TW201932810A - Device and method for rapidly measuring run-out and vibration of main shaft and tool of machine tool to place the main shaft or the tool in the machine between the laser transmitting-receiving module and the reflective module at the processing speed - Google Patents

Abstract

The present invention provides a device and method for rapidly measuring run-out and vibration of a main shaft and a tool of a machine tool, wherein a laser transmitting-receiving module comprises a laser element, a beam splitter, a wave plate, and a two-quadrant light position sensor. The beam splitter is disposed between the wave plate and the laser element, the two-quadrant light position sensor is disposed on one side of the beam splitter, and a reflective module is assembled with a mirror. The reflective module and the laser transmitting-receiving module are disposed on the same line, so that the main shaft or the tool in the machine is placed between the laser transmitting-receiving module and the reflective module at the processing speed, thereby obtaining the variation of the differential energy generated by the two-quadrant light position sensor. In this way, the run-out value of the main shaft in the machine and the high-frequency vibration of the tool are measured.

Description

Tool machine spindle and tool yaw and vibration rapid measuring device and method

The invention relates to a tool machine shaft measuring device, in particular to a differential energy measuring machine tool spindle and a tool yaw and vibration rapid measuring device and method for shielding a laser beam, the invention has the advantages of low cost and convenience. The assembly, high accuracy and direct measurement of the processing speed state have obvious effects.

According to the conventional tool-line measuring device, the maximum speed can be measured at about 3000 rpm. The measured spindle yaw condition at this speed cannot meet the actual processing conditions, and the commercially available tool-line measuring device needs to be read. The coordinates of the machine tool are used as the basis for judging the displacement. Therefore, the accuracy of the rotation on the spindle line cannot be measured. These are the existing problems of the product, which will cause the spindle speed to be measured under the same conditions as the actual machining speed. The lower 3000 rpm does not meet the tool condition in the machining state. This speed is much less than the actual machining speed of 6000 rpm or more. It is impossible to detect the spindle rotation accuracy at high speed on the line immediately, so the current accuracy and life condition of the spindle cannot be measured. When the sensor head and the lens group need to be stopped, the measurement can only be performed in the deceleration state, and the productivity is reduced because of the low measurement efficiency. Furthermore, the assembly position of the sensor head and the lens group is fixed, and the spindle is fixed. The height of the working platform is also fixed, so it is necessary to adjust it to suit each model, and it cannot be assembled without disturbing the processing operation. The tool and the workpiece are removed when the spindle is to be measured, resulting in reduced applicability and time-consuming and labor-intensive. Furthermore, the ultrasonic processing technology will be widely used in the processing of aerospace industry and the manufacture of mobile ceramic back shells. Therefore, the future will be a market explosion point, and the current maintenance technology for ultrasonic machining accuracy During the operation, the ultrasonic machining tool needs to measure the high-frequency vibration of the tool after a period of time, that is, the non-line real-time measurement, can not be adjusted immediately to maintain the stability of the processing parameters, so that the processing quality Reducing, all of the above are the technical problems that the creative office wants to solve.

In view of this, the inventors have been engaged in the manufacturing development and design experience of related products for many years, and after detailed design and careful evaluation of the above objectives, the present invention has finally become practical.

The technical problem to be solved by the present invention is to provide a tool machine spindle and a tool yaw and vibration rapid measuring device in view of the above-mentioned shortcomings existing in the prior art.

A laser transmitting and receiving module includes a laser element, a beam splitter, a wave plate and a two-quadrant light position sensor. The beam splitter is disposed between the wave plate and the laser element, and the laser element is further disposed. A laser beam is emitted toward the beam splitter, and the laser beam passes through the beam splitter to form a first light beam extending linearly with the wave plate, and the two quadrant light position sensors are disposed on one side of the beam splitter. The two-quadrant optical position sensor is separated by a first energy receiving area and a second energy receiving area by a dividing line, a reflection mode is assembled with a mirror, and the reflection module and the laser emitting receiving mode The groups are disposed on the same line, and a measuring section with a variable distance is formed between the wave plate and the mirror, and the first beam is projected to the mirror and reflected by the incident direction to the wave plate and the beam splitting Mirroring, and splitting the first beam with the beam splitter to form a second beam, and the second beam is projected to an equal position of the first energy receiving region and the second energy receiving region of the two-quadrant optical position sensor.

The two-quadrant position sensor is obliquely mounted on the laser emission receiving module, so that the projection between the separation line and the first beam forms an acute angle (between thirty degrees and six Ten degrees of angle).

The laser emitting and receiving module and the reflective module are both fixed on a body, and the base body allows the laser element, the beam splitter, the wave plate, the two-quadrant light position sensor and the mirror to be equal in height. The first beam and the second beam are both located at the center of the beam splitter, the wave plate, the two-quadrant light position sensor, and the mirror.

Wherein, the laser emitting and receiving module and the base of the reflective module are covered with a casing, and the casing is provided with a through hole for providing the first light beam, and the casing is opened on one side. The perforated through hole is communicated, and the through hole is connected to the airflow to form a positive pressure micro gas wall at the perforation, thereby preventing the intrusion of the cutting fluid and the cutting object to form interference.

The auxiliary laser module is further provided with an auxiliary laser module, and the auxiliary laser module is internally provided with a second laser component, a second beam splitter, a second wave plate and a fourth a quadrant light position sensor, wherein the second beam splitter is disposed between the second laser element and the second wave plate, and the four-quadrant light position sensor is disposed on a side of the second beam splitter, and the spindle is further disposed on the spindle A second mirror is mounted, and the third beam emitted by the auxiliary laser module is reflected by the second mirror.

The technical problem to be solved by the present invention is to provide a tool spindle and tool yaw and vibration rapid measurement method for the above-mentioned shortcomings existing in the prior art.

The laser transmitting and receiving module is assembled on the working platform corresponding to the spindle or the tool, and the laser emitting receiving module is internally provided with a laser component, a beam splitter, a wave plate and a two-quadrant light position sensor. And the beam splitter is disposed between the laser component and the wave plate, and the two-quadrant light position sensor is disposed on a side of the beam splitter, and the two-quadrant light position sensor is formed with a first energy receiving region and a first a second energy receiving area; the reflective mode is assembled on the working platform and forms a same line with the laser emitting and receiving module, the reflecting module is internally provided with a mirror, and the reflecting mirror Forming a measurement section on the wave plate; the laser element generates a laser beam passing through the beam splitter and the wave plate, and the laser beam is converted into a first beam by the wave plate, and the first beam is Injecting into the mirror and reflecting back to the wave plate and the beam splitter in the incident direction; the reflected first light beam is formed by the beam splitter toward the two-quadrant light position sensor with a second light beam, and the second light beam is projected thereon The first energy receiving region generates a first energy value, and the second light beam is projected into the second energy receiving region to generate a second energy value; e. the spindle or the tool is displaced into the measuring segment at a processing speed state, And blocking the first beam forming portion by the spindle or the tool circumference, and causing the second beam to be projected to the two-quadrant light position sensor to form a numerical change of the first energy value and the second energy value; subtracting the first energy value by the first energy value The second energy value takes the differential energy, and the yaw of the spindle and the high frequency vibration of the tool cause the differential energy to form a varying value.

The method further includes the following steps: g. The laser transmitting and receiving module is further provided with an auxiliary laser module for emitting a third light beam toward the main shaft, and the auxiliary laser module is internally provided with a second laser element a second beam splitter, a second wave plate and a four-quadrant light position sensor, wherein the second beam splitter is disposed between the second laser element and the second wave plate, and the four-quadrant light position sense The detector is disposed on a side of the second beam splitter; h. the spindle is assembled with a second mirror, and the third beam is directed to the third beam of the auxiliary laser module, and the third beam is reflected by the second mirror The second beam splitter is refracted to the four-quadrant light position sensor, thereby measuring the axial yaw path of the spindle at the working speed; i. comparing the two-image light position sensor and the four-quadrant light position sense The yaw value measured by the detector further calculates the yaw value to achieve the purpose of error correction.

The two-quadrant optical position sensor is separated from the first energy receiving area and the second energy receiving area by a dividing line, and the two-quadrant light position sensor is installed on the ridge in a slanting manner. The emission receiving module is formed, and the projection between the dividing line and the first beam forms an acute angle (between 30 degrees and 60 degrees).

Wherein, the laser transmitting and receiving module and the reflecting module can be installed at any position of the working platform and form different measuring sections under the condition that the same plane and the same straight line are disposed, and the laser emitting The receiving module is connected to the power source by the laser component and the two-quadrant optical position sensor, and the reflective module is an unpowered structure, thereby improving the variability of assembling the laser transmitting and receiving module and the reflective module on the working platform. .

The laser emitting and receiving module and the reflecting module are both fixed on the body, and the housing of the laser emitting and receiving module and the reflecting module are covered with a casing, and the casing is worn by the casing. A through hole for providing the first light beam is provided, and the casing has a through hole penetrating through the hole on one side, and the through hole is connected to the airflow to form a positive pressure micro gas wall at the through hole.

A first main object of the present invention is that the laser emitting and receiving die is assembled on a working platform corresponding to the spindle or the tool, and the beam splitter of the laser emitting and receiving module is disposed between the laser component and the wave plate. The two-quadrant optical position sensor is disposed on a side of the beam splitter, and a second light beam is formed between the beam splitter and the two-quadrant light position sensor, and the reflective mold is assembled on the working platform and The laser emitting and receiving module forms a straight line, the reflecting module is internally provided with a mirror, and the mirror is formed with a first light beam to the wave plate, and the upper spindle of the machine is processed at a rotating speed (6000 rpm or more). The beam forming portion is blocked, and the second beam is incident on the two-quadrant light position sensor to generate a change value of the differential energy, so that the yaw amount of the main shaft can be judged without being decelerated or stopped.

A second main object of the present invention is that the laser emitting and receiving module and the reflecting module can be mounted on the working platform under the conditions of being disposed on the same plane and the same straight line. Positioning and forming different measuring sections relative to each other, thereby being freely assembled to the optimal measuring position in cooperation with the tool machine model, and the laser transmitting and receiving module is connected to the power source by the laser element and the two-quadrant light position sensor. Moreover, the reflective module is an unpowered structure, thereby simplifying the wiring requirement, thereby improving the variability of assembling the laser transmitting and receiving module and the reflective module on the working platform.

A third main object of the present invention is that the two-quadrant optical position sensor is separated by a dividing line, and the dividing line between the first energy receiving area and the second energy receiving area is a gap of about 20~30 μm, and the two The quadrant light position sensor is obliquely mounted on the laser emitting and receiving module, and the projection between the dividing line and the first light beam forms an acute angle (between 30 degrees and 60 degrees) The main axis or the tool blocks the shadow edge of the first beam from completely overlapping the separation line, thereby overcoming the non-reactive area generated during the measurement, so as to improve the accuracy of the measurement.

A fourth main object of the present invention is that the housing is provided with a through hole for providing the first light beam, and the housing has a through hole penetrating through the hole on one side, and the through hole is connected to the airflow to form a through hole. The positive pressure micro-gas wall, in order to prevent the intrusion of cutting fluid and cuttings to form interference, so as to improve its durability.

A fifth main object of the present invention is that the laser emitting and receiving module is further provided with an auxiliary laser module for emitting a third beam toward the main shaft, and the main shaft is assembled with a second mirror and the second reflection is The third beam of the auxiliary laser module is reflected by the mirror, and the third beam is reflected by the four-quadrant position sensor of the auxiliary laser module, thereby measuring the axial direction of the spindle at the working speed. The yaw path is further calculated by the yaw value measured by the two-image light position sensor and the four-quadrant light position sensor, and the yaw value is further calculated for error correction, and the laser emission receiving is increased. The yaw direction that the module and the reflection module cannot measure.

A sixth main object of the present invention is that the tool can be shielded from top to bottom The first beam, at this time, the ultrasonic machining tool will change the range of the first beam by the high frequency vibration frequency, and the first energy value measured by the two-quadrant position sensor is subtracted by the second energy The value of the differential energy can accurately measure the high-frequency vibration of the ultrasonic machining tool. For the ultrasonic machining accuracy maintenance technology, the instrument that needs to be measured can detect the ultrasonic machining tool after a period of time. The attenuation of the high-frequency vibration amount can be adjusted immediately to maintain the stability of the processing parameters.

Other objects, advantages and novel features of the invention will be apparent from the description and appended claims.

[this creation]

10‧‧‧Laser transmitting and receiving module

11‧‧‧Laser components

111‧‧‧Laser beam

112‧‧‧First beam

113‧‧‧second beam

12‧‧‧beam splitter

13‧‧‧ Wave Plate

14‧‧‧Two-quadrant light position sensor

141‧‧‧ separate line

142‧‧‧First energy receiving area

143‧‧‧second energy receiving area

(15) (22) ‧ ‧ ‧ body

(16) (23) ‧‧‧Shell

(161) (231) ‧ ‧ perforation

(162) (232) ‧‧‧ Through Hole

20‧‧‧Reflective Module

21‧‧‧Mirror

30‧‧‧ Spindle

301‧‧‧Tools

31‧‧‧Second mirror

θ 1‧‧‧ angle

D1‧‧‧Measurement section

40‧‧‧Auxiliary Laser Module

401‧‧‧ Third beam

41‧‧‧Second laser element

42‧‧‧Second beam splitter

43‧‧‧second wave plate

44‧‧‧ Four-quadrant light position sensor

Figure 1 is a perspective view of the present invention.

Figure 2 is a schematic representation of the invention.

Fig. 3 is a schematic view showing the state of use of the present invention (1).

Fig. 4 is a schematic view showing the state of use of the present invention (2).

Figure 5 is a graphical representation of the maximum energy change values of the present invention.

Figure 6 is a graphical representation of the minimum energy change values of the present invention.

Figure 7 is a schematic view of still another embodiment of the present invention.

Figure 8 is a schematic diagram showing the maximum energy change value of still another embodiment of the present invention.

Figure 9 is a schematic diagram showing the minimum energy change value of still another embodiment of the present invention.

Figure 10 is a schematic view showing the structure of the micro gas wall of the present invention.

Figure 11 is a schematic view showing another state of use of the present invention.

Figure 12 is a schematic view showing still another state of use of the present invention.

Figure 13 is a perspective view of another embodiment of the present invention.

Figure 14 is a schematic view showing the state of use of another embodiment of the present invention.

Figure 15 is a schematic view showing a third beam projection of another embodiment of the present invention.

Figure 16 is a schematic view of a four-quadrant position sensor of another embodiment of the present invention.

In order to enable your review committee to have a better understanding and understanding of the purpose, features and effects of the present invention, please refer to the following [simplified description of the drawings] as follows: First, please refer to the first, second, third and eleventh As shown in the figure, a machine tool spindle and tool yaw and vibration rapid measuring device and method, comprising: a laser transmitting and receiving module 10 and a reflecting module 20, a laser transmitting and receiving module 10 A laser element 11, a beam splitter 12, a wave plate 13 and a two-quadrant light position sensor 14 are included. The laser element 11 can be a semiconductor laser, and the beam splitter 12 is disposed on the wave plate 13 and the thunder. Between the elements 11 , the laser element 11 emits a laser beam 111 toward the beam splitter 12 , and the laser beam 111 passes through the beam splitter 12 and the wave plate 13 forms a first beam 112 extending in a straight line. The two-quad position optical position sensor 14 is disposed on the side of the beam splitter 12, and the two-quadrant light position sensor 14 is separated by a dividing line 141 with a first energy receiving area 142 and a second energy receiving area. 143, and the two-quadrant light position sensor 14 is obliquely mounted on the laser hair The receiving module 10 is configured to form an acute angle (the angle θ 1 between 30 degrees and 60 degrees) of the projection between the dividing line 141 and the first light beam 112, and a reflective module 20 is provided with a mirror 21, the mirror 21 can be a spherical mirror, a plane mirror or a convex-concave composite mirror, and the reflection module 20 and the laser emission receiving module 10 are disposed on the same line, and the wave plate 13 and the A variable distance measuring section D1 is formed between the mirrors 21, and the first light beam 112 is projected to the mirror 21 to be reflected from the incident direction to the wave plate. 13 and the beam splitter 12, and the first beam 112 is split by the beam splitter 12 to form a second beam 113. The second beam 113 is projected onto the first energy receiving region 142 of the two-quadrant position sensor 14 and The proportional position of the second energy receiving area 143 (as shown in FIG. 5) causes the differential energy generated by the two-quadrant light position sensor 14 to be zero, and in conjunction with FIG. 10, the laser emission receiving The module 10 and the reflection module 20 are both fixed on the body (15) (22), and the base (15) (22) allows the laser element 11, the beam splitter 12, the wave plate 13, and the two quadrant positions. The sensor 14 and the mirror 21 are both at the same height, so that the first beam 112 and the second beam 113 are located at the center of the beam splitter 12, the wave plate 13, the two-quadrant light position sensor 14 and the mirror 21. The housing (15) (22) of the laser transmitting and receiving module 10 and the reflector (20) of the reflective module 20 are covered with a casing (16) (23), and the casing (16) (23) is provided with a casing Providing a through hole (161) (231) through which the first light beam 112 passes, and the housing (16) (23) has a through hole (162) (232) communicating with the through hole (161) (231) on one side, and The through hole (162) (232) is connected to the airflow to form a perforation ( 161) Positive pressure micro-gas wall at (231), to prevent the formation of interference caused by cutting fluid and cuttings. When the spindle 30 yaw measurement or tool high-frequency vibration measurement is performed, the upper spindle 30 or the cutter 301 The first light beam 112 is partially blocked by being placed in the measurement section D1 at a processing speed (6000 rpm or more), and the second light beam 113 is incident on the first energy receiving area 142 and the second energy receiving area 143 to generate differential energy. The variation value (a variation value between the maximum value and the minimum value or a variation value between the two maximum values), and the yaw amount of the spindle 30 on the fast measuring machine and the high frequency vibration of the cutter 301 the amount.

Continued from the first figure to the 12th figure, the tool spindle and the tool yaw and vibration rapid measurement method are the dynamic measurement of the machine tool spindle 30 or the tool 301 at the processing speed. Thereby, the yaw amount of the main shaft 30 and the high-frequency vibration amount of the cutter 301 are judged, and the measuring methods thereof include: The laser transmitting and receiving module 10 is mounted on the working platform 31 corresponding to the main shaft 30 or the tool 301. The laser emitting and receiving module 10 is internally provided with a laser element 11, a beam splitter 12, and a wave plate. 13 and one or two quadrant light position sensors 14 , and the beam splitter 12 is disposed between the laser element 11 and the wave plate 13 , and the two quadrant light position sensors 14 are disposed on the side of the beam splitter 12 , and the The two-quadrant light position sensor 14 is formed with a first energy receiving area 142 and a second energy receiving area 143; b. The reflective module 20 is mounted on the working platform 31 and forms the same with the laser emitting and receiving module 10 A reflecting mirror 21 is disposed inside the reflecting module 20, and the measuring mirror 21 is formed with a measuring section D1, and the laser emitting receiving module 10 and the reflecting module 20 are molded. The assembly constitutes a microstructure, which facilitates its installation and correction, and can greatly reduce the processing interference of the spindle 30 or the tool 301; c. The laser element 11 generates a laser beam 111 through the beam splitter 12 and the wave plate 13, and the laser beam 111 is converted into the first light beam 112 by the wave plate 13, and the first light beam 112 is incident on the mirror 21 Reflected in the incident direction back to the wave plate 13 and the beam splitter 12; d. The reflected first light beam 112 is formed by the beam splitter 12 toward the two-quadrant light position sensor 14 with a second light beam 113, the second light beam A first energy value is generated in the first energy receiving region 142, and the second energy beam is projected on the second energy receiving region 143 to generate a second energy value, and the first energy value in the state to be measured. Equal to the second energy value, that is, when the first energy value is subtracted from the second energy value, the laser emission receiving module 10 and the reflection module 20 are corrected to the same plane and the same linear position; e. 30 or the tool 301 is displaced into the measuring section D1 at the machining speed state, and partially blocks the first light beam 112 by the circumference of the spindle 30 or the cutter 301, and the second light beam 113 is projected to the two-quadrant light position sensor 14 . And forming a numerical change of the first energy value and the second energy value; And f. obtaining the differential energy by subtracting the second energy value from the first energy value, and the yaw of the main shaft 30 and the high frequency vibration of the tool 301 cause the differential energy to have a change value (between the maximum value and A variation value between the minimum values or a variation value between the two maximum values), that is, the yaw amount of the main shaft 30 and the high-frequency vibration amount of the cutter 301 can be determined without the deceleration or the stop state, and the differential energy signal is It is analyzed and judged through the computer's analysis software. This part has nothing to do with the case, and there is no technical difficulty. The content is not detailed here.

Further, as shown in FIGS. 3, 4, 5, and 6, the two-quadrant light position sensor 14 is separated by a dividing line 141 to separate the first energy receiving region 142 from the second energy receiving region 143. 141 is a gap of about 20~30 μm, and the two-quad position optical position sensor 14 is obliquely mounted on the laser emitting and receiving module 10, and the projection between the dividing line 141 and the first beam 112 An acute angle (the angle θ 1 between thirty degrees and sixty degrees) is formed, so that the main axis 30 blocks the shadow edge of the first light beam 112 from completely overlapping the separation line 141, thereby overcoming the occurrence of the measurement. The reaction area is increased to improve the accuracy of the measurement, and the sampling frequency of the two-quadrant light position sensor 14 is 250 kHz, and 1250 points per revolution of the spindle 30 processing speed of 12000 rpm can be sampled, thereby dynamically analyzing the spindle 30 bias. The swinging amount does not need to slow down or stop the spindle 30, thereby effectively saving measurement time and increasing productivity, and the laser transmitting and receiving module 10 and the reflection module 20 are arranged under the same plane and the same straight line. Can be installed at any position of the working platform 31 and relatively different The measurement section D1, as shown in Figures 7, 8, and 9, is another embodiment of the creation. Since the ultrasonic processing technology will be widely applied to the processing of the aerospace industry and the processing of the mobile ceramic back shell, the future will be It is a market explosion point, and the laser emitting module 10 and the reflection module 20 are erected like the measuring spindle yaw amount, so that the tool 301 can shield the first beam from the top to the bottom. 112. At this time, the ultrasonic machining tool 301 will change the range of the first light beam 112 by the high frequency vibration frequency, and the first energy value measured by the two-quadrant light position sensor 14 is subtracted by the second energy. When the value obtains the differential energy, the high-frequency vibration amount of the ultrasonic machining tool 301 can be accurately measured. For the ultrasonic machining precision maintenance technology, the measuring instrument can detect the ultrasonic machining tool 301 after a period of time. The attenuation of the high-frequency vibration after the time can be adjusted immediately to maintain the stability of the processing parameters, and the application of the creation can further develop a measuring instrument capable of measuring the vibration amount of the ultrasonic 301 of the ultrasonic wave on the line and can be extended. Applied to tool 301 tool length, tool tip and tool 301 wear detection, as shown in Figures 11 and 12, the first beam 112 between the laser transmitting and receiving module 10 and the reflecting module 20 can be parallel to the spindle 30. The front-rear displacement or the left-right displacement, and the measuring section D1 can be as large as the side length of the working platform 31 or as small as the spacing through which the main shaft 30 can pass, thereby being freely assembled with the machine tool to optimally measure. Location, the mine The transmitting and receiving module 10 is connected to the power source by the laser element 11 and the two-quadrant position sensor 14 , and the reflection module 20 is an unpowered structure, thereby simplifying the wiring requirement, and the laser transmitting and receiving module 10 is provided. The measurement module 20 has more measurement positions, and has the functions of simple assembly and rapid measurement, thereby improving the variability of assembling the laser emission receiving module 10 and the reflection module 20 on the working platform 31.

Another embodiment of the present invention is further illustrated in FIG. 13 to FIG. 16. The laser transmitting and receiving module 10 is additionally provided with an auxiliary laser module 40, and the auxiliary laser module 40 is further disposed. A second laser element 41, a second beam splitter 42, a second wave plate 43 and a four-quadrant light position sensor 44 are disposed, and the second beam splitter 42 is disposed on the second laser element 41. The four-quadrant position sensor 44 is disposed on the side of the second beam splitter 42 and the second mirror 31 is mounted on the spindle 30. The second mirror 31 is mounted on the spindle 30. The auxiliary laser module 40 is reflected by the third light beam 401 of the auxiliary laser module 40 and transmitted through the second mirror 31 The emitted third light beam 401 causes the third light beam 401 to be reflected by the second beam splitter 42 to the four-quadrant light position sensor 44, and the four equal energy regions of the four-quadrant light position sensor 44 are transmitted. By obtaining the corresponding differential energy, the spindle 30 can be measured as the yaw path projected on the working platform 31, thereby measuring the axial yaw path of the spindle 30 at the working speed, and comparing the two images. The yaw value measured by the position sensor 14 and the four-quadrant light position sensor 44 further calculates the yaw value for error correction, and adds the laser emission receiving module 10 and the reflection module 20 Undetectable yaw direction.

In summary, the present invention has indeed achieved a breakthrough structural design, and has improved invention content, and at the same time, can achieve industrial utilization and progress, and the present invention is not found in any publication, but also novel, when In accordance with the provisions of the relevant laws and regulations of the Patent Law, the application for invention patents is filed according to law, and the examination authority of the bureau is required to grant legal patent rights.

The above is only a preferred embodiment of the present invention, and the scope of the present invention is not limited thereto; that is, the equivalent variations and modifications made by the scope of the present invention should still belong to the present invention. Within the scope of the patent.

Claims (10)

The utility model relates to a tool machine main shaft and a tool yaw and vibration rapid measuring device, which comprises: a laser transmitting and receiving module, the laser transmitting and receiving module comprises a laser element, a beam splitter, a wave plate and one or two a quadrant light position sensor, the beam splitter being disposed between the wave plate and the laser element, wherein the laser element emits a laser beam toward the beam splitter, and the laser beam passes through the beam splitter and the wave The sheet is formed with a first light beam extending in a straight line, and the two quadrant light position sensors are disposed on one side of the beam splitter, and the two quadrant light position sensors are separated by a first line and have a first energy receiving area and a first a second energy receiving region; and a reflective module, the reflective module is assembled with a mirror, and the reflective module is disposed on the same line as the laser emitting and receiving module, and the wave plate and the mirror are Forming a variable distance measuring section, the first beam is projected to the mirror and reflected from the incident direction to the wave plate and the beam splitter, and the first beam is split by the beam splitter to form a second beam And the second beam cast The proportional position of the first energy receiving area and the second energy receiving area of the two-quadrant optical position sensor is such that the differential energy generated by the two-quadrant optical position sensor is zero, thereby allowing the on-board spindle or The tool is inserted into the measuring section at a processing speed to block the first beam forming portion, and obtains a variation value of the differential energy generated by the second beam entering the first energy receiving region and the second energy receiving region, The amount of deflection of the spindle or tool on the machine. The tool spindle and the tool yaw and vibration rapid measuring device according to the first aspect of the patent application, wherein the two-quadrant light position sensor is obliquely mounted on the laser transmitting and receiving module, so that the dividing line The projection between the first beam forms an acute angle. According to the scope of claim 1, the spindle and the tool yaw and vibration rapid measuring device, wherein the laser emitting receiving module and the reflecting module are fixed on the body, The body allows the laser element, the beam splitter, the wave plate, the two-quadrant position sensor and the mirror to have the same height, so that the first beam and the second beam are located at the beam splitter, the wave plate and the two-quadrant light position. At the center of the sensor and mirror. According to the third aspect of the patent application, the tool spindle and the tool yaw and vibration rapid measuring device, wherein the laser transmitting and receiving module and the reflector body are covered with a casing, The housing is provided with a through hole for providing the first light beam, and the housing has a through hole penetrating through the hole on one side, and the through hole is connected to the airflow to form a positive pressure micro gas wall at the perforation. Prevent the intrusion of cutting fluid and cuttings to form interference. According to the scope of claim 1, the spindle and the tool yaw and vibration rapid measuring device, wherein the laser transmitting and receiving module is additionally provided with an auxiliary laser module, the auxiliary laser module a second laser element, a second beam splitter, a second wave plate and a four-quadrant light position sensor are disposed therein, and the second beam splitter is disposed on the second laser element and the second wave plate And the four-quadrant position sensor is disposed on a side of the second beam splitter, and the second spindle is mounted on the spindle, and the second mirror is reflected by the second mirror to reflect the emitted by the auxiliary laser module. Three beams. A tool machine spindle and tool yaw and vibration rapid measurement method is a dynamic measurement of a machine tool spindle or a tool at a processing speed, thereby determining the yaw amount of the spindle and the high frequency vibration amount of the tool, the amount thereof The measuring method comprises: a. assembling the laser transmitting receiving die to the working platform corresponding to the spindle or the tool, the laser emitting receiving module is internally provided with a laser component, a beam splitter, a wave plate and one or two a quadrant light position sensor, wherein the beam splitter is disposed between the laser element and the wave plate, and the two-quadrant light position sensor is disposed on a side of the beam splitter, and the two-quadrant light position sensor forms a first Energy reception And a second energy receiving area; b. the reflective mold is assembled on the working platform and forms a same line with the laser emitting and receiving module, the reflecting module is internally provided with a mirror, and the mirror is directly opposite The wave plate is formed with a measuring section; c. the laser beam generates a laser beam passing through the beam splitter and the wave plate, and the wave beam is converted into a first beam by the wave plate, and the first beam is Injecting into the mirror and reflecting back to the wave plate and the beam splitter in the incident direction; d. the reflected first light beam is formed by the beam splitter toward the two-quadrant light position sensor, and the second light beam is projected Generating a first energy value in the first energy receiving region, and the second light beam is projected into the second energy receiving region to generate a second energy value; e. the spindle or the tool is displaced into the measuring region at a processing speed state Segmenting, and partially blocking the first beam by the spindle or the tool circumference, causing the second beam to be projected to the two-quadrant light position sensor to form a numerical change of the first energy value and the second energy value; and f. An energy value is subtracted from the second energy value to obtain differential energy The amount, and the yaw of the spindle and the high-frequency vibration of the tool will cause the differential energy to have a change value, that is, the yaw amount of the spindle and the high-frequency vibration of the tool can be judged without deceleration or stop. According to the sixth aspect of the patent application scope, the tool spindle and the tool yaw and vibration rapid measurement method further include the following steps: g. the laser transmitting and receiving module is additionally provided with a heading toward the spindle. a three-beam auxiliary laser module, the auxiliary laser module is internally provided with a second laser component, a second beam splitter, a second wave plate and a four-quadrant light position sensor, and the second The beam splitter is disposed between the second laser element and the second wave plate, and the four-quadrant light position sensor is disposed on a side of the second beam splitter; h. the spindle is assembled with a second mirror, and the The second mirror is opposite to the third beam of the auxiliary laser module, and the third beam is reflected by the second beam splitter to the four-quadrant light position sensor, thereby measuring the axis of the spindle at the working speed To the yaw path; i. The yaw value measured by the two-image light position sensor and the four-quadrant light position sensor is further calculated to achieve the purpose of error correction. The tool spindle and tool yaw and vibration rapid measurement method according to claim 6, wherein the two-quadrant light position sensor is separated by the first energy receiving region and the second energy by a dividing line In the receiving area, the two-quadrant light position sensor is obliquely mounted on the laser emitting and receiving module, and the projection between the dividing line and the first light beam forms an acute angle. According to the sixth aspect of the patent application scope, the tool spindle and the tool yaw and the vibration rapid measurement method, wherein the laser emission receiving module and the reflection module are arranged under the same plane and the same straight line, The laser transmitting and receiving module can be connected to the power source by the laser element and the two-quadrant light position sensor, and the reflective module is not connected. The electrical structure further improves the variability of the laser emitting and receiving module and the reflective module assembled on the working platform. According to the sixth aspect of the patent application, the tool spindle and the tool yaw and vibration rapid measurement method, wherein the laser emission receiving module and the reflection module are both fixed on a body, and the laser emission The receiving module and the base of the reflective module are respectively covered with a casing, and the casing is provided with a through hole for providing the first light beam, and the casing has a through hole penetrating through the hole. The through hole is connected to the airflow to form a positive pressure micro gas wall at the perforation.