[go: up one dir, main page]

TW202306703A - Method of shaping cutting blade capable of shaping the shape of the cutting blade easily and at low cost - Google Patents

Method of shaping cutting blade capable of shaping the shape of the cutting blade easily and at low cost Download PDF

Info

Publication number
TW202306703A
TW202306703A TW111129153A TW111129153A TW202306703A TW 202306703 A TW202306703 A TW 202306703A TW 111129153 A TW111129153 A TW 111129153A TW 111129153 A TW111129153 A TW 111129153A TW 202306703 A TW202306703 A TW 202306703A
Authority
TW
Taiwan
Prior art keywords
shaping
cutting
cutting insert
cutting blade
unit
Prior art date
Application number
TW111129153A
Other languages
Chinese (zh)
Inventor
馬路良吾
楠部浩司
Original Assignee
日商迪思科股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商迪思科股份有限公司 filed Critical 日商迪思科股份有限公司
Publication of TW202306703A publication Critical patent/TW202306703A/en

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/06Grinders for cutting-off
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/06Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12Dressing tools; Holders therefor
    • H10P72/0428

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Dicing (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)

Abstract

[課題]提供一種可以容易地且以低成本方式來將切削刀片的形狀整形之切削刀片之整形方法。 [解決手段]一種切削刀片之整形方法,具備以下步驟:整形準備步驟,設成使旋轉之切削刀片21的前端對已以工作夾台10保持之磨刀板200切入預定量201之狀態;及整形步驟,在整形準備步驟實施後,一邊使切削刀片21在主軸的軸心方向上移動一邊使切削刀片21上升,而在切削刀片21的前端的單面(面26)側形成傾斜面28,重複整形準備步驟以及整形步驟,直到切削刀片21的傾斜面28成為期望的角度或寬度為止。 [Problem] To provide a shaping method of a cutting insert capable of shaping the shape of the cutting insert easily and at low cost. [Solution] A method for shaping a cutting blade, comprising the following steps: a shaping preparation step, which is set so that the front end of the rotating cutting blade 21 cuts into a predetermined amount 201 of the sharpening plate 200 held by the work clamp 10; and In the shaping step, after the shaping preparation step is implemented, the cutting insert 21 is raised while moving the cutting insert 21 in the axial direction of the main shaft, and the inclined surface 28 is formed on the single surface (surface 26) side of the front end of the cutting insert 21, The shaping preparation step and shaping step are repeated until the inclined surface 28 of the cutting insert 21 becomes a desired angle or width.

Description

切削刀片之整形方法Shaping method of cutting insert

本發明是有關於一種切削刀片之整形方法。The invention relates to a shaping method of a cutting blade.

為了以切削刀片將半導體器件晶圓、或陶瓷基板、玻璃基板、樹脂封裝基板等各種板狀的被加工物切斷並分割成一個個的晶片,而使用有切削裝置(切割機)。在通常的切割中,雖然會將基板全切來分割,但為了抑制晶片的缺損、形成V溝或在晶片形成傾斜面,有時會使用前端形狀為V形狀之切削刀片來進行切割或開槽(參照例如專利文獻1、2及3)。 先前技術文獻 專利文獻 A cutting device (dicing machine) is used to cut and divide various plate-shaped workpieces such as semiconductor device wafers, ceramic substrates, glass substrates, and resin package substrates into individual wafers with cutting blades. In normal dicing, although the substrate is fully cut and divided, in order to suppress chipping, form a V-groove, or form an inclined surface on the wafer, a cutting blade with a V-shaped tip may be used for dicing or grooving. (See, for example, Patent Documents 1, 2 and 3). prior art literature patent documents

專利文獻1:日本特開2004-039906號公報 專利文獻2:日本特開2012-044096號公報 專利文獻3:日本特開2019-160887號公報 Patent Document 1: Japanese Patent Laid-Open No. 2004-039906 Patent Document 2: Japanese Patent Laid-Open No. 2012-044096 Patent Document 3: Japanese Patent Laid-Open No. 2019-160887

發明欲解決之課題The problem to be solved by the invention

在該情況下,刀片前端會因為消耗而易於使形狀崩壞,且若在每次形狀崩壞時就將切削刀片更換為新品,會導致切削刀片的成本變得很龐大。於是,雖然已構思有用於將切削刀片的形狀整形之加工裝置,但是必須重新導入設備,而有無法容易地實施之問題。又,若一開始就從刀片製造商購入已於前端附加有角度之整形完畢刀片,且裝設到主軸時,會成為主軸的旋轉中心與切削刀片的中心偏離,而呈稍微偏心之狀態。又,若為了修正偏心而進行修整,會因為切削刀片的消耗而導致刀尖的形狀快速地變化,所以還是存在有無法進行修整,因此也無法修正偏心之問題。In this case, the front end of the insert tends to be broken in shape due to consumption, and the cost of the cutting insert becomes large if the cutting insert is replaced with a new one every time the shape breaks. Therefore, although a processing device for shaping the shape of the cutting insert has been conceived, it has to be re-introduced into equipment, and there is a problem that it cannot be easily implemented. Also, if you buy a trimmed blade with an angle attached to the front end from the blade manufacturer and install it on the spindle, the rotation center of the spindle will deviate from the center of the cutting blade, resulting in a slightly eccentric state. In addition, if dressing is performed to correct eccentricity, the shape of the cutting edge changes rapidly due to wear of the cutting insert, so there is still a problem that dressing cannot be performed, and thus eccentricity cannot be corrected.

本發明是有鑒於所述之問題點而作成的發明,其目的在於提供一種可以容易地且以低成本方式來將切削刀片的形狀整形之切削刀片之整形方法。 用以解決課題之手段 The present invention was made in view of the aforementioned problems, and an object of the present invention is to provide a cutting insert shaping method capable of shaping the shape of the cutting insert easily and at low cost. means to solve problems

為了解決上述之課題並達成目的,本發明的切削刀片之整形方法是使用切削裝置來將該切削刀片整形之切削刀片之整形方法,前述切削裝置具備:工作夾台,以保持面保持被加工物;切削單元,將圓環狀的切削刀片裝設在具備和該保持面平行的軸心之主軸,來對已保持在該工作夾台之被加工物進行切削;及移動單元,使該工作夾台與該切削單元相對地移動,前述切削刀片之整形方法具備以下步驟: 整形準備步驟,設成使旋轉之切削刀片的前端,對已以該工作夾台保持之磨刀板切入預定量之狀態;及 整形步驟,在該整形準備步驟實施後,一邊使該切削刀片在該主軸的軸心方向上移動一邊使該切削刀片上升,而在該切削刀片前端的單面側形成傾斜面, 重複該整形準備步驟以及該整形步驟,直到該切削刀片的傾斜面成為期望的角度或寬度為止。 In order to solve the above-mentioned problems and achieve the purpose, the cutting insert shaping method of the present invention is a cutting insert shaping method that uses a cutting device to shape the cutting insert. The cutting device is equipped with a work chuck that holds a workpiece with a holding surface. ; The cutting unit is equipped with a circular cutting blade on the main shaft with an axis parallel to the holding surface to cut the workpiece that has been held on the work clamp table; and the moving unit makes the work clamp The table moves relative to the cutting unit, and the method for shaping the cutting blade has the following steps: The preparatory step for shaping is set so that the front end of the rotating cutting blade cuts into the sharpening plate held by the work clamp by a predetermined amount; and In the shaping step, after the shaping preparation step is performed, the cutting insert is raised while moving the cutting insert in the axial direction of the spindle to form an inclined surface on one side of the front end of the cutting insert, The shaping preparation step and the shaping step are repeated until the inclined surface of the cutting insert becomes a desired angle or width.

該整形步驟亦可對該主軸的軸心方向的正方向以及負方向之雙方實施,並在該切削刀片的一面以及另一面雙方的前端形成傾斜面。The shaping step may be performed in both the positive direction and the negative direction of the shaft center direction of the main shaft, and inclined surfaces may be formed at the front ends of both one side and the other side of the cutting insert.

亦可為:更具備消耗量測定步驟,前述消耗量測定步驟是在該整形步驟實施後,且再次實施該整形準備步驟之前,測定該切削刀片的消耗量之步驟,即使該切削刀片已消耗,在該整形準備步驟中該切削刀片仍切入預定量。 發明效果 It is also possible to further include a consumption measurement step, the aforementioned consumption measurement step is a step of measuring the consumption of the cutting insert after the shaping step is performed and before the shaping preparation step is performed again, even if the cutting insert has been consumed, The cutting insert still cuts into a predetermined amount during the shaping preparation step. Invention effect

本發明可以容易且以低成本方式來將切削刀片的形狀整形。The invention makes it possible to shape the cutting insert easily and at low cost.

用以實施發明之形態form for carrying out the invention

針對用於實施本發明之形態(實施形態),一面參照圖式一面詳細地說明。本發明並非因以下的實施形態所記載之內容而受到限定之發明。又,在以下所記載之構成要素中,包含所屬技術領域中具有通常知識者可以容易地設想得到的構成要素、實質上相同的構成要素。此外,以下所記載之構成是可適當組合的。又,在不脫離本發明之要旨的範圍內,可進行構成之各種省略、置換或變更。The form (embodiment) for carrying out this invention is demonstrated in detail, referring drawings. The present invention is not limited by the contents described in the following embodiments. In addition, the constituent elements described below include constituent elements that can be easily assumed by those skilled in the art and substantially the same constituent elements. In addition, the configurations described below can be appropriately combined. In addition, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[實施形態] 依據圖式來說明本發明的實施形態之切削刀片之整形方法。圖1是顯示實施實施形態之切削刀片之整形方法的切削裝置1的構成例的立體圖。圖2是顯示圖1之切削裝置1的切削單元20的分解立體圖。如圖1所示,切削裝置1具備工作夾台10、切削單元20、移動單元30、拍攝單元40與控制單元50。 [implementation form] A method of shaping a cutting insert according to an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing a configuration example of a cutting device 1 according to a method of shaping a cutting insert according to an embodiment. FIG. 2 is an exploded perspective view showing the cutting unit 20 of the cutting device 1 in FIG. 1 . As shown in FIG. 1 , the cutting device 1 includes a work chuck 10 , a cutting unit 20 , a moving unit 30 , an imaging unit 40 and a control unit 50 .

在本實施形態中,切削裝置1所切削加工之切削加工對象即被加工物100為例如以矽、藍寶石、碳化矽(SiC)、砷化鎵等作為母材之圓板狀的半導體器件晶圓或光器件晶圓等。如圖1所示,被加工物100在平坦的正面101之藉由形成為格子狀之複數條分割預定線102所區劃出的區域中形成有器件103。在本實施形態中,雖然被加工物100在正面101的背側之背面104貼附黏著膠帶105,且在黏著膠帶105的外緣部裝設有環狀框架106,但在本發明中並非限定於此。又,在本發明中,被加工物100亦可為具有複數個被樹脂所密封的器件之矩形狀的封裝基板、陶瓷板、或玻璃板等。In this embodiment, the cutting object 100 to be cut by the cutting device 1 is, for example, a disc-shaped semiconductor device wafer made of silicon, sapphire, silicon carbide (SiC), gallium arsenide, etc. as a base material. Or optical device wafers, etc. As shown in FIG. 1 , a device 103 is formed on a flat front surface 101 of a workpiece 100 defined by a plurality of planned division lines 102 formed in a lattice. In this embodiment, although the adhesive tape 105 is pasted on the back side 104 of the back side of the front side 101 of the workpiece 100, and the ring-shaped frame 106 is installed on the outer edge of the adhesive tape 105, this is not a limitation in the present invention. here. In addition, in the present invention, the workpiece 100 may be a rectangular package substrate, a ceramic plate, a glass plate, or the like having a plurality of devices sealed with resin.

工作夾台10具備形成有凹部之圓板狀的框體、與嵌入於凹部內之圓板狀的吸附部。工作夾台10的吸附部是由具備有多孔(porous)狀的多孔陶瓷等所形成,且已透過未圖示之真空吸引路徑來和未圖示之真空吸引源連接。工作夾台10的吸附部的上表面是可載置被加工物100,並吸引保持已載置之被加工物100的保持面11。在本實施形態中,保持面11可供被加工物100將正面101朝向上方來載置,而從背面104側隔著黏著膠帶105來吸引保持已載置之被加工物100。保持面11與工作夾台10的框體的上表面是配置在同一平面上,且為平行於水平面即XY平面地形成。工作夾台10藉由移動單元30的X軸移動單元31而在水平方向的一個方向即X軸方向上移動自如,且藉由未圖示之旋轉驅動源而繞著和為鉛直方向且為相對於保持面11垂直之Z軸方向平行之軸心旋轉自如地設置。The work chuck 10 includes a disk-shaped frame body formed with a concave portion, and a disk-shaped suction portion fitted in the concave portion. The suction portion of the chuck 10 is formed of porous ceramics or the like, and is connected to a vacuum suction source (not shown) through a vacuum suction path (not shown). The upper surface of the suction part of the work chuck 10 is a holding surface 11 on which a workpiece 100 can be placed and the placed workpiece 100 can be sucked and held. In this embodiment, the holding surface 11 allows the workpiece 100 to be placed with the front surface 101 facing upward, and the placed workpiece 100 is sucked and held from the back surface 104 side through the adhesive tape 105 . The holding surface 11 is arranged on the same plane as the upper surface of the frame of the chuck table 10, and is formed parallel to the XY plane which is a horizontal plane. The work clamp table 10 can move freely in one direction in the horizontal direction, that is, in the X-axis direction by the X-axis moving unit 31 of the moving unit 30, and is rotated around and in the vertical direction and opposite to each other by a rotary drive source not shown. The axis parallel to the Z-axis direction perpendicular to the holding surface 11 is rotatably provided.

如圖2所示,切削單元20具備於前端裝設切削刀片21之主軸22、與安裝座凸緣24。切削刀片21是具有圓環狀的切刃21-1之切削磨石,前述切刃21-1是以金屬或樹脂等之黏結材(結合材)來固定鑽石或CBN(立方氮化硼,Cubic Boron Nitride)等之磨粒而成,且形成為預定厚度。切削刀片21會以隨著進行切削而磨耗切刃21-1的方式來產生自發刃,而始終維持一定以上的鋒利程度。在圖2所示的例子中,雖然切削刀片21是無輪轂刀片,但在本發明中並非限定於此,亦可為在環狀的基台的外周固定有環狀的切刃21-1之輪轂型刀片。As shown in FIG. 2 , the cutting unit 20 includes a main shaft 22 on which a cutting blade 21 is installed at the front end, and a mounting flange 24 . The cutting blade 21 is a cutting grindstone with an annular cutting edge 21-1, and the aforementioned cutting edge 21-1 uses a bonding material (bonding material) such as metal or resin to fix diamond or CBN (cubic boron nitride, Cubic Boron Nitride) and the like, and formed into a predetermined thickness. The cutting insert 21 generates a spontaneous edge so that the cutting edge 21 - 1 is worn away as the cutting progresses, and always maintains a sharpness higher than a certain level. In the example shown in FIG. 2, although the cutting insert 21 is a hubless insert, the present invention is not limited thereto, and may be one in which an annular cutting edge 21-1 is fixed on the outer periphery of an annular base. Hub type blade.

主軸22具備與為水平方向的另一個方向且正交於X軸方向之Y軸方向平行之軸心,亦即與保持面11平行之軸心。安裝座凸緣24將切削刀片21夾入並固定於主軸22的前端。已裝設於主軸22的前端之切削刀片21藉由主軸22的旋轉動作,而被施加繞著和Y軸方向平行之軸心的旋轉動作,並對已保持在工作夾台10之被加工物100進行切削加工。如圖1所示,切削單元20相對於已保持在工作夾台10之被加工物100,藉由移動單元30的Y軸移動單元32而在Y軸方向上移動自如地設置,且藉由移動單元30的Z軸移動單元33而在Z軸方向(升降方向)上移動自如地設置。The main shaft 22 has an axis parallel to the Y-axis direction which is another horizontal direction and perpendicular to the X-axis direction, that is, an axis parallel to the holding surface 11 . The mounting flange 24 sandwiches and fixes the cutting insert 21 to the front end of the spindle 22 . The cutting blade 21 installed at the front end of the spindle 22 is rotated around the axis parallel to the Y-axis direction by the rotation of the spindle 22, and the workpiece held on the work holder 10 is rotated. 100 for cutting. As shown in FIG. 1 , the cutting unit 20 is set movably in the Y-axis direction by the Y-axis moving unit 32 of the moving unit 30 relative to the workpiece 100 held on the work holder 10, and by moving The Z-axis moving unit 33 of the unit 30 is provided movably in the Z-axis direction (lifting direction).

如圖1所示,移動單元30具備X軸移動單元31、Y軸移動單元32與Z軸移動單元33。X軸移動單元31使工作夾台10相對於切削單元20沿著X軸方向(加工進給方向)相對地移動。Y軸移動單元32使切削單元20相對於工作夾台10沿著Y軸方向(分度進給方向)相對地移動。Z軸移動單元33使切削單元20相對於工作夾台10沿著Z軸方向(切入進給方向)相對地移動。如此,移動單元30會使工作夾台10與切削單元20相對地移動。As shown in FIG. 1 , the moving unit 30 includes an X-axis moving unit 31 , a Y-axis moving unit 32 and a Z-axis moving unit 33 . The X-axis moving unit 31 moves the chuck table 10 relative to the cutting unit 20 in the X-axis direction (machining feed direction). The Y-axis moving unit 32 relatively moves the cutting unit 20 in the Y-axis direction (index feed direction) with respect to the chuck table 10 . The Z-axis moving unit 33 relatively moves the cutting unit 20 along the Z-axis direction (cutting feed direction) with respect to the chuck table 10 . In this way, the moving unit 30 relatively moves the work chuck 10 and the cutting unit 20 .

X軸移動單元31、Y軸移動單元32以及Z軸移動單元33均具備習知的滾珠螺桿、習知的脈衝馬達以及習知的導軌,前述滾珠螺桿是繞著軸心旋轉自如地設置,前述脈衝馬達使滾珠螺桿繞著軸心旋轉,前述導軌將工作夾台10或切削單元20支撐成在X軸方向、Y軸方向或Z軸方向上移動自如。又,X軸移動單元31、Y軸移動單元32以及Z軸移動單元33具備檢測工作夾台10或切削單元20的X軸方向、Y軸方向或Z軸方向的位置之習知的位置檢測器,並將以位置檢測器所檢測出之位置輸出至控制單元50。The X-axis moving unit 31, the Y-axis moving unit 32, and the Z-axis moving unit 33 are all equipped with a known ball screw, a known pulse motor and a known guide rail. The aforementioned ball screw is rotatably arranged around the axis. The pulse motor rotates the ball screw around the axis, and the guide rail supports the work chuck 10 or the cutting unit 20 so as to be movable in the X-axis direction, the Y-axis direction, or the Z-axis direction. In addition, the X-axis moving unit 31, the Y-axis moving unit 32, and the Z-axis moving unit 33 are equipped with known position detectors for detecting the positions of the work clamp table 10 or the cutting unit 20 in the X-axis direction, the Y-axis direction, or the Z-axis direction. , and output the position detected by the position detector to the control unit 50 .

切削裝置1是藉由移動單元30來將已裝設於主軸22的前端之切削刀片21相對於已保持在工作夾台10之被加工物100設置(set)在預定的位置,且使切削刀片21一邊旋轉一邊相對於已保持在工作夾台10之被加工物100沿著分割預定線102相對地移動,藉此以切削刀片21沿著分割預定線102對被加工物100進行切削加工。The cutting device 1 uses the moving unit 30 to set the cutting blade 21 mounted on the front end of the main shaft 22 at a predetermined position relative to the workpiece 100 held on the work holder 10, and to make the cutting blade 21 moves relative to the workpiece 100 held on the chuck 10 along the planned dividing line 102 while rotating, whereby the workpiece 100 is cut along the planned dividing line 102 by the cutting blade 21 .

在本實施形態中,拍攝單元40是安裝於切削單元20,且和切削單元20一體地移動。拍攝單元40具備有對已保持在工作夾台10之加工前以及加工後之被加工物100進行拍攝之拍攝元件。拍攝元件可為例如CCD(電荷耦合器件,Charge-Coupled Device)拍攝元件或CMOS(互補式金屬氧化物半導體,Complementary MOS)拍攝元件。拍攝單元40對已保持在工作夾台10之被加工物100進行拍攝,而得到用於完成校準之圖像,並將所得到的圖像輸出至控制單元50,其中前述校準是進行被加工物100與切削刀片21之對位。拍攝單元40對已保持在工作夾台10之被加工物100進行拍攝,而得到用於完成刀痕檢查之圖像,並將所得到的圖像輸出至控制單元50,其中前述刀痕檢查是確認形成於被加工物100之切削溝的品質。In this embodiment, the imaging unit 40 is attached to the cutting unit 20 and moves integrally with the cutting unit 20 . The imaging unit 40 includes an imaging element for imaging the workpiece 100 held on the work chuck 10 before and after machining. The imaging element may be, for example, a CCD (Charge-Coupled Device, Charge-Coupled Device) imaging element or a CMOS (Complementary Metal Oxide Semiconductor, Complementary MOS) imaging element. The photographing unit 40 photographs the workpiece 100 held on the work clamp 10 to obtain an image for calibration, and outputs the obtained image to the control unit 50, wherein the aforementioned calibration is performed on the workpiece 100 and the alignment of the cutting blade 21. The photographing unit 40 photographs the workpiece 100 held on the work clamp 10 to obtain an image for completing the tool mark inspection, and outputs the obtained image to the control unit 50, wherein the aforementioned tool mark inspection is The quality of the cut grooves formed on the workpiece 100 was confirmed.

控制單元50是控制切削裝置1的各種構成要素之動作,而使切削裝置1實施被加工物100的切削加工處理、以及實施形態之切削刀片之整形方法的處理。在本實施形態中,控制單元50包含電腦系統。控制單元50所包含之電腦系統具有運算處理裝置、記憶裝置與輸入輸出介面裝置,前述運算處理裝置具有如CPU(中央處理單元,Central Processing Unit)之微處理器,前述記憶裝置具有如ROM(唯讀記憶體,Read Only Memory)或RAM(隨機存取記憶體,Random Access Memory)之記憶體。控制單元50的運算處理裝置會依照已記憶於控制單元50的記憶裝置之電腦程式來實施運算處理,並透過控制單元50的輸入輸出介面裝置將用於控制切削裝置1之控制訊號輸出至切削裝置1的各個構成要素。The control unit 50 controls the operations of various components of the cutting device 1 so that the cutting device 1 performs the cutting process of the workpiece 100 and the processing of the shaping method of the cutting insert of the embodiment. In this embodiment, the control unit 50 includes a computer system. The computer system included in the control unit 50 has a computing processing device, a memory device, and an input-output interface device. Read memory, Read Only Memory) or RAM (Random Access Memory, Random Access Memory) memory. The calculation processing device of the control unit 50 will implement calculation processing according to the computer program stored in the memory device of the control unit 50, and output the control signal for controlling the cutting device 1 to the cutting device through the input and output interface device of the control unit 50 1 for each component.

其次,本說明書將使用圖式來說明實施形態之切削刀片之整形方法的處理之動作。圖3是顯示實施形態之切削刀片之整形方法的處理的順序之一例的流程圖。圖4是說明實施形態之切削刀片之整形方法的剖面圖。圖5以及圖6是說明圖3之整形準備步驟1001的立體圖。圖7是說明圖3之整形準備步驟1001的剖面圖。圖8以及圖9是說明圖3之整形步驟1002的剖面圖。圖10以及圖11分別是說明圖3之傾斜面判定步驟1003之一例的剖面圖以及側面剖面圖。圖12是說明圖3之消耗量測定步驟1004之一例的圖。Next, this specification will describe the operation of the processing of the cutting insert shaping method of the embodiment using drawings. Fig. 3 is a flowchart showing an example of the processing procedure of the cutting insert shaping method according to the embodiment. Fig. 4 is a sectional view illustrating a shaping method of the cutting insert according to the embodiment. 5 and 6 are perspective views illustrating the shaping preparation step 1001 in FIG. 3 . FIG. 7 is a cross-sectional view illustrating the shaping preparation step 1001 of FIG. 3 . 8 and 9 are cross-sectional views illustrating the shaping step 1002 in FIG. 3 . 10 and 11 are respectively a cross-sectional view and a side cross-sectional view illustrating an example of the slope determination step 1003 in FIG. 3 . FIG. 12 is a diagram illustrating an example of the consumption measurement step 1004 in FIG. 3 .

實施形態之切削刀片之整形方法是藉由切削裝置1所實施之動作處理之一例,且如圖3所示,具備整形準備步驟1001、整形步驟1002、傾斜面判定步驟1003與消耗量測定步驟1004。實施形態之切削刀片之整形方法是在例如在將切削刀片21裝設在主軸22而以該切削刀片21來切削被加工物100之前,對該切削刀片21實施。The shaping method of the cutting insert of the embodiment is an example of operation processing performed by the cutting device 1, and as shown in FIG. . The shaping method of the cutting insert of the embodiment is carried out on the cutting insert 21 before, for example, mounting the cutting insert 21 on the spindle 22 and cutting the workpiece 100 with the cutting insert 21 .

在本實施形態中,切削刀片之整形方法是對切削刀片21進行如圖4所示地將沿著徑方向之剖面的形狀從矩形狀整形成以下之形狀之方法:在切刃21-1的前端(外周面)的一面26側相對於徑方向形成預定的角度θ1以及預定的寬度W1之傾斜面28,並在另一面27側相對於徑方向形成預定的角度θ2以及預定的寬度W2之傾斜面29,其中前述切削刀片21是例如磨粒的種類為合成鑽石(Synthetic Diamond,SD)、粒度為#800、集中度為100、外徑為58mm,且厚度為0.2mm之陶瓷結合劑刀片(Vitrified Bond Blade)。在此,傾斜面28、29之寬度W1、W2是如圖4所示,在傾斜面28、29中沿著切刃21-1的厚度方向之長度。再者,在本發明中,切削刀片之整形方法並不限定於此,也可以在將任意的磨粒、粒度、集中度、外徑以及厚度的切削刀片21整形成在任一面26、27側形成期望的角度θ1、θ2的傾斜面28、29之形狀的情況下實施。In this embodiment, the shaping method of the cutting insert is a method of shaping the cutting insert 21 from a rectangular cross-sectional shape along the radial direction to the following shape as shown in FIG. 4 : One side 26 of the front end (outer peripheral surface) forms an inclined surface 28 with a predetermined angle θ1 and a predetermined width W1 with respect to the radial direction, and forms an inclined surface 28 with a predetermined angle θ2 and a predetermined width W2 with respect to the radial direction on the other side 27 Surface 29, wherein the aforementioned cutting insert 21 is, for example, a vitrified bond insert (Synthetic Diamond, SD) with a particle size of #800, a concentration of 100, an outer diameter of 58mm, and a thickness of 0.2mm. Vitrified Bond Blade). Here, the widths W1 and W2 of the inclined surfaces 28 and 29 are lengths along the thickness direction of the cutting edge 21 - 1 in the inclined surfaces 28 and 29 as shown in FIG. 4 . Furthermore, in the present invention, the shaping method of the cutting blade is not limited thereto, and the cutting blade 21 may be formed on either side 26, 27 by shaping any abrasive grain, particle size, concentration, outer diameter and thickness. It is implemented in the case of the shape of the inclined surfaces 28 and 29 with desired angles θ1 and θ2.

又,在本實施形態中,切削刀片21的切刃21-1的前端的一面26側是主軸22的軸心方向的正方向(圖4的-Y方向)側,切削刀片21的切刃21-1的前端的另一面27側是主軸22的軸心方向的負方向(圖4的+Y方向)側。在本實施形態中,切削刀片之整形方法是針對主軸22的軸心方向的正方向以及負方向之雙方來個別地實施。也就是說,在本實施形態中,整形步驟1002是針對主軸22的軸心方向的正方向以及負方向之雙方來個別地實施,而在切削刀片21的切刃21-1的一面26以及另一面27之雙方的前端各自形成傾斜面28、29,並按這些個別的整形步驟1002在整形步驟1002的實施前實施整形準備步驟1001。Also, in this embodiment, the side 26 of the front end of the cutting edge 21-1 of the cutting insert 21 is the positive direction (-Y direction in FIG. The other surface 27 side of the front end of -1 is the negative direction (+Y direction in FIG. 4 ) side of the axial center direction of the main shaft 22 . In the present embodiment, the shaping method of the cutting insert is carried out individually for both the positive direction and the negative direction of the axial center direction of the main shaft 22 . That is to say, in this embodiment, the shaping step 1002 is individually implemented for both the positive direction and the negative direction of the axial direction of the main shaft 22, and the one side 26 and the other side of the cutting edge 21-1 of the cutting insert 21 The front ends of both sides of one side 27 form inclined surfaces 28 and 29 respectively, and the shaping preparatory step 1001 is performed before the shaping step 1002 according to these individual shaping steps 1002 .

整形準備步驟1001是設成以下狀態之步驟:使旋轉之切削刀片21的切刃21-1的前端對已以工作夾台10保持之磨刀板200切入預定量201(參照圖7)。在整形準備步驟1001中,首先,在本實施形態中是例如,如圖5所示,藉由將板狀的磨刀板200的一面貼附在已被貼附成覆蓋環狀框架106的背側之開口的黏著膠帶105的黏著面,而將磨刀板200在黏著膠帶105上容置在環狀框架106的開口內。在整形準備步驟1001中,然後是讓磨刀板200的和一面為相反側的露出面側朝向上方,且讓黏著膠帶105側朝向工作夾台10的保持面11,來載置已在黏著膠帶105上容置於環狀框架106的開口內之磨刀板200,並以工作夾台10的保持面11隔著黏著膠帶105來吸引保持磨刀板200。Shaping preparation step 1001 is a step in which the cutting edge 21-1 of the rotating cutting blade 21 is cut into the sharpening plate 200 held by the work chuck 10 by a predetermined amount 201 (see FIG. 7 ). In the shaping preparation step 1001, first, in this embodiment, for example, as shown in FIG. Adhesive surface of the adhesive tape 105 on the side opening, and the sharpening board 200 is accommodated in the opening of the ring frame 106 on the adhesive tape 105 . In the shaping preparation step 1001, the exposed surface of the sharpening plate 200 and the opposite side face upward, and the adhesive tape 105 side faces the holding surface 11 of the work clamp table 10 to place the adhesive tape 105 accommodates the sharpening board 200 in the opening of the ring frame 106 , and uses the holding surface 11 of the work clamp 10 to attract and hold the sharpening board 200 through the adhesive tape 105 .

在此,在切削刀片之整形方法中使用之磨刀板200是使用於切削刀片21之修整(真圓度削正或磨銳)之已將磨粒以黏結材固定而成之板狀的板,且可藉由以切削刀片21進行切削,來磨耗切削刀片21的切刃21-1,並且磨刀板200本身也會被切削刀片21的切刃21-1切削去除而形成切削痕跡。在此,真圓度削正是使主軸22的旋轉中心與切削刀片21的切刃21-1的外緣的中心對齊之作法,磨銳是使切削刀片21消耗來進行使磨粒突出之自發刃而讓鋒利程度回復之作法。在本實施形態中,磨刀板200是配合上述之切削刀片21的例子,而使用例如磨石為白剛鋁石(White Alundum,WA)、粒度為#800、集中度為50、且以樹脂黏結劑來固定成板狀之構成。再者,本發明中,磨刀板200並不限定於此,且可以配合切削刀片21來使用任意的磨石、粒度、集中度以及黏結劑之構成。Here, the sharpening plate 200 used in the shaping method of the cutting blade is a plate-shaped plate in which abrasive grains are fixed with a bonding material and used for trimming (roundness correction or sharpening) of the cutting blade 21. , and the cutting edge 21-1 of the cutting blade 21 can be worn by cutting with the cutting blade 21, and the sharpening plate 200 itself will be removed by the cutting edge 21-1 of the cutting blade 21 to form cutting marks. Here, roundness cutting is a method of aligning the rotation center of the spindle 22 with the center of the outer edge of the cutting edge 21-1 of the cutting blade 21, and sharpening is the spontaneous process of making the abrasive grains protrude by consuming the cutting blade 21. The practice of restoring the sharpness of the blade. In this embodiment, the sharpening plate 200 is an example of matching the above-mentioned cutting blade 21. For example, the grinding stone is white alundum (White Alundum, WA), the particle size is #800, the concentration is 50, and the resin Adhesives are used to fix it into a plate-like structure. Furthermore, in the present invention, the sharpening plate 200 is not limited thereto, and any composition of grinding stones, particle sizes, concentrations, and binders can be used in conjunction with the cutting blades 21 .

在整形準備步驟1001中,在工作夾台10的保持面11隔著黏著膠帶105來吸引保持磨刀板200之後,控制單元50會藉由移動單元30來將已裝設於主軸22的前端之切削刀片21對齊於相對於已保持在工作夾台10之磨刀板200的預定的位置(例如,磨刀板200的中央附近之未形成有切削痕跡之位置)。在整形準備步驟1001中,其次,控制單元50會一邊以預定的旋轉數(在本實施形態中為例如10000rpm(每分鐘轉速,rotations per minute))來旋轉此經對位之切削刀片21,一邊藉由Z軸移動單元33使切削刀片21相對於磨刀板200沿著切入進給方向相對地朝相互接近之方向移動,而如圖6以及圖7所示,以切削刀片21的切刃21-1在磨刀板200切入預定量201。In the shaping preparation step 1001, after the holding surface 11 of the work clamp table 10 attracts and holds the sharpening plate 200 through the adhesive tape 105, the control unit 50 will use the moving unit 30 to move the front end of the main shaft 22 The cutting blade 21 is aligned at a predetermined position relative to the sharpening plate 200 held on the work chuck 10 (for example, a position near the center of the sharpening plate 200 where no cutting marks are formed). In the shaping preparation step 1001, next, the control unit 50 rotates the aligned cutting blade 21 at a predetermined number of revolutions (in this embodiment, for example, 10000 rpm (rotations per minute)), while By means of the Z-axis moving unit 33, the cutting blade 21 is relatively moved towards the direction of approaching each other relative to the sharpening plate 200 along the cutting feed direction, and as shown in FIGS. 6 and 7 , the cutting edge 21 of the cutting blade 21 -1 Cut a predetermined amount 201 into the sharpening board 200 .

在此,在主軸22的軸心方向的正方向上實施整形步驟1002的情況下,預定量201可依據欲形成在切削刀片21的切刃21-1的一面26側之期望的傾斜面28的徑方向的長度來適當決定,並隨著此傾斜面28的徑方向的長度變大而將預定量201設定得較大。又,在主軸22的軸心方向的負方向上實施整形步驟1002的情況下,和正方向同樣地,預定量201可依據欲形成在切削刀片21的切刃21-1的另一面27側之期望的傾斜面29的徑方向的長度來適當決定。在本實施形態中,預定量201是設定為例如0.7mm。Here, in the case where the shaping step 1002 is performed in the positive direction of the axial direction of the main shaft 22, the predetermined amount 201 can be based on the diameter of the desired inclined surface 28 to be formed on the side 26 of the cutting edge 21-1 of the cutting insert 21. The length in the radial direction is appropriately determined, and the predetermined amount 201 is set larger as the length in the radial direction of the inclined surface 28 becomes larger. Also, in the case of implementing the shaping step 1002 in the negative direction of the axial direction of the main shaft 22, as in the positive direction, the predetermined amount 201 can be formed according to the desired shape on the other side 27 side of the cutting edge 21-1 of the cutting blade 21. The length in the radial direction of the inclined surface 29 is appropriately determined. In this embodiment, the predetermined amount 201 is set to, for example, 0.7 mm.

整形步驟1002是以下之步驟:在實施整形準備步驟1001後,一邊使切削刀片21朝主軸22的軸心方向移動一邊使切削刀片21上升,而在切削刀片21的切刃21-1的前端的單面(任一個面26、27)側形成傾斜面28、29。在整形步驟1002中,在切削刀片21的切刃21-1的前端的一面26側形成傾斜面28的情況下,控制單元50是如圖8所示,使切削刀片21以預定的旋轉數(在本實施形態中為例如10000rpm)旋轉,並且使切削刀片21從已在整形準備步驟1001中所定位之位置起一邊藉由Y軸移動單元32朝一面26側的方向(主軸22的軸心方向的正方向)移動,一邊藉由Z軸移動單元33而上升。也就是說,在此整形步驟1002中,控制單元50是一邊將已進行旋轉之切削刀片21的面26側朝向主軸22的軸心方向的正方向來按壓於磨刀板200,一邊使切削刀片21朝傾斜方向上升。藉此,在整形步驟1002中,如圖8所示,藉由磨刀板200在傾斜方向上磨耗切削刀片21的切刃21-1的前端的一面26側而形成傾斜面28,並且藉由切削刀片21的切刃21-1將磨刀板200切削去除而在磨刀板200形成切削痕跡202。Shaping step 1002 is the following step: After implementing shaping preparation step 1001, the cutting blade 21 is raised while moving the cutting blade 21 toward the axis of the main shaft 22, and the front end of the cutting edge 21-1 of the cutting blade 21 The inclined surfaces 28 and 29 are formed on one side (any one of the surfaces 26 and 27 ). In the shaping step 1002, when the inclined surface 28 is formed on the side 26 of the front end of the cutting edge 21-1 of the cutting blade 21, the control unit 50 rotates the cutting blade 21 at a predetermined number of rotations ( In this embodiment, for example, 10,000 rpm) is rotated, and the cutting blade 21 is moved from the position positioned in the shaping preparation step 1001 to the direction of the side 26 side by the Y-axis moving unit 32 (the axial direction of the main shaft 22 The positive direction) moves, while rising by the Z-axis moving unit 33. That is to say, in the shaping step 1002, the control unit 50 presses the face 26 of the rotating cutting blade 21 against the sharpening plate 200 in the positive direction of the axis direction of the main shaft 22, and makes the cutting blade 21 rises towards the inclined direction. Thereby, in the shaping step 1002, as shown in FIG. The cutting edge 21 - 1 of the cutting blade 21 cuts off the sharpening plate 200 to form cutting marks 202 on the sharpening plate 200 .

又,在整形步驟1002中,在切削刀片21的切刃21-1的前端的另一面27側形成傾斜面29的情況下,控制單元50是如圖9所示,使切削刀片21以預定的旋轉數(在本實施形態中為例如10000rpm)旋轉,並且使切削刀片21從已在整形準備步驟1001中所定位之位置起,一邊藉由Y軸移動單元32朝另一面27側的方向(主軸22的軸心方向的負方向)移動,一邊藉由Z軸移動單元33而上升。也就是說,在此整形步驟1002中,控制單元50是一邊將已進行旋轉之切削刀片21的面27側朝向主軸22的軸心方向的負方向來按壓於磨刀板200,一邊使切削刀片21朝傾斜方向上升。藉此,在整形步驟1002中,如圖9所示,藉由磨刀板200在傾斜方向上磨耗切削刀片21的切刃21-1的前端的另一面27側,而形成傾斜面29,並且藉由切削刀片21的切刃21-1將磨刀板200切削去除,而在磨刀板200形成切削痕跡203。Also, in the shaping step 1002, when the inclined surface 29 is formed on the other surface 27 side of the front end of the cutting edge 21-1 of the cutting insert 21, the control unit 50, as shown in FIG. The number of revolutions (for example, 10000 rpm in this embodiment) is rotated, and the cutting blade 21 is moved from the position positioned in the shaping preparation step 1001 to the direction of the other surface 27 side by the Y-axis moving unit 32 (spindle 22 in the negative direction of the axis direction) while moving up by the Z-axis moving unit 33. That is to say, in the shaping step 1002, the control unit 50 presses the face 27 of the rotating cutting blade 21 against the sharpening plate 200 toward the negative direction of the axis direction of the main shaft 22, and makes the cutting blade 21 21 rises towards the inclined direction. Thereby, in the shaping step 1002, as shown in FIG. 9, the inclined surface 29 is formed by grinding the other surface 27 side of the front end of the cutting edge 21-1 of the cutting blade 21 in the inclined direction by the sharpening plate 200, and The sharpening plate 200 is cut and removed by the cutting edge 21 - 1 of the cutting blade 21 , and a cutting trace 203 is formed on the sharpening plate 200 .

在此,整形步驟1002中的切削刀片21的主軸22的軸心方向的移動速度、與切削刀片21的上升方向的移動速度之關係是依據形成之期望的傾斜面28、29的角度θ1、θ2,且也考慮切削刀片21的切刃21-1的剛性來適當決定。例如,軸心方向的移動速度與上升方向的移動速度之比是依據角度θ1、θ2的正切(tangent)來決定。在本實施形態中,是例如角度θ1、θ2皆為45°,且將整形步驟1002中的切削刀片21的主軸22的軸心方向的移動速度、與切削刀片21的上升方向的移動速度一起設定為0.1mm/s。Here, the relationship between the moving speed of the cutting insert 21 in the axial direction of the main shaft 22 in the shaping step 1002 and the moving speed of the cutting insert 21 in the upward direction is based on the angles θ1 and θ2 of the desired inclined surfaces 28 and 29 to be formed. , and is appropriately determined in consideration of the rigidity of the cutting edge 21 - 1 of the cutting insert 21 . For example, the ratio of the moving speed in the axial direction to the moving speed in the ascending direction is determined based on the tangent of the angles θ1 and θ2. In this embodiment, for example, the angles θ1 and θ2 are both 45°, and the moving speed of the cutting insert 21 in the axial direction of the spindle 22 in the shaping step 1002 is set together with the moving speed of the cutting insert 21 in the upward direction. is 0.1mm/s.

又,在整形步驟1002中,控制單元50亦可一邊使切削刀片21在主軸22的軸心方向上移動一邊使切削刀片21上升,並且進一步藉由X軸移動單元31來使保持有磨刀板200之工作夾台10相對於切削刀片21沿著X軸方向相對地移動。藉此,在整形步驟1002中,可以一邊在切削刀片21的切刃21-1的前端的任一個面26、27側形成傾斜面28、29,一邊實施切削刀片21的切刃21-1的真圓度削正。在此,工作夾台10相對於切削刀片21的移動速度,在本實施形態中是設定為例如0.3mm/s。In addition, in the shaping step 1002, the control unit 50 may raise the cutting blade 21 while moving the cutting blade 21 in the axial direction of the main shaft 22, and further use the X-axis moving unit 31 to hold the sharpening plate. The work chuck 10 of 200 relatively moves along the X-axis direction with respect to the cutting insert 21 . Thereby, in the shaping step 1002, the cutting edge 21-1 of the cutting insert 21 can be shaped while forming the inclined surfaces 28, 29 on either the surfaces 26, 27 of the front end of the cutting edge 21-1 of the cutting insert 21. The roundness is corrected. Here, the moving speed of the chuck table 10 relative to the cutting insert 21 is set to, for example, 0.3 mm/s in this embodiment.

傾斜面判定步驟1003是以下之步驟:在整形步驟1002的實施後,判定在緊接在前的整形步驟1002中形成在切削刀片21的切刃21-1的任一個面26、27側之傾斜面28、29的形狀是否成為期望的形狀。在傾斜面判定步驟1003中,在本實施形態中是如圖10所示,進行以整形步驟1002的實施後的切削刀片21往X軸方向切過以工作夾台10所保持之預定的板300之切削加工,並將切削加工後的板300從切削裝置1搬出,且如圖11所示,以顯微鏡等從側面沿著X軸方向觀察切削加工後的板300,來觀察已形成於板300之朝X軸方向切過之溝301的傾斜面302、303,藉此各自判定傾斜面28、29的形狀是否已成為期望的形狀。The inclined surface judging step 1003 is a step of judging the inclination on either side of the cutting edge 21-1 of the cutting insert 21 formed in the immediately preceding shaping step 1002 after the implementation of the shaping step 1002. Whether the shape of the surfaces 28 and 29 is a desired shape. In the inclined surface determination step 1003, as shown in FIG. 10 in this embodiment, the cutting insert 21 after the shaping step 1002 is cut through the predetermined plate 300 held by the work chuck 10 in the X-axis direction. cutting process, and the plate 300 after cutting is carried out from the cutting device 1, and as shown in FIG. The inclined surfaces 302 and 303 of the groove 301 cut in the direction of the X-axis are used to determine whether the shapes of the inclined surfaces 28 and 29 have become the desired shape.

在此,在傾斜面判定步驟1003中使用之預定的板300,是以硬度比切削刀片21的切刃21-1低許多之素材所形成之板狀的板,且可在不會由於被切削刀片21切削而磨耗切削刀片21的切刃21-1之情形下,藉由切削刀片21的切刃21-1來將板300本身切削去除而形成切削痕跡。在本實施形態中,預定的板300是配合上述之切削刀片21的例子,而使用例如碳板或矽板。再者,在本發明中並非限定於此,預定的板300可以配合切削刀片21而使用硬度比切削刀片21的切刃21-1更充分地低之任意的素材之板。Here, the predetermined plate 300 used in the inclined surface determination step 1003 is a plate-shaped plate formed of a material whose hardness is much lower than that of the cutting edge 21-1 of the cutting blade 21, and can be cut without being cut. When the blade 21 cuts and wears the cutting edge 21 - 1 of the cutting blade 21 , the cutting edge 21 - 1 of the cutting blade 21 cuts away the plate 300 itself to form cutting marks. In this embodiment, the predetermined plate 300 is an example of the above-mentioned cutting insert 21, for example, a carbon plate or a silicon plate is used. In addition, the present invention is not limited thereto, and the predetermined plate 300 may be a plate of any material whose hardness is sufficiently lower than that of the cutting edge 21 - 1 of the cutting insert 21 in combination with the cutting insert 21 .

在傾斜面判定步驟1003中,傾斜面28、29的形狀的判定,在本實施形態中雖然是切削裝置1的操作人員實施,但在本發明中並非限定於此,亦可為:將操作人員所觀察而得到之傾斜面28、29的角度θ1、θ2以及寬度W1、W2的測定結果從未圖示之輸入單元輸入到切削裝置1,且已受理此輸入之切削裝置1的控制單元50判定此測定結果是否成為期望的角度θ1、θ2以及寬度W1、W2。如此,在控制單元50實施傾斜面判定步驟1003的情況下,如後述,控制單元50會依據此判定結果而繼續以自動方式實施以後的消耗量測定步驟1004、與下一次的整形準備步驟1001以及整形步驟1002。In the inclined surface determination step 1003, the determination of the shape of the inclined surfaces 28 and 29 is carried out by the operator of the cutting device 1 in this embodiment, but the present invention is not limited thereto, and may be performed by the operator. The observed measurement results of angles θ1 and θ2 and widths W1 and W2 of inclined surfaces 28 and 29 are input to the cutting device 1 from an input unit not shown, and the control unit 50 of the cutting device 1 that has received the input determines Whether or not the measurement results are desired angles θ1, θ2 and widths W1, W2. In this way, when the control unit 50 implements the inclined surface determination step 1003, as will be described later, the control unit 50 will continue to automatically implement the subsequent consumption measurement step 1004, the next shaping preparation step 1001 and Shaping step 1002 .

再者,傾斜面判定步驟1003在本發明中,並不限定於觀察已形成於板300之朝X軸方向切過之溝301的傾斜面302、303的形態,亦可利用藉由使切削刀片21對同樣的預定的板300切入至固定深度為止之所謂的斬切式切割(chopper cut)而形成之溝的端部,來判定傾斜面28、29。又,傾斜面判定步驟1003亦可藉由使用切削裝置1所具備之未圖示的側拍顯微鏡,對實施緊接在前之整形步驟1002後之切削刀片21的切刃21-1的前端從圓周方向進行觀察,來判定傾斜面28、29,亦可藉由從板300的側面來觀察已形成於板300之溝301的側面,來判定傾斜面28、29。Furthermore, the slope determination step 1003 in the present invention is not limited to observing the slopes 302 and 303 of the groove 301 that has been formed on the plate 300 and cuts in the direction of the X-axis. 21. The inclined surfaces 28 and 29 are judged at the end of a groove formed by a so-called chopper cut in the same predetermined board 300 to a fixed depth. In addition, in the inclined surface judging step 1003, the front end of the cutting edge 21-1 of the cutting blade 21 after the immediately preceding shaping step 1002 may be observed from The inclined surfaces 28 and 29 can be determined by observing in the circumferential direction, and the inclined surfaces 28 and 29 can also be determined by observing the side of the groove 301 formed on the plate 300 from the side of the plate 300 .

如圖3所示,實施形態之切削刀片之整形方法在傾斜面判定步驟1003中,在判定為緊接在前之整形步驟1002中經整形之側的傾斜面28、29的形狀成為期望的形狀的情況下(在圖3的傾斜面判定步驟1003中為「是」),會結束已判定為一致之面26、27側的用以形成傾斜面28、29之一連串的處理。另一方面,如圖3所示,實施形態之切削刀片之整形方法在傾斜面判定步驟1003中,在判定為緊接在前之整形步驟1002中經整形之側的傾斜面28、29的形狀並未成為期望的形狀的情況下(在圖3的傾斜面判定步驟1003中為「否」),會經過後述之消耗量測定步驟1004的實施,並將已判定為並未成為期望的形狀之面26、27側的用以形成傾斜面28、29之一連串的處理重複進行(整形準備步驟1001以及整形步驟1002)。如此,實施形態之切削刀片之整形方法會針對切削刀片21的切刃21-1的前端的每一個面26、27,重複進行整形準備步驟1001以及整形步驟1002,直到傾斜面28、29成為期望的形狀(角度θ1、θ2以及寬度W1、W2)為止。As shown in FIG. 3 , in the method of shaping the cutting insert according to the embodiment, in the inclined surface judging step 1003, the shapes of the inclined surfaces 28 and 29 on the sides determined to be shaped in the immediately preceding shaping step 1002 become desired shapes. In the case of (YES in the inclined surface determination step 1003 of FIG. 3 ), the series of processes for forming the inclined surfaces 28 and 29 on the side of the surfaces 26 and 27 determined to match are terminated. On the other hand, as shown in FIG. 3, in the method of shaping the cutting insert according to the embodiment, in the inclined surface judging step 1003, the shapes of the inclined surfaces 28 and 29 on the sides that have been shaped in the immediately preceding shaping step 1002 are judged to be If it is not in the desired shape ("No" in the inclined surface judging step 1003 in FIG. A series of processes for forming the inclined surfaces 28 and 29 on the sides of the surfaces 26 and 27 are repeated (shaping preparation step 1001 and shaping step 1002 ). In this way, the shaping method of the cutting insert in the embodiment will repeat the shaping preparation step 1001 and the shaping step 1002 for each surface 26, 27 of the front end of the cutting edge 21-1 of the cutting insert 21 until the inclined surfaces 28, 29 become desired. shape (angle θ1, θ2 and width W1, W2).

消耗量測定步驟1004是在整形步驟1002實施後,且於再次實施整形準備步驟1001之前,測定切削刀片21的切刃21-1的消耗量之步驟。在本實施形態中,消耗量測定步驟1004是在依據於整形步驟1002實施後實施之傾斜面判定步驟1003的結果,將再次實施整形準備步驟1001以及整形步驟1002的情況下實施。The consumption measurement step 1004 is a step of measuring the consumption of the cutting edge 21 - 1 of the cutting insert 21 after the shaping step 1002 is performed and before the shaping preparation step 1001 is performed again. In this embodiment, the consumption measurement step 1004 is performed when the shaping preparation step 1001 and the shaping step 1002 are to be performed again based on the result of the slope determination step 1003 performed after the shaping step 1002 .

在本實施形態中,消耗量測定步驟1004是使用圖12所示之切削裝置1在切削單元20的下方所具備之切削刀片檢測單元60來實施。如圖12所示,切削刀片檢測單元60具有溝構件61、發光部62、光接收部63、光源64、光電轉換部65、基準電壓設定部66、電壓比較部67、端部位置檢測部68、計算部69與位置補正部70。In the present embodiment, the consumption measurement step 1004 is implemented using the cutting insert detection unit 60 provided below the cutting unit 20 in the cutting device 1 shown in FIG. 12 . As shown in FIG. 12 , the cutting blade detecting unit 60 has a groove member 61, a light emitting unit 62, a light receiving unit 63, a light source 64, a photoelectric conversion unit 65, a reference voltage setting unit 66, a voltage comparing unit 67, and an end position detecting unit 68. , the calculation unit 69 and the position correction unit 70 .

溝構件61沿著X軸方向而形成有可供切削刀片21的切刃21-1侵入之溝61-1,且在溝61-1的兩側部相互面對而配設有具有沿著Y軸方向之光軸的發光部62與光接收部63。發光部62藉由光纖等對光源64進行光連接,且將來自光源64之光朝向光接收部63發射。光接收部63藉由光纖等來對光接收元件進行光連接,而以光接收元件來檢測從發光部62發射且到達光接收部63之光。光接收部63藉由光纖等來對光電轉換部65進行光連接,而將從發光部62所接收到之光傳送至光電轉換部65。The groove member 61 is formed with a groove 61-1 along the X-axis direction into which the cutting edge 21-1 of the cutting blade 21 can enter, and is arranged on both sides of the groove 61-1 facing each other with a groove along the Y axis. The light emitting part 62 and the light receiving part 63 of the optical axis in the axial direction. The light emitting unit 62 is optically connected to the light source 64 through an optical fiber or the like, and emits light from the light source 64 toward the light receiving unit 63 . The light receiving unit 63 is optically connected to the light receiving element by an optical fiber or the like, and the light emitted from the light emitting unit 62 and reaching the light receiving unit 63 is detected by the light receiving element. The light receiving unit 63 is optically connected to the photoelectric conversion unit 65 through an optical fiber or the like, and transmits the light received from the light emitting unit 62 to the photoelectric conversion unit 65 .

光電轉換部65會將和從光接收部63所傳送來之光的光量對應之電壓輸出至電壓比較部67。當隨著切削刀片21的切刃21-1的前端侵入溝61-1,而使切削刀片21的切刃21-1遮蔽發光部62與光接收部63之間的量增加時,自光電轉換部65輸出的輸出電壓會逐漸地減少。在本實施形態中,光電轉換部65在光接收部63的光接收量相對於發光部62的發光量之比率即光接收率為100%時會輸出5V(最大電壓)之電壓,在光接收率為0%時會輸出0V(最小電壓)之電壓。光電轉換部65是設定成在光接收部63的光接收量成為預定光量時,亦即切削刀片21的切刃21-1的前端已到達發光部62與光接收部63之間的預定位置時,輸出電壓會成為預定的基準電壓(在本實施形態中為3V)。基準電壓設定部66會將所設定之預定的基準電壓輸出至電壓比較部67。如上述,預定的基準電壓在本實施形態中為3V。The photoelectric conversion unit 65 outputs a voltage corresponding to the light quantity of the light transmitted from the light receiving unit 63 to the voltage comparison unit 67 . When the front end of the cutting edge 21-1 of the cutting blade 21 invades the groove 61-1, and the cutting edge 21-1 of the cutting blade 21 shields the amount between the light-emitting portion 62 and the light-receiving portion 63 increases, the self-photoelectric conversion The output voltage output from section 65 will gradually decrease. In this embodiment, the photoelectric conversion unit 65 outputs a voltage of 5V (maximum voltage) when the ratio of the received light amount of the light receiving unit 63 to the light emitted by the light emitting unit 62, that is, the light receiving rate is 100%. When the rate is 0%, it will output a voltage of 0V (minimum voltage). The photoelectric conversion part 65 is set so that when the light receiving amount of the light receiving part 63 reaches a predetermined light amount, that is, when the front end of the cutting edge 21-1 of the cutting blade 21 has reached a predetermined position between the light emitting part 62 and the light receiving part 63 , the output voltage becomes a predetermined reference voltage (3V in this embodiment). The reference voltage setting unit 66 outputs the set predetermined reference voltage to the voltage comparing unit 67 . As described above, the predetermined reference voltage is 3V in this embodiment.

電壓比較部67會比較來自光電轉換部65之輸出與藉由基準電壓設定部66所設定之基準電壓,並在來自光電轉換部65之輸出達到基準電壓時,將表示該意旨之訊號輸出至端部位置檢測部68。端部位置檢測部68會將從電壓比較部67所輸出之時間點的切削刀片21的切刃21-1的前端的Z軸方向的位置輸出至計算部69。計算部69會將事先已記憶之切削刀片21的切刃21-1的前端的Z軸方向的基準位置、與從端部位置檢測部68所輸出的位置之差分,輸出至位置補正部70。位置補正部70會因應於由計算部69所輸出之值,來補正切削刀片21的切刃21-1的前端的Z軸方向的位置。The voltage comparator 67 compares the output from the photoelectric conversion unit 65 with the reference voltage set by the reference voltage setting unit 66, and when the output from the photoelectric conversion unit 65 reaches the reference voltage, outputs a signal indicating that to the terminal. Part position detection part 68. The edge position detection unit 68 outputs the position in the Z-axis direction of the tip of the cutting edge 21 - 1 of the cutting insert 21 at the time point output from the voltage comparison unit 67 to the calculation unit 69 . Calculation unit 69 outputs the difference between the Z-axis direction reference position of the tip of cutting edge 21 - 1 of cutting insert 21 stored in advance and the position output from end position detection unit 68 to position correction unit 70 . The position correcting unit 70 corrects the Z-axis position of the tip of the cutting edge 21 - 1 of the cutting insert 21 in accordance with the value output from the calculating unit 69 .

再者,在本實施形態中,光電轉換部65、基準電壓設定部66、電壓比較部67、計算部69以及位置補正部70的各個功能是藉由控制單元50的運算處理裝置執行已記憶於控制單元50的記憶裝置之電腦程式,而在控制單元50內實現。Furthermore, in this embodiment, each function of the photoelectric conversion unit 65, the reference voltage setting unit 66, the voltage comparison unit 67, the calculation unit 69, and the position correction unit 70 is executed by the arithmetic processing device of the control unit 50 and has been stored in The computer program of the memory device of the control unit 50 is implemented in the control unit 50 .

在消耗量測定步驟1004中,計算部69是藉由端部位置檢測部68來取得切削刀片21的切刃21-1的前端的Z軸方向的位置。在消耗量測定步驟1004中,之後,計算部69會計算在此緊接在前之整形步驟1002的實施後所取得之切削刀片21的切刃21-1的前端的Z軸方向的位置、與緊接在前之整形步驟1002的實施前所取得之切削刀片21的切刃21-1的前端的Z軸方向的位置之差,並將所計算出之差檢測為實施此緊接在前之整形準備步驟1001以及整形步驟1002之期間的切削刀片21的切刃21-1的前端的徑方向的消耗量(磨耗量),並將所檢測出之消耗量輸出至控制單元50。In the consumption amount measuring step 1004 , the calculation unit 69 acquires the position in the Z-axis direction of the tip of the cutting edge 21 - 1 of the cutting insert 21 through the end position detection unit 68 . In the consumption measurement step 1004, the calculation unit 69 then calculates the position in the Z-axis direction of the front end of the cutting edge 21-1 of the cutting insert 21 obtained after the implementation of the immediately preceding shaping step 1002, and The difference in the Z-axis direction position of the front end of the cutting edge 21-1 of the cutting insert 21 obtained immediately before the implementation of the shaping step 1002, and the calculated difference is detected as the result of the implementation of the immediately before implementation. The radial consumption (abrasion) of the tip of the cutting edge 21 - 1 of the cutting insert 21 during the preparatory step 1001 and the shaping step 1002 is shaped, and the detected consumption is output to the control unit 50 .

再者,在本發明中,在消耗量測定步驟1004中,並不限定於使用切削刀片檢測單元60之形態,亦可藉由斬切式切割而利用以切削刀片21形成在預定的板300之溝的長度,來測定切削刀片21的切刃21-1的消耗量。Furthermore, in the present invention, in the consumption amount measuring step 1004, it is not limited to the form of using the cutting blade detection unit 60, and the cutting blade 21 formed on the predetermined board 300 may also be used by chopper cutting. The length of the groove is used to measure the consumption of the cutting edge 21-1 of the cutting insert 21.

在實施形態之切削刀片之整形方法中,在第2次以後的整形準備步驟1001中,在緊接在前之消耗量測定步驟1004中所取得之切削刀片21的切刃21-1的消耗量之份量有多少,控制單元50就會使切削刀片21相對於磨刀板200沿著切入進給方向朝相互接近之方向相對地移動多少,並以切削刀片21的切刃21-1來切入磨刀板200。藉此,在第2次以後的整形準備步驟1001中,即使切削刀片21的切刃21-1在直到緊接在前之整形準備步驟1001以及整形步驟1002中會消耗,仍然可以考慮該消耗量,而讓切削刀片21的切刃21-1切入磨刀板200相當於預定量201。In the shaping method of the cutting insert of the embodiment, in the shaping preparation step 1001 after the second time, the consumption amount of the cutting edge 21-1 of the cutting insert 21 acquired in the immediately preceding consumption amount measuring step 1004 How much weight is there, the control unit 50 will make the cutting blade 21 move relative to the direction of approaching each other along the cutting feeding direction along the cutting feed direction, and use the cutting edge 21-1 of the cutting blade 21 to cut into the sharpening plate 200. Blade 200. Thereby, in the shaping preparation step 1001 after the second time, even if the cutting edge 21-1 of the cutting insert 21 is consumed in the shaping preparation step 1001 and the shaping step 1002 immediately before, the consumption can still be taken into account. , and let the cutting edge 21 - 1 of the cutting blade 21 cut into the sharpening plate 200 corresponding to the predetermined amount 201 .

實施形態之切削刀片之整形方法是藉由以下作法,來實施圖4所示之在切削刀片21的切刃21-1的雙方之面26、27形成期望的傾斜面28、29之整形處理:針對切削刀片21的切刃21-1的前端的一面26側(主軸22的軸心方向的正方向),如上述地實施圖3所示之切削刀片之整形方法的一連串的處理,來形成期望的傾斜面28之後,除了此一連串的處理之外,進一步針對切削刀片21的切刃21-1的前端的另一面27側(主軸22的軸心方向的負方向),如上述地實施圖3所示之切削刀片之整形方法的一連串的處理,來形成期望的傾斜面29。The shaping method of the cutting insert of the embodiment is to carry out the shaping process of forming the desired inclined surfaces 28, 29 on both sides 26, 27 of the cutting edge 21-1 of the cutting insert 21 shown in Fig. 4 by the following method: For the front end side 26 side of the cutting edge 21-1 of the cutting insert 21 (the positive direction of the axis direction of the main shaft 22), a series of processes of the shaping method of the cutting insert shown in FIG. 3 are implemented as described above to form a desired shape. After the inclined surface 28 of the cutting blade 21, in addition to this series of processing, further for the other surface 27 side of the front end of the cutting edge 21-1 of the cutting insert 21 (the negative direction of the axial center direction of the main shaft 22), as described above, FIG. 3 is implemented. A series of processes of the shown shaping method of the cutting insert to form the desired inclined surface 29 .

具有如以上之構成的實施形態之切削刀片之整形方法,由於在切削刀片21的修整(真圓度削正或磨銳)上只要使其切入平時所使用之磨刀板200,且使其傾斜地上升就可容易地在切削刀片21的前端形成傾斜面28、29,因此可藉此而在不用導入新的設備或構件的情形下,發揮可以容易地且以低成本方式來對切削刀片21的傾斜形狀進行整形之作用效果。The shaping method of the cutting insert of the embodiment having the above-mentioned constitution is to cut the cutting insert 21 into the sharpening plate 200 which is usually used and tilt it Ascent can easily form inclined surfaces 28, 29 at the front end of cutting blade 21, so it can be used without introducing new equipment or components, and the function of cutting blade 21 can be easily and at low cost. The effect of shaping the oblique shape.

又,以往,在從製造商購入於前端形成有傾斜之整形完畢之切削刀片的情況下,若裝設於主軸時,會成為切削刀片的切刃的外緣的中心位置與主軸的旋轉中心稍微偏離而偏心之狀態,但實施形態之切削刀片之整形方法因為是在已裝設於主軸22後對切削刀片21的形狀進行整形,所以也可發揮以沒有偏心的狀態來對切削刀片21的形狀進行整形之作用效果。此外,實施形態之切削刀片之整形方法也會發揮以下之作用效果:即使切削刀片21的形狀崩壞,仍然可以容易地以輕鬆的方式再次重新將切削刀片21的形狀整形。Also, conventionally, when a trimmed cutting insert with a slope formed at the front end is purchased from a manufacturer, when mounted on a main shaft, the center position of the outer edge of the cutting edge of the cutting insert is slightly different from the rotation center of the main shaft. However, the shaping method of the cutting insert in the embodiment is to shape the shape of the cutting insert 21 after it has been installed on the main shaft 22, so it is also possible to adjust the shape of the cutting insert 21 in a state without eccentricity. The effect of plastic surgery. In addition, the shaping method of the cutting insert of the embodiment also exerts the following effect: Even if the shape of the cutting insert 21 is broken, the shape of the cutting insert 21 can be easily reshaped again in a relaxed manner.

[變形例] 依據圖式來說明本發明的變形例1、2之切削刀片之整形方法。圖13以及圖14是各自說明變形例1、2之切削刀片之整形方法的剖面圖。圖13以及圖14對與實施形態相同的部分附加相同符號而省略說明。 [modified example] The shaping method of the cutting insert according to Modifications 1 and 2 of the present invention will be described with reference to the drawings. 13 and 14 are cross-sectional views each illustrating a shaping method of a cutting insert according to Modifications 1 and 2. In FIGS. 13 and 14 , the same reference numerals are attached to the same parts as those in the embodiment, and description thereof will be omitted.

變形例1之切削刀片之整形方法,如圖4以及圖13所示,為在實施形態之切削刀片之整形方法中,整形前的切削刀片21的形狀不同之構成,其他的構成則和實施形態同樣。在變形例1中,雖然整形前的切削刀片21為在切刃21-1的前端之面26、27各自形成有傾斜面28、29之構成,但是其形狀為已因被加工物100的切削處理等而崩壞之構成。變形例1之切削刀片之整形方法可以將這種形狀的整形前的切削刀片21,以和實施形態之切削刀片之整形方法完全同樣的方法,來整形成形成有期望的傾斜面28、29之形狀。As shown in Fig. 4 and Fig. 13, the shaping method of the cutting insert according to Modification 1 is a structure in which the shape of the cutting insert 21 before shaping is different in the shaping method of the cutting insert of the embodiment, and the other structures are the same as those of the embodiment. same. In Modification 1, although the cutting insert 21 before shaping has the configuration in which the inclined surfaces 28, 29 are respectively formed on the front end surfaces 26, 27 of the cutting edge 21-1, the shape of the cutting insert 21 has been changed due to the cutting of the workpiece 100. The structure of collapse due to processing etc. The shaping method of the cutting insert of modification 1 can shape the cutting insert 21 of this shape before shaping to have the desired inclined surfaces 28 and 29 in exactly the same way as the shaping method of the cutting insert of the embodiment. shape.

變形例2之切削刀片之整形方法,如圖4以及圖14所示,為在實施形態之切削刀片之整形方法中,整形前以及整形後之切削刀片21的形狀不同之構成,其他的構成則和實施形態同樣。在變形例2中,雖然整形前的切削刀片21為在切刃21-1的前端之面27未形成有傾斜面29,而在切刃21-1的前端之面26形成有與切刃21-1的厚度同等之比實施形態更大的寬度W1之傾斜面28之構成,但是其形狀為已因被加工物100的切削處理等而崩壞之構成。又,在變形例2中,整形後的切削刀片21為以下之構成:在切刃21-1的前端之面27未形成有傾斜面29,而在切刃21-1的前端之面26形成有比實施形態更大的寬度W1之期望的傾斜面28。變形例2之切削刀片之整形方法可以藉由將和實施形態之切削刀片之整形方法同樣的方法,僅對切削刀片21的切刃21-1的前端之面26側實施,而將這種形狀的整形前之切削刀片21整形成形成有期望的傾斜面28之形狀。As shown in Fig. 4 and Fig. 14, the shaping method of the cutting insert according to Modification 2 is a structure in which the shapes of the cutting insert 21 before and after shaping are different in the shaping method of the cutting insert in the embodiment, and the other structures are as follows: It is the same as the embodiment. In Modification 2, although the cutting insert 21 before shaping is not formed with the inclined surface 29 on the front end surface 27 of the cutting edge 21-1, but is formed on the front end surface 26 of the cutting edge 21-1 to be aligned with the cutting edge 21. The thickness of -1 is equivalent to the configuration of the inclined surface 28 having a larger width W1 than that of the embodiment, but its shape is a configuration that has been collapsed due to the cutting process of the workpiece 100 or the like. Also, in Modification 2, the shaped cutting insert 21 has the following configuration: the inclined surface 29 is not formed on the front end surface 27 of the cutting edge 21-1, but the inclined surface 29 is formed on the front end surface 26 of the cutting edge 21-1. The desired inclined surface 28 having a larger width W1 than in the embodiment. The shaping method of the cutting insert of modification 2 can be carried out only on the front end surface 26 side of the cutting edge 21-1 of the cutting insert 21 in the same way as the cutting insert shaping method of the embodiment, and this shape can be adjusted. The cutting insert 21 before shaping is shaped into a shape having a desired inclined surface 28 .

再者,本發明並不受限於上述實施形態。亦即,在不脫離本發明之要點的範圍內,可以進行各種變形來實施。In addition, this invention is not limited to the said embodiment. That is, various modifications and implementations are possible without departing from the gist of the present invention.

1:切削裝置 10:工作夾台 11:保持面 20:切削單元 21:切削刀片 21-1:切刃 22:主軸 24:安裝座凸緣 26,27:面 28,29,302,303:傾斜面 30:移動單元 31:X軸移動單元 32:Y軸移動單元 33:Z軸移動單元 40:拍攝單元 50:控制單元 60:切削刀片檢測單元 61:溝構件 61-1:溝 62:發光部 63:光接收部 64:光源 65:光電轉換部 66:基準電壓設定部 67:電壓比較部 68:端部位置檢測部 69:計算部 70:位置補正部 100:被加工物 101:正面 102:分割預定線 103:器件 104:背面 105:黏著膠帶 106:環狀框架 200:磨刀板 201:預定量 202,203:切削痕跡 300:板 301:溝 1001:整形準備步驟 1002:整形步驟 1003:傾斜面判定步驟 1004:消耗量測定步驟 W1,W2:寬度 X,Y,Z:方向 θ1,θ2:角度 1: Cutting device 10: Work clamp table 11: keep the surface 20: Cutting unit 21: Cutting blade 21-1: cutting edge 22: Spindle 24: Mounting flange 26,27: face 28, 29, 302, 303: Inclined surfaces 30: mobile unit 31: X-axis mobile unit 32: Y-axis mobile unit 33: Z-axis mobile unit 40: Shooting unit 50: Control unit 60: Cutting blade detection unit 61: Groove member 61-1: ditch 62: Luminous department 63: Light receiving unit 64: light source 65: Photoelectric conversion department 66: Reference voltage setting part 67: Voltage comparison unit 68: End position detection unit 69: Department of Computing 70:Position correction part 100: processed object 101: Front 102: Split schedule line 103: Device 104: back 105: Adhesive tape 106: ring frame 200: sharpening board 201: scheduled amount 202,203: cutting marks 300: board 301: ditch 1001: Plastic preparation steps 1002: Shaping step 1003: Inclined surface determination step 1004: consumption measurement step W1, W2: width X, Y, Z: direction θ1, θ2: angle

圖1是顯示實施實施形態之切削刀片之整形方法的切削裝置的構成例的立體圖。 圖2是顯示圖1之切削裝置的切削單元的分解立體圖。 圖3是顯示實施形態1之加工裝置的處理的順序之一例的流程圖。 圖4是說明實施形態之切削刀片之整形方法的剖面圖。 圖5是說明圖3之整形準備步驟的立體圖。 圖6是說明圖3之整形準備步驟的立體圖。 圖7是說明圖3之整形準備步驟的剖面圖。 圖8是說明圖3之整形步驟的剖面圖。 圖9是說明圖3之整形步驟的剖面圖。 圖10是說明圖3之傾斜面判定步驟之一例的剖面圖。 圖11是說明圖3之傾斜面判定步驟之一例的側面剖面圖。 圖12是說明圖3之消耗量測定步驟之一例的圖。 圖13是說明變形例1之切削刀片之整形方法的剖面圖。 圖14是說明變形例2之切削刀片之整形方法的剖面圖。 Fig. 1 is a perspective view showing a configuration example of a cutting device according to a method of shaping a cutting insert according to an embodiment. FIG. 2 is an exploded perspective view showing a cutting unit of the cutting device of FIG. 1 . Fig. 3 is a flow chart showing an example of the processing procedure of the processing apparatus according to the first embodiment. Fig. 4 is a sectional view illustrating a shaping method of the cutting insert according to the embodiment. FIG. 5 is a perspective view illustrating a preparatory step for shaping in FIG. 3 . FIG. 6 is a perspective view illustrating a preparatory step for shaping in FIG. 3 . Fig. 7 is a cross-sectional view illustrating the preparatory steps for shaping in Fig. 3 . Fig. 8 is a cross-sectional view illustrating a shaping step in Fig. 3 . Fig. 9 is a cross-sectional view illustrating a shaping step in Fig. 3 . FIG. 10 is a cross-sectional view illustrating an example of the step of judging an inclined surface in FIG. 3 . Fig. 11 is a side sectional view illustrating an example of the step of judging an inclined surface in Fig. 3 . Fig. 12 is a diagram illustrating an example of the consumption measuring procedure in Fig. 3 . Fig. 13 is a cross-sectional view illustrating a method of shaping a cutting insert according to Modification 1. Fig. 14 is a cross-sectional view illustrating a method of shaping a cutting insert according to Modification 2.

10:工作夾台 10: Work clamp table

11:保持面 11: keep the surface

21:切削刀片 21: Cutting blade

21-1:切刃 21-1: cutting edge

24:安裝座凸緣 24: Mounting flange

26,27:面 26,27: face

28:傾斜面 28: Inclined surface

105:黏著膠帶 105: Adhesive tape

200:磨刀板 200: sharpening board

201:預定量 201: scheduled amount

202:切削痕跡 202: cutting marks

X,Y,Z:方向 X, Y, Z: direction

Claims (3)

一種切削刀片之整形方法,是使用切削裝置來將該切削刀片整形之切削刀片之整形方法,前述切削裝置具備:工作夾台,以保持面保持被加工物;切削單元,將圓環狀的切削刀片裝設在具備與該保持面平行的軸心之主軸,來對已保持在該工作夾台之被加工物進行切削;及移動單元,使該工作夾台與該切削單元相對地移動,前述切削刀片之整形方法具備以下步驟: 整形準備步驟,設成使旋轉之切削刀片的前端,對已以該工作夾台保持之磨刀板切入預定量之狀態;及 整形步驟,在該整形準備步驟實施後,一邊使該切削刀片在該主軸的軸心方向上移動一邊使該切削刀片上升,而在該切削刀片前端的單面側形成傾斜面, 重複該整形準備步驟以及該整形步驟,直到該切削刀片的傾斜面成為期望的角度或寬度為止。 A cutting blade shaping method is a cutting blade shaping method using a cutting device to shape the cutting blade. The cutting device includes: a work clamp table for holding a workpiece on a holding surface; a cutting unit for cutting a circular cutting blade The insert is installed on the main shaft with an axis parallel to the holding surface to cut the workpiece held on the work holder; and the moving unit moves the work holder and the cutting unit relatively, the aforementioned The shaping method of the cutting blade has the following steps: The preparatory step for shaping is set so that the front end of the rotating cutting blade cuts into the sharpening plate held by the work clamp by a predetermined amount; and In the shaping step, after the shaping preparation step is performed, the cutting insert is raised while moving the cutting insert in the axial direction of the spindle to form an inclined surface on one side of the front end of the cutting insert, The shaping preparation step and the shaping step are repeated until the inclined surface of the cutting insert becomes a desired angle or width. 如請求項1之切削刀片之整形方法,其中該整形步驟是對該主軸的軸心方向的正方向以及負方向之雙方實施,並在該切削刀片的一面以及另一面雙方的前端形成傾斜面。The method for shaping a cutting insert according to claim 1, wherein the shaping step is performed in both the positive direction and the negative direction of the axial direction of the main shaft, and inclined surfaces are formed on the front ends of both one side and the other side of the cutting insert. 如請求項1或2之切削刀片之整形方法,其具備消耗量測定步驟,前述消耗量測定步驟是在該整形步驟實施後,且再次實施該整形準備步驟之前,測定該切削刀片的消耗量之步驟,即使該切削刀片已消耗,在該整形準備步驟中該切削刀片仍切入預定量。The method for shaping a cutting blade according to claim 1 or 2, which has a consumption measuring step, and the aforementioned consumption measuring step is to measure the consumption of the cutting blade after the shaping step is performed and before the shaping preparation step is performed again. step, even if the cutting insert is consumed, the cutting insert is cut into a predetermined amount in the shaping preparation step.
TW111129153A 2021-08-11 2022-08-03 Method of shaping cutting blade capable of shaping the shape of the cutting blade easily and at low cost TW202306703A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-131320 2021-08-11
JP2021131320A JP7649716B2 (en) 2021-08-11 2021-08-11 How to shape a cutting blade

Publications (1)

Publication Number Publication Date
TW202306703A true TW202306703A (en) 2023-02-16

Family

ID=85181483

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111129153A TW202306703A (en) 2021-08-11 2022-08-03 Method of shaping cutting blade capable of shaping the shape of the cutting blade easily and at low cost

Country Status (4)

Country Link
JP (1) JP7649716B2 (en)
KR (1) KR20230024209A (en)
CN (1) CN115703203A (en)
TW (1) TW202306703A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119427168A (en) * 2025-01-13 2025-02-14 沈阳和研科技股份有限公司 A gallium arsenide wafer dicing method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102750610B1 (en) 2024-10-14 2025-01-09 에스피반도체통신 주식회사 Blade dicing apparatus for wafer

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1148141A (en) * 1997-08-06 1999-02-23 Tokyo Seimitsu Co Ltd Dressing device of slicing machine
JP3999584B2 (en) 2002-07-04 2007-10-31 株式会社ディスコ Method for dividing ceramic chip capacitor sheet
JP5702562B2 (en) 2010-08-23 2015-04-15 株式会社ディスコ Cutting equipment
JP7114169B2 (en) 2018-02-14 2022-08-08 株式会社ディスコ Cutting blade shaping method
JP7193920B2 (en) 2018-03-09 2022-12-21 株式会社ディスコ Package substrate processing method
JP7297385B2 (en) 2019-05-27 2023-06-26 株式会社ディスコ Cutting device and cutting blade management method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119427168A (en) * 2025-01-13 2025-02-14 沈阳和研科技股份有限公司 A gallium arsenide wafer dicing method

Also Published As

Publication number Publication date
JP7649716B2 (en) 2025-03-21
CN115703203A (en) 2023-02-17
KR20230024209A (en) 2023-02-20
JP2023025889A (en) 2023-02-24

Similar Documents

Publication Publication Date Title
CN106903810B (en) Cutting device
TW202306703A (en) Method of shaping cutting blade capable of shaping the shape of the cutting blade easily and at low cost
TW201930015A (en) Dressing method of cutting blade
TWI855151B (en) Substrate grinding method
JP2017213613A (en) Dresser board and dress method
JP5340832B2 (en) Mounting flange end face correction method
CN111699545A (en) Cutting device, cutting method, and cutting tape
CN108000348B (en) Scratch Detection Method
JP5460147B2 (en) Cutting blade dressing method
JP6184162B2 (en) Cutting method
JP2012187692A (en) Dressing material and dressing method
JP5384193B2 (en) Workpiece holding unit
JP2012187693A (en) Dress material and dressing method
JP5340835B2 (en) Mounting flange end face correction method
CN109414800B (en) Cutting device
CN112092224B (en) Correction method
TW202310979A (en) Grinding apparatus
KR20230068998A (en) Processing method
JP2021027246A (en) Grinding stone and adjustment method
US20240383103A1 (en) Processing tool
JP5448613B2 (en) Cutting blade dressing method
JP5809047B2 (en) Dressing board, dressing board manufacturing method and dressing method
TW202400353A (en) Cutting devices and trimming methods
JP2022080757A (en) Cutting blade diameter measurement method
KR20240051044A (en) Dressing board and shape determining method