TW202000477A - Manufacturing method of coated metal laminated plate, manufacturing method of coated pressurizing roller and repairing method a coating layer moves synchronously with the pressurizing roller - Google Patents
Manufacturing method of coated metal laminated plate, manufacturing method of coated pressurizing roller and repairing method a coating layer moves synchronously with the pressurizing roller Download PDFInfo
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- TW202000477A TW202000477A TW108122822A TW108122822A TW202000477A TW 202000477 A TW202000477 A TW 202000477A TW 108122822 A TW108122822 A TW 108122822A TW 108122822 A TW108122822 A TW 108122822A TW 202000477 A TW202000477 A TW 202000477A
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- Prior art keywords
- metal
- polyimide
- roller
- manufacturing
- pressure roller
- Prior art date
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 156
- 239000002184 metal Substances 0.000 title claims abstract description 156
- 239000011247 coating layer Substances 0.000 title claims abstract description 80
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 66
- 238000000034 method Methods 0.000 title claims abstract description 66
- 229920001721 polyimide Polymers 0.000 claims abstract description 311
- 239000011888 foil Substances 0.000 claims abstract description 70
- 239000000463 material Substances 0.000 claims abstract description 52
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- 239000004642 Polyimide Substances 0.000 claims description 131
- 239000010410 layer Substances 0.000 claims description 90
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 58
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- 230000007246 mechanism Effects 0.000 claims description 5
- 230000001360 synchronised effect Effects 0.000 claims 1
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- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 6
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- NAMDIHYPBYVYAP-UHFFFAOYSA-N 1-methoxy-2-(2-methoxyethoxy)ethane Chemical compound COCCOCCOC.COCCOCCOC NAMDIHYPBYVYAP-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- QYIMZXITLDTULQ-UHFFFAOYSA-N 4-(4-amino-2-methylphenyl)-3-methylaniline Chemical group CC1=CC(N)=CC=C1C1=CC=C(N)C=C1C QYIMZXITLDTULQ-UHFFFAOYSA-N 0.000 description 1
- WUPRYUDHUFLKFL-UHFFFAOYSA-N 4-[3-(4-aminophenoxy)phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=CC(OC=2C=CC(N)=CC=2)=C1 WUPRYUDHUFLKFL-UHFFFAOYSA-N 0.000 description 1
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- KMKWGXGSGPYISJ-UHFFFAOYSA-N 4-[4-[2-[4-(4-aminophenoxy)phenyl]propan-2-yl]phenoxy]aniline Chemical compound C=1C=C(OC=2C=CC(N)=CC=2)C=CC=1C(C)(C)C(C=C1)=CC=C1OC1=CC=C(N)C=C1 KMKWGXGSGPYISJ-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
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- B32—LAYERED PRODUCTS
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- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/06—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the heating method
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/022—Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
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- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/28—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
- B32B27/281—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/0046—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by constructional aspects of the apparatus
- B32B37/0053—Constructional details of laminating machines comprising rollers; Constructional features of the rollers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/24—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer not being coherent before laminating, e.g. made up from granular material sprinkled onto a substrate
- B32B2037/243—Coating
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/06—Lamination
- H05K2203/068—Features of the lamination press or of the lamination process, e.g. using special separator sheets
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- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Laminated Bodies (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
Abstract
Description
本發明是有關於一種可用於電子製品所使用的 柔性印刷電路(Flexible Printed Circuits,FPC)等中的覆金屬積層板的製造方法、所述方法中能夠使用的被覆加壓輥的製造方法及修復方法。The present invention relates to a method for manufacturing a metal-clad laminate that can be used in flexible printed circuits (FPC) and the like used in electronic products, a method for manufacturing a coated pressure roller that can be used in the method, and a repair method.
FPC可通過蝕刻將樹脂層與銅層積層而得的覆銅積層板(Copper Clad Laminate,CCL)的銅層來進行電路配線加工而製造。關於FPC中所使用的CCL,已知有僅在樹脂層的單側積層銅箔的單面覆銅積層板(以下稱為單面CCL)、在樹脂層的兩側積層銅箔的兩面覆銅積層板(以下稱為兩面CCL)。The FPC can be manufactured by etching the copper layer of a copper-clad laminate (CCL) obtained by laminating a resin layer and a copper layer to perform circuit wiring processing. Regarding the CCL used in the FPC, a single-sided copper-clad laminate (hereinafter referred to as a single-sided CCL) that laminates copper foil only on one side of the resin layer is known, and double-sided copper-clad laminates of copper foil are deposited on both sides of the resin layer Laminate (hereinafter referred to as two-sided CCL).
作為CCL的製造方法,例如已知有使用金屬製的壓輥,將銅箔與樹脂膜熱壓接的層壓法(例如參照專利文獻1、專利文獻2)。As a manufacturing method of CCL, for example, a lamination method using a metal pressure roller and thermally bonding copper foil and a resin film is known (for example, refer to Patent Document 1 and Patent Document 2).
另外,關於層壓法,提出有當將液晶聚合物膜與金屬箔積層時,為了使積層體的外觀良好,而使用在金屬製的壓輥的表面設置有厚度0.02 mm~5 mm的氟橡膠、矽橡膠或聚醯亞胺的樹脂被覆層者(例如參照專利文獻3)。 [現有技術文獻] [專利文獻]In addition, regarding the lamination method, when laminating the liquid crystal polymer film and the metal foil, in order to improve the appearance of the laminate, a fluororubber having a thickness of 0.02 mm to 5 mm is provided on the surface of the metal pressure roller , Silicone rubber or polyimide resin coating layer (for example, refer to Patent Document 3). [Prior Art Literature] [Patent Literature]
[專利文獻1]日本專利特開2001-129918號公報(申請專利範圍等) [專利文獻2]日本專利特開2009-66911號公報(圖2等) [專利文獻3]日本專利特許第4398179號公報(申請專利範圍等)[Patent Document 1] Japanese Patent Laid-Open No. 2001-129918 (Patent Application etc.) [Patent Document 2] Japanese Patent Laid-Open No. 2009-66911 (Figure 2 etc.) [Patent Document 3] Japanese Patent Laid-Open No. 4398179 (Patent Application etc.)
[發明所要解決的問題][Problems to be solved by the invention]
近年來,由於以智能手機(smart phone)為代表的移動設備的顯示器的高精細化及多官能化,對於這些設備的框體內零件的連接中所使用的FPC,推進配線的微細化。伴隨於此,關於通過對所積層的銅箔進行加工來形成配線而發揮作為連接零件的功能的CCL,對銅箔與樹脂層的黏接性等所要求的品質更加嚴格。但是,在利用層壓法來將金屬箔與聚醯亞胺膜積層的情況下,貼合面的黏接性、熱壓接面的填充容易不充分,在進行微細配線加工時會導致配線的剝離。 因此,本發明的目的在於提供一種聚醯亞胺膜無不均地對金屬箔的表面的凹凸進行填充,且聚醯亞胺膜與金屬箔的黏接性高的覆金屬積層板。 [解決問題的技術手段]In recent years, due to the high-definition and multi-functionalization of displays of mobile devices such as smart phones, the miniaturization of wiring has been promoted for FPCs used in the connection of components in the casings of these devices. Along with this, regarding the CCL that functions as a connecting component by processing the deposited copper foil to form wiring, the quality required for the adhesion between the copper foil and the resin layer is more stringent. However, when the metal foil and the polyimide film are laminated by the lamination method, the adhesion of the bonding surface and the filling of the thermocompression bonding surface are likely to be insufficient, which may lead to wiring during fine wiring processing Peel off. Therefore, an object of the present invention is to provide a metal-clad laminate in which the polyimide film fills the unevenness of the surface of the metal foil without unevenness, and the adhesion between the polyimide film and the metal foil is high. [Technical means to solve the problem]
本發明人們反覆進行努力研究,結果發現,當利用層壓法來製造覆金屬積層板時,通過在由膜狀緩衝材被覆一對加壓輥中至少單側的加壓輥的壓迫面的狀態下進行熱壓接,而可解決所述問題,從而完成本發明。The present inventors have repeatedly studied hard and found that when a metal-clad laminate is manufactured by a lamination method, the state of the pressing surface of at least one pressure roller among the pair of pressure rollers is covered by a film-shaped buffer material The thermocompression bonding is carried out under the circumstances, and the above problems can be solved, thereby completing the present invention.
即,本發明的覆金屬積層板的製造方法是通過將聚醯亞胺膜與金屬箔重疊並連續地在一對加壓輥間經過,而將所述聚醯亞胺膜與所述金屬箔熱壓接來製造覆金屬積層板的方法。而且,本發明的覆金屬積層板的製造方法的特徵在於:在由膜狀緩衝材被覆所述一對加壓輥中至少單側的加壓輥的壓迫面的狀態下進行熱壓接,所述膜狀緩衝材能夠與所述加壓輥同步地移動,並且所述膜狀緩衝材包括含有非熱塑性聚醯亞胺的非熱塑性聚醯亞胺層。That is, the manufacturing method of the metal-clad laminate of the present invention is to overlap the polyimide film and the metal foil by overlapping the polyimide film and the metal foil and continuously passing between a pair of pressing rollers A method of manufacturing a metal-clad laminate by thermocompression bonding. Furthermore, the method for manufacturing a metal-clad laminate according to the present invention is characterized by performing thermal compression bonding in a state where at least one of the pressure rollers of the pair of pressure rollers is covered with a film-like cushioning material. The film-shaped cushioning material can move in synchronization with the pressing roller, and the film-shaped cushioning material includes a non-thermoplastic polyimide layer containing non-thermoplastic polyimide.
本發明的覆金屬積層板的製造方法中,所述膜狀緩衝材可形成沿圓周方向被覆所述單側的加壓輥的表面的被覆層。In the method of manufacturing a metal-clad laminate of the present invention, the film-shaped buffer material may form a coating layer that covers the surface of the one-side pressure roller in the circumferential direction.
本發明的覆金屬積層板的製造方法中,所述單側的加壓輥可為具有所述被覆層的被覆加壓輥,另一加壓輥可為金屬製輥。In the method of manufacturing a metal-clad laminate of the present invention, the one-side pressure roller may be a coated pressure roller having the coating layer, and the other pressure roller may be a metal roller.
本發明的覆金屬積層板的製造方法中可將所述金屬製輥配置於所述金屬箔側。In the method for manufacturing a metal-clad laminate of the present invention, the metal roller may be arranged on the metal foil side.
本發明的覆金屬積層板的製造方法中,所述膜狀緩衝材可形成為環狀,且可以通過所述單側的加壓輥及多個引導輥而能夠旋轉的方式形成。In the method of manufacturing a metal-clad laminate of the present invention, the film-shaped buffer material may be formed in a ring shape, and may be rotatably formed by the one-side pressure roller and a plurality of guide rollers.
本發明的覆金屬積層板的製造方法中,所述膜狀緩衝材可形成為長條,且以輥到輥(roll-to-roll)方式進行搬送。In the method of manufacturing a metal-clad laminate of the present invention, the film-shaped buffer material may be formed into a long strip and transported in a roll-to-roll manner.
本發明的覆金屬積層板的製造方法中,所述膜狀緩衝材的厚度可為1 μm~200 μm的範圍內。In the method of manufacturing a metal-clad laminate of the present invention, the thickness of the film-shaped buffer material may be in the range of 1 μm to 200 μm.
本發明的覆金屬積層板的製造方法中,所述聚醯亞胺膜可包含單層或多層的聚醯亞胺層,可為至少一層為非熱塑性聚醯亞胺,且可為至少與所述金屬箔熱壓接一側的表面為熱塑性聚醯亞胺層。In the method for manufacturing a metal-clad laminate of the present invention, the polyimide film may include a single-layer or multi-layer polyimide layer, at least one layer may be a non-thermoplastic polyimide, and may be at least one The surface on the side where the metal foil is thermocompression-bonded is a thermoplastic polyimide layer.
本發明的覆金屬積層板的製造方法中,所述聚醯亞胺膜可為包括基材及積層地形成在所述基材上的聚醯亞胺層的積層結構體。In the method for manufacturing a metal-clad laminate according to the present invention, the polyimide film may be a laminated structure including a base material and a polyimide layer formed on the base material in layers.
本發明的覆金屬積層板的製造方法中,所述基材可為銅箔。In the method of manufacturing a metal-clad laminate of the present invention, the substrate may be copper foil.
本發明的被覆加壓輥的製造方法是通過將聚醯亞胺膜與金屬箔重疊並連續地在一對加壓輥間經過,而將所述聚醯亞胺膜與所述金屬箔熱壓接來製造覆金屬積層板時所使用的被覆加壓輥的製造方法。而且,本發明的被覆加壓輥的製造方法的特徵在於,所述被覆加壓輥包括金屬製輥及被覆層,所述被覆層沿圓周方向被覆所述金屬製輥的表面,且所述被覆加壓輥的製造方法包括: 在所述金屬製輥的表面塗佈聚醯亞胺或聚醯亞胺前體的樹脂溶液的步驟;以及 通過在所述金屬製輥上完成所述樹脂溶液的熱處理而形成所述被覆層的步驟。The manufacturing method of the coated pressure roller of the present invention is to heat and press the polyimide film and the metal foil by overlapping the polyimide film and the metal foil and continuously passing between a pair of pressure rollers Next, a method of manufacturing a coated pressure roller used when manufacturing a metal-clad laminate. Furthermore, the method of manufacturing a coated pressure roller of the present invention is characterized in that the coated pressure roller includes a metal roller and a coating layer, the coating layer covers the surface of the metal roller in the circumferential direction, and the coating The manufacturing method of the pressure roller includes: A step of applying a resin solution of polyimide or a precursor of polyimide on the surface of the metal roller; and The step of forming the coating layer by completing the heat treatment of the resin solution on the metal roller.
本發明的被覆加壓輥的製造方法中,可一邊使所述金屬製輥旋轉一邊在其表面塗佈所述樹脂溶液。所述情況下,可使塗佈單元一邊沿所述金屬製輥的旋轉軸方向相對地移動一邊塗佈所述樹脂溶液。In the method of manufacturing a coated pressure roller of the present invention, the resin solution may be applied to the surface of the metal roller while rotating the metal roller. In this case, the application unit can apply the resin solution while relatively moving in the direction of the rotation axis of the metal roller.
本發明的被覆加壓輥的製造方法可通過使用所述金屬製輥的加熱機構來對所述金屬製輥進行加熱而進行所述樹脂溶液的熱處理。In the method for manufacturing a coated pressure roller of the present invention, the heat treatment of the resin solution can be performed by heating the metal roller using a heating mechanism of the metal roller.
本發明的被覆加壓輥的修復方法是通過將聚醯亞胺膜與金屬箔重疊並連續地在一對加壓輥間經過,而將所述聚醯亞胺膜與所述金屬箔熱壓接來製造覆金屬積層板時所使用的被覆加壓輥的修復方法。而且,本發明的被覆加壓輥的修復方法的特徵在於,所述被覆加壓輥包括金屬製輥及被覆層,所述被覆層沿圓周方向被覆所述金屬製輥的表面,且所述被覆加壓輥的修復方法包括: 在所述被覆層的表面的至少一部分塗佈聚醯亞胺或聚醯亞胺前體的樹脂溶液的步驟;以及 在所述被覆加壓輥上完成所述樹脂溶液的熱處理的步驟。 [發明的效果]The method for repairing the coated pressure roller of the present invention is to heat and press the polyimide film and the metal foil by overlapping the polyimide film and the metal foil and continuously passing between a pair of pressure rollers Next, the method for repairing the coated pressure roller used when manufacturing the metal-clad laminate. Furthermore, the method for repairing the coated pressure roller of the present invention is characterized in that the coated pressure roller includes a metal roller and a coating layer, the coating layer covers the surface of the metal roller in the circumferential direction, and the coating The repair methods of the pressure roller include: A step of coating a resin solution of polyimide or a precursor of polyimide on at least a part of the surface of the coating layer; and The step of heat-treating the resin solution is completed on the coated pressure roller. [Effect of invention]
根據本發明,可製造聚醯亞胺膜無不均地對金屬箔的表面的凹凸進行填充,且聚醯亞胺膜與金屬箔牢固地黏接的覆金屬積層板。通過將以所述方式製造的覆金屬積層板用作FPC等的電路基板材料,可製造經微細化的配線與絕緣樹脂層的密接性優異的電路基板。因此,通過本發明,可提升電路基板以及使用電路基板的電子製品的良率及可靠性。 另外,在使用金屬製輥作為加壓輥的情況下,容易因聚醯亞胺膜的厚度不均、金屬製輥的寬度方向的直徑的偏差而使對壓迫面的壓力變得不均勻。此時,有時會產生在壓力低的部位聚醯亞胺膜未將金屬箔的表面的凹凸充分填充等問題。在本發明方法中,通過使用膜狀緩衝材,而使所述壓力不均變均勻,能夠製造聚醯亞胺膜遍及整面地將金屬箔的表面的凹凸充分填充且牢固地黏接的覆金屬積層板。According to the present invention, it is possible to manufacture a metal-clad laminate in which the polyimide film fills the unevenness of the surface of the metal foil without unevenness, and the polyimide film and the metal foil are firmly adhered. By using the metal-clad laminate manufactured in the above manner as a circuit board material such as FPC, a circuit board excellent in the adhesion between the fine wiring and the insulating resin layer can be manufactured. Therefore, the present invention can improve the yield and reliability of circuit boards and electronic products using the circuit boards. In addition, when a metal roller is used as the pressure roller, the pressure on the pressing surface is likely to become uneven due to uneven thickness of the polyimide film and variations in the diameter of the metal roller in the width direction. At this time, there may be a problem that the polyimide film does not sufficiently fill the irregularities on the surface of the metal foil at the places where the pressure is low. In the method of the present invention, by using a film-like cushioning material, the pressure unevenness is made uniform, and it is possible to produce a polyimide film in which the unevenness of the surface of the metal foil is sufficiently filled and firmly adhered over the entire surface. Metal laminate.
以下,適當參照圖式來對本發明的實施形態進行說明。本發明的覆金屬積層板的製造方法是通過將聚醯亞胺膜與金屬箔重疊並連續地在一對加壓輥間經過,而將聚醯亞胺膜與金屬箔熱壓接來製造覆金屬積層板。此時,在由膜狀緩衝材被覆一對加壓輥中至少單側的加壓輥的壓迫面的狀態下進行熱壓接,所述膜狀緩衝材能夠與所述加壓輥同步地移動。此處,膜狀緩衝材包括含有非熱塑性聚醯亞胺的非熱塑性聚醯亞胺層。此外,所謂「非熱塑性聚醯亞胺」,一般是指即便進行加熱也會軟化而不顯示出黏接性的聚醯亞胺,本發明中是指使用動態黏彈性測定裝置(動態機械熱分析儀(Dynamic Mechanical Thermal Analyzer,DMA))測定出的30℃下的儲存彈性係數為1.0×109 Pa以上、300℃下的儲存彈性係數為3.0×108 Pa以上的聚醯亞胺。另外,所謂「熱塑性聚醯亞胺」,一般是指玻璃化轉變溫度(Tg)可明確地確認的聚醯亞胺,本發明中是指使用動態黏彈性測定裝置(DMA)測定出的30℃下的儲存彈性係數為1.0×109 Pa以上、320℃下的儲存彈性係數小於3.0×108 Pa的聚醯亞胺。Hereinafter, embodiments of the present invention will be described with appropriate reference to the drawings. The manufacturing method of the metal-clad laminate of the present invention is to laminate the polyimide film and the metal foil by overlapping the polyimide film and the metal foil and continuously passing between a pair of pressure rollers, and to heat and pressure-bond the polyimide film and the metal foil Metal laminate. At this time, thermal compression bonding is performed in a state where at least one of the pressure rollers of the pair of pressure rollers is covered with a film-shaped buffer material, and the film-shaped buffer material can move in synchronization with the pressure roller . Here, the film-like cushioning material includes a non-thermoplastic polyimide layer containing non-thermoplastic polyimide. In addition, the so-called "non-thermoplastic polyimide" generally refers to polyimide that softens without heating even when heated, and in the present invention refers to the use of a dynamic viscoelasticity measuring device (dynamic mechanical thermal analysis) (Dynamic Mechanical Thermal Analyzer, DMA)) Polyimide with a storage elasticity coefficient at 30°C of 1.0×10 9 Pa or more and a storage elasticity coefficient at 300°C of 3.0×10 8 Pa or more. The "thermoplastic polyimide" generally refers to a polyimide whose glass transition temperature (Tg) can be clearly confirmed. In the present invention, it refers to 30°C measured using a dynamic viscoelasticity measuring device (DMA) Polyimide with a storage elasticity coefficient of 1.0×10 9 Pa or more and a storage elasticity coefficient of 320° C. of less than 3.0×10 8 Pa.
以下,關於本發明方法中使用的「膜狀緩衝材」的優選實施方式,列舉第一實施形態~第三實施形態來進行說明。Hereinafter, preferred embodiments of the "film-like cushioning material" used in the method of the present invention will be described with reference to the first to third embodiments.
[第一實施形態]
圖1是本發明的第一實施形態的覆金屬積層板的製造方法的說明圖。圖2是所述方法中所使用的被覆加壓輥的主要部分放大剖面圖。本實施形態中,通過將聚醯亞胺膜10與金屬箔20重疊並連續地在一對加壓輥30、加壓輥40間經過,而將聚醯亞胺膜10與金屬箔20熱壓接來製造覆金屬積層板100。而且,膜狀緩衝材形成沿圓周方向被覆加壓輥30的表面的被覆層50。即,單側的加壓輥30是具有被覆層50的被覆加壓輥。因此,本實施形態中,在由作為膜狀緩衝材的被覆層50被覆一對加壓輥30、加壓輥40中至少單側的加壓輥30的壓迫面的狀態下進行熱壓接,所述被覆層50能夠與加壓輥30同步地移動。此處,所謂加壓輥30的「壓迫面」,是指旋轉的加壓輥30的表面上將聚醯亞胺膜10向金屬箔20側(另一加壓輥40側)按壓的部分。壓迫面通過加壓輥30的旋轉而依次更換。另外,關於被覆層50壓接於聚醯亞胺膜10的部分,也與加壓輥30的旋轉同步地依次更換。此外,圖1中的箭頭表示搬送方向或旋轉方向,省略捲出輥、捲繞輥、引導輥等的圖示。另外,一對加壓輥30、加壓輥40分別包括加熱機構(省略圖示)。[First embodiment]
FIG. 1 is an explanatory diagram of a method of manufacturing a metal-clad laminate according to a first embodiment of the present invention. Fig. 2 is an enlarged cross-sectional view of a main part of the coated pressure roller used in the method. In the present embodiment, the
圖1中,另一加壓輥40是不具有被覆層50的金屬製輥,也可為加壓輥30、加壓輥40兩者為具有被覆層50的被覆加壓輥。將加壓輥30、加壓輥40兩者設為被覆加壓輥,對於減小輥寬度方向上的熱壓接時的壓力偏差而言有效。
另一方面,為了將熱有效率地傳導至壓接部位,有效的是將加壓輥30、加壓輥40的其中一個製成被覆加壓輥,將另一個輥製成不具有被覆層50的金屬製輥。所述情況下,如圖1所示,優選為將自金屬箔20側進行按壓的加壓輥40製成不具有被覆層50的金屬製輥。通過在金屬箔20側配置金屬製輥,可更有效率地將熱傳導至壓接部位。即,通過使金屬製的加壓輥40與金屬箔20直接接觸,可將熱迅速地自受到未圖示的加熱機構的加熱的加壓輥40,經由導熱率高的金屬箔20而傳導至與聚醯亞胺膜10的壓接部位,因此熱壓接的效率變高,聚醯亞胺膜10與金屬箔20的黏接性變良好。In FIG. 1, the
<被覆加壓輥>
如圖2所示,加壓輥30包括:作為芯(core)的金屬製輥31、覆蓋所述金屬製輥31的周圍的黏接劑層33、以及經由黏接劑層33而覆蓋金屬製輥31的聚醯亞胺被覆層35。由黏接劑層33及聚醯亞胺被覆層35構成被覆層50。此外,也可不設置黏接劑層33。<Coated Press Roller>
As shown in FIG. 2, the
黏接劑層33優選為包含聚醯亞胺系黏接劑。通過黏接劑層33,可確保金屬製輥31與聚醯亞胺被覆層35的黏接性。此外,所謂聚醯亞胺系黏接劑是指具有醯亞胺鍵的黏接劑,例如還包含矽氧烷聚醯亞胺、聚醚醯亞胺等。The
另一方面,聚醯亞胺被覆層35優選為含有非熱塑性聚醯亞胺。通過由非熱塑性聚醯亞胺來形成與聚醯亞胺膜10直接接觸的聚醯亞胺被覆層35,可防止因聚醯亞胺被覆層35部分地熱熔接於聚醯亞胺膜10而導致的褶皺、污跡等外觀異常的產生。
構成聚醯亞胺被覆層35的聚醯亞胺例如優選為具有玻璃化轉變溫度(Tg)為300℃以上的耐熱性的聚醯亞胺。通過使用Tg為300℃以上的聚醯亞胺,可避免因熱壓接時的加熱而導致變形或損傷,從而提高被覆層50的耐久性。
另外,就同樣的觀點而言,構成聚醯亞胺被覆層35的聚醯亞胺的Tg優選為較構成聚醯亞胺膜10的一部分的熱塑性聚醯亞胺(後述)的Tg高例如10℃以上。
另外,就緩和熱壓接時的對聚醯亞胺膜10的熱衝擊的觀點而言,聚醯亞胺被覆層35優選為導熱率小於0.2 W/m·K。On the other hand, the
另外,為了抑制因熱壓接時的溫度變化而導致尺寸變化、確保對所搬送的聚醯亞胺膜10的追隨性,構成被覆層50的聚醯亞胺被覆層35的熱膨脹係數E優選為相對於後述的聚醯亞胺膜10整體的熱膨脹係數E1,而為例如0.5×E≦E1≦1.5×E的關係。In addition, in order to suppress the dimensional change due to the temperature change during thermocompression bonding and to ensure the followability of the transferred
被覆層50的厚度(本實施形態中是指黏接劑層33與聚醯亞胺被覆層35的合計厚度)並無特別限定,例如優選為1 μm~200 μm的範圍內,更優選為10 μm~100 μm的範圍內。為了有效率地傳導熱,厚度的上限優選為200 μm以下。另外,如下文所述,在將聚醯亞胺或聚醯亞胺前體的樹脂溶液塗佈於金屬製輥31的表面後進行熱處理來形成被覆層50的情況下,為了使被覆層50的形成容易,更優選為100 μm以下。進而,為了防止金屬製輥31的寬度方向上的溫度偏差,被覆層50的厚度優選為25 μm以下。為了耐受反覆使用,厚度的下限優選為1 μm以上,更優選為5 μm以上。The thickness of the coating layer 50 (in this embodiment, the total thickness of the
作為膜狀緩衝材的被覆層50具有緩和熱壓接時的壓力的偏向而均等地分配壓力的作用,且具有使聚醯亞胺膜10與金屬箔20均勻地黏接的效果。因此,可製造聚醯亞胺膜10無不均地對金屬箔20的表面的凹凸進行填充,且聚醯亞胺膜10與金屬箔20牢固地黏接的覆金屬積層板100。The
被覆層50可優選地使用至少包含非熱塑性聚醯亞胺的膜,也可為僅包含非熱塑性聚醯亞胺的膜,也可視需要而含有其他成分。具體而言,其他成分可列舉非熱塑性聚醯亞胺以外的樹脂、用來改善作為被覆層50的各特性的各種添加劑等。此外,非熱塑性聚醯亞胺還可組合多種來使用。另外,也可還含有填料等。The
<被覆加壓輥的製造方法>
具有金屬製輥31、及沿圓周方向被覆所述金屬製輥31的表面的被覆層50的加壓輥30例如可通過包括以下步驟a及步驟b的方法來進行製造:
a)在金屬製輥31的表面塗佈聚醯亞胺或聚醯亞胺前體的樹脂溶液的步驟;
b)通過在金屬製輥31上完成樹脂溶液的熱處理而形成被覆層50的步驟。<Manufacturing method of coated pressure roller>
The
在步驟a中,優選為一邊使金屬製輥31旋轉一邊在其表面塗佈樹脂溶液。作為將樹脂溶液塗佈於金屬製輥31上的方法,例如可使用塗佈機(coater)、噴霧器(sprayer)等塗佈單元,也可為在將金屬製輥31浸漬於樹脂溶液中後提拉金屬製輥31的浸漬法(dipping method)。在使用塗佈機、噴霧器等塗佈單元將樹脂溶液塗佈於金屬製輥31的表面的情況下,更優選為使塗佈單元一邊沿金屬製輥31的旋轉軸方向相對地移動一邊塗佈樹脂溶液。例如,優選為如圖3所示,使塗佈單元61的噴出口靠近或與金屬製輥31的表面接觸,並使金屬製輥31旋轉,且同時一邊使噴出口沿金屬製輥31的旋轉軸方向相對地移動,一邊自噴出口將樹脂溶液63連續地供給至金屬製輥31的表面。此處,所謂使噴出口「沿金屬製輥31的旋轉軸方向相對地移動」,是指自正在旋轉的金屬製輥31的其中一端向另一端移動。因此,樹脂溶液63是以螺旋狀塗佈於金屬製輥31的表面。另外,也可在將樹脂溶液63塗佈於金屬製輥31的表面後,以樹脂溶液63的厚度的均勻化等為目的而在熱處理開始前使金屬製輥31旋轉。In step a, it is preferable to apply a resin solution to the surface of the
在步驟b中,通過在金屬製輥31上進行加熱而完成熱處理,形成被覆層50。加熱可將金屬製輥31放入烘箱中對整體進行加熱,也可利用加熱器(heater)對金屬製輥31表面吹熱風來進行加熱。另外,也可利用金屬製輥31自身的加熱機構(省略圖示),自金屬製輥31的內部進行加熱。In step b, heat treatment is performed by heating on the
熱處理條件根據構成被膜層50的聚醯亞胺的化學結構、厚度、面積、樹脂溶液63的溶劑種類等而不同,最高溫度優選為設為300℃以上且500℃以下的範圍內。另外,若快速加熱,則產生升溫時的氣體逸出(outgas),有時會產生氣泡,因此優選為花費例如30分鐘以上的時間來升溫至最高溫度。The heat treatment conditions differ depending on the chemical structure, thickness, area, and type of solvent of the
在由多個聚醯亞胺層構成被覆層50的情況下,可重複所述步驟a與步驟b,也可在將步驟a重複規定次數後,成批實施步驟b。When the
<被覆加壓輥的修復方法>
關於被覆層50,當在金屬製輥31的表面形成被覆層50時,會產生氣泡、表面粗糙、異物附著等缺陷。另外,在具有被覆層50的加壓輥30的使用、即覆金屬積層板100的製造中,也會產生同樣的缺陷。在加壓輥30的被覆層50中產生了缺陷的情況下,可對所述缺陷部位進行修復。具有被覆層50的加壓輥30的修復例如可包括以下步驟c及步驟d:
c)在被覆層50的表面的至少一部分(例如缺陷部分及其周圍)塗佈聚醯亞胺或聚醯亞胺前體的樹脂溶液的步驟;
d)在具有被覆層50的加壓輥30上完成樹脂溶液的熱處理的步驟。<Repair method of coated pressure roller>
Regarding the
在步驟c中,例如如圖4所示,使注射器(syringe)等塗佈單元61的噴出口靠近或與金屬製輥31的表面接觸,自噴出口將樹脂溶液63局部地塗佈於金屬製輥31的表面。In step c, for example, as shown in FIG. 4, the discharge port of the
步驟d的熱處理可與被覆加壓輥的製造方法中的步驟b同樣地實施。The heat treatment in step d can be carried out in the same manner as in step b in the method of manufacturing the coated pressure roller.
此外,可在步驟c之前,在將缺陷或缺陷及其周邊的被覆層50自金屬製輥31的表面去除後進行步驟c。另外,也可在完成步驟d的熱處理後,進行用以使被覆層50的表面平滑的處理,例如由研磨材實施的研磨。In addition, before step c, step c may be performed after removing the defect or the
<聚醯亞胺膜>
與金屬箔20熱壓接的聚醯亞胺膜10包含單層或多層的聚醯亞胺層,也可還包含聚醯亞胺層以外的任意的層。所述情況下,優選為至少一層為非熱塑性聚醯亞胺層,且至少與金屬箔20熱壓接一側的表面為熱塑性聚醯亞胺層。所述情況下,為了確保與金屬箔20的黏接性,熱塑性聚醯亞胺的玻璃化轉變溫度(Tg)優選為200℃~350℃的範圍內,更優選為280℃~320℃的範圍內。<Polyimide film>
The
就實現對覆金屬積層板100進行加工而獲得的FPC等電路基板的薄型化的觀點而言,聚醯亞胺膜10的厚度例如優選為1 μm~150 μm的範圍內,更優選為2 μm~100 μm的範圍內。若聚醯亞胺膜10的厚度小於1 μm,則擔心有損電絕緣性等功能。若聚醯亞胺膜10的厚度超過150 μm,則難以實現FPC等電路基板的薄型化。From the viewpoint of achieving a thinner circuit board such as an FPC obtained by processing the metal-clad
聚醯亞胺膜10整體的熱膨脹係數優選為盡可能地近似於金屬箔20的熱膨脹係數。通過使聚醯亞胺膜10的熱膨脹係數接近金屬箔20的熱膨脹係數,可抑制在FPC的加工工藝中產生翹曲等。就此種觀點而言,優選為使覆金屬積層板100中,聚醯亞胺膜10整體的熱膨脹係數E1與金屬箔20的熱膨脹係數E2為例如0.7×E1≦E2≦1.1×E1的關係。The thermal expansion coefficient of the
另外,聚醯亞胺膜10可為除聚醯亞胺層以外還包含任意的層的積層結構體的形態。作為任意的層,例如可列舉基材、剝離膜等。作為聚醯亞胺膜10的優選實施方式,可列舉如圖5所示,具有包括基材71、及積層地形成在所述基材71的聚醯亞胺層73的積層結構的聚醯亞胺膜10A。此處,作為基材71,可列舉例如銅箔等金屬箔。在基材71為銅箔的情況下,聚醯亞胺膜10A為單面CCL。通過使用單面CCL作為聚醯亞胺膜10A,可製造能夠實現高密度配線的兩面電路基板中所使用的兩面CCL(兩面覆銅積層板),因而特別有利。另外,在使用單面CCL作為聚醯亞胺膜10A的情況下,優選為以具有被覆層50的加壓輥30壓接於單面CCL的銅箔層側的方式進行配置。其原因在於,因介隔存在有加壓輥30的被覆層50,故可避免對作為基材71的銅箔施加過度的熱歷程。另外,通過以具有被覆層50的加壓輥30壓接於單面CCL的銅箔層側的方式進行配置,而防止加壓輥30與作為基材71的銅箔密接,可維持搬送性,且可防止銅箔的微小尺寸的缺陷。In addition, the
另外,作為聚醯亞胺膜10A的單面CCL優選為通過流延法(casting method)而製造的單面CCL,所述流延法中,在將聚醯亞胺或聚醯亞胺前體的樹脂溶液塗佈於基材71上並加以乾燥後,進行熱處理,由此而形成聚醯亞胺層73。另外,聚醯亞胺層73可僅由單層形成,若考慮聚醯亞胺層73與銅箔的黏接性及尺寸穩定性,優選為包含多層。在將聚醯亞胺層73設為多層的情況下,可在聚醯亞胺或聚醯亞胺前體的樹脂溶液上依次塗佈包含不同的構成成分的其他聚醯亞胺或聚醯亞胺前體的樹脂溶液而形成。在聚醯亞胺層73包含多層的情況下,也可將同一構成的樹脂溶液使用兩次以上。另外,通過流延法而製造的單面CCL為尺寸穩定性優異的有利的實施形態,進而通過僅在單面CCL的銅箔層側配置被覆層50,可將熱壓接時的尺寸變化率控制得較低。此外,在使用單面CCL作為聚醯亞胺膜10A的情況下,所獲得的覆金屬積層板100A為兩面CCL(兩面覆銅積層板)。In addition, the single-sided CCL as the
在將單面CCL的聚醯亞胺層73設為非熱塑性聚醯亞胺層與熱塑性聚醯亞胺層的積層結構的情況下,優選為非熱塑性聚醯亞胺層與熱塑性聚醯亞胺層的厚度比(非熱塑性聚醯亞胺層/熱塑性聚醯亞胺層)為1.5~10.0的範圍內。若所述比的值不足1.5,則相對於聚醯亞胺層73整體而言,非熱塑性聚醯亞胺層變薄,因此對銅箔進行蝕刻時的尺寸變化率容易變大,若超過10.0,則熱塑性聚醯亞胺層變薄,因此聚醯亞胺層73與銅箔的黏接可靠性容易下降。When the
<金屬箔>
作為金屬箔20的金屬,例如可列舉選自銅、鋁、不銹鋼、鐵、銀、鈀、鎳、鉻、鉬、鎢、鋯、金、鈷、鈦、鉭、鋅、鉛、錫、矽、鉍、銦或這些的合金等中的金屬。就導電性的方面而言,特別優選為銅或銅合金的金屬箔。為了連續地生產覆金屬積層板100、覆金屬積層板100A,可使用將規定厚度的金屬箔捲繞為輥狀的長條狀的金屬箔20。<Metal foil>
Examples of the metal of the
金屬箔20的與聚醯亞胺膜10直接接觸的面的表面粗糙度例如以Rz計優選為0.1 μm~7 μm。其原因在於,若為所述範圍,則與聚醯亞胺膜10的黏接力足夠良好。進而,若Rz為0.3 μm~3.0 μm,則更優選。此處,Rz表示日本工業標準(Japanese Industrial Standards,JIS)B 0601(1994)中規定的十點平均粗糙度。The surface roughness of the surface of the
<熱壓接條件>
加壓輥30、加壓輥40的加熱方法只要可以規定的溫度進行加熱則並無特別限定,例如可列舉熱介質循環方式、熱風加熱方式、介電加熱方式等。關於加壓方式,同樣只要可施加規定的壓力則並無特別限定,例如可列舉液壓方式、氣壓方式、間隙壓力方式等。<Thermal compression conditions>
The heating method of the
利用加壓輥30、加壓輥40來進行聚醯亞胺膜10與金屬箔20的熱壓接時的壓力並無特別限定,例如優選為0.1 Mpa~50 MPa的範圍內。The pressure during thermal compression bonding of the
另外,熱壓接時的溫度例如優選為280℃以上,更優選為300℃~400℃的範圍內。In addition, the temperature during thermocompression bonding is preferably, for example, 280°C or higher, and more preferably in the range of 300°C to 400°C.
[第二實施形態]
圖6是本發明的第二實施形態的覆金屬積層板的製造方法的說明圖。本實施形態中,膜狀緩衝材形成為環狀。即,本實施形態中,將環狀聚醯亞胺膜50A配置於一對金屬製的加壓輥40A、加壓輥40B中至少單側的加壓輥40A的外周,將其作為膜狀緩衝材。此處,「環狀」也包括圓筒狀。圖6中,在另一加壓輥40B這一側未配置膜狀緩衝材,也可在由膜狀緩衝材被覆加壓輥40A、加壓輥40B兩者的狀態下進行熱壓接。[Second Embodiment]
6 is an explanatory diagram of a method of manufacturing a metal-clad laminate according to a second embodiment of the present invention. In this embodiment, the film-shaped buffer material is formed in a ring shape. That is, in this embodiment, the ring-shaped
環狀聚醯亞胺膜50A是以內徑較加壓輥40A的外徑更大的方式形成,且以通過單側的加壓輥40A及引導輥80A、引導輥80B而能夠旋轉的方式形成。通過使環狀聚醯亞胺膜50A向與加壓輥40A的旋轉方向相同的方向旋轉,可在由能夠與加壓輥40A同步地移動的環狀聚醯亞胺膜50A被覆加壓輥40A的壓迫面的狀態下進行熱壓接。此外,引導輥並不限於兩個,也可配置一個或三個以上。The ring-shaped
如上所述,環狀聚醯亞胺膜50A的內徑較加壓輥40A的外徑更大,因此環狀聚醯亞胺膜50A未固定於加壓輥40A。聚醯亞胺具有吸濕特性,且環狀聚醯亞胺膜50A中所含的水分在熱壓接時急劇揮發,擔心其會導致覆金屬積層板100的外觀不良。在環狀聚醯亞胺膜50A的內徑相較於加壓輥40A的外徑而言足夠大的情況下,在環狀聚醯亞胺膜50A到達熱壓接面之前,能夠以被覆加壓輥40A的一部分的方式接觸來進行預熱,因此可減少環狀聚醯亞胺膜50A中所含的水分。環狀聚醯亞胺膜50A與加壓輥40A接觸的時間優選為設為1秒以上。As described above, since the inner diameter of the ring-shaped
環狀聚醯亞胺膜50A的厚度並無特別限定,例如優選為1 μm~200 μm的範圍內,更優選為10 μm~100 μm的範圍內。關於厚度的上限,為了有效率地傳導熱而優選為200 μm以下,為了防止加壓輥40A的寬度方向上的溫度偏差而優選為25 μm以下。關於厚度的下限,為了耐受反覆使用而優選為1 μm以上,更優選為5 μm以上。The thickness of the
環狀聚醯亞胺膜50A例如可通過以下方式來製造:將聚醯亞胺或聚醯亞胺前體的樹脂溶液塗佈於圓柱狀或圓筒狀的脫模材的表面,在脫模材上完成樹脂溶液的熱處理後自脫模材剝離。樹脂溶液對脫模材的塗佈方法或熱處理條件可依據被覆加壓輥的製造方法中的步驟a、步驟b來實施。The ring-shaped
環狀聚醯亞胺膜50A可包含單層或多層的聚醯亞胺層。所述情況下,優選為至少一層為非熱塑性聚醯亞胺,且至少與加壓輥40A接觸一側的表面(內周面)為熱塑性聚醯亞胺層。即,環狀聚醯亞胺膜50A可使用黏接性高的熱塑性聚醯亞胺層以使與金屬製的加壓輥40A的表面容易密接。The ring-shaped
另一方面,環狀聚醯亞胺膜50A中,與聚醯亞胺膜10直接接觸一側的表面(外周面)優選為含有非熱塑性聚醯亞胺。通過由非熱塑性聚醯亞胺層來形成與聚醯亞胺膜10直接接觸的表面,可防止因環狀聚醯亞胺膜50A部分地熱熔接於聚醯亞胺膜10而導致的褶皺、污跡等外觀異常的產生。構成環狀聚醯亞胺膜50A中的非熱塑性聚醯亞胺層的聚醯亞胺例如優選為具有玻璃化轉變溫度(Tg)為300℃以上的耐熱性的聚醯亞胺。通過使用Tg為300℃以上的聚醯亞胺,可避免因熱壓接時的加熱而導致變形或損傷,從而提高環狀聚醯亞胺膜50A的耐久性。
另外,就同樣的觀點而言,構成環狀聚醯亞胺膜50A中的非熱塑性聚醯亞胺層的聚醯亞胺的Tg優選為較構成聚醯亞胺膜10的一部分的熱塑性聚醯亞胺(後述)的Tg高例如10℃以上。On the other hand, in the ring-shaped
另外,為了抑制因熱壓接時的溫度變化而導致尺寸變化、確保對所搬送的聚醯亞胺膜10的精密的追隨性,環狀聚醯亞胺膜50A整體的熱膨脹係數E3優選為相對於後述的聚醯亞胺膜10整體的熱膨脹係數E1,而為例如0.5×E3≦E1≦1.5×E3的關係。In addition, in order to suppress the dimensional change caused by the temperature change during thermocompression bonding and ensure precise followability of the transferred
另外,作為環狀聚醯亞胺膜50A,也可使用環狀的CCL等環狀覆金屬積層板。通過使用環狀覆金屬積層板作為環狀聚醯亞胺膜50A,操作性提升,並且可提高耐久性。作為用作環狀聚醯亞胺膜50A的環狀覆金屬積層板,就耐久性的觀點而言,優選為通過流延法而製造的環狀覆金屬積層板。In addition, as the ring-shaped
作為膜狀緩衝材的環狀聚醯亞胺膜50A具有緩和並且均等地分配熱壓接時的壓力的作用,且具有使聚醯亞胺膜10與金屬箔20均勻地黏接的效果。The ring-shaped
本實施形態的其他構成及效果與第一實施形態相同。此外,本實施形態中同樣地,作為變形例,如圖7所示,可通過使用具有積層結構的聚醯亞胺膜10A來代替聚醯亞胺膜10而製造覆金屬積層板100A。The other configurations and effects of this embodiment are the same as those of the first embodiment. In addition, as in the present embodiment, as a modification, as shown in FIG. 7, the metal-clad
環狀聚醯亞胺膜50A優選為在熱壓接前預先進行加熱來減少水分。例如,構成環狀聚醯亞胺膜50A的聚醯亞胺具有吸濕特性,且隨之而含有的水分在熱壓接時揮發,尤其是在聚醯亞胺膜10A的情況下,擔心會導致單面CCL側的銅箔的外觀不良。在熱壓接時使用環狀聚醯亞胺膜50A的情況下,通過增大插入角等來預留出與到達熱壓接面之前的加壓輥40A接觸的時間,而使環狀聚醯亞胺膜50A以覆蓋加壓輥40A的一部分的方式接觸,從而能夠對環狀聚醯亞胺膜50A進行預先加熱。此時,環狀聚醯亞胺膜50A與加壓輥40A接觸的時間優選為設為1秒以上。The ring-shaped
[第三實施形態]
圖8是本發明的第三實施形態的覆金屬積層板的製造方法的說明圖。本實施形態中,膜狀緩衝材形成為長條,且為以輥到輥方式進行搬送的構成。即,本實施形態中,將長條狀聚醯亞胺膜50B配置在一對金屬製的加壓輥40A、加壓輥40B中至少單側的加壓輥40A與聚醯亞胺膜10之間,且將其作為膜狀緩衝材。圖8中,在另一加壓輥40B這一側未配置膜狀緩衝材,也可在由膜狀緩衝材被覆加壓輥40A、加壓輥40B兩者的狀態下進行熱壓接。[Third Embodiment]
8 is an explanatory diagram of a method of manufacturing a metal-clad laminate according to a third embodiment of the present invention. In this embodiment, the film-shaped cushioning material is formed into a long strip and is configured to be transported in a roll-to-roll manner. That is, in the present embodiment, the
長條狀聚醯亞胺膜50B是以能夠由加壓輥40A、捲出輥90A及捲繞輥90B搬送的方式形成。通過將長條狀聚醯亞胺膜50B向與加壓輥40A的旋轉方向相同的方向搬送,可在由能夠與加壓輥40A同步地移動的長條狀聚醯亞胺膜50B被覆加壓輥40A的壓迫面的狀態下進行熱壓接。此外,為了調節相對於加壓輥40A而接觸時的角度及離開時的角度,也可任意地設置一個以上的引導輥。The long-shaped
如上所述,長條狀聚醯亞胺膜50B未固定於加壓輥40A。與第二實施形態的環狀聚醯亞胺膜50A的情況同樣地,以與加壓輥40A相同的速度進行搬送的長條狀聚醯亞胺膜50B,在到達熱壓接面之前,能夠以被覆加壓輥40A的一部分的方式接觸來進行預熱,因此可減少長條狀聚醯亞胺膜50B中所含的水分。長條狀聚醯亞胺膜50B與加壓輥40A接觸的時間優選為設為1秒以上。As described above, the
長條狀聚醯亞胺膜50B的厚度並無特別限定,例如優選為1 μm~200 μm的範圍內,更優選為10 μm~100 μm的範圍內。關於厚度的上限,為了有效率地傳導熱而優選為200 μm以下,為了防止加壓輥40A的寬度方向上的溫度偏差而優選為25 μm以下。關於厚度的下限,為了耐受反覆使用而優選為1 μm以上,更優選為5 μm以上。The thickness of the long-shaped
長條狀聚醯亞胺膜50B可包含單層或多層的聚醯亞胺層。所述情況下,優選為至少一層為非熱塑性聚醯亞胺,且至少與加壓輥40A接觸一側的表面為熱塑性聚醯亞胺層。即,長條狀聚醯亞胺膜50B可使用黏接性高的熱塑性聚醯亞胺層以使與金屬製的加壓輥40A的表面容易密接。The
另一方面,長條狀聚醯亞胺膜50B中,與聚醯亞胺膜10直接接觸一側的表面優選為含有非熱塑性聚醯亞胺。通過由非熱塑性聚醯亞胺層來形成與聚醯亞胺膜10直接接觸的表面,可防止因長條狀聚醯亞胺膜50B部分地熔接於聚醯亞胺膜10而導致的褶皺、污跡等外觀異常的產生。構成長條狀聚醯亞胺膜50B中的非熱塑性聚醯亞胺層的聚醯亞胺例如優選為具有玻璃化轉變溫度(Tg)為300℃以上的耐熱性的聚醯亞胺。通過使用Tg為300℃以上的聚醯亞胺,可避免因熱壓接時的加熱而導致變形或損傷,從而提高長條狀聚醯亞胺膜50B的耐久性。
另外,就同樣的觀點而言,構成長條狀聚醯亞胺膜50B中的非熱塑性聚醯亞胺層的聚醯亞胺的Tg優選為較構成聚醯亞胺膜10的一部分的熱塑性聚醯亞胺(後述)的Tg高例如10℃以上。On the other hand, in the
另外,為了抑制因熱壓接時的溫度變化而導致尺寸變化、確保對所搬送的聚醯亞胺膜10的精密的追隨性,長條狀聚醯亞胺膜50B整體的熱膨脹係數E4優選為相對於後述的聚醯亞胺膜10整體的熱膨脹係數E1,而為例如0.5×E4≦E1≦1.3×E4的關係。In addition, in order to suppress dimensional changes due to temperature changes during thermocompression bonding and to ensure precise followability of the
作為長條狀聚醯亞胺膜50B,例如可使用東麗杜邦(Toray DuPont)公司製造的卡普頓(Kapton)V(商品名)、宇部興產公司製造的優匹萊克斯(UPILEX)S(商品名)等市售的聚醯亞胺膜。As the long-
另外,作為長條狀聚醯亞胺膜50B,也可使用長條的CCL等長條狀覆金屬積層板。通過使用長條狀覆金屬積層板作為長條狀聚醯亞胺膜50B,操作性提升,並且可提高耐久性。作為用作長條狀聚醯亞胺膜50B的長條狀覆金屬積層板,就耐久性、厚度均勻性的觀點而言,優選為通過流延法而製造的長條狀覆金屬積層板。In addition, as the
作為膜狀緩衝材的長條狀聚醯亞胺膜50B具有緩和並且均等地分配熱壓接時的壓力的作用,且具有使聚醯亞胺膜10與金屬箔20均勻地黏接的效果。The
本實施形態的其他構成及效果與第一實施形態及第二實施形態相同。此外,本實施形態中同樣地,作為變形例,如圖9所示,可通過使用具有積層結構的聚醯亞胺膜10A來代替聚醯亞胺膜10而製造覆金屬積層板100A。The other configurations and effects of this embodiment are the same as those of the first and second embodiments. In addition, as in the present embodiment, as a modification, as shown in FIG. 9, the metal-clad
長條狀聚醯亞胺膜50B優選為在熱壓接前預先進行加熱來減少水分。例如,構成長條狀聚醯亞胺膜50B的聚醯亞胺具有吸濕特性,且隨之而含有的水分在熱壓接時揮發,尤其是在聚醯亞胺膜10A的情況下,擔心會導致單面CCL側的銅箔的外觀不良。在熱壓接時使用長條狀聚醯亞胺膜50B的情況下,通過增大插入角等來預留出與到達熱壓接面之前的加壓輥40A接觸的時間,而使長條狀聚醯亞胺膜50B以覆蓋加壓輥40A的一部分的方式接觸,從而能夠對長條狀聚醯亞胺膜50B進行預先加熱。此時,長條狀聚醯亞胺膜50B與加壓輥40A接觸的時間優選為設為1秒以上。The
以上,通過第一實施形態~第三實施形態而獲得的覆金屬積層板100、覆金屬積層板100A中,聚醯亞胺膜10、聚醯亞胺膜10A無不均地對金屬箔20的表面的凹凸進行填充,並且聚醯亞胺膜10、聚醯亞胺膜10A與金屬箔20牢固地黏接。聚醯亞胺膜10、聚醯亞胺膜10A與金屬箔20的黏接強度(剝離強度)可通過構成聚醯亞胺膜10、聚醯亞胺膜10A的聚醯亞胺的原料單體的種類或比率、熱處理條件等而進行控制。As described above, in the metal-clad
[聚醯亞胺]
其次,對所述第一實施形態~第三實施形態中,構成聚醯亞胺膜10、聚醯亞胺膜10A、被覆層50、環狀聚醯亞胺膜50A或長條狀聚醯亞胺膜50B的一部分或者整體的聚醯亞胺進行說明。聚醯亞胺是將作為前體的聚醯胺酸加以醯亞胺化而成,可使特定的酸酐與二胺化合物反應而製造,故通過對酸酐及二胺化合物進行說明而可理解聚醯亞胺的具體例。此外,在本發明中提及聚醯亞胺時,是指包含分子結構中具有醯亞胺基的聚合物的樹脂,除聚醯亞胺以外,還有聚醯胺醯亞胺、聚醚醯亞胺、聚酯醯亞胺、聚矽氧烷醯亞胺、聚苯并咪唑醯亞胺等。[Polyimide]
Next, in the first to third embodiments described above, the
關於作為聚醯亞胺的原料的二胺化合物,可使用芳香族二胺化合物、脂肪族二胺化合物等,例如可列舉由NH2 -Ar1-NH2 所表示的芳香族二胺化合物作為優選化合物。此處,Ar1選自由下述式所表示的基中,氨基的取代位置任意,優選為p,p'位。Ar1還可具有取代基,優選為不具有取代基,或者在具有取代基的情況下其取代基可為碳數1~6的低級烷基或低級烷氧基。這些芳香族二胺化合物可僅使用一種,另外也可並用兩種以上。Regarding the diamine compound as the raw material of the polyimide, an aromatic diamine compound, an aliphatic diamine compound, etc. can be used, and for example, an aromatic diamine compound represented by NH 2 -Ar1-NH 2 can be cited as a preferred compound . Here, Ar1 is selected from the group represented by the following formula, the substitution position of the amino group is arbitrary, and it is preferably the p, p'position. Ar1 may further have a substituent, preferably without a substituent, or in the case of a substituent, the substituent may be a lower alkyl group or a lower alkoxy group having 1 to 6 carbon atoms. Only one type of these aromatic diamine compounds may be used, or two or more types may be used in combination.
[化1] [Chemical 1]
作為與二胺化合物反應的酸酐,就聚醯胺酸的合成的容易度的方面而言,優選為芳香族四羧酸酐。作為芳香族四羧酸酐,並無特別限定,例如可列舉由O(CO)2 Ar2(CO)2 O所表示的化合物作為優選的化合物。此處,Ar2優選為由下述式所表示的四價芳香族基,酸酐基[(CO)2 O]的取代位置任意,優選為對稱的位置。Ar2還可具有取代基,優選為不具有取代基,或者在具有取代基的情況下其取代基可為碳數1~6的低級烷基。The acid anhydride reacted with the diamine compound is preferably an aromatic tetracarboxylic acid anhydride in terms of ease of synthesis of polyamic acid. The aromatic tetracarboxylic anhydride is not particularly limited, and examples thereof include compounds represented by O(CO) 2 Ar2(CO) 2 O as preferred compounds. Here, Ar2 is preferably a tetravalent aromatic group represented by the following formula, and the substitution position of the acid anhydride group [(CO) 2 O] is arbitrary, and is preferably a symmetrical position. Ar2 may further have a substituent, and preferably has no substituent, or in the case of having a substituent, the substituent may be a lower alkyl group having 1 to 6 carbon atoms.
[化2] [Chem 2]
聚醯亞胺膜10、聚醯亞胺膜10A、被覆層50、環狀聚醯亞胺膜50A、長條狀聚醯亞胺膜50B可為包括熱塑性聚醯亞胺層與非熱塑性聚醯亞胺層的多層結構,故對熱塑性聚醯亞胺、非熱塑性聚醯亞胺各自所使用的酸酐與二胺化合物的優選例進行說明。
熱塑性聚醯亞胺: 在聚醯亞胺為熱塑性聚醯亞胺的情況下,雖無特別限定,但作為原料的二氨基成分例如優選為使用:含有50莫耳%以上的選自3,4'-二氨基二苯基醚、1,3-雙(4-氨基苯氧基)苯、1,4-雙(4-氨基苯氧基)苯、2,2-雙[4-(4-氨基苯氧基)苯基]丙烷中的一種以上的二胺化合物。另外,雖無特別限定,但作為原料的酸酐成分例如優選為使用:含有50莫耳%以上的選自均苯四甲酸二酐、3,3',4,4'-聯苯四羧酸二酐、二苯甲酮四羧酸二酐、3,3',4,4'-二苯基碸四羧酸二酐、4,4'-氧基二鄰苯二甲酸酐中的一種以上的酸酐。通過使用規定量的所述二胺化合物或酸酐,可充分發揮由熱塑性聚醯亞胺實現的黏接性,熱壓接性變高。Thermoplastic polyimide: In the case where the polyimide is a thermoplastic polyimide, although not particularly limited, the diamino component as a raw material is preferably used, for example, containing 50 mol% or more selected from 3,4'-diaminodiphenyl Ether, 1,3-bis(4-aminophenoxy)benzene, 1,4-bis(4-aminophenoxy)benzene, 2,2-bis(4-(4-aminophenoxy)benzene More than one diamine compound in the group] propane. In addition, although not particularly limited, the acid anhydride component as a raw material is preferably used, for example, containing 50 mol% or more selected from pyromellitic dianhydride, 3,3',4,4'-biphenyltetracarboxylic diacid One or more of anhydride, benzophenone tetracarboxylic dianhydride, 3,3',4,4'-diphenyl sulfone tetracarboxylic dianhydride, 4,4'-oxydiphthalic anhydride Acid anhydride. By using a predetermined amount of the diamine compound or acid anhydride, the adhesiveness achieved by the thermoplastic polyimide can be fully exerted, and the thermocompression bonding property becomes high.
非熱塑性聚醯亞胺: 在聚醯亞胺為非熱塑性聚醯亞胺的情況下,雖無特別限定,但作為原料的二氨基成分例如優選為使用:含有60莫耳%以上選自1,3-亞苯基二胺、2,2'-二甲基-4,4'-二氨基聯苯、2,2'-雙(三氟甲基)聯苯胺、3,4'-二氨基二苯基醚中的一種以上的二胺化合物。另外,雖無特別限定,但作為原料的酸酐成分例如優選為使用:含有60莫耳%以上的選自均苯四甲酸二酐、3,3',4,4'-聯苯四羧酸二酐中的一種以上的酸酐。通過使用規定量的所述二胺化合物或酸酐,可發揮由非熱塑性聚醯亞胺實現的耐熱性、尺寸穩定性等特性。Non-thermoplastic polyimide: When the polyimide is a non-thermoplastic polyimide, although not particularly limited, the diamino component as a raw material is preferably used, for example, containing 60 mol% or more selected from 1,3-phenylenediamine , 2,2'-dimethyl-4,4'-diaminobiphenyl, 2,2'-bis (trifluoromethyl) benzidine, 3,4'-diaminodiphenyl ether Of diamine compounds. In addition, although not particularly limited, the acid anhydride component as a raw material is preferably used, for example, containing 60 mol% or more selected from pyromellitic dianhydride, 3,3′,4,4′-biphenyltetracarboxylic diacid One or more acid anhydrides in the anhydride. By using a predetermined amount of the diamine compound or acid anhydride, characteristics such as heat resistance and dimensional stability achieved by the non-thermoplastic polyimide can be exhibited.
關於所述熱塑性聚醯亞胺及非熱塑性聚醯亞胺,可通過選定二胺化合物及酸酐的種類、或各自的莫耳比來控制熱膨脹係數、儲存彈性係數、玻璃化轉變溫度等。Regarding the thermoplastic polyimide and the non-thermoplastic polyimide, the coefficient of thermal expansion, the coefficient of storage elasticity, the glass transition temperature, etc. can be controlled by selecting the types of the diamine compound and the acid anhydride, or the respective molar ratios.
此外,所述熱塑性聚醯亞胺及非熱塑性聚醯亞胺中,在具有多個聚醯亞胺的結構單元的情況下,可以嵌段的形式存在,也可無規地存在,優選為無規地存在。In addition, when the thermoplastic polyimide and the non-thermoplastic polyimide have a plurality of structural units of polyimide, they may be present in the form of blocks or may be present randomly, preferably none Regularly exists.
聚醯亞胺例如可通過以下方式獲得:在溶媒中,以大致等莫耳的比例將所述二胺化合物及酸酐混合,以反應溫度0℃~200℃的範圍、優選為0℃~100℃的範圍進行反應而獲得聚醯胺酸的樹脂溶液,進而對其加以醯亞胺化。作為溶媒,例如可列舉:N-甲基吡咯烷酮(N-methyl pyrrolidone,NMP)、二甲基甲醯胺(dimethyl formamide,DMF)、二甲基乙醯胺(dimethyl acetamide,DMAc)、二甲基亞碸(dimethyl sulfoxide,DMSO)、硫酸二甲酯、環丁碸、丁內酯、甲酚、苯酚、鹵化苯酚、環己酮、二噁烷、四氫呋喃、二乙二醇二甲醚(diglyme)、三乙二醇二甲醚(triglyme)等。Polyimide can be obtained, for example, by mixing the diamine compound and the acid anhydride in a solvent at an approximately equal molar ratio, and the reaction temperature is in the range of 0°C to 200°C, preferably 0°C to 100°C The reaction is carried out to obtain a resin solution of polyamic acid, which is further imidized. Examples of the solvent include N-methyl pyrrolidone (NMP), dimethyl formamide (DMF), dimethyl acetamide (DMAc), and dimethyl. Dimethyl sulfoxide (DMSO), dimethyl sulfate, cyclobutane, butyrolactone, cresol, phenol, halogenated phenol, cyclohexanone, dioxane, tetrahydrofuran, diethylene glycol dimethyl ether (diglyme) , Triethylene glycol dimethyl ether (triglyme), etc.
通常,聚醯胺酸的合成是在反應容器等中進行。例如,將聚醯胺酸的樹脂溶液塗佈於任意的基材上並加以乾燥而形成聚醯胺酸層,接著通過熱處理而對聚醯胺酸層加以醯亞胺化,由此可獲得聚醯亞胺層。也可以疊加的方式,在已形成的聚醯胺酸層上或者聚醯亞胺層上反覆進行塗佈。或者,也可將預先經醯亞胺化的聚醯亞胺,以溶解於溶媒中的溶液的形態塗佈於任意的基材的表面並加以乾燥,由此形成聚醯亞胺層。在聚醯亞胺膜10、聚醯亞胺膜10A、被覆層50、環狀聚醯亞胺膜50A、長條狀聚醯亞胺膜50B為多層結構的情況下,優選為在將多個聚醯胺酸的樹脂溶液分次塗佈於任意的基材上並加以乾燥後,成批進行醯亞胺化的方法,但並不限定於此。即,可對任意的基材,利用多層模具等成批塗佈多個聚醯胺酸的樹脂溶液,在將其乾燥後成批地通過熱處理來進行醯亞胺化,由此而形成多個聚醯亞胺層。另外,也可通過分次進行自多個聚醯胺酸的樹脂溶液的塗佈乾燥至醯亞胺化的步驟而一層一層地形成聚醯亞胺層。當形成多個聚醯亞胺層時,這些各處理可任意地組合。Generally, the synthesis of polyamide is carried out in a reaction vessel or the like. For example, a resin solution of polyamic acid is coated on an arbitrary substrate and dried to form a polyamic acid layer, and then the polyamic acid layer is imidized by heat treatment, thereby obtaining a polyimide Acetate layer. It can also be applied repeatedly on the formed polyamic acid layer or polyimide layer in a superimposed manner. Alternatively, the polyimide that has been previously imidized may be applied to the surface of an arbitrary substrate in the form of a solution dissolved in a solvent and dried to form a polyimide layer. When the
作為將聚醯亞胺溶液或聚醯胺酸的樹脂溶液塗佈於任意的基材上的方法,並無特別限制,例如能夠利用以缺角輪、模具、刮刀、模唇等塗佈機為代表的塗佈單元來進行塗佈。當形成多層的聚醯亞胺層時,優選為反覆進行將聚醯亞胺溶液(或聚醯胺酸的樹脂溶液)塗佈於基材並加以乾燥的操作的方法。The method for applying the polyimide solution or the polyamic acid resin solution to any substrate is not particularly limited. For example, a coating machine such as a corner wheel, mold, blade, die lip, etc. can be used. The representative coating unit performs coating. When forming a multi-layer polyimide layer, a method of repeatedly applying a polyimide solution (or a polyamic acid resin solution) to a substrate and drying it is preferred.
作為乾燥及加熱醯亞胺化處理的方法,例如能夠選擇批次(batch)處理方式、連續處理方式等任意的方法。批次處理方式是在將聚醯胺酸的樹脂溶液塗佈於長條狀的金屬箔後,在未醯亞胺化的狀態下將其積層體捲繞為輥狀,並在能夠設定為規定的溫度的熱風乾燥爐中靜置一定時間,且最終以200℃以上的高溫進行熱處理,由此而完成醯亞胺化的方法。連續處理方式是在將聚醯胺酸的樹脂溶液塗佈於長條狀的金屬箔後,使其在乾燥爐內連續移動而確保規定的熱處理時間後,最終以200℃以上的高溫進行熱處理的方法。這些方法中,就生產性或良率等的觀點而言,可選擇任一方法,200℃以上的高溫下的熱處理優選為在減壓環境下、還原性氣體環境下、或者還原性氣體環境下且減壓環境下進行。此外,通過乾燥及醯亞胺化處理步驟中的加熱而將聚醯胺酸樹脂的溶媒去除來加以醯亞胺化,此時,若在高溫下急劇地進行熱處理,則在樹脂表面生成表層而使得溶媒難以蒸發、或產生發泡,因而優選為一邊自低溫階段地上升至高溫一邊進行熱處理。另外,在加熱醯亞胺化步驟中,優選為最終以300℃~400℃的溫度進行熱處理。 [實施例]As the method of drying and heating the imidization treatment, for example, any method such as a batch processing method or a continuous processing method can be selected. The batch processing method is to apply a resin solution of polyamic acid to a long metal foil, wind the laminate into a roll without imidization, and set it to a predetermined value. The temperature is kept in a hot air drying furnace at a certain temperature for a certain period of time, and finally heat treatment is performed at a high temperature of 200° C. or higher, thereby completing the method of imidization. The continuous treatment method is to apply the resin solution of polyamide to the long metal foil, and then move it continuously in the drying furnace to ensure the prescribed heat treatment time, and finally perform heat treatment at a high temperature of 200°C or higher method. Among these methods, any method can be selected from the viewpoint of productivity, yield, etc. The heat treatment at a high temperature of 200° C. or higher is preferably under a reduced pressure environment, a reducing gas environment, or a reducing gas environment And under reduced pressure. In addition, the solvent of the polyacrylic acid resin is removed by the drying and heating in the amidation treatment step to be amidated. In this case, if the heat treatment is performed abruptly at a high temperature, a surface layer is formed on the surface of the resin. It is difficult for the solvent to evaporate or foam, so it is preferable to perform heat treatment while rising from a low temperature stage to a high temperature. In addition, in the heating amide imidization step, it is preferable to finally perform heat treatment at a temperature of 300°C to 400°C. [Example]
以下,示出實施例來對本發明的特徵進行更具體的說明。但本發明的範圍並不限定於實施例。此外,以下的實施例中,只要無特別說明,則各種測定、評價是根據以下方式進行。Hereinafter, examples will be shown to more specifically describe the features of the present invention. However, the scope of the present invention is not limited to the examples. In addition, in the following examples, unless otherwise specified, various measurements and evaluations are performed in the following manner.
[熱膨脹係數(coefficient of thermal expansion,CTE)] 對於尺寸為3 mm×20 mm的聚醯亞胺膜,使用熱機械分析儀(thermomechanical analyzer)(布魯克(Bruker)公司製造,商品名:4000SA),一邊施加5.0 g的負荷一邊以固定的升溫速度自30℃升溫至265℃,進而在所述溫度下保持10分鐘後,以5℃/分鐘的速度冷卻,求出240℃至100℃的平均熱膨脹係數(線熱膨脹係數)。[Coefficient of thermal expansion (CTE)] For a polyimide film with a size of 3 mm×20 mm, a thermomechanical analyzer (manufactured by Bruker, trade name: 4000SA) was used, and a constant temperature increase rate was applied while applying a load of 5.0 g After raising the temperature from 30°C to 265°C, and then maintaining the temperature for 10 minutes, it is cooled at a rate of 5°C/minute, and the average thermal expansion coefficient (linear thermal expansion coefficient) of 240°C to 100°C is obtained.
[玻璃化轉變溫度(Tg)] 玻璃化轉變溫度是對於尺寸為5 mm×20 mm的聚醯亞胺膜,使用動態黏彈性測定裝置(DMA:UBM公司製造,商品名:E4000F),以4℃/分鐘的升溫速度自30℃升溫至400℃,且以頻率11 Hz進行測定,將彈性係數變化(tanδ)最大的溫度作為玻璃化轉變溫度。[Glass transition temperature (Tg)] The glass transition temperature is for a polyimide film with a size of 5 mm×20 mm, using a dynamic viscoelasticity measuring device (DMA: manufactured by UBM Co., Ltd., trade name: E4000F) at a heating rate of 4°C/min from 30°C The temperature was increased to 400°C, and the measurement was performed at a frequency of 11 Hz, and the temperature at which the elastic coefficient change (tan δ) was the largest was taken as the glass transition temperature.
[黏度的測定] 黏度的測定是使用E型黏度計(博勒菲(Brookfield)公司製造,商品名:DV-II+Pro),測定25℃下的黏度。以扭矩為10%~90%的方式設定轉速,且在自開始測定起經過2分鐘後,讀取黏度穩定時的值。[Determination of Viscosity] The viscosity was measured using an E-type viscometer (manufactured by Brookfield Corporation, trade name: DV-II+Pro) to measure the viscosity at 25°C. Set the rotation speed so that the torque is 10% to 90%, and read the value when the viscosity is stable after 2 minutes have elapsed since the start of the measurement.
[剝離強度] 剝離強度是使用滕喜龍(Tensilon)測試儀(東洋精機製作所公司製造,商品名:斯特羅格拉夫(Strograph)VE-1D),求出利用兩面膠帶而使將導體層側的金屬加工為寬度1 mm的配線的覆金屬積層板的樹脂層側固定於SUS板,並以50 mm/分鐘的速度自樹脂層向180°方向剝離金屬配線時的力。[Peel strength] The peel strength was determined using a Tensilon tester (manufactured by Toyo Seiki Co., Ltd., trade name: Strograph VE-1D), and the metal on the conductor layer side was processed to width using double-sided tape The force at the time of peeling the metal wiring from the resin layer to the 180° direction at a speed of 50 mm/min.
[熱壓接面填充狀態] 遍及整個寬度而對熱壓接後的覆銅積層板的銅箔進行蝕刻後,通過目視來觀察聚醯亞胺膜表面,將整面為均勻的色調者評價為整面良好,將存在色調不同的部分者評價為不良。[Filled state of thermocompression bonding surface] After etching the copper foil of the copper-clad laminate after thermocompression bonding over the entire width, the surface of the polyimide film is visually observed, and the person who has a uniform color on the whole surface is evaluated as good on the whole surface, and there will be a difference in color tone Of some people rated it as bad.
實施例等中所使用的縮寫表示以下化合物。 BAPP:2,2-雙[4-(4-氨基苯氧基)苯基]丙烷 m-TB:2,2'二甲基-4,4'-二氨基聯苯 PMDA:均苯四甲酸二酐 BPDA:3,3',4,4'-聯苯四羧酸二酐 DMAc:N,N-二甲基乙醯胺The abbreviations used in Examples and the like indicate the following compounds. BAPP: 2,2-bis[4-(4-aminophenoxy)phenyl]propane m-TB: 2,2'dimethyl-4,4'-diaminobiphenyl PMDA: pyromellitic dianhydride BPDA: 3,3',4,4'-biphenyltetracarboxylic dianhydride DMAc: N,N-dimethylacetamide
<聚醯胺酸溶液的合成> (合成例1) 在具備熱電偶及攪拌機並且能夠導入氮氣的反應容器中,加入87.5 kg的DMAc,進而,向所述反應容器中投入8.11 kg的BAPP並在容器中一邊攪拌一邊使其溶解。其次,投入4.10 kg的PMDA。然後,繼續攪拌3小時來進行聚合反應,獲得聚醯胺酸a的樹脂溶液1。樹脂溶液1(固體成分:12.5%)的黏度為1,300 cps。另外,對聚醯胺酸a加以醯亞胺化而得的聚醯亞胺為熱塑性,由聚醯胺酸a所形成的厚度25 μm的聚醯亞胺膜的熱膨脹係數(CTE)為55×10-6 /K,玻璃化轉變溫度為320℃。<Synthesis of Polyamic Acid Solution> (Synthesis Example 1) In a reaction vessel equipped with a thermocouple and a stirrer and capable of introducing nitrogen, 87.5 kg of DMAc was added, and 8.11 kg of BAPP was added to the reaction vessel Dissolve while stirring in the container. Next, put in 4.10 kg of PMDA. Then, stirring was continued for 3 hours to perform a polymerization reaction, and a resin solution 1 of polyamide a was obtained. Resin solution 1 (solid content: 12.5%) has a viscosity of 1,300 cps. In addition, the polyimide obtained by polyimidization of polyamic acid a is thermoplastic, and the coefficient of thermal expansion (CTE) of a 25 μm thick polyimide film formed of polyamic acid a is 55× 10 -6 /K, glass transition temperature is 320℃.
(合成例2) 在具備熱電偶及攪拌機並且能夠導入氮氣的反應容器中,加入212.5 kg的DMAc,進而,向所述反應容器中投入17.9 kg的m-TB並在容器中一邊攪拌一邊使其溶解。其次,投入4.94 kg的BPDA及14.7 kg的PMDA。然後,繼續攪拌3小時來進行聚合反應,獲得聚醯胺酸b的樹脂溶液2。樹脂溶液2(固體成分:15%)的黏度為26,500 cps。另外,對聚醯胺酸b加以醯亞胺化而得的聚醯亞胺為熱塑性,由聚醯胺酸b所形成的厚度25 μm的聚醯亞胺膜的熱膨脹係數(CTE)為22×10-6 /K。(Synthesis Example 2) In a reaction vessel equipped with a thermocouple and a stirrer and capable of introducing nitrogen, 212.5 kg of DMAc was added, and further 17.9 kg of m-TB was added to the reaction vessel and stirred while stirring in the vessel Dissolve. Next, put in 4.94 kg of BPDA and 14.7 kg of PMDA. Then, stirring was continued for 3 hours to perform a polymerization reaction, and a resin solution 2 of polyamic acid b was obtained. Resin solution 2 (solid content: 15%) has a viscosity of 26,500 cps. In addition, the polyimide obtained by polyimidization of polyamic acid b is thermoplastic, and the coefficient of thermal expansion (CTE) of a 25 μm thick polyimide film formed of polyamic acid b is 22× 10 -6 /K.
[聚醯亞胺被覆輥的製造] 在一邊使內部具備加熱器的金屬製輥旋轉,一邊使用塗佈機將合成例2中製備的樹脂溶液2塗佈於金屬製輥的表面後,利用加熱器來對金屬製輥進行加熱,由此花費一小時而自室溫升溫至360℃,獲得在表面具有規定厚度的聚醯亞胺被覆層的聚醯亞胺被覆輥。[Manufacture of Polyimide Coated Rollers] After rotating the metal roller provided with a heater inside, the resin solution 2 prepared in Synthesis Example 2 was applied to the surface of the metal roller using a coating machine, and then the metal roller was heated by the heater, by It took one hour to increase the temperature from room temperature to 360°C, and a polyimide-coated roller having a polyimide-coated layer having a predetermined thickness on the surface was obtained.
(實施例1) 將長條狀的銅箔1(軋製銅箔,厚度:12 μm,橫向寬度:500 mm)作為基材,且使用模塗機,將合成例1中製備的樹脂溶液1以硬化後的厚度成為2.5 μm的方式均勻地塗佈於銅箔1的粗糙面後,以130℃進行加熱乾燥而將溶媒去除。其次,在所述塗佈面側,以硬化後的厚度成為20 μm的方式均勻地塗佈合成例2中製備的樹脂溶液2,並以120℃進行加熱乾燥而將溶媒去除。進而,在所述塗佈面側,以硬化後的厚度成為2.5 μm的方式均勻地塗佈與第一層中所塗佈的溶液相同的樹脂溶液1,並以130℃進行加熱乾燥而將溶媒去除,階段地進行熱處理直至為360℃,獲得具有厚度為25 μm的聚醯亞胺膜的單面覆銅積層板1a。(Example 1) Using a long copper foil 1 (rolled copper foil, thickness: 12 μm, lateral width: 500 mm) as a base material, and using a die coater, the resin solution 1 prepared in Synthesis Example 1 was cured to a thickness after curing After being uniformly applied to the rough surface of the copper foil 1 so as to be 2.5 μm, it was heated and dried at 130° C. to remove the solvent. Next, on the coating surface side, the resin solution 2 prepared in Synthesis Example 2 was uniformly applied so that the thickness after curing became 20 μm, and was heated and dried at 120° C. to remove the solvent. Furthermore, on the coating surface side, the same resin solution 1 as the solution applied in the first layer was uniformly applied so that the thickness after curing became 2.5 μm, and the solution was heated and dried at 130° C. After removal, heat treatment was performed stepwise until 360° C. to obtain a single-sided copper-clad laminate 1a having a polyimide film with a thickness of 25 μm.
使用具有一對加壓輥的加熱加壓裝置,在單面覆銅積層板1a的銅箔1側配置聚醯亞胺被覆輥1(聚醯亞胺被覆層的厚度:50 μm),另外,在單面覆銅積層板1a的聚醯亞胺層側配置長條狀的銅箔2(電解銅箔,厚度:12 μm,橫向寬度:540 mm),進而,在銅箔2的熱壓接面的相反側配置金屬製輥。對於這些,一邊經由引導輥來搬送,一邊在氮氣環境下,在輥表面溫度:300℃~400℃、壓輥的線壓:38.6~115.8 kgf/cm的範圍內、搬送速度:4.0 m/分鐘的條件下連續地進行熱壓接,獲得兩面覆銅積層板1b。所得的兩面覆銅積層板1b的塗佈面側的銅箔表面的外觀整面良好,壓接側的銅箔的剝離強度為1.6 kN/m。Using a heating and pressing device having a pair of pressure rollers, a polyimide coating roller 1 (thickness of the polyimide coating layer: 50 μm) was placed on the copper foil 1 side of the single-sided copper-clad laminate 1a. In addition, A long copper foil 2 (electrolytic copper foil, thickness: 12 μm, lateral width: 540 mm) is arranged on the polyimide layer side of the single-sided copper-clad laminate 1a, and further, the copper foil 2 is thermally pressed A metal roller is arranged on the opposite side of the surface. For these, while being transported via a guide roller, under a nitrogen atmosphere, the surface temperature of the roller: 300°C to 400°C, the linear pressure of the pressure roller: 38.6 to 115.8 kgf/cm, the transport speed: 4.0 m/min Under the condition of continuous thermal compression bonding, a double-sided copper-clad laminate 1b was obtained. The copper foil surface on the coated surface side of the obtained double-sided copper-clad laminate 1b had a good overall appearance, and the peel strength of the copper foil on the pressure contact side was 1.6 kN/m.
(比較例1) 除了將兩個加壓輥設為金屬製輥以外,以與實施例1相同的方式進行,獲得兩面覆銅積層板1b’。所得的兩面覆銅積層板1b’的塗佈面側的銅箔表面的外觀一部分為不良,壓接側的銅箔的剝離強度為1.2 kN/m。(Comparative example 1) A double-sided copper-clad laminate 1b' was obtained in the same manner as in Example 1, except that the two pressure rollers were made of metal. Part of the appearance of the copper foil surface on the coated surface side of the obtained double-sided copper-clad laminate 1b' was defective, and the peel strength of the copper foil on the pressure bonding side was 1.2 kN/m.
將實施例1及比較例1的結果示於表1中。
[表1]
(實施例2) 除了使用聚醯亞胺被覆輥2(聚醯亞胺被覆層的厚度:75 μm)以外,以與實施例1相同的方式進行,獲得兩面覆銅積層板2b。所得的兩面覆銅積層板2b的塗佈面側的銅箔表面的外觀整面良好,壓接側的銅箔的剝離強度為1.6 kN/m。(Example 2) A double-sided copper-clad laminate 2b was obtained in the same manner as in Example 1, except that the polyimide coating roll 2 (thickness of the polyimide coating layer: 75 μm) was used. The copper foil surface on the coated surface side of the obtained double-sided copper-clad laminate 2b had a good overall appearance, and the peel strength of the copper foil on the pressure contact side was 1.6 kN/m.
(實施例3) 除了使用聚醯亞胺被覆輥3(聚醯亞胺被覆層的厚度:25 μm)以外,以與實施例1相同的方式進行,獲得兩面覆銅積層板3b。所得的兩面覆銅積層板3b的塗佈面側的銅箔表面的外觀整面良好,壓接側的銅箔的剝離強度為1.6 kN/m。(Example 3) The double-sided copper-clad laminate 3b was obtained in the same manner as in Example 1, except that the polyimide coating roll 3 (thickness of the polyimide coating layer: 25 μm) was used. The copper foil surface on the coated surface side of the obtained double-sided copper-clad laminate 3b had a good overall appearance, and the peel strength of the copper foil on the pressure contact side was 1.6 kN/m.
(實施例4) 除了使用聚醯亞胺被覆輥4(聚醯亞胺被覆層的厚度:20 μm)以外,以與實施例1相同的方式進行,獲得兩面覆銅積層板4b。所得的兩面覆銅積層板4b的塗佈面側的銅箔表面的外觀整面良好,壓接側的銅箔的剝離強度為1.6 kN/m。(Example 4) A double-sided copper-clad laminate 4b was obtained in the same manner as in Example 1, except that the polyimide coating roll 4 (thickness of the polyimide coating layer: 20 μm) was used. The copper foil surface on the coated surface side of the obtained double-sided copper-clad laminate 4b had a good overall appearance, and the peel strength of the copper foil on the pressure contact side was 1.6 kN/m.
(實施例5) 除了使用聚醯亞胺被覆輥5(聚醯亞胺被覆層的厚度:15 μm)以外,以與實施例1相同的方式進行,獲得兩面覆銅積層板5b。所得的兩面覆銅積層板5b的塗佈面側的銅箔表面的外觀整面良好,壓接側的銅箔的剝離強度為1.6 kN/m。(Example 5) A double-sided copper-clad laminate 5b was obtained in the same manner as in Example 1, except that the polyimide coating roll 5 (thickness of the polyimide coating layer: 15 μm) was used. The copper foil surface on the coated surface side of the obtained double-sided copper-clad laminate 5b had a good overall appearance, and the peel strength of the copper foil on the pressure contact side was 1.6 kN/m.
(實施例6) 除了使用聚醯亞胺被覆輥6(聚醯亞胺被覆層的厚度:12 μm)以外,以與實施例1相同的方式進行,獲得兩面覆銅積層板6b。所得的兩面覆銅積層板6b的塗佈面側的銅箔表面的外觀整面良好,壓接側的銅箔的剝離強度為1.6 kN/m。(Example 6) A double-sided copper-clad laminate 6b was obtained in the same manner as in Example 1, except that the polyimide coating roll 6 (thickness of the polyimide coating layer: 12 μm) was used. The copper foil surface on the coated surface side of the obtained double-sided copper-clad laminate 6b had a good overall appearance, and the peel strength of the copper foil on the pressure bonding side was 1.6 kN/m.
(實施例7) 除了使用聚醯亞胺被覆輥7(聚醯亞胺被覆層的厚度:10 μm)以外,以與實施例1相同的方式進行,獲得兩面覆銅積層板7b。所得的兩面覆銅積層板7b的塗佈面側的銅箔表面的外觀整面良好,壓接側的銅箔的剝離強度為1.6 kN/m。(Example 7) A double-sided copper-clad laminate 7b was obtained in the same manner as in Example 1, except that the polyimide coating roller 7 (thickness of the polyimide coating layer: 10 μm) was used. The copper foil surface on the coated surface side of the obtained double-sided copper-clad laminate 7b had a good overall appearance, and the peel strength of the copper foil on the pressure contact side was 1.6 kN/m.
(實施例8) 除了使用聚醯亞胺被覆輥8(聚醯亞胺被覆層的厚度:8 μm)以外,以與實施例1相同的方式進行,獲得兩面覆銅積層板8b。所得的兩面覆銅積層板8b的塗佈面側的銅箔表面的外觀整面良好,壓接側的銅箔的剝離強度為1.6 kN/m。(Example 8) A double-sided copper-clad laminate 8b was obtained in the same manner as in Example 1, except that the polyimide coating roll 8 (thickness of the polyimide coating layer: 8 μm) was used. The copper foil surface on the coated surface side of the obtained double-sided copper-clad laminate 8b had a good overall appearance, and the peel strength of the copper foil on the pressure contact side was 1.6 kN/m.
(實施例9) 除了使用聚醯亞胺被覆輥9(聚醯亞胺被覆層的厚度:100 μm)以外,以與實施例1相同的方式進行,獲得兩面覆銅積層板9b。所得的兩面覆銅積層板9b的塗佈面側的銅箔表面的外觀整面良好,壓接側的銅箔的剝離強度為1.6 kN/m。(Example 9) A double-sided copper-clad laminate 9b was obtained in the same manner as in Example 1, except that the polyimide coating roll 9 (thickness of the polyimide coating layer: 100 μm) was used. The copper foil surface on the coated surface side of the obtained double-sided copper-clad laminate 9b had a good overall appearance, and the peel strength of the copper foil on the pressure contact side was 1.6 kN/m.
(實施例10)
在實施例1中的單面覆銅積層板1a的銅箔1側配置通過預加熱而去除了水分的聚醯亞胺帶10(厚度:20 μm,拉伸強度:400 MPa,拉伸彈性係數:9 GPa,無縫型(seamless type)),來代替配置聚醯亞胺被覆輥1,除此以外,以與實施例1相同的方式進行,獲得兩面覆銅積層板10b。所得的兩面覆銅積層板10b的塗佈面側的銅箔表面的外觀整面良好,壓接側的銅箔的剝離強度為1.6 kN/m。此外,聚醯亞胺帶10與加壓輥的接觸時間設為2秒。(Example 10)
Polyimide tape 10 (thickness: 20 μm, tensile strength: 400 MPa, tensile modulus of elasticity) was disposed on the copper foil 1 side of the single-sided copper-clad laminate 1a in Example 1 to remove moisture by preheating. : 9 GPa, seamless type (seamless type), instead of arranging the polyimide-coated roller 1, in the same manner as in Example 1, to obtain a double-sided copper-clad laminate 10b. The copper foil surface on the coated surface side of the obtained double-sided copper-clad laminate 10b had a good overall appearance, and the peel strength of the copper foil on the pressure contact side was 1.6 kN/m. In addition, the contact time between the
(實施例11) 在實施例1中的單面覆銅積層板1a的銅箔1側配置通過預加熱而去除了水分的市售的聚醯亞胺膜11(厚度:25 μm),來代替配置聚醯亞胺被覆輥1,除此以外,以與實施例1相同的方式進行,獲得兩面覆銅積層板11b。所得的兩面覆銅積層板11b的塗佈面側的銅箔表面的外觀整面良好,壓接側的銅箔的剝離強度為1.6 kN/m。此外,聚醯亞胺膜11對加壓輥的插入角設為70°。(Example 11) In the copper foil 1 side of the single-sided copper-clad laminate 1a in Example 1, a commercially available polyimide film 11 (thickness: 25 μm) in which moisture was removed by preheating was arranged instead of polyimide Except for this, the coating roll 1 was carried out in the same manner as in Example 1, and a double-sided copper-clad laminate 11b was obtained. The copper foil surface on the coated surface side of the obtained double-sided copper-clad laminate 11b had a good overall appearance, and the peel strength of the copper foil on the pressure contact side was 1.6 kN/m. In addition, the insertion angle of the polyimide film 11 to the pressure roller was set to 70°.
如上文詳細敘述那樣,根據本實施形態的覆金屬積層板的製造方法,可獲得聚醯亞胺膜無不均地對金屬箔的表面的凹凸進行填充,且聚醯亞胺膜與金屬箔牢固地黏接的覆金屬積層板。通過將以所述方式製造的覆金屬積層板用作FPC等的電路基板材料,可製造經微細化的配線與絕緣樹脂層的密接性優異的電路基板。因此,根據本發明,可提升電路基板及使用電路基板的電子製品的良率及可靠性。As described in detail above, according to the manufacturing method of the metal-clad laminate of the present embodiment, the polyimide film can be obtained to fill the irregularities of the surface of the metal foil without unevenness, and the polyimide film and the metal foil are strong Ground-clad metal-clad laminate. By using the metal-clad laminate manufactured in the above manner as a circuit board material such as FPC, a circuit board excellent in the adhesion between the fine wiring and the insulating resin layer can be manufactured. Therefore, according to the present invention, the yield and reliability of the circuit board and electronic products using the circuit board can be improved.
以上,出於例示的目的而對本發明的實施形態進行了詳細說明,但本發明並不受所述實施形態制約。In the above, the embodiment of the present invention has been described in detail for the purpose of illustration, but the present invention is not restricted by the above embodiment.
10、10A‧‧‧聚醯亞胺膜
20‧‧‧金屬箔
30‧‧‧加壓輥(被覆加壓輥)
31‧‧‧金屬製輥
33‧‧‧黏接劑層
35‧‧‧聚醯亞胺被覆層
40、40A、40B‧‧‧加壓輥
50‧‧‧被覆層
50A‧‧‧環狀聚醯亞胺膜
50B‧‧‧長條狀聚醯亞胺膜
61‧‧‧塗佈單元
63‧‧‧樹脂溶液
71‧‧‧基材
73‧‧‧聚醯亞胺層
80A、80B‧‧‧引導輥
90A‧‧‧捲出輥
90B‧‧‧捲繞輥
100、100A‧‧‧覆金屬積層板10, 10A‧‧‧
圖1是對本發明的第一實施形態的覆金屬積層板的製造方法進行說明的圖式。 圖2是表示被覆加壓輥的結構的剖面圖。 圖3是對被覆加壓輥的製造方法進行說明的圖式。 圖4是對被覆加壓輥的修復方法進行說明的圖式。 圖5是對第一實施形態的覆金屬積層板的製造方法的變形例進行說明的圖式。 圖6是對本發明的第二實施形態的覆金屬積層板的製造方法進行說明的圖式。 圖7是對第二實施形態的覆金屬積層板的製造方法的變形例進行說明的圖式。 圖8是對本發明的第三實施形態的覆金屬積層板的製造方法進行說明的圖式。 圖9是對第三實施形態的覆金屬積層板的製造方法的變形例進行說明的圖式。FIG. 1 is a diagram illustrating a method of manufacturing a metal-clad laminate according to a first embodiment of the present invention. FIG. 2 is a cross-sectional view showing the structure of the coating pressure roller. FIG. 3 is a diagram illustrating a method of manufacturing a covered pressure roller. FIG. 4 is a diagram illustrating a method of repairing a covered pressure roller. 5 is a diagram explaining a modification of the method of manufacturing the metal-clad laminate according to the first embodiment. 6 is a diagram illustrating a method of manufacturing a metal-clad laminate according to a second embodiment of the present invention. 7 is a diagram explaining a modification of the method of manufacturing the metal-clad laminate of the second embodiment. 8 is a diagram illustrating a method of manufacturing a metal-clad laminate according to a third embodiment of the present invention. 9 is a diagram explaining a modification of the method of manufacturing the metal-clad laminate according to the third embodiment.
10‧‧‧聚醯亞胺膜 10‧‧‧Polyimide film
20‧‧‧金屬箔 20‧‧‧Metal foil
30‧‧‧加壓輥(被覆加壓輥) 30‧‧‧Pressure roller (coated pressure roller)
40‧‧‧加壓輥 40‧‧‧Pressure roller
50‧‧‧被覆層 50‧‧‧Coated layer
100‧‧‧覆金屬積層板 100‧‧‧Metal-clad laminate
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|---|---|
| JP (1) | JP7325899B2 (en) |
| KR (1) | KR102592679B1 (en) |
| CN (1) | CN110662358A (en) |
| TW (1) | TWI810329B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI868685B (en) * | 2023-02-10 | 2025-01-01 | 日商普羅瑪帝克股份有限公司 | Method for manufacturing laminated and device for manufacturing the same |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111703185B (en) * | 2020-07-09 | 2021-11-05 | 昆山乐邦精密科技有限公司 | Polyimide screen hot-pressing device and using method thereof |
| JP6900138B1 (en) * | 2020-09-18 | 2021-07-07 | 株式会社日本製鋼所 | Laminate molding press equipment, laminating molding system, and laminating molding method |
| CN112739048A (en) * | 2020-12-10 | 2021-04-30 | 厦门柔性电子研究院有限公司 | Roll type manufacturing method of double-sided flexible circuit board and flexible circuit board manufactured by same |
| JP7662375B2 (en) * | 2021-03-31 | 2025-04-15 | 日鉄ケミカル&マテリアル株式会社 | Manufacturing method for double-sided metal-clad laminate |
| CN115592964B (en) * | 2022-10-08 | 2025-12-09 | 深圳市益达兴科技股份有限公司 | FDC hot-press molding process using PET as base film |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6335991A (en) * | 1986-07-30 | 1988-02-16 | 森本 吉春 | Blind displaying thick or thin figure |
| JPH06335991A (en) * | 1993-05-28 | 1994-12-06 | Mitsui Toatsu Chem Inc | Heat resistant resin coated elastic roll |
| JP2001046963A (en) | 1999-08-13 | 2001-02-20 | Kanegafuchi Chem Ind Co Ltd | Repair method of metal surface |
| JP3989145B2 (en) | 1999-11-01 | 2007-10-10 | 株式会社カネカ | Laminate production method |
| JP2004358677A (en) * | 2003-06-02 | 2004-12-24 | Nippon Steel Chem Co Ltd | Manufacturing method of laminate |
| WO2005063468A1 (en) * | 2003-12-26 | 2005-07-14 | Kaneka Corporation | Method for producing flexible laminate |
| JP2007118477A (en) | 2005-10-31 | 2007-05-17 | Toray Ind Inc | Double-sided metal foil lamination plate and method for manufacturing the same |
| JP5217321B2 (en) | 2007-09-13 | 2013-06-19 | 東レ株式会社 | Method for producing flexible metal laminate |
| JP5151938B2 (en) | 2008-03-31 | 2013-02-27 | 東レ株式会社 | Method for producing metal foil laminated film |
| FI20106107A7 (en) * | 2010-10-26 | 2012-03-19 | Metso Paper Inc | Method for manufacturing a roller for a nonwoven web machine and a roller for a nonwoven web machine |
-
2019
- 2019-06-17 JP JP2019111879A patent/JP7325899B2/en active Active
- 2019-06-26 KR KR1020190076065A patent/KR102592679B1/en active Active
- 2019-06-27 CN CN201910566209.7A patent/CN110662358A/en active Pending
- 2019-06-28 TW TW108122822A patent/TWI810329B/en active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI868685B (en) * | 2023-02-10 | 2025-01-01 | 日商普羅瑪帝克股份有限公司 | Method for manufacturing laminated and device for manufacturing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| KR102592679B1 (en) | 2023-10-24 |
| CN110662358A (en) | 2020-01-07 |
| KR20200002637A (en) | 2020-01-08 |
| JP7325899B2 (en) | 2023-08-15 |
| JP2020006685A (en) | 2020-01-16 |
| TWI810329B (en) | 2023-08-01 |
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