TW201932241A - Flange replacing mechanism, cutting device, flange replacing and cut product manufacturing method by which automatic replacement of flanges is made possible - Google Patents

Abstract

The invention relates to a flange replacement mechanism, a cutting device, a flange replacement and a method for manufacturing a cut product. Can realize the automatic replacement of the flange. The flange replacement mechanism (120) is a flange replacement mechanism (120) capable of replacing a flange holding the blade (22), and includes an outer flange replacement portion (130) and a first outer flange (23a). Replacement with a second outer flange having a diameter different from that of the first outer flange (23a); and an inner flange replacement part (140) capable of replacing the first inner flange (20a) with The inner flange (20a) is a second inner flange (20b) with a different diameter.

Description

Flange replacement mechanism, cutting device, flange replacement and method for manufacturing cut products

The present invention relates to a flange replacement mechanism, a cutting device, a flange replacement method, and a method for manufacturing a cut product.

Japanese Patent Application Laid-Open No. 2010-036291 (Patent Document 1) describes a cutting device including a fixing flange and a mounting flange. In the cutting device described in Patent Document 1, in order to extend the life of the cutting insert, when the cutter is worn due to cutting and the protrusion amount becomes insufficient, the fixing flange and the mounting flange are replaced with small-diameter fixing projections. Edge and mounting and unloading flanges make the worn cutter protrude to ensure sufficient protrusion.
[Prior Art Literature]
[Patent Literature]
[Patent Document 1] Japanese Patent Laid-Open No. 2010-036291

[Problems to be Solved by the Invention]

However, in the cutting device described in Patent Document 1, neither the description nor the suggestion of automatically attaching and detaching the inner flange and the outer flange is made. Therefore, those skilled in the art based on the description of Patent Document 1, use manual operation to replace the flanges, but cannot automatically replace the flanges.
[Means for solving problems]

According to the embodiments disclosed herein, a flange replacement mechanism can be provided, which is a flange replacement mechanism capable of replacing a flange that holds a blade, and the flange replacement mechanism includes an outer flange replacement part that can The first outer flange is replaced with a second outer flange having a diameter different from the first outer flange; and the inner flange replacement portion is capable of replacing the first inner flange with a diameter different from the first inner flange. Second inner flange.

According to the embodiments disclosed herein, it is possible to provide a cutting device including the flange replacement mechanism, a blade, and a main shaft portion.

According to the embodiments disclosed herein, a flange replacement method can be provided, which is a flange replacement method that replaces a flange that holds a blade, and the flange replacement method includes: removing the first protrusion from the main shaft portion Steps of cutting edges and blades; steps of holding the first outer flange and the blade by an adsorption unit and moving them from the main shaft portion to the accommodating portion; step of removing the first inner flange from the main shaft portion; mounting on the main shaft portion A step of having a second inner flange having a different diameter from the first inner flange; and a step of mounting a second outer flange having a different diameter from the first outer flange on the main shaft portion.

According to the embodiments disclosed herein, it is possible to provide a method for manufacturing a cut product, which is a method for manufacturing a cut product using the flange replacement method. The method for manufacturing the cut product further includes: After the step of attaching the two outer flanges to the main shaft portion, the step of cutting the cutting object with a blade.
[Effect of the invention]

According to the embodiments disclosed herein, automatic replacement of the flange can be achieved.

The and other objects, features, aspects, and advantages of the present invention will be clarified by the following detailed description related to the present invention which is understood in association with the accompanying drawings.

Hereinafter, embodiments will be described. In the drawings for explaining the embodiments, the same reference numerals denote the same or corresponding parts.

FIG. 1 is a schematic plan view of a cutting device according to an embodiment as an example of the cutting device of the present invention. As shown in FIG. 1, the cutting device according to the embodiment is a device that is singulated into a plurality of products by cutting an object to be cut. The cutting device 111 according to the embodiment includes, as constituent elements, a substrate supply module MA, a substrate cutting module MB, and an inspection module MC. Each constituent element (each module MA to module MC) is detachable and replaceable with respect to other constituent elements.

The substrate supply module MA includes, for example, a substrate supply mechanism 113 configured to supply a sealed substrate 112 corresponding to an example of a cutting target, and a control unit CTL to perform operations or control of the cutting device 111 and the like. Make up. The sealed substrate 112 includes, for example, a printed circuit board or a substrate (not shown) including a lead frame, and a plurality of functional elements (wafers such as semiconductor elements) mounted in a plurality of regions of the substrate (not shown) (Shown) and a sealing resin (not shown) formed so as to cover a plurality of areas uniformly. The sealed substrate 112 is a cutting target that is finally cut and singulated. The sealed substrate 112 can be transferred to the substrate cutting module MB by, for example, a transfer mechanism (not shown).

The substrate cutting module MB may include, for example, a cutting platform 114 configured to provide a sealed substrate 112, a moving mechanism 115 configured to move the cutting platform 114 in the Y direction, and cutting A rotation mechanism 116 configured to rotate the platform 114 in the θ direction, a spindle portion 21 described later, and a flange replacement mechanism 120 in the embodiment described later. The cutting platform 114 may include, for example, a cutting jig (not shown). When the cutting platform 114 includes a cutting jig, the sealed substrate 112 may be provided on the cutting jig.

In FIG. 1, the cutting device 111 according to the embodiment is shown as a cutting device having a single spindle structure having one spindle portion 21 from the viewpoint of ease of explanation. However, it is needless to say that the cutting device 111 according to the embodiment is not limited to a cutting device having a single spindle configuration, and may be a cutting device having a dual spindle configuration having two spindle portions as described below, for example.

The main shaft portion 21 can be configured to be independently movable in the X direction and the Z direction, for example. A disk-shaped blade 22 can be attached to a distal end portion of the rotation shaft of the main shaft portion 21, for example. The blade 22 can be fixed in parallel with, for example, a plane (a plane including the Y axis and the Z axis) orthogonal to the axial direction (X direction) with respect to the rotation axis. In addition, in order to suppress frictional heat generated by the blade 22 rotating at a high speed, the main shaft portion 21 may include a cutting water nozzle (not shown) that sprays cutting water. In addition, the sealed substrate 112 can be cut while the cutting platform 114 is relatively moved with respect to the main shaft portion 21. The blade 22 can be configured, for example, by cutting the sealed substrate 112 by rotating in a plane including a Y axis and a Z axis.

The inspection module MC may include, for example, an inspection platform 110 and a tray 122. The inspection platform 110 can be configured, for example, so that a cut substrate 121 can be provided, and the cut substrate 121 is an assembly including a plurality of products P obtained by cutting and singulating the sealed substrate 112. The plurality of products P can be sorted into a good product and a defective product by, for example, inspection by an inspection camera (not shown). The tray 122 can be configured, for example, so as to be able to accommodate products P that have been sorted into good products.

2 (a) and 2 (b) are schematic side views showing an example of an adsorption arm used in the flange replacement mechanism according to the embodiment. Since the flange holds the blade of the cutting device, it has an outer flange and an inner flange as described later. As shown in FIGS. 2 (a) and 2 (b), the suction arm 1 includes an outer flange replacement portion 130 including a first outer flange suction portion 131 and a second outer flange suction portion 132, and an inner flange. Replacement section 140. As shown in FIG. 2 (a), the suction arm 1 includes an arm portion 3 connected to the outer flange replacement portion 130 and the inner flange replacement portion 140, and the outer flange replacement portion 130 and the inner flange replacement portion 140 are mounted on the arm portion. 3 ends. As shown in FIGS. 2 (a) and 2 (b), the suction arm 1 has a three-pronged structure including a first outer flange suction portion 131, a second outer flange suction portion 132, and an inner flange replacement portion 140. The trifurcation structure may be the structure shown in FIG. 2 (a) or the structure shown in FIG. 2 (b). The first outer flange suction portion 131, the second outer flange suction portion 132, and the inner flange replacement portion 140 may be connected to the respective arm portions by a single body. Hereinafter, for convenience of illustration and explanation, a flange replacement mechanism in which one flange suction section or flange replacement section is connected to one suction arm will be described for explanation.

A schematic perspective view of the first outer flange suction portion 131 is shown in FIG. 3. The first outer flange adsorption portion 131 includes an adsorption unit 2 including a first adsorption portion 4 having a cylindrical shape, a second adsorption portion 5 having a cylindrical shape, and a ring-shaped attaching / detaching member rotating portion 6. In FIG. 3, the attachment / detachment member rotating portion 6, the second adsorption portion 5, and the first adsorption portion 4 are shown as follows: from the adsorption side (distant side) of the adsorption unit 2 to the arm portion 3 side of the adsorption unit 2 ( Proximity side), and see the respective distal side surfaces in the order of the first suction part 4, the second suction part 5, and the attachment / detachment member rotation part 6. In the description of the adsorption unit 2, the near side refers to the arm portion 3 side, and the far side refers to the adsorption side of the adsorption unit 2.

FIG. 4 is a schematic plan view of the adsorption unit 2 of the first outer flange adsorption portion 131 illustrated in FIGS. 2 (a), 2 (b), and 3. The second suction part 5 is located inside the first suction part 4, and the attachment / detachment member rotation part 6 is located inside the second suction part 5. The first suction unit 4 includes a plurality of first suction ports 4x configured to suction a blade described later, and a ring-shaped first suction tank 4y communicating with the plurality of first suction ports 4x. The second suction unit 5 includes a plurality of second suction ports 5x configured to suck a flange or a hub described later, and a ring-shaped second suction tank 5y communicating with the plurality of second suction ports 5x. The attaching / detaching member rotating portion 6 includes a plurality of protruding portions 6 a arranged in a ring shape at intervals from each other. The attachment / detachment member rotation portion 6 is configured to be rotatable, and can be rotated, for example, in the direction of the arrow in FIG. 4. However, the rotation direction of the attachment / detachment member rotation portion 6 is of course not particularly limited. The attachment / detachment member rotating portion 6 is used to rotate a first attachment / detachment member 24 described later.

FIG. 5 is a schematic cross-sectional view of the adsorption unit 2 of the first outer flange adsorption portion 131 illustrated in FIGS. 2 (a) to 4. The first adsorption part 4 is hollow, and the hollow second adsorption part 5 is located inside the hollow of the first adsorption part 4. A gas flow path 14 is provided in the outer wall surrounding the hollow of the first suction section 4. The gas flow path 14 is configured to communicate with the first suction tank 4 y through the first suction port 4 x and suck a blade described later. The gas flow path 14 is connected to a gas flow path 4z communicating with the first adsorption port 4x. The first suction portion 4 includes a protruding portion 4 a protruding inward from a part of the outer wall on the near side of the first suction portion 4. The protruding portion 4a includes a protruding portion near surface 4b on the near side of the protruding portion 4a. The first adsorption section 4 includes a first adsorption section distal surface 4 c as a surface on the distal side of the first adsorption section 4.

A gas flow path 13 is provided in the outer wall surrounding the hollow of the second adsorption part 5, and the gas flow path 13 communicates with the second adsorption tank 5y through the second adsorption port 5x and adsorbs a flange or a hub. Way composition. A gas suction port 12 configured to suck the gas in the gas flow path 13 is attached to one end of the gas flow path 13. A gas flow path 5z communicating with the second adsorption port 5x is connected to the other end of the gas flow path 13. The second suction portion 5 includes a hook-like portion 5 a protruding inward at an end portion on the near side of the second suction portion 5. The hook-shaped portion 5 a includes the hook-shaped portion distant surface 5 b as the surface on the far side, and includes the hook-shaped portion near surface 5 c as the near-side surface. The second suction section 5 includes a second suction section distal surface 5 d as a surface on the far side of the second suction section 5.

The second suction section 5 is also hollow, and the attachment / detachment member rotating section 6 is located inside the hollow of the second suction section 5. The protruding portion 6 a of the attaching / detaching member rotating portion 6 is a member which partially protrudes toward the far side from the attaching / detaching member rotating portion 6. A rotation drive member 9 is attached to the proximal side of the attachment / detachment member rotation portion 6. When the rotation driving member 9 rotates around the shaft 10, the attachment / detachment member rotation portion 6 can also rotate. A part of the distal side of the attachment / detachment member rotating portion 6 protrudes more outward than the rotation driving member 9. The outwardly protruding portion of the attaching / detaching member rotating portion 6 includes the rotating portion near surface 6 b as a surface on the near side. The proximal side of the rotation driving member 9 also partially protrudes to the outside. The outwardly projecting portion of the rotation driving member 9 includes a near side projecting portion far surface 9 a as a far side surface.

A cylindrical sleeve 15 is located at a position that surrounds the periphery of the attachment / detachment member rotating portion 6, the rotation driving member 9, and the shaft 10. The sleeve 15 includes a storage portion 15a configured to accommodate the attachment member rotating portion 6 and a support portion 15b configured to support the storage portion 15a. The accommodating portion 15a protrudes more outward than the supporting portion 15b. The accommodating portion 15a includes a accommodating portion near surface 15c as a surface on the near side. The accommodating section near surface 15c faces the hook-shaped section distant surface 5b. The support portion 15b includes a distant surface 15d of the support portion as a surface on the distant side.

A connection portion 11 configured to connect the suction unit 2 and the arm portion 3 is attached to the proximal side of the sleeve 15. The connecting portion 11 is attached to the cannula 15 by fitting the distal portion 11 a of the connecting portion 11 into the hollow on the near side of the cannula 15. The connecting portion 11 includes a connecting portion inner near surface 11b facing the hooked portion near surface 5c, and a connecting portion outer near surface 11c facing the protruding portion near surface 4b. The connecting portion outer side near surface 11c is located farther and outside than the connecting portion inner side near surface 11b.

The first spring 16 is located at a position that surrounds the periphery of the rotation driving member 9 between the rotating portion near surface 6b and the near-side protruding portion distant surface 9a. The first spring 16 can expand and contract by changing the distance between the rotating portion near surface 6b and the near-side protruding portion distant surface 9a.

The second spring 8 is located at a position that surrounds the periphery of the support portion 15b between the hook-like portion near surface 5c and the connecting portion inner-side near surface 11b. The second spring 8 can expand and contract due to a change in the distance between the hook-like portion near surface 5c and the connecting portion inner-side near surface 11b.

The third spring 7 is located at a position that surrounds the periphery of the second spring 8 between the protruding portion near surface 4b and the connecting portion outside near surface 11c. The third spring 7 can expand and contract by changing the distance between the protruding portion near surface 4b and the connecting portion outside near surface 11c.

The second outer flange suction portion 132 includes a first suction portion having a cylindrical shape, a second suction portion having a cylindrical shape, and an annular shape, similarly to the first suction portion 131 shown in FIGS. 3 to 5. Since the suction unit of the rotating part of the attaching and detaching member, the details of the structure will not be repeated. The adsorption unit of the second outer flange adsorption portion 132 has a diameter different from that of the adsorption unit 2 of the first outer flange adsorption portion 131.

FIG. 6 is a schematic cross-sectional view of the inner flange replacement part 140 shown in FIGS. 2 (a) and 2 (b). The inner flange replacement portion 140 includes a first claw portion 141, a second claw portion 142 for attaching and detaching the inner flange, a fulcrum 143 rotatably supporting the first claw portion 141, a torsion spring 144, an exciting coil 145, and a wedge.状 件 146。 shaped member 146. The second claw portion 142 attaches and detaches a second attaching / detaching member (bolt) that fixes the inner flange, and is used for fixing a jig for removing the inner flange from the main shaft portion. The torsion spring 144 imparts an elastic force such that the first claw portion 141 is pressed toward the wedge-shaped member 146. When the wedge-shaped member 146 moves in the direction of the arrow A, the first claw portion 141 rotates in the direction of the arrow B with the fulcrum 143 as a center to resist the elastic force of the torsion spring 144. In FIG. 6, a first claw portion similar to the upper side is also provided on the lower side, and also includes a fulcrum 143, a torsion spring 144, and a wedge-shaped member 146 (not shown). The first claw portion 141 on the lower side also operates in the same manner as the first claw portion 141 on the upper side. In this way, the plurality of first claw portions 141 are held so as to sandwich the inner flange. In addition, the claw portion may be provided other than the upper side and the lower side. A magnetic force is generated in the second claw portion 142 by the magnetic field generated by the exciting coil 145, and the clamp can be held by the magnetic force.

The details will be described later, but the first attaching and detaching member 24 and the second attaching and detaching member 150 can be attached or detached to or from the main shaft portion 21 directly or indirectly. The first attachment / detachment member 24 is used to fix the first outer flange 23a to the first inner flange 20a, and the second attachment / detachment member 150 is used to fix the first inner flange 20a to the rotation shaft of the main shaft portion 21.

Hereinafter, a flange replacement method according to an embodiment using a flange replacement mechanism including an embodiment of the suction arm will be described. In this embodiment, a case where the blade 22 is a hubless blade without a hub will be described. However, this embodiment is not limited to a hubless blade, and it can be applied to a hub-equipped blade with a hub.

First, as shown in the schematic sectional view of FIG. 7, the suction unit 2 of the first outer flange suction portion 131 is brought closer to the first outer flange 23 a and the blade 22. Here, the blade 22 is sandwiched between the first inner flange 20 a (proximal side flange) and the first outer flange 23 a (distal side flange) of the main shaft portion 21. In addition, the first outer flange 23a is fastened to the first inner flange 20a by the first attachment / detachment member 24 such as a nut, so that the blade 22 is fixed to the first inner flange 20a of the main shaft portion 21 and the first outer flange. Between the flanges 23a. The near side of the first inner flange 20 a is a near side with respect to the main shaft portion 21, and the far side of the first outer flange 23 a is a far side with respect to the main shaft portion 21. The attaching and detaching member is not particularly limited as long as it is a member that fixes the first outer flange 23a to the first inner flange 20a.

Next, as shown in the schematic cross-sectional view of FIG. 8, the adsorption unit 2 of the first outer flange adsorption portion 131 is further moved toward the far side (the main shaft portion 21 side) until the first of the first adsorption portion 4 The suction portion distal surface 4 c is in contact with the surface on the near side (the arm portion 3 side) of the blade 22.

Then, as shown in the schematic sectional view of FIG. 9, the arm portion 3 is moved to the far side (the main shaft portion 21 side) so that the suction unit 2 of the first outer flange suction portion 131 is further moved to the far side ( Spindle part 21 side) moves. At this time, although the first suction portion 4 is urged by the blade 22 from the far side (the main shaft portion 21 side) to the near side (the arm portion 3 side), the third spring 7 is in contact with the protruding portion near surface 4b and Due to the contraction, the movement of the first suction portion 4 is suppressed, and an excessive load on the blade 22 is suppressed. Then, in a state where the movement of the first suction part 4 is suppressed, the second suction part 5 moves to the far side (the arm part 3 side), and the far surface of the second suction part on the far side of the second suction part 5 5d is in contact with the first outer flange 23a.

After the second suction portion distal surface 5d of the second suction portion 5 comes into contact with the first outer flange 23a, when the protruding portion 6a of the mounting member rotation portion 6 is not fitted into the through hole 24a of the mounting member 24, the first A spring 16 contracts, and the attaching / detaching member rotating portion 6 moves in the direction of the arrow 31 toward the near side (the arm portion 3 side). At this time, although the second suction portion 5 is urged from the far side (the main shaft portion 21 side) to the near side (the arm portion 3 side) by the first outer flange 23a, the second spring 8 is near the hook portion. Since the side surface 5c contacts and contracts, the movement of the second suction part 5 is suppressed.

Then, as shown in the schematic cross-sectional view of FIG. 10, when the protruding portion 6 a of the attaching / detaching member rotating portion 6 is not fitted into the through hole 24 a of the attaching / detaching member 24, the attaching / detaching member rotating portion 6 is, for example, toward the arrow 32. Direction rotation. By the rotation of the attachment member rotation portion 6, when the protruding portion 6 a of the attachment member rotation portion 6 reaches the position of the through hole 24 a of the attachment member 24, the first spring 16 is extended, and the protrusion portion 6 a is fitted into the penetration hole 24 a.

Next, the attachment / detachment member 24 is rotated by the rotation of the attachment / detachment member rotating portion 6. As a result, the outer flange 23 caused by the attachment / detachment member 24 is released from being fastened to the first inner flange 20a. Then, the first suction section 4 suctions the blade 22 and the second suction section 5 suctions the distal flange 23. After that, by moving the suction unit 2 of the first outer flange suction portion 131 to the near side (the arm portion 3 side), the attachment / detachment member 24 is removed from the main shaft portion 21 as shown in the schematic sectional view of FIG. 11, for example. The first outer flange 23 a and the blade 22 are detached while being held by the suction unit 2.

Then, the suction unit 2 of the first outer flange suction portion 131 is moved from the first operation position of the removable blade 22 shown in the schematic perspective views of FIG. 12 and FIG. 13 to the capacity shown in the schematic perspective view of FIG. 14. The second operation position of the attachment member 24, the first outer flange 23a, and the blade 22 is taken out and stored from the storage portion 51. 12 and FIG. 13 are schematic perspective views of a cutting device according to an embodiment of an example of a state where the adsorption unit 2 is located at the first operation position, and FIG. 14 shows an embodiment of an example of a state where the adsorption unit 2 is located at the second operation position. A schematic perspective view of the cutting device of the embodiment.

The cutting device of the embodiment shown in FIGS. 12 to 14 includes a second main shaft portion 25 at a position facing the main shaft portion 21. For example, as shown in the schematic perspective views of FIGS. 15 and 16, the flange replacement mechanism of the embodiment can attach and detach not only the flange of the main shaft portion 21 but also the flange of the second main shaft portion 25. 15 and 16 are schematic perspective views of a cutting device according to another embodiment of the present invention when the adsorption unit 2 is located at the first operation position.

As shown in the schematic perspective views of FIGS. 12 to 16, the flange replacement mechanism according to the embodiment includes a moving mechanism 40, and the moving mechanism 40 includes a first sliding mechanism 41 and a second sliding mechanism 42. For example, as shown in the schematic perspective views of FIGS. 17 and 18, the first sliding mechanism 41 can move the adsorption unit 2 by sliding in the Y direction shown by the arrows 61 and 62. The movement of the adsorption unit 2 in the Y direction can be used to move the adsorption unit 2 to the first operation position and the second operation position, for example.

For example, as shown in the schematic perspective views of FIGS. 19 and 20, the second sliding mechanism 42 can move the adsorption unit 2 by sliding in the Z direction indicated by the arrows 71 and 72. The movement of the adsorption unit 2 in the Z direction can be used for, for example, a step for moving from the first operation position to the second operation position and a step for moving from the second operation position to the first operation position. The Z direction shown by arrows 71 and 72 in FIGS. 19 and 20 intersects the Y direction shown by arrows 61 and 62 in FIGS. 17 and 18.

The flange replacement mechanism according to the embodiment includes a first rotation mechanism 43 shown in the schematic perspective views of FIGS. 21 and 22, and a second rotation mechanism 44 shown in the schematic perspective views of FIGS. 23 and 24.

For example, as shown in FIG. 21 and FIG. 22, the first rotation mechanism 43 is configured so that the adsorption unit 2 can be rotated in the X-θ direction indicated by the arrow 81 in the first virtual surface 82. The rotation of the suction unit 2 in the X-θ direction can be used for, for example, a step for moving from the first operation position to the second operation position, and a step for moving from the second operation position to the first operation position.

For example, as shown in FIG. 23 and FIG. 24, the second rotation mechanism 44 is configured to rotate the adsorption unit 2 in the second virtual plane 93 in the Y-θ direction indicated by the arrows 91 and 92. The rotation of the adsorption unit 2 in the Y-θ direction can be used, for example, to move the adsorption unit 2 from the main shaft portion 21 to the second main shaft portion 25 and to move the adsorption unit 2 from the second main shaft portion 25 to the main shaft portion 21. The second imaginary plane 93 is a imaginary plane different from the first imaginary plane 82, and the first imaginary plane 82 and the second imaginary plane 93 cross each other.

FIG. 25 is a schematic front view of the storage portion 51 of the flange replacement mechanism according to the embodiment. The storage unit 51 includes, from the uppermost stage to the lowermost stage, a cassette 53a to a cassette 53c for storing different blades, a cassette 53d for a first attachment / detachment member, a cassette 53e for a first outer flange, and a second outer casing. A box 53f for a flange, a box 53g for a first inner flange, a box 53h for a second inner flange, a box 53i for a second attachment / detachment member, and a box 53j for a jig. Although FIG. 25 shows an example in which the boxes are arranged in one row in the vertical direction, the boxes in the storage unit 51 may be arranged in multiple rows, for example, or may be arranged in one row in the horizontal direction. In addition, the arrangement order of each box can be arbitrarily changed. In addition, as shown in FIG. 26, the storage section 51 is located within the moving range of the suction arm 1. The two main shaft portions 21 and 25 are arranged at intervals indicated by an arrow C. The suction arm 1 is arranged between the two main shaft portions 21 and the main shaft portion 25. For example, the used blades are stored in the box 53a, and the used blades are stored in the box 53b and the box 53c.

As shown in the schematic perspective view of FIG. 27, the storage portion 51 further includes a first blade pressing member 54a, a second blade pressing member 54b, and a third blade pressing member 54c. The first blade pressing member 54a, the second blade pressing member 54b, and the third blade pressing member 54c are configured to press the blades stored in the cassette 53a, the cassette 53b, and the cassette 53c respectively around the cassette for the blade. This makes it possible to suppress the blade from falling out of the blade case. When storing and removing the blade, as shown in the schematic perspective view of FIG. 28, at least one of the first blade pressing member 54a, the second blade pressing member 54b, and the third blade pressing member 54c is erected upward to release the blade. Press.

FIGS. 29 (a) to 29 (e) show a form of accommodating parts of the accommodating part 51 of the flange replacement mechanism according to the embodiment. As shown in FIG. 29 (a), the attaching and detaching member 24 for fixing the outer flange is accommodated in the box 53 d so as to fit with the tap male screw 180. As shown in FIG. 29 (b), the first outer flange 23a is housed in the case 53e so as to fit into the boss (convex portion) 182. The boss 182 is provided so as to fit the opening of the first outer flange 23a. The opening of the first outer flange 23a is an opening into which the first inner flange 20a is inserted. The second outer flange (not shown) can also be stored in the box 53f in the same manner as the first outer flange 23a. The diameters of the openings of the first outer flange 23a and the second outer flange may be the same or different. When the diameter of the opening portion of the outer flange is made different, the outer diameter of the inner flange is changed to a diameter that fits in accordance with the diameter of the opening portion of the outer flange. By making the diameters different, it is possible to prevent errors in the combination of the outer flange and the inner flange. As shown in FIG. 29 (c), the first inner flange 20 a is housed in the box 53 g so as to fit into the boss (convex portion) 183. The boss 183 is provided so as to fit the opening portion of the first inner flange 20a into which the second attachment / detachment member 150 for fixing the inner flange is inserted. The opening portion of the first inner flange 20 a is inserted into the opening portion of the rotation shaft 170 of the main shaft portion 21. The second inner flange 20b can also be stored in the case 53h in the same manner as the first inner flange 20a. The diameters of the first inner flange 20a and the second inner flange 20b may be the same. As shown in FIG. 29 (d), the attachment / detachment member 150 for fixing the inner flange is housed in the case 53 i by suppressing a part of the front end of the attachment / detachment member 150 with the tap female screw 184. As shown in FIG. 29 (e), the inner flange replacement jig 160 is housed in the case 53j by fitting a tap male screw 181 into a recess provided in the inner flange replacement jig 160.

As described above, the suction unit 2 of the first outer flange suction portion 131 of the flange replacement mechanism removes the attachment / detachment member 24, the first outer flange 23a, and the blade 22 from the main shaft portion 21 or the second main shaft portion 25 as described above. After the lowering, it moves to the second operation position shown in FIG. 14 together with the attaching and detaching member 24, the first outer flange 23a, and the blade 22 adsorbed on the adsorption unit 2. At this time, for example, as shown in the schematic perspective view of FIG. 28, at least one of the first blade pressing member 54 a, the second blade pressing member 54 b, and the third blade pressing member 54 c is erected upward to release the pressing of the blade.

Then, the suction unit 2 of the first outer flange suction portion 131 that suctions the flange replacement mechanism of the blade 22 fits, for example, a central opening of the blade 22 into the case 53 b. Then, the adsorption unit 2 of the first outer flange adsorption portion 131 stops only the adsorption of the blade 22 by the first adsorption portion 4 and leaves the blade case. Thereby, the blade 22 can be accommodated in the cassette 53b.

Thereafter, the suction unit 2 of the first outer flange suction portion 131 stores the first outer flange 23a in the box 53e, and stores the attachment / detachment member 24 in the box 53d.

Next, as shown in FIG. 30, the inner flange replacement part 140 is brought close to the first inner flange 20a. The first inner flange 20 a is fixed to the rotation shaft 170 of the main shaft portion 21 by, for example, a mounting member 150 such as a bolt. The attaching and detaching member is not particularly limited as long as it is a member that fixes the first inner flange 20 a to the rotation shaft 170 of the main shaft portion 21. A recessed portion corresponding to the shape of the second claw portion 142 of the inner flange replacement portion 140 is provided in the attachment member 150, and the second claw portion 142 of the inner flange replacement portion 140 is fitted into the recessed portion of the attachment member 150. When the second claw portion 142 is not fitted into the recessed portion of the attachment / detachment member 150, the inner flange replacement portion 140 having a rotation mechanism is rotated. By the rotation of the inner flange replacement part 140, when the second claw part 142 reaches the position of the recessed part of the attachment / detachment member 150, the second claw part 142 is fitted into the recessed part of the attachment / detachment member 150.

Thereafter, as shown in FIG. 31, the inner flange replacement part 140 is rotated, for example, in the direction of the arrow 152, and the attachment / detachment member 150 to which the first inner flange 20 a is fixed is removed. The removed attachment / detachment member 150 moves to the storage portion 51 and is stored in the case 53i.

Moreover, as shown in FIG. 32, the attaching / detaching member 150 for fixing an inner flange may be provided with the notch part 151 instead of a recessed part. In this case, by setting the second claw portion 142 of the inner flange replacement portion 140 to a shape corresponding to the cutout portion 151, after the second claw portion 142 is fitted into the cutout portion 151, the inner flange replacement portion is made. 140 rotates to remove the attachment member 150 from the first inner flange 20a.

Next, the inner flange replacement part 140 takes out the inner flange replacement jig 160 from the box 53j, and when the jig 160 is fixed to the second claw part 142, it approaches the first inner flange 20a as shown in FIG. 33. Here, threads and grooves corresponding to each other are formed on the outer surface of the first inner flange 20a and the inner surface of the jig 160. By inserting the jig 160 into the first inner flange 20 a and rotating it, as shown in FIG. 34, the central protruding portion 161 of the jig 160 for the inner flange replacement and the first inner flange exposed by removing the attachment member 150 are exposed The inside of the rotating shaft front end 171 is in contact. Further, the jig 160 is rotated, and the first inner flange 20a is taken out so that the center protrusion 161 pushes out the front end 171 of the rotation shaft.

The portion including the second claw portion 142 is configured to be rotatable in the same manner as the attaching / detaching member rotating portion 6, whereby the jig 160 can be rotated. The direction of rotation of this portion is also not particularly limited similarly to the attachment / detachment member rotation portion 6.

Thereafter, the inner flange replacement portion 140 is moved to the storage portion 51, and the jig 160 is stored from the second claw portion 142 to the box 53 j. Next, the inner flange replacement portion 140 uses the first claw portion 141 to take out the second inner flange 20b having a diameter different from that of the first inner flange 20a from the case 53h. Since the first claw portion 141 is movable in the diameter direction of the second inner flange 20b, the first claw portion 141 is in contact with the second inner flange 20b and grasps the second inner flange 20b. Thereafter, as shown in FIG. 35, the inner flange replacement portion 140 moves toward the main shaft portion 21, and the second inner flange 20 b is fitted into the rotation shaft 170.

Next, the inner flange replacement portion 140 is moved toward the storage portion 51, and the second claw portion 142 is fitted into the recessed portion of the attachment member 150 for fixing the inner flange, and the attachment member 150 is removed from the case 53i. Thereafter, the second inner flange 20 b is fixed by the attachment / detachment member 150 by rotating the inner flange replacement portion 140 in the direction opposite to the arrow 152.

After that, the second outer flange suction portion 132 moves to the storage portion 51. The second outer flange suction portion 132 holds the attaching / detaching member 24 stored in the box 53d by using the protruding portion 6a, and sucks the second outer flange stored in the box 53f using the second suction groove 5y. Further, the blade pressing member 54 b that presses the cassette 53 b of the blade 22 is erected upward to release the pressing of the blade 22. After that, the second outer flange suction portion 132 is brought close to the blade 22 stored in the box 53 b, and the first suction portion of the first suction portion of the second outer flange suction portion 132 is in contact with the surface of the blade 22 at a distance. Then, the blade 22 is adsorbed on the far surface of the first adsorption section by sucking from the gas suction port through the gas flow path of the first adsorption section.

In addition, the blade adsorbed by the second outer flange adsorption portion 132 here may be another blade having a diameter different from that of the blade 22 removed from the first outer flange adsorption portion 131. The other blades can be stored in a box 53a or a box 53c.

Thereafter, the second outer flange suction portion 132 is moved from the second operation position shown in FIG. 14 to the first operation position shown in FIGS. 12 and 13. Then, as shown in FIG. 11, the second outer flange suction portion is moved closer to the main shaft portion 21 by moving the second outer flange suction portion toward the distal side of the suction portion.

Next, as shown in FIG. 10, the second outer flange suction portion is further moved to the far side (the main shaft portion 21 side). Thereby, the second outer flange comes into contact with the second inner flange 20b of the main shaft portion 21, and the blade 22 is sandwiched between the second inner flange 20b and the second outer flange. Then, the attachment / detachment member rotating portion 6 is rotated in the direction opposite to the direction of the arrow 32 to rotate the attachment / detachment member 24, and the second outer flange is fastened to the second inner flange 20b by the attachment / detachment member 24. Thereby, the blade 22 can be fixed between the second inner flange 20b and the second outer flange. Thereafter, the suction of the blade 22 by the first suction section 4 is stopped, and the suction of the second outer flange by the second suction section 5 is stopped.

Then, as shown in FIG. 7, the adsorption unit of the second outer flange adsorption portion 132 is moved to the near side (the arm portion 3 side), and the adsorption unit of the second outer flange adsorption portion 132 is separated from the main shaft portion 21. . This completes the mounting of the second inner flange 20b, the blade 22, and the second outer flange to the main shaft portion 21.

As described above, in the embodiment, automatic replacement of the flange can be realized.

The flange replacement mechanism according to the embodiment can improve the productivity of the cutting step by automating the flange replacement operation. In addition, the life of the blade is affected by the amount of wear of the blade. However, by using the flange replacement mechanism of the embodiment to replace the flange with a smaller diameter flange, further wear of the blade can be tolerated, which is the same as using only the blade. Compared with the case of the diameter of the flange, the life of the worn blade can be extended.

FIG. 36 is a schematic plan view of the detection section 100 used in the flange replacement mechanism of the embodiment. In the embodiment, the detection unit 100 includes a laser sensor 101 and a motor (not shown). The detection unit 100 is configured so that the laser sensor 101 can be moved in the direction of the arrow 102 by the driving of the motor.

FIG. 37 is a flowchart showing an example of a method of detecting at least one of abrasion and breakage of the blade 22 by the detection unit 100. First, in step 1 (S1), the position adjustment laser light shielding rate A is measured. S1 can be performed as follows, for example.

First, the position of the laser sensor 101 is adjusted. Here, for example, the position of the laser sensor 101 is adjusted so that the cutting edge of the blade 22 before the cutting is started is located at a laser emitting portion (not shown) and a laser detecting portion (not shown). between. Then, in a state where the position of the laser sensor 101 is adjusted, the laser is emitted from the emitting portion of the laser sensor 101 and detected by the detecting portion. Then, the light-shielding rate of the laser in this state (position-adjusted laser light-shielding rate A) was measured. The position adjustment laser shading rate A is the state of the laser sensor 101 after the position of the laser sensor 101 is adjusted and before the cutting is started. The detection amount of the laser detected by the laser detection unit is relative to that of the laser. Emission ratio. Since the incidence of the laser beam on the detection unit is blocked by the cutting edge of the blade 22 before the start of cutting, the position adjustment laser light shielding rate A may be high.

Then, in step 2 (S2), the measurement of the abrasion or damage detection laser light shielding rate A 'is performed. S2 can be performed as follows, for example.

First, the blade 22 is rotated by rotating the main shaft portion 21. Then, the object to be cut is cut by the rotating blade 22. Next, in a state where the cutting target is being cut by the rotating blade 22, the laser is emitted from the emitting portion of the laser sensor 101 and detected by the detecting portion. Then, the light shielding rate of the laser in this state (abrasion or damage detection laser shielding rate A ') was measured. In the case where the blade 22 is worn or damaged due to cutting, the incidence of the laser light on the detection portion is less likely to be blocked by the blade edge of the blade 22 than before the cutting is started. It may become lower than the position adjustment laser shading ratio A.

Then, in step 3 (S3), the light shielding rate A of the laser measured in S1 is compared with the light shielding rate A 'of the laser measured in S2. At this time, when the light shielding rate A of the laser is equal to the light shielding rate A ′ of the laser, the object to be cut is not stopped by the rotation of the blade 22, and the laser is returned to S2 to perform wear or damage detection laser. Measurement of light shielding rate A '.

On the other hand, if it is determined in S3 that the light-shielding rate A of the laser is not equal to the light-shielding rate A ′ of the laser, the blade 22 is stopped from rotating in step 4 (S4) and the blade 22 is automatically replaced.

As described above, when the flange replacement mechanism according to the embodiment includes the detection unit 100 configured to detect at least one of the wear and tear of the blade 22, at least the wear and tear of the blade 22 can be detected. After one, the cutting by the rotation of the blade 22 is automatically stopped, and the blade 22 of the embodiment is automatically replaced. This enables further automation of the blade 22 replacement.

Here, an example of the magnitude relationship between the diameters of the first outer flange 23a and the first inner flange 20a and the diameters of the second outer flange and the second inner flange 20b, and an example of the flange replacement and the blade replacement related thereto Instructions. In the above description, when the diameters of the first outer flange 23a and the first inner flange 20a are larger than the diameters of the second outer flange and the second inner flange 20b, the detection unit is used. 100 detects that the amount of wear of the blade has reached a predetermined value, and replaces the flange without replacing the worn blade, so that a previously discarded blade can be used. In the above description, when the diameters of the first outer flange 23a and the first inner flange 20a are smaller than those of the second outer flange and the second inner flange 20b, the detection is performed by the detection unit 100. After the wear amount of the blade becomes a predetermined value, the worn-out worn blade is replaced with a blade before use, and the flange is replaced. By repeating the series of operations described above, it is possible to automatically repeat flange replacement and blade replacement.

Although the embodiments have been described as above, it is also expected that the configurations of the respective embodiments described above are appropriately combined from the beginning.

Although the embodiment of the present invention has been described, the embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is clearly shown by the embodiments, and means all changes within the meaning and scope equivalent to the embodiments.

The embodiments disclosed herein may be applicable to a flange replacement mechanism, a cutting device, and a flange replacement method.

1‧‧‧ Adsorption arm

2‧‧‧ Adsorption unit

3‧‧‧ arm

4‧‧‧The first adsorption section

4a, 6a, 11a ‧‧‧ protrusions

4b‧‧‧ near the protrusion

4c‧‧‧Distant surface of the first adsorption section

4x‧‧‧first suction port

4y‧‧‧The first adsorption tank

4z, 5z, 13, 14‧‧‧ gas flow path

5‧‧‧Second adsorption section

5a‧‧‧ Hook

5b‧‧‧ Distant surface of hook

5c‧‧‧ near surface of hook

5d‧‧‧Distant surface of the second adsorption section

5x‧‧‧Second suction port

5y‧‧‧Second adsorption tank

6‧‧‧ Rotating part of loading and unloading member

6b‧‧‧ Near surface of rotating part

7‧‧‧ third spring

8‧‧‧ second spring

9‧‧‧ Rotary drive member

9a‧‧‧proximal side

10‧‧‧ axis

11‧‧‧ Connection Department

11b‧‧‧Inner side of the connecting part

11c‧‧‧Outside of the connecting part

12‧‧‧Gas suction port

15‧‧‧ Casing

15a‧‧‧Containment Department

15b‧‧‧Support Department

15c‧‧‧ Close to Containment Department

15d‧‧‧Far from the support department

16‧‧‧first spring

20a‧‧‧First inner flange

20b‧‧‧Second inner flange

21‧‧‧ Spindle

22‧‧‧ Blade

23‧‧‧distant side flange

23a‧‧‧First outer flange

24‧‧‧The first loading and unloading component

24a‧‧‧through hole

25‧‧‧Second spindle section

31, 32, 61, 62, 71, 72, 81, 91, 92, 102, 152, A, B, C‧‧‧ arrows

40‧‧‧ mobile agency

41‧‧‧first sliding mechanism

42‧‧‧Second sliding mechanism

43‧‧‧first rotation mechanism

44‧‧‧Second rotation mechanism

51‧‧‧Storage

53a ～ 53c‧‧‧‧Box for storing different blades

53d‧‧‧Box for the first loading and unloading member

53e‧‧‧Box for the first outer flange

53f‧‧‧Box for second outer flange

53g‧‧‧Box for the first inner flange

53h‧‧‧Box for second inner flange

53i‧‧‧Box for second loading and unloading unit

53j‧‧‧Box for fixture

54a‧‧‧First blade pressing member

54b‧‧‧Second blade pressing member

54c‧‧‧Third blade pressing member

82‧‧‧The first imaginary noodle

93‧‧‧Second imaginary noodle

100‧‧‧Testing Department

101‧‧‧laser sensor

110‧‧‧ Inspection platform

111‧‧‧ cutting device

112‧‧‧Sealed substrate

113‧‧‧ substrate supply mechanism

114‧‧‧cutting platform

115‧‧‧ Mobile agency

116‧‧‧Rotating mechanism

120‧‧‧Flange replacement mechanism

121‧‧‧ has cut off the substrate

122‧‧‧Tray

130‧‧‧Outer flange replacement section

131‧‧‧The first outer flange suction part

132‧‧‧Second outer flange suction part

140‧‧‧Inner flange replacement part (first flange replacement part)

141‧‧‧first claw

142‧‧‧second claw

143‧‧‧ Fulcrum

144‧‧‧torsion spring

145‧‧‧Excitation coil

146‧‧‧ wedge-shaped member

150‧‧‧Second loading and unloading component

151‧‧‧ incision

160‧‧‧Jig (Jig for replacing inner flange)

161‧‧‧ central protrusion

170‧‧‧rotation axis

171‧‧‧ front end of rotating shaft

180、181‧‧‧Taper external thread

182、183‧‧‧‧Boss (Boss)

184‧‧‧Tap female thread

CTL‧‧‧Control Department

MA‧‧‧ substrate supply module

MB‧‧‧ substrate cutting module

MC‧‧‧ Inspection Module

P‧‧‧ products

Steps S1 ～ S4‧‧‧‧

FIG. 1 is a schematic plan view of a cutting device according to an embodiment.

2 (a) and 2 (b) are schematic side views of an example of an adsorption arm used in the flange replacement mechanism of the embodiment.

FIG. 3 is a schematic perspective view when the first outer flange suction portion of the suction arm shown in FIG. 2 (a) and FIG. 2 (b) is viewed from another angle.

FIG. 4 is a schematic plan view of the first outer flange suction portion shown in FIG. 2 (a), FIG. 2 (b), and FIG. 3. FIG.

FIG. 5 is a schematic cross-sectional view of the first outer flange suction portion shown in FIGS. 2 (a) to 4.

FIG. 6 is a schematic cross-sectional view of the inner flange replacement portion shown in FIGS. 2 (a) and 2 (b).

FIG. 7 is a schematic cross-sectional view illustrating a part of the steps of the flange replacement method according to the embodiment.

FIG. 8 is a schematic cross-sectional view illustrating a part of the steps of the flange replacement method according to the embodiment.

FIG. 9 is a schematic cross-sectional view illustrating a part of the steps of the flange replacement method according to the embodiment.

FIG. 10 is a schematic cross-sectional view illustrating a part of the steps of the flange replacement method according to the embodiment.

FIG. 11 is a schematic cross-sectional view illustrating a part of the steps of the flange replacement method according to the embodiment.

12 is a schematic perspective view of a cutting device according to an embodiment of an example of a state in which a suction unit is located at a first operation position.

FIG. 13 is a schematic perspective view when the cutting device shown in FIG. 12 is viewed from another angle.

14 is a schematic perspective view of a cutting device according to an embodiment of an example of a state in which a suction unit is located at a second operation position.

15 is a schematic perspective view of a cutting device according to another embodiment of a state in which the suction unit is located at the first operation position.

FIG. 16 is a schematic perspective view when the cutting device shown in FIG. 15 is viewed from another angle.

FIG. 17 is a schematic perspective view illustrating an example of moving the adsorption unit in the Y direction by the first sliding mechanism according to the embodiment.

FIG. 18 is a schematic perspective view illustrating another example of moving the adsorption unit in the Y direction by the first sliding mechanism according to the embodiment.

FIG. 19 is a schematic perspective view illustrating an example of moving the adsorption unit in the Z direction by the second sliding mechanism according to the embodiment.

FIG. 20 is a schematic perspective view illustrating another example of moving the adsorption unit in the Z direction by the second sliding mechanism according to the embodiment.

FIG. 21 is a schematic perspective view illustrating an example of rotating the adsorption unit in the X-θ direction by the first rotation mechanism of the embodiment.

22 is a schematic perspective view illustrating another example of rotating the adsorption unit in the X-θ direction by the first rotation mechanism of the embodiment.

FIG. 23 is a schematic perspective view illustrating an example of rotating the adsorption unit in the Y-θ direction by the second rotation mechanism of the embodiment.

FIG. 24 is a schematic perspective view illustrating another example of rotating the adsorption unit in the Y-θ direction by the second rotation mechanism of the embodiment.

FIG. 25 is a schematic front view of a storage portion according to the embodiment.

FIG. 26 is a schematic perspective view showing a position of the storage unit in the cutting device according to the embodiment.

FIG. 27 is a schematic perspective view of the blade cassette shown in FIG. 25 when the blade pressing member according to the embodiment is lowered.

FIG. 28 is a schematic perspective view of the blade cassette shown in FIG. 25 when the blade pressing member according to the embodiment is raised.

FIGS. 29 (a) to 29 (e) are partial cross-sectional views showing a form of accommodating parts in the accommodating portion of FIG. 25.

FIG. 30 is a schematic cross-sectional view illustrating a part of the steps of the first inner flange replacement method according to the embodiment.

FIG. 31 is a schematic cross-sectional view illustrating a part of the steps of the first inner flange replacement method according to the embodiment.

FIG. 32 is a schematic cross-sectional view illustrating a part of the steps of the first inner flange replacement method according to the embodiment.

FIG. 33 is a schematic cross-sectional view illustrating a part of the steps of the first inner flange replacement method according to the embodiment.

FIG. 34 is a schematic cross-sectional view illustrating a part of the steps of the first inner flange replacement method according to the embodiment.

FIG. 35 is a schematic cross-sectional view illustrating a part of the steps of the first inner flange replacement method according to the embodiment.

FIG. 36 is a schematic plan view of a detection unit according to the embodiment.

FIG. 37 is a flowchart of an example of a method of detecting at least one of abrasion and breakage of the blade by the detection unit of the embodiment.

Claims (15)

A flange replacement mechanism capable of replacing a flange holding a blade, which is characterized in that: An outer flange replacement part capable of replacing the first outer flange with a second outer flange having a diameter different from that of the first outer flange; and The inner flange replacement part can replace the first inner flange with a second inner flange having a diameter different from that of the first inner flange. The flange replacement mechanism according to item 1 of the scope of patent application, wherein the outer flange replacement part includes: A first outer flange adsorption portion capable of adsorbing the first outer flange; and The second outer flange suction portion can suck the second outer flange. The flange replacement mechanism according to item 2 of the scope of patent application, wherein the first outer flange adsorption portion and the second outer flange adsorption portion include: A first suction part configured to suck the blade; A second adsorption part, which is located inside the first adsorption part and is configured to adsorb the outer flange independently of the adsorption of the first adsorption part; and The attachment / detachment member rotating portion is located inside the second suction portion and is configured to be capable of rotating the attachment / detachment member, and the attachment / detachment member can attach and detach the blade to and from the main shaft portion. The flange replacement mechanism according to item 1 of the patent application scope further includes: A storage portion capable of receiving at least the first inner flange and the second inner flange; and An inner flange moving mechanism capable of moving the inner flange replacement part, and The inner flange moving mechanism is configured so that the inner flange replacement portion can be moved between a first operation position and a second operation position, and the first operation position can attach and detach the first inner portion to and from the main shaft portion. The flange and the second inner flange, and the second operating position can receive or remove the first inner flange and the second inner flange with respect to the storage portion. The flange replacement mechanism according to item 4 of the patent application scope, wherein the moving mechanism includes: A first sliding mechanism configured to move the inner flange replacement portion in a first direction; A second sliding mechanism configured to move the inner flange replacement portion in a second direction crossing the first direction; and The rotation mechanism is configured so that the inner flange replacement part can be rotated. The flange replacement mechanism according to item 1 of the patent application scope further includes: A receiving portion capable of receiving at least the first outer flange and the second outer flange; and An outer flange moving mechanism capable of moving the outer flange replacement part, and The outer flange moving mechanism is configured so that the outer flange replacement portion can be moved between a first operating position and a second operating position, and the first inner flange can be moved to the first inner flange in the first operating position. The first outer flange and the second outer flange are attached and detached, and the first outer flange and the second outer flange can be housed or taken out of the storage portion in the second operating position. The flange replacement mechanism according to item 6 of the patent application scope, wherein the moving mechanism includes: A first sliding mechanism configured to move the outer flange replacement portion in a first direction; A second sliding mechanism configured to move the outer flange replacement portion in a second direction crossing the first direction; and The rotation mechanism is configured so that the outer flange replacement part can be rotated. The flange replacement mechanism according to item 5 or 7 of the scope of patent application, wherein the rotation mechanism includes: A first rotation mechanism configured to rotate the inner flange replacement portion and the outer flange replacement portion within a first imaginary plane; and The second rotation mechanism is configured so that the inner flange replacement part and the outer flange replacement part can rotate in a second virtual plane different from the first virtual plane. The flange replacement mechanism according to any one of claims 1 to 7 of the scope of patent application, further comprising: Arm, and The arm portion is connected to the outer flange replacement portion and the inner flange replacement portion. The flange replacement mechanism according to any one of claims 1 to 7 of the scope of patent application, further comprising: A detection unit capable of detecting at least one of abrasion and breakage of the blade. A cutting device including: The flange replacement mechanism according to any one of the scope of claims 1 to 10; The blade; and Spindle section. A flange replacement method that replaces a flange that holds a blade, including: A step of removing the first outer flange and the blade from the main shaft portion; A step of holding the first outer flange and the blade by an adsorption unit and moving the first outer flange and the blade from the main shaft portion to a storage portion; A step of removing the first inner flange from the main shaft portion; A step of mounting a second inner flange having a different diameter from the first inner flange on the main shaft portion; A step of mounting a second outer flange having a different diameter from the first outer flange on the main shaft portion. The flange replacement method according to item 12 of the patent application scope, further comprising: A step of replacing the blade with another blade having a different diameter. The flange replacement method according to item 12 or item 13 of the patent application scope, further including: A step of detecting at least one of abrasion and breakage of the blade. A manufacturing method of a cut product, which is a manufacturing method of a cut product using the flange replacement method according to any one of claims 12 to 14 of a patent application scope, wherein the manufacturing method of the cut product include: A step of cutting the object to be cut with a blade after the step of mounting at least the second outer flange on the main shaft portion;