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TW201819183A - Electromagnetic wave shielding material - Google Patents

Electromagnetic wave shielding material Download PDF

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Publication number
TW201819183A
TW201819183A TW106122503A TW106122503A TW201819183A TW 201819183 A TW201819183 A TW 201819183A TW 106122503 A TW106122503 A TW 106122503A TW 106122503 A TW106122503 A TW 106122503A TW 201819183 A TW201819183 A TW 201819183A
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electromagnetic wave
wave shielding
shielding material
substrate
conductive
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TW106122503A
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Chinese (zh)
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TWI800485B (en
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野村直宏
竹山早苗
櫻木喬規
平野昌由
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藤森工業股份有限公司
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • H05K9/0073Shielding materials
    • H05K9/0081Electromagnetic shielding materials, e.g. EMI, RFI shielding
    • H05K9/0084Electromagnetic shielding materials, e.g. EMI, RFI shielding comprising a single continuous metallic layer on an electrically insulating supporting structure, e.g. metal foil, film, plating coating, electro-deposition, vapour-deposition
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Laminated Bodies (AREA)

Abstract

An electromagnetic wave shielding material is provided, capable of realizing excellent followability to a high level difference. An electromagnetic wave shielding material is provided, characterized in that a conductive paste layer 13 and a conductive adhesion layer 14 are laminated in this order in the direction of the thickness of a substrate 11 on one side of the substrate 11, wherein the substrate 11 is made of a dielectric resin film, and the tensile elongation of the substrate 11 is 100% or more.

Description

電磁波遮蔽材    Electromagnetic wave shielding material   

本發明涉及能夠用於印刷基板等的電磁波遮蔽的電磁波遮蔽材。 The present invention relates to an electromagnetic wave shielding material that can be used for electromagnetic wave shielding of a printed circuit board or the like.

在行動電話等可攜式電子設備中,廣泛使用了集積有電子部件的印刷基板。另外,為了防止電磁波雜訊的影響所導致的電子設備的運轉失誤,使用了電磁波遮蔽材。 In portable electronic devices such as mobile phones, printed circuit boards on which electronic components are accumulated are widely used. In addition, in order to prevent malfunction of electronic equipment caused by the influence of electromagnetic wave noise, an electromagnetic wave shielding material is used.

例如,專利文獻1中記載了一種電磁波遮蔽片,其為包含絕緣層、導電層和黏接劑層的電磁波遮蔽片,導電層含有樹脂和導電性填料,表面電阻為100mΩ/□以下,電導率為1×106S/m以上。 For example, Patent Document 1 describes an electromagnetic wave shielding sheet, which is an electromagnetic wave shielding sheet including an insulating layer, a conductive layer, and an adhesive layer. The conductive layer contains a resin and a conductive filler. The surface resistance is 100 mΩ / □ or less. The electrical conductivity is It is 1 × 10 6 S / m or more.

另外,專利文獻2中記載了一種電磁波遮蔽膜,其以層積狀態具備層厚為0.5μm~12μm的金屬層和導電性各向異性黏接劑層。 In addition, Patent Document 2 describes an electromagnetic wave shielding film including a metal layer having a layer thickness of 0.5 to 12 μm and a conductive anisotropic adhesive layer in a laminated state.

[現有技術文獻] [Prior Art Literature]

[專利文獻] [Patent Literature]

專利文獻1:日本特開2015-138813號公報 Patent Document 1: Japanese Patent Application Laid-Open No. 2015-138813

專利文獻2:日本特開2015-109449號公報 Patent Document 2: Japanese Patent Application Laid-Open No. 2015-109449

作為印刷基板,已知有絕緣基板為硬質的剛性基板、絕緣基板為柔軟性的柔性基板、包括柔軟性的部分和硬質的部分的剛性柔性基板(剛柔結合基板)等。在基板厚度不同的部分的邊界部等具有高的段差的情況下,在將電磁波遮蔽材黏貼至印刷基板時,若電磁波遮蔽材對於印刷基板的段差的追隨不足,則會在段差處產生間隙,存在電磁波的侵入或洩漏、水分的侵入、塵埃的附著等問題。若勉強地使電磁波遮蔽材追隨段差,則有時可能會因為構成電磁波遮蔽材的導電層的斷裂或損傷等,而使電磁波遮蔽特性發生劣化。 As the printed substrate, a rigid rigid substrate with an insulating substrate, a flexible flexible substrate with a flexible substrate, and a rigid flexible substrate (rigid-flexible substrate) including a flexible portion and a rigid portion are known. In the case where there is a high level difference such as a boundary portion of a portion with a different substrate thickness, when the electromagnetic wave shielding material is adhered to the printed substrate, if the electromagnetic wave shielding material does not sufficiently follow the level difference of the printed substrate, a gap is generated at the level difference. There are problems such as electromagnetic wave intrusion or leakage, water intrusion, and dust adhesion. If the electromagnetic wave shielding material is forced to follow the step, the electromagnetic wave shielding characteristics may be deteriorated due to breakage or damage of the conductive layer constituting the electromagnetic wave shielding material.

本發明是鑒於上述情況而進行的,其課題在於提供一種即使對於高的段差追隨性也優異的電磁波遮蔽材。 The present invention has been made in view of the above circumstances, and an object thereof is to provide an electromagnetic wave shielding material that is excellent in followability even with a high level difference.

為了解決上述課題,本發明提供一種電磁波遮蔽材,其特徵在於,在由介電質樹脂膜形成的基材的單面上,沿著上述基材的厚度方向依序層積有導電性糊料層和導電性黏接劑層,上述基材的拉伸伸長率為100%以上。 In order to solve the above-mentioned problem, the present invention provides an electromagnetic wave shielding material, characterized in that a conductive paste is sequentially laminated on one side of a substrate formed of a dielectric resin film along a thickness direction of the substrate Layer and the conductive adhesive layer, the tensile elongation of the substrate is 100% or more.

上述導電性糊料層優選包含粒徑小於1μm的銀奈米粒子。 The conductive paste layer preferably contains silver nano particles having a particle diameter of less than 1 μm.

上述基材的拉伸伸長率優選為100%以上、300%以下。 The tensile elongation of the substrate is preferably 100% or more and 300% or less.

上述基材優選由溶劑可溶性聚醯亞胺膜形成。 The substrate is preferably formed of a solvent-soluble polyfluoreneimide film.

上述基材優選由聚醯亞胺膜形成,該聚醯亞胺膜使用在芳香族單元間具有碳原子數為3個以上的脂肪族單元的聚醯亞胺材料形成。 The substrate is preferably formed of a polyfluoreneimide film, which is formed using a polyfluoreneimide material having aromatic units having 3 or more carbon atoms between aromatic units.

上述導電性黏接劑層的厚度優選為15μm以下。 The thickness of the conductive adhesive layer is preferably 15 μm or less.

上述導電性黏接劑層優選為導電性各向異性黏接劑層。 The conductive adhesive layer is preferably a conductive anisotropic adhesive layer.

上述導電性黏接劑層優選包含聚氨酯。 The conductive adhesive layer preferably contains polyurethane.

從上述基材至上述導電性黏接劑層為止的總厚度優選為6μm~20μm。 The total thickness from the substrate to the conductive adhesive layer is preferably 6 μm to 20 μm.

上述基材優選在與層積有上述導電性糊料層和上述導電性黏接劑層的一側相反的面,被能夠從上述基材剝離的支撐體膜所支撐。 The substrate is preferably supported on a surface opposite to a side on which the conductive paste layer and the conductive adhesive layer are laminated by a support film that can be peeled from the substrate.

另外,本發明提供一種行動電話,其具備上述電磁波遮蔽材。 The present invention also provides a mobile phone including the electromagnetic wave shielding material.

另外,本發明提供一種電子設備,其具備上述電磁波遮蔽材。 The present invention also provides an electronic device including the electromagnetic wave shielding material.

根據本發明的電磁波遮蔽材,能夠提供一種即使對於高的段差追隨性也優異的電磁波遮蔽材。 According to the electromagnetic wave shielding material of the present invention, it is possible to provide an electromagnetic wave shielding material which is excellent in followability even with a high level difference.

10‧‧‧電磁波遮蔽材 10‧‧‧Electromagnetic wave shielding material

11‧‧‧基材 11‧‧‧ Substrate

12‧‧‧錨固層 12‧‧‧ Anchor layer

13‧‧‧導電性糊料層 13‧‧‧ conductive paste layer

14‧‧‧導電性黏接劑層 14‧‧‧ conductive adhesive layer

20‧‧‧電磁波遮蔽材層積體 20‧‧‧Layer of electromagnetic wave shielding material

21‧‧‧支撐體膜 21‧‧‧ support body membrane

22‧‧‧剝離膜 22‧‧‧ peeling film

30‧‧‧檢測用基板 30‧‧‧ Detection substrate

31‧‧‧端子部 31‧‧‧Terminal

32‧‧‧柔軟性基板部 32‧‧‧ Flexible substrate section

33‧‧‧硬質基板部 33‧‧‧Hard substrate department

圖1是顯示本發明的電磁波遮蔽材的一例的示意性截面圖。 FIG. 1 is a schematic cross-sectional view showing an example of an electromagnetic wave shielding material of the present invention.

圖2是對實施例中的段差追隨性的評價方法進行說明的示意性截面圖。 FIG. 2 is a schematic cross-sectional view illustrating a method for evaluating a step difference followability in an example.

下面,對本發明的優選實施方式進行說明。 Hereinafter, preferred embodiments of the present invention will be described.

在圖1中顯示出本實施方式的電磁波遮蔽材的示意性截面 圖。該電磁波遮蔽材10具有下述結構:在由介電質樹脂膜形成的基材11的單面上,沿著上述基材的厚度方向依序層積有導電性糊料層13和導電性黏接劑層14。在將電磁波遮蔽材10黏貼至作為被黏物的印刷基板等時,由於外表面為介電質基材11,因而不需要進一步在其外表面設置電絕緣被覆材料。 A schematic cross-sectional view of the electromagnetic wave shielding material of the present embodiment is shown in FIG. 1. This electromagnetic wave shielding material 10 has a structure in which a conductive paste layer 13 and a conductive adhesive layer are sequentially laminated on one surface of a substrate 11 formed of a dielectric resin film along the thickness direction of the substrate.接 剂 层 14。 Connection layer 14. When the electromagnetic wave shielding material 10 is adhered to a printed circuit board or the like as an adherend, since the outer surface is the dielectric base material 11, it is not necessary to further provide an electrically insulating coating material on the outer surface.

(基材) (Base material)

基材11是由介電質樹脂膜形成的絕緣層。作為構成基材11的樹脂膜,可以舉出聚醯亞胺樹脂膜、聚酯樹脂膜、聚醯胺樹脂膜等。在基材11由聚醯亞胺樹脂膜形成的情況下,具有作為聚醯亞胺樹脂的特徵的高機械強度、耐熱性、絕緣性、耐溶劑性,在達到260℃左右之前化學性質是穩定的,因而是合適的。 The base material 11 is an insulating layer formed of a dielectric resin film. Examples of the resin film constituting the base material 11 include a polyimide resin film, a polyester resin film, and a polyimide resin film. When the base material 11 is formed of a polyimide resin film, it has high mechanical strength, heat resistance, insulation, and solvent resistance, which are characteristics of a polyimide resin, and is chemically stable until it reaches about 260 ° C. Yes, it is suitable.

作為聚醯亞胺,有在藉由加熱聚醯胺酸(polyamic acid)所產生的脫水縮合反應中生成的熱固化型聚醯亞胺;和非脫水縮合型的可溶於溶劑的溶劑可溶性聚醯亞胺。作為聚醯亞胺膜的製造方法,通常已知的方法如下:藉由使二胺和羧酸二酐在極性溶劑中發生反應,從而合成作為醯亞胺前驅物的聚醯胺酸,利用熱或催化劑對聚醯胺酸進行脫水環化,從而製成對應的聚醯亞胺。但是,該醯亞胺化的步驟中的加熱處理溫度優選為200℃~300℃的溫度範圍。在加熱溫度低於該溫度的情況下,醯亞胺化有可能不進行,因而不是優選的。在加熱溫度高於上述溫度的情況下,有可能發生化合物的熱分解,因而不是優選的。 Examples of the polyimide include a thermosetting polyimide produced in a dehydration condensation reaction by heating a polyamic acid, and a non-dehydration condensation type solvent-soluble solvent-soluble polymer.醯 imine. As a method for producing a polyimide film, a generally known method is as follows: A diamine and a carboxylic dianhydride are reacted in a polar solvent to synthesize a polyimide acid as a precursor of the imine, and heat is used. Or the catalyst dehydrates and cyclizes the polyamidic acid to make the corresponding polyimide. However, it is preferable that the heat treatment temperature in the step of imidization is in a temperature range of 200 ° C to 300 ° C. When the heating temperature is lower than this temperature, fluorene imidization may not proceed, which is not preferable. In the case where the heating temperature is higher than the above temperature, thermal decomposition of the compound may occur, which is not preferable.

為了進一步提高基材11的可撓性,優選厚度小於 10μm的極薄的聚醯亞胺膜。若在支撐體膜21的單面上層積薄的聚醯亞胺膜而形成基材11,則即使聚醯亞胺膜本身的機械強度低,也容易沿著長度方向進行連續搬運,因而是優選的。作為支撐體膜21,從兼顧價格和耐熱溫度性能的觀點,優選為泛用的樹脂膜,例如聚對苯二甲酸乙二醇酯(PET)樹脂膜。但是,PET的耐熱溫度沒有像聚醯亞胺那麼高,因而無法採用在PET上進行醯亞胺前驅物的塗佈與聚醯胺酸的醯亞胺化的方法。 In order to further improve the flexibility of the substrate 11, an extremely thin polyimide film having a thickness of less than 10 m is preferred. When a thin polyimide film is laminated on one surface of the support film 21 to form the substrate 11, the polyimide film itself is easy to be transported continuously along the longitudinal direction even if the mechanical strength of the polyimide film is low, which is preferable of. As the support film 21, a resin film for general use, such as a polyethylene terephthalate (PET) resin film, is preferred from the viewpoint of both price and heat-resistant temperature performance. However, the heat-resistant temperature of PET is not as high as that of polyimide, so it is impossible to adopt a method of coating the imine precursor on PET and the imidization of polyimide.

溶劑可溶性聚醯亞胺,由於其聚醯亞胺的醯亞胺化完成,並且可溶於溶劑,因而在塗佈了使其溶解於溶劑中而得到的塗佈液後,能夠在小於200℃的低溫下藉由使溶劑揮發而成膜。因此,在基材11是由溶劑可溶性聚醯亞胺膜形成的情況下,能夠利用下述方法形成聚醯亞胺膜的薄膜樹脂膜,該方法是在支撐體膜21的單面上塗佈為非脫水縮合型的溶劑可溶性聚醯亞胺的塗佈液後,以溫度小於200℃的加熱溫度使其乾燥。另外,可以一邊沿著長度方向搬運相同的支撐體膜21,一邊在支撐體膜21的單面上繼續連續地形成錨固層12、導電性糊料層13、導電性黏接劑層14等。藉此,也能夠以卷對卷(roll-to-roll)的方式生產電磁波遮蔽材10,加工性、生產性優異。 The solvent-soluble polyfluorene imine has a polyfluorene imine-imidization and is soluble in a solvent. Therefore, after coating a coating liquid obtained by dissolving the polyfluorene in a solvent, the temperature can be lower than 200 ° C. The film is formed by evaporating the solvent at a low temperature. Therefore, in the case where the substrate 11 is formed of a solvent-soluble polyimide film, a thin-film resin film of a polyimide film can be formed by the following method, which is applying on one side of the support film 21 After being a non-dehydration condensation type solvent-soluble polyfluorene imide coating liquid, it is dried at a heating temperature of less than 200 ° C. In addition, the anchor layer 12, the conductive paste layer 13, the conductive adhesive layer 14, and the like can be continuously formed on one side of the support body film 21 while the same support body film 21 is conveyed in the longitudinal direction. Thereby, the electromagnetic wave shielding material 10 can also be produced in a roll-to-roll manner, which is excellent in processability and productivity.

用於基材11的非脫水縮合型的溶劑可溶性聚醯亞胺,沒有特別限定,可以使用市售的溶劑可溶性聚醯亞胺的塗佈液。作為市售的溶劑可溶性聚醯亞胺的塗佈液,具體可以舉出Solpit 6,6-PI(Solpit Industries,Ltd.)、Q-IP-0895D(PI R&D Co.,LTD)、PIQ(日立化成工業)、SPI-200N(新日鐵化學)、 RIKACOAT SN-20、RIKACOAT PN-20(新日本理化)等。將溶劑可溶性聚醯胺的塗佈液塗佈至支撐體膜21上的方法,沒有特別限制,例如,能夠利用模具塗佈機、刮刀式塗佈機、唇型塗佈機(lip coater)等塗佈機進行塗佈。 The non-dehydration-condensation type solvent-soluble polyfluorene imide used for the substrate 11 is not particularly limited, and a commercially available coating solution of a solvent-soluble polyfluorene imine can be used. Specific examples of commercially available solvent-soluble polyimide coating solutions include Solpit 6,6-PI (Solpit Industries, Ltd.), Q-IP-0895D (PI R & D Co., LTD), and PIQ (Hitachi). Chemical Industry), SPI-200N (Nippon Steel Chemical), RIKACOAT SN-20, RIKACOAT PN-20 (Nippon Physico Chemical), etc. The method for applying the solvent-soluble polyamine coating solution to the support film 21 is not particularly limited. For example, a die coater, a blade coater, a lip coater, or the like can be used. The coating machine performs coating.

基材11的厚度(例如,聚醯亞胺膜的厚度)優選為1μm~9μm。在將聚醯亞胺膜製成厚度小於0.8μm的膜時,所製造的膜的機械強度弱,因而技術上有困難。另外,若基材11的厚度超過10μm,則難以得到薄型且具有優異的段差追隨性的電磁波遮蔽材10。另外,在基材11的厚度薄於約7μm的情況下,難以調整卷取於輥時的張力。因此,優選在支撐體膜21的單面上層積薄的聚醯亞胺膜而形成基材11。或者,優選預先在剝離膜22上形成了導電性黏接劑層14、導電性糊料層13、錨固層12等,之後再進一步形成基材11。 The thickness of the substrate 11 (for example, the thickness of the polyimide film) is preferably 1 μm to 9 μm. When the polyfluorene imide film is made into a film having a thickness of less than 0.8 μm, the mechanical strength of the produced film is weak, and therefore it is technically difficult. In addition, if the thickness of the substrate 11 exceeds 10 μm, it is difficult to obtain the electromagnetic shielding material 10 that is thin and has excellent step-followability. Moreover, when the thickness of the base material 11 is thinner than about 7 micrometers, it is difficult to adjust the tension at the time of being wound by a roll. Therefore, it is preferable to form a base 11 by laminating a thin polyimide film on one surface of the support film 21. Alternatively, it is preferable to form the conductive adhesive layer 14, the conductive paste layer 13, the anchor layer 12, and the like on the release film 22 in advance, and then further form the base material 11.

在不利用支撐體膜21,而使用僅由薄的聚醯亞胺膜形成的基材11的情況下,厚度優選為約1μm~9μm。 When the support body film 21 is not used and the base material 11 formed of only a thin polyimide film is used, the thickness is preferably about 1 μm to 9 μm.

另外,為了提高對於作為被黏物的印刷基板的段差的追隨性,本實施方式的基材11優選拉伸伸長率高。基材11的拉伸伸長率優選為100%以上。另外,對於基材11的拉伸伸長率的上限沒有特別限定,可例示300%以下。基材11的彈性模量優選為1.0GPa以上、2.5GPa以下。在由聚醯亞胺膜形成拉伸伸長率高的基材11的情況下,例如,優選使用在芳香族單元間具有碳原子數為3個以上的脂肪族單元的聚醯亞胺材料所形成的聚醯亞胺膜。進而,脂肪族單元優選包含具有碳原子數為1~10左右的伸烷基(alkylene group)的聚伸氧烷基 (polyalkyleneoxy group)。 In addition, in order to improve the followability of the step to the printed circuit board as an adherend, the base material 11 of the present embodiment preferably has a high tensile elongation. The tensile elongation of the base material 11 is preferably 100% or more. The upper limit of the tensile elongation of the substrate 11 is not particularly limited, and may be 300% or less. The elastic modulus of the base material 11 is preferably 1.0 GPa or more and 2.5 GPa or less. When the base 11 having a high tensile elongation is formed of a polyimide film, for example, it is preferably formed using a polyimide material having aromatic units having 3 or more carbon atoms between aromatic units. Polyimide film. Furthermore, the aliphatic unit preferably contains a polyalkyleneoxy group having an alkylene group having about 1 to 10 carbon atoms.

另外,本實施方式的基材11中使用的聚醯亞胺膜的水蒸氣透過率優選為500g/m2‧天以上。在水蒸氣透過率低於500g/m2‧天的情況下,利用電磁波遮蔽材10被覆印刷基板後,在如焊料回流的加熱步驟中,由於來自各層的殘留溶劑或黏接劑的釋氣(outgas)、膜中的水分被急劇加熱而產生的水蒸氣等,各層間有可能發生剝離。對於水蒸氣透過率不特別設置上限,但只要使用相同的材料,則水蒸氣透過率與厚度成反比,因而在減薄厚度、提高水蒸氣透過率的情況下,優選在上述的厚度範圍內。 Moreover, it is preferable that the water vapor transmission rate of the polyimide film used for the base material 11 of this embodiment is 500 g / m 2 ‧ days or more. In the case where the water vapor transmission rate is less than 500 g / m 2 ‧ days, after the printed circuit board is covered with the electromagnetic wave shielding material 10, in the heating step such as solder reflow, the residual solvent from each layer or the outgassing of the adhesive outgas), water vapor generated by rapid heating of water in the film, etc., peeling may occur between layers. There is no particular upper limit for the water vapor transmission rate, but as long as the same material is used, the water vapor transmission rate is inversely proportional to the thickness. Therefore, when the thickness is reduced and the water vapor transmission rate is increased, it is preferably within the above-mentioned thickness range.

(支撐體膜) (Support body membrane)

在電磁波遮蔽材10的使用時,支撐體膜21能夠從基材11剝離。作為支撐體膜21的基材,可以舉出,例如,聚對苯二甲酸乙二醇酯、聚對苯二甲酸丁二醇酯、聚萘二甲酸乙二醇酯等的聚酯膜;聚丙烯、聚乙烯等地聚烯烴膜。支撐體膜21的厚度並不包括在被覆於印刷基板而使用時的電磁波遮蔽材10的整體厚度中,因而沒有特別限定,通常為12μm~150μm左右。 When the electromagnetic wave shielding material 10 is used, the support film 21 can be peeled from the base material 11. Examples of the base material of the support film 21 include polyester films such as polyethylene terephthalate, polybutylene terephthalate, and polyethylene naphthalate; Polyolefin film such as propylene and polyethylene. The thickness of the support film 21 is not particularly limited to the entire thickness of the electromagnetic wave shielding material 10 when it is used by being coated on a printed circuit board, and is not particularly limited, but is usually about 12 μm to 150 μm.

在支撐體膜21的基材為,例如,聚對苯二甲酸乙二醇酯(PET)等的基材本身具有某種程度的剝離性的情況下,可以不對支撐體膜21實施剝離處理而直接層積由所塗佈的介電質薄膜樹脂膜形成的基材11,也可以在支撐體膜21的表面實施為了使基材11更容易剝離的剝離處理。另外,在支撐體膜21的基材不具有剝離性的情況下,可以藉由在塗佈胺基醇 酸樹脂(amino alkyd resin)或矽酮樹脂等的剝離劑後進行加熱乾燥而實施剝離處理。施用於支撐體膜21的剝離劑優選不使用矽酮樹脂。若使用矽酮樹脂作為剝離劑,則矽酮樹脂的一部分會轉移至與支撐體膜21的表面接觸的基材11的表面,進而矽酮樹脂通過電磁波遮蔽材10的內部而轉移至導電性黏接劑層14的表面,有可能會減弱導電性黏接劑層14的黏接力。 When the base material of the support body film 21 is, for example, a base material such as polyethylene terephthalate (PET) itself has a certain degree of releasability, the support body film 21 may not be subjected to a peeling treatment. The substrate 11 formed of the applied dielectric thin film resin film is directly laminated, and a peeling treatment may be performed on the surface of the support film 21 in order to make the substrate 11 easier to peel. In addition, when the base material of the support film 21 does not have releasability, a peeling treatment may be performed by applying a release agent such as an amino alkyd resin or a silicone resin, followed by heating and drying. . The release agent applied to the support film 21 preferably does not use a silicone resin. When a silicone resin is used as a release agent, a part of the silicone resin is transferred to the surface of the base material 11 which is in contact with the surface of the support film 21, and the silicone resin is transferred to the conductive adhesive through the inside of the electromagnetic shielding material 10 The surface of the adhesive layer 14 may weaken the adhesive force of the conductive adhesive layer 14.

(錨固層) (Anchor layer)

在本實施方式的電磁波遮蔽材10中,為了實現基材11與導電性糊料層13的密合力的提高,可以使用錨固層12。錨固層12是將基材11與導電性糊料層13黏接的薄膜的黏接劑層。在導電性糊料層13與基材11的密合性充分的情況下,也可以省略錨固層12。在錨固層12上進行導電性糊料的塗佈和加熱燒成而形成導電性糊料層13的情況下,需要使用耐熱性優異的黏接性樹脂作為錨固層12的材料。 In the electromagnetic wave shielding material 10 of the present embodiment, in order to improve the adhesion between the substrate 11 and the conductive paste layer 13, the anchor layer 12 may be used. The anchor layer 12 is an adhesive layer of a thin film which adheres the base material 11 and the conductive paste layer 13. When the adhesiveness between the conductive paste layer 13 and the substrate 11 is sufficient, the anchor layer 12 may be omitted. In the case where the conductive paste layer 13 is formed by applying and heating the conductive paste on the anchor layer 12, it is necessary to use an adhesive resin having excellent heat resistance as the material of the anchor layer 12.

作為用於錨固層12的黏接性樹脂,優選可以舉出聚酯樹脂、聚氨酯樹脂、(甲基)丙烯酸樹脂、聚乙烯樹脂、聚苯乙烯樹脂、聚醯胺樹脂等的熱塑性樹脂;環氧樹脂、胺基樹脂、聚醯亞胺樹脂、(甲基)丙烯酸樹脂等的熱固化型樹脂。作為錨固層12的黏接性樹脂,特別優選的是,使具有環氧基的聚酯系樹脂組合物交聯的黏接性樹脂組合物;或是在聚氨酯系樹脂中混合了作為固化劑的環氧樹脂的黏接性樹脂組合物等。因此,與由聚醯亞胺膜的薄膜形成的基材11相比,錨固層12具有較硬的物性。具有環氧基的聚酯系樹脂組合物,沒有特別限定,例如,可以藉由1分子中具有2個以上環氧基的 環氧樹脂(其未固化樹脂)與1分子中具有2個以上羧基的多元羧酸的反應等而獲得。具有環氧基的聚酯系樹脂組合物的交聯,可以使用與環氧基反應的環氧樹脂用的交聯劑。 Preferred examples of the adhesive resin used for the anchor layer 12 include thermoplastic resins such as polyester resins, polyurethane resins, (meth) acrylic resins, polyethylene resins, polystyrene resins, and polyamide resins; epoxy resins; Thermosetting resins such as resins, amine-based resins, polyimide resins, and (meth) acrylic resins. As the adhesive resin of the anchor layer 12, an adhesive resin composition in which a polyester resin composition having an epoxy group is crosslinked is particularly preferable; or a polyurethane resin is mixed as a curing agent. Adhesive resin composition of epoxy resin and the like. Therefore, the anchor layer 12 has harder physical properties than the substrate 11 formed of a thin film of a polyimide film. The polyester resin composition having an epoxy group is not particularly limited. For example, an epoxy resin (its uncured resin) having two or more epoxy groups in one molecule and two or more carboxyl groups in one molecule can be used. Obtained by the reaction of a polycarboxylic acid. For the crosslinking of the epoxy-based polyester resin composition, a crosslinking agent for an epoxy resin that reacts with an epoxy group can be used.

錨固層12的厚度優選為0.05μm~1μm左右。若為該程度的膜厚,則可獲得與導電性糊料層13的充分的密合力。在錨固層12的厚度為0.05μm以下的情況下,基材11與導電性糊料層13的密合力有可能會降低。另外,若錨固層12的厚度超過1μm,則成本增加,因而不是優選的。 The thickness of the anchor layer 12 is preferably about 0.05 μm to 1 μm. With such a film thickness, a sufficient adhesive force with the conductive paste layer 13 can be obtained. When the thickness of the anchor layer 12 is 0.05 μm or less, the adhesion between the substrate 11 and the conductive paste layer 13 may decrease. In addition, if the thickness of the anchor layer 12 exceeds 1 μm, the cost increases, which is not preferable.

(導電性糊料層) (Conductive paste layer)

在導電性糊料層13的形成中,使用在成為黏結劑的樹脂組合物中混入了導電性填料而成的導電性糊料。作為導電性糊料,優選包含選自由導電性金屬微粒、碳奈米管、碳奈米纖維所組成的導電性填料組中的1種以上和黏結劑樹脂組合物。作為導電性金屬微粒,使用銅、銀、鎳、鋁等金屬微粉末,但從導電性能高、價格低的觀點,優選使用銅或銀的微粉、或粒徑小於1μm的奈米粒子(銅奈米粒子、銀奈米粒子等)。另外,也可以使用作為具有導電性的碳奈米粒子的碳奈米管、碳奈米纖維。導電性糊料層13的燒成後的體積電阻率優選為1.5×10-5Ω‧cm以下。另外,導電性糊料層13的燒成後的表面電阻率優選為0.3Ω/□以下。 For the formation of the conductive paste layer 13, a conductive paste in which a conductive filler is mixed in a resin composition serving as a binder is used. The conductive paste preferably contains one or more selected from the group of conductive fillers consisting of conductive metal fine particles, carbon nanotubes, and carbon fibers, and a binder resin composition. As the conductive metal fine particles, fine metal powders such as copper, silver, nickel, and aluminum are used. However, from the viewpoint of high conductivity and low price, it is preferable to use fine powders of copper or silver or nano particles having a particle size of less than 1 μm (copper nano Rice particles, silver nano particles, etc.). In addition, carbon nanotubes and carbon nanofibers which are carbon nanoparticle having conductivity can also be used. The volume resistivity of the conductive paste layer 13 after firing is preferably 1.5 × 10 -5 Ω · cm or less. The surface resistivity of the conductive paste layer 13 after firing is preferably 0.3 Ω / □ or less.

為了將導電性糊料的燒成溫度抑制為150℃~250℃的溫度範圍的低溫,金屬微粒的平均粒徑優選為1nm~120nm的範圍、更優選為1nm~100nm的範圍。藉由使導電性糊料層13中含有這樣的金屬微粒,不僅能夠進行薄膜化,而 且微粒彼此發生熔融接合,還能夠同時實現電導率的提高。此外,藉由用有機分子層被覆金屬微粒的表面,能夠提高在溶劑中的分散性能。在導電性糊料的加熱燒成步驟中,金屬微粒相互使表面接觸,從而導電性糊料層13表現出導電性。 In order to suppress the firing temperature of the conductive paste to a low temperature in a temperature range of 150 ° C to 250 ° C, the average particle diameter of the metal fine particles is preferably in a range of 1 nm to 120 nm, and more preferably in a range of 1 nm to 100 nm. By including such metal fine particles in the conductive paste layer 13, not only can a thin film be formed, but also the fine particles can be melt-bonded with each other, and the electrical conductivity can be improved at the same time. In addition, by covering the surface of the metal fine particles with an organic molecular layer, the dispersibility in a solvent can be improved. In the heating and firing step of the conductive paste, the metal particles are brought into contact with each other on the surface, so that the conductive paste layer 13 exhibits conductivity.

導電性糊料的加熱燒成,例如,藉由加熱至150℃~250℃左右,而使被覆金屬微粒表面的有機分子層脫離,使其蒸發除去,因此優選使燒成溫度在有機分子層的沸點範圍。 The conductive paste is heated and fired. For example, by heating to about 150 ° C to 250 ° C, the organic molecular layer on the surface of the coated metal particles is detached and evaporated to remove it. Therefore, the firing temperature is preferably at the Boiling point range.

在導電性糊料的燒成時,在使用支撐體膜21或剝離膜22的情況下,為了抑制這些樹脂膜的熱劣化,優選使燒成溫度為較低的溫度,優選為150℃~180℃。 When the conductive paste is fired, when the support film 21 or the release film 22 is used, in order to suppress the thermal degradation of these resin films, the firing temperature is preferably lower, and preferably 150 ° C to 180 °. ℃.

作為在導電性糊料中與導電性填料混合使用的黏結劑樹脂組合物,優選可以舉出聚酯樹脂、(甲基)丙烯酸樹脂、聚乙烯樹脂、聚苯乙烯樹脂、聚醯胺樹脂等的熱塑性樹脂;環氧樹脂、胺基樹脂、聚醯亞胺樹脂、(甲基)丙烯酸樹脂等的熱固化性樹脂。 As the binder resin composition to be used in combination with a conductive filler in a conductive paste, polyester resin, (meth) acrylic resin, polyethylene resin, polystyrene resin, polyamide resin, and the like are preferably exemplified. Thermoplastic resin; thermosetting resin such as epoxy resin, amine-based resin, polyimide resin, (meth) acrylic resin.

對於導電性糊料,在這些黏結劑樹脂組合物中混入導電性金屬微粒、碳奈米管、碳奈米纖維等導電性填料後,可根據需要加入醇或醚等有機溶劑進行黏度調節。黏度調節可以藉由有機溶劑的添加量(混配比)而進行。藉由在導電性糊料中混入黏結劑樹脂組合物,在使FPC用電磁波遮蔽材追隨段差而進行貼附的情況下,即使被拉伸也能夠防止產生龜裂、防止損害導電性。 For the conductive paste, conductive adhesives such as conductive metal particles, carbon nanotubes, and carbon nanofibers are mixed into these binder resin compositions, and an organic solvent such as alcohol or ether may be added to adjust the viscosity as required. The viscosity can be adjusted by the addition amount (mixing ratio) of the organic solvent. When an adhesive resin composition is mixed with a conductive paste, when an electromagnetic wave shielding material for FPC is adhered to a step, the crack can be prevented and the conductivity can be prevented from being impaired even when stretched.

導電性糊料層13的燒成後的厚度優選為0.1μm~2μm左右、更優選為0.3μm~1μm左右。在導電性糊料層13的燒成 後的厚度薄於0.1μm的情況下,難以獲得高的電磁波遮蔽性能。另一方面,若導電性糊料層13的燒成後的厚度厚於2μm,則成本增加,因而不是優選的。 The thickness of the conductive paste layer 13 after firing is preferably about 0.1 μm to 2 μm, and more preferably about 0.3 μm to 1 μm. When the thickness of the conductive paste layer 13 after firing is thinner than 0.1 m, it is difficult to obtain high electromagnetic wave shielding performance. On the other hand, if the thickness of the conductive paste layer 13 after firing is thicker than 2 μm, the cost increases, which is not preferable.

(導電性黏接劑層) (Conductive adhesive layer)

導電性黏接劑層14是用於將電磁波遮蔽材10黏貼於印刷基板等被黏物的黏接劑層。作為導電性黏接劑層14,優選藉由加熱加壓的熱固化性黏接劑層,而不是在常溫下顯示出壓敏黏接性的黏著劑層。藉此,即使在印刷基板被反覆彎曲的情況下,黏接力也不易降低。 The conductive adhesive layer 14 is an adhesive layer for attaching the electromagnetic wave shielding material 10 to an adherend such as a printed circuit board. The conductive adhesive layer 14 is preferably a thermosetting adhesive layer by heating and pressing, rather than an adhesive layer that exhibits pressure-sensitive adhesiveness at ordinary temperature. Thereby, even when a printed circuit board is bent repeatedly, it is hard to reduce adhesive force.

作為用於導電性黏接劑層14的熱固化性黏接劑,可以舉出丙烯酸系黏接劑、聚氨酯系黏接劑、環氧系黏接劑、橡膠系黏接劑、矽酮系黏接劑等通常使用的熱固化型黏接劑。此外,優選使用混合了磷系、溴系等阻燃劑等而具有阻燃性的熱固化性黏接劑,對其沒有特別限定。也可以使用聚氨酯樹脂作為熱固化性黏接劑,該聚氨酯樹脂是使用含磷的化合物作為成為聚氨酯的原料的多元醇化合物或多異氰酸酯化合物,而在樹脂的分子結構中含有磷。熱固化性的導電性黏接劑層14優選包含含磷聚氨酯樹脂組合物和環氧樹脂。 Examples of the thermosetting adhesive used for the conductive adhesive layer 14 include an acrylic adhesive, a polyurethane adhesive, an epoxy adhesive, a rubber adhesive, and a silicone adhesive. A thermosetting adhesive generally used for adhesives and the like. In addition, it is preferable to use a thermosetting adhesive having flame retardance by mixing a flame retardant such as a phosphorus-based or bromine-based flame retardant, and the like is not particularly limited. It is also possible to use a urethane resin as a thermosetting adhesive. The urethane resin is a polyol compound or a polyisocyanate compound using a phosphorus-containing compound as a raw material for polyurethane, and the molecular structure of the resin contains phosphorus. The thermosetting conductive adhesive layer 14 preferably contains a phosphorus-containing polyurethane resin composition and an epoxy resin.

對於混配於導電性黏接劑層14中的導電性微粒沒有特別限定,可以應用現有已知的導電性微粒。可以舉出例如:炭黑;由銀、鎳、銅、鋁等金屬形成的金屬微粒;以及在這些金屬微粒的表面被覆了其他金屬的複合金屬微粒,可以適當選擇該等的1種或2種以上而使用。 The conductive fine particles to be mixed in the conductive adhesive layer 14 are not particularly limited, and conventionally known conductive fine particles can be applied. Examples include: carbon black; metal fine particles made of metals such as silver, nickel, copper, and aluminum; and composite metal fine particles coated with other metals on the surface of these metal fine particles. One or two of these may be appropriately selected. Used above.

另外,在上述導電性黏接劑中,藉由導電性微粒相互的接 觸、以及該導電性微粒與導電性糊料層及作為被黏物的印刷基板的接觸,從而表現出導電性。因此,若大量地含有導電性物質,則可以獲得優異的導電性,但黏接力降低,若降低導電性物質的含量,則黏接力提高,但導電性降低,存在這種相反的問題。因此,相對於黏接劑(固體成分)100重量份,導電性微粒的混配量通常為10重量份~100重量份左右、更優選為30重量份~80重量份。 In the above-mentioned conductive adhesive, the conductive fine particles exhibit electrical conductivity by contacting the conductive fine particles with each other and by contacting the conductive fine particles with the conductive paste layer and the printed circuit board as an adherend. Therefore, if a large amount of a conductive substance is contained, excellent conductivity can be obtained, but the adhesion force is reduced. If the content of the conductive substance is decreased, the adhesion force is increased, but the conductivity is reduced. This has the opposite problem. Therefore, the compounding amount of the conductive fine particles is usually about 10 to 100 parts by weight, and more preferably 30 to 80 parts by weight, based on 100 parts by weight of the adhesive (solid content).

另外,作為構成導電性黏接劑層14的導電性黏接劑,優選包含導電性微粒的導電性各向異性黏接劑。作為該導電性各向異性黏接劑,可以使用已知的物質,例如,可以使用以環氧樹脂等絕緣性的熱固化性樹脂作為主要成分,並分散有導電性微粒的黏接劑。作為用於導電性各向異性黏接劑的導電性微粒,可以舉出,例如:金、銀、鋅、錫、焊料等的金屬微粒中的1種或2種以上;或者鍍覆有金屬的樹脂粒子。導電性微粒的形狀,優選為具有樹枝狀、或者針狀。若為這樣的形狀,則在利用壓接部件對被黏物的印刷基板進行加熱加壓處理時,能夠以低的加壓力使導電性微粒咬入印刷基板的導體配線,能夠降低導電性各向異性黏接劑層與導體配線之間的電阻。 As the conductive adhesive constituting the conductive adhesive layer 14, a conductive anisotropic adhesive containing conductive fine particles is preferred. As this conductive anisotropic adhesive, a known substance can be used. For example, an adhesive containing an insulating thermosetting resin such as epoxy resin as a main component and dispersed with conductive fine particles can be used. Examples of the conductive fine particles used in the conductive anisotropic adhesive include, for example, one or two or more kinds of metal fine particles such as gold, silver, zinc, tin, and solder; or metal-coated ones. Resin particles. The shape of the conductive fine particles is preferably dendritic or acicular. With such a shape, when a printed circuit board to be adhered is heated and pressurized by a crimping member, conductive particles can be bite into the conductor wiring of the printed circuit board with a low applied pressure, thereby reducing the conductive anisotropy Resistance between the anisotropic adhesive layer and the conductor wiring.

對於導電性黏接劑的黏接力沒有特別限制,其測定方法是基於JIS Z 0237中記載的試驗方法。在剝離角度180度剝離、剝離速度300mm/分鐘的條件下,對被黏物表面的黏接力優選為5N/英吋~30N/英吋的範圍。黏接力小於5N/英吋時,例如,黏貼於印刷基板的電磁波遮蔽材10有時會剝落或 浮起。對於印刷基板的加熱加壓黏接的條件沒有特別限定,例如,優選將溫度設為160℃、將加壓力設為4.5MPa,進行60分鐘的熱壓。 The adhesive force of the conductive adhesive is not particularly limited, and the measurement method is based on the test method described in JIS Z 0237. Under conditions of a peeling angle of 180 degrees and a peeling speed of 300 mm / minute, the adhesion force to the surface of the adherend is preferably in a range of 5 N / inch to 30 N / inch. When the adhesive force is less than 5 N / inch, for example, the electromagnetic wave shielding material 10 adhered to the printed circuit board may peel off or float. There are no particular restrictions on the conditions for the heat and pressure bonding of the printed substrate. For example, it is preferable to perform the hot pressing for 60 minutes at a temperature of 160 ° C. and a pressure of 4.5 MPa.

導電性黏接劑層14的厚度優選為15μm以下。藉此,包括導電性黏接劑層14的厚度在內的電磁波遮蔽材10的總厚度變薄,段差追隨性提高。若導電性黏接劑層14的厚度厚於15μm,則無法應對近年來的資訊終端機的薄型化,而且成本增加,因而不是優選的。 The thickness of the conductive adhesive layer 14 is preferably 15 μm or less. Thereby, the total thickness of the electromagnetic wave shielding material 10 including the thickness of the conductive adhesive layer 14 becomes thin, and the step followability improves. If the thickness of the conductive adhesive layer 14 is greater than 15 μm, it is not possible to cope with the reduction in thickness of information terminals in recent years, and the cost is increased, which is not preferable.

(光吸收劑) (Light absorbent)

為了賦予電磁波遮蔽材10遮光性,可以在除了支撐體膜21和剝離膜22以外的構成電磁波遮蔽材10的任一層中包含光吸收劑。能夠以該目的而包含光吸收劑的層可以舉出,例如:基材11、錨固層12、導電性糊料層13、導電性黏接劑層14中的1層或2層以上。作為光吸收劑,可以舉出選自由非導電性炭黑、石墨、苯胺黑、花青黑(cyanine black)、鈦黑、黑色氧化鐵、氧化鉻、氧化錳組成的組中的1種以上的黑色顏料或著色顏料。為了改善將電磁波遮蔽材10黏貼於印刷基板等被黏物的狀態下的外觀,優選成為電磁波遮蔽材10的外側的基材11或錨固層12中的任意一者或兩者包含光吸收劑。 In order to impart light-shielding properties to the electromagnetic wave shielding material 10, a light absorber may be included in any of the layers constituting the electromagnetic wave shielding material 10 other than the support film 21 and the release film 22. Examples of the layer capable of containing a light absorber for this purpose include, for example, one or two or more of the substrate 11, the anchor layer 12, the conductive paste layer 13, and the conductive adhesive layer 14. Examples of the light absorber include one or more selected from the group consisting of non-conductive carbon black, graphite, aniline black, cyanine black, titanium black, black iron oxide, chromium oxide, and manganese oxide. Black pigment or color pigment. In order to improve the appearance in a state where the electromagnetic wave shielding material 10 is adhered to an adherend such as a printed circuit board, it is preferable that one or both of the base material 11 and the anchor layer 12 that become the outside of the electromagnetic wave shielding material 10 contain a light absorber.

除去了支撐體膜21和剝離膜22後,電磁波遮蔽材10的透光率優選為5%以下。作為透光率,可以舉出可見光透過率、全光線透過率等。在基材11由溶劑可溶性聚醯亞胺膜形成的情況下,基材11可以含有光吸收劑。 After the support film 21 and the release film 22 are removed, the light transmittance of the electromagnetic wave shielding material 10 is preferably 5% or less. Examples of the light transmittance include visible light transmittance and total light transmittance. When the base material 11 is formed of a solvent-soluble polyfluorene imide film, the base material 11 may contain a light absorber.

為了有效地降低透光率,在光吸收劑中,優選炭 黑等的黑色顏料。由黑色顏料或著色顏料形成的光吸收劑,優選在任一層中以0.1重量%~30重量%而含有。黑色顏料或著色顏料優選藉由SEM觀察的一次粒子的平均粒徑為0.02μm~0.1μm左右。含有光吸收劑的層的厚度優選大於光吸收劑的粒徑,從而使光吸收劑的微粒不會露出。另外,作為黑色顏料,可以是使二氧化矽粒子等浸漬於黑色的色料中而僅使表層部為黑色,也可以是由黑色的著色樹脂等形成而使整體由黑色構成。另外,黑色顏料,除了純黑以外,也可以包含呈現出灰黑色、黑褐色或者墨綠色等近似黑色的顏色的粒子,只要是難以反射光的暗色即可使用。 In order to effectively reduce the light transmittance, among light absorbers, black pigments such as carbon black are preferred. The light absorber formed of a black pigment or a colored pigment is preferably contained in any layer in an amount of 0.1% to 30% by weight. The black pigment or the colored pigment preferably has an average particle diameter of the primary particles observed by SEM of about 0.02 μm to 0.1 μm. The thickness of the light-absorbing agent-containing layer is preferably larger than the particle diameter of the light-absorbing agent so that the fine particles of the light-absorbing agent are not exposed. In addition, as the black pigment, silicon dioxide particles or the like may be immersed in a black colorant so that only the surface layer portion is black, or it may be formed of a black coloring resin or the like so that the entirety is made of black. In addition, the black pigment may include, in addition to pure black, particles exhibiting an approximately black color such as grayish black, dark brown, or dark green, and may be used as long as it is a dark color that is difficult to reflect light.

(剝離膜) (Release film)

為了保護導電性黏接劑層14,可以在導電性黏接劑層14的表面設置剝離膜22。剝離膜22在電磁波遮蔽材10的使用時能夠從導電性黏接劑層14剝離。作為剝離膜22的基材,可以舉出,例如,聚對苯二甲酸乙二醇酯、聚對苯二甲酸丁二醇酯、聚萘二甲酸乙二醇酯等聚酯膜;聚丙烯、聚乙烯等聚烯烴膜。藉由在這些基材膜上塗佈胺基醇酸樹脂或矽酮樹脂等剝離劑後,進行加熱乾燥,而實施剝離處理。施用於剝離膜22的剝離劑優選不使用矽酮樹脂。若使用矽酮樹脂作為剝離劑,則有可能會減弱導電性黏接劑層14的黏接力。剝離膜22的厚度不包括在黏貼於印刷基板而使用時的電磁波遮蔽材10的整體厚度中,因而對其沒有特別限定,通常為12μm~150μm左右。 In order to protect the conductive adhesive layer 14, a release film 22 may be provided on the surface of the conductive adhesive layer 14. The peeling film 22 can be peeled from the conductive adhesive layer 14 when the electromagnetic wave shielding material 10 is used. Examples of the base material of the release film 22 include polyester films such as polyethylene terephthalate, polybutylene terephthalate, and polyethylene naphthalate; polypropylene, Polyolefin film such as polyethylene. These substrate films are coated with a release agent such as an amino alkyd resin or a silicone resin, and then heat-dried to perform a release treatment. The release agent applied to the release film 22 preferably does not use a silicone resin. When a silicone resin is used as the release agent, the adhesive force of the conductive adhesive layer 14 may be weakened. The thickness of the peeling film 22 is not included in the overall thickness of the electromagnetic wave shielding material 10 when it is used by being adhered to a printed circuit board. Therefore, the thickness is not particularly limited, but is generally about 12 μm to 150 μm.

作為電磁波遮蔽材10的總厚度,優選為6μm~20μm的範圍內,更優選為8μm~15μm。此處,電磁波遮蔽材 10的總厚度是指從基材11至導電性黏接劑層14為止的總厚度,包括基材11的厚度以及導電性黏接劑層14的厚度。 The total thickness of the electromagnetic wave shielding material 10 is preferably in the range of 6 μm to 20 μm, and more preferably 8 μm to 15 μm. Here, the total thickness of the electromagnetic shielding material 10 refers to the total thickness from the substrate 11 to the conductive adhesive layer 14, and includes the thickness of the substrate 11 and the thickness of the conductive adhesive layer 14.

(印刷基板) (Printed substrate)

作為使用本發明的電磁波遮蔽的印刷基板,可以舉出絕緣基板為硬質的剛性基板、絕緣基板為柔軟性的柔性基板、包括柔軟性的部分和硬質的部分的剛性柔性基板(剛柔結合基板)等。作為段差,例如,可例示為50μm以上、進而為300μm以上。 Examples of the printed substrate shielded by the electromagnetic wave of the present invention include rigid rigid substrates with insulating substrates, flexible flexible substrates with insulating substrates, and rigid flexible substrates (rigid-flexible substrates) including flexible portions and rigid portions. Wait. Examples of the step difference include 50 μm or more, and further 300 μm or more.

在電磁波遮蔽材10的單面或雙面層積有支撐體膜21或剝離膜22中的一者或兩者的電磁波遮蔽材層積體20,即使電磁波遮蔽材10的總厚度薄,操作性也優異。在將電磁波遮蔽材10黏貼於被黏物的印刷基板時,至少將剝離膜22剝落去除後,使導電性黏接劑層14的表面與被黏物對置。在需要段差追隨性的情況下,在除去支撐體膜21和剝離膜22後的總厚度薄的狀態下,使電磁波遮蔽材10與被黏物疊合。之後,優選藉由加熱加壓使導電性黏接劑層14熱固化,將電磁波遮蔽材10黏接於被黏物。 The electromagnetic wave shielding material laminated body 20 in which one or both of the support film 21 or the release film 22 is laminated on one or both sides of the electromagnetic wave shielding material 10 is operable even if the total thickness of the electromagnetic wave shielding material 10 is thin. Also excellent. When the electromagnetic wave shielding material 10 is adhered to the adherend printed board, at least the peeling film 22 is peeled off and removed, and then the surface of the conductive adhesive layer 14 is opposed to the adherend. When the step followability is required, the electromagnetic wave shielding material 10 and the adherend are laminated in a state where the total thickness after removing the support film 21 and the release film 22 is thin. After that, the conductive adhesive layer 14 is preferably thermally cured by heating and pressing to adhere the electromagnetic wave shielding material 10 to the adherend.

作為使用本發明的電磁波遮蔽的電子設備,沒有特別限定,可以舉出行動電話、筆記型個人電腦、攜帶式終端機、平板式終端機等。這些電子設備可以具備黏貼有本發明的電磁波遮蔽的印刷基板。 The electronic device shielded by the electromagnetic wave of the present invention is not particularly limited, and examples thereof include a mobile phone, a notebook personal computer, a portable terminal, and a tablet terminal. These electronic devices may include a printed circuit board to which the electromagnetic wave shielding of the present invention is adhered.

[實施例] [Example]

下面,藉由實施例而具體說明本發明。 Hereinafter, the present invention will be specifically described by way of examples.

(實施例1) (Example 1)

將單面實施了剝離處理的厚度為50μm的聚對苯二甲酸乙二醇酯(PET)膜用作支撐體膜。在該支撐體膜的單面上,以乾燥後的厚度為4μm的方式流延塗佈溶劑可溶性聚醯亞胺的塗佈液並使其乾燥,而層積出由介電質薄膜樹脂膜形成的基材,該溶劑可溶性聚醯亞胺的塗佈液是相對於乾燥後的拉伸伸長率為140%的溶劑可溶性聚醯亞胺的固體成分,混配了1重量%的非導電性炭黑作為光吸收劑的黑色顏料而得到的。需要說明的是,為了測定基材的拉伸伸長率,與電磁波遮蔽材的製造用的基材同樣地製作拉伸伸長率的測定用的基材,從支撐體膜剝掉基材,根據IPC-TM-650 2.4.19的方法,而測定拉伸伸長率,結果為140%。 A polyethylene terephthalate (PET) film having a thickness of 50 μm subjected to a peeling treatment on one side was used as a support film. On one side of the support film, a solvent-soluble polyimide coating solution was cast and dried to a thickness of 4 μm after drying, and a dielectric thin film resin film was laminated to form a film. The coating solution of the solvent-soluble polyfluorene imide is a solid component of the solvent-soluble polyfluorene imide with a tensile elongation of 140% after drying, and is mixed with 1% by weight of non-conductive carbon. Black is obtained as a black pigment as a light absorber. In addition, in order to measure the tensile elongation of the substrate, a substrate for measuring the tensile elongation was produced in the same manner as the substrate for the production of an electromagnetic shielding material, and the substrate was peeled from the support film, according to IPC. -The method of TM-650 2.4.19, and the tensile elongation was measured, and the result was 140%.

在層積於支撐體膜的單面上的基材上,使用將作為導電性填料的粒徑為10nm~40nm的銀粒子與黏結劑樹脂混合而製備的導電性糊料進行塗佈,使乾燥後的厚度為0.25μm,之後以溫度150℃進行燒成,形成了導電性糊料層。測定乾燥後的導電性糊料層的體積電阻率,其值為1.5×10-5Ω‧cm以下。 A conductive paste prepared by mixing silver particles having a particle size of 10 to 40 nm as a conductive filler and a binder resin is applied to a substrate laminated on one side of a support film and dried. The subsequent thickness was 0.25 μm, and then firing was performed at a temperature of 150 ° C. to form a conductive paste layer. The volume resistivity of the dried conductive paste layer was measured, and the value was 1.5 × 10 -5 Ω · cm or less.

另外地,相對於含磷聚氨酯樹脂的40%溶液(東洋紡製造:UR3575)100重量份,依序加入多官能環氧樹脂70%溶液(東洋紡製造:HY-30)3.9重量份、平均粒徑為16nm的氣相法二氧化矽(Fumed silica)(日本AEROSIL製造:R972)2.1重量份、作為添加劑的矽烷偶聯劑(信越化學工業製造:KBM-403)0.42重量份、銀混摻銅(戶田工業製造:RD-MS3)26重量份,用甲基乙基酮和甲苯進行稀釋,攪拌混煉,得到導電性黏接劑溶液。相對於將含磷聚氨酯樹脂和多官能環氧樹脂合計的黏接劑(固 體成分)100重量份,銀混摻銅的比例為約60.8重量份。對於所得到的導電性黏接劑溶液,按照乾燥後的厚度為4μm的方式而在導電性糊料層上層積導電性黏接劑層,以得到實施例1的電磁波遮蔽材。 Separately, with respect to 100 parts by weight of a 40% solution (manufactured by Toyobo: UR3575) of a phosphorus-containing polyurethane resin, 3.9 parts by weight of a polyfunctional epoxy resin solution (manufactured by Toyobo: HY-30) was sequentially added, and the average particle size was 2.1 parts by weight of 16nm fumed silica (manufactured by AEROSIL, Japan: R972), 0.42 parts by weight of silane coupling agent (manufactured by Shin-Etsu Chemical Co., Ltd .: KBM-403), silver mixed with copper (household) Manufactured by Tian Industry: RD-MS3) 26 parts by weight, diluted with methyl ethyl ketone and toluene, stirred and kneaded to obtain a conductive adhesive solution. The proportion of silver mixed with copper is about 60.8 parts by weight based on 100 parts by weight of the adhesive (solid component) in which the phosphorus-containing polyurethane resin and the polyfunctional epoxy resin are combined. A conductive adhesive layer was laminated on the conductive paste layer so that the obtained conductive adhesive solution had a thickness of 4 μm after drying to obtain the electromagnetic wave shielding material of Example 1.

(實施例2) (Example 2)

在乾燥後的拉伸伸長率為120%的溶劑可溶性聚醯亞胺的塗佈液中添加非導電性炭黑,而形成基材,除此以外,與實施例1同樣地得到實施例2的電磁波遮蔽材。 A non-conductive carbon black was added to the solvent-soluble polyimide coating solution having a tensile elongation of 120% after drying to form a base material. Except that the base material was obtained in the same manner as in Example 1, Example 2 was obtained. Electromagnetic wave shielding material.

(實施例3) (Example 3)

在乾燥後的拉伸伸長率為170%的溶劑可溶性聚醯亞胺的塗佈液中不添加非導電性炭黑,按照乾燥後的厚度為4μm的方式而形成基材,在所形成的基材上,使用用於形成錨固層的塗佈液,以乾燥後的厚度為0.5μm的方式而進行塗佈,層積出錨固層,該用於形成錨固層的塗佈液中混合了作為光吸收劑的黑色顏料的非導電性炭黑和耐熱溫度為260℃~280℃的聚酯系樹脂組合物,之後,在錨固層上形成導電性糊料層和導電性黏接劑層,除此以外,與實施例1同樣地得到實施例3的電磁波遮蔽材。 A non-conductive carbon black was not added to the solvent-soluble polyimide coating solution having a tensile elongation of 170% after drying, and a base material was formed so that the thickness after drying was 4 μm. A coating liquid for forming an anchor layer was applied on the material so that the thickness after drying was 0.5 μm, and an anchor layer was laminated. The coating liquid for forming the anchor layer was mixed with light. The non-conductive carbon black of the black pigment of the absorbent and the polyester-based resin composition having a heat-resistant temperature of 260 ° C to 280 ° C, and thereafter, a conductive paste layer and a conductive adhesive layer are formed on the anchoring layer. Except for the above, the electromagnetic wave shielding material of Example 3 was obtained in the same manner as in Example 1.

(實施例4) (Example 4)

除了使導電性糊料層的厚度為0.8μm以外,與實施例1同樣地得到實施例4的電磁波遮蔽材。 An electromagnetic wave shielding material of Example 4 was obtained in the same manner as in Example 1 except that the thickness of the conductive paste layer was 0.8 μm.

(比較例1) (Comparative example 1)

在乾燥後的拉伸伸長率為50%的溶劑可溶性聚醯亞胺的塗佈液中添加非導電性炭黑,而形成基材,除此以外,與實施 例1同樣地得到比較例1的電磁波遮蔽材。 A non-conductive carbon black was added to a solvent-soluble polyimide coating solution having a tensile elongation of 50% after drying to form a base material, and Comparative Example 1 was obtained in the same manner as in Example 1 except that a substrate was formed. Electromagnetic wave shielding material.

(比較例2) (Comparative example 2)

代替層積導電性糊料層,而設置厚度為0.08μm的銀蒸鍍膜,除此以外,與實施例1同樣地得到比較例2的電磁波遮蔽材。 An electromagnetic shielding material of Comparative Example 2 was obtained in the same manner as in Example 1 except that a silver vapor-deposited film having a thickness of 0.08 μm was provided instead of the laminated conductive paste layer.

(比較例3) (Comparative example 3)

在錨固層上代替層積導電性糊料層,而設置厚度為12μm的電解銅箔,除此以外,與實施例3同樣地得到比較例3的電磁波遮蔽材。 An electromagnetic shielding material of Comparative Example 3 was obtained in the same manner as in Example 3 except that an electrolytic copper foil having a thickness of 12 μm was provided on the anchor layer instead of the conductive paste layer.

(比較例4) (Comparative Example 4)

不使用支撐體膜,使用厚度為10μm、拉伸伸長率為62%的熱固化型聚醯亞胺所形成的聚醯亞胺膜作為基材,除此以外,與實施例3同樣地得到比較例4的電磁波遮蔽材。 A comparison was made in the same manner as in Example 3 except that a polyimide film formed of a thermosetting polyimide having a thickness of 10 μm and a tensile elongation of 62% was used as a base material without using a support film. The electromagnetic wave shielding material of Example 4.

(段差追隨性的評價方法) (Evaluation method of step-followability)

如圖2所示,準備在柔軟性基板部32上設有硬質基板部33和端子部31的檢測用基板30,在其上疊置電磁波遮蔽材10。形成於柔軟性基板部32的兩端上的端子部31間的長度為50mm。相對於柔軟性基板部32,由硬質基板部33形成的段差的高度為0.3mm(300μm)、寬度為30mm。硬質基板部33的長度為30mm,端子部31與硬質基板部33之間的開口部35的長度為左右各10mm。 As shown in FIG. 2, a detection substrate 30 having a rigid substrate portion 33 and a terminal portion 31 provided on a flexible substrate portion 32 is prepared, and an electromagnetic wave shielding material 10 is stacked thereon. The length between the terminal portions 31 formed on both ends of the flexible substrate portion 32 is 50 mm. The height of the step formed by the rigid substrate portion 33 with respect to the flexible substrate portion 32 is 0.3 mm (300 μm) and the width is 30 mm. The length of the rigid substrate portion 33 is 30 mm, and the length of the opening portion 35 between the terminal portion 31 and the rigid substrate portion 33 is 10 mm from the left and right.

在端子部31上殘留用於測定端子間電阻的露出部34,電磁波遮蔽材10的端部覆蓋於端子部31上的一部分,按照開口部35被電磁波遮蔽材10的導電性黏接劑的面所覆蓋的 方式而進行疊置,以160℃、2.5MPa、65分鐘的條件進行熱壓,得到追隨性的評價樣品。觀察所得到的樣品的截面,在電磁波遮蔽材追隨中央的段差的情況下記為「○」;將未追隨、電磁波遮蔽材從檢測用基板浮起而產生了間隙,或在段差的角部電磁波遮蔽材的膜斷裂的情況記為「×」。 An exposed portion 34 for measuring the resistance between the terminals is left on the terminal portion 31. An end portion of the electromagnetic wave shielding material 10 covers a part of the terminal portion 31, and the surface of the conductive adhesive of the electromagnetic wave shielding material 10 according to the opening portion 35. The covering method was superimposed, and hot pressing was performed under the conditions of 160 ° C., 2.5 MPa, and 65 minutes to obtain a follow-up evaluation sample. Observe the cross-section of the obtained sample, and mark it as "○" when the electromagnetic wave shielding material follows the central step; the non-following, electromagnetic wave shielding material floats from the detection substrate to create a gap, or the electromagnetic wave is shielded at the corner of the step. The case where the film of the material is broken is denoted by "×".

(導電性的評價方法) (Evaluation method of conductivity)

利用數位萬用電表(TFF Keithley Instruments公司製造、型號:2100/100),測定在段差追隨性的評價方法中所得到的樣品的兩端的端子間電阻,將小於1Ω記為「○」,將1Ω以上、小於2Ω記為「△」,將2Ω以上記為「×」。 A digital multimeter (TFF Keithley Instruments, model: 2100/100) was used to measure the terminal-to-terminal resistance of both ends of the sample obtained in the evaluation method of the step-following follow-up property, and the less than 1Ω was marked as "○". 1Ω or more and less than 2Ω are referred to as "△", and 2Ω or more are referred to as "×".

(耐熱性的評價方法) (Evaluation method of heat resistance)

在160℃、2.5MPa、65分鐘的條件下,將所得到的電磁波遮蔽材熱壓至厚度為25μm的聚醯亞胺膜,得到耐熱性的評價用樣品。將試驗片切割成2.5cm×5cm的尺寸,浸漬於290℃的焊料浴中10秒後提起。藉由目視觀察浸漬焊料浴後的電磁波遮蔽材的外觀有無變形或收縮等異常,將無異常、良好的情況記為「○」,將觀察到異常的情況記為「×」。 The obtained electromagnetic wave shielding material was hot-pressed to a polyimide film having a thickness of 25 μm under conditions of 160 ° C., 2.5 MPa, and 65 minutes to obtain a sample for evaluating heat resistance. The test piece was cut into a size of 2.5 cm × 5 cm, immersed in a solder bath at 290 ° C. for 10 seconds, and then lifted. The appearance of the electromagnetic wave shielding material after the solder bath was immersed was visually inspected for abnormalities such as deformation or shrinkage. The abnormality and goodness were recorded as "○", and the abnormality was observed as "x".

(試驗結果) (test results)

針對實施例1~4以及比較例1~4,利用上述評價方法進行電磁波遮蔽材的評價,將所得到的評價結果顯示於表1~2。厚度的欄中記入有「無」是指不具有該層。另外,在聚醯亞胺基材的聚醯亞胺材料的欄中,「PI1」、「PI2」、「PI3」、「PI4」、「PI5」分別是指在實施例1、實施例2、實施例3、比較例1、比較例4中所使用的聚醯亞胺。 For Examples 1 to 4 and Comparative Examples 1 to 4, the above-mentioned evaluation method was used to evaluate the electromagnetic wave shielding material, and the obtained evaluation results are shown in Tables 1 to 2. The presence of "none" in the column of thickness means that the layer is absent. In the columns of the polyimide material of the polyimide substrate, "PI1", "PI2", "PI3", "PI4", and "PI5" refer to Examples 1, 2, and 2, respectively. Polyimide used in Example 3, Comparative Example 1, and Comparative Example 4.

根據表1~2所示的追隨性的試驗的結果可知,在基材的拉伸伸長率為100%以上的情況下,追隨性和導電性變得良好。即,在基材的拉伸伸長率為100%以下的情況下,無法完全追隨檢測用基板的段差,在與檢測用基板之間產生間隙,或者發生導電性糊料層的斷裂,追隨性和導電性變差。 As can be seen from the results of the followability tests shown in Tables 1 to 2, when the tensile elongation of the base material is 100% or more, the followability and conductivity are good. That is, when the tensile elongation of the base material is 100% or less, it is impossible to completely follow the step of the detection substrate, a gap may be formed between the detection substrate, or the conductive paste layer may be broken. The conductivity is deteriorated.

此外,如比較例2那樣使蒸鍍膜為導電層的情況下,由於導電層缺乏柔軟性,因而即使基材的拉伸伸長率為100%以上,也無法完全追隨檢測用基板的段差,在與檢測用基板之間產生間隙,或者導電層產生龜裂或發生斷裂,追隨性和導電性變差。 In addition, when the vapor-deposited film is a conductive layer as in Comparative Example 2, the conductive layer lacks flexibility. Therefore, even if the tensile elongation of the base material is 100% or more, the step difference of the detection substrate cannot be completely followed. Gaps occur between the detection substrates, or cracks or breaks occur in the conductive layer, and followability and conductivity are deteriorated.

另外,如比較例3那樣使金屬箔為導電層的情況下,由於導電層缺乏伸長性,因而即使基材的拉伸伸長率為100%以上,也無法完全追隨檢測用基板的段差,在與檢測用基板之間產生間隙,或者導電層產生龜裂或發生斷裂,追隨性和導電性變差。 In addition, when a metal foil is used as a conductive layer as in Comparative Example 3, the conductive layer lacks elongation. Therefore, even if the tensile elongation of the substrate is 100% or more, it cannot completely follow the step difference of the detection substrate, Gaps occur between the detection substrates, or cracks or breaks occur in the conductive layer, and followability and conductivity are deteriorated.

在實施例1~4的情況下,藉由使導電層採用導電性糊料層,由於在燒成後的奈米銀粒子的空隙中所填充的黏結劑,從而產生柔軟性,導電層追隨段差,因而即使基材的聚醯亞胺膜被拉長,也不會失去導通性,可得到段差追隨性良好的電磁波遮蔽材。 In the cases of Examples 1 to 4, since the conductive layer was used as the conductive paste layer, the adhesive was filled in the voids of the nano-silver particles after firing, so that flexibility was generated, and the conductive layer followed the step. Therefore, even if the polyimide film of the base material is stretched, the continuity is not lost, and an electromagnetic wave shielding material with good step-followability can be obtained.

另外,如比較例2、3那樣將金屬箔或蒸鍍膜之類的緻密的導體膜作為導電層的情況下,在焊料浴等的急劇加熱時生成的基材膜中的水分所產生的水蒸氣、或未反應物、低分子成分等所造成的釋氣無法通過,會發生發泡等的外觀不良。 即,如實施例1~4那樣使導電層採用了導電性糊料,結果燒成後在導電層中也存在空隙,因而上述的水分或釋氣等能夠通過,即使在急劇加熱的情況下也不發生發泡等的外觀不良,而能夠得到耐熱性良好的電磁波遮蔽材。 In addition, in the case where a dense conductive film such as a metal foil or a vapor-deposited film is used as the conductive layer as in Comparative Examples 2 and 3, water vapor is generated by moisture in the base film generated during rapid heating of a solder bath or the like. , Or outgassing caused by unreacted materials, low-molecular components, etc., cannot pass through, resulting in poor appearance such as foaming. That is, the conductive layer was made of a conductive paste as in Examples 1 to 4. As a result, there were voids in the conductive layer after firing. Therefore, the above-mentioned moisture, outgassing, and the like can pass through, even under rapid heating. An electromagnetic wave shielding material having good heat resistance can be obtained without causing appearance defects such as foaming.

需要說明的是,在將厚度大、拉伸伸長率為100%以下的聚醯亞胺膜作為基材的比較例4中,耐熱性也變差,據認為這是因為來自厚度大的基材的氣體產生量多,而且氣體透過性低所導致。 In addition, in Comparative Example 4 in which a polyimide film having a large thickness and a tensile elongation of 100% or less was used as a base material, the heat resistance was also deteriorated. This is considered to be due to the base material having a large thickness. Caused by a large amount of gas and low gas permeability.

Claims (12)

一種電磁波遮蔽材,其特徵在於,在由介電質樹脂膜形成的基材的單面上,沿著所述基材的厚度方向依序層積有導電性糊料層和導電性黏接劑層,所述基材的拉伸伸長率為100%以上。     An electromagnetic wave shielding material, characterized in that a conductive paste layer and a conductive adhesive are sequentially laminated on one side of a substrate formed of a dielectric resin film along a thickness direction of the substrate. Layer, the substrate has a tensile elongation of 100% or more.     如申請專利範圍第1項所述的電磁波遮蔽材,其中,所述導電性糊料層包含粒徑小於1μm的銀奈米粒子。     The electromagnetic wave shielding material according to item 1 of the scope of patent application, wherein the conductive paste layer includes silver nano particles having a particle diameter of less than 1 μm.     如申請專利範圍第1或2項所述的電磁波遮蔽材,其中,所述基材的拉伸伸長率為100%以上、300%以下。     The electromagnetic wave shielding material according to item 1 or 2 of the scope of patent application, wherein the tensile elongation of the substrate is 100% or more and 300% or less.     如申請專利範圍第1~3項中任一項所述的電磁波遮蔽材,其中,所述基材由溶劑可溶性聚醯亞胺膜形成。     The electromagnetic wave shielding material according to any one of claims 1 to 3, wherein the substrate is formed of a solvent-soluble polyfluoreneimide film.     如申請專利範圍第1~4項中任一項所述的電磁波遮蔽材,其中,所述基材由聚醯亞胺膜形成,該聚醯亞胺膜使用在芳香族單元間具有碳原子數為3個以上的脂肪族單元的聚醯亞胺材料形成。     The electromagnetic wave shielding material according to any one of claims 1 to 4, wherein the base material is formed of a polyimide film, and the polyimide film has a number of carbon atoms between aromatic units. It is formed of a polyimide material having 3 or more aliphatic units.     如申請專利範圍第1~5項中任一項所述的電磁波遮蔽材,其中,所述導電性黏接劑層的厚度為15μm以下。     The electromagnetic wave shielding material according to any one of claims 1 to 5, wherein the thickness of the conductive adhesive layer is 15 μm or less.     如申請專利範圍第1~6項中任一項所述的電磁波遮蔽材,其中,所述導電性黏接劑層為導電性各向異性黏接劑層。     The electromagnetic wave shielding material according to any one of claims 1 to 6, wherein the conductive adhesive layer is a conductive anisotropic adhesive layer.     如申請專利範圍第1~7項中任一項所述的電磁波遮蔽材,其中,所述導電性黏接劑層包含聚氨酯。     The electromagnetic wave shielding material according to any one of claims 1 to 7, wherein the conductive adhesive layer includes polyurethane.     如申請專利範圍第1~8項中任一項所述的電磁波遮蔽材,其中,從所述基材至所述導電性黏接劑層為止的總厚度為6μm~15μm。     The electromagnetic wave shielding material according to any one of claims 1 to 8, wherein a total thickness from the substrate to the conductive adhesive layer is 6 μm to 15 μm.     如申請專利範圍第1~9項中任一項所述的電磁波遮蔽材,其中,所述基材在與層積有所述導電性糊料層和所述導電性黏接劑層的一側相反的面,被能夠從所述基材剝離的支撐體膜所支撐。     The electromagnetic wave shielding material according to any one of claims 1 to 9, wherein the substrate is on a side where the conductive paste layer and the conductive adhesive layer are laminated. The opposite surface is supported by a support film that can be peeled from the substrate.     一種行動電話,其具備申請專利範圍第1~10項中任一項所述的電磁波遮蔽材。     A mobile phone includes the electromagnetic wave shielding material according to any one of claims 1 to 10.     一種電子設備,其具備申請專利範圍第1~10項中任一項所述的電磁波遮蔽材。     An electronic device includes the electromagnetic wave shielding material according to any one of claims 1 to 10.    
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