TW202011044A - An ultrasonic stereo directional wave guiding device and an ultrasonic transducer device - Google Patents

Abstract

An ultrasonic stereo directional wave guiding device and an ultrasonic transducer device, configured to configure a plurality of ultrasonic components therein, comprising: a base part which comprises a plurality of waveguide grooves, wherein the waveguide grooves are open on an upper surface of the base. The waveguide groove is formed in a cylindrical shape, and each of the waveguide grooves is configured to configure the ultrasonic component; wherein the number of the waveguide grooves is at least two, and the center is symmetrically disposed. The waveguide grooves outside the center are arranged according to a spherical surface, so that the guiding directions of the guiding grooves outside the center are directed to a three-dimensional space formed by the spherical center of the spherical surface.

Description

Ultrasonic stereo directional wave guide device and ultrasonic sensor device

The invention relates to an ultrasonic element, in particular to an ultrasonic stereo directional wave guide device and an ultrasonic sensor device.

Ultrasonic sensors (also known as ultrasonic transmitters and receivers) are transducers that can both transmit and receive ultrasonic waves. This type of component determines the sensor and target by measuring the time interval between transmission and reception by transmitting ultrasonic waves and receiving reflected ultrasonic waves. the distance between. Since the speed of sound is about 340 meters per second, ultrasound is a good distance measuring element for short distance measurements.

At present, ultrasonic sensors are used to measure distances, and are mainly used in short-range distance measurement such as reversing radar. Since the main function of the reversing radar is that the horizontal detection range like the rearview mirror is wider, and the vertical detection range is narrower, the design of the guided wave structure of the ultrasonic sensor is mostly developed in the direction of a similar flat structure. , Such as US5,987,992, US6,181,645, US6,250,162, US6,465,935 and other patents. Because the technology of reversing radar is used in a specific forward direction (reverse direction), the movement direction of its objects is relatively consistent. Therefore, as long as the guided wave structure of the ultrasonic sensor is properly designed, good results can be obtained.

However, at present, ultrasonic sensors have not yet been used for collision avoidance applications of robots. The reason is that the guided wave structure of the traditional ultrasonic sensor is not suitable for the application scenarios of robot collision avoidance. The robot arm of the robot has the characteristics of rapid rotation and rapid movement (linear speed up to 2 meters per second, rotation angular speed up to 8 meters per second) and other characteristics. This characteristic will require an ultrasonic sensor capable of detecting objects in three-dimensional space. Therefore, the reversing radar type structure is completely unsuitable. Therefore, how to develop an ultrasonic sensor that can detect a three-dimensional space has become a research direction worthy of development in the application of ultrasonic sensors to robots.

In order to achieve the above object, the present invention provides an ultrasonic stereo directional wave guide device and an ultrasonic sensor device. A plurality of different ultrasonic elements arranged in a wave guide groove can emit a concentrated beam of ultrasonic waves, thereby forming a spherical space Ultrasonic detection of space allows objects such as robots to move and rotate at high speed to form a visual distance detection mechanism, which can eventually achieve active robot collision avoidance.

The invention provides an ultrasonic three-dimensional directional wave guide device for arranging a plurality of ultrasonic elements therein, including: a base including a plurality of wave guide grooves, the wave guide grooves opening on the upper surface of the base The wave guiding grooves are cylindrical, and each wave guiding groove is used to configure one ultrasonic element; wherein, the number of the wave guiding grooves is at least two, and the center is a symmetrical configuration. The wave guiding grooves arranged outside the center are arranged according to a spherical surface, so that the wave guiding directions of the wave guiding grooves outside the center point to a three-dimensional space formed by the spherical center of the spherical surface .

The invention further provides an ultrasonic sensor device, comprising: a plurality of ultrasonic elements; a base, comprising a plurality of wave guiding grooves, the wave guiding grooves are opened on the upper surface of the base, the wave guiding grooves are It is cylindrical, and each of the wave guiding grooves is used to configure one ultrasonic element; wherein, the number of the wave guiding grooves is at least two, arranged symmetrically with a center, and arranged outside the center. The wave guiding grooves are configured with the wave guiding grooves according to a spherical surface, so that the wave guiding directions of the wave guiding grooves outside the center point to a three-dimensional space formed by the spherical center of the spherical surface; and a circuit board, the base The base is fixed on the circuit board, and the ultrasonic elements are electrically connected to the circuit board.

In order to make the above and other objects, features, and advantages of the present invention more comprehensible, a few preferred embodiments are described below in conjunction with the accompanying drawings, which are described in detail as follows (embodiments).

9, 9a, 9b

11‧‧‧Dock device

10‧‧‧ circuit board

40‧‧‧conductive layer

111~119‧‧‧Guide wave groove

111’~119’‧‧‧Guide Point

121~129‧‧‧Guide groove

201~209‧‧‧Ultrasonic components

211~219‧‧‧Ultrasonic components

D1, D2, D3 ‧‧‧D1

θ 1, θ 2‧‧‧ included angle

FIGS. 1A to 1G show a first specific embodiment of the ultrasonic stereo directional wave guide device and the ultrasonic sensor device of the present invention.

2A-2C, in the embodiment of the present invention, a configuration pattern of a plurality of waveguide grooves with different symmetrical pattern structures. The embodiments of FIGS. 3A-3F illustrate a specific embodiment using a pair of guided wave groove structures as the embodiment of FIG. 1A.

Figures 4A~4F, respectively, reveal another plan arrangement in plan view and two arrangements of spherical centers and spherical radii.

5A and 5B are schematic cross-sectional views taken along lines A-A and B-B of different embodiments in the embodiment of FIG. 1A.

The invention uses a spherical model to configure a plurality of ultrasonic wave guide grooves, so that multiple different ultrasonic elements arranged in the wave guide grooves can emit concentrated beam ultrasonic waves, thereby forming an ultrasonic detection space in a spherical space, and further It can make objects with high speed and rotation, such as robots, constitute a visual distance detection mechanism, which can eventually achieve active robot collision avoidance. What's more, it can be used in different applications that require spherical multi-view stereo space scanning For example, ultrasonic scanning of pipes.

In the following, several embodiments will be listed to illustrate the technical features of the present invention.

First, please refer to FIGS. 1A to 1G, a first specific embodiment of the ultrasonic stereo directional wave guiding device and ultrasonic sensor device of the present invention, and the ultrasonic stereo directional wave guiding device provided by the present invention is shown in FIGS. 1A-1E As shown in the figure, it includes: a base 11. The base 11 is mounted on the circuit board 10. The base 11 includes a plurality of wave guide grooves 111, wave guide grooves 112, wave guide grooves 113, wave guide grooves 114, wave guide grooves 115, wave guide grooves 116, wave guide grooves 117, wave guides The groove 118 and the wave guiding groove 119 are opened on the upper surface of the base 11. The wave guiding grooves are cylindrical (horn-shaped), and each wave guiding groove is used to configure an ultrasonic wave element. Among them, there are at least two waveguide grooves. In this embodiment, nine waveguide grooves are configured. These wave guide grooves are symmetrically arranged with a center, and the wave guide grooves arranged outside the center are configured with a wave guide groove according to a spherical surface (sphere center 9), so that the wave guide direction of the wave guide grooves outside the center points to the spherical surface A three-dimensional space formed by the spherical center 9.

Please refer to FIG. 1B and FIG. 1C, which are cross-sectional views along the cross-sectional lines A-A and B-B of FIG. 1A, respectively. It can be clearly understood from FIGS. 1A, 1B, and 1C that the top surface of the base 11 has an irregular spherical structure, and the waveguide groove 111, the waveguide groove 112, the waveguide groove 113, and the waveguide The groove 114, the wave guide groove 115, the wave guide groove 116, the wave guide groove 117, the wave guide groove 118, and the wave guide groove 119 are arranged on a spherical surface pointed by the spherical center 9 (radius R3). Among them, the bottom center of the wave guiding groove 111, the wave guiding groove 112, the wave guiding groove 113, and the wave guiding groove 114 are arranged on the spherical surface of the spherical center 9 at an angle θ1, so that the wave guiding groove 111, the wave guiding groove The center lines of the groove 112, the wave guiding groove 113, and the wave guiding groove 114 point in the direction of the angle θ 1 of the spherical center 9, so that the ultrasonic elements arranged therein can transmit or receive ultrasonic waves in this direction. In addition, the wave guide groove 111, the wave guide groove 112, the wave guide groove 113, and the wave guide groove 114 have the same distance from each other, and form a planar square structure, as shown in FIG. 1A. The center of the bottom of the wave guide groove 115, the wave guide groove 116, the wave guide groove 117, and the wave guide groove 118 are arranged on the spherical surface of the spherical center 9 at an angle θ2, so that the wave guide groove 115, the wave guide groove 116 The center lines of the wave guide groove 117 and the wave guide groove 118 point in the direction of the angle θ 1 of the spherical center 9, so that the ultrasonic element disposed therein can transmit or receive ultrasonic waves in this direction. In addition, the wave guide groove 115, the wave guide groove 116, the wave guide groove 117, and the wave guide groove 118 are spaced apart from each other to form a planar square structure, as shown in FIG. 1A.

In other words, the configuration of the waveguide groove in FIG. 1A is to arrange a waveguide groove 119 with a center, a first configuration radius from one of the centers is greater than the first circumference of the bottom diameter D1 of the waveguide groove, and more than three More than one equidistant wave-guiding grooves, that is, wave-guiding groove 115, wave-guiding groove 116, wave-guiding groove 117, and wave-guiding groove 118. The second configuration radius from the center is greater than twice the second circumference of the bottom diameter D1 of the guide groove, and more than three equal-spaced guide grooves are arranged, that is, the guide groove 111, the guide wave The groove 112, the wave guide groove 113, and the wave guide groove 114.

It can be found that the embodiment of FIGS. 1A-1C adopts a symmetrical square to configure the wave-guiding groove opening in a plan view, and uses a spherical surface to configure the wave-guiding direction of the wave-guiding groove. The symmetrical structure is only an embodiment of the present invention and is not intended to limit the present invention. Other asymmetrical configuration methods can also achieve the purpose of guiding waves by enlarging the area of the spherical surface in three-dimensional space.

Please refer to FIG. 1D, which is a schematic diagram of an enlarged area of a spherical surface in the wave guiding direction of the present invention. It can be found that due to the wave guiding groove 111, the wave guiding groove 112, the wave guiding groove 113, the wave guiding groove 114, the wave guiding groove 115, the wave guiding groove 116, the wave guiding groove 117, the wave guiding groove 118. The wave guiding groove 119 is arranged on a spherical surface pointed by the spherical center 9 (radius R3), therefore, its wave guiding direction will expand outwards with the spherical center 9 as the center, and the guide points to a larger area of the guide Wave point 111', guided wave point 112', guided wave point 113', guided wave point 114', guided wave point 115', guided wave point 116', guided wave point 117', guided wave point 118', guided wave point 119'. In other words, through the spherical guided wave directivity configuration, the present invention allows multiple guided grooves to jointly detect objects in a larger three-dimensional space.

Next, please refer to FIG. 1E, which is an enlarged schematic view of Part 2 in FIG. 1B, which illustrates the structure of the waveguide groove 119. The diameter D1 of the bottom of the waveguide groove 119 is between 1/2 and 1 times the wavelength of the ultrasonic wave emitted by the ultrasonic element, and the height H1 is between 1/2 and 3/2 times the wavelength of the ultrasonic wave. The opening diameter D2 of the waveguide groove 119 is larger than the bottom diameter D1 of the waveguide groove 119, so that the structure of the waveguide groove 119 in this embodiment is trumpet-shaped. Preferably, the diameter D2 is between 1.1 and 2 times the diameter D1. In addition, the conductive layer 40 is disposed on the upper surface of the base 11 and surrounds the waveguide groove to form an anti-electromagnetic interference layer. Moreover, the opening edge 3 of the wave guiding groove 119 is arc-shaped, and the opening edge 3 of the wave guiding groove 119 is higher than the top surface of the conductive layer 40. In this way, the ultrasonic waves can not form interference points at the opening.

As for another embodiment of the present invention, the conductive layer 40 may not be disposed, and the opening edge 3 of the wave guiding groove 119 also forms an arc-shaped opening. In this way, the ultrasonic waves can not form interference points at the opening.

Among them, the material of the base 11 is a plastic material. The use of plastic material can achieve the purpose of easy shaping and easy control of the smoothness of the waveguide groove, which can further reduce the ultrasonic impedance of the waveguide groove.

In addition, in FIG. 1B, the size of the radius Rc of the spherical surface mapped from the spherical center 9 to the bottom surface of the guide groove and the guide angle (θ 1) of the guide groove can be different according to the size of the guide groove It is optimized for the size of the actual wave guide device. Among them, the angle of the guided wave (θ 1) can be adjusted within 360 degrees. In other words, the ultrasonic stereo directional wave-guiding device can be made into a spherical structure, and the ultrasonic stereo directional wave-guiding device with a full viewing angle can be made.

Next, please refer to FIGS. 1F and 1G, which are the wave guide groove 111, the wave guide groove 112, the wave guide groove 113, the wave guide groove 114, the wave guide concave of the ultrasonic stereo directional wave guide device of the present invention The groove 115, the wave guide groove 116, the wave guide groove 117, the wave guide groove 118, and the wave guide groove 119 are correspondingly configured with an ultrasonic element 201, an ultrasonic element 202, an ultrasonic element 203, an ultrasonic element 204, an ultrasonic element 205, A schematic diagram of the ultrasonic element 206, the ultrasonic element 207, the ultrasonic element 208, and the ultrasonic element 209. After the circuit board 10 is electrically connected to the ultrasonic element 201, the ultrasonic element 202, the ultrasonic element 203, the ultrasonic element 204, the ultrasonic element 205, the ultrasonic element 206, the ultrasonic element 207, the ultrasonic element 208, the ultrasonic element 209 (not shown), the base 11 is fixed to the circuit board 10 to constitute the ultrasonic sensor device of the present invention.

In FIGS. 1F and 1G, the ultrasonic element 201, the ultrasonic element 202, the ultrasonic element 203, the ultrasonic element 204, the ultrasonic element 205, the ultrasonic element 206, the ultrasonic element 207, the ultrasonic element 208, and the ultrasonic element 209 may be ultrasonic transmitter-receiver, ultrasonic The component transmits and receives ultrasonic waves through the same guided groove.

The embodiments shown in FIGS. 1A-1G have completely disclosed how the present invention uses the wave guiding directions of the multiple wave guiding grooves to be arranged in a spherical manner, thereby achieving the purpose of guiding the spherical three-dimensional space. In addition, the foregoing has explained that the present invention can achieve the purpose of guiding waves in a spherical three-dimensional space through the arrangement of a plurality of waveguide grooves with a symmetric structure or an asymmetric structure. Next, please refer to FIGS. 2A to 2C, which reveal a plurality of different symmetrical pattern structures of the waveguide grooves.

FIG. 2A is a design in which a wave guide groove arranged in the center is matched with three wave guide grooves arranged in the first circumference, and the three wave guide grooves are arranged in a regular triangle. FIG. 2B is a design in which a waveguide groove arranged in the center is matched with six waveguide grooves arranged in the first circumference, and the three waveguide grooves are arranged in a regular hexagon. FIG. 2C is a design in which a wave guide groove arranged in the center is matched with six wave guide grooves arranged in the first circumference, and the three wave guide grooves are arranged in a regular hexagon.

The different embodiments of FIGS. 2A-2C can illustrate that the present invention uses different symmetrical arrangements to form a guided wave arrangement in a spherical three-dimensional space. As mentioned above, the asymmetric arrangement can also constitute a guided wave arrangement in a spherical three-dimensional space.

The embodiments of FIGS. 1A-1G and FIGS. 2A-2C can be used in an application example in which one ultrasound transmitting receiver is arranged for each guided groove. As for another embodiment of the present invention, a mode in which a guided wave groove is configured with an ultrasonic transmitter or an ultrasonic receiver may also be used. The present invention is based on the aforementioned basis, and each of the original waveguide grooves is designed as a pair of waveguide grooves, which can be implemented accordingly.

Please refer to the embodiments of FIGS. 3A-3F, which illustrate specific embodiments using the pair of guided groove structures as the embodiment of FIG. 1A.

First, please refer to FIG. 3A, which is a top view of a fifth embodiment of the present invention. Please also refer to FIG. 3B and FIG. 3C, both of which are schematic cross-sectional views along the cross-sectional lines A-A and B-B in FIG. 3A. Comparing Figures 1A~1C, it can be found that the difference between the examples in Figures 3A~3C is that the examples in Figures 3A~3C use two sets of waveguide grooves in the examples in Figures 1A~1C, and The side-by-side manner is jointly formed in the base 11. In other words, in the embodiment of FIGS. 3A~3C, there are two spherical centers 9a and 9b, which correspond to the waveguide groove 111, the waveguide groove 112, the waveguide groove 113, and the waveguide Wave guide groove combination of groove 114, wave guide groove 115, wave guide groove 116, wave guide groove 117, wave guide groove 118, wave guide groove 119, and corresponding wave guide groove 121, wave guide Wave groove 122, wave guide groove 123, wave guide groove 124, wave guide groove 125, wave guide groove 126, wave guide groove 127, wave guide groove 128, wave guide groove 129. Among them, the wave guiding groove 111 and the wave guiding groove 121, the wave guiding groove 112 and the wave guiding groove 122, the wave guiding groove 113 and the wave guiding groove 123, the wave guiding groove 114 and the wave guiding groove 124, Wave guide groove 115 and wave guide groove 125, wave guide groove 116 and wave guide groove 126, wave guide groove 117 and wave guide groove 127, wave guide groove 118 and wave guide groove 128, wave guide The groove 119 and the waveguide groove 129 respectively form a combination of a pair of waveguide grooves. Each pair of guided wave grooves is respectively equipped with an ultrasonic transmitter and an ultrasonic receiver, as shown in Figures 3D and 3E. FIG. 3D is a schematic diagram of a wave-guiding groove in FIG. 3A into which an ultrasonic transmitter and an ultrasonic receiver are placed, and a cross-sectional view along the A-A section line.

Since the waveguide groove 111, the waveguide groove 112, the waveguide groove 113, the waveguide groove 114, the waveguide groove 115, the waveguide groove 116, the waveguide groove 117, the waveguide groove 118, the guide The wave guide groove combination of the wave groove 119 corresponds to the spherical center 9a, the wave guide groove 121, the wave guide groove 122, the wave guide groove 123, the wave guide groove 124, the wave guide groove 125, the wave guide groove 126, the combination of the guide groove 127, the guide groove 128, and the guide groove 129 correspond to the spherical center 9b, therefore, the ultrasonic element 201, the ultrasonic element 202, the ultrasonic element 203, the ultrasonic element 204, the ultrasonic element 205, The ultrasonic element 206, the ultrasonic element 207, the ultrasonic element 208, and the ultrasonic element 209 are placed in the waveguide groove 111, the waveguide groove 112, the waveguide groove 113, the waveguide groove 114, the waveguide groove 115, the waveguide groove Groove 116, wave guide groove 117, wave guide groove 118, wave guide groove 119, and the ultrasonic element 211, ultrasonic element 212, ultrasonic element 213, ultrasonic element 214, ultrasonic element 215, ultrasonic element 216, ultrasonic element 217, the ultrasonic element 218, the ultrasonic element 219 are placed in the waveguide groove 121, the waveguide groove 122, the waveguide groove 123, the waveguide groove 124, the waveguide groove 125, the waveguide groove 126, the waveguide groove Among the groove 127, the wave guide groove 128, and the wave guide groove 129, a pair of combinations of the ultrasonic transmitter and the ultrasonic receiver corresponding to the configuration of the ultrasonic transmitter and receiver elements in the embodiment of FIG. 1E can be formed.

In addition, in FIGS. 3B and 3C, the spherical center 9a and the spherical center 9b correspond to the same radius as the waveguide groove 119 and the waveguide groove 129. Therefore, whether the ultrasonic wave transmitter or the ultrasonic wave receiver is placed on the guided wave Both groove groups are available. In other words, the ultrasonic element 201, the ultrasonic element 202, the ultrasonic element 203, the ultrasonic element 204, the ultrasonic element 205, the ultrasonic element 206, the ultrasonic element 207, the ultrasonic element 208, and the ultrasonic element 209 may all be ultrasonic transmitters or ultrasonic receivers; and The ultrasonic element 211, the ultrasonic element 212, the ultrasonic element 213, the ultrasonic element 214, the ultrasonic element 215, the ultrasonic element 216, the ultrasonic element 217, the ultrasonic element 218, and the ultrasonic element 219 may all be ultrasonic transmitters or ultrasonic receivers. The limitation is that the two combinations must be combined with a set of ultrasonic transmitters and a set of ultrasonic receivers.

Next, please refer to Figure 3F, and please also refer to Figure 1E, the difference between the two is that Figure 3F has an additional waveguide groove 129 adjacent to the waveguide groove 119, the bottom center distance between the two D3 , Which needs to be greater than 1 ultrasonic sensor wavelength. The rest are the same as those in FIG. 1E, and will not be repeated here.

The structure of the pair of guided wave groove groups may also be configured differently from the embodiments of FIGS. 3A to 3F.

Please refer to Figs. 4A~4F, which respectively disclose another plan arrangement method in a plan view and two arrangement methods of spherical centers and spherical radii.

Please refer to FIGS. 4A to 4D, which are still another specific embodiment of the ultrasonic ultrasonic stereo directional guided wave device and the ultrasonic sensor device of the present invention. Compared with the embodiments in FIGS. 3A to 3F, the waveguide groove 111, the waveguide groove 112, the waveguide groove 113, the waveguide groove 114, the waveguide groove 115, the waveguide groove of this embodiment 116, the wave guiding groove 117, the wave guiding groove 118, the wave guiding groove 119, the wave guiding groove combination is arranged on the inner circumference, and the wave guiding groove 121, the wave guiding groove 122, the wave guiding groove 123, the wave guide The combination of the wave groove 124, the wave guide groove 125, the wave guide groove 126, the wave guide groove 127, the wave guide groove 128, and the wave guide groove 129 are arranged on the outer circumference. This also forms an ultrasonic element 201, an ultrasonic element 202, an ultrasonic element 203, an ultrasonic element 204, an ultrasonic element 205, an ultrasonic element 206, an ultrasonic element 207, an ultrasonic element 208, an ultrasonic element 209 arranged on the inner circumference, and an ultrasonic element 211, an ultrasonic element The element 212, the ultrasonic element 213, the ultrasonic element 214, the ultrasonic element 215, the ultrasonic element 216, the ultrasonic element 217, the ultrasonic element 218, and the ultrasonic element 219 are arranged on the outer circumference. When ultrasonic element 201, ultrasonic element 202, ultrasonic element 203, ultrasonic element 204, ultrasonic element 205, ultrasonic element 206, ultrasonic element 207, ultrasonic element 208, ultrasonic element 209 are ultrasonic transmitters, ultrasonic element 211, ultrasonic element 212, ultrasonic When the element 213, the ultrasound element 214, the ultrasound element 215, the ultrasound element 216, the ultrasound element 217, the ultrasound element 218, and the ultrasound element 219 are ultrasound receivers, they can form an inward and outward architecture. Of course, the two can be configured in reverse.

Next, please refer to FIGS. 4E and 4F, which illustrate the same embodiments as FIGS. 4A and 4B, but due to the difference in radius from the center of the sphere, the two structures result in different structures. In the embodiments of FIGS. 4C and 4D, although the spherical centers of the two waveguide groove groups are the same, the radii are different. In the embodiments shown in FIGS. 4E and 4F, the center of the sphere and the radius of the two waveguide groove groups are the same.

Next, please refer to FIGS. 5A and 5B, which are schematic cross-sectional views along lines A-A and B-B of different embodiments in the embodiment of FIG. 1A. Compared with the embodiment of FIGS. 1B and 1C, the top surface of this embodiment is a flat plane, while the top surface of the embodiment of FIGS. 1B and 1C is spherical. In addition, the lengths of the waveguide grooves 112, 114, 115, 117, etc. in FIGS. 5A and 5B are slightly longer than the length of the waveguide grooves 112, 114, 115, 117, etc. in the embodiments in FIGS. 1B and 1C. In addition, the wave guide grooves 112, 114, 115, 117, etc. in FIGS. 5A and 5B have a sloping cylindrical structure because the top surface is a flat plane, and therefore, they are slightly inclined cylindrical structures.

Although the technical content of the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Anyone who is familiar with this art and makes some changes and retouching without departing from the spirit of the present invention should be covered in the present invention. The scope of protection of the present invention shall be subject to the scope of the attached patent application.

11‧‧‧Dock device

10‧‧‧ circuit board

111~119‧‧‧Guide wave groove

Claims (24)

An ultrasonic three-dimensional directional wave-guiding device for arranging a plurality of ultrasonic elements therein, including: a base, including a plurality of wave-guiding grooves, the wave-guiding grooves are opened on the upper surface of the base, and the The waveguide grooves are cylindrical, and each of the waveguide grooves is used to configure one ultrasonic element; wherein, the number of the waveguide grooves is at least two, symmetrically arranged with a center, and arranged on the The wave guiding grooves outside the center are arranged according to a spherical surface, so that the wave guiding directions of the wave guiding grooves outside the center point to a three-dimensional space formed by the spherical center of the spherical surface. The ultrasonic stereo directional wave guiding device as claimed in claim 1, wherein the diameter of the bottom of the wave guiding grooves is between 1/2 and 1 times the wavelength of the ultrasonic wave emitted by the ultrasonic element, and the height is between the wavelength of the ultrasonic wave Between 1/2 times and 3/2 times. The ultrasonic stereo directional wave guiding device according to claim 1, further comprising: a conductive layer disposed on the upper surface of the base and surrounding the wave guiding grooves to form an anti-electromagnetic interference layer. The ultrasonic three-dimensional directional wave-guiding device according to claim 3, wherein the opening edges of the wave-guiding grooves are arc-shaped and the opening edges of the wave-guiding grooves are higher than the top surface of the conductive layer . The ultrasonic stereo directional wave guiding device according to claim 1, wherein the opening edges of the wave guiding grooves are arc-shaped outwardly. The ultrasonic stereo directional wave guiding device according to claim 1, wherein the opening diameter of the wave guiding grooves is larger than the diameter of the bottom of the wave guiding grooves. As in the ultrasonic stereo directional wave guide device of claim 1, the material of the base is a plastic material. The ultrasonic three-dimensional directional wave-guiding device according to claim 1, wherein the configuration of the wave-guiding grooves is to arrange a wave-guiding groove with the center, and a first configuration radius from the center is larger than the wave-guiding grooves A first circumference of the diameter of the bottom is configured with more than two equal-distance wave-guiding grooves. The ultrasonic stereo directional wave guiding device according to claim 8, wherein the arrangement of the wave guiding grooves is to arrange a wave guiding groove with the center, and a second configuration radius from one of the centers is greater than twice the number of the wave guides A second circumference of the bottom diameter of the wave groove is configured with more than two equal-waveguide grooves at equal intervals. The ultrasonic three-dimensional directional wave-guiding device as claimed in claim 1, wherein the configuration of the wave-guiding grooves is a pair of the wave-guiding grooves arranged at the center, and a first configuration radius from the center is larger than the wave-guiding grooves A first circumference of the bottom diameter of the groove is configured with more than two pairs of the equal-wave guide grooves at equal intervals; wherein, for each of the guide grooves, an ultrasonic transmitter and an ultrasonic receiver can be arranged. The ultrasonic three-dimensional directivity guided wave device according to claim 11, wherein the distance between the centers of the guided wave grooves is less than 1.2 wavelengths of the ultrasonic waves emitted by the ultrasonic transmitter. The ultrasonic three-dimensional directional wave-guiding device according to claim 11, wherein the configuration of the wave-guiding grooves is a pair of the wave-guiding grooves arranged at the center, and a second configuration radius from the center is larger than the wave-guiding grooves A second circumference with a diameter of more than twice the bottom of the groove is configured with more than two pairs of the equal-wave guide grooves at equal intervals; wherein each of the guide grooves can be provided with an ultrasonic transmitter and an ultrasonic receiver Device. An ultrasonic sensor device, comprising: a plurality of ultrasonic elements; a base, comprising a plurality of wave guiding grooves, the wave guiding grooves are opened on the upper surface of the base, the wave guiding grooves are cylindrical , Each of the waveguide grooves is used to configure one ultrasonic element; wherein, the number of the waveguide grooves is at least two, with a center as a symmetrical configuration, and the waveguide grooves are arranged outside the center Configuring the wave guiding grooves according to a spherical surface, so that the wave guiding directions of the wave guiding grooves outside the center point to a three-dimensional space formed by the spherical center of the spherical surface; and a circuit board, the base is fixed to the On the circuit board, the ultrasonic elements are electrically connected to the circuit board. The ultrasonic sensor device according to claim 13, wherein the diameters of the bottoms of the guided wave grooves are between 1/2 times and 1 times the wavelength of the ultrasonic wave emitted by the ultrasonic element, and the height is between 1/2 times the wavelength of the ultrasonic wave To 3/2 times. The ultrasonic sensor device according to claim 13, further comprising: a conductive layer disposed on the upper surface of the base and surrounding the wave guide grooves to form an anti-electromagnetic interference layer. The ultrasonic sensor device according to claim 15, wherein the opening edges of the wave guiding grooves are arc-shaped and the opening edges of the wave guiding grooves are higher than the top surface of the conductive layer. The ultrasonic sensor device according to claim 13, wherein the opening edges of the wave guiding grooves are arc-shaped outwardly. The ultrasonic sensor device according to claim 13, wherein the opening diameter of the wave guiding grooves is larger than the bottom diameter of the wave guiding grooves. The ultrasonic sensor device according to claim 13, wherein the material of the base is a plastic material. The ultrasonic sensor device according to claim 13, wherein the configuration of the waveguide grooves is to arrange a waveguide groove with the center, and a first configuration radius from the center is greater than the diameter of the bottom of the waveguide grooves On a first circumference, there are more than three or more equally spaced wave-guiding grooves. The ultrasonic sensor device according to claim 20, wherein the arrangement of the wave guiding grooves is to arrange a wave guiding groove with the center, and a second configuration radius from the center is greater than two times that of the wave guiding grooves On a second circumference of the bottom diameter, there are more than three or more equally spaced wave-guiding grooves. The ultrasonic sensor device according to claim 13, wherein the configuration of the wave guiding grooves is a pair of the wave guiding grooves arranged at the center, and a first configuration radius from the center is greater than the bottom diameter of the wave guiding grooves A first circumference of is configured with more than three pairs of the equal-wave guide grooves at equal intervals; wherein, for each of the guide grooves, an ultrasonic transmitter and an ultrasonic receiver can be arranged. The ultrasonic sensor device according to claim 22, wherein the center-to-center spacing of each of the guided wave grooves is less than 1.2 wavelengths of ultrasonic waves emitted by the ultrasonic transmitter. The ultrasonic sensor device according to claim 22, wherein the arrangement of the waveguide grooves is a pair of the waveguide grooves disposed at the center, and a second configuration radius from the center is greater than the bottom diameter of the waveguide grooves A second circle with more than twice the number is provided with more than three pairs of the equal-wave guide grooves at equal intervals; wherein, each of the guide grooves can be provided with one ultrasonic transmitter and one ultrasonic receiver.

Images