TW201944172A - Photosensitive composition, cured film, method for manufacturing color filter, color filter, solid-state imaging element, and image display device - Google Patents
Photosensitive composition, cured film, method for manufacturing color filter, color filter, solid-state imaging element, and image display deviceInfo
- Publication number
- TW201944172A TW201944172A TW108110901A TW108110901A TW201944172A TW 201944172 A TW201944172 A TW 201944172A TW 108110901 A TW108110901 A TW 108110901A TW 108110901 A TW108110901 A TW 108110901A TW 201944172 A TW201944172 A TW 201944172A
- Authority
- TW
- Taiwan
- Prior art keywords
- group
- ring
- photosensitive composition
- compound
- formula
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C251/00—Compounds containing nitrogen atoms doubly-bound to a carbon skeleton
- C07C251/32—Oximes
- C07C251/62—Oximes having oxygen atoms of oxyimino groups esterified
- C07C251/64—Oximes having oxygen atoms of oxyimino groups esterified by carboxylic acids
- C07C251/66—Oximes having oxygen atoms of oxyimino groups esterified by carboxylic acids with the esterifying carboxyl groups bound to hydrogen atoms, to acyclic carbon atoms or to carbon atoms of rings other than six-membered aromatic rings
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C251/00—Compounds containing nitrogen atoms doubly-bound to a carbon skeleton
- C07C251/32—Oximes
- C07C251/62—Oximes having oxygen atoms of oxyimino groups esterified
- C07C251/64—Oximes having oxygen atoms of oxyimino groups esterified by carboxylic acids
- C07C251/68—Oximes having oxygen atoms of oxyimino groups esterified by carboxylic acids with at least one of the esterifying carboxyl groups bound to a carbon atom of a six-membered aromatic ring
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D219/00—Heterocyclic compounds containing acridine or hydrogenated acridine ring systems
- C07D219/04—Heterocyclic compounds containing acridine or hydrogenated acridine ring systems with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached to carbon atoms of the ring system
- C07D219/08—Nitrogen atoms
- C07D219/10—Nitrogen atoms attached in position 9
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D307/00—Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom
- C07D307/77—Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom ortho- or peri-condensed with carbocyclic rings or ring systems
- C07D307/78—Benzo [b] furans; Hydrogenated benzo [b] furans
- C07D307/82—Benzo [b] furans; Hydrogenated benzo [b] furans with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached to carbon atoms of the hetero ring
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D307/00—Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom
- C07D307/77—Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom ortho- or peri-condensed with carbocyclic rings or ring systems
- C07D307/92—Naphthofurans; Hydrogenated naphthofurans
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D307/00—Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom
- C07D307/77—Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom ortho- or peri-condensed with carbocyclic rings or ring systems
- C07D307/93—Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom ortho- or peri-condensed with carbocyclic rings or ring systems condensed with a ring other than six-membered
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D311/00—Heterocyclic compounds containing six-membered rings having one oxygen atom as the only hetero atom, condensed with other rings
- C07D311/02—Heterocyclic compounds containing six-membered rings having one oxygen atom as the only hetero atom, condensed with other rings ortho- or peri-condensed with carbocyclic rings or ring systems
- C07D311/04—Benzo[b]pyrans, not hydrogenated in the carbocyclic ring
- C07D311/58—Benzo[b]pyrans, not hydrogenated in the carbocyclic ring other than with oxygen or sulphur atoms in position 2 or 4
- C07D311/68—Benzo[b]pyrans, not hydrogenated in the carbocyclic ring other than with oxygen or sulphur atoms in position 2 or 4 with nitrogen atoms directly attached in position 4
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D335/00—Heterocyclic compounds containing six-membered rings having one sulfur atom as the only ring hetero atom
- C07D335/04—Heterocyclic compounds containing six-membered rings having one sulfur atom as the only ring hetero atom condensed with carbocyclic rings or ring systems
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D335/00—Heterocyclic compounds containing six-membered rings having one sulfur atom as the only ring hetero atom
- C07D335/04—Heterocyclic compounds containing six-membered rings having one sulfur atom as the only ring hetero atom condensed with carbocyclic rings or ring systems
- C07D335/06—Benzothiopyrans; Hydrogenated benzothiopyrans
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D335/00—Heterocyclic compounds containing six-membered rings having one sulfur atom as the only ring hetero atom
- C07D335/04—Heterocyclic compounds containing six-membered rings having one sulfur atom as the only ring hetero atom condensed with carbocyclic rings or ring systems
- C07D335/10—Dibenzothiopyrans; Hydrogenated dibenzothiopyrans
- C07D335/12—Thioxanthenes
- C07D335/14—Thioxanthenes with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached in position 9
- C07D335/18—Nitrogen atoms
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D471/00—Heterocyclic compounds containing nitrogen atoms as the only ring hetero atoms in the condensed system, at least one ring being a six-membered ring with one nitrogen atom, not provided for by groups C07D451/00 - C07D463/00
- C07D471/02—Heterocyclic compounds containing nitrogen atoms as the only ring hetero atoms in the condensed system, at least one ring being a six-membered ring with one nitrogen atom, not provided for by groups C07D451/00 - C07D463/00 in which the condensed system contains two hetero rings
- C07D471/06—Peri-condensed systems
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D491/00—Heterocyclic compounds containing in the condensed ring system both one or more rings having oxygen atoms as the only ring hetero atoms and one or more rings having nitrogen atoms as the only ring hetero atoms, not provided for by groups C07D451/00 - C07D459/00, C07D463/00, C07D477/00 or C07D489/00
- C07D491/02—Heterocyclic compounds containing in the condensed ring system both one or more rings having oxygen atoms as the only ring hetero atoms and one or more rings having nitrogen atoms as the only ring hetero atoms, not provided for by groups C07D451/00 - C07D459/00, C07D463/00, C07D477/00 or C07D489/00 in which the condensed system contains two hetero rings
- C07D491/04—Ortho-condensed systems
- C07D491/044—Ortho-condensed systems with only one oxygen atom as ring hetero atom in the oxygen-containing ring
- C07D491/048—Ortho-condensed systems with only one oxygen atom as ring hetero atom in the oxygen-containing ring the oxygen-containing ring being five-membered
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D491/00—Heterocyclic compounds containing in the condensed ring system both one or more rings having oxygen atoms as the only ring hetero atoms and one or more rings having nitrogen atoms as the only ring hetero atoms, not provided for by groups C07D451/00 - C07D459/00, C07D463/00, C07D477/00 or C07D489/00
- C07D491/02—Heterocyclic compounds containing in the condensed ring system both one or more rings having oxygen atoms as the only ring hetero atoms and one or more rings having nitrogen atoms as the only ring hetero atoms, not provided for by groups C07D451/00 - C07D459/00, C07D463/00, C07D477/00 or C07D489/00 in which the condensed system contains two hetero rings
- C07D491/04—Ortho-condensed systems
- C07D491/044—Ortho-condensed systems with only one oxygen atom as ring hetero atom in the oxygen-containing ring
- C07D491/052—Ortho-condensed systems with only one oxygen atom as ring hetero atom in the oxygen-containing ring the oxygen-containing ring being six-membered
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D495/00—Heterocyclic compounds containing in the condensed system at least one hetero ring having sulfur atoms as the only ring hetero atoms
- C07D495/02—Heterocyclic compounds containing in the condensed system at least one hetero ring having sulfur atoms as the only ring hetero atoms in which the condensed system contains two hetero rings
- C07D495/04—Ortho-condensed systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B19/00—Oxazine dyes
- C09B19/02—Bisoxazines prepared from aminoquinones
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B47/00—Porphines; Azaporphines
- C09B47/04—Phthalocyanines abbreviation: Pc
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B47/00—Porphines; Azaporphines
- C09B47/04—Phthalocyanines abbreviation: Pc
- C09B47/08—Preparation from other phthalocyanine compounds, e.g. cobaltphthalocyanineamine complex
- C09B47/10—Obtaining compounds having halogen atoms directly bound to the phthalocyanine skeleton
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B5/00—Dyes with an anthracene nucleus condensed with one or more heterocyclic rings with or without carbocyclic rings
- C09B5/62—Cyclic imides or amidines of peri-dicarboxylic acids of the anthracene, benzanthrene, or perylene series
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B57/00—Other synthetic dyes of known constitution
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B57/00—Other synthetic dyes of known constitution
- C09B57/04—Isoindoline dyes
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials For Photolithography (AREA)
- Optical Filters (AREA)
Abstract
本發明提供一種靈敏度優異的感光性組成物、硬化膜、濾色器之製造方法、濾色器、固體攝像元件及圖像顯示裝置。感光性組成物包含環狀肟化合物及聚合性化合物,該狀肟化合物分別具有包含肟基而形成之環狀結構的環狀肟部位及Taft的σ*常數值為3.5以上的電子吸引基。The invention provides a photosensitive composition having excellent sensitivity, a cured film, a method for manufacturing a color filter, a color filter, a solid-state imaging element, and an image display device. The photosensitive composition includes a cyclic oxime compound and a polymerizable compound, each of which has a cyclic oxime site having a cyclic structure formed by containing an oxime group, and an electron attracting group having a σ * constant value of 3.5 or more.
Description
本發明關於一種感光性組成物。更詳細而言,關於一種包含環狀肟化合物及聚合性化合物之感光性組成物。又,本發明關於一種使用前述感光性組成物而獲得之硬化膜。又,本發明關於一種使用前述感光性組成物之濾色器之製造方法、濾色器、固體攝像元件及圖像顯示裝置。The present invention relates to a photosensitive composition. More specifically, it relates to a photosensitive composition containing a cyclic oxime compound and a polymerizable compound. The present invention also relates to a cured film obtained by using the photosensitive composition. The present invention also relates to a method for manufacturing a color filter using the photosensitive composition, a color filter, a solid-state imaging device, and an image display device.
正在進行,使用包含聚合性化合物和光聚合起始劑之感光性組成物來形成用於濾色器等之硬化膜。作為光聚合起始劑,例如,已知有日本專利文獻1~3中所記載之肟化合物。
[先前技術文獻]
[專利文獻]Currently, a photosensitive composition containing a polymerizable compound and a photopolymerization initiator is used to form a cured film for a color filter and the like. As the photopolymerization initiator, for example, oxime compounds described in Japanese Patent Documents 1 to 3 are known.
[Prior technical literature]
[Patent Literature]
[專利文獻1]國際公開WO2008/078678號公報
[專利文獻2]日本特開2010-032985號公報
[專利文獻3]國際公開WO2002/100903號公報[Patent Document 1] International Publication No. WO2008 / 078678
[Patent Document 2] Japanese Patent Laid-Open No. 2010-032985
[Patent Document 3] International Publication WO2002 / 100903
作為感光性組成物所需之特性之一,可列舉曝光時為高靈敏度。近年來,期望進一步提高感光性組成物的靈敏度。One of the characteristics required for a photosensitive composition includes high sensitivity during exposure. In recent years, it has been desired to further increase the sensitivity of the photosensitive composition.
因此,本發明的目的為,提供一種靈敏度優異的感光性組成物、硬化膜、濾色器之製造方法、濾色器、固體攝像元件及圖像顯示裝置。Therefore, an object of the present invention is to provide a photosensitive composition, a cured film, a method for manufacturing a color filter, a color filter, a solid-state imaging device, and an image display device having excellent sensitivity.
依本發明人的研究,發現了能夠藉由使用後述之規定的環狀肟化合物作為光聚合起始劑來實現上述目的,以至完成了本發明。本發明提供以下。
<1>一種感光性組成物,其包含環狀肟化合物及聚合性化合物,該環狀肟化合物分別具有包含肟基而形成之環狀結構的環狀肟部位及Taft的σ*
常數值為3.5以上的電子吸引基。
<2>如<1>所述之感光性組成物,其中環狀肟化合物具有Taft的σ*
常數值為4以上的電子吸引基。
<3>如<1>或<2>所述之感光性組成物,其中電子吸引基為選自硝基、烷基磺醯基、芳基磺醯基及鎓基中的至少一個。
<4>如<1>至<3>中任一項所述之感光性組成物,其中環狀肟化合物所具有之環狀肟部位由下述式(a-1)表示;
[化學式1]
式中,R1
表示取代基,A表示包含肟基而形成之環,n表示0或1。
<5>如<1>至<4>中任一項所述之感光性組成物,其中環狀肟化合物具有在環狀肟部位鍵結有選自芳香族烴環及雜環中之至少一個環之結構。
<6>如<1>至<5>中任一項所述之感光性組成物,其中環狀肟化合物具有在環狀肟部位鍵結有包含咔唑環或二苯并噻吩環之稠環之結構。
<7>如<1>至<6>中任一項所述之感光性組成物,其中環狀肟化合物為由下述式(1)表示之化合物;
[化學式2]
式(1)中,X1
表示-O-、-CRx1
RX2
-、-S-、-NRx3
-或>C=N-O-Rx4
,Rx1
~Rx4
分別獨立地表示氫原子或取代基,Rx1
及Rx3
可以與R2
、R3
或由B表示之環鍵結而形成環,R1
~R3
分別獨立地表示取代基,L表示碳數1~3的伸烷基或-CRL1
=CRL2
-,RL1
及RL2
分別獨立地表示氫原子或取代基,B表示包含選自芳香族烴環及雜環中之至少一個之環,Z1
表示Taft的σ*
常數值為3.5以上的電子吸引基,n表示0或1,m表示0或1,q表示1以上的整數,o、p分別獨立地表示0以上的整數,p為2以上時,p個R2
可以相同,亦可不同,2個R2
彼此可以鍵結而形成環,o為2以上時,o個R3
可以相同,亦可不同,2個R3
彼此可以鍵結而形成環,q為2以上時,q個Z1
可以相同,亦可不同。
<8>如<1>至<6>中任一項所述之感光性組成物,其中環狀肟化合物為由下述式(2)表示之化合物;
[化學式3]
式(2)中,X1
表示-O-、-CRx1
RX2
-、-S-、-NRx3
-或>C=N-O-Rx4
,Rx1
~Rx4
分別獨立地表示氫原子或取代基,Rx1
及Rx3
可以與R2
或R3a
鍵結而形成環,L表示碳數1~3的伸烷基或-CRL1
=CRL2
-,RL1
及RL2
分別獨立地表示氫原子或取代基,R1
、R2
、R3a
及R3b
分別獨立地表示取代基,Z1a
及Z1b
分別獨立地表示Taft的σ*
常數值為3.5以上的電子吸引基,Y1
表示-CRY1
RY2
-、-NRY3
-或-S-,RY1
~RY3
分別獨立地表示氫原子或取代基,n表示0或1,m表示0或1,o1、o2、p、q1及q2分別獨立地表示0以上的整數,q1及q2中的至少一者表示1以上的整數,p為2以上時,p個R2
可以相同,亦可不同,2個R2
彼此可以鍵結而形成環,o1為2以上時,o1個R3a
可以相同,亦可不同,2個R3a
彼此可以鍵結而形成環,o2為2以上時,o2個R3b
可以相同,亦可不同,2個R3b
彼此可以鍵結而形成環,q1為2以上時,q1個Z1a
可以相同,亦可不同,q2為2以上時,q2個Z1b
可以相同,亦可不同。
<9>如<1>~<6>中任一項所述之感光性組成物,其中環狀肟化合物為由下述式(3a)或式(3b)表示之化合物;
[化學式4]
式(3a)中,X1
表示-O-、-CRx1
RX2
-、-S-、-NRx3
-或>C=N-O-Rx4
,Rx1
~Rx4
分別獨立地表示氫原子或取代基,Rx1
及Rx3
可以與R2
或R3c
鍵結而形成環,Y2
表示-CRY21
RY22
-、-NRY23
-或-S-,RY21
~RY23
分別獨立地表示氫原子或取代基;
式(3b)中,X2
表示>CRX10
-或>N-,Rx10
表示氫原子或取代基;
式(3a)及式(3b)中,R1
、R2
、R3c
及R3d
分別獨立地表示取代基,L表示碳數1~3的伸烷基或-CRL1
=CRL2
-,RL1
及RL2
分別獨立地表示氫原子或取代基,Z1c
及Z1d
分別獨立地表示Taft的σ*
常數值為3.5以上的電子吸引基,n表示0或1,m表示0或1,o3、o4、p、q3及q4分別獨立地表示0以上的整數,q3及q4中的至少一者表示1以上的整數,p為2以上時,p個R2
可以相同,亦可不同,2個R2
彼此可以鍵結而形成環,o3為2以上時,o3個R3c
可以相同,亦可不同,2個R3c
彼此可以鍵結而形成環,o4為2以上時,o4個R3d
可以相同,亦可不同,2個R3d
彼此可以鍵結而形成環,q3為2以上時,q3個Z1c
可以相同,亦可不同,q4為2以上時,q4個Z1d
可以相同,亦可不同。
<10>如<1>至<9>中任一項所述之感光性組成物,其還含有樹脂。
<11>如<1>至<10>中任一項所述之感光性組成物,其還含有色材。
<12>如<11>所述之感光性組成物,其中色材包含顏料。
<13>如<11>或<12>所述之感光性組成物,其中色材包含選自彩色著色劑、白色著色劑、黑色著色劑及近紅外線吸收色素中之至少一個。
<14>如<1>至<13>中任一項所述之感光性組成物,其為用於形成濾色器的像素之組成物。
<15>一種硬化膜,其使用<1>至<14>中任一項所述之感光性組成物而獲得。
<16>一種濾色器之製造方法,其包括:在支撐體上應用<1>至<14>中任一項所述之感光性組成物而形成感光性組成物層之製程;將感光性組成物層曝光成圖案狀之製程;及對曝光後的感光性組成物層進行顯影而形成圖案之製程。
<17>一種濾色器,其具有<15>所述之硬化膜。
<18>一種固體攝像元件,其具有<15>所述之硬化膜。
<19>一種圖像顯示裝置,其具有<15>所述之硬化膜。
[發明效果]According to the study by the present inventors, it was found that the above-mentioned object can be achieved by using a prescribed cyclic oxime compound as a photopolymerization initiator described later, and the present invention has been completed. The present invention provides the following.
<1> A photosensitive composition comprising a cyclic oxime compound and a polymerizable compound, each of which has a cyclic oxime moiety having a cyclic structure formed by containing an oxime group, and a σ * constant value of Taft of 3.5 The above electron attracting group.
<2> The photosensitive composition according to <1>, wherein the cyclic oxime compound has an electron attracting group having a σ * constant value of 4 or more of Taft.
<3> The photosensitive composition according to <1> or <2>, wherein the electron attracting group is at least one selected from a nitro group, an alkylsulfonyl group, an arylsulfonyl group, and an onium group.
<4> The photosensitive composition according to any one of <1> to <3>, wherein the cyclic oxime site of the cyclic oxime compound is represented by the following formula (a-1);
[Chemical Formula 1]
In the formula, R 1 represents a substituent, A represents a ring formed by containing an oxime group, and n represents 0 or 1.
<5> The photosensitive composition according to any one of <1> to <4>, wherein the cyclic oxime compound has at least one selected from an aromatic hydrocarbon ring and a heterocyclic ring bonded to a cyclic oxime site. Ring structure.
<6> The photosensitive composition according to any one of <1> to <5>, wherein the cyclic oxime compound has a fused ring including a carbazole ring or a dibenzothiophene ring bonded to a cyclic oxime site The structure.
<7> The photosensitive composition according to any one of <1> to <6>, wherein the cyclic oxime compound is a compound represented by the following formula (1);
[Chemical Formula 2]
In formula (1), X 1 represents -O-, -CR x1 R X2- , -S-, -NR x3 -or> C = NOR x4 , and R x1 to R x4 each independently represent a hydrogen atom or a substituent, R x1 and R x3 may be bonded to R 2 , R 3 or a ring represented by B to form a ring. R 1 to R 3 each independently represent a substituent, and L represents an alkylene group having 1 to 3 carbon atoms or -CR. L1 = CR L2- , R L1 and R L2 each independently represent a hydrogen atom or a substituent, B represents a ring containing at least one selected from an aromatic hydrocarbon ring and a heterocyclic ring, and Z 1 represents a σ * constant value of Taft 3.5 or more electron attracting groups, n represents 0 or 1, m represents 0 or 1, q represents an integer of 1 or more, o and p each independently represent an integer of 0 or more, and when p is 2 or more, p R 2 may be the same It can also be different. Two R 2 can be bonded to each other to form a ring. When o is 2 or more, o R 3 can be the same or different. Two R 3 can be bonded to each other to form a ring. Q is 2 or more. In this case, q Z 1 may be the same or different.
<8> The photosensitive composition according to any one of <1> to <6>, wherein the cyclic oxime compound is a compound represented by the following formula (2);
[Chemical Formula 3]
In formula (2), X 1 represents -O-, -CR x1 R X2- , -S-, -NR x3 -or> C = NOR x4 , and R x1 to R x4 each independently represent a hydrogen atom or a substituent, R x1 and R x3 may be bonded to R 2 or R 3a to form a ring, L represents an alkylene group having 1 to 3 carbon atoms or -CR L1 = CR L2- , and R L1 and R L2 each independently represent a hydrogen atom or Substituents, R 1 , R 2 , R 3a and R 3b each independently represent a substituent, Z 1a and Z 1b each independently represent an electron attracting group whose Taft σ * constant value is 3.5 or more, and Y 1 represents -CR Y1 R Y2- , -NR Y3 -or -S-, R Y1 to R Y3 each independently represent a hydrogen atom or a substituent, n represents 0 or 1, m represents 0 or 1, o1, o2, p, q1 and q2 respectively Independently represents an integer of 0 or more, at least one of q1 and q2 represents an integer of 1 or more, when p is 2 or more, p R 2 may be the same or different, and two R 2 may be bonded to each other to form a ring When o1 is 2 or more, o1 R 3a may be the same or different, and two R 3a may be bonded to each other to form a ring. When o2 is 2 or more, o2 R 3b may be the same or different, and two R 3b may be bonded to each other to form a ring. When q1 is 2 or more, q1 Z 1a may be formed. It may be the same or different. When q2 is 2 or more, q2 Z 1b may be the same or different.
<9> The photosensitive composition according to any one of <1> to <6>, wherein the cyclic oxime compound is a compound represented by the following formula (3a) or (3b);
[Chemical Formula 4]
In formula (3a), X 1 represents -O-, -CR x1 R X2- , -S-, -NR x3 -or> C = NOR x4 , and R x1 to R x4 each independently represent a hydrogen atom or a substituent, R x1 and R x3 may be bonded to R 2 or R 3c to form a ring, Y 2 represents -CR Y21 R Y22- , -NR Y23- , or -S-, and R Y21 to R Y23 each independently represent a hydrogen atom or a substitution base;
In formula (3b), X 2 represents> CR X10 -or> N-, and R x10 represents a hydrogen atom or a substituent;
In formula (3a) and formula (3b), R 1 , R 2 , R 3c and R 3d each independently represent a substituent, and L represents an alkylene group having 1 to 3 carbon atoms or -CR L1 = CR L2- , R L1 and R L2 each independently represent a hydrogen atom or a substituent, Z 1c and Z 1d each independently represent an electron attracting group having a σ * constant value of 3.5 or more, n represents 0 or 1, m represents 0 or 1, and o3 , O4, p, q3, and q4 each independently represent an integer of 0 or more, and at least one of q3 and q4 represents an integer of 1 or more. When p is 2 or more, p R 2 may be the same or different, and 2 R 2 may be bonded to each other to form a ring. When o 3 is 2 or more, o 3 R 3c may be the same or different. 2 R 3 c may be bonded to each other to form a ring. When o 4 is 2 or more, o 4 R 3d may be The same or different, two R 3d may be bonded to each other to form a ring. When q3 is 2 or more, q3 Z 1c may be the same or different. When q4 is 2 or more, q4 Z 1d may be the same or different. different.
<10> The photosensitive composition according to any one of <1> to <9>, further comprising a resin.
<11> The photosensitive composition according to any one of <1> to <10>, further comprising a color material.
<12> The photosensitive composition according to <11>, wherein the color material contains a pigment.
<13> The photosensitive composition according to <11> or <12>, wherein the color material contains at least one selected from a color colorant, a white colorant, a black colorant, and a near-infrared absorbing pigment.
<14> The photosensitive composition according to any one of <1> to <13>, which is a composition for forming a pixel of a color filter.
<15> A cured film obtained using the photosensitive composition according to any one of <1> to <14>.
<16> A method for manufacturing a color filter, comprising: a process for forming a photosensitive composition layer by applying the photosensitive composition according to any one of <1> to <14> on a support; A process of exposing the composition layer into a pattern; and a process of developing the exposed photosensitive composition layer to form a pattern.
<17> A color filter having the cured film according to <15>.
<18> A solid-state imaging element having the cured film according to <15>.
<19> An image display device having the cured film according to <15>.
[Inventive effect]
藉由本發明,能夠提供一種靈敏度優異的感光性組成物、硬化膜、濾色器之製造方法、濾色器、固體攝像元件及圖像顯示裝置。According to the present invention, it is possible to provide a method for producing a photosensitive composition, a cured film, a color filter, a color filter, a solid-state imaging device, and an image display device having excellent sensitivity.
以下,對本發明的內容進行詳細說明。
本說明書中,“~”係以將記載於其前後之數值作為下限值及上限值而包含之含義來使用。
本說明書中之基團(原子團)的標記中,未標有經取代及未經取代之標記包含不具有取代基之基團(原子團),並且亦包含具有取代基之基團(原子團)。例如,“烷基”係指,不僅包含不具有取代基之烷基(未經取代烷基),亦包含具有取代基之烷基(經取代烷基)。
本說明書中,“(甲基)丙烯酸酯”表示丙烯酸酯及丙烯酸甲酯兩者或任一者,“(甲基)丙烯酸”表示丙烯酸及甲基丙烯酸兩者或任一者,“(甲基)丙烯醯基”表示丙烯醯基及甲基丙烯醯基兩者或任一者。
本說明書中,結構式中的Me表示甲基,Et表示乙基,Bu表示丁基,Ph表示苯基。
本說明書中,重量平均分子量及數平均分子量為藉由GPC(凝膠滲透層析法)法測量而得之聚苯乙烯換算值。
本說明書中,近紅外線係指波長700~2500nm的光。
本說明書中,總固體成分係指從組成物的縂成分去除溶劑之成分的總質量。
本說明書中,“製程”這一詞不僅包含獨立的製程,即使無法與其他製程明確區別之情況下,只要實現該製程的預期作用,則亦包含於本術語中。Hereinafter, the content of this invention is demonstrated in detail.
In this specification, "~" is used as the meaning which includes the numerical value before and after that as a lower limit value and an upper limit value.
In the description of the group (atomic group) in this specification, the unsubstituted and unsubstituted tags include a group (atomic group) having no substituent, and also include a group (atomic group) having a substituent. For example, "alkyl" means not only an alkyl group (unsubstituted alkyl group) without a substituent, but also an alkyl group (substituted alkyl group) with a substituent.
In this specification, "(meth) acrylate" means both or any of acrylate and methyl acrylate, "(meth) acrylic" means both or any of acrylic and methacrylic, and "(meth "Acryl" refers to both or both acryl and methacryl.
In this specification, Me in the structural formula represents methyl, Et represents ethyl, Bu represents butyl, and Ph represents phenyl.
In this specification, weight average molecular weight and number average molecular weight are polystyrene conversion values measured by GPC (gel permeation chromatography) method.
In this specification, near-infrared light means light having a wavelength of 700 to 2500 nm.
In this specification, the total solid content refers to the total mass of a component from which the solvent is removed from the total component of the composition.
In this specification, the term "process" includes not only independent processes, but even if it cannot be clearly distinguished from other processes, as long as the intended role of the process is achieved, it is also included in this term.
<感光性組成物>
本發明的感光性組成物的特徵為包含環狀肟化合物及聚合性化合物,該狀肟化合物具有包含肟基而形成之環狀結構的環狀肟部位及Taft的σ*
常數值為3.5以上的電子吸引基。<Photosensitive composition>
The photosensitive composition of the present invention is characterized by containing a cyclic oxime compound and a polymerizable compound, the oxime compound having a cyclic oxime site having a cyclic structure formed by including an oxime group, and a σ * constant value of 3.5 or more Electron attraction group.
本發明的感光性組成物在曝光時靈敏度優異。關於獲得該種效果之原因,可推測為基於以下者。
本發明的感光性組成物中所包含之環狀肟化合物具有包含肟基而形成之環狀結構的環狀肟部位。亦即,該環狀肟化合物具有肟基併入環結構中之結構。可推測,藉由肟基併入環結構中而使肟基周圍的結構變硬,藉此使環狀肟化合物的吸收光譜變得尖銳,並能夠進一步提高吸光度。又,可推測,環狀肟化合物包括該種環狀肟部位,從而還能夠抑制肟化合物的激發狀態的失活路徑,並且可推測能夠提高基於光照射的分解效率。又,可推測,該環狀肟化合物除了上述環狀肟部位以外還具有Taft的σ*
常數值為3.5以上的電子吸引基,從而使環狀肟化合物的極大吸收波長向更長波長側移動,以便於與在曝光時從光源照射之光的波長匹配。因此,可推測,該環狀肟化合物在曝光時能夠有效地產生自由基。
又,可推測,環狀肟化合物具有上述規定的電子吸引基,從而在膜中環狀肟化合物與聚合性化合物等成分容易相互作用,並且可推測,環狀肟化合物存在於更靠聚合性化合物等成分的附近處,以能夠在更靠該等成分的附近處產生自由基。
因此,可推測,藉由向本發明的感光性組成物照射光並進行曝光,使環狀肟化合物有效地分解並產生自由基,此外,能夠在更靠聚合性化合物等成分的附近處有效地產生自由基,其結果,可推測能夠獲得優異的靈敏度。The photosensitive composition of the present invention is excellent in sensitivity during exposure. The reason for obtaining such an effect is presumably based on the following.
The cyclic oxime compound contained in the photosensitive composition of the present invention has a cyclic oxime moiety having a cyclic structure formed by containing an oxime group. That is, the cyclic oxime compound has a structure in which an oxime group is incorporated into a ring structure. It is presumed that the structure surrounding the oxime group is hardened by incorporating the oxime group into the ring structure, thereby sharpening the absorption spectrum of the cyclic oxime compound and further increasing the absorbance. In addition, it is presumed that the cyclic oxime compound includes such a cyclic oxime site, thereby suppressing the deactivation path of the excited state of the oxime compound, and presumably improving the decomposition efficiency by light irradiation. In addition, it is presumed that the cyclic oxime compound has an electron attracting group having a Ta * sigma constant value of 3.5 or more in addition to the cyclic oxime site, thereby shifting the maximum absorption wavelength of the cyclic oxime compound to a longer wavelength side. In order to match the wavelength of the light irradiated from the light source during the exposure. Therefore, it is presumed that this cyclic oxime compound can efficiently generate radicals upon exposure.
In addition, it is presumed that the cyclic oxime compound has the above-mentioned predetermined electron attracting group, so that the cyclic oxime compound and the polymerizable compound and other components easily interact in the membrane, and it is presumed that the cyclic oxime compound exists in the polymerizable compound. In the vicinity of the components, free radicals can be generated in the vicinity of the components.
Therefore, it is presumed that by irradiating the photosensitive composition of the present invention with light and exposing it, the cyclic oxime compound is effectively decomposed and free radicals are generated, and further, it is effective in the vicinity of components such as the polymerizable compound. Radicals are generated, and as a result, it is estimated that excellent sensitivity can be obtained.
又,藉由本發明的感光性組成物,還能夠進一步提高所獲得之硬化膜的硬化性,例如,還能夠獲得耐溶劑性等特性優異之硬化膜。又,該感光性組成物由於靈敏度優異,因此還能夠形成密接性、矩形性、直線性等優異之圖案。尤其,還能夠形成密接性優異之微細圖案。In addition, with the photosensitive composition of the present invention, the curability of the cured film obtained can be further improved, and for example, a cured film having excellent properties such as solvent resistance can also be obtained. In addition, since the photosensitive composition is excellent in sensitivity, it can also form a pattern having excellent adhesion, rectangularity, and linearity. In particular, it is possible to form a fine pattern with excellent adhesion.
又,本發明的感光性組成物具有優異的靈敏度,並且保存穩定性亦優異。作為獲得該種效果之原因,推測為,是因為肟結構成為硬結構,從而能夠抑制肟化合物的水解等經時分解。另外,若感光性組成物的靈敏度高,則通常保存穩定性趨於降低,但是本發明的感光性組成物藉由使用上述規定的環狀肟化合物,能夠以比以往更高的水準兼顧靈敏度和保存穩定性。In addition, the photosensitive composition of the present invention has excellent sensitivity and excellent storage stability. The reason why such an effect is obtained is presumed to be that the oxime structure becomes a hard structure, so that it is possible to suppress the degradation of the oxime compound with time, such as hydrolysis. In addition, when the sensitivity of the photosensitive composition is high, storage stability generally tends to decrease. However, the photosensitive composition of the present invention can use both the cyclic oxime compound specified above to achieve both sensitivity and sensitivity at a higher level than before. Storage stability.
又,通常,當感光性組成物中包含色材時,靈敏度趨於容易降低,但是藉由在感光性組成物中含有本發明之上述規定的環狀肟化合物,即使當感光性組成物還包含色材時,亦能夠維持優異的靈敏度。其中,在使用彩色著色劑或黑色著色劑等在可視區域具有吸收之色材時,通常靈敏度趨於容易降低,但是由於即使包含該種色材時亦能夠維持優異的靈敏度,因此當本發明的感光性組成物包含該等色材時特別有效。例如,本發明的感光性組成物能夠較佳地用作濾色器的像素形成用的組成物、黑色矩陣等遮光膜形成用的組成物。In general, when a coloring material is contained in a photosensitive composition, the sensitivity tends to be lowered. However, by including the cyclic oxime compound of the present invention as defined above in the photosensitive composition, even when the photosensitive composition further contains Even in color materials, excellent sensitivity can be maintained. Among them, when a coloring material such as a coloring agent or a black coloring agent that has absorption in the visible area is used, the sensitivity tends to be easily reduced, but because it can maintain excellent sensitivity even when it contains such a coloring material, The photosensitive composition is particularly effective when such a color material is included. For example, the photosensitive composition of the present invention can be suitably used as a composition for forming a pixel of a color filter and a composition for forming a light-shielding film such as a black matrix.
又,對於感光性組成物,光透射性低時,藉由與上述相同的原因,靈敏度趨於容易降低,感光性組成物中含有本發明之上述規定的環狀肟化合物,從而即使為光透射性低的感光性組成物亦能夠維持優異的靈敏度。
作為該種光透射性低的感光性組成物的一實施形態,例如可列舉如下感光性組成物,使用感光性組成物製造乾燥後的膜厚為2.0μm的膜時,具有前述膜相對於波長365nm的光的光學濃度成為1.5以上(較佳為1.8以上,更佳為2.1以上)之分光特性。光學濃度的上限並無特別限定,能夠設為5.0以下。另外,光學濃度(OD)為以對數表示光的吸收程度之值,並且為由下述式定義之值。
OD(λ)=Log10
[T(λ)/I(λ)]
λ表示波長,T(λ)表示波長λ下的透射光量,I(λ)表示波長λ下的入射光量。When the light-transmitting property of the photosensitive composition is low, the sensitivity tends to be lowered for the same reasons as described above, and the photosensitive composition contains the cyclic oxime compound specified in the present invention. A low-sensitivity photosensitive composition can maintain excellent sensitivity.
As one embodiment of such a photosensitive composition having low light transmittance, for example, the following photosensitive composition can be cited. When the photosensitive composition is used to produce a film having a thickness of 2.0 μm after drying, the above-mentioned film has a wavelength relative to the wavelength. The optical density of 365 nm light has a spectral characteristic of 1.5 or more (preferably 1.8 or more, and more preferably 2.1 or more). The upper limit of the optical density is not particularly limited, and can be set to 5.0 or less. In addition, the optical density (OD) is a value that expresses the degree of light absorption in a logarithm, and is a value defined by the following formula.
OD (λ) = Log 10 [T (λ) / I (λ)]
λ represents the wavelength, T (λ) represents the amount of transmitted light at the wavelength λ, and I (λ) represents the amount of incident light at the wavelength λ.
又,作為光透射性低的感光性組成物的其他實施形態,可列舉如下感光性組成物:當使用感光性組成物製造乾燥後的膜厚為4.0μm的膜時,具有前述膜的波長360~700nm的範圍的透射率的最大值小於40%(較佳為小於30%,更佳為小於20%,進一步較佳為小於10%)之分光特性。Moreover, as another embodiment of the photosensitive composition with low light transmittance, the photosensitive composition is mentioned. When using the photosensitive composition to manufacture a film having a thickness of 4.0 μm after drying, the wavelength of the film is 360. The maximum value of the transmittance in the range of -700 nm is less than 40% (preferably less than 30%, more preferably less than 20%, even more preferably less than 10%).
本發明的感光性組成物能夠用於濾色器、近紅外線透射濾波器、近紅外線截止濾波器、黑色矩陣、遮光膜、折射率調節膜、平板印刷版原版的感光層、保護膜、紫外線硬化性油墨、各種光阻劑、各種顯示材料、塗佈材料、牙科材料、清漆、粉末塗料、接著劑、牙科用組成物、凝膠塗層、電子零件、磁記錄材料、微機械零件、波導管、光學開關、電鍍用遮罩、顏色校準系統、玻璃纖維電纜塗料、絲網印刷模版、基於立體印刷之三維物體、全項記錄用圖像記錄材料、微電子電路、健康照護材料等。The photosensitive composition of the present invention can be used for a color filter, a near-infrared transmission filter, a near-infrared cut filter, a black matrix, a light-shielding film, a refractive index adjustment film, a photosensitive layer of a lithographic printing plate precursor, a protective film, and ultraviolet curing. Ink, various photoresist, various display materials, coating materials, dental materials, varnishes, powder coatings, adhesives, dental compositions, gel coatings, electronic parts, magnetic recording materials, micromechanical parts, waveguides , Optical switches, masks for electroplating, color calibration systems, glass fiber cable coatings, screen printing stencils, three-dimensional objects based on three-dimensional printing, image recording materials for full-term recording, microelectronic circuits, health care materials, etc.
作為濾色器,可列舉具有透射特定波長的光之著色像素之濾波器,具有選自紅色像素、藍色像素、綠色像素、黃色像素、青色像素及品紅色像素中之至少一種著色像素之濾波器為較佳。濾色器能夠使用包含彩色著色劑之感光性組成物來形成。Examples of the color filter include a filter having colored pixels that transmit light of a specific wavelength, and a filter having at least one colored pixel selected from red pixels, blue pixels, green pixels, yellow pixels, cyan pixels, and magenta pixels. Device is better. The color filter can be formed using a photosensitive composition containing a colorant.
作為近紅外線截止濾波器,可列舉在波長700~1800nm的範圍具有極大吸收波長之濾波器。近紅外線截止濾波器係在波長700~1300nm的範圍具有極大吸收波長之濾波器為較佳,在波長700~1000nm的範圍具有極大吸收波長之濾波器為更佳。又,近紅外線截止濾波器在波長400~650nm的所有範圍的透射率係70%以上為較佳,80%以上為更佳,90%以上為進一步較佳。又,波長700~1800nm的範圍的至少1點的透射率係20%以下為較佳。
又,近紅外線截止濾波器的極大吸收波長下的吸光度Amax與波長550nm下的吸光度A550之比亦即吸光度Amax/吸光度A550係20~500為較佳,50~500為更佳,70~450為進一步較佳,100~400為特佳。近紅外線截止濾波器能夠使用包含近紅外線吸收色素之感光性組成物來形成。Examples of the near-infrared cut filter include a filter having a maximum absorption wavelength in a wavelength range of 700 to 1800 nm. The near-infrared cut-off filter is preferably a filter having a maximum absorption wavelength in a wavelength range of 700 to 1300 nm, and a filter having a maximum absorption wavelength in a wavelength range of 700 to 1000 nm is more preferable. The near-infrared cut filter has a transmittance of 70% or more in all ranges of wavelengths from 400 to 650 nm, more preferably 80% or more, and more preferably 90% or more. The transmittance of at least one point in the wavelength range of 700 to 1800 nm is preferably 20% or less.
In addition, the ratio of the absorbance Amax at the maximum absorption wavelength of the near-infrared cut filter to the absorbance A550 at a wavelength of 550 nm, that is, the absorbance Amax / absorbance A550 is preferably 20 to 500, more preferably 50 to 500, and 70 to 450. More preferably, 100 to 400 is particularly preferred. The near-infrared cut filter can be formed using a photosensitive composition containing a near-infrared absorbing pigment.
近紅外線透射濾波器為透射至少一部分近紅外線之濾波器。近紅外線透射濾波器可以為透射可見光和近紅外線兩者之濾波器(透明膜),亦可以為遮蔽至少一部分可見光,並透射至少一部分近紅外線之濾波器。作為近紅外線透射濾波器,可較佳地列舉滿足波長400~640nm的範圍的透過率的最大值為20%以下(較佳為15%以下,更佳為10%以下)且波長1100~1300nm的範圍的透過率的最小值為70%以上(較佳為75%以上,更佳為80%以上)之分光特性之濾波器等。近紅外線透射濾波器係滿足以下的(1)~(4)中的任一者的分光特性之濾波器為較佳。
(1):波長400~640nm的範圍的透過率的最大值為20%以下(較佳為15%以下,更佳為10%以下)且波長800~1300nm的範圍的透過率的最小值為70%以上(較佳為75%以上,更佳為80%以上)之濾波器。
(2):波長400~750nm的範圍的透過率的最大值為20%以下(較佳為15%以下,更佳為10%以下)且波長900~1300nm的範圍的透過率的最小值為70%以上(較佳為75%以上,更佳為80%以上)之濾波器。
(3):波長400~830nm的範圍的透過率的最大值為20%以下(較佳為15%以下,更佳為10%以下)且波長1000~1300nm的範圍的透過率的最小值為70%以上(較佳為75%以上,更佳為80%以上)之濾波器。
(4):波長400~950nm的範圍的透過率的最大值為20%以下(較佳為15%以下,更佳為10%以下)且波長1100~1300nm的範圍的透過率的最小值為70%以上(較佳為75%以上,更佳為80%以上)之濾波器。The near-infrared transmitting filter is a filter that transmits at least a portion of near-infrared rays. The near-infrared transmission filter may be a filter (transparent film) that transmits both visible light and near-infrared light, or may be a filter that shields at least a portion of visible light and transmits at least a portion of near-infrared light. As the near-infrared transmission filter, those having a maximum transmittance that satisfies a range of wavelengths of 400 to 640 nm are 20% or less (preferably 15% or less, and more preferably 10% or less) and 1100 to 1300 nm The minimum value of the transmittance in the range is 70% or more (preferably 75% or more, more preferably 80% or more) of a spectral characteristic filter, and the like. The near-infrared transmission filter is preferably a filter that satisfies the spectral characteristics of any one of the following (1) to (4).
(1): The maximum transmittance in the wavelength range of 400 to 640 nm is 20% or less (preferably 15% or less, and more preferably 10% or less) and the minimum transmittance in the wavelength range of 800 to 1300 nm is 70. % Or more (preferably 75% or more, more preferably 80% or more).
(2): The maximum transmittance in the wavelength range of 400 to 750 nm is 20% or less (preferably 15% or less, and more preferably 10% or less) and the minimum transmittance in the wavelength range of 900 to 1300 nm is 70. % Or more (preferably 75% or more, more preferably 80% or more).
(3): The maximum transmittance in the wavelength range of 400 to 830 nm is 20% or less (preferably 15% or less, more preferably 10% or less) and the minimum transmittance in the wavelength range of 1000 to 1300 nm is 70. % Or more (preferably 75% or more, more preferably 80% or more).
(4): The maximum value of the transmittance in the wavelength range of 400 to 950 nm is 20% or less (preferably 15% or less, more preferably 10% or less) and the minimum transmittance in the wavelength range of 1100 to 1300 nm is 70. % Or more (preferably 75% or more, more preferably 80% or more).
將本發明的感光性組成物用作近紅外線濾波器用的組成物時,本發明的感光性組成物滿足波長400~640nm的範圍的吸光度的最小值Amin與波長1100~1300nm的範圍的吸光度的最大值Bmax之比亦即Amin/Bmax為5以上之分光特性為較佳。Amin/Bmax為7.5以上為更佳,15以上為進一步較佳,30以上為特佳。When the photosensitive composition of the present invention is used as a composition for a near-infrared filter, the photosensitive composition of the present invention satisfies the minimum value Amin of the absorbance in the wavelength range of 400 to 640 nm and the maximum value of the absorbance in the wavelength range of 1100 to 1300 nm. A ratio of the values Bmax, that is, a spectral characteristic in which Amin / Bmax is 5 or more is preferable. Amin / Bmax is more preferably 7.5 or more, more preferably 15 or more, and particularly preferably 30 or more.
某一波長λ下的吸光度Aλ藉由以下式(1)來定義。
Aλ=-log(Tλ/100)……(1)
Aλ為波長λ下的吸光度,Tλ為波長λ下的透過率(%)。
在本發明中,吸光度的值可以為以溶液的狀態測量而得之值,亦可以為使用感光性組成物製膜而得之膜中的值。當以膜的狀態測量吸光度時,在玻璃基板上藉由旋塗等方法以乾燥後的膜的厚度成為規定的厚度之方式塗佈感光性組成物,並使用利用加熱板在100℃下乾燥120秒鐘後製備而成之膜進行測量為較佳。The absorbance Aλ at a certain wavelength λ is defined by the following formula (1).
Aλ = -log (Tλ / 100) …… (1)
Aλ is the absorbance at the wavelength λ, and Tλ is the transmittance (%) at the wavelength λ.
In the present invention, the value of the absorbance may be a value measured in the state of a solution or a value in a film obtained by forming a film using a photosensitive composition. When the absorbance is measured in the state of a film, a photosensitive composition is coated on a glass substrate by a method such as spin coating so that the thickness of the dried film becomes a predetermined thickness, and dried at 100 ° C. using a hot plate 120 It is better to measure the film prepared after seconds.
將本發明的感光性組成物用作近紅外線濾波器用的組成物時,本發明的感光性組成物滿足以下的(11)~(14)中的任一分光特性為更佳。
(11):波長400~640nm的範圍的吸光度的最小值Amin1與波長800~1300nm的範圍的吸光度的最大值Bmax1之比亦即Amin1/Bmax1為5以上,7.5以上為較佳,15以上為更佳,30以上為進一步較佳。依該態樣,藉由遮擋波長400~640nm的範圍的光而能夠形成能夠使波長720nm以上的光透過之膜。
(12):波長400~750nm的範圍的吸光度的最小值Amin2與波長900~1300nm的範圍的吸光度的最大值Bmax2之比亦即Amin2/Bmax2為5以上,7.5以上為較佳,15以上為更佳,30以上為進一步較佳。依該態樣,藉由遮擋波長400~750nm的範圍的光而能夠形成能夠使波長850nm以上的光透過之膜。
(13):波長400~850nm的範圍的吸光度的最小值Amin3與波長1000~1300nm的範圍的吸光度的最大值Bmax3之比亦即Amin3/Bmax3為5以上,7.5以上為較佳,15以上為更佳,30以上為進一步較佳。依該態樣,藉由遮擋波長400~850nm的範圍的光而能夠形成能夠使波長940nm以上的光透過之膜。
(14):波長400~950nm的範圍的吸光度的最小值Amin4與波長1100~1300nm的範圍的吸光度的最大值Bmax4之比亦即Amin4/Bmax4為5以上,7.5以上為較佳,15以上為更佳,30以上為進一步較佳。依該態樣,藉由遮擋波長400~950nm的範圍的光而能夠形成能夠使波長1040nm以上的光透過之膜。When the photosensitive composition of the present invention is used as a composition for a near-infrared filter, the photosensitive composition of the present invention preferably satisfies any one of the following spectral characteristics (11) to (14).
(11): The ratio of the minimum value Amin1 of the absorbance in the range of 400 to 640 nm to the maximum value Bmax1 of the absorbance in the range of 800 to 1300 nm, that is, Amin1 / Bmax1 is 5 or more, 7.5 or more is preferable, and 15 or more is more Good, 30 or more is further preferred. According to this aspect, a film capable of transmitting light having a wavelength of 720 nm or more can be formed by blocking light in a wavelength range of 400 to 640 nm.
(12): The ratio of the minimum value Amin2 of the absorbance in the range of 400 to 750nm to the maximum value Bmax2 of the absorbance in the range of 900 to 1300nm, that is, Amin2 / Bmax2 is 5 or more, preferably 7.5 or more, and 15 or more is more Good, 30 or more is further preferred. According to this aspect, a film capable of transmitting light having a wavelength of 850 nm or more can be formed by blocking light in a wavelength range of 400 to 750 nm.
(13): The ratio of the minimum value Amin3 of the absorbance in the range of wavelength 400 to 850nm to the maximum value Bmax3 of the absorbance in the range of wavelength 1000-1300nm, that is, Amin3 / Bmax3 is 5 or more, 7.5 or more is preferable, and 15 or more is more Good, 30 or more is further preferred. According to this aspect, a film capable of transmitting light having a wavelength of 940 nm or more can be formed by blocking light in a wavelength range of 400 to 850 nm.
(14): The ratio of the minimum value Amin4 of the absorbance in the range of wavelength 400 to 950nm to the maximum value Bmax4 of the absorbance in the wavelength 1100 to 1300nm, that is, Amin4 / Bmax4 is 5 or more, preferably 7.5 or more, and 15 or more Good, 30 or more is further preferred. According to this aspect, a film capable of transmitting light having a wavelength of 1040 nm or more can be formed by blocking light in a wavelength range of 400 to 950 nm.
本發明的感光性組成物靈敏度優異且能夠形成微細圖案,因此能夠較佳地用作濾色器用的感光性組成物。具體而言,能夠較佳地用作濾色器的像素形成用的感光性組成物,並且能夠更佳地用作固體攝像元件中所使用之濾色器的像素形成用的感光性組成物。Since the photosensitive composition of the present invention is excellent in sensitivity and can form a fine pattern, it can be suitably used as a photosensitive composition for a color filter. Specifically, it can be preferably used as a photosensitive composition for forming a pixel of a color filter, and more preferably as a photosensitive composition for forming a pixel of a color filter used in a solid-state imaging element.
以下,對本發明的感光性組成物中所使用之各成分進行說明。Hereinafter, each component used in the photosensitive composition of this invention is demonstrated.
<<環狀肟化合物A>>
本發明的感光性組成物含有環狀肟化合物(以下,將該環狀肟化合物亦稱為環狀肟化合物A),該環狀肟化合物分別具有包含肟基而形成之環狀結構的環狀肟部位及Taft的σ*
常數值為3.5以上的電子吸引基。亦即,環狀肟化合物A為在相同分子中分別具有環狀肟部位和上述電子吸引基之化合物。<< Cyclic oxime compound A >>
The photosensitive composition of the present invention contains a cyclic oxime compound (hereinafter, this cyclic oxime compound is also referred to as a cyclic oxime compound A), and each of the cyclic oxime compounds has a cyclic structure having a cyclic structure including an oxime group. The σ * constant value of the oxime site and Taft is an electron attracting group of 3.5 or more. That is, the cyclic oxime compound A is a compound having a cyclic oxime moiety and the above-mentioned electron attracting group in the same molecule, respectively.
首先,對環狀肟化合物A所具有之Taft的σ* 常數值為3.5以上的電子吸引基(以下,亦稱為電子吸引基A)進行說明。First, an electron-attracting group (hereinafter, also referred to as an electron-attracting group A) having a Taft σ * constant value of 3.5 or more of the cyclic oxime compound A will be described.
從與感光性組成物中所包含之聚合性化合物等相互作用而環狀肟化合物A更容易接近聚合性化合物之原因考慮,環狀肟化合物A所具有之上述電子吸引基A的Taft的σ* 常數值為4以上為較佳,4.2以上為進一步較佳。從化合物的穩定性的觀點考慮,上限係10以下為較佳。另外,Taft的σ* 常數係表示取代基的極性之參數。在本說明書中,Taft的σ* 常數值使用記載於“D.D. Perrin,B. Dempset,E.P. Serjeant,“pka Prediction for organic Acids And Bases” Springer (1981)P109-126的Table A.1”中所記載之σ* 的值。沒有記載於上述文獻的Table A.1時,能夠藉由Journal of the American Chemical Society(Taft, R. W、 1952, 74, 2729)、Journal of the American Chemical Society(Taft, R. W、 1952, 74, 3120)或Journal of the American Chemical Society(Taft, R. W、 1953, 75, 4538)中所記載之方法求出。Considering that the cyclic oxime compound A is more accessible to the polymerizable compound by interacting with the polymerizable compound and the like contained in the photosensitive composition, σ * of Taft of the electron attracting group A included in the cyclic oxime compound A The constant value is preferably 4 or more, and more preferably 4.2 or more. From the viewpoint of the stability of the compound, the upper limit is preferably 10 or less. The σ * constant of Taft is a parameter indicating the polarity of the substituent. In this specification, Taft's σ * constant value is described in "DD Perrin, B. Dempset, EP Serjeant," pka Prediction for organic Acids And Bases ", Table A.1 of Springer (1981) P109-126". The value of σ * . When not listed in Table A.1 of the above-mentioned literature, the Journal of the American Chemical Society (Taft, R.W, 1952, 74, 2729), the Journal of the American Chemical Society (Taft, R.W, 1952, 74, 3120) or the method described in the Journal of the American Chemical Society (Taft, R.W, 1953, 75, 4538).
作為上述電子吸引基A,從感光性組成物中所包含之聚合性化合物等與環狀肟化合物A更容易相互作用的原因考慮,硝基、烷基磺醯基、芳基磺醯基及鎓基為較佳,硝基、烷基磺醯基及芳基磺醯基為更佳,硝基為特佳。As the above-mentioned electron attracting group A, nitro, alkylsulfonyl, arylsulfonyl, and onium are considered because the polymerizable compound and the like contained in the photosensitive composition interact more easily with the cyclic oxime compound A. A nitro group is preferred, a nitro group, an alkylsulfonyl group, and an arylsulfonyl group are more preferred, and a nitro group is particularly preferred.
作為上述烷基磺醯基,碳數1~20的烷基磺醯基為較佳。作為具體例,可列舉甲基磺醯基、乙基磺醯基、丙基磺醯基、異丙基磺醯基、丁基磺醯基、己基磺醯基、環己基磺醯基、辛基磺醯基、2-乙基己基磺醯基、癸醯基磺醯基、十二醯基磺醯基、十八醯基磺醯基、氰基甲基磺醯基、甲氧基甲基磺醯基、全氟烷基磺醯基等。The alkylsulfonyl group is preferably an alkylsulfonyl group having 1 to 20 carbon atoms. Specific examples include methylsulfonyl, ethylsulfonyl, propylsulfonyl, isopropylsulfonyl, butylsulfonyl, hexylsulfonyl, cyclohexylsulfonyl, and octyl Sulfonyl, 2-ethylhexylsulfonyl, decylsulfonyl, dodecylsulfonyl, octadecylsulfonyl, cyanomethylsulfonyl, methoxymethylsulfonyl Fluorenyl, perfluoroalkylsulfonyl and the like.
作為上述芳基磺醯基,碳數6~30的芳基磺醯基為較佳。作為具體例,可列舉苯磺醯基、1-萘基磺醯基、2-萘基磺醯基、2-氯苯磺醯基、2-甲基苯磺醯基、2-甲氧基苯磺醯基、2-丁氧基苯磺醯基、3-氯苯磺醯基、3-三氟甲基苯磺醯基、3-氰基苯磺醯基、3-硝基苯磺醯基、4-氟苯磺醯基、4-氰基苯磺醯基、4-甲氧基苯磺醯基、4-甲基硫烷基苯磺醯基、4-苯基硫烷基苯磺醯基、4-二甲胺基苯磺醯基等。As the arylsulfonyl group, an arylsulfonyl group having 6 to 30 carbon atoms is preferred. Specific examples include benzenesulfonyl, 1-naphthylsulfonyl, 2-naphthylsulfonyl, 2-chlorobenzenesulfonyl, 2-methylbenzenesulfonyl, and 2-methoxybenzene Sulfonyl, 2-butoxybenzenesulfonyl, 3-chlorobenzenesulfonyl, 3-trifluoromethylbenzenesulfonyl, 3-cyanobenzenesulfonyl, 3-nitrobenzenesulfonyl , 4-fluorobenzenesulfonyl, 4-cyanobenzenesulfonyl, 4-methoxybenzenesulfonyl, 4-methylsulfanylbenzenesulfonyl, 4-phenylsulfanylbenzenesulfonyl Group, 4-dimethylaminobenzenesulfonyl and the like.
作為上述鎓基,可列舉銨基、鋶基、鏻基等,銨基為較佳。作為銨基,可列舉由-N+ (Ro1 )(Ro2 )(Ro3 )表示之基團。Ro1 ~Ro3 分別獨立地表示氫原子、烷基及芳基,烷基及芳基為較佳,烷基為更佳。烷基的碳數係1~20為較佳,1~10為更佳,1~5為進一步較佳。烷基可以為直鏈、支鏈或環狀中的任一種,直鏈或支鏈的烷基為較佳,直鏈的烷基為進一步較佳。Examples of the onium group include an ammonium group, a fluorenyl group, and a fluorenyl group. An ammonium group is preferred. Examples of the ammonium group include a group represented by -N + (Ro 1 ) (Ro 2 ) (Ro 3 ). Ro 1 to Ro 3 each independently represent a hydrogen atom, an alkyl group, and an aryl group, an alkyl group and an aryl group are preferred, and an alkyl group is more preferred. The carbon number of the alkyl group is preferably from 1 to 20, more preferably from 1 to 10, and even more preferably from 1 to 5. The alkyl group may be any of a straight chain, a branched chain, and a cyclic ring. A straight or branched chain alkyl group is preferred, and a straight chain alkyl group is further preferred.
上述電子吸引基為鎓基時,環狀肟化合物具有抗衡陰離子為較佳。作為抗衡陰離子,可列舉鹵素離子(Cl- 、Br- 、I- )、磺酸根陰離子、羧酸根陰離子、磺醯基醯亞胺陰離子、PF6 - 、BF4 - 、ClO4 - 、三(鹵代烷基磺醯基)甲基化物陰離子(例如、(CF3 SO2 )3 C- )、二(鹵代烷基磺醯基)醯亞胺陰離子(例如(CF3 SO2 )2 N- )、四芳基硼酸鹽陰離子、四氰基硼酸鹽陰離子等。When the electron attracting group is an onium group, it is preferable that the cyclic oxime compound has a counter anion. As the counter anion include a halogen ion (Cl -, Br -, I -), a sulfonate anion, a carboxylate anion, sulfonic acyl acyl imide anion, PF 6 -, BF 4 - , ClO 4 -, tris (haloalkyl sulfo acyl group) methide anion (e.g., (CF 3 SO 2) 3 C -), bis (sulfo-haloalkyl acyl) acyl imide anion (e.g. (CF 3 SO 2) 2 N -), tetraarylphosphonium Borate anion, tetracyanoborate anion, etc.
環狀肟化合物A可以僅具有1個上述電子吸引基A,亦可具有2個以上(較佳為2~5個,更佳為2~3個)。僅具有1個上述電子吸引基A時,易於進一步提高溶劑溶解性。又,具有2個以上的上述電子吸引基A時,易於進一步提高自由基產生效率。具有2個以上的上述電子吸引基A時,複數個電子吸引基A可以相同,亦可不同。從合成的簡便性的觀點考慮,複數個電子吸引基A相同為較佳。The cyclic oxime compound A may have only one of the above-mentioned electron attracting groups A, or may have two or more (preferably 2 to 5 and more preferably 2 to 3). When there is only one of the above-mentioned electron attracting groups A, it is easy to further improve the solvent solubility. When there are two or more of the above-mentioned electron attraction groups A, it is easy to further improve the radical generation efficiency. When there are two or more of the electron-attracting groups A, the plurality of electron-attracting groups A may be the same or different. From the viewpoint of simplicity of synthesis, it is preferable that the plurality of electron attracting groups A are the same.
接著,對環狀肟化合物A所具有之環狀肟部位進行說明。
環狀肟化合物A包含含有肟基而形成之環狀結構的環狀肟部位。更具體而言,環狀肟化合物A包含含有直接鍵結於肟基的氮原子之碳原子而形成之環狀結構的環狀肟部位。亦即,環狀肟化合物A具有肟基併入環結構中之結構。Next, the cyclic oxime site which the cyclic oxime compound A has is demonstrated.
The cyclic oxime compound A includes a cyclic oxime moiety having a cyclic structure formed by containing an oxime group. More specifically, the cyclic oxime compound A includes a cyclic oxime site containing a cyclic structure formed by directly bonding to a carbon atom of a nitrogen atom of an oxime group. That is, the cyclic oxime compound A has a structure in which an oxime group is incorporated into a ring structure.
環狀肟部位係5~8員環的環狀結構為較佳,5~7員環的環狀結構為更佳,從化合物的穩定性的原因考慮,5或6員環的環狀結構為進一步較佳。又,環狀肟部位可以包含雜原子作為構成環之原子。作為雜原子,可列舉氧原子、氮原子及硫原子。The cyclic oxime moiety is preferably a cyclic structure with a 5 to 8 member ring, and a cyclic structure with a 5 to 7 member ring is more preferred. Considering the stability of the compound, the cyclic structure of the 5 or 6 member ring is Further preferred. The cyclic oxime moiety may include a hetero atom as an atom constituting a ring. Examples of the hetero atom include an oxygen atom, a nitrogen atom, and a sulfur atom.
環狀肟部位具有直接鍵結於肟基的碳原子之羰基,該肟基與羰基可以併入環結構中。作為該種環結構,可列舉在後述式(a-1)中,n為1之結構。藉由該態樣,容易獲得更優異的光漂白性。又,環狀肟部位不包含上述羰基時(亦即,後述式(a-1)中,n為0時),能夠期待更高的靈敏度化。The cyclic oxime moiety has a carbonyl group directly bonded to a carbon atom of the oxime group, and the oxime group and the carbonyl group may be incorporated into a ring structure. Examples of such a ring structure include a structure in which n is 1 in formula (a-1) described later. With this aspect, it is easy to obtain more excellent photobleaching properties. When the cyclic oxime moiety does not include the carbonyl group (that is, when n is 0 in the formula (a-1) described later), higher sensitivity can be expected.
環狀肟部位可以含有2個以上的肟基。環狀肟部位包含2個以上的肟基時,易於進一步提高自由基產生效率。又,環狀肟部位僅包含1個肟基時,易於進一步提高溶劑溶解性。The cyclic oxime site may contain two or more oxime groups. When the cyclic oxime moiety contains two or more oxime groups, it is easy to further improve the radical generation efficiency. When the cyclic oxime site contains only one oxime group, it is easy to further improve the solubility of the solvent.
上述環狀肟部位係由下述式(a-1)表示之結構為較佳。
[化學式5]
The cyclic oxime site is preferably a structure represented by the following formula (a-1).
[Chemical Formula 5]
式(a-1)中,A表示包含肟基而形成之環。A所表示之環係5~8員環為較佳,5~7員環為更佳,從化合物的穩定性的觀點考慮,5或6員環為進一步較佳。A所表示之環可以包含雜原子作為構成環之原子。作為雜原子,可列舉氧原子、氮原子及硫原子。A所表示之環可以包含2個以上的肟基。In the formula (a-1), A represents a ring formed by containing an oxime group. The ring system represented by A is more preferably a 5 to 8-membered ring, and a 5 to 7-membered ring is more preferable. From the viewpoint of stability of the compound, a 5 or 6-membered ring is more preferable. The ring represented by A may include a hetero atom as an atom constituting the ring. Examples of the hetero atom include an oxygen atom, a nitrogen atom, and a sulfur atom. The ring represented by A may contain two or more oxime groups.
式(a-1)中,n表示0或1。從高靈敏度化的觀點考慮,n係0為較佳。又,從光漂白性的觀點考慮,n係1為較佳。In formula (a-1), n represents 0 or 1. From the viewpoint of high sensitivity, n is preferably 0. From the viewpoint of photobleachability, n-based 1 is preferred.
式(a-1)中,R1 表示取代基。作為R1 所表示之取代基,可列舉烷基、芳基、烯基、炔基、烷基亞磺醯基、芳基亞磺醯基、烷基磺醯基、芳基磺醯基、醯基、烷氧基羰基、芳氧基羰基、膦醯基、雜環基、烷基硫羰基、芳基硫羰基、二烷基胺基羰基、二烷基胺基硫羰基等。該等基團還可具有取代基。作為進一步的取代基,可列舉鹵素基團、烷基、芳基、烷氧基、芳氧基、烷氧基羰基、醯氧基、醯基、烷基亞磺醯基、芳基亞磺醯基、烷基胺基、二烷基胺基、芳基胺基、羥基、羧基、甲醯基、巰基、磺基、胺基、氰基等。In the formula (a-1), R 1 represents a substituent. Examples of the substituent represented by R 1 include an alkyl group, an aryl group, an alkenyl group, an alkynyl group, an alkylsulfinylfluorenyl group, an arylsulfinylfluorenyl group, an alkylsulfonyl group, an arylsulfonyl group, and fluorene. Group, alkoxycarbonyl, aryloxycarbonyl, phosphino, heterocyclic, alkylthiocarbonyl, arylthiocarbonyl, dialkylaminocarbonyl, dialkylaminothiocarbonyl, and the like. These groups may also have a substituent. Examples of the further substituent include a halogen group, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkoxycarbonyl group, a fluorenyloxy group, a fluorenyl group, an alkylsulfinylfluorene group, and an arylsulfinylfluorene group. Group, alkylamino group, dialkylamino group, arylamino group, hydroxyl group, carboxyl group, formamyl group, mercapto group, sulfo group, amine group, cyano group, and the like.
作為可具有取代基之烷基,碳數1~30的烷基為較佳,例如可列舉甲基、乙基、丙基、丁基、己基、辛基、癸基、十二基、十八烷基、異丙基、異丁基、第二丁基、第三丁基、1-乙基戊基、環戊基、環己基、三氟甲基、2-乙基己基、苯甲醯甲基(phenacyl)、1-萘甲醯基甲基、2-萘甲醯基甲基、4-甲基巰基苯甲醯甲基、4-苯基巰基苯甲醯甲基、4-二甲基胺基苯甲醯甲基、4-氰基苯甲醯甲基、4-甲基苯甲醯甲基、2-甲基苯甲醯甲基、3-氟苯甲醯甲基、3-三氟甲基苯甲醯甲基及3-硝基苯甲醯甲基。The alkyl group which may have a substituent is preferably an alkyl group having 1 to 30 carbon atoms, and examples thereof include methyl, ethyl, propyl, butyl, hexyl, octyl, decyl, dodecyl, and octadecyl Alkyl, isopropyl, isobutyl, second butyl, third butyl, 1-ethylpentyl, cyclopentyl, cyclohexyl, trifluoromethyl, 2-ethylhexyl, benzamidine (Phenacyl), 1-naphthylmethyl, 2-naphthylmethyl, 4-methylmercaptobenzyl methyl, 4-phenylmercaptobenzyl methyl, 4-dimethyl Aminobenzylmethyl, 4-cyanobenzylmethyl, 4-methylbenzylmethyl, 2-methylbenzylmethyl, 3-fluorobenzylmethyl, 3-tribenzylmethyl Fluoromethylbenzylmethyl and 3-nitrobenzylmethyl.
作為可具有取代基之芳基,碳數6~30的芳基為較佳,例如可列舉苯基、聯苯基、1-萘基、2-萘基、9-蒽基、9-菲基、1-芘基、5-稠四苯基、1-茚基(1-indenyl)、2-薁基、9-茀基、三聯苯基(terphenyl)、四聯苯基(quarterphenyl)、鄰甲苯基、間甲苯基及對甲苯基、二甲苯基、鄰枯烯基、間枯烯基及對枯烯基、2,4,6-三甲苯基(mesityl)、并環戊二烯基(pentalenyl)、聯萘基(binaphthalenyl)、三聯萘基、四聯萘基、并環庚三烯基(heptalenyl)、伸聯苯基(biphenylenyl)、二環戊二烯并苯基(indacenyl)、丙[二]烯合茀基(fluoranthenyl)、苊基(acenaphthylenyl)、乙烯合蒽基(aceanthrylenyl)、丙烯合萘基(phenalenyl)、茀基、蒽基、聯蒽基、三聯蒽基、四聯蒽基、蒽喹啉基(anthraquinolyl)、菲基、聯三伸苯基(triphenylenyl)、芘基、䓛基(chrysenyl)、稠四苯基、七曜烯基(pleiadenyl)、苉基(picenyl)、苝基(perylenyl)、五苯基(pentaphenyl)、稠五苯基(pentacenyl)、聯四苯基(tetraphenylenyl)、六苯基、稠六苯基、茹基(rubicenyl)、蔻基(coronenyl)、聯伸三萘基(trinaphthylenyl)、七苯基、稠七苯基、苒基(pyranthrenyl)、莪基(ovalenyl)、甲苯甲醯基。As the aryl group which may have a substituent, an aryl group having 6 to 30 carbon atoms is preferable, and examples thereof include a phenyl group, a biphenyl group, a 1-naphthyl group, a 2-naphthyl group, a 9-anthryl group, and a 9-phenanthryl group. , 1-fluorenyl, 5-fused tetraphenyl, 1-indenyl, 2-fluorenyl, 9-fluorenyl, terphenyl, quarterphenyl, o-toluene Methyl, m-tolyl and p-tolyl, xylyl, o-cumenyl, m-cumenyl and p-cumenyl, 2,4,6-trimethylenyl (mesityl), and cyclopentadienyl (pentalenyl ), Binaphthalenyl, teraphthyl, tetranaphthyl, heptalenyl, biphenylenyl, dicyclopentadienyl, indacenyl, propyl [ Two] fluoranthenyl, acenaphthylenyl, aceanthrylenyl, phenalenyl, fluorenyl, anthracenyl, bianthryl, triple anthryl, tetrathryl , Anthraquinolyl, phenanthryl, triphenylenyl, fluorenyl, chrysenyl, fused tetraphenyl, pleiadenyl , Picenyl, perylenyl, pentaphenyl, pentacenyl, tetraphenylenyl, hexaphenyl, hexaphenyl, rubicenyl , Coronenyl, trinaphthylenyl, heptyl, fused heptyl, pyranthrenyl, ovalenyl, tolylmethyl.
作為可具有取代基之烯基,碳數2~10的烯基為較佳,例如可列舉乙烯基、烯丙基、苯乙烯基等。The alkenyl group which may have a substituent is preferably an alkenyl group having 2 to 10 carbon atoms, and examples thereof include a vinyl group, an allyl group, and a styryl group.
作為可具有取代基之炔基,碳數2~10的炔基為較佳,例如可列舉乙炔基、丙炔基、炔丙基等。The alkynyl group which may have a substituent is preferably an alkynyl group having 2 to 10 carbon atoms, and examples thereof include an ethynyl group, a propynyl group, and a propargyl group.
作為可具有取代基之烷基亞磺醯基,碳數1~20的烷基亞磺醯基為較佳,例如可列舉甲基亞磺醯基、乙基亞磺醯基、丙基亞磺醯基、異丙基亞磺醯基、丁基亞磺醯基、己基亞磺醯基、環己基亞磺醯基、辛基亞磺醯基、2-乙基己基亞磺醯基、癸醯基亞磺醯基、十二烷基亞磺醯基、十八烷基亞磺醯基、氰基甲基亞磺醯基、甲氧基甲基亞磺醯基等。As the alkylsulfinylsulfonyl group which may have a substituent, an alkylsulfinylsulfonyl group having 1 to 20 carbon atoms is preferred, and examples thereof include methylsulfinylsulfonyl, ethylsulfinylsulfinyl, and propylsulfinyl. Fluorenyl, isopropylsulfinyl sulfenyl, butylsulfinyl sulfinyl, hexylsulfinyl sulfinyl, cyclohexylsulfinyl sulfinyl, octylsulfinyl sulfinyl, 2-ethylhexylsulfinyl sulfinyl, decyl Sulfinyl sulfenyl, dodecylsulfinyl sulfinyl, octadecylsulfinyl sulfinyl, cyanomethylsulfinyl sulfinyl, methoxymethylsulfinyl sulfinyl and the like.
作為可具有取代基之芳基亞磺醯基,碳數6~30的芳基亞磺醯基為較佳,例如可列舉苯基亞磺醯基、1-萘基亞磺醯基、2-萘基亞磺醯基、2-氯苯基亞磺醯基、2-甲基苯基亞磺醯基、2-甲氧基苯基亞磺醯基、2-丁氧基苯基亞磺醯基、3-氯苯基亞磺醯基、3-三氟甲基苯基亞磺醯基、3-氰基苯基亞磺醯基、3-硝基苯基亞磺醯基、4-氟苯基亞磺醯基、4-氰基苯基亞磺醯基、4-甲氧基苯基亞磺醯基、4-甲基硫烷基苯基亞磺醯基、4-苯基硫烷基苯基亞磺醯基、4-二甲胺基苯基亞磺醯基等。As the arylsulfinylsulfonyl group which may have a substituent, an arylsulfinylsulfonyl group having 6 to 30 carbon atoms is preferred, and examples thereof include phenylsulfinylsulfonyl group, 1-naphthylsulfinylsulfinyl group, and 2- Naphthylsulfinyl sulfenyl, 2-chlorophenylsulfinyl sulfinyl, 2-methylphenylsulfinyl sulfinyl, 2-methoxyphenylsulfinyl sulfinyl, 2-butoxyphenylsulfinyl sulfinyl Group, 3-chlorophenylsulfinylsulfenyl group, 3-trifluoromethylphenylsulfinylsulfenyl group, 3-cyanophenylsulfinylsulfenyl group, 3-nitrophenylsulfinylsulfenyl group, 4-fluoro Phenylsulfinyl, 4-cyanophenylsulfinyl, 4-methoxyphenylsulfinyl, 4-methylsulfanylphenylsulfinyl, 4-phenylsulfane Phenylphenylsulfinyl, 4-dimethylaminophenylsulfinyl and the like.
作為可具有取代基之烷基磺醯基,碳數1~20的烷基磺醯基為較佳,例如可列舉甲基磺醯基、乙基磺醯基、丙基磺醯基、異丙基磺醯基、丁基磺醯基、己基磺醯基、環己基磺醯基、辛基磺醯基、2-乙基己基磺醯基、癸醯基磺醯基、十二醯基磺醯基、十八醯基磺醯基、氰基甲基磺醯基、甲氧基甲基磺醯基、全氟烷基磺醯基等。As the alkylsulfonyl group which may have a substituent, an alkylsulfonyl group having 1 to 20 carbon atoms is preferred, and examples thereof include methylsulfonyl, ethylsulfonyl, propylsulfonyl, and isopropyl Sulfosulfanyl, butylsulfonyl, hexylsulfonyl, cyclohexylsulfonyl, octylsulfonyl, 2-ethylhexylsulfonyl, decylsulfonyl, dodecylsulfonyl Octadecylsulfonyl, cyanomethylsulfonyl, methoxymethylsulfonyl, perfluoroalkylsulfonyl and the like.
作為可具有取代基之芳基磺醯基,碳數6~30的芳基磺醯基為較佳,例如可列舉苯磺醯基、1-萘基磺醯基、2-萘基磺醯基、2-氯苯磺醯基、2-甲基苯磺醯基、2-甲氧基苯磺醯基、2-丁氧基苯磺醯基、3-氯苯磺醯基、3-三氟甲基苯磺醯基、3-氰基苯磺醯基、3-硝基苯磺醯基、4-氟苯磺醯基、4-氰基苯磺醯基、4-甲氧基苯磺醯基、4-甲基硫烷基苯磺醯基、4-苯基硫烷基苯磺醯基、4-二甲胺基苯磺醯基等。As the arylsulfonyl group which may have a substituent, an arylsulfonyl group having 6 to 30 carbon atoms is preferred. Examples include benzenesulfonyl, 1-naphthylsulfonyl, and 2-naphthylsulfonyl. , 2-chlorobenzenesulfonyl, 2-methylbenzenesulfonyl, 2-methoxybenzenesulfonyl, 2-butoxybenzenesulfonyl, 3-chlorobenzenesulfonyl, 3-trifluoro Methylbenzenesulfonyl, 3-cyanobenzenesulfonyl, 3-nitrobenzenesulfonyl, 4-fluorobenzenesulfonyl, 4-cyanobenzenesulfonyl, 4-methoxybenzenesulfonyl Group, 4-methylsulfanylbenzenesulfonyl, 4-phenylsulfanylbenzenesulfonyl, 4-dimethylaminobenzenesulfonyl and the like.
作為可具有取代基之醯基,碳數2~20的醯基為較佳,例如可列舉乙醯基、丙醯基、丁醯基、三氟甲基羰基、戊醯基、苯甲醯基、1-萘甲醯基、2-萘甲醯基、4-甲基硫烷基苯甲醯基、4-苯基硫烷基苯甲醯基、4-二甲基胺基苯甲醯基、4-二乙基胺基苯甲醯基、2-氯苯甲醯基、2-甲基苯甲醯基、2-甲氧基苯甲醯基、2-丁氧基苯甲醯基、3-氯苯甲醯基、3-三氟甲基苯甲醯基、3-氰基苯甲醯基、3-硝基苯甲醯基、4-氟苯甲醯基、4-氰基苯甲醯基、4-甲氧基苯甲醯基、丙醯基等。The fluorenyl group which may have a substituent is preferably a fluorenyl group having 2 to 20 carbon atoms, and examples thereof include ethyl fluorenyl, propyl fluorenyl, butyl fluorenyl, trifluoromethylcarbonyl, pentamyl, benzyl, 1 -Naphthylmethyl, 2-naphthylmethyl, 4-methylsulfanyl benzyl, 4-phenylsulfanyl benzyl, 4-dimethylamino benzyl, 4 -Diethylaminobenzyl, 2-chlorobenzyl, 2-methylbenzyl, 2-methoxybenzyl, 2-butoxybenzyl, 3- Chlorobenzyl, 3-trifluoromethylbenzyl, 3-cyanobenzyl, 3-nitrobenzyl, 4-fluorobenzyl, 4-cyanobenzyl , 4-methoxybenzyl, propionyl and the like.
作為可具有取代基之烷氧基羰基,碳數2~20的烷氧基羰基為較佳,例如可列舉甲氧基羰基、乙氧基羰基、丙氧基羰基、丁氧基羰基、己氧基羰基、辛氧基羰基、癸氧基羰基、十八烷氧基羰基、三氟甲基氧羰基等。The alkoxycarbonyl group which may have a substituent is preferably an alkoxycarbonyl group having 2 to 20 carbon atoms, and examples thereof include a methoxycarbonyl group, an ethoxycarbonyl group, a propoxycarbonyl group, a butoxycarbonyl group, and hexyloxy group. Carbonyl, octyloxycarbonyl, decyloxycarbonyl, octadecyloxycarbonyl, trifluoromethyloxycarbonyl and the like.
作為可具有取代基之芳氧基羰基,可列舉苯氧基羰基、1-萘氧基羰基、2-萘氧基羰基、4-甲基硫烷基苯氧基羰基、4-苯基硫烷基苯氧基羰基、4-二甲基胺基苯氧基羰基、4-二乙基胺基苯氧基羰基、2-氯苯氧基羰基、2-甲基苯氧基羰基、2-甲氧基苯氧基羰基、2-丁氧基苯氧基羰基、3-氯苯氧基羰基、3-三氟甲基苯氧基羰基、3-氰基苯氧基羰基、3-硝基苯氧基羰基、4-氟苯氧基羰基、4-氰基苯氧基羰基、4-甲氧基苯氧基羰基等。Examples of the aryloxycarbonyl group which may have a substituent include a phenoxycarbonyl group, a 1-naphthyloxycarbonyl group, a 2-naphthyloxycarbonyl group, a 4-methylsulfanylphenoxycarbonyl group, and a 4-phenylsulfanyl group. Phenoxycarbonyl, 4-dimethylaminophenoxycarbonyl, 4-diethylaminophenoxycarbonyl, 2-chlorophenoxycarbonyl, 2-methylphenoxycarbonyl, 2-methyl Oxyphenoxycarbonyl, 2-butoxyphenoxycarbonyl, 3-chlorophenoxycarbonyl, 3-trifluoromethylphenoxycarbonyl, 3-cyanophenoxycarbonyl, 3-nitrobenzene Oxycarbonyl, 4-fluorophenoxycarbonyl, 4-cyanophenoxycarbonyl, 4-methoxyphenoxycarbonyl and the like.
作為可具有取代基之膦醯基,總碳數2~50的膦醯基為較佳,例如可列舉二甲基膦醯基、二乙基膦醯基、二丙基膦醯基、二苯基膦醯基、二甲氧基膦醯基、二乙氧基膦醯基、二苯甲醯基膦醯基、雙(2,4,6-三甲基苯基)膦醯基等。As the phosphino group which may have a substituent, a phosphino group having a total carbon number of 2 to 50 is preferred, and examples thereof include dimethylphosphino group, diethylphosphino group, dipropylphosphino group, and diphenyl group. Phosphinofluorenyl, dimethoxyphosphinofluorenyl, diethoxyphosphinofluorenyl, dibenzomethylphosphoninophosphonium, bis (2,4,6-trimethylphenyl) phosphinofluorenyl and the like.
作為可具有取代基之雜環基,包含氮原子、氧原子、硫原子、磷原子的芳香族或脂肪族的雜環基為較佳。例如可列舉噻吩基、苯并[b]噻吩基、苯并[2,3-b]噻吩基、噻嗯基(thianthrenyl group)、呋喃基、吡喃基、異苯并呋喃基、苯并哌喃基(chromenyl group)、呫噸基(xanthenyl group)、啡噁噻基(phenoxathiinyl group)、2H-吡咯基、吡咯基、咪唑基、吡唑基、吡啶基、吡嗪基(pyrazinyl group)、嘧啶基、嗒嗪基(pyridazinyl group)、吲哚嗪基(indolizinyl group)、異吲哚基、3H-吲哚基、吲哚基、1H-吲唑基、嘌呤基、4H-喹嗪基(quinolizinyl group)、異喹啉基、喹啉基、酞嗪基(phthalazinyl group)、萘啶基(naphthyridinyl group)、喹噁啉基、喹唑啉基、噌啉基(cinnolinyl group)、喋啶基(pteridinyl group)、4aH-咔唑基、咔唑基、β-咔啉基、啡啶基、吖啶基、啶基(perimidinyl group)、啡啉基、啡嗪基、啡呻嗪基(phenarsazinyl group)、異噻唑基、啡噻嗪基、異噁唑基、呋吖基(furazanyl group)、啡噁嗪基、異基、基、吡咯啶基、吡咯啉基、咪唑啶基、咪唑啉基、吡唑啶基、吡唑啉基、哌啶基、哌嗪基(piperazinyl group)、吲哚啉基、異吲哚啉基、環基(quinuclidinyl group)、啉基、噻噸酮基等。The heterocyclic group which may have a substituent is preferably an aromatic or aliphatic heterocyclic group containing a nitrogen atom, an oxygen atom, a sulfur atom, and a phosphorus atom. Examples include thienyl, benzo [b] thienyl, benzo [2,3-b] thienyl, thianthrenyl group, furanyl, pyranyl, isobenzofuranyl, and benzophenone Chromenyl group, xanthenyl group, phenoxathiinyl group, 2H-pyrrolyl, pyrrolyl, imidazolyl, pyrazolyl, pyridyl, pyrazinyl group, Pyrimidinyl, pyridazinyl group, indolizinyl group, isoindolyl, 3H-indolyl, indolyl, 1H-indazolyl, purinyl, 4H-quinazinyl ( quinolizinyl group), isoquinolinyl, quinolinyl, phthalazinyl group, naphthyridinyl group, quinoxolinyl, quinazolinyl, cinnolinyl group, fluorinyl (Pteridinyl group), 4aH-carbazolyl, carbazolyl, β-carolinyl, morphinyl, acridyl, perimidinyl group, morpholinyl, morphazinyl, phenarsazinyl group), isothiazolyl, phenothiazinyl, isoxazolyl, furazanyl group, Phenoxazinyl, isoyl, yl, pyrrolidinyl, pyrrolinyl, imidazolyl, imidazolinyl, pyrazolyl, pyrazolinyl, piperidinyl, piperazinyl group, indole Phenyl, isoindolyl, Ring group (quinuclidinyl group), phosphono group, thioxanthone group and so on.
作為可具有取代基之烷基硫羰基,例如可列舉甲基硫羰基、丙基硫羰基、丁基硫羰基、己基硫羰基、辛基硫羰基、癸基硫羰基、十八烷基硫羰基、三氟甲基硫羰基等。Examples of the alkylthiocarbonyl group which may have a substituent include methylthiocarbonyl, propylthiocarbonyl, butylthiocarbonyl, hexylthiocarbonyl, octylthiocarbonyl, decylthiocarbonyl, octadecylthiocarbonyl, Trifluoromethylthiocarbonyl and the like.
作為可具有取代基之芳基硫羰基,可列舉1-萘基硫羰基、2-萘基硫羰基、4-甲基硫烷基苯基硫羰基、4-苯基硫烷基苯基硫羰基、4-二甲基胺基苯基硫羰基、4-二乙基胺基苯基硫羰基、2-氯苯基硫羰基、2-甲基苯基硫羰基、2-甲氧基苯基硫羰基、2-丁氧基苯基硫羰基、3-氯苯基硫羰基、3-三氟甲基苯基硫羰基、3-氰基苯基硫羰基、3-硝基苯基硫羰基、4-氟苯基硫羰基、4-氰基苯基硫羰基、4-甲氧基苯基硫羰基等。Examples of the arylthiocarbonyl group which may have a substituent include 1-naphthylthiocarbonyl group, 2-naphthylthiocarbonyl group, 4-methylsulfanylphenylthiocarbonyl group, and 4-phenylsulfanylphenylthiocarbonyl group. , 4-dimethylaminophenylthiocarbonyl, 4-diethylaminophenylthiocarbonyl, 2-chlorophenylthiocarbonyl, 2-methylphenylthiocarbonyl, 2-methoxyphenylthio Carbonyl, 2-butoxyphenylthiocarbonyl, 3-chlorophenylthiocarbonyl, 3-trifluoromethylphenylthiocarbonyl, 3-cyanophenylthiocarbonyl, 3-nitrophenylthiocarbonyl, 4 -Fluorophenylthiocarbonyl, 4-cyanophenylthiocarbonyl, 4-methoxyphenylthiocarbonyl, and the like.
作為可具有取代基之二烷基胺基羰基,可列舉二甲基胺基羰基、二乙基胺基羰基、二丙基胺基羰基、二丁基胺基羰基等。Examples of the dialkylaminocarbonyl group which may have a substituent include a dimethylaminocarbonyl group, a diethylaminocarbonyl group, a dipropylaminocarbonyl group, and a dibutylaminocarbonyl group.
作為可具有取代基之二烷基胺基硫羰基,可列舉二甲基胺基硫羰基、二丙基胺基硫羰基、二丁基胺基硫羰基等。Examples of the dialkylaminothiocarbonyl group which may have a substituent include a dimethylaminothiocarbonyl group, a dipropylaminothiocarbonyl group, a dibutylaminothiocarbonyl group, and the like.
從高靈敏度化的觀點考慮,式(a-1)的R1 係可具有取代基之醯基為較佳,乙醯基、丙醯基、苯甲醯基、甲苯基為更佳。From the viewpoint of high sensitivity, the fluorenyl group which may have a substituent in the R 1 system of the formula (a-1) is more preferred, and the ethenyl, propionyl, benzyl, and tolyl groups are more preferred.
環狀肟化合物A具有在上述之環狀肟部位鍵結有選自芳香族烴環及雜環之至少1種環之結構為較佳。更具體而言,具有在上述之環狀肟部位稠合選自芳香族烴環及雜環之至少1種環而形成之、包含環狀肟部位之稠環為較佳。藉由使用具有該等結構之環狀肟化合物A,能夠實現更高靈敏度化。又,上述電子吸引基A與上述芳香族烴環或雜環鍵結為較佳。The cyclic oxime compound A preferably has a structure in which at least one ring selected from the group consisting of an aromatic hydrocarbon ring and a heterocyclic ring is bonded to the above-mentioned cyclic oxime site. More specifically, a fused ring containing a cyclic oxime moiety formed by condensing at least one ring selected from an aromatic hydrocarbon ring and a heterocyclic ring at the cyclic oxime site is preferable. By using a cyclic oxime compound A having such a structure, higher sensitivity can be achieved. The electron attracting group A is preferably bonded to the aromatic hydrocarbon ring or heterocyclic ring.
芳香族烴環可以為單環亦可以為稠環。作為芳香族烴環的具體例,可列舉苯環、聯伸苯基環、萘環、蒽環、菲蒽環、薁環、茀環等。The aromatic hydrocarbon ring may be a monocyclic ring or a fused ring. Specific examples of the aromatic hydrocarbon ring include a benzene ring, a biphenylene ring, a naphthalene ring, an anthracene ring, a phenanthrene ring, a fluorene ring, a fluorene ring, and the like.
雜環可以為單環,亦可以為稠環。雜環係包含氮原子、氧原子或硫原子之芳香族或脂肪族的雜環為較佳,更佳為包含氮原子或氧原子之芳香族或脂肪族的雜環,進一步較佳為包含氮原子之芳香族或脂肪族的雜環。作為雜環的具體例,可列舉吡咯環、呋喃環、噻吩環、吡啶環、吡環、嘧啶環、嗒環、哌環、哌喃環、色滿環、咪唑環、噻唑環、吡唑環、啉環、咔唑環、噻蒽環、二羥基啡嗪環、二苯并噻吩環及包含該等環之稠環,吡咯環、呋喃環、噻吩環、咔唑環、噻蒽環、二羥基啡嗪環、二苯并噻吩環為較佳,噻吩環、咔唑環、噻蒽環、二羥基啡嗪環、二苯并噻吩環為更佳,咔唑環及二苯并噻吩環為進一步較佳。The heterocyclic ring may be a single ring or a fused ring. A heterocyclic ring is preferably an aromatic or aliphatic heterocyclic ring containing a nitrogen atom, an oxygen atom, or a sulfur atom, more preferably an aromatic or aliphatic heterocyclic ring containing a nitrogen atom or an oxygen atom, and even more preferably a nitrogen ring. Atomic aromatic or aliphatic heterocyclic ring. Specific examples of the heterocyclic ring include a pyrrole ring, a furan ring, a thiophene ring, a pyridine ring, a pyrimyl ring, a pyrimidine ring, a da ring, a piperidine ring, a piperan ring, a chroman ring, an imidazole ring, a thiazole ring, and a pyrazole ring. Ring A hydroxyphenazine ring and a dibenzothiophene ring are preferred. A thiophene ring, a carbazole ring, a thiathracene ring, a dihydroxyphenazine ring, and a dibenzothiophene ring are more preferred. Further preferred.
從更容易實現高靈敏度化之理由考慮,環狀肟化合物A具有在上述之環狀肟部位鍵結有包含咔唑環或二苯并噻吩環之稠環之結構為較佳。From the reason that it is easier to achieve high sensitivity, it is preferable that the cyclic oxime compound A has a structure in which a fused ring including a carbazole ring or a dibenzothiophene ring is bonded to the above-mentioned cyclic oxime site.
本發明中所使用之環狀肟化合物A係由下述式(1)表示之化合物為較佳。
[化學式6]
式(1)中,X1
表示-O-、-CRx1
RX2
-、-S-、-NRx3
-或>C=N-O-Rx4
,Rx1
~Rx4
分別獨立地表示氫原子或取代基,Rx1
及Rx3
可以與R2
、R3
或由B表示之環鍵結而形成環,R1
~R3
分別獨立地表示取代基,L表示碳數1~3的伸烷基或-CRL1
=CRL2
-,RL1
及RL2
分別獨立地表示氫原子或取代基,B表示包含選自芳香族烴環及雜環中之至少一種之環,Z1
表示Taft的σ*
常數值為3.5以上的電子吸引基,n表示0或1,m表示0或1,q表示1以上的整數,o、p分別獨立地表示0以上的整數,p為2以上時,p個R2
可以相同,亦可不同,2個R2
彼此可以鍵結而形成環,o為2以上時,o個R3
可以相同,亦可不同,2個R3
彼此可以鍵結而形成環,q為2以上時,q個Z1
可以相同,亦可不同。The cyclic oxime compound A used in the present invention is preferably a compound represented by the following formula (1).
[Chemical Formula 6]
In formula (1), X 1 represents -O-, -CR x1 R X2- , -S-, -NR x3 -or> C = NOR x4 , and R x1 to R x4 each independently represent a hydrogen atom or a substituent, R x1 and R x3 may be bonded to R 2 , R 3 or a ring represented by B to form a ring. R 1 to R 3 each independently represent a substituent, and L represents an alkylene group having 1 to 3 carbon atoms or -CR. L1 = CR L2- , R L1 and R L2 each independently represent a hydrogen atom or a substituent, B represents a ring containing at least one selected from an aromatic hydrocarbon ring and a heterocyclic ring, and Z 1 represents Taft's σ * constant value 3.5 or more electron attracting groups, n represents 0 or 1, m represents 0 or 1, q represents an integer of 1 or more, o and p each independently represent an integer of 0 or more, and when p is 2 or more, p R 2 may be the same It can also be different. Two R 2 can be bonded to each other to form a ring. When o is 2 or more, o R 3 can be the same or different. Two R 3 can be bonded to each other to form a ring. Q is 2 or more. In this case, q Z 1 may be the same or different.
式(1)的Z1 所表示之Taft的σ* 常數值為3.5以上的電子吸引基的含義與上述之電子吸引基A相同,較佳的範圍亦相同。The meaning of the electron-attracting group of Taft having a σ * constant value of 3.5 or more represented by Z 1 in the formula (1) is the same as that of the electron-attracting group A described above, and the preferred range is also the same.
式(1)的X1
表示-O-、-CRx1
RX2
-、-S-、-NRx3
-或>C=N-O-Rx4
,Rx1
~Rx4
分別獨立地表示氫原子或取代基。
從更容易提高光分解效率之理由考慮,X1
係-O-、-CRx1
RX2
-、-S-為較佳。
作為Rx1
~Rx3
所表示之取代基,可列舉烷基、芳基、烯基、炔基及雜環基。關於該等基團的詳細內容的含義與在式(a-1)的R1
中說明之範圍相同。
作為Rx4
所表示之取代基,可列舉烷基、芳基、烯基、炔基、烷基亞磺醯基、芳基亞磺醯基、烷基磺醯基、芳基磺醯基、醯基、烷氧基羰基、芳氧基羰基、膦醯基、雜環基、烷基硫羰基、芳基硫羰基、二烷基胺基羰基、二烷基胺基硫羰基等,從高靈敏度的觀點考慮,醯基為較佳。關於該等基團的詳細內容的含義與在式(a-1)的R1
中說明之範圍相同。
Rx1
及Rx3
可以與R2
、R3
或由B表示之環鍵結而形成環。所形成之環可以為脂肪族環,亦可以為芳香族環。X 1 in formula (1) represents -O-, -CR x1 R X2- , -S-, -NR x3 -or> C = NOR x4 , and R x1 to R x4 each independently represent a hydrogen atom or a substituent.
From the reason that it is easier to improve the photodecomposition efficiency, X 1 -O-, -CR x1 R X2- , -S- are preferable.
Examples of the substituent represented by R x1 to R x3 include an alkyl group, an aryl group, an alkenyl group, an alkynyl group, and a heterocyclic group. The meanings of the details of these groups are the same as those described for R 1 in formula (a-1).
Examples of the substituent represented by R x4 include an alkyl group, an aryl group, an alkenyl group, an alkynyl group, an alkylsulfinylene group, an arylsulfinyl group, an alkylsulfonyl group, an arylsulfonyl group, and fluorene. Group, alkoxycarbonyl, aryloxycarbonyl, phosphino, heterocyclyl, alkylthiocarbonyl, arylthiocarbonyl, dialkylaminocarbonyl, dialkylaminothiocarbonyl, etc. From a viewpoint perspective, fluorene is preferred. The meanings of the details of these groups are the same as those described for R 1 in formula (a-1).
R x1 and R x3 may be bonded to R 2 , R 3 or a ring represented by B to form a ring. The formed ring may be an aliphatic ring or an aromatic ring.
式(1)的R1 ~R3 分別獨立地表示取代基。R1 所表示之取代基的含義與式(a-1)的R1 中說明之範圍相同。作為R2 及R3 所表示之取代基,可列舉鹵素原子、烷基、芳基、烯基、炔基、醯基及雜環基等。關於該等基團的詳細內容的含義與在式(a-1)的R1 中說明之範圍相同。R 1 to R 3 in formula (1) each independently represent a substituent. Represented by R 1 in the same range as the one described in the substituent group R with the meanings of formula (a-1) a. Examples of the substituents represented by R 2 and R 3 include a halogen atom, an alkyl group, an aryl group, an alkenyl group, an alkynyl group, a fluorenyl group, and a heterocyclic group. The meanings of the details of these groups are the same as those described for R 1 in formula (a-1).
式(1)的L表示碳數1~3的伸烷基或-CRL1
=CRL2
-,RL1
及RL2
分別獨立地表示氫原子或取代基。L所表示之伸烷基係碳數1或2的伸烷基為較佳,碳數1的伸烷基為更佳。又,L所表示之伸烷基可以具有取代基。
作為L所表示之伸烷基可具有之取代基,可列舉鹵素原子、烷基、芳基、烯基、炔基、醯基、雜環基及亞烷基。作為鹵素原子,可列舉氯原子、氟原子、溴原子及碘原子。作為亞烷基,碳數1~10的亞烷基為較佳,例如可列舉次甲基、亞乙基、亞丙基、亞異丙基、伸丁基等。關於烷基、芳基、烯基、炔基、醯基、雜環基,可列舉在式(a-1)的R1
中說明之基團。
作為RL1
及RL2
所表示之取代基,可列舉鹵素原子、烷基、芳基、烯基、炔基、醯基及雜環基。作為鹵素原子,可列舉氯原子、氟原子、溴原子及碘原子。關於烷基、芳基、烯基、炔基、醯基、雜環基,可列舉在式(a-1)的R1
中說明之基團。L in formula (1) represents an alkylene group having 1 to 3 carbon atoms or -CR L1 = CR L2- , and R L1 and R L2 each independently represent a hydrogen atom or a substituent. The alkylene group represented by L is preferably an alkylene group having 1 or 2 carbon atoms, and an alkylene group having 1 carbon atom is more preferred. The alkylene group represented by L may have a substituent.
Examples of the substituent that the alkylene group represented by L may have include a halogen atom, an alkyl group, an aryl group, an alkenyl group, an alkynyl group, a fluorenyl group, a heterocyclic group, and an alkylene group. Examples of the halogen atom include a chlorine atom, a fluorine atom, a bromine atom, and an iodine atom. The alkylene group is preferably an alkylene group having 1 to 10 carbon atoms, and examples thereof include methine, ethylene, propylene, isopropylidene, and butylene. Examples of the alkyl group, the aryl group, the alkenyl group, the alkynyl group, the fluorenyl group, and the heterocyclic group include the groups described for R 1 in the formula (a-1).
Examples of the substituents represented by R L1 and R L2 include a halogen atom, an alkyl group, an aryl group, an alkenyl group, an alkynyl group, a fluorenyl group, and a heterocyclic group. Examples of the halogen atom include a chlorine atom, a fluorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group, the aryl group, the alkenyl group, the alkynyl group, the fluorenyl group, and the heterocyclic group include the groups described for R 1 in the formula (a-1).
式(1)的B表示包含選自芳香族烴環及雜環之至少1種之環。芳香族烴環可以為單環亦可以為稠環。作為芳香族烴環的具體例,可列舉苯環、聯伸苯基環、萘環、蒽環、菲蒽環、薁環、茀環等。雜環基可以為單環,亦可以為稠環。雜環係包含氮原子、氧原子或硫原子之芳香族或脂肪族的雜環為較佳,更佳為包含氮原子或氧原子之芳香族或脂肪族的雜環,進一步較佳為包含氮原子之芳香族或脂肪族的雜環。作為雜環的具體例,可列舉吡咯環、呋喃環、噻吩環、吡啶環、吡環、嘧啶環、嗒環、哌環、哌喃環、色滿環、咪唑環、噻唑環、吡唑環、啉環、咔唑環、噻蒽環、二羥基啡嗪環、二苯并噻吩環及包含該等環之稠環,吡咯環、呋喃環、噻吩環、咔唑環、噻蒽環、二羥基啡嗪環、二苯并噻吩環為較佳,噻吩環、咔唑環、噻蒽環、二羥基啡嗪環、二苯并噻吩環為更佳,咔唑環及二苯并噻吩環為進一步較佳。B in Formula (1) represents a ring containing at least one selected from an aromatic hydrocarbon ring and a heterocyclic ring. The aromatic hydrocarbon ring may be a monocyclic ring or a fused ring. Specific examples of the aromatic hydrocarbon ring include a benzene ring, a biphenylene ring, a naphthalene ring, an anthracene ring, a phenanthrene ring, a fluorene ring, a fluorene ring, and the like. The heterocyclic group may be a single ring or a fused ring. A heterocyclic ring is preferably an aromatic or aliphatic heterocyclic ring containing a nitrogen atom, an oxygen atom, or a sulfur atom, more preferably an aromatic or aliphatic heterocyclic ring containing a nitrogen atom or an oxygen atom, and even more preferably a nitrogen ring. Atomic aromatic or aliphatic heterocyclic ring. Specific examples of the heterocyclic ring include a pyrrole ring, a furan ring, a thiophene ring, a pyridine ring, a pyrimyl ring, a pyrimidine ring, a da ring, a piperidine ring, a piperan ring, a chroman ring, an imidazole ring, a thiazole ring, and a pyrazole ring. , Phthaloline ring, carbazole ring, thiathracene ring, dihydroxyphenazine ring, dibenzothiophene ring and fused rings containing these rings, pyrrole ring, furan ring, thiophene ring, carbazole ring, thiathracene ring, two A hydroxyphenazine ring and a dibenzothiophene ring are preferred. A thiophene ring, a carbazole ring, a thiathracene ring, a dihydroxyphenazine ring, and a dibenzothiophene ring are more preferred. The carbazole ring and the dibenzothiophene ring are Further preferred.
式(1)的n表示0或1。從高靈敏度化的觀點考慮,n係0為較佳。
式(1)的m表示0或1。式(1)的q表示1以上的整數,1或2為較佳。式(1)的o、p分別獨立地表示0以上的整數,0~2為較佳,0~1為更佳。p為2以上時,p個R2
可以相同,亦可不同,2個R2
彼此可以鍵結而形成環。又,o為2以上時,o個R3
可以相同,亦可不同,2個R3
彼此可以鍵結而形成環。該等基團彼此鍵結而形成之環可以為脂肪族環,亦可以為芳香族環。N in the formula (1) represents 0 or 1. From the viewpoint of high sensitivity, n is preferably 0.
M in the formula (1) represents 0 or 1. Q in Formula (1) represents an integer of 1 or more, and 1 or 2 is preferable. In the formula (1), o and p each independently represent an integer of 0 or more, 0 to 2 is preferable, and 0 to 1 is more preferable. When p is 2 or more, p R 2 may be the same or different, and two R 2 may be bonded to each other to form a ring. When o is 2 or more, o R 3 may be the same or different, and two R 3 may be bonded to each other to form a ring. The ring formed by bonding these groups to each other may be an aliphatic ring or an aromatic ring.
本發明中所使用之環狀肟化合物A係由下述式(2)表示之化合物為較佳。
[化學式7]
式(2)中,X1
表示-O-、-CRx1
RX2
-、-S-、-NRx3
-或>C=N-O-Rx4
,Rx1
~Rx4
分別獨立地表示氫原子或取代基,Rx1
及Rx3
可以與R2
或R3a
鍵結而形成環,L表示碳數1~3的伸烷基或-CRL1
=CRL2
-,RL1
及RL2
分別獨立地表示氫原子或取代基,R1
、R2
、R3a
及R3b
分別獨立地表示取代基,Z1a
及Z1b
分別獨立地表示Taft的σ*
常數值為3.5以上的電子吸引基,Y1
表示-CRY1
RY2
-、-NRY3
-或-S-,RY1
~RY3
分別獨立地表示氫原子或取代基,n表示0或1,m表示0或1,o1、o2、p、q1及q2分別獨立地表示0以上的整數,q1及q2中的至少一者表示1以上的整數,p為2以上時,p個R2
可以相同,亦可不同,2個R2
彼此可以鍵結而形成環,o1為2以上時,o1個R3a
可以相同,亦可不同,2個R3a
彼此可以鍵結而形成環,o2為2以上時,o2個R3b
可以相同,亦可不同,2個R3b
彼此可以鍵結而形成環,q1為2以上時,q1個Z1a
可以相同,亦可不同,q2為2以上時,q2個Z1b
可以相同,亦可不同。The cyclic oxime compound A used in the present invention is preferably a compound represented by the following formula (2).
[Chemical Formula 7]
In formula (2), X 1 represents -O-, -CR x1 R X2- , -S-, -NR x3 -or> C = NOR x4 , and R x1 to R x4 each independently represent a hydrogen atom or a substituent, R x1 and R x3 may be bonded to R 2 or R 3a to form a ring, L represents an alkylene group having 1 to 3 carbon atoms or -CR L1 = CR L2- , and R L1 and R L2 each independently represent a hydrogen atom or Substituents, R 1 , R 2 , R 3a and R 3b each independently represent a substituent, Z 1a and Z 1b each independently represent an electron attracting group having a σ * constant value of 3.5 or more, and Y 1 represents -CRY 1 RY 2- , -NRY 3 -or -S-, RY 1 to RY 3 each independently represent a hydrogen atom or a substituent, n represents 0 or 1, m represents 0 or 1, o1, o2, p, q1, and q2 respectively independently represents an integer of 0, q1 and q2 is at least one represents an integer of 1, p is 2 or more, P R 2 s may be the same or different, two R 2 may be bonded to each other to form a ring When o1 is 2 or more, o1 R 3a may be the same or different, and two R 3a may be bonded to each other to form a ring. When o2 is 2 or more, o2 R 3b may be the same or different, and two R 3b may be bonded to each other to form a ring. When q1 is 2 or more, q1 Z 1a may be formed. It may be the same or different. When q2 is 2 or more, q2 Z 1b may be the same or different.
式(2)的X1 、L、R1 、R2 、m及n的含義與式(1)的X1 、L、R1 、R2 、m及n的相同,較佳的範圍亦相同。式(2)的R3a 及R3b 的含義與式(1)的R3 的相同,較佳的範圍亦相同。式(2)的o1及o2的含義與式(1)的o的相同,較佳的範圍亦相同。式(2)中,o1為2以上時,o1個R3a 可以相同,亦可不同,2個R3a 彼此可以鍵結而形成環,o2為2以上時,o2個R3b 可以相同,亦可不同,2個R3b 彼此可以鍵結而形成環。該等基團彼此鍵結而形成之環可以為脂肪族環,亦可以為芳香族環。X of formula (2) is 1, L, R 1, R 2, m and n have the meaning as in formula (1), X 1, L, R 1, R 2, m and n are the same as the preferred ranges are also the same . The meanings of R 3a and R 3b in formula (2) are the same as those of R 3 in formula (1), and preferred ranges are also the same. The meanings of o1 and o2 in formula (2) are the same as those of o in formula (1), and the preferred ranges are also the same. In formula (2), when o1 is 2 or more, o1 R 3a may be the same or different, and two R 3a may be bonded to each other to form a ring. When o2 is 2 or more, o2 R 3b may be the same or may be different. Differently, two R 3b may be bonded to each other to form a ring. The ring formed by bonding these groups to each other may be an aliphatic ring or an aromatic ring.
式(2)的Z1a 及Z1b 所表示之Taft的σ* 常數值為3.5以上的電子吸引基的含義與上述之電子吸引基A的相同,較佳的範圍亦相同。式(2)中,q1及q2分別獨立地為0以上的整數,q1及q2中的至少一個表示1以上的整數。q1及q2分別獨立地表示0~2為較佳,0或1為更佳。式(2)中,q1為2以上時,q1個Z1a 可以相同,亦可不同,q2為2以上時,q2個Z1b 可以相同,亦可不同。The meaning of the electron-attracting group of Taft σ * constant value of 3.5 or more represented by Z 1a and Z 1b in the formula (2) is the same as that of the electron-attracting group A described above, and the preferable range is also the same. In Formula (2), q1 and q2 are each independently an integer of 0 or more, and at least one of q1 and q2 represents an integer of 1 or more. q1 and q2 each independently indicate that 0 to 2 is preferable, and 0 or 1 is more preferable. In formula (2), when q1 is 2 or more, q1 Z 1a may be the same or different, and when q2 is 2 or more, q2 Z 1b may be the same or different.
式(2)的Y1 表示-CRY1 RY2 -、-NRY3 -或-S-,RY1 ~RY3 分別獨立地表示氫原子或取代基。作為RY1 ~RY3 所表示之取代基,可列舉鹵素原子、烷基、芳基、烯基、炔基、醯基及雜環基。作為鹵素原子,可列舉氯原子、氟原子、溴原子及碘原子。關於烷基、芳基、烯基、炔基、醯基、雜環基,可列舉在式(a-1)的R1 中說明之基團。Y 1 in formula (2) represents -CR Y1 R Y2- , -NR Y3- , or -S-, and R Y1 to R Y3 each independently represent a hydrogen atom or a substituent. Examples of the substituents represented by R Y1 to R Y3 include a halogen atom, an alkyl group, an aryl group, an alkenyl group, an alkynyl group, a fluorenyl group, and a heterocyclic group. Examples of the halogen atom include a chlorine atom, a fluorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group, the aryl group, the alkenyl group, the alkynyl group, the fluorenyl group, and the heterocyclic group include the groups described for R 1 in the formula (a-1).
本發明中所使用之環狀肟化合物A係由下述式(3a)或式(3b)表示之化合物為較佳。該等化合物具有更優異之靈敏度而尤其較佳地使用。
[化學式8]
式(3a)中,X1
表示-O-、-CRx1
RX2
-、-S-、-NRx3
-或>C=N-O-Rx4
,Rx1
~Rx4
分別獨立地表示氫原子或取代基,Rx1
及Rx3
可以與R2
或R3c
鍵結而形成環,Y2
表示-CRY21
RY22
-、-NRY23
-或-S-,RY21
~RY23
分別獨立地表示氫原子或取代基;式(3b)中,X2
表示>CRX10
-或>N-,Rx10
表示氫原子或取代基;
式(3a)及式(3b)中,R1
、R2
、R3c
及R3d
分別獨立地表示取代基,L表示碳數1~3的伸烷基或-CRL1
=CRL2
-,RL1
及RL2
分別獨立地表示氫原子或取代基,Z1c
及Z1d
分別獨立地表示Taft的σ*
常數值為3.5以上的電子吸引基,n表示0或1,m表示0或1,o3、o4、p、q3及q4分別獨立地表示0以上的整數,q3及q4中的至少一個表示1以上的整數,p為2以上時,p個R2
可以相同,亦可不同,2個R2
彼此可以鍵結而形成環,o3為2以上時,o3個R3c
可以相同,亦可不同,2個R3c
彼此可以鍵結而形成環,o4為2以上時,o4個R3d
可以相同,亦可不同,2個R3d
彼此可以鍵結而形成環,q3為2以上時,q3個Z1c
可以相同,亦可不同,q4為2以上時,q4個Z1d
可以相同,亦可不同。The cyclic oxime compound A used in the present invention is preferably a compound represented by the following formula (3a) or (3b). These compounds have more excellent sensitivity and are particularly preferably used.
[Chemical Formula 8]
In formula (3a), X 1 represents -O-, -CR x1 R X2- , -S-, -NR x3 -or> C = NOR x4 , and R x1 to R x4 each independently represent a hydrogen atom or a substituent, R x1 and R x3 may be bonded to R 2 or R 3c to form a ring, Y 2 represents -CR Y21 R Y22- , -NR Y23- , or -S-, and R Y21 to R Y23 each independently represent a hydrogen atom or a substitution In formula (3b), X 2 represents> CR X10 -or> N-, and R x10 represents a hydrogen atom or a substituent;
In formula (3a) and formula (3b), R 1 , R 2 , R 3c and R 3d each independently represent a substituent, and L represents an alkylene group having 1 to 3 carbon atoms or -CR L1 = CR L2- , R L1 and R L2 each independently represent a hydrogen atom or a substituent, Z 1c and Z 1d each independently represent an electron attracting group having a σ * constant value of 3.5 or more, n represents 0 or 1, m represents 0 or 1, and o3 , O4, p, q3, and q4 each independently represent an integer of 0 or more, and at least one of q3 and q4 represents an integer of 1 or more. When p is 2 or more, p R 2 may be the same or different, and 2 R 2 may be bonded to each other to form a ring. When o3 is 2 or more, o3 R 3c may be the same or different. 2 R 3c may be bonded to each other to form a ring. When o4 is 2 or more, o4 R 3d may be the same. It can also be different. Two R 3ds can be bonded to each other to form a ring. When q3 is 2 or more, q3 Z 1c can be the same or different. When q4 is 2 or more, q4 Z 1d can be the same or different. .
式(3a)的X1 、L、R1 、R2 、m及n的含義與式(1)的X1 、L、R1 、R2 、m及n的相同,較佳的範圍亦相同。X of formula (3a) is 1, L, R 1, R 2, X m and n are as defined in the formula (1) is 1, L, R 1, R 2, m and n are the same as the preferred ranges are also the same .
式(3a)的Y2 表示-CRY21 RY22 -、-NRY23 -或-S-,RY21 ~RY23 分別獨立地表示氫原子或取代基。作為RY21 ~RY23 所表示之取代基,可列舉鹵素原子、烷基、芳基、烯基、炔基、醯基及雜環基。作為鹵素原子,可列舉氯原子、氟原子、溴原子及碘原子。關於烷基、芳基、烯基、炔基、醯基、雜環基,可列舉在式(a-1)的R1 中說明之基團。Y 2 in formula (3a) represents -CR Y21 R Y22- , -NR Y23- , or -S-, and R Y21 to R Y23 each independently represent a hydrogen atom or a substituent. Examples of the substituents represented by R Y21 to R Y23 include a halogen atom, an alkyl group, an aryl group, an alkenyl group, an alkynyl group, a fluorenyl group, and a heterocyclic group. Examples of the halogen atom include a chlorine atom, a fluorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group, the aryl group, the alkenyl group, the alkynyl group, the fluorenyl group, and the heterocyclic group include the groups described for R 1 in the formula (a-1).
式(3b)的L、R1 、R2 、m及n的含義與式(1)的L、R1 、R2 、m及n的相同,較佳的範圍亦相同。Of formula (3b) of the L, R 1, L R 2 , m and n have the meaning as in formula (1), R 1, R 2, m and n are the same as the preferred ranges are also the same.
式(3b)的X2 表示>CRX10 -或>N-,Rx10 表示氫原子或取代基。作為Rx10 所表示之取代基,可列舉鹵素原子、烷基、芳基、烯基、炔基、醯基及雜環基。作為鹵素原子,可列舉氯原子、氟原子、溴原子及碘原子。關於烷基、芳基、烯基、炔基、醯基、雜環基,可列舉在式(a-1)的R1 中說明之基團。X 2 in formula (3b) represents> CR X10 -or> N-, and R x10 represents a hydrogen atom or a substituent. Examples of the substituent represented by R x10 include a halogen atom, an alkyl group, an aryl group, an alkenyl group, an alkynyl group, a fluorenyl group, and a heterocyclic group. Examples of the halogen atom include a chlorine atom, a fluorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group, the aryl group, the alkenyl group, the alkynyl group, the fluorenyl group, and the heterocyclic group include the groups described for R 1 in the formula (a-1).
式(3a)及式(3b)的R3c
及R3d
的含義與式(1)的R3
的相同,較佳的範圍亦相同。式(3a)及式(3b)的o3及o4的含義與式(1)的o的相同,較佳的範圍亦相同。式(3a)及式(3b)中,o3為2以上時,o3個R3c
可以相同,亦可不同,2個R3c
彼此可以鍵結而形成環,o4為2以上時,o4個R3d
可以相同,亦可不同,2個R3d
彼此可以鍵結而形成環。
該等基團彼此鍵結而形成之環可以為脂肪族環,亦可以為芳香族環。The meanings of R 3c and R 3d in formula (3a) and formula (3b) are the same as those of R 3 in formula (1), and preferred ranges are also the same. The meanings of o3 and o4 in formula (3a) and formula (3b) are the same as those of o in formula (1), and the preferred ranges are also the same. In formulas (3a) and (3b), when o3 is 2 or more, o3 R 3c may be the same or different, and two R 3c may be bonded to each other to form a ring. When o4 is 2 or more, o4 R 3d They may be the same or different, and two R 3ds may be bonded to each other to form a ring.
The ring formed by bonding these groups to each other may be an aliphatic ring or an aromatic ring.
式(3a)及式(3b)的Z1c 及Z1d 所表示之Taft的σ* 常數值為3.5以上的電子吸引基的含義與上述之電子吸引基A的相同,較佳的範圍亦相同。式(3a)及式(3b)中,q3及q4分別獨立地為0以上的整數,q3及q4中的至少一個表示1以上的整數。q3及q4分別獨立地表示0~2為較佳,0或1為更佳。式(3a)及式(3b)中,q3為2以上時,q3個Z1c 可以相同,亦可不同,q4為2以上時,q4個Z1d 可以相同,亦可不同。The electron-attracting group of Taft having a σ * constant value of 3.5 or more represented by Z 1c and Z 1d in the formulae (3a) and (3b) has the same meaning as the electron-attracting group A described above, and the preferable range is also the same. In formulas (3a) and (3b), q3 and q4 are each independently an integer of 0 or more, and at least one of q3 and q4 represents an integer of 1 or more. Each of q3 and q4 independently indicates that 0 to 2 is preferable, and 0 or 1 is more preferable. In formula (3a) and formula (3b), when q3 is 2 or more, q3 Z 1c may be the same or different, and when q4 is 2 or more, q4 Z 1d may be the same or different.
本發明中所使用之環狀肟化合物A係由下述式(4a)或式(4b)表示之化合物為較佳。使用了該等化合物之情況下,更容易提高感光性組成物的經時穩定性。
[化學式9]
The cyclic oxime compound A used in the present invention is preferably a compound represented by the following formula (4a) or (4b). When these compounds are used, it is easier to improve the stability of the photosensitive composition over time.
[Chemical Formula 9]
式(4a)中,X1
表示-O-、-CRx1
RX2
-、-S-、-NRx3
-或>C=N-O-Rx4
,Rx1
~Rx4
分別獨立地表示氫原子或取代基,Rx1
及Rx3
可以與R2
或R3a
鍵結而形成環;
式(4a)及式(4b)中,R1
、R3e
及R3f
分別獨立地表示取代基,Z1e
及Z1f
分別獨立地表示Taft的σ*
常數值為3.5以上的電子吸引基,o5、o6、q5及q6分別獨立地表示0以上的整數,q5及q6中的至少一個表示1以上的整數,o5為2以上時,o5個R3e
可以相同,亦可不同,2個R3e
彼此可以鍵結而形成環,o6為2以上時,o6個R3f
可以相同,亦可不同,2個R3f
彼此可以鍵結而形成環,q5為2以上時,q5個Z1e
可以相同,亦可不同,q6為2以上時,q6個Z1f
可以相同,亦可不同。In formula (4a), X 1 represents -O-, -CR x1 R X2- , -S-, -NR x3 -or> C = NOR x4 , and R x1 to R x4 each independently represent a hydrogen atom or a substituent, R x1 and R x3 may be bonded to R 2 or R 3a to form a ring;
In the formulae (4a) and (4b), R 1 , R 3e and R 3f each independently represent a substituent, Z 1e and Z 1f each independently represent an electron attracting group having a σ * constant value of 3.5 or more, and o5 , O6, q5, and q6 each independently represent an integer of 0 or more, at least one of q5 and q6 represents an integer of 1 or more, and when o5 is 2 or more, o5 R 3e may be the same or different, and two R 3e are each other It can be bonded to form a ring. When o6 is 2 or more, o6 R 3f can be the same or different. Two R 3f can be bonded to each other to form a ring. When q5 is 2 or more, q5 Z 1e can be the same. It may be different. When q6 is 2 or more, q6 Z 1f may be the same or different.
式(4a)的X1 及R1 的含義與式(1)的X1 及R1 的相同,較佳的範圍亦相同。The meanings of X 1 and R 1 in formula (4a) are the same as those of X 1 and R 1 in formula (1), and preferred ranges are also the same.
式(4b)的R1 的含義與式(1)的R1 的相同,較佳的範圍亦相同。The meaning of R 1 in formula (4b) is the same as that of R 1 in formula (1), and the preferred range is also the same.
式(4a)及式(4b)的R3e
及R3f
的含義與式(1)的R3
的相同,較佳的範圍亦相同。式(4a)及式(4b)的o5及o6的含義與式(1)的o的相同,較佳的範圍亦相同。式(4a)及式(4b)中,o5為2以上時,o5個R3e
可以相同,亦可不同,2個R3e
彼此可以鍵結而形成環,o6為2以上時,o6個R3f
可以相同,亦可不同,2個R3f
彼此可以鍵結而形成環。
該等基團彼此鍵結而形成之環可以為脂肪族環,亦可以為芳香族環。The meanings of R 3e and R 3f in formula (4a) and formula (4b) are the same as those of R 3 in formula (1), and preferred ranges are also the same. The meanings of o5 and o6 in formula (4a) and formula (4b) are the same as those of o in formula (1), and the preferred ranges are also the same. In formulas (4a) and (4b), when o5 is 2 or more, o5 R 3e may be the same or different, and two R 3e may be bonded to each other to form a ring. When o6 is 2 or more, o6 R 3f It may be the same or different, and two R 3f may be bonded to each other to form a ring.
The ring formed by bonding these groups to each other may be an aliphatic ring or an aromatic ring.
式(4a)及式(4b)的Z1e 及Z1f 所表示之Taft的σ* 常數值為3.5以上的電子吸引基的含義與上述之電子吸引基A的相同,較佳的範圍亦相同。式(4a)及式(4b)中,q5及q6分別獨立地表示0以上的整數,q5及q6中的至少一個表示1以上的整數。q5及q6分別獨立地為0~2為較佳,0或1為更佳。式(4a)及式(4b)中,q5為2以上時,q5個Z1e 可以相同,亦可不同,q6為2以上時,q6個Z1f 可以相同,亦可不同。The electron-attracting group of Taft having a σ * constant value of 3.5 or more represented by Z 1e and Z 1f in the formulae (4a) and (4b) has the same meaning as the electron-attracting group A described above, and the preferred range is also the same. In Formula (4a) and Formula (4b), q5 and q6 each independently represent an integer of 0 or more, and at least one of q5 and q6 represents an integer of 1 or more. It is preferable that q5 and q6 are independently 0 to 2, and 0 or 1 is more preferable. In formula (4a) and formula (4b), when q5 is 2 or more, q5 Z 1e may be the same or different, and when q6 is 2 or more, q6 Z 1f may be the same or different.
作為環狀肟化合物A的具體例,可列舉下述結構的化合物。
[化學式10]
[化學式11]
[化學式12]
[化學式13]
[化學式14]
[化學式15]
[化學式16]
[化學式17]
[化學式18]
Specific examples of the cyclic oxime compound A include compounds having the following structures.
[Chemical Formula 10]
[Chemical Formula 11]
[Chemical Formula 12]
[Chemical Formula 13]
[Chemical Formula 14]
[Chemical Formula 15]
[Chemical Formula 16]
[Chemical Formula 17]
[Chemical Formula 18]
環狀肟化合物A在波長350~500nm的範圍具有極大吸收波長為較佳,在波長360~480nm的範圍具有極大吸收波長為更佳。又,環狀肟化合物A的波長365nm或波長405nm下的莫耳吸光係數係10000~300000為較佳,15000~300000為更佳,20000~200000為進一步較佳。能夠使用公知的方法來測量環狀肟化合物A的莫耳吸光係數。例如,藉由分光光度計(Varian公司製造之Cary-5 分光光度計(spectrophotometer)),使用乙酸乙酯溶劑以0.01g/L的濃度測量為較佳。The cyclic oxime compound A preferably has a maximum absorption wavelength in a range of 350 to 500 nm, and more preferably has a maximum absorption wavelength in a range of 360 to 480 nm. In addition, the molar absorption coefficient of the cyclic oxime compound A at a wavelength of 365 nm or a wavelength of 405 nm is preferably 10,000 to 300,000, more preferably 15,000 to 300,000, and more preferably 20,000 to 200,000. The Molar absorption coefficient of the cyclic oxime compound A can be measured using a known method. For example, a spectrophotometer (Cary-5 spectrophotometer manufactured by Varian) is preferably used to measure the concentration of 0.01 g / L using an ethyl acetate solvent.
環狀肟化合物A的含量在感光性著色組成物的總固體成分中係0.1~30質量%為較佳。下限係0.5質量%以上為更佳,1質量%以上為進一步較佳,2質量%以上為特佳。上限係25質量%以下為更佳,20質量%以下為進一步較佳,15質量%以下為特佳。環狀肟化合物A可以單獨使用1種,亦可以併用2種以上。併用2種以上環狀肟化合物A之情況下,該等的合計量在上述範圍為較佳。The content of the cyclic oxime compound A is preferably 0.1 to 30% by mass in the total solid content of the photosensitive coloring composition. The lower limit is more preferably 0.5% by mass or more, more preferably 1% by mass or more, and 2% by mass or more is particularly preferable. The upper limit is more preferably 25% by mass or less, more preferably 20% by mass or less, and particularly preferably 15% by mass or less. The cyclic oxime compound A may be used individually by 1 type, and may use 2 or more types together. When two or more cyclic oxime compounds A are used in combination, the total amount of these is preferably in the above range.
<<聚合性化合物>>
本發明的感光性組成物含有聚合性化合物。作為聚合性化合物,例如可列舉具有烯屬不飽和基之化合物等。作為乙烯性不飽和基,可列舉乙烯基、(甲基)烯丙基、(甲基)丙烯醯基等。聚合性化合物係藉由自由基可聚合之化合物(自由基聚合性化合物)為較佳。<<< Polymerizable Compound >>
The photosensitive composition of the present invention contains a polymerizable compound. Examples of the polymerizable compound include compounds having an ethylenically unsaturated group. Examples of the ethylenically unsaturated group include a vinyl group, a (meth) allyl group, and a (meth) acrylfluorenyl group. The polymerizable compound is preferably a compound (radically polymerizable compound) that can be polymerized by a radical.
作為聚合性化合物,可以是單體、預聚物、低聚物等化學形態的任一種,但單體為較佳。聚合性化合物的分子量為100~3000為較佳。上限為2000以下為更佳,1500以下為進一步較佳。下限為150以上為更佳,250以上為進一步較佳。The polymerizable compound may be any of chemical forms such as a monomer, a prepolymer, and an oligomer, but a monomer is preferred. The molecular weight of the polymerizable compound is preferably 100 to 3000. The upper limit is more preferably 2000 or less, and even more preferably 1500 or less. The lower limit is more preferably 150 or more, and more preferably 250 or more.
聚合性化合物係包含3個以上的烯屬不飽和基之化合物為較佳,包含3~15個烯屬不飽和基之化合物為更佳,包含3~6個烯屬不飽和基之化合物為進一步較佳。又,聚合性化合物為3~15官能的(甲基)丙烯酸酯化合物為較佳,3~6官能的(甲基)丙烯酸酯化合物為更佳。The polymerizable compound is preferably a compound containing three or more ethylenically unsaturated groups, more preferably a compound containing 3 to 15 ethylenically unsaturated groups, and a compound containing 3 to 6 ethylenically unsaturated groups. Better. The polymerizable compound is preferably a 3 to 15-functional (meth) acrylate compound, and more preferably a 3 to 6-functional (meth) acrylate compound.
關於聚合性單體,能夠參閱日本特開2009-288705號公報的0095~0108段、日本特開2013-29760號公報的0227段、日本特開2008-292970號公報的0254~0257段的記載,該等內容被編入到本說明書中。聚合性化合物為二新戊四醇三丙烯酸酯(作為市售品為KAYARAD D-330;NIPPON KAYAKU CO.,Ltd.製)、二新戊四醇四丙烯酸酯(作為市售品為KAYARAD D-320;NIPPON KAYAKU CO.,Ltd.製)、二新戊四醇五(甲基)丙烯酸酯(作為市售品為KAYARAD D-310;NIPPON KAYAKU CO.,Ltd.製)、二新戊四醇六(甲基)丙烯酸酯(作為市售品為KAYARAD DPHA;NIPPON KAYAKU CO.,Ltd.製造、NK ESTER A-DPH-12E;SHIN-NAKAMURA CHEMICAL CO.,Ltd.製)、及該等之(甲基)丙烯醯基經由乙二醇及/或丙二醇殘基鍵結之結構的化合物(例如由SARTOMER Company,Inc.市售之SR454、SR499)為較佳。亦能夠使用該等寡聚物類型。又,作為聚合性化合物,亦能夠使用NK ESTER A-TMMT(Shin-Nakamura Chemical Co.,Ltd.製)、KAYARAD RP-1040、DPCA-20(Nippon Kayaku Co.,Ltd.製)。又,作為聚合性化合物,使用三羥甲基丙烷三(甲基)丙烯酸酯、三羥甲基丙烷環氧丙烷改質三(甲基)丙烯酸酯、三羥甲基丙烷環氧乙烷改質三(甲基)丙烯酸酯、異氰脲酸環氧乙烷改質三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯等3官能的(甲基)丙烯酸酯化合物亦為較佳。作為3官能的(甲基)丙烯酸酯化合物的市售品,可列舉ARONIX M-309、M-310、M-321、M-350、M-360、M-313、M-315、M-306、M-305、M-303、M-452、M-450(TOAGOSEI CO.,Ltd.製)、NK ESTER A9300、A-GLY-9E、A-GLY-20E、A-TMM-3、A-TMM-3L、A-TMM-3LM-N、A-TMPT、TMPT(Shin-Nakamura Chemical Co.,Ltd.製)、KAYARAD GPO-303、TMPTA、THE-330、TPA-330、PET-30(Nippon Kayaku Co.,Ltd.製)等。Regarding the polymerizable monomer, reference can be made to paragraphs 0095 to 0108 of JP 2009-288705, paragraph 0227 of JP 2013-29760, and paragraphs 0254 to 0257 of JP 2008-292970. These contents are incorporated into this manual. The polymerizable compound is dinepentaerythritol triacrylate (KAYARAD D-330 as a commercial product; manufactured by NIPPON KAYAKU CO., Ltd.), and dinepentaerythritol tetraacrylate (KAYARAD D- as a commercial product) 320; manufactured by NIPPON KAYAKU CO., Ltd.), dipentaerythritol penta (meth) acrylate (available commercially as KAYARAD D-310; manufactured by NIPPON KAYAKU CO., Ltd.), dinepentaerythritol Hexa (meth) acrylate (available commercially as KAYARAD DPHA; manufactured by NIPPON KAYAKU CO., Ltd., NK ESTER A-DPH-12E; manufactured by SHIN-NAKAMURA CHEMICAL CO., Ltd.), and the like ( Compounds having a structure in which a meth) acrylfluorenyl group is bonded via ethylene glycol and / or propylene glycol residues (for example, SR454 and SR499 marketed by SARTOMER Company, Inc.) are preferred. These oligomer types can also be used. As the polymerizable compound, NK ESTER A-TMMT (manufactured by Shin-Nakamura Chemical Co., Ltd.), KAYARAD RP-1040, and DPCA-20 (manufactured by Nippon Kayaku Co., Ltd.) can also be used. As polymerizable compounds, trimethylolpropane tri (meth) acrylate, trimethylolpropane propylene oxide modified tri (meth) acrylate, and trimethylolpropane ethylene oxide modified Trifunctional (meth) acrylate compounds such as tri (meth) acrylate, isocyanuric acid ethylene oxide modified tri (meth) acrylate, pentaerythritol tri (meth) acrylate are also preferred. Examples of commercially available trifunctional (meth) acrylate compounds include ARONIX M-309, M-310, M-321, M-350, M-360, M-313, M-315, and M-306. , M-305, M-303, M-452, M-450 (manufactured by TOAGOSEI CO., Ltd.), NK ESTER A9300, A-GLY-9E, A-GLY-20E, A-TMM-3, A- TMM-3L, A-TMM-3LM-N, A-TMPT, TMPT (manufactured by Shin-Nakamura Chemical Co., Ltd.), KAYARAD GPO-303, TMPTA, THE-330, TPA-330, PET-30 (Nippon Kayaku Co., Ltd.) and so on.
聚合性化合物可具有酸基。作為酸基,可列舉羧基、磺酸基、磷酸基等,羧基為較佳。作為具有酸基之自由基聚合性化合物的市售品可列舉ARONIX M-510、M-520、ARONIX TO-2349(TOAGOSEI CO.,LTD.製)等。The polymerizable compound may have an acid group. Examples of the acid group include a carboxyl group, a sulfonic acid group, and a phosphate group. A carboxyl group is preferred. Examples of commercially available products of the radically polymerizable compound having an acid group include ARONIX M-510, M-520, and ARONIX TO-2349 (manufactured by TOAGOSEI CO., LTD.).
作為具有酸基之聚合性化合物的較佳之酸值為0.1~40mgKOH/g,5~30mgKOH/g為更佳。若聚合性化合物的酸值為0.1mgKOH/g以上,則對顯影液之溶解性良好,若為40mgKOH/g以下,則在製造或處理上有利。The polymerizable compound having an acid group preferably has an acid value of 0.1 to 40 mgKOH / g, and more preferably 5 to 30 mgKOH / g. If the acid value of the polymerizable compound is 0.1 mgKOH / g or more, the solubility in the developer is good, and if it is 40 mgKOH / g or less, it is advantageous in terms of manufacturing or handling.
聚合性化合物係具有己內酯結構之化合物亦為較佳。具有己內酯結構之聚合性化合物例如由NIPPON KAYAKU CO.,Ltd.作為KAYARAD DPCA系列而在市場上出售,可列舉DPCA-20、DPCA-30、DPCA-60、DPCA-120等。The polymerizable compound is also a compound having a caprolactone structure. The polymerizable compound having a caprolactone structure is marketed by, for example, NIPPON KAYAKU CO., Ltd. as the KAYARAD DPCA series, and examples include DPCA-20, DPCA-30, DPCA-60, and DPCA-120.
聚合性化合物係具有伸烷氧基之化合物亦為較佳。具有伸烷氧基之聚合性化合物係具有伸乙基氧基及/或伸丙基氧基之化合物為較佳,具有伸乙基氧基之化合物為更佳,具有4~20個伸乙基氧基之3~6官能(甲基)丙烯酸酯化合物為進一步較佳。作為具有伸烷氧基之聚合性化合物的市售品,例如可列舉Sartomer Company, Inc製的作為具有4個伸乙氧基之4官能(甲基)丙烯酸酯之SR-494、作為具有3個異伸丁氧基之3官能(甲基)丙烯酸酯之KAYARAD TPA-330等。The polymerizable compound is also a compound having an alkoxy group. A polymerizable compound having an alkoxy group is preferably a compound having an ethoxy group and / or a propyloxy group, and a compound having an ethoxy group is more preferred, having 4 to 20 ethoxy groups. The 3 to 6-functional (meth) acrylate compound having an oxygen group is more preferable. As a commercially available product of a polymerizable compound having an alkoxy group, for example, SR-494, which is a tetrafunctional (meth) acrylate having four ethoxy groups, and three having ethoxy groups, are available from Sartomer Company, Inc. Trifunctional (meth) acrylic acid isobutylene such as KAYARAD TPA-330.
作為聚合性化合物,如日本特公昭48-041708號公報、日本特開昭51-037193號公報、日本特公平2-032293號公報、日本特公平2-016765號公報中記載之胺基甲酸酯丙烯酸酯類或日本特公昭58-049860號公報、日本特公昭56-017654號公報、日本特公昭62-039417號公報、日本特公昭62-039418號公報中記載之具有環氧乙烷系骨架之胺基甲酸酯化合物亦較佳。又,使用日本特開昭63-277653號公報、日本特開昭63-260909號公報、日本特開平1-105238號公報中記載之在分子內具有胺基結構或硫醚結構之聚合性化合物亦較佳。作為市售品,可列舉UA-7200(Shin-Nakamura Chemical Co.,Ltd.製)、DPHA-40H(Nippon Kayaku Co.,Ltd.製)、UA-306H、UA-306T、UA-306I、AH-600、T-600、AI-600(Kyoeisha chemical Co.,Ltd.製)等。
又,作為聚合性化合物,使用8UH-1006、8UH-1012(以上為TAISEI FINE CHEMICAL Co.,Ltd.製)、LIGHT ACRYLATEPOB-A0(Kyoeisha chemical Co.,Ltd.製)等亦為較佳。
又,作為聚合性化合物,亦能夠使用日本特開2017-048367號公報、日本專利第6057891號公報、日本專利第6031807號公報所記載之化合物。Examples of the polymerizable compound include urethanes described in Japanese Patent Publication No. 48-041708, Japanese Patent Application Publication No. 51-037193, Japanese Patent Publication No. 2-032293, and Japanese Patent Publication No. 2-016765. Acrylates or those having an ethylene oxide skeleton described in Japanese Patent Publication No. 58-049860, Japanese Patent Publication No. 56-017654, Japanese Patent Publication No. 62-039417, and Japanese Patent Publication No. 62-039418. Urethane compounds are also preferred. Also, a polymerizable compound having an amine structure or a thioether structure in a molecule described in Japanese Patent Application Laid-Open No. 63-277653, Japanese Patent Application Laid-Open No. 63-260909, and Japanese Patent Application Laid-Open No. 1-105238 is also used Better. Examples of commercially available products include UA-7200 (manufactured by Shin-Nakamura Chemical Co., Ltd.), DPHA-40H (manufactured by Nippon Kayaku Co., Ltd.), UA-306H, UA-306T, UA-306I, AH -600, T-600, AI-600 (manufactured by Kyoeisha chemical Co., Ltd.), etc.
In addition, as the polymerizable compound, 8UH-1006, 8UH-1012 (the above are manufactured by TAISEI FINE CHEMICAL Co., Ltd.), LIGHT ACRYLATEPOB-A0 (manufactured by Kyoeisha chemical Co., Ltd.), and the like are also preferable.
In addition, as the polymerizable compound, compounds described in Japanese Patent Application Laid-Open No. 2017-048367, Japanese Patent No. 6058791, and Japanese Patent No. 6031807 can be used.
聚合性化合物的含量在感光性著色組成物的總固體成分中係0.1~50質量%為較佳。下限係0.5質量%以上為更佳,1質量%以上為進一步較佳,5質量%以上為特佳。上限係45質量%以下為更佳,40質量%以下為進一步較佳,30質量%以下為特佳。聚合性化合物可以單獨使用1種,亦可以併用2種以上。當併用2種以上的聚合性化合物時,該等的合計量在上述範圍為較佳。The content of the polymerizable compound is preferably 0.1 to 50% by mass in the total solid content of the photosensitive coloring composition. The lower limit is more preferably 0.5% by mass or more, more preferably 1% by mass or more, and particularly preferably 5% by mass or more. The upper limit is more preferably 45% by mass or less, more preferably 40% by mass or less, and particularly preferably 30% by mass or less. The polymerizable compound may be used singly or in combination of two or more kinds. When two or more polymerizable compounds are used in combination, the total amount of these is preferably in the above range.
<<色材>>
本發明的感光性組成物包含色材為較佳。作為色材,可列舉彩色著色劑、白色著色劑、黑色著色劑及近紅外線吸收色素。色材的種類能夠根據感光性組成物的用途適當地選擇。色材可以為顏料,亦可以為染料,從容易獲得耐光性更優異的膜之原因考慮,顏料為較佳。<< Color Material >>
The photosensitive composition of the present invention preferably contains a color material. Examples of the color material include a colorant, a white colorant, a black colorant, and a near-infrared absorbing pigment. The type of the color material can be appropriately selected according to the use of the photosensitive composition. The color material may be a pigment or a dye. From the reason that a film having more excellent light resistance is easily obtained, a pigment is preferred.
(彩色著色劑)
作為彩色著色劑,可列舉紅色著色劑、綠色著色劑、藍色著色劑、黃色著色劑、紫色著色劑、橙色著色劑等。彩色著色劑可以為顏料,亦可以為染料。較佳為顏料。顏料的平均粒徑(r)係20nm≤r≤300nm為較佳,25nm≤r≤250nm為更佳,30nm≤r≤200nm為進一步較佳。在此所說之“平均粒徑”係指關於顏料的一次粒子集合而成之二次粒子的平均粒徑。又,關於能夠使用之顏料的二次粒子的粒徑分佈(以下,亦簡稱為“粒徑分佈”。),包含在平均粒徑±100nm的範圍之二次粒子為整體的70質量%以上為較佳,80質量%以上為更佳。(Color colorant)
Examples of the colorant include a red colorant, a green colorant, a blue colorant, a yellow colorant, a purple colorant, and an orange colorant. The coloring agent may be a pigment or a dye. A pigment is preferred. The average particle diameter (r) of the pigment is more preferably 20nm≤r≤300nm, more preferably 25nm≤r≤250nm, and 30nm≤r≤200nm is more preferable. The "average particle diameter" as used herein refers to the average particle diameter of secondary particles obtained by assembling primary particles of a pigment. Regarding the particle size distribution of the secondary particles of the pigment that can be used (hereinafter, also simply referred to as "particle size distribution"), 70% by mass or more of the secondary particles included in the range of the average particle size ± 100 nm are More preferably, 80 mass% or more is more preferable.
顏料係有機顏料為較佳。作為有機顏料可列舉以下者。
顏色索引(C.I.)顏料黃1,2,3,4,5,6,10,11,12,13,14,15,16,17,18,20,24,31,32,34,35,35:1,36,36:1,37,37:1,40,42,43,53,55,60,61,62,63,65,73,74,77,81,83,86,93,94,95,97,98,100,101,104,106,108,109,110,113,114,115,116,117,118,119,120,123,125,126,127,128,129,137,138,139,147,148,150,151,152,153,154,155,156,161,162,164,166,167,168,169,170,171,172,173,174,175,176,177,179,180,181,182,185,187,188,193,194,199,213,214等(以上為黃色顏料)、
C.I.顏料橙2,5,13,16,17:1,31,34,36,38,43,46,48,49,51,52,55,59,60,61,62,64,71,73等(以上為橙色顏料)、
C.I.顏料紅1,2,3,4,5,6,7,9,10,14,17,22,23,31,38,41,48:1,48:2,48:3,48:4,49,49:1,49:2,52:1,52:2,53:1,57:1,60:1,63:1,66,67,81:1,81:2,81:3,83,88,90,105,112,119,122,123,144,146,149,150,155,166,168,169,170,171,172,175,176,177,178,179,184,185,187,188,190,200,202,206,207,208,209,210,216,220,224,226,242,246,254,255,264,270,272,279等(以上為紅色顏料)、
C.I.顏料綠7,10,36,37,58,59,62,63等(以上為綠色顏料)、
C.I.顏料紫1,19,23,27,32,37,42等(以上、紫色顏料)、
C.I.顏料藍1,2,15,15:1,15:2,15:3,15:4,15:6,16,22,60,64,66,79,80等(以上為藍色顏料)。
該等有機顏料能夠單獨使用或組合各種而使用。Pigment-based organic pigments are preferred. Examples of the organic pigment include the following.
Color Index (CI) Pigment Yellow 1, 2, 3, 4, 5, 6, 10, 11, 12, 13, 14, 15, 16, 17, 18, 20, 24, 31, 32, 34, 35, 35 : 1, 36, 36: 1, 37, 37: 1, 40, 42, 43, 53, 53, 55, 60, 61, 62, 63, 65, 73, 74, 77, 81, 83, 86, 93, 94 , 95, 97, 98, 100, 101, 104, 106, 108, 109, 110, 113, 114, 115, 116, 117, 118, 119, 120, 123, 125, 126, 127, 128, 129, 137 , 138,139,147,148,150,151,152,153,154,155,156,161,162,164,166,167,168,169,170,171,172,173,174,175,176 , 177, 179, 180, 181, 182, 185, 187, 188, 193, 194, 199, 213, 214, etc. (the above are yellow pigments),
CI Pigment Orange 2, 5, 13, 16, 17: 1, 31, 34, 36, 38, 43, 46, 48, 49, 51, 52, 55, 59, 60, 61, 62, 64, 71, 73 Etc. (the above are orange pigments),
CI Pigment Red 1, 2, 3, 4, 5, 6, 7, 9, 10, 14, 17, 22, 23, 31, 38, 41, 48: 1, 48: 2, 48: 3, 48: 4 , 49, 49: 1, 49: 2, 52: 1, 52: 2, 53: 1, 57: 1, 60: 1, 63: 1, 66, 67, 81: 1, 81: 2, 81: 3 , 83, 88, 90, 105, 112, 119, 122, 123, 144, 146, 149, 150, 155, 166, 168, 169, 170, 171, 172, 175, 176, 177, 178, 179, 184 , 185, 187, 188, 190, 200, 202, 206, 207, 208, 209, 210, 216, 220, 224, 226, 242, 246, 254, 255, 264, 270, 272, 279, etc. (the above are Red pigment),
CI Pigment Green 7, 10, 36, 37, 58, 59, 62, 63, etc. (the above are green pigments),
CI Pigment Violet 1, 19, 23, 27, 32, 37, 42 etc. (above, purple pigment),
CI Pigment Blue 1, 2, 15, 15: 1, 15: 2, 15: 3, 15: 4, 15: 6, 16, 22, 60, 64, 66, 79, 80, etc. (the above are blue pigments) .
These organic pigments can be used alone or in combination.
又,作為黃色顏料,還能夠使用金屬偶氮顏料,該金屬偶氮顏料包含選自由下述式(I)表示之偶氮化合物及其互變異構結構的偶氮化合物中的至少1種陰離子、2種以上的金屬離子及三聚氰胺化合物。
[化學式19]
式中,R1
及R2
分別獨立地為-OH或-NR5
R6
,R3
及R4
分別獨立地為=O或=NR7
,R5
~R7
分別獨立地為氫原子或烷基。R5
~R7
所表示之烷基的碳數係1~10為較佳,1~6為更佳,1~4為進一步較佳。烷基可以為直鏈、分支及環狀中的任一種,直鏈或分支為較佳,直鏈為更佳。烷基可具有取代基。取代基係鹵素原子、羥基、烷氧基、氰基及胺基為較佳。In addition, as the yellow pigment, a metal azo pigment containing at least one anion selected from an azo compound represented by the following formula (I) and an azo compound having a tautomeric structure, Two or more metal ions and melamine compounds.
[Chemical Formula 19]
In the formula, R 1 and R 2 are each independently -OH or -NR 5 R 6 , R 3 and R 4 are each independently = O or = NR 7 , and R 5 to R 7 are each independently a hydrogen atom or an alkane base. The carbon number of the alkyl group represented by R 5 to R 7 is preferably 1 to 10, more preferably 1 to 6 and even more preferably 1 to 4. The alkyl group may be any of a straight chain, a branch, and a cyclic ring. A straight chain or a branch is preferable, and a straight chain is more preferable. The alkyl group may have a substituent. The substituent is preferably a halogen atom, a hydroxyl group, an alkoxy group, a cyano group, and an amine group.
式(I)中,R1 及R2 係-OH為較佳。又,R3 及R4 係=O為較佳。In formula (I), R 1 and R 2 are preferably -OH. R 3 and R 4 == 0 are more preferred.
金屬偶氮顏料中的三聚氰胺化合物係由下述式(II)表示之化合物為較佳。
[化學式20]
式中R11
~R13
分別獨立地為氫原子或烷基。烷基的碳數係1~10為較佳,1~6為更佳,1~4為進一步較佳。烷基可以為直鏈、分支及環狀中的任一種,直鏈或分支為較佳,直鏈為更佳。烷基可具有取代基。取代基係羥基為較佳。R11
~R13
中的至少一個係氫原子為較佳,R11
~R13
全部係氫原子為更佳。The melamine compound in the metal azo pigment is preferably a compound represented by the following formula (II).
[Chemical Formula 20]
In the formula, R 11 to R 13 are each independently a hydrogen atom or an alkyl group. The carbon number of the alkyl group is preferably from 1 to 10, more preferably from 1 to 6, and even more preferably from 1 to 4. The alkyl group may be any of a straight chain, a branch, and a cyclic ring. A straight chain or a branch is preferable, and a straight chain is more preferable. The alkyl group may have a substituent. The substituent is preferably a hydroxyl group. R 11 ~ R 13 at least one hydrogen atom is preferred based, R 11 ~ R 13 is more preferably a hydrogen atom entire system.
上述金屬偶氮顏料係包含選自由上述式(I)表示之偶氮化合物及其互變異構結構的偶氮化合物中的至少1種的陰離子、至少包含Zn2+ 及Cu2+ 之金屬離子及三聚氰胺化合物之態樣的金屬偶氮顏料為較佳。在該態樣中,以金屬偶氮顏料的總金屬離子的1莫耳為基準,以合計含有95~100莫耳%的Zn2+ 及Cu2+ 為較佳,含有98~100莫耳%為更佳,含有99.9~100莫耳%為進一步較佳,含有100莫耳%為特佳。又,金屬偶氮顏料中的Zn2+ 與Cu2+ 的莫耳比係Zn2+ :Cu2+ =199:1~1:15為較佳,19:1~1:1為更佳,9:1~2:1為進一步較佳。又,在該態樣中,金屬偶氮顏料可以還包含除了Zn2+ 及Cu2+ 以外的二價或三價的金屬離子(以下,亦稱為金屬離子Me1)。作為金屬離子Me1,可列舉Ni2+ 、Al3+ 、Fe2+ 、Fe3+ 、Co2+ 、Co3+ 、La3+ 、Ce3+ 、Pr3+ 、Nd2+ 、Nd3+ 、Sm2+ 、Sm3+ 、Eu2+ 、Eu3+ 、Gd3+ 、Tb3+ 、Dy3+ 、Ho3+ 、Yb2+ 、Yb3+ 、Er3+ 、Tm3+ 、Mg2+ 、Ca2+ 、Sr2+ 、Mn2+ 、Y3+ 、Sc3+ 、Ti2+ 、Ti3+ 、Nb3+ 、Mo2+ 、Mo3+ 、V2+ 、V3+ 、Zr2+ 、Zr3+ 、Cd2+ 、Cr3+ 、Pb2+ 、Ba2+ ,選自Al3+ 、Fe2+ 、Fe3+ 、Co2+ 、Co3+ 、La3+ 、Ce3+ 、Pr3+ 、Nd3+ 、Sm3+ 、Eu3+ 、Gd3+ 、Tb3+ 、Dy3+ 、Ho3+ 、Yb3+ 、Er3+ 、Tm3+ 、Mg2+ 、Ca2+ 、Sr2+ 、Mn2+ 及Y3+ 中的至少1種為較佳,選自Al3+ 、Fe2+ 、Fe3+ 、Co2+ 、Co3+ 、La3+ 、Ce3+ 、Pr3+ 、Nd3+ 、Sm3+ 、Tb3+ 、Ho3+ 及Sr2+ 中的至少1種為進一步較佳,選自Al3+ 、Fe2+ 、Fe3+ 、Co2+ 及Co3+ 中的至少1種為特佳。金屬離子Me1的含量以金屬偶氮顏料的總金屬離子的1莫耳為基準,5莫耳%以下為較佳,2莫耳%以下為更佳,0.1莫耳%以下為進一步較佳。The metal azo pigment system includes at least one anion selected from the azo compound represented by the formula (I) and an azo compound having a tautomeric structure, a metal ion including at least Zn 2+ and Cu 2+ , and A metal azo pigment in the form of a melamine compound is preferred. In this aspect, based on 1 mole of the total metal ions of the metal azo pigment, it is more preferable to contain 95 to 100 mole% of Zn 2+ and Cu 2+ in total, and 98 to 100 mole%. More preferably, it is more preferable to contain 99.9 to 100 mole%, and it is particularly preferable to contain 100 mole%. In addition, the molar ratio of Zn 2+ and Cu 2+ in the metal azo pigment is Zn 2+ : Cu 2+ = 199: 1 to 1:15 is more preferable, and 19: 1 to 1: 1 is more preferable. 9: 1 to 2: 1 are further preferred. In this aspect, the metal azo pigment may further include divalent or trivalent metal ions (hereinafter, also referred to as metal ions Me1) other than Zn 2+ and Cu 2+ . Examples of the metal ion Me1 include Ni 2+ , Al 3+ , Fe 2+ , Fe 3+ , Co 2+ , Co 3+ , La 3+ , Ce 3+ , Pr 3+ , Nd 2+ , Nd 3+ , Sm 2+ , Sm 3+ , Eu 2+ , Eu 3+ , Gd 3+ , Tb 3+ , Dy 3+ , Ho 3+ , Yb 2+ , Yb 3+ , Er 3+ , Tm 3+ , Mg 2+ , Ca 2+ , Sr 2+ , Mn 2+ , Y 3+ , Sc 3+ , Ti 2+ , Ti 3+ , Nb 3+ , Mo 2+ , Mo 3+ , V 2+ , V 3+ , Zr 2+ , Zr 3+ , Cd 2+ , Cr 3+ , Pb 2+ , Ba 2+ , selected from Al 3+ , Fe 2+ , Fe 3+ , Co 2+ , Co 3+ , La 3+ , Ce 3+ , Pr 3+ , Nd 3+ , Sm 3+ , Eu 3+ , Gd 3+ , Tb 3+ , Dy 3+ , Ho 3+ , Yb 3+ , Er 3+ , Tm 3+ , Mg At least one of 2+ , Ca 2+ , Sr 2+ , Mn 2+, and Y 3+ is preferred, and is selected from the group consisting of Al 3+ , Fe 2+ , Fe 3+ , Co 2+ , Co 3+ , La At least one of 3+ , Ce 3+ , Pr 3+ , Nd 3+ , Sm 3+ , Tb 3+ , Ho 3+, and Sr 2+ is further preferred, and is selected from Al 3+ , Fe 2+ , At least one of Fe 3+ , Co 2+ and Co 3+ is particularly preferred. The content of the metal ion Me1 is based on 1 mol of the total metal ions of the metal azo pigment, preferably 5 mol% or less, more preferably 2 mol% or less, and more preferably 0.1 mol% or less.
關於上述金屬偶氮顏料,能夠參閱日本特開2017-171912號公報的0011~0062段、0137~0276段、日本特開2017-171913號公報的0010~0062段、0138~0295段、日本特開2017-171914號公報的0011~0062段、0139~0190段、日本特開2017-171915號公報的0010~0065段、0142~0222段的記載,該等內容被併入本說明書中。Regarding the metal azo pigments, refer to paragraphs 0011 to 0061, paragraphs 0137 to 0276 of Japanese Patent Laid-Open No. 2017-171912, paragraphs 0010 to 0061, paragraphs 0138 to 0295 of Japanese Patent Laid-Open No. 2017-171913, and Japanese Patent Laid-Open Paragraphs 0011 to 0061, paragraphs 0139 to 0190 of 2017-171914, paragraphs 0010 to 0065, and paragraphs 0142 to 0222 of JP 2017-171915 are incorporated in this specification.
又,作為紅色顏料,還能夠使用具有芳香環基與二酮吡咯并吡咯骨架鍵合而成之結構之化合物:該芳香環基被導入了在芳香環上鍵和有氧原子、硫原子或氮原子的基團。作為該種化合物,由式(DPP1)表示之化合物為較佳,由式(DPP2)表示之化合物為更佳。
[化學式21]
In addition, as the red pigment, a compound having a structure in which an aromatic ring group is bonded to a diketopyrrolopyrrole skeleton can also be used: the aromatic ring group is introduced with an aromatic ring bond and an oxygen atom, a sulfur atom, or nitrogen Atomic groups. As such a compound, a compound represented by the formula (DPP1) is preferable, and a compound represented by the formula (DPP2) is more preferable.
[Chemical Formula 21]
上述式中,R11 及R13 分別獨立地表示取代基,R12 及R14 分別獨立地表示氫原子、烷基、芳基或雜芳基,n11及n13分別獨立地表示0~4的整數,X12 及X14 分別獨立地表示氧原子、硫原子或氮原子,X12 為氧原子或硫原子時,m12表示1,X12 為氮原子時,m12表示2,X14 為氧原子或硫原子時,m14表示1,X14 為氮原子時,m14表示2。作為R11 及R13 所表示之取代基,可列舉烷基、芳基、鹵素原子、醯基、烷氧基羰基、芳氧基羰基、雜芳氧基羰基、醯胺基、氰基、硝基、三氟甲基、亞碸基、磺基等作為較佳的具體例。In the above formula, R 11 and R 13 each independently represent a substituent, R 12 and R 14 each independently represent a hydrogen atom, an alkyl group, an aryl group, or a heteroaryl group, and n11 and n13 each independently represent an integer of 0 to 4. , X 12 and X 14 each independently represent an oxygen atom, a sulfur atom, or a nitrogen atom, when X 12 is an oxygen atom or a sulfur atom, m12 represents 1, when X 12 is a nitrogen atom, m12 represents 2, and X 14 is an oxygen atom or sulfur atom, M14 represents 1 when X 14 is a nitrogen atom, M14 represents 2. Examples of the substituents represented by R 11 and R 13 include an alkyl group, an aryl group, a halogen atom, a fluorenyl group, an alkoxycarbonyl group, an aryloxycarbonyl group, a heteroaryloxycarbonyl group, a fluorenylamino group, a cyano group, and a nitrate. As a preferable specific example, a methyl group, a trifluoromethyl group, a fluorenylene group, a sulfo group, and the like are used.
又,作為綠色顏料,能夠使用1分子中之鹵素原子數為平均10~14個,溴原子為平均8~12個,氯原子為平均2~5個之鹵化鋅酞青素顏料。作為具體例可列舉國際公開WO2015/118720號公報中所記載之化合物。In addition, as the green pigment, a zinc halide phthalocyanine pigment having an average of 10 to 14 halogen atoms, 8 to 12 bromine atoms, and 2 to 5 chlorine atoms per molecule can be used. Specific examples include compounds described in International Publication No. WO2015 / 118720.
又,作為藍色顏料亦能夠使用具有磷原子之鋁酞青素化合物。作為具體例,可列舉日本特開2012-247591號公報的0022~0030段、日本特開2011-157478號公報的0047段中所記載之化合物等。As the blue pigment, an aluminum phthalocyanin compound having a phosphorus atom can also be used. Specific examples include compounds described in paragraphs 0022 to 0030 of JP 2012-247591, and paragraphs 0047 of JP 2011-157478.
作為染料無特別限定,能夠使用公知的染料。例如,能夠列舉吡唑偶氮系、苯胺基偶氮系、三芳基甲烷系、蒽醌系、蒽吡啶酮(anthrapyridone)系、苯亞甲基系、氧雜菁系、吡唑并三唑偶氮系、吡啶酮偶氮系、花青系、啡噻系、吡咯并吡唑甲亞胺系、系、酞菁系、苯并吡喃系、靛藍系、吡咯亞甲基系等染料。又,亦可以使用該等染料的多聚體。又,亦能夠使用日本特開2015-028144號公報、日本特開2015-034966號公報中所記載之染料。The dye is not particularly limited, and a known dye can be used. For example, a pyrazole azo system, an aniline azo system, a triarylmethane system, an anthraquinone system, an anthrapyridone system, a benzimine system, an oxacyanine system, and a pyrazolotriazole couple are mentioned. Nitrogen, pyridone azo, cyanine, phenanthrene, pyrrolopyrazoleimine, Based, phthalocyanine based, benzopyran based, indigo based, and pyrrole methylene based dyes. A multimer of these dyes may also be used. The dyes described in Japanese Patent Application Laid-Open No. 2015-028144 and Japanese Patent Application Laid-Open No. 2015-034966 can also be used.
(白色著色劑)
本發明中,白色著色劑不僅包含純白色,還包含接近白色的亮灰色(例如灰白色、淺灰色等)的著色劑等。白色著色劑可以為顏料,亦可以為染料。作為白色顏料,可列舉氧化鈦、鈦酸鍶、鈦酸鋇、氧化鋅、氧化鎂、氧化鋯、氧化鋁、硫酸鋇、二氧化矽、滑石、雲母、氫氧化鋁、矽酸鈣、矽酸鋁、中空樹脂粒子、硫化鋅等。白色著色劑係具有鈦原子之粒子為較佳,氧化鈦為更佳。(White colorant)
In the present invention, the white colorant includes not only pure white, but also a bright gray (for example, off-white, light gray, etc.) coloring agent that is close to white. The white colorant may be a pigment or a dye. Examples of the white pigment include titanium oxide, strontium titanate, barium titanate, zinc oxide, magnesium oxide, zirconia, alumina, barium sulfate, silicon dioxide, talc, mica, aluminum hydroxide, calcium silicate, and silicate Aluminum, hollow resin particles, zinc sulfide, etc. The white colorant is preferably a particle having titanium atoms, and more preferably titanium oxide.
氧化鈦中二氧化鈦(TiO2 )的含量(純度)係70質量%以上為較佳,80質量%以上為更佳,85質量%以上為進一步較佳。氧化鈦中由Tin O2n-1 (n表示2~4的數。)表示之低次氧化鈦、氧氮化鈦等含量係30質量%以下為較佳,20質量%以下為更佳,15質量%以下為進一步較佳。The content (purity) of titanium dioxide (TiO 2 ) in the titanium oxide is preferably 70% by mass or more, more preferably 80% by mass or more, and more preferably 85% by mass or more. The content of low-order titanium oxide, titanium oxynitride, and the like represented by Ti n O 2n-1 (n represents a number of 2 to 4) in titanium oxide is preferably 30% by mass or less, and more preferably 20% by mass or less. 15 mass% or less is more preferable.
氧化鈦的形狀並無特別限制。例如可列舉各向同性形狀(例如,球狀、多面體狀等)、各向異性形狀(例如、針狀、棒狀、板狀等)、不規則形狀等形狀。氧化鈦的硬度(莫氏硬度)係5~8為較佳,7~7.5為更佳。氧化鈦的真比重(密度)係1.0~6.0g/cm3 為較佳,3.9~4.5g/cm3 為更佳。氧化鈦的體比重係0.1g/cm3 ~1.0g/cm3 為較佳,0.2g/cm3 ~0.4g/cm3 為更佳。The shape of titanium oxide is not particularly limited. Examples include shapes such as isotropic shapes (eg, spherical, polyhedral, etc.), anisotropic shapes (eg, needle-like, rod-like, plate-like, etc.), and irregular shapes. The hardness (Mohs hardness) of titanium oxide is preferably 5 to 8, and more preferably 7 to 7.5. The true specific gravity (density) of titanium oxide is preferably 1.0 to 6.0 g / cm 3, and more preferably 3.9 to 4.5 g / cm 3 . The bulk specific gravity of titanium oxide is preferably 0.1 g / cm 3 to 1.0 g / cm 3, and more preferably 0.2 g / cm 3 to 0.4 g / cm 3 .
白色著色劑能夠使用市售品。市售品可以直接使用,亦可以進行分級處理後使用。作為氧化鈦的市售品,例如可列舉Ishihara Sangyo Kaisha,Ltd.製的商品名Tipaque R-550、R-580、R-630、R-670、R-680、R-780、R-780-2、R-820、R-830、R-850、R-855、R-930、R-980、CR-50、CR-50-2、CR-57、CR-58、CR-58-2、CR-60、CR-60-2、CR-63、CR-67、CR-Super70、CR-80、CR-85、CR-90、CR-90-2、CR-93、CR-95、CR-953、CR-97、PF-736、PF-737、PF-742、PF-690、PF-691、PF-711、PF-739、PF-740、PC-3、S-305、CR-EL、PT-301、PT-401M、PT-401L、PT-501A、PT-501R、UT771、TTO-51C、TTO-80A、TTO-S-2、A-220、MPT-136、MPT-140、MPT-141;SAKAI CHEMICAL INDUSTRY CO.,LTD.製的商品名R-3L、R-5N、R-7E、R-11P、R-21、R-25、R-32、R-42、R-44、R-45M、R-62N、R-310、R-650、SR-1、D-918、GTR-100、FTR-700、TCR-52、A-110、A-190、SA-1、SA-1L、STR-100A-LP、STR-100C-LP、TCA-123E;TAYCA CORPORATION製的商品名JR、JRNC、JR-301、JR-403、JR-405、JR-600A、JR-600E、JR-603、JR-605、JR-701、JR-800、JR-805、JR-806、JR-1000、MT-01、MT-05、MT-10EX、MT-100S、MT-100TV、MT-100Z、MT-100AQ、MT-100WP、MT-100SA、MT-100HD、MT-150EX、MT-150W、MT-300HD、MT-500B、MT-500SA、MT-500HD、MT-600B、MT-600SA、MT-700B、MT-700BS、MT-700HD、MT-700Z;Titan Kogyo, Ltd.製的商品名KR-310、KR-380、KR-380N、ST-485SA15;FUJI TITANIUM INDUSTRY CO., LTD.製的商品名TR-600、TR-700、TR-750、TR-840、TR-900;SHIRAISHI CALCIUM KAISHA,Ltd.製的商品名Brilliant1500等。又,還能夠使用日本特開2015-67794號公報的0025~0027段中所記載之氧化鈦。作為鈦酸鍶的市售品,可列舉SW-100(Titan Kogyo, Ltd.製)等。作為硫酸鋇的市售品,可列舉BF-1L(SAKAI CHEMICAL INDUSTRY CO.,LTD.製)等。作為氧化鋅的市售品,可列舉Zincox Super F-1(Hakusuitech Co.,Ltd.製)等。作為氧化鋯的市售品,可列舉Z-NX(TAIYO KOKO CO.,LTD.製)等。又,白色著色劑亦能夠使用“氧化鈦 物性與應用技術 清野學著 13~45頁 1991年6月25日發行 技報堂出版發行”中所記載之氧化鈦。As the white colorant, a commercially available product can be used. Commercially available products can be used directly or used after being classified. Examples of commercially available products of titanium oxide include the trade names Tipaque R-550, R-580, R-630, R-670, R-680, R-780, and R-780- manufactured by Ishihara Sangyo Kaisha, Ltd. 2.R-820, R-830, R-850, R-855, R-930, R-980, CR-50, CR-50-2, CR-57, CR-58, CR-58-2, CR-60, CR-60-2, CR-63, CR-67, CR-Super70, CR-80, CR-85, CR-90, CR-90-2, CR-93, CR-95, CR- 953, CR-97, PF-736, PF-737, PF-742, PF-690, PF-691, PF-711, PF-739, PF-740, PC-3, S-305, CR-EL, PT-301, PT-401M, PT-401L, PT-501A, PT-501R, UT771, TTO-51C, TTO-80A, TTO-S-2, A-220, MPT-136, MPT-140, MPT- 141; trade names R-3L, R-5N, R-7E, R-11P, R-21, R-25, R-32, R-42, R-44, manufactured by SAKAI CHEMICAL INDUSTRY CO., LTD. R-45M, R-62N, R-310, R-650, SR-1, D-918, GTR-100, FTR-700, TCR-52, A-110, A-190, SA-1, SA- 1L, STR-100A-LP, STR-100C-LP, TCA-123E; trade names JR, JRNC, JR-301, JR-403, JR-405, JR-600A, JR-600E, JR- 603, JR-605, JR-701, JR-800, JR-805, JR-806, JR-1000, MT-01, M T-05, MT-10EX, MT-100S, MT-100TV, MT-100Z, MT-100AQ, MT-100WP, MT-100SA, MT-100HD, MT-150EX, MT-150W, MT-300HD, MT- 500B, MT-500SA, MT-500HD, MT-600B, MT-600SA, MT-700B, MT-700BS, MT-700HD, MT-700Z; Titan Kogyo, Ltd. trade names KR-310, KR-380 , KR-380N, ST-485SA15; trade names TR-600, TR-700, TR-750, TR-840, TR-900 made by FUJI TITANIUM INDUSTRY CO., LTD .; products made by SHIRAISHI CALCIUM KAISHA, Ltd. Name Brilliant1500 and so on. In addition, titanium oxide described in paragraphs 0025 to 0027 of JP-A-2015-67794 can also be used. As a commercial item of a strontium titanate, SW-100 (made by Titan Kogyo, Ltd.) etc. are mentioned. Examples of commercially available products of barium sulfate include BF-1L (manufactured by SAKAI CHEMICAL INDUSTRY CO., LTD.). Examples of commercially available products of zinc oxide include Zincox Super F-1 (manufactured by Hakusuitech Co., Ltd.). Examples of commercially available products of zirconia include Z-NX (manufactured by TAIYO KOKO CO., LTD.). It is also possible to use the titanium oxide described in "Titanium Oxide Physical Properties and Applied Technology, Kiyoshi Scholarship, pages 13-45, June 25, 1991, published by Kyododo".
白色著色劑不僅可以使用包括單一無機物者,亦可以使用與其他材料複合而得之粒子。例如,使用在內部具有空孔或其他材料之粒子、在芯粒子上附著有大量無機粒子之粒子、由包括聚合物粒子之芯粒子和包括無機奈米微粒之殼層構成之芯殼複合粒子為較佳。作為上述由包括聚合物粒子之芯粒子和包括無機奈米微粒之殼層構成之芯殼複合粒子,例如能夠參閱日本特開2015-047520號公報的0012~0042段的記載,該內容被併入本說明書中。As the white colorant, not only a single inorganic substance can be used, but also particles obtained by compounding with other materials can be used. For example, using particles with voids or other materials inside, particles with a large number of inorganic particles attached to the core particles, and core-shell composite particles composed of core particles including polymer particles and a shell layer including inorganic nano particles are Better. As the core-shell composite particles composed of the core particles including the polymer particles and the shell layer including the inorganic nano-particles, for example, the descriptions in paragraphs 0012 to 0042 of Japanese Patent Application Laid-Open No. 2015-047520 can be referred to, and the contents are incorporated herein. In this manual.
白色著色劑亦能夠使用中空無機粒子。中空無機粒子係在內部具有空洞之結構的無機粒子,係指具有被外殻包圍之空洞之無機粒子。作為中空無機粒子,能夠列舉日本特開2011-075786號公報、國際公開WO2013-061621號公報、日本特開2015-164881號公報等中所記載之中空無機粒子,該等內容被併入本說明書中。The white colorant can also use hollow inorganic particles. A hollow inorganic particle is an inorganic particle having a hollow structure inside, and refers to an inorganic particle having a cavity surrounded by a shell. Examples of the hollow inorganic particles include hollow inorganic particles described in Japanese Patent Application Laid-Open No. 2011-075786, International Publication No. WO2013-061621, Japanese Patent Application Laid-Open No. 2015-164881, and the like, which are incorporated into this specification .
(黑色著色劑)
作為黑色著色劑,可列舉碳黑、鈦黑、氧氮化鋯、氧氮化釩、氧氮化鈮等無機黑色著色劑(無機黑色顏料)、或雙苯并呋喃酮化合物、甲亞胺化合物、苝化合物、偶氮化合物等有機黑色著色劑。(Black colorant)
Examples of the black colorant include inorganic black colorants (inorganic black pigments) such as carbon black, titanium black, zirconium oxynitride, vanadium oxynitride, and niobium oxynitride, or bisbenzofuranone compounds and methylimine compounds. Organic black colorants such as, fluorene compounds, azo compounds.
作為無機黑色著色劑,鈦黑為較佳。鈦黑係含有鈦原子之黑色粒子,低次氧化鈦或氧氮化鈦為較佳。鈦黑能夠以提高分散性、抑制凝聚性等目的並根據需要來修飾表面。例如,能夠利用氧化矽、氧化鈦、氧化鍺、氧化鋁、氧化鎂或氧化鋯包覆鈦黑的表面。又,還能夠進行如日本特開2007-302836號公報中所示之利用拒水性物質的處理。鈦黑的每個粒子的一次粒徑及平均一次粒徑中的任一者均較小為較佳。具體而言,平均一次粒徑為10~45nm為較佳。As the inorganic black colorant, titanium black is preferred. Titanium black is black particles containing titanium atoms, and low-order titanium oxide or titanium oxynitride is preferred. Titanium black can modify the surface as needed for the purpose of improving dispersibility and suppressing cohesion. For example, the surface of titanium black can be coated with silicon oxide, titanium oxide, germanium oxide, aluminum oxide, magnesium oxide, or zirconia. Further, a treatment using a water-repellent substance as shown in Japanese Patent Application Laid-Open No. 2007-302836 can also be performed. It is preferable that either the primary particle diameter or the average primary particle diameter of each particle of titanium black is small. Specifically, the average primary particle diameter is preferably 10 to 45 nm.
鈦黑還能夠用作分散物。例如可列舉包含鈦黑粒子及二氧化矽粒子,並且分散物中的Si原子與Ti原子的含有比調整在0.20~0.50的範圍之分散物等。關於上述分散物,能夠參閱日本特開2012-169556號公報的0020~0105段的記載,該內容被編入本說明書中。作為鈦黑的市售品,可列舉鈦黑10S、12S、13R、13M、13M-C、13R-N、13M-T(商品名:Mitsubishi Materials Corporation製)、Tilack D(商品名:Ako Kasei Co.,Ltd.製)等。又,還能夠使用日本特開2013-249471號公報的0149段中所記載之碳黑。Titanium black can also be used as a dispersion. For example, a dispersion containing titanium black particles and silicon dioxide particles, and the content ratio of the Si atoms to the Ti atoms in the dispersion is adjusted to be in the range of 0.20 to 0.50, and the like. Regarding the above-mentioned dispersion, the descriptions in paragraphs 0020 to 0105 of Japanese Patent Application Laid-Open No. 2012-169556 can be referred to, and the contents are incorporated into this specification. As commercially available products of titanium black, titanium black 10S, 12S, 13R, 13M, 13M-C, 13R-N, 13M-T (trade name: Mitsubishi Materials Corporation), Tilack D (trade name: Ako Kasei Co) ., Ltd.) Etc. The carbon black described in paragraph 0149 of Japanese Patent Application Laid-Open No. 2013-249471 can also be used.
關於有機黑色著色劑,雙苯并呋喃酮化合物、苝化合物為較佳。作為雙苯并呋喃酮化合物,可列舉日本特表2010-534726號公報、日本特表2012-515233號公報、日本特表2012-515234號公報等中所記載之化合物,例如,能夠作為BASF公司製的“Irgaphor Black”而獲得。作為苝化合物,可列舉C.I.顏料黑31、32等。
作為甲亞胺化合物,可列舉日本特開平1-170601號公報、日本特開平2-034664號公報等中所記載者,例如,能夠作為Dainichiseika Color & Chemicals Mfg.Co.,Ltd.製的“CHROMO FINE BLACK A1103”而獲得。雙苯并呋喃酮化合物係由下述式的任一者表示之化合物或該等的混合物為較佳。
[化學式22]
As for the organic black colorant, a bisbenzofuranone compound and a fluorene compound are preferable. Examples of the bisbenzofuranone compounds include those described in Japanese Patent Application Publication No. 2010-534726, Japanese Patent Application Publication No. 2012-515233, Japanese Patent Application Publication No. 2012-515234, and the like, and can be produced, for example, by BASF Corporation. "Irgaphor Black". Examples of the fluorene compound include CI Pigment Black 31 and 32.
Examples of the methylimine compound include those described in Japanese Patent Application Laid-Open No. 1-170601 and Japanese Patent Application Laid-Open No. 2-034664. For example, "CHROMO" manufactured by Daichiniseka Color & Chemicals Mfg. Co., Ltd. can be used. FINE BLACK A1103 ". The bisbenzofuranone compound is preferably a compound represented by any one of the following formulas or a mixture of these.
[Chemical Formula 22]
式中,R1 及R2 分別獨立地表示氫原子或取代基,R3 及R4 分別獨立地表示取代基,a及b分別獨立地表示0~4的整數,a為2以上時,複數個R3 可相同,亦可不同,複數個R3 可以鍵結而形成環,b為2以上時,複數個R4 可相同,亦可不同,複數個R4 可以鍵結而形成環。In the formula, R 1 and R 2 each independently represent a hydrogen atom or a substituent, R 3 and R 4 each independently represent a substituent, a and b each independently represent an integer of 0 to 4, and when a is 2 or more, plural R 3 may be the same or different, and a plurality of R 3 may be bonded to form a ring. When b is 2 or more, a plurality of R 4 may be the same or different, and a plurality of R 4 may be bonded to form a ring.
R1 ~R4 所表示之取代基表示鹵素原子、氰基、硝基、烷基、烯基、炔基、芳烷基、芳基、雜芳基、-OR301 、-COR302 、-COOR303 、-OCOR304 、-NR305 R306 、-NHCOR307 、-CONR308 R309 、-NHCONR310 R311 、-NHCOOR312 、-SR313 、-SO2 R314 、-SO2 OR315 、-NHSO2 R316 或-SO2 NR317 R318 ,R301 ~R318 分別獨立地表示氫原子、烷基、烯基、炔基、芳基或雜芳基。The substituents represented by R 1 to R 4 represent a halogen atom, cyano, nitro, alkyl, alkenyl, alkynyl, aralkyl, aryl, heteroaryl, -OR 301 , -COR 302 , -COOR 303 , -OCOR 304 , -NR 305 R 306 , -NHCOR 307 , -CONR 308 R 309 , -NHCONR 310 R 311 , -NHCOOR 312 , -SR 313 , -SO 2 R 314 , -SO 2 OR 315 , -NHSO 2 R 316 or -SO 2 NR 317 R 318 , and R 301 to R 318 each independently represent a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group, an aryl group, or a heteroaryl group.
關於雙苯并呋喃酮化合物的詳細內容,能夠參閱日本特表2010-534726號公報的0014~0037段的記載,該內容被併入本說明書中。For details of the bisbenzofuranone compound, refer to the descriptions in paragraphs 0014 to 0037 of Japanese Patent Application Publication No. 2010-534726, which is incorporated into this specification.
(近紅外線吸收色素)
作為近紅外線吸收色素,在波長700~1800nm的範圍具有極大吸收波長之化合物為較佳,在波長700~1300nm的範圍具有極大吸收波長之化合物為更佳,在波長700~1000nm的範圍具有極大吸收波長之化合物為進一步較佳。又,近紅外線吸收劑的波長500nm下的吸光度A1
與極大吸收波長處的吸光度A2
之比率A1
/A2
係0.08以下為較佳,0.04以下為更佳。(Near-infrared absorbing pigment)
As the near-infrared absorbing pigment, a compound having a maximum absorption wavelength in a wavelength range of 700 to 1800 nm is more preferable, and a compound having a maximum absorption wavelength in a wavelength range of 700 to 1300 nm is more preferable. Compounds with a wavelength are further preferred. The ratio A 1 / A 2 of the absorbance A 1 at a wavelength of 500 nm of the near-infrared absorber to the absorbance A 2 at the maximum absorption wavelength is preferably 0.08 or less, and more preferably 0.04 or less.
作為近紅外線吸收色素,可列舉吡咯并吡咯化合物、花青化合物、方酸菁化合物、酞菁化合物、萘[酞]菁化合物、四萘嵌三苯化合物、部花青素化合物、克酮鎓(croconium)化合物、氧雜菁化合物、亞銨化合物、二硫醇化合物、三芳基甲烷化合物、吡咯亞甲基化合物、甲亞胺化合物、蒽醌化合物及二苯并呋喃酮化合物等,選自吡咯并吡咯化合物、花青化合物、方酸菁化合物、克酮鎓化合物、酞菁化合物、萘[酞]菁化合物及亞銨化合物中的至少一種為較佳,選自吡咯并吡咯化合物、花青化合物、方酸菁化合物、克酮鎓化合物及亞銨化合物中的至少一種為更佳,吡咯并吡咯化合物為特佳。作為酞菁化合物,例如可列舉日本特開2012-077153號公報的0093段中所記載之化合物、日本特開2006-343631號公報中所記載之酞菁氧鈦、日本特開2013-195480號公報的0013~0029段中所記載之化合物、日本專利第6081771號公報中所記載之釩酞菁,該等內容被併入本說明書中。作為萘[酞]菁化合物,例如可列舉日本特開2012-077153號公報的0093段中所記載之化合物,該內容被併入本說明書中。又,近紅外線吸收色素亦能夠使用日本特開2016-146619號公報中所記載之化合物。Examples of near-infrared absorbing pigments include pyrrolopyrrole compounds, cyanine compounds, squaraine compounds, phthalocyanine compounds, naphthalene [phthalocyanine] compounds, tetralin compounds, merocyanin compounds, and ketonium ( croconium compound, oxacyanine compound, immonium compound, dithiol compound, triarylmethane compound, pyrrole methylene compound, methylimine compound, anthraquinone compound, and dibenzofuranone compound, etc., selected from pyrrole At least one of a pyrrole compound, a cyanine compound, a squarylium compound, a ketonium compound, a phthalocyanine compound, a naphthalene [phthalocyanine] compound, and an ammonium compound is preferably selected from the group consisting of pyrrolopyrrole compounds, cyanine compounds, At least one of a squaraine compound, a ketonium compound, and an immonium compound is more preferable, and a pyrrolopyrrole compound is particularly preferable. Examples of the phthalocyanine compound include compounds described in paragraph 0093 of Japanese Patent Application Laid-Open No. 2012-077153, titanium phthalocyanine described in Japanese Patent Laid-Open No. 2006-343631, and Japanese Patent Laid-Open No. 2013-195480. The compounds described in paragraphs 0013 to 0029 and the vanadium phthalocyanine described in Japanese Patent No. 6081771 are incorporated in this specification. Examples of naphthalene [phthalocyanine] compounds include compounds described in paragraph 093 of Japanese Patent Application Laid-Open No. 2012-077153, and the contents are incorporated into the present specification. In addition, as the near-infrared absorbing dye, a compound described in Japanese Patent Application Laid-Open No. 2016-146619 can be used.
作為吡咯并吡咯化合物,可列舉由式(PP)表示之化合物。
[化學式23]
式中,R1a
及R1b
分別獨立地表示烷基、芳基或雜芳基,R2
及R3
分別獨立地表示氫原子或取代基,R2
及R3
可以相互鍵結而形成環,R4
分別獨立地表示氫原子、烷基、芳基、雜芳基、-BR4A
R4B
或金屬原子,R4
可以與選自R1a
、R1b
及R3
中的至少一種共價鍵結或配位鍵結,R4A
及R4B
分別獨立地表示取代基。R4A
及R4B
可以相互鍵結而形成環。關於式(PP)的詳細內容,能夠參閱日本特開2009-263614號公報的0017~0047段、日本特開2011-068731號公報的0011~0036段、國際公開WO2015/166873號公報的0010~0024段的記載,該等內容被併入本說明書中。Examples of the pyrrolopyrrole compounds include compounds represented by the formula (PP).
[Chemical Formula 23]
In the formula, R 1a and R 1b each independently represent an alkyl group, an aryl group or a heteroaryl group, R 2 and R 3 each independently represent a hydrogen atom or a substituent, and R 2 and R 3 may be bonded to each other to form a ring. R 4 each independently represents a hydrogen atom, an alkyl group, an aryl group, a heteroaryl group, -BR 4A R 4B or a metal atom, and R 4 may be covalently bonded to at least one selected from R 1a , R 1b and R 3 Or coordination bonding, and R 4A and R 4B each independently represent a substituent. R 4A and R 4B may be bonded to each other to form a ring. For details of the formula (PP), refer to paragraphs 0017 to 0047 of Japanese Patent Application Laid-Open No. 2009-263614, paragraphs 0011 to 0036 of Japanese Patent Laid-Open No. 2011-068731, and 0010 to 0024 of International Publication WO2015 / 166873. These paragraphs are incorporated into this specification.
式(PP)中,R1a 及R1b 分別獨立地為芳基或雜芳基為較佳,芳基為更佳。又,R1a 及R1b 所表示之烷基、芳基及雜芳基可以具有取代基,亦可以為未經取代。作為取代基,可列舉日本特開2009-263614號公報的0020~0022段中所記載之取代基或以下取代基T。In the formula (PP), it is preferable that R 1a and R 1b are each independently an aryl group or a heteroaryl group, and an aryl group is more preferable. The alkyl group, aryl group, and heteroaryl group represented by R 1a and R 1b may have a substituent, or may be unsubstituted. Examples of the substituent include the substituents described in paragraphs 0020 to 0022 of Japanese Patent Application Laid-Open No. 2009-263614 or the following substituents T.
(取代基T)
烷基(較佳為碳數1~30的烷基)、烯基(較佳為碳數2~30的烯基)、炔基(較佳為碳數2~30的炔基)、芳基(較佳為碳數6~30的芳基)、胺基(較佳為碳數0~30的胺基)、烷氧基(較佳為碳數1~30的烷氧基)、芳氧基(較佳為碳數6~30的芳氧基)、雜芳氧基、醯基(較佳為碳數1~30的醯基)、烷氧基羰基(較佳為碳數2~30的烷氧基羰基)、芳氧基羰基(較佳為碳數7~30的芳氧基羰基)、醯氧基(較佳為碳數2~30的醯氧基)、醯胺基(較佳為碳數2~30的醯胺基)、烷氧基羰基胺基(較佳為碳數2~30的烷氧基羰基胺基)、芳氧基羰基胺基(較佳為碳數7~30的芳氧基羰基胺基)、胺磺醯基(較佳為碳數0~30的胺磺醯基)、胺甲醯基(較佳為碳數1~30的胺甲醯基)、烷硫基(較佳為碳數1~30的烷硫基)、芳硫基(較佳為碳數6~30的芳硫基)、雜芳硫基(較佳為碳數1~30)、烷基磺醯基(較佳為碳數1~30)、芳基磺醯基(較佳為碳數6~30)、雜芳基磺醯基(較佳為碳數1~30)、烷基亞磺醯基(較佳為碳數1~30)、芳基亞磺醯基(較佳為碳數6~30)、雜芳基亞磺醯基(較佳為碳數1~30)、脲基(較佳為碳數1~30)、羥基、羧基、磺基、磷酸基、羧酸醯胺基、磺酸醯胺基、醯亞胺酸基、巰基、鹵素原子、氰基、烷基亞磺酸基、芳基亞磺酸基、肼基、亞胺基、雜芳基(較佳為碳數1~30)。當該等基團係能夠進一步進行取代之基團時,亦可進一步具有取代基。作為取代基,可列舉上述取代基T中說明之基團。(Substituent T)
Alkyl (preferably alkyl having 1 to 30 carbons), alkenyl (preferably alkenyl having 2 to 30 carbons), alkynyl (preferably alkynyl having 2 to 30 carbons), aryl (Preferably aryl having 6 to 30 carbons), amine (preferably amine having 0 to 30 carbons), alkoxy (preferably alkoxy having 1 to 30 carbons), aryloxy Group (preferably aryloxy group having 6 to 30 carbon atoms), heteroaryloxy group, fluorenyl group (preferably fluorenyl group having 1 to 30 carbon atoms), alkoxycarbonyl group (preferably 2 to 30 carbon atoms) Alkoxycarbonyl group), aryloxycarbonyl group (preferably aryloxycarbonyl group having 7 to 30 carbon atoms), fluorenyl group (preferably fluorenyloxy group having 2 to 30 carbon atoms), fluorenylamino group (more Preferred is fluorenylamino having 2 to 30 carbon atoms), alkoxycarbonylamino (preferably alkoxycarbonylamino group having 2 to 30 carbons), aryloxycarbonylamino group (preferably 7 carbon atoms) Aryloxycarbonylamino group of 30), sulfamoyl group (preferably aminesulfonyl group having 0 to 30 carbon atoms), carbamoyl group (preferably carbamoylmethyl group having 1 to 30 carbon atoms) , Alkylthio (preferably alkylthio having 1 to 30 carbons), arylthio (preferably arylthio having 6 to 30 carbons), heteroarylthio (more Is 1-30 carbons), alkylsulfonyl (preferably 1-30 carbons), arylsulfonyl (preferably 6-30 carbons), heteroarylsulfonyl (preferably Carbon number 1-30), alkylsulfinylsulfonyl group (preferably carbon number 1-30), arylsulfinylsulfonyl group (preferably 6-30 carbon number), heteroarylsulfinylsulfonyl group (more It is preferably a carbon number of 1 to 30), a urea group (preferably a carbon number of 1 to 30), a hydroxyl group, a carboxyl group, a sulfo group, a phosphate group, a carboxylic acid amine group, a sulfonic acid amine group, a fluorenyl acid group, Mercapto group, halogen atom, cyano group, alkylsulfinyl group, arylsulfinyl group, hydrazine group, imino group, and heteroaryl group (preferably having 1 to 30 carbon atoms). When these groups are groups which can be further substituted, they may further have a substituent. Examples of the substituent include those described in the above-mentioned substituent T.
作為由R1a 、R1b 表示之基團的具體例,可列舉具有烷氧基作為取代基之芳基、具有羥基作為取代基之芳基、具有醯氧基作為取代基之芳基等。Specific examples of the group represented by R 1a and R 1b include an aryl group having an alkoxy group as a substituent, an aryl group having a hydroxy group as a substituent, and an aryl group having a fluorenyloxy group as a substituent.
式(PP)中,R2 及R3 分別獨立地表示氫原子或取代基。作為取代基可列舉上述取代基T。R2 及R3 中的至少一者係電子吸引基為較佳。作為電子吸引基,可列舉氰基、羧基、烷氧基羰基、芳氧基羰基、胺甲醯基、烷基羰基、芳基羰基、烷基磺醯基、芳基磺醯基等,氰基為較佳。In the formula (PP), R 2 and R 3 each independently represent a hydrogen atom or a substituent. Examples of the substituent include the above-mentioned substituent T. It is preferable that at least one of R 2 and R 3 is an electron attracting group. Examples of the electron attracting group include a cyano group, a carboxyl group, an alkoxycarbonyl group, an aryloxycarbonyl group, a carbamoyl group, an alkylcarbonyl group, an arylcarbonyl group, an alkylsulfonyl group, and an arylsulfonyl group. Is better.
式(PP)中,R2 表示電子吸引基(較佳為氰基),R3 表示雜芳基為較佳。雜芳基係5員環或6員環為較佳。又,雜芳基係單環或稠環為較佳,單環或稠合數為2~8的稠環為更佳,單環或稠合數為2~4的稠環為進一步較佳。構成雜芳基之雜原子的數係1~3為較佳,1~2為更佳。作為雜原子,例如可例示氮原子、氧原子、硫原子。雜芳基具有1個以上的氮原子為較佳。式(PP)中的2個R2 彼此可以相同,亦可不同。又,式(PP)中的2個R3 彼此可以相同,亦可不同。In the formula (PP), R 2 represents an electron attracting group (preferably a cyano group), and R 3 represents a heteroaryl group. Heteroaryl is more preferably a 5-membered ring or a 6-membered ring. In addition, a heteroaryl monocyclic or fused ring is more preferred, a monocyclic or fused ring having a fused number of 2 to 8 is more preferred, and a monocyclic or fused ring of a fused number of 2 to 4 is further preferred. The number of heteroatoms constituting the heteroaryl group is preferably 1 to 3, and more preferably 1 to 2. Examples of the hetero atom include a nitrogen atom, an oxygen atom, and a sulfur atom. The heteroaryl group preferably has one or more nitrogen atoms. The two R 2 in the formula (PP) may be the same as or different from each other. The two R 3 in the formula (PP) may be the same as or different from each other.
式(PP)中,R4 係氫原子、烷基、芳基、雜芳基或由-BR4A R4B 表示之基團為較佳,氫原子、烷基、芳基或由-BR4A R4B 表示之基團為更佳,由-BR4A R4B 表示之基團為進一步較佳。作為R4A 及R4B 所表示之取代基,鹵素原子、烷基、烷氧基、芳基或雜芳基為較佳,烷基、芳基或雜芳基為更佳,芳基為特佳。該等基團可以還具有取代基。式(PP)中的2個R4 彼此可以相同,亦可不同。R4A 及R4B 可以相互鍵結而形成環。In the formula (PP), R 4 is preferably a hydrogen atom, an alkyl group, an aryl group, a heteroaryl group or a group represented by -BR 4A R 4B , and a hydrogen atom, an alkyl group, an aryl group or -BR 4A R 4B shows the group is more preferred, a group represented by the sum -BR 4A R 4B is further preferred. As the substituents represented by R 4A and R 4B , a halogen atom, an alkyl group, an alkoxy group, an aryl group, or a heteroaryl group is preferable, an alkyl group, an aryl group, or a heteroaryl group is more preferable, and an aryl group is particularly preferable. . These groups may further have a substituent. The two R 4 in formula (PP) may be the same as or different from each other. R 4A and R 4B may be bonded to each other to form a ring.
作為吡咯并吡咯化合物的具體例,可列舉後述實施例中所記載之化合物。又,作為吡咯并吡咯化合物,可列舉日本特開2009-263614號公報的0016~0058段中所記載之化合物、日本特開2011-068731號公報的0037~0052段中所記載之化合物、國際公開WO2015/166873號公報的0010~0033段中所記載之化合物等,該等內容被併入本說明書中。Specific examples of the pyrrolopyrrole compound include compounds described in Examples described later. Examples of the pyrrolopyrrole compounds include compounds described in paragraphs 0016 to 0058 of JP 2009-263614, compounds described in paragraphs 0037 to 0052 of JP 2011-068731, and international publications. The compounds and the like described in paragraphs 0010 to 0033 of WO2015 / 166873 are incorporated herein.
方酸菁化合物係由下述式(SQ1)表示之化合物為較佳。
[化學式24]
式中,As1
及As2
分別獨立地表示芳基、雜環基或由式(As-1)表示之基團;
[化學式25]
式中,*表示鍵結鍵,Rs1
~Rs3
分別獨立地表示氫原子或烷基,As3
表示雜環基,ns1
表示0以上的整數,Rs1
與Rs2
可以相互鍵結而形成環,Rs1
與As3
可以相互鍵結而形成環、Rs2
與Rs3
可以相互鍵結而形成環,ns1
為2以上時,複數個Rs2
及Rs3
分別可以相同,亦可不同。The squaraine compound is preferably a compound represented by the following formula (SQ1).
[Chemical Formula 24]
In the formula, As 1 and As 2 each independently represent an aryl group, a heterocyclic group, or a group represented by the formula (As-1);
[Chemical Formula 25]
In the formula, * represents a bonding bond, Rs 1 to Rs 3 each independently represent a hydrogen atom or an alkyl group, As 3 represents a heterocyclic group, n s1 represents an integer of 0 or more, and Rs 1 and Rs 2 may be bonded to each other to form A ring, Rs 1 and As 3 may be bonded to each other to form a ring, and Rs 2 and Rs 3 may be bonded to each other to form a ring. When n s1 is 2 or more, the plurality of Rs 2 and Rs 3 may be the same or different.
As1 及As2 所表示之芳基的碳數係6~48為較佳,6~22為更佳,6~12為特佳。The carbon number of the aryl group represented by As 1 and As 2 is preferably from 6 to 48, more preferably from 6 to 22, and particularly preferably from 6 to 12.
As1 、As2 及As3 所表示之雜環基係5員環或6員環的雜環基為較佳。又,雜環基係單環的雜環基或稠合數為2~8的稠環的雜環基為較佳,單環的雜環基或稠合數為2~4的稠環的雜環基為更佳,單環的雜環基或稠合數為2或3的稠環的雜環基為更佳,單環的雜環基或稠合數為2的稠環的雜環基為特佳。作為構成雜環基的環之雜原子,可例示氮原子、氧原子、硫原子,氮原子、硫原子為較佳。構成雜環基的環之雜原子的數係1~3為較佳,1~2為更佳。The heterocyclic group represented by As 1 , As 2 and As 3 is preferably a 5- or 6-membered heterocyclic ring. A heterocyclic group is preferably a monocyclic heterocyclic group or a fused ring heterocyclic group having a fused number of 2 to 8. A monocyclic heterocyclic group or a fused ring heterocyclic group of fused numbers of 2 to 4 is preferred. A cyclic group is more preferred, a monocyclic heterocyclic group or a fused ring heterocyclic group having a fused number of 2 or 3 is more preferred, a monocyclic heterocyclic group or a fused ring heterocyclic group having a fused number of 2 Especially good. Examples of the hetero atom of the ring constituting the heterocyclic group include a nitrogen atom, an oxygen atom, and a sulfur atom. A nitrogen atom and a sulfur atom are preferred. The number of heteroatoms constituting the ring of the heterocyclic group is 1 to 3, and 1 to 2 is more preferable.
式(As-1)中的Rs1 ~Rs3 分別獨立地表示氫原子或烷基。Rs1 ~Rs3 所表示之烷基的碳數係1~20為較佳,1~15為更佳,1~8為進一步較佳。烷基可以為直鏈、支鏈、環狀中的任一種,直鏈或支鏈為較佳。Rs1 ~Rs3 係氫原子為較佳。Rs 1 to Rs 3 in the formula (As-1) each independently represent a hydrogen atom or an alkyl group. The carbon number of the alkyl group represented by Rs 1 to Rs 3 is preferably 1 to 20, more preferably 1 to 15 and even more preferably 1 to 8. The alkyl group may be any of a straight chain, a branched chain, and a cyclic group, and a straight chain or a branched chain is preferred. Rs 1 to Rs 3 are preferably hydrogen atoms.
式(As-1)中的ns1 表示0以上的整數。ns1 係0~2的整數為較佳,0或1為更佳,0為進一步較佳。N s1 in the formula (As-1) represents an integer of 0 or more. n s1 is an integer of 0 to 2 is preferred, 0 or 1 is more preferred, and 0 is further preferred.
式(As-1)中,Rs1 與Rs2 可以相互鍵結而形成環,Rs1 與As3 可以相互鍵結而形成環,Rs2 與Rs3 可以相互鍵結而形成環。作為形成上述環時的連接基,選自包括-CO-、-O-、-NH-、碳數1~10的伸烷基及該等的組合的組群中之2價的連接基為較佳。作為連接基的伸烷基可以為未經取代,亦可以具有取代基。作為取代基,可列舉上述取代基T。In formula (As-1), Rs 1 and Rs 2 may be bonded to each other to form a ring, Rs 1 and As 3 may be bonded to each other to form a ring, and Rs 2 and Rs 3 may be bonded to each other to form a ring. As the linking group when forming the ring, a divalent linking group selected from the group consisting of -CO-, -O-, -NH-, an alkylene group having 1 to 10 carbon atoms, and a combination thereof is preferred. good. The alkylene group as the linking group may be unsubstituted or may have a substituent. Examples of the substituent include the above-mentioned substituent T.
式(SQ1)中,As1 及As2 所表示之基團具有取代基為較佳。作為取代基可列舉上述取代基T。In the formula (SQ1), it is preferred that the groups represented by As 1 and As 2 have a substituent. Examples of the substituent include the above-mentioned substituent T.
式(SQ1)中,As1 及As2 分別獨立地為芳基或雜環基,或者As1 及As2 分別獨立地為由式(As-1)表示之基團為較佳。In the formula (SQ1), As 1 and As 2 are each independently an aryl group or a heterocyclic group, or As 1 and As 2 are each independently a group represented by the formula (As-1).
另外,式(SQ1)中,陽離子以如下方式非定域化而存在。
[化學式26]
In addition, in the formula (SQ1), a cation exists in a delocalized manner as follows.
[Chemical Formula 26]
作為方酸菁化合物的具體例,可列舉日本特開2011-208101號公報的0044~0049段中所記載之化合物、日本專利第6065169號公報的0060~0061段中所記載之化合物、國際公開WO2016/181987號公報的0040段中所記載之化合物、國際公開WO2013/133099號公報中所記載之化合物、國際公開WO2014/088063號公報中所記載之化合物、日本特開2014-126642號公報中所記載之化合物、日本特開2016-146619號公報中所記載之化合物、日本特開2015-176046號公報中所記載之化合物、日本特開2017-25311號公報中所記載之化合物、國際公開WO2016/154782號公報中所記載之化合物、日本專利5884953號公報中所記載之化合物、日本專利6036689號公報中所記載之化合物、日本專利5810604號公報中所記載之化合物、日本特開2017-068120號公報中所記載之化合物等,該等內容被併入本說明書中。Specific examples of the squaraine compound include compounds described in paragraphs 0044 to 0049 of Japanese Patent Laid-Open No. 2011-208101, compounds described in paragraphs 0060 to 0061 of Japanese Patent No. 6065169, and International Publication WO2016. The compound described in paragraph 0040 of / 181987, the compound described in International Publication No. WO2013 / 133099, the compound described in International Publication No. WO2014 / 088063, and Japanese Patent Application Laid-Open No. 2014-126642. Compounds, compounds described in JP 2016-146619, compounds described in JP 2015-176046, compounds described in JP 2017-25311, international publication WO2016 / 154782 Compounds described in Japanese Patent Publication, Japanese Patent No. 5854953, Japanese Patent No. 6036689, Japanese Patent No. 5810604, Japanese Patent Laid-Open No. 2017-068120 Compounds and the like described are incorporated into this specification.
花青化合物係由式(Cy1)表示之化合物為較佳。
[化學式27]
The cyanine compound is preferably a compound represented by the formula (Cy1).
[Chemical Formula 27]
Rcy1 ~Rcy5 分別獨立地表示氫原子或取代基,Rcy1 ~Rcy5 中,2個可以鍵結而形成環。ncy1 表示0~2的整數,ncy1 為2時,複數個Rcy4 及Rcy5 可以相同,亦可不同。Acy1 及Acy2 分別獨立地表示芳基或雜環基。式中的由Cy表示之部位為陽離子部時,Y表示抗衡陰離子,c表示用以取電荷的平衡所需的數,式中的由Cy表示之部位為陰離子部時,Y表示抗衡陽離子,c表示用以取電荷的平衡所需的數,式中的由Cy表示之部位的電荷在分子內被中和時,c為0。Rcy 1 to Rcy 5 each independently represent a hydrogen atom or a substituent, and two of Rcy 1 to Rcy 5 may be bonded to form a ring. n cy1 represents an integer from 0 to 2. When n cy1 is 2, a plurality of Rcy 4 and Rcy 5 may be the same or different. Acy 1 and Acy 2 each independently represent an aryl group or a heterocyclic group. When the part represented by Cy in the formula is a cationic part, Y represents a counter anion, c represents the number required to balance the charge, and when the part represented by Cy in the formula is an anion part, Y represents a counter cation, c Represents the number required to balance the charge. When the charge of the site represented by Cy in the formula is neutralized in the molecule, c is 0.
Rcy1 ~Rcy5 分別獨立地表示氫原子或取代基。作為取代基可列舉上述取代基T。在式(Cy1)中,Rcy1 ~Rcy5 中,2個可以鍵結而形成環。作為形成上述環時的連接基,選自包括-CO-、-O-、-NH-、碳數1~10的伸烷基及該等的組合的組群中之2價的連接基為較佳。作為連接基的伸烷基可以為未經取代,亦可以具有取代基。作為取代基可列舉上述取代基T。Rcy 1 to Rcy 5 each independently represent a hydrogen atom or a substituent. Examples of the substituent include the above-mentioned substituent T. In the formula (Cy1), two of Rcy 1 to Rcy 5 may be bonded to form a ring. As the linking group when forming the ring, a divalent linking group selected from the group consisting of -CO-, -O-, -NH-, an alkylene group having 1 to 10 carbon atoms, and a combination thereof is preferred. good. The alkylene group as the linking group may be unsubstituted or may have a substituent. Examples of the substituent include the above-mentioned substituent T.
ncy1 表示0~2的整數,0或1為較佳。ncy1 為2時,複數個Rcy4 及Rcy5 可以相同,亦可不同。n cy1 represents an integer of 0 to 2, and 0 or 1 is preferred. When n cy1 is 2, the plurality of Rcy 4 and Rcy 5 may be the same or different.
Acy1 及Acy2 所表示之芳基的碳數係6~48為較佳,6~22為更佳,6~12為特佳。Acy1 及Acy2 所表示之雜環基係5員環或6員環的雜環基為較佳。又,雜環基係單環的雜環基或稠合數為2~8的稠環的雜環基為較佳,單環的雜環基或稠合數為2~4的稠環的雜環基為更佳,單環的雜環基或稠合數為2或3的稠環的雜環基為更佳,單環的雜環基或稠合數為2的稠環的雜環基為特佳。作為構成雜環基的環之雜原子,可列舉氮原子、氧原子、硫原子,氧原子、硫原子為較佳。構成雜環基的環之雜原子的數係1~3為較佳,1~2為更佳。Acy1 及Acy2 所表示之基團可以具有取代基。作為取代基可列舉上述取代基T。The carbon number of the aryl group represented by Acy 1 and Acy 2 is preferably 6 to 48, more preferably 6 to 22, and particularly preferably 6 to 12. The heterocyclic group represented by Acy 1 and Acy 2 is preferably a 5- or 6-membered heterocyclic ring. A heterocyclic group is preferably a monocyclic heterocyclic group or a fused ring heterocyclic group having a fused number of 2 to 8. A monocyclic heterocyclic group or a fused ring heterocyclic group of fused numbers of 2 to 4 is preferred. A cyclic group is more preferred, a monocyclic heterocyclic group or a fused ring heterocyclic group having a fused number of 2 or 3 is more preferred, a monocyclic heterocyclic group or a fused ring heterocyclic group having a fused number of 2 Especially good. Examples of the hetero atom constituting the ring of the heterocyclic group include a nitrogen atom, an oxygen atom, and a sulfur atom. An oxygen atom and a sulfur atom are preferred. The number of heteroatoms constituting the ring of the heterocyclic group is 1 to 3, and 1 to 2 is more preferable. The groups represented by Acy 1 and Acy 2 may have a substituent. Examples of the substituent include the above-mentioned substituent T.
式(Cy1)中,式中的由Cy表示之部位為陽離子部時,Y表示抗衡陰離子,c表示用於取電荷的平衡所需的數。作為抗衡陰離子,可列舉鹵素離子(Cl-
、Br-
、I-
)、磺酸根陰離子、羧酸根陰離子、磺醯基醯亞胺陰離子、PF6 -
、BF4 -
、ClO4 -
、三(鹵代烷基磺醯基)甲基化物陰離子(例如、(CF3
SO2
)3
C-
)、二(鹵代烷基磺醯基)醯亞胺陰離子(例如(CF3
SO2
)2
N-
)、四芳基硼酸鹽陰離子、四氰基硼酸鹽陰離子等。
式(Cy1)中,式中的由Cy表示之部位為陰離子部時,Y表示抗衡陽離子,c表示用於取電荷的平衡所需的數。作為抗衡陽離子,可列舉鹼金屬離子(Li+
、Na+
、K+
等)、鹼土類金屬離子(Mg2+
、Ca2+
、Ba2+
、Sr2+
等)、過渡金屬離子(Ag+
、Fe2+
、Co2+
、Ni2+
、Cu2+
、Zn2+
等)、其他金屬離子(Al3+
等)、銨離子、三乙基銨離子、三丁基銨離子、吡啶離子、四丁基銨離子、胍鎓離子、四甲基胍鎓離子、二吖雙環十一碳烯離子等。
式(Cy1)中,式中的由Cy表示之部位的電荷在分子內被中和時,Y不存在。亦即,c為0。In the formula (Cy1), when the part represented by Cy in the formula is a cationic part, Y represents a counter anion, and c represents a number required for balancing the charge. As the counter anion include a halogen ion (Cl -, Br -, I -), a sulfonate anion, a carboxylate anion, sulfonic acyl acyl imide anion, PF 6 -, BF 4 - , ClO 4 -, tris (haloalkyl sulfo acyl group) methide anion (e.g., (CF 3 SO 2) 3 C -), bis (sulfo-haloalkyl acyl) acyl imide anion (e.g. (CF 3 SO 2) 2 N -), tetraarylphosphonium Borate anion, tetracyanoborate anion, etc.
In the formula (Cy1), when the part represented by Cy in the formula is an anion part, Y represents a counter cation, and c represents a number required for the balance of electric charges. Examples of counter cations include alkali metal ions (Li + , Na + , K +, etc.), alkaline earth metal ions (Mg 2+ , Ca 2+ , Ba 2+ , Sr 2+, etc.), and transition metal ions (Ag + , Fe 2+ , Co 2+ , Ni 2+ , Cu 2+ , Zn 2+, etc.), other metal ions (Al 3+, etc.), ammonium ion, triethylammonium ion, tributylammonium ion, pyridine ion , Tetrabutylammonium ion, guanidinium ion, tetramethylguanidinium ion, diazinebicycloundecene ion, and the like.
In formula (Cy1), when the charge of the site represented by Cy in the formula is neutralized in the molecule, Y does not exist. That is, c is 0.
作為花青化合物的具體例,可列舉日本特開2009-108267號公報的0044~0045段中所記載之化合物、日本特開2002-194040號公報的0026~0030段中所記載之化合物、日本特開2015-172004號公報中所記載之化合物、日本特開2015-172102號公報中所記載之化合物、日本特開2008-088426號公報中所記載之化合物、日本特開2017-031394號公報中所記載之化合物等,該等內容被編入到本說明書中。Specific examples of the cyanine compound include compounds described in paragraphs 0044 to 0045 of JP 2009-108267, compounds described in paragraphs 0026 to 0030 of JP 2002-194040, and Compounds described in JP 2015-172004, compounds described in JP 2015-172102, compounds described in JP 2008-088426, and JP 2017-031394 The recorded compounds and the like are incorporated into this specification.
(克酮鎓化合物)
克酮鎓化合物係由下述式(Cr1)表示之化合物為較佳。
[化學式28]
式中,Ac1
及Ac2
分別獨立地表示芳基、雜環基或由式(Ac-1)表示之基團;
[化學式29]
式中,*表示鍵結鍵,Rc1
~Rc3
分別獨立地表示氫原子或烷基,Ac3
表示雜環基,nc1
表示0以上的整數,Rc1
與Rc2
可以相互鍵結而形成環,Rc1
與Ac3
可以相互鍵結而形成環,Rc2
與Rc3
可以相互鍵結而形成環,nc1
為2以上時,複數個Rc2
及Rc3
分別可以相同,亦可不同。(Gram ketonium compound)
The ketonium compound is preferably a compound represented by the following formula (Cr1).
[Chemical Formula 28]
In the formula, Ac 1 and Ac 2 each independently represent an aryl group, a heterocyclic group, or a group represented by the formula (Ac-1);
[Chemical Formula 29]
In the formula, * represents a bonding bond, Rc 1 to Rc 3 each independently represent a hydrogen atom or an alkyl group, Ac 3 represents a heterocyclic group, n c1 represents an integer of 0 or more, and Rc 1 and Rc 2 can be formed by bonding each other. A ring, Rc 1 and Ac 3 may be bonded to each other to form a ring, Rc 2 and Rc 3 may be bonded to each other to form a ring, and when n c1 is 2 or more, a plurality of Rc 2 and Rc 3 may be the same or different.
Ac1 及Ac2 所表示之芳基的碳數係6~48為較佳,6~22為更佳,6~12為特佳。The carbon number of the aryl group represented by Ac 1 and Ac 2 is preferably 6 to 48, more preferably 6 to 22, and particularly preferably 6 to 12.
Ac1 、Ac2 及Ac3 所表示之雜環基係5員環或6員環的雜環基為較佳。又,雜環基係單環的雜環基或稠合數為2~8的稠環的雜環基為較佳,單環的雜環基或稠合數為2~4的稠環的雜環基為更佳,單環的雜環基或稠合數為2或3的稠環的雜環基為更佳,單環的雜環基或稠合數為2的稠環的雜環基為特佳。作為構成雜環基的環之雜原子,可例示氮原子、氧原子、硫原子,氮原子、硫原子為較佳。構成雜環基的環之雜原子的數係1~3為較佳,1~2為更佳。The heterocyclic group represented by Ac 1 , Ac 2 and Ac 3 is preferably a 5-membered ring or 6-membered ring heterocyclic group. A heterocyclic group is preferably a monocyclic heterocyclic group or a fused ring heterocyclic group having a fused number of 2 to 8. A monocyclic heterocyclic group or a fused ring heterocyclic group of fused numbers of 2 to 4 is preferred. A cyclic group is more preferred, a monocyclic heterocyclic group or a fused ring heterocyclic group having a fused number of 2 or 3 is more preferred, a monocyclic heterocyclic group or a fused ring heterocyclic group having a fused number of 2 Especially good. Examples of the hetero atom of the ring constituting the heterocyclic group include a nitrogen atom, an oxygen atom, and a sulfur atom. A nitrogen atom and a sulfur atom are preferred. The number of heteroatoms constituting the ring of the heterocyclic group is 1 to 3, and 1 to 2 is more preferable.
式(Ac-1)中的Rc1 ~Rc3 分別獨立地表示氫原子或烷基。Rc1 ~Rc3 所表示之烷基的碳數為1~20為較佳,1~15為更佳,1~8為進一步較佳。烷基可以為直鏈、支鏈、環狀中的任一種,直鏈或分支為較佳。Rc1 ~Rc3 係氫原子為較佳。Rc 1 to Rc 3 in the formula (Ac-1) each independently represent a hydrogen atom or an alkyl group. The carbon number of the alkyl group represented by R c1 to R c3 is preferably 1 to 20, more preferably 1 to 15 and even more preferably 1 to 8. The alkyl group may be any of a straight chain, a branched chain, and a cyclic ring, and a straight chain or a branched chain is preferred. Rc 1 to Rc 3 are preferably hydrogen atoms.
式(Ac-1)中的nc1 表示0以上的整數。nc1 係0~2的整數為較佳,0或1為更佳,1為進一步較佳。N c1 in the formula (Ac-1) represents an integer of 0 or more. n c1 is an integer of 0 to 2 is preferred, 0 or 1 is more preferred, and 1 is further preferred.
式(Ac-1)中,Rc1 與Rc2 可以相互鍵結而形成環,Rc1 與Ac3 可以相互鍵結而形成環,Rc2 與Rc3 可以相互鍵結而形成環。作為形成上述環時的連接基,選自包括-CO-、-O-、-NH-、碳數1~10的伸烷基及該等的組合的組群中之2價連接基為較佳。作為連接基的伸烷基可以為未經取代,亦可以具有取代基。作為取代基,可列舉上述取代基T。In formula (Ac-1), Rc 1 and Rc 2 may be bonded to each other to form a ring, Rc 1 and Ac 3 may be bonded to each other to form a ring, and Rc 2 and Rc 3 may be bonded to each other to form a ring. As the linking group when forming the ring, a divalent linking group selected from the group consisting of -CO-, -O-, -NH-, an alkylene group having 1 to 10 carbon atoms, and a combination thereof is preferred . The alkylene group as the linking group may be unsubstituted or may have a substituent. Examples of the substituent include the above-mentioned substituent T.
式(Cr1)中,Ac1 及Ac2 所表示之基團具有取代基為較佳。作為取代基可列舉上述取代基T。In the formula (Cr1), it is preferred that the groups represented by Ac 1 and Ac 2 have a substituent. Examples of the substituent include the above-mentioned substituent T.
式(Cr1)中,Ac1 及Ac2 分別獨立地為芳基或雜環基,或者Ac1 及Ac2 分別獨立地為由式(Ac-1)表示之基團為較佳。In the formula (Cr1), it is preferable that Ac 1 and Ac 2 are each independently an aryl group or a heterocyclic group, or Ac 1 and Ac 2 are each independently a group represented by the formula (Ac-1).
另外,式(Cr1)中,陽離子以如下方式非定域化而存在。
[化學式30]
In addition, in the formula (Cr1), cations are delocalized and exist as follows.
[Chemical Formula 30]
作為克酮鎓化合物的具體例,亦可列舉日本特開平5-155145號公報中所記載之化合物、日本特開2007-031644號公報中所記載之化合物,該等內容被併入本說明書中。Specific examples of the ketonium compound include compounds described in Japanese Patent Application Laid-Open No. 5-155145 and compounds described in Japanese Patent Application Laid-Open No. 2007-031644, which are incorporated into this specification.
亞銨化合物係由下述式(Im)表示之化合物為較佳。The ammonium compound is preferably a compound represented by the following formula (Im).
式(Im)
[化學式31]
式中,R11
~R18
分別獨立地表示烷基或芳基,V11
~V15
分別獨立地表示烷基、芳基、鹵素原子、烷氧基或氰基,X表示抗衡陰離子,c表示用於取電荷的平衡所需的數,n1~n5分別獨立地為0~4。Formula (Im)
[Chemical Formula 31]
In the formula, R 11 to R 18 each independently represent an alkyl group or an aryl group, V 11 to V 15 each independently represent an alkyl group, an aryl group, a halogen atom, an alkoxy group, or a cyano group, X represents a counter anion, and c represents The numbers required for the balance of the electric charges, n1 to n5 are each independently 0 to 4.
R11
~R18
分別獨立地表示烷基或芳基。烷基的碳數係1~20為較佳,1~12為更佳,1~8為特佳。烷基可以為直鏈、支鏈、環狀中的任一種,直鏈或分支為較佳。芳基的碳數為6~25為較佳,6~15為進一步較佳,6~12為更佳。
烷基及芳基可以具有取代基,亦可以為未經取代。作為取代基,可列舉上述取代基T中說明之基團。R 11 to R 18 each independently represent an alkyl group or an aryl group. The carbon number of the alkyl group is preferably from 1 to 20, more preferably from 1 to 12, and particularly preferably from 1 to 8. The alkyl group may be any of a straight chain, a branched chain, and a cyclic ring, and a straight chain or a branched chain is preferred. The carbon number of the aryl group is preferably 6 to 25, 6 to 15 is more preferable, and 6 to 12 is more preferable.
The alkyl group and the aryl group may have a substituent or may be unsubstituted. Examples of the substituent include those described in the above-mentioned substituent T.
V11 ~V15 分別獨立地表示烷基、芳基、鹵素原子、烷氧基或氰基。作為鹵素原子,可列舉氟原子、氯原子、溴原子、碘原子。烷基的碳數係1~20為較佳,1~12為更佳,1~8為特佳。烷基可以為直鏈、支鏈、環狀中的任一種,直鏈或支鏈為較佳,直鏈為特佳。芳基的碳數為6~25為較佳,6~15為進一步較佳,6~12為更佳。烷氧基的碳數係1~20為較佳,1~12為更佳,1~8為特佳。烷氧基可以為直鏈、支鏈、環狀中的任一種,直鏈或支鏈為較佳,直鏈為特佳。V 11 to V 15 each independently represent an alkyl group, an aryl group, a halogen atom, an alkoxy group, or a cyano group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. The carbon number of the alkyl group is preferably from 1 to 20, more preferably from 1 to 12, and particularly preferably from 1 to 8. The alkyl group may be any of a straight chain, a branched chain, and a cyclic ring. A straight chain or a branched chain is preferred, and a straight chain is particularly preferred. The carbon number of the aryl group is preferably 6 to 25, 6 to 15 is more preferable, and 6 to 12 is more preferable. The carbon number of the alkoxy group is preferably from 1 to 20, more preferably from 1 to 12, and particularly preferably from 1 to 8. The alkoxy group may be any of a linear chain, a branched chain, and a cyclic ring. A linear or branched chain is preferred, and a linear chain is particularly preferred.
n1~n5分別獨立地為0~4。n1~n4係0~2為較佳,0或1為更佳。n5係0~3為較佳,0~2為更佳。n1 to n5 are each independently 0 to 4. n1 to n4 are preferably 0 to 2 and more preferably 0 or 1. n5 is more preferably 0 to 3, and more preferably 0 to 2.
X表示抗衡陰離子。作為抗衡陰離子,可列舉鹵素離子(Cl- 、Br- 、I- )、磺酸根陰離子、羧酸根陰離子、磺醯基醯亞胺陰離子、PF6 - 、BF4 - 、ClO4 - 、三(鹵代烷基磺醯基)甲基化物陰離子(例如、(CF3 SO2 )3 C- )、二(鹵代烷基磺醯基)醯亞胺陰離子(例如(CF3 SO2 )2 N- )、四芳基硼酸鹽陰離子、四氰基硼酸鹽陰離子等。X represents a counter anion. As the counter anion include a halogen ion (Cl -, Br -, I -), a sulfonate anion, a carboxylate anion, sulfonic acyl acyl imide anion, PF 6 -, BF 4 - , ClO 4 -, tris (haloalkyl sulfo acyl group) methide anion (e.g., (CF 3 SO 2) 3 C -), bis (sulfo-haloalkyl acyl) acyl imide anion (e.g. (CF 3 SO 2) 2 N -), tetraarylphosphonium Borate anion, tetracyanoborate anion, etc.
c表示用於取電荷的平衡所需的數,例如,2為較佳。c represents a number required for balancing the electric charges, and for example, 2 is preferable.
作為亞銨化合物的具體例,可列舉日本特表2008-528706號公報中所記載之化合物、日本特開2012-012399號公報中所記載之化合物及日本特開2007-092060號公報中所記載之化合物,該等內容被併入本說明書中。Specific examples of the ammonium compound include the compounds described in Japanese Patent Application Publication No. 2008-528706, the compounds described in Japanese Patent Application Publication No. 2012-012399, and the compounds described in Japanese Patent Application Publication No. 2007-092060. Compounds, which are incorporated into this specification.
近紅外線吸收色素亦能夠使用市售品。作為近紅外線吸收色素的市售品,可列舉SDO-C33(Arimoto Chemical Co., Ltd.製)、EX Color IR-14、EX Color IR-10A、EX Color TX-EX-801B、EX Color TX-EX-805K(NIPPON SHOKUBAI CO.,Ltd.製)、ShigenoxNIA-8041、ShigenoxNIA-8042、ShigenoxNIA-814、ShigenoxNIA-820、ShigenoxNIA-839(Hakko Chemical Co.,Ltd.製)、EpoliteV-63、Epolight3801、Epolight3036(EPOLIN INC.製)、PRO-JET825LDI(FUJIFILM Corporation製)、NK-3027、NK-5060(HAYASHIBARA CO.,LTD.製)、YKR-3070(Mitsui Chemicals, Inc.製)等。As the near-infrared absorbing pigment, a commercially available product can also be used. Examples of commercially available products of near-infrared absorbing pigments include SDO-C33 (manufactured by Arimoto Chemical Co., Ltd.), EX Color IR-14, EX Color IR-10A, EX Color TX-EX-801B, and EX Color TX- EX-805K (manufactured by NIPPON SHOKUBAI CO., Ltd.), ShigenoxNIA-8041, ShigenoxNIA-8042, ShigenoxNIA-814, ShigenoxNIA-820, ShigenoxNIA-839 (manufactured by Hakko Chemical Co., Ltd.), EpoliteV-63, Epolight3801, Epolight3036 (manufactured by EPOLIN INC.), PRO-JET825LDI (manufactured by FUJIFILM Corporation), NK-3027, NK-5060 (manufactured by HAYASHIBARA CO., LTD.), YKR-3070 (manufactured by Mitsui Chemicals, Inc.), and the like.
感光性組成物的總固體成分中的色材的含量係5質量%以上為較佳,10質量%以上為更佳,20質量%以上為更佳,30質量%以上為進一步較佳,40質量%以上為更進一步較佳,50質量%以上為更進一步較佳。上限係80質量%以下為較佳,75質量%以下為更佳,70質量%以下為進一步較佳。尤其,隨著感光性組成物中的色材的含量的增加,趨於靈敏度容易降低,但藉由本發明的感光性組成物,即使感光性組成物中的色材的含量高,亦能夠維持優異的靈敏度。因此,在感光性組成物的總固體成分中的色材的含量高的情況下,本發明的效果更明顯。The content of the color material in the total solid content of the photosensitive composition is preferably 5 mass% or more, more preferably 10 mass% or more, more preferably 20 mass% or more, 30 mass% or more is further preferable, and 40 mass % Or more is more preferable, and 50% by mass or more is further preferable. The upper limit is preferably 80% by mass or less, more preferably 75% by mass or less, and more preferably 70% by mass or less. In particular, as the content of the color material in the photosensitive composition increases, the sensitivity tends to decrease, but with the photosensitive composition of the present invention, even if the content of the color material in the photosensitive composition is high, it can maintain excellent The sensitivity. Therefore, when the content of the color material in the total solid content of the photosensitive composition is high, the effect of the present invention is more pronounced.
用於本發明的感光性組成物之色材包含選自彩色著色劑、黑色著色劑及白色著色劑中之至少一種為較佳,包含選自彩色著色劑及黑色著色劑中之至少一種為更佳,包含彩色著色劑為進一步較佳。又,色材的總質量中的色著色劑及黑色著色劑的含量係30質量%以上為較佳,50質量%以上為更佳,70質量%以上為進一步較佳。上限能夠設為100質量%,亦能夠設為90質量%以下。The color material used in the photosensitive composition of the present invention preferably contains at least one selected from the group consisting of a coloring agent, a black coloring agent, and a white coloring agent, and more preferably contains at least one selected from the group consisting of a coloring agent and a black coloring agent. It is more preferable to include a coloring agent. The content of the coloring agent and the black coloring agent in the total mass of the coloring material is preferably 30% by mass or more, more preferably 50% by mass or more, and more preferably 70% by mass or more. The upper limit can be set to 100% by mass or 90% by mass or less.
將本發明的感光性組成物用作濾色器用的組成物(更具體而言為濾色器的著色像素形成用的組成物)時,感光性組成物的總固體成分中的彩色著色劑的含量係30質量%以上為較佳,40質量%以上為更佳,50質量%以上為進一步較佳。上限係80質量%以下為較佳,75質量%以下為更佳,70質量%以下為進一步較佳。又,色材的總質量中的彩色著色劑的含量係25質量%以上為較佳,45質量%以上為更佳,65質量%以上為進一步較佳。上限能夠設為100質量%,亦能夠設為75質量%以下。When the photosensitive composition of the present invention is used as a composition for a color filter (more specifically, a composition for forming a colored pixel of a color filter), the content of the colorant in the total solid content of the photosensitive composition The content is preferably 30% by mass or more, more preferably 40% by mass or more, and more preferably 50% by mass or more. The upper limit is preferably 80% by mass or less, more preferably 75% by mass or less, and more preferably 70% by mass or less. The content of the colorant in the total mass of the color material is preferably 25% by mass or more, more preferably 45% by mass or more, and more preferably 65% by mass or more. The upper limit can be set to 100% by mass or 75% by mass or less.
在將本發明的感光性組成物用作光散射層形成用的組成物或濾色器的白色像素形成用的組成物等的情況下,感光性組成物的總固體成分中的白色著色劑的含量係30質量%以上為較佳,40質量%以上為更佳,50質量%以上為進一步較佳。上限係80質量%以下為較佳,75質量%以下為更佳,70質量%以下為進一步較佳。又,色材的總質量中的白色著色劑的含量係25質量%以上為較佳,45質量%以上為更佳,65質量%以上為進一步較佳。上限能夠設為100質量%,亦能夠設為75質量%以下。When the photosensitive composition of the present invention is used as a composition for forming a light-scattering layer or a composition for forming white pixels of a color filter, etc., the amount of white colorant in the total solid content of the photosensitive composition The content is preferably 30% by mass or more, more preferably 40% by mass or more, and more preferably 50% by mass or more. The upper limit is preferably 80% by mass or less, more preferably 75% by mass or less, and more preferably 70% by mass or less. The content of the white colorant in the total mass of the color material is preferably 25% by mass or more, more preferably 45% by mass or more, and more preferably 65% by mass or more. The upper limit can be set to 100% by mass or 75% by mass or less.
在將本發明的感光性組成物用作遮光膜形成用的組成物或黑色矩陣形成用的組成物時,感光性組成物的總固體成分中的黑色著色劑(較佳為無機黑色著色劑)的含量係30質量%以上為較佳,40質量%以上為更佳,50質量%以上為進一步較佳。上限係80質量%以下為較佳,75質量%以下為更佳,70質量%以下為進一步較佳。又,色材的總質量中的黑色著色劑的含量係30質量%以上為較佳,50質量%以上為更佳,70質量%以上為進一步較佳。上限能夠設為100質量%,亦能夠設為90質量%以下。When the photosensitive composition of the present invention is used as a composition for forming a light-shielding film or a composition for forming a black matrix, a black colorant (preferably an inorganic black colorant) in the total solid content of the photosensitive composition The content is preferably 30% by mass or more, more preferably 40% by mass or more, and more preferably 50% by mass or more. The upper limit is preferably 80% by mass or less, more preferably 75% by mass or less, and more preferably 70% by mass or less. The content of the black colorant in the total mass of the color material is preferably 30% by mass or more, more preferably 50% by mass or more, and more preferably 70% by mass or more. The upper limit can be set to 100% by mass or 90% by mass or less.
在將本發明的感光性組成物用作近紅外線透射濾波器用的組成物之情況下,本發明中所使用之色材滿足以下的(1)~(3)中的至少一個必要條件為較佳。When the photosensitive composition of the present invention is used as a composition for a near-infrared transmission filter, it is preferable that the color material used in the present invention satisfies at least one of the following requirements (1) to (3) .
(1):包含2種以上的彩色著色劑,由2種以上的彩色著色劑的組合形成黑色。由選自紅色著色劑、藍色著色劑、黃色著色劑、紫色著色劑及綠色著色劑中的2種以上的著色劑的組合形成黑色為較佳。
(2):包含有機黑色著色劑。
(3):在上述(1)或(2)中,還包含近紅外線吸收色素。(1): Two or more kinds of coloring agents are included, and black is formed by a combination of two or more kinds of coloring agents. It is preferable that black is formed from a combination of two or more colorants selected from the group consisting of a red colorant, a blue colorant, a yellow colorant, a purple colorant, and a green colorant.
(2): Contains organic black colorant.
(3): The above (1) or (2) further includes a near-infrared absorbing pigment.
作為上述(1)的態樣的較佳的組合,例如可列舉以下。
(1-1)含有紅色著色劑及藍色著色劑之態樣。
(1-2)含有紅色著色劑、藍色著色劑及黃色著色劑之態樣。
(1-3)含有紅色著色劑、藍色著色劑、黃色著色劑及紫色著色劑之態樣。
(1-4)含有紅色著色劑、藍色著色劑、黃色著色劑、紫色著色劑及綠色著色劑之態樣。
(1-5)含有紅色著色劑、藍色著色劑、黃色著色劑及綠色著色劑之態樣。
(1-6)含有紅色著色劑、藍色著色劑及綠色著色劑之態樣。
(1-7)含有黃色著色劑及紫色著色劑之態樣。As a preferable combination of the aspect of said (1), the following are mentioned, for example.
(1-1) A state containing a red colorant and a blue colorant.
(1-2) A state containing a red colorant, a blue colorant, and a yellow colorant.
(1-3) A state containing a red colorant, a blue colorant, a yellow colorant, and a purple colorant.
(1-4) A state containing a red colorant, a blue colorant, a yellow colorant, a purple colorant, and a green colorant.
(1-5) A state containing a red colorant, a blue colorant, a yellow colorant, and a green colorant.
(1-6) A state containing a red colorant, a blue colorant, and a green colorant.
(1-7) A state containing a yellow colorant and a purple colorant.
上述(2)的態樣中,進一步含有彩色著色劑亦為較佳。藉由併用有機黑色著色劑及彩色著色劑,容易獲得優異的分光特性。作為與有機黑色著色劑組合使用之彩色著色劑,例如可列舉紅色著色劑、藍色著色劑、紫色著色劑等,紅色著色劑及藍色著色劑為較佳。該等可以單獨使用,亦可以併用2種以上。又,彩色著色劑與有機黑色著色劑的混合比例相對於有機黑色著色劑100質量份,彩色著色劑係10~200質量份為較佳,15~150質量份為更佳。In the aspect (2), it is also preferable to further contain a coloring agent. By using an organic black colorant and a color colorant together, it is easy to obtain excellent spectral characteristics. Examples of the colorant used in combination with the organic black colorant include red colorants, blue colorants, and purple colorants. Red colorants and blue colorants are preferred. These can be used alone or in combination of two or more. In addition, the mixing ratio of the coloring agent and the organic black coloring agent is preferably from 100 to 200 parts by mass of the organic black coloring agent, and more preferably from 15 to 150 parts by mass.
上述(3)的態樣中,色材的總質量中的近紅外線吸收色素的含量係5~40質量%為較佳。上限係30質量%以下為較佳,25質量%以下為更佳。下限係10質量%以上為較佳,15質量%以上為更佳。In the aspect (3), the content of the near-infrared absorbing pigment in the total mass of the color material is preferably 5 to 40% by mass. The upper limit is preferably 30% by mass or less, and more preferably 25% by mass or less. The lower limit is more preferably 10% by mass or more, and more preferably 15% by mass or more.
<<樹脂>>
本發明的感光性組成物能夠含有樹脂。另外,本發明中樹脂係除了色材以外的有機化合物,係指分子量為3000以上的有機化合物。
樹脂例如以將顏料等粒子分散於組成物中之用途或黏合劑的用途來進行摻和。另外,將主要為了使顏料等的粒子分散而使用之樹脂亦稱為分散劑。但是,樹脂的該等用途為一例,亦能夠以除了該等用途以外的目的使用。<< Resin >>
The photosensitive composition of the present invention can contain a resin. In addition, in the present invention, a resin-based organic compound other than a color material means an organic compound having a molecular weight of 3,000 or more.
The resin is blended, for example, for the purpose of dispersing particles such as pigments in a composition or the use of a binder. A resin mainly used for dispersing particles such as pigments is also referred to as a dispersant. However, these uses of the resin are examples, and they can be used for purposes other than these uses.
樹脂的重量平均分子量(Mw)係3000~2000000為較佳。上限係1000000以下為較佳,500000以下為更佳。下限為4000以上為較佳,5000以上為更佳。The weight average molecular weight (Mw) of the resin is preferably 3000 to 2,000,000. The upper limit is preferably 1000000 or less, and more preferably 500,000 or less. The lower limit is preferably 4,000 or more, and more preferably 5,000 or more.
作為樹脂,可列舉(甲基)丙烯酸樹脂、烯-硫醇樹脂、聚碳酸酯樹脂、聚醚樹脂、聚芳酯樹脂、聚碸樹脂、聚醚碸樹脂、聚苯樹脂、聚伸芳基醚氧化膦樹脂、聚醯亞胺樹脂、聚醯胺醯亞胺樹脂、聚烯烴樹脂、環狀烯烴樹脂、聚酯樹脂、苯乙烯樹脂等。從該等樹脂可以單獨使用一種,亦可混合兩種以上使用。Examples of the resin include a (meth) acrylic resin, an olefin-thiol resin, a polycarbonate resin, a polyether resin, a polyarylate resin, a polyfluorene resin, a polyether resin, a polyphenylene resin, and a polyarylene ether. Phosphine oxide resin, polyimide resin, polyimide resin, polyolefin resin, cyclic olefin resin, polyester resin, styrene resin, etc. These resins may be used alone or in combination of two or more.
本發明中,使用具有酸基之樹脂作為樹脂為較佳。藉由該態樣,能夠提高感光性組成物的顯影性,並且容易形成矩形性優異的像素。作為酸基,可列舉羧基、磷酸基、磺基、酚性羥基等,羧基為較佳。具有酸基之樹脂例如能夠用作鹼可溶性樹脂。In the present invention, a resin having an acid group is preferably used as the resin. According to this aspect, the developability of the photosensitive composition can be improved, and a pixel having excellent rectangularity can be easily formed. Examples of the acid group include a carboxyl group, a phosphate group, a sulfo group, and a phenolic hydroxyl group. A carboxyl group is preferred. The resin having an acid group can be used as an alkali-soluble resin, for example.
具有酸基之樹脂包含側鏈上具有酸基之重複單元為較佳,在樹脂的所有重複單元中包含5~70莫耳%的側鏈上具有酸基之重複單元為更佳。側鏈上具有酸基之重複單元的含量的上限係50莫耳%以下為較佳,30莫耳%以下為更佳。側鏈上具有酸基之重複單元的含量的下限係10莫耳%以上為較佳,20莫耳%以上為更佳。It is preferable that the resin having an acid group includes a repeating unit having an acid group on a side chain, and it is more preferable that all repeating units of the resin include a repeating unit having an acid group on a side chain of 5 to 70 mole%. The upper limit of the content of the repeating unit having an acid group on the side chain is preferably 50 mol% or less, and more preferably 30 mol% or less. The lower limit of the content of the repeating unit having an acid group on the side chain is preferably 10 mol% or more, and more preferably 20 mol% or more.
具有酸基之樹脂包含來自於包含由下述式(ED1)表示之化合物和/或由下述式(ED2)表示之化合物(以下,有時將該等化合物亦稱為“醚二聚物”。)之單體成分之重複單元亦為較佳。The resin having an acid group includes a compound derived from a compound represented by the following formula (ED1) and / or a compound represented by the following formula (ED2) (hereinafter, these compounds are also sometimes referred to as "ether dimers" The repeating unit of the monomer component is also preferred.
[化學式32]
[Chemical Formula 32]
式(ED1)中,R1
及R2
分別獨立地表示氫原子或可具有取代基之碳數1~25的烴基。
[化學式33]
式(ED2)中,R表示氫原子或碳數1~30的有機基。關於式(ED2)的詳細內容,能夠參閱日本特開2010-168539號公報的記載,該內容被併入本說明書中。In formula (ED1), R 1 and R 2 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 25 carbon atoms which may have a substituent.
[Chemical Formula 33]
In formula (ED2), R represents a hydrogen atom or an organic group having 1 to 30 carbon atoms. For details of the formula (ED2), refer to the description of Japanese Patent Application Laid-Open No. 2010-168539, which is incorporated into this specification.
作為醚二聚物的具體例,例如能夠參閲日本特開2013-029760號公報的0317段,該內容被併入本說明書中。As a specific example of the ether dimer, refer to, for example, paragraph 0317 of Japanese Patent Application Laid-Open No. 2013-029760, which is incorporated into the present specification.
本發明中所使用之樹脂包含來自於由下述式(X)表示之化合物之重複單元亦為較佳。
[化學式34]
式(X)中,R1
表示氫原子或甲基,R2
表示碳數2~10的伸烷基,R3
表示氫原子或可以包含苯環之碳數1~20的烷基。n表示1~15的整數。It is also preferable that the resin used in the present invention contains a repeating unit derived from a compound represented by the following formula (X).
[Chemical Formula 34]
In the formula (X), R 1 represents a hydrogen atom or a methyl group, R 2 represents an alkylene group having 2 to 10 carbon atoms, and R 3 represents a hydrogen atom or an alkyl group having 1 to 20 carbon atoms which may contain a benzene ring. n represents an integer from 1 to 15.
關於具有酸基之樹脂,能夠參閱日本特開2012-208494號公報的0558~0571段(對應之美國專利申請公開第2012/0235099號說明書的0685~0700段)的記載、日本特開2012-198408號公報的0076~0099段的記載,該等內容被併入本說明書中。又,具有酸基之樹脂亦能夠使用市售品。Regarding the resin having an acid group, refer to the description of paragraphs 0558 to 0571 of Japanese Patent Application Laid-Open No. 2012-208494 (corresponding to paragraphs 0685 to 0700 of US Patent Application Publication No. 2012/0235099), Japanese Patent Laid-Open No. 2012-198408 The contents of paragraphs 0076 to 0099 of the Gazette are incorporated into this specification. In addition, as the resin having an acid group, a commercially available product can also be used.
具有酸基之樹脂的酸值係30~500mgKOH/g為較佳。下限為50mgKOH/g以上為較佳,70mgKOH/g以上為更佳。上限為400mgKOH/g以下為較佳,300mgKOH/g以下為更佳,200mgKOH/g以下尤進一步較佳。具有酸基之樹脂的重量平均分子量(Mw)係5000~100000為較佳。又,具有酸基之樹脂的數平均分子量(Mn)係1000~20000為較佳。The acid value of the resin having an acid group is preferably 30 to 500 mgKOH / g. The lower limit is preferably 50 mgKOH / g or more, and more preferably 70 mgKOH / g or more. The upper limit is preferably 400 mgKOH / g or less, more preferably 300 mgKOH / g or less, and even more preferably 200 mgKOH / g or less. The weight average molecular weight (Mw) of the resin having an acid group is preferably 5,000 to 100,000. The number average molecular weight (Mn) of the resin having an acid group is preferably 1,000 to 20,000.
作為具有酸基之樹脂,例如可列舉下述結構的樹脂等。
[化學式35]
Examples of the resin having an acid group include resins having the following structures.
[Chemical Formula 35]
本發明的感光性組成物還能夠包含作為分散劑之樹脂。作為分散劑,可列舉酸性分散劑(酸性樹脂)、鹼性分散劑(鹼性樹脂)。在此,酸性分散劑(酸性樹脂)表示酸基的量多於鹼性基的量之樹脂。酸性分散劑(酸性樹脂),將酸基的量與鹼性基的量的總計量設為100莫耳%時,酸基的量佔70莫耳%以上之樹脂為較佳,實質上僅包含酸基之樹脂為更佳。
酸性分散劑(酸性樹脂)所具有之酸基為羧基為較佳。酸性分散劑(酸性樹脂)的酸值係40~105mgKOH/g為較佳,50~105mgKOH/g為更佳,60~105mgKOH/g為進一步較佳。又,鹼性分散劑(鹼性樹脂)表示鹼性基的量多於酸基的量之樹脂。鹼性分散劑(鹼性樹脂),將酸基的量與鹼性基的量的總計量設為100莫耳%時,鹼性基的量大於50莫耳%之樹脂為較佳。鹼性分散劑所具有之鹼性基為胺基為較佳。The photosensitive composition of the present invention can further contain a resin as a dispersant. Examples of the dispersant include an acidic dispersant (acid resin) and a basic dispersant (basic resin). Here, the acidic dispersant (acid resin) means a resin having more acid groups than basic groups. For acidic dispersants (acid resins), when the total amount of acid groups and basic groups is 100 mol%, resins with an acid group content of 70 mol% or more are preferred, and essentially only contain Acid-based resins are more preferred.
It is preferred that the acidic group of the acidic dispersant (acid resin) is a carboxyl group. The acid value of the acidic dispersant (acid resin) is preferably 40 to 105 mgKOH / g, more preferably 50 to 105 mgKOH / g, and still more preferably 60 to 105 mgKOH / g. The basic dispersant (basic resin) means a resin having a larger number of basic groups than an acid group. For the basic dispersant (basic resin), when the total amount of the acid group and the amount of the basic group is 100 mol%, a resin having an amount of the basic group greater than 50 mol% is preferred. It is preferred that the basic group of the basic dispersant is an amine group.
用作分散劑之樹脂包含具有酸基之重複單元為較佳。用作分散劑之樹脂包含具有酸基之重複單元,藉此在藉由光微影法形成圖案時,能夠進一步抑制顯影殘渣的產生。It is preferable that the resin used as a dispersant contains a repeating unit having an acid group. The resin used as a dispersant contains a repeating unit having an acid group, and thereby, when a pattern is formed by a photolithography method, the development residue can be further suppressed.
用作分散劑之樹脂為接枝樹脂亦為較佳。接枝樹脂的詳細內容能夠參閲日本特開2012-255128號公報的0025~0094段的記載,該內容被併入本說明書中。作為接枝樹脂的具體例,可列舉下述結構的樹脂。
[化學式36]
It is also preferred that the resin used as the dispersant is a graft resin. The details of the graft resin can be found in paragraphs 0025 to 0094 of Japanese Patent Application Laid-Open No. 2012-255128, and the contents are incorporated into this specification. Specific examples of the graft resin include resins having the following structures.
[Chemical Formula 36]
用作分散劑之樹脂係在主鏈及側鏈中的至少一者包含氮原子之聚亞胺系分散劑亦為較佳。作為聚亞胺系分散劑,係具有主鏈及側鏈,且在主鏈及側鏈的至少一者上具有鹼性氮原子之樹脂為較佳,該主鏈包含具有pKa14以下的官能基之部分結構,該側鏈包含原子數40~10,000的側鏈。鹼性氮原子只要係呈鹼性之氮原子,則並沒有特別限制。關於聚亞胺系分散劑,能夠參閱日本特開2012-255128號公報的0102~0166段的記載,該內容被併入本說明書中。作為聚亞胺系分散劑的具體例可列舉下述結構的樹脂。
[化學式37]
The resin used as a dispersant is also a polyimide-based dispersant containing a nitrogen atom in at least one of a main chain and a side chain. As the polyimide-based dispersant, a resin having a main chain and a side chain and having a basic nitrogen atom on at least one of the main chain and the side chain is preferable. The main chain contains a resin having a functional group of pKa14 or less. In a partial structure, the side chain includes a side chain having 40 to 10,000 atoms. The basic nitrogen atom is not particularly limited as long as it is a basic nitrogen atom. Regarding the polyimide-based dispersant, the description in paragraphs 0102 to 0166 of Japanese Patent Application Laid-Open No. 2012-255128 can be referred to, and this content is incorporated into this specification. Specific examples of the polyimide-based dispersant include resins having the following structures.
[Chemical Formula 37]
用作分散劑之樹脂係在芯部鍵結有複數個聚合物鏈之結構的樹脂亦為較佳。作為該種樹脂,例如可列舉樹枝狀聚合物(包含星型聚合物)。又,作為樹枝狀聚合物的具體例,可列舉日本特開2013-043962號公報的0196~0209段中所記載之高分子化合物C-1~C-31及下述結構的化合物。
[化學式38]
The resin used as a dispersant is also a resin having a structure in which a plurality of polymer chains are bonded to a core. Examples of such resins include dendrimers (including star polymers). Further, as specific examples of the dendrimer, the polymer compounds C-1 to C-31 described in paragraphs 0196 to 0209 of Japanese Patent Application Laid-Open No. 2013-043962 and compounds having the following structures may be mentioned.
[Chemical Formula 38]
又,亦能夠將上述具有酸基之樹脂(鹼可溶性樹脂)用作分散劑。Moreover, the resin (alkali soluble resin) which has the said acid group can also be used as a dispersing agent.
又,用作分散劑之樹脂係包含側鏈上具有乙烯性不飽和鍵結基之重複單元之樹脂亦為較佳。側鏈上具有乙烯性不飽和鍵結基之重複單元的含量係樹脂的所有重複單元中10莫耳%以上為較佳,10~80莫耳%為更佳,20~70莫耳%為進一步較佳。The resin used as a dispersant is also a resin containing a repeating unit having an ethylenically unsaturated bond group in a side chain. The content of the repeating unit having an ethylenically unsaturated bond group on the side chain is more than 10 mol% in all repeating units of the resin, more preferably 10 to 80 mol%, and more preferably 20 to 70 mol%. Better.
分散劑亦能夠作為市售品獲得,作為該種具體例,可列舉BYKChemie GmbH製的DISPERBYK系列(例如,DISPERBYK-111、161等)、Lubrizol Japan Limited.製的SOLSPERSE系列(例如、SOLSPERSE76500等)等。又,亦能夠使用日本特開2014-130338號公報的0041~0130段中所記載之顏料分散劑,該內容被併入本說明書中。另外,作為上述分散劑而說明之樹脂還能夠以除了分散劑以外的用途而使用。例如,還能夠作為黏合劑而使用。Dispersants can also be obtained as commercially available products. Examples of such dispersants include DISPERBYK series (for example, DISPERBYK-111, 161, etc.) manufactured by BYKChemie GmbH, and SOLSPERSE series (for example, SOLSPERSE76500, etc.) manufactured by Lubrizol Japan Limited. . In addition, the pigment dispersant described in paragraphs 0041 to 0130 of Japanese Patent Application Laid-Open No. 2014-130338 can also be used, and the content is incorporated into this specification. The resin described as the dispersant can also be used for applications other than dispersants. For example, it can also be used as a binder.
本發明的感光性組成物包含樹脂時,感光性組成物的總固體成分中的樹脂的含量係5~50質量%為較佳。下限係10質量%以上為較佳,15質量%以上為更佳。上限係40質量%以下為較佳,35質量%以下為更佳,30質量%以下為進一步較佳。又,感光性組成物的總固體成分中的具有酸基之樹脂的含量係5~50質量%為較佳。下限係10質量%以上為較佳,15質量%以上為更佳。上限係40質量%以下為較佳,35質量%以下為更佳,30質量%以下進一步較佳。又,從容易獲得優異的顯影性的原因考慮,樹脂總量中的具有酸基之樹脂的含量係30質量%以上為較佳,50質量%以上為更佳,70質量%以上為進一步較佳,80質量%以上為特佳。上限能夠設為100質量%,亦能夠設為95質量%,亦能夠設為90質量%以下。When the photosensitive composition of the present invention contains a resin, the content of the resin in the total solid content of the photosensitive composition is preferably 5 to 50% by mass. The lower limit is more preferably 10% by mass or more, and more preferably 15% by mass or more. The upper limit is preferably 40% by mass or less, more preferably 35% by mass or less, and further preferably 30% by mass or less. The content of the resin having an acid group in the total solid content of the photosensitive composition is preferably 5 to 50% by mass. The lower limit is more preferably 10% by mass or more, and more preferably 15% by mass or more. The upper limit is preferably 40% by mass or less, more preferably 35% by mass or less, and even more preferably 30% by mass or less. In addition, from the reason that it is easy to obtain excellent developability, the content of the resin having an acid group in the total resin is preferably 30% by mass or more, more preferably 50% by mass or more, and more preferably 70% by mass or more. , 80% by mass or more is particularly preferred. The upper limit can be 100% by mass, 95% by mass, or 90% by mass or less.
又,從硬化性、顯影性及覆膜性的觀點考慮,感光性組成物的總固體成分中的聚合性化合物與樹脂的合計的含量係15~65質量%為較佳。下限係20質量%以上為較佳,25質量%以上為更佳,30質量%以上為進一步較佳。上限係60質量%以下為較佳,50質量%以下為更佳,40質量%以下進一步較佳。又,相對於聚合性化合物的100質量份,含有30~300質量份的樹脂為較佳。下限為50質量份以上為較佳,80質量份以上為更佳。上限係250質量份以下為較佳,200質量份以下為更佳。From the viewpoints of curability, developability, and film-forming property, the total content of the polymerizable compound and the resin in the total solid content of the photosensitive composition is preferably 15 to 65% by mass. The lower limit is more preferably 20% by mass or more, more preferably 25% by mass or more, and more preferably 30% by mass or more. The upper limit is preferably 60% by mass or less, more preferably 50% by mass or less, and even more preferably 40% by mass or less. The resin is preferably contained in an amount of 30 to 300 parts by mass based on 100 parts by mass of the polymerizable compound. The lower limit is preferably 50 parts by mass or more, and more preferably 80 parts by mass or more. The upper limit is preferably 250 parts by mass or less, and more preferably 200 parts by mass or less.
<<具有環狀醚基之化合物>>
本發明的感光性組成物能夠含有具有環狀醚基之化合物。作為環狀醚基,可列舉環氧基、氧雜環丁基等。具有環狀醚基之化合物係具有環氧基之化合物為較佳。作為具有環氧基之化合物,可列舉1分子內具有一個以上的環氧基之化合物,具有2個以上的環氧基之化合物為較佳。在1分子內具有1~100個環氧基為較佳。環氧基的上限例如能夠設為10個以下,亦能夠設為5個以下。環氧基的下限係2個以上為較佳。作為具有環氧基之化合物,亦能夠使用日本特開2013-011869號公報的0034~0036段、日本特開2014-043556號公報的0147~0156段、日本特開2014-089408號公報的0085~0092段中所記載之化合物、日本特開2017-179172號公報中所記載之化合物。該等內容被併入本說明書中。<<< Compound with a cyclic ether group >>
The photosensitive composition of the present invention can contain a compound having a cyclic ether group. Examples of the cyclic ether group include an epoxy group and an oxetanyl group. The compound having a cyclic ether group is preferably a compound having an epoxy group. Examples of the compound having an epoxy group include compounds having one or more epoxy groups in one molecule, and compounds having two or more epoxy groups are preferred. It is preferable to have 1 to 100 epoxy groups in one molecule. The upper limit of the epoxy group can be, for example, 10 or less, or 5 or less. The lower limit of the epoxy group is preferably two or more. As the compound having an epoxy group, paragraphs 0034 to 0036 of Japanese Patent Application Publication No. 2013-011869, paragraphs 0147 to 0156 of Japanese Patent Application Publication No. 2014-043556, and 0085 to Japanese Patent Publication No. 2014-089408 can also be used. The compound described in paragraph 0092 and the compound described in Japanese Patent Application Laid-Open No. 2017-179172. Such content is incorporated into this specification.
具有環氧基之化合物可以為低分子化合物(例如,分子量小於2000,進而分子量小於1000),亦可以為高分子化合物(macromolecule)(例如,分子量1000以上的聚合物的情況下,重量平均分子量為1000以上)中的任一個。具有環氧基之化合物的重量平均分子量係200~100000為較佳,500~50000為更佳。重量平均分子量的上限係10000以下為較佳,5000以下為更佳,3000以下為進一步較佳。The compound having an epoxy group may be a low-molecular compound (for example, a molecular weight of less than 2000 and further a molecular weight of less than 1000) or a macromolecule (for example, in the case of a polymer having a molecular weight of 1,000 or more, the weight average molecular weight is 1000 or more). The weight average molecular weight of the compound having an epoxy group is preferably 200 to 100,000, and more preferably 500 to 50,000. The upper limit of the weight average molecular weight is preferably 10,000 or less, more preferably 5,000 or less, and even more preferably 3,000 or less.
作為具有環氧基之化合物,能夠較佳地使用環氧樹脂。作為環氧樹脂,例如可列舉作為酚化合物的縮水甘油醚化物之環氧樹脂、作為各種酚醛清漆樹脂的縮水甘油醚化物之環氧樹脂、脂環式環氧樹脂、脂肪族系環氧樹脂、雜環式環氧樹脂、縮水甘油酯系環氧樹脂、縮水甘油胺系環氧樹脂、將鹵代酚類縮水甘油基化而得之環氧樹脂、具有環氧基之矽化合物與其以外的矽化合物的稠合物、具有環氧基之聚合性不飽和化合物與其以外的其他聚合性不飽和化合物的共聚物等。環氧樹脂的環氧當量係310~3300g/eq為較佳,310~1700g/eq為更佳,310~1000g/eq為進一步較佳。As the compound having an epoxy group, an epoxy resin can be preferably used. Examples of the epoxy resin include epoxy resins of glycidyl etherification of phenol compounds, epoxy resins of glycidyl etherification of various novolak resins, alicyclic epoxy resins, aliphatic epoxy resins, Heterocyclic epoxy resin, glycidyl ester-based epoxy resin, glycidylamine-based epoxy resin, epoxy resin obtained by glycidizing halogenated phenols, silicon compounds having epoxy groups, and other silicon Condensates of compounds, copolymers of polymerizable unsaturated compounds having epoxy groups and other polymerizable unsaturated compounds other than them, and the like. The epoxy equivalent of the epoxy resin is preferably 310 to 3300 g / eq, more preferably 310 to 1700 g / eq, and still more preferably 310 to 1000 g / eq.
作為具有環狀醚基之化合物的市售品,例如可列舉EHPE3150(Daicel Corporation製)、EPICLON N-695(DIC CORPORATION製)、Marproof G-0150M、G-0105SA、G-0130SP、G-0250SP、G-1005S、G-1005SA、G-1010S、G-2050M、G-01100、G-01758(以上,NOF CORPORATION製,含有環氧基之聚合物)等。Examples of commercially available compounds having a cyclic ether group include EHPE3150 (manufactured by Daicel Corporation), EPICLON N-695 (manufactured by DIC Corporation), Marproof G-0150M, G-0105SA, G-0130SP, G-0250SP, G-1005S, G-1005SA, G-1010S, G-2050M, G-01100, G-01758 (above, manufactured by NOF Corporation, epoxy-containing polymer), etc.
本發明的感光性組成物含有具有環狀醚基之化合物時,感光性組成物的總固體成分中的具有環狀醚基之化合物的含量係0.1~20質量%為較佳。下限例如係0.5質量%以上為較佳,1質量%以上為更佳。
上限例如係15質量%以下為較佳,10質量%以下為更佳。具有環狀醚基之化合物可以僅為1種,亦可以為2種以上。為2種以上時,該等合計量係上述範圍為較佳。When the photosensitive composition of the present invention contains a compound having a cyclic ether group, the content of the compound having a cyclic ether group in the total solid content of the photosensitive composition is preferably 0.1 to 20% by mass. The lower limit is, for example, preferably 0.5% by mass or more, and more preferably 1% by mass or more.
The upper limit is, for example, preferably 15% by mass or less, and more preferably 10% by mass or less. The compound having a cyclic ether group may be only one kind, or two or more kinds. When there are two or more kinds, the total amount is preferably in the above range.
<<其他光聚合起始劑>>
本發明的感光性組成物可以含有上述除了環狀肟化合物以外的其他光聚合起始劑(以下,亦稱為其他光聚合起始劑)。作為其他光聚合起始劑,例如可列舉三鹵甲基三(trihalo methyl triazine)化合物、苄基二甲基縮酮化合物、α-羥基酮化合物、α-胺基酮化合物、醯基膦化合物、氧化膦化合物、茂金屬化合物、肟化合物、三芳基咪唑二聚物、鎓化合物、苯并噻唑化合物、二苯甲酮化合物、苯乙酮化合物、環戊二烯-苯-鐵錯合物、鹵甲基噁二唑化合物、香豆素化合物等,肟化合物、α-羥基酮化合物、α-胺基酮化合物及醯基膦化合物為較佳,肟化合物、α-羥基酮化合物為進一步較佳。作為其他光聚合起始劑的肟化合物可列舉不具有上述之環狀肟部位之肟化合物、或不具有上述之電子吸引基之肟化合物。關於其他光聚合起始劑的詳細內容,能夠參閱日本特開2017-126044號公報的0013~0031段,該內容被併入本說明書中。<< Other photopolymerization initiators >>
The photosensitive composition of the present invention may contain other photopolymerization initiators (hereinafter, also referred to as other photopolymerization initiators) other than the cyclic oxime compound. Examples of other photopolymerization initiators include trihalo methyl triazine compounds, benzyldimethylketal compounds, α-hydroxyketone compounds, α-aminoketone compounds, fluorenylphosphine compounds, Phosphine oxide compound, metallocene compound, oxime compound, triarylimidazole dimer, onium compound, benzothiazole compound, benzophenone compound, acetophenone compound, cyclopentadiene-benzene-iron complex, halogen Methyloxadiazole compounds, coumarin compounds, and the like, oxime compounds, α-hydroxyketone compounds, α-aminoketone compounds, and fluorenylphosphine compounds are more preferable, and oxime compounds and α-hydroxyketone compounds are more preferable. Examples of the oxime compound as another photopolymerization initiator include an oxime compound having no cyclic oxime moiety described above, or an oxime compound having no electron attracting group described above. For details of other photopolymerization initiators, refer to paragraphs 0013 to 0031 of Japanese Patent Application Laid-Open No. 2017-126044, which are incorporated into this specification.
作為α-羥基酮化合物的市售品,能夠使用IRGACURE-184、DAROCUR-1173、IRGACURE-500、IRGACURE-2959、IRGACURE-127(以上為BASF公司製)。作為α-胺基酮化合物的市售品,可列舉IRGACURE-907、IRGACURE-369、IRGACURE-379及IRGACURE-379EG(以上為BASF公司製)等。作為醯基膦化合物的市售品,可列舉IRGACURE-819、DAROCUR-TPO(以上為BASF公司製)等。As a commercially available product of an α-hydroxy ketone compound, IRGACURE-184, DAROCUR-1173, IRGACURE-500, IRGACURE-2959, and IRGACURE-127 (the above are manufactured by BASF) can be used. Examples of commercially available products of the α-amino ketone compound include IRGACURE-907, IRGACURE-369, IRGACURE-379, and IRGACURE-379EG (the above are manufactured by BASF). Examples of commercially available fluorenylphosphine compounds include IRGACURE-819, DAROCUR-TPO (the above is made by BASF), and the like.
作為肟化合物,能夠使用日本特開2001-233842號公報中所記載之化合物、日本特開2000-080068號公報中所記載之化合物、日本特開2006-342166號公報中所記載之化合物、日本特開2016-021012號公報中所記載之化合物等。作為能夠在本發明中較佳地使用之肟化合物,例如可列舉3-苯甲醯氧基亞胺基丁烷-2-酮、3-乙醯氧基亞胺基丁烷-2-酮、3-丙醯氧基亞胺基丁烷-2-酮、2-乙醯氧基亞胺基戊烷-3-酮、2-乙醯氧基亞胺基-1-苯基丙烷-1-酮、2-苯甲醯氧基亞胺基-1-苯基丙烷-1-酮、3-(4-甲苯磺醯氧基)亞胺基丁烷-2-酮、以及2-乙氧基羰氧基亞胺基-1-苯基丙烷-1-酮等。又,還可列舉J.C.S.Perkin II(1979年,pp.1653-1660)、J. C. S. Perkin II(1979年,pp.156-162)、Journal of Photopolymer Science and Technology(1995年,pp.202-232)、日本特開2000-066385號公報、日本特開2000-080068號公報、日本特表2004-534797號公報、日本特開2006-342166號公報中所記載之化合物等。作為肟化合物的市售品,可列舉IRGACURE-OXE01、IRGACURE-OXE02、IRGACURE-OXE03、IRGACURE-OXE04(以上,BASF公司製)、TR-PBG-304(Changzhou Tronly New Electronic Materials CO.,LTD.製)、Adeka Optomer N-1919(ADEKA CORPORATION製、日本特開2012-014052號公報中所記載的光聚合起始劑2)、ADEKA ARKLS NCI-730、NCI-831、NCI-930(以上為ADEKA Corporation製)等。As the oxime compound, a compound described in JP 2001-233842, a compound described in JP 2000-080068, a compound described in JP 2006-342166, and Japanese Patent Compounds described in Japanese Patent Publication No. 2016-021012. Examples of the oxime compound that can be preferably used in the present invention include 3-benzyloxyiminobutane-2-one, 3-ethoxyiminobutane-2-one, 3-propionyloxyiminobutane-2-one, 2-ethoxymethyliminopentane-3-one, 2-ethoxymethylimino-1-phenylpropane-1- Ketone, 2-benzyloxyimino-1-phenylpropane-1-one, 3- (4-toluenesulfonyloxy) iminobutane-2-one, and 2-ethoxy Carbooxyimino-1-phenylpropane-1-one and the like. Another example is J. C. S. Perkin II (1979, pp. 1653-1660), JCS Perkin II (1979, pp. 156-162), Journal of Photopolymer Science and Technology (1995, pp. 202-232), Japanese Patent Laid-Open No. 2000-066385 The compounds described in Japanese Patent Application Publication No. 2000-080068, Japanese Patent Application Publication No. 2004-534797, and Japanese Patent Application Publication No. 2006-342166. Examples of commercially available oxime compounds include IRGACURE-OXE01, IRGACURE-OXE02, IRGACURE-OXE03, IRGACURE-OXE04 (above, manufactured by BASF), and TR-PBG-304 (manufactured by Changzhou Tronly New Electronic Materials CO., LTD.) ), Adeka Optomer N-1919 (manufactured by ADEKA CORPORATION, photopolymerization initiator 2 described in JP 2012-014052), ADEKA ARKLS NCI-730, NCI-831, NCI-930 (the above is ADEKA Corporation制) and so on.
作為其他光聚合起始劑,亦能夠使用具有茀環之肟化合物。作為具有茀環之肟化合物的具體例,可列舉日本特開2014-137466號公報中所記載的化合物。該內容被併入本說明書中。As another photopolymerization initiator, an oxime compound having a fluorene ring can also be used. Specific examples of the oxime compound having a fluorene ring include compounds described in Japanese Patent Application Laid-Open No. 2014-137466. This content is incorporated into this specification.
作為其他光聚合起始劑,亦能夠使用具有氟原子之肟化合物。作為具有氟原子之肟化合物的具體例,可列舉日本特開2010-262028號公報中所記載的化合物、日本特表2014-500852號公報中所記載的化合物24、36~40、日本特開2013-164471號公報中所記載的化合物(C-3)等。該內容被併入本說明書中。As another photopolymerization initiator, an oxime compound having a fluorine atom can also be used. Specific examples of the oxime compound having a fluorine atom include compounds described in Japanese Patent Application Laid-Open No. 2010-262028, compounds 24, 36-40 of Japanese Patent Application No. 2014-500852, and Japanese Patent Laid-Open No. 2013 Compound (C-3) and the like described in JP-164471. This content is incorporated into this specification.
作為其他光聚合起始劑,能夠使用具有硝基之肟化合物。
具有硝基之肟化合物作為二聚體亦較佳。作為具有硝基之肟化合物的具體例,可列舉日本特開2013-114249號公報的0031~0047段、日本特開2014-137466號公報的0008~0012段、0070~0079段中所記載的化合物、日本專利4223071號公報的0007~0025段中所記載的化合物、ADEKA ARKLS NCI-831(ADEKA CORPORATION製)。As another photopolymerization initiator, an oxime compound having a nitro group can be used.
An oxime compound having a nitro group is also preferred as a dimer. Specific examples of the nitro-containing oxime compound include the compounds described in paragraphs 0031 to 0047 of Japanese Patent Application Laid-Open No. 2013-114249, paragraphs 0008 to 0012 and 0070-0079 of Japanese Patent Laid-Open No. 2014-137466 Compounds described in paragraphs 0007 to 0025 of Japanese Patent No. 4222071, ADEKA ARKLS NCI-831 (manufactured by ADEKA CORPORATION).
本發明可以使用2官能或3官能以上的光聚合起始劑作為光聚合起始劑。藉由使用該種光聚合起始劑,從光聚合起始劑的1分子產生2個以上的自由基等活性種,因此可獲得良好的靈敏度。又,當使用非對稱結構的化合物時,結晶性降低,溶劑等中的溶解性提高,隨時間的推移難以析出,能夠提高組成物的經時穩定性。作為該種光聚合起始劑的具體例,可列舉日本特表2010-527339號公報、日本特表2011-524436號公報、國際公開WO2015/004565號公報、日本特表2016-532675號公報的0407~0412段、國際公開WO2017/033680號公報的0039~0055段中所記載之肟化合物的二聚體、日本特表2013-522445號公報中所記載之化合物(E)及化合物(G)、國際公開WO2016/034963號公報中所記載之Cmpd1~7、日本特表2017-523465號公報的0007段中所記載之肟酯類光起始劑、日本特開2017-167399號公報的0020~0033段中所記載之光起始劑、日本特開2017-151342號公報的0017~0026段中所記載之光聚合起始劑(A)等。In the present invention, a bifunctional or trifunctional or more photopolymerization initiator can be used as the photopolymerization initiator. By using such a photopolymerization initiator, two or more active species such as radicals are generated from one molecule of the photopolymerization initiator, and therefore, good sensitivity can be obtained. In addition, when a compound having an asymmetric structure is used, crystallinity is reduced, solubility in a solvent and the like is improved, precipitation is difficult to occur over time, and the stability of the composition over time can be improved. Specific examples of such a photopolymerization initiator include Japanese Patent Application Publication No. 2010-527339, Japanese Patent Application Publication No. 2011-524436, International Publication No. WO2015 / 004565, and Japanese Patent Application Publication No. 2016-532675. Paragraphs ~ 0412, dimers of oxime compounds described in paragraphs 0039 to 0055 of International Publication WO2017 / 033680, compounds (E) and compounds (G) described in Japanese Patent Publication No. 2013-522445, International Cmpd1 to 7 described in WO2016 / 034963, oxime ester photoinitiators described in paragraph 0007 of Japanese Patent Publication No. 2017-523465, and paragraphs 0020 to 0033 of Japanese Patent Publication No. 2017-167399 are disclosed. The photoinitiator described in Japanese Patent Application Laid-Open No. 2017-151342, and the photopolymerization initiator (A) described in paragraphs 0017 to 0026.
本發明的感光性組成物含有其他光聚合起始劑時,其他光聚合起始劑的含量相對於上述環狀肟化合物A的100質量份係10~90質量份為較佳。下限為15質量份以上為較佳,20質量份以上為更佳。上限係80質量份以下為較佳,70質量份以下為進一步較佳。若環狀肟化合物A與其他光聚合起始劑的比例為上述範圍,則容易獲得充分硬化至深部的膜。When the photosensitive composition of the present invention contains other photopolymerization initiators, the content of the other photopolymerization initiators is preferably 10 to 90 parts by mass based on 100 parts by mass of the cyclic oxime compound A. The lower limit is preferably 15 parts by mass or more, and more preferably 20 parts by mass or more. The upper limit is preferably 80 parts by mass or less, and more preferably 70 parts by mass or less. When the ratio of the cyclic oxime compound A to the other photopolymerization initiator is in the above range, it is easy to obtain a film sufficiently hardened to a deep portion.
本發明的感光性組成物實質上不含有其他光聚合起始劑亦為較佳。藉由該態樣,容易進一步抑制對所獲得之膜的硬化程度的偏差。本發明的感光性組成物實質上不含有其他光聚合起始劑之情況係指感光性組成物的總固體成分中的其他光聚合起始劑的含量為0.1以下,0.05質量%以下為較佳,0.01質量%以下為進一步較佳,不含有其他光聚合起始劑為特佳。It is also preferable that the photosensitive composition of the present invention does not substantially contain other photopolymerization initiators. With this aspect, it is easy to further suppress variations in the degree of hardening of the obtained film. When the photosensitive composition of the present invention does not substantially contain other photopolymerization initiators, it means that the content of other photopolymerization initiators in the total solid content of the photosensitive composition is 0.1 or less, and preferably 0.05% by mass or less. 0.01 mass% or less is more preferable, and it is particularly preferable not to contain other photopolymerization initiators.
<<敏化劑>>
以上述環狀肟化合物A的自由基產生效率的提高或感光波長的長波長化的目的,本發明的感光性組成物可以進一步含有敏化劑。作為敏化劑,可列舉多核芳香族化合物(例如菲、蒽、芘、苝、三伸苯、9,10-二烷氧基蒽)、(xanthene)化合物(例如螢光素、曙紅、赤蘚紅、玫瑰紅B、孟加拉玫瑰紅)、硫雜蒽酮化合物(例如異丙基硫雜蒽酮、二乙基硫雜蒽酮、氯硫雜蒽酮)、花青化合物(例如硫雜羰花青、氧雜羰花青)、部花青化合物(例如部花青、羰部花青)、酞菁化合物、噻嗪化合物(例如噻嚀、亞甲藍、甲苯胺藍)、吖啶化合物(例如吖啶橙、氯黃素、吖啶黃素)、蒽醌化合物(例如蒽醌)、方酸菁化合物(例如方酸菁)、香豆素化合物(例如、7-二乙基胺基-4-甲基香豆素)、香豆素酮化合物、啡噻嗪化合物、啡嗪化合物、苯乙烯基苯化合物、偶氮化合物、二苯基甲烷化合物、三苯基甲烷化合物、二苯乙烯基苯化合物、咔唑化合物、卟啉化合物、螺化合物、喹吖酮化合物、靛藍化合物、吡喃鎓化合物、吡咯亞甲基化合物、吡唑并三唑化合物、苯并噻唑化合物、巴比妥酸衍生物衍生物、硫巴比妥酸衍生物、苯乙酮化合物、二苯甲酮化合物、硫雜蒽酮化合物、米其勒酮化合物等。敏化劑係在波長300~450nm的範圍具有極大吸收波長之化合物為較佳。作為敏化劑的具體例,可列舉後述的實施例中所記載之化合物、日本特開2013-249471號公報的0172~0222段中所記載之化合物。<〈 Sensitizer 〉>
The photosensitive composition of the present invention may further contain a sensitizer for the purpose of improving the radical generation efficiency of the cyclic oxime compound A or increasing the wavelength of the photosensitive wavelength. Examples of the sensitizer include polynuclear aromatic compounds (for example, phenanthrene, anthracene, fluorene, pyrene, triphenylene, 9,10-dialkoxyanthracene), (Xanthene) compounds (e.g. luciferin, eosin, erythrosine, rose red B, bengal rose red), xanthene compounds (e.g. isopropylthioanthone, diethylthioanthone, chlorine Thia anthrone), cyanine compounds (e.g., thiocarbocyanine, oxocyanine), merocyanine compounds (e.g., merocyanine, oxocyanine), phthalocyanine compounds, thiazine compounds (e.g. Fluorene, methylene blue, toluidine blue), acridine compounds (e.g. acridine orange, chloroflavin, acridine xanthophyll), anthraquinone compounds (e.g. anthraquinone), squaraine compounds (e.g. squaraine), Coumarin compounds (eg, 7-diethylamino-4-methylcoumarin), coumarin compounds, phenothiazine compounds, phenazine compounds, styrylbenzene compounds, azo compounds, Phenylmethane compound, triphenylmethane compound, distyrylbenzene compound, carbazole compound, porphyrin compound, spiro compound, quinacridone compound, indigo compound, pyranium compound, pyrrole methylene compound, pyrazole Benzotriazole compounds, benzothiazole compounds, Acid derivative than properly derivatives, thiobarbituric acid derivatives, acetophenone compounds, benzophenone compounds, thioxanthone compounds, which meters Le ketone compounds. The sensitizer is preferably a compound having a maximum absorption wavelength in a wavelength range of 300 to 450 nm. Specific examples of the sensitizer include compounds described in Examples described later, and compounds described in paragraphs 0172 to 0222 of Japanese Patent Application Laid-Open No. 2013-249471.
本發明的感光性組成物含有敏化劑時,感光性組成物的總固體成分中的敏化劑的含量係0.1~20質量%為較佳。下限例如係0.5質量%以上為較佳,1質量%以上為更佳。上限例如係15質量%以下為較佳,10質量%以下為進一步較佳。敏化劑可以僅為1種,亦可以為2種以上。為2種以上時,該等合計量係上述範圍為較佳。When the photosensitive composition of the present invention contains a sensitizer, the content of the sensitizer in the total solid content of the photosensitive composition is preferably 0.1 to 20% by mass. The lower limit is, for example, preferably 0.5% by mass or more, and more preferably 1% by mass or more. The upper limit is preferably 15% by mass or less, and more preferably 10% by mass or less. The sensitizer may be only one kind, or two or more kinds. When there are two or more kinds, the total amount is preferably in the above range.
<<矽烷偶合劑>>
本發明的感光性組成物能夠含有矽烷偶合劑。藉由該態樣,能夠進一步提高與所獲得之硬化膜的支撐體的密接性。本發明中,矽烷偶合劑係指具有水解性基和其以外的官能基之矽烷化合物。又,水解性基係指直接鍵結於矽原子並且可藉由水解反應及稠合反應中的任一者產生矽氧烷鍵之取代基。作為水解性基,例如可列舉鹵素原子、烷氧基、醯氧基等,烷氧基為較佳。亦即,矽烷耦合劑係具有烷氧基甲矽烷基之化合物為較佳。又,作為除水解性基以外的官能基,例如可列舉乙烯基、(甲基)烯丙基、(甲基)丙烯醯基、巰基、環氧基、氧雜環丁基、胺基、脲基、硫醚基、異氰酸酯基、苯基等,胺基、(甲基)丙烯醯基及環氧基為較佳。作為矽烷耦合劑的具體例,可列舉日本特開2009-288703號公報的0018~0036段中所記載之化合物、日本特開2009-242604號公報的0056~0066段中所記載之化合物,該等內容被併入本說明書中。< Silane Coupling Agent >>
The photosensitive composition of the present invention can contain a silane coupling agent. According to this aspect, the adhesiveness with the support body of the obtained cured film can be further improved. In the present invention, the silane coupling agent refers to a silane compound having a hydrolyzable group and a functional group other than the silane compound. The hydrolyzable group refers to a substituent directly bonded to a silicon atom and capable of generating a siloxane bond by any of a hydrolysis reaction and a condensation reaction. Examples of the hydrolyzable group include a halogen atom, an alkoxy group, and a fluorenyl group. An alkoxy group is preferred. That is, the silane coupling agent is preferably a compound having an alkoxysilyl group. Examples of the functional group other than the hydrolyzable group include a vinyl group, a (meth) allyl group, a (meth) acrylfluorenyl group, a mercapto group, an epoxy group, an oxetanyl group, an amino group, and a urea. Groups, thioether groups, isocyanate groups, phenyl groups, etc., amino groups, (meth) acrylfluorenyl groups, and epoxy groups are preferred. Specific examples of the silane coupling agent include compounds described in paragraphs 0018 to 0036 of JP 2009-288703, and compounds described in paragraphs 0056 to 0066 of JP 2009-242604. The content is incorporated into this manual.
感光性組成物的總固體成分中的矽烷耦合劑的含量係0.1~5質量%為較佳。上限係3質量%以下為較佳,2質量%以下為更佳。下限係0.5質量%以上為較佳,1質量%以上為更佳。矽烷耦合劑可以僅為1種,亦可以為2種以上。為2種以上時,合計量成為上述範圍為較佳。The content of the silane coupling agent in the total solid content of the photosensitive composition is preferably 0.1 to 5% by mass. The upper limit is preferably 3% by mass or less, and more preferably 2% by mass or less. The lower limit is preferably 0.5% by mass or more, and more preferably 1% by mass or more. The silane coupling agent may be only one kind, or two or more kinds. When there are two or more kinds, it is preferable that the total amount falls within the above range.
<<顏料衍生物>>
本發明的感光性組成物包含顏料時,還含有顏料衍生物為較佳。
作為顏料衍生物,可列舉具有由酸基、鹼性基或鄰苯二甲醯亞胺甲基取代了發色團的一部分之結構之化合物。<< Pigment Derivatives >>
When the photosensitive composition of the present invention contains a pigment, it is preferable to further contain a pigment derivative.
Examples of the pigment derivative include compounds having a structure in which a part of a chromophore is substituted with an acid group, a basic group, or a phthalimide methyl group.
作為構成顏料衍生物之發色團,可列舉喹啉系骨架、苯并咪唑酮系骨架、二酮吡咯并吡咯系骨架、偶氮系骨架、酞青素系骨架、蒽醌系骨架、喹吖酮系骨架、二㗁系骨架、紫環酮系骨架、苝系骨架、硫靛藍(Thioindigo)系骨架、異吲哚啉系骨架、異吲哚啉酮系骨架、喹啉黃系骨架、士林(threne)系骨架、金屬錯合物系骨架等,喹啉系骨架、苯并咪唑酮系骨架、二酮吡咯并吡咯系骨架、偶氮系骨架、喹啉黃系骨架、異吲哚啉系骨架及酞青素系骨架為較佳,偶氮系骨架及苯并咪唑酮系骨架為更佳。作為具有顏料衍生物之酸基,磺基、羧基為較佳,磺基為更佳。作為顏料衍生物所具有之鹼性基,胺基為較佳,三級胺基為更佳。作為顏料衍生物的具體例,例如能夠參閱日本特開2011-252065號公報的0162~0183段的記載,該內容被併入本說明書中。Examples of the chromophore constituting the pigment derivative include a quinoline-based skeleton, a benzimidazolone-based skeleton, a diketopyrrolopyrrole-based skeleton, an azo-based skeleton, a phthalocyanin-based skeleton, an anthraquinone-based skeleton, and quinacridine. Ketone skeleton, difluorene skeleton, purple ring ketone skeleton, fluorene skeleton, Thioindigo skeleton, isoindolline skeleton, isoindolinone skeleton, quinoline yellow skeleton, Shihlin (Threne) -based skeleton, metal complex-based skeleton, etc., quinoline-based skeleton, benzimidazolone-based skeleton, diketopyrrolopyrrole-based skeleton, azo-based skeleton, quinoline yellow-based skeleton, isoindoline-based skeleton A skeleton and a phthalocyanin-based skeleton are preferable, and an azo-based skeleton and a benzimidazolone-based skeleton are more preferable. As the acid group having a pigment derivative, a sulfo group and a carboxyl group are preferred, and a sulfo group is more preferred. As the basic group possessed by the pigment derivative, an amine group is preferable, and a tertiary amine group is more preferable. As a specific example of a pigment derivative, the description of paragraph 0162 to 0183 of Unexamined-Japanese-Patent No. 2011-252065 can be referred, for example, and this content is integrated into this specification.
當本發明的感光性組成物含有顏料衍生物時,顏料衍生物的含量相對於顏料100質量份,係1~30質量份為較佳,3~20質量份為進一步較佳。顏料衍生物可以僅使用一種,亦可併用兩種以上。本發明的感光性組成物可以僅包含1種顏料衍生物,亦可以包含2種以上。當包含2種以上的顏料衍生物時,該等的合計量成為上述範圍為較佳。When the photosensitive composition of the present invention contains a pigment derivative, the content of the pigment derivative is preferably 1 to 30 parts by mass, and more preferably 3 to 20 parts by mass relative to 100 parts by mass of the pigment. One type of pigment derivative may be used, or two or more types may be used in combination. The photosensitive composition of the present invention may contain only one kind of pigment derivative, or may contain two or more kinds. When two or more types of pigment derivatives are contained, the total amount of these is preferably in the above range.
<<溶劑>>
本發明的感光性組成物含有溶劑為較佳。作為溶劑可列舉有機溶劑。溶劑只要滿足各成分的溶解性和組成物的塗佈性,則基本上並無特別限制。作為有機溶劑的例子,例如可列舉酯類、醚類、酮類、芳香族烴類等。關於該等的詳細內容,能夠參閱國際公開WO2015/166779號公報的0223段,該內容被併入本說明書中。又,亦能夠較佳地使用環狀烷基所取代之酯系溶劑、環狀烷基所取代之酮系溶劑。作為有機溶劑的具體例,可列舉聚乙二醇單甲基醚、二氯甲烷、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙基、乙基溶纖劑乙酸酯、乳酸乙基、二乙二醇二甲醚、乙酸丁基、3-甲氧基丙酸甲酯、2-庚酮、環己酮、乙酸環己基、環戊酮、乙基卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇單甲醚、及丙二醇單甲醚乙酸酯等。在本發明中,有機溶劑可以單獨使用1種,亦可以組合使用2種以上。又,從提高溶解性的觀點考慮,3-甲氧基-N,N-二甲基丙醯胺、3-丁氧基-N,N-二甲基丙醯胺亦為較佳。但是作為溶劑的芳香族烴類(苯、甲苯、二甲苯、乙基苯等),有時因環境方面等的理由降低為宜(例如,相對於有機溶劑總量,能夠設為50質量ppm(百万分率,parts per million)以下,亦能夠設為10質量ppm以下、亦能夠設為1質量ppm以下)。< solvent >
The photosensitive composition of the present invention preferably contains a solvent. Examples of the solvent include organic solvents. The solvent is not particularly limited as long as it satisfies the solubility of each component and the coatability of the composition. Examples of the organic solvent include esters, ethers, ketones, and aromatic hydrocarbons. Regarding such details, refer to paragraph 0223 of International Publication No. WO2015 / 166779, which is incorporated into this specification. In addition, an ester-based solvent substituted with a cyclic alkyl group and a ketone-based solvent substituted with a cyclic alkyl group can also be preferably used. Specific examples of the organic solvent include polyethylene glycol monomethyl ether, methylene chloride, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, and ethyl cellosolve acetate. , Ethyl lactate, diethylene glycol dimethyl ether, butyl acetate, methyl 3-methoxypropionate, 2-heptanone, cyclohexanone, cyclohexyl acetate, cyclopentanone, ethyl carbitol ethyl Acid esters, butylcarbitol acetate, propylene glycol monomethyl ether, and propylene glycol monomethyl ether acetate. In the present invention, one type of organic solvent may be used alone, or two or more types may be used in combination. From the viewpoint of improving solubility, 3-methoxy-N, N-dimethylpropanamide and 3-butoxy-N, N-dimethylpropanamide are also preferable. However, the aromatic hydrocarbons (benzene, toluene, xylene, ethylbenzene, etc.) as the solvent may be reduced for environmental reasons (for example, it may be 50 mass ppm relative to the total amount of the organic solvent ( Parts per million) can be set to 10 mass ppm or less, or 1 mass ppm or less).
本發明中,使用金屬含量較少之溶劑為較佳,例如溶劑的金屬含量例如為10質量ppb(十億分率,parts per billion)以下為較佳。依需要,亦可以使用質量ppt(万億分之一,parts per trillion)級別的溶劑,該種高純度溶劑例如由TOYO Gosei Co.,Ltd.所提供(化學工業日報,2015年11月13日)。In the present invention, it is preferable to use a solvent with a small metal content. For example, the metal content of the solvent is preferably 10 mass ppb (parts per billion) or less. If required, solvents with quality ppt (parts per trillion) grade can also be used. Such high-purity solvents are provided by, for example, TOYO Gosei Co., Ltd. (Chemical Industry Daily, November 13, 2015 ).
作為從溶劑中去除金屬等雜質之方法,例如,能夠列舉使用蒸餾(分子蒸餾和薄膜蒸餾等)或過濾器之過濾。作為用於過濾之過濾器的過濾器孔徑,10μm以下為較佳,5μm以下為更佳,3μm以下為進一步較佳。過濾器的材質係聚四氟乙烯、聚乙烯或耐綸為較佳。Examples of a method for removing impurities such as metals from a solvent include filtration using distillation (molecular distillation, thin film distillation, etc.) or a filter. As the filter pore size of the filter used for filtration, 10 μm or less is preferable, 5 μm or less is more preferable, and 3 μm or less is more preferable. The material of the filter is preferably polytetrafluoroethylene, polyethylene, or nylon.
溶劑可以含有異構物(原子數相同但結構不同之化合物)。又,異構物可以僅包含1種,亦可以包含複數種。The solvent may contain isomers (compounds having the same number of atoms but different structures). The isomers may include only one kind or plural kinds.
本發明中,有機溶劑中過氧化物的含有率係0.8mmol/L以下為較佳,實際上不含有過氧化物為更佳。In the present invention, the content of peroxide in the organic solvent is preferably 0.8 mmol / L or less, and it is more preferable not to contain peroxide.
感光性組成物中的溶劑的含量係10~95質量%為較佳。下限係20質量%以上為較佳,30質量%以上為更佳,40質量%以上為進一步較佳,50質量%以上為更進一步較佳,55質量%以上為更進一步較佳,60質量%以上為特佳。上限係90質量%為較佳。The content of the solvent in the photosensitive composition is preferably 10 to 95% by mass. The lower limit is preferably 20% by mass or more, more preferably 30% by mass or more, 40% by mass or more is further preferable, 50% by mass or more is further preferable, 55% by mass or more is further preferable, and 60% by mass The above is particularly good. The upper limit is preferably 90% by mass.
又,從環境法規的觀點考慮,本發明的感光性組成物實質上不含有環境法規物質為較佳。另外,本發明中,實質上不含有環境法規物質係指感光性組成物中之環境法規物質的含量為50質量ppm以下,30質量ppm以下為較佳,10質量ppm以下為進一步較佳,1質量ppm以下為特佳。環境法規物質例如可列舉苯;甲苯、二甲苯等烷基苯類;氯苯等鹵化苯類等。該等在REACH(Registration Evaluation Authorization and Restriction of CHemicals)法規、PRTR(Pollutant Release and Transfer Register)法、VOC(Volatile Organic Compounds)法規等下註冊為環境法規物質,使用量和處理方法受到嚴格管制。該等化合物有時在製造用於本發明的感光性組成物之各成分等時用作溶劑,作為殘留溶劑混入感光性組成物中。從對人的安全性、對環境的考慮的觀點考慮,盡可能地減少該等物質為較佳。作為減少環境法規物質之方法,可列舉將系統內部進行加熱和減壓而設為環境法規物質的沸點以上,並從系統中蒸餾去除環境法規物質並將其減少之方法。又,在蒸餾去除少量的環境法規物質之情況下,為了提高效率而與具有該溶劑相同的沸點之溶劑共沸亦是有用的。又,當含有具有自由基聚合性之化合物時,可以在添加聚合抑制劑之後減壓蒸餾去除,以便抑制在減壓蒸餾去除中自由基聚合反應的進行導致在分子間進行交聯。該等蒸餾去除方法能夠在原料階段、使原料反應之產物(例如聚合後的樹脂溶液和多官能單體溶液)的階段或藉由混合該等化合物而製作之組成物的階段中的任一階段中進行。From the viewpoint of environmental regulations, it is preferable that the photosensitive composition of the present invention does not substantially contain environmental regulations. In addition, in the present invention, substantially no environmental regulatory substance means that the content of the environmental regulatory substance in the photosensitive composition is 50 mass ppm or less, 30 mass ppm or less is preferred, and 10 mass ppm or less is further preferred, 1 Mass ppm is particularly preferred. Examples of environmental regulations include benzene; alkylbenzenes such as toluene and xylene; and halogenated benzenes such as chlorobenzene. These substances are registered as environmentally regulated substances under the REACH (Registration Evaluation Authorization and Restriction of CHemicals) regulations, the PRTR (Pollutant Release and Transfer Register) law, and the VOC (Volatile Organic Compounds) regulations, and their usage and disposal methods are strictly controlled. These compounds may be used as a solvent in the production of each component or the like of the photosensitive composition used in the present invention, and may be mixed into the photosensitive composition as a residual solvent. From the viewpoint of human safety and environmental considerations, it is better to reduce these substances as much as possible. Examples of the method for reducing environmental regulatory substances include heating and depressurizing the inside of the system to have a boiling point of the environmental regulatory substances, and distilling and reducing environmental regulatory substances from the system. Moreover, when a small amount of environmental regulations are removed by distillation, azeotropy with a solvent having the same boiling point as the solvent in order to improve efficiency is also useful. In addition, when a compound having a radical polymerizable property is contained, after adding a polymerization inhibitor, it can be distilled off under reduced pressure in order to suppress the progress of the radical polymerization reaction during the reduced pressure distillation to cause cross-linking between molecules. These distillation removal methods can be at any of the raw material stage, the stage of reacting the raw materials (such as a polymerized resin solution and a polyfunctional monomer solution), or a stage of a composition produced by mixing these compounds. In progress.
<<聚合抑制劑>>
本發明的感光性組成物能夠含有聚合抑制劑。作為聚合抑制劑,可列舉對苯二酚、對甲氧基苯酚、二-三級丁基-對甲酚、五倍子酚、三級丁基鄰苯二酚、苯醌、4,4’-硫代雙(3-甲基-6-三級丁基苯酚)、2,2'-亞甲基雙(4-甲基-6-三級丁基酚醛)、N-亞硝基苯基羥基胺鹽(銨鹽、第一鈰鹽等)。其中,對甲氧基苯酚為較佳。感光性組成物的總固體成分中的聚合抑制劑的含量係0.001~5質量%為較佳。<< polymerization inhibitors >>
The photosensitive composition of this invention can contain a polymerization inhibitor. Examples of the polymerization inhibitor include hydroquinone, p-methoxyphenol, di-tertiary-butyl-p-cresol, gallophenol, tertiary-butylcatechol, benzoquinone, 4,4'-sulfur Substituted bis (3-methyl-6-tertiary-butylphenol), 2,2'-methylenebis (4-methyl-6-tertiary-butylphenolaldehyde), N-nitrosophenylhydroxylamine Salt (ammonium salt, first cerium salt, etc.). Among them, p-methoxyphenol is preferred. The content of the polymerization inhibitor in the total solid content of the photosensitive composition is preferably 0.001 to 5% by mass.
<<界面活性劑>>
本發明的感光性組成物能夠含有界面活性劑。作為界面活性劑,能夠使用氟系界面活性劑、非離子系界面活性劑、陽離子系界面活性劑、陰離子系界面活性劑、矽酮系界面活性劑等各種界面活性劑。關於界面活性劑,能夠參閱國際公開WO2015/166779號公報的0238~0245段,該內容被併入本說明書中。< Interfacial Active Agents >>
The photosensitive composition of the present invention can contain a surfactant. As the surfactant, various surfactants such as a fluorine-based surfactant, a non-ionic surfactant, a cationic surfactant, an anionic surfactant, and a silicone-based surfactant can be used. Regarding the surfactant, paragraphs 0238 to 0245 of International Publication No. WO2015 / 166779 can be referred to, and this content is incorporated into the present specification.
本發明中,界面活性劑係氟系界面活性劑為較佳。感光性組成物中含有氟系界面活性劑,藉此能夠進一步提高液體特性(尤其,流動性),並且能夠進一步改善省液性。又,還能夠形成厚度不均勻少之膜。In the present invention, the surfactant is preferably a fluorine-based surfactant. By containing a fluorine-based surfactant in the photosensitive composition, the liquid characteristics (especially, fluidity) can be further improved, and the liquid saving property can be further improved. Moreover, a film with small thickness unevenness can also be formed.
氟系界面活性劑中之氟含有率為3~40質量%為較佳,5~30質量%為更佳,7~25質量%為特佳。氟含有率為該範圍之氟系界面活性劑,從塗佈膜的厚度的均匀性和省液性的方面而言為有效,組成物中之溶解性亦良好。The fluorine content in the fluorine-based surfactant is preferably 3 to 40% by mass, more preferably 5 to 30% by mass, and particularly preferably 7 to 25% by mass. A fluorine-based surfactant having a fluorine content ratio within this range is effective from the viewpoint of the uniformity of the thickness of the coating film and the liquid saving property, and the solubility in the composition is also good.
作為氟系界面活性劑,可列舉日本特開2014-041318號公報的0060~0064段(相對應之國際公開2014/017669號公報的0060~0064段)等中所記載的界面活性劑、日本特開2011-132503號公報的0117~0132段中所記載的界面活性劑,該等內容被併入本說明書中。作為氟系界面活性劑的市售品,例如可列舉Magaface F171、F172、F173、F176、F177、F141、F142、F143、F144、R30、F437、F475、F479、F482、F554、F780、EXP、MFS-330(以上,DIC CORPORATION製)、Fluorad FC430、FC431、FC171(以上,Sumitomo 3M Limited製)、Surflon S-382、SC-101、SC-103、SC-104、SC-105、SC-1068、SC-381、SC-383、S-393、KH-40(以上,ASAHI GLASS CO.,LTD.製)、 PolyFox PF636、PF656、PF6320、PF6520、PF7002(以上,OMNOVA SOLUTIONS INC.製)等。Examples of the fluorine-based surfactant include the surfactants described in Japanese Patent Application Laid-Open No. 2014-041318, paragraphs 0060 to 0064 (corresponding to International Publication No. 2014/017669, paragraphs 0060 to 0064), and the like. The surfactants described in paragraphs 0117 to 0132 of the 2011-132503 publication are incorporated into this specification. Examples of commercially available fluorine-based surfactants include Magaface F171, F172, F173, F176, F177, F141, F142, F143, F144, R30, F437, F475, F479, F482, F554, F780, EXP, and MFS. -330 (above, manufactured by DIC Corporation), Fluorad FC430, FC431, FC171 (above, manufactured by Sumitomo 3M Limited), Surflon S-382, SC-101, SC-103, SC-104, SC-105, SC-1068, SC-381, SC-383, S-393, KH-40 (above, manufactured by ASAHI GLASS CO., LTD.), PolyFox PF636, PF656, PF6320, PF6520, PF7002 (above, manufactured by OMNOVA SOLUTIONS INC.), Etc.
又,氟系界面活性劑亦能夠較佳地使用包含具有含有氟原子之官能基之分子結構,且在加熱時含有氟原子之官能基的一部分被斷裂而氟原子揮發之丙烯酸系化合物。作為該等氟系界面活性劑,可列舉DIC CORPORATION製的Magaface DS系列(化學工業日報,2016年2月22日)(日經產業新聞,2016年2月23日)、例如Magaface DS-21。Further, as the fluorine-based surfactant, an acrylic compound containing a molecular structure having a functional group containing a fluorine atom, and a part of the functional group containing a fluorine atom being cleaved upon heating, and a fluorine atom volatilizing can be preferably used. Examples of such fluorine-based surfactants include Magaface DS series (Chemical Industry Daily, February 22, 2016) (Nikkei Industry News, February 23, 2016) manufactured by DIC Corporation, such as Magaface DS-21.
又,氟系界面活性劑使用具有氟化烷基或氟化伸烷基醚基之含氟原子乙烯醚化合物與親水性乙烯醚化合物的聚合物亦為較佳。該種氟系界面活性劑能夠參閱日本特開2016-216602號公報的記載,並該內容被併入本說明書中。It is also preferable that the fluorine-based surfactant is a polymer of a fluorine atom-containing vinyl ether compound having a fluorinated alkyl group or a fluorinated alkylene ether group and a hydrophilic vinyl ether compound. Such a fluorine-based surfactant can be referred to the description in Japanese Patent Application Laid-Open No. 2016-216602, and the content is incorporated into this specification.
氟系界面活性劑還可以使用嵌段聚合物。例如可列舉日本特開2011-089090號公報中所記載之化合物。氟系界面活性劑還能夠較佳地使用含氟高分子化合物,該含氟高分子化合物含有:源自具有氟原子之(甲基)丙烯酸酯化合物之重複單元;及源自具有2個以上(較佳為5個以上)伸烷氧基(較佳為伸乙氧基、伸丙氧基)之(甲基)丙烯酸酯化合物之重複單元。作為本發明中所使用之氟系界面活性劑,還例示出下述化合物。
[化學式39]
上述的化合物的重量平均分子量較佳為3,000~50,000,例如為14,000。上述化合物中,表示重複單元的比例之%為莫耳%。As the fluorine-based surfactant, a block polymer may be used. Examples thereof include compounds described in Japanese Patent Application Laid-Open No. 2011-089090. The fluorine-based surfactant can also preferably use a fluorine-containing polymer compound containing: a repeating unit derived from a (meth) acrylate compound having a fluorine atom; and derived from a compound having two or more ( It is preferably 5 or more) repeating units of a (meth) acrylate compound of an alkoxy group (preferably an ethoxy group and a propyleneoxy group). The following compounds are exemplified as the fluorine-based surfactant used in the present invention.
[Chemical Formula 39]
The weight average molecular weight of the compound is preferably 3,000 to 50,000, and is, for example, 14,000. In the above compounds, the percentage representing the proportion of the repeating unit is Molar%.
又,氟系界面活性劑亦能夠使用側鏈上具有乙烯性不飽和鍵結基之含氟聚合物。作為具體例,可列舉日本特開2010-164965號公報的0050~0090段及0289~0295段中所記載之化合物,例如DIC CORPORATION製的MEGAFACE RS-101、RS-102、RS-718K、RS-72-K等。氟系界面活性劑亦能夠使用日本特開2015-117327號公報的0015~0158段中所記載之化合物。In addition, as the fluorine-based surfactant, a fluorine-containing polymer having an ethylenically unsaturated bond group in a side chain can also be used. Specific examples include compounds described in paragraphs 0050 to 0090 and 0289 to 0295 of Japanese Patent Application Laid-Open No. 2010-164965, such as MEGAFACE RS-101, RS-102, RS-718K, RS- 72-K and so on. As the fluorine-based surfactant, the compounds described in paragraphs 0015 to 0158 of JP-A-2015-117327 can also be used.
作為非離子系界面活性劑,可列舉甘油、三羥甲基丙烷、三羥甲基乙烷以及它們的乙氧基化物及丙氧基化物(例如,甘油丙氧基化物、甘油乙氧基化物等)、聚氧乙烯月桂基醚、聚氧乙烯硬脂基醚、聚氧乙烯油基醚、聚氧乙烯辛基苯基醚、聚氧乙烯壬基苯基醚、聚乙二醇二月桂酸酯、聚乙二醇二硬脂酸酯、脫水山梨糖醇脂肪酸酯、PLURONIC L10、L31、L61、L62、10R5、17R2、25R2(BASF公司製)、TETRONIC 304、701、704、901、904、150R1(BASF公司製)、SOLSPERSE 20000(Lubrizol Japan Ltd.製)、NCW-101、NCW-1001、NCW-1002(FUJIFILM Wako Pure Chemical Corporation製)、PIONIN D-6112、D-6112-W、D-6315(Takemoto Oil & Fat Co.,Ltd.製)、OLFIN E1010、Surfynol 104、400、440(Nissin Chemical Co.,Ltd.製)等。Examples of nonionic surfactants include glycerol, trimethylolpropane, trimethylolethane, and their ethoxylates and propoxylates (for example, glycerol propoxylate and glycerol ethoxylate). Etc.), polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octylphenyl ether, polyoxyethylene nonylphenyl ether, polyethylene glycol dilauric acid Ester, polyethylene glycol distearate, sorbitan fatty acid ester, PLURONIC L10, L31, L61, L62, 10R5, 17R2, 25R2 (made by BASF), TETRONIC 304, 701, 704, 901, 904 , 150R1 (manufactured by BASF), SOLSPERSE 20000 (manufactured by Lubrizol Japan Ltd.), NCW-101, NCW-1001, NCW-1002 (manufactured by FUJIFILM Wako Pure Chemical Corporation), PIONIN D-6112, D-6112-W, D -6315 (manufactured by Takemoto Oil & Fat Co., Ltd.), OLFIN E1010, Surfynol 104, 400, 440 (manufactured by Nissin Chemical Co., Ltd.) and the like.
作為矽酮系界面活性劑,例如可列舉Toray Silicone DC3PA、Toray Silicone SH7PA、Toray Silicone DC11PA、Toray Silicone SH21PA、Toray Silicone SH28PA、Toray Silicone SH29PA、Toray Silicone SH30PA、Toray Silicone SH8400(以上,Dow Corning Toray Co.,Ltd.製)、TSF-4440、TSF-4300、TSF-4445、TSF-4460、TSF-4452(以上,Momentive performance Materials Inc.製)、KP-341、KF-6001、KF-6002(以上,Shin-Etsu Chemical Co.,Ltd.製)、BYK307、BYK323、BYK330(以上,BYK Chemie GmbH製)等。Examples of the silicone-based surfactants include Toray Silicone DC3PA, Toray Silicone SH7PA, Toray Silicone DC11PA, Toray Silicone SH21PA, Toray Silicone SH28PA, Toray Silicone SH29PA, Toray Silicone SH30PA, Toray Silicone SH8400 (above, Dow Corning Toray Co. , Ltd.), TSF-4440, TSF-4300, TSF-4445, TSF-4460, TSF-4452 (above, manufactured by Momentive performance Materials Inc.), KP-341, KF-6001, KF-6002 (above, Shin-Etsu Chemical Co., Ltd.), BYK307, BYK323, BYK330 (above, manufactured by BYK Chemie GmbH), and the like.
感光性組成物的總固體成分中的界面活性劑的含量係0.001質量%~5.0質量%為較佳,0.005~3.0質量%為更佳。界面活性劑可以僅為1種,亦可以為2種以上。為2種以上時,合計量成為上述範圍為較佳。The content of the surfactant in the total solid content of the photosensitive composition is preferably 0.001% to 5.0% by mass, and more preferably 0.005 to 3.0% by mass. The surfactant may be only one kind, or two or more kinds. When there are two or more kinds, it is preferable that the total amount falls within the above range.
<<紫外線吸收劑>>
本發明的感光性組成物能夠含有紫外線吸收劑。紫外線吸收劑能夠使用共軛二烯化合物、胺基二烯化合物、水楊酸酯化合物、二苯甲酮化合物、苯并三唑化合物、丙烯腈化合物、羥基苯基三化合物、吲哚化合物、三化合物等。關於該等的詳細內容,能夠參閱日本特開2012-208374號公報的0052~0072段、日本特開2013-068814號公報的0317~0334段、日本特開2016-162946號公報的0061~0080段中的記載,該等內容被併入本說明書中。作為紫外線吸收劑的具體例子,可列舉下述結構的化合物等。作為紫外線吸收劑的市售品,例如可列舉UV-503(DAITO CHEMICAL CO.,LTD.製)等。又,作為苯并三唑化合物,可列舉MIYOSHI OIL & FAT CO.,LTD.製的MYUA系列(化學工業日報、2016年2月1日)。
[化學式40]
<< Ultraviolet absorbent >>
The photosensitive composition of this invention can contain an ultraviolet absorber. As the ultraviolet absorber, a conjugated diene compound, an amino diene compound, a salicylate compound, a benzophenone compound, a benzotriazole compound, an acrylonitrile compound, a hydroxyphenyl tri compound, an indole compound, or a trivalent compound can be used. Compounds etc. For details, please refer to paragraphs 0052 to 0072 of Japanese Patent Application Laid-Open No. 2012-208374, paragraphs 0317 to 0334 of Japanese Patent Laid-Open No. 2013-068814, and paragraphs 0061 to 0080 of Japanese Patent Laid-Open No. 2016-162946. In the description, these contents are incorporated into this specification. Specific examples of the ultraviolet absorber include compounds having the following structures. As a commercial item of an ultraviolet absorber, UV-503 (made by DAITO CHEMICAL CO., LTD.) Etc. are mentioned, for example. Examples of the benzotriazole compound include the MYUA series manufactured by MIYOSHI OIL & FAT CO., LTD. (Chemical Industry Daily, February 1, 2016).
[Chemical Formula 40]
感光性組成物的總固體成分中的紫外線吸收劑的含量係0.01~10質量%為較佳,0.01~5質量%為更佳。本發明中,紫外線吸收劑可以僅使用1種,亦可以使用2種以上。使用2種以上之情況下,合計量係上述範圍為較佳。The content of the ultraviolet absorber in the total solid content of the photosensitive composition is preferably 0.01 to 10% by mass, and more preferably 0.01 to 5% by mass. In the present invention, only one kind of ultraviolet absorbent may be used, or two or more kinds may be used. When two or more kinds are used, the total amount is preferably in the above range.
<<抗氧化劑>>
本發明的感光性組成物能夠含有抗氧化劑。作為抗氧化劑,可列舉苯酚化合物、亞磷酸酯化合物、硫醚化合物等。作為苯酚化合物,能夠使用作為苯酚系抗氧化劑已知之任意的苯酚化合物。作為較佳的苯酚化合物,可列舉受阻酚化合物。在與苯酚性羥基相鄰之部位(鄰位)具有取代基之化合物為較佳。作為前述取代基,碳數1~22的經取代或未經取代的烷基為較佳。又,抗氧化劑係在同一分子內具有苯酚基和亞磷酸酯基之化合物亦為較佳。又,抗氧化劑亦能夠較佳地使用磷系抗氧化劑。作為磷系抗氧化劑,可列舉三[2-[[2,4,8,10-四(1,1-二甲基乙基)二苯并[d,f][1,3,2]二氧雜磷雜庚英-6-基]氧基]乙基]胺、三[2-[(4,6,9,11-四-第三丁基二苯并[d,f][1,3,2]二氧雜磷雜庚英-2-基)氧基]乙基]胺、及亞磷酸乙基雙(2,4-二-第三丁基-6-甲基苯基)。作為抗氧化劑的市售品,例如可以列舉ADKSTAB AO-20、ADKSTAB AO-30、ADKSTAB AO-40、ADKSTAB AO-50、ADKSTAB AO-50F、ADKSTAB AO-60、ADKSTAB AO-60G、ADKSTAB AO-80、ADKSTAB AO-330(以上為ADEKA CORPORATION製造)等。<〈 Antioxidant 〉>
The photosensitive composition of the present invention can contain an antioxidant. Examples of the antioxidant include a phenol compound, a phosphite compound, and a thioether compound. As the phenol compound, any phenol compound known as a phenol-based antioxidant can be used. As a preferable phenol compound, a hindered phenol compound is mentioned. A compound having a substituent at a position adjacent to a phenolic hydroxyl group (ortho position) is preferred. The aforementioned substituent is preferably a substituted or unsubstituted alkyl group having 1 to 22 carbon atoms. In addition, an antioxidant is preferably a compound having a phenol group and a phosphite group in the same molecule. As the antioxidant, a phosphorus-based antioxidant can be preferably used. Examples of the phosphorus-based antioxidant include tris [2-[[2,4,8,10-tetra (1,1-dimethylethyl) dibenzo [d, f] [1,3,2] di Oxaphosphaheptin-6-yl] oxy] ethyl] amine, tris [2-[(4,6,9,11-tetra-tert-butyldibenzo [d, f] [1, 3,2] dioxaphosphaheptin-2-yl) oxy] ethyl] amine, and ethylbis (2,4-di-third-butyl-6-methylphenyl) phosphite. Examples of commercially available antioxidants include ADKSTAB AO-20, ADKSTAB AO-30, ADKSTAB AO-40, ADKSTAB AO-50, ADKSTAB AO-50F, ADKSTAB AO-60, ADKSTAB AO-60G, and ADKSTAB AO-80. , ADKSTAB AO-330 (the above is made by ADEKA CORPORATION) and so on.
感光性組成物的總固體成分中的抗氧化劑的含量係0.01~20質量%為較佳,0.3~15質量%為更佳。抗氧化劑可以僅使用一種,亦可以使用兩種以上。使用2種以上之情況下,合計量係上述範圍為較佳。The content of the antioxidant in the total solid content of the photosensitive composition is preferably 0.01 to 20% by mass, and more preferably 0.3 to 15% by mass. The antioxidant may be used alone or in combination of two or more. When two or more kinds are used, the total amount is preferably in the above range.
<<其他他成分>>
本發明的感光性組成物視需要亦可含有硬化促進劑、填料、熱硬化促進劑、塑化劑及其他助劑類(例如,導電性粒子、填充劑、消泡劑、阻燃劑、調平劑、剝離促進劑、香料、表面張力調整劑、鏈轉移劑等)。藉由適宜含有該等成分,而能夠調整膜物性等性質。該等成分例如能夠參閱日本特開2012-003225號公報的0183段以後(相對應之美國專利申請公開第2013/0034812號說明書的0237段)的記載、日本特開2008-250074號公報的0101~0104段、0107~0109段等的記載,該等內容被併入本說明書中。又,本發明的感光性組成物根據需要還可以含有潛伏的抗氧化劑。作為潛伏的抗氧化劑,可列舉作為抗氧化劑發揮功能之部位被保護基保護之化合物,且保護基藉由在100~250℃下進行加熱或在酸/鹼觸媒存在下在80~200℃下進行加熱而脫離並作為抗氧化劑發揮功能之化合物。作為潛伏的抗氧化劑,可列舉國際公開WO2014/021023號公報、國際公開WO2017/030005號公報、日本特開2017-008219號公報中所記載之化合物。作為市售品,可列舉ADEKAARKLS GPA-5001(ADEKA CORPORATION製)等。< Other Other Ingredients >>
The photosensitive composition of the present invention may further contain a hardening accelerator, a filler, a thermal hardening accelerator, a plasticizer, and other auxiliary agents (for example, conductive particles, fillers, defoamers, flame retardants, conditioning agents, etc.) as needed. Leveling agent, peeling accelerator, perfume, surface tension adjuster, chain transfer agent, etc.). By appropriately containing these components, properties such as film physical properties can be adjusted. These components can be referred to, for example, Japanese Patent Application Laid-Open No. 2012-003225 and subsequent paragraphs 0183 (paragraph 0237 of the corresponding US Patent Application Publication No. 2013/0034812), and Japanese Patent Application No. 2008-250074 0101 to The descriptions of paragraphs 0104, 0107 to 0109, etc. are incorporated into this specification. Moreover, the photosensitive composition of this invention may contain a latent antioxidant as needed. Examples of the latent antioxidant include compounds protected by a protective group at a site where the antioxidant functions, and the protective group is heated at 100 to 250 ° C or at 80 to 200 ° C in the presence of an acid / base catalyst. A compound that is detached by heating and functions as an antioxidant. Examples of the latent antioxidant include compounds described in International Publication No. WO2014 / 021023, International Publication No. WO2017 / 030005, and Japanese Patent Application Laid-Open No. 2017-008219. Examples of commercially available products include ADEKARAKLS GPA-5001 (manufactured by ADEKA CORPORATION).
例如,藉由塗佈形成膜時,本發明的感光性組成物的黏度(23℃)係1~100mPa・s為較佳。下限係2mPa・s以上為更佳,3mPa・s以上為進一步較佳。上限係50mPa・s以下為更佳,30mPa・s以下為進一步較佳,15mPa・s以下為特佳。For example, when the film is formed by coating, the viscosity (23 ° C) of the photosensitive composition of the present invention is preferably 1 to 100 mPa ・ s. The lower limit is more preferably 2 mPa ・ s or more, and more preferably 3 mPa 以上 s or more. The upper limit is more preferably 50 mPa · s or less, 30 mPa ・ s or less is more preferable, and 15 mPa · s or less is particularly preferable.
<收容容器>
作為本發明的感光性組成物的收容容器並無特別限定,能夠使用公知的收容容器。又,作為收容容器,以抑制雜質混入原材料或組成物中為目的,使用由6種6層的樹脂構成容器內壁之多層瓶或將6種樹脂設為7層結構之瓶亦較佳。作為該種容器,例如可列舉日本特開2015-123351號公報中所記載之容器。<Container>
The storage container for the photosensitive composition of the present invention is not particularly limited, and a known storage container can be used. In addition, as a storage container, in order to suppress the incorporation of impurities into the raw materials or the composition, it is also preferable to use a multi-layer bottle composed of six kinds of six-layer resins or a bottle having six resins in a seven-layer structure. As such a container, the container described in Unexamined-Japanese-Patent No. 2015-123351 is mentioned, for example.
將本發明的感光性組成物用作液晶顯示裝置用途的濾色器形成用的組成物之情況下,具備由本發明的感光性組成物所形成之濾色器之液晶顯示元件的電壓保持率為70%以上為較佳,90%以上為更佳。能夠適當組合用於獲得高電壓保持率的公知的方法,作為典型的方法,可列舉純度高之原材料的使用(例如離子性不純物的減少)和組成物中之酸性官能基量的控制。電壓保持率例如能夠由日本特開2011-008004號公報的0243段、日本特開2012-224847號公報的0123~0129段中所記載之方法等進行測量。When the photosensitive composition of the present invention is used as a composition for forming a color filter for a liquid crystal display device, the voltage holding ratio of a liquid crystal display element including a color filter formed of the photosensitive composition of the present invention is used. More than 70% is better, more than 90% is better. A known method for obtaining a high voltage holding ratio can be appropriately combined. Typical methods include the use of high-purity raw materials (for example, reduction of ionic impurities) and control of the amount of acidic functional groups in the composition. The voltage holding ratio can be measured, for example, by a method described in paragraph 0243 of Japanese Patent Application Laid-Open No. 2011-008004 and paragraphs 0123 to 0129 of Japanese Patent Laid-Open No. 2012-224847.
<感光性組成物的製備方法>
本發明的感光性組成物能夠混合前述成分而製備。在製備感光性組成物時,可以將所有成分同時溶解或分散於溶劑中來製備感光性組成物,亦可以根據需要預先製備將各成分適當摻合而成之2種以上的溶液或分散液,並在使用時(塗佈時)將該等進行混合而作為感光性組成物來製備。<Preparation method of photosensitive composition>
The photosensitive composition of this invention can be prepared by mixing the said component. When preparing a photosensitive composition, all components may be dissolved or dispersed in a solvent at the same time to prepare a photosensitive composition, or two or more kinds of solutions or dispersions obtained by appropriately blending the components may be prepared in advance, These are mixed during use (at the time of coating) to prepare a photosensitive composition.
又,當本發明的感光性組成物包含顏料等粒子時,包括使粒子分散之製程為較佳。在使粒子分散之製程中,作為粒子的分散中所使用之機械力,可列舉壓縮、壓搾、衝擊、剪切、氣蝕等。作為該等製程的具體例,可列舉珠磨機、混砂機(sand mill)、輥磨機、球磨機、塗料攪拌器(pain shaker)、微射流機(microfluidizer)、高速葉輪、砂磨機、噴流混合器(flowjet mixer)、高壓濕式微粒化、超音波分散等。又,在混砂機(珠磨機)中之粒子的粉碎中,在藉由使用直徑小的珠子、加大珠子的填充率等來提高了粉碎效率之條件下進行處理為較佳。又,粉碎處理後,藉由過濾、離心分離等去除粗粒子為較佳。又,使粒子分散之製程及分散機能夠較佳地使用《分散技術大全,JOHOKIKO CO.,LTD.發行,2005年7月15日》或《以懸浮液(固/液分散體系)為中心之分散技術與工業應用的實際綜合資料集、經營開發中心出版部發行,1978年10月10日》、日本特開2015-157893號公報的0022段中所記載之製程及分散機。又,在使粒子分散之製程中,可以藉由鹽磨(salt milling)步驟進行粒子的微細化處理。鹽磨步驟中所使用之原材料、機器、處理條件等例如能夠參閱日本特開2015-194521號公報、日本特開2012-046629號公報的記載。When the photosensitive composition of the present invention contains particles such as a pigment, a process including dispersing the particles is preferred. In the process of dispersing particles, examples of the mechanical force used in dispersing the particles include compression, pressing, impact, shear, and cavitation. Specific examples of such processes include a bead mill, a sand mill, a roll mill, a ball mill, a paint shaker, a microfluidizer, a high-speed impeller, a sand mill, Flowjet mixer, high-pressure wet-type micronization, ultrasonic dispersion, etc. In addition, in the pulverization of particles in a sand mixer (bead mill), it is preferable to perform the treatment under conditions that increase the pulverization efficiency by using beads having a small diameter and increasing the filling rate of the beads. After the pulverization treatment, it is preferable to remove coarse particles by filtration, centrifugation, or the like. In addition, the process of dispersing particles and the dispersing machine can better use the "Encyclopedia of Dispersion Technology, issued by JOHOKIKO CO., LTD., July 15, 2005" or "centered on suspension (solid / liquid dispersion system) The actual comprehensive data collection of dispersion technology and industrial applications, issued by the Publishing Department of the Business Development Center, October 10, 1978, and the process and dispersion machine described in paragraph 0022 of Japanese Patent Application Laid-Open No. 2015-157893. In the process of dispersing the particles, the particles can be miniaturized by a salt milling step. The raw materials, equipment, and processing conditions used in the salt milling step can be found in, for example, Japanese Patent Application Laid-Open No. 2015-194521 and Japanese Patent Application Laid-Open No. 2012-046629.
製備本發明的感光性組成物時,以去除異物和減少缺陷等為目的,利用過濾器過濾感光性組成物為較佳。作為過濾器,只要為至今用於過濾用途等之過濾器,則能夠無特別限定而使用。例如可列舉使用了聚四氟乙烯(PTFE)等氟樹脂、耐綸(例如耐綸-6、耐綸-6,6)等聚醯胺系樹脂、聚乙烯、聚丙烯(PP)等聚烯樹脂(包含高密度、超高分子量的聚烯樹脂)等的原材料之過濾器。該等原材料中聚丙烯(包含高密度聚丙烯)及尼龍為較佳。過濾器的孔徑適合為0.01~7.0μm左右,較佳為0.01~3.0μm左右,進一步較佳為0.05~0.5μm左右。只要過濾器的孔徑在上述範圍,則能夠可靠地去除微細的異物。又,使用纖維狀過濾材料亦為較佳。作為纖維狀過濾材料,例如可列舉聚丙烯纖維、尼龍纖維、玻璃纖維等。具體而言,可列舉ROKI GROUP CO.,Ltd.製的SBP類型系列(SBP008等)、TPR類型系列(TPR002、TPR005等)、SHPX類型系列(SHPX003等)的濾芯。使用過濾器時,亦可以組合不同之過濾器(例如,第1過濾器和第2過濾器等)。此時,各過濾器中之過濾可以僅為一次,亦可以為兩次以上。又,可以在上述範圍組合不同之孔徑的過濾器。又,第1過濾器中的過濾僅對分散液進行,混合其他成分之後亦可以由第2過濾器進行過濾。When preparing the photosensitive composition of the present invention, it is preferable to filter the photosensitive composition with a filter for the purpose of removing foreign matter, reducing defects, and the like. The filter can be used without particular limitation as long as it is a filter that has been used for filtration applications and the like so far. Examples include fluororesins such as polytetrafluoroethylene (PTFE), polyamide resins such as nylon (eg, nylon-6, nylon-6,6), and polyolefins such as polyethylene and polypropylene (PP). Filters for raw materials such as resins (including high-density, ultra-high molecular weight polyolefin resins). Among these raw materials, polypropylene (including high-density polypropylene) and nylon are preferred. The pore diameter of the filter is suitably about 0.01 to 7.0 μm, preferably about 0.01 to 3.0 μm, and more preferably about 0.05 to 0.5 μm. As long as the pore diameter of the filter is within the above range, fine foreign matter can be reliably removed. It is also preferable to use a fibrous filter material. Examples of the fibrous filter material include polypropylene fibers, nylon fibers, and glass fibers. Specifically, filter elements of SBP type series (SBP008, etc.), TPR type series (TPR002, TPR005, etc.) and SHPX type series (SHPX003, etc.) manufactured by ROKI GROUP CO., Ltd. are mentioned. When using filters, you can also combine different filters (for example, the first filter and the second filter, etc.). At this time, the filtration in each filter may be only once, or may be more than two. Filters with different pore sizes can be combined in the above range. In addition, the filtration in the first filter is performed only on the dispersion liquid, and after mixing the other components, it may be filtered by the second filter.
<硬化膜>
本發明的硬化膜為由上述本發明的感光性組成物獲得之硬化膜。本發明的硬化膜能夠用於濾色器、近紅外線透射濾波器、近紅外線截止濾波器、黑色矩陣、遮光膜、折射率調節膜、平板印刷版原版的感光層、保護膜、UV硬化性油墨、各種光阻劑、各種顯示材料、塗佈材料、牙科材料、清漆、粉末塗料、接著劑、牙科用組成物、凝膠塗層、電子零件、磁記錄材料、微機械零件、波導管、光學開關、電鍍用遮罩、顏色校準系統、玻璃纖維電纜塗料、絲網印刷模版、基於立體印刷之三維物體、全項記錄用圖像記錄材料、微電子電路、健康照護材料等。膜厚能夠根據目的適當地調整。
例如,膜厚為20μm以下為較佳,10μm以下為更佳,5μm以下為進一步較佳。膜厚的下限為0.1μm以上為較佳,0.2μm以上為更佳,0.3μm以上為進一步較佳。<Hardened film>
The cured film of the present invention is a cured film obtained from the photosensitive composition of the present invention. The cured film of the present invention can be used for a color filter, a near-infrared transmission filter, a near-infrared cut-off filter, a black matrix, a light-shielding film, a refractive index adjustment film, a photosensitive layer of a lithographic printing plate precursor, a protective film, and a UV-curable ink. , Various photoresist, various display materials, coating materials, dental materials, varnishes, powder coatings, adhesives, dental compositions, gel coatings, electronic parts, magnetic recording materials, micromechanical parts, waveguides, optics Switches, plating masks, color calibration systems, glass fiber cable coatings, screen printing stencils, three-dimensional objects based on three-dimensional printing, image recording materials for full-scale recording, microelectronic circuits, health care materials, etc. The film thickness can be appropriately adjusted according to the purpose.
For example, the film thickness is preferably 20 μm or less, more preferably 10 μm or less, and even more preferably 5 μm or less. The lower limit of the film thickness is preferably 0.1 μm or more, more preferably 0.2 μm or more, and more preferably 0.3 μm or more.
<濾色器之製造方法>
本發明的濾色器之製造方法包括:在支撐體上應用上述本發明的感光性組成物而形成感光性組成物層之製程;將感光性組成物層曝光成圖案狀之製程;及對曝光後的感光性組成物層進行顯影而形成圖案之製程。以下,對各步驟進行說明。< Manufacturing method of color filter >
The manufacturing method of the color filter of the present invention includes: a process of forming the photosensitive composition layer by applying the photosensitive composition of the present invention on a support; a process of exposing the photosensitive composition layer into a pattern; and exposing A process for developing the subsequent photosensitive composition layer to form a pattern. Each step will be described below.
首先,在支撐體上應用本發明的感光性組成物而形成感光性組成物層。作為支撐體,並無特別限定,能夠依用途適當選擇。例如可列舉玻璃基板、矽基板等,矽基板為較佳。又,矽基板上可形成電荷耦合元件(CCD)、互補金屬氧化膜半導體(CMOS)、透明導電膜等。又,有時亦會在矽基板上形成隔離各像素之黑色矩陣。又,在矽基板上為了改良與上部層的密接、防止物質的擴散或者基板表面的平坦化而設置有底塗層。First, the photosensitive composition of the present invention is applied to a support to form a photosensitive composition layer. The support is not particularly limited, and can be appropriately selected depending on the application. For example, a glass substrate, a silicon substrate, etc. are mentioned, A silicon substrate is preferable. In addition, a charge coupled device (CCD), a complementary metal oxide film semiconductor (CMOS), a transparent conductive film, and the like can be formed on a silicon substrate. In addition, a black matrix that isolates each pixel is sometimes formed on a silicon substrate. Further, an undercoat layer is provided on the silicon substrate in order to improve the adhesion with the upper layer, prevent the diffusion of substances, or flatten the surface of the substrate.
作為感光性組成物的應用方法能夠使用公知的方法。例如可列舉滴加法(滴鑄);狹縫塗佈法;噴霧法;輥塗法;旋轉塗佈法(旋塗);流延塗佈法;狹縫及旋塗法;預濕法(例如,日本特開2009-145395號公報中所記載之方法);噴墨法(例如按需噴塗方式、壓電方式、熱方式)、噴嘴噴塗等吐出系印刷、柔性版印刷、網板印刷、凹版印刷、反轉膠版印刷、金屬遮罩印刷法等各種印刷法;使用模具等之轉印法;奈米壓印法等。作為基於噴墨之應用方法並無特別限定,例如可列舉“擴散、可使用之噴墨-在專利中看到的無限可能性-、2005年2月發行、S.B. Techno-Research Co.,Ltd.”中所示出之方法(尤其,115頁~133頁)或日本特開2003-262716號公報、日本特開2003-185831號公報、日本特開2003-261827號公報、日本特開2012-126830號公報、日本特開2006-169325號公報等中所記載之方法。又,關於組成物的塗佈方法,能夠參閱國際公開WO2017/030174號公報、國際公開WO2017/018419號公報的記載,該等內容被編入到本說明書中。As a method of applying the photosensitive composition, a known method can be used. For example, a dropwise addition method (drop casting); a slit coating method; a spray coating method; a roll coating method; a spin coating method (spin coating); a cast coating method; a slit and spin coating method; , The method described in Japanese Patent Application Laid-Open No. 2009-145395); inkjet method (such as on-demand spray method, piezoelectric method, thermal method), nozzle spraying and other ejection printing, flexographic printing, screen printing, gravure Various printing methods such as printing, reverse offset printing, and metal mask printing methods; transfer methods using molds, etc .; nano-imprint methods. The application method based on inkjet is not particularly limited, and examples thereof include "diffuse and usable inkjet-infinite possibilities seen in patents", issued in February 2005, SB Techno-Research Co., Ltd. "(Especially, pages 115 to 133) or Japanese Patent Application Publication No. 2003-262716, Japanese Patent Application Publication No. 2003-185831, Japanese Patent Application Publication No. 2003-261827, Japanese Patent Application Publication No. 2012-126830 The method described in Japanese Patent Publication No. 2006-169325 and the like. Regarding the coating method of the composition, reference may be made to the descriptions of International Publication No. WO2017 / 030174 and International Publication No. WO2017 / 018419, and the contents are incorporated into this specification.
形成於支撐體上之感光性組成物層可以進行乾燥(預烘烤)。藉由低溫製程製造濾色器之情況下,亦可以不進行預烘烤。進行前烘烤時,前烘烤溫度為150℃以下為較佳,120℃以下為更佳,110℃以下為進一步較佳。下限例如能夠設為50℃以上,亦能夠設為80℃以上。預烘烤時間係10~3000秒為較佳,40~2500秒為更佳,80~2200秒為進一步較佳。預烘烤能夠由加熱板、烘箱等進行。The photosensitive composition layer formed on the support can be dried (pre-baked). When a color filter is manufactured by a low temperature process, pre-baking may not be performed. When performing pre-baking, the pre-baking temperature is preferably below 150 ° C, more preferably below 120 ° C, and even more preferably below 110 ° C. The lower limit can be set to, for example, 50 ° C or higher, and can also be set to 80 ° C or higher. The pre-baking time is preferably 10 to 3000 seconds, more preferably 40 to 2500 seconds, and even more preferably 80 to 2200 seconds. The pre-baking can be performed by a hot plate, an oven, or the like.
接著,將感光性組成物層曝光成圖案狀(曝光步驟)。例如,使用步進機等曝光裝置經由具有規定的遮罩圖案之遮罩,對形成於支撐體上之感光性組成物層進行曝光,從而能夠進行圖案曝光。藉此,能夠使曝光部的感光性組成物層硬化。Next, the photosensitive composition layer is exposed to a pattern (exposure step). For example, a pattern exposure can be performed by exposing the photosensitive composition layer formed on a support body using an exposure device such as a stepper through a mask having a predetermined mask pattern. Thereby, the photosensitive composition layer of an exposure part can be hardened.
作為能夠在曝光時使用之放射線(光),可列舉g射線、i射線等。
又,亦能夠使用波長300nm以下的光(較佳為波長180~300nm的光)。作為波長300nm以下的光,可列舉KrF射線(波長248nm)、ArF射線(波長193nm)等,KrF射線(波長248nm)為較佳。又,亦能夠利用300nm以上的長波的光源。亦能夠利用各種LED或LD光源。又,亦能夠利用EB或EUV等放射線區域的光源。Examples of radiation (light) that can be used during exposure include g-rays and i-rays.
It is also possible to use light having a wavelength of 300 nm or less (preferably light having a wavelength of 180 to 300 nm). Examples of the light having a wavelength of 300 nm or less include KrF rays (wavelength 248 nm), ArF rays (wavelength 193 nm), and the like, and KrF rays (wavelength 248 nm) are preferred. In addition, a long-wavelength light source of 300 nm or more can be used. Can also use a variety of LED or LD light sources. In addition, a light source in a radiation region such as EB or EUV can be used.
又,在曝光時,可以連續照射光而進行曝光,亦可以脈衝照射而進行曝光(脈衝曝光)。另外,脈衝曝光係指在短時間(例如,毫秒級以下)的循環中反覆進行光的照射和暫停而進行曝光之方式的曝光方法。脈衝曝光時,脈衝寬度係100奈秒(ns)以下為較佳,50奈秒以下為更佳,30奈秒以下為進一步較佳。脈衝寬度的下限並無特別限定,能夠設為1飛秒(fs)以上,亦能夠設為10飛秒以上。頻率係1kHz以上為較佳,2kHz以上為更佳,4kHz以上為進一步較佳。頻率的上限係50kHz以下為較佳,20kHz以下為更佳,10kHz以下為進一步較佳。最大瞬間照度係50000000W/m2 以上為較佳,100000000W/m2 以上為更佳,200000000W/m2 以上為進一步較佳。又,最大瞬間照度的上限係1000000000W/m2 以下為較佳,800000000W/m2 以下為更佳,500000000W/m2 以下為進一步較佳。另外,脈衝寬度係指在脈衝週期中照射光之時間。又,頻率係指每一秒的脈衝週期的次數。又,最大瞬間照度係指在脈衝週期中照射光之時間內的平均照度。又,脈衝週期係指將脈衝曝光中的光的照射和暫停作為一個循環之週期。In addition, during exposure, exposure may be performed by continuously irradiating light, or exposure may be performed by pulse irradiation (pulse exposure). In addition, the pulse exposure refers to an exposure method in which light is repeatedly irradiated and paused for a short period of time (for example, less than milliseconds) to perform exposure. In pulse exposure, the pulse width is preferably 100 nanoseconds (ns) or less, more preferably 50 nanoseconds or less, and even more preferably 30 nanoseconds or less. The lower limit of the pulse width is not particularly limited, and can be set to 1 femtosecond (fs) or more, and can also be set to 10 femtosecond or more. The frequency is preferably 1 kHz or more, more preferably 2 kHz or more, and more preferably 4 kHz or more. The upper limit of the frequency is preferably below 50 kHz, more preferably below 20 kHz, and even more preferably below 10 kHz. The maximum instantaneous illuminance is more preferably 50000000W / m 2 or more, more preferably 100000000W / m 2 or more, and more preferably 200000000W / m 2 or more. The upper limit of the maximum instantaneous illuminance is preferably 1000000000 W / m 2 or less, more preferably 800000000 W / m 2 or less, and more preferably 500000000 W / m 2 or less. The pulse width refers to the time during which the light is irradiated during the pulse period. The frequency is the number of pulse cycles per second. In addition, the maximum instantaneous illuminance refers to the average illuminance in the time during which light is irradiated in the pulse period. The pulse period refers to a period in which the irradiation and pause of light during pulse exposure are taken as one cycle.
照射量(曝光量)例如係0.03~2.5J/cm2 為較佳,0.05~1.0J/cm2 為更佳。關於曝光時之氧濃度,能夠進行適當選擇,除了在大氣下進行以外,亦可以例如在氧濃度為19體積%以下的低氧環境下(例如15體積%、5體積%、或者實質上無氧)進行曝光,亦可以在氧濃度大於21體積%之高氧環境下(例如22體積%、30體積%、或者50體積%)進行曝光。又,能夠適當設定曝光照度,通常能夠從1000W/m2 ~100000W/m2 (例如,5000W/m2 ,15000W/m2 ,或者35000W/m2 )的範圍選擇。氧濃度與曝光照度亦可以組合適當條件,例如能夠在氧濃度10體積%下設為照度10000W/m2 ,在氧濃度35體積%下設為照度20000W/m2 等。The irradiation amount (exposure amount) is, for example, preferably 0.03 to 2.5 J / cm 2, and more preferably 0.05 to 1.0 J / cm 2 . The oxygen concentration at the time of exposure can be appropriately selected, and in addition to being performed in the atmosphere, it can also be performed in a low-oxygen environment with an oxygen concentration of 19% by volume or less (for example, 15% by volume, 5% by volume, or substantially free of oxygen). ) For exposure, or in a high-oxygen environment with an oxygen concentration greater than 21% by volume (for example, 22% by volume, 30% by volume, or 50% by volume). In addition, the exposure illuminance can be appropriately set, and can usually be selected from a range of 1000 W / m 2 to 100,000 W / m 2 (for example, 5000 W / m 2 , 15000 W / m 2 , or 35000 W / m 2 ). Oxygen concentration also may be appropriately combined exposure illuminance condition, for example illuminance 10000W / m 2 at an oxygen concentration of 10 vol% under an oxygen concentration of 35% by volume under an illuminance 20000W / m 2 and the like.
接著,對曝光後的感光性組成物層進行顯影而形成圖案(顯影製程)。更具體而言,顯影去除未曝光部的感光性組成物層之後形成圖案。未曝光部的感光性組成物層的顯影去除能夠使用顯影液來進行。藉此,未曝光部的感光性組成物層溶出於顯影液,只有光硬化之部分殘留於支撐體上。顯影液的溫度係20~30℃為較佳。顯影時間為20~180秒為較佳。又,為了提高殘渣去除性,可反覆進行數次如下步驟:每隔60秒甩去顯影液,進一步重新供給顯影液。Next, the exposed photosensitive composition layer is developed to form a pattern (development process). More specifically, a pattern is formed after removing the photosensitive composition layer of an unexposed part by development. The development and removal of the photosensitive composition layer in the unexposed portion can be performed using a developing solution. Thereby, the photosensitive composition layer of an unexposed part melt | dissolved in the developing solution, and only the photohardened part remained on the support body. The temperature of the developer is preferably 20 to 30 ° C. The development time is preferably 20 to 180 seconds. Further, in order to improve the residue removal performance, the following steps may be repeated several times: the developer is shaken off every 60 seconds, and the developer is supplied again.
顯影液係用純水稀釋鹼劑而得之鹼性水溶液(鹼性顯影液)為較佳。作為鹼劑,例如可列舉胺、乙胺、二乙胺、二甲基乙醇胺、二甘醇胺、二乙醇胺、羥基胺、乙二胺、四甲基氫氧化銨、四乙基氫氧化銨、四丙基氫氧化銨、四丁基氫氧化銨、乙基三甲基氫氧化銨、苄基三甲基氫氧化銨、二甲基雙(2-羥基乙基)氫氧化銨、膽鹼、吡咯、哌啶、1,8-二氮雜雙環[5.4.0]-7-十一碳烯等有機鹼性化合物或氫氧化鈉、氫氧化鉀、碳酸鈉、碳酸氫鈉、矽酸鈉、偏矽酸鈉等無機鹼性化合物。關於鹼劑,分子量大的化合物在環境面及安全面方面較佳。鹼性水溶液的鹼劑的濃度為0.001~10質量%為較佳,0.01~1質量%為更佳。又,顯影液可進一步包含界面活性劑。作為界面活性劑,可列舉上述界面活性劑,非離子系界面活性劑為較佳。從方便運輸和保管等觀點考慮,顯影液可以暫且作為濃縮液製造,並在使用時稀釋成所需之濃度。稀釋倍率並無特別限定,例如能夠設定在1.5~100倍的範圍。又,顯影後利用純水進行清洗(沖洗)亦為較佳。又,沖洗藉由使形成有顯影後的感光性著色組成物層之支撐體旋轉的同時向顯影後的感光性著色組成物層供給沖洗液來進行為較佳。又,藉由使吐出沖洗液之噴嘴從支撐體的中心部向支撐體的周緣部移動來進行亦為較佳。此時,在從噴嘴的支撐體中心部向周緣部移動時,可以在逐漸降低噴嘴的移動速度的同時使其移動。藉由以該種方式進行沖洗,能夠抑制沖洗的面內偏差。又,藉由從噴嘴的支撐體中心部向周緣部移動的同時逐漸降低支撐體的轉速亦可獲得相同的效果。The developing solution is preferably an alkaline aqueous solution (alkaline developing solution) obtained by diluting the alkaline agent with pure water. Examples of the alkaline agent include amine, ethylamine, diethylamine, dimethylethanolamine, diethylene glycolamine, diethanolamine, hydroxylamine, ethylenediamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, Tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, ethyltrimethylammonium hydroxide, benzyltrimethylammonium hydroxide, dimethylbis (2-hydroxyethyl) ammonium hydroxide, choline, Organic basic compounds such as pyrrole, piperidine, 1,8-diazabicyclo [5.4.0] -7-undecene or sodium hydroxide, potassium hydroxide, sodium carbonate, sodium bicarbonate, sodium silicate, Inorganic basic compounds such as sodium metasilicate. Regarding the alkali agent, a compound having a large molecular weight is preferable in terms of environmental aspects and safety aspects. The concentration of the alkaline agent in the alkaline aqueous solution is preferably 0.001 to 10% by mass, and more preferably 0.01 to 1% by mass. The developing solution may further include a surfactant. Examples of the surfactant include the aforementioned surfactants, and nonionic surfactants are preferred. From the standpoint of convenient transportation and storage, the developing solution can be temporarily prepared as a concentrated solution and diluted to a desired concentration when in use. The dilution ratio is not particularly limited, and can be set in a range of 1.5 to 100 times, for example. It is also preferable to wash (rinse) with pure water after development. The rinsing is preferably performed by supplying a rinsing liquid to the developed photosensitive colored composition layer while rotating the support on which the developed colored photosensitive composition layer is formed. Moreover, it is also preferable to carry out by moving the nozzle which discharges a rinse liquid from the center part of a support body to the peripheral part of a support body. At this time, when moving from the center portion of the support to the peripheral portion of the nozzle, the nozzle can be moved while gradually reducing the moving speed of the nozzle. By performing the rinsing in this manner, it is possible to suppress the in-plane variation of the rinsing. The same effect can also be obtained by gradually reducing the rotation speed of the support while moving from the center of the support to the peripheral portion of the nozzle.
顯影後,在實施乾燥之後進行加熱處理(後烘烤)為較佳。後烘烤為用於使硬化完全之顯影後的加熱處理,加熱溫度例如100~240℃為較佳,200~240℃為更佳。關於後烘烤,對顯影後的膜,能夠以成為上述條件之方式,利用加熱板或對流式烘箱(熱風循環式乾燥機)、高頻加熱器等加熱機構,以連續式或者間斷式進行。After development, it is preferable to perform heat treatment (post-baking) after drying. Post-baking is a heat treatment for developing after hardening is completed, and the heating temperature is, for example, preferably 100 to 240 ° C, and more preferably 200 to 240 ° C. As for the post-baking, the film after development can be performed in a continuous or discontinuous manner using heating means such as a hot plate or a convection oven (hot air circulation dryer), a high-frequency heater, and the like, so as to satisfy the above conditions.
能夠經上述製程形成圖案(像素)。製造具有2色以上的像素之濾色器時,將上述各製程反覆進行所期望的額色相數,藉此能夠製造具有複數種顏色的像素之濾色器。Patterns (pixels) can be formed through the above process. When manufacturing a color filter having pixels of two or more colors, each of the processes described above is repeated for the desired number of hue phases, whereby a color filter of pixels having a plurality of colors can be manufactured.
在此,作為本發明的濾色器之製造方法,以形成濾色器的像素時使用本發明的感光性組成物之態樣為中心進行說明,但本發明並不限定於該態樣。例如,本發明的感光性組成物亦能夠應用於隔離構成濾色器之各顏色的像素之黑色矩陣的形成。亦即,藉由進行上述各製程,能夠在支撐體上形成黑色矩陣(黑色圖案)。Here, as a method for manufacturing the color filter of the present invention, the description will be given focusing on the aspect of using the photosensitive composition of the present invention when forming the pixels of the color filter, but the present invention is not limited to this aspect. For example, the photosensitive composition of the present invention can also be applied to the formation of a black matrix that isolates pixels of each color constituting a color filter. That is, by performing each of the above processes, a black matrix (black pattern) can be formed on the support.
<濾色器>
接著,對本發明的濾色器進行說明。本發明的濾色器具有上述本發明的硬化膜。將本發明的硬化膜用於濾色器時,本發明的硬化膜包含彩色著色劑為較佳。亦即,本發明的硬化膜係使用包含彩色著色劑之感光性組成物而形成者為較佳。在本發明的濾色器中,本發明的硬化膜的膜厚能夠依目的適當地調整。膜厚為20μm以下為較佳,10μm以下為更佳,5μm以下為進一步較佳。膜厚的下限為0.1μm以上為較佳,0.2μm以上為更佳,0.3μm以上為進一步較佳。本發明的濾色器能夠用於CCD(電荷耦合元件)或CMOS(互補金屬氧化膜半導體)等固體攝像元件或圖像顯示裝置等。< Color filter >
Next, a color filter of the present invention will be described. The color filter of the present invention includes the cured film of the present invention described above. When the cured film of the present invention is used for a color filter, the cured film of the present invention preferably contains a coloring agent. That is, it is preferable that the cured film of this invention is formed using the photosensitive composition containing a coloring agent. In the color filter of the present invention, the film thickness of the cured film of the present invention can be appropriately adjusted according to the purpose. The film thickness is preferably 20 μm or less, more preferably 10 μm or less, and even more preferably 5 μm or less. The lower limit of the film thickness is preferably 0.1 μm or more, more preferably 0.2 μm or more, and more preferably 0.3 μm or more. The color filter of the present invention can be used for a solid-state imaging element such as a CCD (Charge Coupled Element) or a CMOS (Complementary Metal Oxide Film Semiconductor) or an image display device.
<固體攝像元件>
本發明的固體攝像元件具有上述本發明的硬化膜。作為本發明的固體攝像元件的結構,具備本發明的硬化膜,只要是作為固體攝像元件而發揮功能之結構,則無特別限定,例如可列舉如以下般結構。<Solid-state image sensor>
The solid-state imaging element of the present invention includes the cured film of the present invention. The structure of the solid-state imaging element of the present invention includes the cured film of the present invention and is not particularly limited as long as it functions as a solid-state imaging element, and examples thereof include the following structures.
該結構如下:在基板上具有由構成固體攝像元件(CCD(電荷耦合元件)影像感測器、CMOS(互補金屬氧化膜半導體)影像感測器等)的受光區域之複數個二極體及多晶矽等構成之傳輸電極,在二極體及傳輸電極上具有僅二極體的受光部開口之遮光膜,在遮光膜上具有由以覆蓋遮光膜整面及二極體受光部的方式形成之氮化矽等構成之元件保護膜,在元件保護膜上具有濾色器。進而,亦可以為在元件保護膜上且濾色器之下(接近於基板之一側)具有聚光機構(例如,微透鏡等。以下相同)之結構或在濾色器上具有聚光機構之結構等。
又,濾色器可具有如下結構:在藉由隔壁例如以方格狀隔開之空間嵌入有各著色像素之結構。此時的隔壁係相對於各著色像素為低折射率為較佳。作為具有該種結構之攝像裝置的例,可列舉日本特開2012-227478號公報、日本特開2014-179577號公報中所記載之裝置。具備了本發明的固體攝像元件之攝像裝置,除了數位相機或具有攝像機能之電子設備(移動電話等)以外,能夠用作車載攝像機或監控攝像機用。The structure is as follows: there are a plurality of diodes and polycrystalline silicon on a substrate, which are composed of a light-receiving area of a solid-state imaging element (a CCD (Charge Coupled Device) image sensor, a CMOS (Complementary Metal Oxide Film Semiconductor) image sensor, and the like). The transmission electrode having the same structure has a light-shielding film having only the light-receiving portion of the diode on the diode and the transmission electrode. The light-shielding film has nitrogen formed so as to cover the entire surface of the light-shielding film and the light-receiving portion of the diode. An element protection film made of silicon and the like has a color filter on the element protection film. Furthermore, it is also possible to have a structure having a light-concentrating mechanism (for example, a micro lens, etc. below) on the element protective film and below the color filter (close to one side of the substrate) or a light-concentrating mechanism on the color filter. The structure, etc.
The color filter may have a structure in which each colored pixel is embedded in a space separated by a partition, for example, in a grid pattern. It is preferable that the partition wall system has a low refractive index with respect to each colored pixel. Examples of the imaging device having such a structure include the devices described in Japanese Patent Application Laid-Open No. 2012-227478 and Japanese Patent Application Laid-Open No. 2014-179577. The imaging device provided with the solid-state imaging element of the present invention can be used as a vehicle-mounted camera or a surveillance camera in addition to a digital camera or an electronic device (mobile phone, etc.) having a camera function.
<圖像顯示裝置>
本發明的圖像顯示裝置具有上述本發明的硬化膜。作為圖像顯示裝置,可列舉液晶顯示裝置和有機電致發光顯示裝置等。關於圖像顯示裝置的定義和各圖像顯示裝置的詳細內容,例如記載於“電子顯示器設備(佐佐木昭夫著、Kogyo Chosakai Publishing Co.,Ltd. 1990年發行)”、“顯示器設備(伊吹順章著、Sanyo Tosho Publishing Co.,Ltd. 1989年發行)”等。又,關於液晶顯示裝置,例如記載於“下一代液晶顯示器技術(內田龍男編輯、(株)工業調査會,1994年發行)”中。能夠適用本發明之液晶顯示裝置並無特別限制,例如能夠適用於上述“下一代液晶顯示器技術”中記載之各種方式的液晶顯示裝置。
[實施例]<Image display device>
An image display device of the present invention includes the cured film of the present invention described above. Examples of the image display device include a liquid crystal display device and an organic electroluminescence display device. Definitions of image display devices and details of each image display device are described in, for example, "Electronic display equipment (by Sasaki Akio, Kogyo Chosakai Publishing Co., Ltd. 1990)", "Display equipment (Ibuki Junaki Author, Sanyo Tosho Publishing Co., Ltd. (issued in 1989) "and so on. The liquid crystal display device is described in, for example, "Next-generation liquid crystal display technology (edited by Uchida Ryuo, Industrial Survey Association, 1994). The liquid crystal display device to which the present invention can be applied is not particularly limited. For example, the liquid crystal display device can be applied to various types of liquid crystal display devices described in the "next-generation liquid crystal display technology" described above.
[Example]
以下藉由實施例來進一步具體地說明本發明,本發明只要不脫離本發明的宗旨,則並不限定於以下實施例。又,結構式中的Me表示甲基,Et表示乙基,Bu表示丁基,Ph表示苯基。Hereinafter, the present invention will be described in more detail through examples. The present invention is not limited to the following examples as long as they do not depart from the gist of the present invention. In the structural formula, Me represents a methyl group, Et represents an ethyl group, Bu represents a butyl group, and Ph represents a phenyl group.
以下各試驗例中所使用之光聚合起始劑為下述結構的化合物。以下化合物中,OX-1~OX-21為本發明之環狀肟化合物(環狀肟化合物A)。又,OX-R1~OX-R4為比較化合物。The photopolymerization initiator used in each of the following test examples is a compound having the following structure. Among the following compounds, OX-1 to OX-21 are cyclic oxime compounds (cyclic oxime compound A) of the present invention. OX-R1 to OX-R4 are comparative compounds.
(本發明之環狀肟化合物)
[化學式41]
(Cyclic oxime compound of the present invention)
[Chemical Formula 41]
(比較化合物)
[化學式42]
(Comparative compound)
[Chemical Formula 42]
[試驗例1]
(實施例1-1)
混合作為光聚合起始劑的0.08mmol化合物OX-1、作為聚合性化合物的1g新戊四醇四丙烯酸酯、作為黏合劑樹脂的1g聚甲基丙烯酸甲酯(Aldrich公司製、重量平均分子量=996000)、作為溶劑的16g環己酮,從而製備了實施例1-1的感光性組成物。利用旋塗法將所得到之感光性組成物塗佈於玻璃基板上,在40℃下乾燥10分鐘,形成了1.5μm的膜厚的塗膜。在該塗膜上放置格片數21段(Kodak Japan Ltd.製)的灰度膜,使用曝光機(USHIO INC.製、“UVC-2534/1MNLC3-AA08”、120W/cm2
金屬鹵化物燈1燈)照射集成光量300mJ/cm2
的紫外線之後,浸漬於甲苯中60秒鐘,進行了顯影處理。作為靈敏度,評價了將對應於格片數之完全硬化而不溶化之段數,其結果靈敏度為6段。另外,關於靈敏度,數字越大,表示靈敏度越高。[Test Example 1]
(Example 1-1)
0.08 mmol of compound OX-1 as a photopolymerization initiator, 1 g of neopentaerythritol tetraacrylate as a polymerizable compound, and 1 g of polymethylmethacrylate (manufactured by Aldrich, weight average molecular weight = 996000) and 16 g of cyclohexanone as a solvent, thereby preparing the photosensitive composition of Example 1-1. The obtained photosensitive composition was applied to a glass substrate by a spin coating method, and dried at 40 ° C. for 10 minutes to form a coating film having a film thickness of 1.5 μm. A gray film of 21 steps (manufactured by Kodak Japan Ltd.) was placed on the coating film, and an exposure machine (manufactured by USHIO INC., "UVC-2534 / 1MNLC3-AA08", 120W / cm 2 metal halide lamp) was used. 1 lamp) After irradiating ultraviolet rays with an integrated light amount of 300 mJ / cm 2 , it was immersed in toluene for 60 seconds, and developed. As the sensitivity, the number of segments that completely hardened but did not dissolve corresponding to the number of cells was evaluated. As a result, the sensitivity was 6 segments. As for the sensitivity, the larger the number, the higher the sensitivity.
(實施例1-2~1-21、比較例1-1~1-4)
實施例1-1中,分別將作為光聚合起始劑的0.08mmol化合物OX-1代替為0.08mmol下述表中記載的化合物,除此以外,以與實施例1-1完全相同的操作製備了實施例1-2~1-21、比較例1-1~1-4的感光性組成物,與實施例1-1同樣地評價了靈敏度段數。將實施例1-2~1-21、及比較例1-1~1-4的評價結果與實施例1-1的評價結果一併示於下述表中。
[表1]
In Example 1-1, 0.08 mmol of the compound OX-1, which is a photopolymerization initiator, was replaced with 0.08 mmol of the compound described in the following table, and the preparation was performed in exactly the same manner as in Example 1-1. The photosensitive compositions of Examples 1-2 to 1-21 and Comparative Examples 1-1 to 1-4 were evaluated, and the number of sensitivity steps was evaluated in the same manner as in Example 1-1. The evaluation results of Examples 1-2 to 1-21 and Comparative Examples 1-1 to 1-4 and the evaluation results of Example 1-1 are shown in the following table.
[Table 1]
如上述表所示,實施例的感光性組成物的靈敏度高於比較例的感光性組成物的靈敏度。As shown in the above table, the sensitivity of the photosensitive composition of the example is higher than that of the photosensitive composition of the comparative example.
[試驗例2]
(分散液的製備)
分別以下述表中記載的質量份混合下述表中記載的原料,進而加入230質量份直徑0.3mm的氧化鋯微珠,使用珠磨(附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製))混合及分散3小時,從而製備了各分散液。[Test Example 2]
(Preparation of dispersion)
Each of the raw materials described in the following table was mixed with the mass parts described in the following table, and 230 parts by mass of zirconia microspheres with a diameter of 0.3 mm were added, and a bead mill (high-pressure disperser NANO-3000-10 with a pressure reducing mechanism ( (Manufactured by Nippon BEE Co., Ltd.)) were mixed and dispersed for 3 hours to prepare each dispersion.
[表2]
用於製造各分散液之原料如下所示。The raw materials used to make each dispersion are shown below.
(色材)
PR254:C.I.顏料紅254(紅色顏料)
PR264:C.I.顏料紅264(紅色顏料)
PY139:C.I.顏料黃139(黃色顏料)
PY150:C.I.顏料黃150(黃色顏料)
PY185:C.I.顏料黃185(黃色顏料)
PG36:C.I.顏料綠36(綠色顏料)
PG58:C.I.顏料綠58(綠色顏料)
PB15:6:C.I.顏料藍15:6(藍色顏料)
PV23:C.I.顏料紫23(紫色顏料)(Color material)
PR254: CI Pigment Red 254 (red pigment)
PR264: CI Pigment Red 264 (red pigment)
PY139: CI Pigment Yellow 139 (yellow pigment)
PY150: CI Pigment Yellow 150 (yellow pigment)
PY185: CI Pigment Yellow 185 (yellow pigment)
PG36: CI Pigment Green 36 (green pigment)
PG58: CI Pigment Green 58 (green pigment)
PB15: 6: CI Pigment Blue 15: 6 (blue pigment)
PV23: CI Pigment Violet 23 (Purple Pigment)
Pc1:使用以下方法製造之鹵化鋅酞菁顏料(綠色顏料)
在40℃下混合硫醯氯(45.5質量份)、無水氯化鋁(54.5質量份)、氯化鈉(7質量份),加入了鋅酞菁顏料(15質量份)。向其滴加溴(35質量份),經19.5小時升溫至130℃並保持了1小時。之後,將反應混合物溶於水中,析出了鹵化鋅酞菁粗顏料。對該水性漿料進行過濾,在60℃的熱水中進行清洗,在1%硫酸水素鈉水進行清洗,在60℃的熱水中進行清洗,在90℃下進行乾燥,得到了2.7質量份的經純化之鹵化鋅酞菁粗顏料A。在雙臂型捏合機中準備經純化之鹵化鋅酞菁粗顏料A(1質量份)、經粉碎之氯化鈉(10質量份)、二乙二醇(1質量份),在100℃下混煉8小時。混練後溶於80℃的水(100質量份)中,攪拌1小時之後,進行過濾、熱水清洗、乾燥、粉碎,從而得到了鹵化鋅酞菁顏料。從質量分析與基於燒瓶燃燒離子色譜儀的鹵素含量分析,得出所得到之鹵化鋅酞菁顏料為平均組成ZnPcBr9.8
Cl3.1
H3.1
。另外,Pc為酞菁的縮寫。Pc1: Zinc halide phthalocyanine pigment (green pigment) manufactured by the following method
Thiochlorine (45.5 parts by mass), anhydrous aluminum chloride (54.5 parts by mass), and sodium chloride (7 parts by mass) were mixed at 40 ° C, and a zinc phthalocyanine pigment (15 parts by mass) was added. Bromine (35 parts by mass) was added dropwise thereto, and the temperature was raised to 130 ° C over 19.5 hours and maintained for 1 hour. Then, the reaction mixture was dissolved in water, and a zinc halide phthalocyanine crude pigment was precipitated. This aqueous slurry was filtered, washed in hot water at 60 ° C, washed in 1% sodium hydrosulfate water, washed in hot water at 60 ° C, and dried at 90 ° C to obtain 2.7 parts by mass Purified Zinc Halide Phthalocyanine Crude Pigment A. Prepare a purified zinc halide phthalocyanine crude pigment A (1 part by mass), pulverized sodium chloride (10 parts by mass), and diethylene glycol (1 part by mass) in a two-arm kneader at 100 ° C. Mix for 8 hours. After kneading, it was dissolved in water (100 parts by mass) at 80 ° C, and after stirring for 1 hour, it was filtered, washed with hot water, dried, and pulverized to obtain a zinc halide phthalocyanine pigment. From the mass analysis and the halogen content analysis based on the flask combustion ion chromatograph, the obtained zinc halide phthalocyanine pigment has an average composition of ZnPcBr 9.8 Cl 3.1 H 3.1 . In addition, Pc is an abbreviation for phthalocyanine.
PP1、PP2:下述結構的化合物(近紅外線吸收色素)
[化學式43]
PP1, PP2: Compounds of the following structure (near-infrared absorbing pigment)
[Chemical Formula 43]
IBk:Irgaphor Black(BASF公司製、黑色著色劑)
PBk32:C.I.顏料黑 32(黑色著色劑)
TTO-80A:氧化鈦(TTO-80A,Ishihara Sangyo Kaisha,Ltd.製,白色顏料)IBk: Irgaphor Black (black colorant manufactured by BASF)
PBk32: CI Pigment Black 32 (black colorant)
TTO-80A: Titanium oxide (TTO-80A, manufactured by Ishihara Sangyo Kaisha, Ltd., white pigment)
N-Ti:使用以下所示之方法製作之含氧氮化鈦的粒子(黑色顏料)。
含氧氮化鈦的粒子的製作中,使用了日本特開2005-343784號公報的0042段及圖1中所記載之裝置。具體而言,使用上述公報的圖1中的將放電容器1作為不銹鋼製真空腔室(FUKUSHIN KOGYO Co.,Ltd.製)之裝置(以下,稱為“奈米粒子製造裝置”。)製作了含氧氮化鈦的粒子。首先,藉由排氣泵對真空腔室內的空氣進行了排氣。接著,向真空腔室供給氦(He)氣(純度99.99%)及氬氣的混合氣體(標準狀態下之混合比50/50體積%)直至成為600托(79.99kPa)的壓力。作為奈米粒子製造裝置的放電電極,使用了將鎢成形加工成長度500mm、直徑12mm及中空口徑6mm的中空結構的棒狀者。放電電極的配置與日本特開2005-343784號公報的圖1相同。具體而言,將12個放電電極以每6個配置成2段。另外,上段與下段之間的距離設為約160mm。中空結構的放電電極與原材料供給裝置連接,使得能夠從放電電極的中空部分向真空腔室內供給原料氣體。一邊對各放電電極施加存在相位差之交流(電壓20~40V、電流70~100A),一邊使各放電電極的前端接觸之狀態下開始放電。產生電弧放電之後,以使各放電電極的前端分開之方式向外方移動,並設置於相鄰之放電電極的前端之間的距離成為5~10mm之位置,繼續進行電弧放電。進行15分鐘電弧放電之後,對原材料供給裝置的供給罐進行加溫,將原料氣體導入到真空腔室內。首先,以0.5氣壓導入了NH3
氣(液化銨ECOAN,Showa Denko Co.,Ltd.製造),以0.1氣壓導入了H2
氣(氫氣,SHOWA DENKO GASPRODUCTS CO.LTD.),並以0.4氣壓導入了Ar氣(氬氣,TAIYO NIPPON SANSO CORPORATION)。接著,將供給槽加溫到210℃,並從放電電極以600氣壓導入了TiCl4
氣體(TLT-1、TOHOTITANIUM CO.,LTD.製)。在導入TiCl4
氣之同時,使用粉末供給裝置TP-99010FDR(JEOL Ltd.製造),利用氮氣供給了硫微粉末(微粉硫325目(mesh),Tsurumi Chemical Industry Co.,Ltd.製)。以如下方式將供給量進行調整:將所獲得之含氧氮化鈦粒子中的、藉由X射線光電子能譜檢測之硫原子的質量基準的含量設為TE
(質量%),並將藉由熒光X射線分析檢測之硫原子的質量基準的含量設為TX
(質量%)之兩者的比(TE
/TX
)小於1.1。向真空腔室內導入1小時TiCl4
氣和混合有硫微粉末之氮氣之後,停止從交流電源施加電壓,從而停止了供給上述氣體。接著,回收了附著於真空腔室的內壁之粒子。接著,將所得到之粒子放入導入有將O2
含量及水分含量分別控制為100ppm以下之氮(N2
)氣之密閉容器內,靜置了24小時。使用減壓烘箱VAC-101P(ESPEC Corp.製)在200℃下對上述中所得到之粒子進行加熱,從而得到了含氧氮化鈦的粒子。另外,加熱中的減壓烘箱的內壓設為1.0×103
Pa。N-Ti: titanium oxynitride-containing particles (black pigment) produced by the method shown below.
In the production of titanium oxynitride-containing particles, the apparatus described in paragraph 042 of Japanese Patent Application Laid-Open No. 2005-343784 and the apparatus shown in FIG. 1 were used. Specifically, an apparatus (hereinafter, referred to as a “nanoparticle manufacturing apparatus”) using the discharge vessel 1 as a stainless steel vacuum chamber (manufactured by FUKUSHIN KOGYO Co., Ltd.) in FIG. 1 of the above publication was used. Particles containing titanium oxynitride. First, the air in the vacuum chamber was exhausted by an exhaust pump. Next, a mixed gas of helium (He) gas (purity 99.99%) and argon gas (mixing ratio 50/50% by volume in the standard state) was supplied to the vacuum chamber until the pressure became 600 Torr (79.99kPa). As the discharge electrode of the nanoparticle manufacturing apparatus, a rod-shaped one having a hollow structure of 500 mm in length, 12 mm in diameter, and 6 mm in hollow diameter was used for forming tungsten. The arrangement of the discharge electrodes is the same as that shown in FIG. 1 of Japanese Patent Application Laid-Open No. 2005-343784. Specifically, twelve discharge electrodes are arranged in two sections every six. The distance between the upper and lower stages is set to approximately 160 mm. The discharge electrode of the hollow structure is connected to the raw material supply device, so that the raw material gas can be supplied into the vacuum chamber from the hollow portion of the discharge electrode. While applying an alternating current (voltage 20 to 40 V, current 70 to 100 A) with a phase difference to each discharge electrode, discharge was started with the tip of each discharge electrode in contact. After the arc discharge is generated, the front ends of the respective discharge electrodes are moved apart, and the distance between the front ends of the adjacent discharge electrodes is set to be 5 to 10 mm, and the arc discharge is continued. After the arc discharge was performed for 15 minutes, the supply tank of the raw material supply device was heated, and the raw material gas was introduced into the vacuum chamber. First, NH 3 gas (liquefied ammonium ECOAN, manufactured by Showa Denko Co., Ltd.) was introduced at 0.5 atmosphere, H 2 gas (hydrogen, SHOWA DENKO GASPRODUCTS CO.LTD.) Was introduced at 0.1 atmosphere, and 0.4 atmosphere was introduced. Ar gas (Argon, TAIYO NIPPON SANSO CORPORATION). Next, the supply tank was heated to 210 ° C., and TiCl 4 gas (TLT-1, manufactured by TOHOTITANIUM CO., LTD.) Was introduced from the discharge electrode at 600 atmospheres. While introducing TiCl 4 gas, a powder supply device TP-99010FDR (manufactured by JEOL Ltd.) was used to supply sulfur fine powder (fine powder sulfur 325 mesh, manufactured by Tsurumi Chemical Industry Co., Ltd.) using nitrogen. The supply amount was adjusted as follows: The content of the mass basis of the sulfur atom in the obtained titanium oxynitride-containing particles detected by X-ray photoelectron spectroscopy was set to T E (mass%), and The mass basis content of the sulfur atom detected by the fluorescent X-ray analysis is set to a ratio (T E / T X ) of both of T X (% by mass). After introducing TiCl 4 gas and nitrogen mixed with fine sulfur powder into the vacuum chamber for 1 hour, the application of voltage from the AC power supply was stopped, and the supply of the gas was stopped. Then, particles attached to the inner wall of the vacuum chamber were recovered. Next, the obtained particles were placed in a closed container in which nitrogen (N 2 ) gas was introduced to control the O 2 content and the moisture content to 100 ppm or less, and left to stand for 24 hours. The particles obtained in the above were heated at 200 ° C using a vacuum oven VAC-101P (manufactured by ESPEC Corp.) to obtain particles containing titanium oxynitride. The internal pressure of the reduced-pressure oven during heating was 1.0 × 10 3 Pa.
N-Zr:使用以下所示之方法製作之含氧窒化鋯的粒子(黑色顏料)
上述含氧氮化鈦的粒子的製造中,使用粉末供給裝置TP-99010FDR(JEOL Ltd.製)導入了鋯粉末(Wako Pure Chemical Industries, Ltd.製鋯粉末)來代替TiCl4
氣體的導入,除此以外,以與上述含氧氮化鈦的粒子相同的方法製造了含氧窒化鋯的粒子。N-Zr: oxygen-containing zirconium-containing particles (black pigment) produced by the method shown below
In the production of the titanium oxynitride-containing particles, a powder supply device TP-99010FDR (manufactured by JEOL Ltd.) was used to introduce zirconium powder (zirconium powder manufactured by Wako Pure Chemical Industries, Ltd.) instead of introducing TiCl 4 gas. Other than that, the particles containing oxygen-assisted zirconium were produced in the same manner as the particles containing titanium oxynitride.
N-V:使用以下所示之方法製作之含氧氮化釩的粒子(黑色顏料)
上述含氧氮化鈦的粒子的製造中,使用粉末供給裝置TP-99010FDR(JEOL Ltd.製)導入了釩粉末(TAIYO KOKO CO.,Ltd製金屬釩粉末VHO)來代替TiCl4
氣體的導入,除此以外,以與上述含氧氮化鈦的粒子相同的方法製造了含氧氮化釩的粒子。NV: Vanadium oxynitride-containing particles (black pigment) produced by the method shown below
In the production of the above titanium oxynitride-containing particles, a powder supply device TP-99010FDR (manufactured by JEOL Ltd.) was used to introduce vanadium powder (metal vanadium powder VHO manufactured by TAIYO KOKO CO., Ltd.) instead of introducing TiCl 4 gas. Other than that, particles containing vanadium oxynitride were produced in the same manner as the particles containing titanium oxynitride.
N-Nb:使用以下所示之方法製作之含氧氮化鈮的粒子(黑色顏料)。
上述含氧氮化鈦的粒子的製造中,使用粉末供給裝置TP-99010FDR(JEOL Ltd.製)導入了鈮粉末(Mitsuwa Chemicals Co.,Ltd製鈮粉末)來代替TiCl4
氣體的導入,除此以外,以與上述含氧氮化鈦的粒子相同的方法製造了含氧氮化鈮的粒子。N-Nb: Niobium oxynitride-containing particles (black pigment) produced by the method shown below.
In the production of the above-mentioned titanium oxynitride-containing particles, a powder supply device TP-99010FDR (manufactured by JEOL Ltd.) was used to introduce niobium powder (nitsu powder manufactured by Mitsuwa Chemicals Co., Ltd) instead of introducing TiCl 4 gas. Other than that, particles of niobium oxynitride were produced in the same manner as the particles of titanium oxynitride.
(顏料衍生物)
Syn1~4:下述結構的化合物
[化學式44]
(Pigment Derivatives)
Syn1 to 4: Compounds of the following structures
[Chemical Formula 44]
(有機溶劑)
PGMEA:丙二醇單甲醚乙酸酯(Organic solvents)
PGMEA: propylene glycol monomethyl ether acetate
(分散劑)
P-1:使用以下方法合成之樹脂p1的30質量%PGMEA(丙二醇單甲醚乙酸酯)溶液
向9.05質量份的多官能硫醇化合物(下述結構的化合物S-1)與90.95質量份的巨單體(下述結構的化合物MM-1、Mw=3000)的混合溶液加入丙二醇單甲醚乙酸酯(PGMEA),將固體成分濃度調整為63質量%之後,在氮氣氣流下加熱到75℃。接著,向該混合溶液加入0.4質量份的2,2’-偶氮雙(異丁酸)二甲酯(V-601、Wako Pure Chemical Industries, Ltd.製),加熱2小時之後,再次加入0.4質量份的2,2’-偶氮雙(異丁酸)二甲酯,在氮氣氣流下在90℃下反應了2小時。之後,冷卻到室溫(25℃、以下同樣)。接著,在氮氣氣流下,將76.93質量份的所得到之反應物與23.06質量份的具有乙烯性不飽和鍵基之單體(下述結構的化合物m-1)的混合溶液加熱到75℃。接著,向該混合溶液加入0.4質量份的2,2’-偶氮雙(異丁酸)二甲酯,加熱2小時之後,再次加入0.4質量份的2,2’-偶氮雙(異丁酸)二甲酯,在氮氣氣流下在90℃下反應了2小時。之後,冷卻到室溫之後,向混合溶液加入PGMEA,將固體成分濃度調整為30質量%,從而得到了樹脂p1的30質量%PGMEA溶液。樹脂p1的重量平均分子量(Mw)為11000,分散度(Mw/Mn)為1.8,酸值為75mgKOH/g,還元黏度為11ml/gs。
[化學式45]
(Dispersant)
P-1: 30 mass% PGMEA (propylene glycol monomethyl ether acetate) solution of resin p1 synthesized by the following method to 9.05 parts by mass of a polyfunctional thiol compound (compound S-1 of the following structure) and 90.95 parts by mass Propylene glycol monomethyl ether acetate (PGMEA) was added to a mixed solution of a macromonomer (compound MM-1, Mw = 3000 with the following structure), and the solid content concentration was adjusted to 63% by mass, and then heated to 75 ° C. Next, 0.4 part by mass of 2,2'-azobis (isobutyric acid) dimethyl ester (V-601, manufactured by Wako Pure Chemical Industries, Ltd.) was added to the mixed solution, and after heating for 2 hours, 0.4 was added again. Mass parts of 2,2'-azobis (isobutyric acid) dimethyl ester were reacted at 90 ° C for 2 hours under a nitrogen gas flow. After that, it was cooled to room temperature (25 ° C, the same applies below). Next, a mixed solution of 76.93 parts by mass of the obtained reactant and 23.06 parts by mass of a monomer having an ethylenically unsaturated bond group (compound m-1 of the following structure) was heated to 75 ° C. under a nitrogen gas stream. Next, 0.4 part by mass of 2,2'-azobis (isobutyric acid) dimethyl was added to the mixed solution, and after heating for 2 hours, 0.4 part by mass of 2,2'-azobis (isobutyl) was added again. The dimethyl acid) was reacted at 90 ° C for 2 hours under a stream of nitrogen. Then, after cooling to room temperature, PGMEA was added to the mixed solution, and the solid content concentration was adjusted to 30% by mass, thereby obtaining a 30% by mass PGMEA solution of the resin p1. The weight average molecular weight (Mw) of the resin p1 was 11,000, the dispersion (Mw / Mn) was 1.8, the acid value was 75 mgKOH / g, and the reduction viscosity was 11 ml / gs.
[Chemical Formula 45]
P-2:下述結構的樹脂的30質量%PGMEA溶液(附記到主鏈上之數值為莫耳比,附記到側鏈之數值為重複單元的數。Mw=17000、分散度(Mw/Mn)=4.2、酸值=75mgKOH/g、還元黏度=12.5ml/g)。
[化學式46]
P-2: 30% by mass PGMEA solution of the resin of the following structure (the value attached to the main chain is the mole ratio, and the value attached to the side chain is the number of repeating units. Mw = 17000, dispersion (Mw / Mn ) = 4.2, acid value = 75mgKOH / g, viscosity reduction = 12.5ml / g).
[Chemical Formula 46]
P-3:下述結構的樹脂的30質量%PGMEA溶液(附記到主鏈上之數值為莫耳比,附記到側鏈之數值為重複單元的數。Mw=7950)
[化學式47]
P-4:下述結構的樹脂的30質量%PGMEA溶液(附記到主鏈上之數值為莫耳比。Mw=12000)
[化學式48]
P-5:下述結構的樹脂的PGMEA30質量%溶液(附記到主鏈上之數值為莫耳比,附記到側鏈之數值為重複單元的數。Mw=30000)
[化學式49]
P-3: 30% by mass PGMEA solution of the resin of the following structure (the value attached to the main chain is the mole ratio, and the value attached to the side chain is the number of repeating units. Mw = 7950)
[Chemical Formula 47]
P-4: 30% by mass PGMEA solution of the resin of the following structure (the value attached to the main chain is the molar ratio. Mw = 12000)
[Chemical Formula 48]
P-5: PGMEA 30% by mass solution of the resin with the following structure (the value attached to the main chain is the mole ratio, and the value attached to the side chain is the number of repeating units. Mw = 30000)
[Chemical Formula 49]
<感光性組成物的製造>
混合下述表中記載的原料,分別製造了實施例及比較例的感光性組成物。
[表3]
[表4]
The raw materials shown in the following table were mixed, and the photosensitive compositions of Examples and Comparative Examples were produced.
[table 3]
[Table 4]
組成物的製造中所使用之原料為如下所述。The raw materials used in the production of the composition are as follows.
(樹脂)
E1:下述結構的樹脂。(附記到主鏈上之數值為莫耳比。Mw=10,000、酸值=70mgKOH/g)
E2:下述結構的樹脂。(附記到主鏈上之數值為莫耳比。Mw=10,000、酸值=70mgKOH/g)
E3:下述結構的樹脂。(附記到主鏈上之數值為莫耳比。Mw=40,000、酸值=100mgKOH/g)
[化學式50]
(Resin)
E1: Resin of the following structure. (The value attached to the main chain is the mole ratio. Mw = 10,000, acid value = 70mgKOH / g)
E2: Resin of the following structure. (The value attached to the main chain is the mole ratio. Mw = 10,000, acid value = 70mgKOH / g)
E3: Resin of the following structure. (The value attached to the main chain is the mole ratio. Mw = 40,000, acid value = 100mgKOH / g)
[Chemical Formula 50]
(聚合性化合物)
D1:KAYARAD RP-1040(Nippon Kayaku Co.,Ltd.製、自由基聚合性化合物)
D2:ARONIX TO-2349(TOAGOSEI CO.,LTD.製、自由基聚合性化合物)
D3:ARONIX M-305(TOAGOSEI CO.,LTD.製、自由基聚合性化合物)
D4:NK ESTER A-TMMT(Shin-Nakamura Chemical Co.,Ltd.製、自由基聚合性化合物)
D5:KAYARAD DPHA(Nippon Kayaku Co.,Ltd.製、自由基聚合性化合物)(Polymerizable compound)
D1: KAYARAD RP-1040 (Nippon Kayaku Co., Ltd., a radical polymerizable compound)
D2: ARONIX TO-2349 (manufactured by TOAGOSEI CO., LTD., A radical polymerizable compound)
D3: ARONIX M-305 (manufactured by TOAGOSEI CO., LTD., A radical polymerizable compound)
D4: NK ESTER A-TMMT (free radical polymerizable compound manufactured by Shin-Nakamura Chemical Co., Ltd.)
D5: KAYARAD DPHA (Nippon Kayaku Co., Ltd., a radical polymerizable compound)
(光聚合起始劑)
OX-1~OX-21、OX-R1~OX-R4:上述之結構的化合物
I-1:IRGACURE-369(BASF公司製,α-胺基烷基苯酮化合物)(Photopolymerization initiator)
OX-1 to OX-21, OX-R1 to OX-R4: compounds of the above structure
I-1: IRGACURE-369 (manufactured by BASF, α-amino alkyl phenone compound)
(有機溶劑)
J1:丙二醇單甲醚乙酸酯(PGMEA)
J2:環己酮
J3:丙二醇單甲醚(PGME)
J4:乙酸丁酯
J5:乳酸乙酯(Organic solvents)
J1: Propylene glycol monomethyl ether acetate (PGMEA)
J2: Cyclohexanone
J3: Propylene glycol monomethyl ether (PGME)
J4: Butyl acetate
J5: ethyl lactate
(其他添加劑)
[紫外線吸收劑]
UV1:UV-503(DAITO CHEMICAL CO.,LTD.製)
UV2:下述結構的化合物
[化學式51]
(Other additives)
[Ultraviolet absorbent]
UV1: UV-503 (manufactured by DAITO Chemical Co., Ltd.)
UV2: Compound of the following structure
[Chemical Formula 51]
[界面活性劑]
F1:下述混合物(Mw=14000、氟系界面活性劑)。下述式中,表示重複單元的比例之%為質量%。
[化學式52]
[Interactive agent]
F1: The following mixture (Mw = 14000, fluorine-based surfactant). In the following formula,% representing the proportion of the repeating unit is mass%.
[Chemical Formula 52]
[聚合抑制劑]
G1:p-甲氧基苯酚
[抗氧化劑]
AO1:ADK STAB AO-80(ADEKA Corporation製)[Polymerization inhibitor]
G1: p-methoxyphenol
[Antioxidants]
AO1: ADK STAB AO-80 (manufactured by ADEKA Corporation)
[敏化劑]
Z1~Z3:下述結構的化合物
[化學式53]
[Sensitizer]
Z1 to Z3: Compounds of the following structures
[Chemical Formula 53]
[近紅外線吸收色素]
A5、A8、A12:下述結構的化合物
[化學式54]
[Near-infrared absorbing pigment]
A5, A8, A12: Compounds of the following structure
[Chemical Formula 54]
<評價>
使用如上述那樣得到之各感光性組成物,進行了以下評價。< Evaluation >
The following evaluations were performed using each photosensitive composition obtained as described above.
(保存穩定性(經時穩定性)的評價)
將上述中所得到之各感光性組成物加入到玻璃容器而進行密封,在50℃下保存1個月之後,回到室溫,評價下述靈敏度評價的經時變動的程度,按照下述判定基準評價了保存穩定性。
-判定基準-
A:小於10mJ/cm2
的靈敏度變動。
B:10mJ/cm2
以上且小於50mJ/cm2
的靈敏度變動。
C:50mJ/cm2
以上的靈敏度變動。(Evaluation of storage stability (stability over time))
Each photosensitive composition obtained in the above was placed in a glass container and sealed, and after being stored at 50 ° C for one month, the temperature was returned to room temperature, and the degree of time-dependent change in the sensitivity evaluation described below was evaluated. The benchmark evaluated storage stability.
-Judgment criteria-
A: Changes in sensitivity less than 10 mJ / cm 2 .
B: Sensitivity change of 10 mJ / cm 2 or more and less than 50 mJ / cm 2 .
C: Sensitivity change of 50 mJ / cm 2 or more.
(靈敏度的評價)
使用旋轉塗佈機將各感光性組成物塗佈於矽晶圓上,接著,使用加熱板在100℃下進行加熱(預烘烤)120秒鐘,得到了膜厚為1.0μm的塗膜。
接著,使用i射線步進機曝光裝置FPA-3000iS+(Canon Inc.製),經由刻有10nm的線與空間的圖案之遮罩,以10mJ/cm2
刻度改變50~1000mJ/cm2
的範圍的曝光量而進行了照射(曝光製程)。接著,使用氫氧化四甲基銨(TMAH)0.3%水溶液,在23℃下進行旋覆浸沒顯影60秒鐘,之後,使用純水用旋轉噴淋進行沖洗20秒鐘,進而用純水進行了水洗。之後,用空氣去除附著於圖案表面之水滴而使圖案自然乾燥,從而得到了圖案。
關於靈敏度的評價,測量在上述曝光製程中照射光之領域的顯影後的膜厚相對於曝光前的膜厚100%為95%以上時的最少曝光量(最適曝光量),將其作為靈敏度而進行了評價。上述最少曝光量(最適曝光量)的值越小,表示靈敏度越高。(Evaluation of sensitivity)
Each photosensitive composition was coated on a silicon wafer using a spin coater, and then heated (pre-baked) at 100 ° C. for 120 seconds using a hot plate to obtain a coating film having a film thickness of 1.0 μm.
Next, an i-ray stepper exposure device FPA-3000iS + (manufactured by Canon Inc.) was used to change the range of 50 to 1000 mJ / cm 2 at a scale of 10 mJ / cm 2 through a mask engraved with a 10 nm line and space pattern. The exposure amount was irradiated (exposure process). Next, a 0.3% aqueous solution of tetramethylammonium hydroxide (TMAH) was used for spin-immersion development at 23 ° C for 60 seconds, and then rinsed with pure water for 20 seconds using a spin shower, and further purified water was used Washed. After that, the water droplets adhering to the surface of the pattern were removed by air, and the pattern was naturally dried to obtain a pattern.
Regarding the evaluation of sensitivity, the minimum exposure amount (optimal exposure amount) when the film thickness after development with respect to 100% of the film thickness before exposure in the above-mentioned exposure process is measured and measured as the sensitivity is measured as the sensitivity. Commented. The smaller the value of the minimum exposure amount (the optimal exposure amount) is, the higher the sensitivity is.
(顯影性的評價)
使用旋轉塗佈機將各感光性組成物塗佈於矽晶圓上,接著,使用加熱板在100℃下進行加熱(預烘烤)120秒鐘,得到了膜厚為1.0μm的塗膜。
接著,使用i射線步進機曝光裝置FPA-3000iS+(Canon Inc.製),經由刻有10nm的線與空間的圖案之遮罩,以400mJ/cm2
的曝光量進行了曝光。接著,使用氫氧化四甲基銨(TMAH)0.3%水溶液,在23℃下進行旋覆浸沒顯影60秒鐘,之後,使用純水用旋轉噴淋進行沖洗20秒鐘,進而用純水進行了水洗。之後,用空氣去除附著於圖案表面之水滴而使圖案自然乾燥,得到了圖案。
使用SEM(Scanning Electron Microscope(掃描電子顯微鏡)、倍率:20000倍)觀察形成有圖案之矽晶圓,從SEM照片觀察未照射光之區域(未曝光部)中的殘渣的有無,並評價了顯影性。評價基準為如下。
-評價基準-
A:未曝光部中完全沒有確認到殘渣。
B:未曝光部中稍微確認到殘渣,但是實用上沒有問題的程度。
C:未曝光部中明顯確認到殘渣。(Evaluation of developability)
Each photosensitive composition was coated on a silicon wafer using a spin coater, and then heated (pre-baked) at 100 ° C. for 120 seconds using a hot plate to obtain a coating film having a film thickness of 1.0 μm.
Next, exposure was performed using an i-ray stepper exposure device FPA-3000iS + (manufactured by Canon Inc.) through a mask engraved with a pattern of lines and spaces of 10 nm at an exposure amount of 400 mJ / cm 2 . Next, a 0.3% aqueous solution of tetramethylammonium hydroxide (TMAH) was used for spin-immersion development at 23 ° C for 60 seconds, and then rinsed with pure water for 20 seconds using a spin shower, and further purified water was used. Washed. Then, the water droplets adhering to the surface of the pattern were removed by air, and the pattern was naturally dried to obtain a pattern.
The patterned silicon wafer was observed using a SEM (Scanning Electron Microscope, magnification: 20000 times), and the presence or absence of residues in the unirradiated area (unexposed area) was observed from the SEM photograph, and development was evaluated. Sex. The evaluation criteria are as follows.
-Evaluation criteria-
A: No residue was recognized at all in the unexposed portion.
B: Residue was slightly confirmed in the unexposed portion, but there was no problem in practical use.
C: Residue was clearly recognized in the unexposed portion.
(密接性的評價)
以與顯影性的評價相同的順序形成了圖案。使用SEM(Scanning Electron Microscope、倍率:20000倍)觀察所得到之圖案,從SEM照片觀察圖案缺損的有無,並評價了密接性。評價基準為如下。
-評價基準-
A:完全觀察不到圖案缺損。
B:幾乎觀察不到圖案缺損,但是僅觀察到一部分缺損。實用上沒有問題的程度。
C:顯著地觀察到較多的圖案缺損。(Evaluation of tightness)
A pattern was formed in the same procedure as the evaluation of developability. The obtained pattern was observed using a SEM (Scanning Electron Microscope, magnification: 20000 times), the presence or absence of pattern defects was observed from the SEM photograph, and adhesion was evaluated. The evaluation criteria are as follows.
-Evaluation criteria-
A: No pattern defect was observed at all.
B: Pattern defects are scarcely observed, but only part of the defects are observed. There is no problem in practical terms.
C: Significantly more pattern defects were observed.
<後烘烤後的著色的評價>
以與顯影性的評價相同的順序形成了圖案。使用加熱板,在200℃下對所得到之圖案進行加熱1小時,依據下述基準,使用Otsuka Electronics Co.,Ltd.製MCPD-3000評價了後烘烤前後的色差ΔEab*。
-評價基準-
A:ΔEab*≤5
B:5<ΔEab*<8
C:ΔEab*≥8< Evaluation of color after post-baking >
A pattern was formed in the same procedure as the evaluation of developability. The obtained pattern was heated at 200 ° C. for 1 hour using a hot plate, and the color difference ΔEab * before and after post-baking was evaluated using MCPD-3000 manufactured by Otsuka Electronics Co., Ltd. according to the following criteria.
-Evaluation criteria-
A: ΔEab * ≤5
B: 5 <ΔEab * <8
C: ΔEab * ≥8
<圖案截面形狀1(後烘烤前的圖案形狀)>
以與顯影性的評價相同的順序形成了圖案。使用SEM(Scanning Electron Microscope、倍率:20000倍)觀察所得到之圖案的截面形狀,從SEM照片抽出5個圖案,求出5個圖案的截面的平均斜率並由以下基準評價了圖案截面形狀1。另外,圖案的截面的斜率為形成有圖案之部分中的矽晶圓上的圖案的厚度方向的斜率。具體而言,測量了由矽晶圓的表面與圖案的厚度方向的邊構成之部分的角度。圖案的斜率相對於矽晶圓的表面小於90度的情況係指圖案從矽晶圓側朝向圖案的表面側變細(正錐形狀)。
-評價基準-
A:5個圖案的平均斜率相對於矽晶圓為80度以上且小於100度。
B:5個圖案的平均斜率相對於矽晶圓大於100度。
C:5個圖案的平均斜率相對於矽晶圓小於80度。<Pattern section shape 1 (pattern shape before post-baking)>
A pattern was formed in the same procedure as the evaluation of developability. The cross-sectional shape of the obtained pattern was observed using a SEM (Scanning Electron Microscope, magnification: 20000 times). Five patterns were extracted from the SEM photograph, and the average slope of the cross-sections of the five patterns was determined. The pattern cross-sectional shape 1 was evaluated based on the following criteria. The slope of the cross section of the pattern is the slope in the thickness direction of the pattern on the silicon wafer in the portion where the pattern is formed. Specifically, the angle of a portion composed of the surface of the silicon wafer and the edge in the thickness direction of the pattern was measured. When the slope of the pattern is less than 90 degrees with respect to the surface of the silicon wafer, it means that the pattern is tapered from the silicon wafer side toward the surface side of the pattern (forward cone shape).
-Evaluation criteria-
A: The average slope of the five patterns is 80 degrees or more and less than 100 degrees with respect to the silicon wafer.
B: The average slope of the five patterns is greater than 100 degrees with respect to the silicon wafer.
C: The average slope of the five patterns is less than 80 degrees with respect to the silicon wafer.
<圖案截面形狀2(後烘烤後的圖案形狀)>
以與顯影性的評價相同的順序形成了圖案。使用加熱板在200℃下對所得到之圖案加熱(後烘烤)5分鐘。關於後烘烤後的圖案,以與上述圖案截面形狀1相同的順序評價了圖案截面形狀2。
-評價基準-
A:5個圖案的平均斜率相對於矽晶圓為80度以上且小於100度。
B:5個圖案的平均斜率相對於矽晶圓大於100度。
C:5個圖案的平均斜率相對於矽晶圓小於80度。<Pattern section shape 2 (pattern shape after post-baking)>
A pattern was formed in the same procedure as the evaluation of developability. The obtained pattern was heated (post-baking) at 200 ° C for 5 minutes using a hot plate. Regarding the pattern after the post-baking, the pattern cross-sectional shape 2 was evaluated in the same order as the pattern cross-sectional shape 1 described above.
-Evaluation criteria-
A: The average slope of the five patterns is 80 degrees or more and less than 100 degrees with respect to the silicon wafer.
B: The average slope of the five patterns is greater than 100 degrees with respect to the silicon wafer.
C: The average slope of the five patterns is less than 80 degrees with respect to the silicon wafer.
[表5]
如上述表所示,實施例的感光性組成物的靈敏度高於比較例的感光性組成物的靈敏度。進而,能夠形成後烘烤後的著色亦少且矩形性良好的圖案。As shown in the above table, the sensitivity of the photosensitive composition of the example is higher than that of the photosensitive composition of the comparative example. Furthermore, it is possible to form a pattern with little coloring after post-baking and good rectangularity.
[試驗例3]
<濾色器用組成物的製備>
(Red組成物1)
將以下所示之原料混合並攪拌之後,利用孔徑0.45μm的尼龍製過濾器(NIHON PALL LTD.製)進行過濾,製備了Red組成物1。
Red顏料分散液……51.7質量份
樹脂1的40質量%PGMEA溶液……0.6質量份
聚合性化合物1……0.6質量份
光聚合起始劑(化合物OX-1)……0.3質量份
界面活性劑1的0.2質量%PGMEA溶液……4.2質量份
PGMEA……42.6質量份[Test Example 3]
<Preparation of composition for color filters>
(Red Composition 1)
The raw materials shown below were mixed and stirred, and then filtered through a nylon filter (manufactured by NIHON PALL LTD.) Having a pore diameter of 0.45 μm to prepare Red Composition 1.
Red pigment dispersion liquid ... 51.7 parts by mass of 40% by mass PGMEA solution of resin 1 ... 0.6 parts by mass of polymerizable compound 1 ... 0.6 parts by mass of photopolymerization initiator (compound OX-1) ... 0.3 parts by mass of surfactant 0.2 mass% PGMEA solution of 1 ... 4.2 mass parts
PGMEA ... 42.6 parts by mass
(Green組成物1)
將以下所示之原料混合並攪拌之後,利用孔徑0.45μm的尼龍製過濾器(NIHON PALL LTD.製)進行過濾,製備了Green組成物1。
Green顏料分散液……73.7質量份
樹脂1的40質量%PGMEA溶液……0.3質量份
聚合性化合物2……1.2質量份
光聚合起始劑(化合物OX-1)……0.6質量份
界面活性劑1的0.2質量%PGMEA溶液……4.2質量份
紫外線吸收劑1……0.5質量份
PGMEA……19.5質量份(Green composition 1)
The raw materials shown below were mixed and stirred, and then filtered through a nylon filter (manufactured by NIHON PALL LTD.) Having a pore diameter of 0.45 μm to prepare Green Composition 1.
Green pigment dispersion liquid ... 73.7 parts by mass of 40% by mass PGMEA solution of resin 1 ... 0.3 parts by mass of polymerizable compound 2 ... 1.2 parts by mass of photopolymerization initiator (compound OX-1) ... 0.6 parts by mass of surfactant 0.2 mass% PGMEA solution of 1 ... 4.2 mass parts of ultraviolet absorber 1 ... 0.5 mass parts
PGMEA ... 19.5 parts by mass
(Blue組成物1)
將以下所示之原料混合並攪拌之後,利用孔徑0.45μm的尼龍製過濾器(NIHON PALL LTD.製)進行過濾,製備了Blue組成物1。
Blue顏料分散液……44.9質量份
樹脂1的40質量%PGMEA溶液……2.1質量份
聚合性化合物1……1.5質量份
聚合性化合物3……0.7質量份
光聚合起始劑(化合物OX-1)……0.8質量份
界面活性劑1的0.2質量%PGMEA溶液……4.2質量份
PGMEA……45.8質量份(Blue composition 1)
The raw materials shown below were mixed and stirred, and then filtered through a nylon filter (manufactured by NIHON PALL LTD.) Having a pore diameter of 0.45 μm to prepare Blue Composition 1.
Blue pigment dispersion ... 44.9 parts by mass of 40% by mass PGMEA solution of resin 1 ... 2.1 parts by mass of polymerizable compound 1 ... 1.5 parts by mass of polymerizable compound 3 ... 0.7 parts by mass of photopolymerization initiator (compound OX-1 ) ... 0.8 parts by mass of 0.2% by mass of PGMEA solution of the surfactant 1 ... 4.2 parts by mass
PGMEA ... 45.8 parts by mass
用於濾色器用組成物之原料為以下。
Red顏料分散液
使用珠磨(氧化鋯微珠0.3mm直徑),將包括9.6質量份C.I.顏料紅 254、4.3質量份C.I.顏料黃139、6.8質量份分散劑(Disperbyk-161、BYK Chemie GmbH製)及79.3質量份PGMEA之混合液進行混合及分散了3小時。
然後進一步使用附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在2000kg/cm3
的壓力下以500g/min的流量進行了分散處理。反覆進行10次該分散處理,從而得到了Red顏料分散液。The raw materials used for the color filter composition are as follows.
The Red pigment dispersion uses a bead mill (0.3mm diameter of zirconia beads) and will include 9.6 parts by mass of CI Pigment Red 254, 4.3 parts by mass of CI Pigment Yellow 139, and 6.8 parts by mass of a dispersant (Disperbyk-161, manufactured by BYK Chemie GmbH). And 79.3 parts by mass of the PGMEA mixed solution were mixed and dispersed for 3 hours.
Then, using a high-pressure disperser NANO-3000-10 (manufactured by Nippon BEE Co., Ltd.) with a decompression mechanism, the dispersion treatment was performed at a flow rate of 500 g / min under a pressure of 2000 kg / cm 3 . This dispersion treatment was repeated 10 times to obtain a Red pigment dispersion.
Green顏料分散液
使用珠磨(氧化鋯微珠0.3mm直徑),將包含6.4質量份C.I.顏料綠 36、5.3質量份C.I.顏料黃 150、5.2質量份分散劑(Disperbyk-161、BYK Chemie GmbH製)及83.1質量份PGMEA之混合液進行了混合及分散3小時。然後進一步使用附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在2000kg/cm3
的壓力下以流量500g/min進行了分散處理。反覆進行10次該分散處理,從而得到了Green顏料分散液。The green pigment dispersion liquid uses a bead mill (0.3 mm diameter of zirconia microbeads), and contains 6.4 parts by mass of CI Pigment Green 36, 5.3 parts by mass of CI Pigment Yellow 150, and 5.2 parts by mass of a dispersant (manufactured by Disperbyk-161, BYK Chemie GmbH). And 83.1 parts by mass of the PGMEA mixed solution were mixed and dispersed for 3 hours. Then, using a high-pressure disperser NANO-3000-10 (manufactured by Nippon BEE Co., Ltd.) with a decompression mechanism, the dispersion treatment was performed at a flow rate of 500 g / min at a pressure of 2000 kg / cm 3 . This dispersion treatment was repeated 10 times to obtain a Green pigment dispersion.
Blue顏料分散液
使用珠磨(氧化鋯微珠0.3mm直徑),將包含9.7質量份C.I.顏料藍 15:6、2.4質量份C.I.顏料紫 23、5.5質量份分散劑(Disperbyk-161、BYK Chemie GmbH製)及82.4質量份PGMEA之混合液進行混合及分散3小時。然後進一步使用附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在2000kg/cm3
的壓力下以流量500g/min進行了分散處理。反覆進行10次該分散處理,從而得到了Blue顏料分散液。The Blue pigment dispersion uses a bead mill (0.3mm diameter of zirconia microbeads) and will contain 9.7 parts by mass of CI Pigment Blue 15: 6, 2.4 parts by mass of CI Pigment Violet 23, and 5.5 parts by mass of dispersant (Disperbyk-161, BYK Chemie GmbH Made) and 82.4 parts by mass of the PGMEA mixed solution were mixed and dispersed for 3 hours. Then, using a high-pressure disperser NANO-3000-10 (manufactured by Nippon BEE Co., Ltd.) with a decompression mechanism, the dispersion treatment was performed at a flow rate of 500 g / min at a pressure of 2000 kg / cm 3 . This dispersion treatment was repeated 10 times to obtain a Blue pigment dispersion.
聚合性化合物1:下述結構的化合物
[化學式55]
聚合性化合物2:上述聚合性化合物D5
聚合性化合物3:上述聚合性化合物D3Polymerizable compound 1: Compound of the following structure
[Chemical Formula 55]
Polymerizable compound 2: The aforementioned polymerizable compound D5
Polymerizable compound 3: The aforementioned polymerizable compound D3
樹脂1:上述樹脂E1
界面活性劑1:上述界面活性劑F1
紫外線吸收劑1:上述紫外線吸收劑UV1Resin 1: Resin E1 above
Surfactant 1: The aforementioned surfactant F1
Ultraviolet absorbent 1: The above-mentioned ultraviolet absorbent UV1
(濾色器的製作)
使用旋塗法將Green組成物1塗佈於矽晶圓上,以使後烘烤後的膜厚成為1.0μm。接著,使用加熱板在100℃下加熱(預烘烤)2分鐘。接著,使用i射線步進機曝光裝置FPA-3000i5+(Canon Inc.製),以400mJ/cm2
的曝光量經由具有1.0μm四方的Bayer圖案之遮罩進行了曝光。接著,使用氫氧化四甲銨(TMAH)0.3質量%水溶液,在23℃下進行了旋覆浸沒顯影60秒鐘。之後,使用旋轉噴淋進行沖洗,進而使用純水進行了水洗。接著,使用加熱板在200℃下加熱(後烘烤)5分鐘,形成了1.0μm四方的拜耳圖案的綠色像素(綠色圖案)。關於Red組成物1、Blue組成物1,亦以與Green組成物1的情況相同的順序依次進行圖案化,在矽晶圓上的綠色像素的缺失部分別形成1.0μm四方的島形圖案的紅色像素(紅色圖案)及1.0μm四方的島形圖案的藍色像素(青色圖案),從而製造了濾色器。將該濾色器組裝於固體攝像元件時,確認到該固體攝像元件為高解析度且色分離性優異。(Production of color filters)
The green composition 1 was applied on a silicon wafer by a spin coating method so that the film thickness after post-baking became 1.0 μm. Next, it was heated (pre-baked) at 100 ° C for 2 minutes using a hot plate. Next, exposure was performed using an i-ray stepper exposure device FPA-3000i5 + (manufactured by Canon Inc.) at a exposure amount of 400 mJ / cm 2 via a mask having a 1.0 μm square Bayer pattern. Next, spin-on immersion development was performed at 23 ° C. for 60 seconds using a 0.3% by mass aqueous solution of tetramethylammonium hydroxide (TMAH). After that, it was rinsed with a rotary shower, and then washed with pure water. Next, a green plate (green pattern) with a square Bayer pattern of 1.0 μm was formed by heating (post-baking) at 200 ° C. for 5 minutes using a hot plate. The Red composition 1 and the Blue composition 1 were sequentially patterned in the same order as in the case of the Green composition 1, and the missing portions of the green pixels on the silicon wafer were formed into 1.0 μm square island-shaped red patterns. The pixel (red pattern) and the blue pixel (cyan pattern) of a 1.0 μm square island pattern produced a color filter. When this color filter was assembled in a solid-state imaging device, it was confirmed that the solid-state imaging device has high resolution and excellent color separation properties.
Claims (19)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018073763 | 2018-04-06 | ||
| JP2018-073763 | 2018-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201944172A true TW201944172A (en) | 2019-11-16 |
Family
ID=68100553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW108110901A TW201944172A (en) | 2018-04-06 | 2019-03-28 | Photosensitive composition, cured film, method for manufacturing color filter, color filter, solid-state imaging element, and image display device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7072638B2 (en) |
| TW (1) | TW201944172A (en) |
| WO (1) | WO2019194136A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI899392B (en) * | 2020-12-24 | 2025-10-01 | 日商東京威力科創股份有限公司 | Estimation model creation device, estimation model creation method, and storage medium |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021166860A1 (en) * | 2020-02-20 | 2021-08-26 | 富士フイルム株式会社 | Photosensitive composition, film, optical filter, solid-state imaging element and image display device |
| JP7321115B2 (en) * | 2020-02-28 | 2023-08-04 | 富士フイルム株式会社 | On-machine development type lithographic printing plate precursor, method for preparing lithographic printing plate, and lithographic printing method |
| KR102834243B1 (en) * | 2021-02-26 | 2025-07-15 | 동우 화인켐 주식회사 | A photosensitive resin composition for forming partition wall, a partition wall structure prepared using the composition, and a display device comprising the partition wall structure |
| JP7781557B2 (en) * | 2021-07-30 | 2025-12-08 | 富士フイルム株式会社 | Photosensitive transfer material, light-shielding material, LED array, and electronic device |
| EP4644115A1 (en) * | 2023-04-04 | 2025-11-05 | Nippon Steel Corporation | Surface-treated steel sheet |
| WO2025164316A1 (en) * | 2024-01-30 | 2025-08-07 | 富士フイルム株式会社 | Photocurable composition, pixel manufacturing method, film, solid-state imaging element, image display device, and photopolymerization initiator |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007322744A (en) * | 2006-05-31 | 2007-12-13 | Fujifilm Corp | Colored photosensitive resin composition, photosensitive resin transfer material, color filter, method for producing color filter, and liquid crystal display device |
| JP5171506B2 (en) * | 2008-06-30 | 2013-03-27 | 富士フイルム株式会社 | NOVEL COMPOUND, POLYMERIZABLE COMPOSITION, COLOR FILTER, PROCESS FOR PRODUCING THE SAME, SOLID-STATE IMAGING ELEMENT, AND lithographic printing plate |
| JP5669386B2 (en) * | 2009-01-15 | 2015-02-12 | 富士フイルム株式会社 | NOVEL COMPOUND, POLYMERIZABLE COMPOSITION, COLOR FILTER, PROCESS FOR PRODUCING THE SAME, SOLID-STATE IMAGING ELEMENT, AND lithographic printing plate precursor |
| JP2013029709A (en) * | 2011-07-29 | 2013-02-07 | Fujifilm Corp | Colored photosensitive resin composition, color filter, and liquid crystal display element having color filter |
-
2019
- 2019-03-28 TW TW108110901A patent/TW201944172A/en unknown
- 2019-04-01 WO PCT/JP2019/014488 patent/WO2019194136A1/en not_active Ceased
- 2019-04-01 JP JP2020512238A patent/JP7072638B2/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI899392B (en) * | 2020-12-24 | 2025-10-01 | 日商東京威力科創股份有限公司 | Estimation model creation device, estimation model creation method, and storage medium |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7072638B2 (en) | 2022-05-20 |
| JPWO2019194136A1 (en) | 2021-03-18 |
| WO2019194136A1 (en) | 2019-10-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7072638B2 (en) | Photosensitive composition, cured film, manufacturing method of color filter, color filter, solid-state image sensor and image display device | |
| JP5638285B2 (en) | Polymerizable composition, cured film, color filter, method for producing color filter, and solid-state imaging device | |
| JP6997202B2 (en) | Photosensitive coloring composition, cured film, pattern forming method, color filter, solid-state image sensor and image display device | |
| JP7462807B2 (en) | Photosensitive coloring composition, cured film, pattern forming method, color filter, solid-state imaging device, and image display device | |
| TWI819041B (en) | Compositions, films, filters, laminates, solid-state imaging devices, image display devices, and infrared sensors | |
| TW202112842A (en) | Colored resin composition, film, color filter, solid-state image pickup element, and image display device | |
| JP7627291B2 (en) | CURABLE COMPOSITION, FILM, COLOR FILTER, METHOD FOR PRODUCING COLOR FILTER, SOLID-STATE IMAGING DEVICE, IMAGE DISPLAY DEVICE, AND POLYMER COMPOUND | |
| JP2024009929A (en) | Colored photosensitive compositions, films, color filters, solid-state imaging devices, and image display devices | |
| WO2022168743A1 (en) | Resin composition, film, optical filter, solid-state imaging element and image display device | |
| JP7095091B2 (en) | Photosensitive composition, film, color filter, solid-state image sensor and image display device | |
| JP7045456B2 (en) | Coloring composition, film, color filter, manufacturing method of color filter, solid-state image sensor and image display device | |
| JP7436620B2 (en) | Photosensitive compositions, films, optical filters, solid-state imaging devices, and image display devices | |
| JP7451807B2 (en) | Composition, film, cured film and method for producing the same, near-infrared transmission filter, solid-state image sensor, and infrared sensor | |
| JP7080325B2 (en) | Curable composition, film, color filter, manufacturing method of color filter, solid-state image sensor and image display device | |
| JP7198819B2 (en) | Curable composition, method for producing curable composition, film, color filter, method for producing color filter, solid-state imaging device, and image display device | |
| JP7376609B2 (en) | Colored compositions, cured films, structures, color filters and display devices | |
| KR102783235B1 (en) | Coloring compositions, films, color filters, solid-state imaging devices and image display devices | |
| WO2023120387A1 (en) | Resin composition, film, optical filter, solid imaging element, and image display device | |
| KR20210132138A (en) | Coloring composition, cured film, structure, color filter and display device | |
| TW202022054A (en) | Coloring composition, film, method for producing color filter, color filter, solid state imaging device and image display device | |
| JP7273046B2 (en) | Coloring composition, method for forming pixel, method for producing color filter, and method for producing display device | |
| TW202328353A (en) | Coloring composition, film, color filter, display device, and structure |