TW202000948A - Metal sheet wound body, packaging provided with wound body, wound body packaging method, wound body storage method, method of manufacturing evaporation mask using wound body metal sheet, and metal sheet - Google Patents

Abstract

Provided is a wound body with which it is possible to implement an evaporation mask inspection step appropriately. A wound body of a metal sheet for use in manufacturing an evaporation mask is provided with: a shaft member having an outer diameter of not less than 150 mm and not more than 550 mm; and a metal sheet which is wound around the shaft member and has a thickness of not more than 50 [mu]m.

Description

Winding body of metal plate, packaging body with winding body, packaging method of winding body, storage method of winding body, method of manufacturing vapor deposition cover of metal plate using winding body, and metal plate

An embodiment of the present invention relates to a wound body of a metal plate, a packaged body provided with a wound body, a packaging method of the wound body, a storage method of the wound body, and a vapor deposition cover of a metal plate using the wound body Manufacturing method and metal plate.

In recent years, display devices used in portable devices such as smart phones or tablet PCs (pesonal computers) have been required to be high-definition, for example, having a pixel density of 500 ppi or more. In addition, among portable devices, the demand for ultra high definition (UHD) is increasing. In this case, the pixel density of the display device is required to be, for example, 800 ppi or more.

Organic EL (Electroluminescence) display devices have attracted attention due to their excellent responsiveness or reduced power consumption. As a method of forming a pixel of an organic EL display device, a method of forming a pixel in a desired pattern using a vapor deposition mask including through holes arranged in a desired pattern is known. Specifically, first, the vapor deposition cover is adhered to the substrate for the organic EL display device, and then, the vapor deposition cover and the substrate are put into the vapor deposition device together to perform vapor deposition of an organic material or the like.

The vapor deposition cover includes, for example, a metal plate and a plurality of through holes penetrating the metal plate. Such a vapor deposition mask is produced by, for example, as disclosed in Patent Document 1, by forming a through hole in a metal plate by etching. [Prior Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent No. 5382259

[Problems to be solved by the invention]

As one of the supply forms of the metal plate, a winding body in which a metal plate is wound around a shaft member is known. When the metal plate of the winding body is used for the vapor deposition mask, the metal plate rolled out from the winding body is subjected to etching or the like.

During the winding of the metal plate around the shaft member, the metal plate deforms according to the shape of the shaft member. If such deformation also remains in the vapor deposition cover made from the metal plate, the accuracy when measuring the size of the vapor deposition cover in the inspection step of the vapor deposition cover is considered to be reduced, or the measurement may not be possible.

The purpose of the embodiments of the present invention is to provide a winding body that can effectively solve such problems. [Technical means to solve the problem]

The first aspect of the present invention is a wound body, which is a wound body for manufacturing a metal plate of a vapor deposition cover, and includes: a shaft member having an outer diameter of 150 mm or more and 550 mm or less; and the above The metal plate is wound around the shaft member and has a thickness of 50 μm or less.

The second aspect of the present invention is the wound body of the first aspect described above, wherein the metal plate may also have an iron alloy containing 30% by mass or more and 54% by mass or less of nickel.

The third aspect of the present invention is the wound body of the first aspect or the second aspect, wherein the outer diameter of the shaft member is 300 mm or less, and the thickness of the metal plate is 30 μm or less.

The fourth aspect of the present invention is the wound body of the third aspect described above, wherein the weight of the wound body may be 70 kg or less.

The fifth aspect of the present invention is the wound body of the third aspect or the fourth aspect, wherein the shaft member may include a phenol resin.

The sixth aspect of the present invention is the wound body according to any one of the third aspect to the fifth aspect, wherein the shaft member may be a hollow member having an inner diameter of 100 mm or more.

The seventh aspect of the present invention is the wound body of the sixth aspect described above, wherein the difference between the outer diameter and the inner diameter of the shaft member may be 5 mm or more.

The eighth aspect of the present invention is the wound body of the first aspect or the second aspect described above, wherein the outer diameter of the shaft member may be 300 mm or more and 550 mm or less, and the thickness of the metal plate is 50 Below μm.

The ninth aspect of the present invention is the wound body of the above-mentioned eighth aspect, wherein the weight of the wound body may be 100 kg or less.

A tenth aspect of the present invention is a package body including: a wound body of a metal plate for manufacturing a vapor deposition cover; and a container that houses the wound body; the wound body includes: a shaft member, which It has an outer diameter of 150 mm or more and 550 mm or less; and the above-mentioned metal plate, which is wound on the above-mentioned shaft member, and has a thickness of 50 μm or less.

The eleventh aspect of the present invention is the packaging body according to the tenth aspect, wherein the container includes a side portion that supports the shaft member, and the side portion may be that the metal plate of the winding body is located at a lower end of the side portion The shaft member is supported more upward.

A twelfth aspect of the present invention is the packaging body according to the eleventh aspect, wherein the container may further include: a lower portion, which is located below the winding body; and the side portion, which supports the shaft member to make the roll The metal plate of the winding body is not in contact with the lower part.

A thirteenth aspect of the present invention is the packaging body of the twelfth aspect, wherein the container may include an upper portion covering the winding body from above.

The fourteenth aspect of the present invention is any one of the tenth aspect to the thirteenth aspect, and may also include a deoxidizer or a desiccant located inside the container.

A fifteenth aspect of the present invention is a packaging method, comprising: a preparation step, which prepares a winding body of a metal plate for manufacturing a vapor deposition cover; and an accommodation step, which houses the winding body in a container; and The wound body includes: a shaft member having an outer diameter of 150 mm or more and 550 mm or less; and the metal plate wound on the shaft member and having a thickness of 50 μm or less.

A sixteenth aspect of the present invention is the packaging method of the fifteenth aspect, wherein the container includes a side portion that supports the shaft member, and the side portion may be the metal plate of the winding body located at a lower end of the side portion The shaft member is supported more upward.

A seventeenth aspect of the present invention is the packing method of the sixteenth aspect, wherein the container may further include: a lower portion located below the winding body; and a side portion supporting the shaft member to wind the winding The metal plate of the body is not in contact with the lower part; and the upper part, which covers the winding body from above.

The eighteenth aspect of the present invention is a storage method for storing a wound body of a metal plate used for manufacturing a vapor deposition cover, and the metal plate wound on the shaft member is located most on the shaft member side The inner diameter of the part is kept at 150 mm or more and 550 mm or less so as to store the wound body.

The nineteenth aspect of the present invention is a method for manufacturing a vapor deposition cover, which is a method for manufacturing a vapor deposition cover formed with a plurality of through holes, and includes: a step of rolling out the metal plate from a winding body of the metal plate And a processing step of etching the metal plate to form the through hole in the metal plate; and the winding body includes: a shaft member having an outer diameter of 150 mm or more and 550 mm or less; and the metal plate, It is wound around the shaft member and has a thickness of 50 μm or less.

The twentieth aspect of the present invention is a metal plate that is wound on a shaft member having an outer diameter of 150 mm or more and 550 mm or less and used to manufacture a vapor deposition mask, and has a thickness of 50 μm or less.

The twenty-first aspect of the present invention may also be a packaging body manufactured by the packaging method as described above in the fifteenth to the seventeenth aspects.

The 22nd aspect of this invention can also be a vapor deposition mask manufactured by the manufacturing method as the 19th aspect mentioned above. [Effect of invention]

According to the embodiment of the present invention, the metal plate can be appropriately stored.

In this manual and the drawings, unless otherwise specified, the terms "board", "sheet", and "film" are not distinguished from each other based on the difference in only the address. For example, "board" is a concept that also includes components such as sheets or films. In addition, "surface (sheet surface, film surface)" refers to the overall and overall observation of the target plate-shaped (sheet-shaped, film-shaped) member and the target plate-shaped member (sheet-shaped member , Film-like member) in the same plane direction. In addition, the normal direction used with respect to a plate-shaped (sheet-shaped, film-shaped) member refers to the normal direction with respect to the surface (sheet surface, film surface) of the member. Furthermore, the shape or geometrical conditions used in this specification and terms such as "parallel" or "rectangular" or values of length or angle, etc., which are of a specific degree, are not bound by a strict sense and include expectations The extent of the same function is explained.

In this specification and this drawing, the words "upper (or lower)", "upper (or lower)", or "an upper part (or lower side)" that make a structure of a component or a certain area into other structures of other components or other areas In the case of "above (or below)", unless otherwise specified, it is not only the case where a certain structure is directly connected to other structures, but also the case where another structure is included between a certain structure and other structures. In addition, as long as there is no special explanation, there may be a case where words are used to describe the upper (or upper side or upper side) or lower (or lower side or lower side), but the vertical direction may be reversed.

In this specification and this drawing, unless otherwise specified, the same part or part having the same function may be marked with the same symbol or a similar symbol, and repeated descriptions may be omitted. In addition, there are cases where the size ratio of the drawings is different from the actual ratio for convenience of explanation, or a part of the configuration is omitted from the drawings.

In this specification and the drawings, as long as there is no special explanation, it can be combined with other embodiments or modifications within a range that does not cause conflicts. In addition, other embodiments or other embodiments and variations may be combined within a range that does not cause conflicts. In addition, the modified examples may be combined within a range that does not cause conflicts.

In this specification and the drawings, as long as there is no special description, when a plurality of steps are disclosed with respect to a method such as a manufacturing method, other steps not disclosed may be implemented between the disclosed steps. In addition, the order of the steps disclosed is arbitrary within the scope that no contradiction occurs.

In this specification and the drawings, as long as there is no special explanation, the numerical range expressed by the symbol "~" includes the value placed before and after the symbol "~". For example, the numerical range defined by the expression "34 to 38 mass%" is the same as the numerical range defined by the expression "34 mass% or more and 38 mass% or less".

In one embodiment of the present specification, an example related to a vapor deposition mask used for patterning an organic material on a substrate in a desired pattern for manufacturing an organic EL display device or a method for manufacturing the same will be described. However, it is not limited to this kind of application, and this embodiment can be applied to a vapor deposition mask used for various purposes.

Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings. In addition, the embodiments shown below are examples of embodiments of the present invention, and the present invention is not limited to these embodiments and explained.

First, referring to FIG. 1, a vapor deposition device 90 that performs a vapor deposition process of vapor-depositing a vapor deposition material on an object will be described. As shown in FIG. 1, the vapor deposition device 90 may include a vapor deposition source (for example, a crucible 94 ), a heater 96, and a vapor deposition cover device 10 inside. In addition, the vapor deposition apparatus 90 may further include an exhaust mechanism for making the inside of the vapor deposition apparatus 90 a vacuum atmosphere. The crucible 94 accommodates a vapor deposition material 98 such as an organic light-emitting material. The heater 96 heats the crucible 94 and evaporates the vapor deposition material 98 in a vacuum atmosphere. The vapor deposition hood device 10 may be arranged to face the crucible 94.

Hereinafter, the vapor deposition mask device 10 will be described. As shown in FIG. 1, the vapor deposition mask device 10 may include at least one vapor deposition mask 20 and a frame 15 that supports the vapor deposition mask 20. The frame 15 may support the vapor deposition cover 20 in a state of being stretched in the direction of its surface in such a manner that the vapor deposition cover 20 does not flex. As shown in FIG. 1, the vapor deposition mask device 10 may be disposed in the vapor deposition device 90 such that the vapor deposition mask 20 faces the substrate to which the vapor deposition material 98 is attached, for example, the organic EL substrate 92. In the following description, the surface of the vapor deposition cover 20 on the side of the organic EL substrate 92 is referred to as a first surface 20a, and the surface on the opposite side of the first surface 20a is referred to as a second surface 20b.

As shown in FIG. 1, the vapor deposition mask device 10 may include a magnet 93 disposed on the surface of the organic EL substrate 92 opposite to the vapor deposition mask 20. By providing the magnet 93, the vapor deposition cover 20 can be pulled toward the magnet 93 side by the magnetic force, so that the vapor deposition cover 20 is closely attached to the organic EL substrate 92. In addition, an electrostatic chuck using electrostatic force (Coulomb force) may be used to closely adhere the vapor deposition cover 20 to the organic EL substrate 92.

FIG. 3 is a plan view showing the state of the vapor deposition cover device 10 viewed from the first surface 20 a side of the vapor deposition cover 20. As shown in FIG. 3, the vapor deposition mask device 10 may include a plurality of vapor deposition masks 20. In this embodiment, each vapor deposition mask 20 has a rectangular shape extending in the first direction D1. In the vapor deposition mask device 10, a plurality of vapor deposition masks 20 are arranged in a second direction D2 crossing the first direction D1 of the vapor deposition mask 20. Each vapor deposition cover 20 is fixed to the frame 15 at both ends of the vapor deposition cover 20 in the first direction D1 by welding, for example.

The vapor deposition cover 20 includes a rectangular metal plate extending in the first direction D1 and a plurality of through holes 25 penetrating through the metal plate. After evaporation from the crucible 94, the vapor deposition material 98 that reaches the vapor deposition cover device 10 passes through the through hole 25 of the vapor deposition cover 20 and is attached to the organic EL substrate 92. Thereby, the vapor deposition material 98 can be deposited on the surface of the organic EL substrate 92 in a desired pattern corresponding to the position of the through hole 25 of the vapor deposition cover 20.

2 is a cross-sectional view of an organic EL display device 100 manufactured using the vapor deposition device 90 of FIG. 1. The organic EL display device 100 may also include an organic EL substrate 92 and pixels including a vapor deposition material 98 provided in a pattern. In addition, in the organic EL display device 100 of FIG. 2, electrodes and the like that apply voltage to pixels including the vapor deposition material 98 are omitted. In addition, after the vapor deposition step of providing the vapor deposition material 98 on the organic EL substrate 92 in a pattern, other constituent elements of the organic EL display device can be further provided in the organic EL display device 100 of FIG. 2. Therefore, the organic EL display device 100 of FIG. 2 can also be referred to as an intermediate of the organic EL display device.

Furthermore, when a color display using a plurality of colors is to be performed, a vapor deposition device 90 equipped with a vapor deposition cover 20 corresponding to each color is prepared, and the organic EL substrate 92 is sequentially put into each vapor deposition device 90. With this, for example, an organic light-emitting material for red, an organic light-emitting material for green, and an organic light-emitting material for blue can be sequentially deposited on the organic EL substrate 92.

In addition, the vapor deposition process may be performed inside the vapor deposition device 90 that becomes a high-temperature atmosphere. In this case, during the vapor deposition process, the vapor deposition cover 20, the frame 15, and the organic EL substrate 92 held inside the vapor deposition device 90 are also heated. At this time, the vapor deposition cover 20, the frame 15, and the organic EL substrate 92 will exhibit the behavior of dimensional change based on the respective thermal expansion coefficients. In this case, if the thermal expansion coefficients of the vapor deposition cover 20 or the frame 15 and the organic EL substrate 92 are significantly different, a positional shift due to the difference in dimensional change or the like will occur, and as a result, they will adhere to the organic EL The dimensional accuracy or position accuracy of the vapor deposition material on the substrate 92 is reduced.

In order to solve such a problem, it is preferable that the thermal expansion coefficients of the vapor deposition cover 20 and the frame 15 and the organic EL substrate 92 have the same value. For example, when a glass substrate is used as the organic EL substrate 92, an iron alloy containing nickel can be used as the main material of the vapor deposition cover 20 and the frame 15. The iron alloy may contain cobalt in addition to nickel. For example, an iron alloy whose total content of nickel and cobalt is 30% by mass or more and 54% by mass or less and whose content of cobalt is 0% by mass or more and 6% by mass or less can be used as the material of the metal plate constituting the vapor deposition cover 20 . Specific examples of nickel or iron alloys containing nickel and cobalt include nickel steel materials containing 34% by mass or more and 38% by mass or less of nickel, and those containing cobalt in addition to nickel containing 30% by mass or more and 34% by mass or less. Super nickel steel material, low thermal expansion Fe-Ni plating alloy containing nickel of 38% by mass or more and 54% by mass or less.

Furthermore, during the vapor deposition process, when the temperature of the vapor deposition cover 20, the frame 15, and the organic EL substrate 92 does not reach a high temperature, it is not particularly necessary to set the thermal expansion coefficient of the vapor deposition cover 20 and the frame 15 to the organic EL substrate. The coefficient of thermal expansion of 92 is the same. In this case, a material other than the above-mentioned iron alloy may be used as the material constituting the vapor deposition cover 20. For example, iron alloys other than the above-mentioned nickel-containing iron alloys such as chromium-containing iron alloys can also be used. As the iron alloy containing chromium, for example, an iron alloy called so-called stainless steel can be used. In addition, alloys other than iron alloys such as nickel or nickel-cobalt alloys can also be used.

Next, the vapor deposition cover 20 will be described in detail. As shown in FIG. 3, the vapor deposition cover 20 includes a first ear portion 17a and a second ear portion 17b opposed in the first direction D1 of the vapor deposition cover 20, and a middle portion between the pair of ear portions 17a, 17b Department 18.

First, the ears 17a and 17b will be described in detail. The ears 17a and 17b are parts of the vapor deposition cover 20 fixed to the frame 15. The first ear portion 17a includes a first end portion 20e which is one end of the vapor deposition cover 20 in the first direction D1. The second ear portion 17b includes a second end portion 20f which is the other end in the first direction D1 of the vapor deposition cover 20.

In this embodiment, the ear portions 17a, 17b and the intermediate portion 18 are formed integrally. Furthermore, the ear portions 17a and 17b may be constituted by a member different from the middle portion 18. In this case, the ear portions 17a and 17b are joined to the middle portion 18 by welding, for example.

Next, the intermediate portion 18 will be described. The intermediate portion 18 includes at least one effective region 22 in which a through hole 25 is formed from the first surface 20 a to the second surface 20 b, and a peripheral region 23 surrounding the effective region 22. The effective area 22 is an area of the vapor deposition cover 20 that faces the display area of the organic EL substrate 92.

In the example shown in FIG. 3, the intermediate portion 18 includes a plurality of effective regions 22 arranged at predetermined intervals along the first direction D1 of the vapor deposition mask 20. One effective area 22 corresponds to the display area of one organic EL display device 100. Therefore, according to the vapor deposition cover device 10 shown in FIG. 1, multi-faceted vapor deposition of the organic EL display device 100 can be performed. Furthermore, there is also a case where one effective area 22 corresponds to a plurality of display areas. Although not shown, a plurality of effective regions 22 may be arranged at predetermined intervals in the second direction D2 of the vapor deposition mask 20.

As shown in FIG. 3, the effective area 22 has a substantially quadrangular shape in plan view, for example, and has a substantially rectangular outline in plan view. In addition, although not shown, each effective area 22 may have contours of various shapes according to the shape of the display area of the organic EL substrate 92. For example, each effective area 22 may also have a circular outline.

Hereinafter, the effective area 22 will be described in detail. FIG. 4 is an enlarged plan view showing the effective region 22 from the second surface 20b side of the vapor deposition mask 20. FIG. As shown in FIG. 4, in the illustrated example, a plurality of through holes 25 formed in each effective area 22 are arranged in the effective area 22 at predetermined intervals along two directions orthogonal to each other.

FIG. 5 is a cross-sectional view along the V-V direction of the effective region 22 of FIG. 4. As shown in FIG. 5, the plurality of through holes 25 extend from the first surface 20 a on one side along the normal direction N of the vapor deposition mask 20 to the other side along the normal direction N of the vapor deposition mask 20. The second surface 20b penetrates. In the example shown in the figure, as described in detail below, the first surface 51a of the metal plate 51 that becomes one side in the normal direction N of the vapor deposition mask 20 is formed with a first recess 30 by etching, and is vapor-deposited The second surface 51b of the metal plate 51 on the other side in the normal direction N of the cover 20 forms a second concave portion 35. The first concave portion 30 is connected to the second concave portion 35, whereby the second concave portion 35 and the first concave portion 30 are formed to communicate with each other. The through hole 25 is configured by the second recess 35 and the first recess 30 connected to the second recess 35. As shown in FIGS. 4 and 5, the wall surface 31 of the first recessed portion 30 and the wall surface 36 of the second recessed portion 35 are connected via a circumferential connecting portion 41. The connecting portion 41 defines a through portion 42 where the opening area of the through hole 25 is the smallest when the vapor deposition cover 20 is viewed in plan.

As shown in FIG. 5, on the first surface 20 a side of the vapor deposition mask 20, two adjacent through holes 25 are separated from each other along the first surface 51 a of the metal plate 51. On the second surface 20b side of the vapor deposition mask 20, two adjacent second concave portions 35 may be separated from each other along the second surface 51b of the metal plate 51. That is, the second surface 51b of the metal plate 51 may remain between two adjacent second recesses 35. In the following description, the portion of the effective area 22 of the second surface 51b of the metal plate 51 that is not etched and remains is also referred to as the top portion 43. By making the vapor deposition cover 20 in such a manner that the top portion 43 remains, the vapor deposition cover 20 can have sufficient strength. In this case, for example, damage to the vapor deposition cover 20 can be suppressed during transportation and the like. In addition, if the width β of the top portion 43 is too large, shadows are generated in the vapor deposition step, whereby the utilization efficiency of the vapor deposition material 98 may decrease. Therefore, it is preferable to manufacture the vapor deposition cover 20 such that the width β of the top portion 43 is not excessively increased.

When the vapor deposition mask device 10 is accommodated in the vapor deposition device 90 as shown in FIG. 1, as shown by the two-dot chain line in FIG. 5, the first surface 20 a of the vapor deposition mask 20 faces the organic EL substrate 92, The second surface 20b of the vapor deposition cover 20 is located on the side of the crucible 94 holding the vapor deposition material 98. Therefore, the vapor deposition material 98 passes through the second recess 35 whose opening area gradually decreases, and then adheres to the organic EL substrate 92. As shown by the arrow from the second surface 20b side toward the first surface 20a in FIG. 5, the vapor deposition material 98 not only moves from the crucible 94 toward the organic EL substrate 92 along the normal direction N of the organic EL substrate 92, but also faces The organic EL substrate 92 moves in a substantially oblique direction in the normal direction N. At this time, if the thickness of the vapor deposition cover 20 is large, the vapor deposition material 98 moving obliquely is easily caught on the top portion 43, the wall surface 36 of the second recess 35, or the wall surface 31 of the first recess 30, and as a result, cannot pass through the through hole The ratio of the vapor deposition material 98 of 25 increases. Therefore, in order to improve the utilization efficiency of the vapor deposition material 98, the thickness T of the vapor deposition cover 20 is reduced. Therefore, it is considered that it is preferable to change the height of the wall surface 36 of the second recess 35 or the wall surface 31 of the first recess 30 small. That is, it can be said that it is preferable to use the metal plate 51 having the thickness T as small as possible as the metal plate 51 constituting the vapor deposition cover 20 within a range where the strength of the vapor deposition cover 20 can be ensured. Considering this aspect, in this embodiment, the thickness T of the vapor deposition mask 20 is preferably 100 μm or less. The thickness T of the vapor deposition mask 20 may be 50 μm or less, 40 μm or less, 35 μm or less, 30 μm or less, 25 μm or less, or 20 μm or less. On the other hand, if the thickness of the vapor deposition cover 20 is too small, the strength of the vapor deposition cover 20 decreases, and the vapor deposition cover 20 is likely to be damaged or deformed. Considering this aspect, the thickness T of the vapor deposition mask 20 is preferably 5 μm or more. The thickness T of the vapor deposition mask 20 may be 8 μm or more, 10 μm or more, 12 μm or more, 13 μm or more, or 15 μm or more. The range of the thickness T of the vapor deposition mask 20 can also be specified by a combination of any one of the candidate values of the upper limit and any one of the candidate values of the lower limit. For example, the thickness T of the vapor deposition mask 20 may be 5 μm or more and 100 μm or less, 8 μm or more and 50 μm or less, 10 μm or more and 40 μm or less, or 12 μm or more and 35 μm or less. It may be 13 μm or more and 30 μm or less, 15 μm or more and 25 μm or less, or 15 μm or more and 20 μm or less. In addition, the range of the thickness T of the vapor deposition mask 20 can also be specified by a combination of any two of the plurality of upper limit candidate values. For example, the thickness T of the vapor deposition mask 20 may range from 20 μm to 25 μm. In addition, the range of the thickness T of the vapor deposition mask 20 may be specified by a combination of any two of the candidate values of the plurality of lower limits. For example, the thickness T of the vapor deposition mask 20 may range from 13 μm to 15 μm. In addition, the thickness T is the thickness of the surrounding area 23, that is, the thickness of the portion of the vapor deposition mask 20 where the first recess 30 and the second recess 35 are not formed. Therefore, the thickness T can also be referred to as the thickness of the metal plate 51.

As a method of measuring the thickness of the metal plate 51 and the vapor deposition cover 20, a contact type measuring method is used. As the measurement method of the contact type, the "MT1271" of the HEIDENHAIM-METRO length gauge manufactured by HEIDENHAIN Co., Ltd. with a ball-guided plunger is used.

In FIG. 5, a straight line M1 formed at any other arbitrary position of the connection portion 41 and the wall surface 36 of the second recess 35 having the minimum opening area of the through hole 25 is formed with respect to the normal direction N of the vapor deposition mask 20 The minimum angle is represented by the symbol θ1. In order to prevent the vapor-deposited material 98 moving obliquely from reaching the wall surface 36 and reaching the organic EL substrate 92 as much as possible, it is advantageous to increase the angle θ1. Increasing the angle θ1 is effective not only to reduce the thickness T of the vapor deposition mask 20 but also to reduce the width β of the top 43.

In FIG. 5, the symbol α indicates the width of a portion (hereinafter, also referred to as a flange portion) remaining in the effective area 22 of the first surface 51 a of the metal plate 51 without being etched. The width α of the flange portion and the size r of the penetration portion 42 are appropriately determined according to the size of the organic EL display device and the number of display pixels. For example, the width α of the flange portion is 5 μm or more and 40 μm or less, and the dimension r of the penetration portion 42 is 10 μm or more and 60 μm or less.

In addition, in FIGS. 4 and 5, an example in which the second surface 51 b of the metal plate 51 remains between two adjacent second concave portions 35 is shown, but it is not limited to this. Although not shown, etching may be performed so that two adjacent second recesses 35 are connected. That is, there may be a place where the second surface 51b of the metal plate 51 does not remain between two adjacent second concave portions 35.

Next, a method of manufacturing the vapor deposition mask 20 will be described.

First, the manufacturing method of the metal plate used for manufacturing a vapor deposition mask is demonstrated. In this embodiment, an example in which the metal plate 51 includes a rolled material of an iron alloy containing nickel will be described. The rolled material has a thickness of 100 μm or less, preferably 50 μm or less, 40 μm or less, or 30 μm or less. The total content of nickel and cobalt in the rolled material is, for example, 30% by mass or more and 38% by mass or less. The metal plate 51 including the rolled material is produced and circulated in the form of the following wound body.

First, the base material 510 for the metal plate is prepared. The base material 510 is produced by melting raw materials for metal plates in a melting furnace. Raw materials for metal plates include iron, nickel, cobalt and other additives. After the base material 510 is taken out from the melting furnace, a grinding step of cutting off the surface of the base material 510 may also be performed.

Next, as shown in FIG. 6, a rolling step is performed to roll the base material 510 including an iron alloy containing nickel. For example, it is conveyed while applying tensile tension in the direction F1 toward the rolling device 61 including a pair of rolling rollers (work rolls) 61a, 61b. The base material 510 reaching between the pair of rolling rollers 61a, 61b is rolled by the pair of rolling rollers 61a, 61b. As a result, the thickness of the base material 510 decreases, and it elongates in the direction F1. Thereby, a metal plate 51 extending in the direction F1 and having a predetermined thickness T can be obtained. In the following description, the direction F1 in which the metal plate 51 extends is also referred to as the longitudinal direction F1.

In addition, FIG. 6 merely shows the outline of the rolling step, and the specific configuration or order for performing the rolling step is not particularly limited. For example, the rolling step may also include a hot rolling step of processing the base material at a temperature above the temperature at which the crystal arrangement of the iron alloy constituting the base material 510 is changed or a cold processing of the base material at a temperature below the temperature at which the crystal arrangement of the iron alloy is changed Rolling steps. In addition, the direction when the base material 510 or the metal plate 51 passes between the pair of rolling rollers 61a, 61b is not limited to one direction. For example, in FIGS. 6 and 7, the base material 510 or the metal plate 51 may be passed through the pair of nip rollers 61a, 61b by repeating the direction from the left side to the right side of the paper surface and the direction from the right side to the left side of the paper surface. During this time, the base material 510 or the metal plate 51 is gradually rolled.

In the rolling step, the pressure of the rolling actuator may be adjusted in order to adjust the shape of the metal plate 51. In addition to the pressing rollers (work rollers) 61a and 61b, the shape of the backup roller can be appropriately adjusted.

In addition, in the cold rolling step, a coolant such as kerosene may be supplied between the base material 510 and the rolls 61a and 61b. By this, the temperature of the base material can be controlled.

In addition, an analysis step for analyzing the quality or characteristics of the base material 510 or the metal plate 51 may be performed before or after the rolling step or between the rolling steps. For example, the composition may be analyzed by irradiating fluorescent X-rays to the base material 510 or the metal plate 51. Moreover, the thermal expansion and contraction amount of the base material 510 or the metal plate 51 can also be measured by thermomechanical analysis (TMA: Thermomechanical Analisys).

Then, in order to remove the residual stress accumulated in the metal plate 51 by rolling, as shown in FIG. 7, the annealing device 63 may be used to anneal the metal plate 51. Furthermore, as shown in FIGS. 6 and 7, the metal plate 51 may be temporarily wound around the core 62 between the rolling step and the annealing step.

As shown in FIG. 7, the annealing step may be carried out while stretching the metal plate 51 in the longitudinal direction F1. That is, the annealing step can also be carried out as a continuous annealing with one side transfer, rather than the so-called batch-type annealing. In this case, it is preferable to set the temperature or the conveying speed in such a way as to suppress deformation of the metal plate 51 such as buckling bending. By performing the annealing step, the metal plate 51 with the residual strain removed to some extent can be obtained. In addition, FIG. 7 shows an example in which the metal plate 51 is transported in the horizontal direction during the annealing step, but it is not limited thereto, and the metal plate 51 may be transported in other directions such as the vertical direction during the annealing step.

Preferably, the above annealing step is performed in a non-reducing atmosphere or an inert gas atmosphere. Here, the non-reducing atmosphere refers to an atmosphere that does not contain reducing gas such as hydrogen. The so-called "excluding reducing gas" means that the concentration of reducing gas such as hydrogen is 10% or less. In addition, the inert gas atmosphere refers to an atmosphere in which the concentration of inert gases such as argon, helium, and nitrogen is 90% or more. Since the annealing step is performed in a non-reducing atmosphere or an inert gas atmosphere, the generation of nickel compounds such as nickel hydroxide on the surface layer of the metal plate 51 can be suppressed. The annealing device 63 may also have a mechanism to monitor the concentration of inert gas or a mechanism to adjust the concentration of inert gas.

Before the annealing step, a washing step of washing the metal plate 51 may be performed. In this way, it is possible to suppress foreign matter from adhering to the surface of the metal plate 51 during the annealing step. As the cleaning liquid for cleaning, for example, a hydrocarbon liquid can be used.

In addition, FIG. 7 shows an example in which the metal plate 51 is stretched in the longitudinal direction F1 while performing the annealing step, but it is not limited to this, and the metal plate 51 may be wound around the core 62 and other members. The annealing step is implemented next. That is, batch-type annealing can also be performed. Furthermore, when the annealing step is performed in a state where the metal plate 51 is wound around the core 62 and other members, the metal plate 51 may have a problem of warpage corresponding to the outer diameter of the core 62. Therefore, from the viewpoint of suppressing the defect of warpage, it is advantageous to perform the annealing step while stretching the metal plate 51 in the longitudinal direction F1.

Then, a cutting step may be performed in which both ends in the width direction of the metal plate 51 obtained by the rolling step are cut across the predetermined range so that the width of the metal plate 51 becomes within the predetermined range. The width direction refers to a direction orthogonal to the longitudinal direction F1 in the plane of the metal plate 51. By performing the cutting step, for example, cracks generated at both ends in the width direction of the metal plate 51 due to rolling can be removed. By removing the cracks, it is possible to prevent the metal plate 51 from breaking. The so-called plate cutting takes cracks as a starting point.

The width of the portion cut off in the cutting step can also be adjusted in a manner that the shape of the metal plate 51 after the cutting step is symmetrical in the width direction. In addition, the dicing step may be performed before the annealing step.

Furthermore, by repeating at least two of the above rolling step, annealing step and cutting step a plurality of times, a long metal plate 51 of a predetermined thickness can also be produced.

After the annealing process of the metal plate 51 is completed, the winding step of winding the metal plate 51 around the shaft member 52 is performed. In FIG. 7, an example of performing the winding step after the annealing step is shown. Although not shown, the winding step may be performed after the cutting step. Although not shown, after the annealing process of the metal plate 51 is completed, the metal plate 51 may be temporarily wound around the core, and then the metal plate 51 may be unwound from the core, and then the metal plate 51 may be rolled. Winding shaft member 52. In this way, the wound body 50 of the metal plate 51 can be produced.

Hereinafter, the wound body 50 will be described. FIG. 8 is a perspective view showing the winding body 50. The winding body 50 includes a shaft member 52 and a metal plate 51 wound around the shaft member 52. The metal plate 51 may be wound around the shaft member 52 with the second surface 51b located closer to the shaft member 52 side than the first surface 51a, or may be wound with the first surface 51a located closer to the shaft member 52 side than the second surface 51b于轴员52。 The shaft member 52.

In FIG. 8, the symbol W1 indicates the size of the metal plate 51 in the width direction F2 orthogonal to the longitudinal direction F1 of the metal plate 51. In addition, the symbol W2 indicates the size of the shaft member 52 in the width direction F2. The width direction F2 coincides with the axial direction of the shaft member 52. The size W1 of the metal plate 51 is, for example, 150 mm or more, or 300 mm or more. In addition, the size W1 of the metal plate 51 is, for example, 1300 mm or less, or may be 1000 mm or less. The size W2 of the shaft member 52 is larger than the size W1 of the metal plate 51. The value obtained by subtracting the dimension W1 from the dimension W2 is, for example, 20 mm or more, or 50 mm or more. In addition, the value obtained by subtracting the dimension W1 from the dimension W2 is, for example, 500 mm or less, or 200 mm or less.

9 is a cross-sectional view of the wound body 50 when the wound body 50 is cut on a plane orthogonal to the axial direction of the shaft member 52. In the example shown in FIG. 9, the shaft member 52 is a hollow member having an inner diameter R1. Symbol R2 represents the outer diameter of the shaft member 52. The outer diameter R2 of the shaft member 52 corresponds to the inner diameter of the metal plate 51 that is wound on the metal plate 51 of the shaft member 52 and is in contact with the shaft member 52. Symbol R3 represents the outer diameter of the metal plate 51 wound around the shaft member 52. Furthermore, the "outer diameter" refers to the diameter of the outer peripheral surface of the columnar body. The "inner diameter" refers to the diameter of the inner peripheral surface when the columnar body has an inner peripheral surface caused by the hollow portion.

As an instrument for measuring the inner diameter and outer diameter of the shaft member 52 or the inner diameter and outer diameter of the metal plate 51 in a state of being wound around the shaft member 52, a measuring instrument is used.

In addition, if the outer diameter R2 of the shaft member 52 is small, the warpage caused by the plastic deformation caused by the metal plate 51 during the winding of the metal plate 51 around the shaft member 52 is also rolled out from the shaft member 52 The metal plate 51 remains at least partially. As described below, the vapor deposition cover 20 is manufactured by processing the metal plate 51 rolled out from the winding body 50. Therefore, if the outer diameter R2 of the shaft member 52 is small, warpage may remain in the vapor deposition cover 20 manufactured from the metal plate 51. Such warpage may occur when the iron alloy constituting the metal plate 51 contains 34% by mass or more and 38% by mass or less of nickel, that is, when the iron alloy is a so-called nickel steel material. As a reason, when the metal plate 51 is a nickel steel material, the thermal expansion coefficient of the metal plate 51 is low, so the difference between the thermal expansion coefficient of the metal plate 51 and the thermal expansion coefficient of the shaft member 52 becomes large due to the force of thermal expansion It easily occurs between the metal plate 51 and the shaft member 52, but the reason is not particularly limited. If warpage occurs in the vapor deposition mask 20, the accuracy when measuring the size of the vapor deposition mask 20 in the inspection step of the vapor deposition mask 20 may decrease, or the measurement may not be possible. In addition, if warpage occurs in the vapor deposition mask 20, it is also considered that the accuracy of the size of the vapor deposition mask 20 in plan view decreases. Considering such a problem, the outer diameter R2 of the shaft member 52 may be 125 mm or more, 150 mm or more, 180 mm or more, or 200 mm or more.

As described above, from the viewpoint of suppressing warpage of the metal plate 51 rolled out from the winding body 50, it is preferable that the outer diameter R2 of the shaft member 52 is large. On the other hand, when the outer diameter R2 of the shaft member 52 becomes larger, the weight of the shaft member 52 increases, and the weight of the wound body 50 including the shaft member 52 and the metal plate 51 also increases. The increase in the weight of the winding body 50 increases the difficulty of handling the winding body 50. For example, if the weight of the wound body 50 is large, the transportability of the wound body 50 decreases. Also, it is considered that the metal plate 51 of the wound body 50 is damaged or deteriorated due to its own weight. In addition, when the winding body 50 is installed in the manufacturing apparatus of the vapor deposition cover 20, there is a necessity of using a conveying device such as a stacker. When a conveying device such as a stacker is used, the space for the stacker to enter is provided in the manufacturing apparatus of the vapor deposition cover 20, so the manufacturing apparatus is enlarged. Considering such a problem, the outer diameter R2 of the shaft member 52 may be, for example, 550 mm or less, 400 mm or less, 300 mm or less, or 280 mm or less.

The range of the outer diameter R2 of the shaft member 52 may also be defined by a combination of any one of the plurality of candidate values of the lower limit and any one of the candidate values of the upper limit, for example, may also be From 125 mm to 550 mm, from 150 mm to 400 mm, from 180 mm to 300 mm, from 200 mm to 280 mm. In addition, the range of the outer diameter R2 of the shaft member 52 can also be specified by a combination of any two of the plurality of candidate values of the lower limit, for example, it can be 125 mm or more and 200 mm or less, or 125 mm Above 180 mm, below 150 mm, above 200 mm, below 150 mm, and below 180 mm. In addition, the range of the outer diameter R2 of the shaft member 52 can also be specified by a combination of any two of the plurality of upper limit candidate values, for example, it can be 280 mm or more and 550 mm or less, or 280 mm Above 400 mm or less, 300 mm or more and 550 mm or less, or 300 mm or more and 400 mm or less.

As shown in FIG. 9, as shown in FIG. 9, when the hollow member is formed with a hollow portion, the weight of the shaft member 52 becomes smaller than when the hollow member is not formed with the hollow member 52. Therefore, from the viewpoint of facilitating the handling of the wound body 50, it is advantageous that the shaft member 52 is a hollow member.

When the shaft member 52 is a hollow member, the inner diameter R1 of the shaft member 52 is determined in such a manner that the deformation or breakage of the shaft member 52 due to the weight of the shaft member 52 or the weight of the metal plate 51 can be suppressed. The inner diameter R1 of the shaft member 52 is, for example, 100 mm or more, 150 mm or less, or 200 mm or more. The difference between the outer diameter R2 and the inner diameter R1 of the shaft member 52 is, for example, 5 mm or more, 10 mm or more, 20 mm or more, or 30 mm or more. In addition, the difference between the outer diameter R2 and the inner diameter R1 of the shaft member 52 may be 100 mm or less, 80 mm or less, 60 mm or less, or 40 mm or less.

The range of the difference between the outer diameter R2 and the inner diameter R1 of the shaft member 52 can also be defined by the combination of any one of the plurality of lower limit candidate values and any one of the plurality of upper limit candidate values For example, it can be 5 mm or more and 100 mm or less, 10 mm or more and 80 mm or less, 20 mm or more and 60 mm or less, or 30 mm or more and 40 mm or less. In addition, the range of the difference between the outer diameter R2 and the inner diameter R1 of the shaft member 52 can also be specified by a combination of any two of the plurality of candidate values of the lower limit, for example, it can be 5 mm or more and 30 mm or less It can also be 5 mm or more and 20 mm or less, 10 mm or more and 30 mm or less, or 10 mm or more and 20 mm or less. In addition, the range of the difference between the outer diameter R2 and the inner diameter R1 of the shaft member 52 can also be specified by a combination of any two of the plurality of upper limit candidate values, for example, 40 mm or more and 100 mm or less It can also be 40 mm or more and 80 mm or less, 60 mm or more and 100 mm or less, or 60 mm or more and 80 mm or less.

When the shaft member 52 is a hollow member, as the material constituting the shaft member 52, resin, a mixture of resin and fiber, metal, or the like can be used. Examples of the resin include phenol resin, ABS (acrylonitrile-butadiene-styrene, acrylonitrile-butadiene-styrene) resin, polystyrene resin, and polyethylene resin. Examples of the mixture of resin and fiber include phenolic paper and fiber-reinforced plastic (PRP). Examples of metals include iron and iron alloys. In addition, the so-called ABS resin refers to the general term of copolymerization of acrylonitrile, butadiene and styrene to form resin. The so-called phenolic paper refers to a mixture of paper and phenolic resin. Phenolic paper is a mixture of paper and phenol resin, for example, paper containing phenol resin is impregnated. Fiber-reinforced plastics include, for example, glass fibers impregnated with resin, carbon fibers, and other fibers.

The mixing ratio of the resin such as phenol resin and the fiber such as paper in the shaft member 52 may be, for example, 0.2 or more, 0.4 or more, 0.6 or more, or 0.8 or more. In addition, the mixing ratio of resin and fiber may be, for example, 5.0 or less, 3.0 or less, 2.0 or less, or 1.5 or less. The range of the mixing ratio of the resin and the fiber can also be defined by the combination of any one of the candidate values of the lower limit and any one of the candidate values of the upper limit, for example, it can be 0.2 More than 5.0 or less, 0.4 or more and 3.0 or less, 0.6 or more and 2.0 or less, or 0.8 or more and 1.5 or less. In addition, the range of the mixing ratio of the resin and the fiber can also be defined by the combination of any two of the plurality of candidate values of the lower limit, for example, it can be 0.2 or more and 0.8 or less, or 0.2 or more and 0.6 or less, It may be 0.4 or more and 0.8 or less, or 0.4 or more and 0.6 or less. In addition, the range of the mixing ratio of the resin and the fiber can also be specified by the combination of any two of the plurality of upper limit candidate values, for example, it can be 1.5 or more and 5.0 or less, or 1.5 or more and 3.0 or less, It may be 2.0 or more and 5.0 or less, or 2.0 or more and 3.0 or less. In addition, the mixing ratio of resin and fiber refers to a value obtained by dividing the weight ratio of the resin in the shaft member 52 by the weight ratio of the fiber in the shaft member 52.

When the shaft member 52 is a hollow member, the outer diameter R2 of the shaft member 52 may be 125 mm or more, 150 mm or more, 180 mm or more, or 200 mm or more. This can suppress plastic deformation of the metal plate 51 while the metal plate 51 is wound around the shaft member 52. When the shaft member 52 is a hollow member, the outer diameter R2 of the shaft member 52 may be 300 mm or less, 280 mm or less, 250 mm or less, or 200 mm or less, for example.

When the shaft member 52 is a hollow member, the range of the outer diameter R2 of the shaft member 52 may be any one of the candidate values of the plurality of lower limits and any one of the candidate values of the plurality of upper limits According to the combination of the two, for example, it may be 125 mm or more and 300 mm or less, 150 mm or more and 280 mm or less, or 180 mm or more and 250 mm or less. In addition, the range of the outer diameter R2 of the shaft member 52 can also be specified by a combination of any two of the plurality of candidate values of the lower limit, for example, it can be 125 mm or more and 200 mm or less, or 125 mm Above 180 mm, below 150 mm, above 200 mm, below 150 mm, and below 180 mm. In addition, the range of the outer diameter R2 of the shaft member 52 can also be specified by a combination of any two of the plurality of upper limit candidate values, for example, 200 mm or more and 300 mm or less, or 200 mm or more 280 mm or less, 250 mm or more and 300 mm or less, or 250 mm or more and 280 mm or less.

After the winding body 50 is produced, a housing step of housing the winding body 50 in the container may be performed. The winding body 50 is circulated in a state of being accommodated in a container. In the following description, the article provided with the container and the wound body 50 accommodated in the container is referred to as a package. In addition, the circulation of the winding body 50 refers to activities such as conveyance, storage, and transaction until the winding body 50 is transferred from the manufacturer of the winding body 50 to the user of the winding body 50. The user of the winding body 50 is, for example, a company that uses the winding body 50 to manufacture the vapor deposition cover 20.

10A is a perspective view showing an example of a package body 55 including a container 56 and a winding body 50 housed in the container 56. FIG. 10B is a cross-sectional view of the package body 55 along the line XB-XB of FIG. 10A. FIG. 10B shows a case where the container 56 accommodating the wound body 50 is cut on a plane parallel to the vertical direction and the axial direction of the shaft member 52.

As shown in FIGS. 10A and 10B, the container 56 includes: a lower portion 57 located below the winding body 50; a pair of side portions 58 located laterally of the winding body 50; and an upper portion 59 covering from above Winding body 50. The side portion 58 preferably supports the shaft member 52 so that the metal plate 51 of the winding body 50 does not contact the lower portion 57. This can suppress deformation or damage to the metal plate 51 due to the force received from the lower portion 57.

The method by which the side portion 58 supports the shaft member 52 is arbitrary. For example, a through hole 58a having a size larger than the outer diameter R2 of the shaft member 52 may be provided in the side portion 58 and the shaft member 52 may be inserted into the through hole 58a. In addition, a cutout or the like corresponding to the shape of the shaft member 52 may be provided at the upper end of the side portion 58 to place the shaft member 52 on the cutout.

As the material constituting the container 56 such as the lower part 57, the side part 58 and the upper part 59, wood, reinforced corrugated cardboard, etc. can be used.

The wound body 50 can also be stored in an appropriate storage place until the wound body 50 is transferred from the manufacturer of the wound body 50 to the user of the wound body 50. Here, according to the present embodiment, the metal plate 51 of the winding body 50 is stored in a state of being wound around the shaft member 52 having an outer diameter R2 of a predetermined threshold value or more. The threshold is 125 mm, 150 mm, etc. as described above. With this, it is possible to suppress the remaining warpage of the metal plate 51 after being rolled out from the shaft member 52.

The environment of the storage place is set in such a way as to prevent the characteristics of the metal plate 51 of the winding body 50 from changing. For example, the temperature of the storage place is 30°C or lower, more preferably 25°C or lower. Also, for example, the temperature of the storage place is 0°C or higher, more preferably 10°C or higher. In addition, the humidity of the storage place is 60% or less, more preferably 50% or less.

The winding body 50 may be stored in the container 56 of the packaging body 55 described above. In this case, the winding body 50 can be stored in a state where the metal plate 51 of the winding body 50 is not in contact with the lower portion 57 of the container 56, so that the metal plate 51 can be suppressed from being deformed or damaged.

Alternatively, the wound body 50 may be stored without being stored in the container 56. In this case, it is also preferable to support the shaft member 52 so that the metal plate 51 is not in contact with the surrounding structure. This can suppress deformation or damage of the metal plate 51.

After the metal plate 51 is wound around the shaft member 52 to produce the wound body 50, an inspection method for unwinding the metal plate 51 and inspecting the warpage caused by the metal plate 51 may be implemented. The inspection method is implemented, for example, by the manufacturer of the metal plate 51 or the winding body 50 before the metal plate 51 or the winding body 50 circulates. In addition, the inspection method may be implemented by a company or the like who stores the winding body 50 during circulation. In addition, a user who uses the wound body 50 may perform the inspection method after obtaining the wound body 50.

The inspection method includes: a test piece manufacturing step, which is to roll out the metal plate 51 of the winding body 50 and take out a metal plate 51 of a predetermined length to make a test piece 66; and a measurement step, which is to measure the warpage of the test piece 66. In the test piece production step, for example, a metal plate 51 of a predetermined length is cut from the wound body 50. For example, the metal plate 51 of the winding body 50 is cut using a large cutter such as a shear. As the test piece 66, the metal plate 51 located on the outermost side among the metal plates 51 wound around the shaft member 52 is used.

Furthermore, the degree of warpage caused by the metal plate 51 wound around the shaft member 52 becomes the largest in the innermost part of the metal plate 51, that is, the metal plate 51 located on the side closest to the shaft member 52. On the other hand, in the present embodiment, the difference between the outer diameter R3 of the metal plate 51 wound around the shaft member 52 and the outer diameter R2 of the shaft member 52 is smaller than the outer diameter R2 of the shaft member 52. For example, the ratio of the difference between the outer diameter R3 of the metal plate 51 and the outer diameter R2 of the shaft member 52 relative to the outer diameter R2 of the shaft member 52, that is, (R3-R2)/R2 is 1/5 or less, and also exists as 1/ In the case of 10 or less. Therefore, it is considered that the metal plate 51 located on the outermost side among the metal plates 51 wound around the shaft member 52 can be used as the test piece 66 to measure the warpage to become the metal plate located on the innermost side among the metal plates 51 wound around the shaft member 52 A useful indicator of the warpage produced by 51.

FIG. 11 is a diagram showing a method of measuring the warpage caused by the test piece 66 including the metal plate 51. FIG. 12 is a diagram when the test piece 66 of FIG. 11 is viewed from the direction of the arrow XII. In FIG. 12, the symbol L1 represents the size of the test piece 66 in the longitudinal direction F1, and the symbol L2 represents the size of the test piece 66 in the width direction F2. The size L1 of the test piece 66 is 400 mm or more and 600 mm or less, for example, 500 mm. The size L2 of the test piece 66 is equal to the size W1 of the metal plate 51 in the width direction F2, for example, 150 mm or more and 1300 mm or less. As shown in FIG. 12, the size L2 of the test piece 66, that is, the size W1 of the metal plate 51 is preferably large enough to distribute the plurality of vapor deposition covers 20 to the metal plate 51 along the width direction F2 of the metal plate 51.

In the measurement step, first, as shown in FIG. 11, a part of the test piece 66 is fixed to the vertical surface 67 a of the adherend 67 such as a wall. For example, the first end portion 51e in the longitudinal direction F1 of the metal plate 51 constituting the test piece 66 is fixed to the vertical surface 67a such that the first end portion 51e is located above. At this time, among the surfaces of the test piece 66, the surface located outside in the direction of the radius of curvature of the warpage generated in the test piece 66 is opposed to the vertical surface 67a of the adherend 67. For example, as shown in FIG. 11, when convex warpage occurs in the test piece 66 in the direction from the second surface 51 b of the metal plate 51 toward the first surface 51 a, the first surface 51 a of the metal plate 51 is made It faces the vertical surface 67a of the adherend 67. The method of fixing the first end 51e is arbitrary. For example, the first end 51e can be fixed to the vertical surface 67a using an adhesive, a single-sided tape, a double-sided tape, a magnet, or the like.

Next, as shown in FIG. 11, the gap S1 generated between the second end portion 51 f opposed to the first end portion 51 e in the longitudinal direction F1 and the vertical surface 67 a of the adherend 67 is measured. As a measuring device for measuring the gap S1, for example, a ruler, a vernier caliper, or the like can be used.

In the case where the gap S1 is equal to or less than the threshold value, a determination step for determining that the wound body 50 from which the test piece 66 has been taken out is acceptable. The threshold value is preferably 20 mm or less, and more preferably 15 mm or less. The determination step may be performed by the manufacturer of the winding body 50, or may be performed by the user of the winding body 50. When the user of the winding body 50 performs the determination step, after the determination step, the metal plate 51 of the winding body 50 determined to be acceptable may be used to manufacture the vapor deposition cover 20. In this case, the above-mentioned inspection step including the determination step can be said to be a part of the manufacturing method of the vapor deposition mask 20. Furthermore, the manufacturing method of the vapor deposition mask 20 may not always include the above-mentioned inspection steps.

Next, referring mainly to FIGS. 13 to 17, a method of manufacturing the vapor deposition cover 20 using the metal plate 51 wound around the shaft member 52 of the winding body 50 will be described. FIG. 13 is a diagram showing a manufacturing apparatus 70 for manufacturing the vapor deposition mask 20 using the metal plate 51. First, the winding body 50 including the metal plate 51 wound around the shaft member 52 is prepared. Then, the metal plate 51 of the winding body 50 is unwound from the shaft member 52, and the metal plate 51 is directed to the resist film forming device 71, exposure, developing device 72, etching device 73, film stripping device 74 and The separating device 75 conveys in order. In addition, FIG. 13 shows an example in which the metal plate 51 moves between the devices by being transported in the longitudinal direction F1, but it is not limited to this. For example, after the metal plate 51 provided with the resist film in the resist film forming apparatus 71 is wound around the shaft member 52 again, the metal plate 51 in the state of the winding body may be supplied to the exposure and development device 72. In addition, the metal plate 51 in the state where the resist film exposed to the exposure and development process in the exposure and development device 72 is wound on the shaft member 52 again may be supplied to the metal plate 51 in the state of the winding body Etching device 73. In addition, after the metal plate 51 etched in the etching device 73 is wound around the shaft member 52 again, the metal plate 51 in the state of the wound body may be supplied to the film stripping device 74. In addition, after the metal plate 51 from which the resin 54 described below is removed in the film peeling device 74 is wound around the shaft member 52 again, the metal plate 51 in the state of the wound body may be supplied to the separating device 75.

The resist film forming device 71 is provided with a resist film on the surface of the metal plate 51. The exposure and development device 72 patterns the resist film to form a resist pattern by performing exposure processing and development processing on the resist film.

The etching device 73 etches the metal plate 51 using the resist pattern as a mask, and forms a through hole 25 in the metal plate 51. Furthermore, in this embodiment, a plurality of through holes 25 corresponding to the plurality of vapor deposition covers 20 are formed in the metal plate 51. In other words, a plurality of vapor deposition covers 20 are allocated to the metal plate 51. For example, a plurality of through holes are formed in the metal plate 51 in such a manner that a plurality of effective areas 22 are arranged in the width direction F2 of the metal plate 51 and a plurality of effective areas 22 for the vapor deposition mask 20 are arranged in the length direction F1 of the metal plate 51 25. The film stripping device 74 strips the constituent elements provided to protect the unetched portions of the metal plate 51 such as the resist pattern or the resin 54 described below from the etching solution.

The separation device 75 performs a separation step of separating the portion of the metal plate 51 where the plurality of through holes 25 corresponding to one vapor deposition cover 20 is formed from the metal plate 51. In this way, a single-piece vapor deposition cover 20 can be obtained.

Hereinafter, each step of the method of manufacturing the vapor deposition mask 20 will be described in detail.

First, the winding body 50 is installed in the manufacturing apparatus 70. For example, the winding body 50 is provided in an unshown unwinding device for unwinding the metal plate 51 toward the resist film forming device 71.

Here, in the present embodiment, the outer diameter R2 of the shaft member 52 is 550 mm or less, more preferably 300 mm or less. In addition, a hollow portion is formed in the shaft member 52. In addition, the thickness T of the metal plate 51 wound around the shaft member 52 is small, for example, 50 μm or less. Therefore, the weight of the winding body 50 provided with the metal plate 51 and the shaft member 52 is smaller than that of the winding body used in the previous manufacturing step of the vapor deposition cover 20. The weight of the wound body 50 of this embodiment is, for example, 70 kg or less, preferably 50 kg or less. Therefore, the step of installing the winding body 50 in the manufacturing device 70 can be performed without using a conveying device such as a stacker. For example, the winding body 50 may be installed in the manufacturing apparatus 70 by supporting one end of the shaft member 52 while supporting the other end while supporting the other end. Therefore, it is possible to install the winding body 50 in the manufacturing apparatus 70 without providing the space for entering the conveying apparatus in the manufacturing apparatus of the vapor deposition cover 20. This makes it possible to reduce the area of the manufacturing apparatus 70 compared to the previous manufacturing apparatus that uses the conveying apparatus to install the winding body 50.

In addition, in the winding body 50 of the present embodiment, the safety of work is also emphasized, and the winding body 50 may be installed in the manufacturing device 70 using a conveying device such as a stacker.

Next, using the resist film forming device 71, resist films 53a and 53b are formed on the first surface 51a and the second surface 51b of the metal plate 51 rolled out from the unwinding device, as shown in FIG. For example, the resist films 53a and 53b are formed by attaching a dry film containing a photosensitive resist material such as acrylic photocurable resin to the first surface 51a and the second surface 51b of the metal plate 51. Alternatively, it is also possible to form a resist by applying a coating liquid containing a negative-type photosensitive resist material on the first surface 51a and the second surface 51b of the metal plate 51, and drying the coating liquid The membrane 53a, 53b.

Then, using the exposure and development device 72, the resist films 53a and 53b are exposed and developed. Thereby, as shown in FIG. 15, the first resist pattern 53 c can be formed on the first surface 51 a of the metal plate 51, and the second resist pattern 53 d can be formed on the second surface 51 b of the metal plate 51.

Then, using the etching device 73, the metal plate 51 is etched using the resist patterns 53c and 53d as a mask. Specifically, first, as shown in FIG. 16, an area of the first surface 51 a of the metal plate 51 that is not covered by the first resist pattern 53 c is etched using the first etchant. For example, the first etchant is sprayed toward the first surface 51a of the metal plate 51 across the first resist pattern 53c from the nozzle disposed on the side facing the first surface 51a of the metal plate 51 to be transported. As a result, as shown in FIG. 16, in the region of the metal plate 51 that is not covered by the first resist pattern 53c, the corrosion by the first etchant progresses. As a result, a plurality of first recesses 30 are formed on the first surface 51a of the metal plate 51. As the first etching solution, for example, a solution containing ferric chloride solution and hydrochloric acid is used.

Next, as shown in FIG. 17, an area of the second surface 51b of the metal plate 51 that is not covered by the second resist pattern 53d is etched to form a second recess 35 on the second surface 51b. The etching of the second surface 51b is performed until the first concave portion 30 and the second concave portion 35 communicate with each other, thereby forming the through hole 25. As the second etching solution, for example, a solution containing ferric chloride solution and hydrochloric acid is used in the same manner as the above-mentioned first etching solution. In addition, when etching the second surface 51b, as shown in FIG. 17, the first concave portion 30 may be covered with a resin 54 having resistance to the second etching solution.

Then, using the peeling device 74, the resin 54 is removed from the metal plate 51. The resin 54 can be removed by using an alkali-based stripping liquid, for example. When an alkali-based stripping solution is used, the resist patterns 53c and 53d are also removed simultaneously with the resin 54. In addition, after the resin 54 is removed, a peeling liquid different from the peeling liquid for peeling off the resin 54 may be used to remove the resist patterns 53c and 53d separately from the resin 54.

Then, the plurality of vapor deposition covers 20 distributed to the metal plate 51 are taken out one by one. For example, the part of the metal plate 51 in which a plurality of through holes 25 corresponding to one vapor deposition mask 20 is formed is separated from the other parts of the metal plate 51. Thereby, the vapor deposition cover 20 can be obtained. Furthermore, before performing the separation step, a portion of the metal plate 51 to which an appropriate number of vapor deposition covers 20 are allocated may be cut. In this case, in the separation step, the vapor-deposited covers 20 are taken out one by one from the sheet-shaped metal plate 51 to which an appropriate number of vapor-deposited covers 20 are allocated. As a method of removing the vapor deposition cover 20 from the metal plate 51, a method of separating the vapor deposition cover 20 from the metal plate 51 by laser processing, or a method of separating the vapor deposition cover 20 from the metal plate 51 by an operator And other methods.

In addition, the method of forming the through-hole 25 in the metal plate 51 is not limited to etching. For example, the through hole 25 may be formed in the metal plate 51 by laser processing that irradiates the metal plate 51 with laser light.

Then, the inspection step of inspecting the vapor deposition cover 20 is implemented. The inspection step includes at least any one of a step of inspecting the position of the constituent elements of the vapor deposition mask 20, a step of inspecting the size of the constituent elements of the vapor deposition mask 20, or a step of inspecting the distance between the two constituent elements of the vapor deposition mask 20. The component to be inspected is, for example, the through-hole 25.

In the inspection step, first, as shown in FIG. 18, the vapor deposition cover 20 is placed on the horizontal surface 68 a of the inspection table 68. FIG. 19 is a view when the vapor deposition cover 20 and the inspection table 68 of FIG. 18 are viewed from the direction of the arrow XIX. The inspection table 68 is, for example, a glass plate. As shown in FIG. 19, the vapor deposition cover 20 is placed on the inspection table 68 so that the first surface 20 a of the vapor deposition cover 20 faces the horizontal surface 68 a of the inspection table 68. The first direction D1 in which the vapor deposition cover 20 extends may also coincide with the longitudinal direction F1 of the metal plate 51. The size of the vapor deposition cover 20 in the first direction D1 is 500 mm or more and 1300 mm or less, for example, 1200 mm. In addition, the size of the vapor deposition cover 20 in the second direction D2 is 30 mm or more and 400 mm or less, for example, 70 mm.

In the inspection step, for example, the vapor deposition cover 20 is irradiated with light from one side of the first surface 20a or the second surface 20b of the vapor deposition cover 20 along the normal direction of the horizontal plane 68a. In addition, the light emitted from the other side of the first surface 20a or the second surface 20b of the vapor deposition cover 20 through the through hole 25 of the vapor deposition cover 20 is detected using a detector. Then, based on the detected light pattern, information about the position, area, shape, etc. of the through hole 25 of the vapor deposition cover 20 is obtained. Based on such information, the qualification of the vapor deposition cover 20 can be determined. Furthermore, information regarding the position, area, shape, etc. of the through hole 25 of the vapor deposition cover 20 can also be obtained based on the pattern of light reflected by the vapor deposition cover 20.

In addition, when the metal plate 51 is wound around the shaft member 52, the warpage remains in the vapor deposition cover 20. As shown in FIG. 19, it occurs between the vapor deposition cover 20 and the horizontal surface 68a of the inspection table 68. The case of gap S2. As shown in FIG. 19, when the vapor deposition cover 20 is placed on the horizontal surface 68a, it is due to the weight of the vapor deposition cover 20 as compared with the case where the metal plate 51 is fixed to the vertical surface 67a as shown in FIG. Moreover, the distance between the metal plate 51 of the vapor deposition cover 20 and the horizontal plane 68a tends to become smaller. Therefore, the gap S2 is easily smaller than the gap S1. However, since the position, area, shape, etc. of the through hole 25 of the vapor deposition mask 20 require high accuracy, as described below, the gap S2 may cause a problem.

The greater the degree of warpage of the vapor deposition mask 20, and the greater the gap S2, the more information about the position, area, shape, etc. of the through-hole 25 obtained based on the pattern of light from the actual direction of the surface direction of the vapor deposition mask 20 The position, area, shape, etc. of the through hole 25 are separated. Therefore, the greater the warpage of the vapor deposition mask 20, the lower the accuracy of the inspection step of the vapor deposition mask 20. If the warpage of the vapor deposition cover 20 is greater, the light passing through the through hole 25 of the vapor deposition cover 20 or the light reflected by the vapor deposition cover 20 may not reach the detector.

Here, in this embodiment, as described above, the outer diameter R2 of the shaft member 52 of the wound body 50 is at least 125 mm or more or 150 mm or more. In other words, the inner diameter of the portion of the metal plate 51 wound around the shaft member 52 that is closest to the shaft member 52 is 125 mm or more or 150 mm or more. Therefore, the metal plate 51 wound around the shaft member 52 can be suppressed from remaining warpage. For example, the gap S1 generated when the test piece 66 taken out of the metal plate 51 is fixed to the vertical surface 67a can be suppressed to 20 mm or less, and more preferably 15 mm or less. Therefore, the gap S2 generated when the vapor deposition cover 20 made from the metal plate 51 is placed on the horizontal plane 68a can be suppressed to 0.5 mm or less, and more preferably to 0.25 mm or less. In this way, in the inspection step of the vapor deposition mask 20, information related to the position, area, shape, etc. of the through hole 25 can be obtained with high accuracy.

In addition, from the viewpoint of suppressing warpage of the vapor deposition cover 20, it is preferable that the outer diameter R2 of the shaft member 52 is large. However, when the outer diameter R2 of the shaft member 52 becomes larger, the weight of the winding body 50 increases, and the difficulty of conveyance and installation of the winding body 50 increases. Considering this aspect, in the present embodiment, the outer diameter R2 of the shaft member 52 is, for example, 550 mm or less, and more preferably 300 mm or less.

In addition, as a method of increasing the outer diameter R2 of the shaft member 52 while suppressing the weight of the winding body 50, it is also considered to shorten the length of the metal plate 51 wound around the shaft member 52. However, when the front end of the metal plate 51 of the winding body 50 is put into the exposure device, the development device 72, and the etching device 73 of the manufacturing device 70, the steps performed by the devices are likely to become unstable. Therefore, in the vapor deposition cover 20 produced near the front end of the metal plate 51 of the self-winding body 50, uneven quality tends to increase. Therefore, in order to produce a plurality of vapor deposition covers 20 with a small quality unevenness from one winding body 50, the length of the metal plate 51 of the winding body 50 is required to some extent. The length in the longitudinal direction F1 of the metal plate 51 of the wound body 50 is preferably 200 m or more, more preferably 300 m or more, and further preferably 400 m or more or 500 m or more, or 600 m or more.

Against this background, in a particularly preferred form of the present embodiment, by making the length of the metal plate 51 of the winding body 50 at least 200 m or more, while making the thickness T of the metal plate 51 30 m or less, and Reduce the weight of the metal plate 51. In addition, by setting the outer diameter R2 of the shaft member 52 to 300 mm or less, the weight of the entire wound body 50 is reduced. In addition, since the thickness T of the metal plate 51 is 30 μm or less, even when the outer diameter R2 of the shaft member 52 is 125 mm or 150 mm, the remaining warpage of the metal plate 51 can be suppressed. In addition, since the weight of the metal plate 51 is reduced, the required strength or rigidity of the shaft member 52 becomes low. Therefore, a hollow member can be used as the shaft member 52. Further, as the material constituting the shaft member 52, a resin lighter than metal such as phenol resin can be used. As a result, the weight of the entire wound body 50 can be further reduced. For example, it can be set to 70 kg or less or 50 kg or less. This situation can reduce the difficulty of conveyance and installation of the winding body 50. For example, the step of installing the winding body 50 in the manufacturing device 70 may be performed by a two-person operator without using a conveying device such as a stacker. This makes it possible to reduce the area of the manufacturing apparatus 70 compared to the previous manufacturing apparatus that uses the conveying apparatus to install the winding body 50. In this way, according to the particularly preferable form of the present embodiment, the warpage of the metal plate 51 can be suppressed, and the difficulty of transportation and installation of the winding body 50 can be reduced.

As an instrument for measuring the weight of the winding body 50, a large-scale weight scale in which a jig provided with the winding body 50 is placed in advance is used.

In a particularly preferable form of the present embodiment, the length of the metal plate 51 of the shaft member 52 wound around the winding body 50 can also be set according to the thickness T of the metal plate 51. For example, when the thickness T of the metal plate 51 is 20 μm or less, the length of the metal plate 51 wound around the shaft member 52 is 550 m or more and 650 m or less, and the thickness T of the metal plate 51 is more than 20 μm and is In the case of 30 μm or less, the length of the metal plate 51 wound around the shaft member 52 may be 350 m or more and 450 m or less. As a result, the weight of the metal plate 51 wound around the shaft member 52 can be about 50 kg.

Next, a welding step of welding the vapor deposition cover 20 obtained in the above manner to the frame 15 is performed. Thereby, the vapor deposition cover device 10 including the vapor deposition cover 20 and the frame 15 can be obtained.

Next, a method of manufacturing the organic EL display device 100 using the vapor deposition cover 20 of this embodiment will be described. The manufacturing method of the organic EL display device 100 includes a vapor deposition step in which a vapor deposition material 98 is vapor deposited on a substrate such as an organic EL substrate 92 using a vapor deposition cover 20. In the vapor deposition step, first, the vapor deposition cover device 10 is arranged so that the vapor deposition cover 20 and the organic EL substrate 92 face each other. In addition, the vapor deposition cover 20 is closely adhered to the organic EL substrate 92 using the magnet 93. In addition, the inside of the vapor deposition apparatus 90 is vacuum atmosphere. In this state, by evaporating the vapor deposition material 98 and flying toward the organic EL substrate 92 through the vapor deposition cover 20, the pattern corresponding to the through hole 25 of the vapor deposition cover 20 can adhere the vapor deposition material 98 to the organic EL substrate 92.

Furthermore, various changes can be added to the above-mentioned embodiment. Hereinafter, as necessary, referring to the drawings, a description will be given of the modified examples. In the following description and the drawings used in the following description, the same symbols as those used for the corresponding parts in the above embodiment are used for the parts that can be constructed in the same manner as in the above embodiment, and repeated descriptions are omitted. . In addition, when it is clarified that the operational effects that can be obtained in the above-described embodiment can be obtained in the modified example, the description thereof is also omitted.

In the above-mentioned embodiment, an example in which the hollow portion is formed in the shaft member 52 is shown. However, it is not limited to this, and as shown in FIG. 20, the hollow member may not be formed on the shaft member 52 of the winding body 50. The thickness of the metal plate 51 of the shaft member 52 is large, and the total weight of the metal plate 51 wound around the shaft member 52 is large. Therefore, it is preferably used when the shaft member 52 requires high rigidity. For example, it can be used when the thickness T of the metal plate 51 is greater than 30 μm and less than 50 μm. In addition, when the thickness T of the metal plate 51 is 30 μm or less, for example, 10 μm or more and 30 μm or less, the shaft member 52 shown in FIG. 20 may be used.

In the case where a hollow portion is not formed in the shaft member 52, as a material constituting the shaft member 52, resin, a mixture of resin and fiber, metal, or the like can be used. Examples of the resin include phenol resin, ABS resin, polystyrene resin, and polyethylene resin. Examples of the mixture of resin and fiber include phenolic paper and fiber-reinforced plastic (PRP). Examples of metals include iron and iron alloys.

When the hollow portion is not formed in the shaft member 52, the outer diameter R2 of the shaft member 52 is, for example, 300 mm or more, or 350 mm or more. In addition, when a hollow portion is not formed in the shaft member 52, the outer diameter R2 of the shaft member 52 is, for example, 550 mm or less, or may be 500 mm or less.

Even when a hollow portion is not formed in the shaft member 52, it is preferable that the weight of the winding body 50 is so small that the step of installing the winding body 50 in the manufacturing device 70 can be performed without using a conveying device such as a stacker . For example, the weight of the winding body 50 is 100 kg or less. In this case, for example, two of the four-person operator can support the one end side of the shaft member 52 while the other two support the other end side while transporting the winding body 50, and the winding body 50 can be transferred. Provided in the manufacturing apparatus 70.

In the present embodiment described above, an example in which the metal plate 51 is obtained by rolling the base material is shown. However, it is not limited to this, and a metal plate 51 having a desired thickness may be produced by a foil-making step using a plating process. In the foil-making step, for example, while rotating a drum made of stainless steel or the like partially immersed in the plating solution, a plating film is formed on the surface of the drum, and the plating film is peeled off, which can be used Roll-to-roll production of long metal plates. In the case of manufacturing a metal plate including an iron alloy containing nickel, as the plating solution, a mixed solution of a solution containing a nickel compound and a solution containing an iron compound can be used. For example, a mixed solution of a solution containing nickel sulfamate and a solution containing iron sulfamate can be used. The plating solution may contain additives. Examples of additives include boric acid that functions as a buffer, saccharin or malonic acid that functions as a smoothing material, and sodium lauryl sulfate that functions as a surfactant.

Secondly, the above-mentioned annealing step may also be performed on the metal plate 51 obtained in this way. In addition, before or after the annealing step, the above-mentioned cutting step of cutting off both ends of the metal plate 51 in order to adjust the width of the metal plate 51 to a desired width may be performed.

When the metal plate 51 is produced by the plating process, the metal plate 51 is wound around the shaft member 52 having the outer diameter R2 of 150 mm or more and 550 mm or less, as in the case of the above-described embodiment.体50。 50. With this, it is possible to suppress that the warpage caused by winding the metal plate 51 around the shaft member 52 remains in the metal plate 51 or the vapor deposition cover 20 rolled out from the shaft member 52.

In the present embodiment described above, the shaft member 52 is an example of a hollow member having an inner diameter R1. In this case, as shown in FIG. 22, the inner diameter R1 of the shaft member 52 may be fixed across the axial direction of the shaft member 52. In other words, in the direction orthogonal to the axial direction of the shaft member 52, the size of the hollow portion 52c of the shaft member 52 can also be fixed. Alternatively, as shown in FIG. 23, the inner diameter R1 of the shaft member 52 may be changed according to the axial position of the shaft member 52. For example, as shown in FIG. 23, the shaft member 52 may include a portion where the inner diameter R1 increases from the end of the shaft member 52 in the axial direction toward the center.

Moreover, as shown in FIG. 24, the shaft member 52 may include the outer peripheral part 52a and the partition 52b. The outer peripheral portion 52a is a portion of the shaft member 52 that extends in the axial direction and contacts the metal plate 51. The outer peripheral portion 52a defines the inner diameter R1 and the outer diameter R2 of the shaft member 52. The partition wall 52b is a portion of the shaft member 52 that is located inside the outer peripheral portion 52a in the radial direction of the shaft member 52 and traverses the hollow portion 52c in a direction orthogonal to the axial direction. In the example shown in FIG. 24, since the shaft member 52 has the hollow portion 52c, the weight of the shaft member 52 can be reduced. With this, the handling of the wound body 50 can be facilitated. In addition, since the shaft member 52 has the partition wall 52b, the rigidity of the shaft member 52 can be improved. Thereby, deformation or breakage of the shaft member 52 due to the weight of the shaft member 52 or the weight of the metal plate 51 can be suppressed.

FIG. 25 is a cross-sectional view showing an example of the wound body 50 when cut along the line A-A of FIG. 24. As shown in FIG. 25, the partition wall 52b may be formed in such a manner that the hollow portion 52c located on one side of the partition wall 52b in the axial direction of the shaft member 52 communicates with the hollow portion 52c located on the other side of the partition wall 52b.

FIG. 26 is a cross-sectional view showing an example of the wound body 50 when cut along the line A-A of FIG. 24. As shown in FIG. 26, the partition wall 52b may be formed in such a manner that the hollow portion 52c located on one side of the partition wall 52b and the hollow portion 52c located on the other side of the partition wall 52b in the axial direction of the shaft member 52 are separated by the partition wall 52b .

In the present embodiment described above, the example in which the packaging body 55 includes the lower portion 57, the side portion 58, and the upper portion 59 is shown, but the configuration of the packaging body 55 is arbitrary. For example, as shown in FIG. 27, the packing body 55 may include a pair of side portions 58 located on the side of the winding body 50 and supporting the shaft member 52, but does not include the lower portion 57 and the upper portion 59. Furthermore, as shown in FIG. 28, the packing body 55 may also include a pair of side portions 58 located on the side of the winding body 50 and supporting the shaft member 52, and covering the upper portion 59 of the winding body 50 from above, but not including a lower portion 57. In either the example shown in FIG. 27 or the example shown in FIG. 28, it is preferable that the side portion 58 supports the shaft in such a manner that the metal plate 51 of the winding body 50 is located above the lower end 58b of the side portion 58 Member 52. This can suppress deformation or damage of the metal plate 51.

As shown in FIG. 28, the upper portion 59 may also be deformed due to the weight of the upper portion 59 or the flexibility of the upper portion 59. The upper portion 59 may also include a film including plastic materials such as plastic. Such an upper part 59 can also be used in the package body 55 provided with the lower part 57, the side part 58, and the upper part 59 shown in FIGS. 10A and 10B.

In the present embodiment described above, the example in which the lower portion 57, the side portion 58 and the upper portion 59 of the packing body 55 are each constituted by individual members is shown. However, it is not limited to this, and as shown in FIG. 29, the lower portion 57 and the side portion 58 may be integrally configured. For example, at least a portion of the lower portion 57 and at least a portion of the side portion 58 may be formed by deforming a series of members such as a piece of reinforced corrugated cardboard by bending or the like. In addition, the upper portion 59 and the side portion 58 may be integrally configured.

FIG. 30 is a cross-sectional view showing a modified example of the packing body 55. FIG. The packaging body 55 may also include an environmental regulator 60 located inside the container 56. Examples of the environment regulator 60 include a deoxidizer that captures oxygen in the container 56 and a desiccant that captures moisture in the container 56.

The desiccant is, for example, silicone rubber. By adsorbing the moisture inside the container 56 by the desiccant, the dry state of the atmosphere inside the container 56 can be maintained. In this case, the metal plate 51 or the shaft member 52 can be prevented from being deteriorated due to moisture.

The environmental regulator 60 may contain either a deoxidizer or a desiccant, or both.

The inside of the container 56 may also be depressurized to a pressure lower than atmospheric pressure. Furthermore, the interior of the container 56 may be filled with an inert gas such as nitrogen or non-reducing gas. The concentration of inert gas or non-reducing gas such as nitrogen in the interior of the container 56 may also be 85% or more, 90% or more, or 95% or more. [Example]

Next, the above embodiment will be described more specifically by way of examples, but the embodiments are not limited by the description of the following examples as long as they do not exceed the gist.

First, a shaft member 52 having an outer diameter R2 of 50 mm, 75 mm, 100 mm, 125 mm, 150 mm, 200 mm, 250 mm, 300 mm, 400 mm, 500 mm, and 600 mm, respectively, is prepared. As the shaft member 52, a hollow member containing a mixture of paper and phenol resin is used. The difference between the outer diameter R2 and the inner diameter R1 of the shaft member 52 is 10 mm. As an instrument for measuring the outer diameter R2 of the shaft member 52, a measuring instrument is used.

In addition, metal plates 51 having thickness T of 8 μm, 10 μm, 13 μm, 15 μm, 18 μm, 20 μm, 25 μm, 30 μm, 35 μm, 40 μm, 50 μm, and 100 μm are prepared, respectively. As a material of the metal plate 51, an iron alloy containing 34% by mass of nickel is used. As an instrument for measuring the thickness T of the metal plate 51, "MT1271" of a length gauge HEIDENHAIM-METRO manufactured by HEIDENHAIN Corporation equipped with a ball-guided plunger is used. The length of each metal plate 51 in the longitudinal direction F1 is 200 m, and the size W1 of each metal plate 51 in the width direction F2 is 500 mm. The number of metal plates 51 of each thickness prepared corresponds to the number of types of the outer diameter R2 of the shaft member 52.

Next, the metal plate 51 having the above-mentioned various thicknesses T is wound around the shaft member 52 having the above-mentioned various outer diameters R2 to produce the wound body 50. Then, the weight of the winding body 50 was measured. As an instrument for measuring the weight of the winding body 50, a large-scale weight scale in which a jig provided with the winding body 50 is placed in advance is used. Then, each wound body 50 was stored for 30 days in an environment with a temperature of 25°C and a humidity of 55°C. Then, the metal plate 51 is unwound from each winding body 50 to produce the test piece 66 described above. The size L1 of the test piece 66 in the longitudinal direction F1 is 500 mm, and the size L2 of the test piece 66 in the width direction F2 is 500 mm.

Then, the measurement method shown in FIGS. 11 and 12 was implemented, and the gap S1 between the test piece 66 taken out from each winding body 50 and the vertical surface 67a of the adherend 67 was measured. The results are shown in Figure 21. In FIG. 21, among the cells corresponding to the combination of the specific thickness T and the outer diameter R2, the cell corresponding to the combination of the gap S1 of 15 mm or less displays "A1" or "A2". In addition, "B" is displayed on the cell corresponding to the combination where the gap S1 exceeds 15 mm and is 20 mm or less. In addition, "C" is displayed in the cell where the gap S1 exceeds 20 mm. When the threshold value is set to 20 mm and the judgment step of judging the pass or fail of the test piece 66 based on the value of the gap S1 is performed, "A1", "A2" and "B" indicate pass, and "C" indicates pass. "A1" and "A2" are classifications based on the measurement results of the weight of the winding body 50. "A1" indicates that the weight of the wound body 50 is 70 kg or less, and "A2" indicates that the weight of the wound body 50 exceeds 70 kg. Considering the ease of handling the wound body 50, the weight of the wound body 50 is preferably 70 kg or less. Therefore, "A1" is the best result, "A2" is the better result after "A1", and "B" is the better result after "A2".

As shown in FIG. 21, when the thickness T of the metal plate 51 is 50 μm or less and the outer diameter R2 of the shaft member 52 is 150 mm or more, the gap S1 is 15 mm or less. In addition, when the thickness T of the metal plate 51 is 30 μm or less and the outer diameter R2 of the shaft member 52 is 125 mm or more, the gap S1 is also 15 mm or less.

Also, as shown in FIG. 21, when the thickness T of the metal plate 51 is 10 μm or less and the outer diameter R2 of the shaft member 52 is 100 mm or more and 300 mm or less, the gap S1 is 15 mm or less, and the wound body The weight of 50 is below 70 kg. In addition, when the thickness T of the metal plate 51 is 15 μm or less, and the outer diameter R2 of the shaft member 52 is 125 mm or more and 300 mm or less, the gap S1 is 15 mm or less, and the weight of the wound body 50 is 70 kg the following. In addition, when the thickness T of the metal plate 51 is 25 μm or less, and the outer diameter R2 of the shaft member 52 is 125 mm or more and 280 mm or less, the gap S1 is 15 mm or less, and the weight of the wound body 50 is 70 kg the following. In addition, when the thickness T of the metal plate 51 is 30 μm or less, and the outer diameter R2 of the shaft member 52 is 125 mm or more and 250 mm or less, the gap S1 is 15 mm or less, and the weight of the wound body 50 is 70 kg the following. In addition, when the thickness T of the metal plate 51 is 35 μm or less, and the outer diameter R2 of the shaft member 52 is 150 mm or more and 250 mm or less, the gap S1 is 15 mm or less, and the weight of the wound body 50 is 70 kg the following. In addition, when the thickness T of the metal plate 51 is 50 μm or less, and the outer diameter R2 of the shaft member 52 is 150 mm or more and 200 mm or less, the gap S1 is 15 mm or less, and the weight of the wound body 50 is 70 kg the following.

10‧‧‧Evaporation cover device 15‧‧‧frame 17a‧‧‧1st ear 17b‧‧‧ 2nd ear 18‧‧‧Middle 20‧‧‧Evaporation cover 20a‧‧‧The first side 20b‧‧‧The second side 20e‧‧‧1st end 20f‧‧‧2nd end 22‧‧‧effective area 23‧‧‧ surrounding area 25‧‧‧Through hole 30‧‧‧The first recess 31‧‧‧The wall surface of the first recess 30 35‧‧‧Second recess 36‧‧‧The wall surface of the second recess 35 41‧‧‧ Connection 42‧‧‧Penetration Department 43‧‧‧Top 50‧‧‧wound body 51‧‧‧Metal plate 51a‧‧‧The first side of metal plate 51 51b‧‧‧The second side of the metal plate 51 51e‧‧‧1st end 51f‧‧‧2nd end 52‧‧‧Shaft member 52a‧‧‧Outer periphery 52b‧‧‧ partition 52c‧‧‧Hollow Department 53a, 53b‧‧‧ resist film 53c, 53d‧‧‧ resist pattern 54‧‧‧Resin 55‧‧‧Packing body 56‧‧‧Container 57‧‧‧Lower 58‧‧‧Side 58a‧‧‧Through hole 58b‧‧‧Side 58 lower end 59‧‧‧Upper 60‧‧‧Environmental Regulator 61‧‧‧Rolling device 61a、61b‧‧‧Rolling roller 62‧‧‧Core 63‧‧‧Annealing device 66‧‧‧Test piece 67‧‧‧ Attached 67a‧‧‧straight face 68‧‧‧Examination table 68a‧‧‧horizontal 70‧‧‧Manufacturing device 71‧‧‧resist film forming device 72‧‧‧Exposure and development device 73‧‧‧Etching device 74‧‧‧Film stripping device 75‧‧‧ Separating device 90‧‧‧Evaporation equipment 92‧‧‧ organic EL substrate 93‧‧‧Magnet 94‧‧‧Crucible 96‧‧‧heater 98‧‧‧Evaporation material 100‧‧‧ organic EL display device 510‧‧‧ base material D1‧‧‧First direction D2‧‧‧ 2nd direction F1‧‧‧ length direction F2‧‧‧Width direction L1‧‧‧The size of the test piece 66 in the longitudinal direction F1 L2‧‧‧Dimension of test piece 66 in width direction F2 M1‧‧‧Straight N‧‧‧ Normal direction of the vapor deposition cover 20 r‧‧‧The size of the through part 42 R1‧‧‧Inner diameter R2‧‧‧Outer diameter of shaft member 52 R3‧‧‧Outer diameter of the metal plate 51 wound around the shaft member 52 S1‧‧‧Gap S2‧‧‧Gap T‧‧‧thickness of evaporation cover 20 W1‧‧‧Dimension of the metal plate 51 in the width direction F2 orthogonal to the longitudinal direction F1 of the metal plate 51 W2‧‧‧Dimension of shaft member 52 in width direction F2 θ1‧‧‧minimum angle α‧‧‧Width of flange β‧‧‧Top 43 width

FIG. 1 is a view showing a vapor deposition apparatus provided with a vapor deposition hood apparatus of an embodiment. 2 is a cross-sectional view showing an organic EL display device manufactured using the vapor deposition cover device shown in FIG. 1. Fig. 3 is a plan view showing a vapor deposition hood apparatus of an embodiment. 4 is a partial plan view showing the effective area of the vapor deposition mask shown in FIG. 3. FIG. 5 is a cross-sectional view taken along line V-V of FIG. 4. FIG. 6 is a diagram showing a step of rolling a base material to obtain a metal plate having a desired thickness. FIG. 7 is a diagram showing the steps of annealing the metal plate obtained by rolling. FIG. 8 is a perspective view showing a wound body provided with a metal plate wound around a shaft member. 9 is a cross-sectional view of the winding body. FIG. 10A is a perspective view showing a wound body accommodated in a container. FIG. 10B is a cross-sectional view taken along line XB-XB of FIG. 10A. Fig. 11 is a diagram showing a method of measuring warpage caused by a metal plate. FIG. 12 is a view showing the metal plate of FIG. 11 viewed from the direction of arrow XII. FIG. 13 is a schematic diagram for explaining one example of a method of manufacturing a vapor deposition mask as a whole. 14 is a diagram showing the steps of providing a resist film on a metal plate. FIG. 15 is a diagram showing the steps of patterning the resist film. FIG. 16 is a diagram showing the first surface etching step. FIG. 17 is a diagram showing a second surface etching step. FIG. 18 is a diagram showing an example of the inspection procedure of the vapor deposition mask. FIG. 19 is a view when the vapor deposition cover of FIG. 18 is viewed from the direction of arrow XIX. 20 is a cross-sectional view showing a modified example of the winding body. 21 is a graph showing the evaluation results of the warpage of the metal plate in the examples. 22 is a cross-sectional view showing an example of a wound body when it is parallel to the axial direction of the shaft member and cut by a plane passing through the axis of the shaft member. 23 is a cross-sectional view showing an example of a wound body when it is parallel to the axial direction of the shaft member and cut by a plane passing through the axis of the shaft member. 24 is a cross-sectional view showing an example of a wound body when it is parallel to the axial direction of the shaft member and cut by a plane passing through the axis of the shaft member. FIG. 25 is a cross-sectional view showing an example of the wound body when cut along the line A-A of FIG. 24. FIG. 26 is a cross-sectional view showing an example of the wound body when cut along the line A-A of FIG. 24. Fig. 27 is a cross-sectional view showing a modified example of the packing body. Fig. 28 is a cross-sectional view showing a modified example of the packing body. Fig. 29 is a cross-sectional view showing a modified example of the packing body. Fig. 30 is a cross-sectional view showing a modified example of the packing body.

50‧‧‧wound body

51‧‧‧Metal plate

52‧‧‧Shaft member

F2‧‧‧Width direction

W1‧‧‧Dimension of the metal plate 51 in the width direction F2 orthogonal to the longitudinal direction F1 of the metal plate 51

W2‧‧‧Dimension of shaft member 52 in width direction F2

Claims (20)

A winding body, which is a winding body for manufacturing a metal plate of a vapor deposition cover, and is provided with: Shaft member with an outer diameter of 150 mm or more and 550 mm or less; and The metal plate is wound around the shaft member and has a thickness of 50 μm or less. The wound body according to claim 1, wherein the metal plate has an iron alloy containing 30% by mass or more and 54% by mass or less of nickel. If the winding body of claim 1 or 2, wherein the outer diameter of the shaft member is 300 mm or less, The thickness of the metal plate is 30 μm or less. The winding body according to claim 3, wherein the weight of the above winding body is 70 kg or less. The wound body according to claim 3 or 4, wherein the shaft member contains a phenol resin. The wound body according to any one of claims 3 to 5, wherein the shaft member is a hollow member having an inner diameter of 100 mm or more. The wound body according to claim 6, wherein the difference between the outer diameter and the inner diameter of the shaft member is 5 mm or more. If the winding body of claim 1 or 2, wherein the outer diameter of the shaft member is 300 mm or more and 550 mm or less, The thickness of the metal plate is 50 μm or less. The winding body according to claim 8, wherein the weight of the above winding body is 100 kg or less. A packing body with: A rolled body of a metal plate, which is used to manufacture a vapor deposition cover; and A container which houses the above-mentioned winding body; and The above winding body has: Shaft member with an outer diameter of 150 mm or more and 550 mm or less; and The metal plate is wound around the shaft member and has a thickness of 50 μm or less. The packaging body according to claim 10, wherein the container has a side portion supporting the shaft member, The side portion supports the shaft member such that the metal plate of the wound body is located above the lower end of the side portion. As in the packaged body of claim 11, the above-mentioned container has: The lower part, which is below the above-mentioned winding body; and The side portion supports the shaft member so that the metal plate of the wound body does not contact the lower portion. The packaging body according to claim 12, wherein the container includes an upper portion covering the winding body from above. The packaging body according to any one of claims 10 to 13, which includes a deoxidizer or a desiccant located inside the container. A packing method, which has: Preparation step, which is to prepare the winding body of the metal plate for manufacturing the vapor deposition cover; and An accommodating step, which is to accommodate the winding body in a container; and The above winding body has: Shaft member with an outer diameter of 150 mm or more and 550 mm or less; and The metal plate is wound around the shaft member and has a thickness of 50 μm or less. The packing method according to claim 15, wherein the container has a side portion supporting the shaft member, The side portion supports the shaft member such that the metal plate of the wound body is located above the lower end of the side portion. According to the packing method of claim 16, the above container is provided with: The lower part, which is located below the winding body; The side portion, which supports the shaft member so that the metal plate of the winding body does not contact the lower portion; and The upper part covers the winding body from above. A storage method which stores the winding body of the metal plate used for manufacturing the vapor deposition cover, and The wound body is stored so that the inner diameter of the portion of the metal plate wound on the shaft member that is closest to the shaft member side is 150 mm or more and 550 mm or less. A method for manufacturing a vapor deposition cover, which is a method for manufacturing a vapor deposition cover formed with a plurality of through holes, and has: The step of rolling out the above metal plate from the winding body of the metal plate; and A processing step of etching the metal plate to form the through hole in the metal plate; and The above winding body has: Shaft member with an outer diameter of 150 mm or more and 550 mm or less; and The metal plate is wound around the shaft member and has a thickness of 50 μm or less. A metal plate which is wound on a shaft member having an outer diameter of 150 mm or more and 550 mm or less and used to manufacture a vapor deposition mask, and It has a thickness below 50 μm.

Images