TW201727251A - Pusher apparatus - Google Patents

Abstract

The present invention relates to a pusher device, and more particularly, to a pusher device for pushing terminals of an inspection target device against an inspection device. The pusher device includes a housing including a pusher accommodating space, a valve accommodating space, an inflow path having, a discharge path, and a connection path; the valve structure being configured to selectively connect the connection path to one of the inflow path and the discharge path; and a pushing means being configured to be lowered by a pneumatic pressure and brought into contact with the inspection target device for pushing the inspection target device against the inspection device, wherein the valve structure and the pushing means are arranged in the housing.

Description

Pusher device

This invention relates to a pusher device and, more particularly, to a pusher device that integrates a housing with a valve to reduce the overall size and weight of the device.

Typically, the semiconductor device that is inspected is electrically inspected. In order to perform such electrical inspection, after mounting the semiconductor device transferred from the outside to a specific inspection device, a specific pressing force is applied to the semiconductor device to fix the terminal of the semiconductor device with a fixed pressure and an inspection device. Pad contact.

Such a device for pressing a semiconductor device to the inspection device side is referred to as a pusher device, and the pusher device generally includes a housing having a cylinder structure inside, which is operated by air pressure, and a valve device. The supply of air is turned on/off (ON/OFF) between the cylinder that supplies the air and the casing.

At this time, a specific space filled with air flowing in from the outside and a pressurizing unit that pressurizes the upper surface of the semiconductor device in the space is provided inside the casing.

Further, the valve device is internally provided with a valve for connecting to the cylinder and the casing to turn on/off the air supplied from the cylinder, and the valve device is provided outside the casing independently of the casing.

As described above, the pusher device of the prior art is constructed by separately manufacturing the casing and the valve device, and is attached to each other, so that there is a problem that the overall size and weight are large.

[Problem to be Solved by the Invention] The present invention has been made to solve the above problems, and more specifically, an object of the invention is to provide a pusher device that integrates a casing and a valve to reduce the overall size and weight of the device. [Means for solving the problem]

The pusher device of the present invention for achieving the above object is for pressurizing a terminal of the device to be inspected to the inspection device, the pusher device comprising: a housing including a pusher housing space disposed to the center and open downward, and The pusher accommodating space is disposed adjacent to each other and can accommodate a valve accommodating space of the valve structure, an inflow passage whose one end is connected to the external air inflow portion, and the other end is connected to the valve accommodating space, and one end is connected to the outside and the other end is connected to the above a discharge passage connected to the valve accommodating space; and a connection passage connected at one end to the valve accommodating space and connected to the pusher accommodating space at the other end; the valve structure selectively connecting the connecting passage to the inflow passage and the discharge passage And the pressurizing unit is in contact with the device to be inspected by the air pressure drop when the inflow passage communicates with the connecting passage and the air flows into the pusher housing space from the air inflow portion, thereby being Pressing the device to be inspected on the side of the inspection device; and the valve structure and the pressurizing unit are disposed in the same casing

In the pusher device, the valve structure is insertable into a valve housing space of the housing, and moves between an inflow position and a discharge position, and the valve structure connects the connection passage and the inflow passage to each other at the inflow position. The communication between the connection passage and the discharge passage is blocked, and the valve structure connects the connection passage and the discharge passage to each other at the discharge position, and blocks communication between the connection passage and the inflow passage.

In the above-described pusher device, when the valve structure moves to the inflow position and air flows into the pusher housing space, the pressurizing unit can come into contact with the device to be inspected by a drop in air pressure, thereby checking The device side is pressed against the device to be inspected.

In the above-described pusher device, the valve structure may include a tubular valve bush inserted into the valve housing space, and having a rod insertion hole that connects the upper end and the lower end; at least a part of the valve stem is inserted into the valve bushing, Moving between the inflow position and the discharge position; the elastic biasing unit elastically biasing the valve stem from the discharge position toward the inflow position side; and the operation unit being disposed to the upper end side of the tubular valve member, The valve stem is in contact with the valve stem to pressurize the valve stem to move toward the discharge position.

In the above-described pusher device, the valve accommodating space may include an inflow portion that connects the inflow passage, a discharge portion that connects the discharge passage, and a connection portion that connects the connection passage, and the connection portion is disposed between the inflow portion and the discharge portion. .

In the above-described pusher device, the valve bushing may be provided with a communication hole that communicates the inflow passage with the inner rod insertion hole at the upper end, and the outer surface of the valve bushing and the valve receiving space are disposed on the lower side of the communication hole. A sealed liner seal between them.

In the above pusher device, the valve stem may include a post portion at least partially inserted into the rod insertion hole of the valve bushing, having an outer diameter smaller than the rod insertion hole, and a sealing portion integrally connected to the column portion a sealing member is provided; the inflow position is a position at which the sealing member of the sealing portion is in airtight contact with an inner surface of the rod insertion hole of the valve bush, and the discharge position is a sealing of the sealing portion The seal is in a position to be in airtight contact with the inner wall of the accommodating space between the inflow portion and the connecting portion.

In the connecting portion of the pusher device, the valve stem is spaced apart from the inner wall of the valve receiving space by a specific interval. When the sealing member of the sealing portion is located at the inflow portion, the connecting passage of the connecting portion can be connected by a valve. The lower end of the rod is in communication with the discharge passage.

In the pusher device, when the sealing member of the sealing portion is fitted into the valve stem, the inflow passage of the connecting portion can communicate with each other by a space between the outer circumferential surface of the valve stem and the sealing portion. [Effect of the invention]

Since the valve structure and the pressurizing unit are disposed in the same casing, there is an advantage that the space for inspecting the semiconductor device can be minimized.

Hereinafter, a pusher device according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

The present invention relates to a pusher device 10 for pressurizing a terminal of an inspected device 50 to an inspection device, the pusher device 10 comprising: a housing 20, a valve structure 30, and a pressurizing unit 40; The body 30 and the pressurizing unit 40 are disposed in the same casing 20.

The casing 20 has a rectangular parallelepiped shape as a whole, and includes a pusher accommodating space 21, a valve accommodating space 22, an inflow passage 23, a discharge passage 24, and a connecting passage 25 therein.

The pusher accommodating space 21 is disposed substantially at the center and opened downward, and is formed substantially in a cylindrical shape. The other end of the connecting passage 25 is connected to the pusher accommodating space 21.

The valve housing space 22 is disposed adjacent to the pusher housing space 21 and can accommodate the valve structure 30 to house the valve structure 30 therein. Specifically, the valve accommodating space 22 has a groove shape that is open to the upper side. The valve accommodating space 22 is connected to the other end of the inflow passage 23, the other end of the discharge passage 24, and one end of the connecting passage 25.

The valve accommodating space 22 includes an inflow portion 221 that connects the inflow passage 23, a discharge portion 222 that connects the discharge passage 24, and a connection portion 223 that connects the connection passage 25, and the connection portion 223 is disposed in the inflow portion 221 and the discharge portion. Between 222. In the connecting portion 223, the valve stem 32 is spaced apart from the inner wall of the valve receiving space 22 by a predetermined interval. When the sealing member 322a of the sealing portion 322 is located at the inflow portion 221, the connecting passage 25 of the connecting portion 223 is borrowed. The discharge passage 24 is communicated by the lower end of the valve stem 32.

When the sealing seal 322a of the sealing portion 322 is fitted into the valve stem 32, the inflow passage 23 of the connecting portion 223 can communicate with each other by the space between the outer circumferential surface of the valve stem 32 and the sealing portion 322.

One end of the inflow passage 23 is connected to the external air inflow portion 231, and the other end is connected to the valve housing space 22. Specifically, the inflow passage 23 is a passage that is connected to an external air pump at one end to allow air to be supplied from an air pump (not shown) to flow therein.

One end of the discharge passage 24 is connected to the external discharge passage 241, and the other end is connected to the valve accommodating space 22, and the function of the air discharge passage 24 is performed to increase the pressure of the device under inspection 50 after the pressurizing unit 40 is completed. When it is possible, the air can be discharged.

The connecting passage 25 is a passage that is connected to the valve housing space 22 at one end and to the pusher housing space 21 at the other end. Such a connecting passage 25 serves as a passage for allowing air to flow into the inside of the pusher accommodating space 21, or as a passage for discharging the air inside the pusher accommodating space 21 to the outside.

The valve structure 30 allows the connection passage 25 to selectively communicate with any of the inflow passage 23 and the discharge passage 24. Specifically, the valve structure 30 is inserted into the valve housing space 22 of the casing 20 and moved between the inflow position and the discharge position, and the valve structure 30 causes the connection passage 25 and the inflow passage 23 to be in contact with each other at the inflow position. Communicating and blocking the communication between the connecting passage 25 and the discharge passage 24, the valve structure 30 communicates between the connecting passage 25 and the discharge passage 24 at the discharge position, and blocks the connection passage 25 and the inflow passage 23 therebetween. Connected.

Such a valve structure 30 includes a valve bushing 31, a valve stem 32, a resilient biasing unit 33, and an operating unit 34.

The valve bushing 31 has a cylindrical shape and is inserted into the valve housing space 22, and has a rod insertion hole 311 that communicates with the upper and lower ends. The valve bushing 31 is provided at the upper end with a communication hole 312 that communicates the inflow passage 23 with the inner rod insertion hole 311, and an outer surface of the valve bushing 31 and the valve housing space 22 are provided below the communication hole 312. A sealed liner seal 313 is provided.

At least a portion of the valve stem 32 is inserted into the valve bushing 31 to move between the inflow position and the discharge position. The valve stem 32 includes a column portion 321 that is at least partially inserted into the rod insertion hole 311 of the valve bushing 31 and has an outer diameter smaller than the rod insertion hole 311, and a sealing portion 322 integrally connected to the column portion 321 A hermetic seal 322a is provided. In this case, the inflow position is a position at which the sealing seal 322a of the sealing portion 322 is in airtight contact with the inner surface of the rod insertion hole 311 of the valve bush 31, and the discharge position is a sealing of the sealing portion. The seal is in a gas-tight manner at a position in contact with the inner wall of the valve housing space 22 between the inflow portion 221 and the connecting portion 223.

The elastic biasing unit 33 elastically biases the valve stem 32 from the discharge position toward the inflow position side. Specifically, the elastic biasing unit 33 is disposed between the lower end of the valve stem 32 and the lower end of the valve housing space 22 to elastically support the valve stem 32.

The operation unit 34 is disposed on the upper end side of the cylindrical valve member, and is in contact with the valve stem 32 to pressurize the valve stem 32 to move the valve stem to the discharge position.

When the inflow passage 23 communicates with the connection passage 25 and the air flows into the pusher housing space 21 from the air inflow portion 231, the pressurizing unit 40 comes into contact with the device under inspection 50 by a drop in air pressure. The device under inspection 50 can be pressurized to the inspection device side. When the valve structure 30 moves toward the inflow position and air flows into the pusher housing space 21, the pressurizing unit 40 comes into contact with the device under inspection 50 by the pressure drop of the air, thereby being able to be directed to the inspection device side. The above-mentioned device to be inspected 50 is pressurized. The pressurizing unit 40 includes a pressurizing plate 41 that presses against the upper surface of the device to be inspected to pressurize the device under test 50, and a piston 42 that is connected to the pressurizing plate 41 and rises by air pressure. Or descending; and the piston spring 43 elastically biases the piston 42 to the upper side. The pressurizing unit has a structure in which, when air flows into the pusher accommodating space 21, the piston 42 is lowered by air pressure, and the pressure plate 41 is also lowered together with the piston. If the air pressure is removed, the piston 42 is removed. The piston spring 43 rises. Such a pressurizing unit 40 is a general configuration of the pusher device 10, and thus detailed description thereof will be omitted.

The action and effect of the pusher device 10 of the present invention are as follows.

First, the case where the valve structure 30 is located at the discharge position and the pressurizing unit 40 is raised is shown in FIGS. 6 to 8. At this time, since the connection passage 25 and the discharge passage 24 communicate with each other, the air inside the pusher accommodating space 21 is discharged to the outside.

When the operation unit 34 is operated in the above state and the valve structure 30 is raised by the elastic bias unit 33, the operation is performed as shown in FIGS. 10 to 12. In other words, when the valve structure 30 is raised, the sealing seal 322a of the sealing portion 322 is in airtight contact with the inner surface of the valve stem 32, and the discharge passage 24 is blocked from communicating with the connecting passage 25. In contrast to this, the inflow passage 23 and the connecting passage 25 are communicated with each other. Thereby, the external air is supplied to the pusher housing space 21 through the inflow passage 23 and the connecting passage 25, and the pressurizing unit 40 is lowered to press the device under inspection 50 toward the inspection device side.

On the other hand, if the valve is operated in reverse, the valve structure 30 is lowered and the hermetic seal 322a of the sealing portion 322 is blocked from the connecting portion 223 in a gastight manner as shown in FIGS. 6 to 8 . The inflow portion 221 is thereby prevented from flowing in from the outside. In contrast to this, the discharge passage 24 and the connecting passage 25 are communicated with each other. That is, the air inside the pusher accommodating space 21 is via the connecting passage 25, the space between the inner wall of the valve accommodating space 22 and the valve stem 32, the lower end of the valve stem 32, and the rod insertion hole 311 of the valve stem 32. The discharge passage 24 is discharged to the outside.

The pusher device of the present invention integrally arranges the valve structure including the pressurizing unit inside the casing, thereby having the advantage of not only reducing the overall size of the pusher device but also reducing the weight.

10‧‧‧ Pusher device
20‧‧‧shell
21‧‧‧ Pusher accommodating space
22‧‧‧Valve containment space
23‧‧‧Inflow path
24, 241‧‧‧Drainage pathway
25‧‧‧ Connection path
30‧‧‧ valve structure
31‧‧‧ valve bushing
32‧‧‧ valve stem
33‧‧‧Flexible biasing unit
34‧‧‧Operating unit
40‧‧‧ Pressurizing unit
41‧‧‧ Pressurized plate
42‧‧‧Piston
43‧‧‧ piston spring
50‧‧‧Inspected device
221‧‧‧Inflow section
222‧‧‧Exporting section
223‧‧‧Connected section
231‧‧ Air Inflow
311‧‧‧ rod insertion hole
312‧‧‧Connected holes
313‧‧‧Blanket seals
321‧‧‧ Column
322‧‧‧Containing Department
322a‧‧‧ Sealed seals

1 is a perspective view of a pusher device according to an embodiment of the present invention. Fig. 2 is an exploded perspective view of Fig. 1; 3 and 4 are side views showing a state before the pusher device pressurizes the semiconductor device. Fig. 5 is a plan view showing a state before the pusher device pressurizes the semiconductor device. Fig. 6 is a sectional view taken along line VI-VI of Fig. 5; Fig. 7 is a sectional view taken along line VII-VII of Fig. 5; Fig. 8 is a sectional view taken along line VIII-VIII of Fig. 5; Fig. 9 is a plan view showing a state in which a pusher device pressurizes a semiconductor device. Fig. 10 is a cross-sectional view taken along line X-X of Fig. 9; Fig. 11 is a sectional view taken along line XI-XI of Fig. 9; Fig. 12 is a sectional view taken along line XII-XII of Fig. 9;

20‧‧‧shell

30‧‧‧ valve structure

31‧‧‧ valve bushing

32‧‧‧ valve stem

33‧‧‧Flexible biasing unit

34‧‧‧Operating unit

40‧‧‧ Pressurizing unit

41‧‧‧ Pressurized plate

42‧‧‧Piston

43‧‧‧ piston spring

50‧‧‧Inspected device

231‧‧ Air Inflow

241‧‧‧Drainage path

311‧‧‧ rod insertion hole

Claims (9)

A pusher device for pressurizing a terminal of an inspected device to an inspection device, the pusher device comprising: a housing including a pusher receiving space disposed to the center and open downward, and the pusher receiving a valve accommodating space which is disposed adjacent to the space and which can accommodate the valve structure, an inflow passage whose one end is connected to the external air inflow portion and whose other end is connected to the valve accommodating space, one end is connected to the outside and the other end is connected to the valve a discharge passage that is connected to the space, and a connection passage that is connected to the valve receiving space at one end and connected to the pusher receiving space at the other end; the valve structure is configured to selectively connect the connecting passage with the inflow passage and One of the discharge passages is in communication; and a pressurizing unit is connected to the connecting passage and the air flows from the air inflow portion into the pusher housing space by air pressure Dropping in contact with the device to be inspected, whereby the device to be inspected can be pressurized toward the side of the inspection device; and the valve structure and the pressurizing unit Disposed in the same housing. The pusher device of claim 1, wherein the valve structure is inserted into the valve receiving space of the housing and movable between an inflow position and a discharge position, the valve structure being The inflow position causes the connection passage and the inflow passage to communicate with each other and block communication between the connection passage and the discharge passage, the valve structure causing the connection passage and the connection at the discharge position The discharge passages communicate with each other and block communication between the connection passage and the inflow passage. The pusher device of claim 2, wherein the pressurizing unit is pressurized by air if the valve structure moves to the inflow position and air flows into the interior of the pusher housing space The device is brought into contact with the device to be inspected, whereby the device to be inspected is pressurized toward the inspection device side. The pusher device according to claim 2, wherein the valve structure comprises: a valve bush having a cylindrical shape inserted into the valve receiving space, and having a rod insertion hole connecting the upper end and the lower end; a rod, at least a portion of which is inserted into the valve bushing to move between the inflow position and the discharge position; and an elastic biasing unit that elastically biases the valve stem from the discharge position to the inflow position side And an operation unit disposed on an upper end side of the valve member in a cylindrical shape, in contact with the valve stem to pressurize the valve stem to move the valve stem toward the discharge position. The pusher device of claim 4, wherein the valve receiving space includes an inflow portion connecting the inflow passage, a discharge portion connecting the discharge passage, and a connecting portion connecting the connecting passage, The connecting portion is disposed between the inflow portion and the discharge portion. The pusher device of claim 5, wherein the valve bushing is provided at a top end with a communication hole that communicates the inflow passage with the inner rod insertion hole, and is disposed at a lower side of the communication hole There is a bushing seal that seals between the outer surface of the valve bushing and the valve receiving space. The pusher device of claim 6, wherein the valve stem comprises: a post portion at least a portion of the rod insertion hole inserted into the valve bushing, having an outer diameter smaller than the rod insertion hole And a sealing portion integrally connected to the column portion and provided with a hermetic seal; the inflow position being the hermetic seal of the sealing portion in a gastight manner with the valve bushing a position at which an inner surface of the rod insertion hole contacts, wherein the discharge position is that the hermetic seal of the sealing portion is airtight and a housing space between the inflow portion and the connecting portion The location of the wall contact. The pusher device of claim 7, wherein the valve stem is spaced apart from the inner wall of the valve receiving space by a specific interval at the connecting portion, and the sealing seal at the sealing portion When the inflow portion is located, the connecting passage of the connecting portion communicates with the discharge passage by a lower end of the valve stem. The pusher device of claim 7, wherein the inflow passage of the connecting portion is by the valve when the sealing seal of the sealing portion is embedded in the inside of the valve stem The space between the outer peripheral surface of the rod and the sealing portion communicates with each other.