TW201833700A - Parameter management device - Google Patents

Abstract

This parameter management device manages parameter groups each of which includes a plurality of parameters and serves as a base for control in an industrial device. The parameter management device includes: a registration means in which the parameter groups are registered; a parameter editing means for changing the values of the parameters; a change history storage means for storing a change history information item of each parameter; an acquisition means for acquiring the change history information item of each parameter that is stored in the change history storage means; a display means for displaying change history information items of the plurality of parameters that are acquired by the acquisition means; a selection input means to be operated by an operator in order to select whether or not to reflect the change for each of the parameters having the change history information items displayed by the display means; a determination input means to be operated by the operator in order to determine a value selected by the operator via the selection input means; and an update registration means for registering, in the registration means, the parameter group that includes a value on which a determination operation is performed by the determination input means.

Description

   Parameter management device   

The present invention relates to a parameter management device for managing a parameter group as a basis for control in an industrial device, and a computer program for causing a computer to operate as a parameter management device.

An example of an industrial device is a semiconductor manufacturing device for manufacturing a semiconductor device. The semiconductor manufacturing apparatus is configured so that the values of a plurality of parameters for specifying various processing conditions can be variably set. The value of each parameter is set by a user of the semiconductor manufacturing apparatus, a maintenance operator, and the like. The computer provided in the semiconductor manufacturing apparatus controls each part of the apparatus according to the set parameters, thereby performing necessary processing.

Patent Document 1 discloses a parameter management device that easily reuses device parameters of industrial devices. The operator can operate the input device to change the device parameter group. When the change of the device parameter group starts, the current device parameter group is retreated to the retreat area of the memory section. When the change of the device parameter group is detected, the device parameter group that has retreated to the retreat area is added to the parameter history, and the parameter history is updated. When the change of the device parameter group is not detected, the device parameter group that has retreated to the retreat area is written back to the original area as the current device parameter.

The parameter management device of Patent Document 1 has a function of comparing a current device parameter group with a past device parameter group. That is, the current device parameter group is compared with the past device parameter group obtained from the parameter history, and the comparison result is output to a display. At this time, the parts with different parameter values will be highlighted, so that the operator can easily identify the details of the similarities and differences of the device parameter groups.

(Prior technical literature)

(Patent Literature)

Patent Document 1: Japanese Patent Application Laid-Open No. 2008-77175.

At the stage of adjusting the device in order to obtain the optimal processing conditions, it is necessary to change the values of a plurality of parameters and perform a trial and error operation. Such operations are performed when a new device is introduced, the structure of a changed device, the content of a change process, and the maintenance of the device are performed. The operator may also be the user of the device or the maintenance operator dispatched from the device manufacturer.

The values of the plurality of parameters that are experimentally changed are different depending on the situation. That is, there are cases where a batch is applicable as a better case, only a part is applicable as a better case, and no matter which value is applicable, it is returned to a case where the previous value is better.

However, the device of Patent Document 1 does not provide an interface that can easily and flexibly select the applicable / inapplicable parameters in response to such various situations, and does not necessarily have a structure with good usability.

Accordingly, it is an object of the present invention to provide a parameter management device having an interface that can easily perform an applicable / inapplicable operation of changing a parameter value depending on a situation.

Another object of the present invention is to provide a computer program that can make a computer a parameter management device having an interface that can easily perform applicable / inapplicable operations of parameter value changes depending on the situation.

The invention provides a parameter management device for managing a parameter group including a plurality of parameters as a basis for control in an industrial device. The parameter management device includes: a registration means for registering the aforementioned parameter group; a parameter editing means for changing the value of the aforementioned parameter; a change history memory means for storing the change history information of the aforementioned parameter; an obtaining means for Obtain the change history information of the aforementioned parameters that have been memorized in the aforementioned change history memory means; the display means is used to display the change history information of the plurality of aforementioned parameters obtained by the aforementioned acquisition means; the selection input means is operated by the operator Whether the parameter selection reflects the change of the parameters for which the change history information is displayed by the aforementioned display means; and the determination input means is operated by the operator to determine whether the operator selected the aforementioned input means through the selection input means. A value; and an update registration means for registering a parameter group including a value determined by the determination input means in the registration means.

According to this configuration, the change history information of the plurality of parameters can be displayed by the display means. For each parameter of the displayed plurality of parameters, the operator can choose whether to reflect the change, and can determine the selected value (the value before the change or the value after the change). This determined value is registered in the registration means. Therefore, the operator can select and determine the parameters that should reflect the change according to the situation. This makes it possible to provide an applicable / inapplicable interface that can easily perform parameter value changes depending on the situation.

In one embodiment of the present invention, the display means displays the change history information of the plurality of parameters obtained by the obtaining means on a single screen (including a portion displayed by scrolling); The selection input means is operated by the operator to select whether or not to reflect the change in each of the parameters of the parameters for which the change history information is displayed by the display means. According to this configuration, the change history information of a plurality of parameters can be displayed on one screen by a display means. For each parameter of the plurality of parameters displayed on the one screen, the operator can select whether to reflect the change in the one screen, and can determine the selected value (the value before the change or the value after the change). This determined value is registered in the registration means. Therefore, the operator can select and determine the parameters that should reflect the change on a screen according to the situation. This makes it possible to provide an applicable / inapplicable interface that can easily perform parameter value changes depending on the situation.

In an embodiment of the present invention, the selection input means includes an individual selection means, and the individual selection means is for an operator to select for each parameter: the latest value input last and the value that has been registered in the registration means. Used by any of the registered values. According to this configuration, since either the latest value or the existing registered value can be individually selected for each parameter, the application / non-applicability of the change can be individually specified for each parameter. The aforementioned individual selection means is preferably provided on the aforementioned screen.

In one embodiment of the present invention, the selection input means includes a latest value batch selection means, and the latest value batch selection means is for the operator to select all parameter batches whose change history is displayed by the display means. The latest value entered last is used. According to this configuration, among the displayed change history information of the plurality of parameters, the latest value can be selected in batches. This makes it easy to select the latest value. For example, when the latest value is selected for a plurality of parameters, as long as the latest value is selected in a batch and the registered values are individually selected for several parameters as required, the applicable value can be quickly selected for each parameter. The aforementioned latest value batch selection means is preferably provided on the aforementioned screen.

In one embodiment of the present invention, the selection input means includes a batch of registered values, and the batch of selected values is provided for the operator to display all parameter batches of the change history by the display means. The secondary selection is used as the existing registered value of the value registered in the aforementioned registration means. According to this configuration, among the displayed change history information of the plurality of parameters, the registered values can be selected in batches. This makes it easy to select a registered value. For example, in the case where selected registered values are selected for a plurality of parameters, as long as the registered values are selected in batches, and the latest values are individually selected for several parameters as required, the applicable value can be quickly selected for each parameter . It is preferable that the aforementioned registered value batch selection means is provided on the aforementioned one screen.

In an embodiment of the present invention, the change history information includes parameter identification information of a parameter whose value has been changed, and the parameter management device further includes a retrieval means that uses the parameter identification information to sort Or extract the change history information displayed by the aforementioned display means. According to this configuration, parameter identification information (such as a parameter name) can be used to sort or extract change history information about a plurality of displayed parameters. Thereby, even when the number of displayed parameters is large, the change history information of the target parameter can be quickly found.

In one embodiment of the present invention, the change history information includes resource identification information for identifying the resource of the industrial device involved in the parameter whose value has been changed, and the parameter management device further includes a retrieval means. The retrieval means uses the aforementioned resource identification information to sort or extract the change history information displayed by the aforementioned display means. According to this configuration, resource identification information (such as a resource name) can be used to sort or extract change history information about a plurality of parameters displayed. Thereby, even when the number of displayed parameters is large, the change history information of the target parameter can be quickly found.

In an embodiment of the present invention, the change history information includes time information indicating a time after the value of each parameter has been changed, and the parameter management device further includes a retrieval means. The retrieval means uses the time information to Sort or extract the change history information displayed by the aforementioned display means. According to this configuration, it is possible to use the time information after the value of the parameter has been changed to sort or extract the change history information about the displayed plurality of parameters. Thereby, even when the number of displayed parameters is large, the change history information of the target parameter can be quickly found.

In an embodiment of the present invention, the aforementioned parameter management device further includes: a comment input means for an operator to input a comment associated with the change history information provision; and an annotation memory means for memorizing The annotation input by the aforementioned annotation input means. Then, the display means displays the annotation in the annotation display area. According to this configuration, the operator's annotation can be displayed by the display means. For example, the operator may record arbitrary information such as the intention of the change and the result of the change as a comment when the parameter has been changed. Since the operator can judge whether or not the change should be reflected based on the annotation, the appropriate value (both registered value or latest value) of each parameter can be quickly selected.

The annotation display area is preferably arranged in the aforementioned one frame. In this case, by displaying the change history information and the annotations on one screen together, the operator can quickly determine whether or not the change of each parameter is reflected based on the display of the annotation area in the same screen.

In an embodiment of the present invention, the parameter management device further includes a history display erasing means. When a value of a parameter determined by a determination operation on the determination input means is registered in the registration means, Clear the display of the change history information of this parameter. According to this configuration, when the value of the parameter is determined, the display of the change history information of the parameter can be erased. Therefore, since the operator can easily grasp the undetermined change history information, the parameters can be selected and determined quickly.

In addition to clearing the display of the change history information, erasing the display of the change history information also includes displaying the change history information of the determined completion parameter in a state different from the change history information of the undetermined parameters. The so-called different appearances may be, for example, an overlay display of a cancellation line on the change history information, or a mask display for changing the display area of the history information by using a predetermined color (such as gray). .

In one embodiment of the present invention, the parameter management device further includes: a change history record start instruction means, which is operated by an operator in order to start a change history record mode for recording a change history of parameters; and a change history The writing means is to write the change history information of the parameter into the change history storage means in the change history recording mode. According to this configuration, when the operator instructs the start of changing the history recording mode, the history recording mode is changed. In the change history record mode, when the parameter value is changed, the change history information is written in the change history storage means. For example, when you want to temporarily change the value of a parameter, you can record a temporary change history of a parameter by using the change history recording mode. Therefore, when the value of the temporarily set parameter is returned to the original value, the change history information about the plurality of parameters that have been changed can be displayed. Then, as long as the values before the change are selected and determined for all the parameters, the values of all the parameters can be returned to the previous values (the registered values). Of course, some of the parameters can also be determined by selecting the changed values.

In one embodiment of the present invention, the parameter management device further includes a mode indicator for displaying whether the mode is in the change history recording mode. According to this configuration, since the mode indicator can be used to indicate whether the change history recording mode is in use, the operator can clearly recognize that the parameter change history information has been recorded.

In one embodiment of the present invention, the parameter management device further includes: a status indicator, in the change history recording mode, different change history information of any parameter is not stored in the first change history storage means. One state and the change history information of any one of the parameters have been stored in the second state of the change history storage means. According to this configuration, the status indicator can display whether the change history information of any of the parameters is stored in the change history storage means in addition to the change history recording mode. This allows the operator to clearly identify whether the parameters have been changed.

In an embodiment of the present invention, the parameter management device further includes: a status indicator, which is stored in the first color when the change history of any parameter in the change history recording mode is not stored in the change history storage means. It is shown that the change history of any one of the parameters in the change history recording mode is displayed in the second color when it is stored in the change history storage means, and is displayed in the third color when it is not in the history record mode. With the display color of the status indicator, it can be displayed whether the change history information of any of the parameters is stored in the change history storage means in the change history recording mode. This allows the operator to clearly identify the mode of the parameter management device and the presence or absence of parameter value changes.

In one embodiment of the present invention, the status indicator is disposed on a screen that displays the change history information of the parameter by the display means. With this configuration, the status indicator can be displayed on a screen that can display the change history information of a plurality of parameters. With this, the operator can easily grasp the parameter setting status and memory status.

In an embodiment of the present invention, the parameter management device further includes a mode end prohibiting means for prohibiting the end of the change history recording mode when a value of at least one parameter is not determined. According to this configuration, changing the history recording mode cannot be completed when there are parameters whose values are not determined. By this, it is possible to suppress or prevent the omission of the operation of determining the value of the parameter.

In one embodiment of the present invention, the parameter management device further includes a change history writing means that changes the parameters when the updated parameter group is registered to the registration means by the update registration means. The history information is written in the aforementioned change history memory means; and a search condition input means for receiving an input of changing the history search conditions by the operator. Then, the change history obtaining means obtains change history information that matches the change history search conditions input by the search condition input means from the change history storage means. When the updated parameter group is registered in the registration means, the change history information is written in the change history storage means. Therefore, each time the parameter group is changed, the change history information is stored. When the parameter change history information is displayed, the operator specifies the change history search condition from the search condition input means, and retrieves the change history information. Thereby, change history information matching the change history search conditions can be obtained from the change history storage means and displayed on the display means. Even in this case, change history information related to a plurality of parameters can be displayed.

The search condition may include a search period. The search conditions may include specific control target resources included in the industrial device. Furthermore, even when an alarm (anomaly notification) is generated by an industrial device, a person associated with the alarm can be specified as a search condition.

An embodiment of the present invention provides a computer program. The computer program is embedded with a step group to control a computer including an input device, a display device, and a memory device as a parameter management device having the aforementioned characteristics. The input device, the display device, and the memory device. Thereby, it is possible to provide a computer program that can operate a computer as a parameter management device with an interface that can easily perform applicable / inapplicable operations of parameter value changes according to the situation.

An embodiment of the present invention provides a computer-readable recording medium having the computer program recorded as described above.

In addition, one embodiment of the present invention provides a computer program product that is executed by loading a computer program as described above through a computer.

The above-mentioned or further other objects, features, and effects in the present invention can be understood by referring to the drawings and the description of the embodiments described below.

1‧‧‧ substrate processing device

2‧‧‧Unit

3‧‧‧ computer

4‧‧‧ external memory device

11‧‧‧Parameter Editing Department

12‧‧‧Parameter editing screen display section

13‧‧‧parameter change history record department

14‧‧‧Parameter change history acquisition department

15‧‧‧Parameter change history display section

16‧‧‧Parameter selection input receiving section

17‧‧‧ Parameter change confirmation input receiving section

18‧‧‧Parameter Registration Department

20‧‧‧Select input section

21‧‧‧ Individual selection input section

22‧‧‧Batch selection input section

23‧‧‧ confirm input

25‧‧‧Log in to the level management department

26‧‧‧Status display section

27‧‧‧Parameter Retrieval Department

28‧‧‧ Mode Migration Prohibition Department

31‧‧‧CPU

32‧‧‧ input device

33‧‧‧Display

34‧‧‧Memory Department

35‧‧‧ interface

40‧‧‧Parameter change history screen

41‧‧‧Change history record start button

42‧‧‧ Change history record end key

43‧‧‧Status display area

44‧‧‧ Change history display

45‧‧‧Parameter selection operation section

45N‧‧‧Change value individual selection key

45P‧‧‧ Individual selection key from previous value

46‧‧‧Parameter determination operation section

47‧‧‧List Display Department

47A to 47D‧‧‧sort key

48, 52‧‧‧Scroll keys

48D, 52D‧‧‧Move down one line

48E, 52E‧‧‧Jump to the end of the table

48H, 52H‧‧‧Jump to the head

48P, 52P‧‧‧Previous page scroll key

48S, 52S‧‧‧Next page scroll key

48U, 52U‧‧‧ up one line

50‧‧‧Parameter edit screen

51‧‧‧parameter table

53‧‧‧Save key

54‧‧‧Back key

60‧‧‧Unit selection screen

61‧‧‧unit selection key

65‧‧‧Parameter detailed display bar

66‧‧‧Annotation input field

70‧‧‧Screen switching operation section

71‧‧‧Unit selection screen display key

72‧‧‧ Change history display key

73‧‧‧Import key

74‧‧‧Export key

80‧‧‧Resume Write Key

451‧‧‧Batch selection key from previous value

452‧‧‧ Change value batch selection key

460‧‧‧ Individual OK button

461‧‧‧Batch OK button

D‧‧‧ Information

D1‧‧‧ Production Parameter Group

D2‧‧‧ Device Type Information

D3‧‧‧device identification ID

D4‧‧‧Updater Information

D5‧‧‧Annotation data

D6‧‧‧ Updated Date and Time Information

D7‧‧‧ Device Composition Information

DB‧‧‧Parameter Management Database

DT‧‧‧Temporary Parameter Group

ED‧‧‧Device parameter data

H‧‧‧parameter change history data

HT‧‧‧Changing resume information temporarily

P‧‧‧Program

P1‧‧‧Control program

P2‧‧‧Management Program

S1 to S31, S41 to S46, S50 to S59

FIG. 1 is a block diagram for explaining the electrical configuration of a substrate processing apparatus as an example of an industrial apparatus.

FIG. 2 is a schematic diagram for explaining a specific example of device parameter data.

FIG. 3 is a functional block diagram for explaining a configuration example of a management program.

Figure 4 shows an example of a parameter editing screen.

FIG. 5 is an example of a unit selection screen showing a unit for selecting a parameter editing target.

FIG. 6 is an example of a screen for displaying a parameter change history.

FIG. 7A is a flowchart for explaining the operation of the operator related to the parameter change and the processing of the computer in the first embodiment.

FIG. 7B is a flowchart for explaining the operation of the operator related to the parameter change in the first embodiment and the processing of the computer.

FIG. 8A is a flowchart for explaining the operation of the operator and the processing of the computer regarding the change of parameters in the second embodiment.

FIG. 8B is a flowchart for explaining the operation of the operator related to the parameter change in the second embodiment and the processing of the computer.

The "industrial device" refers to a device used in a business, and a typical example refers to a manufacturing device used in the manufacture of a product. The "manufacturing device" includes an inspection device, a conveying device, an environmental management device, and the like in addition to the device to be processed. The “manufacturing device” includes, for example, a cleaning device for manufacturing semiconductor devices, a heat treatment device, an impurity introduction device, a thin film forming device, a lithography device, a planarization device, and the like. These devices are merely examples of "manufacturing devices" and are not intended to limit the scope of application of the present invention.

The "parameter" refers to a device parameter for specifying processing conditions in an industrial device. Among the parameters, for example, there is a scrubber (washing tower) in a cleaning device (scrubber) that scrubs the cleaned surface while supplying a chemical solution to the cleaned surface of a rotating substrate (silicon wafer, etc.). Parameters used to specify the flow rate of the cleaning solution, parameters used to specify the distance between the surface to be cleaned and the chemical solution ejection outlet of the nozzle supplying the solution, and parameters used to specify the number of rotations of the silicon wafer. However, these parameters are merely examples, and are not intended to limit the scope of application of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a block diagram for explaining the electrical configuration of a substrate processing apparatus as an example of an industrial apparatus. The substrate processing apparatus 1 is a computer 3 including one or more units 2 and a control unit 2. In the present embodiment, the computer 3 refers to an embedded computer that is embedded (built-in) in the substrate processing apparatus 1. The unit 2 is a processing unit that processes a substrate, a transport unit that transports a substrate, a fluid supply unit that supplies a processing fluid for processing a substrate, and the like. The computer 3 is a controllable resource provided in the control unit 2. In this embodiment, the computer 3 also has a function as a parameter management device that manages parameters for controlling resources.

For example, the unit 2 may be a liquid processing unit that supplies a processing liquid to a substrate for processing. The single-chip type liquid processing unit that processes substrates one by one includes, for example, a spin chuck to keep the substrate rotating horizontally, and a processing liquid nozzle to supply the processing liquid to the rotary chuck. Hold the substrate. In this case, an electric motor that rotates the rotary chuck, a valve that opens and closes the processing liquid flow path to the processing liquid nozzle, and a flow controller that controls the flow rate of the processing liquid passing through the processing liquid flow path, Examples of resources that can be controlled. The number of rotations and rotation time of the spin chuck, and the supply time and flow rate of the processing liquid are examples of parameters.

The computer 3 includes a CPU (Central Processing Unit) 31, an input device 32, a display 33 (display device), and a memory unit 34 (memory device). Furthermore, the computer 3 may be provided with an interface 35 capable of being connected to the external memory device 4 as needed. The input device 32 refers to a man-machine interface such as a keyboard, a touch panel, a pointing device, and the like, and is capable of performing input by an operation performed by an operator. The display 33 refers to a two-dimensional display such as a liquid crystal panel, and is a human-machine interface that provides information to an operator, that is, an information output device. As the information output device, in addition to the display 33, a printer, a sound output device, and the like may be provided. The memory unit 34 is composed of a solid state memory such as a semiconductor memory, a memory device such as an HDD (Hard Disk Drive), and an SSD (Solid State Drive).

A program P and data D are stored in a memory area of the memory unit 34. The program P includes: a control program P1, which is used by the computer 3 and the control unit 2 in order to perform substrate processing; and a management program P2, which is used to manage a set of parameters for which processing conditions are set by the unit 2. When the CPU 31 executes these control programs P1 and management programs P2, the computer 3 can operate as a device for realizing the respective functions. The data D includes the device parameter data ED, and the device parameter data ED includes the production parameter group D1, which is a parameter group of the operating conditions or processing conditions of the predetermined unit 2 in the production step. The data D includes a temporary parameter group DT that is a parameter group that is temporarily applied. The data D further includes temporary change history data HT indicating a change in the temporary parameter group DT from the production parameter group D1. The data D further includes a parameter management database DB that systematically stores a change history of the device parameter data ED including the production parameter group D1. In the parameter management database DB, parameter history data H indicating the past change history of the device parameter data ED including the production parameter group D1 is recorded.

The memory unit 34 is configured such that the contents of the memory 3, that is, the program P and the data D can be retained even if the power of the computer 3 is turned off.

The external memory device 4 may also be constituted by a removable storage (removable storage) that can be attached to and detached from the computer 3 through the interface 35. USB (Universal Serial Bus) memory, memory card, portable HDD, and portable SDD are typical examples.

FIG. 2 is a schematic diagram for explaining a specific example of device parameter data. The device parameter data ED corresponding to the substrate processing apparatus 1 includes a production parameter group D1 which is a basis for controlling each unit 2, a device type data D2, a device identification information D1, an updater data D4, Annotation data D5, update date and time data D6, and device configuration information D7. The device type data D2 indicates the type of the substrate processing apparatus 1. The device identification information D3 is unique data for identifying the substrate processing apparatus 1. The updater data D4 is data indicating the operator who last changed the production parameter group D1. The annotation data D5 is data input by the operator arbitrarily when changing the production parameter group D1. The update date and time data D6 is data indicating the date and time when the production parameter group D1 was last changed. The device configuration information D7 is data indicating the unit 2 constituting the substrate processing apparatus 1. The device configuration information D7 is, for example, data including a unit name and a unit type of each unit 2 constituting the substrate processing apparatus 1. Unit name data refers to the data identifying each unit from other units, and unit type data refers to the type of display unit.

The plurality of parameters constituting the production parameter group D1 are described for each unit 2 described in the device configuration information D7. Each unit 2 includes one or more parameters for specifying conditions and the like of the processing performed by the unit 2. Each unit is specified by the unit name. Each unit name describes more than one parameter. Each parameter is specified by a parameter name. Parameter name refers to parameter identification information. Parameter values are described for each parameter.

The configuration of the temporary parameter group DT is the same as that of the production parameter group D1.

The temporary change history data HT is data indicating a change history from the production parameter group D1 to the temporary parameter group DT. If the production parameter group D1 and the temporary parameter group DT are equal, the temporary change history data HT will be empty. The temporary change history data HT is, for example, for each parameter that has been changed, including the date and time (time information) after the change, the corresponding unit name, parameter name, the value before the change, and the value after the change. The parameter after the value has been changed a plurality of times may also include a plurality of values before the change. In this case, the changed value (latest value) may be the same as the corresponding parameter value of the production parameter group D1.

FIG. 3 is a functional block diagram for explaining a configuration example of the management program P2, and shows an outline of the functions provided by the computer 3 by the CPU 31 to execute the management program P2. That is, the computer 3 is executed by the management program P2, and substantially has a plurality of function processing sections. However, this does not necessarily mean that the management program P2 has a unit portion corresponding to a plurality of function processing units.

The plurality of function processing units include a parameter editing unit 11, a parameter editing screen display unit 12, a parameter change history recording unit 13, a parameter change history acquisition unit 14, a parameter change history display unit 15, a parameter selection input receiving unit 16, and a parameter change determination The input receiving unit 17 and the parameter registration unit 18. In the present embodiment, the plurality of function processing units include a login level management unit 25, a status display unit 26, a parameter search unit 27, and a mode migration prohibition unit 28.

The parameter editing screen display unit 12 displays the parameter editing screen 50 on the display 33 (see FIG. 4). The operator can edit the parameters by operating the input device 32 with the parameter editing screen 50 displayed. The parameter editing screen display unit 12 may also display the parameter editing screen 50 of each unit on the display 33. In this case, you can edit the parameters in unit units. The parameter editing unit 11 is an example of a parameter editing means, and changes both the production parameter group D1 and the temporary parameter group DT that have been expanded in the memory unit 34 in accordance with the editing input of the operator on the parameter editing screen 50. Or only the parameter value of the temporary parameter group DT.

As described later, when editing a parameter, a change history recording mode can be set. If the change history recording mode is not set, the parameter editing unit 11 changes the parameter values of both the production parameter group D1 and the temporary parameter group DT according to the edit input of the operator. If the change history recording mode has been set, the parameter editing unit 11 changes the parameter value of the temporary parameter group DT according to the edit input by the operator, and the parameter value of the production parameter group D1 does not change.

The parameter change history recording unit 13 is an example of a change history writing means. The parameter change history recording unit 13 records the change (change history) of the temporary parameter group DT with respect to the production parameter group D1 as a temporary change history data HT in the memory unit 34. Therefore, in the change history recording mode, the parameter change history recording unit 13 records the parameter change history as the temporary change history data HT in the memory unit 34. In addition, the parameter change history recording unit 13 changes the parameter name, the parameter value before the change, the parameter value after the change, the time information of the change, and the changed value when any parameter value in the production parameter group D1 is changed. Subsequent operator names are recorded in the parameter management database DB as the parameter history data H.

The parameter change history acquisition unit 14 is an example of an acquisition means for obtaining the temporary change history data HT or the parameter history data H. Instead of recording the temporary change history data HT, if necessary, the parameter change history acquisition unit 14 compares the production parameter group D1 and the temporary parameter group DT and extracts parameters with different values to generate the temporary change history data HT.

The parameter change history display unit 15 displays the parameter change history screen 40 (see FIG. 6) on the display 33 in response to a predetermined input operation made by the operator. That is, in the present embodiment, the display 33 and the parameter change history display unit 15 are examples of display means. The parameter change history screen 40 displays a list of the information of the parameters that have been temporarily changed, that is, the list displays the change history information equivalent to the temporary change history data HT (see FIG. 6). At this display, the parameter change history acquisition unit 14 obtains the temporary change history data HT. Based on the obtained temporary change history data HT, the parameter change history display unit 15 creates a parameter change history screen 40 and displays it on the display 33.

The parameter selection input receiving unit 16 is provided on the parameter change history screen 40 and provides a selection input unit 20 for selecting a parameter value before the change or a parameter value after the change. The selection input unit 20 is an example of a selection input means. The operator can select a parameter value before or after the change by operating the selection input section 20. In this embodiment, the selection input unit 20 includes an individual selection input unit 21 and a batch selection input unit 22. The individual selection input unit 21 can individually select a parameter value before or after the change for a plurality of parameters provided on the parameter change history screen 40. The batch selection input unit 22 is capable of selecting parameter values before or after the batch is changed for the plurality of parameters provided on the parameter change history screen 40. The parameter selection input receiving unit 16 may display either the parameter value before the change or the parameter value after the change on the parameter change history screen 40 as a predetermined selection state.

The parameter change determination input receiving section 17 is provided on the display 33 with a determination input section 23 for determining a parameter value that has been received by the parameter selection input receiving section 16. Such a determination input unit 23 may be provided on the parameter change history screen 40. The determination input unit 23 is an example of a determination input means.

The parameter registration unit 18 responds to the determination input received in the parameter change determination input reception unit 17 and rewrites the determined parameter value to a value corresponding to that in the production parameter group D1. Accordingly, since the production parameter group D1 changes, the parameter change history recording unit 13 writes the parameter history data H to the parameter management database DB. As described above, the parameter registration unit 18 is an example of an update registration means.

The login hierarchy management unit 25 manages the operation authority of the operator. The operator uses the login name and password (password) given in advance to log in, so that he can use the function of the management program P2. A login level is given in advance for each login name. The login level refers to, for example, the manager level, the general user level, and the maintenance technician level. For example, the use of the parameter editing function and the parameter change history recording function can be allowed only when logging in with a login name of a certain login level (such as a manager level and a maintenance technician level).

The status display section 26 displays the status display area 43 of the parameter change history screen 40 as to whether the mode is displayed in the change history recording mode and the status display of the change history record. That is, the status display unit 26 is an example of a mode indicator and an example of a status indicator. The details of the display of the status display area 43 will be described later.

The parameter search unit 27 has a function of sorting the parameter change history displayed on the parameter change history screen 40, or a function of searching for a parameter change history satisfying a specific condition. The parameter search unit 27 may have a function of searching the parameter history data H of the parameter management database DB. Specifically, the parameter change history data that matches the search conditions (for example, the search period) specified by the operator may be searched from the parameter history data H. The parameter search unit 27 is an example of a search means.

The mode transition prohibition unit 28 is an example of a mode termination prohibition means that prohibits the change of the history recording mode until a predetermined condition is satisfied. Specifically, the mode transition prohibition unit 28 prohibits the end of changing the history recording mode when the temporary parameter group DT and the production parameter group D1 do not agree, that is, when the change of at least one parameter is not determined.

When the computer 3 executes the control program P1, the CPU 31 uses the temporary parameter group DT. However, when there is a difference between the production parameter group D1 and the temporary parameter group DT, only a trial substrate processing operation is allowed, and a substrate processing operation for producing a product is prohibited. That is, the substrate processing for producing a product is designed such that the control program P1 is permitted only when the production parameter group D1 and the temporary parameter group DT match.

FIG. 4 shows an example of a parameter editing screen 50. The parameter editing screen 50 includes a list of parameters that can be set for one unit, that is, a parameter list 51. The parameter table 51 includes a plurality of items for each parameter, that is, the parameter table 51 includes a number, a category, a parameter name, and a setting value. The category indicates the processing content to be targeted. The parameter name indicates the name of a parameter to be set. The set value is the parameter value. The so-called parameter editing refers to changing the setting value.

For example, the parameters included in the category of chamber cleaning are: "interval (minutes)" indicating the time interval of chamber cleaning, and the chamber is designated by the number of process jobs (PJ) "Interval (number of PJs)" in the case of cleaning, "Interval (number of carriers)" in the case where the interval of the chamber cleaning is specified by the number of carriers, and the chamber cleaning is designated by the number of the wafer The "interval (number of wafers)" in the case of a clear interval, the "recipe number" that specifies the contents of the chamber cleaning process, and is used to specify the cavity to be specified by one of time, number of carriers, or number of wafers The "timing designation" of the chamber cleaning interval, and the "trigger designation" of designating the chamber cleaning start trigger.

The term "chamber cleaning" refers to the treatment inside the chamber of the processing unit. The so-called processing work refers to a processing unit that specifies the processing of one or more wafers. Generally, a common processing (recipe) can be specified for a plurality of wafers in one processing job. The so-called carrier refers to a substrate receiving container that holds a plurality of wafers. The wafer to be processed is set in the substrate processing apparatus 1 in a state where the wafer is stored in a carrier. The substrate processing apparatus 1 takes out a substrate from the set carrier and processes it. The recipe number refers to identification information of a recipe stored in the memory section 34 in advance. A recipe is information that specifies what to do.

A scroll button 52 is arranged on the right side of the parameter table 51. The scroll key 52 includes a jump button 52H to the head, a jump key 52E to the end of the table, a previous page scroll key 52P, a next page scroll key 52S, a move up key 52U, and a down line Move the key 52D. Furthermore, the parameter editing screen 50 is provided with a save key 53 for saving the edited parameter value, and a return key 54 for returning to the previous screen.

When the return key 54 is operated on the parameter editing screen 50, the screen can be shifted to the unit selection screen 60 shown in FIG. The cell selection screen 60 includes a plurality of cell selection keys 61 respectively corresponding to the plurality of cells. When any one of the unit selection keys 61 is operated, a parameter editing screen 50 (see FIG. 5) for editing the parameters of the corresponding unit can be displayed. The parameter editing screen 50 in FIG. 4 is, for example, a parameter editing screen corresponding to a liquid processing unit (MPC).

A screen switching operation unit 70 is disposed on the unit selection screen 60. The screen switching operation section 70 is provided with a unit selection screen display key 71, a change history display key 72, an import button 73, an export button 74, and the like.

When the import key 73 is operated, the screen is shifted to an import screen for importing device parameter data. When the export key 74 is operated, it transitions to the export screen for exporting the device parameter data. The source or destination of the device parameter data can also be an external memory device 4. When the external memory device 4 is a removable storage device, device parameter data set in another device can be introduced into the substrate processing device 1 and reused. In addition, the device parameter data set in the substrate processing apparatus 1 can be written to an external memory device 4 and the external memory device 4 can be mounted on another substrate processing apparatus of the same type as the substrate processing apparatus 1 to further import the device parameter data. It is reused in this other substrate processing apparatus. In addition, the import screen can also provide the function of importing parameters that have been set in one unit as parameters of other units. The source of the import in this case may also be the memory unit 34, or the production parameter group D1 or the parameter management database DB. For example, a parameter group of a certain unit may be selected from the parameter management database DB for import. This allows you to copy parameters for use on the unit keys. It is preferable that the introduction of the parameter group from the external memory device 4 can be performed in units of units.

When the change history display key 72 is operated, the display screen transitions to the parameter change history screen 40.

FIG. 6 shows an example of a parameter change history screen 40. The parameter change history screen 40 includes a change history record start key 41, a change history record end key 42, a status display area 43 (shown with a double slash for the sake of clarity), a change history display section 44, and a parameter selection operation section 45 (equivalent The selection input section 20), the parameter determination operation section 46, the screen switching operation section 70, and the history write key 80 are shown in FIG. The configuration of the screen switching operation section 70 is the same as that of the unit selection screen 60. That is, the screen switching operation unit 70 refers to a portion displayed on the unit selection screen 60 and the parameter change history screen 40 together. When the parameter change history screen 40 is displayed and the operation unit selection screen display key 71 is operated, the display screen transitions to the unit selection screen 60 (see FIG. 5).

The change history record start key 41 is a key that instructs the start of the recording of a change history of a parameter. When the change history record start key 41 is operated, the computer 3 enters the change history record mode. As described above, in the change history recording mode, when the parameter value is changed, the parameter value of the temporary parameter group DT is changed. On the other hand, the parameter value of the production parameter group D1 is not changed. The difference between the production parameter group D1 and the temporary parameter group DT is recorded in the memory unit 34 as the temporary change history data HT. If the change history mode is not set, when the parameter value is changed, the corresponding parameter value of both the production parameter group D1 and the temporary parameter group DT can be changed accordingly. The change history record start key 41 is an example of a change history record start instruction means.

The change history record end key 42 is a key that instructs the end of the recording of the parameter change history. When the change history recording end key 42 is operated, the change history recording mode is canceled. Therefore, even if the parameter value is changed in the parameter editing screen 50 (see FIG. 4) thereafter, the change history is not recorded. That is, when the parameter value is changed, the change is reflected to both the production parameter group D1 and the temporary parameter group DT. When there is a change in the production parameter group D1, the changed production parameter group D1 is registered in the parameter management database DB, and the content of the change is written in the parameter management database DB as the parameter history data H.

The status display area 43 is an area in which the recording status of the change history is displayed. For example, in the change history recording mode, any change history is not recorded in the state of the temporary change history data HT, that is, the state where the production parameter group D1 and the temporary parameter group DT are equal, and the status display area is colored as the first One color (for example, yellow). In the change history record mode, the change history of any parameter has been recorded in the state of the temporary change history data HT, that is, the production parameter group D1 and the temporary parameter group DT have different states, and the status display area is colored as the first Two colors (such as red). When the record mode is not changed, the status display area is in a third color (for example, white), and it indicates that the record is not in the change history.

The change history display section 44 includes: a list display section for displaying a list of parameters whose values have been changed; a plurality of scroll keys 48 (scroll operation sections) for scrolling the list display section 47; a parameter detailed display field 65; and Note input field 66.

Each row of the list displayed on the list display unit 47 includes a plurality of items, that is, a number, a date and time of change, a unit name, a parameter name, a parameter value before the change, and a parameter value after the change. The list displayed on the list display unit 47 can be sorted by these items. Specifically, the display section of each item becomes sort keys 47A to 47E. Any one of these sort keys 47A to 47E is operated using the input device 32 (for example, a pointing device), whereby the list can be sorted in ascending or descending order of each item. That is, the parameter search unit 27 (see FIG. 3) can sort the temporary change history data HT in response to the operations of the sort keys 47A to 47E. The sorted temporary change history data HT can be displayed on the list display unit 47.

The plurality of scroll keys 48 include a jump key 48H to the head, a jump key 48E to the end of the table, a previous page scroll key 48P, a next page scroll key 48S, a one-line move key 48U, and a one-line move key 48D. When there is a change history of a plurality of parameters, the change history of all parameters cannot be displayed on the list display unit 47. In such a case, it is possible to display the change history of the target parameter by operating the scroll key 48. FIG. 6 shows a part of the list of change history that can be scrolled and displayed in dotted lines. All the parts that can be scrolled and displayed on the list display unit 47 refer to the constituent parts of the parameter change history screen 40 constituting one screen.

The parameter selection operation unit 45 includes a previous value individual selection key 45P for selecting the value of each line of the parameter list after the change, and a change value individual selection key 45N for selecting the changed value. These are equivalent to the individual selection input section 21 (see FIG. 3). The operator operates the scroll key 48 to move the focus (for example, a cursor) to a line on which a value should be selected. In this state, the value before change (previous value) is selected when the previous value individual selection key 45P is operated, and when the value change individual selection key 45N is operated, the changed value is selected. The selected value of each line is displayed on the display 33 in a state different from the unselected value (for example, color display), and it is preferable to express the selected state. In the initial state where the operator has not performed a selection operation, for example, the changed value may also be selected as a predetermined value, and the selected state is displayed. Of course, the program can also be designed by selecting the previous value as a predetermined value and displaying its selection status. The parameter selection operation unit 45 may further include a batch selection key 451 of the previous value before the batch selection is changed for all parameters in the list, and a batch selection after the batch selection is changed for all the parameters in the list. The value change value batch selection key 452. These are equivalent to the batch selection input part 22 (refer FIG. 5). By operating the batch selection key 451 from the previous value and the batch selection key 452 from the changed value, the changed value can be selected in batches or the previous value can be selected in batches. The previous value batch selection key 451 is an example of a batch selection means for a previously registered value. The change value batch selection key 452 is an example of the latest value batch selection method.

The previous value of each parameter refers to the value (that is, the registered value) of the parameter included in the production parameter group D1. On the other hand, the changed value of each parameter refers to the value (latest value) that was last entered on the parameter editing screen 50 (see FIG. 4). Each value of the parameters constituting the temporary parameter group DT is a value (previous value or changed value) displayed in the selected state on the change history display unit 44 of the parameter change history screen 40. Therefore, as long as the selection state is changed between the previous value and the changed value, the value of the parameter that matches the temporary parameter group DT can be rewritten.

The parameter determination operation unit 46 is equivalent to the determination input unit 23 and is used to determine a parameter value that is selected by the operation of the parameter selection operation unit 45 or the like in order to be suitable for the production of a product (see FIG. 3).

The parameter determination operation unit 46 may also include an individual determination key 460, which determines the parameter selection status of each row of the list or a part of a plurality of selected rows in order to be applicable to the production of a product. For example, by operating the scroll key 48 and operating the individual determination key 460 in a state where focus is arranged in a parameter row, the value (previous value or changed value) of the selection state can be determined for the one parameter. In addition, for example, a pointing device or the like is used to select a plurality of parameters as the determination target, and the individual determination key 460 is operated in this state, whereby the value of the selection status can be determined for the plurality of parameters selected as the determination target ( (Previous value or changed value). In response to such a determination operation, the value of the matching parameter of the production parameter group D1 can be updated to the value of the selected state (previous value or changed value). However, when the previous value is selected, the value remains in the previous value.

In addition, the parameter determination operation unit 46 may also include a batch determination key 461. The batch determination key 461 is used to batchly determine each parameter value as a selected state value (previous value or Change value). By operating the batch determination key 461, it is possible to determine the value (previous value or changed value) of the selection state for all parameters already displayed on the list display section 47. In response to such a batch determination operation, the values of all the parameters of the production parameter group D1 can be updated to the values of the selected state (previous values or changed values). However, for a parameter whose previous value was selected, the value remains in the previous value.

When the value of at least one parameter that has been displayed in the list display unit 47 is not determined, the operation of changing the history record end key 42 is not accepted due to the role of the mode transition prohibition unit 28 (see FIG. 3). That is to say, as long as the confirmation operation is not performed on all the parameters displayed on the list display section 47, the change history recording mode cannot be canceled, and the status display area 43 is continuously displayed as the change history recording mode.

The parameter detailed display field 65 displays detailed information about the parameters that have been configured with focus. The detailed information can also be, for example, the date and time after the parameter has been changed, the operator after the change, the category name of the parameter, and the login level of the operator.

The annotation input field 66 refers to an input field in which an operator has arbitrarily input a comment using the input device 32 for a parameter that has been configured with focus. The annotation data representing the entered annotation is a part of the change history data of the parameter. The input device 32 and the annotation input field 66 are examples of annotation input means.

The history write-out key 80 refers to a key for outputting the state of the parameter after the operation as evidence. An example of a voucher is a screen image. Specifically, by saving a list that has been displayed on the list display unit 47 and a screen image that knows the state before and after selecting a change, it is possible to leave a check operation as an implemented parameter. Credentials. This screen image can be used as the certificate of the operation report. Although it is also possible to obtain a screen image that has been displayed on the display 33, each time it is acquired, the screen needs to be scrolled or the screen is switched, and man-hours are required. Therefore, it is preferable to use the operation history write key 80 so that the entire list display unit 47 also includes a scrollable portion and can be acquired in batches, thereby reducing the burden on the operator. Certificates can be stored on the device or on other computers connected through the network. The certificate can also be text, CSV (Comma Separated Value) data, etc.

7A and 7B are flowcharts for explaining the operation of the operator related to the change of the parameters and the processing of the computer 3. When the recording of a history of a temporary change of a parameter is started, the operator displays a parameter change history screen 40 (see FIG. 6) and operates a change history record start key 41 (step S1). Accordingly, the computer 3 (more specifically, the CPU 31. The same applies hereinafter) uses the display color of the status display area 43 as the first color (for example, yellow), and displays that it is in the change history recording mode (step S2). The parameter value is changed on the parameter editing screen 50 (see FIG. 4). Specifically, the operator operates the unit selection screen display key 71 (step S3), displays the unit selection screen 60 (see FIG. 5) on the display 33 (step S4), and selects the unit whose parameter value is to be changed (step S5). . Thereby, the computer 3 displays the parameter editing screen 50 (refer to FIG. 4) for editing the parameter value of the selected unit on the display 33 (step S6). The operator changes (edits) the parameter value as needed in the parameter editing screen 50 (step S7). When the operator operates the save key 53 (see FIG. 4) (step S8: YES), the computer 3 reflects the value of the changed parameter to the temporary parameter group DT (step S9). At this time, the change is not reflected in the production parameter group D1. Furthermore, the computer 3 generates temporary change history data HT about the changed parameters and records them in the memory unit 34 (step S10). The temporary change history data HT includes the parameter name after the change, the unit name of the parameter, the value before the change (previous value), the value after the change (updated value), the date and time after the change, and the change After the operator name. When the editing of the parameters is completed, the operator operates the return key 54 (see FIG. 4) (step S11: YES). In response to this, the computer 3 causes the unit selection screen 60 (see FIG. 5) to be displayed on the display 33 (step S12).

In this way, the changed parameter is a temporary setting parameter. Although it is not used in the production process, it is used in the operation test of the substrate processing apparatus 1, that is, in the test operation mode for testing the operation of the substrate processing apparatus 1. use.

When confirming the parameter change history, the operator operates the change history display key 72 (see FIG. 5) (step S13). In response to this, the computer 3 displays the parameter change history screen 40 (see FIG. 6) on the display 33 (step S14). The computer 3 reads out the temporary change history data HT from the memory unit 34 (step S15), and creates a list of the changed parameters and displays it on the list display unit 37 (step S16). The computer 3 further judges whether the temporary change history data HT is empty, that is, whether there is a difference between the values of the production parameter group D1 and the temporary parameter group DT (step S17). When the computer 3 has at least one parameter with a different value, that is, when the history data HT is not empty temporarily (step S17: Yes), the status display area 43 is displayed with a second color (for example, red), and the display is In the change history recording mode, it is displayed that there are parameters that have been temporarily changed (step S18). On the other hand, when the temporary change history data HT is empty and the production parameter group D1 matches the temporary parameter group DT (step S17: No), the computer 3 displays the status display area 43 with the first color (for example, yellow). And the display is in the change history recording mode, and it is displayed that there is no parameter that has been temporarily changed (step S19).

In this way, the operator can confirm the previous value and the changed value (updated value) on the parameter change history screen 40 for all parameters after the value has been changed after operating the change history record start key 41.

Furthermore, when the selection state is changed between the previous value and the updated value in each parameter on the parameter change history screen 40 (step S20: Yes), the computer 3 will have the value of the selected state (the previous value or (Change value) is written as a matching parameter value of the temporary parameter group DT (step S21). Thereby, the parameters applicable in the test operation mode can be set to any of the previous value and the updated value. Furthermore, the computer 3 changes the temporary change history data HT in accordance with the change of the selected state (step S22).

The parameter values are values that should be applied only during the test operation, and values that should be applied not only during the test operation but also during the production of the product. For example, parameters such as the processing time and flow rate of the processing liquid, the number of rotations of the spin chuck, and the rotation time are related to the processing content, so in many cases, different values are set during the test and during the production. Such parameters are temporarily changed during the test operation for maintenance of the substrate processing apparatus 1 and the like, and it is necessary to return to the previous values beforehand after the test operation is completed. On the other hand, the parameters related to the operation of the transfer robot that transfers substrates may be appropriately set to common values during test operation and production. Such parameters are changed during the test operation. As long as it is confirmed that the value is appropriate, the changed value should be registered as a value that should be applied to the production of the product.

Then, the operator selects any one of the previous value and the updated value for all the parameters in which the change history has been recorded on the parameter change history screen 40, and confirms whether the selection state is appropriate. After this confirmation, the operator operates the individual determination key 460 or the batch determination key 461, and determines the parameters individually or in batches (step S23). In response to this determination operation, the computer 3 writes the value (previous value or changed value) of the selected state of each parameter as the value of the parameter corresponding to the production parameter group D1 into the memory section 34 (step S24). The computer 3 is configured to delete the parameter that has been determined from the list display unit 47 or a display state that indicates the determined state (step S25. An example of a history display erasing means). The display state indicating the determined state may be, for example, display of a row of parameters matched with gray masking. In addition, the computer 3 generates the change history information and writes the change history information in the memory unit 34, more specifically, the parameter management database DB (step S26). The change history information includes the previous and changed values of the parameters after the change, the date and time after the change (date and time after the confirmation operation), and the name of the operator after the change. The change history information may be generated based on the temporary change history data HT.

When the determination operation is performed on all the parameters already displayed on the list display section 47 (step S27: YES), the computer 3 changes the status display area 43 to the first color (for example, yellow) (step S28). Thereby, it can be displayed that the parameter is temporarily changed in the change history recording mode. In this state, the operation of changing the history recording end key 42 is permitted (step S29). After that, when the operator operates the change history recording end key 42 (step S30), the computer 3 cancels the change history recording mode and changes the color of the status display area 43 to a third color (for example, white) (step S31). Thereby, it can be displayed that it is not in the change history recording mode.

Although the edited parameter value will not be reflected to the production parameter group D1 as long as the confirmation operation is not performed, the value of the parameter matching the temporary parameter group DT will become the value of the selection state (previous value or changed value). Therefore, a test operation using the parameter value of the selected state can be performed.

The computer 3 can operate the change history record end key 42 when a determination operation is performed on the values of all the parameters that have been displayed on the list display section 47 of the parameter change history screen 40. In other words, the change history record end key 42 is controlled in an inoperable state until the operation of determining all parameters after the value has been changed is started after the record of the change history is started. When the change history recording end key 42 has been operated with the undefined parameters remaining, the computer 3 may also output an alarm display to the display 33 to call attention.

The computer 3 may prohibit the operation of the substrate processing apparatus 1 in the production mode for producing products until the change history record end key 42 is operated and the change history record mode is exited. For example, when a plurality of parameters are temporarily changed for the maintenance of the substrate processing apparatus 1, the operator may operate the previous value batch selection key 451 on the parameter change history screen 40 and then operate the batch determination key 461. As a result, all the parameters that have been temporarily changed in thickness can be returned to the previous values in batches. With this, it is possible to avoid the return of the parameters that have been temporarily forgotten. Then, by prohibiting the production mode operation in a state where the history of change prohibition is not over, the processing conditions for test operation can be avoided and applied to the substrate for the product. Thereby, improper processing of the substrate for the product can be avoided, and thus the substrate can be avoided from being wasted.

As described above, in this embodiment, the parameter change history screen 40 which is a single screen displays the change history of a plurality of parameters. The operator can choose whether to reflect the change for each parameter of the plurality of parameters that have been displayed on the one screen, and determine the selected value (the value before the change or the value after the change). The determined value is reflected in the production parameter group D1 and registered in the parameter management database DB. Therefore, the operator can select and determine the parameters that should reflect the change on a screen according to the situation. Thereby, an applicable / inapplicable interface that can easily perform parameter value changes depending on the situation can be prepared in the substrate processing apparatus 1.

In addition, since the previous value individual selection key 45P and the changed value individual selection key 45N provided on the operation parameter change history screen 40 can individually select a changed value or a previous value for each parameter, it is possible to individually select each parameter. Applicability / Not Applicability of Designation Changes.

In addition, since the previous value batch selection key 451 provided on the operation parameter change history screen 40 can be used to select the previous value for all parameter batches. This makes it easy to select the previous value. For example, in the case where the previous value is selected for a plurality of parameters, as long as the previous value is selected in a batch, and the changed value is individually selected for several parameters as required, the applicable value can be quickly selected for each parameter.

In addition, the change value batch selection key 452 provided on the operation parameter change history screen 40 allows selection of change values for all parameter batches. This makes it easy to select a value. For example, in the case where a change value is selected for a plurality of parameters, as long as the change value is selected in a batch and the previous value is individually selected for several parameters as required, the applicable value can be quickly selected for each parameter.

In this embodiment, the parameter change history that has been displayed on the parameter change history screen 40 can be sorted by the date and time (time information), unit name (resource identification information), and parameter name (parameter identification information). . Thereby, even when the number of displayed parameters is large, the change history information of the target parameter can be quickly found.

In the present embodiment, the parameter change history screen 40 is provided with a comment input field 66 (annotation display area), and the operator can input a comment associated with the change history information. For example, the operator may record arbitrary information such as the intention of the change and the result after the change as a comment when the parameter has been changed. This annotation constitutes a part of the change history data in the form of annotation data. When a comment has been input, when the parameter change history screen 40 is displayed, the operator's comment is displayed in addition to the change history information on this screen. With this, the operator can use the annotation as a reference when judging whether the change should be reflected later, so that the appropriate value (previous value or changed value) of each parameter can be quickly selected.

Moreover, in the present embodiment, when an operation for determining the value of a parameter is performed on the parameter change history screen 40, the display of the change history information of the parameter can be erased. Therefore, since the operator can easily grasp the undetermined change history information, the parameters can be selected and determined quickly.

Moreover, in this embodiment, by operating the change history record start key 41, a change history record mode for recording a change history (temporary change history) of a parameter whose value has been temporarily changed can be started. Then, by operating the change history recording end key 42, the change history recording mode can be ended. The change history recorded in the change history recording mode is displayed on the parameter change history screen 40 as a single screen. Therefore, when it is desired to return the value of the temporarily set parameter to the original value, as long as the pattern change history screen 40 is turned on, the change history information about the plurality of parameters after the change can be displayed on one screen. Then, as long as the values before the change are selected and determined for all the parameters, the values of all parameters can be returned to the previous values. Of course, you can also select and determine the changed value for some parameters.

For example, when the substrate processing apparatus 1 is installed in a factory and its operation is started, or a maintenance operation after the operation is started, the operator may temporarily set conditions different from those used in the production process. conditions of.

In this case, the recommended operation sequence can be determined, for example, as follows. The operator operates the change history record start key 41 to start changing the history record mode. After that, change the value of the parameter as needed. The operator can perform the test operation of the substrate processing apparatus 1 using the temporary parameter group DT including the parameter after the value has been changed. At the end of the operation, the operator opens the parameter change history screen 40 and performs a determination operation on all the parameters that have been temporarily changed. After that, the operator operates the change history recording end key 42 to end the change history recording mode.

It is particularly good to determine the work order by performing the change of the history recording mode at the beginning of the operation and ending the change of the history recording mode at the end of the operation. In this embodiment, as long as the confirmation operation is not performed for all the parameters that have been temporarily changed, the change history recording mode cannot be ended. Thus, it is possible to avoid completing the operation in a state where there are undefined parameters. Thereby, the operation which can avoid returning the temporarily set parameter to the original value is omitted.

In this embodiment, the status display of the change history recording mode and the status display of whether any one of the parameters has been changed can be expressed by the colored display of the status display area 43. With this, the operator can clearly change the status of the history recording mode and parameters. In addition, since the status display area 43 is arranged on the parameter change history screen 40, the operator can easily grasp the setting status of the parameters and the recording status of the change history.

The operator can clearly consciously start the operation by operating the change history record start key 41, and use the mode display and status display shown in the status display area 43 to clearly recognize that the operation is changing the history record by operation The end key 42 is used to clearly consciously end the operation. Thereby, it becomes easy to perform the operation sequence, and operation omission can be suppressed or prevented.

Next, a second embodiment of the present invention will be described.

In the second embodiment, the parameter change history screen 40 (see FIG. 6) is not provided with a change history record start key 41 and a change history record end key 42. On the other hand, each time the parameter value is changed on the parameter editing screen 50 and the save key 53 is operated, the computer 3 creates and writes the change history information to the memory section 34, and more specifically, to the parameter management database. DB. The change history information includes information about the previous and changed values of the changed parameter, the operator after the change, and the date and time of the change. In this embodiment, the computer 3 does not distinguish the parameter values into temporary setting values and setting values for production steps. Therefore, when the parameter value is changed on the parameter editing screen 50 (refer to FIG. 4) and the save key 53 is operated, the computer 3 stores the changed parameter value as the value of the parameter corresponding to the production parameter group D1 in记忆 部 34。 The memory section 34. The device parameter data including the changed production parameter group D1 is written in the parameter management database DB.

8A and 8B are flowcharts for explaining the operation of the operator related to the change of the parameters and the processing of the computer. The operator performs an operation to switch the display on the display 33 to the parameter change history screen (step S41). In response to this, the computer 3 (more specifically, the CPU 31. The same applies hereinafter) displays the parameter change history screen (see FIG. 6) on the display 33 (step S42). In this parameter change history screen, the operator designates a change history search condition, such as a change history search period (step S43), and instructs the search of the change history by operating the input device 32 (step S44). That is, in this case, the input device 32 is an example of a search condition input means. When the search of the change history is instructed in this way, the computer 3 searches the parameter history data H of the parameter management database DB, extracts the parameter change history (step S45), and displays the change history on the parameter change history screen (step S46). . More specifically, the parameter change history during the change history search period can be extracted and displayed. For example, the latest value (current value) and the previous setting value (previous value) of the parameter that has been changed during the change history search period may be displayed. For parameters that have been changed more than twice during the change history search period, for example, two or more previous values may be displayed in accordance with the changed time series.

The subsequent operations by the operator and the computer are similar to those in FIG. 7B. When specifically described with reference to FIG. 8B, the value of each parameter (previous value or latest value) can be changed on the parameter change history screen (step S50: Yes) to temporarily change the value of the parameter. A temporary parameter group DT including the values of the parameters that have been temporarily changed as described above can be generated and stored in the memory unit 34 (step S51). Further, a temporary change history data HT indicating the change can be formed (step S52). The temporary parameter group DT system can be used for test operation in the same manner as in the first embodiment. When the value of the parameter has been temporarily changed, the computer 3 switches the display state of the state display area 43 and displays that the parameter has been temporarily changed (step S53). For example, the status display area 43 (see FIG. 6) may be displayed by temporarily changing the display color (for example, red) with a parameter.

The operator can reflect the value of the selected state to the production parameter group D1 by the operation parameter determination operation unit 46 (step S54: YES) (step S55). The computer 3 is set to delete the determined parameters from the list display unit 47 (see FIG. 6) or to display the determined parameters (step S56). A display state indicating a certain state, for example, a gray line may be displayed to mask the matching parameters. In addition, the computer 3 generates parameter history data H indicating the content of parameter changes, and adds the parameter history data H to the parameter management database DB (step S57). When the determination operation is performed on all the parameters that have been temporarily changed (step S58: YES), the computer 3 sets the display state of the status display area 43 (see FIG. 6) to the normal display state (step S59). For example, the status display area 43 may be displayed in a normal display color (for example, white).

In this way, according to this embodiment, each time the parameter group is updated, the change history information is stored in the parameter management database DB. When displaying the parameter change history information, the operator specifies the change history search conditions and retrieves the change history information. Thereby, the change history information that matches the change history search conditions can be extracted from the parameter history data H of the parameter management database DB and displayed on the parameter change history screen 40. In this parameter change history screen 40, the operator can select past setting values for all or a part of the parameters as needed.

Although two embodiments of the present invention have been described, the present invention can be implemented in other forms as exemplarily listed below.

1. In the aforementioned embodiment, although the computer 3 embedded in the substrate processing apparatus 1 has a function as a parameter management device, the parameter management device may be configured by a computer different from the embedded computer 3 as described above. Such a parameter management apparatus may be connected to the substrate processing apparatus 1 when necessary. The parameter management device may be constituted by a computer connected to the substrate processing device 1 via a network.

2. In the parameter change history screen 40 (refer to FIG. 6), when the parameter determination operation unit 46 is operated and a parameter value change is determined, an authentication dialog (for example, a pop-up display) is displayed. . The authentication dialog may also have a signature field and an approval key. The signature field is used to sign the signature of the approver who is used to recognize the determination of the parameter value change. The approval key becomes active after the signature. Then, it is possible to allow the parameter value to be changed by accepting that the key is operated.

3. It is also possible to output an alarm when the change history recording start key 41 is operated to start changing the history recording mode, or when the value of a parameter is changed later. The alarm may be displayed by, for example, an alarm indicator displayed on the screen of the display 33. Then, the alarm can be eliminated by changing the end of the history recording mode. Thereby, since the operator can be prompted to end the change of the history recording mode, it can be avoided that the change of the history recording mode is maintained after a necessary operation.

4. When an alarm occurs when the substrate processing is executed, the computer 3 stores the history data of the alarm in the memory unit 34. In this case, the computer 3 preferably assigns an alarm and a parameter change history (preferably a person related to the alarm) to the associated relationship immediately before the alarm. This makes it easy to investigate the correlation between alarms and parameter value changes. The computer 3 may also use the alarm occurrence as a trigger, and display the previous parameter change history on the display 33.

5. In the case where the result (quality) of the substrate processing is monitored and the evaluation data is generated, the computer 3 may also give a related relationship to the evaluation data with the previous parameter change history. With this, as long as there is a change in the substrate processing result, it is possible to easily investigate the correlation with the change in the parameter value. The computer 3 may also use the generation of the evaluation data as a trigger, and display the previous parameter change history on the display 33.

6. In the second embodiment described above, although the search period can be specified to retrieve the parameter change history, it is also possible to retrieve the change history associated with a specific alarm or the change history associated with a specific unit. The search conditions are not limited to these, and other search conditions may be further specified to search the parameter change history.

7. In the parameter change history screen 40, not only the parameters whose values before and after the change are not the same, but also parameters whose values have been changed can be recorded. As a result, even if the values before and after the change are equal, the change history can still be changed The information is displayed on the list display section 47.

This application corresponds to Japanese Patent Application No. 2017-015922 filed at the Japan Patent Office on January 31, 2017, and the entire disclosure of this application is incorporated herein by reference.

Although the embodiments of the present invention have been described in detail, these are only specific examples used for understanding the technical content of the present invention, and the present invention should not be construed as being limited to these specific examples. The scope of the present invention is only Limited by the scope of the attached patent application.

Claims (18)

    A parameter management device manages a parameter group including a plurality of parameters as a basis for control in an industrial device, and includes: a registration means for registering the foregoing parameter group; and a parameter editing means for changing the value of the foregoing parameter ; Change history memory means for memorizing the change history information of the aforementioned parameters; acquisition means for obtaining the change history information of the aforementioned parameters already memorized in the aforementioned change history storage means; display means for displaying the information obtained by the aforementioned acquisition means The change history information of the plurality of parameters obtained above; the selection input means is selected by the operator for each parameter selection of the parameter of the change history information displayed by the foregoing display means to reflect the change; determine the input means , Which are operated by the operator to determine the value selected by the operator through the selection input means; and update the registration means to register the parameter group containing the value determined by the determination input means to the foregoing Login means.         The parameter management device according to claim 1, wherein the display means displays the change history information of the plurality of parameters obtained by the acquisition means on one screen; the selection input means is operated by an operator For each parameter of the parameter of the change history information displayed by the display means, it is selected whether to reflect the change in the previous screen.         The parameter management device according to claim 1, wherein the aforementioned selection input means includes an individual selection means, and the individual selection means is for the operator to select for each parameter: the latest value entered last and the value registered in the aforementioned registration means Any of the registered values of the value is used.         The parameter management device according to claim 1, wherein the selection input means includes a latest value batch selection means, and the latest value batch selection means is for the operator to display all the parameters of the change history by the foregoing display means. The batch is used to select the latest value entered last.         The parameter management device according to claim 1, wherein the selection input means includes a batch of registered values, and the batch of selected values is for the operator to display the change history by the display means. All parameter batch selection is used as the existing registered value of the value registered in the aforementioned registration means.         The parameter management device described in claim 1, wherein the change history information includes parameter identification information of a parameter whose value has been changed, and the parameter management device further includes a retrieval means which uses the foregoing parameter identification information to sort Or extract the change history information displayed by the aforementioned display means.         The parameter management device described in claim 1, wherein the change history information includes resource identification information for identifying the resource of the industrial device involved in the parameter whose value has been changed, and the parameter management device further includes a retrieval means. The retrieval means uses the aforementioned resource identification information to sort or extract the change history information displayed by the aforementioned display means.         The parameter management device according to claim 1, wherein the change history information includes time information indicating a time after the value of each parameter has been changed, and the parameter management device further includes a retrieval means that uses the foregoing Time information to sort or extract the change history information displayed by the aforementioned display means.         The parameter management device as described in claim 1, further including: an annotation input means for an operator to input annotations associated with the change history information provision; and an annotation memory means to memorize the data generated by the aforementioned annotation input means. Entered annotations; the aforementioned display means displays the aforementioned annotations in the annotation display area.         The parameter management device described in claim 1, further includes: a history display erasing means, which is erased when the value of the parameter determined by the determination operation of the aforementioned determination input means is registered in the aforementioned registration means. Display of change history information of this parameter.         The parameter management device described in claim 1, further including: a change history record start instruction means, which is operated by an operator in order to start a change history record mode for recording parameter change history; and a change history write The means is to write the change history information of the parameters in the change history storage means in the change history recording mode.         The parameter management device as described in claim 11, further including: a mode indicator for displaying whether it is in the aforementioned change history recording mode.         The parameter management device as described in claim 11, further including: a status indicator, in the aforementioned change history recording mode, different change history information of any parameter is not stored in the first state of the aforementioned change history storage means And change history information of any of the parameters has been stored in the second state of the aforementioned change history memory means.         The parameter management device described in claim 11, further including: a status indicator, which is displayed in a first color when the change history of any parameter in the foregoing change history recording mode is not stored in the foregoing change history storage means, The change history of any one of the parameters in the change history record mode is displayed in the second color when the change history is stored in the change history storage means, and is displayed in the third color when the change history is not in the history record mode.         The parameter management device according to claim 13, wherein the status indicator is arranged on a screen that displays the change history information of the parameter by the display means.         The parameter management device according to claim 11, further comprising: a mode end prohibiting means, which prohibits the end of the foregoing change of the history recording mode when the value of at least one parameter is not determined.         The parameter management device described in claim 1, further includes: a change history writing means, which records the change history information of the parameter when the updated parameter group is registered to the registration means by the update registration means. Written in the change history memory means; and a search condition input means for receiving input of change history search conditions by an operator; the change history acquisition means is obtained from the change history storage means and used in the search condition Change history information matching the change history search conditions entered by the input means.         A computer-readable recording medium is a computer in which a step group is recorded in order to operate a computer including an input device, a display device, and a memory device as the parameter management device described in any one of claims 1 to 17. Programs to control the input device, the display device, and the memory device.