TW202126118A - Plasma reactor and gas nozzle thereof capable of effectively preventing the occurrence of gas corrosion - Google Patents

Abstract

The present invention provides a plasma reactor and a gas nozzle thereof. The plasma reactor has an inner lining. The gas nozzle includes: an insertion part, in which a first end of the insertion part is configured to be inserted into a gas outlet fixed to a pipe, and a second end opposite to the first end is configured to be placed outside the pipe; and a gas outlet part, in which one side surface of the gas outlet part has a mounting groove which faces the second end of the insertion part, the second end of the insertion part is connected to the bottom of the mounting groove, and the opposite side surface of the gas outlet part has a main gas nozzle. The gas nozzle has a main gas injection channel that communicates with the first end of the insertion part and the main gas nozzle. The inner lining has a mounting part for being placed in the mounting groove. The mounting part is located on the surface of the inner lining where the gas outlet is provided, and protrudes from the surface. The technical solution provided by the present invention can effectively prevent the occurrence of gas corrosion.

Description

Plasma reactor and its gas nozzle

The present invention relates to the technical field of semiconductor manufacturing, and more specifically, to a plasma reactor and a gas nozzle thereof.

As the scale of semiconductor equipment continues to expand, the requirements for process complexity are getting higher and higher, and corrosive gases are widely used in plasma etching. The gas transmission pipeline is the basic component of the plasma etching chamber, and stainless steel and aluminum-containing materials are widely used in gas transmission pipelines, chamber walls and electronic stability control systems. The plasma etching process requires halogen gases (such as Cl ₂ , BCl ₃ ) and other gases (such as COS). However, these gases have a serious corrosive effect on stainless steel and aluminum-containing materials.

In the prior art, a carbon-based material coating method is used to isolate the contact between the plasma and the surface of the part. However, due to the limitation of the process conditions, the coating cannot protect the area where the gas nozzle is installed in the plasma reactor well, which makes this area easy Damaged by the corrosive gas, the service life of the plasma reactor is reduced.

In view of this, the present invention provides a plasma reactor and its gas nozzle, which can effectively prevent the occurrence of gas corrosion, thereby prolonging the service life of various parts in the plasma reactor.

To achieve the foregoing objective, the embodiments of the present invention provide the following technical solutions: A gas nozzle used in a plasma reactor, the plasma reactor has an inner liner, and the inner liner has a pipe for gas transmission, and the gas nozzle includes: An inserting part, the first end of the inserting part is used to insert a gas outlet fixed to the pipe, and the second end opposite to the first end is used to be placed outside the pipe; An air outlet, one side surface of the air outlet is provided with an installation groove, the installation groove faces the second end of the insertion part, and the second end of the insertion part is connected with the bottom of the installation groove, the air outlet The opposite side surface has a main gas nozzle; Wherein, the gas nozzle has a main gas injection channel that communicates the first end of the insertion portion and the main gas nozzle; the inner liner has a mounting portion for being placed in the mounting groove, and the mounting portion It is located on the surface of the inner liner with the gas outlet, protrudes from the surface and surrounds the gas outlet; the inner side wall of the installation groove is used for sealing and fixing with the outer side of the installation part.

Preferably, in the above-mentioned gas nozzle, the thickness of the side wall of the installation groove gradually decreases from the bottom of the installation groove to the top of the installation groove, or increases, or remains uniform.

Preferably, in the above-mentioned gas nozzle, the outer surface of the side wall of the installation groove has at least one auxiliary gas nozzle; The auxiliary gas injection port communicates with the main gas injection channel through an auxiliary gas injection channel located in the gas outlet.

Preferably, in the above-mentioned gas nozzle, the outer surface of the side wall of the installation groove has a plurality of the auxiliary gas nozzles, and the auxiliary gas nozzles are evenly distributed on the outer surface of the side wall of the installation groove.

Preferably, in the above-mentioned gas nozzle, the auxiliary gas nozzle is located at the same height position of the side wall of the installation groove; The auxiliary gas injection channel is in vertical communication with the main gas injection channel; or the auxiliary gas injection channel is in oblique communication with the main gas injection channel.

Preferably, in the above-mentioned gas nozzle, the axis of the auxiliary gas injection channel passes through the axis of the main gas injection channel, or the axis of the auxiliary gas injection channel and the axis of the main gas injection channel do not intersect.

Preferably, in the above-mentioned gas nozzle, the diameter of the auxiliary gas injection channel gradually decreases from the main gas injection channel to the auxiliary gas injection port, or gradually increases, or is uniform.

Preferably, in the above-mentioned gas nozzle, the diameter of the main gas injection channel gradually decreases from the insertion portion to the gas outlet portion, or is uniform.

The present invention also provides a plasma reactor, which includes: A reaction chamber, an inner liner, and a gas nozzle, the gas nozzle being any one of the above-mentioned gas nozzles; The reaction chamber includes a reaction chamber side wall, and a space enclosed by the reaction chamber side wall is a plasma environment; The inner liner is located on the side wall of the reaction chamber, the inner liner has a pipeline for gas transmission; the gas nozzle is installed in the gas outlet of the pipeline; the gas nozzle has an installation groove, and the inner The liner has a mounting part protruding from its surface for placing in the mounting groove; the surface of the liner facing the plasma environment is coated with a first protective layer.

Preferably, in the above-mentioned plasma reactor, the outer surface of the side wall of the mounting portion has a groove surrounding the mounting portion, and the groove is used for placing a first gasket, and the first gasket is used for sealing. The inner surface of the side wall of the installation groove and the outer surface of the side wall of the installation part.

Preferably, in the above-mentioned plasma reactor, it further includes: A second gasket, the second gasket being arranged between the top surface of the mounting portion and the bottom of the mounting groove to seal the area where the top surface of the mounting portion is opposite to the bottom of the mounting groove; And/or, a third gasket, which is arranged between the top surface of the side wall of the installation groove and the side surface of the liner with the gas outlet to seal the top surface of the side wall of the installation groove An area opposite to the side surface of the inner liner with the gas outlet.

Preferably, in the above-mentioned plasma reactor, the mounting portion is higher than a surface of the inner liner on which the gas outlet is located.

Preferably, in the above-mentioned plasma reactor, the inner liner has a convex structure on one side surface of the gas outlet, and the convex structure surrounds the mounting portion and is different from the mounting portion. There is a gap therebetween, and the side wall of the installation groove is placed in the gap.

Preferably, in the above-mentioned plasma reactor, the inner liner has a containing groove in the side surface with the gas outlet, the side wall of the installation groove is placed in the containing groove, and the containing groove surrounds The gas outlet, the side wall of the containing groove between the containing groove and the gas outlet is the mounting part.

Preferably, in the above-mentioned plasma reactor, the material of the first protective layer includes yttrium oxide.

Preferably, in the above-mentioned plasma reactor, the side wall of the gas outlet is coated with a second protective layer, and the material of the second protective layer includes: Teflon.

Preferably, the material of the first gasket is Teflon plastic.

Compared with the conventional technology, the technical solution of the present invention has the following advantages: In the technical scheme of the present invention, the nozzle is provided with a mounting groove, which can be nested and sealed with the mounting part on the surface of the lining, forming a sealing structure outside the gas outlet, extending the diffusion path of the plasma, and making the plasma flow in the pipeline. The diffusion path is gradually extinguished to prevent the plasma from corroding the side wall of the gas outlet. Moreover, since the surface of the lining has a convex mounting part, the convex mounting part facing the outer surface of the mounting groove can form a yttrium oxide coating through the PS process. Even if the plasma diffusion problem occurs, the first contact of the plasma is the mounting part. The plasma corrosion-resistant yttrium oxide coating on the outer surface can well prevent plasma corrosion problems. The problem that the aluminum substrate of the pipeline is exposed due to the corrosion of the surface protective layer is avoided, and metal pollution can be effectively prevented.

The following describes the embodiments of the present invention clearly and completely with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without making progressive work shall fall within the protection scope of the present invention.

As shown in Figure 1, Figure 1 is a cross-sectional view of a gas nozzle connected to the inner liner. In the manner shown in FIG. 1, the gas nozzle 15 is fixed at the gas outlet of the plasma reactor by a snap ring (not shown in the figure). The gas nozzle 15 has a first gasket 17, a second gasket 20, and a third gasket 16. And the main gas injection passage 10 communicating with the gas nozzle 15, wherein the gap between the gas nozzle 15 and the gas outlet is sealed with a first gasket 17, a second gasket 20, and a third gasket 16. The plasma reactor has an inner The liner 14, the second protective layer 13, the gas transmission pipe 12, and the first protective layer 19 are provided on one side surface of the gas outlet of the plasma reactor, wherein the gas transmission pipe 12 is used for transmitting corrosive gas.

In the method shown in FIG. 1, the gas in the gas transmission pipe 12 is ejected into the reaction chamber through the main gas ejection channel 10 to form plasma. There are free radical molecules 11 in the plasma. The free radical molecules 11 have a corrosive effect on the second protective layer 13. The service life of the protective layer 13. The location of the erosion point 18 is vulnerable to corrosion due to the inability to achieve a complete seal between the gas nozzle 15 and other outlets and the poor quality of the protective layer covering the corners of the components.

It should be noted that the material of the first protective layer includes yttrium oxide, and the material of the second protective layer includes Teflon.

As shown in Figure 2, Figure 2 is a cross-sectional view of another gas nozzle connected to the inner liner. In the method shown in FIG. 2, the gas nozzle 25 is fixed at the gas outlet of the plasma reactor by a snap ring (not shown in the figure), and the gap between the gas nozzle 25 and the gas outlet is sealed with a gasket and an O-ring. The gas nozzle 25 has a main gas injection channel 28, and the plasma reactor has an inner lining 24, a second protective layer 23, a gas transmission pipe 22 and a chamber wall 27, wherein the gas transmission pipe 22 is used to transmit corrosive gas.

In the method shown in FIG. 2, under ideal conditions, the inner surface of the gas outlet is separated from the plasma or free radical molecules 21 with a gasket. This method can only improve the corrosion problem to a certain extent, but the improvement effect is poor, and it still cannot guarantee the complete sealing effect and the problem that the second protective layer 23 is easily corroded at the corrosion point due to the poor film coverage at the corners.

The gas nozzles described in the above two methods can not well improve the problem of free radical molecules entering the gas transmission pipeline, resulting in the corrosion of the second protective layer on the surface of the gas outlet.

In order to solve the above-mentioned problems, the present invention provides a plasma reactor and a gas nozzle thereof. The plasma reactor has an inner liner, and the inner liner has a pipe for gas transmission. The gas nozzle includes: An inserting part, the first end of the inserting part is used to insert a gas outlet fixed to the pipe, and the second end opposite to the first end is used to be placed outside the pipe; An air outlet, one side surface of the air outlet is provided with an installation groove, the installation groove faces the second end of the insertion part, and the second end of the insertion part is connected with the bottom of the installation groove, the air outlet The opposite side surface has a main gas nozzle; Wherein, the gas nozzle has a main gas injection channel that communicates the first end of the insertion portion and the main gas nozzle; the inner liner has a mounting portion for being placed in the mounting groove, and the mounting portion It is located on the surface of the inner liner with the gas outlet, protrudes from the surface and surrounds the gas outlet; the inner side wall of the installation groove is used for sealing and fixing with the outer side of the installation part.

It can be seen from this that, in the technical solution provided by the present invention, the gas outlet in the plasma reactor has a protruding installation part, the protruding installation part is connected with the concave gas nozzle, and the concave gas nozzle is inserted into the gas outlet. Through the concave-convex nested design structure of the gas nozzle and the mounting part, the sealing performance of the joint position of the gas nozzle and the gas outlet can be effectively improved, and the problem of corrosion of the joint position by free radical molecules in the plasma can be effectively improved.

In addition, in the technical solution provided by the present invention, further, an auxiliary gas injection channel can be provided on the side wall of the gas nozzle, and the gas can be ejected from the main gas injection channel and the auxiliary gas injection channel at the same time, and the side injection gas can spray the nozzle The plasma in the surrounding reaction chamber is blown away from the gas outlet, thereby inhibiting the damage of the second protective layer on the inner surface of the gas outlet by the diffusion of free radical molecules, thereby preventing the occurrence of the problem of gas corrosion of the second protective layer.

In order to make the above-mentioned objects, features and advantages of the present invention more obvious and understandable, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

Example one

Referring to Figures 3 and 4, Figure 3 is a cross-sectional view of a convex liner provided by the present invention connected to a concave gas nozzle, and Figure 4 is a cross-sectional view of a convex liner provided by the present invention at the gas outlet.

As shown in Figure 3, the convex lining at the gas outlet in the plasma reactor is connected with the concave gas nozzle, and the concave gas nozzle is inserted into the gas outlet. Through the concave-convex nested design structure of the gas nozzle and the inner lining, the sealing performance of the joint position of the gas nozzle and the gas outlet can be effectively improved, and the problem of corrosion of the joint position by free radical molecules in the plasma can be effectively improved.

Specifically, the plasma reactor has an inner lining 33, and the inner lining 33 has a pipe 31 for gas transmission.

The gas nozzle 35 includes an insertion part 00, a first end of the insertion part 00 is used to be inserted and fixed at the gas outlet of the pipe 31, and a second end opposite to the first end is used to be placed in the The outside of the pipe 31; the outlet portion 39, one side surface of the outlet portion 39 has a mounting groove 45, the mounting groove 45 faces the second end of the insertion portion 00, and the second end of the insertion portion 00 and The bottom of the mounting groove 45 is connected, and the opposite surface of the gas outlet 39 has a main gas nozzle; wherein the gas nozzle 35 has a main gas nozzle that communicates the first end of the insertion portion 00 and the main gas nozzle. Gas injection channel 40; the lining 33 has a mounting portion 41 for placing in the mounting groove 45, the mounting portion 41 is located on the surface of the lining 33 with the gas outlet, protruding from the surface, And surround the gas outlet; the inner side wall of the mounting groove 45 is used for sealing and fixing the outer side of the mounting portion 41.

As shown in FIG. 3 and FIG. 4, there are also a second protective layer 32 and a first protective layer 34. In order to further improve the sealing performance, a first gasket 36, a second gasket 38, and a third gasket 37 are further included. The materials of these three-layer gaskets are all Teflon plastics, which are used for sealing to prevent gas leakage.

It should be noted that the second protective layer 32 may be Teflon, and the first protective layer 34 may be yttrium oxide. Among them, yttrium oxide has the effect of resisting corrosive gas corrosion, but due to the limitation of spraying technology, when forming the first protective layer 34, the yttrium oxide material cannot be sprayed perfectly in the relatively large depth and width holes. However, in the embodiment of the present invention, since the mounting portion 41 on the outer surface of the inner liner 33 is a convex structure, the yttrium oxide material can be successfully sprayed onto the convex outer surface of the inner liner 33. The inner liner 33 with the protruding mounting portion 41 is matched with the gas nozzle 35 of the mounting groove 45. The second protective layer 32 is protected behind the first gasket 36, the second gasket 38 and the third gasket 37. The sealing area is formed by the gas outlet. The surface has moved to the outer surface of the gas outlet. Even in the worst case, when the three-layer gasket cannot be sealed, the winding diffusion path will also enhance the barrier effect to free radical molecules, greatly reducing its corrosion to the second protective layer 32 , Increase the service life of the inner lining 33 and the second protective layer 32.

The structure of the inner lining 33 matches the structure of the gas nozzle 35, and the two can be nested and fixed to each other. The surface of the inner liner 33 provided with the gas outlet has a mounting portion 41 for being placed in the mounting groove 45, and the mounting portion 41 surrounds the gas outlet. Wherein, a groove 42 is provided on the outer side wall of the mounting portion 41, and the groove 42 is used to install the first gasket. In addition, FIG. 4 also shows a gas transmission pipe 31, a second protective layer 32 and a first protective layer 34.

In the manner shown in FIGS. 3 and 4, the thickness of the side wall of the installation groove 45 gradually decreases from the bottom of the installation groove to the top of the installation groove 45. In other manners, it may also be gradually increased or evenly uneven. Change.

As shown in FIG. 5, FIG. 5 is a cross-sectional view of the connection structure of the convex liner and the concave gas nozzle at the gas outlet provided by the present invention. In FIG. 5(a) and FIG. 5(c), the thickness d of the side wall of the installation groove 45 is uniform from the bottom of the installation groove 45 to the top of the installation groove 45. In FIG. 5( b ), the thickness d of the side wall of the installation groove 45 gradually increases from the bottom of the installation groove 45 to the top of the installation groove 45.

In the solution of the present invention, a connection structure in which a concave structure and a convex structure cooperate with each other is adopted. By matching the substrate of the convex structure with the gas nozzle of the concave structure, the sealing area moves from the inner surface of the gas outlet to the outer surface of the gas outlet , It can effectively improve the sealing performance of the joint position of the gas nozzle and the gas outlet, and effectively improve the problem of the free radical molecules in the plasma corroding the joint position.

According to the above description, in the technical solution of the present invention, the nozzle is provided with a mounting groove, which can be nested and sealed with the raised mounting part on the surface of the lining, forming a sealing structure outside the gas outlet, extending the diffusion path of the plasma, and making the plasma The body is gradually extinguished in the diffusion path into the pipe to avoid the corrosion of the side wall of the gas outlet by the plasma. Moreover, since the surface of the lining has a convex mounting part, the convex mounting part facing the outer surface of the mounting groove can form a yttrium oxide coating through the PS process. Even if the plasma diffusion problem occurs, the first contact of the plasma is the mounting part. The plasma corrosion-resistant yttrium oxide coating on the outer surface can well prevent plasma corrosion problems. The problem that the aluminum substrate of the pipeline is exposed due to the corrosion of the surface protective layer is avoided, and metal pollution can be effectively prevented.

Example two

In order to prevent corrosion caused by free radical molecules in the plasma, another gas nozzle is provided in the embodiment of the present invention.

6 and 7, FIG. 6 is a cross-sectional view of a gas nozzle provided by the present invention, and FIG. 7 is a design structure diagram of the main gas injection channel and the auxiliary gas injection channel in the gas nozzle provided by the present invention.

As shown in Fig. 6, the gas nozzle 55 at the gas outlet of the plasma reactor is inserted into the gas transmission pipe 52. The plasma reactor has an inner liner 54 with a pipe 52 for gas transmission in the inner liner 54. The gas nozzle 55 includes an insertion part 00, and a first end of the insertion part 00 is used for inserting and fixing. At the gas outlet of the pipe 52, the second end opposite to the first end is used to be placed outside the pipe 52. The first end of the insertion part 00 is used to insert and fix the gas outlet of the pipe 52, and the second end of the insertion part 00 is connected and fixed to the gas outlet 60, and the gas outlet 60 is located The position of the gas outlet.

In the manner shown in FIGS. 6 and 7, the surfaces of the air outlet 60 and the inner liner 54 opposite to each other are flat. Alternatively, as in the embodiment, the air outlet portion 60 and the inner liner 54 are fixed to each other through the above-mentioned concave-convex nesting structure to improve the sealing performance.

The top of the gas outlet 60 has a main gas nozzle; wherein the gas nozzle 55 has a main gas injection passage 57 that communicates the first end of the insertion portion 00 and the main gas nozzle. As shown in FIGS. 6 and 7, there is also a second protective layer 53, a chamber wall 56 and free radical molecules 51.

As in the above embodiment, the thickness of the side wall of the installation groove may gradually decrease from the bottom of the installation groove to the top of the installation groove, or increase, or be uniform.

As shown in FIGS. 6-7, the outer surface of the side wall of the installation groove has at least one auxiliary gas injection port 58; the auxiliary gas injection port 58 passes through the auxiliary gas injection channel 59 located in the gas outlet part and the main gas injection channel 57 connected. As shown in FIG. 6, the auxiliary gas nozzle 58 sprays gas toward the periphery of the gas outlet 60, and the plasma in the chamber can be blown away from the periphery of the gas nozzle 55, so as to reduce the effect of radical molecules on the gas in the plasma. Corrosion of the second protective layer at the position where the nozzle 55 is opposite to the gas outlet.

As shown in FIGS. 6-7, the outer surface of the side wall of the installation groove has a plurality of auxiliary gas nozzles 58, which are evenly distributed on the outer surface of the side wall of the installation groove. The number of the auxiliary gas nozzles 58 can be set based on requirements. The plurality of auxiliary gas nozzles 58 are evenly distributed on the outer surface of the side wall of the installation groove, so that the plasma around the nozzle can be evenly blown away.

In one way, as shown in Fig. 7(a), the auxiliary gas nozzle 58 is located at the same height position of the side wall of the installation groove; the left picture in Fig. 7(a) is a top view of the gas outlet 60 facing the main gas nozzle, and the right picture is A cross-sectional view of the gas nozzle 55. As shown in the right diagram in FIG. 7( a ), the auxiliary gas injection passage 59 is in vertical communication with the main gas injection passage 57.

In one manner, as shown in FIG. 7( f ), the auxiliary gas injection passage 59 is in oblique communication with the main gas injection passage 57. As shown in Figure 7(f). In this manner, the auxiliary gas injection channel 59 is preferably arranged to be inclined away from the main gas injection channel 57, so that the gas emitted from the auxiliary gas injection channel 59 can be injected toward the lining 54 to better prevent free radical molecules in the plasma. Corrosion of the second protective layer in the gas outlet.

In one manner, as shown in the left diagram of FIG. 7(a) and FIGS. 7(b) and 7(d), the axis of the auxiliary gas injection passage 59 passes through the axis of the main gas injection passage 57.

In one manner, as shown in FIG. 7( c ), the axis of the auxiliary gas injection channel 59 and the axis of the main gas injection channel 57 do not intersect.

In one way, as shown in the left diagram in Fig. 7(d), the diameter of the auxiliary gas injection passage 59 gradually decreases from the main gas injection passage 57 to the auxiliary gas injection port 58, to increase the injection pressure, Or as shown in the right figure in Figure 7(d), the diameter of the auxiliary gas injection passage 59 gradually decreases from the main gas injection passage 57 to the auxiliary gas injection port 58, or increases, or remains uniform, Or, as shown in the left image of FIG. 7(a), FIG. 7(b), and FIG. 7(c), the diameter of the auxiliary gas injection channel 59 is uniform.

In one way, as shown in FIG. 7(e), the diameter of the main gas injection passage 57 gradually decreases from the insertion portion to the gas outlet portion to increase the injection pressure, or as shown in FIG. 7(a) As shown in the right figure, it is uniform and unchanged. As shown in Figure 7 (e).

It should be noted that in order to control the gas flow distribution, the size and aperture structure of the main gas injection channel 57 and the auxiliary gas injection channel 59 can be designed based on requirements, wherein the total flow rate of the gas outlet is greater than or equal to the main gas The sum of the gas flow rates of the injection passage 57 and the auxiliary gas injection passage 59.

It can be seen from the above description that in the embodiment of the present invention, in order to prevent gas corrosion, an auxiliary gas injection channel is provided on the side wall of the gas nozzle, so that the gas can be ejected through the auxiliary gas injection channel and the main gas injection channel at the same time, effectively reducing the The gas injection channel has a large injection pressure caused by the gas flow impact, and the gas ejected through the auxiliary gas nozzle can blow the free radical molecules in the plasma at the gas outlet away from the gas outlet, thereby inhibiting the diffusion of free radical molecules on the inner surface of the gas outlet Damage to the second protective layer, thereby preventing the occurrence of the problem of gas corrosion of the second protective layer.

Example three

Based on the above description, another embodiment of the present invention also provides a plasma reactor.

Referring to Fig. 8, Fig. 8 is a cross-sectional view of a gas nozzle at the gas outlet of a plasma reactor provided by the present invention.

As shown in FIG. 8, the plasma reactor includes a reaction chamber, a lining 63, and a gas nozzle 65. The gas nozzle 65 is the gas nozzle described in the above-mentioned embodiment; the reaction chamber includes the side wall of the reaction chamber. The space enclosed by the side walls of the reaction chamber is a plasma environment; the inner lining 63 is located on the side walls of the reaction chamber, the inner lining 63 has a pipe 61 for gas transmission, and the gas nozzle 65 is installed in the The gas outlet of the pipe 61; the gas nozzle 65 has a mounting groove 45, the lining 63 has a mounting portion 41 protruding from its surface, for being placed in the mounting groove 45; the lining 63 faces the The surface of the plasma environment is coated with a first protective layer 64. The lining 63 has a mounting portion 41 for placing in the mounting groove 45. The mounting portion 41 is located on the surface of the lining 63 with the gas outlet, protruding from the surface, and the mounting portion 41 surrounds the gas. The outlet is provided, and the gas nozzle 65 can be installed on the gas outlet through the mounting portion 41, and the structure of the inner liner 63 matched with it can also refer to the manner and structure described in the above-mentioned embodiment.

Wherein, the material of the first protective layer 64 may be yttrium oxide.

In addition, a second protective layer is also coated on the side wall of the gas outlet, and the material of the second protective layer may be Teflon.

It should be noted that the first protective layer 64 can be resistant to plasma corrosion, but due to the limitation of the preparation process, it cannot be formed in the gas outlet and pipe with a relatively large depth and width, so the surface of the lining 63 facing the plasma environment is coated First protection layer 64. In addition, a second protective layer is coated on the side walls of the gas outlet and the inner surface of the pipe 61. The pipe 61 is filled with corrosive gas. The second protective layer 62 has the function of preventing gas corrosion in the pipe. It is used to protect the lining 63 from Corroded by gas.

In the embodiment of the present invention, the outer surface of the side wall of the mounting portion 00 has a groove surrounding the mounting portion 41, the groove is used to place the first gasket 66, and the first gasket 66 is used to seal the side wall of the installation groove 45 The inner surface of the mounting portion 41 and the outer surface of the side wall of the mounting portion 41. Wherein, the material of the first gasket 66 may be special plastic, which is resistant to plasma corrosion, for example, it may be Teflon plastic.

Further, the plasma reactor further includes a second gasket 68, which is arranged between the top surface of the mounting portion 41 and the bottom of the mounting groove 45 to seal the top of the mounting portion 41. The area opposite to the bottom of the mounting groove 45; and/or, a third gasket 67, which is arranged on the top surface of the side wall of the mounting groove 45 and the inner liner 63 having the gas outlet Between the side surfaces, to seal the opposite area between the top surface of the side wall of the installation groove 45 and the side surface of the inner liner 63 with the gas outlet.

It should be noted that the above three types of gaskets are all special plastics, which are used to seal the gap at the gas outlet to prevent gas leakage.

Referring to FIG. 9, FIG. 9 is a cross-sectional view of the connection structure of the convex liner and the concave gas nozzle at the gas outlet provided by the present invention.

As shown in FIG. 9(a) and FIG. 9(c), the thickness d of the side wall of the installation groove 45 is uniform from the bottom of the installation groove 45 to the top of the installation groove 45. In FIG. 9( b ), the side wall thickness d of the installation groove 45 gradually increases from the bottom of the installation groove 45 to the top of the installation groove 45.

As shown in Fig. 9(b), the mounting portion 41 is higher than the side surface of the inner liner 33 having the gas outlet. It should be noted that the side walls of the mounting portion 41 and the air outlet portion may be designed as a tapered structure to improve the spraying efficiency of the first protective layer.

As shown in Figure 9(a), the inner liner 33 has a protruding structure 71 on one side surface of the gas outlet. The protruding structure 71 surrounds the mounting portion 41 and is connected to the mounting portion 41. There is a gap therebetween, and the side wall of the mounting groove 45 is placed in the gap. It should be noted that the number of the protruding structures 71 can be set based on requirements to facilitate better sealing. The protruding structure 71 is arranged outside the pipe 61, which facilitates the coating of yttrium oxide through the PS process. The yttrium oxide has the effect of plasma corrosion resistance. In addition, the protruding structure 71 is far away from the gas outlet, and the diffusion path will also be blocked. The plasma barrier effect is enhanced, and the corrosion of the inner lining 33 is greatly reduced.

As shown in FIG. 9(c), the inner liner 33 has a receiving groove 72 in the side surface with the gas outlet, the side wall of the mounting groove 45 is placed in the receiving groove 72, and the receiving groove 72 Surrounding the gas outlet, the side wall of the containing groove 72 between the containing groove 72 and the gas outlet is the mounting portion 41. The concave-convex structure of the accommodating groove 72 and the mounting portion 41 can be more effectively sealed.

It can be seen from the above description that in the technical solution of the present invention, the nozzle is provided with a mounting groove, which can be nested and sealed with the raised mounting part on the surface of the lining, forming a sealing structure outside the gas outlet, extending the diffusion path of the plasma, and making the plasma The body is gradually extinguished in the diffusion path into the pipe to avoid the corrosion of the side wall of the gas outlet by the plasma. Moreover, since the surface of the lining has a convex mounting part, the convex mounting part facing the outer surface of the mounting groove can form a yttrium oxide coating through the PS process. Even if the plasma diffusion problem occurs, the first contact of the plasma is the mounting part. The plasma corrosion-resistant yttrium oxide coating on the outer surface can well prevent plasma corrosion problems. The problem that the aluminum substrate of the pipeline is exposed due to the corrosion of the surface protective layer is avoided, and metal pollution can be effectively prevented.

The various embodiments in this specification are described in a progressive, or parallel, or progressive and parallel combination. Each embodiment focuses on the differences from other embodiments. The same and similar parts of the various embodiments are mutually exclusive. Just see.

It should also be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply these entities or operations. There is any such actual relationship or order between. Moreover, the terms "including", "including" or any other variations thereof are intended to cover non-exclusive inclusion, so that an article or device including a series of elements includes not only those elements, but also other elements that are not explicitly listed. Or it also includes elements inherent to such items or equipment. If there are no more restrictions, the element defined by the sentence "including one..." does not exclude the existence of another same element in the article or equipment that includes the above element.

The above description of the disclosed embodiments enables those with ordinary knowledge in the art to implement or use the present invention. Various modifications to these embodiments will be obvious to those skilled in the art, and the general principles defined in this document can be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown in this document, but should conform to the widest scope consistent with the principles and novel features disclosed in this document.

00: Insert part 10, 28, 40, 57: main gas injection channel 11, 21, 51: free radical molecules 12, 22: Gas transmission pipeline 13,23,32,53: second protective layer 14,24,33,54,63: lining 15, 25, 35, 55, 65: gas nozzle 16, 37, 67: third washer 17, 36, 66: first washer 18: erosion point 19, 34, 64: the first protective layer 20, 38, 68: second washer 27, 56: wall 31, 52, 61: pipeline 39, 60: Exhalation part 41: Installation Department 45: installation slot 58: auxiliary gas nozzle 59: auxiliary gas injection channel 71: raised structure 72: holding tank d: side wall thickness

In order to more clearly describe the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are merely It is an embodiment of the present invention. For those of ordinary skill in the art, other drawings can be obtained according to the provided drawings without making progressive labor. Figure 1 is a cross-sectional view of a gas nozzle connecting the inner liner; Figure 2 is a cross-sectional view of another gas nozzle connecting the inner liner; Figure 3 is a cross-sectional view of a convex liner connected to a concave gas nozzle provided by the present invention; 4 is a cross-sectional view of the gas outlet of a convex liner provided by the present invention; 5 is a cross-sectional view of the connection structure of the convex liner and the concave gas nozzle at the gas outlet provided by the present invention; Figure 6 is a cross-sectional view of a gas nozzle provided by the present invention; 7 is a design structure diagram of the main gas injection channel and the auxiliary gas injection channel in the gas nozzle provided by the present invention; 8 is a cross-sectional view of a gas nozzle at the gas outlet of a plasma reactor provided by the present invention; 9 is a cross-sectional view of the connection structure of the convex liner and the concave gas nozzle at the gas outlet provided by the present invention.

00: Insert part

32: The second protective layer

33: Lining

35: gas nozzle

37: third washer

36: first washer

34: The first protective layer

38: second washer

31: Pipeline

39: Exhalation Department

40: Main gas injection channel

41: Installation Department

45: installation slot

Claims (17)

A gas nozzle for a plasma reactor. The plasma reactor has an inner liner with a pipe for gas transmission. The gas nozzle includes: An insertion portion, a first end of the insertion portion is inserted into a gas outlet fixed to the pipe, and a second end opposite to the first end is used to be placed outside the pipe; An air outlet, one side surface of the air outlet has a mounting groove facing the second end of the insertion part, and the second end of the insertion part is connected to the bottom of the installation groove, and the air outlet is opposite On the other side of the surface there is a main gas nozzle; Wherein, the gas nozzle has a main gas injection channel connecting the first end of the insertion portion and the main gas nozzle; the liner has a mounting portion for placing in the mounting groove, and the mounting portion is located The inner liner has a surface of the gas outlet, protrudes from the surface, and surrounds the gas outlet; the inner side wall of the installation groove and the outer side surface of the installation part are relatively sealed and fixed. The gas nozzle according to claim 1, wherein the thickness of the side wall of the installation groove gradually decreases from the bottom of the installation groove to the top of the installation groove, or increases, or is uniformly unchanged. The gas nozzle according to claim 1, wherein the outer surface of the side wall of the installation groove has at least one auxiliary gas nozzle; The auxiliary gas injection port communicates with the main gas injection channel through the auxiliary gas injection channel located in the gas outlet. The gas nozzle according to claim 3, wherein the outer surface of the side wall of the installation groove has a plurality of auxiliary gas nozzles, and the auxiliary gas nozzles are evenly distributed on the outer surface of the side wall of the installation groove. The gas nozzle according to claim 4, wherein the auxiliary gas nozzle is located at the same height position of the side wall of the installation groove; The auxiliary gas injection channel is in vertical communication with the main gas injection channel; or, the auxiliary gas injection channel is in oblique communication with the main gas injection channel. The gas nozzle according to claim 3, wherein the axis of the auxiliary gas injection channel passes through the axis of the main gas injection channel, or the axis of the auxiliary gas injection channel and the axis of the main gas injection channel do not intersect. The gas nozzle according to claim 3, wherein the diameter of the auxiliary gas injection channel gradually decreases from the main gas injection channel to the auxiliary gas injection port, or gradually increases, or is uniform. The gas nozzle according to any one of claims 1 to 7, wherein the diameter of the main gas injection passage gradually decreases from the insertion portion to the gas outlet portion, or is uniformly unchanged. A plasma reactor, which includes: A reaction chamber, an inner liner, and a gas nozzle, the gas nozzle being the gas nozzle according to any one of claims 1 to 8; The reaction chamber includes a reaction chamber side wall, the space enclosed by the reaction chamber side wall is a plasma environment; the lining is located on the reaction chamber side wall, the lining has a pipe for gas transmission; the gas nozzle is installed In a gas outlet of the pipeline; the gas nozzle has a mounting groove, the lining has a mounting portion protruding from its surface for placing in the mounting groove; the lining is coated on the surface facing the plasma environment Covered with a first protective layer. The plasma reactor according to claim 9, wherein the outer surface of the side wall of the mounting portion has a groove surrounding the mounting portion, and the groove is used for placing a first gasket, and the first gasket is used for sealing the The inner surface of the side wall of the installation groove and the outer surface of the side wall of the installation part. The plasma reactor according to claim 9, which further includes: A second gasket arranged between the top surface of the mounting portion and the bottom of the mounting groove to seal the opposite area between the top surface of the mounting portion and the bottom of the mounting groove; And/or, a third gasket, which is arranged between the top surface of the side wall of the installation groove and the surface of the liner on the side with the gas outlet to seal the top surface of the side wall of the installation groove and The liner has an opposing area of the surface on one side of the gas outlet. The plasma reactor according to claim 9, wherein the mounting portion is higher than the surface of the liner on the side having the gas outlet. The plasma reactor according to claim 12, wherein the surface of the liner on the side with the gas outlet further has a convex structure, and the convex structure surrounds the mounting portion and has a gap between the mounting portion and the mounting portion. A gap, the side wall of the installation groove is placed in the gap. The plasma reactor according to any one of claims 9 to 11, wherein the surface of the liner on the side with the gas outlet has a containing groove, and the side wall of the containing groove is placed in the containing groove, The accommodating groove surrounds the gas outlet, and the side wall of the accommodating groove between the accommodating groove and the gas outlet is the mounting part. The plasma reactor according to claim 9, wherein the material of the first protective layer includes yttrium oxide. The plasma reactor according to claim 9, wherein the side wall of the gas outlet is coated with a second protective layer, and the material of the second protective layer includes: Teflon. The plasma reactor according to claim 10, wherein the material of the first gasket is Teflon plastic.

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