TW201812956A - Substrate container with improved substrate retainer and door latch assist mechanism - Google Patents

Abstract

A substrate container with a substrate retainer mounted to a biased actuation linkage, and a door assembly with latch assist. Various configurations for biasing the substrate retainer in a substrate non-engagement position are disclosed. The biasing helps prevent the substrate retainer from hanging up due to friction that might counter the gravitational force that is otherwise relied upon for disengagement. The assembly may also include retention clips that positively secure the substrate retainer to the actuation linkage. The latch assist provides springs that deliver stored energy to assist in latching and unlatching the door assembly from the substrate carrier. The latch assist further provides off-center forces that bias the latching mechanism in either an unlatched or a fully latched configuration.

Description

Substrate container with improved substrate holder and door latch assist mechanism

This invention relates to apparatus for confining substrates, such as memory disks, silicon wafers, and the like, for transport, storage, or processing. More particularly, the present invention relates to a substrate holding structure and a door latching mechanism.

A particular container is used to transport and store the substrates before, during, and after processing of a plurality of batches of substrates, such as germanium wafers or disks. "Wafer" is used herein to refer to tantalum wafers, magnetic substrates, and the like. The substrate is processed into an integrated circuit and the magnetic disk is processed into a magnetic storage disk of a computer. Processing a wafer disk into a bulk circuit wafer typically involves several steps of reprocessing, storing, and shipping the disk. Due to the fragile nature of the disk and its extreme value, it is important to be properly protected and firmly maintained throughout this procedure. Accordingly, the substrate container is generally configured to receive a carrier that supports the substrate in a slot adjacent the peripheral edge of the substrate or on the support member. Some conventional containers are configured to hold an H-bar member carrier, such as a standard mechanical interface (SMIF) cassette. The SMIF cassette typically has a bottom opening at the base of a housing for accessing the H-bar carrier with the substrate. The SMIF cassette generally includes a substrate holder rotatably mounted to one of the series of movable links. The coupling of the bottom door to the outer casing exerts a force on the actuating link set that causes the substrate holder to swing into contact with the peripheral edge of the substrate. When engaged, the substrate holder prevents the substrate from sliding laterally relative to one of the vertical axes of the substrate. After removing the bottom door from the outer casing, actuating the link set disengages (swings away from) the substrate holder such that the substrate and the H-bar carrier are free to be removed from the outer casing having the bottom portion. It is known that the substrate holder of the conventional SMIF cassette "hangs up" after the bottom portion is removed. During an unplanned shutdown, when the door is removed, the actuation link set does not swing the substrate holder away from the substrate. This unplanned shutdown of the substrate holder can result in interference with substrate removal, which can result in catastrophic loss of one of the substrates due to subsequent interference during subsequent handling or mishandling by the robotic end effector. One of the wafer containers will be popular during the operation to prevent accidental shutdown of the substrate holder.

Various embodiments of the present invention provide for reliable, continuous biasing of the substrate holder from a substrate retention configuration into a substrate non-retaining configuration. The continuous bias supplements, reduces or otherwise replaces the dependence on gravity to detach the substrate holder from the substrates, thereby ensuring that the substrates are safely removed from the substrate container. In conventional SMIF cassettes, the weight of the substrate holder (i.e., gravity) provides the only urging force for detaching the substrate holder from the substrates after removal of the door. A substrate holder, typically made of a polymer, can produce a surface having an adhesion quality, particularly after cleaning the substrate container in which the substrate holder resides. The adhesion quality imparts a "stickiness" to the mechanism that has been observed to cause the substrate holder to be unexpectedly shut down and unsatisfactorily detached from the substrates. Various embodiments of the present invention provide for one of the actuation link sets to be continuously biased such that the actuation link set overcomes any viscous of the actuation link set from full engagement to full unlocking. This continuous biasing ensures that when the bottom section and the accompanying H-bar carrier are removed from the housing, the substrate holder will be emptied without wafers. In some instances, applying a biasing force to one of the actuation linkages may cause the actuation linkage to experience a force greater than the original design criteria such that the added force load cannot be maintained. For example, when the bottom section is in position and the actuation linkage is compressed between the bottom section and the biasing force of the actuation linkage, at a particular point on the linkage The stress (eg, at the clamp between the roller traversing the inner surface of the bottom section during actuation and/or at the pivot between the actuation link set and the substrate holder) may be comparable to gravity One of the bias designs is several times larger. Such additional forces caused by the bias may be sufficient to cause the added term of the actuating linkage assembly to become disassembled. For example, the roller can be disengaged from the substrate holder and/or the substrate holder can become removed from the pivots of the actuation linkage assembly. This disintegration of the actuating linkage assembly can result in a catastrophic effect equivalent to the aforementioned unplanned shutdown of the substrate holder. Accordingly, various embodiments of the present invention include additional securing assemblies that are configured to mate with existing substrate holders and/or actuation link sets to ensure load under increased load due to offset The integrity of the system, and generally increases the reliability of the actuation linkage (whether biased or unbiased). In some embodiments, the fixation components are designed to impose a lateral force (such as by a swaying tool) to become detached. Because the actuating linkage is not subjected to large lateral forces during operation, the stationary components are not displaced by the biasing force or the positive force of the operation (which is axial rather than lateral) except. Various embodiments of the present invention also reduce the torque requirements for installing a door assembly into the container portion. Conventional SMIF cassettes may also require more than 7 inch-in-lbf of torque to latch a door to the dome and unlock the door from the dome. A spring loaded configuration is disclosed that provides one of the force assistance for actuation of the door latch that assists in reducing the accompanying torque demand when latching the door to the dome and unlocking the door assembly from the dome. For example, tests have shown that during the latching operation of the door assembly within the dome, the torque demand for the latching operation is reduced by more than 50%. Structurally, in various embodiments of the present invention, a substrate container is disclosed that includes: a container portion including a door frame defining an opening; and a door configured to be mounted within the door frame. The actuator linkage assembly includes a frame, a substrate holder assembly and a mandrel pivotally mounted to the frame and to the substrate holder assembly, the frame being mounted to the container portion An inner wall, the substrate holder assembly can extend into the opening of the door frame. The actuation link assembly is selectively configurable in a substrate holding position, wherein the substrate holder assembly is in contact with the door and actuated by the door when the door is seated within the door frame . The actuation link assembly can also be selectively configured in a substrate non-retaining position, wherein the substrate holder assembly extends into the opening of the door frame when the door is not within the door frame. A biasing member is operatively coupled to at least one of the frame, the mandrel, and the substrate holder assembly, the biasing member biasing the actuation link set assembly in the substrate non-retaining position. In various embodiments of the invention, a door for a substrate container is disclosed that includes a front panel and a back panel that are joined to define an interior chamber. A latch cam is mounted to the door within the interior chamber and rotatable about a cam axis. A latch arm is disposed within the internal chamber and is operatively coupled to the latch cam. A bow spring includes a first end and a second end pivotally coupled to the latch cam, the second end being pivotally coupled to the latch arm. The latch cam can be rotated from a first angular orientation of the door in an unlocked configuration to a second angular orientation of the door in a fully latched configuration. The bow spring is in maximum compression at an intermediate angular orientation between the first angular orientation and the second angular orientation. In various embodiments of the invention, a substrate container is disclosed comprising: a container portion including a door frame defining an opening; and a door configured to be mounted within the door frame. The door includes a front plate and a back plate that are coupled to define an interior chamber, a latching cam that is mounted to the door within the interior chamber and rotatable about a cam axis, the latch The cam is rotatable from a first angle of the door in an unlocked configuration to a second angular orientation of the door in a latching configuration; a latch arm disposed within the interior chamber and Operatively coupled to the latch cam; and an arcuate spring having a first end and a second end pivotally coupled to the latch cam, the second end being pivotally coupled to The latch arm is in maximum compression at an intermediate angular orientation between the first angular orientation and the second angular orientation. In one or more embodiments, the actuating linkage assembly includes a frame, a substrate holder assembly, and a mandrel that is pivotally mounted to the frame and to the substrate holder assembly. The frame is mounted to an inner wall of one of the container portions, the substrate holder assembly extending into the opening of the door frame. In such embodiments, the actuation link assembly is selectively configurable in a substrate holding position, wherein the substrate holder assembly is in contact with the door when the door is seated within the door frame And actuated by the door. Also in such embodiments, the actuation link set assembly is selectively configurable in a substrate non-retaining position, wherein the substrate holder assembly extends to the door frame when the door is not within the door frame In the opening. A biasing member is operatively coupled to at least one of the frame, the mandrel, and the substrate holder assembly, the biasing member biasing the actuation link set assembly in the substrate non-retaining position. In various embodiments of the invention, a method for holding a substrate in a substrate carrier includes: configuring a consistent moving link assembly within the substrate carrier in a substrate holding position for use in a substrate Selectively retained within the substrate carrier; and when the actuation link assembly is in the substrate holding position, the actuation linkage assembly is biased in a substrate non-retaining position. In various embodiments of the invention, a substrate container includes a container portion including: a door frame defining an opening; a door configured to be mounted within the door frame; and an actuating linkage assembly. The actuation link set assembly includes: a frame mounted to an inner wall of the container portion; a spindle pivotally mounted to the frame; a substrate holder assembly pivotally mounted Mounted to the mandrel, the substrate holder assembly can extend into the opening of the door frame. A wheel axle can be mounted to one of the lower ends of the substrate holder assembly to hold the shaft to the substrate holder assembly by defining a sandwiched configuration at the lower end of the substrate holder assembly. In some embodiments, a wheel retaining clip is mounted to the substrate holder assembly and configured to prevent release of the shaft from the substrate holder assembly, the actuating link set assembly being selectively configurable in a substrate holding position, wherein the substrate holder assembly is in contact with the wheel and actuated by the door when the door seat falls within the door frame, the wheel being configured to roll along an inner surface of the door . In some embodiments, the wheel retaining clip includes a plurality of hook portions that are coupled to the substrate holder assembly to secure the wheel retaining clip to the substrate holder assembly. The substrate holder assembly can include a base defining a void. In some embodiments, at least one of the plurality of hook portions of the wheel retaining clip is coupled to a periphery of one of the apertures. The wheel retaining clip can include a registration structure for registering the wheel retaining clip within the aperture. In some embodiments, a yoke is disposed at the lower end of the substrate holder assembly that is mounted to the yoke. In some embodiments, the clip-on structure of the substrate holder assembly includes a resilient cantilever that applies a biasing force to the shaft to retain the shaft within the yoke, and the wheel retaining clip The configuration is configured to prevent deflection of the resilient cantilever of the clip-on structure, thereby preventing the clip-on structure from releasing the shaft. In various embodiments, at least one of the plurality of hook portions of the wheel retaining clip is coupled to the yoke. The wheel retaining clip can also be configured to resiliently displace the at least one of the plurality of hook portions about the yoke and clip onto the yoke during assembly. In some embodiments, at least one of the plurality of hook portions coupled to the yoke includes one of the introduction structures for sliding over the yoke during assembly. In various embodiments of the invention, a substrate container includes: a container portion including a door frame defining an opening; a door configured to be mounted within the door frame; and a consistent linkage link assembly. In some embodiments, the actuation linkage includes: a frame mounted to an inner wall of the container portion; a mandrel pivotally mounted to a proximal end of the frame and including a pivot a distal end side of the shaft; and a substrate holder assembly extendable into the opening of the door frame and pivotally mounted to the pivot rod of the spindle, the substrate holder assembly defining a a groove in which the pivot rod is rotatable relative to the substrate holder assembly. In some embodiments, a pivotal locking clip is mounted to the substrate holder assembly to capture the pivot rod between the substrate holder assembly and the pivotal locking clip. The pivotal locking clip can include a plurality of hook portions that are coupled to the substrate holder assembly to secure the pivotal locking clip to the substrate holder assembly. In some embodiments, the substrate holder assembly includes an axially extending portion defining one of the grooves, the axially extending portion defining an opposing axially extending edge, wherein the plurality of hook portions of the pivotal locking clip At least some of the opposing axially extending edges coupled to the axially extending portion. The pivotal locking clip can include: an arcuate body portion including opposite ends; and a first pair of hook portions extending from a first end of the arcuate body portion, wherein the first pair of hook portions are coupled to The substrate holder assembly secures the arcuate body portion with the pivot rod that abuts the mandrel. In some embodiments, the substrate holder assembly includes an axially extending portion defining one of the grooves, the axially extending portion defining an opposing axially extending edge. The first pair of hook portions are configured to engage the opposing axially extending edges of the axially extending portion. The first pair of hook portions can be configured for resilient displacement about the axially extending portion of the substrate holder assembly and clipped to the axially extending portion when assembled. Likewise, the first pair of hook portions can include an introduction structure configured to deflect the first pair of hook portions away from each other during assembly. In some embodiments, the pivotal locking clip includes a second pair of hook portions extending from a second end of the arcuate body portion, wherein the second pair of hook portions are coupled to the substrate holder assembly for abutment The pivot rod of the mandrel secures the arcuate body portion. The second pair of hook portions can be configured to engage the opposing axially extending edges of the axially extending portion. Like the first pair of hook portions, the second pair of hook portions can be configured for resilient displacement about the axially extending portion of the substrate holder assembly and clipped to the axially extending portion when assembled. In some embodiments, each hook portion of the second pair of hook portions includes an introduction structure that is configured to deflect the second pair of hook portions away from each other during assembly.

Cross-reference to related applications This application claims US Provisional Application No. 62/235, filed on October 1, 2015, and entitled "Substrate Container with Improved Wafer Retainer and Door Latch Assist Mechanism", Priority 682, And also proposes US Provisional Application No. 62/339, filed on May 20, 2016 and entitled "Substrate Container with Improved Substrate Retainer and Door Latch Assist Mechanism", Priority 404, The entire contents of these patents are incorporated herein by reference. Referring to Figures 1 to 6, A substrate container 10 is depicted in accordance with an embodiment of the present invention. The substrate container 10 includes: a dome or container portion 12, It has a consistent moving link assembly 30 mounted thereto, 30a; And a door assembly 14, It serves to selectively affect the closure of the substrate container 10. The particular embodiment depicted is a bottom open standard mechanical interface (SMIF) cassette, Wherein the container portion 12 has a substantially three-dimensional shape and has a front wall 20, a rear wall 16, Two side walls 18 and 22, A top portion 24 and a bottom assembly 26. The bottom assembly 26 includes a door assembly 14, The door assembly 14 can be seated within a door frame 28 of the container portion 12 to form a housing 27. A plurality of substrates 29 having edges 29a can be received within housing 27 and can be suspended by an H-bar carrier (not depicted). The present invention discloses several embodiments of an actuating linkage assembly, They are generally or collectively referred to by element symbol 30 (eg, Actuating the linkage assembly 30), And individually by component symbol 30 followed by a letter suffix (for example, Actuating the linkage assembly 30a, As discussed above). The various actuating linkage assemblies 30 include a number of components and attributes that are identical to the actuation linkage assembly 30. They are indicated by similarly numbered component symbols. In the depicted embodiment, The actuation link set assembly 30a hangs from the top portion 24 adjacent one of the inner surfaces 31 of the rear wall 16. Alternatively or additionally, Actuating the linkage assembly 30a can be with the wall 16, 18. One of 20 or 22 is operatively coupled, Or coupled to the door assembly 14. The actuation link assembly 30a can include a frame 32, The frame 32 includes an upper cross member 45 and a lower cross member 46. They are separated by a pair of lateral members 47 (Figs. 3 and 4). The frame 32 is pivotally mounted to an upper mandrel 34 and a lower mandrel 36 of the frame 32 at a pivot seat 37 defined in the lateral member 47 of the frame 32. The pivot seat 37 further defines a pivot axis or axis of rotation 39 that extends laterally through the frame 32. The upper mandrel 34 and the lower mandrel 36 can each include a struts 38 extending therefrom, Each struts 38 includes a proximal end side 41 and a distal end side 42. The proximal side 41 is pivotally mounted to the frame 32. The distal ends 42 each support a cylindrical pivot rod 44. In a particular embodiment, A biasing member 40 is operatively coupled to the frame 32 and the lower mandrel 36. For a depicted embodiment of the actuating linkage assembly 30a, The biasing member 40 is coupled to one of the coil springs 40a of the lower spindle 36, The coil spring 40a is concentric about the axis of rotation 39 of the lower mandrel 36. In addition or in the alternative, Biasing member 40 / coil spring 40a can be coupled to upper mandrel 34. in the text, The biasing components are collectively or generally referred to by component symbols 40. And individually identified by component symbol 40 followed by a letter suffix (eg, Coil spring 40a, As discussed above). In various embodiments, The actuation link assembly 30a includes a substrate holder assembly 50, The substrate holder assembly 50 includes a base portion 54 and an engagement portion 56 operatively coupled to the cylindrical pivot rod 44. The substrate holder assembly 50 can include a overmold portion 57 to prevent chipping due to contact with the substrate 29, Indented or worn, It is described in International Publication No. WO 2007/146019 to Smith et al., which is owned by the applicant of the present application. The entire disclosure of the present invention (except for the expressly defined and claimed scope of the disclosure) is hereby incorporated by reference. The base portion 54 of the substrate holder assembly 50 can include a pair of track portions 58 and 59 (Fig. 6) separated by lateral members 61-66. A center or longitudinal axis 67 is defined at the midpoint of the span of the transverse members 61-66. An upper clip assembly 68 can extend from the cross members 62 and 63. An axially extending portion 74, such as a central bridging member, can extend between the cross members 62 and 63. And extending between the cross members 64 and 65, And can be shaped to receive a recess 76 of the cylindrical pivot rod 44 when the substrate holder assembly 50 is operatively coupled to the actuation link set. Each axially extending portion 74 can be characterized as having opposing axially extending edges 75 and 77. An axially extending portion 87 (such as one of the bridging plates extending between the transverse members 65 and 66) can cooperate with the track portions 58 and 59 and the transverse members 65 and 66 to define a pair of apertures 89. A spacer 88 can project from the back side 51 of the substrate holder assembly 50. The gapper 88 is depicted as extending from the cross member 65. More than one gap member 88 can be utilized. One of the yokes 90 having a free end 92 extends from the transverse member 66 along the central axis 67. One of the wheels 94 and the shaft 96 are operatively coupled to the yoke 90. In this configuration, The shaft 96 is mounted to the yoke 90 near the free end 92, The outer radius of the wheel 94 is caused to protrude beyond the free end 92 of the yoke 90. In various embodiments, A clip-on structure 98 is defined at one of the lower ends 99 of the substrate holder assembly 50, The clip-on structure 98 is configured to hold the shaft 96 to the substrate holder assembly 50. In some embodiments, The clip-on structure 98 includes an elastic cantilever 101, The resilient cantilever 101 applies a biasing force to the shaft 96 to retain the shaft 96 within the yoke 90. In various embodiments, The actuation link assembly 30a is selectively configurable in a substrate holding position, As depicted in Figure 2, Where the door assembly 14 is seated in the door frame 28, The substrate holder assembly 50 is in contact with the door assembly 14 and is actuated by the door assembly 14. In this embodiment, The actuation link assembly 30a can also be selectively configured in a substrate non-retaining position, As depicted in Figure 1, Where the door assembly 14 is not in the door frame 28, The substrate holder assembly extends into an opening in the door frame 28. Functionally, The biasing member 40 (coil spring 40a) acts to bias the actuation link set assembly 30a in the non-retaining position of FIG. This bias helps actuate the linkage assembly 30a against any friction between the moving components, After the door assembly 14 is removed from the substrate container 12, The substrate holder assembly 50 is detached from the substrate 29. Referring to Figure 7, The actuating linkage assembly 30b is depicted in accordance with an embodiment of the present invention. The actuating link set 30b includes a biasing member 40b, The biasing member 40b includes an extension 102 that extends laterally beyond the lower shaft 36 of the pivot seat 37, The extension portion 102 includes a rotation stop 104 at a distal end 106. In the depicted embodiment, The extension portion 102 extends laterally beyond the frame 32, The rotation stop 104 is caused to engage the inner surface 31 of the rear wall 16. The extension portion 102 can extend laterally along the pivot axis 39. As depicted in Figure 7. In various embodiments, The rotation stop 104 is configured to extend perpendicular to the pivot axis 39 and in a plane parallel to one of the struts 38 to bias the actuation link set 30b. therefore, The actuation link set assembly 30b is biased in a non-retaining configuration of the substrate. Functionally, After the door assembly 14 is seated in the door frame 28, The substrate holding assembly 50 is rotated and translated into the substrate container 10, Rotating the lower mandrel 36, The rotation stop 104 prevents rotation of the distal end 106 of the extended portion 102 of the lower mandrel 36. At least when the door assembly 14 is seated within the door frame 28, A differential rotation along the lower mandrel 36 produces a twist. Torsion produces a biasing torque, The biasing torque biases the actuation link assembly 30b toward the substrate non-retaining configuration. However, this is overcome by the door assembly 14 being seated within the door frame 28. After the door assembly 14 leaves the door frame 28, The biasing torque returns the actuating linkage assembly 30b to the substrate non-retaining configuration. Embodiments in which the rotation stop 104 engages the frame 32 rather than the inner surface 31 are also contemplated. Similarly, It should be understood that The contact inner surface is not limited to the inner surface 31 of the rear wall 16, However, it can be positioned adjacent to any inner surface of the rotational stop 104. In addition, An embodiment in which one of the biasing members 40b extends from the upper mandrel 34 is also contemplated. Referring to Figures 8 to 11, A consistent moving link set assembly 30c is depicted in accordance with an embodiment of the present invention. One of the biasing members 40c of the actuating linkage set 30c includes a pair of spring arms 122 extending from the frame 32 to contact the struts 38 of the upper mandrel 34. In the depicted embodiment, When the actuation link set assembly 30c is moved from the substrate non-retaining configuration (Figs. 8 and 9) to the substrate holding configuration (Figs. 10 and 11), The spring arm 122 slidingly contacts the upper mandrel 34. in the text, "Sliding contact" is the ability of a first component to remain in contact with the second component as it moves relative to a first component, The second component is caused to slide over a surface of one of the first components. The spring arms 122 can be formed generally parallel to the frame 32. It is depicted in dashed lines in Figure 8. Referring to Figure 12, A consistent moving link set assembly 30d is depicted in accordance with an embodiment of the present invention. One of the biasing members 40d of the actuating linkage set 30d also includes a pair of spring arms 122 extending from the frame 32. however, For actuating the linkage assembly 30d and the biasing element 40d, The spring arms 122 extend toward the substrate holder assembly 50 and are coupled to the substrate holder assembly 50. Functionally, For actuating the linkage assembly 30c and 30d, The spring arms 122 of the biasing members 40c and 40d are resiliently displaced by the struts 38 of the upper mandrel 34. The elastic displacement exerts a biasing force on the upper mandrel 34 or the substrate holder assembly 50 to bias the upper mandrel 34 or substrate holder assembly 50 toward the frame 32. The biasing force is overcome by the force exerted by the door assembly 14 on the substrate holder assembly 50 by seating the door assembly 14 within the door frame 28. This biasing force effectively biases the actuation link set assemblies 30c and 30d into the substrate non-retaining configuration (Fig. 8, Figure 9 and Figure 12). Embodiments utilizing a single spring arm 122 or more than two spring arms 122 for the actuating linkage assembly 30c or 30d are also contemplated. In addition, Embodiments in which one of the biasing members 40c or 40d acts on the lower mandrel 36 are also contemplated. Referring to Figures 13 to 16, A consistent moving link set assembly 30e is depicted in accordance with an embodiment of the present invention. One of the biasing members 40e of the actuation link set 30e includes a continuous elastic band 132 extending from the frame 32 to the substrate holder assembly 50. In the depicted embodiment, The continuous elastic band 132 is coupled to the lower cross member 46 of the frame 32. Also in this embodiment, The substrate holder assembly 50 includes a mounting structure 134 for mounting a continuous elastic band 132. Functionally, As the actuation link assembly 30e moves from the substrate non-retaining configuration (Figs. 13 and 14) to the substrate retention configuration (Figs. 15 and 16), The resiliently displaced continuous resilient member 132 applies a biasing force to bias the substrate holder assembly 50 toward the frame 32. This force is overcome by the force exerted by the door on the substrate holder assembly 50 by seating the door assembly 14 within the door frame 28. This biasing force effectively biases the actuation link set assembly 30e into the substrate non-retaining configuration (Figs. 15 and 16). Embodiments utilizing a discontinuous resilient member and embodiments utilizing a plurality of resilient members (continuous or discontinuous) are also contemplated. In addition, It is also contemplated that one of the biasing members 40e acts on one or more of the mandrels 34, 36 is coupled to the embodiment of the frame at a location other than the substrate holder assembly 50 and/or at a location other than the lower cross member 46. Referring to Figures 17 to 18, A consistent moving link set assembly 30f is depicted in accordance with an embodiment of the present invention. The actuating linkage assembly 30f includes a number of components and attributes that are identical to the actuation linkage assembly 30c. They are indicated by the same reference numerals. In addition, The actuation linkage assembly 30f includes a wheel retaining clip 142 and a pivot locking clip 144. The wheel retaining clip 142 is mounted to the substrate holder assembly 50 and configured to prevent the clip-on structure 98 from accidentally releasing the shaft 96. A pivot lock clip 144 is mounted to the substrate holder assembly 50 to capture the cylindrical pivot rod 44 between the substrate holder assembly 50 and the pivot lock clip 144, The substrate holder assembly 50 is thereby locked to the cylindrical pivot rod 44 of the respective mandrel 34. Although the actuating linkage assembly 30f includes many of the same components and attributes as the actuation linkage assembly 30c, However, the wheel retaining clip 142 and the pivotal locking clip 144 can be implemented using any of the linkage assembly 30 of the present invention. Referring to Figures 19 to 22, A wheel retaining clip 142 is depicted in accordance with an embodiment of the present invention. The wheel retaining clip 142 includes a plate portion 146. It has an inner mounting surface 148 and an outer surface 152 opposite the inner mounting surface 148. A pair of arm portions 154 extend from the outer surface 152 and overtake one of the bottom edges 153 of the plate portion 146. The inner mounting surface 148 can include a plurality of features 156 that extend in a direction 157. The direction 157 is perpendicular to the inner mounting surface 148, Feature 156 includes hook portion 158 and registration structure 162. Each arm portion 154 includes a hook portion 164 that also extends in direction 157. In some embodiments, Each arm portion 154 includes a stop structure 165 at a distal end 167. Referring to Figures 23 to 27, The mounting of a wheel retaining clip 142 is depicted in accordance with an embodiment of the present invention. When assembling, The feature 156 of the inner mounting surface 148 is aligned with the aperture 89 of the substrate holder assembly 50. The wheel retaining clip 142 is mounted to the substrate holder assembly 50, Each hook portion 158 extending from the plate portion 146 is coupled to one of the respective ones of one of the apertures 89 of the substrate holder assembly 50, The registration structure 162 is disposed within the apertures 89. The arm portion 154 is configured to span the wheel 94, And the hook portion 164 spans and engages the opposite side of the yoke 90. In some embodiments, Each hook portion 164 includes an introduction structure 166 to facilitate sliding of the hook portion 164 over the opposite sides of the yoke 90 during assembly. When the hook portion 164 slides over the yoke 90, The introduction structure 166 deflects the hook portion 164. The deflection of the hook portion 164 is elastically twisted by the arm portion 154, The elastic bending of the hook portion 164 or a combination thereof is caused. Once the wheel retaining clip 142 is installed, The elasticity of the arm portion 154 and/or the hook portion 164 causes the hook portion 164 to snap into place. Thereby, the yoke 90 is caught between the hook portions 164. Functionally, In the depicted embodiment, The wheel retaining clip 142 prevents the wheel 94 and shaft 96 from becoming accidentally removed from the clip-on structure 98 of the substrate holder assembly 50. In some embodiments, The fixation of the shaft 96 prevents the deflection of the resilient cantilever portion 101 of the clip-on structure 98, The shaft 96 is not released from the clip-on structure 98, This is done unless the wheel retaining clip 142 is removed. The wheel retaining clip 142 is secured to the substrate holder assembly 50 by a hook portion 158 of the plate portion 146 joined at the periphery of the aperture 89 and by a hook portion 164 that is clipped to the yoke 90. Registration structure 162 helps align plate portion 146 with aperture 89, And maintaining a stability and a substantially fixed relationship between the retaining clip 142 and the substrate holder assembly 50 when subjected to axial and/or lateral forces during operation. As depicted in Figures 26 and 27, The stop structure 165 cooperates with the yoke 90 to provide additional capture of the shaft 96. Referring to Figures 28 to 30, A pivotal locking clip 144 is depicted in accordance with an embodiment of the present invention. The pivot lock clip 144 includes a body portion 170 and a plurality of hook portions 172 extending from the body portion 170. Body portion 170 includes opposing ends 174 and 176. In the depicted embodiment, The plurality of hook portions 172 include a first pair of hook portions 178 extending from one of the opposite ends 174 and a second pair of hook portions 182 extending from the other of the opposite ends 176. The body portion 170 can be arcuate. In various embodiments, Some or all of the plurality of hook portions 172 are configured to have an introduction structure 184. Referring to Figures 31 to 34, Assembly of the pivotal locking clip 144 to the substrate holder assembly 50 is depicted in accordance with an embodiment of the present invention. When assembling, The first pair of hook portions 178 are coupled to the substrate holder assembly 50 to secure the body portion 170 against the cylindrical pivot rod 44 of the mandrel 34 or 36. In the depicted embodiment, A plurality of hook portions 172 are coupled to opposing axially extending edges 75 and 77 of the axially extending portion 74. Some or all of the plurality of hook portions 172 can be configured for resilient displacement about the axially extending portion 74 of the substrate holder assembly 50 for clamping onto the axially extending portion 74. Functionally, A plurality of hook portions 172 are coupled to the substrate holder assembly 50 to secure the pivotal locking clips 144 to the substrate holder assembly 50, The cylindrical pivot rods 44 of the respective mandrels 34 or 36 are positively locked within the recesses 76 of the axially extending portion 74. The introduction structure 184 is configured such that when the pivot lock clip 144 is pressed onto the axially extending portion 74 during assembly, The hook portions 172 of a given pair of hook portions 178 and 182 are deflected away from each other. The pivot lock clip 144 cannot be removed from the axially extending portion 74 by the axial force applied to the wheel 94. Real facts, Removal of the pivotal locking clip 144 from the axially extending portion 74 requires (such as using a swaying tool) to deflect the first pair of hook portions 178 and/or the second pair of hook portions 182 outwardly. Referring to Figures 35 to 40D, A door assembly 14 is depicted in accordance with an embodiment of the present invention. The door assembly 14 includes a front panel 202 (FIG. 1) and a back panel 204. In various embodiments, The back plate 204 includes an outer peripheral portion 206; The outer peripheral portion 206 can also be formed as part of the front panel 202. Or it may be defined by a combination of the front plate 202 and the back plate 204. The outer peripheral portion 206 also defines a latching tip aperture 207 (Fig. 35) that passes through the outer peripheral portion 206. The front plate 202 and the back plate 204 are joined to define an interior chamber 208 of the door assembly 14. The door assembly 14 includes a latch assembly 210. In various embodiments, The latch assembly 210 includes a latch cam 212, The latch arm 214 and the bow spring 216 are coupled to the latch cam 212 and the latch arm 214. The latch cam 212 is mounted to the door assembly 14 within the interior chamber 208, It is rotatable about a cam axis 218. The latch cam 212 includes a front side 222 (Fig. 36) and a back side 224 (Fig. 37). The front side 222 can include a key aperture 226 defined thereon. The key apertures 226 are accessible through arcuate through slots 227 (FIG. 41) formed in the front panel 202. In the depicted embodiment, The back side 224 includes vanes 228 that are concentrically disposed about the cam axis 218. The back side 224 can also include a cam surface 232 that defines a flat surface 233 that leads to the ramp or sloped surface 234, The cam surface 232 is also concentrically disposed about the cam axis 218. In some embodiments, The latch cam 212 also includes a radially projecting tab 236. Each of the radially projecting tabs 236 can define a mounting aperture 238. A bow spring 216 is mounted through the mounting hole 238. In some embodiments, The door assembly 14 includes one or more cam stops 239, They are positioned to engage the latch cam 212 and prevent the latch cam 212 from rotating beyond a particular angular rotation. For example, Cam stop 239 can extend from backing plate 204 and be positioned to engage one or more of radially projecting tabs 236, Such as depicted in Figures 35 and 39. The latch arm 214 is disposed within the interior chamber 208, The latch arms 214 each include a cam interface profile 242 at a proximal end portion 244 and a latch tip 246 at a distal end portion 248. The latch arms 214 are aligned such that the latch tips 246 extend laterally and retracted through the latch tip apertures 207 of the outer perimeter portion 206. In various embodiments, The latch arm 214 is fitted with a cam bearing 252 at the proximal end portion 244. The latch arm 214 can also define an elongated aperture 254 having a longitudinal axis 255, The shaft extends in a direction between the proximal end portion 244 and the distal end portion 248. The latch arm 214 can also include a mounting hole 256. A bow spring 216 is mounted to the latch arm 214 through the mounting aperture 256. Various bow springs 216 can be utilized, E.g, The bow springs 216a to 216d are respectively described in Figs. 40A to 40D. The bow springs are generally and collectively referred to as bow springs 216, And individually by element symbol 216 followed by a letter suffix (for example, The bow spring 216a) of Figure 40A indicates. The bow spring 216 is configured to surround various spacers and other structures that make up the door assembly 14, At the same time, a replenishing force is still applied between the latch cam 212 and the latch arm 214. The bow springs 216 each include a first end 262 and a second end 264. And each of the at least one arcuate segment 266 between the first end 262 and the second end 264 is defined over at least a portion of the arcuate spring 216. In the depicted embodiment, A first end 262 of each bow spring 216 is pivotally coupled to a respective one of the tabs 236 of the latch cam 212, The second end is pivotally coupled to each of the latch arms 214. The bow spring 216 also defines a free or no load operating length 268, It is defined as a straight line between the first end 262 and the second end 264. The bow spring 216 can be formed from a resilient wire material such as stainless steel. Polymer bow springs 216 are also contemplated. Referring to Figures 41 and 42, A door assembly 14a is depicted in accordance with an embodiment of the present invention, It is equipped with a latch mechanism 210a having one of the S-shaped bow springs 216d of Fig. 40D. The door assembly 14a and the latch mechanism 210a include many of the same components and attributes as the door assembly 14 and the latch mechanism 210. They are indicated by the same reference numerals. The front panel 202 is depicted as being transparent or translucent in Figures 41 and 42 to illustrate the internal operation of the door assembly 14a. In addition, The door assembly 14a includes a wear pad 270 that is adhered to the inside of the front panel 202, The S-shaped bow spring 216d can abut against the wear pads during actuation of the latch assembly 210a. Similarly, The door assembly 14a includes a guide assembly 275 (Fig. 42) coupled to the latch arm 214 at the elongated aperture 254 and includes a hub 276 and a biasing member 278. The particular biasing member 278 is depicted as a coil spring, However, the technician expects and is easy to understand other biasing components. The guide assembly 275 can also include a washer or bushing 282 disposed between the biasing member 278 and the latch arm 214. Functionally, In the depicted embodiment, The guide assembly maintains the alignment of the latch arms 214, The latching tip 246 is caused to extend through the latch tip aperture 207 and retract in a desired manner. The hub 276 and the elongated aperture 254 maintain the necessary alignment in the extension and retraction directions, The biasing member 278 biases the latch arm 214 against the guide 279 (Figs. 44A and 44B). The latching tip 246 is caused to pass through the aperture at a desired distance between the front panel 202 and the backing plate 204. A washer or bushing 282, which may be made of a low friction or self-lubricating material, slidably contacts the latch arm 214, The latch arm 214 is thereby enabled to translate laterally while being biased against the guide 279. Referring to Figures 43A to 43C, 44A and 44B, The operation of the latch mechanism 210a is depicted in an embodiment of the invention. 43A to 43C illustrate the operation of the bow spring 216, 44A and 44B illustrate the interaction between the latch cam 212 and the latch arm 214. Although the particular bow spring 216 is depicted as an S-shaped bow spring 216d, However, any of the bow springs 216 of the present invention will function in a similar manner. The latch cam 212 is rotatable from a first angular orientation 272 of the door in an unlocked configuration by a constant angular angle θ (Figs. 39 and 43C) to a second angular orientation 274 of the door in a fully latched configuration. (Figure 39). During this rotation, The bow spring 216 is subjected to FIG. 43A, 43B and 43C are respectively depicted as an operation length 268a, One of the operational lengths 268 of 268b and 268c varies. The operating lengths 268a through 268c are determined by the orientation of the latch cam 212 relative to the cam interface profile 242 of the latch arm 214. which is, The bow spring 216 follows the distance between the mounting holes 238 and 256 and is defined by this distance. therefore, The bow spring 216 can be maintained in a compressed state. Wherein the operation length 268a, 268b and 268c are shorter than the free operating length 268. In various embodiments, Latch mechanism 210, The operation of 210a is as follows: The operating length 268a is in the unlocked configuration (ie, The free length 268 of the bow spring 216 under the first angular orientation 272 is short (Fig. 43A), The bow spring 216 is caused to exert a compressive force between the latch cam 212 and the latch arm 214. As the latch cam 212 rotates through actuation, The latch cam 212 passes through an intermediate angle orientation 273 (Fig. 43B), Wherein the bow spring 216 is in one of the states of maximum compression (Fig. 43B), Wherein the length of operation 268b is at a minimum length during the actuation process (ie, The mounting holes 238 and 256 are closest to each other). As the latch cam 212 continues to pass through the intermediate angle orientation 274 to the fully latched configuration (second angular orientation 274) (Fig. 43C), The bow spring 216 presents an operational length 268c, It still maintains a compressive load on the bow spring 216, But it is not as large as one of the compression loads in the intermediate angle orientation 273. Functionally, The compressed state of the bow spring 216 acts upon latching the door assembly 14a to force the latch mechanism 210, Actuation of 210a. During the actuation period, The compression of the bow spring 216 advances the latch arm toward the latch configuration, This provides assistance. which is, The compression of the bow spring 216 forces the latch cam 212 to rotate toward the full latch configuration and the interaction between the cam blade 228 (Fig. 37) and the cam interface contour 242 (Fig. 38) drives the latch arm 214 to the second angular orientation. 274 latch configuration. In addition, Configuring the latch mechanism 210, The 210a causes the bow spring 216 to be at a maximum compressive force in the intermediate configuration 273 to also assist in securing the latch mechanism in the unlocked configuration of the first angular orientation 272 or in the fully latched configuration of the second angular orientation 274. which is, Because the bow spring 216 exerts a maximum compressive force under the intermediate angular orientation 273, Thus the bow spring 216 is believed to force or assist in forcing the latch cam 212 into an eccentric orientation (ie, Oriented toward a first angular orientation 272 or a second angular orientation 274). The eccentric force also helps prevent false rotation of the latch cam 212. Simultaneously, In various embodiments and with further reference to Figures 44A and 44B, The latch cam 212 and the latch arm 214 interact as follows: In the unlocked configuration of the first angular orientation 272, The cam bearing 252 engages a flat surface 233 of the cam surface 232 of the latch cam 212, The latch tip 246 is retracted (Fig. 44A). In the depicted embodiment, The flat surface 233 is sized such that when the latch cam 212 reaches or passes through the intermediate angle orientation 273 of Figure 43B, The cam bearing 252 remains on the flat surface 233. Further attention should be paid to In the depicted embodiment, The latching tip 246 extends after reaching the intermediate angle orientation 273, As depicted in Figure 43B. After passing through the intermediate angle orientation 273, Cam bearing 252 rides over inclined surface 234 of cam surface 232, It causes the latch arm 214 to become tilted within the interior chamber 208 of the door assembly 14a. The tilt of the latch arm 214 deflects the extended latch tip 246 toward the front panel 202 of the door assembly 14a. The deflected latching tip 246 engages the door frame 28 to apply a drop to the door assembly 14a to better seal the door assembly 14a within the bottom assembly 26. The configuration of Figures 43C and 44B (where the latch tip 246 extends laterally and deflects toward the front panel 202) is referred to herein as a "fully latched" configuration. Referring to Figures 45A and 45B, Predictions 292 and 294 of the torque requirements for actuating the latch mechanisms 210a and 210 are presented separately for embodiments of the present invention. The prediction of Figure 45A is used to actuate the latch mechanism 210a having an S-shaped bow spring 216d. The prediction of Figure 45B is used to actuate the latch mechanism 210 illustrated in Figure 35, It includes a bow spring 216 that approximately corresponds to the bow spring 216b of Figure 40B. As the latch mechanism is actuated from the first angular orientation 272 to the second angular orientation 274 (ie, From unlocking to a fully latched configuration) Both predictions 292 and 294 exhibit predicted torque in Newton-meter (Nm) in discrete angular orientation. Similarly, The respective door assemblies 14a and 14 are not seated in a container portion 12; which is, Predicting the torque requirements for door assemblies 14a and 14 separately, There is no additional torque requirement required to seat the latch tip 246 within the bottom assembly 26. The predicted predictions presented in Figures 45A and 45B are at the end of the cam rotation (ie, In the second angle orientation 274) one of the maximum torque, One of the peak torques during no spring compression is significantly increased. which is, For the prediction 292 of Figure 45A representing the S-shaped bow spring 216d, The torque at the second angular orientation 274 is within 20% of the maximum predicted torque (local maximum 296). For the prediction 294 of Figure 45B, which represents an arcuate spring 216 that is similar to one of the bow springs 216b, The torque at the second angular orientation 274 is within 50% of the maximum predicted torque (local maximum 296). These characteristics are attributed to the fact that one end of the spring is mounted to the moving latch arm 214, It acts directly on the latch arm 214 and assists in the rotation of the latch cam 212. therefore, Although the bow spring 216, 216d does store some energy to provide an effective eccentric effect, But given the spring 216, Some of the energy of 216d acts on the latch arm 214 during rotation of the latch cam 212, Thus providing a more uniform torque profile than would be provided by acting on only one of the springs on the cam. The characteristics of each group's predictions 292 and 294 are two local maxima 296 and 298. There is a local minimum value 299 defined between it and the like. The local minimum value approximately corresponds to the intermediate angle orientation 273 (eg, Figure 43B). The portion of predictions 292 and 294 from θ = 0° to about θ = 50° and passing through the local maximum 296 represents the latching arm 214 from a retracted configuration (eg, Figure 43A) actuated to an extended configuration (eg, Figure 43B) The required torque. The portion of predictions 292 and 294 from about θ = 50° to about θ = 86° and passing through the local maximum 298 represents the latch arm 214 (eg, Figure 43C and Figure 44B) the torque required for tilting. A minimum value of 299 indicates that it is provided to approximate the bow spring 216d, 216 (for example, Figure 43B) The maximum compression force assisted. Referring to Figures 46A and 46B, Test results 312 and 314 comparing the torque demand of the operating door assembly 14a with the torque demand for operating a conventional SMIF card are presented. In FIGS. 46A and 46B, "Conv" indicates the familiar SMIF card, And "Prototype" indicates the door assembly 14a of the present invention. "Door Only" means an independent door (ie, It is not seated in a substrate container and "in the dome" is a door that is seated in a substrate container. Test result 312 presents a torque demand for latching the conventional door and door assembly 14a, Test result 314 presents a torque demand for unlocking the conventional door and door assembly 14a. The torque units of Figures 46A and 46B are in-lbf. For the "single door" configuration, Compared with the "Conv" custom door, Both the latching torque and the unlocking torque are slightly higher for the "prototype" (door assembly 14a). however, For the "in the dome" configuration, Compared with the Xizhimen, Both the latching torque and the unlocking torque are significantly smaller for the "prototype" door assembly 14a. This unexpected result can be attributed to the force provided by the bow spring 216d coupled to the latch cam 212 and the latch arm 214. which is, Due to the compression bow spring 216, 216d requires more work, The torque can increase during the first half of the cam rotation, Then the maximum torque is reduced, This is because the torque provided by the spring during the second half of the rotation already contains the other without the bow spring 216, In the case of 216d, it is necessary to store energy. Referring to Figure 47, A modified attachment 320 for one of the bow springs 216 is depicted in accordance with an embodiment of the present invention. For the depicted embodiment, A bushing 322 is coupled to the first end 262 of the bow spring 216 and to the radial projection tab 236 of the latch cam 212. The bushing 322 provides a larger diameter shaft 324 with respect to the diameter of the wire of the bow spring 316, The bushing 322 is rotatable within the radially projecting tab 236. The bushing 322 can also be configured to provide a top bearing portion 326. The top bearing portion 326 protrudes above the front surface 222 of the radial projection tab 236 and the latch cam 212. Referring to Figures 48A and 48B, Another modified attachment 340 of bow spring 216 in accordance with an embodiment of the present invention is depicted. In the depicted embodiment, The first end 262 of the bow spring 216 defines a ring or eyelet 342, The ring or eyelet 342 is sized to rotate about one of the hubs 344 extending from the radial projection tab 236. In one or more embodiments, A cover pin 346 is sized to pass through the eyelet 342 and snap into the hub 344, Thereby the first end 262 of the bow spring 216 is captured. The cover pin 346 can also include a top bearing portion or wear pad 348. The top bearing portion or wear pad 348 projects above the front surface 222 of the radial projection tab 236 and the latch cam 212. Functionally, The larger diameter of the larger diameter shaft 324 or hub 344 of the bushing 322 relative to the wire diameter of the bow spring 216 will impart a load spread over a larger area. Thereby the stress is reduced and particle generation is reduced. The top bearing portions 326 and 348 provide a large surface area that can contact the front plate 202 during actuation and reduce wear and concomitant particle generation relative to the direct contact bow spring 216. Referring to Figure 49, One of the modified ends 360 for the second end 264 of the bow spring 216 is depicted in accordance with an embodiment of the present invention. For the depicted embodiment, A bushing 362 is coupled to the second end 264 of the bow spring 216 and to the latch arm 214. Bushing 362 provides a larger diameter shaft 364 ("larger" diameter relative to bow spring 216), The shaft 364 extends into and is rotatable within the latch arm 214. Bushing 362 can also be configured to provide a top bearing portion 366. The top bearing portion 366 can also define a laterally extending slot 368, The laterally extending slot 368 extends from the center of the top bearing portion 366 to its edge. The bushing defines a pivot axis 372, The second end 264 of the bow spring 216 rotates about the pivot axis 372. Functionally, The larger diameter shaft 364 of the bushing 362 relative to the wire diameter of the bow spring 216 will impart a load spread over a larger area. Thereby reducing stress and accompanying particle generation. The top bearing portion 366 provides a large surface area that can contact the front plate 202 during actuation and reduces wear and concomitant particle generation relative to the direct contact bow spring 216. The laterally extending slot 368 enables the second end 264 of the bow spring 216 to be easily snapped into the bushing 362 during assembly, Also, when the pivot arm 214 is tilted during actuation (Fig. 44B), the second end 264 of the bow spring 216 can be angled from parallel to the pivot axis 372 (Fig. 44A) to be non-parallel to the pivot axis 372. Each of the additional features and methods disclosed herein can be used alone or in combination with other features and methods to provide improved devices and methods for making and using the same. therefore, Combinations of the features and methods disclosed herein may not necessarily practice the invention in the broadest sense of the invention. Instead, the representative and preferred embodiments are specifically described. Various modifications to the embodiments will become apparent to those skilled in the <RTIgt; For example, One of ordinary skill in the relevant art will recognize that The various features described for different embodiments may be combined with other features, alone or in different combinations, Do not combine and recombine. Similarly, The various features described above should be considered as example embodiments. Rather than limiting the scope or spirit of the invention. One of ordinary skill in the relevant art will recognize that Various embodiments may include fewer features than those illustrated in any of the individual embodiments described above. The embodiments described herein are not intended to be exhaustive as one of the ways in which the various features can be combined. therefore, The embodiments are not mutually exclusive combinations of features; But, As the average technician should understand, The patentable scope can encompass a combination of different individual features selected from different individual embodiments. Any incorporation by way of a reference to the above documents is not incorporated into the subject matter of the disclosure. Further incorporation by reference to the above documents is not intended to be incorporated herein by reference. Further, any incorporation by way of reference to the above documents is not to be incorporated herein by reference. Unless explicitly included in this document. For the "(the) embodiments" included in this article, " revealing content", "this invention", "Examples of the invention", The reference to "the disclosure of the embodiments" and the like refers to the specification of the patent application (including the text and drawings of the patent application) of the prior art. To explain the purpose of applying for a patent, Clear expectations do not invoke 35 U. S. C. 112(f), unless the specific term "components of" or "steps of" are stated in their respective claims.

10‧‧‧Substrate container

12‧‧‧ container part

14‧‧‧ door assembly

14a‧‧‧ door assembly

16‧‧‧ Back wall

18‧‧‧ side wall

20‧‧‧ front wall

22‧‧‧ side wall

24‧‧‧ top part

26‧‧‧ bottom assembly

27‧‧‧Shell

28‧‧‧ door frame

29‧‧‧Substrate

Edge of 29a‧‧

30‧‧‧Activity linkage assembly

30a‧‧‧Activity linkage assembly

30b‧‧‧Activity linkage assembly

30c‧‧‧Activity linkage assembly

30d‧‧‧Activity linkage assembly

30e‧‧‧Activity linkage assembly

30f‧‧‧Activity linkage assembly

31‧‧‧ inner surface

32‧‧‧Frame

34‧‧‧Upper mandrel

36‧‧‧ lower mandrel

37‧‧‧ pivot seat

38‧‧‧ struts

39‧‧‧ pivot axis / axis of rotation

40‧‧‧Offset parts

40a‧‧‧ coil spring

40b‧‧‧Offset parts

40c‧‧‧ biasing element

40d‧‧‧ biasing element

40e‧‧‧Offset / biasing parts

41‧‧‧ proximal side

42‧‧‧ distal side

44‧‧‧Cylindrical pivot rod

45‧‧‧Upper cross member

46‧‧‧ Lower cross member

47‧‧‧ lateral parts

50‧‧‧Substrate holder assembly

51‧‧‧ Back side

54‧‧‧Base section

56‧‧‧ joint part

57‧‧‧Overlay part

58‧‧‧ Track section

59‧‧‧ Track section

61‧‧‧Transverse parts

62‧‧‧Transverse parts

63‧‧‧Transverse parts

64‧‧‧Transverse parts

65‧‧‧Transverse parts

66‧‧‧Transverse parts

67‧‧‧ center axis

68‧‧‧Upper clip assembly

74‧‧‧ axial extension

75‧‧‧ axially extending edge

76‧‧‧ Groove

77‧‧‧ axially extending edge

87‧‧‧ axial extension

88‧‧‧Gap

89‧‧‧ pores

90‧‧‧ wheel yoke

92‧‧‧Free end

94‧‧‧ round

96‧‧‧Axis

98‧‧‧Clamped structure

99‧‧‧Bottom

101‧‧‧Flexible cantilever

102‧‧‧Extension

104‧‧‧Rotary stop

106‧‧‧Remote

122‧‧‧spring arm

132‧‧‧Continuous elastic band

134‧‧‧Installation structure

142‧‧‧ wheel retaining clip

144‧‧‧ pivot lock clip

146‧‧‧ board section

Installation surface in 148‧‧

152‧‧‧ outer surface

153‧‧‧ bottom edge

154‧‧‧arm section

156‧‧‧Characteristics

157‧‧‧ Direction

158‧‧‧ hook part

162‧‧‧ Registration structure

164‧‧‧ hook part

165‧‧ § stop structure

166‧‧‧Introduction structure

167‧‧‧ distal

170‧‧‧ body part

172‧‧‧ hook part

174‧‧‧ opposite end

176‧‧‧ opposite end

178‧‧‧ first pair of hooks

182‧‧‧Second pair of hooks

184‧‧‧Introduction structure

202‧‧‧ front board

204‧‧‧ Backplane

206‧‧‧outer perimeter

207‧‧‧Latch tip aperture

208‧‧‧Internal chamber

210‧‧‧Latch assembly

210a‧‧‧Latch mechanism

212‧‧‧Latch cam

214‧‧‧Latch arm

216‧‧‧ bow spring

216a‧‧‧ bow spring

216b‧‧‧ bow spring

216c‧‧‧ bow spring

216d‧‧‧ bow spring

218‧‧‧Cam axis

222‧‧‧ positive

224‧‧‧ back

226‧‧ ‧ key pore

227‧‧‧ bow through the slot

228‧‧‧ leaves

232‧‧‧ cam surface

233‧‧‧flat surface

234‧‧‧Sloping surface

236‧‧‧1

238‧‧‧Installation holes

239‧‧‧Cam stop

242‧‧‧Cam interface profile

244‧‧‧ proximal part

246‧‧‧Latch tip

248‧‧‧ distal part

252‧‧‧ cam bearing

254‧‧‧Long pores

255‧‧‧ longitudinal axis

256‧‧‧ mounting holes

262‧‧‧ first end

264‧‧‧ second end

266‧‧‧Bow segments

268‧‧‧Operation length

268a‧‧‧Operation length

268b‧‧‧Operation length

268c‧‧‧Operation length

270‧‧‧ wear pad

272‧‧‧First angle orientation

273‧‧‧Intermediate angle orientation

274‧‧‧second angle orientation

275‧‧‧Guide assembly

276‧‧‧ hub

278‧‧‧Offset parts

279‧‧‧Guide

282‧‧‧ bushing

292‧‧‧ Forecast

294‧‧‧ Forecast

296‧‧‧Local maxima

298‧‧‧Local maxima

299‧‧‧Local minimum

312‧‧‧ test results

314‧‧‧ test results

320‧‧‧ Attached

322‧‧‧ bushing

324‧‧‧ diameter shaft

326‧‧‧Top bearing section

340‧‧‧ Attached

342‧‧‧ ring or eye ring

344‧‧‧ hub

346‧‧‧Reimbursement

348‧‧‧Top bearing part or wear pad

360‧‧‧ Attached

362‧‧‧ bushing

364‧‧‧Axis of larger diameter

366‧‧‧Top bearing section

368‧‧‧ slot

372‧‧‧ pivot axis

1 is a cross-sectional side view of a substrate container having one of a series of movable link members in a non-retaining position of a substrate, in accordance with an embodiment of the present invention. 2 is a cross-sectional side view of the actuating link set of FIG. 1 having a substrate holder in a substrate holding position, in accordance with an embodiment of the present invention. 3 is a front elevational view of the substrate container of FIG. 1 with the back wall removed to expose the actuation link set, in accordance with an embodiment of the present invention. 4 is a perspective view of one of the frame, a pair of mandrels, and a biasing member of the actuating link set of FIG. 1 in accordance with an embodiment of the present invention. Figure 5 is an enlarged partial view of one of the biasing members of Figure 4 in accordance with an embodiment of the present invention. 6 is a perspective view of one of the substrate holder assemblies of FIG. 1 in accordance with an embodiment of the present invention. Figure 7 is a perspective view of one of the series of movable links having one biasing member extending laterally from one of the axes of the movable link set, in accordance with an embodiment of the present invention. Figure 8 is a front elevational view of one of the sets of cooperating links in a non-retaining position of a substrate having a biasing member comprising a mandrel of a sliding contact actuating link set, in accordance with an embodiment of the present invention One of the spring arms. Figure 9 is a perspective view of one of the actuation link sets of Figure 8 in a non-retaining position of the substrate, in accordance with an embodiment of the present invention. Figure 10 is a front elevational view of the actuating linkage set of Figures 8 and 9 in a substrate holding position, in accordance with an embodiment of the present invention. Figure 11 is a perspective view of one of the actuation link sets of Figure 10 in a substrate holding position, in accordance with an embodiment of the present invention. Figure 12 is a perspective view of a cooperating link set having a biasing member in a non-retaining position of a substrate, the biasing member including a substrate holding member of the contact actuating link set, in accordance with an embodiment of the present invention. One of the assembly spring arms. Figure 13 is a front elevational view of one of the sets of cooperating links in a substrate non-retaining position having a biasing member, the biasing member comprising an elastic member, in accordance with an embodiment of the present invention. Figure 14 is a perspective view of one of the actuating linkage sets of Figure 13 in a non-retaining position of the substrate, in accordance with an embodiment of the present invention. Figure 15 is a front elevational view of one of the actuating linkage sets of Figures 13 and 14 in a substrate holding position, in accordance with an embodiment of the present invention. Figure 16 is a perspective view of one of the actuation link sets of Figure 15 in a substrate holding position, in accordance with an embodiment of the present invention. Figure 17 is a front perspective view of a consistent linkage set having a wheel retaining clip and a pair of pivot locking clips in a substrate non-retaining position, in accordance with an embodiment of the present invention. Figure 18 is a rear perspective view of one of the actuation link sets of Figure 17. Figure 19 is a rear perspective view of one of the wheel retaining clips of Figures 17 and 18 in a disengaged state in accordance with an embodiment of the present invention. Figure 20 is a front perspective view of one of the wheel retaining clips of Figures 17 and 18 in a disengaged state in accordance with an embodiment of the present invention. Figure 21 is a rear elevational view of one of the wheel retaining clips of Figures 17 and 18 in a disengaged state in accordance with an embodiment of the present invention. Figure 22 is a top plan view of the wheel retaining clip of Figures 17 and 18 in a disengaged state in accordance with an embodiment of the present invention. 23 is a rear perspective view of one of the wheel retaining clips of FIGS. 17 and 18 aligned with a substrate holder assembly in accordance with an embodiment of the present invention. Figure 24 is a partial, rear perspective view of the wheel retaining clip of Figures 17 and 18 mounted to a substrate holder assembly in accordance with an embodiment of the present invention. Figure 25 is a partial, front perspective view of the wheel retaining clip of Figures 17 and 18 mounted to a substrate holder assembly in accordance with an embodiment of the present invention. Figure 26 is a bottom plan view of the wheel retaining clip of Figures 17 and 18 mounted to a substrate holder assembly in accordance with an embodiment of the present invention. Figure 27 is a partial, front perspective view of the wheel retaining clip of Figures 17 and 18 mounted to a substrate holder assembly in accordance with an embodiment of the present invention. Figure 28 is a rear perspective view of one of the pivotal locking clips of Figures 17 and 18 in a disengaged state in accordance with an embodiment of the present invention. Figure 29 is a front perspective view of one of the pivotal locking clips of Figures 17 and 18 in a disengaged state in accordance with an embodiment of the present invention. Figure 30 is a side elevational view of the pivotal locking clip of Figures 17 and 18 in a disengaged state in accordance with an embodiment of the present invention. 31 is a partial, rear perspective view of the pivotal locking clip of FIGS. 17 and 18 aligned with a substrate holder assembly and mandrel in accordance with an embodiment of the present invention. Figure 32 is a partial, rear perspective view of the wheel retaining clip of Figures 17 and 18 mounted to a substrate holder assembly and mandrel in accordance with an embodiment of the present invention. Figure 33 is a partial perspective front elevational view of the wheel retaining clip of Figures 17 and 18 mounted to a substrate holder assembly and mandrel, in accordance with an embodiment of the present invention. Figure 34 is a cross-sectional view, partly in section, of the wheel retaining clip of Figures 17 and 18 mounted on a substrate holder assembly and mandrel, in accordance with an embodiment of the present invention. Figure 35 is a partial perspective view of one of the latch mechanisms mounted in a door assembly of a substrate container in accordance with one embodiment of the present invention. Figure 36 is a perspective view of one of the latching cams of Figure 35 in a disengaged state in accordance with an embodiment of the present invention. Figure 37 is a perspective view of the opposite side of the latch cam of Figure 36, in accordance with an embodiment of the present invention. 38 is a plan view of one of the latch arms of FIG. 35 in accordance with an embodiment of the present invention. 39 is a partial plan view of the latch mechanism of FIG. 35 in a latch configuration and depicting the angular displacement of the latch cam in accordance with an embodiment of the present invention. 40A to 40D are perspective views of a bow spring in a separated state in an embodiment of the present invention. Figure 41 is a partial perspective view of one of the latch mechanisms having a bow spring defining an S-shaped section, the latch mechanism being mounted in a door assembly of a substrate container, in accordance with an embodiment of the present invention. 42 is an enlarged view of one of the latch mechanisms of FIG. 41 illustrating one of the latch arms for biasing the door assembly in accordance with an embodiment of the present invention. Figure 43A is a partial elevational view of the latch mechanism of Figure 41 in an unlocked configuration. 43B is a partial elevational view of the latch mechanism of FIG. 41 in an intermediate configuration between a latch configuration and an unlock configuration, in accordance with an embodiment of the present invention. Figure 43C is a partial elevational view of the latch mechanism of Figure 41 in a fully latched configuration. Figure 44A is a cross-sectional view of the door assembly of Figure 35 having a latching cam and a latching arm in an unlocked configuration, in accordance with an embodiment of the present invention. 44B is a cross-sectional view of the door assembly of FIG. 35 having a latch cam and a latch arm in a fully latched configuration, in accordance with an embodiment of the present invention. Figure 45A is a diagram showing the torque diagonal orientation required to actuate the latch of the latch mechanism of Figure 41 in accordance with one embodiment of the present invention. Figure 45B is a diagram showing the torque diagonal orientation required to actuate the latch of the door assembly of Figure 35 in accordance with one embodiment of the present invention. Figure 46A is a diagram showing the latch torque requirements of a latch mechanism of a conventional substrate carrier door and the latch mechanism of Figure 41, in accordance with an embodiment of the present invention. Figure 46B is a diagram showing the unlocking torque requirements of one of the latch mechanisms of the conventional substrate carrier door and the latch mechanism of Figure 41, in accordance with an embodiment of the present invention. Figure 47 is a perspective cross-sectional view of one of the latching cams having a bushing for coupling a bow spring to the latching cam, in accordance with an embodiment of the present invention. Figure 48A is an enlarged, perspective and partially exploded view of one of the latching cams having a bushing for coupling a bow spring to the latching cam, in accordance with an embodiment of the present invention. Figure 48B is a perspective view of one of the assembled latch cams and bushings of Figure 48A. Figure 49 is an enlarged, perspective view of one of the bushings coupled to a latch arm and an arcuate spring, in accordance with an embodiment of the present invention.

Claims (42)

A substrate container includes a container portion including a door frame defining an opening; a door configured to be mounted in the door frame; and a movable link assembly assembly including a frame and a substrate holder And a mandrel pivotally mounted to the frame and to the substrate holder assembly, the frame being mounted to an inner wall of the container portion, the substrate holder assembly extending to the door frame In the opening, the actuation link set assembly is selectively configurable in a substrate holding position, wherein the substrate holder assembly is in contact with the door when the door seat falls within the door frame Actuating the door assembly, the actuating link assembly is selectively configurable in a substrate non-retaining position, wherein the substrate holder assembly extends to the opening of the door frame when the door is not within the door frame And a biasing member operatively coupled to at least one of the frame, the mandrel, and the substrate holder assembly, the biasing member biasing the actuation link assembly to the substrate Keep in position. The substrate container of claim 1, wherein the biasing member comprises a spring arm extending from the frame and contacting one of the mandrel and the substrate holder assembly. The substrate container of claim 2, wherein the spring arm slidably contacts the mandrel. The substrate container of claim 1, wherein the biasing member comprises a coil spring coupled to the mandrel, the coil spring being concentric about a rotational axis of the mandrel. The substrate container of claim 4, wherein the coil spring is coupled to the frame and concentric about a pivot axis of the frame. The substrate container of claim 4, wherein the coil is coupled to the substrate holder assembly and concentric about a pivot axis of the substrate holder assembly. The substrate container of claim 1, wherein the biasing member comprises an elastic member extending from the frame to the mandrel and the substrate holder assembly. The substrate container of claim 7, wherein the elastic member is a continuous belt. The substrate container of claim 8, wherein the continuous strip is an O-ring. The substrate container of claim 1, wherein: the mandrel is mounted to the frame at a pivot defining one of the pivot axes; the biasing member includes an extension of the mandrel extending laterally beyond the pivot, the The extension portion includes a rotation stop that engages the frame and one of the inner surfaces of the container to impart a biasing torque between the rotation stop and the mandrel. The substrate container of claim 10, wherein the extension extends laterally beyond the frame and the rotational stop engages the inner surface. The substrate container of claim 10 or claim 11, wherein the extension extends laterally along the pivot axis. A door for a substrate container, comprising: a front plate and a back plate joined to define an internal chamber; a latching cam mounted to the door in the internal chamber and surrounding a cam axis rotation; a latch arm disposed within the inner chamber and operatively coupled to the latch cam; and a bow spring having a first end and a second end, the first end Pivotally coupled to the latching cam, the second end being pivotally coupled to the latching arm, wherein the latching cam is rotatable from a first angle thereof in which the door is in an unlocked configuration The door is in a second angular orientation in a latching configuration, wherein the bow spring is in maximum compression at an intermediate angular orientation between the first angular orientation and the second angular orientation. The door of claim 13, wherein the bow spring is oriented from the first angle to the second angular orientation is in compression. The door of claim 13, wherein the first end of the bow spring is coupled to a hub on the latch cam. A door of claim 13, wherein a bushing is coupled to the second end of the bow spring and coupled to the latch arm. The door of claim 16, wherein the bushing defines a pivot axis about which the second end of the bow spring rotates, and wherein the bushing defines a laterally extending slot, the laterally extending slot The second end of the bow spring can be inclined parallel to the pivot axis to be non-parallel to the pivot axis when the pivot arm is actuated. The door of claim 13 wherein the door latch mechanism includes a guide assembly coupled to the latch arm and one of the first plate and the second plate of the door such that the latch arm faces the latch The second plate and the other of the first plates are offset. The door of claim 18, wherein the guide assembly includes a coil spring mounted on a hub extending from one of the front panel and the back panel. The door of claim 13, wherein the latch configuration of the second angle is a fully latched configuration. The door of any one of claims 13 to 20, wherein the bow spring comprises an S-shaped segment. The door of any one of claims 13 to 20, wherein the bow spring comprises a U-shaped segment. A substrate container comprising: a container portion including a door frame defining an opening; a door configured to be mounted within the door frame, the door including a front panel and a back panel, the interfaces being joined to define An internal chamber, a latching cam mounted to the door within the internal chamber and rotatable about a cam axis, the latching cam being positionable from a first corner of the unlocking configuration Rotating to a second angular orientation in which the door is in a latching configuration, a latching arm disposed within the internal chamber and operatively coupled to the latching cam, and an arcuate spring having a a first end and a second end pivotally coupled to the latch cam, the second end being pivotally coupled to the latch arm, the bow spring being oriented at the first angle An intermediate angular orientation between the second angular orientation is at a maximum compression; an actuating linkage assembly comprising a frame, a substrate holder assembly and a mandrel pivotally mounted To the frame and to the substrate holder assembly, the frame is Attached to an inner wall of the container portion, the substrate holder assembly extends into the opening of the door frame, the actuation link set assembly being selectively configurable in a substrate holding position, wherein When the door is seated in the door frame, the substrate holder assembly is in contact with the door and actuated by the door, the actuation link set assembly is selectively configurable in a substrate non-holding position, wherein The substrate holder assembly extends into the opening of the door frame when the door is not in the door frame; a biasing member operatively coupled to the frame, the spindle, and the substrate holder assembly The biasing member biases the actuation link set assembly into the substrate non-retaining position. A method for holding a substrate in a substrate carrier, the method comprising: configuring a consistent moving link assembly in the substrate carrier in a substrate holding position for selectively holding a substrate on the substrate And within the carrier; and when the actuation link assembly is in the substrate holding position, the actuation linkage assembly is biased in a substrate non-retaining position. A substrate container comprising a container portion including a door frame defining an opening; a door configured to be mounted within the door frame; a consistent moving link set assembly comprising: a frame mounted to An inner wall of the container portion; a mandrel pivotally mounted to the frame; a substrate holder assembly pivotally mounted to the mandrel, the substrate holder assembly extending to the door frame In the opening; an axle mounted to a lower end of the substrate holder assembly, the shaft being held to the substrate by a sandwiched structure defined at the lower end of the substrate holder assembly And a retaining clip mounted to the substrate holder assembly and configured to prevent release of the shaft from the substrate holder assembly, the actuating linkage assembly, optionally Formed in a substrate holding position, wherein when the door seat falls within the door frame, the substrate holder assembly is in contact with the wheel and actuated by the door, the wheel being configured to follow the door An inner surface rolls. The substrate container of claim 25, wherein the wheel retaining clip includes a plurality of hook portions that are coupled to the substrate holder assembly to secure the wheel retaining clip to the substrate holder assembly. The substrate container of claim 26, wherein: the substrate holder assembly includes a base defining a void; at least one of the plurality of hook portions of the wheel retaining clip being coupled to a periphery of the aperture; and The wheel retaining clip includes a registration structure for registering the wheel retaining clip within the aperture. The substrate container of claim 25, comprising a yoke at the lower end of the substrate holder assembly, the wheel axle being mounted to the yoke, wherein: the wheel retaining clip includes a plurality of hook portions, etc. A substrate holder assembly is coupled to secure the wheel retaining clip to the substrate holder assembly; the clip-on structure of the substrate holder assembly includes a resilient cantilever that applies a biasing force to the shaft to The shaft is retained within the yoke; and the wheel retaining clip is configured to prevent deflection of the resilient cantilever of the clip-on structure thereby preventing the clip-on structure from releasing the shaft. The substrate container of claim 28, wherein at least one of the plurality of hook portions of the wheel retaining clip is coupled to the yoke. The substrate container of claim 29, wherein the wheel retaining clip is configured to cause the at least one of the plurality of hook portions to be resiliently displaced about the yoke and clipped to the yoke during assembly. The substrate container of any one of claims 29 and 30, wherein each of the at least one of the plurality of hook portions coupled to the yoke includes one of a structure for sliding over the yoke during assembly . A substrate container comprising a container portion including a door frame defining an opening; a door configured to be mounted within the door frame; a consistent moving link set assembly comprising: a frame mounted to An inner wall of the container portion; a mandrel having a proximal end side pivotally mounted to the frame and including a distal end side of a pivot rod; a substrate holder assembly extendable to the door frame The pivoting rod is pivotally mounted to the spindle, the substrate holder assembly defining a recess in which the pivot rod is rotatable relative to the substrate holder assembly; And a pivoting locking clip mounted to the substrate holder assembly to capture the pivot rod between the substrate holder assembly and the pivotal locking clip. The substrate container of claim 32, wherein the pivotal locking clip includes a plurality of hook portions that are coupled to the substrate holder assembly to secure the pivotal locking clip to the substrate holder assembly. The substrate container of claim 33, wherein: the substrate holder assembly includes an axially extending portion defining one of the grooves, the axially extending portion defining an opposite axially extending edge; and the plurality of pivoting locking clips At least some of the hook portions are coupled to the opposite axially extending edges of the axially extending portion. The substrate container of claim 32, wherein the pivotal locking clip comprises: an arcuate body portion including an opposite end; and a first pair of hook portions extending from a first end of the arcuate body portion; wherein the first A pair of hook portions are coupled to the substrate holder assembly to secure the arcuate body portion against the pivot rod of the mandrel. The substrate container of claim 35, wherein: the substrate holder assembly includes an axially extending portion defining one of the grooves, the axially extending portion defining an opposite axially extending edge; the first pair of hook portions being configured To engage the opposing axially extending edges of the axially extending portion. The substrate container of claim 36, wherein the first pair of hook portions are configured to be resiliently displaced about the axially extending portion of the substrate holder assembly and clipped to the axially extending portion when assembled. The substrate container of claim 37, wherein the first pair of hook portions comprise an introduction structure configured to deflect the first pair of hook portions away from each other during assembly. The substrate container of claim 35, wherein the pivotal locking clip includes a second pair of hook portions extending from a second end of the arcuate body portion, wherein the second pair of hook portions are coupled to the substrate holder assembly The arcuate body portion is secured by the pivot rod that abuts the mandrel. The substrate container of claim 39, wherein: the substrate holder assembly includes an axially extending portion defining one of the grooves, the axially extending portion defining an opposite axially extending edge; the first pair of hook portions being configured To engage the opposing axially extending edges of the axially extending portion; and the second pair of hook portions are configured to engage the opposing axially extending edges of the axially extending portion. The substrate container of claim 40, wherein the first pair of hook portions and the second pair of hook portions are configured for resilient displacement about the axially extending portion of the substrate holder assembly and are clipped during assembly The axial extension is on. The substrate container of claim 41, wherein each of the first pair of hook portions and the hook portions of the second pair of hook portions are configured to move the first pair of hook portions and the second pair of hook portions away from each other during assembly The introduction structure of the deflection.