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TW202006307A - Heat dissipation component and manufacturing method thereof - Google Patents

Heat dissipation component and manufacturing method thereof Download PDF

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TW202006307A
TW202006307A TW107122922A TW107122922A TW202006307A TW 202006307 A TW202006307 A TW 202006307A TW 107122922 A TW107122922 A TW 107122922A TW 107122922 A TW107122922 A TW 107122922A TW 202006307 A TW202006307 A TW 202006307A
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metal plate
heat dissipating
manufacturing
item
patent application
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TW107122922A
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TWI661172B (en
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林志曄
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奇鋐科技股份有限公司
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Abstract

A heat dissipation component and a manufacturing method thereof. The heat dissipation component has a main body. The main body has a first metal plate body and a second metal plate body. The first and second metal plate bodies together define a chamber. A capillary structure layer is disposed in the chamber and a working fluid is filled in the chamber. An outer periphery of the chamber of the main body has a flange section. The flange section has a sintered welding section. The sintered welding section is perpendicularly connected with the first and second metal plate bodies. The manufacturing method of the heat dissipation component employs fillet welding to directly perpendicularly weld and connect the first and second metal plate bodies so as to enhance the connection and sealing of the welded first and second metal plate bodies.

Description

散熱元件及其製造方法Radiating element and its manufacturing method

一種散熱元件及其製造方法,尤指一種提升散熱元件焊接之結合度及密閉性的散熱元件及其製造方法。A heat dissipation element and a manufacturing method thereof, in particular to a heat dissipation element and a method for manufacturing the heat dissipation element, which improve the bonding and sealing of the heat dissipation element.

均溫板或平板式熱管普遍被使用在作為熱傳導元件使用,這兩項熱傳導元件具有高導熱之特性,由於內部真空密閉腔室填充工作液體使得透過氣液兩相特性之轉換快速達到熱傳導之效果,均溫板及平板式熱管係透過以上、下至少兩金屬板體進行疊合後進行封邊注水抽真空封閉等作業,均溫板及平板式熱管最常使用之材料係為銅、鋁、不銹鋼等金屬材質,其中又以銅最為常使用,因銅本身具有高熱傳導特性,故最常被使用。 多數均溫板及平板式熱管主要透過擴散接合(Diffusion Bonding)與硬焊(Brazing)及點焊之方式進行封邊之工作,而擴散接合(Diffusion Bonding)與硬焊(Brazing)適用於多數材質,但若兩種相異材質之結合例如銅與鋁或銅與不銹鋼則並不適用擴散接合此項工法。 點焊的缺點在於雖可連續加工但無法完整密閉封邊,則若使用在均溫板封邊之工作則無法維持內部腔室之真空度以及工作液體容易因為密閉性不佳而產生外洩,進而失去熱傳導效果。 亦有業者透過使用電阻輪焊之方式進行焊接接合的工作,而現行電阻輪焊 之均溫板或平板式熱管,主要由一上板3a(表面積較小)及一下板3b(表面積較大)相互疊合後,再透過於上、下板3a、3b搭接重合的直角角落位置進行電阻輪焊(Fillet Weld)(如第1、1a圖所示),雖電阻輪焊可提供大小不一致的上、下板3a、3b的焊接結合,但習知電阻輪焊的焊接方式及材料的結合處仍具有缺點,如上、下板3a、3b為了形成可提供焊接之垂直角落部位,選擇上板3a小於下板3b,故上、下板3a、3b必須要準確對位,甚至必須有專用治具對該上、下板3a、3b進行定位。 再者,當電阻輪焊之焊接路徑當遇到圓角時則會因路徑必需由直線慢慢修正為弧形,則會採用多段短直線進行拼湊為弧形之路徑,故使電阻輪焊之部位重複或停留時間增長,令材料過度燒熔甚至破壞至均溫板或平板式熱管內部之毛細結構或令內部腔室縮減等缺點,並且為了形成可焊接之垂直角落部位,則必須選用形狀大小不同之上、下板3a、3b,使下板3b外緣唇邊容易產生多餘無效之唇邊,形成材料浪費之缺點。 習知具有下列缺點: 1. 材料浪費; 2. 密閉性不佳; 3. 必須額外進行定位; 4. 異材料不易結合。The temperature equalizing plate or flat plate heat pipe is generally used as a heat conduction element. These two heat conduction elements have the characteristics of high thermal conductivity. Because the internal vacuum sealed chamber is filled with working liquid, the conversion of the two-phase characteristics of gas and liquid can quickly achieve the effect of heat conduction. , The temperature equalizing plate and the flat type heat pipe are superimposed through at least two metal plates above and below, and then the edge sealing, water injection and vacuum sealing are performed. The most commonly used materials for the temperature equalizing plate and the flat type heat pipe are copper, aluminum, Stainless steel and other metal materials, among which copper is most commonly used, is most commonly used because of its high thermal conductivity. Most temperature-averaged plates and flat-plate heat pipes mainly use diffusion bonding (Diffusion Bonding), brazing and spot welding for edge sealing, while diffusion bonding (Biffusion Bonding) and brazing (Brazing) are suitable for most materials However, if the combination of two different materials, such as copper and aluminum or copper and stainless steel, the diffusion bonding method is not applicable. The disadvantage of spot welding is that although it can be processed continuously but cannot be completely sealed, if it is used in the edge-sealing work, the vacuum degree of the internal chamber cannot be maintained and the working liquid is likely to leak due to poor sealing. Then lose the heat conduction effect. There are also companies who perform resistance welding by using resistance wheel welding. The current temperature-averaged plate or flat plate heat pipe of resistance wheel welding is mainly composed of an upper plate 3a (smaller surface area) and a lower plate 3b (larger surface area). After overlapping with each other, perform resistance wheel welding (as shown in Figures 1 and 1a) by overlapping the right and left corners of the upper and lower plates 3a and 3b (as shown in Figures 1 and 1a). Although resistance wheel welding can provide inconsistent sizes Welding combination of upper and lower plates 3a, 3b, but the welding method and material joints of conventional resistance wheel welding still have shortcomings, such as upper and lower plates 3a, 3b in order to form a vertical corner portion that can provide welding, choose the upper plate 3a It is smaller than the lower plate 3b, so the upper and lower plates 3a and 3b must be accurately aligned, and even a special jig must be used to position the upper and lower plates 3a and 3b. In addition, when the welding path of resistance wheel welding meets rounded corners, the path must be slowly corrected from a straight line to an arc, and multiple short straight lines are used to piece together into an arc path, so the resistance wheel welding The parts are repeated or the residence time is increased, the material is excessively melted or even destroyed to the capillary structure inside the temperature equalizing plate or flat plate heat pipe or the inner cavity is reduced, and in order to form a weldable vertical corner, the shape and size must be selected The difference between the upper and lower plates 3a, 3b makes the outer lip of the lower plate 3b prone to excess and ineffective lips, resulting in the disadvantage of waste of material. The conventional knowledge has the following disadvantages: 1. Waste of materials; 2. Poor airtightness; 3. Additional positioning is required; 4. Different materials are not easy to combine.

爰此,為解決上述習知技術之缺點,本發明之主要目的,係提供一種具有較佳結合性及密閉性的散熱元件。 本發明之另一目的,係提供一種可提升均溫板結合性及密閉性的散熱元件製造方法。 為達上述之目的,本發明係提供一種散熱元件,係包含:一本體; 所述本體具有一第一金屬板體及一第二金屬板體,所述第一、二金屬板體共同界定一腔室,所述腔室表面具有至少一毛細結構層並填充有一工作液體,該本體腔室外緣具有一唇部,所述唇部具有一燒結焊部,所述燒結焊部垂直連結該第一、二金屬板體。 為達上述之目的,本發明係提供一種散熱元件製造方法,係包含下列步驟: 提供一第一金屬板體及一第二金屬板體; 於前述第一、二金屬板體其中任一的一側形成一毛細結構; 將所述第一、二金屬板體對應疊合,並透過電阻輪焊之方式,垂直對應該第一、二金屬板體對應疊合之部位進行封邊作業並預留一注水抽氣區域; 進行抽真空及注水作業,最後將注水抽氣區域透過電阻輪焊之方式進封閉。 本發明主要透過改善電阻輪焊與該第一、二金屬板體之焊接角度結構及方法藉以改善均溫板結合性及密閉性不佳之缺失者。Secondly, in order to solve the above-mentioned shortcomings of the conventional technology, the main object of the present invention is to provide a heat dissipating element with better bonding and airtightness. Another object of the present invention is to provide a method for manufacturing a heat dissipating element that can improve the uniformity and tightness of a temperature equalizing plate. To achieve the above purpose, the present invention provides a heat dissipation element, which includes: a body; the body has a first metal plate body and a second metal plate body, and the first and second metal plate bodies jointly define a A cavity, the surface of the cavity has at least one capillary structure layer and is filled with a working liquid, the outer periphery of the body cavity has a lip portion, the lip portion has a sintered welding portion, and the sintered welding portion is vertically connected to the first 2. Two metal plates. To achieve the above purpose, the present invention provides a method for manufacturing a heat dissipating element, which includes the following steps: providing a first metal plate body and a second metal plate body; one of the first and second metal plate bodies A capillary structure is formed on the side; the first and second metal plates are stacked correspondingly, and through resistance wheel welding, the edges corresponding to the first and second metal plates corresponding to the overlapping are vertically sealed and reserved 1. Water injection and pumping area; perform vacuuming and water injection operations, and finally seal the water injection and pumping area through resistance wheel welding. The invention mainly improves the lack of poor bonding and tightness of the temperature equalizing plate by improving the welding angle structure and method of the resistance wheel welding and the first and second metal plate bodies.

請參閱第2、3圖,係為本發明散熱元件之第一實施例之立體分解及組合圖,如圖所示,所述散熱元件,係包含:一本體; 所述本體1具有一第一金屬板體1a及一第二金屬板體1b,所述第一、二金屬板體1a、1b之材質為金、銀、鐵、銅、鋁、商業純鈦、不銹鋼或其他具導熱特性之金屬其中任一,所述第一、二金屬板體1a、1b共同界定一密閉腔室1e,所述密閉腔室1e表面具有至少一毛細結構1d(可係為燒結粉末體或纖維體或網格體或溝槽其中任一),所述毛細結構1d係選擇設置於前述第一、二金屬板體1a、1b其中任一,所述密閉腔室1e填充有一工作液體1g,該本體1密閉腔室1e外緣具有一唇部1h,所述唇部1h具有一燒結焊部1i,所述燒結焊部1i垂直連結該第一、二金屬板體1a、1b,所述燒結焊部1i垂直貫穿所述第一金屬板體1a整個板厚並延伸至所述第二金屬板體1b板厚之三分之一至三分之二處。 所述本體1具有一支撐結構1c,所述支撐結構1c係可為透過外力變形或透過切銷加工或透過外加元件作為支撐之支撐件,所述切銷加工係為選擇於該第一、二金屬板體1a、1b其中任一板體之一側透過切銷加工方式(如銑削加工)形成凸出結構向另一板體抵頂支撐;所述外力形變之支撐結構1c係為選擇於該第一、二金屬板體1a、1b其中任一板體的一側施加外力向另一側凹陷所形成的支撐結構1c;所述外加元件係透過於該第一、二金屬板體1a、1b兩者之間設置支撐體如支撐柱作為支撐結構1c,並不引以為限。 請參閱第4圖,係為本發明散熱元件之第二實施例立體分解圖,如圖所示,本實施例部分說明實施與前述第一實施例相同,故在此將不再贅述,惟本實施例與前述第一實施例之差異在於所述第一、二金屬板體之間放置一毛細結構件3,此一步驟之毛細結構件係為單一結構體,該毛細結構件3設置於該第一、二金屬板體1a、1b之間,所述毛細結構件3係為燒結粉末板體或纖維體或網格體或波浪板或具有複數溝槽之板體其中任一,並透過該毛細結構件3可提供輔助之毛細力,增加汽液循環之效率。 請參閱第5圖,係為本發明散熱元件製造方法之第一實施例步驟流程圖,一併參閱第6、7圖加工示意圖,如圖所示,本發明之散熱元件製造方法,係包含下列步驟: S1:提供一第一金屬板體及一第二金屬板體; 提供一第一金屬板體1a及一第二金屬板體1b,所述第一、二金屬板體1a、1b大小相同或不同其中任一,所述第一、二金屬板體1a、1b係可為銅、鋁、不銹鋼、鈦合金、商業純鈦其中任一,本實施例係選擇以商業純鈦與銅搭配作為說明實施例但並不引以為限。 S2:於前述第一、二金屬板體其中任一的一側形成一毛細結構; 選擇於前述第一、二金屬板體1a、1b其中任一或任二相互對應之一側形成一毛細結構1d,所述毛細結構1d係為燒結粉末或網格體或溝槽或纖維體其中任一。 S3:將所述第一、二金屬板體對應疊合,並透過電阻輪焊之方式,垂直對應該第一、二金屬板體對應疊合之部位進行封邊作業並預留一注水抽氣區域; 將前述第一、二金屬板體1a、1b對應疊合並於兩者之間形成一密閉腔室1e,並於所述第一、二金屬板體1a、1b對應疊合的外緣部分透過電阻輪焊之方式進行結合,進行電阻輪焊工作時,所述電阻輪焊機具主要與該第一、二金屬板體1a、1b呈垂直設置,令所述電阻輪焊機具2所產生之放電熔熔垂直穿設進入該第一、二金屬板體1a、1b,並直接穿透設置於上部之第一金屬板體1a整體後再穿透位於該第一金屬板體1a下部之第二金屬板體1b板厚約三分之一至三分之二處,最後保留欲進行注水抽氣之區域1f將其他部位封閉,進行所述電阻輪焊工作時較佳係於該所述電阻輪焊機具2與該第一、二金屬板體1a、1b處通以氬氣進行惰性氣體保護,避免進行電阻輪焊工作時產生氧化反應,亦可將電阻輪焊之工作環境設置於真空環境之下進行藉以避免焊接工作中遭受污染或氧化反應產生。 S4:進行抽真空及注水作業,最後將注水抽氣區域透過電阻輪焊之方式進行封閉。 進行抽氣注水作業,對進行封邊後之第一、二金屬板體1a、1b進行抽真空注入工作液體之作業,並最後將預留之注水抽氣區域1f相同透過電阻輪焊之方式進行封閉。 請參閱第8圖,係為本發明散熱元件製造方法之第二實施例步驟流程圖,如圖所示,本實施例部分說明實施與前述第一實施例相同,故在此將不再贅述,惟本實施例與前述第一實施例之差異在於前述第一、二金屬板體其中任一的一側形成一毛細結構此一步驟後更具有一步驟S5:於該第一、二金屬板體之間放置一毛細結構件,此一步驟之毛細結構件3係為單一結構體,該毛細結構件3設置於該第一、二金屬板體1a、1b之間,所述毛細結構件係為燒結粉末板體或纖維體或網格體或波浪板或具有複數溝槽之板體其中任一。 請參閱第9圖,係為本發明散熱元件製造方法之第三實施例步驟流程圖,如圖所示,本實施例部分說明實施與前述第一實施例相同,故在此將不再贅述,惟本實施例與前述第一實施例之差異在於前述第一、二金屬板體其中任一的一側形成一毛細結構;此一步驟後更具有一步驟S6:於前述第一、二金屬板體其中任一的一側形成一支撐結構; 所述支撐結構1c係可為透過外力變形或透過切銷加工或透過外加元件作為支撐之支撐件,所述切銷加工係為選擇於該第一、二金屬板體1a、1b其中任一板體之一側透過切銷方式形成凸出結構向另一板體抵頂支撐;所述外力形變之支撐結構係為選擇於該第一、二金屬板體1a、1b其中任一板體的一側施加外力向另一側凹陷所形成的支撐結構;所述外加元件係透過於該第一、二金屬板體1a、1b兩者之間設置支撐體如支撐柱作為支撐結構,本實施例係選擇以外力加壓加工所形成之支撐結構作為說明實施例並不引以為限。 本發明主要透過以電阻輪焊之方式改善商業純鈦或鈦金屬或銅材質不易結合之缺點,並改善電阻輪焊時電阻輪焊器具與欲接受電阻輪焊之第一、二金屬板體1a、1b垂直對應設置,令電阻輪焊所產生之放電熔熔相同垂直穿透該第一金屬板體1a及第二金屬板體1b厚度的三分之一至三分之二處最後令兩者完整接合,提升第一、二金屬板體1a、1b之結合性及密閉性,及改善習知均溫板或平板式熱管對位不易之缺失。Please refer to Figs. 2 and 3, which are three-dimensional exploded and assembled views of the first embodiment of the heat dissipation element of the present invention. As shown in the figure, the heat dissipation element includes: a body; the body 1 has a first Metal plate body 1a and a second metal plate body 1b, the material of the first and second metal plate bodies 1a, 1b is gold, silver, iron, copper, aluminum, commercial pure titanium, stainless steel or other metals with thermal conductivity In any one of them, the first and second metal plates 1a, 1b together define a closed chamber 1e, and the surface of the closed chamber 1e has at least one capillary structure 1d (which may be a sintered powder body or a fiber body or a grid) Any one of the body or the groove), the capillary structure 1d is selected to be provided in any one of the first and second metal plate bodies 1a, 1b, the sealed chamber 1e is filled with a working liquid 1g, and the body 1 is closed chamber The outer edge of the chamber 1e has a lip 1h, the lip 1h has a sintered weld 1i, the sintered weld 1i vertically connects the first and second metal plate bodies 1a, 1b, and the sintered weld 1i penetrates vertically The entire thickness of the first metal plate body 1a extends to one third to two thirds of the thickness of the second metal plate body 1b. The body 1 has a support structure 1c, which can be a support member that is deformed by external force or processed by pin cutting or through an external element as a support. The pin cutting process is selected from the first and second One side of any one of the metal plate bodies 1a, 1b forms a protruding structure through a pin cutting method (such as milling) to support the other plate body; the externally deformed support structure 1c is selected for this A supporting structure 1c formed by applying an external force to one side of any one of the first and second metal plate bodies 1a and 1b and recessing the other side; the additional element is transmitted through the first and second metal plate bodies 1a and 1b Setting a supporting body such as a supporting column between the two as the supporting structure 1c is not limited. Please refer to FIG. 4, which is an exploded perspective view of the second embodiment of the heat dissipating element of the present invention. As shown in the figure, the part of the description of this embodiment is the same as the aforementioned first embodiment, so it will not be repeated here. The difference between this embodiment and the foregoing first embodiment is that a capillary structure 3 is placed between the first and second metal plates. The capillary structure in this step is a single structure, and the capillary structure 3 is disposed on the Between the first and second metal plate bodies 1a, 1b, the capillary structure 3 is any one of a sintered powder plate body or a fiber body or a grid body or a wave plate or a plate body with a plurality of grooves, and penetrates through the The capillary structure 3 can provide auxiliary capillary force and increase the efficiency of vapor-liquid circulation. Please refer to FIG. 5, which is a flow chart of the steps of the first embodiment of the manufacturing method of the heat dissipating element of the present invention, and also refer to the processing schematic diagrams of FIGS. 6 and 7. As shown in the figure, the manufacturing method of the heat dissipating element of the present invention includes the following Steps: S1: providing a first metal plate body and a second metal plate body; providing a first metal plate body 1a and a second metal plate body 1b, the first and second metal plate bodies 1a, 1b are the same size Or any one of them, the first and second metal plates 1a, 1b can be any one of copper, aluminum, stainless steel, titanium alloy, and commercial pure titanium. In this embodiment, the combination of commercial pure titanium and copper is selected as The embodiments are described but not limited. S2: forming a capillary structure on one side of any one of the first and second metal plate bodies; forming a capillary structure on one side corresponding to any one or any one of the first and second metal plate bodies 1a, 1b 1d, the capillary structure 1d is any one of sintered powder, mesh body, groove or fiber body. S3: The first and second metal plates are stacked correspondingly, and through resistance wheel welding, the edges corresponding to the first and second metal plates corresponding to the stacked portions are vertically sealed and a water injection is reserved for air extraction Area; the aforementioned first and second metal plates 1a, 1b are stacked correspondingly between them to form a sealed chamber 1e, and the outer edges of the first and second metal plates 1a, 1b correspondingly overlap Through the combination of resistance wheel welding, when performing resistance wheel welding, the resistance wheel welding machine is mainly arranged perpendicular to the first and second metal plates 1a, 1b, so that the resistance wheel welding machine 2 The generated discharge melt penetrates vertically into the first and second metal plate bodies 1a, 1b, and directly penetrates the entirety of the first metal plate body 1a provided on the upper part and then penetrates the lower part of the first metal plate body 1a The thickness of the second metal plate body 1b is about one third to two thirds, and finally the area 1f to be filled with water is pumped and the other parts are closed, and the resistance wheel welding work is preferably based on this Resistance wheel welding machine 2 and the first and second metal plates 1a and 1b are protected by inert gas through argon gas to avoid oxidation reaction during resistance wheel welding. The working environment of resistance wheel welding can also be set at Carried out under vacuum to avoid contamination or oxidation during welding. S4: Carry out vacuuming and water injection operations, and finally seal the water injection and suction area through resistance wheel welding. Carry out suction and water injection, vacuumize and inject the working liquid into the first and second metal plates 1a, 1b after edge banding, and finally perform the same reserved water injection and suction area 1f through resistance wheel welding Closed. Please refer to FIG. 8, which is a flow chart of the steps of the second embodiment of the manufacturing method of the heat dissipating element of the present invention. As shown in the figure, the part of the description of this embodiment is the same as the first embodiment described above, so it will not be repeated here. However, the difference between this embodiment and the foregoing first embodiment is that a capillary structure is formed on either side of the first and second metal plates. After this step, there is a step S5: the first and second metal plates A capillary structure part is placed between them. The capillary structure part 3 in this step is a single structure body. The capillary structure part 3 is disposed between the first and second metal plates 1a, 1b. The capillary structure part is Sintered powder plate body or fiber body or grid body or wave plate or plate body with plural grooves. Please refer to FIG. 9, which is a flow chart of the steps of the third embodiment of the manufacturing method of the heat dissipating element of the present invention. As shown in the figure, the part of this embodiment is the same as the first embodiment described above, so it will not be repeated here. However, the difference between this embodiment and the aforementioned first embodiment is that a capillary structure is formed on either side of the aforementioned first and second metal plates; after this step, there is a step S6: the aforementioned first and second metal plates A support structure is formed on either side of the body; the support structure 1c may be a support member that is deformed by external force or processed by a pin cutting process or through an external component, and the pin cutting process is selected from the first 1. One side of any one of the two metal plates 1a, 1b forms a protruding structure through the pin-cutting method to support the other plate; the supporting structure of the external force deformation is selected from the first and second metals A supporting structure formed by applying an external force to one side of one of the plate bodies 1a, 1b and recessing the other side; the additional element is provided between the first and second metal plate bodies 1a, 1b For example, a supporting column is used as a supporting structure. In this embodiment, a supporting structure formed by external force press processing is selected as an illustrative embodiment and is not limited thereto. The present invention mainly improves the defect that commercial pure titanium or titanium metal or copper materials are not easy to combine by means of resistance wheel welding, and improves resistance wheel welding equipment and the first and second metal plates 1a to be subjected to resistance wheel welding during resistance wheel welding , 1b are arranged vertically, so that the discharge melting produced by resistance wheel welding penetrates the first metal plate body 1a and the second metal plate body 1b by one-third to two-thirds of the thickness at the same time. Complete bonding, improve the adhesion and tightness of the first and second metal plates 1a, 1b, and improve the lack of easy alignment of the conventional temperature plate or flat plate heat pipe.

1‧‧‧本體 1a‧‧‧第一金屬板體 1b‧‧‧第二金屬板體 1c‧‧‧支撐結構 1d‧‧‧毛細結構 1e‧‧‧密閉腔室 1f‧‧‧注水抽氣之區域 1g‧‧‧工作液體 1h‧‧‧唇部 1i‧‧‧燒結焊部 2‧‧‧電阻輪焊機具 3‧‧‧毛細結構件 1‧‧‧Body 1a‧‧‧The first metal plate 1b‧‧‧Second metal plate 1c‧‧‧support structure 1d‧‧‧Capillary structure 1e‧‧‧Closed chamber 1f‧‧‧Water injection area 1g‧‧‧working liquid 1h‧‧‧lip 1i‧‧‧sintered welding department 2‧‧‧Resistance wheel welding machine 3‧‧‧Capillary structure

第1圖係為習知均溫板示意圖; 第1a圖係為習知均溫板示意圖; 第2圖係為本發明散熱元件之第一實施例之立體分解圖; 第3圖係為本發明散熱元件之第一實施例之剖視圖; 第4圖係為本發明散熱元件之第二實施例之立體分解圖; 第5圖係為本發明散熱元件製造方法之第一實施例步驟流程圖; 第6圖係為本發明散熱元件製造方法之第一實施例加工示意圖; 第7圖係為本發明散熱元件製造方法之第一實施例加工示意圖; 第8圖係為本發明散熱元件製造方法之第二實施例步驟流程圖; 第9圖係為本發明散熱元件製造方法之第三實施例步驟流程圖。Figure 1 is a schematic diagram of a conventional temperature equalization plate; Figure 1a is a schematic diagram of a conventional temperature equalization plate; Figure 2 is a three-dimensional exploded view of the first embodiment of the heat dissipation element of the present invention; Figure 3 is the present invention Sectional view of the first embodiment of the heat dissipation element; FIG. 4 is a perspective exploded view of the second embodiment of the heat dissipation element of the present invention; FIG. 5 is a flowchart of steps of the first embodiment of the method of manufacturing the heat dissipation element of the present invention; 6 is a schematic view of the first embodiment of the manufacturing method of the heat dissipating element of the present invention; FIG. 7 is a schematic view of the first embodiment of the manufacturing method of the heat dissipating element of the present invention; Step flow chart of the second embodiment; FIG. 9 is a step flow chart of the third embodiment of the manufacturing method of the heat dissipating element of the present invention.

1‧‧‧本體 1‧‧‧Body

1a‧‧‧第一金屬板體 1a‧‧‧The first metal plate

1b‧‧‧第二金屬板體 1b‧‧‧Second metal plate

1c‧‧‧支撐結構 1c‧‧‧support structure

1d‧‧‧毛細結構 1d‧‧‧Capillary structure

1e‧‧‧密閉腔室 1e‧‧‧Closed chamber

1h‧‧‧唇部 1h‧‧‧lip

Claims (14)

一種散熱元件,係包含: 一本體,具有一第一金屬板體及一第二金屬板體,所述第一、二金屬板體共同界定一密閉腔室,所述密閉腔室表面具有至少一毛細結構層並填充有一工作液體,該本體腔室外緣具有一唇部,所述唇部具有一燒結焊部,所述燒結焊部垂直連結該第一、二金屬板體。A heat dissipation element includes: a body having a first metal plate body and a second metal plate body, the first and second metal plate bodies collectively define a closed chamber, and the surface of the closed chamber has at least one The capillary structure layer is filled with a working liquid. The outer periphery of the body cavity has a lip portion, and the lip portion has a sintered welded portion, and the sintered welded portion vertically connects the first and second metal plate bodies. 如申請專利範圍第1項所述之散熱元件,所述燒結焊部垂直貫穿所述第一金屬板體整個板厚並延伸至所述第二金屬板體板厚之三分之一至三分之二處。According to the heat dissipating element described in item 1 of the patent application scope, the sintered welded portion vertically penetrates the entire thickness of the first metal plate body and extends to one third to three points of the thickness of the second metal plate The second place. 如申請專利範圍第1項所述之散熱元件,所述第一、二金屬板體之材質為金、銀、鐵、銅、鋁、商業純鈦、鈦合金、不銹鋼其中任一。As for the heat dissipating element described in item 1 of the patent application scope, the material of the first and second metal plates is any one of gold, silver, iron, copper, aluminum, commercial pure titanium, titanium alloy, and stainless steel. 如申請專利範圍第1項所述之散熱元件,所述本體具有一支撐結構,所述支撐結構係可為透過外力變形或透過切銷加工或透過外加元件作為支撐之支撐件,所述切銷加工係為選擇於該第一、二金屬板體其中任一板體之一側透過切銷方式形成凸出結構向另一板體抵頂支撐;所述外力形變之支撐結構係為選擇於該第一、二金屬板體其中任一板體的一側施加外力向另一側凹陷所形成的支撐結構;所述外加元件係透過於該第一、二金屬板體兩者之間設置支撐體如支撐柱作為支撐結構。According to the heat dissipation element described in item 1 of the patent application scope, the body has a support structure, and the support structure may be a support member which is deformed by external force or processed by a cutting pin or by an external element, the cutting pin The processing method is to select a side of any one of the first and second metal plate bodies to form a protruding structure to support the other plate body by cutting pins; the supporting structure of the external force deformation is selected for the A supporting structure formed by applying an external force to one side of one of the first and second metal plate bodies and recessing the other side; the additional element is disposed between the first and second metal plate bodies Such as the support column as a support structure. 如申請專利範圍第1項所述之散熱元件,所述第一、二金屬板體之間具有一毛細結構件,所述毛細結構件係為燒結粉末板體或纖維體或網格體或波浪板或具有複數溝槽之板體其中任一。According to the heat dissipating element described in item 1 of the patent application scope, there is a capillary structure between the first and second metal plates, and the capillary structure is a sintered powder plate or fiber or mesh or wave Either a plate or a plate body with plural grooves. 一種散熱元件製造方法,係包含下列步驟: 提供一第一金屬板體及一第二金屬板體; 於前述第一、二金屬板體其中任一的一側形成一毛細結構; 將所述第一、二金屬板體對應疊合,並透過電阻輪焊之方式,垂直對應該第一、二金屬板體對應疊合之部位進行封邊作業並預留一注水抽氣區域; 進行抽真空及注水作業,最後將注水抽氣區域透過電阻輪焊之方式進行封閉。A method for manufacturing a heat dissipating element includes the following steps: providing a first metal plate body and a second metal plate body; forming a capillary structure on either side of the first and second metal plate bodies; One and two metal plates are stacked correspondingly, and through resistance wheel welding, the edges corresponding to the first and second metal plates corresponding to the stacked areas are vertically sealed and a water injection and extraction area is reserved; In the water injection operation, the water injection and suction area is finally closed by resistance wheel welding. 如申請專利範圍第6項所述之散熱元件製造方法,其中所述第一、金屬板體之材質為銅、鋁、商業純鈦、不銹鋼其中任一。The method for manufacturing a heat dissipating element as described in item 6 of the patent application scope, wherein the material of the first and the metal plates is any one of copper, aluminum, commercial pure titanium, and stainless steel. 如申請專利範圍第6項所述之散熱元件製造方法,其中進行電阻輪焊時係通入氬氣作為惰性氣體防止氧化反應產生。The method for manufacturing a heat dissipating element as described in item 6 of the patent application scope, wherein argon gas is introduced as an inert gas to prevent the oxidation reaction during resistance wheel welding. 如申請專利範圍第6項所述之散熱元件製造方法,其中進行電阻輪焊工作時係於真空環境下進行。The method for manufacturing a heat dissipating element as described in item 6 of the patent application scope, in which resistance wheel welding is performed under a vacuum environment. 如申請專利範圍第6項所述之散熱元件製造方法,其中所述第一、二金屬板體大小相同或不同其中任一。The method for manufacturing a heat dissipating element as described in item 6 of the patent application range, wherein the first and second metal plates are the same size or different. 如申請專利範圍第6項所述之散熱元件製造方法,其中所述電阻輪焊係完全穿透該第一金屬板體並穿透第二金屬板體三分之一至三分之二厚度。The method of manufacturing a heat dissipating element as described in item 6 of the patent application range, wherein the resistance wheel welding completely penetrates the first metal plate body and penetrates the second metal plate body by one third to two thirds of the thickness. 如申請專利範圍第6項所述之散熱元件製造方法,其中於前述第一、二金屬板體其中任一的一側形成一毛細結構此一步驟後更具有一步驟於該第一、二金屬板體之間放置一毛細結構件,所述毛細結構件係為一網格體或一纖維體其中任一。The method for manufacturing a heat dissipating element as described in item 6 of the patent application scope, wherein a capillary structure is formed on either side of the first and second metal plates. After this step, there is a step for the first and second metals A capillary structure is placed between the plates, and the capillary structure is either a mesh or a fiber. 如申請專利範圍第6項所述之散熱元件製造方法,其中步驟提供一第一金屬板體及一第二金屬板體;更具有一步驟於前述第一、二金屬板體其中任一的一側形成一支撐結構。The method for manufacturing a heat dissipating element as described in item 6 of the patent application scope, wherein the steps provide a first metal plate body and a second metal plate body; there is also a step in any one of the first and second metal plate bodies A supporting structure is formed on the side. 如申請專利範圍第13項所述之散熱元件製造方法,其中所述支撐結構係可為透過外力變形或透過切銷加工或透過外加元件作為支撐之支撐件,所述切銷加工係為選擇於該第一、二金屬板體其中任一板體之一側透過切銷方式形成凸出結構向另一板體抵頂支撐;所述外力形變之支撐結構係為選擇於該第一、二金屬板體其中任一板體的一側施加外力向另一側凹陷所形成的支撐結構;所述外加元件係透過於該第一、二金屬板體兩者之間設置支撐體如支撐柱作為支撐結構。The method of manufacturing a heat dissipating element as described in item 13 of the patent application range, wherein the support structure may be a support member that is deformed by external force or processed by a pin or processed by an external element, and the pin cutting process is selected from One side of any one of the first and second metal plates forms a protruding structure through a pin-cutting method to support the other plate; the supporting structure of the external deformation is selected from the first and second metals A support structure formed by applying an external force on one side of one of the plate bodies to the other side; the additional element is provided between the first and second metal plates by providing a support body such as a support column as a support structure.
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