TW201904705A - Cutting device capable of efficiently photographing cutting groove formed on workpiece - Google Patents

Abstract

[Problem] The cutting groove formed in the workpiece can be imaged efficiently. [Solution] The cutting device (1) is provided with an imaging means (30) for imaging the plate-like workpiece (W) held by the holding platform (10), and the imaging means (30) is provided with: facing the plate-like workpiece (W) An air layer forming means (33) that ejects air to form an air layer between the bottom portion (321) of the casing (32) and the plate-shaped workpiece (W). The air layer forming means (33) is provided with: An annular air passage (34) centered on the optical axis of the objective lens (310); an air inlet (35) for introducing air into the annular air passage (34); and making the air in one direction in the annular air passage (34) A guide plate (36) that rotates to generate a vortex airflow; and an inverse annular conical flow path (37) whose diameter is reduced downward by an annular air passage (34). A high-pressure air layer (100) having a vortex airflow (101) is formed between the objective lens (310) and the plate-shaped workpiece (W), and the vortex airflow (101) will remain on the plate-shaped workpiece (W) ( Wa) or the cutting water of the cutting groove (G) is blown off, so that the groove width of the cutting groove (G) can be measured more accurately.

Description

Cutting device

The present invention relates to a cutting device for cutting a workpiece.

The cutting device for cutting a workpiece includes at least: a holding platform that holds the workpiece; a cutting means for cutting the workpiece that is held on the holding platform; and a camera (microscope) that images the processed surface of the workpiece. ). The video camera is housed in a case that prevents cutting water or machining chips used during cutting from adhering. An opening for imaging is formed in the bottom of the casing, and an opening / closing shutter is attached to the opening. When the workpiece is imaged, the shutter is opened to open the opening. Next, when the object to be processed is imaged, the opening is closed by blocking the opening, thereby preventing droplets (water droplets) of the cutting water used during cutting from adhering to the objective lens of the camera (see, for example, Patent Document 1 below). And 2).

In addition to the cutting device described above, a cutting device including a cover glass at the bottom of the housing, and an air nozzle that ejects air to remove water droplets adhering to the cover glass (see, for example, the following Patent Documents 3 and 4) ). In this cutting device, during the cutting of the workpiece, air is sprayed from an air nozzle, thereby removing water droplets adhering to the cover glass, and also removing cutting water adhering to the upper surface of the workpiece. [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent No. 5936845 [Patent Document 2] Japanese Patent No. 4664788 [Patent Document 3] Japanese Patent No. 5769605 [Patent Document 4] Japanese Patent No. 2617001

(Problems to be solved by the invention)

However, the air ejection system is directional, so if there are droplets of cutting water around the direction of the ejected air, although the droplets are introduced in the ejection direction of the air and the air is ejected toward the workpiece, fine water droplets are attached. The problem on the top of the workpiece. In the past, the cutting process was temporarily suspended and the camera was used to check the cutting position or the width of the cutting groove (chips on both sides of the cutting groove). However, if fine water droplets adhere to the workpiece, it cannot be accurately measured. The width of the cut groove is wide, so the top surface of the workpiece must be dried. In addition, since the droplets of the cutting water are formed as water droplets and also adhere to the camera side, the camera side must be dried.

The present invention has been made in view of the above circumstances, and an object thereof is to efficiently image a cutting groove formed in a workpiece, thereby reducing the time required from the start of imaging to the storage of the workpiece. (Means for solving problems)

The cutting device of the present invention is provided with a holding platform for holding a workpiece, a cutting means rotatably mounted with a cutting blade, and cutting water supplied to the workpiece held by the holding platform for cutting processing; An imaging means for imaging the workpiece held by the holding platform from above; and a moving means for relatively moving the holding platform and the imaging means in a cutting feed direction, the cutting device is characterized in that the imaging means is provided with: A microscope provided with an objective lens facing the upper surface of the workpiece held by the holding platform; a ring shape covering the periphery of the microscope and having a circular opening for photography centered on the optical axis of the objective lens; A casing at the bottom; and an air layer forming means for ejecting air from the bottom toward the workpiece to form an air layer between the bottom and the workpiece at a higher pressure than the surroundings, the air layer forming means includes: An annular air passage centered on the optical axis of the objective lens; an air introduction port for introducing air into the annular air passage; the air introduction port is guided by the air introduction port The air in the annular air passage rotates in one direction and generates a vortex airflow guide plate; and the reverse annular conical flow path whose diameter is reduced downward by the annular air passage, when passing through the air The air ejected by the layer forming means forms a high-pressure air layer including a swirling airflow centered on the optical axis of the objective lens between the objective lens and the upper surface of the object to be processed, while the holding platform is opposed to the imaging means. When imaging the cutting groove formed in the workpiece while moving in the cutting feed direction, the cutting water remaining on the upper surface of the workpiece held by the holding platform is blown off by the vortex while blowing the cutting water. Groove for video. (Effect of the invention)

The cutting device of the present invention is configured to include: a holding platform holding a workpiece; a cutting means for supplying cutting water to the workpiece held by the holding platform to perform cutting processing; and a workpiece to be held by the holding platform The imaging means for imaging from above includes a microscope provided with an objective lens facing the upper surface of the workpiece held by the holding platform, and a microscope axis covering the periphery of the microscope and having an optical axis provided with the objective lens. A casing with a circular opening at the center as a center for photography; and an air layer forming means for ejecting air from the bottom toward the workpiece to form a higher-pressure air layer between the bottom and the workpiece than the surrounding air layer. The forming means includes: an annular air passage centered on the optical axis of the objective lens; an air introduction port for introducing air into the annular air passage; and the air introduced through the air introduction port in one direction in the annular air passage. A guide plate that swirls and generates a vortex airflow; and an inverse annular conical flow path whose diameter is reduced downward by an annular air passage. When imaging the cutting groove of a workpiece, a high-pressure air layer with a vortex airflow is formed between the objective lens and the workpiece, and the vortex airflow will remain on the workpiece or the cutting groove is cut The water is blown off, so that the groove width of the cut groove can be measured more accurately. Thereby, the imaging of the cut groove can be performed efficiently, and the time required from the start of imaging to the storage of the workpiece can be shortened.

The cutting device 1 shown in FIG. 1 includes a device base 2 and includes: a holding platform 10 which is arranged on the device base 2 and holds a workpiece W, that is, a plate-like workpiece W; A cutting means 20 is provided, and a cutting means 20 is used for cutting while supplying cutting water to the plate-like workpiece W held by the holding platform 10; an imaging means 30 for imaging the plate-like workpiece W held by the holding platform 10 from above; A moving means 40 that moves the holding platform 10 and the imaging means 30 relative to each other in a cutting feed direction (X-axis direction); a grading feeding means 50 that performs stepwise feeding in the grading feed direction (Y-axis direction); And the lifting means 60 which raises and lowers the cutting means 20 in a vertical direction (Z-axis direction).

The upper surface of the holding platform 10 is formed as a holding surface 10 a that holds the plate-shaped workpiece W. A plurality of frame holding means 11 are provided on the periphery of the holding platform 10 to hold the ring-shaped frame F that supports the plate-shaped workpiece W through the belt T. The frame holding means 11 includes a frame mounting table 12 on which the frame F is placed, and a clamp portion 13 which presses the upper surface of the frame F placed on the frame mounting table 12.

The moving means 40 includes a ball screw 41 extending in the X-axis direction, a motor 42 connected to one end of the ball screw 41, a pair of guide rails 43 extending parallel to the ball screw 41, and a moving base capable of moving in the X-axis direction. Block 44. A support base 10 is rotatably supported on one side of the moving base 44, and a pair of guide rails 43 are slidably connected to the other side of the moving base 44. A nut formed at the center of the moving base 44 is screwed together.球球 41。 Ball screw 41. The ball screw 41 driven by the motor 42 is rotated to move the base 44 along the guide rail 43 in the X-axis direction, so that the holding platform 10, the cutting means 20, and the imaging means 30 can be relatively moved in the X-axis direction. .

At the rear of the apparatus base 2 in the X-axis direction, a gate-shaped column 3 is erected across the moving means 40. A cutting means 20 is disposed on the side of the column 3 through a step feeding means 50 and a lifting means 60. The step feeding means 50 includes a ball screw 51 extending in the Y-axis direction, a motor 52 connected to one end of the ball screw 51, a pair of guide rails 53 extending in parallel with the ball screw 51, and one side being mounted on a lifting means. 60 的 移动 轴 54。 60 of the moving base 54. A ball screw 51 is screwed to a pair of guide rails 53 on the other surface of the moving base 54 in sliding contact with a nut formed inside the moving base 54. The motor 52 rotates the ball screw 51, whereby the moving base 54 is guided to the guide rail 53 and moves in the Y-axis direction, and the lifting means 60 and the cutting means 20 can be fed in steps in the same direction.

The lifting and lowering means 60 includes a ball screw 61 extending in the Z-axis direction, a motor 62 connected to one end of the ball screw 61, a pair of guide rails 63 extending in parallel with the ball screw 61, and a cutting means provided at the lower end portion. 20 Lifting plate 64. The lifting plate 64 is slidably connected to the pair of guide rails 63, and a ball screw 61 is screwed into a nut formed inside the lifting plate 64. When the motor 62 is driven and the ball screw 61 is rotated, the lifting plate 64 is guided to the guide rail 63 and moved in the Z-axis direction, so that the cutting means 20 can be raised and lowered in the same direction.

The cutting means 20 includes: a mandrel 21 having a shaft center in the Y-axis direction; a mandrel housing cover 22 rotatably supporting the mandrel 21; a cutter 23 attached to a front end of the mandrel 21; and a cover A cutter cover 24 around the cutter 23. When a motor (not shown) is driven, the mandrel 21 is rotated at a predetermined rotation speed, whereby the cutter 23 can be rotated at a predetermined rotation speed.

As shown in FIG. 2, the knife cover 24 is composed of: a cover body 240; a first block 241 installed on one side surface of the cover body 240; and a first block 241 installed on the other side surface of the cover body 240. 2 Block 242. A pair of cutting water supply nozzles 25 are installed, which extend from the lower end portion of the first block 241 in a horizontal direction and sandwich the cutting blade 23 to supply the cutting water toward the side of the cutting blade 23. A cutting water supply nozzle (not shown) is provided at a lower end portion of the second block 242 to supply cutting water to an area where the cutting blade 23 contacts the plate-like workpiece W. A pipe 26 that connects a pair of cutting water supply nozzles 25 and a cutting water supply source 27 is connected to the upper end of the first block 241. In addition, a pipe 26 a that connects a cutting water supply nozzle (not shown) and the cutting water supply source 27 is also connected to the upper end of the second block 242.

The imaging device 30 is mounted on the side of the mandrel housing cover 22 and is positioned above the moving path of the holding platform 10 shown in FIG. 1. As shown in FIG. 3, the imaging means 30 includes a microscope 31 including an objective lens 310 facing the upper surface of the plate-shaped workpiece W held by the holding platform 10 shown in FIG. 1, and a periphery of the microscope 31 is covered, and A housing 32 having an annular bottom portion 321 having a circular opening 320 for photography with the optical axis of the objective lens 310 as the center; and an air is sprayed from the bottom portion 321 toward the plate-shaped workpiece W and is provided between the bottom portion 321 and the plate-shaped workpiece W The air layer forming means 33 which forms an air layer having a higher pressure than the surroundings.

The microscope 31 is an imaging camera that images the plate-like workpiece W from above, and includes an optical imaging element (for example, a CCD or a CMOS) inside. In the microscope 31, the reflected light reflected on the imaged surface of the plate-like workpiece W passes through the objective lens 310 and is incident on the imaging element, whereby, for example, an area to be processed of the plate-like workpiece W before cutting is captured The captured image is captured, or the captured image of the cut groove of the plate-like workpiece W during or after the cutting process is captured.

The casing 32 is formed in a cylindrical shape, and is configured to hermetically seal the periphery of the microscope 31 to prevent the droplets of cutting water used during cutting and scattered to the surroundings from adhering to the microscope 31. A circular opening 320 formed on the bottom 321 of the housing 32 is located directly below the objective lens 310. As shown in FIG. 4, the circular opening 320 shown in this embodiment is formed to have a diameter larger than at least the diameter of the objective lens 310, and is formed so that the objective lens 310 is exposed through the circular opening 320.

As shown in FIG. 5, the air layer forming means 33 is an air nozzle formed integrally on the lower side of the casing 32. The air layer forming means 33 is provided with an annular air passage 34 centered on the optical axis of the objective lens 310 shown in FIG. 4; an air introduction port 35 for introducing air into the annular air passage 34; The introduced air rotates in one direction in the annular air passage 34 and generates a vortex airflow guide plate 36; and the reverse annular conical flow path 37 whose diameter is reduced downward by the annular air passage 34.

The annular air passage 34 is an annular cavity formed inside the housing 32 and surrounded by the ceiling 34a, the bottom surface 34b, and the side surface 34c. An inflow port 340 communicating with the air introduction port 35 is formed on a side surface 34 c of the annular air passage 34. An air supply source 39 is connected to the air introduction port 35 through a valve (not shown). By opening the valve and introducing air into the air introduction port 35, air can be supplied into the annular air passage 34 through the inflow port 340.

The uppermost end of the reverse annular conical flow path 37 communicates with the annular air passage 34, and the air supplied to the inside of the annular air passage 34 flows into the reverse annular conical flow path 37. An annular air ejection port 38 for ejecting air is formed at the lowermost end of the reverse annular conical flow path 37. The air ejection port 38 surrounds the periphery of the objective lens 310 shown in FIG. 4 and is formed to eject air toward the optical axis of the center of the objective lens 310.

As shown in FIG. 6, the guide plate 36 is a fluid guide plate configured by, for example, a flat plate and rectifying the direction of air flow in one direction in the annular air passage 34. As shown in FIG. 7, the guide plate 36 is disposed obliquely in the annular air passage 34 at a position rearward than the air introduction port 35. That is, the upper end portion 360 of the guide plate 36 is disposed more rearward than the inflow port 340 communicating with the air introduction port 35, and the lower end portion 361 of the guide plate 36 is fixed to the bottom surface 34 b of the annular air passage 34. And it is arrange | positioned at the position of the one direction side of air flow, and it forms in the state which the guide surface 362 of the guide plate 36 is inclined. In the guide plate 36 configured as described above, if the air flowing into the annular air passage 34 abuts against the guide surface 362, the air can be rotated in one direction in the annular air passage 34, and the Generate vortex airflow. In addition, since the guide surface 362 of the guide plate 36 is positioned further behind than the position of the inflow port 340, the air flowing into the annular air passage 34 from the inflow port 340 can be prevented from flowing in one direction with the air Backflow for the opposite direction. The number, material, and size of the guide plates 36 are not particularly limited.

Next, an operation example of the cutting device 1 will be described. The plate-like workpiece W shown in FIG. 1 is an example of a workpiece having a circular plate-like substrate. On the upper surface Wa is an element D formed in each region divided by a grid-like dividing line S. Attachment T is attached to the surface of the plate-like workpiece W opposite to the upper surface Wa, that is, the lower surface Wb. That is, the plate-shaped workpiece W shown in this embodiment is formed integrally with the ring frame F through the belt T, and houses a plurality of cassettes and the like (not shown).

First, the plate-shaped workpiece W integrated with the frame F is transferred to the holding table 10. Specifically, the plate-shaped workpiece W is placed on the holding surface 10 a of the holding platform 10 through the belt T, and the frame F is placed on the frame mounting table 12. Then, the plate-shaped workpiece W is sucked and held on the holding surface 10 a by the suction force of a suction source (not shown), and fixed by pressing the upper surface of the frame F by the clamp portion 13.

After the plate-shaped workpiece W is held by the holding table 10, the holding table 10 is moved to the lower side of the cutting device 20 by the moving means 40. At this time, the imaging means 30 images the upper surface Wa of the plate-like workpiece W held on the holding platform 10 and detects an area where the plate-like workpiece W should be subjected to cutting processing (partition line S).

Next, the upper surface Wa of the plate-shaped workpiece W is cut by the cutting means 20. Specifically, while the holding platform 10 is moved below the cutting means 20, the mandrel 21 is rotated at a predetermined rotation speed, the cutting blade 23 is rotated at a predetermined rotation speed, and the cutting means 20 is caused by the lifting means 60. It descends in the Z-axis direction close to the plate-like workpiece W held on the holding table 10. The rotating cutting blade 23 is cut into a predetermined depth from the upper surface Wa of the plate-like workpiece W, and the cutting means 20 and the holding table 10 are cut while moving relatively in the cutting feed direction. As described above, the cutting groove G shown in FIG. 8 is formed in the plate-like workpiece W along the planned division line S.

In the cutting process of the plate-like workpiece W, cutting water is supplied to the pipe 26 from a cutting water supply source 27 shown in FIG. 2, cutting water is supplied from the cutting water supply nozzle 25 toward the side of the cutting blade 23, and the cutting water supply source is used. The cutting water flows into the pipe 26a and a cutting water supply nozzle (not shown) supplies cutting water to the contact area between the cutting blade 23 and the plate-shaped workpiece W, and the plate-shaped workpiece W is cut while the cutting blade 23 is cooled. As soon as the cutting grooves G are formed along all of the predetermined division lines S, the cutting means 20 is raised by the lifting means 60 and the cutting blade 23 is avoided from the upper surface Wa of the plate-like workpiece W.

Next, an operation of imaging the upper surface Wa of the plate-like workpiece W by the imaging means 30 and measuring the groove width of the cutting groove G formed in the workpiece W will be described. The timing of imaging the cut groove G is not particularly limited. For example, the cutting device 1 sets a timing for imaging based on the number of processed plate-shaped workpieces W, the cutting distance at which the plate-shaped workpiece W is cut by the cutter 23, the number of cut grooves G, and the like.

As shown in FIG. 8, the upper surface Wa of the plate-shaped workpiece W is imaged by the imaging means 30 while the holding platform 10 and the imaging means 30 are moved relative to each other in the X-axis direction (cutting feed direction). At this time, the air is introduced into the air inlet 35 by the air supply source 39, thereby allowing the air to pass downward through the annular air passage 34 and the inverse annular conical flow path 37 from the air ejection outlet 38, and is connected to the objective lens 310 and the plate. A high-pressure air layer 100 is formed between the upper surfaces Wa of the workpiece W.

The high-pressure air layer 100 is provided with a vortex airflow 101 shown in FIG. 9. Here, a flow of generating the vortex flow 101 will be described. When air flows into the annular air passage 34 through the air inlet 340 through the air inlet 35 shown in FIG. 7, the air abuts against the guide surface 362 of the guide plate 36 and the air flows in a uniform direction. It flows inside the annular air passage 34 in one of the directions indicated by, for example, the arrow A direction. Thereby, the air swirls in one direction in the annular air passage 34, and the vortex airflow 101 is generated just below the objective lens 310. That is, the air flowing spirally in one direction in the annular air passage 34 flows downward along the inverse annular conical flow path 37, so the air flow system of the air ejected from the air ejection port 38 is formed to be connected to Between the objective lens 310 and the upper surface Wa of the plate-like workpiece W, a vortex airflow 101 centered on the optical axis of the objective lens 310.

The vortex airflow 101 blows off cutting water remaining on the upper surface Wa of the plate-like workpiece W within the imaging range of the imaging means 30. That is, if the vortex airflow 101 contacts the upper surface Wa of the plate-shaped workpiece W, and air flows from the contact portion toward the outside in the radial direction, the upper surface Wa of the plate-shaped workpiece W or the groove in the cutting groove G can be attached The water droplets of the cutting water blow off. As a result, water droplets are removed from the upper surface Wa of the plate-like workpiece W and the upper surface Wa is in a dry state. The microscope 31 shown in FIG. 8 can be used to image the cut groove G with high efficiency. However, it is preferable that the high-pressure air layer 100 having the vortex air flow 101 be formed immediately under the objective lens 310 not only in the imaging of the plate-shaped workpiece W, but also in the cutting processing of the plate-shaped workpiece W. Thereby, the cutting water can be prevented from immersing into the housing 32 through the circular opening 320 of the housing 32, and the cutting water can be prevented from adhering to the objective lens 310.

As described above, the cutting device 1 of the present invention is configured to include: an imaging means 30 for imaging the plate-like workpiece W held by the holding platform 10 from above; the imaging means 30 includes: having and holding the platform 10 The upper surface Wa of the held plate-shaped workpiece is opposite to the microscope 31 of the objective lens 310; it covers the periphery of the microscope 31, and has an annular bottom portion 321 having a circular opening 320 for photography centered on the optical axis of the objective lens 310. And an air layer forming means 33 that sprays air from the bottom portion 321 toward the plate-like workpiece to form an air layer between the bottom portion 321 and the plate-like workpiece W having a higher pressure than the surroundings. The air layer forming means 33 includes: An annular air passage 34 centered on the optical axis of the objective lens 310; an air introduction port 35 that introduces air into the annular air passage 34; and that the air introduced through the air introduction port 35 has one direction in the annular air passage 34 A guide plate 36 that swirls and generates a vortex airflow, and an inverse annular conical flow path 37 that is reduced in diameter by an annular air passage 34 when imaging a cutting groove G formed in a plate-like workpiece W The objective lens 31 A high-pressure air layer 100 having a vortex airflow 101 is formed between 0 and the plate-shaped workpiece W. The vortex airflow 101 blows off the cutting water remaining on the upper surface Wa of the plate-shaped workpiece W or the cutting groove G, so that The groove width of the cut groove G was measured more accurately. As described above, according to the present invention, imaging of the cutting groove G can be performed efficiently, and therefore, the time required from the start of imaging to the storage of the plate-shaped workpiece W can be shortened. In addition, not only the imaging of the plate-like workpiece W, but also the cutting process of the plate-like workpiece W, a high-pressure air layer 100 having a vortex airflow 101 is formed directly under the objective lens 310, thereby preventing cutting water from adhering to the interface. The objective lens 310 does not need to be provided with a shutter or the like that closes the circular opening 320 of the housing 32. Thereby, the objective lens 310 can be brought close to the plate-shaped workpiece W, and the decomposition energy of the microscope 31 can be improved.

The air layer forming means 33 shown in the above-mentioned embodiment has a configuration in which air is introduced into the annular air passage 34 from the side surface 34c side of the annular air passage 34, but is not limited to this structure. For example, as shown in the air layer forming means 33A shown in FIG. 10, the air introduction port 35A may be formed so as to communicate with the annular air passage 34 formed through a pipe disposed inside the housing 32. The inflow inlet 341 of the ceiling 34a is configured to introduce air into the annular air passage 34 from the ceiling 34a side. Even if it is configured as the air layer forming means 33A as described above, the air introduced into the annular air passage 34 through the air inlet 35A through the air inlet 35A can be rotated in one direction in the annular air passage 34 This causes it to generate vortex airflow.

1‧‧‧ cutting device

2‧‧‧ device base

3‧‧‧ post

10‧‧‧ keep the platform

10a‧‧‧ keep face

11‧‧‧ Means of maintaining the frame

12‧‧‧Frame mounting table

13‧‧‧Jig Department

20‧‧‧Cutting means

21‧‧‧ mandrel

22‧‧‧ mandrel cover

23‧‧‧Cutter

24‧‧‧ knife cover

240‧‧‧ cover body

241‧‧‧Block 1

242‧‧‧Block 2

25‧‧‧ Cutting water supply nozzle

26, 26a‧‧‧Piping

27‧‧‧ Cutting water supply source

30‧‧‧ camera means

31‧‧‧ microscope

310‧‧‧ objective lens

32‧‧‧ shell

320‧‧‧ round opening

321‧‧‧ bottom

33, 33A‧‧‧ Air layer forming means

34‧‧‧ annular air passage

34a‧‧‧ ceiling

34b‧‧‧ underside

34c‧‧‧ side

340, 341‧‧‧Inlet

35, 35A‧‧‧Air inlet

36‧‧‧Guide Board

360‧‧‧ upper end

361‧‧‧ lower end

362‧‧‧Guide plane

37‧‧‧ inverse annular conical flow path

38‧‧‧Air spout

39‧‧‧Air supply source

40‧‧‧ Means of movement

41‧‧‧ball screw

42‧‧‧ Motor

43‧‧‧rail

44‧‧‧mobile base

50‧‧‧ step feed

51‧‧‧ball screw

52‧‧‧Motor

53‧‧‧rail

54‧‧‧mobile base

60‧‧‧ Lifting means

61‧‧‧ball screw

62‧‧‧Motor

63‧‧‧rail

64‧‧‧ Lifting plate

100‧‧‧ high-pressure air layer

101‧‧‧vortex

D‧‧‧Element

F‧‧‧Frame

G‧‧‧Cutting groove

S‧‧‧ divided scheduled line

T‧‧‧ with pieces

W‧‧‧ Workpiece

Wa‧‧‧ The top of workpiece W

Wb‧‧‧ Below the workpiece W

FIG. 1 is a perspective view showing the configuration of an example of a cutting device. FIG. 2 is a perspective view showing the configuration of the cutting means and the imaging means. FIG. 3 is a cross-sectional view showing the configuration of the imaging means. FIG. 4 is a bottom view of the imaging means viewed from the lower side. FIG. 5 is a partially enlarged perspective view showing the configuration of the air layer forming means. FIG. 6 is a sectional view taken along the line a-a in FIG. 3. FIG. 7 is a sectional view along line b-b in FIG. 6. FIG. 8 is a cross-sectional view illustrating a state where an upper surface of a workpiece is imaged by an imaging means. FIG. 9 is an explanatory diagram illustrating a vortex airflow included in a high-pressure air layer formed between an objective lens and a workpiece. FIG. 10 is a partially enlarged perspective view showing a configuration of a modification of the air layer forming means.

Claims (1)

A cutting device includes: a holding platform that holds a workpiece; a cutting tool that is rotatably installed; and cutting water that is supplied to the workpiece held by the holding platform to perform cutting processing; An imaging means for imaging the object held by the holding platform from above; and a moving means for relatively moving the holding platform and the imaging means in the cutting feed direction, the cutting device is characterized by: The imaging means is provided with: A microscope provided with an objective lens facing the upper surface of the workpiece held by the holding platform; a ring shape covering the periphery of the microscope and having a circular opening for photography centered on the optical axis of the objective lens; A bottom shell; and an air layer forming means that sprays air from the bottom toward the workpiece to form a higher-pressure air layer between the bottom and the workpiece than the surroundings, and the air layer forming means includes: An annular air passage centered on the optical axis of the objective lens; An air introduction port through which air is introduced into the passage; a guide plate that rotates the air introduced through the air introduction port in one direction in the annular air passage and generates a vortex airflow; and the annular air passage faces downward The conical flow path with a reduced diameter is formed between the objective lens and the upper surface of the object by means of air ejected from the air layer forming means, and a vortex centered on the optical axis of the objective lens is formed. The high-pressure air layer of the air current, while moving the holding platform and the imaging means in the cutting feed direction while imaging the cutting groove formed in the workpiece, will process the workpiece remaining on the holding platform. The cutting water on the object is blown away by the vortex airflow, and the cutting groove is imaged.