TW201810701A - Perovskite solar cell and manufacturing method thereof - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- YBXMTNGWQWZJHK-UHFFFAOYSA-N [Au].[Ni]=O Chemical compound [Au].[Ni]=O YBXMTNGWQWZJHK-UHFFFAOYSA-N 0.000 claims abstract description 52
- 239000000463 material Substances 0.000 claims abstract description 49
- 239000000758 substrate Substances 0.000 claims abstract description 43
- 238000000034 method Methods 0.000 claims abstract description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 58
- 239000010931 gold Substances 0.000 claims description 54
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 38
- 229910052737 gold Inorganic materials 0.000 claims description 37
- 229910052759 nickel Inorganic materials 0.000 claims description 27
- 238000000137 annealing Methods 0.000 claims description 19
- 229910000480 nickel oxide Inorganic materials 0.000 claims description 15
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 11
- DXZHSXGZOSIEBM-UHFFFAOYSA-M iodolead Chemical compound [Pb]I DXZHSXGZOSIEBM-UHFFFAOYSA-M 0.000 claims description 9
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 7
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical group C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 claims description 6
- 229910003472 fullerene Inorganic materials 0.000 claims description 6
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- MSNOMDLPLDYDME-UHFFFAOYSA-N gold nickel Chemical compound [Ni].[Au] MSNOMDLPLDYDME-UHFFFAOYSA-N 0.000 abstract 1
- 230000005525 hole transport Effects 0.000 description 10
- 229920000144 PEDOT:PSS Polymers 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 5
- MCEWYIDBDVPMES-UHFFFAOYSA-N [60]pcbm Chemical compound C123C(C4=C5C6=C7C8=C9C%10=C%11C%12=C%13C%14=C%15C%16=C%17C%18=C(C=%19C=%20C%18=C%18C%16=C%13C%13=C%11C9=C9C7=C(C=%20C9=C%13%18)C(C7=%19)=C96)C6=C%11C%17=C%15C%13=C%15C%14=C%12C%12=C%10C%10=C85)=C9C7=C6C2=C%11C%13=C2C%15=C%12C%10=C4C23C1(CCCC(=O)OC)C1=CC=CC=C1 MCEWYIDBDVPMES-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- STTGYIUESPWXOW-UHFFFAOYSA-N 2,9-dimethyl-4,7-diphenyl-1,10-phenanthroline Chemical compound C=12C=CC3=C(C=4C=CC=CC=4)C=C(C)N=C3C2=NC(C)=CC=1C1=CC=CC=C1 STTGYIUESPWXOW-UHFFFAOYSA-N 0.000 description 3
- 230000035515 penetration Effects 0.000 description 3
- -1 poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004770 highest occupied molecular orbital Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 229920001467 poly(styrenesulfonates) Polymers 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910001922 gold oxide Inorganic materials 0.000 description 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 1
- 238000010329 laser etching Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
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- H10K30/80—Constructional details
- H10K30/81—Electrodes
- H10K30/82—Transparent electrodes, e.g. indium tin oxide [ITO] electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
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- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/50—Organic perovskites; Hybrid organic-inorganic perovskites [HOIP], e.g. CH3NH3PbI3
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- H10K30/15—Sensitised wide-bandgap semiconductor devices, e.g. dye-sensitised TiO2
- H10K30/151—Sensitised wide-bandgap semiconductor devices, e.g. dye-sensitised TiO2 the wide bandgap semiconductor comprising titanium oxide, e.g. TiO2
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Abstract
本發明提供一種鈣鈦礦太陽能電池,其包含一鈣鈦礦材料層,具有彼此相對的一第一表面及一第二表面;一電子傳輸層,配置於該第一表面上;以及一金鎳氧化物層,配置於該第二表面上。本發明也提供一種鈣鈦礦太陽能電池的製造方法,其包含提供一透明基板;形成一金鎳氧化物層於該透明基板上;以及形成一鈣鈦礦材料層於該金鎳氧化物層上。 The present invention provides a perovskite solar cell comprising a layer of perovskite material having a first surface and a second surface opposite to each other; an electron transport layer disposed on the first surface; and a gold nickel An oxide layer disposed on the second surface. The invention also provides a method for manufacturing a perovskite solar cell, comprising: providing a transparent substrate; forming a gold-nickel oxide layer on the transparent substrate; and forming a layer of perovskite material on the gold-nickel oxide layer .
Description
本發明係關於一種鈣鈦礦太陽能電池及其製造方法,特別是關於一種使用金鎳氧化物作為透明電極層的鈣鈦礦太陽能電池及其製造方法。 The present invention relates to a perovskite solar cell and a method of manufacturing the same, and more particularly to a perovskite solar cell using gold nickel oxide as a transparent electrode layer and a method of manufacturing the same.
鈣鈦礦(perovskite)材料對於太陽能電池上的應用具有卓越的優勢,例如高載子遷移率、高載子擴散距離、高吸收係數等特性均適合製作高效率的太陽能電池。另一優勢為材料成本便宜且製程簡易,可利用簡單濕式塗佈製程製作超薄的光吸收層且具有高光電轉效率。其發電成本預估僅有矽晶電池的五分之一至四分之一左右。由於其高光電轉換效率、低製造成本與簡易的製程,在太陽能電池的技術領域造成相當大的衝擊。但目前為止,鈣鈦礦太陽能電池的技術尚未成熟,許多基礎研究正在快速展開,引起了各國研究單位的投入大量研發。近年來,鈣鈦礦太陽能電池效率進展非常快速,目前光電轉換效率已可到達18%。 Perovskite materials have excellent advantages for applications on solar cells, such as high carrier mobility, high carrier diffusion distance, high absorption coefficient and other characteristics are suitable for the production of high efficiency solar cells. Another advantage is that the material cost is low and the process is simple. The ultra-thin light absorbing layer can be fabricated by a simple wet coating process and has high photoelectric conversion efficiency. Its power generation cost is estimated to be only one-fifth to one-quarter of the crystal battery. Due to its high photoelectric conversion efficiency, low manufacturing cost and simple process, it has caused considerable impact in the technical field of solar cells. But so far, the technology of perovskite solar cells is not yet mature, and many basic research is rapidly expanding, which has led to a large amount of research and development by research units in various countries. In recent years, the efficiency of perovskite solar cells has progressed very rapidly, and the photoelectric conversion efficiency has reached 18%.
目前在多數發表的文獻中大多利用透明導電膜(transparent conductive oxide,TCO),先利用雷射蝕刻或曝光蝕刻出圖案在電池結構上,鈣鈦礦材料可以和n型半導體金屬氧化物(n-type metal oxide)結合,再搭配 合適的電洞傳輸材料(hole transport materials,HTM)來製作成鈣鈦礦太陽能電池,即一般常見的n型半導體金屬氧化物/鈣鈦礦/電洞傳輸材料(n-type metal oxide/perovskite/hole transport materials)的堆疊結構。n型半導體金屬氧化物與電洞傳輸材料是分別作為電子、電洞之傳輸層,可選擇性幫助由鈣鈦礦材料中萃取(charge extraction)並分離之電子電洞對。另外,如倒置型結構的太陽能電池,一般常見的作法為玻璃基板/氧化銦錫(glass/ITO)上塗佈一層PEDOT:PSS(poly(3,4-ethylenedioxythiophene)poly(styrenesulfonate)),然後再將鈣鈦礦材料成長於電洞傳輸材料上,並搭配合適的電子傳輸材料製作成太陽能電池。 At present, most of the published literature mostly uses a transparent conductive oxide (TCO), which is first etched by laser etching or exposure on a cell structure, and a perovskite material and an n-type semiconductor metal oxide (n- Type metal oxide) Suitable hole transport materials (HTM) are used to make perovskite solar cells, which are commonly used n-type semiconductor oxide/perovskite/hole transfer materials (n-type metal oxide/perovskite/ Stack structure of hole transport materials). The n-type semiconductor metal oxide and the hole transporting material are respectively used as a transport layer of electrons and holes, and can selectively assist electron-hole pairs extracted and separated from the perovskite material. In addition, for a solar cell of an inverted structure, it is common practice to coat a glass substrate/indium tin oxide (glass/ITO) with a layer of PEDOT:PSS(poly(3,4-ethylenedioxythiophene)poly(styrenesulfonate), and then The perovskite material is grown on a hole transport material and fabricated into a solar cell with a suitable electron transport material.
PEDOT:PSS的最高佔據分子軌域(highest occupied molecular orbital level,HOMO)為5.1eV,可做為鈣鈦礦材料之電洞傳輸材料。此外,PEDOT:PSS還可以改善ITO之表面特性以利後續鈣鈦礦材料之成長。但是由於PEDOT:PSS為酸性物質(pH=1.2)且具吸濕性,易造成ITO被腐蝕損傷,且伴隨著ITO中之銦(indium,In)擴散至主動層中的缺點,使得元件光電特性下降。此外,有機物質通常不利於在紫外線下的長期操作,而太陽能電池則需要具有長時間的元件穩定性才能增加其使用壽命。 PEDOT: The highest occupied molecular orbital level (HOMO) of PSS is 5.1 eV, which can be used as a hole transport material for perovskite materials. In addition, PEDOT:PSS can also improve the surface properties of ITO to facilitate the growth of subsequent perovskite materials. However, since PEDOT:PSS is an acidic substance (pH=1.2) and hygroscopic, it is easy to cause corrosion damage of ITO, and the indium (Indium, In) in ITO diffuses into the active layer, which makes the photoelectric characteristics of the element. decline. In addition, organic materials are generally not conducive to long-term operation under ultraviolet light, while solar cells require long-term component stability to increase their useful life.
故,有必要提供一種鈣鈦礦太陽能電池及其製造方法,以解決習用技術中所存在的問題。 Therefore, it is necessary to provide a perovskite solar cell and a method of manufacturing the same to solve the problems in the conventional technology.
本發明之主要目的在於提供一種鈣鈦礦太陽能電池,其利用酸鹼值為中性的金鎳氧化物層,可以具有相當好的穿透率,可做為電洞 傳輸材料直接和鈣鈦礦材料層接合,同時做為一透明電極。因此,該鈣鈦礦太陽能電池可不須使用有機電洞傳輸層,結構單純且元件穩定性高,可提升元件壽命、降低消費成本,也提升了鈣鈦礦太陽能電池的可應用性。 The main object of the present invention is to provide a perovskite solar cell which utilizes a gold-nickel oxide layer having a neutral acid value, which can have a relatively good transmittance and can be used as a hole. The transport material is bonded directly to the layer of perovskite material and serves as a transparent electrode. Therefore, the perovskite solar cell can eliminate the use of the organic hole transport layer, has a simple structure and high component stability, can improve the life of the component, reduce the consumption cost, and improves the applicability of the perovskite solar cell.
本發明的另一目的在於提供一種鈣鈦礦太陽能電池的製造方法,可利用快速簡易的熱退火處理形成上述金鎳氧化物層,且省略了傳統有機電洞傳輸材料與透明導電膜ITO的形成步驟,可簡化製造程序。 Another object of the present invention is to provide a method for manufacturing a perovskite solar cell, which can form the gold nickel oxide layer by a quick and simple thermal annealing process, and omits the formation of the conventional organic hole transport material and the transparent conductive film ITO. Steps to simplify the manufacturing process.
為達上述之目的,本發明的一實施例提供一種鈣鈦礦太陽能電池,其包含:一鈣鈦礦材料層,包含彼此相對的一第一表面及一第二表面;一電子傳輸層,配置於該第一表面上;以及一金鎳氧化物層,配置於該第二表面上。 To achieve the above objective, an embodiment of the present invention provides a perovskite solar cell comprising: a layer of perovskite material, comprising a first surface and a second surface opposite to each other; an electron transport layer, configured And on the first surface; and a gold-nickel oxide layer disposed on the second surface.
在本發明的一實施例中,該鈣鈦礦材料層具有分子式為CH3NH3PbI3、CH3NH3PbIxCl3-x或HC(NH2)2PbI3。 In an embodiment of the invention, the perovskite layer has a molecular formula of CH 3 NH 3 PbI 3 , CH 3 NH 3 PbI x Cl 3-x or HC(NH 2 ) 2 PbI 3 .
在本發明的一實施例中,該金鎳氧化物層包含有金(Au)的網狀結構嵌入於氧化鎳(NiOX)中。 In an embodiment of the present invention, the gold-nickel oxide layer comprises gold (Au) embedded in the network structure of nickel oxide (NiO X) in.
在本發明的一實施例中,該鈣鈦礦太陽能電池另包含一透明基板,該金鎳氧化物層配置於該透明基板的一表面上。 In an embodiment of the invention, the perovskite solar cell further comprises a transparent substrate, and the gold nickel oxide layer is disposed on a surface of the transparent substrate.
在本發明的一實施例中,該透明基板為一玻璃基板。 In an embodiment of the invention, the transparent substrate is a glass substrate.
在本發明的一實施例中,該金鎳氧化物層具有一厚度為50奈米或以下。 In an embodiment of the invention, the gold nickel oxide layer has a thickness of 50 nm or less.
在本發明的一實施例中,該電子傳輸層包含富勒烯、ZnO、TiO2或[6.6]-苯基-C61-丁酸甲酯(PCBM,[6,6]-phenyl-C61-butyric acid methyl ester)。 In an embodiment of the invention, the electron transport layer comprises fullerene, ZnO, TiO 2 or [6.6]-phenyl-C61-butyric acid methyl ester (PCBM, [6,6]-phenyl-C61-butyric Acid methyl ester).
為達上述之目的,本發明的另一實施例提供一種鈣鈦礦太陽能電池的製造方法,其包含如下步驟:提供一透明基板;形成一金鎳氧化物層於該透明基板上;以及形成一鈣鈦礦材料層於該金鎳氧化物層上。 In order to achieve the above object, another embodiment of the present invention provides a method of manufacturing a perovskite solar cell, comprising the steps of: providing a transparent substrate; forming a gold-nickel oxide layer on the transparent substrate; and forming a A layer of perovskite material is layered on the gold nickel oxide layer.
在本發明的一實施例中,該金鎳氧化物層是由下列步驟所形成:形成一鎳(Ni)層於該透明基板上;形成一金(Au)層於該鎳層上;將該透明基板、該鎳層以及該金層在氧氣中進行一熱退火處理,形成一金(Au)的網狀結構嵌入於氧化鎳(NiOX)中。 In an embodiment of the invention, the gold-nickel oxide layer is formed by: forming a nickel (Ni) layer on the transparent substrate; forming a gold (Au) layer on the nickel layer; The transparent substrate, the nickel layer and the gold layer are subjected to a thermal annealing treatment in oxygen to form a gold (Au) network structure embedded in nickel oxide (NiO X ).
在本發明的一實施例中,該透明基板是一玻璃基板,且該熱退火處理的溫度是350至550℃。 In an embodiment of the invention, the transparent substrate is a glass substrate, and the temperature of the thermal annealing treatment is 350 to 550 °C.
在本發明的一實施例中,該鎳層和該金層係利用電子束法來形成。 In an embodiment of the invention, the nickel layer and the gold layer are formed by an electron beam method.
在本發明的一實施例中,該鎳層的厚度和該金層的厚度均小於20奈米。 In an embodiment of the invention, both the thickness of the nickel layer and the thickness of the gold layer are less than 20 nanometers.
在本發明的一實施例中,該鈣鈦礦材料層係為有機鉛碘化合物,其分子式為CH3NH3PbI3、CH3NH3PbIxCl3-x或HC(NH2)2PbI3。 In an embodiment of the invention, the perovskite layer is an organic lead iodine compound having the formula CH 3 NH 3 PbI 3 , CH 3 NH 3 PbI x Cl 3-x or HC(NH 2 ) 2 PbI 3 .
在本發明的一實施例中,在形成該鈣鈦礦材料層之後,另包含一步驟:形成一電子傳輸層於該鈣鈦礦材料層上。 In an embodiment of the invention, after the layer of the perovskite material is formed, the method further comprises the step of forming an electron transport layer on the layer of the perovskite material.
在本發明的一實施例中,該電子傳輸層是富勒烯、ZnO、TiO2或[6.6]-苯基-C61-丁酸甲酯。 In an embodiment of the invention, the electron transport layer is fullerene, ZnO, TiO2 or [6.6]-phenyl-C61-butyric acid methyl ester.
10‧‧‧鈣鈦礦太陽能電池 10‧‧‧Perovskite solar cells
11‧‧‧鈣鈦礦材料層 11‧‧‧Perovskite material layer
12‧‧‧金鎳氧化物層 12‧‧‧ Gold Nickel Oxide Layer
13‧‧‧電子傳輸層 13‧‧‧Electronic transport layer
14‧‧‧透明基板 14‧‧‧Transparent substrate
14’‧‧‧玻璃基板 14'‧‧‧ glass substrate
15‧‧‧電子緩衝層 15‧‧‧Electronic buffer layer
16‧‧‧金屬電極 16‧‧‧Metal electrodes
第1圖:本發明一實施例之鈣鈦礦太陽能電池的結構示意圖。 Fig. 1 is a schematic view showing the structure of a perovskite solar cell according to an embodiment of the present invention.
第2A~2C圖:本發明一實施例之金鎳氧化物層的形成機制。 2A-2C: Formation mechanism of a gold-nickel oxide layer according to an embodiment of the present invention.
第3A~3B圖:以掃描式電子顯微鏡(SEM)觀察本發明一實施例之金鎳氧化物層(Au:NiOX)的表面及剖面結構。 3A ~ 3B of FIG: a scanning electron microscope (SEM) observation of the gold-nickel oxide layer according to an embodiment of the present invention: the surface and a cross-sectional structure (Au NiO X) a.
第4圖:顯示對照組及實驗組1~5的金鎳氧化物層對不同波長的光線的穿透率變化。 Figure 4: shows the change in the transmittance of the gold-nickel oxide layer of the control group and the experimental group 1 to 5 for different wavelengths of light.
第5圖:實驗組1~4中金鎳氧化物層的功函數(work function)變化趨勢圖。 Figure 5: Trend diagram of the work function of the gold-nickel oxide layer in the experimental group 1~4.
為了讓本發明之上述及其他目的、特徵、優點能更明顯易懂,下文將特舉本發明較佳實施例,並配合所附圖式,作詳細說明如下。再者,本發明所提到的方向用語,例如上、下、頂、底、前、後、左、右、內、外、側面、周圍、中央、水平、橫向、垂直、縱向、軸向、徑向、最上層或最下層等,僅是參考附加圖式的方向。此外,本發明所提到的單數形式“一”、“一個”和“所述”包括複數引用,除非上下文另有明確規定。數值範圍(如10%~11%的A)若無特定說明皆包含上、下限值(即10%≦A≦11%);數值範圍若未界定下限值(如低於0.2%的B,或0.2%以下的B),則皆指其下限值可能為0(即0%≦B≦0.2%)。上述用語是用以說明及理解本發明,而非用以限制本發明。 The above and other objects, features and advantages of the present invention will become more <RTIgt; Furthermore, the directional terms mentioned in the present invention, such as upper, lower, top, bottom, front, rear, left, right, inner, outer, side, surrounding, central, horizontal, horizontal, vertical, longitudinal, axial, Radial, uppermost or lowermost, etc., only refer to the direction of the additional schema. In addition, the singular forms "a", "the" The range of values (such as 10% to 11% of A) includes upper and lower limits (ie, 10% ≦A ≦ 11%) unless otherwise specified; if the value range does not define a lower limit (such as less than 0.2% B) , or B) below 0.2%, the lower limit may be 0 (ie 0% ≦ B ≦ 0.2%). The above terms are used to illustrate and understand the present invention and are not intended to limit the invention.
請參考第1圖,本發明的一實施例提供一種鈣鈦礦太陽能電池10,其主要包含一鈣鈦礦(perovskite)材料層11,包含彼此相對的一第一表面及一第二表面;一電子傳輸層13,配置於該第一表面上;以及一金鎳氧化物層12,配置於該第二表面上。該鈣鈦礦太陽能電池10主要為層 狀的堆疊結構,各層之間具有大致上為平坦的接面。 Referring to FIG. 1 , an embodiment of the present invention provides a perovskite solar cell 10 , which mainly comprises a perovskite material layer 11 including a first surface and a second surface opposite to each other; An electron transport layer 13 disposed on the first surface; and a gold-nickel oxide layer 12 disposed on the second surface. The perovskite solar cell 10 is mainly a layer A stacked structure with substantially flat junctions between the layers.
該鈣鈦礦材料層11是一有機無機複合的光敏性材料,較佳的,其具有分子式為CH3NH3PbI3、CH3NH3PbIxCl3-x或HC(NH2)2PbI3。該金鎳氧化物層12具有透光性,可使太陽光從該層通過而被該鈣鈦礦材料層11吸收產生電子及電洞。該金鎳氧化物層12係一包含金與鎳氧化物的複合層體,該金鎳氧化物層12可以包含有金(Au)的網狀(network)結構嵌入於氧化鎳(NiOX)中。該金鎳氧化物層12具有一厚度為50奈米或以下,可例如是10至50奈米,較佳是20至45奈米,如25、30或40奈米,然不限於此。 The perovskite material layer 11 is an organic-inorganic composite photosensitive material, preferably having a molecular formula of CH 3 NH 3 PbI 3 , CH 3 NH 3 PbI x Cl 3-x or HC(NH 2 ) 2 PbI 3 . The gold-nickel oxide layer 12 has light transmissivity, and allows sunlight to pass through the layer and is absorbed by the perovskite material layer 11 to generate electrons and holes. The gold nickel oxide layer 12 is a composite layer comprising gold and nickel oxide, and the gold nickel oxide layer 12 may be embedded in nickel oxide (NiO X ) in a network structure containing gold (Au). . The gold-nickel oxide layer 12 has a thickness of 50 nm or less, and may be, for example, 10 to 50 nm, preferably 20 to 45 nm, such as 25, 30 or 40 nm, but is not limited thereto.
較佳的,該鈣鈦礦太陽能電池10另包含一透明基板14,使該金鎳氧化物層12可被配置於該透明基板14的一表面上,亦即該金鎳氧化物層12被夾設於該透明基板14與該鈣鈦礦材料層11之間。該金鎳氧化物層12之金(Au)的網狀(network)結構嵌入氧化鎳(NiOX)中,氧化鎳(NiOX)鄰接該鈣鈦礦材料層11;而該金鎳氧化物層12之金(Au)的網狀(network)結構相對靠近該透明基板14(即相對遠離該鈣鈦礦材料層11)。該透明基板14可例如是一玻璃基板。 Preferably, the perovskite solar cell 10 further comprises a transparent substrate 14 such that the gold nickel oxide layer 12 can be disposed on a surface of the transparent substrate 14, that is, the gold nickel oxide layer 12 is sandwiched. It is disposed between the transparent substrate 14 and the perovskite material layer 11. The gold (Au) network structure of the gold nickel oxide layer 12 is embedded in nickel oxide (NiO X ), and the nickel oxide (NiO X ) is adjacent to the perovskite material layer 11; and the gold nickel oxide layer The network structure of gold (Au) of 12 is relatively close to the transparent substrate 14 (i.e., relatively far from the layer 11 of the perovskite material). The transparent substrate 14 can be, for example, a glass substrate.
此外,一般已知可用於鈣鈦礦太陽能電池的電子傳輸材料,如富勒烯、ZnO、TiO2或[6.6]-苯基-C61-丁酸甲酯(PCBM,[6,6]-phenyl-C61-butyric acid methyl ester),均可用來作為該電子傳輸層13。 Further, electron transport materials usable for perovskite solar cells, such as fullerene, ZnO, TiO 2 or [6.6]-phenyl-C61-butyric acid methyl ester (PCBM, [6, 6]-phenyl), are generally known. -C61-butyric acid methyl ester) can be used as the electron transport layer 13.
再者,如第1圖所示,該鈣鈦礦太陽能電池10一般也包含一電子緩衝層15以及一金屬電極16。該電子緩衝層15設置於該電子傳輸層13的一表面上,可例如是BCP(bathocuproine),然不限於此,一般太陽能電池常用的電子傳輸材料均可替代BCP。該金屬電極16可設置在該電子 緩衝層15以做為陰極;及另設置在該金鎳氧化物層12上以做為陽極。該金屬電極16可例如為鋁金屬電極,但並不限於此。太陽光可以從該金鎳氧化物層12及該透明基板14進入該鈣鈦礦太陽能電池10的內部結構中,進行光電轉換之後產生電子電洞的電壓趨勢,然後,該金屬電極16可以設置一適當傳遞迴路導通其電流。 Furthermore, as shown in FIG. 1, the perovskite solar cell 10 generally also includes an electron buffer layer 15 and a metal electrode 16. The electronic buffer layer 15 is disposed on a surface of the electron transport layer 13 and may be, for example, a BCP (bathocuproine). However, the present invention is not limited thereto. Generally, an electron transport material commonly used in solar cells can replace the BCP. The metal electrode 16 can be disposed on the electron The buffer layer 15 serves as a cathode; and is additionally disposed on the gold nickel oxide layer 12 as an anode. The metal electrode 16 may be, for example, an aluminum metal electrode, but is not limited thereto. The sunlight can enter the internal structure of the perovskite solar cell 10 from the gold nickel oxide layer 12 and the transparent substrate 14, and the voltage tendency of the electron hole is generated after photoelectric conversion. Then, the metal electrode 16 can be disposed. A proper transfer loop conducts its current.
本發明的另一實施例提供一種鈣鈦礦太陽能電池10的製造方法,其主要包含步驟:(1)提供一透明基板14;(2)形成一金鎳氧化物層12於該透明基板14上;以及(3)形成一鈣鈦礦材料層11於該金鎳氧化物層12上。 Another embodiment of the present invention provides a method of fabricating a perovskite solar cell 10, which mainly includes the steps of: (1) providing a transparent substrate 14; and (2) forming a gold-nickel oxide layer 12 on the transparent substrate 14. And (3) forming a layer 11 of perovskite material on the gold-nickel oxide layer 12.
在該步驟(1)中,該透明基板14是一可耐高溫的透明基板,較佳是一玻璃基板,然不限於此。 In the step (1), the transparent substrate 14 is a high temperature resistant transparent substrate, preferably a glass substrate, but is not limited thereto.
在該步驟(2)中,該金鎳氧化物層12的形成可例如藉由步驟:(2a)先形成一鎳(Ni)層於該透明基板14上;(2b)接著形成一金(Au)層於該鎳層上;以及(2c)將該透明基板14、該鎳層以及該金層在氧氣中進行一熱退火處理,以形成一金(Au)的網狀結構嵌入於氧化鎳中。在本步驟中,該熱退火處理的溫度可為350至550℃,可例如是350、450、500或550℃,然不限於此。該熱退火處理的時間可為3~10分鐘,例如3、4、5、6、7、9或10分鐘,然不限於此。該鎳層和該金層可以利用電子束法(electron beam)來形成。該鎳層的厚度和該金層的厚度均小於20奈米,可例如是7、10、15或20奈米,然不限於此。較佳的,該鎳層的厚度為10奈米,同時該金層的厚度為5或7奈米。 In the step (2), the gold nickel oxide layer 12 can be formed, for example, by the step of: (2a) forming a nickel (Ni) layer on the transparent substrate 14; (2b) forming a gold (Au). a layer on the nickel layer; and (2c) subjecting the transparent substrate 14, the nickel layer and the gold layer to a thermal annealing treatment in oxygen to form a gold (Au) network structure embedded in the nickel oxide . In this step, the temperature of the thermal annealing treatment may be 350 to 550 ° C, and may be, for example, 350, 450, 500 or 550 ° C, but is not limited thereto. The time of the thermal annealing treatment may be 3 to 10 minutes, for example, 3, 4, 5, 6, 7, 9, or 10 minutes, but is not limited thereto. The nickel layer and the gold layer can be formed by an electron beam method. The thickness of the nickel layer and the thickness of the gold layer are both less than 20 nm, and may be, for example, 7, 10, 15, or 20 nm, but is not limited thereto. Preferably, the nickel layer has a thickness of 10 nm while the gold layer has a thickness of 5 or 7 nm.
在該步驟(3)中,該鈣鈦礦材料層11係為有機鉛碘化合 物,其分子式可例如是CH3NH3PbI3、CH3NH3PbIxCl3-x或HC(NH2)2PbI3。在本步驟中,該鈣鈦礦材料層11可藉由下述步驟形成:先製備有機鉛碘化合物溶液,然後在該金鎳氧化物層12上以1000轉/每分鐘進行塗布20秒;接著不添加溶液僅改變旋轉速度,以4000轉/每分鐘(rpm)持續25秒,使有機鉛碘化合物溶液平均分布於該金鎳氧化物層12,形成一有機鉛碘薄膜;然後,維持4000rpm並以氮氣吹拂該有機鉛碘薄膜持續35秒;最後將該有機鉛碘薄膜在100℃進行熱退火10分鐘。 In the step (3), the perovskite material layer 11 is an organic lead iodine compound, and its molecular formula may be, for example, CH 3 NH 3 PbI 3 , CH 3 NH 3 PbI x Cl 3-x or HC(NH 2 ). 2 PbI 3 . In this step, the perovskite material layer 11 can be formed by first preparing an organic lead iodine compound solution, and then coating the gold nickel oxide layer 12 at 1000 rpm for 20 seconds; The organic lead iodine compound solution was evenly distributed on the gold nickel oxide layer 12 to form an organic lead iodine film by forming the organic lead iodine film evenly at a speed of 25 rpm for 25 seconds without adding a solution; then, maintaining 4000 rpm and The organic lead iodine film was blown with nitrogen for 35 seconds; finally, the organic lead iodine film was thermally annealed at 100 ° C for 10 minutes.
此外,在形成該鈣鈦礦材料層11之後,可另包含一步驟:形成一電子傳輸層13於該鈣鈦礦材料層11上,其中該電子傳輸層13可選自富勒烯、ZnO、TiO2或PCBM。 In addition, after the formation of the perovskite material layer 11, a further step may be further included: forming an electron transport layer 13 on the perovskite material layer 11, wherein the electron transport layer 13 may be selected from fullerene, ZnO, TiO 2 or PCBM.
請參考第2A至2C圖,其係用以說明該金鎳氧化物層12的形成機制。如第2A圖所示,該鎳層及金層依序以電子束法形成於該透明基板14上。接著,如第2B圖所示,在氧氣(O2)充足的環境中進行該熱退火處理時,該金層和該鎳層發生擴散作用,部份從金的金屬晶界(grain boundary)處溢出的鎳開始與氧氣進行反應形成鎳氧化物(NiOX)。當越來越多鎳氧化物持續累積於金的晶界處,會使不被氧化的金被推擠且沉積於該透明基板14上。最後,形成如第2C圖所示之該金的網狀結構嵌入於氧化鎳中。 Please refer to FIGS. 2A to 2C for explaining the formation mechanism of the gold-nickel oxide layer 12. As shown in FIG. 2A, the nickel layer and the gold layer are sequentially formed on the transparent substrate 14 by electron beam method. Next, as shown in FIG. 2B, when the thermal annealing treatment is performed in an environment where oxygen (O 2 ) is sufficient, the gold layer and the nickel layer diffuse, partially from the metal grain boundary of the gold. The spilled nickel begins to react with oxygen to form nickel oxide (NiO X ). As more and more nickel oxide continues to accumulate at the grain boundaries of the gold, gold that is not oxidized is pushed and deposited on the transparent substrate 14. Finally, a network structure in which the gold is formed as shown in Fig. 2C is embedded in the nickel oxide.
本發明另提供實際測試數據及分析以驗證本發明上述實施例之鈣鈦礦太陽能電池的結構及效率。 The present invention further provides actual test data and analysis to verify the structure and efficiency of the perovskite solar cell of the above-described embodiments of the present invention.
請參考第3A及3B圖,其係顯示在500℃進行熱退火處理5分鐘後,以掃描式電子顯微鏡(SEM)觀察所形成的金鎳氧化物層 (Au:NiOX)的表面及剖面結構。從第3A圖可發現其表面型態已具有金的網狀結構及於氧化鎳層中的島狀結構,而從第3B圖則可見到下層的鎳所形成的氧化鎳(NiOX)將金推擠到玻璃基板14’上。在SEM圖中氧化鎳(NiOX)的部分為暗灰色(黑色),而較亮的部分為金(Au)。 Please refer to Figures 3A and 3B, which show the surface and cross-sectional structure of the formed gold-nickel oxide layer (Au:NiO X ) observed by scanning electron microscopy (SEM) after thermal annealing at 500 ° C for 5 minutes. . It can be seen from Fig. 3A that the surface morphology already has a gold network structure and an island structure in the nickel oxide layer, and from Fig. 3B, it can be seen that the nickel oxide (NiO X ) formed by the lower layer of nickel is gold. Push onto the glass substrate 14'. In the SEM image, the portion of nickel oxide (NiO X ) is dark gray (black), and the brighter portion is gold (Au).
請參考下表1所示,其係在不同溫度下進行熱退火處理5分鐘所形成的金鎳氧化物層的光電特性的比較,並以現有鈣鈦礦太陽能電池所使用的ITO/PEDOT:PSS作為對照組。其中,7Au:NiOX代表7奈米厚的金層與10奈米厚的鎳層進行熱退火處理後形成的金鎳氧化物層,而5Au:NiOX是代表5奈米厚的金層與10奈米厚的鎳層進行熱退火處理後形成的金鎳氧化物層。 Please refer to Table 1 below for comparison of the photoelectric characteristics of the gold-nickel oxide layer formed by thermal annealing at different temperatures for 5 minutes, and using ITO/PEDOT:PSS for existing perovskite solar cells. As a control group. Among them, 7Au:NiO X represents a gold nickel oxide layer formed by thermal annealing of a 7 nm thick gold layer and a 10 nm thick nickel layer, and 5Au:NiO X is a 5 nm thick gold layer and A gold nickel oxide layer formed by thermal annealing after a 10 nm thick nickel layer.
從表1可知,實驗組1~4中具有相同厚度的金層與鎳層在 不同溫度下,所形成的金鎳氧化物層的光電特性也有極大差異,其中以實驗組3在500℃進行熱退火處理所獲得的金鎳氧化物層具有最佳的光電轉換效率約10.24%,已相當接近現有透明電極ITO及電洞傳輸層PEDOT:PSS。 It can be seen from Table 1 that the gold layer and the nickel layer having the same thickness in the experimental groups 1 to 4 are At different temperatures, the photoelectric properties of the formed gold-nickel oxide layer are also greatly different. The gold-nickel oxide layer obtained by thermal annealing of the experimental group 3 at 500 ° C has an optimum photoelectric conversion efficiency of about 10.24%. It is quite close to the existing transparent electrode ITO and hole transport layer PEDOT:PSS.
請繼續參考第4圖,其係顯示上述對照組及實驗組1~5的金鎳氧化物層的穿透率變化。此外,量測實驗組1進行熱退火處理前的金層及鎳層的穿透率以供比較。從第4圖中可以發現,經過熱退火處理,可將原本不透光的金層及鎳層(未退火)轉變為實驗組1中穿透率約40%的金鎳氧化物層,隨著退火溫度的提高,可提升穿透率至大約70%(實驗組3~5)。此外,從實驗組3及實驗組5可知不同厚度的金層及鎳層分別經過500℃的熱退火處理後,實驗組5的5奈米金層和10奈米鎳層所形成的金鎳氧化物層具有較高的穿透率,相較於實驗組3可提升大約10%。 Please continue to refer to Fig. 4, which shows the change in the transmittance of the gold nickel oxide layer of the above control group and the experimental group 1 to 5. In addition, the penetration rates of the gold layer and the nickel layer before the thermal annealing treatment were measured by the experimental group 1 for comparison. It can be seen from Fig. 4 that after the thermal annealing treatment, the gold layer and the nickel layer (unannealed) which are originally opaque can be converted into the gold nickel oxide layer having a transmittance of about 40% in the experimental group 1, with An increase in the annealing temperature increases the penetration rate to approximately 70% (experimental group 3 to 5). In addition, from the experimental group 3 and the experimental group 5, it is known that the gold and nickel layers of different thicknesses are subjected to thermal annealing at 500 ° C, respectively, and the gold nickel oxide formed by the 5 nm gold layer and the 10 nm nickel layer of the experimental group 5 is oxidized. The layer has a higher penetration rate and can be increased by about 10% compared to the experimental group 3.
請繼續參考第5圖,其顯示了上述實驗組1至4的功函數(work function)變化。從第5圖可見,隨著熱退火溫度從350℃上升至550℃,功函數也隨之上升,在500℃時約5.25eV。 Please continue to refer to FIG. 5, which shows the change in work function of the above experimental groups 1 to 4. As can be seen from Fig. 5, as the thermal annealing temperature rises from 350 ° C to 550 ° C, the work function also rises, about 5.25 eV at 500 ° C.
依照本發明的鈣鈦礦太陽能電池及其製造方法,該金鎳氧化物層可以具有相當好的透光性,在500℃熱退火處理後最高可達到約70%,且具有與鈣鈦礦相匹配的功函數約5.25eV,這是因為該金鎳氧化物層含有NiOX,其具有與鈣鈦礦材料相匹配之功函數為5.4eV,相較於PEDOT:PSS功函數為5.1eV,由於電洞傳輸時能量損失少,更適合電洞之萃取,且具有化學穩定性與電子阻擋能力。再者,雖然電洞傳輸材料NiOX非常適合做為鈣鈦礦太陽能電池之電洞傳輸材料,但NiOX之電特性較差,因此本發明藉由在玻璃基板上以電子束成長Ni/Au雙層結構,再以高溫退 火氧化形成Au:NiOX,可取代傳統ITO作為一透明電極,亦不須使用電洞傳輸材料,可直接與鈣鈦礦材料層形成相當好的異質接合。 According to the perovskite solar cell of the present invention and the method of manufacturing the same, the gold nickel oxide layer can have a relatively good light transmittance, up to about 70% after thermal annealing at 500 ° C, and has a perovskite phase The matched work function is about 5.25 eV because the gold nickel oxide layer contains NiO X , which has a work function matching the perovskite material of 5.4 eV, which is 5.1 eV compared to the PEDOT:PSS work function due to The hole has less energy loss when it is transmitted, and is more suitable for extraction of holes, and has chemical stability and electron blocking ability. Furthermore, although the hole transport material NiO X is very suitable as a hole transport material for a perovskite solar cell, the electrical characteristics of NiO X are poor, so the present invention grows Ni/Au double by electron beam on a glass substrate. The layer structure is then annealed at high temperature to form Au:NiO X , which can replace the traditional ITO as a transparent electrode, and does not need to use a hole transport material, and can form a fairly good heterojunction directly with the perovskite material layer.
雖然本發明已以較佳實施例揭露,然其並非用以限制本發明,任何熟習此項技藝之人士,在不脫離本發明之精神和範圍內,當可作各種更動與修飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 The present invention has been disclosed in its preferred embodiments, and is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application.
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