TW202004168A - Optical sensor - Google Patents
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Abstract
Description
本發明是有關於一種感測器,特別是指一種光學感測器。The invention relates to a sensor, in particular to an optical sensor.
以往有害物質感測膜進行感測有害物質後,可用比色法,以粗略地確認有害物質的濃度。然而,該方法存在有無法得知精確的有害物質的濃度,甚至,當有害物質濃度過低時,無法比對出來,因而無法精準地確認是否存在有害物質。此外,也可採用光譜儀器,確認有害物質的存在及其濃度。然而,該方法所使用的光譜儀器為大型設備且成本高,存在有不方便攜帶而無法立即確認有害物質的存在及其濃度的問題。In the past, after the hazardous substance sensing film sensed the hazardous substance, the colorimetric method can be used to roughly confirm the concentration of the hazardous substance. However, this method has an inaccurate concentration of harmful substances, and even when the concentration of harmful substances is too low, it cannot be compared, so it is impossible to accurately confirm the existence of harmful substances. In addition, spectroscopic instruments can also be used to confirm the presence and concentration of hazardous substances. However, the spectroscopic instrument used in this method is a large-scale device and has a high cost. There is a problem that it is inconvenient to carry and the presence and concentration of harmful substances cannot be confirmed immediately.
台灣專利公告第565941號揭露一種用於量測一種待測物的濃度的光學量測系統。該光學量測系統包括一個濃度感測裝置、一個光源,及一個光偵測器。該濃度感測裝置包括一個濃度偵測膜、一個入光波導,及一個出光波導。該入光波導及該出光波導耦接該濃度偵測膜。該光源設置在該入光波導的入光端。該光偵測器設置在該出光波導的出光端。在該濃度偵測膜與該待測物反應後,該光源發出一個第一光束,且該第一光束經由該入光波導的入光端傳遞至該濃度感測裝置,而被該濃度感測裝置接收,然後,該濃度感測裝置會放出一個第二光束,且該第二光束經由該出光波導的出光端傳遞至該光偵測器,而被該光偵測器接收。該第二光束的光強度能夠被用來推算出待測物的濃度。Taiwan Patent Announcement No. 565941 discloses an optical measurement system for measuring the concentration of an object to be measured. The optical measurement system includes a concentration sensing device, a light source, and a light detector. The concentration sensing device includes a concentration detection film, an optical waveguide, and an optical waveguide. The light input waveguide and the light output waveguide are coupled to the concentration detection film. The light source is arranged at the light entrance end of the light entrance waveguide. The light detector is arranged at the light output end of the light output waveguide. After the concentration detection film reacts with the analyte, the light source emits a first light beam, and the first light beam is transmitted to the concentration sensing device through the light entrance end of the light entrance waveguide and is sensed by the concentration The device receives, and then, the concentration sensing device emits a second light beam, and the second light beam is transmitted to the light detector through the light output end of the light output waveguide and received by the light detector. The light intensity of the second light beam can be used to calculate the concentration of the analyte.
雖該專利案的光學量測系統具有成本低且能夠即時量測出待測物的濃度的優點,但由於該專利案需透過入光波導及出光波導作為訊號傳輸的媒介,容易導致光訊號傳遞過程中產生光訊號失真的問題。再者,該專利案是利用光纖作為入光波導及出光波導,而光纖信號再接到光偵測器轉為電信號的時候,常因接點無法對準以及良好固定,造成光耦合不佳以及光信號的大幅衰減的問題,在環境有震動時,耦合點的微小位移就會造成雜訊或信號變異,而造成感測信號判讀困難。Although the optical measurement system of the patent case has the advantages of low cost and real-time measurement of the concentration of the analyte, the patent case needs to pass through the optical waveguide and the optical waveguide as the signal transmission medium, which is likely to cause optical signal transmission The problem of optical signal distortion in the process. In addition, the patent case uses optical fibers as the optical waveguide and the optical waveguide. When the optical fiber signal is connected to the photodetector and converted to an electrical signal, the optical coupling is often poor due to the inability to align the contacts and the good fixation. As well as the problem of large attenuation of the optical signal, when there is vibration in the environment, the slight displacement of the coupling point will cause noise or signal variation, which makes it difficult to interpret the sensed signal.
因此,本發明的目的,即在提供一種攜帶方便,且能夠避免訊號失真,並能夠立即確認有害物質的存在的光學感測器。Therefore, the object of the present invention is to provide an optical sensor that is easy to carry, can avoid signal distortion, and can immediately confirm the presence of harmful substances.
於是,本發明光學感測器,用來感測待測物,包含一個用來與該待測物作用而產生顏色變化的感測單元、一個位於該感測單元的下方的第一光穿透電極單元、一個位於該第一光穿透電極單元的下方的光接收單元、一個位於該光接收單元下方且包括光穿透部及遮光部的第二光穿透電極單元,及一個位於該第二光穿透電極單元下方且用來發射朝向該感測單元的光的發光單元。Therefore, the optical sensor of the present invention is used for sensing the object to be tested, and includes a sensing unit for generating a color change with the object to be tested, and a first light transmission under the sensing unit An electrode unit, a light receiving unit located below the first light penetrating electrode unit, a second light transmitting electrode unit located below the light receiving unit and including a light penetrating portion and a light shielding portion, and a The two light penetrating the light emitting unit below the electrode unit and used to emit light toward the sensing unit.
本發明的功效在於:透過該感測單元、該第一光穿透電極單元、該光接收單元、該第二光穿透電極單元,及該發光單元在一個堆疊方向上堆疊,使得由該發光單元發射的光能夠直接進入該感測單元,接著,該感測單元會提供一個反射光,而該反射光能夠直接進入該光接收單元並被該光接收單元吸收,此時,藉由該第一光穿透電極單元及該第二光穿透電極單元,能夠直接且立即將反射光的光強度轉變成為電流訊號,而能夠直接反映出是否存在待測物。此外。還可藉由光強度變化造成的電流訊號變化,反映出該待測物的濃度。The effect of the present invention is that: through the sensing unit, the first light penetrating electrode unit, the light receiving unit, the second light penetrating electrode unit, and the light emitting unit are stacked in a stacking direction, so that the light is emitted by the The light emitted by the unit can directly enter the sensing unit, and then the sensing unit can provide a reflected light, and the reflected light can directly enter the light receiving unit and be absorbed by the light receiving unit. A light penetrating electrode unit and the second light penetrating electrode unit can directly and immediately convert the light intensity of the reflected light into a current signal, and can directly reflect the presence of the object to be measured. Also. The concentration of the test object can also be reflected by the change in current signal caused by the change in light intensity.
在本發明被詳細描述前,應當注意在以下的說明內容中,類似的元件是以相同的編號來表示。Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same number.
參閱圖1及圖2,本發明光學感測器的一個第一實施例,用來感測待測物,且包含一個感測單元1、一個第一光穿透電極單元2、一個光接收單元3、一個第二光穿透電極單元4、一個用來發射光的發光單元5,及一個光穿透支撐基板6。該光學感測器的第一光穿透電極單元2及該第二光穿透電極單元4與一個電流檢測器(圖未示)電連接。Referring to FIGS. 1 and 2, a first embodiment of the optical sensor of the present invention is used to sense the object to be measured, and includes a
該待測物例如但不限於有害物質。該有害物質例如但不限於甲醛、尿素,或汞等。該感測單元1是依據該待測物進行調整或選擇。該感測單元1的物理型態可以是固態、凝膠態或溶液態。該感測單元1的結構型態可以是由感測件所形成的膜或容置有感測件的光穿透器件。該感測件例如但不限於為由包含4-胺基肼基-5-巰基-1,2,4-三氮唑(4-amino hydrazino-5-mercapto-1,2,4-triazole,簡稱AHMT)的組分所形成的感測件,或由包含硫酸二(羥胺)(hydroxylamine sulfate)與甲基黃(methyl yellow)的組分所形成的感測件,或由包含羅丹明類物質的組分所形成的感測件,或由包含尿素酶(urease)及苯酚紅(phenol red)的組分所形成的感測件。該羅丹明類物質例如但不限於羅丹明(rhodamine)或羅丹明腙(rhodamine hydrazone)等。在該第一實施例中,該待測物為甲醛,而該感測單元1包含一個由包含硫酸二(羥胺)與甲基黃的組分所形成的感測溶液及一個容置該感測溶液的光穿透容器(圖未示),或,該待測物為尿素,而該感測單元1包含一個由包含尿素酶及苯酚紅的組分所形成的感測溶液及一個容置該感測溶液的光穿透容器(圖未示)。該等感測溶液的體積為3ml。The test object is, for example but not limited to, a harmful substance. The harmful substance is, for example, but not limited to formaldehyde, urea, or mercury. The
該第一光穿透電極單元2位於該感測單元1的下方,且接觸該感測單元1或鄰近該感測單元1。當該第一光穿透電極單元2鄰近該感測單元1時,該第一光穿透電極單元2與該感測單元1的距離例如0.1cm至0.5cm。該第一光穿透電極單元2的厚度範圍為5nm至999nm。該第一光穿透電極單元2包括一層光穿透電極層21。該光穿透電極層21的材質例如但不限於氧化銦錫或金屬等。該透明支撐基板的材質例如但不限於玻璃或塑膠等。在該第一實施例中,該第一光穿透電極單元2的厚度為300nm,且該光穿透電極層21為氧化銦錫層。The first light-transmitting
該光接收單元3位於該第一光穿透電極單元2的下方,且連接該第一光穿透電極單元2的光穿透電極層21。該光接收單元3的厚度範圍為20nm至2,000nm。該光接收單元3包括一層光接收層31。該光接收層31的材質例如但不限於吸光後能夠產生電子電洞對的有機材料或摻雜n型或p型物質的材料。該有機材料例如但不限於9,9-二辛基芴-N-(4-丁基苯基)二苯胺共聚物{poly[9,9-dioctylfluorene-co-N-(4-butylphenyl)diphenylamine],簡稱TFB}、苯基-碳61-丁酸甲酯(phenyl-C61-butyric acid methyl ester,簡稱PC61BM)、聚{4,8-二(5-(2-乙基己基)噻吩-2-基)苯并[1,2-b;4,5-b’]二噻吩-2,6-二基-4-(2-乙基己氧基羰基)-3-氟基-噻吩并[3,4-b]噻吩-2,6-二基)}{poly[4,8-bis(5-(2-ethylhexyl)thiophene-2-yl)-benzo[1,2-b;4,5-b’]dithiophene-2,6-diyl-4-(2-ethylhexyloxycarbonyl)-3-fluoro-thieno[3,4-b]-thiophene))-2,6-diyl],簡稱PBDTTT-EFT}、聚(3-己烷基噻吩)[poly(3-hexylthiophene),簡稱P3HT]、聚{4,8-二(5-(2-乙基己基)噻吩-2-基)苯并[1,2-b;4,5-b’]二噻吩-2,6-二基-4-(2-乙基己醯基)-噻吩并[3,4-b]噻吩-2,6-二基}({poly[4,8-bis(5-(2-ethylhexyl)thiophene-2-yl)-benzo[1,2-b;4,5-b’]dithiophene-2,6-diyl-4-(2-ethylhexanoyl)-thieno[3,4-b]-thiophene)-2,6-diyl]},簡稱PBDTTT-CT),或苯基-碳71-丁酸甲酯(phenyl-C71-butyric acid methyl ester,簡稱PC71BM)等。在該第一實施例中,該光接收單元3的厚度為400nm,且該光接收層31為包含PBDTTT-CT及PC71BM的光接收層,該PBDTTT-CT及PC71BM的重量比為1:1.5。The
該第二光穿透電極單元4位於該光接收單元3的下方,且連接該光接收單元3。該第二光穿透電極單元4的厚度範圍為10nm至900nm。該第二光穿透電極單元4包括一層電極層43。該電極層43的材質例如但不限於鋁等。該電極層43的結構型態為指叉型,且該電極層43包括一個作為一個遮光部42的遮光體431,及複數個共同配合作為一個光穿透部41且貫穿該遮光體431並供該發光單元5的光通過而到達該感測單元1的貫孔430。該等貫孔430呈矩形。該等貫孔430的尺寸範圍為200nm至5mm。在該第一實施例中,該第二光穿透電極單元4的厚度為100nm、該電極層43為鋁層,且該等貫孔430的尺寸為110μm。值得說明的是,該電極層43的結構型態為指叉型時,由該發光單元5的光部分會被該電極層43的遮光體431遮住,以避免被該光接收單元3吸收,繼而能夠降低背景電流值(如後所述)。此外,該電極層43的結構型態不限於指叉型,只要該電極層43的遮光體431能夠達到遮光效果的任何結構型態皆可,且該等貫孔430的形狀也不限於矩形,只要能夠讓該發光單元5的光通過的任何形狀皆可。The second light penetrating
該光穿透支撐基板6位於該第二光穿透電極單元4的下方,且連接該第二光穿透電極單元4的電極層43。該光穿透支撐基板6的材質例如但不限於玻璃或塑膠等。該光穿透支撐基板6的厚度範圍為200μm至2mm。值得說明的是,該光穿透支撐基板6是用來支撐其上方的各元件中任一者或全體,因此,該光穿透支撐基板6的設置與否以及設置的位置是依據其上方的各元件的機械強度(例如硬度等)進行設置及位置的調整。此外,當其上方的各元件的機械強度是足夠時,是可不需要設置該光穿透支撐基板6。在該第一實施例中,該光穿透支撐基板6為玻璃基板,且該光穿透支撐基板6的厚度為700μm。The light
該發光單元5位於該光穿透支撐基板6的下方。該發光單元5發射的光依據該感測單元1與該待測物作用後所產生的顏色進行選擇,也就是,對應感測單元1與該待測物作用後吸收光譜有變化的光波段。該發光單元5例如但不限於發光二極體燈具或雷射光燈具。在該第一實施例中,當待測物為尿素時,該發光單元5為發射主波長為518nm的光且照度為18300lux的綠光發光二極體燈具,或,當待測物為甲醛時,該發光單元5為發射主波長為532nm的光且照度為65W/m2
的綠光雷射。The
操作本發明光學感測器時,首先,將該第一光穿透電極單元2及該第二光穿透電極單元4電連接一個電器設備,且該電器設備包括一個電壓供應器及一個電流檢測器。使該電壓供應器提供一個定偏壓,且使該發光單元5發射出光。該光會經由該第二光穿透電極單元4的光穿透部41並通過該光接收單元3及該第一光穿透電極單元2,而到達該感測單元1。隨即該感測單元1會提供一個第一個反射光,並被該光接收單元3吸收。當該光接收單元3吸收該第一反射光後,藉由該第一光穿透電極單元2與該第二光穿透電極單元4,將該第一反射光的光訊號轉變成電流訊號,並藉由該電流檢測器,獲得一個背景電流值。然後,將該待測物與該感測單元1接觸並產生作用,而使該感測單元1產生顏色變化,此時,該發光單元5發射出的光會經由該第二光穿透電極單元4的光穿透部41並通過該光接收單元3及該第一光穿透電極單元2,而到達該感測單元1。該感測單元1因產生顏色變化會提供一個有別於該第一反射光的第二反射光,而該第二反射光會通過該第二光穿透電極單元4而被該光接收單元3吸收。當該光接收單元3吸收該第二反射光後,再藉由該第一光穿透電極單元2與該第二光穿透電極單元4,將該第二反射光的光訊號轉變成電流訊號,並再藉由該電流檢測器,獲得一個檢測電流值。藉由該背景電流值及該檢測電流值的比對,獲得一個電流差值或電流變化率,並透過該電流差值或電流變化率可以得知是否有該待測物的存在。此外,透過建立已知濃度的待測物的濃度值與其檢測電流值、其電流差值或其電流變化率的資料庫,進一步還可以得知未知濃度的待測物的濃度值。When operating the optical sensor of the present invention, first, the first light penetrating
參閱圖3,本發明光學感測器的一第二實施例與該第一實施例不同在於:該光穿透支撐基板6的位置。在該第二實施例中,該光穿透支撐基板6位於該感測單元1與該第一光穿透電極單元2間,且連接並支撐該第一光穿透電極單元2的光穿透電極層21。Referring to FIG. 3, a second embodiment of the optical sensor of the present invention differs from the first embodiment in that the light penetrates the
在本發明中,提供數個感測數據,且使用該第二實施例的光學感測器進行,參閱表1至表4。In the present invention, several sensing data are provided and are performed using the optical sensor of the second embodiment, refer to Table 1 to Table 4.
表1
表2
表3
表4
參閱圖4及圖5,本發明光學感測器的一第三實施例與該第一實施例不同在於:該第一光穿透電極單元2及該光接收單元3。在該第三實施例中,該第一光穿透電極單元2包括一層光穿透電極層22,及複數個貫穿該光穿透電極層22且供該發光單元5的光通過的穿孔20。該第一光穿透電極單元2的結構型態為指叉型,且該光穿透電極層22與該第二光穿透電極單元4的電極層43的遮光體431在空間上是重疊的(參閱圖5)。該等穿孔20的尺寸範圍為200nm至5mm。該光接收單元3包括一層形成有複數個貫穿且供該發光單元5的光通過的通孔30的光接收層32。該等通孔30的尺寸範圍為200nm至5mm。該第一光穿透電極單元2的光穿透電極層22的該等穿孔20、該光接收單元3的光接收層32的該等通孔30,及該第二穿透電極單元4的電極層43的該等貫孔430在空間上分別相連通且重疊,以使該發光單元5發射的光能夠依序通過該等貫孔430、該等通孔30,及該等穿孔20,而到達該感測單元1。Referring to FIGS. 4 and 5, a third embodiment of the optical sensor of the present invention differs from the first embodiment in that the first light penetrating
值得說明的是,該第三實施例的光學感測器的光接收單元3的該等通孔30能夠供由該發光單元5的光直接通過,而減少與該光接收單元3接觸而被吸收,繼而能夠降低背景電流值,然而,在該第一實施例的光學感測器及該第二實施例的光學感測器中,由該發光單元5的光皆會接觸該光接收單元3而被吸收,導致背景電流質較大,因此,相較於該第一實施例的光學感測器及該第二實施例的光學感測器,該第三實施例的光學感測器在感測上更精準。It is worth noting that the through
參閱圖6,本發明光學感測器的一第四實施例,用來感測待測物,且包含一個感測單元1、一個第一光穿透電極單元2、一個光接收單元3、一個第二光穿透電極單元4、一個用來發射光的發光單元5,及一個光穿透支撐基板6。Referring to FIG. 6, a fourth embodiment of the optical sensor of the present invention is used to sense the object to be measured, and includes a
該待測物、該感測單元1、該第一光穿透電極單元2,及該光接收單元3與該第一實施例的該待測物、該感測單元1、該第一光穿透電極單元2,及該光接收單元3相同,故不再贅述。The object under test, the
該第二光穿透電極單元4位於該光接收單元3的下方,且連接該光接收單元3。該第二光穿透電極單元4包括一層遮光層44及一層光穿透電極層46。該遮光層44位於該光接收單元3的下方,且嵌入該光接收單元3,並包括一個作為一個遮光部42的遮光體441,及複數個共同配合作為一個光穿透部41且貫穿該遮光體441並供該發光單元5的光通過而到達該感測單元1的貫孔440。該等貫孔440的尺寸範圍為50nm至5mm。該光穿透電極層46位於該遮光層44的下方,且連接該遮光層44。該光穿透電極層46的厚度範圍為10nm至900nm。該光穿透支撐基板6位於該第二光穿透電極單元4的下方,且連接該第二光穿透電極單元4的光穿透電極層46。該發光單元5位於該光穿透支撐基板6的下方。The second light penetrating
值得說明的是,該第一實施例及該第二實施例的光學感測器的第二光穿透電極單元4在製造上不易而存在有成本高且良率低的問題,但該第四實施例的光學感測器的第二光穿透電極單元4在製造上容易,因而能夠降低成本及提高良率。因此,相較於該第一實施例及該第二實施例的光學感測器,該第四實施例的光學感測器具有成本低且良率高的優點。It is worth noting that the second light penetrating
參閱圖7,本發明光學感測器的一第五實施例與該第四實施例不同在於:該第二光穿透電極單元4。在該第五實施例中,該第二光穿透電極單元4的光穿透電極層46位於該光接收單元3及該光穿透支撐基板6間,且連接該光接收單元3及該光穿透支撐基板6。該第二光穿透電極單元4的遮光層44位於該光穿透支撐基板6及該發光單元5間,且連接該光穿透支撐基板6。Referring to FIG. 7, a fifth embodiment of the optical sensor of the present invention differs from the fourth embodiment in that the second light penetrating
參閱圖8,本發明光學感測器的一第六實施例與該第四實施例不同在於:該第二光穿透電極單元4。在該第六實施例中,該第二光穿透電極單元4的光穿透電極層46連接該光接收單元3。該第二光穿透電極單元4的遮光層44位於該光穿透電極層46及該光穿透支撐基板6間,且連接該光穿透電極層46及該光穿透支撐基板6。Referring to FIG. 8, a sixth embodiment of the optical sensor of the present invention differs from the fourth embodiment in that the second light penetrating
綜上所述,透過該感測單元1、該第一光穿透電極單元2、該光接收單元3、該第二光穿透電極單元4,及該發光單元5在一個堆疊方向上堆疊,使得由該發光單元5發射的光能夠直接進入該感測單元1,接著,該感測單元1會提供一個反射光,而該反射光能夠直接進入該光接收單元3並被該光接收單元3吸收,此時,藉由該第一光穿透電極單元2及該第二光穿透電極單元4,能夠直接且立即將反射光的光強度轉變成為電流訊號,而能夠直接反映出是否存在待測物。此外。還可藉由光強度變化造成的電流訊號變化,反映出該待測物的濃度,故確實能達成本發明的目的。In summary, through the
惟以上所述者,僅為本發明的實施例而已,當不能以此限定本發明實施的範圍,凡是依本發明申請專利範圍及專利說明書內容所作的簡單的等效變化與修飾,皆仍屬本發明專利涵蓋的範圍內。However, the above are only examples of the present invention, and the scope of implementation of the present invention cannot be limited by this, any simple equivalent changes and modifications made according to the scope of the patent application of the present invention and the content of the patent specification are still classified as Within the scope of the invention patent.
1‧‧‧感測單元2‧‧‧第一光穿透電極單元21‧‧‧光穿透電極層22‧‧‧光穿透電極層20‧‧‧穿孔3‧‧‧光接收單元31‧‧‧光接收層32‧‧‧光接收層30‧‧‧通孔4‧‧‧第二光穿透電極單元41‧‧‧光穿透部42‧‧‧遮光部43‧‧‧電極層431‧‧‧遮光體430‧‧‧貫孔44‧‧‧遮光層441‧‧‧遮光體440‧‧‧貫孔46‧‧‧光穿透電極層5‧‧‧發光單元6‧‧‧光穿透支撐基板1‧‧‧
本發明的其他的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中: 圖1是本發明光學感測器的一第一實施例的一示意剖視圖; 圖2是該第一實施例的一示意立體分解圖; 圖3是本發明光學感測器的一第二實施例的一示意剖視圖; 圖4是本發明光學感測器的一第三實施例的一示意剖視圖; 圖5是該第三實施例的一示意立體分解圖; 圖6是本發明光學感測器的一第四實施例的一示意剖視圖; 圖7是本發明光學感測器的一第五實施例的一示意剖視圖;及 圖8是本發明光學感測器的一第六實施例的一示意剖視圖。Other features and functions of the present invention will be clearly presented in the embodiments with reference to the drawings, in which: FIG. 1 is a schematic cross-sectional view of a first embodiment of the optical sensor of the present invention; FIG. 2 is the first A schematic exploded view of the embodiment; FIG. 3 is a schematic cross-sectional view of a second embodiment of the optical sensor of the present invention; FIG. 4 is a schematic cross-sectional view of a third embodiment of the optical sensor of the present invention; 5 is a schematic perspective exploded view of the third embodiment; FIG. 6 is a schematic cross-sectional view of a fourth embodiment of the optical sensor of the present invention; FIG. 7 is a fifth embodiment of the optical sensor of the present invention A schematic cross-sectional view; and FIG. 8 is a schematic cross-sectional view of a sixth embodiment of the optical sensor of the present invention.
1‧‧‧感測單元 1‧‧‧sensing unit
2‧‧‧第一光穿透電極單元 2‧‧‧First light penetrating electrode unit
43‧‧‧電極層 43‧‧‧electrode layer
430‧‧‧貫孔 430‧‧‧through hole
21‧‧‧光穿透電極層 21‧‧‧Light penetrating electrode layer
3‧‧‧光接收單元 3‧‧‧Light receiving unit
4‧‧‧第二光穿透電極單元 4‧‧‧Second light penetrating electrode unit
5‧‧‧發光單元 5‧‧‧Lighting unit
6‧‧‧光穿透支撐基板 6‧‧‧light penetration support substrate
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