TW201837528A - Imaging method for low contrast features - Google Patents
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- 238000003384 imaging method Methods 0.000 title claims abstract description 11
- 238000005286 illumination Methods 0.000 claims abstract description 8
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- 239000011521 glass Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000003550 marker Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000003973 paint Substances 0.000 description 3
- 229920000515 polycarbonate Polymers 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
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- 210000001747 pupil Anatomy 0.000 description 2
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
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- G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
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Abstract
Description
本發明涉及用於低對比特徵的成像方法。 The present invention relates to an imaging method for low contrast features.
本發明主張2016年12月16日提交的美國臨時申請案第62/435,671號的權益,且通過引用將其整體併入。 The present invention claims the benefit of U.S. Provisional Application Serial No. 62/435,671, filed on Dec.
為了品質確保的目的,需要在製造過程期間在透明部件(例如,由玻璃、藍寶石、諸如聚碳酸酯的聚合物等形成)上放置識別標記以在整個生產過程追蹤單一物件和批量。在整個過程中追蹤單位體,使製造商能夠辨識引入品質不合格的缺陷且進行修正之特定生產步驟。在透明部件(例如透明窗口)上或其中施加識別標記的挑戰是,在生產之後,產品的最終用戶不應該注意到識別標記(例如,使用者可能購買了帶有這樣的識別標記的電話或手錶)。達到這個目的的一個手段是使這樣識別標記相當小。示例性識別標記可以包括QR碼(例如,200×200微米大小,由尺寸為兩微米的點組成)、條碼(例如,由相鄰或重疊點的平行線組成)等或其任何組合。識別標記的點可以藉由玻璃材料的雷射干擾而產生,並且可以做得很小並且具有如此低的對比度,以至於人類觀察者至少不太可能注意到 它們。 For quality assurance purposes, it is desirable to place identification marks on transparent components (eg, formed of glass, sapphire, polymers such as polycarbonate, etc.) during the manufacturing process to track a single item and lot throughout the production process. Tracking the unit body throughout the process allows the manufacturer to identify specific production steps that introduce defects of unqualified quality and correct them. The challenge of applying an identification mark on or in a transparent component, such as a transparent window, is that after production, the end user of the product should not notice the identification mark (eg, the user may have purchased a phone or watch with such an identification mark) ). One way to achieve this is to make such identification marks quite small. Exemplary identification indicia can include a QR code (eg, 200 x 200 micron size, consisting of dots of two microns in size), a bar code (eg, consisting of parallel lines of adjacent or overlapping points), or the like, or any combination thereof. The points identifying the marks can be produced by laser interference of the glass material and can be made small and have such low contrast that human observers are at least less likely to notice them.
在一些情況下,習慣上用淺色(例如白色)塗料塗覆透明部件的一個表面。但是,特別是當透明部件的一面有白色塗料塗層時,對光學顯微鏡來說,識別標記可能變得基本上看不見。下面更詳細討論的實施例提供了用於建立這種識別標記的高對比度圖像的方法和系統。 In some cases, it is customary to coat one surface of a transparent member with a light (e.g., white) coating. However, especially when one side of the transparent member has a white paint coating, the identification mark may become substantially invisible to the optical microscope. Embodiments discussed in more detail below provide methods and systems for establishing high contrast images of such identification marks.
本發明的另一個實施例可以是以偵測嵌入在透明部件的區域內的標記的方法為特徵。所述透明部件可以具有第一表面和與所述第一表面相對的第二表面以及形成在所述嵌入標記下方的所述第二表面上的淺色塗層為特徵。所述方法可以包括透過透明部件的區域將亮區和暗區的圖案投影且到達所述塗層上以及捕獲所述嵌入標記的圖像和所述投影圖案的行為。 Another embodiment of the invention may be characterized by a method of detecting indicia embedded in the area of a transparent component. The transparent member may have a first surface and a second surface opposite the first surface and a light colored coating formed on the second surface below the embedded indicia. The method can include projecting a pattern of bright and dark regions through the region of the transparent member and onto the coating and capturing the behavior of the embedded indicia image and the projected pattern.
本發明的另一個實施例可以是以顯微鏡系統為特徵,所述顯微鏡系統包括沿著照射軸排列的光源、空間光調變器、透鏡和分束器以及沿著成像軸排列的相機和物鏡。所述分束器也沿所述成像軸排列。所述空間光調變器被配置成對由所述光源發射的光進行空間調變以產生亮區和暗區的佈置。 Another embodiment of the invention may be characterized by a microscope system comprising a light source arranged along an illumination axis, a spatial light modulator, a lens and a beam splitter, and a camera and an objective lens arranged along the imaging axis. The beam splitters are also arranged along the imaging axis. The spatial light modulator is configured to spatially modulate light emitted by the light source to produce an arrangement of bright and dark regions.
100‧‧‧識別標記 100‧‧‧identification mark
100a‧‧‧點 100a‧‧ points
300‧‧‧識別標記偵測系統 300‧‧‧Identification Mark Detection System
302‧‧‧物鏡 302‧‧‧ Objective lens
304‧‧‧分束器 304‧‧‧beam splitter
306‧‧‧鏡筒 306‧‧‧Mirror tube
308‧‧‧相機 308‧‧‧ camera
310‧‧‧第一組透鏡 310‧‧‧First group of lenses
312‧‧‧視場光闌 312‧‧ ‧ field of view
314‧‧‧圖案化標線片 314‧‧‧ patterned markings
316‧‧‧第二組透鏡 316‧‧‧Second lens
318‧‧‧孔徑光闌 318‧‧‧ aperture diaphragm
320‧‧‧聚焦透鏡 320‧‧‧focus lens
322‧‧‧光源 322‧‧‧Light source
324‧‧‧透明部件 324‧‧‧ Transparent parts
324a‧‧‧上表面 324a‧‧‧ upper surface
324b‧‧‧下表面 324b‧‧‧ lower surface
圖1和圖2說明了根據一個實施例之嵌入在透明部件內且在相對於被投影的視場光闌圖案(field stop pattern)的不同位置處之識別標記。 1 and 2 illustrate identification marks embedded in a transparent member and at different locations relative to a projected field stop pattern, in accordance with one embodiment.
圖3說明了用於偵測識別標記的系統的一個實施例,諸如圖1和2中 所示的識別標記。 Figure 3 illustrates one embodiment of a system for detecting identification marks, such as the identification marks shown in Figures 1 and 2.
圖4說明了用於投影視場光闌圖案的標線片(reticle)的一個實施例。 Figure 4 illustrates one embodiment of a reticle for projecting a field stop pattern.
本文參照附圖描述示例性實施例。除非另外明確指出,否則在附圖中,部件、特徵、元件等的尺寸、位置等以及它們之間的任何距離不一定按比例繪製,而是為了清楚起見而被放大。在附圖中,相似的數字始終代表相似的元件。因此,即使在相應的附圖中既沒有提及也沒有描述,但可以參照其他附圖來描述相同或相似的數字。而且,甚至可以參考其他附圖來描述沒有用元件符號表示的元件。 Exemplary embodiments are described herein with reference to the drawings. The size, position, etc. of the components, features, elements, and the like, and any distances between them are not necessarily drawn to scale, but are exaggerated for clarity. In the figures, like numerals have been used to refer to similar elements. Therefore, the same or similar numerals may be described with reference to the other drawings, even if they are neither mentioned nor described in the corresponding drawings. Moreover, elements that are not represented by the component symbols may be described with reference to other drawings.
這裡使用的用語僅僅是為了描述特定示例實施例的目的,而不意圖具限制性。除非另外定義,否則這裡使用的所有用語(包括技術和科學術語)具有與本領域中具有通常知識的技術人士通常理解的相同的含義。如本文所使用的,除非上下文另外明確指出,否則單數形式“一”、“一個”和“該”也意圖包括複數形式。應當認知到,當在本說明書中使用時,用語“包括”及/或“包含”指定存在所陳述的特徵、整體、步驟、操作、元件和/或部件,但不排除一個或多個其他特徵、整體、步驟、操作、元件、部件和/或其組合存在或添加。除非另外指明,否則列舉的數值範圍包括範圍的上限和下限以及其間的任何子範圍。除非另外指出,否則諸如“第一”、“第二”等用語僅用於區分一個元件與另一個元件。例如,一個節點可以被稱為“第一節點”,同樣,另一個節點可以被稱為“第二節點”,反之亦然。 The terms used herein are for the purpose of describing particular example embodiments only and are not intended to be limiting. Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning meaning meaning As used herein, the singular forms "", " It is to be understood that the phrase "comprising" and """ The entirety, steps, operations, elements, components, and/or combinations thereof are present or added. Ranges of values recited include the upper and lower limits of the range and any sub-ranges therebetween, unless otherwise indicated. Terms such as "first", "second", and the like, are used to distinguish one element from another. For example, one node may be referred to as a "first node," and another node may be referred to as a "second node," and vice versa.
除非另外指明,否則用語“約”、“大約”等意指數量、尺寸、形式、參數和其他量值和特性不是且不必是精確的,並且可以根據需要而 是近似的及/或較大或較小,以反映公差、轉換因子、捨入(rounding off)、測量誤差等以及本領域技術人士已知的其他因素。為了便於描述,可以在本文使用諸如“在...下”、“在...下方”,“在......下面”、“在...上”和“在...上方”等的空間相對用語來描述一個元件或特徵與另一個元件或特徵的關係,如圖所示。應該意識到,空間相對用語意圖除了包括圖中描繪的方位之外還包括不同方位。例如,如果圖中的物件翻轉時,被描述為在其他元件或特徵“下”或“下方”的元件將被定向為在其它元件或特徵“上”。因此,示例性用語“在...之下”可以涵蓋上方和下方的方位。物件也可以被另外定向(例如,旋轉90度或以其它方向),並且可以相應地解釋本文使用的空間相對描述。 The terms "about", "about" and the like mean that the quantity, size, form, parameters, and other quantities and characteristics are not, and are not necessarily, precise, and may be approximate and/or greater or Smaller to reflect tolerances, conversion factors, rounding off, measurement errors, etc., as well as other factors known to those skilled in the art. For ease of description, such as "under", "below", "below", "on", and "above" may be used herein. Spatial equivalents are used to describe the relationship of one element or feature to another element or feature, as shown. It should be appreciated that spatially relative terms are intended to include different orientations in addition to the orientation depicted in the figures. For example, elements in the "following" or "beneath" or "an" or "an" Thus, the exemplary term "under" can encompass the orientations above and below. The article may also be otherwise oriented (eg, rotated 90 degrees or in other directions), and the spatially relative description used herein may be interpreted accordingly.
根據本文討論的一個實施例,嵌入在透明部件(例如,由諸如玻璃、藍寶石、如聚碳酸酯之類的聚合物材料等的材料形成)內的低對比度識別標記透過將亮區和暗區交替的圖案化標線片放置在光學顯微鏡的視場光闌處而被偵測(參見例如圖3和4)。在光學顯微鏡內,所述圖案化標線片在透明部件中建立了嵌入式識別標記的高對比視圖,其中所述透明部件具有明亮塗覆的下側。當通過顯微鏡的視場光闌的光均勻地照射這種玻璃的被塗覆底側時,光會向四面八方漫射並“沖洗(wash-out)”所述碼。透過將所述圖案化標線片放置在所述視場光闌處或其附近並且選擇性地照射具有亮區和暗區的物件,一些光從塗覆表面反射並照射嵌入的識別標記(例如,以QR碼、條碼等提供)的部件(例如,點),但是這些點下方的塗覆區域的背景仍然是暗的,從而產生了對比。在亮區,識別碼也是可見的,因為周圍的區域是暗的,並且這些點往往不會被“沖洗”,因為光只是從它們正下方反射回來,而不是從各種各樣的角度反射回來。例如,如圖1所示, 由併入如上所述的圖案化標線片的光學顯微鏡投影的視場光闌圖案的暗線在透明部件(例如,清玻璃窗(clear glass window))內嵌入的識別標記下方略微離焦,所述透明部件(例如透明玻璃窗)具有以白色塗料塗覆的下側,這給所述圖案帶來了對比。參考圖1,識別標記100由多個點100a構成。識別標記100的尺寸約為200×200微米,而點100a的最大尺寸約為2微米。如圖2所示,即使在光學顯微鏡的視場的角落,識別標記100也可以於投影的視野光闌圖案襯托下被看到。 According to one embodiment discussed herein, a low contrast identification mark embedded in a transparent member (eg, formed of a material such as glass, sapphire, or a polymer material such as polycarbonate) is passed through alternating bright and dark regions The patterned reticle is placed at the field stop of the optical microscope to be detected (see, for example, Figures 3 and 4). Within an optical microscope, the patterned reticle establishes a high contrast view of the embedded identification indicia in the transparent component, wherein the transparent component has a brightly coated underside. When the light passing through the field of view of the microscope uniformly illuminates the coated bottom side of the glass, the light diffuses in all directions and "wash-outs" the code. By placing the patterned reticle at or near the field stop and selectively illuminating objects having bright and dark regions, some of the light is reflected from the coated surface and illuminates the embedded identification mark (eg, Parts (eg, dots) provided by QR code, bar code, etc., but the background of the coated area below these points is still dark, resulting in contrast. In bright areas, the identification code is also visible because the surrounding areas are dark and these points are often not "flushed" because the light is only reflected back from below them, rather than being reflected back from a variety of angles. For example, as shown in FIG. 1, a dark line of a field stop pattern projected by an optical microscope incorporating a patterned reticle as described above is embedded in a transparent member (eg, a clear glass window). The underside of the identification mark is slightly out of focus, and the transparent member, such as a clear glazing, has a lower side coated with a white paint, which gives a contrast to the pattern. Referring to Figure 1, the identification mark 100 is composed of a plurality of points 100a. The identification mark 100 has a size of about 200 x 200 microns, while the point 100a has a maximum size of about 2 microns. As shown in FIG. 2, even at the corner of the field of view of the optical microscope, the identification mark 100 can be seen against the projected field of view pupil pattern.
圖3是示意性地說明被配置成投影上述視野光闌圖案的光學顯微鏡(在本文中也被稱為用於偵測識別標記的系統或識別標記偵測系統)的實施例的視圖。參考圖3,識別標記偵測系統300可以包括物鏡302(例如,明視野顯微鏡物鏡)、分束器304、鏡筒306(例如,包括中繼鏡頭)、相機308(例如數位相機)、第一組透鏡310(注意:第一組透鏡310可以由單個透鏡或多個透鏡組成)、視場光闌312、圖案化標線片(這裡在314處示出)、第二組透鏡316(注意:第二組透鏡316可以由單個透鏡或多個透鏡組成)、孔徑光闌318、聚焦透鏡320和光源322。 3 is a view schematically illustrating an embodiment of an optical microscope (also referred to herein as a system for detecting an identification mark or an identification mark detection system) configured to project the above-described field stop pupil pattern. Referring to FIG. 3, the identification mark detection system 300 can include an objective lens 302 (eg, a bright field microscope objective), a beam splitter 304, a lens barrel 306 (eg, including a relay lens), a camera 308 (eg, a digital camera), first Group lens 310 (note: first set of lenses 310 may be comprised of a single lens or multiple lenses), field stop 312, patterned reticle (shown here at 314), second set of lenses 316 (note: The second set of lenses 316 may be comprised of a single lens or multiple lenses), aperture stop 318, focusing lens 320, and light source 322.
如在圖3中示例性地說明,第一組透鏡310、視場光闌312、圖案化標線片314、第二組透鏡316、孔徑光闌318、聚焦透鏡320和光源322可以沿著照射軸(未示出)排列在一起為特徵。分束器304可以將沿著所述照射軸(即,從光源322)傳輸的光反射到物鏡302中,在物鏡302處光被聚焦到透明部件324上/透鏡部件324中。物鏡302、鏡筒306和相機308可以沿著成像軸(未示出)排列在一起為特徵。從透明部件324反射到物鏡302中的光可以沿著所述成像軸通過分束器304傳輸到相機308。因 此,分束器304沿著所述照射軸和所述成像軸排列。 As exemplarily illustrated in FIG. 3, the first set of lenses 310, field stop 312, patterned reticle 314, second set of lenses 316, aperture stop 318, focus lens 320, and light source 322 may be illuminated The shafts (not shown) are arranged together to feature. Beam splitter 304 can reflect light transmitted along the illumination axis (i.e., from source 322) into objective lens 302 where it is focused onto transparent component 324/lens component 324. Objective lens 302, lens barrel 306, and camera 308 can be characterized as being aligned along an imaging axis (not shown). Light reflected from the transparent member 324 into the objective lens 302 can be transmitted to the camera 308 through the beam splitter 304 along the imaging axis. Therefore, the beam splitter 304 is arranged along the illumination axis and the imaging axis.
如上述構造,聚焦透鏡320作用以收集和準直由光源322所發射的光(即,照明光)。所述照明光最終從聚焦透鏡320透射穿過圖案化標線片314。因此,識別標記偵測系統300被配置為透過透明部件324(例如,由清玻璃、藍寶石或諸如聚碳酸酯的聚合物材料形成)投影(例如,如上所討論的)所述視場光闌圖案。透明部件324包括上表面324a,其對由識別標記偵測系統300(例如,從物鏡302)投射的光來說是可穿透的(或至少基本可穿透的)。透明部件324還包括塗有淺色塗層(例如白色塗料)的下表面324b。這種塗層未在圖3中示出。所述視場光闌圖案穿過上表面324a,穿過透明部件324的內部,並且被投影至塗覆到透明部件324的下表面324b上的塗層上。 As with the above configuration, the focus lens 320 acts to collect and collimate the light emitted by the light source 322 (i.e., illumination light). The illumination light is ultimately transmitted from the focusing lens 320 through the patterned reticle 314. Thus, the identification mark detection system 300 is configured to project (eg, as discussed above) the field stop pattern through a transparent member 324 (eg, formed of clear glass, sapphire, or a polymeric material such as polycarbonate). . The transparent member 324 includes an upper surface 324a that is permeable (or at least substantially permeable) to light projected by the identification mark detection system 300 (eg, from the objective lens 302). The transparent member 324 also includes a lower surface 324b coated with a light colored coating such as a white paint. This coating is not shown in Figure 3. The field stop pattern passes through the upper surface 324a, passes through the interior of the transparent member 324, and is projected onto the coating applied to the lower surface 324b of the transparent member 324.
儘管有上述結構,應該理解的是,識別標記偵測系統300可以被不同地構造。例如,可以從識別標記偵測系統300中省略視場光闌312和孔徑光闌318中的一者或兩者。在另一個示例中,可以從識別標記偵測系統300中省略第二組透鏡316。在另一個示例中,例如,第一組透鏡310可以被移動,以便插入在視場光闌312和圖案化標線片314之間。在另一個示例中,雖然沒有在圖3中示出,但是識別標記偵測系統300可以可選地包括佈置在聚焦透鏡320的與光源322相反的一側的漫射器(例如,使得聚焦透鏡320介於光源322和所述漫射器之間)。在一個實施例中,所述漫射器可以全像漫射器提供。所述漫射器可以用來使由聚焦透鏡320傳遞的光略微不準直且稍微更均勻。 Despite the above structure, it should be understood that the identification mark detecting system 300 can be constructed differently. For example, one or both of field stop 312 and aperture stop 318 may be omitted from identification mark detection system 300. In another example, the second set of lenses 316 can be omitted from the identification mark detection system 300. In another example, for example, the first set of lenses 310 can be moved for insertion between the field stop 312 and the patterned reticle 314. In another example, although not shown in FIG. 3, the identification mark detection system 300 can optionally include a diffuser disposed on a side of the focus lens 320 opposite the light source 322 (eg, such that the focus lens is made 320 is between the light source 322 and the diffuser). In one embodiment, the diffuser can be provided as a full-image diffuser. The diffuser can be used to make the light transmitted by the focusing lens 320 slightly misaligned and slightly more uniform.
在一個實施例中,雖然未顯示,但是識別標記偵測系統300 可以可選地包括焦距調節機構,所述焦距調節機構操作來將識別標記偵測系統300的焦點從嵌入透明部件324內的識別標記上方移動到下方(或反之亦然)。在一個實施例中,所述焦距調節機構可以設置為可變焦距透鏡、可變半徑面鏡、機械平台等或其任何組合。當以可變焦距透鏡或可變半徑面鏡提供時,所述焦距調節機構可以在任何合適的或期望的位置(例如,介於物鏡302和分束器304之間)被併入到識別標記偵測系統300中。當以機械平台提供時,所述焦距調節機構可以操作以支撐和移動物鏡302(例如相對於透明部件324)、以支撐和移動透明部件324(例如相對於物鏡302)等或其任何組合。 In one embodiment, although not shown, the identification mark detection system 300 can optionally include a focus adjustment mechanism operative to identify the focus of the identification mark detection system 300 from the embedded transparent component 324. Move above the marker to the bottom (or vice versa). In one embodiment, the focal length adjustment mechanism can be configured as a variable focus lens, a variable radius mirror, a mechanical platform, or the like, or any combination thereof. When provided with a variable focus lens or a variable radius mirror, the focus adjustment mechanism can be incorporated into the identification mark at any suitable or desired location (eg, between objective lens 302 and beam splitter 304) Detection system 300. When provided with a mechanical platform, the focal length adjustment mechanism is operable to support and move the objective lens 302 (eg, relative to the transparent member 324) to support and move the transparent member 324 (eg, relative to the objective lens 302), etc., or any combination thereof.
在一個實施例中,圖案化標線片314是識別標記偵測系統300內的固定夾具。然而,在替代實施例中,圖案化標線片314可在識別標記偵測系統300內移動。在此替代實施例中,識別標記偵測系統300可以包括耦合到圖案化標線片314並且被配置為移動圖案化標線片314的運動平台(例如,機動運動平台)(例如,使得圖案化標線片314的亮區和暗區沿著與第二組透鏡316的光軸橫向之方向移動)。 In one embodiment, the patterned reticle 314 is a fixed fixture within the identification mark detection system 300. However, in an alternate embodiment, the patterned reticle 314 can move within the identification mark detection system 300. In this alternative embodiment, the identification mark detection system 300 can include a motion platform (eg, a motorized motion platform) coupled to the patterned reticle 314 and configured to move the patterned reticle 314 (eg, to enable patterning) The bright and dark regions of the reticle 314 move in a direction transverse to the optical axis of the second set of lenses 316).
鑑於以上提供的討論,由識別標記偵測系統300投影的視場光闌圖案可以被認為是從圖案化標線片314的亮區和暗區的圖案衍生出。另一個實施例中,所投影的視場光闌圖案可以從可電定址或可光學定址的空間光調變器(例如,微面鏡陣列、液晶光閥等)衍生出,在本文中統稱為“可定址空間光調變器”。在這種情況下,識別標記偵測系統300可以包括可定址空間光調變器來代替圖案化標線片314或者除了圖案化標線片314之外還包括可定址空間光調變器。通常,可定址空間光調變器可操作以產 生且改變亮區和暗區的佈置,所述佈置可以最終地形成由識別標記偵測系統300投射的視場光闌圖案。在所述識別標記偵測系統300投射的視場光闌圖案可以被認為是從圖案化標線片314的亮區和暗區的圖案衍生出或者是由可定址空間光調變器產生的圖案衍生出的程度下,圖案化標線片314和可定址空間光調變器中的每一個可以統稱為“空間光調變器”。 In view of the discussion provided above, the field stop pattern projected by the identification mark detection system 300 can be considered to be derived from the pattern of bright and dark areas of the patterned reticle 314. In another embodiment, the projected field stop pattern may be derived from an electrically addressable or optically addressable spatial light modulator (eg, a micro mirror array, a liquid crystal light valve, etc.), collectively referred to herein. "Addressable Space Light Modulator". In this case, the identification mark detection system 300 can include an addressable spatial light modulator in place of or in addition to the patterned reticle 314, an addressable spatial light modulator. In general, the addressable spatial light modulator is operable to create and change the arrangement of the bright and dark regions, which may ultimately form the field stop pattern projected by the identification mark detection system 300. The field stop pattern projected by the identification mark detection system 300 can be considered to be derived from a pattern of bright and dark areas of the patterned reticle 314 or a pattern produced by an addressable spatial light modulator. To the extent that it is derived, each of the patterned reticle 314 and the addressable spatial light modulator can be collectively referred to as a "spatial light modulator."
儘管未顯示,但是識別標記偵測系統300還可以包括耦合到相機308的輸出(即,當相機308以數位相機提供時)之電腦(例如,通用電腦)。在這種情況下,相機308可以產生與圖像對應的圖像數據(例如,捕獲從透明部件324反射且通過物鏡302、分束器304和鏡筒306傳輸到相機308的光)且電腦可以被配置(例如,利用適當的圖像處理硬體及/或軟體)來處理所述圖像數據以偵測嵌入在透明部件324內的識別標記的存在。電腦還可以被配置成基於所述圖像數據的處理來產生和輸出偵測數據。 Although not shown, the identification mark detection system 300 can also include a computer (eg, a general purpose computer) coupled to the output of the camera 308 (ie, when the camera 308 is provided with a digital camera). In this case, camera 308 can generate image data corresponding to the image (eg, capture light that is reflected from transparent component 324 and transmitted to camera 308 through objective lens 302, beam splitter 304, and lens barrel 306) and the computer can The image data is configured (e.g., with appropriate image processing hardware and/or software) to detect the presence of an identification mark embedded within the transparent component 324. The computer can also be configured to generate and output detected data based on processing of the image data.
在一個實施例中,第一組透鏡310被設計成使得色差被強調,以便將從透明部件324反射回來的人類可見光譜的顏色散佈在透明部件324內的經嵌入標記的預期位置的範圍內。在此實施例中,鏡筒306中的中繼透鏡被設計成將人類可見光譜的經散佈顏色會聚到數位相機308的感測器上。 In one embodiment, the first set of lenses 310 are designed such that the chromatic aberration is emphasized such that the color of the human visible spectrum reflected from the transparent member 324 is spread over a range of expected locations of the embedded indicia within the transparent member 324. In this embodiment, the relay lens in the barrel 306 is designed to converge the scatter color of the human visible spectrum onto the sensor of the digital camera 308.
儘管未顯示,但是識別標記偵測系統300可以進一步包括控制器,其通信地耦合到所述電腦(例如,電腦的I/O埠、USB埠等)、通信地耦合到所述焦距調節機構的輸入、通信地耦合到相機308的輸入(例如,在相機308是數位相機的情況下)、通信地耦合到機動運動平台的輸入(其進而耦合到圖案化標線片314)及/或可定址空間光調變器的輸入等或其組 合,並且被配置成控制與其耦合的任何部件的操作。 Although not shown, the identification tag detection system 300 can further include a controller communicatively coupled to the computer (eg, computer I/O port, USB port, etc.), communicatively coupled to the focus adjustment mechanism Inputs that are input, communicatively coupled to camera 308 (eg, where camera 308 is a digital camera), communicatively coupled to an input of a motorized motion platform (which in turn is coupled to patterned reticle 314), and/or addressable The input of the spatial light modulator, etc., or a combination thereof, and is configured to control the operation of any components coupled thereto.
例如,在一個實施例中,所述控制器被配置成控制所述焦距調節機構的操作(例如,如上述移動識別標記偵測系統300的焦點)。所述控制器還可以被配置為在識別標記偵測系統300的焦點已經移動之後控制所述電腦或相機308的操作(即,捕獲從透明部件324反射的光的圖像)。在一個實施例中,識別標記偵測系統300的焦點可以藉由增量距離來重複移動,並且每當焦點已經移動時可以捕獲圖像。通過交替地進行移動焦點且捕獲所得圖像,所述電腦可以處理所述圖像數據以確定經嵌入標記存在於透明部件324內的焦點。 For example, in one embodiment, the controller is configured to control the operation of the focus adjustment mechanism (e.g., the focus of the mobile identification mark detection system 300 as described above). The controller may also be configured to control the operation of the computer or camera 308 (ie, capture an image of light reflected from the transparent component 324) after the focus of the identification mark detection system 300 has moved. In one embodiment, the focus of the recognition mark detection system 300 can be repeatedly moved by the incremental distance and the image can be captured whenever the focus has moved. By alternately moving the focus and capturing the resulting image, the computer can process the image data to determine the focus that is embedded within the transparent component 324 via the embedded indicia.
在另一個示例實施例中,所述控制器可以被配置成控制機動運動平台(其進而耦合到圖案化標線片314)及/或可定址空間光調變器的操作,以便偏移由識別標記偵測系統300投射的視場光闌圖案的明和暗區域的圖案。所述控制器可以進一步被配置成在經投影的視場光闌圖案的亮區和暗區的圖案已經偏移之後控制電腦或相機308的操作(即,捕獲從透明部件324反射的光的圖像)。在一個實施例中,已經被偏移的經投影的視場光闌圖案的亮區和暗區的圖案可以增量距離重複地偏移,並且每當圖案已經移位時可以捕獲圖像。通常,增量距離可以在0.1μm(或約0.1μm)至10μm(或約10μm)(例如0.2μm、0.5μm、0.8μm、1μm,2μm、4μm、5μm、8μm、9μm等或這些值中的任何值之間)的範圍內。通過交替地進行偏移所述圖案且捕獲所得圖像,嵌入標記的每個區域的圖像可以用不同亮度層級的背景來捕獲。與這捕獲的圖像對應的圖像數據因此可以在電腦處促進在透明部件324內嵌入的標記的精準和可靠度偵測。如上所述,可以在確定 經嵌入的標記存在於透明部件324內的焦點之後執行以不同的亮度層級捕獲圖像的過程。 In another example embodiment, the controller may be configured to control the operation of the motorized motion platform (which in turn is coupled to the patterned reticle 314) and/or the addressable spatial light modulator such that the offset is identified by The pattern of the bright and dark regions of the field stop pattern projected by the marker detection system 300. The controller may be further configured to control operation of the computer or camera 308 (ie, capture a map of light reflected from the transparent member 324 after the pattern of bright and dark regions of the projected field diaphragm pattern has been shifted) image). In one embodiment, the pattern of bright and dark regions of the projected field stop pattern that has been shifted may be repeatedly offset by the incremental distance and the image may be captured whenever the pattern has been shifted. In general, the incremental distance may be in the range of 0.1 μm (or about 0.1 μm) to 10 μm (or about 10 μm) (for example, 0.2 μm, 0.5 μm, 0.8 μm, 1 μm, 2 μm, 4 μm, 5 μm, 8 μm, 9 μm, etc.) Any value between the ranges). By alternately shifting the pattern and capturing the resulting image, the image of each region embedded in the marker can be captured with a background of different brightness levels. The image data corresponding to the captured image can thus facilitate the accuracy and reliability detection of the indicia embedded within the transparent component 324 at the computer. As described above, the process of capturing images at different levels of brightness may be performed after determining that the embedded indicia is present in the focus within the transparent component 324.
通常,所述控制器包括一個或多個處理器,其被配置為在執行指令時控制所述焦距調節機構的一個或多個操作來生成上述控制信號。處理器可以被配置為執行指令的可編程處理器(例如,包括一個或多個通用電腦處理、微處理器、數位信號處理器等或其任何組合)。可由所述處理器執行的指令可以是以軟體、韌體等或以包括可程式邏輯裝置(programmable logic device,PLD)、現場可程式閘陣列(field-programmable gate array,FPGA)、現場可程式物件陣列(field-programmable object array,FPOA)、包括數位、類比和混合類比/數位電路的特定應用積體電路(application-specific integrated circuit,ASIC)等或其任何組合等的任何適當形式的電路來實施。指令的執行可以在一個處理器上執行、在多個處理器之間分佈、在裝置內的處理器之間並行或在多個裝置網絡之間並行等或者其任何組合。在一個實施例中,所述控制器包括可由處理器(例如,經由一個或多個有線或無線通信鏈路)存取的諸如電腦記憶體的有形介質。如本文所使用的,“電腦記憶體”包括磁介質(例如,磁帶、硬磁碟驅動器等)、光碟、易失性或非易失性半導體記憶體(例如RAM、ROM、NAND型快閃記憶體、NOR型快閃記憶體、SONOS記憶體等)等,並且可以原地、遠程(例如通過網絡)或其組合來存取。一般而言,所述指令可以作為電腦軟體(例如,可執行代碼、檔案、指令等、程式館檔案等)來儲存,其可以由本領域技術人士從本文提供的描述而輕易地製作出(例如用C、C++、Visual Basic、Java、Python、Tel、Perl、Scheme、Ruby等寫出)。電腦軟體 通常存儲在由電腦記憶體傳遞的一個或多個數據結構中。 Typically, the controller includes one or more processors configured to control one or more operations of the focus adjustment mechanism to generate the control signals when the instructions are executed. The processor can be configured as a programmable processor that executes the instructions (eg, including one or more general purpose computer processing, a microprocessor, a digital signal processor, etc., or any combination thereof). The instructions executable by the processor may be software, firmware, etc. or include a programmable logic device (PLD), a field-programmable gate array (FPGA), a field programmable object. Field-programmable object array (FPOA), any suitable form of circuitry including digital, analog and mixed analog/digital circuits, application-specific integrated circuits (ASICs), etc., or any combination thereof, etc. . Execution of instructions can be performed on one processor, distributed among multiple processors, in parallel between processors within a device, or in parallel between multiple device networks, etc., or any combination thereof. In one embodiment, the controller includes a tangible medium such as computer memory that is accessible by a processor (eg, via one or more wired or wireless communication links). As used herein, "computer memory" includes magnetic media (eg, magnetic tape, hard disk drives, etc.), optical disks, volatile or non-volatile semiconductor memory (eg, RAM, ROM, NAND type flash memory). Body, NOR type flash memory, SONOS memory, etc.), etc., and can be accessed in situ, remotely (eg, via a network), or a combination thereof. In general, the instructions may be stored as computer software (eg, executable code, files, instructions, etc., library files, etc.), which may be readily fabricated by those skilled in the art from the description provided herein (eg, C, C++, Visual Basic, Java, Python, Tel, Perl, Scheme, Ruby, etc.). Computer software is typically stored in one or more data structures that are passed by computer memory.
以上是對本發明的實施例和示例的說明,並且不應被解釋為對其進行限制。儘管已經參考附圖描述了一些具體實施例和示例,但是本領域技術人士將會輕易地理解,在不實質上脫離本發明的新穎教導和優點的情況下,對所公開的實施例和示例以及其它實施例進行許多修改是可以的。因此,所有這些修改意圖被包括在如申請專利範圍中所定義的本發明的範圍內。例如,技術人士將會理解,任何句子、段落、示例或實施例的主題可以與其他句子、段落、示例或實施例中的一些或全部的主題相結合,除非這樣的組合是相互排斥的。因此,本發明的範圍應由所附申請專利範圍所界定,並且包括申請專利範圍的等效物。 The above is a description of the embodiments and examples of the invention and should not be construed as limiting. Although the embodiments and examples have been described with reference to the drawings, the embodiments and examples, and the disclosed embodiments and examples, as well as Many other modifications are possible in other embodiments. Accordingly, all such modifications are intended to be included within the scope of the invention as defined in the scope of the claims. For example, a person skilled in the art will understand that the subject matter of any sentence, paragraph, example or embodiment may be combined with the subject matter of some or all of the other sentences, paragraphs, examples or embodiments, unless such combinations are mutually exclusive. The scope of the invention is therefore intended to be defined by the appended claims
Claims (6)
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| US4561731A (en) * | 1980-03-10 | 1985-12-31 | Kley Victor B | Electronic illumination control |
| EP1181569B1 (en) * | 1999-05-14 | 2004-04-07 | MV Research Limited | A microvia inspection system |
| WO2008124397A1 (en) * | 2007-04-03 | 2008-10-16 | David Fishbaine | Inspection system and method |
| JP2009222683A (en) * | 2008-03-19 | 2009-10-01 | Panasonic Corp | Method and apparatus for surface inspection |
| JP6266302B2 (en) * | 2013-10-25 | 2018-01-24 | 株式会社キーエンス | Microscope imaging apparatus, microscope imaging method, and microscope imaging program |
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