perfluoroalkyl group having 1 to 6 carbon atoms. The carbon number of R f1 is more preferably 1 to 4, particularly preferably 1 to 3. Examples of the structure of R f1 include a straight chain structure, a branched chain structure, a ring structure, a structure partially having a ring, etc., and a straight chain structure is preferred. R f1 is particularly preferably a linear perfluoroalkyl group having 1 to 3 carbon atoms.
R f2之碳數為與R f1之合計成為2~40之數。該碳數較佳為2~30,尤佳為2~20。 The carbon number of R f2 is such that the total of the carbon number and R f1 is 2 to 40. The carbon number is preferably 2 to 30, and more preferably 2 to 20.
作為R f2,可較佳地例舉以下之式(1)所表示之基。 -[(CY 2-O) n1(CY 2CY 2-O) n2(CY 2CY 2CY 2-O) n3(CY 2CY 2CY 2CY 2-O) n4]-(CY 2) n5- (1) 式(1)中,各符號如下所述。 Y分別獨立地表示H、F或CF 3,以n1、n2、n3、n4、n5括起來之各重複單元中至少1個Y為F或CF 3。 n1、n2、n3、n4分別獨立地表示0以上之整數,且n1+n2+n3+n4至少為1以上。 n5表示1~4之整數。 式(1)之全部碳原子數係與R f1之合計成為2~40之數。 以n1、n2、n3、n4括起來之各重複單元之存在順序於式(1)中並無限定。 As R f2 , a group represented by the following formula (1) can be preferably exemplified. -[(CY 2 -O) n1 (CY 2 CY 2 -O) n2 (CY 2 CY 2 CY 2 -O) n3 (CY 2 CY 2 CY 2 CY 2 -O) n4 ]-(CY 2 ) n5 - (1) In formula (1), each symbol is as follows. Y independently represents H, F or CF 3 , and at least one Y in each repeating unit enclosed by n1, n2, n3, n4 and n5 is F or CF 3 . n1, n2, n3 and n4 each independently represent an integer above 0, and n1+n2+n3+n4 is at least 1 or above. n5 represents an integer from 1 to 4. The total number of all carbon atoms in the formula (1) and R f1 is a number from 2 to 40. The order of existence of the repeating units enclosed by n1, n2, n3 and n4 is not limited in formula (1).
式(1)中,(CY 2) n5為直鏈或支鏈聚氟伸烷基,較佳為所有Y為F或CF 3之全氟伸烷基,尤佳為CF(CF 3)(CF 2) n6(n6為n5-1所表示之整數,較佳為0或1)或(CF 2) n5(n5為與上述同樣之整數,較佳為1或2)。 作為R f2,較佳為式(1)中之Y之全部為F或CF 3,且包含醚性氧原子之全氟伸烷基。 In formula (1), (CY 2 ) n5 is a linear or branched polyfluoroalkylene group, preferably a perfluoroalkylene group in which all Y are F or CF 3 , and particularly preferably CF(CF 3 )(CF 2 ) n6 (n6 is an integer represented by n5-1, preferably 0 or 1) or (CF 2 ) n5 (n5 is the same integer as above, preferably 1 or 2). As R f2 , a perfluoroalkylene group in which all Y in formula (1) are F or CF 3 and contains an ethereal oxygen atom is preferred.
若R f2為上述所例示之基,則撥墨劑(C)具有良好之撥墨性,尤其是墨水滾落性,且下述化合物(s1)向溶劑中之溶解性優異。 When R f2 is any of the groups exemplified above, the ink repellent (C) has good ink repellency, especially ink rolling property, and the solubility of the compound (s1) described below in the solvent is excellent.
作為R f2之具體例,可例舉以下之基。 -(CF 2O) n1-(CY 2) n5-、 -(CF 2CF 2O) n2-(CY 2) n5-、 -{CF(CF 3)CF 2O} n2-(CY 2) n5-、 -(CF 2CF 2CF 2O) n3-(CY 2) n5-、 -[(CF 2O) n1-(CF 2CF 2O) n2]-(CY 2) n5-、 -[(CF 2O) n1-{CF 2CF(CF 3)O} n2]-(CY 2) n5-、 -[(CF 2O) n1-{CF(CF 3)CF 2O} n2]-(CY 2) n5-、 -[(CF 2CF 2O) n2-{CF(CF 3)CF 2O} n2]-(CY 2) n5-、-[(CF 2CF 2O) n2-(CF 2CF 2CF 2CF 2O) n4]-(CY 2) n5-、-[(CF 2CF 2CF 2O) n3-{CF(CF 3)CF 2O} n2]-(CY 2) n5-。(其中,各式中,n1~n5及Y於各式中獨立地為與上述式(1)相同之含義,較佳之態樣亦同樣) As specific examples of R f2 , the following groups can be cited. -(CF 2 O) n1 -(CY 2 ) n5 -, -(CF 2 CF 2 O) n2 -(CY 2 ) n5 -, -{CF(CF 3 )CF 2 O} n2 -(CY 2 ) n5 -, -(CF 2 CF 2 CF 2 O) n3 - (CY 2 ) n5 -, -[(CF 2 O) n1 -(CF 2 CF 2 O) n2 ] -(CY 2 ) n5 -, -[(CF 2 O ) n1 - { CF 2 CF(CF 3 )O} n2 ]-( CY 2 ) n5 - , - [(CF 2 O ) n1 -{CF(CF 3 )CF 2 O} n2 ] -(CY 2 ) n5 -, -[(CF 2 CF 2 O) n2 -(CF 2 CF 2 CF 2 CF 2 O) n4 ]-(CY 2 ) n5 -, -[(CF 2 CF 2 CF 2 O) n3 -{CF(CF 3 )CF 2 O} n2 ]-(CY 2 ) n5 -. (In each formula, n1 to n5 and Y in each formula independently have the same meanings as in the above formula (1), and the preferred embodiments are also the same.)
該等之中,作為R f2,較佳為以下之基。 -CF 2CF 2O-CF 2-、 -CF 2CF 2O-CF 2CF 2-、 -(CF 2CF 2O) 2-CF 2-、 -(CF 2CF 2O) 2-CF 2CF 2-、 -(CF 2CF 2O) 4-CF 2-、 -(CF 2CF 2O) 4-CF 2CF 2-、 -(CF 2CF 2O) 7-CF 2-、 -(CF 2CF 2O) 7-CF 2CF 2-、 -CF 2CF 2CF 2O-CF 2-、 -CF 2CF 2CF 2O-CF 2CF 2-、 -CF 2CF 2CF 2O-CF(CF 3)-、 -CF 2CF 2CF 2O-CF(CF 3)CF 2-、 -CF 2O-CF(CF 3)CF 2O-CF(CF 3)-、 -CF 2CF 2O-CF(CF 3)CF 2O-CF(CF 3)-、 -CF 2CF 2CF 2O-CF(CF 3)CF 2O-CF 2CF 2-、 -CF 2CF 2CF 2O-CF(CF 3)CF 2O-CF(CF 3)-、 -CF 2CF 2CF 2O-CF(CF 3)CF 2O-CF(CF 3)CF 2-、 -CF(CF 3)CF 2O-CF 2CF 2-、 -CF(CF 3)CF 2O-CF(CF 3)-、 -CF(CF 3)CF 2O-CF(CF 3)CF 2-。 Among them, the following groups are preferred as R f2 . -CF 2 CF 2 O-CF 2 -, -CF 2 CF 2 O-CF 2 CF 2 -, -(CF 2 CF 2 O) 2 -CF 2 -, -(CF 2 CF 2 O) 2 -CF 2 CF 2 -, -(CF 2 CF 2 O) 4 -CF 2 -, -(CF 2 CF 2 O) 4 -CF 2 CF 2 -, -(CF 2 CF 2 O) 7 -CF 2 -, -(CF 2 CF 2 O) 7 -CF 2 CF 2 -, -CF 2 CF 2 CF 2 O-CF 2 -, -CF 2 CF 2 CF 2 O-CF 2 CF 2 -, -CF 2 CF 2 CF 2 O-CF(CF 3 )-, -CF 2 CF 2 CF 2 O-CF(CF 3 )CF 2 -, -CF2O -CF ( CF3 ) CF2O-CF( CF3 ) - , -CF2CF2O-CF ( CF3 ) CF2O - CF( CF3 )-, -CF2CF2CF2O-CF( CF3 )CF2O-CF2CF2- , -CF2CF2CF2O -CF( CF3 ) CF2O - CF( CF3 ) - , -CF2CF2CF2O - CF ( CF3 ) CF2O -CF ( CF3 ) CF2- , -CF( CF3 ) CF2O - CF2CF2- , -CF( CF3 ) CF2O -CF ( CF3 ) CF2- .
撥墨劑(C)較佳為具有上述基(c)與矽烷系骨架之撥墨劑(C1)、或具有上述基(c)與丙烯酸系骨架之撥墨劑(C2)。 以下,對撥墨劑(C1)及撥墨劑(C2)進行說明。 The ink repellent agent (C) is preferably the ink repellent agent (C1) having the above-mentioned group (c) and a silane-based skeleton, or the ink repellent agent (C2) having the above-mentioned group (c) and an acrylic-based skeleton. Hereinafter, the ink repellent agent (C1) and the ink repellent agent (C2) will be described.
<撥墨劑(C1)> 撥墨劑(C1)係包含水解性矽烷化合物之混合物(M)之部分水解縮合物,作為水解性矽烷化合物,含有具有上述式(c)所表示之基之水解性矽烷化合物(s1)作為必需成分。 <Ink repellent(C1)> The ink repellent agent (C1) is a partially hydrolyzed condensate of a mixture (M) containing a hydrolyzable silane compound, and as the hydrolyzable silane compound, it is necessary to contain a hydrolyzable silane compound (s1) having a group represented by the above formula (c). Element.
<水解性矽烷化合物(s1)> 水解性矽烷化合物(s1)係具有上述式(c)所表示之基與水解性基之矽烷化合物。藉由使用水解性矽烷化合物(s1),撥墨劑(C1)具有聚氟醚結構,維持殘渣去除性,並且具有優異之表面轉移性與撥墨性,尤其是墨水滾落性。 <Hydrolyzable silane compound (s1)> The hydrolyzable silane compound (s1) is a silane compound having a group represented by the above formula (c) and a hydrolyzable group. By using the hydrolyzable silane compound (s1), the ink repellent (C1) has a polyfluoroether structure, maintains the residue removal property, and has excellent surface transferability and ink repellency, especially ink rolling property.
作為水解性基,可例舉:烷氧基、鹵素原子、醯基、異氰酸基、胺基及胺基之至少1個氫經烷基取代之基等。從藉由水解反應而成為羥基(矽烷醇基),進而於分子間進行縮合反應而形成Si-O-Si鍵之反應容易順利地進行之方面考慮,較佳為碳原子數1~4之烷氧基及鹵素原子,更佳為甲氧基、乙氧基及氯原子,尤佳為甲氧基及乙氧基。 水解性矽烷化合物(s1)可單獨使用一種,亦可併用兩種以上。 Examples of the hydrolyzable group include an alkoxy group, a halogen atom, a acyl group, an isocyanato group, an amino group, and a group in which at least one hydrogen of the amino group is substituted by an alkyl group. Alkanes having 1 to 4 carbon atoms are preferred because the reaction of forming a hydroxyl group (silanol group) through a hydrolysis reaction and further condensation reaction between molecules to form a Si-O-Si bond proceeds easily and smoothly. Oxygen group and halogen atom are more preferably methoxy group, ethoxy group and chlorine atom, especially methoxy group and ethoxy group. One type of hydrolyzable silane compound (s1) may be used alone, or two or more types may be used in combination.
作為水解性矽烷化合物(s1),較佳為下式(s1)所表示之化合物。 (R f1OR f2-Q 1) a-Si(R H1) bX 1 (4 - a - b)(s1) 式(s1)中,各符號如下所述。 R f1、R f2分別與上述式(c)中之R f1、R f2相同,較佳之態樣亦同樣。 Q 1係碳原子數1~10之不含氟原子之二價有機基。 R H1為碳原子數1~6之一價烴基。 a為1或2,b為0或1,且a+b為1或2。 X 1為水解性基。 於X 1存在複數個之情形時,該等可互不相同,亦可相同。 於R f1OR f2-Q 1存在複數個之情形時,該等可互不相同,亦可相同。 As the hydrolyzable silane compound ( s1 ), a compound represented by the following formula (s1) is preferred. ( Rf1ORf2 - Q1 ) a -Si( RH1 ) bX1 (4 - a - b ) (s1) In formula (s1), the symbols are as follows. Rf1 and Rf2 are respectively the same as Rf1 and Rf2 in the above formula (c), and preferred embodiments are also the same. Q1 is a divalent organic group having 1 to 10 carbon atoms and not containing fluorine atoms. RH1 is a monovalent hydrocarbon group having 1 to 6 carbon atoms. a is 1 or 2, b is 0 or 1, and a+b is 1 or 2. X1 is a hydrolyzable group. When there are plural X1s , they may be different from each other or the same. When there are plural Rf1ORf2 -Q1s , they may be different from each other or the same.
化合物(s1)係具有1個2或3官能性之水解性矽烷基之含氟水解性矽烷化合物。 R H1較佳為碳原子數1~3之烴基,尤佳為甲基。 式(s1)中,更佳為a為1,且b為0或1,尤佳為b為0。 X 1之具體例及較佳之樣態如上述水解性基所述。 Compound (s1) is a fluorine-containing hydrolyzable silane compound having one difunctional or trifunctional hydrolyzable silane group. R H1 is preferably a alkyl group having 1 to 3 carbon atoms, and more preferably a methyl group. In formula (s1), a is more preferably 1, and b is 0 or 1, and more preferably b is 0. Specific examples and preferred aspects of X 1 are as described above for the hydrolyzable group.
式(s1)中,Q 1為碳原子數1~10之不含氟原子之二價有機基。 作為Q 1,於表示為Si鍵結於右側之鍵結鍵,且R f2鍵結於左側之鍵結鍵之情形時,例如可例舉-(CH 2) i1-A-(CH 2) i2-(A為單鍵、醯胺鍵、胺基甲酸酯鍵、磺醯胺鍵、醚鍵或酯鍵,i1、i2分別獨立地為0~10之整數,整個基之碳原子數為1~10)所表示之基。 In the formula (s1), Q 1 is a divalent organic group having 1 to 10 carbon atoms and not containing a fluorine atom. As Q 1 , when Si is bonded to the bond on the right side and R f2 is bonded to the bond on the left side, for example, -(CH 2 ) i1 -A-(CH 2 ) i2 can be mentioned. -(A is a single bond, amide bond, urethane bond, sulfonamide bond, ether bond or ester bond, i1 and i2 are independently integers from 0 to 10, and the number of carbon atoms in the entire group is 1 ~10) represents the base.
作為Q 1,較佳為以下之基。 -(CH 2) i1-、 -CH 2O(CH 2) i2-、 -O(CH 2) i2-、 -SO 2NR 1-(CH 2) i2-、 -(C=O)-NR 1-(CH 2) i2-、 -(CH 2) i1-O-C(=O)-NR 1-(CH 2) i2-、 -(CH 2) i1-O-C(=O)-(CH 2) i2-、 -(CH 2) i1-C(=O)-O-(CH 2) i2-。 (各基中,i1為1~5之整數,i2為1~4之整數,R 1為氫原子、甲基、或乙基,整個基之碳原子數為1~10。整個基之碳原子數較佳為1~5) Q 1 is preferably the following: -(CH 2 ) i1 -, -CH 2 O(CH 2 ) i2 -, -O(CH 2 ) i2 -, -SO 2 NR 1 -(CH 2 ) i2 -, -(C=O)-NR 1 -(CH 2 ) i2 -, -(CH 2 ) i1 -OC(=O)-NR 1 -(CH 2 ) i2 -, -(CH 2 ) i1 -OC(=O)-(CH 2 ) i2 -, -(CH 2 ) i1 -C(=O)-O-(CH 2 ) i2 -. (In each group, i1 is an integer of 1 to 5, i2 is an integer of 1 to 4, R 1 is a hydrogen atom, a methyl group, or an ethyl group , and the number of carbon atoms in the entire group is 1 to 10. The number of carbon atoms in the entire group is preferably 1 to 5.)
以下,-C(=O)N…表示為-CON…。例如,-C(=O)NH-表示為-CONH-。同樣地,-O-C(=O)…表示為-OCO…,-C(=O)-O…表示為-COO…。Hereinafter, -C(=O)N... is represented as -CON... For example, -C(=O)NH- is represented as -CONH-. Similarly, -O-C(=O)... is represented as -OCO..., and -C(=O)-O... is represented as -COO....
作為Q 1,尤佳為-(CH 2) i1-、-O(CH 2) i2-、及-CONH(CH 2) i2-(i1及i2包含較佳之態樣在內而與上述同樣)。再者,i1及i2均獨立地更佳為1~3,尤佳為2或3。 Particularly preferred as Q 1 are -(CH 2 ) i1 -, -O(CH 2 ) i2 -, and -CONH(CH 2 ) i2 - (i1 and i2 include preferred aspects and are the same as described above). Furthermore, i1 and i2 are each independently preferably 1 to 3, and particularly preferably 2 or 3.
作為化合物(s1)之具體例,可例舉以下之化合物。 CF 3CF 2O(CF 2CF 2O)(CF 2) 2O(CH 2) 3Si(OCH 3) 3、CF 3CF 2O(CF 2CF 2O)(CF 2)CONH(CH 2) 3Si(OCH 3) 3、CF 3CF 2CF 2O(CF(CF 3)CF 2O)(CF 2) 2(CH 2) 2Si(OCH 3) 3、CF 3CF 2O(CF 2CF 2O)(CF 2) 2(CH 2) 2Si(OCH 3) 3、CF 3CF 2CF 2O(CF(CF 3)CF 2O)(CF(CF 3))CONH(CH 2) 3Si(OCH 3) 3、CF 3CF 2CF 2O(CF(CF 3)CF 2O)(CF(CF 3)CF 2)O(CH 2) 3Si(OCH 3) 3、CF 3CF 2CF 2O(CF 2CF 2CF 2O)(CF 2) 2CONH(CH 2) 3Si(OCH 3) 3。 Specific examples of the compound (s1) include the following compounds. CF 3 CF 2 O(CF 2 CF 2 O)(CF 2 ) 2 O(CH 2 ) 3 Si(OCH 3 ) 3 、CF 3 CF 2 O(CF 2 CF 2 O)(CF 2 )CONH(CH 2 ) 3 Si(OCH 3 ) 3 , CF 3 CF 2 CF 2 O(CF(CF 3 )CF 2 O)(CF 2 ) 2 (CH 2 ) 2 Si(OCH 3 ) 3 , CF 3 CF 2 O(CF 2 CF 2 O)(CF 2 ) 2 (CH 2 ) 2 Si(OCH 3 ) 3 , CF 3 CF 2 CF 2 O(CF(CF 3 )CF 2 O)(CF(CF 3 ))CONH(CH 2 ) 3 Si(OCH 3 ) 3 , CF 3 CF 2 CF 2 O(CF(CF 3 )CF 2 O)(CF(CF 3 )CF 2 )O(CH 2 ) 3 Si(OCH 3 ) 3 , CF 3 CF 2 CF 2 O(CF 2 CF 2 CF 2 O)(CF 2 ) 2 CONH(CH 2 ) 3 Si(OCH 3 ) 3 .
上述化合物(s1)能夠藉由公知之方法例如國際公開第2009/008380號中所記載之方法來製造。The above compound (s1) can be produced by a known method, for example, the method described in International Publication No. 2009/008380.
混合物(M)中之水解性矽烷化合物(s1)之含有比率較佳為由該混合物獲得之部分水解縮合物中之氟原子的含有率成為1~45質量%之比率,更佳為2質量%以上且未達25質量%。若水解性矽烷化合物(s1)之含有比率為上述範圍之下限值以上,則可對硬化膜表面賦予良好之撥墨性,尤其是良好之墨水滾落性,若為上限值以下,則與該混合物中之其他水解性矽烷化合物之相溶性變良好,並且於感光性樹脂組合物中之儲存穩定性亦幾乎不會降低。The content ratio of the hydrolyzable silane compound (s1) in the mixture (M) is preferably such that the content ratio of fluorine atoms in the partially hydrolyzed condensate obtained from the mixture is 1 to 45 mass %, more preferably 2 mass % or more and less than 25 mass %. If the content ratio of the hydrolyzable silane compound (s1) is at least the lower limit of the above range, good ink repellency, especially good ink rolling property, can be imparted to the surface of the cured film. If it is below the upper limit, the compatibility with other hydrolyzable silane compounds in the mixture becomes good, and the storage stability in the photosensitive resin composition is hardly reduced.
撥墨劑(C1)中之混合物(M)包含上述水解性矽烷化合物(s1)作為必需成分,且任意地包含水解性矽烷化合物(s1)以外之水解性矽烷化合物。作為混合物(M)任意地包含之水解性矽烷化合物,可例舉以下之水解性矽烷化合物(s2)~(s6)。The mixture (M) in the ink repellent agent (C1) contains the above-mentioned hydrolyzable silane compound (s1) as an essential component, and optionally contains a hydrolyzable silane compound other than the hydrolyzable silane compound (s1). Examples of the hydrolyzable silane compound optionally included in the mixture (M) include the following hydrolyzable silane compounds (s2) to (s6).
水解性矽烷化合物(s2);含有具有環氧基之基、及水解性基,且不含氟原子之水解性矽烷化合物。 水解性矽烷化合物(s3);具有苯基、及水解性基,且不含氟原子之水解性矽烷化合物。 水解性矽烷化合物(s4);4個水解性基鍵結於矽原子之水解性矽烷化合物。 水解性矽烷化合物(s5);含有具有乙烯性雙鍵之基、及水解性基,且不含氟原子之水解性矽烷化合物。 水解性矽烷化合物(s6);具有水解性基、及具有氟原子且不具有醚性氧原子之有機基之水解性矽烷化合物。 Hydrolyzable silane compound (s2); a hydrolyzable silane compound containing a group having an epoxy group and a hydrolyzable group, and containing no fluorine atom. Hydrolyzable silane compound (s3); a hydrolyzable silane compound containing a phenyl group and a hydrolyzable group, and containing no fluorine atom. Hydrolyzable silane compound (s4); a hydrolyzable silane compound in which four hydrolyzable groups are bonded to a silicon atom. Hydrolyzable silane compound (s5); a hydrolyzable silane compound containing a group having an ethylene double bond and a hydrolyzable group, and containing no fluorine atom. Hydrolyzable silane compound (s6); a hydrolyzable silane compound having a hydrolyzable group and an organic group having a fluorine atom and not having an ethereal oxygen atom.
作為水解性矽烷化合物(s2)~(s6)中之水解性基,可使用與水解性矽烷化合物(s1)之水解性基同樣者。As the hydrolyzable group in the hydrolyzable silane compounds (s2) to (s6), the same hydrolyzable group as that of the hydrolyzable silane compound (s1) can be used.
<水解性矽烷化合物(s2)> 水解性矽烷化合物(s2)為下式(s2)所表示之水解性矽烷化合物(以下,亦稱為「化合物(s2)」)。 R 4Si(R 5) n(X 2) 3-n(s2) R 4係具有環氧基之碳數2~12之有機基。其中,較佳為具有縮水甘油基之碳數3~12之有機基、或具有環氧環己基之碳數6~12之有機基。 R 5為氫原子或碳數1~5之烷基。其中,較佳為氫原子或碳數1~3之烷基。 X 2為水解性基,包含較佳之態樣在內而與上述式(s1)中之X 1同樣。 n為0或1。 <Hydrolyzable silane compound (s2)> The hydrolyzable silane compound (s2) is a hydrolyzable silane compound represented by the following formula (s2) (hereinafter, also referred to as "compound (s2)"). R 4 Si(R 5 ) n (X 2 ) 3-n (s2) R 4 is an organic group having 2 to 12 carbon atoms having an epoxy group. Among them, an organic group having 3 to 12 carbon atoms having a glycidyl group or an organic group having 6 to 12 carbon atoms having an epoxycyclohexyl group is preferred. R 5 is a hydrogen atom or an alkyl group having 1 to 5 carbon atoms. Among them, a hydrogen atom or an alkyl group having 1 to 3 carbon atoms is preferred. X 2 is a hydrolyzable group and is the same as X 1 in the above formula (s1) including preferred aspects. n is 0 or 1.
作為化合物(s2)之具體例,可例舉以下之化合物。 二乙氧基(3-縮水甘油氧基丙基)甲基矽烷 3-縮水甘油氧基丙基(二甲氧基)甲基矽烷 3-縮水甘油氧基丙基(二乙氧基)甲基矽烷 3-縮水甘油氧基丙基三甲氧基矽烷 3-縮水甘油氧基丙基三乙氧基矽烷 2-(3,4-環氧環己基)乙基三甲氧基矽烷 2-(3,4-環氧環己基)乙基三乙氧基矽烷 As specific examples of compound (s2), the following compounds can be cited. Diethoxy(3-glycidyloxypropyl)methylsilane 3-glycidyloxypropyl(dimethoxy)methylsilane 3-glycidyloxypropyl(diethoxy)methylsilane 3-glycidyloxypropyltrimethoxysilane 3-glycidyloxypropyltriethoxysilane 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane 2-(3,4-epoxycyclohexyl)ethyltriethoxysilane
上述化合物(s2)能夠藉由公知之方法例如國際公開第2019/156000號中所記載之方法來製造。The above compound (s2) can be produced by a known method, for example, the method described in International Publication No. 2019/156000.
混合物(M)中所含之化合物(s2)可單獨使用一種,亦可併用兩種以上。 混合物(M)中之化合物(s2)之調配量相對於水解性矽烷化合物(s1)之1莫耳,較佳為5~15莫耳,尤佳為7~13莫耳。若含有比率在該範圍,則撥墨層之耐溶劑性提高,故較佳。 One type of compound (s2) contained in the mixture (M) may be used alone, or two or more types may be used in combination. The compounding amount of the compound (s2) in the mixture (M) is preferably 5 to 15 moles, and particularly preferably 7 to 13 moles per 1 mol of the hydrolyzable silane compound (s1). If the content ratio is within this range, the solvent resistance of the ink repellent layer is improved, so it is preferable.
<水解性矽烷化合物(s3)> 水解性矽烷化合物(s3)為下式(s3)所表示之水解性矽烷化合物(以下,亦稱為「化合物(s3)」)。 (Y-Q 2) q-Si(R H2) rX 3 (4 - q - r)(s3) 式(s3)中,表示水解性基之X 3包含較佳之態樣在內而與上述式(s1)中之X 1同樣。 又,R H2較佳為碳原子數1~4之烷基,更佳為甲基或乙基,尤佳為甲基。 式(s3)中,Y表示氫原子可經鹵素原子、碳原子數1~3之烷基、碳原子數2~3之烯基或硝基取代之苯基。 Q 2係連結矽原子與苯基之基,為單鍵或二價有機基。 <Hydrolyzable silane compound (s3)> The hydrolyzable silane compound (s3) is a hydrolyzable silane compound represented by the following formula (s3) (hereinafter, also referred to as "compound (s3)"). ( YQ2 ) q -Si( RH2 ) rX3 (4 - q - r) (s3) In the formula (s3), X3 representing a hydrolyzable group is the same as X1 in the above formula (s1), including preferred aspects. RH2 is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and particularly preferably a methyl group. In the formula (s3), Y represents a phenyl group in which a hydrogen atom may be substituted by a halogen atom, an alkyl group having 1 to 3 carbon atoms, an alkenyl group having 2 to 3 carbon atoms, or a nitro group. Q2 is a group linking the silicon atom and the phenyl group, and is a single bond or a divalent organic group.
q為1或2,r為0或1,且q+r為1或2。 再者,式(s3)中,於q為2之情形時,2個Q 2可互不相同,亦可相同,於q+r為1之情形時,3個X 3可互不相同,亦可相同,於q+r為2之情形時,2個X 3可互不相同,亦可相同。 式(s3)中,較佳為q為1且r為1,或者q為1且r為0。 q is 1 or 2, r is 0 or 1, and q+r is 1 or 2. Furthermore, in formula (s3), when q is 2, the two Q 2 can be different from each other or the same. When q + r is 1, the three X 3 can be different from each other or the same. , when q+r is 2, the two X 3 can be different from each other or the same. In formula (s3), it is preferable that q is 1 and r is 1, or q is 1 and r is 0.
式(s3)中,作為Y,可例舉:苯基、氟苯基、氯苯基、二氯苯基等,尤佳為苯基。藉由使用此種化合物(s3),可獲得較高之解像度、及於點部殘渣較少之阻隔壁。推測其原因在於,撥墨劑(C1)移至正型感光性樹脂組合物之膜表面之後,源自化合物(s3)之苯基於顯影液中與感光劑之二疊氮基進行偶氮偶合反應,藉此容易使撥墨劑(C1)留於正型感光性樹脂組合物之膜表面。藉此,即便於經過顯影、後烘烤等後,亦可將所獲得之阻隔壁之表面保持為撥墨性,且將側面保持為親墨性。In formula (s3), Y may be exemplified by phenyl, fluorophenyl, chlorophenyl, dichlorophenyl, etc., and phenyl is particularly preferred. By using such compound (s3), a barrier wall with higher resolution and less residue in the dot portion can be obtained. The reason is presumed to be that after the ink repellent (C1) is transferred to the film surface of the positive photosensitive resin composition, the phenyl group derived from compound (s3) undergoes an azo coupling reaction with the diazonium group of the photosensitive agent in the developer, thereby making it easy for the ink repellent (C1) to remain on the film surface of the positive photosensitive resin composition. Thus, even after development, post-baking, etc., the surface of the barrier wall obtained can be kept ink-repellent, and the side surface can be kept ink-affinity.
式(s3)中,於Q 2為二價有機基之情形時,-(CH 2)j-(j為1~6之整數)、-NH-、-NH-(C kH 2k)-(k為1~6之整數)、-N(C gH 2g + 1)-(g為1~6之整數)為供電子性基,於獲取容易性之方面較佳。作為Q 2,尤佳為單鍵或-NH-。 In formula (s3), when Q 2 is a divalent organic group, -(CH 2 )j-(j is an integer from 1 to 6), -NH-, -NH-(C k H 2k )-( k is an integer from 1 to 6) and -N(C g H 2g + 1 )- (g is an integer from 1 to 6) are electron-donating groups and are preferable in terms of ease of acquisition. Q 2 is particularly preferably a single bond or -NH-.
作為化合物(s3)之具體例,可例舉以下之化合物。 (C 6H 5)Si(OC 2H 5) 3(C 6H 5)NH(CH 2) 3Si(OCH 3) 3 Specific examples of the compound (s3) include the following compounds. (C 6 H 5 )Si(OC 2 H 5 ) 3 (C 6 H 5 )NH(CH 2 ) 3 Si(OCH 3 ) 3
上述化合物(s3)能夠藉由公知之方法、例如國際公開第2013/133392號中所記載之方法來製造。The compound (s3) can be produced by a known method, for example, the method described in International Publication No. 2013/133392.
混合物(M)中所含之化合物(s3)可單獨使用一種,亦可併用兩種以上。 混合物(M)中之化合物(s3)之調配量相對於水解性矽烷化合物(s1)之1莫耳,較佳為20莫耳以下,尤佳為15莫耳以下。若含有比率在該範圍,則於顯影時撥墨性得以維持,故較佳。 The compound (s3) contained in the mixture (M) may be used alone or in combination of two or more. The amount of the compound (s3) in the mixture (M) is preferably 20 mol or less, and more preferably 15 mol or less, relative to 1 mol of the hydrolyzable silane compound (s1). If the content ratio is within this range, the ink repellency can be maintained during development, which is preferred.
<水解性矽烷化合物(s4)> 藉由在本發明中之混合物(M)中包含水解性矽烷化合物(s4),於使包含撥墨劑(C1)之正型感光性樹脂組合物硬化而成之硬化膜中,可提高撥墨劑(C1)移至表面之後之造膜性。即,認為,由於水解性矽烷化合物(s4)中之水解性基數較多,故於移至表面之後,撥墨劑(C1)彼此良好地縮合,於整個表面形成薄膜而成為撥墨層。 又,藉由在混合物(M)中包含水解性矽烷化合物(s4),撥墨劑(C)容易溶解於烴系溶劑中。 水解性矽烷化合物(s4)可單獨使用一種,亦可併用兩種以上。 <Hydrolyzable silane compound (s4)> By including a hydrolyzable silane compound (s4) in the mixture (M) of the present invention, the film-forming property of the ink repellent (C1) after it migrates to the surface can be improved in the cured film formed by curing the positive photosensitive resin composition containing the ink repellent (C1). That is, it is considered that since the hydrolyzable bases in the hydrolyzable silane compound (s4) are relatively large, the ink repellent (C1) is well condensed with each other after migrating to the surface, forming a thin film on the entire surface to form an ink repellent layer. In addition, by including a hydrolyzable silane compound (s4) in the mixture (M), the ink repellent (C) is easily dissolved in a hydrocarbon solvent. The hydrolyzable silane compound (s4) may be used alone or in combination of two or more.
水解性矽烷化合物(s4)能夠以下式(s4)表示。水解性矽烷化合物(s4)亦可為化合物(s4)之低聚物。 Si(X 4) 4(s4) 式(s4)中,X 4表示水解性基,4個X 4可互不相同,亦可相同。作為X 4,可使用與上述X 1同樣之水解性基。 The hydrolyzable silane compound (s4) can be represented by the following formula (s4). The hydrolyzable silane compound (s4) may also be an oligomer of the compound (s4). Si(X 4 ) 4 (s4) In the formula (s4), X 4 represents a hydrolyzable group, and the four X 4 may be different from each other or the same. As X 4 , the same hydrolyzable group as X 1 mentioned above can be used.
作為水解性矽烷化合物(s4),具體而言,可例舉以下之化合物。 Si(OCH 3) 4Si(OC 2H 5) 4Si(OCH 3) 4之部分水解縮合物(例如COLCOAT公司製造之Methyl Silicate 51(商品名)) Si(OC 2H 5) 4之部分水解縮合物(例如COLCOAT公司製造之Ethyl Silicate 40、Ethyl Silicate 48(均為商品名))。 Specific examples of the hydrolyzable silane compound (s4) include the following compounds. Si(OCH 3 ) 4 Si(OC 2 H 5 ) 4 Partial hydrolysis condensation product of Si(OCH 3 ) 4 (for example, Methyl Silicate 51 (trade name) manufactured by COLCOAT) Partial hydrolysis of Si(OC 2 H 5 ) 4 Condensate (for example, Ethyl Silicate 40 and Ethyl Silicate 48 (both trade names) manufactured by COLCOAT).
上述化合物(s4)能夠藉由公知之方法例如國際公開第2015/093415號中所記載之方法來製造。The compound (s4) can be produced by a known method, for example, the method described in International Publication No. 2015/093415.
混合物(M)中之水解性矽烷化合物(s4)之含有比率相對於水解性矽烷化合物(s1)之1莫耳,較佳為1~25莫耳,尤佳為3~20莫耳。若含有比率為上述範圍之下限值以上,則撥墨劑(C1)之造膜性良好,若為上限值以下,則撥墨劑(C1)之撥墨性良好。The content ratio of the hydrolyzable silane compound (s4) in the mixture (M) is preferably 1 to 25 moles, and particularly preferably 3 to 20 moles per 1 mol of the hydrolyzable silane compound (s1). If the content ratio is more than the lower limit of the above range, the film-forming property of the ink repellent agent (C1) is good, and if it is less than the upper limit, the ink repellent property of the ink repellent agent (C1) is good.
<水解性矽烷化合物(s5)> 藉由在本發明中之混合物(M)中包含水解性矽烷化合物(s5),可獲得作為混合物(M)之部分水解縮合物之於側鏈含有具有乙烯性雙鍵之基的撥墨劑(C1)。藉此,撥墨劑(C1)可經由具有乙烯性雙鍵之基而進行撥墨劑(C1)彼此、或撥墨劑(C1)與正型感光性樹脂組合物所含之具有乙烯性雙鍵之其他成分的(共)聚合而較佳。藉此,可獲得提高撥墨層中之撥墨劑(C1)之定著性之效果。 水解性矽烷化合物(s5)可單獨使用一種,亦可併用兩種以上。 作為具有乙烯性雙鍵之基,較佳為(甲基)丙烯醯氧基及乙烯基苯基,尤佳為(甲基)丙烯醯氧基。 <Hydrolyzable silane compound (s5)> By including a hydrolyzable silane compound (s5) in the mixture (M) of the present invention, an ink repellent (C1) having a group having an ethylenic double bond in the side chain can be obtained as a partial hydrolysis condensate of the mixture (M). In this way, the ink repellent (C1) can be preferably (co)polymerized with each other or with other components having an ethylenic double bond contained in the positive photosensitive resin composition through the group having an ethylenic double bond. In this way, the effect of improving the fixation of the ink repellent (C1) in the ink repellent layer can be obtained. The hydrolyzable silane compound (s5) may be used alone or in combination of two or more. As the group having an ethylenic double bond, (meth)acryloyloxy and vinylphenyl are preferred, and (meth)acryloyloxy is particularly preferred.
作為水解性矽烷化合物(s5),較佳為下式(s5)所表示之化合物。 (Z-Q 3) g-Si(R H3) hX 5 (4 - g - h)(s5) 式(s5)中之符號如下所述。 Z係具有乙烯性雙鍵之基。 Q 3為碳原子數1~6之不含氟原子之二價有機基。 R H3為碳原子數1~6之一價烴基。 X 5為水解性基。 g為1或2,h為0或1,且g+h為1或2。 於Z-Q 3存在複數個之情形時,該等可互不相同,亦可相同。 於X 5存在複數個之情形時,該等可互不相同,亦可相同。 As the hydrolyzable silane compound (s5), a compound represented by the following formula (s5) is preferred. (ZQ 3 ) g -Si(R H3 ) h X 5 (4 - g - h) (s5) The symbols in formula (s5) are as follows. Z is a group with an ethylenic double bond. Q 3 is a divalent organic group containing 1 to 6 carbon atoms and does not contain fluorine atoms. R H3 is a monovalent hydrocarbon group having 1 to 6 carbon atoms. X 5 is a hydrolyzable group. g is 1 or 2, h is 0 or 1, and g+h is 1 or 2. When there are multiple ZQ 3s , they may be different from each other or they may be the same. When there are multiple X 5s , they may be different from each other or they may be the same.
作為R H3,具體而言,可使用與上述R H1同樣之基。 作為X 5,具體而言,可使用與上述X 1同樣之基。 As R H3 , specifically, the same groups as those for R H1 described above can be used. As X 5 , specifically, the same groups as those for X 1 described above can be used.
作為Z,例如較佳為(甲基)丙烯醯氧基及乙烯基苯基,尤佳為(甲基)丙烯醯氧基。As Z, for example, a (meth)acryloyloxy group and a vinylphenyl group are preferred, and a (meth)acryloyloxy group is particularly preferred.
作為Q 3之具體例,可例舉-(CH 2)j-(j為1~6之整數)。 較佳為g為1,且h為0或1。 化合物(s5)可單獨使用一種,亦可併用兩種以上。 Specific examples of Q 3 include -(CH 2 )j- (j is an integer of 1 to 6). Preferably, g is 1, and h is 0 or 1. Compound (s5) may be used alone or in combination of two or more.
作為化合物(s5)之具體例,可例舉以下之化合物。 CH 2=C(CH 3)COO(CH 2) 3Si(OCH 3) 3、 CH 2=C(CH 3)COO(CH 2) 3Si(OC 2H 5) 3、 CH 2=CHCOO(CH 2) 3Si(OCH 3) 3、 CH 2=CHCOO(CH 2) 3Si(OC 2H 5) 3、 [CH 2=C(CH 3)COO(CH 2) 3]CH 3Si(OCH 3) 2、 [CH 2=C(CH 3)COO(CH 2) 3]CH 3Si(OC 2H 5) 2、 Specific examples of compound (s5) include the following compounds. CH2 =C( CH3 )COO( CH2 ) 3Si ( OCH3 ) 3 , CH2 =C( CH3 )COO(CH2)3Si( OC2H5 ) 3 , CH2 =CHCOO(CH2)3Si(OCH3)3, CH2=CHCOO(CH2)3Si(OC2H5 ) 3 , [ CH2 = C ( CH3 ) COO ( CH2 ) 3 ] CH3Si ( OCH3 ) 2 , [ CH2 =C ( CH3 )COO( CH2 ) 3 ] CH3Si ( OC2H5 ) 2 ,
上述化合物(s5)能夠藉由公知之方法例如國際公開第2015/093415號中所記載之方法來製造。The above compound (s5) can be produced by a known method, for example, the method described in International Publication No. 2015/093415.
混合物(M)中之水解性矽烷化合物(s5)之含有比率相對於水解性矽烷化合物(s1)之1莫耳,較佳為0.1~25莫耳,尤佳為0.5~20莫耳。若含有比率為上述範圍之下限值以上,則撥墨劑(C1)之表面轉移性良好,又,表面轉移後於包含表面之撥墨層中撥墨劑(C1)之定著性良好,進而,撥墨劑(C1)之儲存穩定性良好。若為上限值以下,則撥墨劑(C1)之撥墨性良好。The content ratio of the hydrolyzable silane compound (s5) in the mixture (M) is preferably 0.1 to 25 mol, and more preferably 0.5 to 20 mol, relative to 1 mol of the hydrolyzable silane compound (s1). If the content ratio is at least the lower limit of the above range, the surface transferability of the ink repellent (C1) is good, and the fixation of the ink repellent (C1) in the ink repellent layer including the surface after the surface transfer is good, and further, the storage stability of the ink repellent (C1) is good. If it is at most the upper limit, the ink repellent (C1) has good ink repellency.
<水解性矽烷化合物(s6)> 水解性矽烷化合物(s6)係具有水解性基、及具有氟原子且不具有醚性氧原子之有機基之水解性矽烷化合物。具有氟原子之有機基係鍵結於聚矽氧烷主鏈之矽原子之有機基,且為一部分或全部經氟原子取代之有機基。該具有氟原子之有機基只要不損害本發明效果,只要係具有氟原子者,則並無特別限定。尤佳為氫原子之一部分或全部經氟原子取代之烷基。又,該有機基所具有之氟原子數亦並無特別限定。其中,有機基不具有醚性氧原子。 作為水解性矽烷化合物(s6),較佳為下式(s6)所表示之化合物。 [CF 3(CF 2) xCH 2CH 2] y-Si(R H6) zX 6 (4 - y - z)(s6) 式(s6)中之符號如下所述。 R H6為碳原子數1~6之一價烴基。 X 6為水解性基。 x為0~12。 y為1或2,z為0或1,且y+z為1或2。 於CF 3(CF 2) xCH 2CH 2-存在複數個之情形時,該等可互不相同,亦可相同。 <Hydrolyzable silane compound (s6)> The hydrolyzable silane compound (s6) is a hydrolyzable silane compound having a hydrolyzable group and an organic group having a fluorine atom and not having an etheric oxygen atom. The organic group having a fluorine atom is an organic group bonded to a silicon atom of the polysiloxane main chain, and is an organic group partially or completely substituted with a fluorine atom. The organic group having a fluorine atom is not particularly limited as long as it does not impair the effect of the present invention, as long as it has a fluorine atom. It is particularly preferred to be an alkyl group in which a part or all of the hydrogen atoms are substituted with a fluorine atom. In addition, the number of fluorine atoms possessed by the organic group is not particularly limited. Among them, the organic group does not have an etheric oxygen atom. As the hydrolyzable silane compound (s6), the compound represented by the following formula (s6) is preferred. [ CF3 ( CF2 ) xCH2CH2 ] y - Si ( RH6 ) zX6 (4 - y - z) ( s6) The symbols in formula (s6) are as follows. RH6 is a monovalent hydrocarbon group having 1 to 6 carbon atoms. X6 is a hydrolyzable group. x is 0 to 12. y is 1 or 2, z is 0 or 1, and y+z is 1 or 2. When there are a plurality of CF3 ( CF2 ) xCH2CH2- , they may be different from each other or the same.
作為R H6,具體而言,可使用與上述R H1同樣之基。 作為X 6,具體而言,可使用與上述X 1同樣之基。 As R H6 , specifically, the same groups as those for R H1 described above can be used. As X 6 , specifically, the same groups as those for X 1 described above can be used.
作為化合物(s6)之具體例,可例舉以下之化合物。 nC 6F 13(CH 2) 2Si(OCH 3) 3。 Specific examples of the compound (s6) include the following compounds. nC 6 F 13 (CH 2 ) 2 Si(OCH 3 ) 3 .
上述化合物(s6)能夠藉由公知之方法例如國際公開第2019/156000號中所記載之方法來製造。The above compound (s6) can be produced by a known method, for example, the method described in International Publication No. 2019/156000.
混合物(M)中所含之化合物(s6)可單獨使用一種,亦可併用兩種以上。 混合物(M)中之化合物(s6)之調配量相對於水解性矽烷化合物(s1)之1莫耳,較佳為5莫耳以下,尤佳為1莫耳以下。若含有比率在該範圍,則撥墨層之表面轉移性穩定化,撥墨層中之氟化物之分佈變均勻,故較佳。 The compound (s6) contained in the mixture (M) may be used alone or in combination of two or more. The amount of the compound (s6) in the mixture (M) is preferably 5 mol or less, and particularly preferably 1 mol or less, relative to 1 mol of the hydrolyzable silane compound (s1). If the content ratio is within this range, the surface transferability of the ink-repellent layer is stabilized, and the distribution of the fluoride in the ink-repellent layer becomes uniform, which is preferred.
作為混合物(M)任意地包含之水解性矽烷化合物,較佳為如下者:於使正型感光性樹脂組合物硬化而成之硬化膜之製造中,於撥墨劑(C1)移至表面之後,作為提高使正型感光性樹脂組合物硬化而成之硬化膜之上層部,即撥墨層中之撥墨劑(C1)之定著性之成分起作用的水解性矽烷化合物(s2);作為提高撥墨劑(C1)之穩定性、造膜性之成分起作用之水解性矽烷化合物(s3)。The hydrolyzable silane compound optionally included in the mixture (M) is preferably the following: a hydrolyzable silane compound (s2) which acts as a component for improving the fixation of the ink repellent (C1) in the upper layer portion, i.e., the ink repellent layer, of the cured film formed by curing the positive photosensitive resin composition after the ink repellent (C1) has moved to the surface; and a hydrolyzable silane compound (s3) which acts as a component for improving the stability and film-forming property of the ink repellent (C1).
再者,作為水解性矽烷化合物(s1)~(s6),除了被分類為各水解性矽烷化合物之單體以外,亦可使用預先使其複數個部分水解縮合所獲得之部分水解縮合物(低聚物)。In addition, as the hydrolyzable silane compounds (s1) to (s6), in addition to the monomers classified into each hydrolyzable silane compound, partial hydrolysis condensates (low hydrolysis condensates) obtained by hydrolyzing and condensing a plurality of parts in advance can also be used. polymer).
撥墨劑(C1)係包含化合物(s1),且任意包含化合物(s2)~(s6)之混合物(M)之水解縮合物,但實際上為水解性基或矽烷醇基殘留之產物(部分水解縮合物),故不易以化學式表示該產物。The ink repellent (C1) is a hydrolytic condensate of a mixture (M) containing compound (s1) and optionally containing compounds (s2) to (s6), but is actually a product (part of which remains of a hydrolyzable group or silanol group). Hydrolysis condensation product), so it is difficult to express this product with a chemical formula.
撥墨劑(C1)可藉由利用公知之方法使上述混合物(M)水解及縮合反應而製造。 於該反應中,作為觸媒,較佳為使用通常所使用之鹽酸、硫酸、硝酸及磷酸等無機酸;或乙酸、草酸及順丁烯二酸等有機酸。 於上述反應中可使用公知之溶劑。 上述反應中獲得之撥墨劑(C1)可與溶劑一併以溶液之性狀調配至正型感光性樹脂組合物中。 The ink repellent (C1) can be produced by subjecting the above mixture (M) to hydrolysis and condensation reaction using a known method. In the reaction, it is preferred to use as a catalyst a commonly used inorganic acid such as hydrochloric acid, sulfuric acid, nitric acid and phosphoric acid; or an organic acid such as acetic acid, oxalic acid and maleic acid. A known solvent can be used in the above reaction. The ink repellent (C1) obtained in the above reaction can be mixed with a solvent and formulated into a positive photosensitive resin composition in the form of a solution.
<撥墨劑(C2)> 撥墨劑(C2)係具有上述基(c)、及丙烯酸系骨架之聚合物,較佳為具有包含上述式(c)所表示之基之側鏈、及包含乙烯性雙鍵之側鏈之聚合物。具有乙烯性雙鍵之側鏈可藉由聚合反應後之化學轉換而形成。藉由具有包含乙烯性雙鍵之側鏈,於後烘烤時產生撥墨劑(C2)之硬化反應,容易固定於阻隔壁表面。於後烘烤時不易產生未反應之殘留分子遷移至點而污染點之情況。 <Ink repellent (C2)> The ink repellent (C2) is a polymer having the above-mentioned group (c) and an acrylic skeleton, preferably a polymer having a side chain containing a group represented by the above-mentioned formula (c) and a side chain containing an ethylene double bond. The side chain containing an ethylene double bond can be formed by chemical conversion after a polymerization reaction. By having a side chain containing an ethylene double bond, a curing reaction of the ink repellent (C2) occurs during post-baking, and it is easy to fix it on the surface of the barrier wall. It is not easy for unreacted residual molecules to migrate to the point and contaminate the point during post-baking.
作為乙烯性雙鍵,可例舉:(甲基)丙烯醯基、烯丙基、乙烯基、乙烯氧基、乙烯氧基烷基等具有加成聚合性之雙鍵,該等可單獨使用一種,亦可併用兩種以上。再者,該加成聚合性基所具有之氫原子之一部分或全部可經烷基、較佳為甲基取代。Examples of the ethylenic double bond include (meth)acryl, allyl, vinyl, vinyloxy, vinyloxyalkyl and other double bonds having addition polymerizability, which may be used alone or in combination of two or more. Furthermore, part or all of the hydrogen atoms of the addition polymerizability group may be substituted by an alkyl group, preferably a methyl group.
撥墨劑(C2)較佳為含有進而具有酸性基之側鏈之聚合物。於曝光步驟中未進行硬化反應之撥墨劑(C2)之一部分分子因其等含有具有酸性基之側鏈,顯影時自曝光後之基材表面被沖走,而不易留下殘留分子。因此,可進一步提高點之親墨性。The ink repellent (C2) is preferably a polymer containing a side chain having an acidic group. Some molecules of the ink repellent (C2) that do not undergo a hardening reaction in the exposure step are washed away from the surface of the exposed substrate during development because they contain a side chain having an acidic group, and are unlikely to leave residual molecules. Therefore, the ink affinity of the dots can be further improved.
作為上述酸性基,可例舉羧基、及磺基等,該等可單獨使用一種,亦可併用兩種以上。 具有酸性基之側鏈可藉由具有酸性基之單體之聚合反應形成,亦可藉由聚合反應後之化學轉換形成。 Examples of the above-mentioned acidic group include a carboxyl group, a sulfo group, and the like. One type of these may be used alone, or two or more types may be used in combination. Side chains with acidic groups can be formed by polymerization of monomers with acidic groups, or by chemical conversion after polymerization.
撥墨劑(C2)可藉由使聚合物與化合物(z1)反應而製造,該聚合物係使下述單體(a1)均聚所獲得,該化合物(z1)具有能夠與上述反應性基鍵結之官能基與乙烯性雙鍵。The ink repellent (C2) can be produced by reacting a polymer obtained by homopolymerizing the following monomer (a1) with a compound (z1) having a functional group capable of bonding to the above-mentioned reactive group and an ethylenic double bond.
於撥墨劑(C2)含有進而具有酸性基之側鏈之聚合物之情形時,可藉由使下述單體(a1)與具有酸性基之單體(a4)共聚,繼而,使所獲得之共聚物與化合物(z1)反應而製造。When the ink repellent (C2) contains a polymer having a side chain further having an acidic group, it can be produced by copolymerizing the following monomer (a1) and a monomer (a4) having an acidic group, and then reacting the obtained copolymer with the compound (z1).
單體(a1)係具有基(c)之單體,且由下式(a1)表示。 CH 2=CR 21COO-Y-R f2-O-R f1(a1) 上述式中,R 21表示氫原子、甲基、或三氟甲基,Y表示不含氟原子之碳數1~6之二價有機基。R f1、R f2分別與上述式(c)中之R f1、R f2相同,較佳之態樣亦同樣。 The monomer (a1) is a monomer having a group (c) and is represented by the following formula (a1). CH 2 =CR 21 COO-YR f2 -OR f1 (a1) In the above formula, R 21 represents a hydrogen atom, a methyl group, or a trifluoromethyl group, and Y represents a divalent organic carbon number of 1 to 6 that does not contain a fluorine atom. base. R f1 and R f2 are respectively the same as R f1 and R f2 in the above formula (c), and the preferred aspects are also the same.
單體(a1)中,從獲取容易性之觀點考慮,Y較佳為下述式所示之基。 -R 22- -R 22NR 23SO 2- -R 22NR 23CO- -CH 2CH(OH)R 24- R 22:碳數1~6之伸烷基 R 23:氫原子或甲基 R 24:單鍵或碳原子數1~4之伸烷基 In the monomer (a1), Y is preferably a group represented by the following formula from the viewpoint of availability: -R 22 - -R 22 NR 23 SO 2 - -R 22 NR 23 CO- -CH 2 CH(OH)R 24 - R 22 : Alkylene having 1 to 6 carbon atoms R 23 : Hydrogen atom or methyl group R 24 : Single bond or Alkylene having 1 to 4 carbon atoms
作為R 22之具體例,可例舉:-CH 2-、-CH 2CH 2-、-CH(CH 3)-、-CH 2CH 2CH 2-、-C(CH 3) 2-、-CH(CH 2CH 3)-、-CH 2CH 2CH 2CH 2-、-CH(CH 2CH 2CH 3)-、-CH 2(CH 2) 3CH 2-、-CH(CH 2CH(CH 3) 2)-等。 Specific examples of R 22 include -CH 2 -, -CH 2 CH 2 -, -CH(CH 3 )-, -CH 2 CH 2 CH 2 -, -C(CH 3 ) 2 -, - CH(CH 2 CH 3 )-, -CH 2 CH 2 CH 2 CH 2 -, -CH(CH 2 CH 2 CH 3 )-, -CH 2 (CH 2 ) 3 CH 2 -, -CH(CH 2 CH (CH 3 ) 2 )-etc.
作為R 24之具體例,可例舉:-CH 2-、-CH 2CH 2-、-CH(CH 3)-、-CH 2CH 2CH 2-、-C(CH 3) 2-、-CH(CH 2CH 3)-、-CH 2CH 2CH 2CH 2-、-CH(CH 2CH 2CH 3)-等。 Specific examples of R24 include -CH2- , -CH2CH2- , -CH( CH3 ) - , -CH2CH2CH2- , -C ( CH3 ) 2- , -CH ( CH2CH3 ) - , -CH2CH2CH2CH2-, -CH( CH2CH2CH3 )-, -CH2CH2CH2CH2-, and -CH(CH2CH2CH3 ) -.
作為單體(a1)之具體例,可例舉: CF 3O(CF 2CF 2O) pCF 2CH 2OCOCH=CH 2(p=2~7)等。單體(a1)可使用一種,亦可併用兩種以上。 Specific examples of the monomer (a1) include: CF 3 O (CF 2 CF 2 O) p CF 2 CH 2 OCOCH=CH 2 (p=2 to 7) and the like. One type of monomer (a1) may be used, or two or more types may be used in combination.
單體(a3)係具有反應性基之單體,可例舉:具有羥基之單體、具有酸酐基之單體、具有羧基之單體、具有環氧基之單體等。作為反應性基,即,可例舉:羥基、酸酐基、羧基、環氧基。再者,單體(a3)較佳為實質上不含基(c)。The monomer (a3) is a monomer having a reactive group, and examples thereof include a monomer having a hydroxyl group, a monomer having an acid anhydride group, a monomer having a carboxyl group, a monomer having an epoxy group, and the like. Examples of the reactive group include a hydroxyl group, an acid anhydride group, a carboxyl group, and an epoxy group. Furthermore, it is preferable that the monomer (a3) substantially does not contain the group (c).
作為具有羥基之單體之具體例,可例舉:(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯、(甲基)丙烯酸3-羥基丙酯、(甲基)丙烯酸4-羥基丁酯、(甲基)丙烯酸5-羥基戊酯、(甲基)丙烯酸6-羥基己酯、(甲基)丙烯酸4-羥基環己酯、新戊二醇單(甲基)丙烯酸酯、(甲基)丙烯酸3-氯-2-羥基丙酯、甘油單(甲基)丙烯酸酯、2-羥乙基乙烯醚、4-羥丁基乙烯醚、環己二醇單乙烯醚、2-羥乙基烯丙醚、N-羥甲基(甲基)丙烯醯胺、N,N-雙(羥甲基)(甲基)丙烯醯胺等。Specific examples of the monomer having a hydroxyl group include: 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, 3-hydroxypropyl (meth)acrylate, (meth)acrylate ) 4-hydroxybutyl acrylate, 5-hydroxypentyl (meth)acrylate, 6-hydroxyhexyl (meth)acrylate, 4-hydroxycyclohexyl (meth)acrylate, neopentyl glycol mono(methyl ) Acrylate, 3-chloro-2-hydroxypropyl (meth)acrylate, glyceryl mono(meth)acrylate, 2-hydroxyethyl vinyl ether, 4-hydroxybutyl vinyl ether, cyclohexanediol monoethylene Ether, 2-hydroxyethyl allyl ether, N-hydroxymethyl (meth) acrylamide, N, N-bis (hydroxymethyl) (meth) acrylamide, etc.
進而,作為具有羥基之單體,亦可為具有末端為羥基之聚氧伸烷基鏈之單體。例如可例舉:CH 2=CHOCH 2C 6H 10CH 2O(C 2H 4O) hH(此處,h為1~100之整數,下同)、CH 2=CHOC 4H 8O(C 2H 4O) hH、CH 2=CHCOOC 2H 4O(C 2H 4O) hH、CH 2=C(CH 3)COOC 2H 4O(C 2H 4O) hH、CH 2=CHCOOC 2H 4O(C 2H 4O) i(C 3H 6O) gH(此處,i為0~100之整數,g為1~100之整數,m+j為1~100。下同)、CH 2=C(CH 3)COOC 2H 4O(C 2H 4O) i(C 3H 6O) gH等。 作為具有羥基之單體,可使用市售品。 Furthermore, the monomer having a hydroxyl group may be a monomer having a polyoxyalkylene chain having a hydroxyl group at the end. For example, CH 2 =CHOCH 2 C 6 H 10 CH 2 O(C 2 H 4 O) h H (here, h is an integer from 1 to 100, the same below), CH 2 =CHOC 4 H 8 O (C 2 H 4 O) h H, CH 2 =CHCOOC 2 H 4 O(C 2 H 4 O) h H, CH 2 =C(CH 3 )COOC 2 H 4 O(C 2 H 4 O) h H , CH 2 =CHCOOC 2 H 4 O(C 2 H 4 O) i (C 3 H 6 O) g H (here, i is an integer from 0 to 100, g is an integer from 1 to 100, m+j is 1 to 100. The same below), CH 2 =C(CH 3 )COOC 2 H 4 O(C 2 H 4 O) i (C 3 H 6 O) g H, etc. As the monomer having a hydroxyl group, commercially available products can be used.
作為具有酸酐基之單體之具體例,可例舉:順丁烯二酸酐、伊康酸酐、檸康酸酐、甲基-5-降莰烯-2,3-二羧酸酐、3,4,5,6-四氫鄰苯二甲酸酐、順式-1,2,3,6-四氫鄰苯二甲酸酐、2-丁烯-1-基琥珀酸酐等。 作為具有羧基之單體之具體例,可例舉:丙烯酸、甲基丙烯酸、乙烯基乙酸、丁烯酸、伊康酸、順丁烯二酸、反丁烯二酸、桂皮酸、或者其等之鹽。 作為具有環氧基之單體之具體例,可例舉(甲基)丙烯酸縮水甘油酯、甲基丙烯酸3,4-環氧環己酯。 Specific examples of the monomer having an acid anhydride group include maleic anhydride, itaconic anhydride, citraconic anhydride, methyl-5-norbornene-2,3-dicarboxylic anhydride, 3,4, 5,6-tetrahydrophthalic anhydride, cis-1,2,3,6-tetrahydrophthalic anhydride, 2-buten-1-yl succinic anhydride, etc. Specific examples of the monomer having a carboxyl group include acrylic acid, methacrylic acid, vinyl acetic acid, crotonic acid, itaconic acid, maleic acid, fumaric acid, cinnamic acid, and the like. of salt. Specific examples of the monomer having an epoxy group include glycidyl (meth)acrylate and 3,4-epoxycyclohexyl methacrylate.
作為單體(a3),較佳為於末端具有羥基之化合物,更佳為於末端具有羥基之(甲基)丙烯酸酯,尤佳為(甲基)丙烯酸2-羥基乙酯。The monomer (a3) is preferably a compound having a hydroxyl group at the terminal, more preferably a (meth)acrylate having a hydroxyl group at the terminal, and particularly preferably 2-hydroxyethyl (meth)acrylate.
作為化合物(z1),較佳為根據單體(a3)所具有之反應性基來選擇。反應性基與化合物(z1)之組合可例舉以下。(1)相對於作為反應性基之羥基,作為化合物(z1)之具有乙烯性雙鍵之酸酐;(2)相對於作為反應性基之羥基,作為化合物(z1)之具有異氰酸基與乙烯性雙鍵之化合物;(3)相對於作為反應性基之羥基,作為化合物(z1)之具有氯化醯基與乙烯性雙鍵之化合物;(4)相對於作為反應性基之酸酐基,作為化合物(z1)之具有羥基與乙烯性雙鍵之化合物;(5)相對於作為反應性基之羧基,作為化合物(z1)之具有環氧基與乙烯性雙鍵之化合物;(6)相對於作為反應性基之環氧基,作為化合物(z1)之具有羧基與乙烯性雙鍵之化合物。The compound (z1) is preferably selected based on the reactive group of the monomer (a3). Examples of the combination of the reactive group and the compound (z1) include the following. (1) an acid anhydride having an ethylenic double bond relative to the hydroxyl group as the reactive group; (2) a compound having an isocyanate group and an ethylenic double bond relative to the hydroxyl group as the reactive group; (3) a compound having an acyl chloride group and an ethylenic double bond relative to the hydroxyl group as the reactive group; (4) a compound having an acyl chloride group and an ethylenic double bond relative to the hydroxyl group as the reactive group; 4) a compound having a hydroxyl group and an ethylenic double bond relative to the acid anhydride group as the reactive group of the compound (z1); (5) a compound having an epoxide group and an ethylenic double bond relative to the carboxyl group as the reactive group of the compound (z1); (6) a compound having a carboxyl group and an ethylenic double bond relative to the epoxide group as the reactive group of the compound (z1).
關於作為化合物(z1)之具有乙烯性雙鍵之酸酐之具體例,可例舉與上述具有酸酐基之單體相同之化合物。 關於作為化合物(z1)之具有異氰酸基與乙烯性雙鍵之化合物之具體例,可例舉:異氰酸2-(甲基)丙烯醯氧基乙酯、異氰酸1,1-雙((甲基)丙烯醯氧基甲基)乙酯、異氰酸2-丙烯醯氧基乙酯。 關於作為化合物(z1)之具有氯化醯基與乙烯性雙鍵之化合物之具體例,可例舉(甲基)丙烯醯氯。 關於作為化合物(z1)之具有羥基與乙烯性雙鍵之化合物之具體例,可例舉上述具有羥基之單體之例。 關於作為化合物(z1)之具有環氧基與乙烯性雙鍵之化合物之具體例,可例舉上述具有環氧基之單體之例。 關於作為化合物(z1)之具有羧基與乙烯性雙鍵之化合物之具體例,可例舉上述具有羧基之單體之例。 作為上述組合,較佳為組合(2),尤佳為使用異氰酸1,1-雙((甲基)丙烯醯氧基甲基)乙酯作為化合物(z1)。其原因在於,藉由設為該組合,撥墨劑(C2)具有每一個側鏈具有2個以上之乙烯性雙鍵之側鏈,撥墨劑(C2)向阻隔壁表面之固定化優異,可獲得撥墨性優異之阻隔壁。 As specific examples of the acid anhydride having an ethylenic double bond as the compound (z1), the same compounds as the above-mentioned monomers having an acid anhydride group can be cited. As specific examples of the compound having an isocyanate group and an ethylenic double bond as the compound (z1), 2-(meth)acryloyloxyethyl isocyanate, 1,1-bis((meth)acryloyloxymethyl)ethyl isocyanate, and 2-acryloyloxyethyl isocyanate can be cited. As specific examples of the compound having an acyl chloride group and an ethylenic double bond as the compound (z1), (meth)acryloyl chloride can be cited. As specific examples of the compound having a hydroxyl group and an ethylenic double bond as the compound (z1), the above-mentioned examples of the monomers having a hydroxyl group can be cited. As specific examples of compounds having an epoxy group and an ethylenic double bond as compound (z1), the above-mentioned examples of monomers having an epoxy group can be cited. As specific examples of compounds having a carboxyl group and an ethylenic double bond as compound (z1), the above-mentioned examples of monomers having a carboxyl group can be cited. As the above combination, combination (2) is preferred, and it is particularly preferred to use 1,1-bis((meth)acryloyloxymethyl)ethyl isocyanate as compound (z1). The reason for this is that by using this combination, the ink repellent (C2) has a side chain having two or more ethylenic double bonds per side chain, and the ink repellent (C2) is excellently fixed to the barrier wall surface, and a barrier wall with excellent ink repellency can be obtained.
作為具有酸性基之單體(a4),可例舉具有羧基之單體、具有磺基之單體等。 作為具有羧基之單體,可例舉與上述單體(a3)中所例示者同樣之單體。於使用具有羧基之單體作為具有酸性基之單體(a4),且亦使用具有羧基之單體作為上述具有反應性基之單體(a3)時,將最終未導入乙烯性雙鍵而以羧基之形式殘留者視為單體(a4)。 As the monomer (a4) having an acidic group, there can be exemplified a monomer having a carboxyl group, a monomer having a sulfonic group, and the like. As the monomer having a carboxyl group, there can be exemplified the same monomers as those exemplified in the above-mentioned monomer (a3). When a monomer having a carboxyl group is used as the monomer (a4) having an acidic group, and a monomer having a carboxyl group is also used as the above-mentioned monomer (a3) having a reactive group, the monomer (a4) is considered to be the one that does not introduce an ethylenic double bond and remains in the form of a carboxyl group.
作為具有磺基之單體,可例舉:乙烯基磺酸、苯乙烯磺酸、(甲基)烯丙基磺酸、2-羥基-3-(甲基)烯丙氧基丙磺酸、(甲基)丙烯酸-2-磺乙酯、(甲基)丙烯酸-2-磺丙酯、2-羥基-3-(甲基)丙烯醯氧基丙磺酸、2-(甲基)丙烯醯胺-2-甲基丙磺酸。Examples of the monomer having a sulfonic group include vinylsulfonic acid, styrenesulfonic acid, (meth)allylsulfonic acid, 2-hydroxy-3-(meth)allyloxypropanesulfonic acid, 2-sulfoethyl (meth)acrylate, 2-sulfopropyl (meth)acrylate, 2-hydroxy-3-(meth)acryloyloxypropanesulfonic acid, and 2-(meth)acrylamide-2-methylpropanesulfonic acid.
作為本發明中之聚合中所使用之單體,亦可使用單體(a1)、(a3)、(a4)以外之其他單體(a5)、單體(a6)。As the monomer used in the polymerization in the present invention, other monomers (a5) and monomers (a6) other than the monomers (a1), (a3), and (a4) can also be used.
作為其他單體(a5),較佳為日本專利特開2013-05049號公報中所記載之單體(a5)。 作為其他單體(a6),較佳為具有丙烯醯基、以及具有氟原子且不具有醚性氧原子之有機基之化合物,具體而言,可例舉具有含氟烷基且不具有醚性氧原子之丙烯酸化合物。 As the other monomer (a5), the monomer (a5) described in Japanese Patent Application Laid-Open No. 2013-05049 is preferred. As the other monomer (a6), a compound having an acryl group and an organic group having a fluorine atom and not having an etheric oxygen atom is preferred. Specifically, a compound having a fluorine-containing alkyl group and not having an etheric property can be mentioned. Oxygen atom acrylic compound.
撥墨劑(C2)例如可藉由以下方法合成。首先,將用以獲得所需之聚合物之單體溶解於溶劑中並加熱,添加聚合起始劑使其聚合,而獲得聚合物。於聚合反應中,較佳為視需要使鏈轉移劑存在。單體、聚合起始劑、溶劑及鏈轉移劑可連續添加。The ink repellent agent (C2) can be synthesized by the following method, for example. First, a monomer used to obtain a desired polymer is dissolved in a solvent and heated, a polymerization initiator is added, and polymerization is performed to obtain a polymer. In the polymerization reaction, it is preferred that a chain transfer agent is present if necessary. Monomers, polymerization initiators, solvents and chain transfer agents can be added continuously.
作為聚合起始劑,可例舉:公知之有機過氧化物、無機過氧化物、偶氮化合物等。有機過氧化物、無機過氧化物亦可與還原劑組合而用作氧化還原系觸媒。Examples of the polymerization initiator include known organic peroxides, inorganic peroxides, azo compounds, and the like. Organic peroxides and inorganic peroxides can also be combined with reducing agents and used as redox catalysts.
作為有機過氧化物,可例舉:過氧化苯甲醯、過氧化月桂醯、過氧化異丁醯、氫過氧化第三丁基、第三丁基-α-異丙苯基過氧化物等。作為無機過氧化物,可例舉:過硫酸銨、過硫酸鈉、過硫酸鉀、過氧化氫、過碳酸鹽等。作為偶氮化合物,可例舉:2,2'-偶氮二異丁腈、1,1'-偶氮雙(環己烷-1-甲腈)、2,2'-偶氮雙(2,4-二甲基戊腈)、2,2'-偶氮雙(4-甲氧基-2,4-二甲基戊腈)、2,2'-偶氮二異丁酸二甲酯、2,2'-偶氮雙(2-脒基丙烷)二鹽酸鹽等。又,作為偶氮系聚合起始劑,亦可使用市售品之V-65(商品名,富士膠片和光純藥股份有限公司製造)等。Examples of organic peroxides include benzyl peroxide, lauryl peroxide, isobutyl peroxide, tert-butyl hydroperoxide, tert-butyl-α-cumyl peroxide, etc. . Examples of inorganic peroxides include ammonium persulfate, sodium persulfate, potassium persulfate, hydrogen peroxide, percarbonate, and the like. Examples of azo compounds include: 2,2'-azobisisobutyronitrile, 1,1'-azobis(cyclohexane-1-carbonitrile), 2,2'-azobis(2 ,4-dimethylvaleronitrile), 2,2'-azobis(4-methoxy-2,4-dimethylvaleronitrile), 2,2'-azobisisobutyric acid dimethyl ester , 2,2'-Azobis(2-amidinopropane) dihydrochloride, etc. In addition, as the azo polymerization initiator, commercially available V-65 (trade name, manufactured by Fujifilm and Wako Pure Chemical Industries, Ltd.), etc. can also be used.
作為上述溶劑,可例舉:乙醇、1-丙醇、2-丙醇、1-丁醇、乙二醇等醇類;丙酮、2-丁酮、甲基異丁基酮、環己酮等酮類;2-甲氧基乙醇、2-乙氧基乙醇、2-丁氧基乙醇等賽路蘇類;2-(2-甲氧基乙氧基)乙醇、2-(2-乙氧基乙氧基)乙醇、2-(2-丁氧基乙氧基)乙醇等卡必醇類;乙酸甲酯、乙酸乙酯、乙酸正丁酯、乳酸乙酯、乳酸正丁酯、乙二醇單甲醚乙酸酯、乙二醇單乙醚乙酸酯、乙二醇單丁醚乙酸酯、二乙二醇單甲醚乙酸酯、二乙二醇單乙醚乙酸酯、二乙二醇單丁醚乙酸酯、丙二醇單甲醚乙酸酯、乙二醇二乙酸酯、丙二醇二乙酸酯、3-乙氧基丙酸乙酯、環己醇乙酸酯、γ-丁內酯、3-甲氧基丁基乙酸3-甲酯、甘油三乙酸酯等酯類;二乙二醇二甲醚、二乙二醇二乙醚、二乙二醇二丁醚、三乙二醇二甲醚、四乙二醇二甲醚、丙二醇二甲醚、二丁醚、二乙二醇甲基乙醚等。Examples of the above solvent include: alcohols such as ethanol, 1-propanol, 2-propanol, 1-butanol, and ethylene glycol; acetone, 2-butanone, methyl isobutyl ketone, cyclohexanone, etc. Ketones; 2-methoxyethanol, 2-ethoxyethanol, 2-butoxyethanol and other cyclosuoids; 2-(2-methoxyethoxy)ethanol, 2-(2-ethoxy) ethanol, 2-(2-butoxyethoxy)ethanol and other carbitols; methyl acetate, ethyl acetate, n-butyl acetate, ethyl lactate, n-butyl lactate, ethylene glycol Alcohol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol monobutyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, diethyl Glycol monobutyl ether acetate, propylene glycol monomethyl ether acetate, ethylene glycol diacetate, propylene glycol diacetate, ethyl 3-ethoxypropionate, cyclohexanol acetate, γ- Butyrolactone, 3-methyl 3-methoxybutylacetate, glycerol triacetate and other esters; diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol dibutyl ether, triethylene glycol dibutyl ether, etc. Ethylene glycol dimethyl ether, tetraethylene glycol dimethyl ether, propylene glycol dimethyl ether, dibutyl ether, diethylene glycol methyl ethyl ether, etc.
作為鏈轉移劑,可例舉:正丁基硫醇、正十二硫醇、第三丁基硫醇、硫代乙醇酸乙酯、硫代乙醇酸2-乙基己酯、2-巰基乙醇等硫醇類;氯仿、四氯化碳、四溴化碳等鹵代烷基。Examples of the chain transfer agent include n-butyl mercaptan, n-dodecyl mercaptan, tert-butyl mercaptan, ethyl thioglycolate, 2-ethylhexyl thioglycolate, and 2-mercaptoethanol. Thiols such as chloroform, carbon tetrachloride, carbon tetrabromide and other haloalkyl groups.
撥墨劑(C2)首先藉由上述聚合反應使單體(a1)聚合。於使單體(a1)、與選自單體(a3)、單體(a4)、單體(a5)、單體(a6)中之至少一種共聚之情形時,於該時點添加各單體而使其共聚。 其次,使所獲得之聚合物或共聚物與化合物(z1)反應。 於該反應中較佳為使用溶劑。溶劑可使用上述聚合反應中所使用之溶劑。 又,較佳為調配聚合抑制劑。作為聚合抑制劑,例如可例舉2,6-二第三丁基對甲酚。 又,亦可添加觸媒或中和劑。例如,於使具有羥基之共聚物、與具有異氰酸基及乙烯性雙鍵之化合物反應之情形時,可使用二月桂酸二丁基錫等錫化合物等。於使具有羥基之共聚物、與具有氯化醯基及乙烯性雙鍵之化合物反應之情形時,可使用鹼性觸媒。 The ink repellent agent (C2) first polymerizes the monomer (a1) through the above-mentioned polymerization reaction. When monomer (a1) is copolymerized with at least one selected from the group consisting of monomer (a3), monomer (a4), monomer (a5), and monomer (a6), each monomer is added at that point And make it coaggregate. Next, the obtained polymer or copolymer is reacted with compound (z1). It is preferred to use a solvent in this reaction. As the solvent, the solvent used in the above-mentioned polymerization reaction can be used. Furthermore, it is preferable to prepare a polymerization inhibitor. Examples of the polymerization inhibitor include 2,6-di-tert-butyl-p-cresol. In addition, a catalyst or neutralizing agent may also be added. For example, when a copolymer having a hydroxyl group is reacted with a compound having an isocyanate group and an ethylenic double bond, tin compounds such as dibutyltin dilaurate can be used. When reacting a copolymer having a hydroxyl group with a compound having a chloride group and an vinyl double bond, an alkaline catalyst can be used.
於該情形時,各單體相對於共聚之單體總質量之較佳之比率如下所述。 單體(a1)之比率較佳為5~50質量%,尤佳為10~40質量%。若該比率為上述範圍之下限值以上,則可降低包含硬化膜之阻隔壁之表面張力,可對阻隔壁賦予較高之撥墨性。若為上述範圍之上限值以下,則阻隔壁與基材之密接性變良好。 單體(a3)之比率較佳為10~70質量%,尤佳為20~50質量%。若為該範圍,則由導入乙烯性雙鍵引起之撥墨劑(C2)向阻隔壁之固定化變良好。 In this case, the preferred ratio of each monomer to the total mass of copolymerized monomers is as follows. The ratio of the monomer (a1) is preferably 5 to 50 mass%, particularly preferably 10 to 40 mass%. If the ratio is more than the lower limit of the above range, the surface tension of the barrier wall including the cured film can be reduced, and high ink repellency can be imparted to the barrier wall. If it is below the upper limit of the above range, the adhesion between the barrier rib and the base material will be good. The ratio of the monomer (a3) is preferably 10 to 70% by mass, particularly preferably 20 to 50% by mass. If it is within this range, the immobilization of the ink repellent agent (C2) to the barrier rib by introduction of the ethylenic double bond will be favorable.
具有酸性基之單體(a4)之比率較佳為1~20質量%,尤佳為1~15質量%。若為該範圍,則於顯影步驟中容易自基材表面被沖走。The ratio of the monomer (a4) having an acidic group is preferably 1 to 20% by mass, and more preferably 1 to 15% by mass. If it is within this range, it is easily washed away from the substrate surface during the development step.
於撥墨劑(C2)同時含有具有乙烯性雙鍵之側鏈與具有酸性基之側鏈之情形時,首先,使單體(a1)、單體(a3)及具有酸性基之單體(a4)共聚。 其次,藉由使所獲得之共聚物與化合物(z1)反應,可獲得撥墨劑(C)。 單體(a1)之比率與上述同樣地較佳為5~50質量%,尤佳為10~40質量%。單體(a3)之比率與上述同樣地較佳為10~70質量%,尤佳為20~50質量%。單體(a4)之比率較佳為1~20質量%,尤佳為1~15質量%。若為該範圍,則於顯影步驟中容易自基材表面被沖走。 When the ink repellent (C2) contains both a side chain having an vinyl double bond and a side chain having an acidic group, first, the monomer (a1), the monomer (a3) and the monomer having an acidic group ( a4) Copolymerization. Next, the ink repellent agent (C) can be obtained by reacting the obtained copolymer with the compound (z1). The ratio of the monomer (a1) is preferably 5 to 50% by mass, particularly preferably 10 to 40% by mass, as described above. The ratio of the monomer (a3) is preferably 10 to 70% by mass, particularly preferably 20 to 50% by mass, as described above. The ratio of the monomer (a4) is preferably 1 to 20% by mass, particularly preferably 1 to 15% by mass. If it is within this range, it will be easily washed away from the substrate surface during the development step.
於使用其他單體(a5)之情形時,其比率較佳為5~45質量%,尤佳為5~25質量%。若為該範圍,則撥墨劑之儲存穩定性良好。 於使用其他單體(a6)之情形時,其比率較佳為0~15質量%,尤佳為0~10質量%。若為該範圍,則撥墨層之表面轉移性較穩定,撥墨層中之氟化物之分佈變均勻而較佳。 When using another monomer (a5), the ratio is preferably 5 to 45 mass%, particularly preferably 5 to 25 mass%. If it is within this range, the storage stability of the ink repellent agent is good. When using another monomer (a6), the ratio is preferably 0 to 15% by mass, particularly preferably 0 to 10% by mass. If it is within this range, the surface transfer property of the ink repellent layer will be more stable, and the distribution of fluoride in the ink repellent layer will become uniform and better.
單體之較佳之組合如下所述。 單體(a1):單體(a3):單體(a4):單體(a5)=5~50質量%:10~70質量%:1~20質量%:5~45質量% Preferred combinations of monomers are as follows. Monomer (a1): Monomer (a3): Monomer (a4): Monomer (a5) = 5 to 50 mass %: 10 to 70 mass %: 1 to 20 mass %: 5 to 45 mass %
聚合物與化合物(z1)較佳為以[化合物(z1)之官能基]/[聚合物之反應性基]之當量比的值成為0.5~2之方式添加,尤佳為0.6~1.5。若當量比為上述範圍之下限值以上,則撥墨劑(C2)向阻隔壁之固定化變良好。若為上述範圍之上限值以下,則可將未反應之化合物(z1)以雜質之形式存在之量抑制為較低,而可良好地維持塗膜外觀。 再者,於使用具有羧基之單體作為單體(a3)與單體(a4)兩者之情形時,只要以撥墨劑(C2)之酸值成為下述範圍之方式,調節共聚物與化合物(z1)之添加量即可。 The polymer and compound (z1) are preferably added so that the equivalent ratio of [functional group of compound (z1)]/[reactive group of polymer] becomes 0.5 to 2, particularly preferably 0.6 to 1.5. If the equivalent ratio is more than the lower limit of the above range, the ink repellent agent (C2) will be better fixed to the barrier ribs. If it is below the upper limit of the above range, the amount of unreacted compound (z1) present as an impurity can be suppressed to a low level, and the appearance of the coating film can be maintained favorably. Furthermore, when a monomer having a carboxyl group is used as both the monomer (a3) and the monomer (a4), it is only necessary to adjust the copolymer and The addition amount of compound (z1) is sufficient.
於撥墨劑(C2)具有乙烯性雙鍵之情形時,其量較佳為1.0×10 -3~5.0×10 -3mol/g,尤佳為2.0×10 -3~4.0×10 -3mol/g。若為上述範圍,則撥墨劑(C2)向阻隔壁之固定化變良好。 When the ink repellent (C2) has an ethylenic double bond, the amount is preferably 1.0×10 -3 to 5.0×10 -3 mol/g, and more preferably 2.0×10 -3 to 4.0×10 -3 mol/g. Within the above range, the ink repellent (C2) is well fixed to the barrier ribs.
於撥墨劑(C2)具有酸性基之情形時,其酸值較佳為100 mgKOH/g以下,尤佳為10~50 mgKOH/g。若為上述範圍,則基材上之殘留分子於顯影步驟中容易自阻隔壁被沖走。When the ink repellent agent (C2) has an acidic group, its acid value is preferably 100 mgKOH/g or less, and particularly preferably 10 to 50 mgKOH/g. If it is within the above range, residual molecules on the substrate will be easily washed away from the barrier ribs during the development step.
撥墨劑(C1)之重量平均分子量(Mw)較佳為500~2000,尤佳為500~1500。 若重量平均分子量(Mw)為500以上,則於使用正型感光性樹脂組合物形成硬化膜時,撥墨劑(C1)容易移至表面之。若為2000以下,則儲存穩定性優異。 撥墨劑(C1)之重量平均分子量(Mw)可藉由製造條件來調節。 The weight average molecular weight (Mw) of the ink repellent agent (C1) is preferably 500 to 2000, particularly preferably 500 to 1500. If the weight average molecular weight (Mw) is 500 or more, when the positive photosensitive resin composition is used to form a cured film, the ink repellent agent (C1) is likely to migrate to the surface. If it is 2000 or less, storage stability will be excellent. The weight average molecular weight (Mw) of the ink repellent agent (C1) can be adjusted by manufacturing conditions.
撥墨劑(C2)之重量平均分子量(Mw)較佳為6000~200000,更佳為6000~180000,進而較佳為6000~150000,尤佳為30000~150000,最佳為50000~150000。 若重量平均分子量(Mw)為6000以上,則於使用正型感光性樹脂組合物形成硬化膜時,撥墨劑(C2)容易移至表面之。尤其是若為50000以上,則撥墨劑(C2)更容易移至表面之,且以較少之添加量亦容易表現出撥液性。若重量平均分子量(Mw)為200000以下,則顯影殘渣去除性優異。 撥墨劑(C2)之重量平均分子量(Mw)可藉由製造條件來調節。 The weight average molecular weight (Mw) of the ink repellent agent (C2) is preferably 6000 to 200000, more preferably 6000 to 180000, further preferably 6000 to 150000, particularly preferably 30000 to 150000, most preferably 50000 to 150000. If the weight average molecular weight (Mw) is 6000 or more, the ink repellent agent (C2) will easily migrate to the surface when the positive photosensitive resin composition is used to form a cured film. In particular, if it is 50,000 or more, the ink repellent agent (C2) is more likely to move to the surface, and liquid repellency is easily expressed even with a small amount added. When the weight average molecular weight (Mw) is 200,000 or less, the development residue removability is excellent. The weight average molecular weight (Mw) of the ink repellent agent (C2) can be adjusted by manufacturing conditions.
又,從表面轉移性之觀點考慮,鹼可溶性樹脂(A)之分子量與撥墨劑(C)之分子量之比率較佳為特定範圍。尤其是具有丙烯酸系骨架之撥墨劑(C2)從相分離之觀點考慮,重要的是與鹼可溶性樹脂(A)之分子量之平衡性。鹼可溶性樹脂(A)之分子量(Mw)與撥墨劑(C2)之分子量(Mw)之比率較佳為1:2~1:30,尤佳為1:3~1:20。In addition, from the viewpoint of surface transferability, the ratio of the molecular weight of the alkali-soluble resin (A) to the molecular weight of the ink repellent (C) is preferably within a specific range. In particular, from the viewpoint of phase separation, the molecular weight balance of the ink repellent (C2) having an acrylic skeleton and the alkali-soluble resin (A) is important. The ratio of the molecular weight (Mw) of the alkali-soluble resin (A) to the molecular weight (Mw) of the ink repellent (C2) is preferably 1:2 to 1:30, and more preferably 1:3 to 1:20.
本發明之正型感光性樹脂組合物中之全部固形物成分中之撥墨劑(C)的含有比率較佳為0.01~15質量%,更佳為0.01~5質量%,尤佳為0.03~1.5質量%。若含有比率為0.01質量%以上,則由正型感光性樹脂組合物形成之硬化膜表面具有優異之撥墨性,尤其是優異之墨水滾落性。若為15質量%以下,則硬化膜與基材之密接性變良好。又,正型感光性樹脂組合物之儲存穩定性優異。The content ratio of the ink repellent (C) in the total solid content of the positive photosensitive resin composition of the present invention is preferably 0.01 to 15% by mass, more preferably 0.01 to 5% by mass, and particularly preferably 0.03 to 1.5% by mass. If the content ratio is 0.01% by mass or more, the surface of the cured film formed by the positive photosensitive resin composition has excellent ink repellency, especially excellent ink rolling property. If it is 15% by mass or less, the adhesion between the cured film and the substrate becomes good. In addition, the positive photosensitive resin composition has excellent storage stability.
進而,本發明之正型感光性樹脂組合物中之全部固形物成分中之撥墨劑(C1)的含有比率從撥墨性之觀點考慮,較佳為0.01~5質量%,更佳為0.1~2質量%。 又,本發明之正型感光性樹脂組合物中之全部固形物成分中之撥墨劑(C2)的含有比率從撥墨性之觀點考慮,較佳為0.01~5質量%,更佳為0.1~2質量%。 Furthermore, the content ratio of the ink repellent (C1) in the total solid content of the positive photosensitive resin composition of the present invention is preferably 0.01 to 5% by mass, and more preferably 0.1 to 2% by mass, from the perspective of ink repellency. Furthermore, the content ratio of the ink repellent (C2) in the total solid content of the positive photosensitive resin composition of the present invention is preferably 0.01 to 5% by mass, and more preferably 0.1 to 2% by mass, from the perspective of ink repellency.
[溶劑(D)] 本發明之正型感光性樹脂組合物亦可含有溶劑(D)。 藉由含有溶劑(D),該組合物向基板之塗敷性、與基板表面之密接性更優異。又,藉由含有溶劑(D),於該組合物中,可使撥墨劑(C)穩定地存在。 溶劑(D)只要係使正型感光性樹脂組合物作為必須成分而含有之鹼可溶性樹脂(A)、感光劑(B)、撥墨劑(C)、作為任意成分含有之熱硬化劑(E)、熱硬化促進劑(F)及其他添加劑均勻地溶解或分散,且與正型感光性樹脂組合物中所含之各成分不具有反應性者,則並無特別限制。 [Solvent (D)] The positive photosensitive resin composition of the present invention may also contain a solvent (D). By containing the solvent (D), the coating property of the composition to the substrate and the adhesiveness to the substrate surface are further improved. Furthermore, by containing the solvent (D), the ink repellent agent (C) can stably exist in the composition. The solvent (D) may be an alkali-soluble resin (A), a photosensitive agent (B), an ink repellent agent (C), or a thermosetting agent (E) contained as an optional component so that the positive photosensitive resin composition contains it as an essential component. ), the thermosetting accelerator (F) and other additives are uniformly dissolved or dispersed, and have no reactivity with the components contained in the positive photosensitive resin composition.
作為溶劑(D)之具體例,可例舉:乙醇、1-丙醇、2-丙醇、1-丁醇、乙二醇等醇類;丙酮、甲基異丁基酮、環己酮等酮類;2-甲氧基乙醇、2-乙氧基乙醇、2-丁氧基乙醇等賽路蘇類;2-(2-甲氧基乙氧基)乙醇、2-(2-乙氧基乙氧基)乙醇、2-(2-丁氧基乙氧基)乙醇等卡必醇類;乙酸甲酯、乙酸乙酯、乙酸正丁酯、乳酸乙酯、乳酸正丁酯、乙二醇單甲醚乙酸酯、乙二醇單乙醚乙酸酯、乙二醇單丁醚乙酸酯、二乙二醇單甲醚乙酸酯、二乙二醇單乙醚乙酸酯、二乙二醇單丁醚乙酸酯、丙二醇單甲醚乙酸酯、乙二醇二乙酸酯、丙二醇二乙酸酯、3-乙氧基丙酸乙酯、環己醇乙酸酯、乳酸丁酯、γ-丁內酯、3-甲氧基丁基乙酸3-甲酯、甘油三乙酸酯等酯類;二乙二醇二甲醚、二乙二醇二乙醚、二乙二醇二丁醚、三乙二醇二甲醚、四乙二醇二甲醚、丙二醇二甲醚、二丁醚、二乙二醇甲基乙醚等。此外可例舉:正丁烷、正己烷等鏈式烴;環己烷等環式飽和烴;甲苯、二甲苯、苄醇等芳香族烴等。該等可單獨使用一種,亦可併用兩種以上。Specific examples of the solvent (D) include alcohols such as ethanol, 1-propanol, 2-propanol, 1-butanol, and ethylene glycol; ketones such as acetone, methyl isobutyl ketone, and cyclohexanone; celulose such as 2-methoxyethanol, 2-ethoxyethanol, and 2-butoxyethanol; carbitols such as 2-(2-methoxyethoxy)ethanol, 2-(2-ethoxyethoxy)ethanol, and 2-(2-butoxyethoxy)ethanol; methyl acetate, ethyl acetate, n-butyl acetate, ethyl lactate, n-butyl lactate, ethylene glycol monomethyl ether acetate, and ethylene glycol monoethyl ether acetate. , ethylene glycol monobutyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether acetate, propylene glycol monomethyl ether acetate, ethylene glycol diacetate, propylene glycol diacetate, 3-ethoxyethyl propionate, cyclohexanol acetate, butyl lactate, γ-butyrolactone, 3-methyl 3-methoxybutyl acetate, glycerol triacetate and other esters; diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol dibutyl ether, triethylene glycol dimethyl ether, tetraethylene glycol dimethyl ether, propylene glycol dimethyl ether, dibutyl ether, diethylene glycol methyl ethyl ether and the like. In addition, chain hydrocarbons such as n-butane and n-hexane; cyclic saturated hydrocarbons such as cyclohexane; aromatic hydrocarbons such as toluene, xylene, benzyl alcohol and the like can be cited. These can be used alone or in combination of two or more.
本發明之正型感光性樹脂組合物之溶劑(D)之含量相對於正型感光性樹脂組合物的全部固形物成分100質量%,較佳為5~2,000質量%,更佳為100~500質量%。The content of the solvent (D) in the positive photosensitive resin composition of the present invention is preferably 5 to 2,000 mass %, and more preferably 100 to 500 mass %, relative to 100 mass % of the total solid content of the positive photosensitive resin composition.
[熱硬化劑(E)] 本發明之正型感光性樹脂組合物可包含熱硬化劑(E)作為促進熱硬化之任意成分。 作為熱硬化劑(E),較佳選自由為胺基樹脂、環氧化合物、㗁唑啉化合物、多異氰酸酯化合物、及聚碳二醯亞胺化合物所組成之群中之至少1種。 [Thermosetting agent (E)] The positive photosensitive resin composition of the present invention may contain a thermosetting agent (E) as an optional component for promoting thermosetting. As the thermosetting agent (E), at least one selected from the group consisting of amino resins, epoxy compounds, oxazoline compounds, polyisocyanate compounds, and polycarbodiimide compounds is preferred.
作為胺基樹脂,可例舉:將三聚氰胺系化合物、胍胺系化合物、脲系化合物等之胺基之一部分或全部羥基甲基化而成之化合物;或將該羥基甲基化而成之化合物之羥基之一部分或全部利用甲醇、乙醇、正丁醇、2-甲基-1-丙醇等醚化而成之化合物,例如六甲氧基甲基三聚氰胺等。Examples of the amino resin include compounds obtained by methylating a part or all of the hydroxyl groups of melamine compounds, guanamine compounds, urea compounds, etc., or compounds obtained by etherifying a part or all of the hydroxyl groups of the compounds obtained by methylating the hydroxyl groups using methanol, ethanol, n-butanol, 2-methyl-1-propanol, etc., such as hexamethoxymethylmelamine.
作為環氧化合物,可例舉:雙酚A型環氧樹脂、雙酚F型環氧樹脂、苯酚-酚醛清漆型環氧樹脂、甲酚-酚醛清漆型環氧樹脂、三苯酚甲烷型環氧樹脂、溴化環氧樹脂等縮水甘油醚類;3,4-環氧環己烷羧酸3,4-環氧環己基甲酯、雙(2,3-環氧環戊基)醚等脂環式環氧樹脂;六氫鄰苯二甲酸二縮水甘油酯、四氫鄰苯二甲酸二縮水甘油酯、鄰苯二甲酸二縮水甘油酯等縮水甘油酯類;四縮水甘油基二胺基二苯基甲烷、三縮水甘油基對胺基苯酚等縮水甘油基胺類;異氰尿酸三縮水甘油酯等雜環式環氧樹脂等。 又,可例舉具有環烯烴氧化物結構之環氧化合物。 Examples of the epoxy compound include bisphenol A type epoxy resin, bisphenol F type epoxy resin, phenol-novolak type epoxy resin, cresol-novolac type epoxy resin, and trisphenolmethane type epoxy. Resins, brominated epoxy resins and other glycidyl ethers; 3,4-epoxycyclohexanecarboxylic acid 3,4-epoxycyclohexylmethyl ester, bis(2,3-epoxycyclopentyl) ether and other esters Cyclic epoxy resin; glycidyl esters such as hexahydrophthalic diglycidyl ester, tetrahydrophthalic diglycidyl ester, and diglycidyl phthalate; tetrahydroglycidyl diamine diamine Glycidyl amines such as phenylmethane and triglycidyl p-aminophenol; heterocyclic epoxy resins such as triglycidyl isocyanurate, etc. Furthermore, an epoxy compound having a cyclic olefin oxide structure can be exemplified.
作為㗁唑啉化合物,可例舉:2-乙烯基-2-㗁唑啉、2-乙烯基-4-甲基-2-㗁唑啉、2-乙烯基-5-甲基-2-㗁唑啉、2-異丙烯基-2-㗁唑啉、2-異丙烯基-4-甲基-2-㗁唑啉等聚合性單體之共聚物等。Examples of the oxazoline compound include copolymers of polymerizable monomers such as 2-vinyl-2-oxazoline, 2-vinyl-4-methyl-2-oxazoline, 2-vinyl-5-methyl-2-oxazoline, 2-isopropenyl-2-oxazoline, and 2-isopropenyl-4-methyl-2-oxazoline.
又,作為熱硬化劑(E),亦可使用具有2個以上選自烷氧基甲基及羥基甲基中之取代基之交聯性化合物。例如可例舉:烷氧基甲基化甘脲、烷氧基甲基化苯并胍胺、及烷氧基甲基化三聚氰胺等化合物、及酚醛塑膠(phenoplast)系化合物。Furthermore, as the heat curing agent (E), a crosslinking compound having two or more substituents selected from alkoxymethyl and hydroxymethyl groups may be used, such as alkoxymethylated glycoluril, alkoxymethylated benzoguanamine, alkoxymethylated melamine and phenoplast compounds.
該等化合物可單獨使用一種,亦可併用兩種以上。These compounds may be used alone or in combination of two or more.
作為熱硬化劑(E),尤佳為一分子中具有2個以上之環氧基之化合物。藉由正型感光性樹脂組合物包含熱硬化劑(E),曝光時之正型感光性樹脂組合物之硬化性更優異,可形成熱硬化後之形狀穩定化之阻隔壁。As the thermosetting agent (E), a compound having two or more epoxy groups in one molecule is particularly preferred. When the positive photosensitive resin composition includes the thermosetting agent (E), the curability of the positive photosensitive resin composition during exposure is more excellent, and a barrier wall having a stable shape after thermosetting can be formed.
本發明之正型感光性樹脂組合物中之全部固形物成分中之熱硬化劑(E)的含量較佳為2~40質量%,尤佳為3~30質量%。若為上述範圍,則於使用正型感光性樹脂組合物形成具有阻隔壁之硬化膜時,阻隔壁表面以外(點)之墨水之潤濕性更優異。The content of the thermosetting agent (E) in the total solid content of the positive photosensitive resin composition of the present invention is preferably 2-40 mass %, and more preferably 3-30 mass %. If it is within the above range, when a cured film having barrier walls is formed using the positive photosensitive resin composition, the wettability of the ink (dots) other than the barrier wall surface is better.
[熱硬化促進劑(F)] 本發明之正型感光性樹脂組合物可包含熱硬化促進劑(F)作為促進熱硬化之任意成分。 [Thermal hardening accelerator (F)] The positive photosensitive resin composition of the present invention may contain a thermosetting accelerator (F) as an optional component that accelerates thermosetting.
熱硬化促進劑(F)係具有藉由加熱而於正型感光性樹脂組合物中形成交聯結構之作用之化合物。 作為熱硬化促進劑(F),例如可例舉:其本身與熱硬化劑(E)反應,並交聯而形成交聯結構之化合物;或其本身不交聯,而對熱硬化劑(E)具有觸媒作用之化合物。 於使用環氧化合物作為熱硬化劑(E)之情形時,作為形成交聯結構之熱硬化促進劑(F),可例舉:聚胺類、聚硫醇類、聚羧酸酐。更具體而言,作為聚胺類,可例舉:乙二胺、三伸乙基二胺、三伸乙基四胺、四伸乙基五胺、六亞甲基二胺、聚氧伸烷基聚胺、異佛爾酮二胺、䓝二胺、3,9-雙(3-胺基丙基)-2,4,8,10-四氧雜螺(5,5)十一烷。作為聚硫醇類,可例舉聚醚聚硫醇,作為聚羧酸酐,可例舉:琥珀酸酐、甲基四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐、4-甲基六氫鄰苯二甲酸酐等。 作為具有觸媒作用者,可例舉:三級胺類、咪唑類、路易斯酸類、鎓鹽類、雙氰胺類、有機酸二醯肼類、膦類等硬化觸媒。更具體而言,可例舉:2-甲基咪唑、2-乙基-4-甲基咪唑、三(二甲基胺基甲基)苯酚、三氟化硼-胺錯合物、雙氰胺、二苯基錪六氟磷酸鹽、三苯基鋶六氟磷酸鹽等。 熱硬化促進劑(F)可單獨使用該等之一種,亦可併用兩種以上。 The thermosetting accelerator (F) is a compound that has the function of forming a crosslinked structure in the positive photosensitive resin composition by heating. As the thermosetting accelerator (F), for example, there can be mentioned: a compound that reacts with the thermosetting agent (E) and crosslinks to form a crosslinked structure; or a compound that does not crosslink itself but has a catalytic effect on the thermosetting agent (E). In the case of using an epoxy compound as the thermosetting agent (E), as the thermosetting accelerator (F) that forms a crosslinked structure, there can be mentioned: polyamines, polythiols, and polycarboxylic anhydrides. More specifically, examples of polyamines include ethylenediamine, triethylenediamine, triethylenetetramine, tetraethylenepentamine, hexamethylenediamine, polyoxyalkylenepolyamine, isophoronediamine, 3,9-bis(3-aminopropyl)-2,4,8,10-tetraoxaspiro(5,5)undecane. Examples of polythiols include polyether polythiols, and examples of polycarboxylic anhydrides include succinic anhydride, methyltetrahydrophthalic anhydride, hexahydrophthalic anhydride, 4-methylhexahydrophthalic anhydride, etc. Examples of catalysts include tertiary amines, imidazoles, Lewis acids, onium salts, dicyandiamides, organic acid dihydrazides, phosphines, and other hardening catalysts. More specifically, examples include: 2-methylimidazole, 2-ethyl-4-methylimidazole, tris(dimethylaminomethyl)phenol, boron trifluoride-amine complex, dicyandiamide, diphenyliodonium hexafluorophosphate, triphenylcopperium hexafluorophosphate, etc. The heat curing accelerator (F) may be used alone or in combination of two or more.
於熱硬化劑(E)為一分子中具有2個以上之環氧基之化合物之情形時,作為熱硬化促進劑(F),尤佳為2-甲基咪唑、4-甲基-2-苯基咪唑。 本發明之感光性樹脂組合物中之全部固形物成分中之熱硬化促進劑(F)的含量較佳為0.1~10質量%,尤佳為0.5~3質量%。 When the thermal hardening agent (E) is a compound having two or more epoxy groups in one molecule, the thermal hardening accelerator (F) is particularly preferably 2-methylimidazole or 4-methyl-2- Phenylimidazole. The content of the thermosetting accelerator (F) in the total solid content of the photosensitive resin composition of the present invention is preferably 0.1 to 10% by mass, particularly preferably 0.5 to 3% by mass.
[著色劑(G)] 於為了形成包圍液晶顯示元件之彩色濾光片之R、G、及B三色之像素的晶格狀黑色部分即黑矩陣而使用本發明之正型感光性樹脂組合物之情形時,較佳為包含著色劑(G)。 著色劑(G)例如可例舉:碳黑、苯胺黑、蒽醌系黑色顏料、苝系黑色顏料,具體而言,C.I.顏料黑1、6、7、12、20、31等。作為著色劑(G),亦可使用紅色顏料、藍色顏料、綠色顏料等有機顏料或無機顏料之混合物。 [Colorant (G)] When the positive photosensitive resin composition of the present invention is used to form a black matrix, which is a lattice-shaped black portion of the pixels of the three colors of R, G, and B surrounding the color filter of the liquid crystal display element, it is preferred to contain a colorant (G). Examples of the colorant (G) include carbon black, aniline black, anthraquinone-based black pigments, and perylene-based black pigments. Specifically, C.I. Pigment Black 1, 6, 7, 12, 20, 31, etc. As the colorant (G), a mixture of organic pigments or inorganic pigments such as red pigments, blue pigments, and green pigments can also be used.
於本發明之正型感光性樹脂組合物含有著色劑(G),併用於形成黑矩陣等之情形時,該正型感光性樹脂組合物中之全部固形物成分中之著色劑(G)之含量較佳為15~65質量%,尤佳為20~50質量%。若為上述範圍,則正型感光性樹脂組合物之感度優異,又,所形成之阻隔壁之遮光性優異。When the positive photosensitive resin composition of the present invention contains a colorant (G) and is used to form a black matrix, etc., the colorant (G) in the total solid content of the positive photosensitive resin composition is The content is preferably 15 to 65% by mass, particularly preferably 20 to 50% by mass. If it is the said range, the sensitivity of a positive photosensitive resin composition will be excellent, and the barrier rib formed will be excellent in light-shielding property.
於本發明之正型感光性樹脂組合物含有上述著色劑(G)等分散性材料之情形時,為了提高其分散性,亦可進而含有高分子分散劑、分散助劑等。該等能夠以不損害本發明效果之範圍之含量含有於正型感光性樹脂組合物中。When the positive photosensitive resin composition of the present invention contains dispersible materials such as the above-mentioned colorant (G), in order to improve its dispersibility, it may further contain a polymer dispersant, a dispersion aid, and the like. These can be contained in the positive photosensitive resin composition in the content within the range which does not impair the effect of the present invention.
[矽烷偶合劑(H)] 本發明之正型感光性樹脂組合物亦可視需要包含矽烷偶合劑(H)。藉由含有矽烷偶合劑(H),所形成之硬化膜之基板密接性更優異。 作為矽烷偶合劑(H),可例舉:四乙氧基矽烷、3-縮水甘油氧基丙基三甲氧基矽烷、甲基三甲氧基矽烷、乙烯基三甲氧基矽烷、3-甲基丙烯醯氧丙基三甲氧基矽烷、3-氯丙基三甲氧基矽烷、3-巰基丙基三甲氧基矽烷、3-胺基丙基三乙氧基矽烷、十七氟辛基乙基三甲氧基矽烷、含聚氧伸烷基鏈之三乙氧基矽烷等。該等可單獨使用一種,亦可併用兩種以上。 [Silane coupling agent (H)] The positive photosensitive resin composition of the present invention may also contain a silane coupling agent (H) as needed. By containing the silane coupling agent (H), the substrate adhesion of the formed cured film is better. As the silane coupling agent (H), there can be cited: tetraethoxysilane, 3-glyceryloxypropyl trimethoxysilane, methyl trimethoxysilane, vinyl trimethoxysilane, 3-methacryloxypropyl trimethoxysilane, 3-chloropropyl trimethoxysilane, 3-butyl propyl trimethoxysilane, 3-aminopropyl triethoxysilane, heptadecafluorooctylethyl trimethoxysilane, triethoxysilane containing a polyoxyalkylene chain, etc. These can be used alone or in combination of two or more.
本發明之正型感光性樹脂組合物中之全部固形物成分中之矽烷偶合劑(H)的含量較佳為0.1~20質量%,尤佳為1~10質量%。若為上述範圍之下限值以上,則由正型感光性樹脂組合物形成之硬化膜之基板密接性更優異,若為上述範圍之上限值以下,則硬化膜之撥墨性良好。The content of the silane coupling agent (H) in the total solid content of the positive photosensitive resin composition of the present invention is preferably 0.1 to 20 mass%, and more preferably 1 to 10 mass%. If it is above the lower limit of the above range, the substrate adhesion of the cured film formed by the positive photosensitive resin composition is better, and if it is below the upper limit of the above range, the ink repellency of the cured film is good.
[微粒子(I)] 本發明之正型感光性樹脂組合物亦可視需要包含微粒子(I)。藉由含有微粒子(I),可防止使用正型感光性樹脂組合物形成之阻隔壁之熱流掛。 [Fine particles (I)] The positive photosensitive resin composition of the present invention may optionally contain fine particles (I). By containing the fine particles (I), heat sagging of the barrier rib formed using the positive photosensitive resin composition can be prevented.
作為微粒子(I),並無特別限定,可例舉:二氧化矽、氧化鋯、氟化鎂、摻錫氧化銦(ITO)、摻銻氧化錫(ATO)等無機系微粒子;聚乙烯、聚甲基丙烯酸甲酯(PMMA)等有機系微粒子等。從耐熱性之方面考慮,較佳為無機系微粒子,從獲取容易性或分散穩定性之方面考慮,尤佳為二氧化矽或氧化鋯。 又,於正型感光性樹脂組合物含有著色劑(G)及高分子分散劑之情形時,若考慮該高分子分散劑之吸附能力,則較佳為微粒子(I)帶負電。 進而,若考慮正型感光性樹脂組合物之曝光感度,則較佳為微粒子(I)不吸收曝光時所照射之光,尤佳為不吸收作為超高壓水銀燈之主發光波長之i射線(365 nm)、h射線(405 nm)、及g射線(436 nm)。 The fine particles (I) are not particularly limited, and examples thereof include inorganic fine particles such as silicon dioxide, zirconium oxide, magnesium fluoride, tin-doped indium oxide (ITO), and antimony-doped tin oxide (ATO); polyethylene, polyethylene, etc. Organic fine particles such as methyl methacrylate (PMMA), etc. From the viewpoint of heat resistance, inorganic fine particles are preferred, and from the viewpoint of ease of acquisition and dispersion stability, silica or zirconium oxide is particularly preferred. Moreover, when the positive photosensitive resin composition contains a colorant (G) and a polymer dispersant, considering the adsorption capacity of the polymer dispersant, it is preferable that the fine particles (I) be negatively charged. Furthermore, considering the exposure sensitivity of the positive photosensitive resin composition, it is preferable that the fine particles (I) do not absorb the light irradiated during exposure, and it is particularly preferable that they do not absorb the i-ray (365) which is the main emission wavelength of the ultrahigh-pressure mercury lamp. nm), h-rays (405 nm), and g-rays (436 nm).
關於微粒子(I)之平均粒徑,從阻隔壁之表面平滑性變良好之方面考慮,平均粒徑較佳為1 μm以下,尤佳為200 nm以下。其中,作為平均粒徑,最佳為5~100 nm。 本發明之正型感光性樹脂組合物中之全部固形物成分中之微粒子(I)的含量較佳為5~35質量%,尤佳為10~30質量%。若含量為上述範圍之下限值以上,則存在抑制撥墨性降低之效果,若為上述範圍之上限值以下,則正型感光性樹脂組合物之儲存穩定性優異。 Regarding the average particle size of the microparticles (I), from the perspective of improving the surface smoothness of the barrier wall, the average particle size is preferably 1 μm or less, and more preferably 200 nm or less. Among them, the best average particle size is 5 to 100 nm. The content of the microparticles (I) in the total solid content of the positive photosensitive resin composition of the present invention is preferably 5 to 35% by mass, and more preferably 10 to 30% by mass. If the content is above the lower limit of the above range, there is an effect of suppressing the reduction of ink repellency, and if it is below the upper limit of the above range, the storage stability of the positive photosensitive resin composition is excellent.
[其他添加劑] 於本發明之正型感光性樹脂組合物中,作為其他添加劑,亦可視需要於不損害本發明效果之範圍內,調配選自由增黏劑、塑化劑、消泡劑、調平劑、防收縮劑及紫外線吸收劑所組成之群中之1種以上。 [Other additives] In the positive photosensitive resin composition of the present invention, other additives may be selected from the group consisting of tackifiers, plasticizers, defoaming agents, leveling agents, and anti-foaming agents as needed within the scope that does not impair the effects of the present invention. One or more of the group consisting of shrinkage agents and ultraviolet absorbers.
[正型感光性樹脂組合物之製造方法] 作為製造正型感光性樹脂組合物之方法,較佳為與鹼可溶性樹脂(A)、感光劑(B)、撥墨劑(C)、視需要之溶劑(D)、熱硬化劑(E)、熱硬化促進劑(F)、著色劑(G)、矽烷偶合劑(H)、微粒子(I)、及其他添加劑混合之方法。 混合係使用攪拌機,以溫度20℃~25℃、時間3 hr~6 hr進行,所獲得之組合物係直接使用。 [Production method of positive photosensitive resin composition] As a method for producing a positive photosensitive resin composition, it is preferable to use an alkali-soluble resin (A), a photosensitive agent (B), an ink repellent agent (C), an optional solvent (D), and a thermosetting agent (E). , method of mixing thermal hardening accelerator (F), colorant (G), silane coupling agent (H), microparticles (I), and other additives. Mixing is performed using a mixer at a temperature of 20°C to 25°C and a time of 3 hr to 6 hr, and the obtained composition is used directly.
本發明之正型感光性樹脂組合物可與通常之正型感光性樹脂組合物同樣地用作光微影法等之材料,所獲得之硬化膜可用作通常之使用正型感光性樹脂組合物之硬化膜之光學元件的構件。The positive photosensitive resin composition of the present invention can be used as a material for photolithography, etc., similarly to a conventional positive photosensitive resin composition, and the obtained cured film can be used as a component of an optical element using a conventional cured film of a positive photosensitive resin composition.
[阻隔壁及其製造方法] 本發明之阻隔壁係用以於基板上設置區間而形成者,包含塗佈上述本發明之正型感光性樹脂組合物,進行乾燥,並使其硬化而成之硬化膜。 本發明之阻隔壁可適宜地用於光學元件之用途,於上述正型感光性樹脂組合物含有著色劑(G)之情形時,所獲得之阻隔壁可用作黑矩陣。 本發明之阻隔壁例如係應用於在基板上具有複數個像素、及位於相鄰之像素間之阻隔壁的光學元件用之阻隔壁。 [Barrier and its manufacturing method] The barrier of the present invention is formed by setting a partition on a substrate, and includes a cured film formed by applying the positive photosensitive resin composition of the present invention, drying it, and curing it. The barrier of the present invention can be suitably used for optical elements. When the positive photosensitive resin composition contains a coloring agent (G), the obtained barrier can be used as a black matrix. The barrier of the present invention is used, for example, as a barrier for an optical element having a plurality of pixels on a substrate and barrier between adjacent pixels.
作為使用本發明之正型感光性樹脂組合物,製造光學元件用之阻隔壁之方法,例如可例舉以下之方法。As a method for manufacturing a barrier rib for an optical element using the positive photosensitive resin composition of the present invention, for example, the following method can be cited.
將本發明之正型感光性樹脂組合物塗佈於基板上而形成塗膜(塗膜形成步驟),繼而,將該塗膜乾燥而製成膜(預烘烤步驟),繼而,僅將該膜之未成為阻隔壁之部分曝光(曝光步驟),其後,去除上述曝光後之部分之塗膜而形成包含上述塗膜之未曝光部分之阻隔壁(顯影步驟)。繼而,視需要進而使上述形成之阻隔壁等熱硬化(後烘烤步驟),藉此可製造本發明之光學元件用之阻隔壁。The positive photosensitive resin composition of the present invention is coated on a substrate to form a coating film (coating film forming step), and then the coating film is dried to form a film (prebaking step), and then only this coating film is The portion of the film that has not become the barrier rib is exposed (exposure step), and then the coating film on the exposed portion is removed to form a barrier rib including the unexposed portion of the coating film (development step). Then, if necessary, the barrier ribs formed above are further thermally cured (post-baking step), whereby the barrier ribs for the optical element of the present invention can be manufactured.
基板之材質並無特別限定,可使用各種玻璃板;聚酯(聚對苯二甲酸乙二酯等)、聚烯烴(聚乙烯、聚丙烯等)、聚碳酸酯、聚甲基丙烯酸甲酯、聚碸、聚醯亞胺、聚甲基丙烯酸樹脂、丙烯酸系樹脂等熱塑性塑膠片材;環氧樹脂、不飽和聚酯等熱硬化性樹脂之硬化片材等。尤其是從耐熱性之方面考慮,較佳為玻璃板、聚醯亞胺等耐熱性塑膠。又,較佳為透明基板。The material of the substrate is not particularly limited, and various glass plates; thermoplastic plastic sheets such as polyester (polyethylene terephthalate, etc.), polyolefin (polyethylene, polypropylene, etc.), polycarbonate, polymethyl methacrylate, polysulfone, polyimide, polymethacrylate, acrylic resin, etc.; hardened sheets of thermosetting resins such as epoxy resin and unsaturated polyester, etc. can be used. In particular, from the perspective of heat resistance, heat-resistant plastics such as glass plates and polyimide are preferred. In addition, a transparent substrate is preferred.
對基板之形狀或形成阻隔壁之表面並無特別限制,係根據用途而適當選擇。於基板為板狀之情形時,可為平板,亦可整個面或一部分具有曲率。基板之厚度可根據阻隔壁之用途而適當選擇,通常較佳為0.5~10 mm。There is no particular restriction on the shape of the substrate or the surface on which the barrier ribs are formed, and they are appropriately selected according to the application. When the substrate is in the form of a plate, it may be a flat plate, or the entire surface or a portion thereof may have a curvature. The thickness of the substrate may be appropriately selected according to the application of the barrier ribs, and is generally preferably 0.5 to 10 mm.
本發明中所使用之基板較佳為預先利用醇洗淨、紫外線/臭氧洗淨等將塗佈正型感光性樹脂組合物之面洗淨。For the substrate used in the present invention, it is preferred that the surface on which the positive photosensitive resin composition is coated has been cleaned in advance by alcohol cleaning, ultraviolet ray/ozone cleaning, or the like.
以下,使用圖1,具體地說明使用本發明之正型感光性樹脂組合物之光學元件用阻隔壁之製造方法。 圖1係模式性地表示使用本發明之正型感光性樹脂組合物之光學元件用阻隔壁之製造例的剖面圖。 圖1之(I)係模式性地表示於基板1上形成包含本發明之正型感光性樹脂組合物之塗膜2之步驟的圖。 圖1之(II)係模式性地表示曝光步驟之圖。 圖1之(III)係表示顯影步驟後之基板1、及形成於基板上之阻隔壁6之剖面圖。 Hereinafter, the method for manufacturing a barrier wall for an optical element using the positive photosensitive resin composition of the present invention will be specifically described using FIG. FIG. 1 is a cross-sectional view schematically showing an example of manufacturing a barrier wall for an optical element using the positive photosensitive resin composition of the present invention. FIG. 1 (I) is a view schematically showing a step of forming a coating film 2 containing the positive photosensitive resin composition of the present invention on a substrate 1. FIG. 1 (II) is a view schematically showing an exposure step. FIG. 1 (III) is a cross-sectional view showing a substrate 1 after a development step and a barrier wall 6 formed on the substrate.
(塗膜形成步驟) 如於圖1之(I)中示出剖面般,於基板1上塗佈上述本發明之正型感光性樹脂組合物,而形成包含正型感光性樹脂組合物之塗膜2。 (Coating film formation step) As shown in cross section in (I) of FIG. 1 , the above-mentioned positive photosensitive resin composition of the present invention is applied on the substrate 1 to form a coating film 2 including the positive photosensitive resin composition.
作為正型感光性樹脂組合物之塗佈方法,只要為形成膜厚均勻之塗膜之方法,則並無特別限制,可例舉:旋塗法、噴霧法、狹縫式塗佈法、輥塗法、旋轉塗佈法、棒式塗佈法等通常之塗膜形成中所使用之方法。 塗膜2之膜厚係考慮最終獲得之阻隔壁之高度而確定。塗膜2之膜厚較佳為最終獲得之阻隔壁之高度的100~200%,尤佳為100~130%。塗膜2之膜厚較佳為0.3~325 μm,尤佳為0.5~65 μm。 The coating method of the positive photosensitive resin composition is not particularly limited as long as it forms a coating film with a uniform film thickness. Examples thereof include spin coating, spray coating, slit coating, and roll coating. Methods commonly used for coating film formation, such as coating, spin coating, and rod coating. The film thickness of the coating film 2 is determined taking into consideration the height of the barrier wall finally obtained. The film thickness of the coating film 2 is preferably 100 to 200% of the height of the barrier wall finally obtained, particularly preferably 100 to 130%. The film thickness of the coating film 2 is preferably 0.3 to 325 μm, particularly preferably 0.5 to 65 μm.
(預烘烤步驟) 對在上述塗膜形成步驟中形成於基板1上之塗膜2進行加熱,獲得膜2。藉由加熱,構成塗膜之正型感光性樹脂組合物中所含之包含溶劑在內之揮發成分揮發而被去除,獲得無黏著性之膜。又,撥墨劑(C)向膜表面附近轉移。 作為加熱方法,可例舉如下方法:利用加熱板、烘箱等加熱裝置,將基板1與塗膜2一併於50~120℃、較佳為70~110℃下進行加熱處理10~2,000秒鐘、較佳為30~180秒鐘左右。 (pre-baking step) The coating film 2 formed on the substrate 1 in the above-mentioned coating film forming step is heated to obtain the film 2 . By heating, the volatile components including the solvent contained in the positive photosensitive resin composition constituting the coating film are volatilized and removed, and a non-adhesive film is obtained. Furthermore, the ink repellent agent (C) is transferred to the vicinity of the film surface. An example of the heating method is the following method: Using a heating device such as a hot plate or an oven, the substrate 1 and the coating film 2 are heated together at 50 to 120°C, preferably 70 to 110°C for 10 to 2,000 seconds. , preferably about 30 to 180 seconds.
為了去除溶劑等揮發成分,可於預烘烤步驟之前另外設置加熱(乾燥)以外之真空乾燥等乾燥步驟。又,為了不產生塗膜外觀之不均,高效率地進行乾燥,更佳為併用利用上述預烘烤步驟進行之兼具乾燥之加熱、及真空乾燥。真空乾燥之條件根據各成分之種類、調配比率等亦有所不同,可於500~10 Pa且10~300秒鐘左右之較寬之範圍內進行。In order to remove volatile components such as solvents, an additional drying step such as vacuum drying in addition to heating (drying) can be provided before the pre-baking step. Furthermore, in order to prevent unevenness in the appearance of the coating film and to perform drying efficiently, it is more preferable to use both heating and vacuum drying in the above-mentioned prebaking step. The conditions for vacuum drying vary depending on the type of each component, the mixing ratio, etc., but can be carried out within a wide range of 500 to 10 Pa and 10 to 300 seconds.
(曝光步驟) 如圖1之(II)所示,對膜2介隔規定圖案之光罩4照射光5。光5僅透過經上述光罩4分割之規定圖案部分,到達基板1上之膜2。由於僅曝光部進行鹼可溶化,故上述規定圖案係以適合阻隔壁形狀之形態設置。於後烘烤步驟後,阻隔壁寬度之平均值較佳為成為100 μm以下,尤佳為20 μm以下。又,相鄰之阻隔壁間之距離之平均值較佳為成為300 μm以下,尤佳為100 μm以下。作為光罩4,較佳為使用以成為該範圍之方式形成有圖案者。 (exposure step) As shown in (II) of FIG. 1 , the film 2 is irradiated with light 5 through a mask 4 with a predetermined pattern interposed therebetween. The light 5 only passes through the predetermined pattern portion divided by the above-mentioned photomask 4 and reaches the film 2 on the substrate 1 . Since only the exposed portion is alkali-solubilized, the above-mentioned predetermined pattern is provided in a form suitable for the shape of the barrier rib. After the post-baking step, the average barrier rib width is preferably 100 μm or less, and more preferably 20 μm or less. In addition, the average distance between adjacent barrier ribs is preferably 300 μm or less, more preferably 100 μm or less. As the photomask 4, it is preferable to use one in which a pattern is formed so as to fall within this range.
圖1之(II)中,被照射光之膜之曝光部分成為正型感光性樹脂組合物之可溶化部分,另一方面,未曝光部分3為正型感光性樹脂組合物之膜2本身之狀態。In Figure 1 (II), the exposed portion of the film irradiated with light becomes the soluble portion of the positive photosensitive resin composition. On the other hand, the unexposed portion 3 is the film 2 itself of the positive photosensitive resin composition. condition.
作為所照射之光5,可例舉:可見光;紫外線;遠紫外線;KrF準分子雷射、ArF準分子雷射、F 2準分子雷射、Kr 2準分子雷射、KrAr準分子雷射、Ar 2準分子雷射等準分子雷射;X射線;電子束等。又,作為照射光5,較佳為波長100~600 nm之電磁波,更佳為於300~500 nm之範圍內具有分佈之光線,尤佳為i射線(365 nm)、h射線(405 nm)及g射線(436 nm)。 Examples of the irradiated light 5 include: visible light; ultraviolet rays; far ultraviolet rays; KrF excimer laser, ArF excimer laser, F 2 excimer laser, Kr 2 excimer laser, KrAr excimer laser, Excimer lasers such as Ar 2 excimer laser; X-rays; electron beams, etc. In addition, the irradiation light 5 is preferably an electromagnetic wave with a wavelength of 100 to 600 nm, more preferably a light with distribution in the range of 300 to 500 nm, and particularly preferably an i-ray (365 nm) or an h-ray (405 nm). and g-rays (436 nm).
作為照射裝置(未圖示),可使用公知之超高壓水銀燈或深(Deep)UV燈等。曝光量較佳為5~1,000 mJ/cm 2,尤佳為50~400 mJ/cm 2。若曝光量為上述範圍之下限值以上,則正型感光性樹脂組合物之可溶化之部分對顯影液之溶解性變充分,顯影殘渣消失。若為上述範圍之上限值以下,則可獲得較高之解像度。 作為曝光時間,亦取決於曝光量、感光組合物之組成、塗膜之厚度等,但較佳為1~60秒鐘,尤佳為5~20秒鐘。 As the irradiation device (not shown), a known ultrahigh-pressure mercury lamp or deep UV lamp can be used. The exposure amount is preferably 5 to 1,000 mJ/cm 2 , particularly preferably 50 to 400 mJ/cm 2 . If the exposure amount is more than the lower limit of the above range, the soluble part of the positive photosensitive resin composition becomes sufficiently soluble in the developer, and the development residue disappears. If it is below the upper limit of the above range, a higher resolution can be obtained. The exposure time also depends on the exposure amount, the composition of the photosensitive composition, the thickness of the coating film, etc., but is preferably 1 to 60 seconds, and particularly preferably 5 to 20 seconds.
(顯影步驟) 使用顯影液進行顯影,並去除圖1之(II)所示之基板1上之曝光部分。藉此,可獲得圖1之(III)中如剖面圖所示之基板1、及於上述基板上由正型感光性樹脂組合物之膜形成之阻隔壁6的構成。又,由阻隔壁6與基板1所圍成之部分係藉由墨水注入等而形成像素之被稱為點7之部分。所獲得之基板10可經過下述後烘烤步驟而用於利用噴墨方式之光學元件。 (Development step) Develop using a developer, and remove the exposed portion of the substrate 1 shown in (II) of Figure 1 . Thereby, the structure of the substrate 1 as shown in the cross-sectional view in (III) of FIG. 1 , and the barrier rib 6 formed of a film of a positive photosensitive resin composition on the substrate can be obtained. In addition, the portion surrounded by the barrier rib 6 and the substrate 1 is a portion called a dot 7 where a pixel is formed by ink injection or the like. The obtained substrate 10 can be used for optical elements using the inkjet method through the following post-baking steps.
作為顯影液,可使用包含無機鹼類、胺類、醇胺類、四級銨鹽等鹼類之鹼性水溶液、較佳為包含氫氧化四甲基銨等鹼類之鹼性水溶液。 又,為了提高溶解性或去除殘渣,於顯影液中可添加界面活性劑或醇等有機溶劑。 As the developer, an alkaline aqueous solution containing alkali such as inorganic alkalis, amines, alcoholamines, and quaternary ammonium salts, preferably an alkaline aqueous solution containing alkali such as tetramethylammonium hydroxide, can be used. In addition, in order to improve solubility or remove residues, a surfactant or an organic solvent such as alcohol may be added to the developer.
顯影時間(與顯影液接觸之時間)較佳為5~180秒鐘,更佳為10~60秒鐘。 顯影方法可例舉:溢液法、浸漬法、噴淋法等。顯影後,進行高壓水洗或流水洗淨,並利用壓縮空氣或壓縮氮氣使其風乾,藉此可去除基板1及阻隔壁6上之水分。 The development time (time of contact with the developer) is preferably 5 to 180 seconds, more preferably 10 to 60 seconds. Examples of the development method include: overflow method, dipping method, spray method, etc. After development, perform high-pressure water washing or running water washing, and use compressed air or compressed nitrogen to air-dry, thereby removing moisture on the substrate 1 and barrier ribs 6 .
(後烘烤步驟) 作為後烘烤步驟,對基板1上之阻隔壁6進行加熱。作為加熱方法,可例舉如下方法:利用加熱板、烘箱等加熱裝置,將基板1與阻隔壁6一併於150~250℃下進行5~90分鐘之加熱處理。 藉由加熱,基板1上之包含正型感光性樹脂組合物之硬化膜之阻隔壁6進一步硬化,由阻隔壁6與基板1所圍成之點7之形狀亦更被固定。再者,上述加熱溫度尤佳為180℃以上。若加熱溫度過低,則阻隔壁6之硬化不充分,無法獲得充分之耐化學品性。於藉由下述墨水注入步驟向點7中注入墨水之情形時,根據該墨水中所含之溶劑,有阻隔壁6膨潤或者墨水洇滲之虞。另一方面,若加熱溫度過高,則有產生阻隔壁6之熱分解之虞。 (post-baking step) As a post-baking step, the barrier ribs 6 on the substrate 1 are heated. An example of the heating method is the following method: using a heating device such as a hot plate or an oven, the substrate 1 and the barrier rib 6 are heated together at 150 to 250° C. for 5 to 90 minutes. By heating, the barrier rib 6 including the cured film of the positive photosensitive resin composition on the substrate 1 is further hardened, and the shape of the point 7 surrounded by the barrier rib 6 and the substrate 1 is further fixed. Furthermore, the above-mentioned heating temperature is particularly preferably 180°C or higher. If the heating temperature is too low, the barrier rib 6 will not be sufficiently hardened and sufficient chemical resistance will not be obtained. When ink is injected into the dots 7 by the ink injection step described below, there is a risk that the barrier rib 6 may swell or the ink may bleed depending on the solvent contained in the ink. On the other hand, if the heating temperature is too high, there is a risk of thermal decomposition of the barrier rib 6 .
所形成之阻隔壁之寬度之平均值較佳為100 μm以下,尤佳為20 μm以下。其中,最佳為5~20 μm。 又,相鄰之阻隔壁間之距離(點之寬度)之平均值較佳為300 μm以下,尤佳為100 μm以下。其中,最佳為30~80 μm。 又,阻隔壁高度之平均值較佳為0.05~50 μm,尤佳為0.2~10 μm。 The average width of the formed barrier ribs is preferably 100 μm or less, particularly preferably 20 μm or less. Among them, the optimum range is 5 to 20 μm. Furthermore, the average distance (width of dots) between adjacent barrier ribs is preferably 300 μm or less, particularly preferably 100 μm or less. Among them, the optimum range is 30 to 80 μm. Moreover, the average value of the barrier rib height is preferably 0.05 to 50 μm, particularly preferably 0.2 to 10 μm.
[光學元件之製造方法] 本發明之光學元件可藉由如下方法獲得:藉由上述製造方法於基板上形成阻隔壁後,例如對由上述基板與上述阻隔壁所圍成之區域內之露出之基板表面進行親墨化處理(親墨化處理步驟),繼而,藉由噴墨法向上述區域注入墨水,形成上述像素(墨水注入步驟)。 [Manufacturing method of optical components] The optical element of the present invention can be obtained by the following method: after forming the barrier rib on the substrate by the above-mentioned manufacturing method, for example, the exposed substrate surface in the area surrounded by the above-mentioned substrate and the above-mentioned barrier rib is subjected to an ink-receptive treatment. (Ink adhesion processing step), and then, ink is injected into the above-mentioned area by an inkjet method to form the above-mentioned pixels (ink injection step).
(親墨化處理步驟) 作為親墨化處理之方法,可例舉:利用鹼性水溶液之洗淨處理、紫外線洗淨處理、紫外線/臭氧洗淨處理、準分子洗淨處理、電暈放電處理、氧電漿處理等方法。 利用鹼性水溶液之洗淨處理係使用鹼性水溶液(氫氧化鉀、氫氧化四甲基銨水溶液等)洗淨基板表面之濕式處理。 紫外線洗淨處理係使用紫外線來洗淨基板表面之乾式處理。 紫外線/臭氧洗淨處理係使用發出185 nm與254 nm之光之低壓水銀燈,洗淨基板表面之乾式處理。 準分子洗淨處理係使用發出172 nm之光之氙準分子燈,洗淨基板表面之乾式處理。 電暈放電處理係利用高頻高電壓,於空氣中產生電暈放電,並洗淨基板表面之乾式處理。 氧電漿處理係主要使用於真空中將高頻電源等作為觸發器而激發氧,使其成為反應性較高之「電漿狀態」者,從而洗淨基板表面之乾式處理。 (Ink affinity treatment step) As methods for ink affinity treatment, there can be cited: cleaning treatment using alkaline aqueous solution, ultraviolet cleaning treatment, ultraviolet/ozone cleaning treatment, excimer cleaning treatment, corona discharge treatment, oxygen plasma treatment and the like. Cleaning treatment using alkaline aqueous solution is a wet treatment using an alkaline aqueous solution (potassium hydroxide, tetramethylammonium hydroxide aqueous solution, etc.) to clean the surface of the substrate. Ultraviolet cleaning treatment is a dry treatment using ultraviolet light to clean the surface of the substrate. Ultraviolet/ozone cleaning treatment is a dry treatment using a low-pressure mercury lamp emitting light of 185 nm and 254 nm to clean the surface of the substrate. Excimer cleaning is a dry process that uses a xenon excimer lamp that emits 172 nm light to clean the substrate surface. Corona discharge treatment is a dry process that uses high frequency and high voltage to generate corona discharge in the air and clean the substrate surface. Oxygen plasma treatment is a dry process that uses a high frequency power source as a trigger in a vacuum to excite oxygen and make it a more reactive "plasma state", thereby cleaning the substrate surface.
作為親墨化處理之方法,於較簡便之方面,較佳為紫外線/臭氧洗淨處理等乾式處理法。紫外線/臭氧可使用市售之裝置而產生。 於紫外線/臭氧裝置內部設置形成有阻隔壁之基板,於空氣中,於室溫下,於不損害阻隔壁之撥油性之範圍內進行處理1~10分鐘左右,藉此可進行親墨化處理。再者,關於處理時間,只要配合各紫外線/臭氧裝置,以成為不損害阻隔壁之撥墨性之範圍之方式調整即可。 As a method of ink adhesion treatment, a dry treatment method such as ultraviolet/ozone cleaning treatment is preferred in terms of simplicity. UV/ozone can be generated using commercially available devices. The substrate with the barrier ribs is placed inside the ultraviolet/ozone device, and is processed in the air at room temperature for about 1 to 10 minutes within a range that does not impair the oil repellency of the barrier ribs. This allows the ink adhesion treatment to be performed. . Furthermore, the treatment time can be adjusted in a range that does not impair the ink repellency of the barrier rib in conjunction with each ultraviolet/ozone device.
藉由親墨化處理,充分地進行於形成上述阻隔壁後,殘留於點之顯影殘渣之去除等,藉此可充分地實現點之親墨化,且能夠防止使用所獲得之光學元件之彩色顯示裝置等之空心現象。又,若使用利用本發明之正型感光性樹脂組合物形成之阻隔壁,則可藉由上述紫外線洗淨處理等,於不降低阻隔壁之撥墨性之情況下進行親墨化。By the ink affinity treatment, the development residues remaining in the dots after the formation of the barrier ribs are fully removed, thereby achieving sufficient ink affinity of the dots and preventing hollowing of the color display device using the obtained optical element. In addition, if the barrier ribs are formed using the positive photosensitive resin composition of the present invention, the ink affinity can be performed without reducing the ink repellency of the barrier ribs by the above-mentioned ultraviolet cleaning treatment.
此處,由正型感光性樹脂組合物形成之硬化膜之撥墨性(撥水撥油性)能夠以水及PGMEA(丙二醇單甲醚乙酸酯:較多地用作墨水之溶劑之有機溶劑)之接觸角來估算。 於使用具有利用本發明之正型感光性樹脂組合物形成之阻隔壁的基板來製造光學元件之情形時,要求阻隔壁於上述親墨化處理後亦具有充分之撥墨性。阻隔壁之水之接觸角較佳為90度以上,尤佳為95度以上。又,阻隔壁之PGMEA之接觸角較佳為30度以上,尤佳為35度以上。 另一方面,於使用具有利用本發明之正型感光性樹脂組合物形成之阻隔壁的基板來製造光學元件之情形時,關於點,要求其為親墨性,且其水之接觸角較佳為20度以下,尤佳為10度以下。 Here, the ink repellency (water repellency and oil repellency) of the cured film formed by the positive photosensitive resin composition can be estimated by the contact angle between water and PGMEA (propylene glycol monomethyl ether acetate: an organic solvent that is often used as a solvent for ink). When a substrate having a barrier wall formed using the positive photosensitive resin composition of the present invention is used to manufacture an optical element, the barrier wall is required to have sufficient ink repellency after the above-mentioned ink affinity treatment. The contact angle of water of the barrier wall is preferably 90 degrees or more, and more preferably 95 degrees or more. In addition, the contact angle of PGMEA of the barrier wall is preferably 30 degrees or more, and more preferably 35 degrees or more. On the other hand, when using a substrate having a barrier wall formed using the positive photosensitive resin composition of the present invention to manufacture an optical element, it is required to be ink-affinity and its water contact angle is preferably less than 20 degrees, and more preferably less than 10 degrees.
(墨水注入步驟) 該步驟為藉由噴墨法向親墨化處理步驟後之點中注入墨水而形成像素之步驟。 該步驟可使用噴墨法中通常使用之噴墨裝置,與通常之方法同樣地進行。作為此種像素之形成中所使用之噴墨裝置,並無特別限定,可使用利用如下等各種方法之噴墨裝置:連續地噴射帶電後之墨水,並利用磁場進行控制之方法;使用壓電元件間歇性地噴射墨水之方法;對墨水進行加熱,並利用其發泡而間歇性地噴射之方法。 (Ink injection step) This step is a step of injecting ink into the dots after the ink adhesion treatment step by an inkjet method to form pixels. This step can be performed in the same manner as a normal method using an inkjet device commonly used in the inkjet method. The inkjet device used for forming such pixels is not particularly limited, and an inkjet device using various methods such as the following can be used: a method of continuously ejecting charged ink and controlling it using a magnetic field; a method using piezoelectric A method of intermittently ejecting ink from an element; a method of heating the ink and utilizing its foaming to eject intermittently.
作為使用本發明之正型感光性樹脂組合物製造之光學元件,可例舉:彩色濾光片、有機EL元件、有機TFT(Thin Film Transistor,薄膜電晶體)陣列等。Examples of optical elements produced using the positive photosensitive resin composition of the present invention include color filters, organic EL elements, organic TFT (Thin Film Transistor, thin film transistor) arrays, and the like.
[彩色濾光片之製造] 阻隔壁之形成、點之親墨化處理、利用噴墨法之墨水注入如上所述。 於彩色濾光片中,所形成之像素之形狀亦可設為條紋型、馬賽克型、三角型、4像素配置型等公知之任一種排列。 [Manufacturing of color filter] The formation of barrier walls, ink affinity treatment of dots, and ink injection using the inkjet method are as described above. In the color filter, the shape of the pixels formed can also be any known arrangement such as stripe type, mosaic type, triangle type, 4-pixel configuration type, etc.
用於像素之形成之墨水主要包含著色成分、黏合劑樹脂成分、及溶劑。 作為著色成分,較佳為使用耐熱性、耐光性等優異之顏料及染料。 作為黏合劑樹脂成分,較佳為透明且耐熱性優異之樹脂,可例舉:丙烯酸系樹脂、三聚氰胺樹脂、聚胺酯樹脂等。 水性墨水包含水及視需要之水溶性有機溶劑作為溶劑,包含水溶性樹脂或水分散性樹脂作為黏合劑樹脂成分,且視需要包含各種助劑。 又,油性墨水包含有機溶劑作為溶劑,包含可溶於有機溶劑中之樹脂作為黏合劑樹脂成分,且視需要包含各種助劑。 較佳為藉由噴墨法注入墨水後,視需要進行乾燥、加熱硬化、及/或紫外線硬化。 The ink used for forming pixels mainly includes a coloring component, a binder resin component, and a solvent. As the coloring component, it is preferred to use a pigment or dye with excellent heat resistance and light resistance. As the binder resin component, it is preferred to use a transparent resin with excellent heat resistance, such as acrylic resin, melamine resin, polyurethane resin, etc. The water-based ink includes water and a water-soluble organic solvent as a solvent, a water-soluble resin or a water-dispersible resin as a binder resin component, and various additives as needed. Furthermore, the oil-based ink contains an organic solvent as a solvent, contains a resin soluble in the organic solvent as a binder resin component, and contains various additives as needed. It is preferred that the ink is injected by inkjet method and then dried, heat-cured, and/or UV-cured as needed.
於形成像素後,視需要使用保護層用塗佈液來形成保護膜層。 保護膜層較佳為出於提高表面平坦性之目的、及阻斷源自阻隔壁或像素部之墨水之溶出物到達液晶層之目的而形成。 於形成保護膜層之情形時,較佳為事先去除阻隔壁之撥墨性。於不去除撥墨性之情形時,會排斥保護層用塗佈液,而無法獲得均勻之膜厚,故欠佳。 作為去除阻隔壁之撥墨性之方法,可例舉電漿灰化(Plasma Ashing)處理或光灰化處理等。 進而視需要為了使用彩色濾光片製造之液晶面板之高品質化,較佳為於包含阻隔壁之黑矩陣上形成感光性間隔件。 After forming the pixel, a protective coating liquid is used to form a protective film layer as needed. The protective film layer is preferably formed for the purpose of improving the surface flatness and blocking the dissolution of the ink from the barrier wall or the pixel portion from reaching the liquid crystal layer. When forming the protective film layer, it is preferred to remove the ink repellency of the barrier wall in advance. If the ink repellency is not removed, the protective coating liquid will be repelled, and a uniform film thickness cannot be obtained, which is not preferred. As a method for removing the ink repellency of the barrier wall, plasma ashing or optical ashing can be cited. Furthermore, in order to improve the quality of the liquid crystal panel manufactured using the color filter, it is preferred to form a photosensitive spacer on the black matrix including the barrier ribs.
[有機EL元件之製造] 於使用本發明之正型感光性樹脂組合物形成阻隔壁前,於玻璃等透明基板上藉由濺鍍法等將摻錫氧化銦(ITO)等透明電極製膜,且視需要將透明電極蝕刻為所需之圖案。其次,使用本發明之正型感光性樹脂組合物形成阻隔壁,進行點之親墨化處理後,使用噴墨法對點依序塗佈電洞傳輸材料、發光材料之溶液,並進行乾燥,而形成電洞傳輸層、及發光層。其後,藉由蒸鍍法等形成鋁等電極,藉此可獲得有機EL元件之像素。 [Manufacturing of organic EL elements] Before forming barrier ribs using the positive photosensitive resin composition of the present invention, a transparent electrode such as tin-doped indium oxide (ITO) is formed on a transparent substrate such as glass by sputtering, and the transparent electrode is etched if necessary. for the desired pattern. Secondly, the positive photosensitive resin composition of the present invention is used to form barrier ribs, and after the dots are treated with ink adhesion, the solution of the hole transport material and the luminescent material is sequentially coated on the dots using the inkjet method, and dried. A hole transport layer and a luminescent layer are formed. Thereafter, electrodes such as aluminum are formed by evaporation, etc., thereby obtaining pixels of organic EL elements.
[有機TFT陣列之製造] 可經過以下之(1)~(3)之步驟來製造有機TFT陣列。 (1)於玻璃等透明基板上使用本發明之正型感光性樹脂組合物形成阻隔壁。繼而,進行點之親墨化處理後,使用噴墨法對點塗佈閘極電極材料之溶液,形成閘極電極。 (2)形成閘極電極後,於其上形成閘極絕緣膜。繼而,於閘極絕緣膜上,使用本發明之正型感光性樹脂組合物形成阻隔壁,進行點之親墨化處理後,使用噴墨法對點塗佈源極、汲極電極材料之溶液,而形成源極、汲極電極。 (3)形成源極、汲極電極後,以包圍一對源極、汲極電極之區域之方式,使用本發明之正型感光性樹脂組合物形成阻隔壁。繼而,進行點之親墨化處理後,使用噴墨法對點塗佈有機半導體之溶液,而於源極、汲極電極間形成有機半導體層。 再者,步驟(1)~(3)可分別僅於1個步驟中使用本發明之正型感光性樹脂組合物形成阻隔壁並利用,亦可於2個以上之步驟中使用本發明之正型感光性樹脂組合物形成阻隔壁並利用。 [Manufacturing of organic TFT array] An organic TFT array can be manufactured through the following steps (1) to (3). (1) A barrier wall is formed on a transparent substrate such as glass using the positive photosensitive resin composition of the present invention. Then, after the dots are subjected to ink-receptive treatment, a solution of a gate electrode material is applied to the dots using an inkjet method to form a gate electrode. (2) After the gate electrode is formed, a gate insulating film is formed thereon. Next, on the gate insulating film, a barrier wall is formed using the positive photosensitive resin composition of the present invention, and after the dots are subjected to ink-receptive treatment, a solution of source and drain electrode materials is applied to the dots using an inkjet method to form source and drain electrodes. (3) After the source and drain electrodes are formed, a barrier wall is formed using the positive photosensitive resin composition of the present invention in a manner surrounding a pair of source and drain electrodes. Next, after the dots are subjected to ink-receptive treatment, an organic semiconductor solution is applied to the dots using an inkjet method to form an organic semiconductor layer between the source and drain electrodes. Furthermore, steps (1) to (3) can be used in only one step to form a barrier wall using the positive photosensitive resin composition of the present invention, or can be used in two or more steps to form a barrier wall using the positive photosensitive resin composition of the present invention.
根據以上,本說明書揭示有下述正型感光性樹脂組合物、阻隔壁及光學元件。 [1]一種正型感光性樹脂組合物,其係包含鹼可溶性樹脂(A)、感光劑(B)及撥墨劑(C)者,且 上述撥墨劑(C)具有下述式(c)所表示之碳數2~40之一價基之正型感光性樹脂組合物。 R f1-O-R f2- (c) R f1:碳數1~6之聚氟烷基 R f2:於碳-碳原子間可具有醚性氧原子之聚氟伸烷基 其中,R f1-O-R f2-具有至少1個-O-CF 2-基。 [2]如[1]中所記載之正型感光性樹脂組合物,其中上述式(c)中,R f1為碳數1~6之全氟烷基,R f2為於碳-碳原子間可具有醚性氧原子之全氟伸烷基。 [3]如[1]或[2]中所記載之正型感光性樹脂組合物,其中上述撥墨劑(C)具有矽烷系骨架,且重量平均分子量(Mw)為500~2000。 [4]如[1]至[3]中任一項所記載之正型感光性樹脂組合物,其中上述撥墨劑(C)具有丙烯酸系骨架,且重量平均分子量(Mw)為6000~200000。 [5]如[1]至[4]中任一項所記載之正型感光性樹脂組合物,其中上述撥墨劑(C)之氟原子含有率為1~45質量%。 [6]如[1]至[5]中任一項所記載之正型感光性樹脂組合物,其中上述感光劑(B)係具有醌二疊氮基之化合物。 [7]如[1]至[6]中任一項所記載之正型感光性樹脂組合物,其進而包含溶劑(D)。 [8]如[1]至[7]中任一項所記載之正型感光性樹脂組合物,其進而包含熱硬化劑(E)。 [9]如[1]至[8]中任一項所記載之正型感光性樹脂組合物,其進而包含熱硬化促進劑(F)。 [10]如[1]至[9]中任一項所記載之正型感光性樹脂組合物,其進而包含著色劑(G)。 [11]一種阻隔壁,其係以將基板表面分隔為像素形成用之複數個區間之形態形成者,且包含如[1]至[10]中任一項所記載之正型感光性樹脂組合物之硬化膜。 [12]一種光學元件,其係具有基板、形成於上述基板表面之複數個像素、及位於相鄰之上述複數個像素間之阻隔壁者,且 上述阻隔壁包含如[1]至[10]中任一項所記載之正型感光性樹脂組合物之硬化膜。 [13]如[12]中所記載之光學元件,其中上述光學元件為彩色濾光片、TFT陣列或有機EL元件。 [實施例] Based on the above, the present specification discloses the following positive photosensitive resin composition, barrier rib and optical element. [1] A positive photosensitive resin composition comprising an alkali-soluble resin (A), a photosensitive agent (B) and an ink repellent (C), wherein the ink repellent (C) has a monovalent group having 2 to 40 carbon atoms represented by the following formula (c). Rf1 - ORf2- (c) Rf1 : a polyfluoroalkyl group having 1 to 6 carbon atoms Rf2 : a polyfluoroalkyl group having an ethereal oxygen atom between carbon atoms, wherein Rf1 - ORf2- has at least one -O- CF2- group. [2] The positive photosensitive resin composition as described in [1], wherein in the above formula (c), Rf1 is a perfluoroalkyl group having 1 to 6 carbon atoms, and Rf2 is a perfluoroalkylene group which may have an ethereal oxygen atom between carbon atoms. [3] The positive photosensitive resin composition as described in [1] or [2], wherein the ink repellent (C) has a silane skeleton and a weight average molecular weight (Mw) of 500 to 2000. [4] The positive photosensitive resin composition as described in any one of [1] to [3], wherein the ink repellent (C) has an acrylic skeleton and a weight average molecular weight (Mw) of 6000 to 200000. [5] The positive photosensitive resin composition as described in any one of [1] to [4], wherein the fluorine atom content of the ink repellent (C) is 1 to 45% by mass. [6] The positive photosensitive resin composition as described in any one of [1] to [5], wherein the photosensitive agent (B) is a compound having a quinonediazide group. [7] The positive photosensitive resin composition as described in any one of [1] to [6], further comprising a solvent (D). [8] The positive photosensitive resin composition as described in any one of [1] to [7], further comprising a thermosetting agent (E). [9] The positive photosensitive resin composition as described in any one of [1] to [8], further comprising a thermosetting accelerator (F). [10] A positive photosensitive resin composition as described in any one of [1] to [9], further comprising a colorant (G). [11] A barrier wall, which is formed in a morphology of dividing a substrate surface into a plurality of zones for forming pixels, and comprises a cured film of the positive photosensitive resin composition as described in any one of [1] to [10]. [12] An optical element, which comprises a substrate, a plurality of pixels formed on the surface of the substrate, and barrier walls located between adjacent pixels, and the barrier walls comprise a cured film of the positive photosensitive resin composition as described in any one of [1] to [10]. [13] An optical element as described in [12], wherein the optical element is a color filter, a TFT array, or an organic EL element. [Examples]
使用以下實施例更詳細地說明本發明,但本發明並非限定於該等實施例而解釋者。The present invention is described in more detail using the following examples, but the present invention is not limited to these examples.
各測定係藉由以下方法進行。 [數量平均分子量(Mn)及重量平均分子量(Mw)] 使用市售之GPC測定裝置(東曹公司製造,裝置名:HLC-8320GPC),測定作為分子量測定用之標準試樣而於市面上有售之聚合度不同之數種單分散聚苯乙烯聚合物的凝膠滲透層析(GPC),並基於聚苯乙烯之分子量與保持時間(滯留時間)之關係製作校準曲線。 利用四氫呋喃將試樣稀釋為1.0質量%,使其通過0.5 μm之過濾器後,使用上述GPC測定裝置對與該試樣相關之GPC進行測定。 使用上述校準曲線,對試樣之GPC光譜進行電腦解析,藉此求出該試樣之數量平均分子量(Mn)及重量平均分子量(Mw)。 Each measurement was performed by the following method. [Number average molecular weight (Mn) and weight average molecular weight (Mw)] Using a commercially available GPC measuring apparatus (manufactured by Tosoh Corporation, apparatus name: HLC-8320GPC), several commercially available monodisperse polystyrene polymers with different polymerization degrees were measured by gel permeation chromatography (GPC) as standard samples for molecular weight measurement, and a calibration curve was prepared based on the relationship between the molecular weight and retention time (retention time) of polystyrene. After diluting the sample to 1.0 mass % with tetrahydrofuran and passing it through a 0.5 μm filter, the GPC related to the sample was measured using the above-mentioned GPC measuring apparatus. Using the above calibration curve, the GPC spectrum of the sample is analyzed by computer to obtain the number average molecular weight (Mn) and weight average molecular weight (Mw) of the sample.
[鹼可溶性樹脂(A)] A1:N-苯基順丁烯二醯亞胺、甲基丙烯酸苄酯、及丙烯酸之共聚物(Mw6200,固形物成分20%) A2:N-環己基順丁烯二醯亞胺、甲基丙烯酸甲酯、甲基丙烯酸4-羥基苯酯、及丙烯酸之共聚物(Mw4800,固形物成分20%) [Alkali-soluble resin (A)] A1: Copolymer of N-phenylmaleimide, benzyl methacrylate, and acrylic acid (Mw6200, solid content 20%) A2: Copolymer of N-cyclohexylmaleimide, methyl methacrylate, 4-hydroxyphenyl methacrylate, and acrylic acid (Mw4800, solid content 20%)
[感光劑(B)] B1:(4-{4-[1,1-雙(4-羥基苯基)乙基]-α,α-二甲基苄基}苯酚與6-重氮-5,6-二氫-5-氧代-萘-1-磺酸之(單~四)酯) [Photosensitive agent (B)] B1: (4-{4-[1,1-bis(4-hydroxyphenyl)ethyl]-α,α-dimethylbenzyl}phenol and 6-diazo-5,6-dihydro-5 -Oxo-naphthalene-1-sulfonic acid (mono-tetra)ester)
[撥墨劑(C)] 將撥墨劑C1-1~C1-4中使用之水解性矽烷化合物示於以下。 [Ink repellent (C)] The hydrolyzable silane compounds used in ink repellents C1-1 to C1-4 are shown below.
[化1] [Chemistry 1]
撥墨劑C1-1: 使用藉由以下方法合成者。 將表1所示之水解性矽烷化合物、及丙二醇單甲醚(PGME)以表1所示之調配量混合直至變均勻。 於混合溶液中滴加1%硝酸水溶液6.29 g。滴加結束後,於40℃下攪拌5小時而進行反應,獲得撥墨劑(C1-1)之PGME溶液(撥墨劑(C1-1)濃度:10質量%,以下亦稱為「撥墨劑(C1-1)溶液」)。 Ink repellent C1-1: Use those synthesized by the following method. Mix the hydrolyzable silane compound shown in Table 1 and propylene glycol monomethyl ether (PGME) in the amounts shown in Table 1 until uniform. Add 6.29 g of 1% nitric acid aqueous solution dropwise to the mixed solution. After the dropwise addition, the mixture was stirred at 40° C. for 5 hours to react, and a PGME solution of the ink repellent agent (C1-1) was obtained (ink repellent agent (C1-1) concentration: 10 mass%, also referred to as "ink repellent agent (C1-1)" below). Agent (C1-1) solution").
撥墨劑C1-2~C1-4: 以與撥墨劑C1-1同樣之順序,變更為表1中所記載之材料與調配量而製作。 Ink repellent C1-2~C1-4: Prepare in the same order as ink repellent C1-1, but change the materials and mixing amounts listed in Table 1.
[表1]
將撥墨劑C2-1~C2-4中使用之含氟單體示於以下。 a1-1:CF 3O(CF 2CF 2O) 7CF 2CH 2OCOCH=CH 2a1-2:CF 3O(CF 2CF 2O) 2CF 2CH 2OCOCH=CH 2a6-1:nC 6F 13CH 2CH 2OCOC(CH 3)=CH 2 The fluorine-containing monomers used in ink repellents C2-1 to C2-4 are shown below. a1-1: CF 3 O(CF 2 CF 2 O) 7 CF 2 CH 2 OCOCH=CH 2 a1-2: CF 3 O(CF 2 CF 2 O) 2 CF 2 CH 2 OCOCH=CH 2 a6-1: nC 6 F 13 CH 2 CH 2 OCOC(CH 3 )=CH 2
撥墨劑C2-1: 使用藉由以下方法合成者。 (步驟1)一面將表2所示之各原料(單位:g)於氮氣氣氛下攪拌,一面於50℃下進行24小時聚合。進而於70℃下進行5小時加熱,使聚合起始劑惰性化,而獲得共聚物之溶液。共聚物之數量平均分子量為5300,質量平均分子量為13100。 (步驟2)繼而,一面將上述共聚物之溶液(130.0 g)、異氰酸1,1-(雙丙烯醯氧基甲基)乙酯(33.5 g)、二月桂酸二丁基錫(0.13 g)、第三丁基對苯醌(1.5 g)攪拌,一面於40℃下使其聚合24小時。 使用己烷對聚合物進行精製,繼而進行乾燥,而獲得撥墨劑(C2-1)65.6 g。其後,利用PGMEA進行稀釋,獲得撥墨劑(C2-1)之PGMEA溶液(撥墨劑(C2-1)濃度:10質量%。以下亦稱為「撥墨劑(C2-1)溶液」)。 Ink repellent C2-1: Use those synthesized by the following method. (Step 1) While stirring each raw material (unit: g) shown in Table 2 in a nitrogen atmosphere, polymerization was performed at 50° C. for 24 hours. Furthermore, the mixture was heated at 70° C. for 5 hours to inert the polymerization initiator, thereby obtaining a solution of the copolymer. The number average molecular weight of the copolymer is 5300, and the mass average molecular weight is 13100. (Step 2) Next, add the solution of the above copolymer (130.0 g), 1,1-(bisacryloxymethyl)ethyl isocyanate (33.5 g), and dibutyltin dilaurate (0.13 g). , tert-butyl-p-benzoquinone (1.5 g) was stirred while polymerizing at 40°C for 24 hours. The polymer was purified using hexane and then dried to obtain 65.6 g of ink repellent agent (C2-1). Thereafter, PGMEA was diluted with PGMEA to obtain a PGMEA solution of the ink repellent agent (C2-1) (ink repellent agent (C2-1) concentration: 10 mass %. Hereinafter, it is also referred to as "ink repellent agent (C2-1) solution" ).
撥墨劑C2-2:Ink repellent C2-2:
以與撥墨劑C2-1同樣之順序,變更為表2中所記載之材料與調配量而製作。 步驟1中獲得之共聚物之數量平均分子量為5570,質量平均分子量為13700。 The same sequence as ink repellent C2-1 was used, except that the materials and amounts listed in Table 2 were used. The number average molecular weight of the copolymer obtained in step 1 was 5570, and the mass average molecular weight was 13700.
撥墨劑C2-3: 以與撥墨劑C2-1同樣之順序,變更為表2中所記載之材料與調配量而製作。 步驟1中獲得之共聚物之數量平均分子量為5540,質量平均分子量為13200。 Ink repellent C2-3: It was produced by following the same procedure as the ink repellent agent C2-1, except that the materials and preparation amounts described in Table 2 were changed. The number average molecular weight of the copolymer obtained in step 1 is 5540, and the mass average molecular weight is 13200.
撥墨劑C2-4: 以與撥墨劑C2-1同樣之順序,變更為表2中所記載之材料與調配量而製作。 步驟1中獲得之共聚物之數量平均分子量為2990,質量平均分子量為121000。 Ink repellent C2-4: It was produced by following the same procedure as the ink repellent agent C2-1, except that the materials and preparation amounts described in Table 2 were changed. The number average molecular weight of the copolymer obtained in step 1 was 2990, and the mass average molecular weight was 121000.
[表2]
[硬化劑(E)] E1:2-[4-(2,3-環氧丙氧基)苯基-2-[4-[1,1-雙[4-([2,3-環氧丙氧基]苯基]乙基]苯基]丙烷 E2:由1,4-環己烷二甲醇二烯丙醚之過氧化氫引起之縮水甘油醚化反應產物 E3:N,N,N',N'-四縮水甘油基-間苯二甲胺 E4:環氧化丁烷四羧酸四-(3-環己烯基甲基)修飾ε-己內醯胺 [Hardener (E)] E1: 2-[4-(2,3-glycidyloxy)phenyl-2-[4-[1,1-bis[4-([2,3-glycidyloxy]phenyl]ethyl]phenyl]propane E2: Glycidyl etherification product of 1,4-cyclohexanedimethanol diallyl ether with hydrogen peroxide E3: N,N,N',N'-tetraglycidyl-m-phenylenediamine E4: Epoxybutanetetracarboxylic acid tetra-(3-cyclohexenylmethyl) modified ε-caprolactam
[溶劑(D)] EDM:二乙二醇乙基甲醚(沸點176℃) EDEGAC:二乙二醇單乙醚乙酸酯(沸點217℃) PGME:丙二醇單甲醚(沸點120℃) PGMEA:丙二醇單甲醚乙酸酯(沸點146℃) [Solvent (D)] EDM: diethylene glycol ethyl methyl ether (boiling point 176°C) EDEGAC: diethylene glycol monoethyl ether acetate (boiling point 217°C) PGME: propylene glycol monomethyl ether (boiling point 120°C) PGMEA: propylene glycol monomethyl ether acetate (boiling point 146°C)
<例1~例10> 以表3中所記載之比率攪拌原料直至變均勻(約30分鐘),而製備正型感光性樹脂組合物。使用該正型感光性樹脂組合物,並分別藉由下述方法進行評價。 再者,例1~例8為實施例,例9~例10為比較例。 <Example 1 to Example 10> The raw materials were stirred at the ratios listed in Table 3 until they became uniform (about 30 minutes) to prepare a positive photosensitive resin composition. The positive photosensitive resin composition was used and evaluated by the following methods. In addition, Examples 1 to 8 are implementation examples, and Examples 9 to 10 are comparative examples.
<測定條件、評價條件> [評價用樣品] 使用表3中所記載之正型感光性樹脂組合物,於ITO基板上製作硬化膜,而設為評價用樣品。準備評價用樣品1與2兩種作為評價用樣品。 使用評價用樣品1評價IJ(Ink Jet,噴墨)塗佈性與殘渣。 使用評價用樣品2評價撥墨性。 <Measurement conditions, evaluation conditions> [Sample for evaluation] Using the positive photosensitive resin composition described in Table 3, a cured film was produced on an ITO substrate and used as a sample for evaluation. Two types of evaluation samples, 1 and 2, were prepared as evaluation samples. Sample 1 for evaluation was used to evaluate IJ (Ink Jet) coating properties and residue. The ink repellency was evaluated using Sample 2 for evaluation.
[評價用樣品1] 將ITO基板(倉元製作所公司製造之電阻值10 Ω/sq以下之ITO品,尺寸7.5 cm×7.5 cm×0.7 mm)於乙醇中進行超音波洗淨(30秒鐘)。繼而進行5分鐘紫外線/臭氧洗淨(裝置:PL7-200 Sen Engineering公司製造)。 於上述洗淨後之玻璃基板表面,使用旋轉器(Mikasa股份有限公司 IH-DX2),將正型感光性樹脂組合物以轉速610 rpm保持10秒鐘,並旋轉塗佈(於轉速610 rpm下10秒鐘)。其次,於100℃下於加熱板上乾燥2分鐘,製作膜厚1.3 μm之膜。 將所獲得之膜之表面於以下之條件下進行曝光。 <條件> [光罩]:於20 mm×20 mm之範圍內以如下圖案具有開口部。 開口部形狀:100 μm×200 μm 遮光部之圖案間隔:20 μm [燈]:牛尾電機公司製造之USH-255BY,365 nm換算之曝光功率(曝光輸出)為25 mW/cm 2[照射條件]:對330 nm以下之光進行截止,此時隔開50 μm之間隙,並以25 mW/cm 2進行8秒鐘照射。 將曝光後之經處理之ITO基板浸漬於氫氧化四甲基銨水溶液(0.4質量%)中40秒鐘而進行顯影。其後,進行水洗與乾燥。 將乾燥後之基板於加熱板上加熱(於220℃下60分鐘),製作含有具有特定圖案之硬化膜之ITO基板(評價用樣品1)。 [Sample 1 for evaluation] An ITO substrate (ITO product with a resistance value of 10 Ω/sq or less manufactured by Kuramoto Seisakusho Co., Ltd., size 7.5 cm×7.5 cm×0.7 mm) was ultrasonically cleaned in ethanol (30 seconds). Then, ultraviolet/ozone cleaning is performed for 5 minutes (device: PL7-200 manufactured by Sen Engineering Co., Ltd.). On the surface of the above-cleaned glass substrate, use a spinner (Mikasa Co., Ltd. IH-DX2) to hold the positive photosensitive resin composition at a rotation speed of 610 rpm for 10 seconds, and spin-coat (at a rotation speed of 610 rpm 10 seconds). Next, it was dried on a hot plate at 100° C. for 2 minutes to prepare a film with a thickness of 1.3 μm. The surface of the obtained film was exposed under the following conditions. <Conditions> [Mask]: It has openings in the following pattern within the range of 20 mm × 20 mm. Opening shape: 100 μm × 200 μm Pattern spacing of light shielding part: 20 μm [Lamp]: USH-255BY manufactured by Ushio Electric Co., Ltd., exposure power (exposure output) converted to 365 nm is 25 mW/cm 2 [Irradiation conditions] : Cut off light below 330 nm, separate a gap of 50 μm, and irradiate for 8 seconds at 25 mW/ cm2 . The exposed and treated ITO substrate was immersed in an aqueous tetramethylammonium hydroxide solution (0.4% by mass) for 40 seconds to develop. Thereafter, water washing and drying are performed. The dried substrate was heated on a hot plate (at 220° C. for 60 minutes) to prepare an ITO substrate (evaluation sample 1) including a cured film having a specific pattern.
[評價用樣品2] 除了進行曝光之步驟以外,還藉由與評價用樣品1同樣之方法製作評價用樣品2。 [Sample 2 for evaluation] An evaluation sample 2 was produced in the same manner as the evaluation sample 1 except for the step of exposure.
[IJ塗佈性] 於由評價用樣品1之阻隔壁圍成之點內部,使用IJ裝置(LaboJET 500 Microjet公司製造),滴加1%TPD(三苯基二胺)之環己基苯溶液20 pl。確認乾燥後之點內部之乾燥物之擴散。再者,判定設為下述基準。 ○:於點內均勻地擴散,且材料到達阻隔壁邊緣。 ×:於點內未擴散。 [IJ coating properties] Using an IJ device (manufactured by LaboJET 500 Microjet), 20 pl of a cyclohexylbenzene solution of 1% TPD (triphenyldiamine) was added dropwise inside the point surrounded by the barrier wall of sample 1 for evaluation. Check the spread of dry matter inside the dried spot. In addition, the following criteria were used for judgment. ○: Spread evenly within the point, and the material reaches the edge of the barrier rib. ×: Not spread within the point.
[顯影殘渣] 對由評價用樣品1之阻隔壁圍成之點內部進行殘渣量測定。 藉由μ-XPS法(X-ray photoelectron spectroscopy,X射線光電子光譜法)測定障壁去除部之ITO面之殘渣量。 <測定條件> 測定裝置:ULVAC-PHI公司製造 QuanteraSXM X射線條件:50 μmΦ 12.5 W 15 kV 光柵尺寸:點(point) 試樣角度:45度 採集週期(Acquisition cycle):18 通能步長(Pass Energy Step):以0.4 eV進行測定,並以C/In將測定資料數值化。 ◎:4以下 ○:大於4且5以下 △:大於5且8以下 ×:大於8 將◎、○、△評價為合格。 [Development residue] The residue amount was measured inside the point surrounded by the barrier wall of Sample 1 for evaluation. The amount of residue on the ITO surface of the barrier removal part was measured by the μ-XPS method (X-ray photoelectron spectroscopy, X-ray photoelectron spectroscopy). <Measurement conditions> Measuring device: QuanteraSXM manufactured by ULVAC-PHI X-ray conditions: 50 μmΦ 12.5 W 15 kV Raster size: point Sample angle: 45 degrees Acquisition cycle: 18 Pass Energy Step: Measure at 0.4 eV, and digitize the measurement data as C/In. ◎:4 or less ○: More than 4 and less than 5 △: Greater than 5 and less than 8 ×: greater than 8 ◎, ○, and △ were evaluated as passing.
[撥墨性] 對上評價用樣品2,藉由θ/2法測定膜表面對PGMEA之接觸角。評價為以下基準。 ◎:45°以上 ○:40°以上且未達45° △:30°以上且未達40° ×:未達30° 將◎、○、△評價為合格。 [Ink repellency] For the above evaluation sample 2, the contact angle of the film surface with respect to PGMEA was measured by the θ/2 method. The evaluation is based on the following criteria. ◎:Above 45° ○:Above 40° and less than 45° △: More than 30° and less than 40° ×: Less than 30° ◎, ○, and △ were evaluated as passing.
將評價結果示於表3。The evaluation results are shown in Table 3.
[表3]
根據上述結果,於使用具有聚氟醚結構之撥墨劑之例1~例8之正型感光性樹脂組合物中,所獲得之硬化膜於IJ塗佈性、殘渣去除性、撥墨性之所有評價中為合格基準以上。 於撥墨劑不具有聚氟醚結構之例9~例10之正型感光性樹脂組合物中,所獲得之硬化膜之IJ塗佈性、與殘渣去除性及撥墨性之一者成為較低之結果。 若對例1、例3、例4、例9中之撥墨劑之氟含量進行比較,則例1、例3、例4中之撥墨劑C1-1~C1-3與例9中之撥墨劑C1-4相比,雖然氟含量較低,但關於塗佈性,例1、例3、例4成為良好之結果。 若對例5~例6與例10中之撥墨劑之氟含量進行比較,則例5~例6中之撥墨劑C2-1~C2-2與例10中之撥墨劑C2-3相比,雖然氟含量較低,但關於塗佈性,例5~例6成為良好之結果。 又,根據例1與例4之對比,利用使用含有氟之矽烷化合物、及不含氟之矽烷化合物所獲得之撥墨劑C1-3之例4與例1相比,殘渣去除性提高。認為其原因在於:藉由併用不含氟之矽烷化合物,進行了水解之矽烷醇基之殘基容易殘留,親水性提高,顯影液之滲透性增加,而容易去除殘渣。 According to the above results, in the positive photosensitive resin compositions of Examples 1 to 8 using ink repellents having a polyfluoroether structure, the cured films obtained were above the pass standard in all evaluations of IJ coating, residue removal, and ink repellency. In the positive photosensitive resin compositions of Examples 9 and 10 in which the ink repellents did not have a polyfluoroether structure, the cured films obtained had lower IJ coating, and either the residue removal or ink repellency. If the fluorine content of the ink repellents in Examples 1, 3, 4, and 9 is compared, the ink repellents C1-1 to C1-3 in Examples 1, 3, and 4 have lower fluorine content than the ink repellent C1-4 in Example 9, but Examples 1, 3, and 4 have good results in terms of coating properties. If the fluorine content of the ink repellents in Examples 5 to 6 and 10 is compared, the ink repellents C2-1 to C2-2 in Examples 5 to 6 have lower fluorine content than the ink repellent C2-3 in Example 10, but Examples 5 to 6 have good results in terms of coating properties. Furthermore, according to the comparison between Example 1 and Example 4, the ink repellent C1-3 obtained by using the fluorine-containing silane compound and the fluorine-free silane compound in Example 4 has improved residue removal performance compared with Example 1. It is believed that the reason is that by using the fluorine-free silane compound, the residue of the hydrolyzed silanol group is easy to remain, the hydrophilicity is improved, the permeability of the developer is increased, and the residue is easy to remove.
又,參照特定之實施態樣而詳細地對本發明進行了說明,但業者明瞭可於不脫離本發明之精神與範圍之情況下施加各種變更或修正。本申請案係基於2022年8月19日提出申請之日本專利申請(日本專利特願2022-131378)者,其內容係以參照之形式併入至本文中。 [產業上之可利用性] In addition, the present invention has been described in detail with reference to specific implementation modes, but the industry understands that various changes or modifications can be made without departing from the spirit and scope of the present invention. This application is based on the Japanese patent application (Japanese Patent Application No. 2022-131378) filed on August 19, 2022, and its contents are incorporated into this article by reference. [Industrial Applicability]
本發明之正型感光性樹脂組合物能夠製造撥墨性優異,且於點中殘留物較少之阻隔壁,可適宜地用於利用噴墨記錄技術法之彩色濾光片之製造、有機EL元件之製造、有機TFT陣列之製造中之阻隔壁的形成,尤其可適宜地用於大面積基板之阻隔壁之形成。The positive photosensitive resin composition of the present invention can produce barrier ribs with excellent ink repellency and less residue in dots, and can be suitably used for the production of color filters and organic EL using inkjet recording technology. The formation of barrier ribs in the manufacture of components and organic TFT arrays is particularly suitable for the formation of barrier ribs on large-area substrates.
1:基板 2:正型感光性樹脂組合物之塗膜 3:塗膜之未曝光部分 4:光罩 5:光 6:阻隔壁 7:點 10:噴墨方式中所使用之光學元件用基板 1:Substrate 2: Coating film of positive photosensitive resin composition 3: The unexposed part of the coating film 4: Photomask 5:Light 6: Barrier wall 7:00 10: Substrate for optical components used in inkjet method
圖1之(I)~圖1之(III)係模式性地表示使用本發明之正型感光性樹脂組合物之光學元件用阻隔壁之製造例的步驟圖,圖1之(I)表示於基板上形成包含本發明之正型感光性樹脂組合物之塗膜的步驟,圖1之(II)表示曝光步驟,且圖1之(III)係表示顯影步驟後之基板、及形成於基板上之阻隔壁之剖面圖。1(I) to 1(III) are step diagrams schematically showing an example of manufacturing a barrier rib for an optical element using the positive photosensitive resin composition of the present invention, and FIG. 1(I) is shown in The step of forming a coating film containing the positive photosensitive resin composition of the present invention on a substrate. (II) of Figure 1 shows the exposure step, and (III) of Figure 1 shows the substrate after the development step and the formation on the substrate. Sectional view of the barrier wall.
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