TW201807404A - 在玻璃上表面上偵測粒子的方法與設備以及照射入射光的方法 - Google Patents
在玻璃上表面上偵測粒子的方法與設備以及照射入射光的方法 Download PDFInfo
- Publication number
- TW201807404A TW201807404A TW106117330A TW106117330A TW201807404A TW 201807404 A TW201807404 A TW 201807404A TW 106117330 A TW106117330 A TW 106117330A TW 106117330 A TW106117330 A TW 106117330A TW 201807404 A TW201807404 A TW 201807404A
- Authority
- TW
- Taiwan
- Prior art keywords
- glass
- region
- light
- incident light
- mirror
- Prior art date
Links
- 239000011521 glass Substances 0.000 title claims abstract description 113
- 239000002245 particle Substances 0.000 title claims abstract description 67
- 238000000034 method Methods 0.000 title claims abstract description 33
- 230000001678 irradiating effect Effects 0.000 title claims description 5
- 239000005357 flat glass Substances 0.000 description 14
- 238000001514 detection method Methods 0.000 description 8
- 238000005286 illumination Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N2021/1765—Method using an image detector and processing of image signal
- G01N2021/177—Detector of the video camera type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
- G01N2021/945—Liquid or solid deposits of macroscopic size on surfaces, e.g. drops, films, or clustered contaminants
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Geophysics And Detection Of Objects (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ??10-2016-0064134 | 2016-05-25 | ||
| KR1020160064134A KR20170133113A (ko) | 2016-05-25 | 2016-05-25 | 유리 상면 상의 이물질 검출 방법과 장치, 및 입사광 조사 방법 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201807404A true TW201807404A (zh) | 2018-03-01 |
Family
ID=60412805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW106117330A TW201807404A (zh) | 2016-05-25 | 2017-05-25 | 在玻璃上表面上偵測粒子的方法與設備以及照射入射光的方法 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6953446B2 (fr) |
| KR (1) | KR20170133113A (fr) |
| CN (1) | CN109564170A (fr) |
| TW (1) | TW201807404A (fr) |
| WO (1) | WO2017204560A1 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI804401B (zh) * | 2022-07-28 | 2023-06-01 | 國立成功大學 | 光學量測系統 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110073203B (zh) | 2016-11-02 | 2022-07-08 | 康宁股份有限公司 | 检查透明基材上的缺陷的方法和设备 |
| JP7183156B2 (ja) * | 2016-11-02 | 2022-12-05 | コーニング インコーポレイテッド | 透明基板上の欠陥部の検査方法および装置並びに入射光の出射方法 |
| TWI711802B (zh) * | 2019-08-27 | 2020-12-01 | 勵威電子股份有限公司 | 一種對玻璃上的微粒進行統計的方法 |
| CN111007016A (zh) * | 2019-12-09 | 2020-04-14 | 暨南大学 | 一种检测透明材料表面微小颗粒杂质的装置及使用方法 |
| GB202100905D0 (en) | 2021-01-22 | 2021-03-10 | Pikington Group Ltd | Glass inspection |
| KR20230092065A (ko) | 2021-12-16 | 2023-06-26 | 삼성디스플레이 주식회사 | 검사 방법 및 이를 수행하는 검사 장치 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2559470B2 (ja) * | 1988-08-12 | 1996-12-04 | 株式会社日立製作所 | 外観検査方法 |
| JPH10160683A (ja) * | 1996-11-29 | 1998-06-19 | Matsushita Electric Ind Co Ltd | 異物検査方法とその装置 |
| KR101332786B1 (ko) * | 2005-02-18 | 2013-11-25 | 쇼오트 아게 | 결함 검출 및/또는 분류 방법 및 장치 |
| DE102005007715B4 (de) * | 2005-02-18 | 2008-07-24 | Schott Ag | Vorrichtung zur Erfassung von Fehlstellen und Verwendung der Vorrichtung |
| KR100829501B1 (ko) * | 2005-03-09 | 2008-05-16 | 엘지전자 주식회사 | 디스플레이 패널 검사 장치 및 그 검사 방법 |
| US8289387B2 (en) * | 2007-07-10 | 2012-10-16 | Datalogic Automation S.R.L. | Vision system, method for installing a vision system and method for manufacturing a vision system |
| CN101082585B (zh) * | 2007-07-19 | 2010-06-02 | 清华大学 | 反射式近场拉曼光谱仪测量头 |
| KR101108672B1 (ko) * | 2009-05-12 | 2012-01-25 | (주)제이티 | 반도체소자 비전검사장치 및 그 방법 |
| US7929129B2 (en) * | 2009-05-22 | 2011-04-19 | Corning Incorporated | Inspection systems for glass sheets |
| KR101177299B1 (ko) * | 2010-01-29 | 2012-08-30 | 삼성코닝정밀소재 주식회사 | 평판 유리 표면 이물질 검사 장치 |
| JP5791101B2 (ja) * | 2011-05-16 | 2015-10-07 | 芝浦メカトロニクス株式会社 | 貼り合せ板状体検査装置及び方法 |
| KR101234935B1 (ko) * | 2011-06-09 | 2013-02-19 | 삼성전기주식회사 | 조명검사장치 및 조명검사방법 |
| KR101324015B1 (ko) * | 2011-08-18 | 2013-10-31 | 바슬러 비전 테크놀로지스 에이지 | 유리기판 표면 불량 검사 장치 및 검사 방법 |
| US8736831B2 (en) * | 2012-05-15 | 2014-05-27 | Kla-Tencor Corp. | Substrate inspection |
| JP2014016326A (ja) * | 2012-07-11 | 2014-01-30 | Hitachi High-Technologies Corp | 基板検査方法及び装置 |
| KR20140023791A (ko) * | 2012-08-17 | 2014-02-27 | (주) 인텍플러스 | 기판 검사장치 |
| CN103115928A (zh) * | 2013-02-05 | 2013-05-22 | 深圳市华星光电技术有限公司 | 玻璃表面异物检查装置、检查机及其检查方法 |
| KR101605000B1 (ko) * | 2014-03-12 | 2016-03-21 | 이영우 | 기판 검사장치 |
| KR101636055B1 (ko) * | 2014-04-30 | 2016-07-05 | 주식회사 나노프로텍 | 편광을 이용한 투명기판 상면 이물 검출 방법 |
| JP2015219085A (ja) * | 2014-05-16 | 2015-12-07 | 東レエンジニアリング株式会社 | 基板検査装置 |
| JP6296499B2 (ja) * | 2014-08-11 | 2018-03-20 | 株式会社 東京ウエルズ | 透明基板の外観検査装置および外観検査方法 |
| CN105203559B (zh) * | 2015-10-22 | 2018-11-20 | 夏烬楚 | 一种多层石墨烯污点拍照检测装置 |
-
2016
- 2016-05-25 KR KR1020160064134A patent/KR20170133113A/ko not_active Withdrawn
-
2017
- 2017-05-24 CN CN201780032453.4A patent/CN109564170A/zh active Pending
- 2017-05-24 WO PCT/KR2017/005418 patent/WO2017204560A1/fr not_active Ceased
- 2017-05-24 JP JP2018561206A patent/JP6953446B2/ja not_active Expired - Fee Related
- 2017-05-25 TW TW106117330A patent/TW201807404A/zh unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI804401B (zh) * | 2022-07-28 | 2023-06-01 | 國立成功大學 | 光學量測系統 |
| US12196550B2 (en) | 2022-07-28 | 2025-01-14 | National Cheng-Kung University | Optical measurement system |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2017204560A1 (fr) | 2017-11-30 |
| CN109564170A (zh) | 2019-04-02 |
| JP6953446B2 (ja) | 2021-10-27 |
| JP2019516998A (ja) | 2019-06-20 |
| KR20170133113A (ko) | 2017-12-05 |
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