TW201937097A - Cam-type control valve, and stroke adjustment method for cam-type control valve - Google Patents

Abstract

The present invention can facilitate the adjustment of the pressure of contact of a valve body with a valve seat and the adjustment of the height of a holder for mounting a driving means, and can also reduce the number of components, simplify assembly, and reduce costs. The present invention comprises: a body 4 provided with a fluid flow path 2 and an elastic valve seat 3; a valve body 5 for opening and closing the fluid flow path 2 by being brought into contact with or separated from the valve seat 3; a hood 6 fixed to the body 4; a stem 7 inserted and supported in the hood 6 so as to be movable in the axial direction of the hood 6, the stem 7 moving the valve body 5 to bring the valve body into contact with the valve seat 3; a cam 8 which acts on the stem 7 to press the stem 7 in the direction of the valve body 5; a driving means for rotationally driving the cam 8; a holder 10 which is supported on the hood 6 so as to be movable in the axial direction of the hood 6, and which holds the driving means; a first lock nut 11 which is screwed into the hood 6 so as to be adjustably movable in the axial direction of the hood 6, and which moves the holder 10 along the hood 6; and a second lock nut 12 which is screwed into the hood 6 so as to be adjustably movable in the axial direction of the hood 6, and which sandwiches and fixes part of the holder 10 together with the first lock nut 11.

Description

Cam type control valve and cam type control valve stroke adjustment method

The present invention is mainly applied to a fluid supply line such as a semiconductor manufacturing equipment and a solar battery manufacturing step, or a refrigerant circulation circuit of a chiller unit, and the like, and is used for a flow rate adjustment of a fluid such as a gas or a refrigerant. In particular, it is an improvement of the stroke adjustment of a motor-driven cam type control valve and a cam type control valve which can adjust the flow rate of gas and refrigerant with a small amount and precision by using a cam and a motor.

Conventionally, a motor-driven cam type control valve is known, for example, from Japanese Laid-Open Patent Publication No. SHO 61-117971 (Patent Document 1) and Japanese Laid-Open Publication No. 61-117972 (Patent Document 2). The disclosed construction.

In other words, the motor-driven cam type control valve includes a valve box including a fluid flow path and a valve seat, and a valve body that contacts and separates the valve seat of the valve box; An elastic body that urges the valve body toward the direction away from the valve seat; and a valve rod that is coupled to the valve body and that is liftably supported by the upper cover of the valve box; and abuts against the cam that is disposed at the upper end of the valve rod a roller plate, and a cam plate that presses the valve rod; and a pulse motor (stepping motor) for rotating the driving cam plate, the cam plate is rotated by a pulse motor, and the valve bar is pressed through the cam Thereby, the valve body provided at the lower end of the valve rod is brought into contact with the valve seat.

The aforementioned motor-driven cam type control valve can perform high-precision flow control, and is an apparatus that can achieve excellent practical effects.

Furthermore, with the cam type control valve of the pulse motor, the cam plate rotates only at a specific angle corresponding to the number of pulsations supplied to the pulse motor, and the valve rod and the valve body are slightly displaced by the rotation of the cam plate to execute the fluid. Flow control, therefore, when the valve is fully open or fully closed, in order to correctly position the valve body and the valve rod at the zero position (full open position or fully closed position), zero adjustment must be performed.

That is, when the cam type control valve is fully opened, in order to make the minimum radius portion of the cam plate abut against the cam roller, and the valve body and the valve seat form the most (distal) state, it must be adjusted, and in addition, when the cam type When the control valve is fully closed, in order to make the maximum radius portion of the cam plate abut against the cam roller, and the valve body contacts the valve seat with an appropriate force, it must be adjusted.

However, in the above-described conventional motor-driven cam type control valve, the adjustment mechanism for adjusting the position of the valve body or the like toward the zero position is not provided at all, and there is a problem that the "zero adjustment of the valve is rather cumbersome and time consuming".

Further, if the machining accuracy and assembly accuracy of the components of the cam type control valve are not increased, there is a case where the valve body is excessively pressed toward the valve seat or the valve body and the valve seat are not sufficiently contacted. As a result, there is a problem that the valve seat of the cam type control valve is damaged or the fluid is leaked.

In view of this, in order to eliminate such a problem, the applicant of the present invention has developed a cam type control valve that can finely adjust the cam and the stepping motor in the up and down direction, and can perform the zero point adjustment of the valve simply and easily (for example, Patent Literature) 3).

That is, as shown in Fig. 5, the cam type control valve 30 includes a main body 33 having a fluid flow path 31 and a valve seat 32, and a valve body 34 that contacts and separates the valve seat 32 to open and close the fluid flow path. And the cap 36 covers the body 33 and is fixed to the body 33 by the cap nut 35; and the valve rod 37 is guided by the cap 36 so as to be movable up and down, and the valve body 34 is pressed down. Contacting the valve seat 32; and the cam 38 disposed at a position above the valve rod 37 for pressing the valve rod 37; and a motor 39 for rotating the driving cam 38; and a motor socket 40 for holding the motor And the support frame 41 is fixed to the body 33 side to support the motor holder 40 so as to be movable in the up and down direction; and the elastic member 42 to push the motor holder 40 away from the upper side portion 41a of the support frame 41. And two height adjusting screws 43, slidably inserted into the upper side portion 41a of the support frame 41, and locked into the motor socket 40, and the motor socket 40 is supported by the support frame 41 to be suspended by the two height adjusting screws 43 The height adjustment of the support frame 41 by the motor socket 40 is performed.

Further, the cam type control valve 30 includes a contact pressure adjusting mechanism that is configured such that the piston member 44 is supported by the upper side portion 41a of the support frame 41 and the motor holder 40 so as to be movable in the vertical direction. And the elastic member 44 and the elastic adjusting screw 45 are locked in the upper side 41a of the support frame 41, and the piston member 44 is pressed, and the elastic force of the elastic member 42 is adjusted.

Then, according to the cam type control valve 30, since the motor holder 40 is supported in the suspension frame 41 by the height adjusting screw 43, the lock of the motor holder 40 can be adjusted by adjusting the height adjusting screw 43. To the extent, the upper and lower heights of the "motor 39 to which the cam 38 is attached" are adjusted, and as a result, there is an advantage that the zero point adjustment of the valve can be easily performed. Moreover, since the height adjusting screw 43 is provided in the upper side portion 41a of the support frame 41, there is an advantage that the height adjusting screw 43 can be easily handled.

Further, according to the cam type control valve 30 described above, since the elastic force of the elastic member 42 can be adjusted by the contact pressure adjusting mechanism, the valve body 34 can be adjusted to the valve seat 32 after the height adjustment of the cam 38 and the motor 39 is performed. The benefits of abutting pressure.

Having said that, even in the above-described cam type control valve 30, the problem to be solved remains.

That is, the cam type control valve 30 adjusts the elastic force of the elastic member 42 by forming the rotational elastic adjusting screw 45 when the abutting pressure of the valve body 34 is adjusted to the valve seat 32, so that the elastic adjusting screw 45 has the elastic member 42. In the case where the locking is excessively locked or the locking of the elastic member 42 is insufficient, there is a problem that it is difficult to adjust the abutment pressure of the valve body 34 to the valve seat 32 to a predetermined pressure, and the operator needs skill. For example, if the elastic member 42 is excessively locked, the valve body 34 and the valve seat 32 may be deformed in a large amount to be broken, or the valve opening may become difficult. On the contrary, if the locking of the elastic member 42 is insufficient, The expected sealing is not guaranteed.

Further, the cam type control valve 30 rotates two height adjusting screws 43 to adjust the lower limit position of the motor holder 40 provided with the cam 38 and the motor 39. Since the adjustment of the above-described elastic adjusting screw 45 and the height adjustment thereof are performed, the position adjustment of the motor holder 40 has a problem of time consuming. Not only that, but the two height adjustment screws 43 must be rotated and operated by the same amount, so that the adjustment becomes complicated.

In addition, the cam type control valve 30 needs to support the motor frame 40 so as to be movable in the vertical direction, the lock nut 41 for fixing the support frame 41 to the main body 33 side, and the height adjustment of the two. The screw 43, the piston member 44, the elastic adjusting screw 45, and the like have a problem that the number of parts is increased, resulting in complicated assembly and an increase in cost.

[Previous Technical Literature]
[Patent Literature]

[Patent Document 1] Japanese Shikai Show No. 61-117971
[Patent Document 2] Japanese Unexamined Limited Publication No. 61-117972
[Patent Document 3] Japanese Patent No. 5357721

[The problem that the invention wants to solve]

The present invention has been made in view of such problems, and an object of the invention is to provide an adjustment of the abutment pressure of a valve body to a valve seat and a height adjustment of a socket for mounting a motor as a driving means. Moreover, the number of parts can be reduced, and the simplification of assembly and the cost reduction of the cam type control valve and the cam type control valve stroke adjustment method can be achieved.

[Means for solving problems]

In order to achieve the above object, a first aspect of a cam type control valve according to the present invention includes: a body having a fluid flow path and a valve seat provided in the middle of the fluid flow path and having elasticity; and a valve body forming a contact with the valve seat Separating to open and close the fluid flow path; and a cylindrical cap fixed to the body; and a post that is inserted into the cap and movably moved in the axial direction of the cap, by the valve The body moves to abut against the valve seat, thereby blocking the fluid flow path; and the cam acts on the pillar to press the pillar toward the valve body; and the driving means rotates the cam in the forward and reverse directions And a socket supported by the cap in the axial direction of the cap and holding the driving means; the first lock nut is movably locked to the axial direction of the cap The cap and the socket are moved along the cap; and the second lock nut is adjustably locked to the cap along the axial direction of the cap, and the first anti-loose The nut holds the board that fixes the aforementioned seat unit.

According to a second aspect of the cam type control valve of the present invention, in the first aspect, the valve seat is formed by a valve seat (VALVE SEAT) which is formed in a ring shape by a resilient synthetic resin.

In a third aspect of the cam type control valve according to the present invention, in the first aspect or the second aspect, the valve body is formed of a metal diaphragm, and the metal diaphragm is bulged toward a center thereof. The portion is elastically deformed toward the other side by the pressing of the pillar, and is in contact with the valve seat, and is elastically restored by the elasticity retained by the pillar by releasing the pressing of the pillar, and is separated from the valve seat.

According to a fourth aspect of the cam type control valve of the present invention, in the first aspect, the cap is formed in a cylindrical shape into which the pillar is inserted, and the first lock nut and the second lock preventer are provided. The nut is movably locked to the outer peripheral surface of the cap in the axial direction of the cap, and the first lock nut is disposed in the socket, and the second lock nut is matched It is located outside the aforementioned seat.

According to a fifth aspect of the cam type control valve of the present invention, in the first aspect or the fourth aspect, a straight line is formed between the cap and the pillar so that the pillar is oriented in an axial direction of the cap Linear bushing for movement.

According to a sixth aspect of the cam type control valve of the present invention, in any one of the first aspect, the fourth aspect, or the fifth aspect, the socket is formed in a box shape having an open front surface, and the socket is The lower edge is slidably passed through the cap toward the axial direction of the cap.

The first aspect of the stroke adjustment method of the cam type control valve according to the present invention is the stroke adjustment method of the cam type control valve according to any one of the first to sixth aspects, comprising: the first step, When the cam presses the support and the valve body and the valve body abuts against the valve seat, the cam position that maximizes the distance between the rotation center of the cam and the support is used as the origin position, and the cam is formed from the origin position. a predetermined angle of rotation to form a gap between the valve seat and the valve body; and a second step of flowing a predetermined amount of gas from the primary side to the secondary side in the fluid flow path of the body; and the third step The first anti-loose nut is locked downwardly and adjusted, and the socket is pressed down along the cap to adjust the gap between the valve seat and the valve body, so that the primary side pressure of the fluid flow path of the body becomes predetermined. And the fourth step of locking and adjusting the second lock nut upward, and fixing the portion of the socket to the first lock nut to fix the seat to the cap; and 5th Step of rotating the aforementioned cam back to a predetermined angle Position, the valve element causes the valve seat by elastic deformation, to ensure tightness between the valve body and the valve seat.

[Effects of the Invention]

The cam type control valve of the present invention adjusts the abutment pressure of the valve body to the valve seat by adjusting the height of the seat of the "motor as the driving operation of the cam and the driving means of the first lock nut" Therefore, the valve body to the valve seat can be simply executed as compared with the conventional cam type control valve which "deforms the elastic member by the locking operation of the elastic adjusting screw to adjust the abutment pressure of the valve body to the valve seat" The adjustment of the abutment pressure.

In the cam type control valve of the present invention, the height adjustment of the "seat having the cam and the driving means" is performed by the first lock nut, and the seat is fixed to a predetermined height by the second lock nut. Therefore, the height adjustment of the socket can be easily and easily performed as compared with the conventional cam type control valve that "rotates two height adjustment screws to perform the height adjustment of the socket".

The cam type control valve of the present invention is provided with a socket for a cam and a driving means, and is supported by the cap so as to be movable in the up and down direction, and the height of the nut is adjusted by a first lock nut, and further, the elastic The member forms a valve seat, and the elastic force of the valve seat adjusts the abutment pressure of the valve body to the valve seat. Therefore, the support frame, the two height adjustment screws, the piston member, the elastic adjusting screw, and the like which are necessary in the conventional cam type control valve are not required. The number of parts is reduced, and simplification of assembly and cost reduction can be achieved.

The stroke adjustment method of the cam type control valve of the present invention comprises: a first step of rotating the cam from the origin position by a predetermined angle, and forming a gap between the valve seat and the valve body; and a second step of fluidizing the body a flow path for causing a predetermined amount of gas to flow from the primary side to the secondary side; and in the third step, the first lock nut is locked downwardly and adjusted, and the socket is pressed down along the cap to adjust the valve seat and the valve The gap between the bodies causes the primary side pressure of the fluid flow path of the body to be a predetermined pressure; and in the fourth step, the second lock nut is locked upwardly and adjusted, and the first retaining nut is held by the fixed bearing The seat is fixed to the cap by a part of the seat; and in the fifth step, the cam is rotated to a predetermined angle to return to the original position, and the valve body is urged to elastically deform the valve seat to ensure sealing between the valve body and the valve seat. Therefore, the stroke adjustment of the cam type control valve can be performed simply and easily.
As a result, according to the stroke adjustment method of the cam type control valve of the present invention, there is no case where the elastic adjusting screw excessively locks the elastic member or the elastic member is insufficiently locked, even if the operator is not skilled. It is also possible to easily and easily adjust the abutment pressure of the valve body to the valve seat to a predetermined pressure.

Hereinafter, embodiments of the present invention will be described in detail based on the drawings.

1 to 3 show a cam type control valve 1 according to an embodiment of the present invention, which is mainly a fluid supply line embedded in a semiconductor manufacturing facility, a solar cell manufacturing step, or the like, or cooled. In the refrigerant circulation circuit of the unit, the device for adjusting the flow rate of the fluid such as the gas and the refrigerant, the valve seat 3 formed of the "valve-shaped valve seat made of synthetic resin" is used for the valve body 5 made of the metal diaphragm. The fluid flow path 2 is opened and closed by contact, separation, and constitutes a normally open type cam type control valve 1.

That is, as shown in FIGS. 1 to 3, the cam type control valve 1 includes a main body 4 including a fluid flow path 2 and a valve seat 3 provided in the middle of the fluid flow path 2 and having elasticity; and a valve body 5 And the valve seat 3 is brought into contact with and separated to open and close the fluid flow path 2; and the cap 6 is fixed to the body 4; and the post 7 is inserted into the cap 6 so as to be movable in the up and down direction, and is supported by the valve The body 5 is pressed down to abut against the valve seat 3, thereby blocking the fluid flow path 2; and the cam 8 is pressed against the strut 7 to press the strut 7 downward; and a driving means such as a motor 9, a cam 8 is driven in the forward direction and the reverse direction; and the socket (hereinafter referred to as the motor socket 10) is supported by the cap 6 so as to be movable in the up and down direction, and holds the motor 9; the first lock nut 11 can be The motor cap 10 is press-fitted in the up-and-down direction and is pressed down along the cap 6; and the second lock nut 12 is adjustably locked to the cap 6 in the up-and-down direction. And the part of the motor socket 10 is fixed to the first lock nut 11 . As for the driving means for rotating the driving cam 8, in addition to the motor 9 (for example, a stepping motor) as used in the present embodiment, it is also possible to use a pressure cylinder, and a rack and pinion (rack and Various ways such as pinion).

Specifically, the main body 4 is formed of a metal material such as stainless steel, and includes a fluid flow path 2, a valve chamber 13 formed in the middle of the fluid flow path 2 and facing upward, and a bottom surface of the valve chamber 13 and having The elastic valve seat 3 has a female thread 4a that can be locked in the longitudinal direction of the cap 6.

The body 4 is provided with a thermal flow sensor 14 which is a rectifying layer portion 14a for measuring the flow rate of the fluid flowing in the fluid flow path 2 and flow detection. The portion 14b is formed.

The valve seat 3 is formed by a valve seat that is formed in a ring shape by a resilient synthetic resin, and is fitted and fixed in such a manner as to "open in the upward direction of the fluid flow path 2 on the upstream side". The bottom surface of the valve chamber 13 formed in the middle of the fluid flow path 2. The valve seat 3 is not particularly limited as long as it is elastic. In the present embodiment, it is formed of, for example, polychlorotrifluoroethylene (PolyChloro TriFluoroEthylene; PCTFE). The elastic force of the valve seat 3 can assume the task of the conventional elastic member 42 shown in Fig. 5.

The valve body 5 is formed by a metal diaphragm in which a central portion of a single or a plurality of circular thin metal plates is bulged upward to form an inverted disk shape. The metal diaphragm is housed in the valve chamber 13 of the main body 4, and the lower end portion of the cap 6 that has been locked to the female screw 4a of the main body 4 is locked toward the female screw 4a of the main body 4, and is placed The outer peripheral edge portion of the metal diaphragm is pressed toward the main body 4 side together with the stainless steel ring-shaped pressing adapter 15" on the outer peripheral portion of the metal diaphragm, thereby being fixed to the main body 4.

Further, when the metal diaphragm forming the valve body 5 is opened, the central portion is greatly raised and separated from the valve seat 3, and when the central portion of the metal diaphragm is pressed downward by the support 7, the disk 19 and the diaphragm are pressed. The member 21 is elastically deformed to abut against the valve seat 3 and locks the fluid flow path 2. Further, once the pressing force formed by the strut 7 is released, the elastic recovery and opening of the fluid flow path 2 are formed by the elasticity of the self. .

The metal film is a conventional article formed of a metal thin plate made of a nickel-cobalt alloy, an Inconel (registered trademark), a SPRON (registered trademark) alloy, or the like.

The cap 6 is formed of a metal material such as stainless steel and has a cylindrical shape into which the column 7 can be inserted. On the outer peripheral surface of the lower end portion of the cap 6, a lower portion of the female thread 4a detachably attached to the body 4 is formed. The thread 6a is formed on the outer peripheral surface of the upper end portion of the cap 6 so that the first lock nut 11 can be locked in a direction toward the axial direction of the cap 6 (hereinafter, "the axis along the cap 6" The male thread 6b whose movement is adjusted in the direction of the direction is referred to as an up-and-down direction, and the intermediate portion of the intermediate portion of the cap 6 is formed with an intermediate portion in which the second lock nut 12 is locked to be moved in the vertical direction. Thread 6c.

Further, on the outer peripheral surface between the male screw 6c and the lower male screw 6a of the intermediate portion of the cap 6, a polygonal nut portion 6d that is rotated by the tool or the like to lock the cap 6 into the main body 4 is formed.

In addition, the outer peripheral surface between the upper male screw 6b and the intermediate male male screw 6c of the cap 6 is formed with a sliding portion 6e that supports the motor holder 10 so as to be slidably movable in the vertical direction.

The pillar 7 is formed of a metal material such as stainless steel and has a columnar shape. The upper end portion of the pillar 7 is formed with a double fork portion 7a for supporting the roller 16 made of a bearing abutting against the cam 8 so as to be rotatable. . The roller 16 is disposed in a posture in which a portion thereof protrudes from the upper side of the double fork portion 7a of the pillar 7 and is supported by "a parallel pin 17 that is supported by the double fork portion 7a". Free to rotate.

Then, the above-mentioned strut 7 is supported by the cap 6 so as to be movable in the vertical direction by the linear bushing 18, and is placed on the disc 19 which is inserted into the lower end portion of the lower end of the cap 6 so as to be movable up and down.

The linear bushing 18 is a guiding device for infinite line motion of a plurality of balls circulating in a holder (not shown), and is fixed by the buckle 20 so as not to be detached from the cap 6. . The linear bushing 18, since the balls are in point contact with the strut 7, can form a linear motion with low friction and high precision, and can obtain high-precision motion. In addition to the linear bushing 18, an oil-free bushing can be assembled at the post 7 of the cap 6 through the port.

Further, the disk 19 is formed of a metal material such as stainless steel and has a cylindrical shape having a meandering shape, and the lower end surface of the disk 19 is attached to the upper surface of the central portion of the metal diaphragm as the valve body 5, Further, it is a diaphragm presser 21 made of synthetic resin. The disk 19 is a member that abuts against the upper surface of the pressing joint 15 by the crotch portion 19a, thereby restricting the unreasonable lowering of the strut 7. Further, the crotch portion 19a restricts the rise of the strut 7 by abutting against the "section portion formed at the lower end portion of the strut 7 through the port of the cap 6".

In the above-described embodiment, the pillar 7 and the disk 19 are formed as separate individuals. However, in other embodiments, the pillar 7 and the disk 19 may be integrally formed, although not shown.

The cam 8 is formed of a metal material made of stainless steel in a columnar shape, and is fixed to the rotation shaft 9a of the motor 9 in the horizontal posture so that "the position deviated from the central axis by a predetermined distance" becomes the rotation center 8a. The cam 8 has a cam surface 8b on its outer peripheral surface, and the center of rotation of the cam 8 is pressed by the cam surface 8b to press the support 7, the disk 19, and the valve body 5 to bring the valve body 5 into contact with the valve seat 3. The position of the cam 8 whose distance between 8a and the strut 7 becomes the largest is used as the origin position. In the present embodiment, as shown in Fig. 4, the shape of the cam 8 is set such that the support 7, the disk 19, and the valve body 5 are displaced upward by about 80 μm when rotated 50 degrees from the origin position. Further, the cam 8 is formed in a bilaterally symmetrical shape.

In the above embodiment, the cam 8 is formed in a cylindrical shape. However, in other embodiments, the cam 8 may be formed in a disk shape. Further, in the above-described embodiment, the cam 8 is formed in a bilaterally symmetrical shape, but in other embodiments, the cam 8 may be formed in a left-right asymmetrical shape.

In the present embodiment, the motor 9 is attached to the motor holder 10 by a plurality of fixing bolts 22 in a horizontal posture. The motor 9 uses a stepper motor with a controllable position.

Although the stepping motor is used as the motor 9 in the above embodiment, any type of motor may be used as long as it is a motor that can control the angle of rotation. For example, the motor 9 can also be: a servo motor (DC motor + encoder) and an AC servo motor (AC motor + encoder), an ultrasonic motor.

The motor socket 10 is formed of a metal material such as aluminum or stainless steel, and has a box shape in which the front surface is open. On the back surface of the motor socket 10, the motor 9 is mounted in a horizontal posture by a fixing bolt 22, and further, in the motor socket 10. On the inner side, a cam 8 and a bearing holder 23 that supports the front end of the cam 8 are housed.

The bearing holder 23 is formed in a T shape by a metal material such as stainless steel, and is fixed in a suspended shape by a plurality of fixing bolts 24 on the lower surface of the upper side portion 10a of the motor holder 10. The bearing holder 23 is provided with a bearing 26 that rotatably supports the "support shaft 25 fitted to the end portion of the cam 8".

Further, on the inner surface of one of the side walls of the motor holder 10, a sensor 27 (for example, a photosensor) for detecting the rotational angle position of the cam 8 is mounted.

Then, the motor holder 10 is formed in the lower side portion 10b thereof by a sliding hole 10c through which the sliding portion 6e of the cap 6 is slidably slidable in the vertical direction, and is passed through the sliding portion 6e of the cap 6 The sliding hole 10c is formed to be slidable in the vertical direction with respect to the cap 6.

The first lock nut 11 has a circular outer peripheral surface, and a female thread 11a that is detachably fitted to the upper male thread 6b of the cap 6 is formed on the inner peripheral surface thereof. The first lock nut 11 is placed on the lower side portion 10b of the motor socket 10 when it is locked to the upper male thread 6b of the cap 6, and is used to perform "staking the motor socket 10 along the cap" The component of the task of 6 pressing down.

Further, on the outer circumferential surface of the first lock nut 11, a rotation operation hole 11b is formed at each fixed angle, and the first anti-loose screw can be rotated by inserting a rod-shaped tool into the rotation operation hole 11b. Cap 11. Therefore, even if the first lock nut is housed in the box-shaped motor holder 10 that is open in the front, the first lock nut 11 can be easily and easily rotated.

The second lock nut 12 has a polygonal outer peripheral surface, and a female thread 12a detachably fitted to the lower male thread 6a of the cap 6 is formed on the inner peripheral surface thereof. The second lock nut 12 is positioned below the lower side portion 10b of the motor socket 10 when it is locked to the lower male thread 6a of the cap 6, and is used to hold the first lock nut 11 A member of the lower side portion 10b of the motor socket 10.

Next, a stroke adjustment method of the cam type control valve 1 described above will be described.

First, the rotational angular position of the cam 8 is rotated to a position where "the distance between the rotational center 8a of the cam 8 and the roller 16 is maximized", and this position is used as the origin position of the cam 8, and the cam 8 is made from the origin position. A predetermined angle is turned and a predetermined gap is formed between the valve seat 3 and the valve body 5 (first step).

When the cam 8 is placed at the origin position, the support 7 and the disk 19 are pressed against the "elastic force of the metal diaphragm forming the valve body 5" by the cam 8, and the central portion of the metal diaphragm is "provided". The diaphragm pressing device 21" of the disk 19 is pressed down to abut against the valve seat 3. That is, once the cam 8 is set at the origin position, the cam type control valve 1 is in a state in which the fluid flow path 2 is closed.

Once the cam 8 is rotated from the origin position by a predetermined angle, the central portion of the metal diaphragm forming the valve body 5 will be restored to its original shape by its own elastic force, while the strut 7 and the disc 19 will be subjected to the elastic force of the metal diaphragm. Push up the predetermined amount upwards. As a result, the cam type control valve 1 forms a predetermined gap between the valve seat 3 and the valve body 5, and the fluid flow path 2 is opened.

In the present embodiment, the cam 8 is rotated by 50 degrees from the origin position. Further, the shape of the cam surface 8a of the cam 8 is determined in such a manner that when the cam 8 has been rotated 50 degrees from the origin position, the pillar 7, the disk 19, and the central portion of the metal diaphragm forming the valve body 5 are formed. Displaces upward by about 80 μm.

When the cam 8 is rotated 50 degrees from the origin position and the fluid flow path 2 is opened, a predetermined amount of gas flows to the fluid flow path 2 of the body 4. That is, in the fluid flow path 2 of the body 4, a predetermined amount of gas flows from the primary side to the secondary side (second step).

In the present embodiment, 100 sccm of N ₂ gas (nitrogen gas) flows from the primary side to the secondary side in the fluid flow path _{2 of the main} body 4.

If the N ₂ gas flows in the fluid flow path 2 of the body 4, the first lock nut 11 that is locked to the upper male thread 6b of the cap 6 is locked and adjusted downward, so that the motor provided with the motor 9 and the cam 8 is provided. The socket 10 slides downward along the sliding portion 6e of the cap 6, and adjusts the gap between the valve seat 3 and the valve body 5 so that the primary side pressure of the fluid flow path 2 of the body 4 becomes a predetermined pressure (step 3) ). That is, once the first lock nut 11 is locked downward, the motor holder 10 provided with the motor 9 and the cam 8 is lowered, and the lower arm 8 causes the post 7 and the disc 19 to "form the valve". The elastic force of the metal diaphragm of the body 5 is pressed downward, and the gap between the valve seat 3 and the valve body 5 is adjusted to change the primary side pressure of the fluid flow path 2 of the body 4.

In the present embodiment, the amount of locking of the first lock nut 11 downward is adjusted so that the primary side pressure of the fluid flow path 2 of the main body 4 becomes 50 Torr.

When the locking adjustment of the first lock nut 11 is completed, the second lock nut 12 that has been locked to the intermediate male thread 6c of the cap 6 is locked upwardly to be adjusted with the first lock nut. 11 holds the lower side portion 10b of the motor holder 10 and fixes the motor holder 10 to the cap 6 (step 4). In this way, the height of the cam 8 and the position of the center of rotation 8a of the cam 8 can be determined.

When the motor holder 10 is fixed to the cap 6, the cam 8 is rotated by a predetermined angle in a direction opposite to the above to return to the original position (step 5). At this time, the strut 7 and the disk 19 are pressed against the "elastic force of the metal diaphragm forming the valve body 5" by the cam 8, and the central portion of the metal diaphragm is closely attached to the "valve by the valve." The state of the valve seat 3" formed by the seat is pressed, and the valve seat 3 is crushed by a predetermined amount. As a result, the cam type control valve 1 is in a closed state, and the desired sealing performance can be ensured at the time of valve closing.

In the present embodiment, the cam 8 is rotated 50 degrees in the opposite direction to the original position. Further, in order to ensure the necessary sealing performance by the displacement characteristics and the flow rate characteristics of the cam 8, it is formed when the valve is closed: the valve seat 3 is crushed by about 40 μm.

When the cam type control valve 1 is in the closed state, N ₂ gas having a pressure of 100 Torr is applied to the primary side of the fluid flow path 2 of the body 4, and it is confirmed whether or not the leakage from the valve seat 3 is 0.1% or less. If the leakage from the valve seat 3 becomes 0.1% or less, the sealing property at the time of valve closing is ensured.

As described above, the adjustment of the stroke of the cam type control valve 1 (that is, the amount of lift of the support 7 and the disk 19, and the amount of deformation of the metal diaphragm) is performed.

Then, if the stroke adjustment of the cam type control valve 1 is performed as described above, and the desired sealing performance is ensured in the closed state, a pulse signal is sent to the motor 9 so that the cam 8 faces the open cam type control valve 1. The direction is rotated. In this case, from the state in which the valve body 5 abuts against the valve seat 3, the distance between the rotation center 8a of the cam 8 and the roller 16 is reduced, and the valve body 5 is caused to be formed by the elastic force of the metal diaphragm itself of the valve body 5. The valve seat 3 is separated and the fluid flow path 2 is opened.

When the fluid flow path 2 is opened and the flow rate of the fluid flow path 2 has reached a desired value, the rotation of the motor 9 is stopped, and the rotational angle position of the stop position is memorized in the control circuit of the motor 9 (not shown). Set to the maximum opening.

In this way, in the cam type control valve 1, once a pulse signal of a predetermined value is input to the motor 9 in the state of the maximum opening degree, the motor 9 performs a stepping rotation corresponding to the number of input pulsations, whereby The cam 8 is rotated by a predetermined angle.

When the cam 8 is rotated, the roller 16 is pressed downward, and as a result, the support 7 and the disk 19 are gradually pressed against the "elastic force of the metal diaphragm forming the valve body 5", and the central portion of the metal diaphragm is transmitted. "The diaphragm pressing device 21 provided on the disk 19" is gradually lowered downward toward the bottom. As a result, the interval between the metal diaphragm and the valve seat 3 is narrowed, and the flow rate of the fluid is controlled.

Then, the metal diaphragm forming the valve body 5 is pressed down, and the central portion of the metal diaphragm is brought into contact with the valve seat 3. When the valve seat 3 is pressurized by a predetermined amount, the cam type control valve 1 is fully closed. The fluid flow path 2 is blocked. At this time, the valve seat 3 must be crushed by about 40 μm more than the valve body 5 in order to secure the necessary sealing performance.

When the cam 8 is rotated from the state in the opposite direction to the above, and the distance between the cam 8 and the roller 16 is shortened, the metal diaphragm forming the valve body 5 is restored to its original shape by its own elastic force, while Push the strut 7 and the disc 19 upward. As a result, the cam type control valve 1 has the metal diaphragm separated from the valve seat 3 to open the fluid flow path 2.

[industrial use]

The cam type control valve 1 of the present invention is mainly used for a fluid supply line such as a semiconductor manufacturing facility and a refrigerant circulation circuit of a cooling unit. However, the use target is not limited to the semiconductor manufacturing apparatus described above, and can be used in the chemical industry. And fluid supply lines in various devices such as the pharmaceutical industry and the food industry.

1‧‧‧Cam type control valve

2‧‧‧ fluid flow path

3‧‧‧ valve seat

4‧‧‧Ontology

5‧‧‧ valve body

6‧‧‧bonnet

7‧‧‧ pillar

8‧‧‧ cam

9‧‧‧Motor (driver)

10‧‧‧Motor bearing (bearing)

10b‧‧‧The lower part of the motor bearing

11‧‧‧1st lock nut

12‧‧‧2nd anti-loose nut

Fig. 1 is a perspective view showing a cam type control valve according to an embodiment of the present invention.

Fig. 2 is a partially cutaway front view of the cam type control valve shown in Fig. 1.

Fig. 3 is a partial longitudinal sectional side view of the cam type control valve shown in Fig. 1.

Fig. 4 is an explanatory view of a cam used for the cam type control valve shown in Fig. 1.

Figure 5: A partial longitudinal cut-off front view of a conventional cam control valve.

Claims (7)

A cam type control valve having: a body having a fluid flow path and a valve seat provided on the way of the fluid flow path and having elasticity; a valve body that contacts and separates the valve seat to open and close the fluid flow path; and a tubular cap fixed to the body; and The struts are inserted into the cap and movably moved in the axial direction of the cap, and are supported by the valve body to abut against the valve seat, thereby blocking the fluid flow path; a cam acting on the aforementioned pillar, pressing the pillar toward the valve body; and Driving means driving the cam in the forward and reverse directions; and a socket supported by the cap moving in the axial direction of the cap and maintaining the aforementioned driving means; and a first lock nut that is adjustably locked to the cap in the axial direction of the cap to move the socket along the cap; and The second lock nut is movably locked to the cap in the axial direction of the cap, and the first retaining nut is gripped and fixed to a part of the socket. The cam type control valve according to claim 1, wherein the valve seat is formed by a valve seat formed of an elastic synthetic resin. The cam type control valve according to claim 1 or claim 2, wherein the valve body is formed of a metal diaphragm, and the metal diaphragm has a central portion that bulges toward one side, and is pressed by the pillar The other side is elastically deformed to contact the valve seat, and is elastically restored by the elasticity retained by the support by releasing the pressing of the pillar, thereby separating from the valve seat. The cam type control valve according to claim 1, wherein the cap is formed in a cylindrical shape into which the support post is inserted, and the first lock nut and the second lock nut are respectively provided toward the cap The axial direction is adjustably locked to the outer peripheral surface of the cap, the first lock nut is disposed in the socket, and the second lock nut is disposed outside the seat. . The cam type control valve according to claim 1 or claim 4, wherein a linear bushing for linearly moving the strut in the axial direction of the cap is fitted between the cap and the strut. The cam type control valve according to any one of the preceding claims, wherein the socket is formed in a box shape having an open front, and a lower side portion of the socket is slidably slidable toward an axial direction of the cap Pass the cap. A method for adjusting a stroke of a cam type control valve is a stroke adjustment method of a cam type control valve according to any one of claim 1 to claim 6, comprising: In the first step, the cam body is pressed by the cam and the valve body is pressed against the valve seat, and the position of the cam at which the distance between the rotation center of the cam and the pillar is the largest is used as the origin. a position from which the cam is rotated by a predetermined angle, and a gap is formed between the valve seat and the valve body; and In the second step, a predetermined amount of gas flows from the primary side to the secondary side in the fluid flow path of the body; In the third step, the first lock nut is locked downwardly, and the socket is pressed down along the cap to adjust the gap between the valve seat and the valve body to make the fluid flow path of the body The primary side pressure becomes a predetermined pressure; and In the fourth step, the second lock nut is locked upwardly, and a part of the socket is fixed to the first lock nut, and the socket is fixed to the cap; In the fifth step, the cam is rotated to a predetermined angle to return to the home position, and the valve body urges the valve seat to elastically deform to ensure the sealing property between the valve body and the valve seat.