TW201823125A - Assembly structure connected with nozzle automatically adjusting the vertical shift and holding the nozzle in position horizontally - Google Patents

Abstract

An assembly structure connected with a nozzle includes: a fixing base, a nozzle base, and a nozzle. The fixing base is provided with a tapered positioning hole; the nozzle base is provided with a positioning post inserted into the tapered positioning hole, and is provided with a sealing member and a magnet. The upper edge of the sealing member is joined to the bottom surface of the fixing base. The fixing base and the nozzle base are made of a metal material with magnetic property to avoid magnetic leakage; the nozzle is adhered to the nozzle base, and the nozzle is provided with a plurality of through holes penetrating from the top surface to the bottom surface to communicate with the vacuum passage of the fixing base; the nozzle base and the nozzle are attracted to the fixing base by the attraction force of the magnet and are thus combined into a chip collecting and placing device. With the adjustment of the tapered positioning hole of the fixing base and the positioning post and the sealing member of the nozzle base, the vertical shift can be automatically adjusted, and the nozzle can be held in position horizontally.

Description

Assembly structure for connecting nozzles (1)

The invention provides an assembly structure for connecting a wafer suction nozzle, in particular, an assembly structure capable of automatically adjusting the vertical offset and horizontal positioning of the overall structure.

In the semiconductor packaging process, the cut and polished wafers need to be sucked and placed, so there will be a device to complete the process of sucking and placing, and there will be a fixed seat and contact between the device and the wafer sucking and placing. Nozzle.

As the thickness of the wafer is getting thinner and thinner, the common specifications on the market are about 30 ~ 50um, and it may become thinner and thinner, which will cause the suction and placement operations to be caused by the negligence of the nozzle of the artificial device. The inability of the nozzle to exert force uniformly causes air to be generated between the wafer and the contact surface or cannot be fully bonded with the primer, resulting in damage to the wafer. As a result, the original holders and nozzles that have been sucked and placed can no longer meet the production requirements. In addition to the planar production method, there are a variety of different solutions for fixing the thin wafers and the suction nozzle.

One of the commonly used structures used to connect and assemble the suction nozzle is to provide a clamping jaw on the fixing base and embed the suction nozzle directly into the clamping jaw. However, it is precisely because the suction nozzle is a clamp embedded above the fixing base. In the claw, the suction nozzle is difficult to remove after installation and insertion, which makes it difficult to replace. When installing the suction nozzle, it will inevitably touch the suction crystal surface of the suction nozzle, which will cause the nozzle to be contaminated. The nozzle is pushed to the bottom so that the contact surface with the fixed seat is inclined. It cannot be ensured that the nozzle must be flat after the nozzle is installed, which will cause the chip to break, and because the clamping jaw and the nozzle are closely fitted on the assembly. Fixed, it is easy for the suction nozzle to deform due to the pressure of the clamping claw, which will cause the wafer to be crushed and damaged.

In the conventional structure for connecting and assembling the suction nozzle, another fixing base uses a convex structure at the bottom of the vacuum hole to correspond to a corresponding concave structure provided on the suction nozzle. Although it is easier to install the suction nozzle than the clamping claw, The mouth needs to be provided with a corresponding concave structure, which is easy to deform during the production process, and also has the problem of contamination of the nozzle during installation. Furthermore, due to the material of the nozzle, it is easy to have a large tolerance when it is manufactured. Although the structural relationship corresponding to the unevenness is preset, it is easy to slide and deform, causing damage to the wafer.

The corresponding tight fitting relationship fixes the assembly structure of the suction nozzle. The positioning foot can be extended below the fixing seat to match the positioning hole on the suction nozzle. However, due to the tight fitting structure between the positioning foot and the suction nozzle, It is difficult to install and take out, and the suction nozzle and the fixed seat are positioned with a tight fit, structural adjustment cannot be performed, and there is a chance of contacting the pollution nozzle during installation.

In the conventional assembly structure, there is also an improvement on the above-mentioned fixed fitting nozzle with a corresponding tight fitting relationship, and a magnet is embedded in the fixed seat, and an iron piece or a stainless steel piece for magnetic suction is added to the suction nozzle. Instead of the tight-fitting assembly structure, although it can improve the assembly problem of the tight-fitting structure, it also causes other technical problems. The iron or stainless steel sheet between the fixed seat and the suction nozzle cannot be completely tightly combined, and there is a possibility of leaking vacuum. In addition, the magnetic adsorption structure between the magnet and the iron piece or stainless steel piece on the suction nozzle does not have a corresponding positioning place, which will cause a horizontal offset problem on the suction nozzle assembly.

In addition, the assembly structures that are used to fix the nozzles with a close fitting relationship all focus on the flatness of the nozzles after assembly. However, if the sucked wafer has a vertical offset (tilt) that is not planar with the nozzles, Problem, the above-mentioned structural improvement of the flatness between the nozzle and the fixed seat cannot solve the problem of vertical offset (tilt), especially when the thickness of the wafer becomes thinner and thinner, the influence of this problem will become more and more obvious.

In view of this, the conventional structure is improved, and an assembly structure for connecting nozzles is provided for the installation of the nozzles. The assembly structure includes a fixing base, which has a magnetically permeable body and is provided with at least Two positioning parts, which are respectively disposed at different sides of the fixed base; a nozzle base, which has a magnetically permeable body and is provided with the nozzle, and the nozzle base corresponds to each of the positioning parts A positioning column is provided, and the positioning column is correspondingly inserted into the positioning portion, so as to connect the nozzle base to the fixing base, and limit the horizontal displacement of the fixing base and the nozzle base assembly structure to facilitate This nozzle is used for operation.

The nozzle base is provided with a recess for setting a magnet, and the fixing base has magnetic permeability, so that the fixing base and the nozzle base are combined and connected through magnetic adsorption, and the magnetic force can be prevented from under the nozzle. Leakage, wherein the fixing seat is provided with a joint portion on the upper end surface, the joint portion has a vacuum channel, the magnet is provided with an opening for communicating with the nozzle base in the vacuum channel, and the nozzle base A sealing groove is provided. The sealing groove surrounds the outside of the recess, is sandwiched between the fixing seat and the nozzle base, and a sealing member is provided in the sealing groove. The sealing member is made of elastic material. To ensure vacuum tightness, the seal is higher than the nozzle base and its height is matched with an adjustment space reserved between the lower end surface of the fixed seat and the upper end surface of the nozzle base. The height of the adjustment space is To compensate for the height drop caused by the tilt.

The suction nozzle base is provided with at least one concave portion for setting a magnet for the fixed connection between the fixing base and the suction nozzle base by magnetic adsorption, wherein the fixing base is provided with a joint portion on an upper end surface, the The joint portion has a vacuum channel, and the nozzle base is provided with a vacuum hole for communicating with the vacuum channel of the fixed base. The nozzle base is provided with a sealing groove, which is surrounded on the outside of the recess and is clamped. A seal is provided between the fixing base and the nozzle base, and a sealing member is provided in the sealing groove. The seal is made of an elastic material to ensure vacuum tightness. The seal is higher than the nozzle base and is The height is matched with an adjustment space reserved between the lower end surface of the fixed seat and the upper end surface of the nozzle base. The height of the adjustment space is used to compensate for the height drop caused by the tilt.

A handle is provided on each side of the suction nozzle base to facilitate loading and unloading.

Another technical means adopted by the present invention is that the assembly structure includes a fixing base, the fixing base has a magnetically permeable body and is provided with at least two positioning portions, and the positioning portions have a tapered channel with an upper width and a narrow width. And a lower end hole is formed on the lower end surface of the fixed seat; a nozzle base has a magnetically permeable body and is provided with the nozzle, the nozzle base is provided with a positioning column corresponding to the positioning portion, and the positioning is based on the positioning A column is correspondingly inserted into the lower end hole to assemble the nozzle base to the fixing base and limit the horizontal displacement of the fixing base and the nozzle base assembly structure; a seal is clamped to the fixing Between the seat and the nozzle base, the positioning portion uses the cone-shaped channel opposite to the hole above the lower end hole to provide the relative displacement space required by the positioning column when the nozzle base is inclined to facilitate the suction. The lower end surface of the mouth is attached to an inclined wafer surface, and the seal is used to maintain the closeness between the fixing seat and the assembly structure of the nozzle base.

The tapered hole prop has an inclined surface between 1 degree and 5 degrees with a vertical line, and a preferred range of an included angle between the inclined surface and the vertical line is between 2 degrees and 2.5 degrees.

The positioning portions are respectively disposed at different sides of the fixing base.

The nozzle base is provided with a recessed portion and a sealing groove, and the recessed portion is provided with a magnet, so that the fixed seat and the nozzle base are combined and connected through magnetic adsorption, and the magnetic force can be prevented from passing through the lower end of the nozzle. Leakage, and the sealing groove is surrounded on the outside of the recess, the seal is provided on the sealing groove, the fixing seat is provided with a joint portion on the upper end surface, the joint portion has a vacuum channel, and the bottom surface of the recess portion is provided with a vacuum hole, The magnet is provided with an opening for communicating with the concave portion to the vacuum channel. The seal is higher than the nozzle base and its height is fitted between the lower end surface of the fixing base and the upper end surface of the nozzle base. One of the reserved adjustment spaces is reserved, and the height of the adjustment space is used to compensate for the height drop caused by the tilt.

The nozzle base also has magnetic permeability, and is provided with at least one recessed portion and a sealing groove. The recessed portion is provided with a magnet for the magnetic connection between the fixed seat and the nozzle base to prevent magnetic force from being combined. The lower end of the suction nozzle leaks out, and the sealing groove is surrounded on the outside of the recess. The seal is provided on the sealing groove. The fixing seat is provided with a joint on the upper end surface. The joint has a vacuum channel. The nozzle base is provided with a vacuum hole for communicating with the vacuum channel of the fixed base. The seal is higher than the nozzle base and its height is matched between the lower end of the fixed base and the upper end of the nozzle base. An adjustment space is reserved. The height of the adjustment space is used to compensate for the height drop caused by the inclination. The seal is made of an elastic material to ensure vacuum tightness.

A handle is provided on each side of the suction nozzle base to facilitate loading and unloading.

Compared with the prior art, the present invention has the following effects:

In the assembly structure of the present invention, the fixing base uses positioning parts at different sides and cooperates with the positioning post of the nozzle base, and the corresponding structural relationship of the positioning post correspondingly inserted in the lower end hole of the positioning part is used as the assembly fixing base and the nozzle base. Horizontal positioning so that the nozzle will not have a horizontal displacement problem.

Furthermore, because the suction nozzle is directly flatly attached to the nozzle base, it replaces the structure of assembling the suction nozzle with a tight fit in the prior art, and there is no problem of deformation of the suction nozzle.

The nozzle base in the assembly structure is provided with a seal in the sealing groove. The elasticity of the seal can be used to correct various irregularities or tilts related to the fixed seat, the nozzle, the nozzle base, the wafer or its adsorbate. Allow the suction nozzle to be flat or attached to the wafer or the adsorbent to ensure flatness.

Because the nozzle base in the assembly structure is provided with a magnet, and the magnetically conductive fixing base and the nozzle base are matched, the fixed base and the nozzle base can be combined and connected through magnetic adsorption, so as to avoid magnetic leakage at the end of the nozzle surface. And because the nozzle base is provided with a handle, the handle is used to assemble the nozzle base, so that the operator can quickly and easily install the nozzle base together with the nozzle without touching the lower end face of the nozzle. It can be removed from the seat or by the fixed seat, and it will not pollute the lower end surface of the suction nozzle for sucking crystals, and there is no need to remove the fixed seat for installation or removal.

Although the temperature of the operating environment may affect the magnetic force of the magnet, due to the short life of the suction nozzle, the temperature will affect the magnetic force before it needs to be replaced, which will not affect the suction and placement of the wafer unless it is placed in the nozzle. Before the end of its useful life, the magnet has been completely demagnetized due to the curie temperature.

In the fixed seat, the positioning portion has a tapered channel, and the tapered channel has a tapered structure space which is wide and narrow around the inclined surface, so that when the nozzle base is tilted, the position of the fixed seat is not changed. The relative displacement space required by the column enables the nozzle base to cooperate with the seal, and corrects the vertical offset problems that may occur due to the overall assembly and the wafer itself or other factors.

The angle of the inclined surface of the fixed seat to the vertical line is designed by considering the maximum inclination of all possible vertical offsets of the fixed seat, nozzles, and wafers, so that it can be matched with the seal when vertical offset occurs. The vertical offset is flat.

When the nozzle base is tilted, there will be a height difference between the nozzle and the fixed seat due to the tilt. The seal can be used to maintain the closeness between the two.

Please refer to FIGS. 1 to 3, which are perspective views and exploded views of the first embodiment of the present invention. The assembly structure of the assembly structure for connecting nozzles according to the present invention includes a fixing base 10, a nozzle base 20, and a nozzle base. 20 is provided with a suction nozzle 30, which sucks a wafer 40 by its lower end surface.

The fixing base 10 has a metal body and a joint portion 11 provided on an upper end surface thereof for joining a vacuum getter (not shown), and the joint portion 11 has a vacuum passage 111 penetrating the joint portion 11 and below.的 固定座 10。 The fixed seat 10.

As shown in FIG. 5A of the same reference, the fixing base 10 is provided with two positioning portions 12, and the positioning portions 12 are respectively disposed at different sides of the fixing base 10. The positioning portion 12 penetrates the fixing base 10 and has a tapered tunnel 120 with an upper width and a narrow width. The upper end hole 121 and the lower end hole 122 are formed on the upper and lower ends of the fixing base 10, respectively, and the cone portion 120 of the positioning portion 12 is formed. It has an inclined surface which is sandwiched between 1 degree and 5 degrees with a vertical line.

According to actual needs, the angle θ between the inclined surface of the tapered tunnel 120 and the vertical line may be 2 degrees, 2.5 degrees, 3 degrees, 3.5 degrees, 4 degrees, or 4.5 degrees. The preferred range of the included angle θ is 2 degrees to Between 2.5 degrees.

The fixing base 10 can optionally add a cover (not shown) at the upper end hole 121 of the positioning portion 12 to prevent dust or debris from falling into the positioning portion 12 and affecting its function. If necessary, it can be increased. Number of positioning portions 12.

In addition, the tapered channel 120 of the positioning portion 12 of the fixed base 10 in this embodiment may penetrate only the lower end surface of the fixed base 10 and only form the lower end hole 122.

The nozzle base 20 is provided with a positioning post 21 and a vacuum hole 22 for communicating with the vacuum channel 111 at positions of the upper end corresponding to the positioning portions 12 on the fixed base 10, and a nozzle base 20 is provided with a communicating vacuum at the lower end. The vacuum space 25 of the hole 22 and a fixing concave portion 26 can be used for the suction nozzle 30 to be adhered and fixed. Since the suction nozzle 30 is fixed flat under the nozzle base 20, the flatness of the suction nozzle 30 can be ensured.

A positioning post 21 is inserted into the lower end hole 122 of the fixing base 10 on the upper end surface of the nozzle base 20 to assemble the nozzle base 20 below the fixing base 10, and is inserted between the positioning part 12 and the positioning post 21. This structure restricts the horizontal displacement on the assembly structure of the fixing base 10 and the nozzle base 20, so that the relative positions of the two are limited and cannot be moved left and right, so as to facilitate the operation of the nozzle 30 under vacuum.

In this embodiment, the fixing base 10 and the nozzle base 20 are magnetically permeable, and the nozzle base 20 is provided with a recessed portion 24 below the vacuum channel 111, and the vacuum hole 22 is oppositely positioned on the bottom surface of the recessed portion 24, and a magnet 29 is provided on the In the recess 24, the fixed base 10 and the nozzle base 20 are combined and connected by magnetic adsorption, and since the fixed base 10 and the nozzle base 20 are made of magnetically conductive material, magnetic force can be prevented from leaking from the lower end of the nozzle 30.

The nozzle base 20 is magnetically attached to the fixed base 10, which can improve the conventional embedded combination structure. During installation, it is easy to negligently fail to push the nozzle base 20 to the bottom to be flat with the fixed base 10, so that The nozzle 30 assembled by the nozzle base 20 is also tilted together, which causes the problem that the adsorbed wafer 40 is broken during operation.

The magnet 29 is also provided with an opening for communicating with the vacuum passage 111 in common with the recess 24.

The nozzle base 20 is also provided with a sealing groove 23 outside the recessed portion 24. As shown in FIG. 3, the sealing groove 23 is surrounded on the outside of the recessed portion 24, and a sealing member 28 is provided in the sealing groove 23 to tightly adhere to it. The upper end of 28 is connected to the bottom surface of the fixing base 10 and is clamped between the fixing base 10 and the nozzle base 20 after assembly. The seal 28 and the seal groove 23 are provided in the same outer shape correspondingly.

The seal 28 is made of flexible insulating material, which can ensure the airtightness of the structure between the fixed seat 10 and the nozzle base 20 (as shown in Figures 4 and 5), so that the two can be maintained under vacuum operation. The vacuum degree is used to facilitate the operation of the suction nozzle 30 under vacuum. The elasticity of the material of the seal 28 can correct various structural irregularities or tilts that may be caused by the fixing base 10, the nozzle base 20, the nozzle 30, and the wafer 40, so that the nozzle 30 can be flatly adsorbed or stuck on the surface. Wafer 40.

In fact, temperature may affect the magnet 29 in the nozzle base 20, and then its magnetic force. However, because the life of the nozzle 30 is short, the temperature will affect the magnetic force of the magnet 29 before the nozzle 30 needs to be replaced. Affects the suction and placement operation, unless the magnet 30 has been completely demagnetized due to the courtesy temperature before the suction nozzle 30 has reached the end of its useful life.

As shown in Figures 4 and 5 of the same reference, the suction nozzle 30 is fixed to the lower end surface of the suction nozzle base 20. A channel 31 is provided on the top surface of the suction nozzle 30 and a plurality of circulation holes 32 penetrating through the suction nozzle 30. The circulation holes 32 communicate with the suction nozzle base. The vacuum hole 22 and the vacuum space 25 of 20 communicate with the vacuum channel 111 of the fixing base 10, so that the vacuum channel 111 and the circulation hole 32 form an air flow channel, and the suction nozzle 30 is transmitted through the vacuum aspirator (not shown in the figure). The vacuum suction force generated when the vacuum channel 111 is sucked to pick up a wafer 40. At this time, the wafer 40 is attached to the lower end surface 33 of the wafer 40 after being assembled on the suction nozzle 30.

Under normal operating conditions, the suction nozzle 30 can be directly attached to the wafer 40 with its lower end surface 33, but in exceptional circumstances such as the wafer 40 itself is not flat or the wafer 40 is placed abnormally, the wafer 40 may cause the wafer 40 The surface is inclined with respect to the lower end surface 33 of the suction nozzle 30.

In the above case, in order to make the lower end surface 33 of the suction nozzle 30 adhere to the surface of the wafer 40 which is relatively inclined, the suction nozzle 30 and the nozzle base 20 need to cooperate to incline so as not to damage the structure of the wafer 40 It is bonded to the wafer 40.

As shown in Figures 6 and 6A of the same reference, the nozzle base 20 is inserted into the lower end hole 122 of the cone-shaped channel 120 of the fixing base 10 with the positioning post 21, and the cone-shaped channel 120 has a gradually wider width than the lower end hole 122. The diameter of the channel, which is the narrow and wide cone-shaped structure space surrounded by the inclined surface of the cone-shaped channel 120, and when the nozzle base 20 is tilted, the fixing base 10 is maintained in place, but in its cone shape The channel 120 provides the relative displacement space required by the positioning post 21 when the nozzle base 20 is inclined, so that the nozzle base 20 can be vertically adjusted corresponding to the tilt direction.

When the nozzle base 20 is inclined, there is a height difference between the nozzle base 20 and the fixed base 10 due to the tilt. At this time, a seal 28 sandwiched between the fixed base 10 and the nozzle base 20 is used to maintain the distance between the two. Closeness.

The height of the seal 28 above the upper end surface of the nozzle base 20 is adapted to an adjustment space 13 reserved between the lower end surface of the fixed base 10 and the upper end surface of the nozzle base 20, and the height is based on a comprehensive consideration of the wafer 40 itself and the wafer 40 Set the tolerances of the various component combinations required for placement, and use the elasticity of the seal 28 to compensate for the vertical height drop caused by the relative tilt to maintain the air density of the overall structure when the nozzle base 20 is tilted. And can automatically correct the vertical tolerance deviation accumulated due to assembly.

The tapered channel 120 of the positioning portion 12 can cooperate with the seal 28 to correct the vertical offset due to structural assembly tolerances. It can also be used for adjustment operations when the surface of the wafer 40 is inclined with the suction nozzle 30, and the tapered channel 120 At the same time, the corresponding structural relationship between the lower end hole 122 and the positioning post 21 of the nozzle base 20 can make the overall assembly structure without relative horizontal displacement. The angle θ between the inclined surface of the tapered tunnel 120 and the vertical line is set in consideration of the maximum inclination of the fixed seat 10, the nozzle base 20, the nozzle 30 and the wafer 40, which may cause vertical offset.

When assembling the assembly structure of the first embodiment, the sealing member 28 is first placed in the sealing groove 23, the magnet 29 is placed in the recess 24 of the nozzle base 20, and then the nozzle 30 is fixed to the nozzle base 20 for fixing. The recess 26, finally, hold the handles 27 provided on both sides of the nozzle base 20 by hand to insert the positioning post 21 of the nozzle base 20 into the positioning portion 12 of the fixing base 10, and by the attraction of the magnet 29, The suction nozzle base 20 and the fixed suction nozzle 30 are sucked under the fixing base 10. On the contrary, when disassembling, only holding the handle 27 of the nozzle base 20 by hand and pulling it down, the nozzle base 20 and the nozzle 30 can be removed together.

The handle 27 of the nozzle base 20 allows the operator to directly install or remove the nozzle 30 to or from the fixed base 10 without touching the lower end surface 33 of the nozzle 30. It will contaminate the lower end surface 33 of the suction nozzle 30, and it is not necessary to remove the fixing base 10 on the device to quickly and conveniently install the suction nozzle 30 on the fixing base 10.

Please refer to FIGS. 7 to 12, which are drawings related to the second embodiment of the present invention. The structure of this embodiment is substantially the same as that of the first embodiment and has the same functions. For simplicity, the same symbols are used. The relevant description is omitted. The fixed base 10A and the suction nozzle 30A of the second embodiment are only larger in size than the first embodiment, and both have the same function.

The nozzle base 20A of the second embodiment has an oval-shaped vacuum hole 22A, and the vacuum hole 22A communicates with the vacuum channel 111. The nozzle base 20A is provided with at least one recessed portion 24A on the upper end surface other than the vacuum hole 22A, respectively provided with a magnet 29A, and a sealing groove 23A having a rectangular shape surrounding the recessed portion 24A. The sealing groove 23A is correspondingly provided with a similarly rectangular shape.的 封 件 28A。 The seal 28A.

The number of the recessed portions 24A in this embodiment is not limited to the number or shape of the magnets as long as the provided magnets 29A are provided with sufficient magnetism to allow the nozzle base 20A to be adsorbed and fixed to the fixed seat 10A. According to actual needs, the sealing members 28A may be selectively surrounded on the outside of all the recesses 24A or individually.

Please refer to FIGS. 13 to 18, which are diagrams showing the third embodiment of the present invention. The structure of this embodiment is substantially the same as that of the first and second embodiments and has the same functions. Identical symbols and related descriptions are omitted. The fixed base 10B and the suction nozzle 30B of the third embodiment are only larger in size than the second embodiment, and both have the same function.

The nozzle base 20B of the third embodiment has an oval-shaped vacuum hole 22B, and the vacuum hole 22B communicates with the vacuum channel 111. The nozzle base 20B is provided with at least one recessed portion 24B on the upper end surface other than the vacuum hole 22B so as to be provided with a magnet 29B and a sealing groove 23B having a rectangular shape surrounding the recessed portion 24B. The sealing groove 23B is correspondingly provided with an equally rectangular shape. Of seal 28B.

The number of the recessed portions 24B in this embodiment is not limited to the number or shape of the magnets, as long as the provided magnet 29B is sufficiently magnetic to allow the nozzle base 20B to be attracted to the fixed base 10B and combined. According to actual needs, the sealing members 28B can be selectively surrounded on the outside of all the recesses 24B or individually.

The assembly structure of the present invention can be used in three different specifications as shown in the first to third embodiments, and can also be replaced with a suitable nozzle base according to the size of the chip, and the nozzle can also be replaced with different styles and shapes as required. And the same size, and get the same effect.

The above description is only the preferred embodiments of the present invention, and therefore does not limit the patent scope of the present invention. Therefore, any simple modifications and equivalent structural changes made by using the description and drawings of the present invention should be included in the same way. Within the patent scope of the present invention.

10, 10A, 10B‧‧‧Fixed

11‧‧‧ Junction

111‧‧‧Vacuum channel

12‧‧‧ Positioning Department

120‧‧‧Tapered channel

121‧‧‧ top hole

122‧‧‧ bottom hole

13‧‧‧ adjust space

20, 20A, 20B‧‧‧ Nozzle base

21‧‧‧Positioning post

22, 22A, 22B‧‧‧Vacuum hole

23, 23A, 23B‧‧‧Sealed grooves

24, 24A, 24B ‧‧‧ Recess

25‧‧‧Vacuum space

26‧‧‧Fixed recess

27‧‧‧handle

28, 28A, 28B‧‧‧Seals

29, 29A, 29B‧‧‧ Magnets

30, 30A, 30B ‧‧‧ Nozzles

31‧‧‧channel

32‧‧‧flow hole

33‧‧‧ bottom face

40‧‧‧Chip

Fig. 1 is a perspective view of the first embodiment of the present invention; Fig. 2 is a bottom perspective view of the first embodiment of the present invention; Fig. 3 is an exploded view of the first embodiment of the present invention; A cross-sectional view of the example; FIG. 5 is a schematic diagram of the suction wafer of the first embodiment of the present invention; FIG. 5A is a partially enlarged view of FIG. 5; FIG. 6 is a schematic diagram of the vertical adjustment of the first embodiment of the present invention; FIG. 6 is a partially enlarged view of FIG. 6; FIG. 7 is a perspective view of the second embodiment of the present invention; FIG. 8 is a bottom perspective view of the second embodiment of the present invention; and FIG. 9 is an exploded view of the second embodiment of the present invention; FIG. 10 is a cross-sectional view of a second embodiment of the present invention; FIG. 11 is a schematic diagram of a wafer picking up according to the second embodiment of the present invention; FIG. 12 is a schematic diagram of vertical adjustment of the second embodiment of the present invention; Three-dimensional view of the third embodiment. FIG. 14 is a bottom perspective view of the third embodiment of the present invention. FIG. 15 is an exploded view of the third embodiment of the present invention. FIG. 16 is a cross-sectional view of the third embodiment of the present invention. FIG. Is a schematic diagram of sucking a wafer according to a third embodiment of the present invention; FIG. 18 is a schematic diagram of vertical adjustment of the third embodiment of the present invention.

Claims (18)

An assembly structure for connecting suction nozzles for mounting a suction nozzle. The assembly structure includes: a fixing base, the fixing base has a magnetically permeable body and is provided with at least two positioning parts, and the positioning parts are respectively arranged on the fixing base; Different sides of the fixing base; a nozzle base which has a magnetically permeable body and is provided with the nozzle, the nozzle base is provided with a positioning column corresponding to the positioning portion, and corresponds to the positioning column It is inserted into the positioning part to connect the nozzle base to the fixing base, and to limit the horizontal displacement of the assembly structure of the fixing base and the nozzle base, so as to facilitate the operation and use of the nozzle. The assembly structure for connecting nozzles according to claim 1, wherein the nozzle base is provided with a recess for setting a magnet, and the fixing base has magnetic permeability to allow the fixing base and the nozzle base to pass through It is magnetically connected and combined to prevent leakage of magnetic force from the lower end of the nozzle. The assembly structure for connecting nozzles according to claim 2, wherein the fixing seat is provided with a joint portion on an upper end surface, the joint portion has a vacuum channel, and the magnet is provided with an opening for sharing with the nozzle base. Connected to the vacuum channel. The assembly structure for connecting nozzles according to claim 1, wherein the nozzle base is provided with at least one concave portion for setting a magnet for the magnetic base to be combined and connected between the fixing base and the nozzle base. . The assembly structure for connecting nozzles according to claim 4, wherein the fixing seat is provided with a joint portion on the upper end surface, the joint portion has a vacuum channel, and the nozzle base is provided with a vacuum hole for communicating with the fixing. Block vacuum channel. The assembly structure for connecting nozzles according to claim 2 or 4, wherein the nozzle base is provided with a sealing groove, the sealing groove is surrounded on the outside of the recess and is sandwiched between the fixing seat and the nozzle base A sealing member is provided in the sealing groove, and the sealing member is made of elastic material to ensure vacuum tightness. The assembly structure for connecting nozzles according to claim 6, wherein the seal is higher than the nozzle base and its height is matched between the lower end of the fixed seat and the upper end of the nozzle base. An adjustment space whose height is used to compensate for the height drop caused by the tilt. An assembly structure for connecting suction nozzles for mounting a suction nozzle. The assembly structure includes: a fixing base, the fixing base has a magnetically permeable body and is provided with at least two positioning parts, and the positioning parts have an upper width A narrow cone-shaped channel is formed at the bottom, and a lower end hole is formed on the lower end surface of the fixed seat; a nozzle base has a magnetically permeable body and is equipped with the nozzle, and the nozzle base is provided with a positioning corresponding to the positioning portion. A column, and the positioning column is correspondingly inserted into the lower end hole to assemble the nozzle base to the fixing base and limit the horizontal displacement of the fixing base and the nozzle base assembly structure; a seal, the seal A piece is clamped between the fixing base and the nozzle base, and the positioning portion uses the cone-shaped channel relative to the hole above the lower end hole to provide the relative displacement required by the positioning column when the nozzle base is inclined Space to facilitate the lower end surface of the nozzle to be attached to an inclined wafer surface, and the seal to maintain the tightness between the fixing seat and the assembly structure of the nozzle base. The assembly structure for connecting nozzles according to claim 8, wherein the tapered hole prop has an inclined surface which is clamped by 1 to 5 degrees with a vertical line. The assembly structure for connecting suction nozzles according to claim 9, wherein a preferred range of the angle θ between the inclined surface and the vertical line is between 2 degrees and 2.5 degrees. The assembly structure for connecting suction nozzles according to claim 8, wherein the positioning portions are respectively disposed at different sides of the fixing base. The assembly structure for connecting nozzles according to claim 8, wherein the nozzle base is provided with a recessed portion and a sealing groove, and the recessed portion is provided with a magnet to allow magnetic adsorption between the fixing base and the nozzle base. The combination connection can prevent the magnetic force from leaking from the lower end of the suction nozzle, and the sealing groove is surrounded on the outside of the concave portion, and the seal is provided in the sealing groove. The assembly structure for connecting nozzles according to claim 12, wherein the fixing seat is provided with a joint portion on an upper end surface, the joint portion has a vacuum passage, a bottom hole of the recess portion is provided with a vacuum hole, and the magnet is provided with an opening hole For communicating with the vacuum channel together with the recess. The assembly structure for connecting nozzles according to claim 8, wherein the nozzle base is provided with at least a recessed portion and a sealing groove, and the recessed portion is provided with a magnet for magnetically bonding between the fixing base and the nozzle base. The combination and connection by suction can prevent the magnetic force from leaking from the lower end of the suction nozzle, and the sealing groove is surrounded on the outside of the recess, and the seal is arranged in the sealing groove. The assembly structure for connecting nozzles according to claim 14, wherein the fixing seat is provided with a joint portion on an upper end surface, the joint portion has a vacuum passage, and the nozzle base is provided with a vacuum hole for communicating with the fixing. Block vacuum channel. The assembly structure for connecting nozzles according to claim 12 or 14, wherein the seal is higher than the nozzle base and its height is matched between the lower end of the fixed seat and the upper end of the nozzle base. An adjustment space is reserved, and the height of the adjustment space is used to compensate for the height drop caused by the tilt. The assembly structure for connecting suction nozzles according to claim 12 or 14, wherein the sealing member is made of an elastic material to ensure vacuum tightness. The assembly structure for connecting nozzles as described in claim 1 or 2 or 3 or 4 or 5 or 6 or 7 or 8 or 12 or 14 or 15 wherein both sides of the nozzle base are provided with handles to facilitate loading and unloading. .