TW201932801A - Thermocouple structure and method for manufacturing same - Google Patents

Abstract

The purpose of the present disclosure is to provide a thermocouple structure and a method for manufacturing the same, said thermocouple structure being less susceptible to measurement temperature deviation resulting from thermocouple drift, being less susceptible to protective tube or protective film fracturing/breaking resulting from deposits adhered to the surface of the protective tube or protective film, and preventing temperature measurement junction movement resulting from thermocouple vibration or the like. A thermocouple structure 100 according to the present disclosure comprises a thermocouple 1 in which one end of a positive electrode wire 1a and one end of a negative electrode wire 1b are joined, and one columnar glass body 2. The positive electrode wire 1a and negative electrode wire 1b, which include a thermocouple junction 1c, are embedded in parallel along the length direction of the columnar glass body 2 so as to only come into contact with each another at the thermocouple junction 1c. The other end side of the positive electrode wire 1a and the other end side of the negative electrode wire 1b are drawn out to the outside of the columnar glass body 2.

Description

Thermocouple structure and manufacturing method thereof

The present disclosure relates to a thermocouple structure used in, for example, a heat treatment film-forming device of a semiconductor device, and a method for manufacturing the same.

Most thermocouples have a structure that is directly exposed to the measurement environment. If the thermocouple is directly exposed to the measurement environment, the measurement accuracy will be reduced or disconnected due to the oxidation or corrosion of the thermocouple, which will shorten the service life. Further, in a manufacturing environment where semiconductor manufacturing steps and the like are required to be extremely clean, contamination due to volatilization of constituent metals from a thermocouple or contamination due to volatilization of metallic impurities contained in a protection tube becomes a problem.

Therefore, in order to protect the thermocouple or suppress the pollution of the measurement environment, the following forms have been disclosed: a form in which the thermocouple is placed in a clean protective tube (for example, refer to Patent Documents 1 to 3); The element and the negative element extend into a straight line, and then they are placed in a quartz glass tube, and the quartz glass tube is bent at the contact point, and the structure of the quartz glass tube is folded back (for example, refer to Patent Document 4); and a thermocouple The prime line is covered with a glass having a specific thermal expansion coefficient (for example, refer to Patent Document 5). [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 9-113372 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2015-215220 [Patent Document 3] Japanese Utility Model Registration No. 3014093 [Patent Document 4] Japanese Patent Laid-Open No. 2009 ‐749978 [Patent Document 5] Japanese Patent Laid-Open No. 59-58882

[Non-Patent Document 1] Putian Toshio, Industrial Heating Vol.44, No.5, 36-42 (2007), "Calibration and Drift and Heterogeneity of Platinum Thermocouples"

[Problems to be solved by the invention]

In the inventions disclosed in Patent Documents 1 to 3, that is, when a thermocouple is used for a long time at a high temperature, the element component of the thermocouple is volatilized, and the constituent elements of the positive element wire are attached to the surface of the negative element wire, or the negative element wire The constituent elements are attached to the surface of the positive electrode element wire, and there is a possibility that the measurement temperature shift (shift of the electromotive force) is caused by the drift phenomenon. For example, it has been reported that in the Pt-Pt-Rh thermocouple, the main reason for the volatility of Rh and the drift of the adhesion system to pure Pt wires (for example, see Non-Patent Document 1).

In the invention disclosed in Patent Document 4, a structure in which a quartz glass tube with a thermocouple extending into a straight line is folded is placed. The portion other than the contact of the thermocouple is provided between the plain wire and the quartz glass tube. Space, so the quartz glass tube is easy to crack, and it is easy to produce plain line pollution. In addition, since it has a structure for folding back the quartz glass tube, the ends of the quartz glass tubes that are approached are brought close to each other or separated from each other due to the folding back, and the stress is likely to be concentrated in the folded back portion and easily damaged. Furthermore, the contact point of the thermocouple on the structure is limited to one point of the fold-back portion, and cannot correspond to the measurement of plural points.

In the invention disclosed in Patent Document 5, in the form of covering the thermocouple element line with glass having a specific thermal expansion coefficient, the contact point of the thermocouple is tightly connected to the glass, and the volatilization of the element component of the thermocouple is not easy to occur. It is not easy to cause measurement temperature shift due to drift phenomenon. However, in the invention of Patent Document 5, the thermocouples are covered with crystallized glass one by one. Since the positive line and the negative line are not integrated, stress is easily concentrated in the contact of the thermocouple, and the glass film is easily damaged by external forces. In addition, if the glass coating film is thin, there is a possibility that the protective film may be cracked and broken due to the deposit deposited on the surface of the glass coating film.

Furthermore, Patent Documents 1, 2, and 4 disclose multi-point temperature measuring elements. However, it is preferable to completely prevent the movement of the temperature measuring contact due to vibration or the like.

Therefore, the purpose of this disclosure is to provide a protection tube or a protection film that is less prone to drift in measurement temperature due to drift, and is less likely to be cracked and damaged due to the adherence of deposits to the surface of the protection tube or the protection film. Thermocouple structure for preventing the temperature measurement contact of the thermocouple from moving due to vibration and the like, and a manufacturing method thereof. [Technical means to solve the problem]

The present inventors have actively explored and found a structure in which the positive electrode element wires and the negative electrode element wires of the thermocouple which are not in contact with each other except the contact point are embedded side by side along the length of the columnar glass body. The above problems can be solved, and the present invention has been completed. That is, the thermocouple structure of the present invention is characterized by having a thermocouple joined to one end of a positive electrode element wire and one end of a negative electrode element wire, and a columnar glass body, and the above-mentioned positive electrode element wire including a contact point of the thermocouple and The negative electrode element wires are in a state of being inserted side by side along the length direction of the columnar glass body without contacting each other except the contacts, and the other end side of the positive electrode element wires and the other end side of the negative electrode element wires are drawn out. To the outside of the columnar vitreous body.

In the thermocouple structure of the present invention, it is preferable that both the other end side of the positive electrode element wire and the other end side of the negative electrode element wire are drawn from one end surface of the columnar glass body. The maximum length of a thermocouple protected by a cylindrical glass body can be set. In addition, the operation becomes easy.

In the thermocouple structure of the present invention, the columnar glass body preferably contains amorphous quartz glass. The ability to protect the thermocouple from the external environment is higher, and the electrical insulation function is higher. In addition, the mechanical reliability at room temperature and high temperature is high.

In the thermocouple structure of the present invention, the above-mentioned thermocouple preferably contains platinum or a nickel alloy. By setting it as a platinum or platinum alloy thermocouple, it can be used in high temperature areas up to 1100 ° C.

In the thermocouple structure of the present invention, it is preferable that the side surface of the positive electrode element wire and the glass of the columnar glass body are contacted and joined without gap, and the side surface of the negative electrode element wire is in contact with the glass of the columnar glass body without gap Join. It completely prevents the contact between the positive electrode element line and the negative electrode element line, and has excellent mechanical strength.

In the thermocouple structure of the present invention, the length of the columnar glass body is preferably longer than the heated region of the thermocouple pair. Prevent the thermocouple element line from volatilizing due to heating, and improve the durability of the thermocouple.

In the thermocouple structure of the present invention, the plurality of thermocouples are in a state where the plurality of thermocouples in the columnar glass body are not in contact with each other and are embedded side by side along the lengthwise direction of the columnar glass body. The contacts of the thermocouple are preferably arranged in a state of being staggered from each other along the longitudinal direction of the columnar glass body. Can provide multi-point temperature measurement elements without shifting measurement points.

The manufacturing method of the thermocouple structure of the present invention has the following steps: a first step of connecting the positive electrode wire and the negative electrode wire of the thermocouple connected to one end of the positive electrode wire and one end of the negative electrode wire with a glass member; The positive electrode element line and the negative electrode element line are set to be non-contact; in a second step, the thermocouple made in the first step is inserted into a hollow glass tube; and in a third step, the end of the hollow glass tube is inserted. The end near the contact point of the thermocouple is heated and softened, and then the hollow glass tube is eliminated and softened along the length direction of the hollow glass tube, followed by cooling to form a columnar glass body.

In the manufacturing method of the thermocouple structure of the present invention, one end of the above-mentioned hollow glass tube is open, and the other end is closed. In the third step, it is preferable to soften the interior of the above-mentioned hollow glass tube while decompressing it. cool down. The air layer can be removed from the inside of the cylindrical glass body.

In the manufacturing method of the thermocouple structure of the present invention, in the first step, a plurality of thermocouples with the positive and negative element wires set as non-contact are made. In the second step, it is preferable to use the first and second steps. A plurality of thermocouples are inserted into the above-mentioned hollow glass tube in a state where they are not in contact with the positive element wires and the negative element wires of other thermocouples, and the contact points of the thermocouples are staggered from each other, and then in the third step In the formation of columnar vitreous body. Can provide multi-point temperature measurement elements without shifting measurement points. [Effect of the invention]

According to the present disclosure, there is provided a measurement temperature shift that is less likely to be caused by a drift phenomenon, and it is difficult to cause cracks and damages of the protection tube or the protection film due to the adhesion of the deposit to the surface of the protection tube or the protection film, and thus there is no thermocouple. Structure of a thermocouple whose measurement points are shifted due to vibration and the like, and a manufacturing method thereof.

Hereinafter, although the embodiment of the present invention is shown and described in detail, the present invention is not construed as being limited to these descriptions. As long as the effect of the present invention is exerted, the embodiment may be variously changed.

The thermocouple structure of this embodiment will be described with reference to Figs. 1 and 2. The thermocouple structure 100 of this embodiment has a thermocouple 1 connected to one end of a positive electrode element wire 1a and one end of a negative electrode element wire 1b, and a columnar glass body 2, a positive electrode element wire 1a including a thermocouple contact 1c and The negative electrode element wire 1b is in a state of being inserted side by side along the length direction of the columnar glass body 2 except for the contact point 1c of the thermocouple, and the other end side of the positive electrode element wire 1a and the other negative electrode element wire 1b One end side is drawn out to the outside of the columnar glass body 2.

The thermocouple 1 preferably contains platinum or a platinum alloy. For example, the combination of (positive element line 1a, negative element line 1b) (PtRh13%, Pt), (PtRh10%, Pt), and (PtRh30%, Pt).

The glass constituting the columnar glass body 2 is expected to have a higher protection function to fully protect the thermocouple from the external air environment and a higher electrical insulation function to stabilize the electromotive force of the thermocouple. Specifically, the glass constituting the columnar glass body 2 is preferably a glass having electrical insulation properties that is not softened at 300 ° C to 1100 ° C. The softening point is 300 ° C or higher, preferably 500 ° C or higher, and particularly preferably 700 ° C or higher. The upper limit of the softening point is not particularly limited, but is, for example, 1100 ° C. The resistance value is preferably 1 × 10 ¹⁰ to 7.5 × 10 ¹⁷ (Ω ･ m). The glass satisfying such characteristics is limited, and for example, amorphous quartz glass can be used. Amorphous quartz glass has a higher ability to protect the thermocouple from the external environment and a higher electrical insulation function. Moreover, the mechanical reliability at room temperature and high temperature is high. The thermal expansion coefficient of the amorphous quartz glass is about 4.5 × 10 ^-7 / ° C to about 6.0 × 10 ^-7 / ° C. The thermal expansion coefficient in this range is about one digit smaller than the thermal expansion coefficient (approximately 5.0 × 10 ^-6 / ° C to approximately 40 × 10 ^-6 / ° C) of the coating glass of the invention described in Patent Document 5.

The columnar glass body 2 is not a hollow glass body like a hollow glass tube, but has a structure that does not have a hollow portion along the length direction as shown in FIG. 2. In addition, there may be bubbles remaining during manufacturing. The columnar glass body 2 has a rod-like shape, and its cross section is preferably circular, polygonal, or oval. When the columnar glass body 2 is rod-shaped, it is preferably linear. However, if necessary, it can be bent into an arcuate shape or bent into an angle like an L shape. Because the material is glass, it can be appropriately deformed. The columnar glass body 2 preferably has the same diameter or the same cross-sectional area of the contact 1c of the thermocouple along the length direction of the rod. The columnar glass body 2 may also be set to a gradually thicker shape or a thinner shape from the contact 1c of the thermocouple along the length of the rod. As shown in FIG. 3, the length of the columnar glass body 2 is preferably longer than the heated region 3 of the thermocouple 1. Prevent the thermocouple element line from volatilizing due to heating, and improve the durability of the thermocouple. As shown in FIG. 3, a part of a thermocouple structure 100 is arranged in an internal space 5 a of a heating furnace 5 such as an electric furnace. The columnar glass body 2 includes a heated region 3 and a non-heated region 4. The heated area 3 is an area heated up by the heating furnace 5, and the non-heated area 4 is an area not heated up by the heating furnace 5. In the previous thermocouple structure, the heated region 3 may also be referred to as a region equivalent to a protective tube. The other end side of the positive electrode wire 1a drawn to the outside of the columnar glass body 2 is connected to the terminal of the electromotive force measuring device 6, and the other end of the negative electrode wire 1b is also connected to the terminal of the electromotive force measuring device 6.

As shown in FIG. 1, a thermocouple 1 is embedded in a columnar glass body 2. That is, in one columnar glass body 2, the positive electrode element line 1a and the negative electrode element line 1b including the contact point 1c of the thermocouple become side-by-side along the columnar glass body 2 except for the contact point 1c of the thermocouple. Embedded in the length direction. The thermocouple 1 embedded in the cylindrical glass body 2 has no movable region. In this embodiment, the columnar glass body is not embedded in the state where the positive electrode line and the negative electrode line are extended in a straight line, and the columnar glass body is bent near the contact point, and the positive electrode line and the negative electrode line are set as Side-by-side form (hereinafter referred to as a bent form A). In the bending form A, the bent portion of the columnar glass body may be bent due to stress concentration. In contrast, if the thermocouple structure of this embodiment is embedded in this way, stress will not be concentrated in the vicinity of the thermocouple contact 1c in the columnar glass body 2. Compared with the bending form A, the columnar shape can also be used. The glass body is relatively thick, which is more advantageous in terms of ensuring strength. ｢Parallel｣ does not require that the positive electrode element line 1a and the negative electrode element line 1b are parallel, but means that the contact points 1c of the thermocouples are not in contact with each other, and the widths are arranged side by side.

In the thermocouple structure 100 of this embodiment, as shown in FIG. 2, it is preferable that the side surface of the positive electrode element wire 1 a and the glass of the columnar glass body 2 be joined without contact, and the side surface of the negative electrode element wire 1 b and the columnar glass body. The glass of 2 has no gap contact bonding. It completely prevents the contact between the positive electrode element line and the negative electrode element line, and has excellent mechanical strength. Although the contact between the side surface of the positive electrode element 1a and the glass of the columnar glass body 2 is preferably full contact, it is included in the present embodiment in a form having non-contact parts due to manufacturing errors, for example, including the length of the positive electrode element 1a Directional contact with more than 95% of the form. Although the contact between the side surface of the negative electrode element wire 1b and the glass of the columnar glass body 2 is preferably full contact, it is included in the present embodiment in a form having non-contact portions due to manufacturing errors. For example, the negative element element wire 1b is included The lengthwise direction is more than 95%.

Furthermore, the other end side of the positive electrode element wire 1 a and the other end side of the negative electrode element wire 1 b in the thermocouple 1 are led out to the outside of the columnar glass body 2. Here, in the thermocouple 1, the other end side of the positive electrode element wire 1a and the other end side of the negative electrode element wire 1b are both preferably drawn from one end surface 2a of the columnar glass body. The length of the thermocouple 1 protected by the columnar glass body 2 can be maximized. In addition, the operation becomes easy. In this embodiment, as a modified example, both the other end side of the positive electrode element wire 1a and the other end side of the negative electrode element wire 1b may be drawn from the side of the columnar glass body 2, or either It is drawn out from one end surface 2 a of the columnar glass body, and the other is drawn out from the side surface of the columnar glass body 2.

Next, a multi-point temperature measuring type thermocouple structure will be described with reference to FIGS. 4 and 5. In the thermocouple structure 200 of this embodiment, the thermocouples 11 and 12 are a plurality of thermocouples, and the plurality of thermocouples 11 and 12 in the columnar glass body 13 are not in contact with each other and are arranged side by side along the columnar glass body 13. In the state of being embedded in the longitudinal direction, the contacts 11 c and 12 c of the thermocouples 11 and 12 are preferably arranged in a state of being staggered from each other along the longitudinal direction of the columnar glass body 13. Multi-point temperature measuring element with good durability and no shift of measuring points. As shown in FIG. 5, the element wires 11 a, 11 b, 12 a, and 12 b of the thermocouple are not in contact with each other, and are embedded in the columnar glass body 13. In this form, the contact between the sides of the prime wires 11a, 11b, 12a, and 12b of the thermocouple and the glass of the columnar glass body 13 is also preferably full contact, respectively. However, this embodiment includes non-effects caused by manufacturing errors. The form of the contact part includes, for example, a form in which the long side of each prime line contacts 95% or more.

In FIG. 4, although two thermocouples are shown, three or more thermocouples may be used. When three or more thermocouples are used, the interval between the contact points of the thermocouples may be set to an equal interval, or the interval may be appropriately set to a different one.

(Manufacturing method of thermocouple structure) Next, the manufacturing method of the thermocouple structure of this embodiment is demonstrated. FIG. 6 is a diagram illustrating a manufacturing method of the thermocouple structure shown in FIG. 1. FIG. The manufacturing method of the thermocouple structure of this embodiment has the following steps: (1) The positive electrode element wire 1a and the negative electrode element wire 1b of the thermocouple 1 are connected to one end of the positive electrode element wire 1a and one end of the negative electrode element wire 1b by a glass member 30. The positive step 1a and the negative step 1b are set as non-contact first step; (2) the second step of inserting the thermocouple made in the first step into the hollow glass tube 31; and (3) inserting the hollow glass The end of the tube 31 which is close to the contact 1c of the thermocouple is heated and softened. Then, along the length direction of the hollow glass tube 31, the hollow glass tube 31 is eliminated and softened, and then cooled to form a columnar glass body ( The third step of the symbol 2) in FIG. 1.

(First step) The glass member 30 is not particularly limited in shape as long as the positive electrode element wire 1a and the negative electrode element wire 1b can be made non-contact. Examples of the glass member 30 are rod-shaped glass sheets and glass wool. It is preferably a hollow glass tube as shown in FIG. 6. The glass composition of the glass member 30 may be different from the hollow glass tube 31, but the same composition is preferred. The hollow glass tube 31 is more preferably formed of amorphous quartz glass. In addition, in the first step, “the positive electrode element line and the negative electrode element line are non-contact” means that the positive electrode element line and the negative electrode element line are made non-contact except for a contact point.

(Second step) The thermocouple produced in the first step is the thermocouple 1 that prevents the negative element wire 1a from coming into contact with the positive element wire 1a through the glass member 30, which is a hollow glass tube, in FIG. 1a passes to prevent contact with the negative electrode element wire 1b (not shown). It is assumed that the thermocouple 1 is inserted into a hollow glass tube 31.

(Third step) The end of the hollow glass tube 31 heated by a heater 32 such as a flame burner is near the end of the contact 1c of the thermocouple. The hollow glass tube 31 and the glass member 30, which is a hollow glass tube, are softened and integrated by heating. Then, along the length direction of the hollow glass tube 31, the hollow (internal space 31a) of the hollow glass tube 31 is eliminated, softened, and then cooled to form a columnar glass body (symbol 2 in FIG. 1). The columnar glass body 2 is formed by fusing and integrating the hollow glass tube 31 and the glass member 30 which is a hollow glass tube.

The hollow glass tube 31 is preferably a hollow tube with one end open and the other end closed. In this embodiment, in the third step, it is preferable to soften and then cool the interior of the hollow glass tube 31 while the interior of the hollow glass tube 31 is decompressed by an exhaust mechanism 40 such as an exhaust pump. The air layer can be removed from the inside of the cylindrical glass body 2 shown in FIG. 1. In addition, the inner space 31a of the hollow glass tube 31 can be reduced by a glass process. In addition, the internal space 31a can be reduced by the surface tension of the softened glass.

(Manufacturing method of multi-point temperature measuring type thermocouple structure) Next, a manufacturing method of the multi-point temperature measuring type thermocouple structure of this embodiment will be described. FIG. 7 is a diagram illustrating a manufacturing method of the multi-point temperature measurement type thermocouple structure shown in FIG. 4. The manufacturing method of the thermocouple structure of this embodiment is preferably as follows: (1) in the first step, a plurality of thermocouples with the positive and negative element wires made non-contact are made; (2) in the second step, The plurality of thermocouples produced in the first step were inserted into the above-mentioned hollow glass tube in a state where they were not in contact with the positive and negative lead wires of other thermocouples, and the contact points of the thermocouples were staggered from each other. ; And (3) a columnar vitreous body is subsequently formed in a third step. Multi-point temperature measuring element with good durability and no shift of measuring points.

(First step) In the first step, a plurality of thermocouples are used in which the positive electrode element line and the negative electrode element line are made non-contact. In FIG. 7, a thermocouple 12 is inserted into a glass member 34, which is a hollow glass tube, and a thermocouple 11 is inserted into a glass member 33, 35, which is a hollow glass tube. This prevents the positive electrode element lines 11a, the negative electrode element lines 11b, the positive electrode element lines 12a, and the negative electrode element lines 12b from contacting each other. In the thermocouple 12, other prime wires, that is, positive prime wires 12a, may be inserted into a glass member, which is a hollow glass tube.

(Second step) As shown in FIG. 7, the plurality of thermocouples 11 and 12 produced in the first step are inserted into the hollow glass tube 36 without contacting the positive and negative lead wires of other thermocouples, and The contacts 11c and 12c of the thermocouples are staggered from each other. When the plurality of thermocouples 11 and 12 are inserted into the inner space 36a of the hollow glass tube 36, the glass members 33, 34, and 35 prevent the element wires from contacting each other.

(Third step) Thereafter, in the third step, a columnar glass body is preferably formed. Multi-point temperature measuring element with good durability and no shift of measuring points. A heater 32 such as a flame burner is used to heat the end of the hollow glass tube 36 close to the contact 11 c of the thermocouple 11. The hollow glass tube 36 and the glass members 33, 34, and 35, which are the hollow glass tube, are softened by heating and integrated. Then, along the length direction of the hollow glass tube 36, the hollow (inner space 36a) of the hollow glass tube 36 is eliminated, softened, and then cooled to form a columnar glass body (symbol 13 in FIG. 4). The columnar glass body 13 is formed by fusing and integrating the hollow glass tube 36 and the glass members 33, 34, and 35, which are hollow glass tubes.

The hollow glass tube 36 is preferably open at one end and closed at the other end, and is a bottomed type hollow tube. In this embodiment, it is also preferable that the inside of the hollow glass tube 36 is reduced to a reduced pressure state by the exhaust mechanism 40 in the third step, and then softened and then cooled. In addition, the inner space 36a of the hollow glass tube 36 can be reduced by a glass process. In addition, the internal space 36a can be reduced by the surface tension of the softened glass.

In the thermocouple structure shown in FIG. 1 and FIG. 4, after the columnar glass body is obtained, the columnar glass body may be softened by heating by a flame burner or the like, and the shape may be deformed into an L shape.

1‧‧‧Thermocouple

1a‧‧‧Positive element line

1b‧‧‧Negative element wire

1c‧‧‧Thermocouple contact

2‧‧‧ cylindrical glass body

2a‧‧‧ one end of cylindrical glass body

2b‧‧‧ front of columnar vitreous body

3‧‧‧ The heated area of the thermocouple

4‧‧‧ Non-Heated Area of Thermocouple

5‧‧‧ heating furnace

5a‧‧‧ Internal space of heating furnace

6‧‧‧ Electromotive Force Tester

11‧‧‧Thermocouple

11a‧‧‧Positive element line

11b‧‧‧Negative element line

11c‧‧‧Thermocouple contact

12‧‧‧Thermocouple

12a‧‧‧Positive element line

12b‧‧‧Negative element wire

12c‧‧‧Thermocouple contact

13‧‧‧ cylindrical glass body

13a‧‧‧ one end of cylindrical glass body

13b‧‧‧ Front end of columnar vitreous body

13c‧‧‧Glass components

30‧‧‧ glass components

31‧‧‧Insulating glass tube

31a‧‧‧Internal space of hollow glass tube

32‧‧‧heater

33‧‧‧Glass Construction

34‧‧‧ glass components

35‧‧‧ glass components

36‧‧‧ Insulating glass tube

36a‧‧‧Internal space of hollow glass tube

40‧‧‧Exhaust mechanism

100‧‧‧ Thermocouple Structure

200‧‧‧ Thermocouple Structure

A-A‧‧‧ Section

B-B‧‧‧ Section

FIG. 1 is a schematic diagram of a thermocouple structure of this embodiment. Fig. 2 is a sectional view taken along A-A. FIG. 3 is a schematic diagram of the thermocouple structure according to this embodiment when it is used in a heating furnace. FIG. 4 is a schematic diagram of a multi-point temperature measurement type thermocouple structure according to this embodiment. Fig. 5 is a sectional view taken along the line B-B. FIG. 6 is an explanatory diagram of a manufacturing method of a thermocouple structure according to this embodiment. FIG. 7 is an explanatory diagram of a manufacturing method of a multi-point temperature measurement type thermocouple structure according to this embodiment.

Claims (10)

A thermocouple structure, comprising: a thermocouple which is connected to one end of a positive element wire and one end of a negative element wire, and a columnar glass body, and the positive element wire and the negative electrode including a contact point of the thermocouple. The element wires are in a state of being inserted side by side along the length direction of the columnar glass body without touching each other except for the above-mentioned contacts, and the other end side of the positive electrode element wire and the other end side of the negative electrode element wire are drawn to The outside of the columnar vitreous body. As in the thermocouple structure of claim 1, wherein both the other end side of the positive electrode element wire and the other end side of the negative electrode element wire are drawn from one end surface of the columnar glass body. The thermocouple structure according to claim 1 or 2, wherein the columnar glass body is composed of amorphous quartz glass. The thermocouple structure according to any one of claims 1 to 3, wherein the thermocouple is made of platinum or a platinum alloy. The thermocouple structure according to any one of claims 1 to 4, wherein the side surface of the positive electrode element line and the glass system of the columnar glass body are in contact with each other without gaps, and the side surface of the negative electrode element line is in contact with the glass of the columnar glass body. Contact without gaps. The thermocouple structure according to any one of claims 1 to 5, wherein the length of the columnar glass body is longer than the heated region of the thermocouple. The thermocouple structure according to any one of claims 1 to 6, wherein the thermocouple is a plurality of thermocouples, and the plurality of thermocouples in the columnar glass body are not in contact with each other along the length of the columnar glass body. In the state where the direction is embedded, the contacts of the thermocouple are arranged in a state where they are staggered from each other along the longitudinal direction of the columnar glass body. A manufacturing method of a thermocouple structure, comprising: a first step of connecting the positive electrode element wire and the negative electrode element wire of the thermocouple connected to one end of the positive electrode element wire and one end of the negative electrode element wire with a glass member; The positive electrode element line and the negative electrode element line are set to be non-contact; the second step is to put the thermocouple made in the first step into a state of inserting a hollow glass tube; and the third step is to insert the end of the hollow glass tube into the end The end near the contact point of the thermocouple is heated and softened, and then the hollow glass tube is hollowed out and softened along the length direction of the hollow glass tube, and then cooled to form a columnar glass body. For example, the manufacturing method of the thermocouple structure of claim 8, wherein one end of the above-mentioned hollow glass tube is open and the other end is closed. In the third step, the inside of the above-mentioned hollow glass tube is softened and then cooled. . For example, the manufacturing method of the thermocouple structure of claim 8 or 9, wherein in the first step, a plurality of thermocouples with the positive and negative element wires made non-contact are produced, and in the second step, they will be produced in the first step The plurality of thermocouples were inserted into the above-mentioned hollow glass tube in a state where they were not in contact with the positive and negative lead wires of other thermocouples, and the contact points of the thermocouples were staggered from each other. A columnar vitreous body is formed in the step.