TW201838003A - Separation device and separation method to increase the degree of freedom in selecting the shape of the interval maintaining member and prevent lacking versatility - Google Patents

Abstract

To provide a separation device and a separation method, which can increase the degree of freedom in selecting the shape of the interval maintaining member and prevent lacking versatility. The separating device includes plural holding means (20), a separating means (30), and a maintaining member mounting means (50). The plural holding means (20) hold the end portions of the adhesive sheet (AS) adhered to plural adhered bodies (CP) on one surface (AS1). The separating means (30) relatively moves the holding means (20) holding the end portions of the adhesive sheet (AS), so as to expand the mutual interval of the adhered bodies (CP). The maintaining member mounting means (50) mounts the interval maintaining member (DM) on the adhesive sheet (AS), the interval maintaining member (DM) maintains the mutual interval of the adhered bodies (CP) expanded by the separating means (30). The maintaining member mounting means (50) mounts the interval maintaining member (DM) to the other side (AS2) of the adhesive sheet (AS).

Description

Separation device and method

The invention relates to a separation device and a separation method.

Conventionally, it is known to increase the space | interval of a band expansion device (separation device) of the several adherend adhered to an adhesive sheet (for example, refer patent document 1). [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2008-140874

[Problems to be solved by the invention]

However, in the conventional separation device as described in Patent Document 1, the frame (attachment) is attached (mounted) on the surface (one side) of the wafer (subject) on the adhesive tape (adhesive sheet) ( Interval maintaining structure), the interval maintaining structure needs to have a ring-shaped structure for avoiding the inner diameter (through-hole) of the adherend, so it is not suitable for the versatility of the separation device. .

An object of the present invention is to provide a separation device and a separation method, which can increase the freedom of selection of the shape of the interval maintaining structure and prevent the lack of versatility. [Technical means to solve the problem]

The present invention adopts a configuration described in a claim. [Compared with the efficacy of the prior art]

According to the present invention, the gap maintaining member is installed on the other side of the adhesive sheet to which the adhered body is attached. Therefore, it is not necessary to use a ring-shaped member having a through hole as the gap maintaining member. Avoiding the person to be adhered can increase the freedom of selection of the shape of the interval maintaining structure and prevent lack of versatility. In addition, when the cutting means is provided, when the adherends which are spaced apart from each other on the adhesive sheet are transported to another process, the end portion of the adhesive sheet can be prevented from becoming an obstacle to transport. Furthermore, in the case of the interval maintaining structure, when a laminate of at least two layers of the base material and the holding adhesive layer is used, the freedom of selection of the interval maintaining structure can be further increased, which can effectively prevent the lack of versatility. In addition, when the maintenance member mounting means is provided with the lamination means, it is not necessary to prepare in advance a gap maintaining member between the laminated base material and the holding adhesive layer. In addition, in the case of the gap maintaining member, when another bonding sheet is used, the gap maintaining member can be simply mounted on the bonding sheet.

Hereinafter, embodiments of the present invention will be described based on the drawings. In the present embodiment, the X-axis, Y-axis, and Z-axis are orthogonal to each other. The X-axis and Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. In addition, in the present embodiment, the case when viewed from the direction of the arrow BD parallel to the Y axis is used as a reference, and when the direction is described without referring to the drawing as a reference, "up" is the direction of the Z axis arrow , "Down" is the reverse direction, "left" is the direction of the arrow on the X axis, "right" is the direction of the arrow, "front" is the direction of the arrow on the Y axis, and "rear" is the direction of the reverse.

The separation device 10 of the present invention includes a plurality of holding means 20, a separation means 30, a detection means 40, a maintenance member installation means 50, and a cutting means 60. The plurality of holding means 20 are attached on one side of AS1 with a plurality of quilts. The separating means 30 moves the holding means 20 holding the end of the next piece AS relative to the end of the sticking piece AS of the implant CP, and increases the mutual distance between the subject CP and the detecting means 40. Various sensors such as cameras, projectors, optical sensors, acoustic sensors, etc. that can detect the distance between the CPs, the collective shape of the entire CP, etc. Alternatively, the maintenance member installation means 50 is to install the interval maintenance member DM which can maintain the mutual distance of the adhered CP increased by the separation means 30 to the bonding sheet AS, and the cutting means 60 is to continue Slice AS Cutters. In addition, the adhesive sheet AS is formed by laminating an adhesive layer on one surface of the base material sheet, and has the property that when the tension is applied and the tension is released, the adhesive sheet tends to approach a state before deformation.

The holding means 20 includes a rotation motor 21 as a driving device supported by the separating means 30 and an upper holding member 22 supported by its output shaft 21A.

The separating means 30 includes a linear motor 31 as a driving device, and a lower holding member 32 supported by the slider 31A and supporting the rotation motor 21 on the upper surface side.

The maintenance structure installation means 50 is a device for installing a space maintenance structure DM composed of a two-layer laminate on the other side AS2 of the adhesive sheet AS. The two-layer laminate includes a glass plate GP as a base material and a glass plate GP as a base material. The double-sided adhesive sheet BA of the holding adhesive layer has a rigidity that can surpass the force of the adhesive sheet AS tending to approach the state before deformation. The double-sided adhesive sheet BA is attached to the glass sheet GP. By. That is, the maintenance member mounting means 50 includes a linear motor 51 as a driving device, a linear motor 52 as a driving device, a linear motor 53 as a driving device, a support table 54, and a laminating means 55. In the case of a slider 51A in the Y axis direction, the linear motor 52 is supported by the slider 51A, and in the case of a slider 52A moving in the X axis direction, the linear motor 53 is supported by the slider 52A, and the support table 54 is Supported by its output shaft 53A and having a support surface 54A capable of supporting the interval maintaining member DM through a pressure reducing means (not shown) such as a pressure reducing pump, a vacuum ejector, etc. This lamination means 55 is attached to a glass plate GP The double-sided adhesive sheet BA is laminated to form a spacer DM. The laminating means 55 includes a support roller 55A, a guide roller 55B, a peeling plate 55C, a pressing roller 55D, a first recovery roller 55F, a driving roller 55H, and a second recovery roller 55K. The support roller 55A is a double-sided adhesive sheet BA. One side temporarily rests on the strip-shaped release sheet RL, and the other side temporarily supports the original material RS of the cover sheet CS. The guide roller 55B guides the original material RS, and the release plate 55C folds the release sheet RL. As the peeling means for peeling the double-sided adhesive sheet BA from the release sheet RL, the pressing roller 55D presses and adheres the double-sided adhesive sheet BA to the glass plate GP via the cover sheet CS, and adheres the sheet from the double-sided adhesive sheet. The first peeling roller 55F is driven by a rotating motor 55E as a driving device for the peeling of the cover sheet CS as a pressing means, and the driving roller 55H is transmitted as a driving device when the cover CS is recovered. The motor 55G is driven to sandwich the release sheet RL between the pressure rollers 55J. The second recovery roller 55K is driven by a drive device (not shown) to recover the release sheet RL.

The cutting means 60 includes a articulated robot 61 as a driving device constituted by a plurality of arm members, and a articulated member 61A supported by a front end arm 61A of a work section belonging to the articulated robot 61 via a bracket 62. Blade 63. The articulated robot 61 can be a so-called 6-axis robot that can move the supporter of the front end arm 61A to any position and any angle within its working range. An exemplified example is the articulated robot illustrated in Japanese Patent Application Laid-Open No. 2016-81974 111 etc.

The operation of the separation device 10 described above will be described. First of all, the separation device 10 of each component standby at the initial position indicated by the solid line in FIGS. 1 (A) and (B), and the user of the separation device 10 (hereinafter referred to as "user") treats the original material RS as After the drawing is set, a signal for starting automatic operation is input via an operation means (not shown) such as an operation panel or a personal computer. After that, when a glass plate GP is placed on the supporting surface 54A by an unillustrated conveyance means such as an operator, a driving device, or a conveyer, the structural member mounting means 50 drives the pressure reducing means (not shown) to start the glass plate. Adsorption of GP is maintained. In addition, the glass plate GP and the double-sided adhesive sheet BA according to this embodiment are formed of a rectangular structure in plan view without a through hole for avoiding the object CP.

In addition, when an operator or a conveyance means (not shown) attaches the plurality of adhesive sheets AS under the object CP to the lower holding member 32, the holding means 20 drives the rotation motor 21, as shown in FIG. 1 (B ) Is indicated by a two-dot chain line. The upper holding member 22 and the lower holding member 32 hold the ends of the sheet AS. Next, the separating means 30 drives the linear motors 31 to separate the holding means 20 from each other, thereby increasing the distance between the objects CP. At this time, as shown in FIG. 2 (A), each subject CP system may not be able to increase the mutual distance to a predetermined interval due to the strain of the bonding sheet AS or the like. Therefore, the detection means 40 drives a camera or the like to detect the distance between the subject CPs, the collective shape of the entire subject CPs, and the like. Next, based on the detection result of the detection means 40, the separation means 30 drives the linear motors 31, as shown in FIG. 2 (B), so that the interval between the respective objects CP becomes a predetermined interval, or each of the objects CP The overall collective shape of the volume CP is similar to the basic collective shape, and each holding means 20 is moved individually.

When the interval between the objects CP increases to a predetermined interval or when the detection means 40 detects that the entire collective shape of each object CP becomes a predetermined shape, the structural member mounting means 50 drives the linear motor 52 to support the glass plate GP. The support base 54 moves to the left. Next, when the glass plate GP reaches the predetermined position, the maintaining material installation means 50 drives the rotation motors 55E and 55G, and feeds the original material RS, as shown by a two-dot chain line in FIG. 1 (B), and is attached to the glass plate GP. The sheet BA was adhered on both sides to form the gap maintaining member DM. Next, the maintaining member mounting means 50 drives the linear motors 51 and 52. As shown in FIG. 3 (A), the interval maintaining member DM is disposed below the adhered body CP having increased intervals, and then the linear motor 53 is driven. As shown in FIG. 3 (B), the space maintaining member DM is installed on the other side AS2 side of the adhesive sheet AS.

After that, the cutting means 60 drives the articulated robot 61. As shown in FIG. 3 (C), the blade 63 is stabbed to the subsequent piece AS, and then the blade 63 is wound around the entire periphery of the subject CP to make one revolution. Subsequently, the sheet AS is cut to form an integrated body WK in which the interval maintaining member DM is mounted, and the adherend CP is spaced apart from each other. Next, when the cutting means 60 drives the articulated robot 61 to return the blade 63 to the initial position, the maintaining structural material mounting means 50 stops driving of a pressure reducing means (not shown), and releases the interval maintaining structural material DM. Then, when the operator or a transporting means (not shown) transports the integrated body WK to another process, the holding means 20 drives the rotation motor 21 to release the holding of the adhesive sheet AS by the upper holding member 22 and the lower holding member 32. . After that, when the operator or a conveying means (not shown) removes the AS portion of the bonding sheet remaining on the lower holding member 32, each means drives an individual driving machine to return each member to the initial position, and then repeats the same operation described above. .

In the separation device 10 according to the above, the interval maintaining member DM is mounted on the other side AS2 of the adhesive sheet AS on which one side AS1 is attached to the adherent CP. Therefore, it is not necessary to use a ring-shaped member having a through hole as the The space maintaining member DM, the through-hole system is used to avoid the person to be adhered CP, and the freedom of selecting the shape of the space maintaining member DM can be increased to prevent lack of versatility.

The means and programs in the present invention are not limited as long as the operations, functions, or programs that describe the means and programs can be exerted, and they are not limited to the configuration of only one embodiment described in the foregoing embodiments. Things, procedures. For example, as long as the holding means can hold the ends of the plurality of adhered adhesive sheets on one side, according to the technical common sense at the time of application, there is no limitation as long as it is within the technical scope (other means And procedures are the same).

As shown in FIG. 4 (A), the separation device of the present invention may be a separation device 10A. The separation device 10A includes a holding device 20, an abutment device 70, a separation device 30A, a detection device 40, and a maintenance member installation device. 50A, cutting means 60, and the abutment means 70 is connected to the outer side of the adherence region CE of the plurality of adherends CP of the adhesive sheet AS, and is connected to the inner side of the retaining region HE held by the retaining means 20. In the case of the bonding sheet AS, the separation means 30A moves the holding means 20 and the abutment means 70 under the end of the holding sheet AS relatively, and increases the distance between the CPs of the object, and the maintenance member mounting means 50A An interval maintaining member DM capable of maintaining the mutual interval of the adherend CP increased by the separation means 30A is attached to the adhesive sheet AS. In addition, in the separation device 10A, those having the same configuration and functions as those of the separation device 10 are denoted by the same reference numerals as those of the separation device 10, and the description of the structure is omitted, and the description of operations is simplified.

The separating means 30A includes a linear motor 33 as a driving device supported on the bottom plate BP, a lower holding member 34 supported by its output shaft 33A, and supporting the rotation motor 21 on the upper surface side. The maintenance member mounting means 50A is provided on the slider 56A which is a linear motor 56 as a driving device and includes a slider 56A that moves in the Y-axis direction, and supports the support table 54 via a linear motor 53. The abutment means 70 includes a cylindrical abutment member 71 that is supported on the bottom plate BP and has a cutout 71A that allows entry and exit of the member attachment means 50A to be formed on the front side of the eye.

Such a separating device 10A is configured by stacking the double-sided adhesive sheet BA on the glass plate GP in advance to maintain the space between the structural members DM, and placing the double-sided adhesive sheet BA on the outer side of the abutting member 71 (in front of the eye). Side). After that, it is made like the separating device 10, and when a plurality of adherent sheets AS to which the object CP is attached are placed on the lower holding member 34, the holding means 20 drives the rotation motor 21, as shown in FIG. 4 (B). The two-dot chain line indicates that the upper holding member 22 and the lower holding member 34 hold the ends of the sheet AS. In addition, as shown in FIG. 4, the end of the adhesive sheet AS is attached with a ring-shaped frame RF, but the frame RF may not be provided. Next, the separating means 30A drives the linear motor 33 to lower the holding means 20 and relatively move the holding means 20 and the abutment means 70. As shown in FIG. 4 (B), the distance between the objects CP is increased, and the structure is maintained. The mounting means 50A drives the linear motor 56 and arranges the interval maintaining member DM below the adhered body CP which has been increased in space from each other. Then, as shown in FIG. 4 (B), the separation device 10 is manufactured to maintain the structural material mounting means 50A on the other side AS2 of the bonding sheet AS, and the maintenance member DM is installed to cut off the bonding sheet AS by the cutting means 60. After that, the integrated WK is transferred to another procedure.

According to such a separation device 10A, the same effect as that of the separation device 10 can also be obtained.

The holding means 20 may be configured to hold the end of the bonding sheet AS in a state shown in FIGS. 1 and 4 in a state where the bonding sheet AS is turned upside down (the state of the subject CP is positioned below). In this case, The maintenance member mounting means 50 and 50A have a configuration in which the gap maintenance member DM is mounted on the upper surface side of the bonding sheet AS. The holding means 20 may be configured to hold the end of the sheet AS by a holding means such as a mechanical clamp, a chuck cylinder, a Coulomb force, an adhesive, an adhesive, a magnetic force, a white force adsorption, a driving machine, and the like. In the case of the separation device 10, the holding means 20 may be constituted by, for example, two bodies. The holding means 20 that has been conventionally moved to the right in the two systems is integrated, and the holding means 20 that has been conventionally moved to the left is integrated. For example, it can be comprised of three or more bodies capable of moving conventionally in the right, left, and other directions. In the case of the separation device 10A, the holding means 20 may be integrated or may be two or more.

The separation means 30 and 30A may be singular rather than plural. In this case, for example, the separation device 10 may be configured as two sliders with an integrated linear motor, and the holding means 20 are supported by each body separately to increase the number of the CP of the subject. Those who are spaced apart from each other may be configured to increase the space between the objects CP only in one axial direction (for example, the X-axis direction or the Y-axis direction). The separation means 30 may be configured to increase the distance between each other in three or more directions (for example, the X-axis direction, the Y-axis direction, and other axial directions). For example, the separation means 30 may be configured to hold a plurality of pieces moving in the X-axis direction. The means 20 are respectively moved in the Y-axis direction (the plurality of holding means 20 are moved in the X-axis direction), and the distance between the objects CP can be increased. The intervals between the body CPs are activated at predetermined intervals, or are configured such that they cannot be operated in such a manner that the entire collective shape of each subject CP has a similar relationship with the basic collective shape. (3) The separation means 30A may also move the contact means 70 while stopping or moving the holding means 20, thereby moving the holding means 20 and the contact means 70 relatively, and increasing the interval between the objects CP. The separation means 30 and 30A can be operated by the operator to operate the linear motor 31 and the linear motor 33 by operating keys, levers, and the like. In this case, for example, the detection results obtained by the detection means 40 can be displayed on a monitor, a detector, or the like. According to the detection result displayed on this display, the distance between the CPs of the subject CP becomes a predetermined interval, or the overall collective shape of each subject CP becomes similar to the basic collective shape. In the method, the operator drives the linear motor 31 and the linear motor 33.

The detection means 40 may be the visual inspection of the operator. For example, the visual inspection may be performed by the operator so that the interval between the CPs of the subject becomes a predetermined interval, or the entire collective shape of each CP is relative to the base. The shape of the overall collection is similar to each other, and the buttons, levers, and the like are operated to drive the linear motor 31 and the linear motor 33, which may not be included in the separation devices 10 and 10A of the present invention.

The structural material installation means 50 and 50A can be configured to maintain the structural material DM by means of holding means such as mechanical fixtures, chuck cylinders, coulomb force, adhesives, adhesives, magnetic forces, white hard adsorption, and driving machinery. In terms of maintaining the structure DM, it is also possible to adopt another unillustrated adhesive sheet having a rigidity that can surpass the force of the adhesive sheet AS tending to be close to the state before deformation, and attach the other unillustrated adhesive sheet to the adhesive sheet. On the other side of the sheet AS, a ring-shaped structure having a through hole for avoiding the object CP can be used for the space-maintaining material DM. A space-maintaining material DM can also be a triangle or a pentagon in plan view. Polygonal, round, oval, and other shapes. For the maintenance structure installation means 50 and the interval maintenance structure DM, those having a pre-installation on the adhesive sheet AS may be used. In this case, there is no lamination method 55. In the structure maintenance installation means 50A, the double-sided adhesive sheet BA is not laminated on the glass plate GP in advance, and the double-sided adhesive sheet 55 may be formed by the same lamination means 55 as the separation device 10. BA is laminated on the glass plate GP.

The cutting means 60 can replace the blade 63 with a laser cutter, ion beam, fire power, heat, water pressure, electric heating wire, gas, liquid, etc. as the cutting structure, or it can be driven by a suitable drive machine. The combiner may move the cutting member and cut it, but may not be provided in the separation devices 10 and 10A of the present invention.

In addition to the abutting means 70, in addition to a rectangular shape, an elliptical tube shape, or the like, other shapes of abutting members 71 such as a column, a corner column, and an ellipse can also be used.

The separating device 10A may be configured such that the maintenance member installation means 50A is disposed inside the abutting member 71, and the maintenance member installation means 50A does not enter and exit the inside of the abutting member 71. In this case, the maintenance member installation is maintained The means 50A may be the wireless motor 56, and the abutting member 71 may have no notch 71A.

The interval maintaining member DM can replace the glass plate GP with members such as metal, resin, wood, and pottery. The outer edge portion can be cup-shaped or pot-shaped with a thickness greater than that of other regions. Any rigid body having a force capable of overcoming a force that tends to approach the state before deformation may be arbitrary, and the shape may be any shape. The adhesive layer for rhenium holding may be a double-sided adhesive sheet having an adhesive layer composed of the same component or different components on both sides of the substrate sheet, and a liquid or gel-like adhesive. The interval maintaining member DM can be installed on the adhesive sheet AS by using wettability, magnetic adhesion, adsorption, white adhesion, etc. without using a holding adhesive layer.

The materials, types, shapes, and the like of the adhesive sheet AS, the double-sided adhesive sheet BA, other adhesive sheets, and the subject CP in the present invention are not particularly limited. Such an adhesive sheet AS, a double-sided adhesive sheet BA, and other adhesive sheets may be a polygon such as a circle, an ellipse, a triangle, a quadrangle, or other shapes, and may be pressure-sensitive adhesive, heat-sensitive adhesive, etc. In the case of the bonding method, in the case of using a thermally sensitive adhesive, the bonding may be performed by an appropriate method such as providing a suitable coil heater for heating it, a heating side such as a heating pipe, and the like. In addition, the adhesive sheet AS and other adhesive sheets may be, for example, a single layer having only an adhesive layer, an intermediate layer between the substrate and the adhesive layer, and a three or more layers including a cover layer on the upper surface of the substrate. Furthermore, it may be a so-called double-sided adhesive sheet that can peel the substrate from the adhesive layer. Such double-sided adhesive sheet, double-sided adhesive sheet BA may be an intermediate layer having a single layer or multiple layers, or It is a single layer or a multi-layer without an intermediate layer. In addition, as for the object CP, it can be, for example, food wafers, resin containers, silicon semiconductor wafers, compound semiconductor wafers, semiconductor wafers, semiconductor wafers, circuit boards, information recording boards such as optical discs, glass plates, steel plates, and ceramics. Monomers such as wood, wood, and resin may also be composites formed of two or more of these, and structures, articles, and the like in any manner may also be targeted. In addition, the adhesive sheet AS is used for functional and usable reading. For example, it can be an information recording label, a decorative label, a protective sheet, a dicing tape, a die attach film DAF, a die bonding tape, and a recording layer forming resin sheet. Any sheet, film, tape, etc. The target CP may have a plurality of pre-existing pieces on the adhesive sheet AS, and may be singulated when the tension is applied to the adhesive sheet AS by the separation means 30, 30A, thereby becoming a plurality of pieces on the adhesive sheet AS. When there is a plurality of adherent CPs at the time when tension is applied to such an adhesive sheet AS, it is, for example, without limitation: a semiconductor wafer is irradiated with laser light, and the semiconductor wafer is formed into a linear or lattice shape. Such weak lines of weakness are singulated at the point when tension is applied to the adhesive sheet AS, and become a plurality of adherents CP; for example, cut into a resin or glass plate with a blade, and form a linear, grid on the resin or glass plate. When the tension is applied to the adhesive sheet AS, the cut-off line, such as a cut line that does not penetrate the front and back, or a perforation, etc., becomes a plurality of objects CP.

As long as the driving machine in the foregoing embodiment can use electric motors such as rotary motors, linear motors, linear motors, single-axis robots, articulated robots, actuators such as cylinders, hydraulic cylinders, rodless cylinders, and rotary cylinders, etc., It is also possible to use a combination of these directly or indirectly.

10, 10A10‧‧‧ separation device

2010‧‧‧ Means of retention

30, 30A10‧‧‧ Separation means

50, 50A10 ‧ ‧ ‧ maintenance of structural installation methods

5510‧‧‧Layering means

6010‧‧‧ Cutting means

7010‧‧‧Abutment means

AS10‧‧‧continued

One side of AS110‧‧‧

AS210‧‧‧ the other side

BA10‧‧‧Double-sided adhesive sheet (adhesive layer for holding)

CE10‧‧‧Body-attached area

CP10‧‧‧ Undercover

HE10‧‧‧ holding area

DM10‧‧‧Interval maintenance structure

GP10‧‧‧Glass Plate (Base Material)

[Fig. 1] (A) is a plan view of a separation device according to an embodiment of the present invention. (B) is a side view of FIG. 1 (A). [FIG. 2] (A) and (B) are operation explanatory diagrams of the separation device according to the embodiment of the present invention. [FIG. 3] (A) to (C) are operation explanatory diagrams of the separation device according to the embodiment of the present invention. [FIG. 4] (A) and (B) are explanatory diagrams of another example of the present invention.

Claims (8)

A separating device is provided with a plurality of holding means, a separating means, and a maintenance member installation means. The plurality of holding means are holders on the ends of a plurality of adhered pieces attached to one side. The separating means is Relatively moving the holding means for holding the end of the adhesive sheet to increase the mutual distance between the adherends, the maintenance structure mounting means will allow the mutual distance between the adherends to be increased through the separating means. Those who maintain the interval-maintaining structural member are mounted on the adhesive sheet, and the maintenance-member attaching means installs the interval-maintaining structural member on the other side of the adhesive sheet. A separating device includes a holding means, an abutting means, a separating means, and a maintaining structure installation means. The holding means is to hold the end of a plurality of adhered adhesive sheets on one side, and the abutting means. The attachment piece is located on the outer side of the adherence area of the plurality of adherends on the outer side of the adhesive sheet, and abuts on the inner side of the retaining area held by the retaining means, and the separation means keeps the aforementioned Then the relative holding means and abutment means at the end of the sheet are moved relatively to increase the distance between the adherends. The maintenance structure installation means will allow the mutual increase of the adherends through the separating means. The interval maintaining member that maintains the interval is installed on the adhesive sheet, and the maintenance member installing means installs the interval maintaining member on the other side of the adhesive sheet. The separation device according to claim 1 or 2, further comprising a cutting means for cutting the aforementioned adhesive sheet. For example, the separation device of claims 1 to 3, wherein: the above-mentioned adhesive film has a property of tending to be close to a state before deformation when an effect caused by the separation means is released; the interval maintaining member is made of a laminate of at least two layers. The laminated system of at least two layers has a rigid base material capable of surpassing the force of the aforementioned adhesive sheet tending to approach a state before deformation, and a holding adhesive layer attached to the base material. The separation device according to claim 4, wherein the maintenance member mounting means includes a lamination means for laminating the holding adhesive layer on the base material. For example, the separation device of claims 1 to 3, wherein: the bonding sheet has a property that tends to be close to the state before deformation when the effect caused by the separating means is released; the gap maintaining material system is made to have the ability to surpass the bonding sheet. The other adhesive sheet having a rigidity that tends to be close to the state before deformation. (1) The aforementioned maintaining member mounting means attaches the other adhesive sheet to the adhesive sheet. A separation method comprising a retaining procedure, a separating procedure, and a maintenance material installation procedure. The retaining procedure is to hold the ends of a plurality of adhered adhesive pieces on one side by a plurality of retaining means. The separation procedure The holding means for holding the end of the bonding sheet is relatively moved to increase the distance between the adherends. The maintenance member installation process can be performed at the mutual distance of the adherends added in the separation procedure. Those who maintain the space-maintaining structural member are installed on the adhesive sheet, and then install the space-maintaining structural member on the other surface of the adhesive sheet in the maintenance-material installing procedure. A separation method comprising a retaining procedure, a separating procedure, and a maintenance material installation procedure. The retaining procedure is to hold the ends of a plurality of adhered adhesive pieces on one side by the retaining means. The separation procedure is to use The contact means and the holding means for holding the ends of the adhesive sheet are moved relative to each other to increase the distance between the adherends. The abutment means is to adhere the adhesive of the plurality of adherends to the adhesive sheet. The body bonding area abuts on the outer side and the inner side of the holding area held by the holding means abuts the bonding piece. The maintenance material installation procedure is to maintain the mutual distance of the adherends increased through the separation procedure. The interval maintaining member is installed on the above-mentioned adhesive sheet, and the interval maintaining member is installed on the other side of the foregoing adhesive sheet in the above-mentioned maintenance member installation procedure.