TW202144700A - Gas supply apparatus - Google Patents

Abstract

A gas supply device is disclosed. The gas supply device according to one embodiment may include: a lower module that moves up and down along the height direction of the gas container, and is fastened to the gas container in a state of being aligned with the gas container; and a load support The part is connected with the lower module and supports the load of the lower module during the lifting and lowering operation of the lower module.

Description

gas supply device

The following description relates to a gas supply device.

In general, in a process using gas, for example, in the case of a process that performs precision work like a semiconductor manufacturing process, a gas of a type suitable for the purpose of each process is required to be supplied after satisfying a certain concentration and pressure.

During the manufacturing process, various types of gases are stored in gas containers under high pressure for efficient gas supply. Under strict management, the gas containers used to store gases containing components harmful to the human body are stored in an unmanned state. keep it.

The gas container that stores the gas is connected to the gas supply device, and when all the gas in the gas container is consumed, the connection piping connected to the gas supply device is separated from the valve of the gas container, the gas container is removed, and a new gas is added. Replacement process in which the container is securely attached to the gas supply.

In order to connect the gas container to the gas supply device, it is necessary to connect the valve connector of the gas container to the connector of the gas supply device. For such a connection process, the valve connector of the gas container and the connector of the gas supply device need to be aligned with Status settings. In the conventional technology, the operator manually aligns the gas containers. However, in the case of gas containers, most of the gas containers are heavy and contain harmful gas. Therefore, there is a problem that it is difficult to manually align the gas containers. alignment work.

In addition, when the gas container or the gas supply device is misaligned in the process of connecting the gas container to the gas supply device, the high-pressure gas inside the gas container with the valve opened will be ejected to the outside, thereby causing a potential accident problem.

Thus, it is a device that requires a secure fastening connection while aligning the gas supply device with respect to the gas container.

The foregoing contents described as background art are mastered or learned by the inventor during the derivation process of the present invention, and are not necessarily known technologies disclosed to the general public before the application of the present invention.

An object of one embodiment is to provide a gas supply device that allows easy control of the fastening connection, so that the fastening connection can be securely carried out with respect to the gas container.

An object of an embodiment is to provide a gas supply device that reduces the load of the equipment during the fast connection process to the gas container, thereby preventing damage caused by the free fall of the equipment.

The problems to be solved in the examples are not limited to the problems mentioned above, and other problems not mentioned can be clearly understood by practitioners from the following description.

The gas supply device according to one embodiment may include: a lower module that is moved up and down in a height direction of the gas container, and is fastened to the gas container in a state of being aligned with the gas container; and The load support part is connected with the lower module, and supports the load of the lower module during the lifting operation of the lower module.

As a side surface, when the lower module is in a state of raising and lowering operation, the load supporting portion can apply an external force to the lower module in a direction to counteract the load of the lower module.

As one side, the load supporting part may include: an air pressure cylinder, which is connected with the lower module and acts air pressure along the height direction of the lower module; an air pressure regulator, which adjusts the Air pressure The air pressure inside the cylinder.

As a side, the air pressure regulator can adjust the air pressure of the air pressure cylinder, so that the external force applied by the air pressure cylinder to the lower module corresponds to the load of the lower module.

As a side surface, the load supporting part may further include: a connecting wire, which connects the air pressure cylinder and the lower module; and a guide wheel, which is connected with the connecting wire and guides the movement of the connecting wire.

As a side surface, it also includes a guide rail arranged along the height direction of the gas container, and the lower module can be connected to the guide rail in a form that can be lifted and lowered along the guide rail.

As a side surface, a movement preventing part may also be included, and the movement preventing part is connected to the lower module, so that the position of the lower module relative to the guide rail is fixed.

As one side, the movement preventing portion includes an air brake for applying air pressure to prevent the lower module from being raised and lowered, and the air brake can selectively release the air pressure according to an operation signal.

As one side, the lower module may include: a cover separation part that removes the cover of the valve connector of the gas container in a state of being aligned relative to the gas container; and a connector fastening connection part that A self-fastening connection is made to the cover separation portion from which the cover is removed.

The gas supply device according to one embodiment may include: an upper module including a main board located on an upper side of a gas container; a lower module, which is moved up and down relative to the upper module along the height direction of the gas container , in a state of being aligned relative to the gas container, fastened to the gas container; and a load support part, which supports the load of the lower module.

As a side face, during the lifting operation of the lower module, the air pressure cylinder can apply an external force to the lower module along the direction of counteracting the load of the lower module.

As one side, the load support part further includes: an air pressure cylinder, which connects the upper and lower modules; and an air pressure regulator, which adjusts the air pressure of the air pressure cylinder, and the air pressure adjusts The device can adjust the external force exerted by the air pressure cylinder on the lower module to a certain extent.

As a side surface, the load supporting part may further include: a connecting wire connecting the air pressure cylinder and the lower module; and a guide wheel guiding the movement of the connecting wire caused by the action of the air pressure cylinder.

As a side face, during the lifting operation of the lower module, the external force exerted by the air pressure cylinder may correspond to the load of the lower module.

As a side face, the upper module further includes a vertical guide portion, the vertical guide portion guides the lifting and lowering of the lower module relative to the main board, and the vertical guide portion may include: a vertical guide rail along the and a vertical guide member slidably connected along the vertical guide rail and connected with the lower module.

As one side surface, the guide portion further includes a movement preventing portion that brakes the movement of the vertical guide member relative to the vertical guide rail, and the movement preventing portion selectively operates according to an operation signal , so that the lifting operation of the lower module can be controlled.

As one side, when the movement preventing portion controls the lower module to move up and down, the load support portion can adjust the air pressure of the air pressure cylinder so as to offset the load of the lower module.

As a side face, the lower module is rotatably connected with respect to the guide member around an axis perpendicular to the ground.

As a side face, the upper module further includes: a first horizontal guide part, which is movably connected relative to the main board in a first direction perpendicular to the ground; and a second horizontal guide part, which is connected with the first horizontal guide part. A horizontal guide portion is connected and is movably connected relative to the main board in a first direction perpendicular to the ground, and the vertical guide portion can be connected to a second horizontal guide portion.

As one side, the lower module may further include: a cover removing part for removing the cover of the valve connector of the gas container; and a connector fastening connection part for connecting with the valve of the gas container The connectors are connected to obtain the gas supply.

According to the gas supply device of one embodiment, the weight of the device is reduced during height adjustment of the gas container, so that equipment damage caused by free fall can be prevented.

According to the gas supply device of one embodiment, the weight of the equipment can be reduced by the air pressure cylinder, so that the overall size of the equipment can be reduced.

According to the gas supply device of one embodiment, the fastened connection control can be easily performed, so that the fastened connection can be securely performed with respect to the gas container.

The effects of the gas supply device according to one embodiment are not limited to those mentioned above, and other effects not mentioned can be clearly understood by a person of ordinary skill from the following description.

In the following, embodiments are described in detail by means of exemplary figures. It should be noted that when reference numerals are attached to constituent elements in the respective drawings, the same constituent elements are given the same numerals as much as possible even if they are shown in different drawings. In addition, in the description of the embodiment, if the specific description of the related conventional structures or functions is considered to obstruct the understanding of the embodiment, the detailed description thereof will be omitted.

Also, when describing the constituent elements of the embodiments, terms such as first, second, A, B, (a), and (b) may be used. These terms are only used to distinguish the constituent element from other constituent elements, and the nature or order or sequence, etc. of the related constituent elements are not limited by these terms. When it is mentioned that a certain component is "connected", "coupled" or "connected" to another component, it should be understood that the component may be directly connected to or connected to the other component, or it may be "Connecting," "joining," or "connecting" to other constituent elements between constituent elements.

The constituent elements included in any one embodiment and the constituent elements including the common performance may be described using the same names in other embodiments. Unless stated to the contrary, descriptions recited in any one embodiment may be applicable to other embodiments, and specific descriptions will be omitted within the scope of repetition.

FIG. 1 is a perspective view of a gas supply device according to an embodiment, FIG. 2 is a perspective view of a gas supply device according to an embodiment, and FIG. 3 is a configuration diagram showing an operation of a load support section according to an embodiment .

Referring to FIGS. 1 to 3 , the gas supply device 1 according to one embodiment can be used to fasten a gas container G that stores gas supplied to a place where various gases are required, such as a semiconductor manufacturing process, to a connecting pipe. The gas supply device 1 can align its position with respect to the gas container G so that a tight connection with respect to the gas container G is possible.

The gas container G can store and store process gas inside. The upper part of the gas container G may be provided with a valve for discharging the stored gas. The valve can restrict the supply of gas stored inside the container. The valve may include: a valve connector, which is provided on the outside of the side in a protruding form and is used to exhaust gas; a valve flapper, which is provided inside the valve to selectively close the valve connector; and a valve handle, which is provided on the valve In the upper part, the valve flapper is moved according to the rotation operation, thereby opening and closing the valve connector. A cover may be installed on the outside of the valve connector for covering the valve connector and preventing gas leakage. The cover is screwed to the valve connector through threads formed on the outside of the valve connector.

In the following, for the convenience of explanation, unless otherwise mentioned, the valve part where the valve connector is located is referred to as the front of the valve.

The position of the gas supply device 1 according to one embodiment is aligned so as to enable a tight connection with respect to the valve of the gas container G. The gas supply device 1 is arranged on the upper part of the gas container G, and the height with respect to the gas container G can be adjusted. The gas supply device 1 may include an upper module 10 , a lower module 11 and a load support portion 12 .

The upper module 10 may include a main board 101 fixedly disposed on the upper side of the gas container G, a first horizontal guide portion 102 , a second horizontal guide portion 13 and a vertical guide portion.

The main board 101 can be fixedly disposed on the upper side of the gas container G. The main board 101 may be parallel to the ground.

The first horizontal guide portion 102 is movably connected with respect to the main board 101 along a first direction parallel to the ground. The first horizontal guide part 102 may include: a first guide rail 1021 disposed on the lower side of the main board 101 along the first direction; and a first guide member 1022 movably connected to the first guide rail 1021 .

The second horizontal guide portion 13 is movably connected relative to the main board 101 along a second direction parallel to the ground. The second horizontal guide portion 13 may include: a second guide rail 131 disposed on the lower side of the first guide member 1022 along the first direction; and a second guide member 132 movably connected to the second guide rail 131 .

The vertical guide is movably connected in a direction perpendicular to the ground with respect to the main board 101 . The vertical guide part may include: a vertical guide rail 1041 arranged along a direction perpendicular to the ground, that is, along a height direction of the gas container G; a vertical guide part 1042 slidably connected along the vertical guide rail 1041; And the movement preventing portion 1043 which brakes the movement of the vertical guide member 1042 . The vertical guide rail 1041 may be connected to the second guide part 132 . The lower module 11 may be connected to the vertical guide member 1042 .

According to the structure as described above, since the lower module 11 is connected to the main board 101 through the first horizontal guide portion 102 , the second horizontal guide portion 13 and the vertical guide portion, its position on the plane with respect to the main board 101 and its relative The height of the main board 101 can be adjusted. In other words, since the three-dimensional position of the lower module 11 can be adjusted with respect to the main board 101 , the position can be aligned with respect to the valve connector of the gas container G on the lower side of the main board 101 .

The lower module 11 is rotatably connected with respect to the vertical guide member 1042 about an axis perpendicular to the ground. According to the structure described above, the angle of the lower module 11 with respect to the central axis of the valve connector can be adjusted, so that the central axis of the connector fastening portion described later and the central axis of the valve connector can be aligned.

The movement preventing portion 1043 can cut off movement of the vertical guide member 1042 in the vertical direction. Since the lower module 11 is connected to the vertical guide member 1042 , the vertical guide member 1042 may move downward along the vertical guide rail 1041 due to the load of the lower module 11 . The movement preventing portion selectively cuts off the movement of the vertical guide member 1042 , and thus can be cut off in a form that the vertical guide member 1042 is moved only in the process of aligning the height of the lower die set 11 .

The movement preventing unit 1043 can selectively operate according to an operator's operation signal. The movement preventing portion 1043 can cancel the movement of the vertical guide member 1042 as long as the operation canceling signal is received, so that the lifting and lowering operation of the lower module 11 can be adjusted. The movement preventing portion 1043 may include, for example, an air brake that cuts off the movement of the vertical guide member 1042 by air pressure. In the state where the operation release signal is not received, the air brake applies air pressure in a form that prevents the vertical guide member 1042 from moving, so that the lower module 11 can be prevented from being Free fall under load.

The lower module 11 can be fastened to the gas container G. The position of the valve connector relative to the gas container G can be aligned by adjusting the position of the lower module 11 relative to the main board 101 . The lower module 11 is fastened to the valve connector in a state of being aligned with the valve connector, so that the gas inside the gas container G can be supplied.

The lower module 11 may include a cover separation part, a connector fastening connection part and an actuator.

The cover separation part can remove the cover installed on the outside of the valve connector. In a state where the lower module 11 is aligned with respect to the valve connector, the valve connector can be inserted into the cap separation portion. At this time, the cap separation part rotates to release the screw coupling of the cap to the valve connector, so that the cap can be separated from the valve connector.

The connector fastening portion can be directly fastened to the valve connector in a state where the cover of the valve connector is removed. The connector fastening portion is coupled with the valve connector, and in the coupled state, the valve connector and the connecting pipe communicate with each other, so that the gas in the gas container G can be supplied to the connecting pipe. The connector fastening connection portion may be coupled with the valve connector through threads formed on the outside of the valve connector.

The actuator may provide a driving force for operating the cover separation portion and the connector securing connection.

The load supporting portion 12 is connected with the lower module 11 , and can support the load of the lower module 11 during the lifting operation of the lower module 11 . When the lower module 11 is raised and lowered, that is, during the height alignment of the lower module 11 , the load supporting portion 12 applies an external force to the lower module 11 along the direction of offsetting the load of the lower module 11 . The load support portion 12 may include an air pressure cylinder and an air pressure regulator 122 .

The air pressure cylinder 121 is connected to the lower module 11, and can act on the lower module 11 along the height direction of the lower module 11, that is, along the opposite direction of the gravity direction, to the lower module 11 with air pressure. The air pressure cylinder 121 is connected to the upper module 10 and the lower module 11 , and can realize the piston operation according to the lifting operation of the lower module 11 .

The air pressure regulator 122 may adjust the air pressure inside the air pressure cylinder 121 . The air pressure regulator 122 can adjust the air pressure inside the air pressure cylinder 121 so that the external force applied by the air pressure cylinder 121 to the lower module 11 corresponds to the load of the lower module 11 . During the lifting and lowering process of the lower module 11 , the air pressure regulator 122 can adjust the external force exerted by the air pressure cylinder 121 to a certain extent. According to the lifting and lowering of the lower module 11, the air pressure cylinder 121 acts as a piston, and the air pressure regulator 122 can continuously apply an external force that counteracts the load of the lower module 11 to the lower module by adjusting the air pressure inside the air pressure cylinder 121. 11. For example, the air pressure regulator 122 may discharge the air inside the air pressure cylinder 121 or inject air into the air pressure cylinder 121 during the operation of the air pressure cylinder 121 .

According to the structure as described above, the load supporting portion 12 applies an external force to the lower module 11 corresponding to the load of the lower module 11 , so that the lower module 11 can cancel the gravitational force according to the load. Accordingly, in the process of aligning the height direction position of the lower module 11, the weight of the lower module 11 felt by the operator can be reduced, and the operator can be assisted in adjusting the height of the lower module 11 with a small force.

In addition, the load support portion 12 prevents the lower module 11 from falling sharply due to the self-weight of the lower module 11 , and thus can prevent equipment damage due to the free fall of the lower module 11 or an accident in which the lower module 11 collides with the gas container G in advance. occur.

In particular, the load support portion 12 maintains the force applied by the air pressure cylinder 121 to the lower module 11 to a certain extent through the air pressure regulator 122, so that it can assist the operator in the process of aligning the height of the lower module 11 with a certain force. The height of the lower module 11 .

FIG. 4 and FIG. 5 are perspective views showing the operation process of the gas supply device 1 according to one embodiment.

4 and 5, the operation process of the gas supply device 1 will be described.

In the process of adjusting the height of the lower module 11 with respect to the gas container G, the operator can cancel the operation of the movement preventing portion 1043 through an operation signal. In the absence of an operation signal, the movement preventing portion 1043 prevents the vertical guide member 1042 from moving relative to the vertical guide rail 1041, so that the height direction position of the lower module 11 is surely maintained. If an operation signal is received, the load support portion 12 may function to apply an external force of a magnitude corresponding to the load of the lower module 11 in the opposite direction to the direction of gravity. The operator can align the position of the lower module 11 with respect to the connector valve of the gas container G while moving the lower module 11 in the height direction. In such a process, the air pressure regulator 122 can discharge the air inside the air pressure cylinder 121 , or inject air into the air pressure cylinder 121 , so as to maintain the air pressure inside the air pressure cylinder 121 to a certain extent.

After that, when the height direction positions of the lower modules 11 are aligned, the operator releases the operation signal, and the movement preventing portion 1043 cuts off the movement of the vertical guide members 1042 relative to the vertical guide rails 1041, thereby enabling the height of the lower module 11 to be adjusted. fixed.

FIG. 6 is a perspective view of a gas supply device according to one embodiment.

Referring to FIG. 6 , the gas supply device 2 according to an embodiment may include an upper module 20 , a lower module 21 and a load support portion 23 .

The lower module 21 may be connected to the upper module 20 in a form that can move in the height direction.

The load support part 23 may include an air pressure cylinder 231 , an air pressure regulator (not shown), a connecting wire 233 and a guide wheel 234 .

During the lifting and lowering process of the lower die set 21, that is, the process of aligning the positions in the height direction, the air pressure cylinder 231 can apply an external force corresponding to the load of the lower die set 21 to the lower die set along the opposite direction of the gravity direction. Group 21.

The air pressure regulator can adjust the air pressure inside the air pressure cylinder 231 during the operation of the air pressure cylinder 231 , so that the air pressure cylinder 231 can exert a certain force relative to the lower module 21 .

The connecting wire 233 can connect the air pressure cylinder 231 and the lower module 21 . At this time, the connecting wire 233 is connected to the upper end of the lower module 21 , and the lower module 21 can be pulled upward according to the action of the air pressure cylinder 231 . The connecting wire 233 can be guided by the guide wheel 234 . The guide pulley 234 guides the movement of the connecting wire 233 that moves during the operation of the air pressure cylinder 231 while setting the position of the connecting wire 233 . Regardless of the moving direction of the piston of the air pressure cylinder 231 , the guide pulley 234 can guide the transmission direction of the force in such a manner that the lower module 21 is subjected to an upward force.

According to the above structure, even if the air pressure cylinder 231 is not directly connected to the lower module 21, force can be applied to the lower module 21 in the height direction, so the installation position of the air pressure cylinder 231 can be freely set. In addition, there is an advantage that the size and weight of the gas supply device 2 can be reduced.

As described above, although the embodiments have been described based on the limited drawings, those skilled in the art can make various modifications and variations from the above description. For example, even if the described technique is performed in an order different from the described method, and/or the described structures, devices, etc. are combined or combined in a form different from the described method, or by other constituent elements or equivalent Substitutes or substitutions can also be made to achieve appropriate results.

G: Gas container 1: Gas supply device 2: Gas supply device 10: Lower module 11: Upper module 12: Load support part 121: Air pressure cylinder 122: Air pressure regulator 13: Second horizontal guide 131: Second rail 132: Second guide part 101: Motherboard 102: The first horizontal guide 1021: The first rail 1022: First Guide Part 1041: Vertical rail 1042: Vertical Guide Parts 1043: Movement Prevention Department 20: Upper module 21: Lower module 23: Load support part 231: Air pressure cylinder 233: connecting line 234: Guide wheel

The following drawings attached to this specification illustrate a preferred embodiment of the present invention, and together with the detailed description of the invention, play a role in further understanding the technical idea of the present invention, so it should not be construed that the present invention is limited to these drawings. items recorded in the formula. [FIG. 1] is a perspective view of a gas supply device according to an embodiment. [Fig. 2] is a perspective view of a gas supply device according to an embodiment. [FIG. 3] and [FIG. 4] are perspective views showing an operation process of a gas supply device according to an embodiment. [ Fig. 5 ] is a configuration diagram showing the operation of the load support portion according to one embodiment. [Fig. 6] is a perspective view of a gas supply device according to an embodiment.

G: Gas container

1: Gas supply device

10: Lower module

11: Upper module

Claims (20)

A gas supply device, comprising: a lower module, which moves up and down along the height direction of the gas container, and is fastened to the gas container in a state of being aligned with the gas container; and The load support part is connected with the lower module, and is used to support the load of the lower module during the lifting operation of the lower module. The gas supply device according to claim 1, wherein the load supporting portion applies an external force to the lower module in a direction that cancels the load of the lower module in a state where the lower module is in an up-and-down operation . The gas supply device according to claim 2, wherein the load supporting portion comprises: an air pressure cylinder, which is connected to the lower module and acts air pressure along the height direction of the lower module; and An air pressure regulator that regulates the air pressure inside the air pressure cylinder. The gas supply device according to claim 3, wherein the air pressure regulator adjusts the air pressure of the air pressure cylinder so that the external force applied by the air pressure cylinder to the lower module and the lower module corresponding to the load. The gas supply device according to claim 3, wherein the load supporting portion further comprises: a connecting line connecting the air pressure cylinder and the lower module; and A guide wheel, which is connected with the connecting wire, guides the movement of the connecting wire. The gas supply device according to claim 3, further comprising a vertical guide rail arranged along the height direction of the gas container, wherein the lower module is connected to the said lower module in a form that can be lifted and lowered along the vertical guide rail. Vertical rails. The gas supply device according to claim 6, further comprising: The movement preventing part is connected to the lower module, so that the position of the lower module relative to the guide rail is fixed. The gas supply device according to claim 7, wherein the movement preventing portion includes an air brake applying air pressure to prevent the lower module from being raised and lowered, the air brake being selectively released according to an operation signal air pressure. The gas supply device according to claim 1, wherein the lower module comprises: a cap separation portion that, in a state aligned relative to the gas container, removes a cap of the valve connector of the gas container; and The connector fastens the connection part, which is automatically fastened to the cover separation part from which the cover is removed. A gas supply device, comprising: an upper module including a main board on the upper side of the gas container; The lower module, along the height direction of the gas container, can be moved up and down relative to the upper module, and is fastened to the gas container in a state of being aligned relative to the gas container; and The load support part supports the load of the lower module. The gas supply device according to claim 10, wherein when the lower module is moving up and down, the load supporting portion applies an external force to the lower module in a direction that counteracts the load of the lower module . The gas supply device according to claim 10, wherein the load supporting portion further comprises: an air pressure cylinder connecting the upper module and the lower module; and an air pressure regulator, which regulates the air pressure of the air pressure cylinder, The air pressure regulator adjusts the external force applied to the lower module by the air pressure cylinder to a certain extent. The gas supply device according to claim 10, wherein the load supporting portion further comprises: a connecting line connecting the air pressure cylinder and the lower module; and A guide wheel that guides the movement of the connecting wire caused by the action of the air pressure cylinder. The gas supply device according to claim 11, wherein in the process of raising and lowering the lower module, the external force exerted by the air pressure cylinder corresponds to the load of the lower module. The gas supply device according to claim 10, wherein the upper module further comprises a vertical guide portion, and the vertical guide portion guides the lifting and lowering of the lower module relative to the main board, The vertical guide includes: vertical rails arranged along a direction perpendicular to the ground; and A vertical guide member slidably connected along the vertical guide rail and connected with the lower module. The gas supply device according to claim 15, wherein the vertical guide portion further comprises: a movement preventing portion that brakes the movement of the vertical guide member relative to the vertical guide rail, The movement preventing portion selectively operates according to an operation signal, thereby controlling the raising and lowering operation of the lower module. The gas supply device according to claim 16, wherein the load supporting portion adjusts the air pressure of the air pressure cylinder so as to offset the lower portion in a state in which the movement preventing portion controls the lower module to ascend and descend. The load of the module. The gas supply device according to claim 15, wherein the lower module is rotatably connected with respect to the vertical guide member about an axis perpendicular to the ground. The gas supply device according to claim 15, wherein the upper module further comprises: a first horizontal guide portion movably connected relative to the main board along a first direction parallel to the ground; and A second horizontal guide part, which is connected with the first horizontal guide part, is movably connected with respect to the main board along a second direction parallel to the ground and perpendicular to the first direction, and the vertical guide part is connected on the second horizontal guide portion. The gas supply device according to claim 10, wherein the lower module further comprises: a cap removal portion for removing the cap of the valve connector of the gas container; and The connector fastens the connection part for connecting with the valve connector of the gas container, so as to obtain the supply of gas.

Images