TW201814815A - Item transport equipment - Google Patents

Abstract

The present invention comprises: a port for carrying in for containers to be brought in; a first washing port for supporting a container containing articles before being washed by the first washing machine; a second washing port for supporting the first port Articles cleaned by the washing machine; first conveying device, conveying articles; and second conveying device, conveying containers; second conveying device performs: conveyance of containers from the port for carrying in to the first port for washing, and The container after the article is taken out is transferred from the first washing port to the second transfer destination, and the first transfer device is used to transfer the article from the second washing port to the first transfer destination.

Description

Goods handling equipment

FIELD OF THE INVENTION The present invention relates to an article transport facility including a first transport device that transports an article, and a second transport device that transports a container.

BACKGROUND OF THE INVENTION An example of the article transfer device is described in Japanese Patent Laid-Open No. 2000-091401 (Patent Document 1). The article transfer device of Patent Document 1 includes a transfer device (transfer robot 76), and a port (in / out door 81) for carrying in a container (cassette) containing an article (reduction mask). ), A storage unit for articles (the rack body 72A), and a storage unit for containers (the cassette holder 72B). The conveying device includes a cassette hand portion 77 and a reticle reticle hand portion 78. One conveying device can also be used as a first conveying device that conveys articles, and a second conveying device that conveys containers. Transfer device. In addition, the transfer device uses a cassette 77 with a hand portion 77 to transfer a container that has been transferred to the transfer port to a container storage unit. In addition, the transfer device uses the handpiece 78 of the reduction mask to take out the articles from the storage container stored in the storage section for the container and transfer the articles to the storage section for the article, and the articles in the storage section for the article are transferred. Contained in a container under storage.

It is conceivable to clean the articles and the containers by using such an article transport facility. That is, a port for cleaning articles is provided instead of a storage section for articles, and a port for cleaning containers is provided instead of a storage section for containers. The article washing port is a port provided at a position corresponding to a first washing machine for washing articles, and the container washing port is a port provided at a position corresponding to a second washing machine for washing containers. That is, the following cases may be considered: using the hand of the cassette of the conveying device, transferring the container before washing from the carrying port to the container washing port, and using the shrinking hood of the conveying device with the hand, Take out the items before cleaning from the container located in the container cleaning port, and transfer the items before cleaning to the item cleaning port, and the items from the item cleaning port will be washed by the first washing machine The cleaned articles are contained in a container located in a container washing port.

Summary of the Invention Problems and Means for Solving the Problems However, as described above, when the container and articles are transported by the transporting device, the articles before washing and the articles after washing are transported by the hand with the reduction mask. both sides. Therefore, a case may be considered in which when the articles before cleaning are transported by the hand with the shrinking reticle, pollutants such as dust adhering to the articles before the washing are attached to the hand with the reticle. When the washed articles are conveyed by the hand of the reduction mask, the pollutants already attached to the hands of the shrink mask can be attached to the articles after washing, resulting in post-washing. Contaminated.

Therefore, what is desired is the realization of an article transfer device that can avoid the situation where the washed articles are contaminated.

In view of the foregoing, the article transfer facility is characterized by the following features: it includes: a carry-in port for carrying in the container in which the article is stored; and a first washing port provided in the first section corresponding to the washing of the article. 1 position of the washing machine, and supporting the container, the container containing the articles before being washed by the first washing machine; the second washing port is provided at a position corresponding to the first washing machine And supports the article, which is an article taken out of the container and washed by the first washing machine; a first conveying device for conveying the article; and a second conveying device for conveying the container, the second The cleaning port is provided separately from the first cleaning port, and the second transfer device performs the following: the container is transferred from the loading port to the first cleaning port, and the items are removed The container is transferred from the first washing port to the second transfer destination, and the first transfer device transfers the articles from the second washing port to the first transfer destination.

With such a configuration, the container that has been carried into the carrying port can be transferred from the carrying port to the first washing port by the second carrying device. At this time, the articles transported by the first washing machine are stored in a container transported by the second transporting device. In addition, the articles are taken out from the container located in the first washing port, washed by the first washing machine, and then placed on the second washing port. Then, the washed articles can be transferred from the second washing port to the first transfer destination by the first transfer device. In addition, the container that has been taken out and emptied can be transferred from the first cleaning port to the second transfer destination by the second transfer device.

The articles before being washed by the first washing machine are carried into the carrying port in a state of being stored in a container, and are transferred from the carrying port to the first port by a second carrying device in a state of being stored in the container. Wash the port. In addition, the articles washed by the first washing machine are transferred from the second washing port to the transfer destination by the first transfer device. In this way, since the first conveying device does not convey the articles before being cleaned by the first washing machine, but only the articles after being cleaned, the following situation can be avoided: The second conveying device that is soiled by the articles conveys the articles after the washing, and thus the articles after the washing are contaminated.

Embodiments for Carrying Out the Invention Embodiments of the article transfer device of the present invention will be described below with reference to the drawings. As shown in FIG. 1, the article transfer facility includes a storage rack 4 for storing the plate-shaped body 1 and the container 2, a first stacker crane 5 for transferring the plate-shaped body 1, and a second stacker for transferring the container 2 Crane 6, port 7 for carrying in containers, and port 8 for carrying out containers. In addition, the article transfer facility includes a wall W, and the storage rack 4, the first stacker crane 5, and the second stacker crane 6 are installed inside the wall W.

A first washing machine CL1 and a second washing machine CL2 are provided outside the wall body W in a state adjacent to the wall body W. The first washing machine CL1 is a washing machine for washing the plate-like body 1, and the second washing machine CL2 is a washing machine for washing the container 2 after the plate-like body 1 has been taken out. In addition, the article transfer facility includes a first washing port 11 and a second washing port 12 provided to the first washing machine CL1, and a third washing port provided to the second washing machine CL2. Port 13 and the fourth cleaning port 14. The first washing port 11 is provided separately from the second washing port 12, and the fourth washing port 14 is provided separately from the third washing port 13.

In this embodiment, the plate-like body 1 is a photomask, and the shape in a planar viewing angle is formed into a rectangle. The plate-like body 1 corresponds to an article. The container 2 is a container that can accommodate a predetermined number of plate-like bodies 1. Usable as the container 2 are any of the following: a closed container having a lid and a lid that must be opened and closed, and an open container that does not have a lid and does not need to be opened and closed. . However, when a closed container is used, an opening / closing device for opening and closing the lid of the container 2 must be provided at a position where the lid must be opened and closed (for example, a port 8 for carrying out described later).

Hereinafter, each configuration of the article transport facility will be described. The direction in which the first washing machine CL1 and the second washing machine CL2 are aligned when viewed from the vertical direction Z is referred to as an alignment direction Y, and the alignment direction Y is orthogonal to this. The direction of is described as the front-back direction X. Further, in the front-rear direction X, the direction in which the first stacker crane 5 and the second stacker crane 6 exist with respect to the storage rack 4 is referred to as the front X1, and the opposite direction thereof is referred to as the rear X2. In the arrangement direction Y, the direction in which the first washing machine CL1 exists with respect to the second washing machine CL2 is referred to as a first direction Y1, and the opposite direction is referred to as a second direction Y2.

As shown in FIG. 2, a first fan filter unit 16 is provided on a ceiling portion of the article transport facility. This first fan filter unit 16 is installed above the storage rack 4, the first stacker crane 5, and the second stacker crane 6, and sucks the air from above and discharges the air downward. As a result, in the interior of the wall W, a downflow is formed in which clean air flows downward from the ceiling side toward the floor side. A second fan filter unit 17 is provided in the wall body W. The second fan filter unit 17 is provided on the rear X2 side with respect to the storage rack 4. In addition, the second fan filter unit 17 sucks the air in the rear X2 and spit out the air in the front X1. As a result, an airflow of clean air flowing from the rear X2 to the front X1 is formed in the storage rack 4. The floor part F on which the article conveyance equipment is installed is composed of a lower floor F1 and an upper floor F2 disposed above the lower floor F1. An underfloor space is formed between the lower floor F1 and the upper floor F2. A working space is formed between the floor F2 and the ceiling. The upper floor F2 is a grazing floor and is formed with a plurality of ventilation holes penetrating in the vertical direction Z. The lower floor F1 is a floor without ventilation holes, and in this embodiment is made of non-porous concrete.

[Conveyor for Conveying and Incoming] As shown in FIG. 1, in the article conveying equipment, each of the conveying conveyor 19 and the conveying conveyor 20 are provided in a state penetrating the wall W. The carrying-in conveyor 19 and the carrying-out conveyor 20 transport the container 2 in which the plate-shaped body 1 is housed. The carrying-in conveyor 19 carries the container 2 from the first carrying-in position located outside the wall W to the second carrying-in position located inside the wall W. The port 7 for carrying in is comprised by the edge part of the front of X1 of the carrying in conveyor 19 which is located inside more than the wall W among the carrying in conveyor 19. In other words, the carry-in port 7 is a port for supporting the container 2 located in the second carry-in position. In addition, the container 2 can be transferred to the loading port 7 by transferring the container 2 from the first loading position to the second loading position by the loading conveyor 19. As described above, the port 7 for carrying in is a port for carrying in the container 2 in which the plate-shaped body 1 is accommodated. The carrying-out conveyor 20 carries the container 2 from the first carrying-out position located inside the wall body W to the second carrying-out position located outside the wall body W. The port 8 for carrying out is comprised by the end part X1 of the carrying-out conveyor 20 located in the inside more than the wall W among carrying-out conveyors 20. In other words, the carry-out port 8 is a port for supporting the container 2 located in the first carry-out position. In addition, the container 2 can be carried out from the carrying-out port 8 by carrying the container 2 from the first carrying-out position to the second carrying-out position by the carrying-out conveyor 20. As described above, the carrying-out port 8 is a port for carrying out the container 2 in which the plate-shaped body 1 is accommodated.

[Cleaning Conveyor] As shown in FIG. 1, in the article transfer facility, the first cleaning conveyor 21, the second cleaning conveyor 22, the third cleaning conveyor 23, Each of the fourth and fourth cleaning conveyors 24 is installed in a state of penetrating the wall body W. The first washing conveyor 21 and the second washing conveyor 22 are provided relative to the first washing machine CL1, and the third washing conveyor 23 and the fourth washing conveyor 24 are opposed to the first washing machine CL1. 2 was installed CL2.

The first washing conveyor 21 conveys the container 2 from the first position P1 located inside the wall W toward the position close to the first washing machine CL1, and from the position close to the first washing machine CL1. The container 2 is transported toward the first position P1. The first washing machine CL1 is equipped with a robot (not shown) that takes out the plate-like body 1 from the container 2. Therefore, although the plate-like body 1 is stored in the container 2 immediately adjacent to the position of the first washing machine CL1 by the first washing conveyor 21 from the first position P1, it is moved from here by the robot The plate-shaped body 1 is taken out from the container 2 in the close position, and therefore is not accommodated in the container 2 conveyed to the first position P1 by the first cleaning conveyor 21 from the position close to the first cleaning machine CL1.有 板状 体 1 There are plate-like bodies 1. As described above, the first cleaning conveyor 21 transports both the container 2 in which the plate-like body 1 is housed and the container 2 in which the plate-like body 1 is not housed. The container 2 transported by the first washing conveyor 21 and the plate-like body 1 stored therein are the container 2 (the container 2 before washing) and the plate-like body before being washed by the washing machine. Body 1 (plate-like body 1 before washing). The first washing port 21 is formed by an end portion of the first washing conveyor 21 in the front X1 of the first washing conveyor 21 which is located more inward than the wall body W. In other words, the first washing port 11 is a port for supporting the container 2 located at the first position P1. In addition, the first washing port 11 is provided at a position corresponding to the first washing machine CL1 for washing the plate-like body 1 and is equivalent to a port for supporting a container 2 in which the container 2 is accommodated by the first 1 Washing machine CL1 The plate-like body 1 before washing.

The second washing conveyor 22 transports the plate-like body 1 from the first washing machine CL1 to the second position P2 located inside the wall W. The first washing machine CL1 cleans the plate-like body 1 taken out by the robot, and places the washed plate-like body 1 (the washed plate-like body 1) on a second washing conveyor. twenty two. Therefore, the plate-like body 1 transferred from the first washing machine CL1 to the second position P2 by the second washing conveyor 22 is the washed plate-like body 1. The second washing port 12 is formed by an end portion of the front X1 of the second washing conveyor 22 located on the inner side than the wall W of the second washing conveyor 22. In other words, the second washing port 12 is a port for supporting the plate-like body 1 located at the second position P2. The second washing port 12 is provided at a position corresponding to the first washing machine CL1, and is equivalent to supporting a plate-like body taken out of the container 2 and washed by the first washing machine CL1. 1 port.

The third cleaning conveyor 23 transports the container 2 to the second cleaning machine CL2 from the third position P3 located inside the wall W. The container 2 transported by the third washing conveyor 23 is the container 2 (the container 2 before washing) before being washed by the second washing machine CL2. A third washing port 13 is formed by an end portion of the third washing conveyor 23 on the front X1 of the third washing conveyor 23 located more inward than the wall body W. In other words, the third cleaning port 13 is a port for supporting the container 2 located at the third position P3. The third washing port 13 is provided at a position corresponding to the second washing machine CL2, and is equivalent to a port supporting the container 2 before being washed by the second washing machine CL2.

The fourth washing conveyor 24 transports the container 2 from the second washing machine CL2 to the fourth position P4 located inside the wall W. The container 2 carried by the fourth washing conveyor 24 is the container 2 (the washed container 2) which has been washed by the second washing machine CL2. A fourth washing port 14 is formed by an end portion of the fourth washing conveyor 24 located in front of the fourth washing conveyor 24 on the inner side than the wall body W1. In other words, the fourth washing port 14 is a port for supporting the container 2 located at the fourth position P4. The fourth washing port 14 is provided at a position corresponding to the second washing machine CL2, and is equivalent to a port supporting the container 2 that has been washed by the second washing machine CL2.

[Storage Rack] The storage rack 4 includes a plurality of storage sections 26. The storage rack 4 is provided with a storage unit 26 in a state where a plurality of storage racks 4 are arranged in the up-down direction Z and the arrangement direction Y. The storage rack 4 includes, as the storage section 26, a first storage section 27 for storing the plate-like body 1 and a second storage section 28 for storing the container 2. The storage rack 4 includes a first storage section 27 and a second storage section 28, and the first storage section 27 is located in the first direction Y1 with respect to the second storage section 28 in the arrangement direction Y. The storage rack 4 further includes a port 7 for carrying in (conveyor 19 for carrying in), a port 8 for carrying out (conveyor 20 for carrying out), and a port 11 for first washing (first conveyor 21 for washing) ), The second washing port 12 (the second washing conveyor 22), the third washing port 13 (the third washing conveyor 23), the fourth washing port 14 (the fourth washing Using a conveyor 24) and an inspection section 29 described later.

In this embodiment, a pair of storage racks 4 are provided in a state of being aligned in the front-back direction X, and a first stacker crane 5 and a second stacker are provided between the pair of storage racks 4 in the front-back direction X. Stacked crane 6. One storage rack 4 of the pair of storage racks 4 is provided with a loading port 7, a loading port 8, and an inspection unit 29. The other storage rack 4 of the pair of storage racks 4 includes a first storage rack 4. 1 washing port 11, second washing port 12, third washing port 13, and fourth washing port 14. Each of the first storage unit 27 and the second storage unit 28 is provided on both sides of a pair of storage racks 4. In addition, in the present embodiment, as the inspection section 29, two inspection sections 29 of the first inspection section 30 and the second inspection section 31 are provided. The first inspection unit 30 inspects the appearance of the plate-like body 1 such as particles and pattern defects. The second inspection unit 31 measures the size (length measurement) of the plate-like body 1 such as the length, width, and thickness of the plate-like body 1.

As shown in FIG. 2, as the second storage section 28, there are a second storage section 28A for storing the cleaned container 2 and a second storage section 28A for storing the cleaned container 2 before cleaning. 2Storage section 28B. The second storage section 28B for washing is provided below the second storage section 28A after washing. The second storage section 28A for washing after the washing and the second storage section 28B for washing before washing in the vertical direction Z are separated by the partition body 32. The partition body 32 is formed of a non-porous plate-like material so that the second storage portion 28A for washing and the second storage portion 28B for washing are not caused to flow to each other adjacent to each other in the vertical direction Z. .

[Elevated Crane] As shown in FIG. 1, each of the first elevated crane 5 and the second elevated crane 6 is configured to be movable in the arrangement direction Y. The first stacker crane 5 is a stacker crane that transports the plate-like body 1. The second stacker crane 6 is a stacker crane that transports the container 2. The first stacker crane 5 is located on the first direction side with respect to the second stacker crane 6. The moving path M1 of the first stacker crane 5 and the moving path M2 of the second stacker crane 6 have overlapping portions in the arrangement direction Y. It should be noted that the first stacker crane 5 is a first transfer device corresponding to the plate-shaped body 1, and the second stacker crane 6 is a second transfer device corresponding to the transfer container 2.

As shown in FIG. 2, the second stacker crane 6 includes: a traveling trolley 33 that travels in the alignment direction Y; a mast 34 that is erected on the traveling trolley 33; an elevating body 35 that elevates along the mast 34; and The transfer device 36 is supported by the lifting body 35. Although detailed description is omitted, the transfer device 36 is provided with a support body that supports the container 2 and a link mechanism that moves the support body in the front-back direction X. The transfer device 36 of the second stacker crane 6 is configured so that the container 2 can be transferred from the second transfer starting point S2 to itself, and the container 2 can be transferred from itself to the second transfer destination G2. . The first stacker crane 5 is configured in the same manner as the second stacker crane 6 except that the plate-shaped body 1 is supported by the support of the transfer device 36. The transfer device 36 of the first stacker crane 5 can transfer the plate-shaped body 1 to itself from the first transfer starting point S1, and can transfer the plate-shaped body 1 to the first transfer destination from itself. G1 way.

[Position relationship of the ports] Among the first washing port 11, the second washing port 12, the third washing port 13, the fourth washing port 14, the carrying port 7, and the carrying port 8, The second washing port 12 is provided on the side in the first direction Y1, and the fourth washing port 14 is provided on the side in the second direction Y2. In this embodiment, the first washing port 11, the second washing port 12, the third washing port 13, and the fourth washing port 14 face the second direction Y2 and perform the second washing. The cleaning port 12, the first cleaning port 11, the third cleaning port 13, and the fourth cleaning port 14 are arranged in this order. In this way, the second washing port 12 using the first stacker crane 5 as the transfer start point or transfer destination is set to be the first washing port with the second stacker crane 6 as the transfer start point or transfer destination. The cleaning port 11, the third cleaning port 13, and the fourth cleaning port 14 are further positioned in the first direction Y1.

The carry-in port 7 and the carry-out port 8 are oriented in the second direction Y2, and are arranged in the order of the carry-in port 7 and the carry-out port 8. The carry-in port 7 and the carry-out port 8 are provided in the arrangement direction Y, and are located at the ends of the second washing port 12 in the first direction Y1 side, and the second washing port 14 in the second direction Y2 side. Between the ends. These loading ports 7 and loading ports 8 are arranged in an area in which the moving path M1 of the first stacker crane 5 and the moving path M2 of the second stacker crane 6 are arranged in the arrangement direction Y. Only the first storage section 27 among the first storage section 27 and the second storage section 28 is provided in the first direction Y1 than the second cleaning port 12, and the first storage section 27 is located farther than the fourth cleaning port 14. Only the second storage unit 28 among the first storage unit 27 and the second storage unit 28 is provided in the two directions Y2.

[Form of Transfer] The first stacker crane 5 transfers the plate-like body 1 from the first transfer starting point S1 to the first transfer destination G1. The first stacker crane 5 sets the second cleaning port 12, the first inspection unit 30, the second inspection unit 31, and the first storage unit 27 as the first transfer starting point S1 and sets the first inspection unit 30. The second inspection unit 31, the first storage unit 27, and the port 8 for carrying out are set as the first carrying destination G1. That is, as a specific example, the first stacker crane 5 transfers the plate-like body 1 from the first transfer starting point S1 to the first transfer destination G1 as follows. As shown in FIG. 4, the first stacker crane 5 is plate-shaped with the second cleaning port 12 as the first transfer starting point S1 and the first inspection section 30 as the first transfer destination G1. The body 1 is transferred from the second cleaning port 12 to the first inspection unit 30. As shown in FIG. 5, the first stacker crane 5 performs the plate-shaped body 1 by setting the first inspection unit 30 as the first transfer starting point S1 and the second inspection unit 31 as the first transfer destination G1. It is transported from the first inspection unit 30 to the second inspection unit 31. As shown in FIG. 6, the first stacker crane 5 performs the plate-shaped body 1 by setting the second inspection section 31 as the first transfer starting point S1 and the first storage section 27 as the first transfer destination G1. It is transferred from the second inspection unit 31 to the first storage unit 27. As shown in FIG. 8, the first stacker crane 5 performs the plate-like body 1 by setting the first storage unit 27 as the first transfer starting point S1 and the port 8 for carrying out as the first transfer destination G1. Transfer from the first storage unit 27 to the carry-out port 8. Specifically, the first stacker crane 5 is a plate-shaped body in which the first storage unit 27 is set as the first transfer starting point S1 and the container 2 located in the port 8 for transfer is set as the first transfer destination G1. 1 is transferred from the first storage unit 27 to the container 2 in the port 8 for carrying out. In addition, the first stacker crane 5 has the second inspection unit 31 as the first transfer starting point S1, and the port 8 for carrying out as the first transport destination G1, and a plate-like body from the second inspection unit 31. 1 In the case of transfer to port 8 for carrying out, etc., the combination of the transfer starting point and the transfer destination of the plate-like body 1 by the first stacker crane 5 is not limited to the combination shown in the figure.

The second stacker crane 6 transfers the container 2 to the second transfer destination G2 from the second transfer starting point S2. The second stacker crane 6 sets the loading port 7, the first washing port 11, the fourth washing port 14, and the second storage unit 28 as the second transfer starting point S2, and moves the loading port 8 The first cleaning port 11, the third cleaning port 13, and the second storage unit 28 are set as the second transfer destination G2. It should be noted that the second stacker crane 6 uses the port 8 for carrying out and the second storage unit 28 as the third transfer destination, and the fourth port for cleaning 14 as the second transfer starting point S2. In the second transfer destination G2, the port and the storage unit 26 serving as the destination of the transfer container are set as the third transfer destination.

That is, as a specific example, the second stacker crane 6 transfers the container 2 from the second transfer starting point S2 to the second transfer destination G2 as follows. As shown in FIG. 3, the second stacker crane 6 uses the port 7 for carrying in as the second transfer starting point S2, and the first port 11 for washing as the second transferring destination G2 to carry out the container 2 Transfer from the loading port 7 to the first washing port 11. As shown in FIG. 5, the second stacker crane 6 sets the first cleaning port 11 as the second transfer starting point S2 and the third cleaning port 13 as the second transfer destination G2. The container 2 is transferred from the first washing port 11 to the third washing port 13. As shown in FIG. 6, the second stacker crane 6 uses the fourth cleaning port 14 as the second transfer starting point S2 and the second storage unit 28 as the second transfer destination G2 (the third transfer destination Ground) to carry the container 2 from the fourth washing port 14 to the second storage unit 28. As shown in FIG. 7, in the second stacker crane 6, the second storage unit 28 is set as the second transfer starting point S2 and the port 8 for transfer is set as the second transfer destination G2. The 2 storage unit 28 transfers to the port 8 for carrying out. In addition, although the container 2 has been moved into the port 7 for carrying in, the container 2 carried in the port 7 cannot be transferred to the first washing port because other containers 2 are present in the first washing port 11 In the case of 11, the second stacker crane 6 sets the loading port 7 as the second transfer starting point S2 and sets the second storage unit 28 as the second transfer destination G2 to move the container 2 from the loading port 7 is transferred to the second storage unit 28. When it is possible to transfer the container 2 to the first washing port 11, the second stacker crane 6 sets the second storage unit 28 as the second transfer starting point S2, and the first washing port S2 The cleaning port 11 is set as the second transfer destination G2, and the container 2 is transferred from the second storage unit 28 to the first cleaning port 11. As described above, the combination of the transfer starting point and the transfer destination of the container 2 by the second stacker crane 6 is not limited to the combination shown in the figure.

As shown in FIG. 1, the article transfer facility includes a control unit H that controls the first stacker crane 5 and the second stacker crane 6. In order to carry the plate-shaped body 1 and the container 2 as described below, the first stacker crane 5 and the second stacker crane 6 can be controlled by the control unit H. As shown by an imaginary line (two-point chain line) in FIG. 3, the container 2 can be carried into the carrying port 7 by the carrying conveyor 19. The container 2 carried in to this port 7 is a container 2 before washing, and a plate-like body 1 before washing is stored in the container 2. In addition, the control unit H executes the first container transfer control that controls the second stacker crane 6 to transfer the container 2 that has been transferred to the transfer port 7 from the transfer port 7 to the first washing port 11 (see FIG. image 3). The container 2 that has been transferred to the first washing port 11 is transferred to the position close to the first washing machine CL1 by the first washing conveyor 21 and then transferred to the robot of the first washing machine CL1. (Not shown) The plate-like body 1 is taken out of the container 2 and the plate-like body 1 is washed by the first washing machine CL1. The plate-like body 1 washed by the first washing machine CL1 is placed on the second washing conveyor 22 by the robot of the first washing machine CL1, as shown in FIG. 3 , Is transported to the second cleaning port 12 by the second cleaning conveyor 22. The container 2 from which the plate-shaped body 1 has been completely taken out can be transferred to the first washing port 11 from the position close to the first washing machine CL1 by the first washing conveyor 21.

The control unit H executes the second container transfer control that controls the second stacker crane 6 to transfer the container 2 of the first cleaning port 11 from the first cleaning port 11 to the third cleaning port 13 ( (See Figure 5). The container 2 conveyed by the second stacker crane 6 by the second container conveyance control is the container 2 before washing, and the plate-shaped body 1 is not accommodated in the container 2. In addition, as shown in FIG. 5, the container 2 before washing that has been transferred to the third washing port 13 can be transferred to the second washing machine CL2 by the third washing conveyor 23, and It was washed by the second washing machine CL2. The washed container 2 after being washed by the second washing machine CL2 is transferred to the fourth washing port 14 by the fourth washing conveyor 24.

The control unit H executes the third container transfer control that controls the second stacker crane 6 to transfer the container 2 of the fourth washing port 14 from the fourth washing port 14 to the second storage unit 28 (see FIG. 6). In addition, the control unit H executes the fourth container conveyance control that controls the second stacker crane 6 so that when the plate-shaped body 1 is to be accommodated in the container 2 and the container 2 needs to be carried out, the control unit H is removed from the second storage unit 28 is transferred to port 8 for carrying out (refer to FIG. 7). The container 2 transported by the second stacker crane 6 under the third container transport control and the fourth container transport control is the washed container 2, and the plate-shaped body 1 is not contained in the container 2.

The control unit H executes the first plate-like body transport control that controls the first stacker crane 5 to transfer the plate-like body 1 of the second washing port 12 from the second washing port 12 to the first inspection unit. 30 (see FIG. 4). The control unit H executes the second plate-like body conveyance control that controls the first stacker crane 5 to convey the plate-like body 1 that has completed the inspection in the first inspection unit 30 from the first inspection unit 30 to the second Inspection section 31 (see FIG. 5). The control unit H executes the third plate-like body conveying control that controls the first stacker crane 5 to convey the plate-like body 1 that has completed the inspection in the second inspection unit 31 from the second inspection unit 31 to the first The storage unit 27 (see FIG. 6). In addition, the control unit H executes the fourth plate-shaped body conveyance control that controls the first stacker crane 5 so as to store the plate-shaped body 1 in the container 2 and carry the container 2 out of the first storage unit The plate-like body 1 of 27 is transferred from the first storage unit 27 to the carrying-out port 8 (see FIG. 8). The plate-like body 1 conveyed by the first stacker crane 5 by the first plate-like body conveying control, the second plate-like body conveying control, the third plate-like body conveying control, and the fourth plate-like body conveying control. Is the plate-like body 1 after washing. In addition, in the fourth plate-shaped body conveying control, when the plate-shaped body 1 is transported to the port 8 for carrying out by the first stacker crane 5, the first plate-shaped crane 5 conveys the plate-shaped body. 1 is transported to the carrying-out port 8 so that the plate-shaped body 1 is accommodated in the container 2 located in the carrying-out port 8.

2. Other Embodiments Next, other embodiments of the article transfer facility will be described.

(1) In the above embodiment, although the first washing port 11 is provided on the first direction Y1 side with respect to the second washing port 12, the first washing port 11 and the second washing port The setting position of the port 12 can be changed as appropriate. For example, the first washing port 11 may be provided in the second direction Y2 with respect to the second washing port 12 or may be provided so that the first washing port 11 is viewed from the vertical direction Z. It overlaps with the second washing port 12, and the first washing port 11 and the second washing port 12 are provided at the same position in the arrangement direction Y. The installation positions of the third cleaning port 13 and the fourth cleaning port 14 and the installation positions of the carry-in port 7 and the carry-out port 8 may be the same as those of the first washing port 11 and the second Similarly, the washing port 12 is appropriately changed. In the above-mentioned embodiment, the fourth washing port 14 and the third washing port 13 are separately provided, but the third washing port 13 may be provided with the fourth washing port 14 Function, the third cleaning port 13 and the fourth cleaning port 14 are shared. In addition, although the carrying-out port 8 and the carrying-in port 7 are separately provided, the carrying-in port 7 can be provided with the function of carrying-out port 8 and the carrying-in port 7 and carrying-out port 8 can be shared.

(2) In the above embodiment, although the second stacker crane 6 is used to transport the container 2 which has been cleaned by the second washing machine CL2 and does not contain the plate-like body 1, to the port 8 for carrying out, and The first stacker crane 5 transfers the plate-like body 1 which has been washed by the first washing machine CL1 to the carrying-out port 8 so that the plate-like body 1 is accommodated in a container located at the carrying-out port 8. 2. In this manner, the plate-shaped body 1 is accommodated in the container 2, but the plate-shaped body 1 may be accommodated in the container 2 by other structures. Specifically, for example, it may be performed as follows: a container storage port is separately provided from the port 8 for carrying out, so that the second stacker crane 6 is cleaned by the second cleaning machine CL2 and the plate-shaped body is not stored therein. The container 2 of 1 is transferred to the container storage port, and the first stacker crane 5 transfers the plate-shaped body 1 that has been washed by the first washing machine CL1 to the container storage port, so that the container 1 The plate-like body 1 is accommodated in a container 2 located in a container storage port. In this case, the container 2 in which the plate-shaped body 1 is accommodated is transferred from the container storage port to the carry-out port 8 by the second stacker crane 6. For example, a plate-shaped body port is provided separately from the port 8 for carrying out, and the second stacker crane 6 transports the container 2 which is cleaned by the second washing machine CL2 and does not contain the plate-shaped body 1 to The port 8 for carrying out and the first stacker crane 5 transfer the plate-like body 1 washed by the first washing machine CL1 to the plate-like body port. In addition, the plate-shaped body 1 may be transferred from the plate-shaped port to the port 8 for carrying out by a separately equipped storage robot so that the plate-shaped body 1 is accommodated in the container 2 located at the port 8 for carrying-out. .

(3) In the above embodiment, although the first stacker crane 5 is configured to support the bottom surface of the plate-shaped body 1 from below, the configuration of the support plate-shaped body 1 in the first stacker crane 5 may be configured. By making appropriate changes, for example, the first stacker crane 5 may be configured to support the plate-like body 1 from above by adsorbing the upper surface of the plate-like body 1. Although the second stacker crane 6 is configured to support the bottom surface of the container 2 from below, the configuration of the support container 2 in the second stacker crane 6 may be appropriately changed, and for example, the second stacker The crane 6 supports the upper portion of the container 2 and supports the container 2 in a suspended manner.

(4) In the above embodiment, the first washing port 11, the second washing port 12, the third washing port 13, the fourth washing port 14, the carry-in port 7, and the carry-out Among the ports 8, only the first storage unit 27 among the first storage unit 27 and the second storage unit 28 is provided in the first direction Y1 than the port located on the side of the first direction Y1. The port located on the side of the first direction Y1 is further positioned in the first direction Y1, and both the first storage section 27 and the second storage section 28 are provided. In addition, among the first washing port 11, the second washing port 12, the third washing port 13, the fourth washing port 14, the carry-in port 7, and the carry-out port 8, The port located on the side of the second direction Y2 is closer to the second direction Y2, and only the second storage unit 28 among the first storage unit 27 and the second storage unit 28 is provided, but it may be located on the Y2 side more than the second storage The port is further located in the second direction Y2, and both the first storage unit 27 and the second storage unit 28 are provided.

(5) In the above embodiment, the third washing port 13 and the fourth washing port 14 are provided at positions where the second stacker crane 6 can transfer the container 2, but a third washing port is provided. The positions of the port 13 and the fourth cleaning port 14 may be changed as appropriate. Specifically, for example, the third washing port 13 and the fourth washing port 14 may be provided outside the wall body W, and the container 2 before the washing without the plate-like body 1 may be removed from The carrying-out port 8 is carried out, and the container 2 carried out from the carrying-out port 8 is transferred to the third washing port 13 by an external transfer device, and the washing is transferred from the fourth washing port 14 by an external transfer device. After cleaning, the container 2 in which the plate-shaped body 1 is not contained is carried in from the port 7 for carrying in. The second washing machine CL2, the third washing port 13 and the fourth washing port 14 may not be provided.

(6) In the above-mentioned embodiment, although the article is a mask, other plate-like bodies 1 such as wafers may be used, and the shape of the article may be cube-shaped and round in addition to the plate-like shape. Other shapes such as rods.

(7) Furthermore, the structures disclosed in each of the above embodiments can be applied in combination with the structures disclosed in other embodiments as long as no contradiction occurs. Regarding other structures, the embodiments disclosed in this specification are merely examples in all respects. Therefore, various changes can be appropriately made without departing from the gist of the present invention.

3. Outline of the above embodiment The outline of the article transfer facility described above will be described below.

An article transporting device comprising: a carry-in port for carrying the container in which the article is stored; a first washing port provided at a position corresponding to the first washing machine for washing the article, and supporting the container, The container contains the articles before being washed by the first washing machine; the second washing port is provided at a position corresponding to the first washing machine and supports the articles, and the articles are removed from the container Take out the aforementioned articles after being washed by the aforementioned first washing machine; the first transporting device to transport the aforementioned articles; and the second transporting device to transport the aforementioned containers, the second washing port is the same as the first washing port The port is separately provided, and the second transfer device performs the transfer of the container from the carry-in port to the first washing port, and the removal of the container from the first washing port after the item is taken out. The port transfers to the second transfer destination, and the first transfer device transfers the articles from the second cleaning port to the first transfer destination.

With such a configuration, the container that has been carried into the carrying port can be transferred from the carrying port to the first washing port by the second carrying device. At this time, the articles transported by the first washing machine are stored in a container transported by the second transporting device. In addition, the articles are taken out from the container located in the first washing port, washed by the first washing machine, and then placed on the second washing port. Then, the washed articles can be transferred from the second washing port to the first transfer destination by the first transfer device. In addition, the container that has been taken out and emptied can be transferred from the first cleaning port to the second transfer destination by the second transfer device.

The articles before being washed by the first washing machine are carried into the carrying port in a state of being stored in a container, and are transferred from the carrying port to the first port by a second carrying device in a state of being stored in the container. Wash the port. In addition, the articles washed by the first washing machine are transferred from the second washing port to the transfer destination by the first transfer device. In this way, since the first conveying device does not convey the articles before being cleaned by the first washing machine, but only the articles after being cleaned, the following situation can be avoided: The second conveying device that is soiled by the articles conveys the articles after the washing, and thus the articles after the washing are contaminated.

It is also preferable to further include a third washing port provided at a position corresponding to the second washing machine, and supporting the container before being washed by the second washing machine. The washing machine cleans the container after the articles have been taken out; and the fourth washing port is provided at a position corresponding to the second washing machine and supports washing by the second washing machine In the cleaned container, the fourth washing port may be separately provided from the third washing port, or may be shared with the third washing port. The second transfer device is performed after the articles are taken out. Of the container from the first cleaning port to the third cleaning port as the second transfer destination, and the container from the fourth cleaning port to the third transfer destination Transport.

According to this configuration, a container that has been washed by the second washing machine from the first washing port to the third washing port by the second transfer device, and can be transferred by the second transfer device. Transfer from the 4th washing port to the 3rd transfer destination. In this manner, the container is washed by the second washing machine, and the container is transferred from the fourth washing port to the third transfer destination by the second transfer device. This is different from the case where a separate transfer device is provided. In contrast, it is possible to simplify the configuration of the article transfer facility.

Here, it is desirable to set the direction in which the first washing machine and the second washing machine are arranged as the arrangement direction, and to set the first washing machine to the second washing machine in the arrangement direction. The direction in which the clean machine exists is set to the first direction, and the opposite direction is set to the second direction. Each of the first transport device and the second transport device is configured to be movable in the array direction. The first conveying device is located on the first direction side with respect to the second conveying device, and the moving path of the first conveying device and the moving path of the second conveying device have overlapping portions in the arrangement direction.

According to this configuration, by assigning a transfer destination to a portion where the movement path of the first transfer device and the movement path of the second transfer device overlap in the arrangement direction, the articles can be borrowed by the first transfer device and the second transfer device. And container to the same destination. Therefore, for example, the washed container can be transferred to the transfer destination by the second transfer device, and the washed articles can be transferred to the transfer destination to be stored in the container located at the transfer destination. In this way, it is possible to provide an easy-to-use article transfer device.

Preferably, the first storage unit further includes a first storage unit for storing the article, and a second storage unit for storing the container. The first transfer device also performs the following operations: When the cleaning port is transferred to the first storage unit as the first transfer destination, the second transfer device also performs the following: The container is moved from the fourth cleaning port to the third transfer destination. Transport by the second storage unit.

According to this configuration, the washed articles can be stored in the first storage section, and the washed containers can be stored in the second storage section. In addition, if the articles to be cleaned are to be stored in a cleaned container, and there is a deviation between the time when the washing of the articles is completed and the time when the washing of the containers is completed, etc., the first storage can be used. The second storage unit and the second storage unit serve as a buffer for temporarily storing articles and containers.

In addition, it is preferable that a direction in which the first washing machine exists relative to the second washing machine is set to a first direction, and an opposite direction is set to a second direction, and the first washing port is Among the second washing port, the third washing port, the fourth washing port, and the carry-in port, the second washing port is disposed closest to the first direction side, and The fourth washing port is provided at the side closest to the second direction, and in the first direction further than the second washing port, only one of the first storage unit and the second storage unit is provided. The first storage unit is provided with only the second storage unit among the first storage unit and the second storage unit in the second direction further than the fourth cleaning port.

According to this configuration, in the arrangement direction, a first washing port, a second washing port, a third washing port, a fourth washing port, and the like are provided between the first and second storing units. And move into ports, so you can set these ports together. Therefore, when an article or container is transferred from a port to another port, the article and container can be efficiently transferred. In addition, since the first storage section for storing articles is provided in the first direction further than the second washing port provided on the most first direction side, the second storage port for transporting containers is not provided. The transfer device moves in the first direction more than the second cleaning port, and the moving path of the second transfer device can be shortened. In addition, since the first storage section for storing containers is provided in the second direction further than the fourth washing port provided on the second-most direction side, the first storage section for storing articles is not provided. The transfer device moves in the second direction more than the fourth cleaning port, and the moving path of the first transfer device can be shortened. Since the moving paths of the first transfer device and the second transfer device can be shortened in this manner, it is possible to efficiently transfer the articles by the first transfer device and the container by the second transfer device.

Further, it is more desirable to further include a carrying-out port for carrying out the container in which the article is stored, and the second carrying device is to be washed by the second washing machine and is not contained. The container having the item is transferred to the port for carrying out, and the first transfer device transfers the item to the port for carrying out, so that the item that has been washed by the first washing machine is stored in the port Remove the container from the port.

According to this configuration, the container that does not contain articles is first transferred to the port for carrying out by the second transfer device, and the washed articles are transferred to the port for carrying out by the first transferring device so that the articles are stored in the port. container. As described above, by using the carry-out port to store the articles in the container, it is not necessary, for example, to store the washed articles in the container in a place other than the carry-out port, but also to carry out the container containing the articles. The container can be efficiently carried out due to the transfer processing to the port for carrying out. Industrial availability

The technology of the present disclosure can be used in an article transfer device that transfers articles and containers to a port provided at a position corresponding to a washing machine.

1‧‧‧ plate (item)

2‧‧‧ container

4‧‧‧Storage rack

5‧‧‧ The first stacker crane (the first transfer device)

6‧‧‧ The second stacker crane (second transfer device)

7‧‧‧ moved into the port

8‧‧‧ moved out of the port

11‧‧‧The first cleaning port

12‧‧‧ 2nd cleaning port

13‧‧‧3rd cleaning port

14‧‧‧ 4th cleaning port

16‧‧‧The first fan filter unit

17‧‧‧ 2nd fan filter unit

19‧‧‧ Conveyor for moving in

20‧‧‧ Conveyor for carrying out

21‧‧‧The first cleaning conveyor

22‧‧‧The second cleaning conveyor

23‧‧‧The third cleaning conveyor

24‧‧‧The fourth cleaning conveyor

26‧‧‧Storage Department

27‧‧‧The first storage department

28, 28A, 28B‧‧‧Second Storage Department

29‧‧‧ Inspection Department

30‧‧‧The first inspection department

31‧‧‧The second inspection department

32‧‧‧ Isolator

33‧‧‧ Walking trolley

34‧‧‧mast

35‧‧‧Lifting body

36‧‧‧ Transfer Device

CL1‧‧‧The first washing machine

CL2‧‧‧The second washing machine

F‧‧‧Floor Department

F1‧‧‧Lower floor

F2‧‧‧ Upper floor

G1‧‧‧The first transfer destination

G2‧‧‧The second transfer destination

H‧‧‧Control Department

M1, M2‧‧‧moving path

P1‧‧‧1st position

P2‧‧‧ 2nd position

P3‧‧‧3rd position

P4‧‧‧4th position

S1‧‧‧The first transfer starting point

S2‧‧‧The second transfer starting point

W‧‧‧ wall

X‧‧‧ forward and backward direction

X1‧‧‧Front

X2‧‧‧ rear

Y‧‧‧Arrangement direction

Y1‧‧‧1st direction

Y2‧‧‧ 2nd direction

Z‧‧‧ Up and down direction

FIG. 1 is a plan view of an article transport facility. FIG. 2 is a side view of the article transport facility. FIG. 3 is an explanatory diagram of container transportation by a second stacker crane. FIG. 4 is an explanatory diagram of conveying a plate-like body by a first stacker crane. FIG. 5 is an explanatory diagram of conveying a plate-shaped body by a first stacker crane and conveying a container by a second stacker crane. FIG. 6 is an explanatory diagram of conveying a plate-shaped body by a first stacker crane and conveying a container by a second stacker crane. FIG. 7 is an explanatory diagram of container transportation by a second stacker crane. FIG. 8 is an explanatory diagram of conveying a plate-like body by a first stacker crane.

Claims (6)

An article transporting device includes: a port for carrying in for a container containing an article to be carried in; a first washing port provided at a position corresponding to a first washing machine for washing the article, and supporting the container and the container The second washing port is provided at a position corresponding to the first washing machine, and supports the article. The article is taken out from the container and stored therein. The articles cleaned by the first washing machine; the first conveying device conveys the articles; and the second conveying device conveys the container. The article conveying device is characterized in that the second washing port is and The first cleaning port is separately provided, and the second transfer device is configured to transfer the container from the loading port to the first cleaning port, and to remove the container from the container after the item is removed. The first cleaning port transfers the second cleaning port to the second transfer destination, and the first transfer device transfers the articles from the second cleaning port to the first transfer destination. For example, the item transfer equipment of claim 1 further includes: a third washing port, which is provided at a position corresponding to the second washing machine, and supports the container before being washed by the second washing machine, The second washing machine cleans the container after the articles have been taken out; and the fourth washing port is provided at a position corresponding to the second washing machine, and supports the second washing machine through the second washing. In the container after the washing machine is cleaned, the fourth cleaning port may be separately provided from the third cleaning port, or may be shared with the third cleaning port. The second transfer device is for removing the foregoing. Transfer of the container after the article from the first cleaning port to the third cleaning port as the second transfer destination, and transfer of the container from the fourth cleaning port to the third transfer destination Ground transportation. If the item transfer facility of item 1 or 2 is requested, the direction in which the first washing machine and the second washing machine are arranged is set as the arrangement direction, and the direction in which the first washing machine is arranged is opposite to the second washing machine. The direction in which the first washing machine exists is set to the first direction, and the opposite direction is set to the second direction. Each of the first conveying device and the second conveying device is in a direction that can be arranged. The moving structure is such that the first conveying device is located on the first direction side with respect to the second conveying device, and the moving path of the first conveying device and the moving path of the second conveying device have the moving direction. Overlapping parts. If the article transfer equipment of claim 2 further includes: a first storage unit for storing the aforementioned articles, and a second storage unit for storing the aforementioned containers, the first transporting device also performs the following: When the second cleaning port is transferred to the first storage unit as the first transfer destination, the second transfer device also performs the following: The container is transferred from the fourth cleaning port to the third transfer port. Transfer to the aforementioned second storage section of the destination. The article transfer facility according to claim 4, wherein a direction in which the first washing machine is present with respect to the second washing machine is set as a first direction, and an opposite direction is set as a second direction, and the first Among the cleaning port, the second cleaning port, the third cleaning port, the fourth cleaning port, and the carry-in port, the second cleaning port is located closest to the first port. 1 direction side, and the 4th washing port is provided at the side closest to the 2nd direction. Only the 1st storage unit and the 1st direction are provided in the 1st direction further than the 2nd washing port. The first storage unit of the second storage unit is provided with the second storage unit of the first storage unit and the second storage unit only in the second direction further than the fourth washing port. . For example, the article transfer equipment of claim 1 or 2 further includes a port for carrying out the aforementioned container for containing the aforementioned article, and the second transferring device is for the aforementioned container which does not contain the aforementioned article. The first transfer device transfers the article to the port for carrying out, so that the article that has been washed by the first washing machine is stored in the container at the port for carrying out.