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TW201918460A - Method for producing glass film - Google Patents

Method for producing glass film Download PDF

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Publication number
TW201918460A
TW201918460A TW107125046A TW107125046A TW201918460A TW 201918460 A TW201918460 A TW 201918460A TW 107125046 A TW107125046 A TW 107125046A TW 107125046 A TW107125046 A TW 107125046A TW 201918460 A TW201918460 A TW 201918460A
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TW
Taiwan
Prior art keywords
glass film
shaped member
conveying
rod
glass
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Application number
TW107125046A
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Chinese (zh)
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TWI759509B (en
Inventor
長谷川義徳
森弘樹
森浩一
秋山修二
植村弥浩
松本直之
Original Assignee
日商日本電氣硝子股份有限公司
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Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/08Severing cooled glass by fusing, i.e. by melting through the glass
    • C03B33/082Severing cooled glass by fusing, i.e. by melting through the glass using a focussed radiation beam, e.g. laser
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06Forming glass sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/08Severing cooled glass by fusing, i.e. by melting through the glass
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/54Glass

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Laser Beam Processing (AREA)

Abstract

A transport step in a method for producing a glass film G comprises a wrinkle removal step for removing wrinkles from the glass film G by a wrinkle removal unit 20 disposed on the upstream side from a laser irradiation device 25. A cutting step in the method for producing a glass film G involves separating the glass film G by irradiating the glass film G with laser light L after wrinkles Ge are removed from the glass film G in the transport step, and generating a filamentous peeled product Gg from the width-direction end portion of the separated glass film G.

Description

玻璃膜的製造方法Manufacturing method of glass film

本發明是有關於一種製造可捲繞為捲筒狀的玻璃膜的方法。The present invention relates to a method for manufacturing a glass film that can be wound into a roll shape.

如周知般,於液晶顯示器、有機電致發光(electroluminescence,EL)顯示器等的平板顯示器(flat panel display,FPD)所使用的板玻璃、有機EL照明所使用的板玻璃、作為觸控面板的構成元件的強化玻璃等的製造中所使用的板玻璃、進而太陽能電池的面板等所使用的板玻璃事實上正在被推進薄壁化。As is well known, the glass used in flat panel displays (FPD) such as liquid crystal displays and organic electroluminescence (EL) displays, the plate glass used in organic EL lighting, and the structure of touch panels The sheet glass used in the production of element-reinforced glass and the like, and further the sheet glass used in the panels of solar cells and the like are actually being thinned.

例如在專利文獻1中,揭示有一種厚度為數百μm以下的玻璃膜(薄板玻璃)。此種玻璃膜亦如在該文獻中所記載般,通常是藉由採用所謂的溢流下拉(overflow down draw)法的成形裝置而連續成形。For example, Patent Document 1 discloses a glass film (thin glass) having a thickness of several hundred μm or less. As described in this document, such a glass film is usually continuously formed by a forming apparatus employing a so-called overflow down draw method.

藉由溢流下拉法而連續成形的長條的玻璃膜,例如在其搬送方向自鉛垂方向改變為水平方向後,被搬送裝置的橫向搬送部(水平搬送部)繼續朝下游側搬送。在該搬送途中,玻璃膜的寬度方向兩端部被切斷去除。其後,玻璃膜藉由被捲繞輥捲繞為捲筒狀,而構成玻璃捲筒。The long glass film continuously formed by the overflow down-draw method, for example, after the conveying direction thereof is changed from the vertical direction to the horizontal direction, the lateral conveyance section (horizontal conveyance section) of the conveyance device continues to convey to the downstream side. During this transport, both ends in the width direction of the glass film are cut and removed. Thereafter, the glass film is wound into a roll shape by a winding roll to constitute a glass roll.

作為切斷玻璃膜的寬度方向兩端部的技術,在專利文獻1中揭示有一種雷射切割技術。在雷射切割中,在藉由金剛石切刀等的裂痕形成機構於玻璃膜形成初始裂痕之後,對該部分照射雷射光而進行加熱。其後,藉由冷卻機構冷卻經加熱的部分,而藉由在玻璃膜產生的熱應力使初始裂痕進展從而切斷玻璃膜。As a technique of cutting both ends of the glass film in the width direction, Patent Document 1 discloses a laser cutting technique. In laser cutting, after an initial crack is formed on a glass film by a crack formation mechanism such as a diamond cutter, the portion is irradiated with laser light and heated. Thereafter, the heated portion is cooled by the cooling mechanism, and the initial crack progresses by the thermal stress generated in the glass film to cut the glass film.

作為其他的切斷方法,在專利文獻2中,揭示有一種利用所謂的剝離(peeling)現象的玻璃膜的切斷技術。該技術為:一面搬送玻璃膜(玻璃基板),一面對該玻璃膜照射雷射光而熔斷其一部分,且藉由將該熔斷部分遠離雷射光的照射區域而進行冷卻。As another cutting method, Patent Document 2 discloses a cutting technology of a glass film using a so-called peeling phenomenon. The technology is that while a glass film (glass substrate) is transported, a part of the glass film is irradiated with laser light while being fused, and the fused part is cooled away from the laser light irradiation area.

在此種情形下,由於熔斷部分被冷卻而產生大致絲狀的剝離物(析出物)(例如參照專利文獻2的段落0044及圖3)。通常將該絲狀剝離物自玻璃膜的端部剝落的現象稱為剝離現象。由於產生絲狀剝離物,而會於玻璃膜形成均一的切斷面。 [現有技術文獻] [專利文獻]In this case, because the fusible part is cooled, a substantially filament-like peeling material (precipitate) is generated (for example, refer to paragraph 0044 and FIG. 3 of Patent Document 2). The phenomenon in which the filamentary peeling material is peeled from the end of the glass film is generally referred to as a peeling phenomenon. Since a filament-like peeling material is generated, a uniform cut surface is formed on the glass film. [Prior Art Literature] [Patent Literature]

[專利文獻1]日本專利特開2012-240883號公報 [專利文獻2]國際公開第2014/002685號公報[Patent Document 1] Japanese Patent Laid-Open No. 2012-240883 [Patent Document 2] International Publication No. 2014/002685

[發明所欲解決之課題] 由於玻璃膜具有可撓性,故而在利用橫向搬送部在橫向上搬送的中途,會於該玻璃膜產生皺褶。若產生皺褶,則會在該皺褶及其附近產生彎曲應力。因此,當在保持皺褶生成的狀態下對玻璃膜照射雷射光時,會對熔斷部分賦予由皺褶引起的難以預料的彎曲應力。因此,會招致難以高精度地進行玻璃膜的切斷的問題。[Problems to be Solved by the Invention] Since the glass film has flexibility, wrinkles may be generated in the glass film in the middle of being transported in the horizontal direction by the horizontal transport section. When a wrinkle is generated, a bending stress is generated in the wrinkle and the vicinity thereof. Therefore, when the glass film is irradiated with laser light while the wrinkles are generated, an unexpected bending stress caused by the wrinkles is given to the fused portion. Therefore, there is a problem that it is difficult to cut the glass film with high accuracy.

本發明是鑒於所述事態而完成者,其技術性的課題在於:在利用剝離現象切斷玻璃膜時,適宜地去除會於玻璃膜生成的皺褶,而可高精度地切斷玻璃膜。 [解決課題之手段]This invention was made in view of the said situation, The technical subject is when removing a glass film by a peeling phenomenon, it can remove the wrinkles which generate | occur | produce in a glass film suitably, and can cut a glass film with high precision. [Means for solving problems]

本發明用以解決所述課題,其特徵在於包括:搬送步驟,將長條狀的玻璃膜沿著其長邊方向自上游朝下游搬送;以及切斷步驟,一面利用所述搬送步驟搬送所述玻璃膜,一面自雷射照射裝置對所述玻璃膜照射雷射光,藉此分離所述玻璃膜;且所述搬送步驟包括皺褶去除步驟,藉由配置於較所述雷射照射裝置更靠上游側的皺褶去除部來去除所述玻璃膜的皺褶;所述切斷步驟於在所述搬送步驟中去除所述玻璃膜的所述皺褶之後,藉由對所述玻璃膜照射所述雷射光而分離所述玻璃膜,且使絲狀剝離物自被分離的所述玻璃膜的寬度方向端部產生。The present invention is to solve the above-mentioned problem, and is characterized in that it includes a conveying step of conveying a long glass film from upstream to downstream along its long side direction, and a cutting step of conveying the same by the conveying step. The glass film is irradiated with laser light from the laser irradiation device on one side, thereby separating the glass film; and the conveying step includes a wrinkle removing step, and is disposed closer to the laser irradiation device than the laser irradiation device. The wrinkle removing portion on the upstream side removes the wrinkles of the glass film; the cutting step is performed by irradiating the glass film by removing the wrinkles of the glass film in the conveying step. The laser light separates the glass film, and a filamentous peel is generated from a widthwise end portion of the glass film to be separated.

根據此種構成,於在搬送步驟中利用皺褶去除部去除玻璃膜的皺褶之後,在切斷步驟中進行利用剝離現象所致的玻璃膜的切斷(熔斷),藉此可使均一的絲狀剝離物自玻璃膜的寬度方向端部產生。藉此,可將玻璃膜的寬度方向端部形成為均一的截面,因此可高精度地切斷玻璃膜。According to this configuration, after the wrinkles of the glass film are removed by the wrinkle removing portion in the conveyance step, the glass film is cut (fused) by the peeling phenomenon in the cutting step, thereby making it possible to make the glass film uniform. The filament-like peeling object was generated from the width direction edge part of a glass film. Thereby, since the width direction edge part of a glass film can be formed into a uniform cross section, a glass film can be cut | disconnected with high precision.

在所述玻璃膜的製造方法中,所述皺褶去除部理想的是包括棒狀構件,所述棒狀構件位於所述玻璃膜的下表面側且沿所述玻璃膜的寬度方向而配置。如此,在搬送步驟的皺褶去除步驟中,藉由玻璃膜通過該棒狀構件,而可適宜地使玻璃膜的皺褶消失。In the manufacturing method of the said glass film, it is desirable that the said wrinkle removal part includes a rod-shaped member which is located in the lower surface side of the said glass film, and is arrange | positioned along the width direction of the said glass film. In this way, in the wrinkle removing step of the conveying step, the wrinkles of the glass film can be appropriately eliminated by passing the glass film through the rod-shaped member.

又,所述皺褶去除部可包括板狀構件,所述板狀構件配置於所述棒狀構件與所述雷射照射裝置之間,且配置於所述玻璃膜的下表面側。在皺褶去除步驟中,藉由玻璃膜通過棒狀構件及板狀構件,而可更加適宜地使玻璃膜的皺褶消失。In addition, the wrinkle removing portion may include a plate-like member which is arranged between the rod-like member and the laser irradiation device and is arranged on a lower surface side of the glass film. In the wrinkle removal step, the wrinkles of the glass film can be more appropriately eliminated by passing the glass film through the rod-shaped member and the plate-shaped member.

在此種情形下,所述板狀構件的上表面理想的是位於較所述棒狀構件的上端部更靠下方處。由此,可利用棒狀構件與板狀構件使玻璃膜的皺褶階段性地消失。In this case, the upper surface of the plate-like member is desirably located further below the upper end portion of the rod-like member. Accordingly, the wrinkles of the glass film can be gradually eliminated by the rod-shaped member and the plate-shaped member.

又,所述板狀構件的寬度理想的是設定為小於所述棒狀構件的長度。The width of the plate-shaped member is desirably set to be smaller than the length of the rod-shaped member.

在所述玻璃膜的製造方法中,理想的是,所述雷射照射裝置配置於所述玻璃膜的上方,並且在所述玻璃膜的寬度方向上空開規定的間隔距離而配置二台,所述板狀構件的寬度設定為大於所述雷射照射裝置的所述間隔距離。再者,板狀構件的寬度是指板狀構件在與被搬送的玻璃膜的長度方向正交的寬度方向上的尺寸。In the manufacturing method of the glass film, it is preferable that the laser irradiation device is disposed above the glass film, and two laser irradiation devices are arranged at a predetermined interval in the width direction of the glass film, so that The width of the plate-like member is set to be larger than the interval distance of the laser irradiation device. In addition, the width of a plate-shaped member means the dimension of the plate-shaped member in the width direction orthogonal to the longitudinal direction of the glass film to be conveyed.

藉由如所述般將板狀構件的寬度設定為大於二台雷射照射裝置的間隔距離,而可在玻璃膜到達照射雷射光的位置之前,確實地使該皺褶消失。By setting the width of the plate-like member to be larger than the distance between the two laser irradiation devices as described above, the wrinkles can be reliably eliminated before the glass film reaches the position where the laser light is irradiated.

在此種情形下,所述板狀構件的寬度理想的是所述雷射照射裝置的所述間隔距離的1.02倍以上、所述棒狀構件的長度的0.95倍以下。In this case, the width of the plate-like member is desirably 1.02 times or more the distance between the laser irradiation devices and 0.95 times or less the length of the rod-like member.

在所述搬送步驟中,理想的是,藉由使與所述玻璃膜的下表面接觸的搬送用片材在平台上移動而搬送所述玻璃膜,所述皺褶去除部設置於較由所述雷射照射裝置進行的所述雷射光的照射位置更靠上游側,且設置於應使所述搬送用片材自所述平台的上表面朝上方分隔的所述上表面,在所述雷射光的所述照射位置的上游側,所述搬送用片材呈與所述平台的所述上表面接觸的狀態。In the conveying step, it is desirable that the glass film is conveyed by moving a conveyance sheet that is in contact with a lower surface of the glass film on a platform, and the wrinkle removing portion is provided at a relatively free place The irradiation position of the laser light by the laser irradiation device is further upstream, and is provided on the upper surface where the conveying sheet should be spaced upward from the upper surface of the platform, and the laser On the upstream side of the irradiation position where the light is emitted, the conveyance sheet is in a state of being in contact with the upper surface of the platform.

根據此種構成,經皺褶去除部去除了皺褶的玻璃膜在雷射光的照射位置,由平台的上表面穩定地支撐。藉此,可在雷射光的照射位置高精度地切斷玻璃膜。 [發明的效果]According to this configuration, the glass film from which the wrinkles have been removed by the wrinkle removing section is stably supported by the upper surface of the platform at the irradiation position of the laser light. This makes it possible to cut the glass film with high accuracy at the irradiation position of the laser light. [Effect of the invention]

根據本發明,在利用剝離現象切斷玻璃膜時,可適宜地去除會於玻璃膜生成的皺褶,而可高精度地切斷玻璃膜。According to the present invention, when the glass film is cut by the peeling phenomenon, wrinkles generated in the glass film can be appropriately removed, and the glass film can be cut with high accuracy.

以下,參照圖式對用於實施本發明的形態進行詳細地說明。圖1至圖6表示用於實施本發明的玻璃膜的製造方法的製造裝置的第一實施形態。Hereinafter, the form for implementing this invention is demonstrated in detail with reference to drawings. 1 to 6 show a first embodiment of a manufacturing apparatus for implementing the method for manufacturing a glass film of the present invention.

圖1是示意性地表示玻璃膜的製造裝置的整體構成的概略側視圖。如圖1所示,製造裝置1包括:成形部2,成形玻璃膜G;方向轉換部3,將玻璃膜G的行進方向自縱向朝下轉換為橫向;橫向搬送部4,在轉換方向後在橫向上搬送玻璃膜G;切斷部5,一面藉由橫向搬送部4在橫向上不斷搬送,一面將玻璃膜G的寬度方向端部Ga、端部Gb作為非製品部Gc而切斷;以及捲繞部6,將利用該切斷部5切斷去除非製品部Gc而成的製品部Gd捲繞為捲筒狀而構成玻璃捲筒R。FIG. 1 is a schematic side view schematically showing the overall configuration of a glass film manufacturing apparatus. As shown in FIG. 1, the manufacturing apparatus 1 includes: a forming section 2 that forms a glass film G; a direction conversion section 3 that converts the traveling direction of the glass film G from a vertical direction to a horizontal direction; and a horizontal transfer section 4 that changes the direction after The glass film G is conveyed in the horizontal direction; the cutting section 5 is continuously conveyed in the horizontal direction by the horizontal conveyance section 4 while cutting the widthwise end portion Ga and the end portion Gb of the glass film G as the non-product portion Gc; The winding part 6 winds the product part Gd obtained by cutting and removing the non-product part Gc by the cutting part 5 into a roll shape, and forms a glass roll R.

再者,在以下的說明中,「上游」(側)是指靠成形部2或玻璃捲筒基材Ra的位置,「下游」(側)是指靠捲繞部6的位置。又,本實施形態的製品部Gd的厚度設為300 μm以下,較佳的是設為10 μm以上200 μm以下,更佳的是設為50 μm以上100 μm以下,但並不限定於此。In the following description, “upstream” (side) refers to a position near the forming section 2 or the glass roll substrate Ra, and “downstream” (side) refers to a position near the winding section 6. The thickness of the product portion Gd in this embodiment is 300 μm or less, preferably 10 μm or more and 200 μm or less, and more preferably 50 μm or more and 100 μm or less, but it is not limited thereto.

成形部2包括:成形體7,在上端部形成有溢流槽7a且剖面觀察下呈大致楔形;邊緣輥8,配置於成形體7的正下方,且自表裡兩側夾著自成形體7溢出的熔融玻璃;以及退火爐(annealer)9,配備於邊緣輥8的正下方。The forming section 2 includes a forming body 7 with an overflow groove 7a formed at an upper end portion and a substantially wedge shape in cross-section. An edge roller 8 is disposed directly below the forming body 7 and sandwiches the self-forming body from both sides of the surface. 7 overflowed molten glass; and an annealing furnace 9 provided directly below the edge roller 8.

成形部2使自成形體7的溢流槽7a的上方溢流的熔融玻璃沿著兩側面分別流下,且在下端合流而成形膜狀的熔融玻璃。邊緣輥8限制熔融玻璃的寬度方向收縮而形成規定寬度的玻璃膜G。退火爐9用以對玻璃膜G施加消除應變處理。該退火爐9具有在上下方向配設多段的退火爐輥(annealer roller)10。The molding unit 2 causes molten glass overflowing from the overflow groove 7 a of the molded body 7 to flow down along both side surfaces, and merges at the lower end to form a film-like molten glass. The edge roller 8 restricts the widthwise shrinkage of the molten glass to form a glass film G having a predetermined width. The annealing furnace 9 is used to apply strain relief treatment to the glass film G. The annealing furnace 9 includes a plurality of annealing rollers 10 arranged in the up-down direction.

於退火爐9的下方配設有自表裡兩側夾持玻璃膜G的支撐輥11。在支撐輥11與邊緣輥8之間、或支撐輥11與任一處的退火爐輥10之間,賦予用於促進使玻璃膜G薄壁化的張力。A support roller 11 is provided below the annealing furnace 9 to hold the glass film G on both sides of the surface. Tension is applied between the support roll 11 and the edge roll 8 or between the support roll 11 and the annealing furnace roll 10 at any place to promote thinning of the glass film G.

方向轉換部3設置於支撐輥11的下方位置。於方向轉換部3呈彎曲狀地排列有多個引導玻璃膜G的引導輥12。該些引導輥12將在鉛垂方向上搬送的玻璃膜G朝橫向引導。The direction changing section 3 is provided below the support roller 11. A plurality of guide rollers 12 for guiding the glass film G are arranged in a curved shape in the direction changing section 3. The guide rollers 12 guide the glass film G conveyed in the vertical direction in the lateral direction.

橫向搬送部4配置於方向轉換部3的行進方向前方(下游側)。該橫向搬送部4自上游側起依序具有第一搬送裝置13、第二搬送裝置14、以及第三搬送裝置15。The lateral conveyance part 4 is arrange | positioned ahead (downstream side) of the traveling direction of the direction conversion part 3. The horizontal transfer unit 4 includes a first transfer device 13, a second transfer device 14, and a third transfer device 15 in this order from the upstream side.

第一搬送裝置13具有環帶狀的搬送帶16、以及該搬送帶16的驅動裝置17。第一搬送裝置13藉由使搬送帶16的上表面與玻璃膜G接觸,藉此將通過方向轉換部3的玻璃膜G朝下游側連續地進行搬送。驅動裝置17具有:用於驅動搬送帶16的輥、鏈輪(sprocket)等驅動體17a、以及使該驅動體17a旋轉的馬達(未圖示)。The first conveying device 13 includes an endless belt-shaped conveying belt 16 and a driving device 17 of the conveying belt 16. The first conveying device 13 continuously conveys the glass film G passing through the direction changing section 3 to the downstream side by bringing the upper surface of the conveying belt 16 into contact with the glass film G. The driving device 17 includes a driving body 17 a such as a roller for driving the transport belt 16, a sprocket, and a motor (not shown) that rotates the driving body 17 a.

第二搬送裝置14具有:支撐玻璃膜G的平台18、以及用於搬送玻璃膜G的片材19。The second transfer device 14 includes a stage 18 that supports the glass film G, and a sheet 19 for transferring the glass film G.

平台18具有用於去除在搬送中於玻璃膜G生成的皺褶Ge的皺褶去除部20。在本實施形態中,皺褶去除部20包含棒狀構件20a。棒狀構件20a由具有圓筒面的構件而構成,但並不限定於該形狀。棒狀構件20a為了去除玻璃膜G的皺褶Ge,只要具有朝上方凸的曲面即可,亦可構成為剖面觀察下為半圓形或橢圓形。The stage 18 includes a wrinkle removing section 20 for removing wrinkles Ge generated in the glass film G during transportation. In this embodiment, the wrinkle removing section 20 includes a rod-shaped member 20a. The rod-shaped member 20a is constituted by a member having a cylindrical surface, but is not limited to this shape. In order to remove the wrinkles Ge of the glass film G, the rod-shaped member 20 a may have a curved surface that is convex upward, and may be configured to have a semicircular shape or an oval shape in cross-section.

如圖3所示,棒狀構件20a固定於平台18的上表面18a,但並不限定於該形態。棒狀構件20a亦可構成為可在自平台18的上表面18a朝上方隔開的位置旋轉。此種情形下,棒狀構件20a可空轉,亦可被驅動機構旋轉驅動。棒狀構件20a的直徑D設定為2 mm以上100 mm以下,但並不限定於該範圍,可根據玻璃膜G或製品部Gd的尺寸等而適當設定。又,在棒狀構件20a為圓筒形以外的情形(例如三角柱狀或半圓柱狀)下,棒狀構件20a的高度較佳為10 mm以上100 mm以下,經由搬送用片材23而與玻璃接觸的部分的曲率半徑較佳為R1 mm以上、R100 mm以下。As shown in FIG. 3, the rod-shaped member 20a is fixed to the upper surface 18a of the platform 18, but it is not limited to this form. The rod-shaped member 20 a may be configured to be rotatable at a position spaced upward from the upper surface 18 a of the platform 18. In this case, the rod-shaped member 20a may be idly rotated or may be rotationally driven by the driving mechanism. The diameter D of the rod-shaped member 20a is set to 2 mm or more and 100 mm or less, but is not limited to this range, and can be appropriately set depending on the size of the glass film G or the product portion Gd, and the like. Moreover, when the rod-shaped member 20a is other than a cylindrical shape (for example, a triangular columnar shape or a semi-cylindrical shape), the height of the rod-shaped member 20a is preferably 10 mm or more and 100 mm or less, and communicates with the glass via the transport sheet 23 The radius of curvature of the contact portion is preferably R1 mm or more and R100 mm or less.

棒狀構件20a是沿玻璃膜G的寬度方向W而配置。即,棒狀構件20a以與玻璃膜G的長度方向正交的方式配置於平台18的上表面18a。The rod-shaped member 20 a is arranged along the width direction W of the glass film G. That is, the rod-shaped member 20 a is disposed on the upper surface 18 a of the stage 18 so as to be orthogonal to the longitudinal direction of the glass film G.

如圖2及圖4所示,棒狀構件20a的長度LR設定為短於玻璃膜G的寬度WG。As shown in FIGS. 2 and 4, the length LR of the rod-shaped member 20 a is set to be shorter than the width WG of the glass film G.

於玻璃膜G的寬度方向端部Ga、端部Gb,形成有厚度較中央部大的部分(以下稱為「耳部」)Gf。當將棒狀構件20a配置於玻璃膜G的下表面側時,棒狀構件20a的長度LR以不與該耳部Gf重合的方式設定。即,棒狀構件20a的長度LR理想的是設為短於玻璃膜G的不包含耳部Gf的寬度方向中央側的部分的寬度WC。由此,支撐玻璃膜G的棒狀構件20a不支撐玻璃膜G的耳部Gf,而支撐較玻璃膜G的耳部Gf更靠寬度方向中央側的部分。棒狀構件20a的長度LR較佳為雷射照射裝置25的間隔距離DL的1.1倍以上,且為玻璃膜G的中央側的部分的寬度WC的0.98倍以下。In the width direction end portion Ga and the end portion Gb of the glass film G, a portion (hereinafter referred to as an "ear portion") Gf having a thickness greater than that of the center portion is formed. When the rod-shaped member 20a is disposed on the lower surface side of the glass film G, the length LR of the rod-shaped member 20a is set so as not to overlap the ear Gf. That is, the length LR of the rod-shaped member 20a is desirably shorter than the width WC of the portion of the glass film G that does not include the center portion in the width direction of the ear portion Gf. As a result, the rod-shaped member 20a supporting the glass film G does not support the ear portion Gf of the glass film G, but supports a portion closer to the widthwise center than the ear portion Gf of the glass film G. The length LR of the rod-shaped member 20a is preferably 1.1 times or more the interval distance DL of the laser irradiation device 25 and 0.98 times or less the width WC of the central portion of the glass film G.

搬送用片材19是由例如發泡樹脂片材而構成,但並不限定於該材料。搬送用片材19自配置於平台18的下方的片材捲筒21引出,且在平台18上自上游側朝下游側移動(參照圖1)。搬送用片材19在平台18上與玻璃膜G的下表面接觸,藉由其移動而將該玻璃膜G朝下游側搬送。搬送用片材19在通過平台18的上表面18a之後,在平台18的下方位置,由未圖示的捲繞裝置回收。The transporting sheet 19 is made of, for example, a foamed resin sheet, but is not limited to this material. The conveying sheet 19 is drawn out from a sheet roll 21 disposed below the platform 18 and moves on the platform 18 from an upstream side to a downstream side (see FIG. 1). The conveyance sheet 19 is in contact with the lower surface of the glass film G on the platform 18, and the glass film G is conveyed to the downstream side by the movement thereof. After passing the upper surface 18 a of the platform 18, the conveying sheet 19 is collected by a winding device (not shown) at a position below the platform 18.

搬送用片材19的寬度WS設定為大於棒狀構件20a的長度LR。又,搬送用片材19的寬度WS設定為小於玻璃膜G的寬度WG。更詳細而言,搬送用片材19的寬度WS理想的是設定為小於玻璃膜G的不包含耳部Gf的寬度方向中央側的部分的寬度WC(參照圖4)。The width WS of the conveying sheet 19 is set to be longer than the length LR of the rod-shaped member 20a. The width WS of the conveyance sheet 19 is set to be smaller than the width WG of the glass film G. More specifically, the width WS of the conveyance sheet 19 is desirably set to be smaller than the width WC of the portion of the glass film G that does not include the central portion in the width direction of the ear portion Gf (see FIG. 4).

搬送用片材19的厚度TS設定為0.05 mm以上2 mm以下,但並不限定於該範圍,可以玻璃膜G的耳部Gf不與平台18的上表面18a接觸的方式而適當設定。The thickness TS of the transporting sheet 19 is set to 0.05 mm or more and 2 mm or less, but is not limited to this range. The thickness G of the glass film G can be appropriately set so that the ear portion Gf of the glass film G does not contact the upper surface 18 a of the stage 18.

第三搬送裝置15具有:支撐玻璃膜G的平台22、以及用於搬送玻璃膜G的片材23。第三搬送裝置15藉由使自配置於平台22的上游側下方的片材捲筒24引出的搬送用片材23在平台22上朝下游側移動,而將經切斷部5切斷的玻璃膜G的非製品部Gc及製品部Gd朝下游側搬送。The third transfer device 15 includes a stage 22 that supports the glass film G, and a sheet 23 for transferring the glass film G. The third conveying device 15 moves the conveying sheet 23 drawn out from the sheet roll 24 disposed below the upstream side of the platform 22 on the platform 22 to the downstream side, and cuts the glass cut by the cutting unit 5. The non-product portion Gc and the product portion Gd of the film G are conveyed downstream.

如圖1及圖2所示,切斷部5配置在橫向搬送部4的第二搬送裝置14與第三搬送裝置15之間。切斷部5包括:雷射照射裝置25、支撐玻璃膜的平台26、以及回收藉由將雷射照射裝置25的雷射光L照射至玻璃膜G而產生的絲狀剝離物Gg的回收裝置27。As shown in FIG. 1 and FIG. 2, the cutting section 5 is disposed between the second conveying device 14 and the third conveying device 15 of the horizontal conveying section 4. The cutting unit 5 includes a laser irradiation device 25, a stage 26 that supports a glass film, and a recovery device 27 that recovers the filamentous peeling material Gg generated by irradiating the laser light L of the laser irradiation device 25 to the glass film G. .

雷射照射裝置25配置於平台26的上方,且較皺褶去除部20更靠下游側處。雷射照射裝置25以將例如CO2 雷射、釔鋁石榴石(Yttrium-Aluminum Garnet,YAG)雷射等其他的雷射光L朝下方照射的方式構成。在本實施形態中配置有兩台雷射照射裝置25,以切斷玻璃膜G的寬度方向兩端部Ga、端部Gb(參照圖2)。The laser irradiation device 25 is disposed above the platform 26, and is located further downstream than the wrinkle removing portion 20. The laser irradiation device 25 is configured to irradiate other laser light L such as a CO 2 laser and a Yttrium-Aluminum Garnet (YAG) laser downward. In the present embodiment, two laser irradiation devices 25 are arranged to cut off both ends Ga and Gb of the glass film G in the width direction (see FIG. 2).

雷射光L對玻璃膜G於規定的位置(照射位置)O進行照射。將該照射位置O與皺褶去除部20的棒狀構件20a的間隔距離D1設為200 mm以上2000 mm以下,但並不限定於該範圍,而是根據玻璃膜G的尺寸及棒狀構件20a的尺寸適當設定。The laser light L irradiates the glass film G at a predetermined position (irradiation position) O. The distance D1 between the irradiation position O and the rod-shaped member 20a of the wrinkle removing portion 20 is set to 200 mm or more and 2000 mm or less. However, the distance D1 is not limited to this range, and it depends on the size of the glass film G and the rod-shaped member 20a. The size is set appropriately.

平台26具有在上下方向上貫通的開口部26a。雷射照射裝置25的雷射光L的照射位置O設在該開口部26a的範圍內。The platform 26 has an opening portion 26 a penetrating in the vertical direction. The irradiation position O of the laser light L of the laser irradiation device 25 is provided in the range of this opening part 26a.

如圖2及圖3所示,回收裝置27配置於平台26的下方。回收裝置27由帶式輸送機27a構成。在本實施形態中,與玻璃膜G的各端部Ga、端部Gb相對應而配置有兩台帶式輸送機27a。各帶式輸送機27a沿著與玻璃膜G的搬送方向(長度方向)正交的方向(寬度方向)、即,自玻璃膜G的寬度方向的內側向外側搬送絲狀剝離物Gg。As shown in FIGS. 2 and 3, the recovery device 27 is disposed below the platform 26. The recovery device 27 is composed of a belt conveyor 27a. In this embodiment, two belt conveyors 27a are arranged corresponding to each of the end portions Ga and the end portions Gb of the glass film G. Each of the belt conveyors 27 a conveys the filamentous peeling material Gg in a direction (width direction) orthogonal to the conveyance direction (length direction) of the glass film G, that is, from the inside to the outside in the width direction of the glass film G.

捲繞部6設置於第三搬送裝置15的下游側。捲繞部6具有:捲繞輥28、旋轉驅動該捲繞輥28的馬達(未圖示)、以及對捲繞輥28供給保護片材29a的保護片材供給部29。捲繞部6藉由一面使自保護片材供給部29給送的保護片材29a與製品部Gd重合,一面利用馬達使捲繞輥28旋轉,而將製品部Gd捲繞為捲筒狀。經捲繞的製品部Gd構成為玻璃捲筒R。The winding section 6 is provided on the downstream side of the third transfer device 15. The winding section 6 includes a winding roller 28, a motor (not shown) that rotationally drives the winding roller 28, and a protective sheet supply section 29 that supplies a protective sheet 29 a to the winding roller 28. The winding section 6 overlaps the protective sheet 29a fed from the protective sheet supply section 29 with the product section Gd while rotating the winding roller 28 by a motor to wind the product section Gd into a roll shape. The rolled product portion Gd is configured as a glass roll R.

以下,對利用所述構成的製造裝置1製造玻璃捲筒R的方法進行說明。玻璃捲筒R的製造方法包括:成形步驟,利用成形部2成形帶狀的玻璃膜G;搬送步驟,利用方向轉換部3及橫向搬送部4搬送玻璃膜G;切斷步驟,利用切斷部5切斷玻璃膜G的寬度方向端部Ga、端部Gb;以及捲繞步驟,在切斷步驟後利用捲繞部6捲繞製品部Gd。Hereinafter, a method for manufacturing the glass roll R by the manufacturing apparatus 1 having the above-mentioned configuration will be described. The manufacturing method of the glass roll R includes a forming step of forming a strip-shaped glass film G by the forming section 2; a conveying step of conveying the glass film G by the direction changing section 3 and the lateral conveying section 4; and a cutting step of using the cutting section 5 cutting the width direction end portion Ga and the end portion Gb of the glass film G; and a winding step of winding the product portion Gd by the winding portion 6 after the cutting step.

在成形步驟中,使自成形部2的成形體7的溢流槽7a的上方溢流的熔融玻璃沿著兩側面分別流下,且在下端合流而形成膜狀的熔融玻璃。此時,利用邊緣輥8限制熔融玻璃的寬度方向收縮而形成規定寬度的玻璃膜G。其後,利用退火爐9對玻璃膜G施加消除應變處理(慢冷步驟)。藉由支撐輥11的張力,而玻璃膜G形成為規定的厚度。In the forming step, the molten glass overflowing from the overflow groove 7a of the formed body 7 of the forming section 2 is caused to flow down along both side surfaces, and merges at the lower end to form a film-like molten glass. At this time, the edge roller 8 restricts the widthwise shrinkage of the molten glass to form a glass film G having a predetermined width. Thereafter, strain relief treatment (slow cooling step) is applied to the glass film G in the annealing furnace 9. The glass film G is formed to a predetermined thickness by the tension of the support roller 11.

在搬送步驟中,利用方向轉換部3將玻璃膜G的搬送方向轉換為橫向,並且利用各搬送裝置13~搬送裝置15將玻璃膜G朝下游側的捲繞部6搬送。In the conveyance step, the conveyance direction of the glass film G is changed to the horizontal direction by the direction conversion unit 3, and the glass film G is conveyed toward the winding unit 6 on the downstream side by each of the conveying devices 13 to 15.

於玻璃膜G上在利用橫向搬送部4的搬送過程中不規則地生成多個皺褶Ge。該些皺褶Ge藉由玻璃膜G通過第二搬送裝置14的皺褶去除部20而消失(皺褶去除步驟)。即,玻璃膜G在通過皺褶去除部20的棒狀構件20a時,與搬送用片材19一起被位於玻璃膜G的下表面側的棒狀構件20a頂壓至較平台18的上表面18a更靠上方位置。此時,玻璃膜G的皺褶Ge藉由玻璃膜G被棒狀構件20a拉伸而消失。A plurality of wrinkles Ge are irregularly generated on the glass film G during the transfer by the lateral transfer unit 4. These wrinkles Ge disappear by the glass film G passing through the wrinkle removing section 20 of the second conveying device 14 (wrinkle removing step). That is, when the glass film G passes through the rod-shaped member 20 a of the wrinkle removing section 20, the glass film G is pressed together with the conveying sheet 19 by the rod-shaped member 20 a located on the lower surface side of the glass film G to the upper surface 18 a of the platform 18. Further up. At this time, the wrinkles Ge of the glass film G disappear by the glass film G being stretched by the rod-shaped member 20a.

搬送用片材19在通過棒狀構件20a時,被該棒狀構件20a抬高。藉此,搬送用片材19的較棒狀構件20a更靠上游側的一部分、與較棒狀構件20a更靠下游側的一部分與平台18的上表面18a分隔。如圖3所示,搬送用片材19與平台18的上表面18a在上下方向上的分隔距離隨著搬送用片材19自棒狀構件20a朝下游移動而變小。搬送用片材19在較雷射照射裝置25的雷射光L的照射位置O更靠上游側處與平台18的上表面18a接觸。When the conveyance sheet 19 passes through the rod-shaped member 20a, it is lifted by the rod-shaped member 20a. Thereby, a part of the conveying sheet 19 on the upstream side of the rod-shaped member 20 a and a portion of the conveying sheet 19 on the downstream side from the rod-shaped member 20 a are separated from the upper surface 18 a of the platform 18. As shown in FIG. 3, the separation distance between the transporting sheet 19 and the upper surface 18 a of the platform 18 in the vertical direction decreases as the transporting sheet 19 moves downstream from the rod-shaped member 20 a. The conveyance sheet 19 is in contact with the upper surface 18 a of the platform 18 at an upstream side from the irradiation position O of the laser light L of the laser irradiation device 25.

玻璃膜G藉由搬送用片材19與平台18的上表面18a接觸,而經由該搬送用片材19被支撐於平台18。搬送用片材19一面維持與平台18的上表面18a的接觸,一面使玻璃膜G朝雷射光L的照射位置O移動。The glass film G is in contact with the upper surface 18 a of the platform 18 by the conveyance sheet 19, and is supported by the platform 18 via the conveyance sheet 19. The conveyance sheet 19 moves the glass film G toward the irradiation position O of the laser light L while maintaining contact with the upper surface 18 a of the stage 18.

在切斷步驟中,自切斷部5的雷射照射裝置25對被第二搬送裝置14搬送的玻璃膜G照射雷射光L,而切斷玻璃膜G的寬度方向兩端部Ga、端部Gb。藉此,玻璃膜G分離為非製品部Gc與製品部Gd。In the cutting step, the laser irradiation device 25 from the cutting unit 5 irradiates the glass film G transported by the second transporting device 14 with laser light L, and cuts both ends Ga and end portions of the glass film G in the width direction. Gb. Thereby, the glass film G is separated into the non-product part Gc and the product part Gd.

具體而言,當雷射光L照射至玻璃膜G時(參照圖6A),玻璃膜G的一部分利用雷射光L的加熱而熔斷(參照圖6B)。玻璃膜G由於被第二搬送裝置14搬送,故而被熔斷的部分遠離雷射光L。Specifically, when the laser light L is irradiated to the glass film G (see FIG. 6A), a part of the glass film G is fused by the heating of the laser light L (see FIG. 6B). Since the glass film G is transported by the second transport device 14, the fused portion is far from the laser light L.

由此,玻璃膜G的熔斷部分被冷卻。熔斷部分藉由被冷卻而產生熱應變,由此所產生的應力對未被熔斷的部分作為拉力而發揮作用。藉由該作用,而絲狀剝離物Gg自非製品部Gc的寬度方向端部、及製品部Gd的寬度方向端部分離。所分離的絲狀剝離物Gg因其自體重量而朝下方移動(參照圖6C)。絲狀剝離物Gg在自非製品部Gc或製品部Gd分離後,變形為螺旋狀。在切斷步驟中,利用回收裝置27回收自非製品部Gc與製品部Gd產生的絲狀剝離物Gg(回收步驟)。Thereby, the fused portion of the glass film G is cooled. The fused portion is thermally strained by being cooled, and the resulting stress acts as a tensile force on the unfused portion. By this action, the filament-shaped peeling material Gg is separated from the widthwise end portion of the non-product portion Gc and the widthwise end portion of the product portion Gd. The separated filamentous strip Gg moves downward due to its own weight (see FIG. 6C). The filamentous exfoliation Gg is deformed into a spiral shape after being separated from the non-product portion Gc or the product portion Gd. In the cutting step, the filiform exfoliation Gg generated from the non-product portion Gc and the product portion Gd is recovered by the recovery device 27 (recovery step).

再者,非製品部Gc被第三搬送裝置15搬送至下游側,且在捲繞部6的上游側,由未圖示的其他回收裝置回收。In addition, the non-product part Gc is conveyed to the downstream side by the third conveying device 15, and is recovered on the upstream side of the winding part 6 by another recovery device (not shown).

在捲繞步驟中,自保護片材供給部29對製品部Gd供給保護片材29a,且利用捲繞部6的捲繞輥28將由第三搬送裝置15搬送的製品部Gd捲繞為捲筒狀。藉由利用捲繞輥28捲繞規定長度的製品部Gd,而完成玻璃捲筒R。In the winding step, the protective sheet 29 a is supplied from the protective sheet supply unit 29 to the product portion Gd, and the product portion Gd conveyed by the third conveying device 15 is wound into a roll by the winding roller 28 of the winding portion 6. shape. The glass roll R is completed by winding the product portion Gd of a predetermined length by the winding roller 28.

根據以上所說明的本實施形態的玻璃膜G的製造方法,在切斷步驟中,藉由在利用皺褶去除部20(棒狀構件20a)去除玻璃膜G的皺褶Ge之後進行玻璃膜G的熔斷,而可自玻璃膜G高精度地切出製品部Gd。在雷射照射裝置25的雷射光L的照射位置O,玻璃膜G經由搬送用片材19被穩定地支撐於平台18的上表面18a。藉此,可使均一的絲狀剝離物Gg自製品部Gd產生,藉由使製品部Gd的切斷面均一化,而可製造高品質的玻璃膜G(玻璃捲筒R)。According to the manufacturing method of the glass film G of this embodiment described above, in the cutting step, the wrinkle Ge of the glass film G is removed by the wrinkle removing portion 20 (the rod-shaped member 20a), and then the glass film G is performed. Can be cut, and the product portion Gd can be cut out from the glass film G with high accuracy. At the irradiation position O of the laser light L of the laser irradiation device 25, the glass film G is stably supported on the upper surface 18 a of the stage 18 via the conveyance sheet 19. Thereby, a uniform filamentous peel Gg can be generated from the product part Gd, and the cut surface of the product part Gd can be made uniform, and a high-quality glass film G (glass roll R) can be manufactured.

圖7至圖10表示玻璃膜的製造裝置及製造方法的第二實施形態。在本實施形態中,橫向搬送部4的第二搬送裝置14、第三搬送裝置15、及切斷部5的構成與第一實施形態不同。7 to 10 show a second embodiment of the apparatus and method for manufacturing a glass film. In this embodiment, the configuration of the second conveying device 14, the third conveying device 15, and the cutting section 5 of the lateral conveying section 4 is different from that of the first embodiment.

如圖7至圖9所示,第二搬送裝置14的皺褶去除部20除了第一實施形態的棒狀構件20a以外,亦包括配置於該棒狀構件20a的下游側處的板狀構件20b。As shown in FIGS. 7 to 9, the wrinkle removing section 20 of the second conveying device 14 includes a plate-shaped member 20 b disposed on the downstream side of the rod-shaped member 20 a in addition to the rod-shaped member 20 a of the first embodiment. .

板狀構件20b在玻璃膜G的搬送方向上配置於棒狀構件20a與雷射照射裝置25之間。板狀構件20b固定於平台18的上表面18a。板狀構件20b的寬度WP(板狀構件20b在玻璃膜G的寬度方向上的長度)設定為小於棒狀構件20a的長度LR。板狀構件20b的寬度WP較佳為雷射照射裝置25的間隔距離DL的1.02倍以上、棒狀構件20a的長度LR的0.95倍以下。板狀構件20b在玻璃膜G的搬送方向上的長度LP理想的是設為10 mm以上500 mm以下,但並不限定於該範圍,而是根據玻璃膜G及製品部Gd的尺寸而適當設定。The plate-like member 20b is arranged between the rod-like member 20a and the laser irradiation device 25 in the conveyance direction of the glass film G. The plate-like member 20 b is fixed to the upper surface 18 a of the platform 18. The width WP of the plate-like member 20b (the length of the plate-like member 20b in the width direction of the glass film G) is set to be shorter than the length LR of the rod-like member 20a. The width WP of the plate-like member 20b is preferably 1.02 times or more the separation distance DL of the laser irradiation device 25 and 0.95 times or less the length LR of the rod-like member 20a. The length LP of the plate-like member 20b in the conveyance direction of the glass film G is desirably set to 10 mm or more and 500 mm or less. However, the length LP is not limited to this range, and is appropriately set according to the sizes of the glass film G and the product portion Gd. .

板狀構件20b的厚度TP設定為小於棒狀構件20a的直徑D。因此,板狀構件的上表面20c位於較棒狀構件20a的上端部20d更靠下方處。該板狀構件20b的厚度TP設為1 mm以上、95 mm以下,但並不限定於該範圍,而是根據棒狀構件20a的直徑D而適當設定。板狀構件20b的上表面20c、與棒狀構件20a的上端部20d的高低差理想的是3 mm以上50 mm以下。The thickness TP of the plate-like member 20b is set to be smaller than the diameter D of the rod-like member 20a. Therefore, the upper surface 20c of the plate-like member is located below the upper end portion 20d of the rod-like member 20a. The thickness TP of the plate-like member 20b is set to 1 mm or more and 95 mm or less. However, the thickness TP is not limited to this range, and is appropriately set according to the diameter D of the rod-like member 20a. The height difference between the upper surface 20c of the plate-like member 20b and the upper end portion 20d of the rod-like member 20a is preferably 3 mm or more and 50 mm or less.

在玻璃膜G的搬送方向上,雷射照射裝置25的雷射光L的照射位置O與板狀構件20b的間隔距離D2設為50 mm以上1950 mm以下,但並不限定於該範圍,而是根據玻璃膜G及製品部Gd的尺寸而適當設定。又,板狀構件20b與棒狀構件20a在玻璃膜G的搬送方向上的間隔距離D3理想的是設為50 mm以上1500 mm以下。In the conveyance direction of the glass film G, the distance D2 between the irradiation position O of the laser light L of the laser irradiation device 25 and the plate-like member 20b is set to 50 mm or more and 1950 mm or less, but it is not limited to this range, but It is appropriately set in accordance with the sizes of the glass film G and the product portion Gd. The distance D3 between the plate-shaped member 20b and the rod-shaped member 20a in the conveyance direction of the glass film G is preferably 50 mm to 1500 mm.

第三搬送裝置15具有:搬送玻璃膜G的多條(在本例中為三條)搬送帶30a~搬送帶30c、以及各搬送帶30a~搬送帶30c的驅動裝置31。如圖8所示,搬送帶30a~搬送帶30c構成為環帶狀,並且包含:與玻璃膜G的寬度方向一端部Ga側的部分接觸的第一搬送帶30a、與玻璃膜G的寬度方向另一端部Gb側的部分接觸的第二搬送帶30b、以及與玻璃膜G的寬度方向中央部接觸的第三搬送帶30c。驅動裝置31具有:用於驅動各搬送帶30a~搬送帶30c的輥、鏈輪等驅動體31a、以及使該驅動體31a旋轉的馬達(未圖示)。The third conveying device 15 includes a plurality of (three in this example) conveying belts 30 a to 30 c for conveying the glass film G, and a driving device 31 for each of the conveying belts 30 a to 30 c. As shown in FIG. 8, the conveyance belt 30 a to the conveyance belt 30 c are formed in an endless belt shape, and include a first conveyance belt 30 a that is in contact with a portion on the Ga side of the width direction one end portion of the glass film G and a width direction of the glass film G The second conveyance belt 30b that is partially in contact with the other end portion Gb side and the third conveyance belt 30c that is in contact with the widthwise central portion of the glass film G. The driving device 31 includes a driving body 31a such as a roller and a sprocket for driving each of the conveying belts 30a to 30c, and a motor (not shown) that rotates the driving body 31a.

如圖8所示,各搬送帶30a~搬送帶30c在玻璃膜G的寬度方向上分隔。由此,在第一搬送帶30a與第三搬送帶30c之間、第二搬送帶30b與第三搬送帶30c之間形成有間隙。As shown in FIG. 8, each of the conveyance belts 30 a to 30 c is partitioned in the width direction of the glass film G. Thereby, a gap is formed between the first conveyance belt 30a and the third conveyance belt 30c, and between the second conveyance belt 30b and the third conveyance belt 30c.

切斷部5的雷射照射裝置25配置於第三搬送裝置15的上方。雷射照射裝置25的雷射光L的照射位置O以與各搬送帶30a~搬送帶30c之間的間隙相對應的方式設定。本實施形態的切斷部5不包括第一實施形態的平台26,但可包括可配置於各搬送帶30a~搬送帶30c的間隙的平台。回收裝置27以橫穿第一搬送帶30a及第二搬送帶30b的方式配置於各搬送帶30a、搬送帶30b的內側。The laser irradiation device 25 of the cutting unit 5 is disposed above the third transfer device 15. The irradiation position O of the laser light L of the laser irradiation device 25 is set so as to correspond to the gap between each of the transfer belts 30a to 30c. The cutting unit 5 of the present embodiment does not include the stage 26 of the first embodiment, but may include a stage that can be placed in a gap between each of the transfer belts 30a to 30c. The recovery device 27 is disposed inside each of the transporting belts 30a and 30b so as to cross the first transporting belt 30a and the second transporting belt 30b.

在利用本實施形態的製造裝置1製造玻璃膜G(玻璃捲筒R)時,與第一實施形態同樣地,執行成形步驟、搬送步驟、切斷步驟、及捲繞步驟,但搬送步驟的皺褶去除步驟的態樣與第一實施形態不同。When the glass film G (glass roll R) is manufactured by the manufacturing apparatus 1 of this embodiment, the forming step, the conveying step, the cutting step, and the winding step are performed in the same manner as in the first embodiment. The appearance of the wrinkle removing step is different from that of the first embodiment.

在皺褶去除步驟中,首先,玻璃膜G通過設置於第二搬送裝置14的平台18的棒狀構件20a。此時,玻璃膜G與搬送用片材19一起被位於玻璃膜G的下表面側的棒狀構件20a頂壓至較平台18的上表面18a更上方位置。此時,於玻璃膜G上生成的多個皺褶Ge藉由玻璃膜G被棒狀構件20a拉伸而消失。In the wrinkle removing step, first, the glass film G passes through the rod-shaped member 20 a provided on the platform 18 of the second conveying device 14. At this time, the glass film G is pressed together with the conveying sheet 19 by the rod-shaped member 20 a located on the lower surface side of the glass film G to a position higher than the upper surface 18 a of the stage 18. At this time, the plurality of wrinkles Ge generated on the glass film G disappear by the glass film G being stretched by the rod-shaped member 20a.

在即便通過棒狀構件20a後亦於玻璃膜G殘存有皺褶Ge時,該皺褶Ge藉由玻璃膜G通過板狀構件20b而消失。棒狀構件20a經由搬送用片材19與玻璃膜G線狀地接觸,相對於此,板狀構件20b經由搬送用片材19,可謂面狀地接觸。藉此,未被棒狀構件20a去除的皺褶Ge藉由玻璃膜G通過板狀構件20b而確實地消失。When wrinkles Ge remain in the glass film G even after passing through the rod-shaped member 20a, the wrinkles Ge disappear through the glass film G through the plate-shaped member 20b. On the other hand, the rod-shaped member 20 a is in linear contact with the glass film G via the conveyance sheet 19, while the plate-shaped member 20 b is in planar contact through the conveyance sheet 19. As a result, the wrinkles Ge that have not been removed by the rod-shaped member 20 a are surely disappeared by the glass film G passing through the plate-shaped member 20 b.

搬送用片材19在通過棒狀構件20a及板狀構件20b時,與平台18的上表面18a朝上方隔開,但在通過板狀構件20b之後,在較雷射光L的照射位置O更靠上游側處與該上表面18a接觸。由此,玻璃膜G在較雷射光L的照射位置O更靠上游側處被支撐於平台18的上表面18a。因此,玻璃膜G在被穩定地支撐於平台18的上表面18a的狀態下,被雷射照射裝置25切斷。藉此,可使均一的絲狀剝離物Gg連續地自製品部Gd的寬度方向端部產生,因此可高精度地執行玻璃膜G的切斷。When the conveyance sheet 19 passes through the rod-shaped member 20a and the plate-shaped member 20b, it is spaced upward from the upper surface 18a of the platform 18, but after passing through the plate-shaped member 20b, it is closer to the irradiation position O of the laser light L The upstream side is in contact with the upper surface 18a. Thus, the glass film G is supported on the upper surface 18 a of the platform 18 at an upstream side from the irradiation position O of the laser light L. Therefore, the glass film G is cut off by the laser irradiation device 25 in a state where the glass film G is stably supported on the upper surface 18 a of the platform 18. Thereby, the uniform filamentous peeling object Gg can be continuously generated from the width direction end of the product portion Gd, and therefore, the cutting of the glass film G can be performed with high accuracy.

在本實施形態的切斷步驟中,利用第三搬送裝置15一面搬送玻璃膜G,一面自配置於上方的雷射照射裝置25照射雷射光L。其後,利用回收裝置27回收絲狀剝離物Gg(參照圖10),利用第三搬送裝置15的第一搬送帶30a及第二搬送帶30b搬送玻璃膜G的非製品部Gc,且利用第三搬送帶30c搬送製品部Gd。本實施形態的成形步驟、捲繞步驟等其他的步驟與第一實施形態相同。In the cutting step of this embodiment, while the glass film G is being conveyed by the third conveying device 15, the laser light L is irradiated from the laser irradiation device 25 disposed above. Thereafter, the filiform strip Gg is recovered by the recovery device 27 (see FIG. 10), and the non-product portion Gc of the glass film G is transported by the first transport belt 30 a and the second transport belt 30 b of the third transport device 15. The three conveying belts 30c convey the product portion Gd. The other steps such as the forming step and the winding step in this embodiment are the same as those in the first embodiment.

圖11及圖12表示玻璃膜的製造裝置及製造方法的第三實施形態。在所述的第一實施形態、第二實施形態中,示出了利用溢流下拉法製造玻璃膜G的例子,在本實施形態中,例示利用捲對捲步驟(Roll to Roll)製造玻璃膜G(玻璃捲筒R)的方法。11 and 12 show a third embodiment of the apparatus and method for manufacturing a glass film. In the first embodiment and the second embodiment described above, an example of manufacturing the glass film G by the overflow down-draw method is shown. In this embodiment, the manufacturing of the glass film by a roll-to-roll process is exemplified. G (glass roll R).

如圖11及圖12所示,製造裝置1於最上游側具備將作為加工對象的玻璃膜G構成為捲筒狀而成的玻璃捲筒基材Ra而取代第一實施形態的成形部2、方向轉換部3。玻璃捲筒基材Ra捲繞於供給輥32而成。於玻璃捲筒基材Ra的下游側,與第一實施形態同樣地,依序配置有橫向搬送部4、切斷部5、捲繞部6。所述各元件4~元件6的構成與第一實施形態相同。As shown in FIGS. 11 and 12, the manufacturing apparatus 1 includes a glass roll substrate Ra configured by forming a glass film G as a processing target in a roll shape on the most upstream side, instead of the forming section 2 of the first embodiment. Direction conversion section 3. The glass roll substrate Ra is wound around a supply roll 32. On the downstream side of the glass roll substrate Ra, as in the first embodiment, a lateral conveyance section 4, a cutting section 5, and a winding section 6 are sequentially arranged. The configuration of each of the elements 4 to 6 is the same as that of the first embodiment.

本實施形態的玻璃膜G(玻璃捲筒R)的製造方法包括:自玻璃捲筒基材Ra引出加工用的玻璃膜G並供給至下游側的玻璃膜供給步驟、搬送步驟、切斷步驟、以及捲繞步驟。在玻璃膜供給步驟中,製造裝置1藉由使供給輥32旋轉,而自玻璃捲筒基材Ra引出加工用的玻璃膜G且使其朝下游側移動。以後的搬送步驟、切斷步驟及捲繞步驟與第一實施形態同樣。The manufacturing method of the glass film G (glass roll R) according to this embodiment includes a glass film supply step, a conveying step, a cutting step, and a glass film G for drawing out from the glass roll substrate Ra and supplying it to the downstream side. And winding steps. In the glass film supply step, the manufacturing apparatus 1 rotates the supply roller 32 to withdraw the glass film G for processing from the glass roll substrate Ra and move it to the downstream side. The subsequent conveying steps, cutting steps, and winding steps are the same as those in the first embodiment.

在本實施形態中,在切斷步驟中,可使加工用的玻璃膜G分離為多塊玻璃膜G,而使其中一部分或全部作為製品。此種情形下,與所製造的製品的數目相應而於捲繞部6配置有多個捲繞輥28。In this embodiment, in the cutting step, the glass film G for processing can be separated into a plurality of glass films G, and a part or all of them can be used as a product. In this case, a plurality of winding rollers 28 are arranged in the winding section 6 in accordance with the number of manufactured products.

圖13及圖14表示玻璃膜的製造裝置及使用該製造裝置製造玻璃膜的方法的第四實施形態。13 and 14 show a fourth embodiment of a glass film manufacturing apparatus and a method for manufacturing a glass film using the same.

如圖13及圖14所示,製造裝置1於最上游側具備將作為加工對象的玻璃膜G構成為捲筒狀而成的玻璃捲筒基材Ra而取代第二實施形態的成形部2、方向轉換部3。玻璃捲筒基材Ra捲繞於供給輥32而成。於玻璃捲筒基材Ra的下游側,與第二實施形態同樣地,依序配置有橫向搬送部4、切斷部5、捲繞部6。所述各元件4~元件6的構成與第二實施形態相同。As shown in FIG. 13 and FIG. 14, the manufacturing apparatus 1 includes a glass roll substrate Ra configured by forming a glass film G as a processing target in a roll shape on the most upstream side, instead of the forming section 2 of the second embodiment. Direction conversion section 3. The glass roll substrate Ra is wound around a supply roll 32. On the downstream side of the glass roll substrate Ra, as in the second embodiment, a lateral conveyance section 4, a cutting section 5, and a winding section 6 are sequentially arranged. The configuration of each of the elements 4 to 6 is the same as that of the second embodiment.

再者,本發明並不限定於所述實施形態的構成,亦不限定於所述的作用效果。本發明可在不脫離本發明的主旨的範圍內進行各種變更。In addition, the present invention is not limited to the configuration of the embodiment described above, nor is it limited to the aforementioned effects. The present invention can be variously modified without departing from the gist of the present invention.

在所述第二實施形態中,例示了含有一根棒狀構件20a、一片板狀構件20b的皺褶去除部20,但並不限定於此,可於平台18上配置多個棒狀構件、多個板狀構件。In the second embodiment, the wrinkle removing portion 20 including one rod-shaped member 20 a and one plate-shaped member 20 b is exemplified, but the invention is not limited to this. A plurality of rod-shaped members may be arranged on the platform 18. Multiple plate-like members.

1‧‧‧製造裝置1‧‧‧ manufacturing equipment

2‧‧‧成形部2‧‧‧forming department

3‧‧‧方向轉換部3‧‧‧Direction Conversion Department

4‧‧‧橫向搬送部4‧‧‧Horizontal Transfer Department

5‧‧‧切斷部5‧‧‧ cutting section

6‧‧‧捲繞部6‧‧‧ winding section

7‧‧‧成形體7‧‧‧ shaped body

7a‧‧‧溢流槽7a‧‧‧ overflow tank

8‧‧‧邊緣輥8‧‧‧Edge roller

9‧‧‧退火爐9‧‧‧annealing furnace

10‧‧‧退火爐輥10‧‧‧annealing furnace roller

11‧‧‧支撐輥11‧‧‧ support roller

12‧‧‧引導輥12‧‧‧Guide roller

13‧‧‧第一搬送裝置13‧‧‧ the first transfer device

14‧‧‧第二搬送裝置14‧‧‧Second transfer device

15‧‧‧第三搬送裝置15‧‧‧Third transfer device

16‧‧‧搬送帶16‧‧‧ transport belt

17‧‧‧驅動裝置17‧‧‧Drive

17a‧‧‧驅動體17a‧‧‧Driver

18、22、26‧‧‧平台18, 22, 26‧‧‧ platforms

18a‧‧‧平台的上表面18a‧‧‧ The upper surface of the platform

19、23‧‧‧搬送用片材19, 23‧‧‧ Sheets for transport

20‧‧‧皺褶去除部20‧‧‧ Wrinkle removal section

20a‧‧‧棒狀構件20a‧‧‧ rod-shaped member

20b‧‧‧板狀構件20b‧‧‧ plate member

20c‧‧‧板狀構件的上表面20c‧‧‧ Upper surface of plate-shaped member

20d‧‧‧棒狀構件的上端部20d‧‧‧ Upper end of rod-shaped member

21、24‧‧‧片材捲筒21, 24‧‧‧ Sheet Roll

25‧‧‧雷射照射裝置25‧‧‧laser irradiation device

26a‧‧‧開口部26a‧‧‧ opening

27‧‧‧回收裝置27‧‧‧ Recovery device

27a‧‧‧帶式輸送機27a‧‧‧belt conveyor

28‧‧‧捲繞輥28‧‧‧ Winding roller

29‧‧‧保護片材供給部29‧‧‧Protection Sheet Supply Department

29a‧‧‧保護片材29a‧‧‧Protection sheet

30a‧‧‧第一搬送帶30a‧‧‧The first conveying belt

30b‧‧‧第二搬送帶30b‧‧‧Second Transfer Belt

30c‧‧‧第三搬送帶30c‧‧‧Third transfer belt

31‧‧‧驅動裝置31‧‧‧Drive

31a‧‧‧驅動體31a‧‧‧Driver

32‧‧‧供給輥32‧‧‧Supply roller

D‧‧‧棒狀構件的直徑D‧‧‧ diameter of rod-shaped member

D1、D2、D3‧‧‧間隔距離D1, D2, D3 ‧‧‧ separation distance

DL‧‧‧雷射照射裝置的間隔距離DL‧‧‧Laser distance of laser irradiation device

G‧‧‧玻璃膜G‧‧‧glass film

Ga、Gb‧‧‧寬度方向端部Ga, Gb‧‧‧ width end

Gc‧‧‧非製品部Gc‧‧‧Non-products

Gd‧‧‧製品部Gd‧‧‧Products Department

Ge‧‧‧玻璃膜的皺褶Ge‧‧‧ Glass Wrinkles

Gf‧‧‧耳部Gf‧‧‧ear

Gg‧‧‧絲狀剝離物Gg‧‧‧ Filiform Strip

IV-IV‧‧‧線IV-IV‧‧‧line

L‧‧‧雷射光L‧‧‧ laser light

LP‧‧‧玻璃膜的搬送方向上的長度Length of LP‧‧‧ glass film in the conveying direction

LR‧‧‧棒狀構件的長度LR‧‧‧ Length of rod-shaped member

O‧‧‧雷射光的照射位置O‧‧‧ Irradiation position of laser light

R‧‧‧玻璃捲筒R‧‧‧ glass roll

Ra‧‧‧玻璃捲筒基材Ra‧‧‧ glass roll substrate

TP‧‧‧板狀構件的厚度TP‧‧‧Thickness of plate member

TS‧‧‧搬送用片材的厚度TS‧‧‧Thickness of conveying sheet

V-V‧‧‧線V-V‧‧‧line

W‧‧‧玻璃膜的寬度方向W‧‧‧ glass film width direction

WC‧‧‧玻璃膜的不包含耳部的寬度方向中央側的部分的寬度WC‧‧‧ The width of the part of the glass film that does not include the ear in the widthwise center side

WG‧‧‧玻璃膜的寬度WG‧‧‧Width of glass film

WP‧‧‧板狀構件的寬度WP‧‧‧Width of plate member

WS‧‧‧搬送用片材的寬度WS‧‧‧Width of conveying sheet

圖1是表示第一實施形態的玻璃膜的製造裝置的側視圖。 圖2是玻璃膜的製造裝置的平面圖。 圖3是玻璃膜的製造裝置的主要部分放大側視圖。 圖4是圖2的IV-IV線剖面圖。 圖5是圖2的V-V線剖面圖。 圖6A是用於說明切斷步驟的玻璃膜的剖面圖。 圖6B是用於說明切斷步驟的玻璃膜的剖面圖。 圖6C是用於說明切斷步驟的玻璃膜的剖面圖。 圖7是表示第二實施形態的玻璃膜的製造裝置的側視圖。 圖8是玻璃膜的製造裝置的平面圖。 圖9是玻璃膜的製造裝置的主要部分放大側視圖。 圖10是圖8的X-X線剖面圖。 圖11是表示第三實施形態的玻璃膜的製造裝置的側視圖。 圖12是玻璃膜的製造裝置的平面圖。 圖13是表示第四實施形態的玻璃膜的製造裝置的側視圖。 圖14是玻璃膜的控制裝置的平面圖。FIG. 1 is a side view showing a glass film manufacturing apparatus according to a first embodiment. FIG. 2 is a plan view of a glass film manufacturing apparatus. FIG. 3 is an enlarged side view of a main part of a manufacturing apparatus of a glass film. FIG. 4 is a sectional view taken along the line IV-IV in FIG. 2. Fig. 5 is a sectional view taken along the line V-V in Fig. 2. 6A is a cross-sectional view of a glass film for explaining a cutting step. 6B is a cross-sectional view of a glass film for explaining a cutting step. 6C is a cross-sectional view of a glass film for explaining a cutting step. Fig. 7 is a side view showing a glass film manufacturing apparatus according to a second embodiment. FIG. 8 is a plan view of a glass film manufacturing apparatus. FIG. 9 is an enlarged side view of a main part of a manufacturing apparatus of a glass film. Fig. 10 is a sectional view taken along the line X-X in Fig. 8. 11 is a side view showing a glass film manufacturing apparatus according to a third embodiment. FIG. 12 is a plan view of a glass film manufacturing apparatus. FIG. 13 is a side view showing a glass film manufacturing apparatus according to a fourth embodiment. 14 is a plan view of a control device for a glass film.

Claims (8)

一種玻璃膜的製造方法,其特徵在於包括: 搬送步驟,將長條狀的玻璃膜沿著其長度方向自上游朝下游搬送;以及 切斷步驟,一面利用所述搬送步驟搬送所述玻璃膜,一面自雷射照射裝置對所述玻璃膜照射雷射光,藉此分離所述玻璃膜;且 所述搬送步驟包括皺褶去除步驟,藉由配置於較所述雷射照射裝置更靠上游側的皺褶去除部來去除所述玻璃膜的皺褶; 所述切斷步驟於在所述搬送步驟中去除所述玻璃膜的所述皺褶之後,藉由對所述玻璃膜照射所述雷射光而分離所述玻璃膜,且使絲狀剝離物自被分離的所述玻璃膜的寬度方向端部產生。A method for manufacturing a glass film, comprising: a conveying step of conveying a long glass film from upstream to downstream along its length direction; and a cutting step of conveying the glass film by the conveying step, One side of the self-laser irradiation device irradiates the glass film with laser light, thereby separating the glass film; and the conveying step includes a wrinkle removing step, by disposing on the upstream side of the laser irradiation device A wrinkle removing unit to remove wrinkles of the glass film; the cutting step is after the wrinkles of the glass film are removed in the conveying step, and the laser light is irradiated to the glass film Then, the glass film is separated, and a filament-like peeling object is generated from the widthwise end portion of the glass film to be separated. 如申請專利範圍第1項所述的玻璃膜的製造方法,其中所述皺褶去除部包括棒狀構件,所述棒狀構件位於所述玻璃膜的下表面側且沿所述玻璃膜的寬度方向而配置。The method of manufacturing a glass film according to item 1 of the scope of patent application, wherein the wrinkle removing portion includes a rod-shaped member that is located on a lower surface side of the glass film and along a width of the glass film Configuration. 如申請專利範圍第2項所述的玻璃膜的製造方法,其中所述皺褶去除部包括板狀構件,所述板狀構件配置於所述棒狀構件與所述雷射照射裝置之間,且配置於所述玻璃膜的下表面側。The method for manufacturing a glass film according to item 2 of the scope of patent application, wherein the wrinkle removing portion includes a plate-shaped member, the plate-shaped member is disposed between the rod-shaped member and the laser irradiation device, And it is arrange | positioned on the lower surface side of the said glass film. 如申請專利範圍第3項所述的玻璃膜的製造方法,其中所述板狀構件的上表面位於較所述棒狀構件的上端部更靠下方處。The method for manufacturing a glass film according to item 3 of the scope of patent application, wherein an upper surface of the plate-like member is located lower than an upper end portion of the rod-like member. 如申請專利範圍第3項或第4項所述的玻璃膜的製造方法,其中所述板狀構件的寬度設定為小於所述棒狀構件的長度。The method for manufacturing a glass film according to item 3 or 4 of the scope of patent application, wherein the width of the plate-shaped member is set to be smaller than the length of the rod-shaped member. 如申請專利範圍第3項至第5項中任一項所述的玻璃膜的製造方法,其中所述雷射照射裝置配置於所述玻璃膜的上方,並且在所述玻璃膜的寬度方向上空開規定的間隔距離而配置二台,所述板狀構件的寬度設定為大於所述雷射照射裝置的所述間隔距離。The method for manufacturing a glass film according to any one of claims 3 to 5, wherein the laser irradiation device is disposed above the glass film, and is spaced in a width direction of the glass film. Two plates are arranged at a predetermined separation distance, and the width of the plate-shaped member is set to be larger than the separation distance of the laser irradiation device. 如申請專利範圍第6項所述的玻璃膜的製造方法,其中所述板狀構件的寬度為所述雷射照射裝置的所述間隔距離的1.02倍以上、所述棒狀構件的長度的0.95倍以下。The method of manufacturing a glass film according to item 6 of the scope of patent application, wherein the width of the plate-like member is 1.02 times or more the distance between the laser irradiation devices and 0.95 of the length of the rod-like member. Times below. 如申請專利範圍第1項至第7項中任一項所述的玻璃膜的製造方法,其中在所述搬送步驟中,藉由使與所述玻璃膜的下表面接觸的搬送用片材在平台上移動而搬送所述玻璃膜,且 所述皺褶去除部設置於較由所述雷射照射裝置進行的所述雷射光的照射位置更靠上游側,且設置於應使所述搬送用片材自所述平台的上表面朝上方分隔的所述上表面; 在所述雷射光的所述照射位置的上游側,所述搬送用片材呈與所述平台的所述上表面接觸的狀態。The method for manufacturing a glass film according to any one of claims 1 to 7 in the scope of patent application, wherein in the conveying step, the conveying sheet is brought into contact with the lower surface of the glass film in the conveying step. The glass film is transported while being moved on a platform, and the wrinkle removing section is provided on an upstream side from the laser light irradiation position by the laser irradiation device, and is provided for use in the transportation. A sheet separated from the upper surface of the platform toward the upper surface; on the upstream side of the irradiation position of the laser light, the conveying sheet is in contact with the upper surface of the platform status.
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CN110573465B (en) 2022-04-12
CN114573224A (en) 2022-06-03
WO2019026554A1 (en) 2019-02-07
KR102475077B1 (en) 2022-12-07
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CN110573465A (en) 2019-12-13
JP6909403B2 (en) 2021-07-28

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