TW201724330A - Substrate processing system - Google Patents

Abstract

A substrate processing system that can suppress the contamination of a substrate and that has a high degree of freedom in layout is provided. An FOUP transportation section 300 is configured of length-adjustable rails 32 and a self-movable FOUP support part 30. Because of this, it is possible to perform extension or reduction of a substrate processing system 1 (addition or removal of a substrate processing apparatus 20) through an easy task of attaching or detaching a unit rail 320 and adding or removing the substrate processing apparatus 20. Also, the FOUP transportation section 300 transports an FOUP 80 in which a substrate is stored in each substrate processing apparatus 20. Therefore, the time for which the substrate is exposed to the atmosphere outside the FOUP 80 is short, thus making it possible to effectively suppress contamination of the substrate.

Description

Substrate processing system

The present invention is directed to a substrate processing system.

Since the prior art, a substrate processing system that transports a carrier containing a plurality of substrates and takes out the substrate from the carrier for processing has been known.

For example, Patent Document 1 discloses a technique in which a carrier is accommodated in a loading and unloading portion, and a loading and unloading portion moves a carrier to a position adjacent to a substrate processing system, and a conveying mechanism in the substrate processing system takes out a substrate from the carrier. The substrate taken out from the carrier is transferred to each processing device in the substrate processing system for processing.

Further, in the cited document 2, there is disclosed a technique in which a carrier is transported from a dedicated transport path extending from a shared transport cassette toward a common carry-out port, and the substrate is taken out from the carrier in each processing device during the transfer.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2006-237559

[Patent Document 2] Japanese Patent No. 5392190

However, in the technique of Patent Document 1, there is a problem that In the substrate processing system, since the substrate is transferred to each processing device in a state of being taken out from the carrier, the time during which the substrate is exposed to the ambient gas outside the carrier becomes long, and the substrate is easily contaminated.

In the technique of Citation 2, since the carrier transport system is performed in one direction, for example, it is necessary to arrange each processing device or the like in the order of processing, and the arrangement of each processing device is restricted. Further, in the technique of Citation 2, at the time of adding or removing the processing device, at least one of the total carry-in or the shared carry-out moves. Therefore, in the technique of Citation 2, based on the viewpoint of the transfer of the carrier between the substrate processing system and the external device, it is necessary to perform the drive control of the external device in a manner that counteracts the influence of the above-described movement, accompanied by the expansion of the substrate processing system. The labor and time of shrinking (adding or removing the processing device) is increased. That is, in the technique cited in Document 2, the degree of freedom in the layout in the substrate processing system is low.

Therefore, in the present invention, it is an object of the invention to provide a substrate processing system capable of suppressing contamination of a substrate and having a high degree of freedom in layout.

In the substrate processing system according to the first aspect of the present invention, the substrate is taken out from the carrier in which the substrate is housed, and the substrate is provided with a first transfer portion that transfers the carrier between the substrate processing system and the outside thereof. a substrate processing apparatus group in which a plurality of substrate processing apparatuses are arranged in a row, and the first delivery unit is adjacent to one side of the plurality of substrate processing apparatuses along the arrangement direction; and a carrier transport unit along the first Each of the substrate processing apparatuses that constitute the substrate processing apparatus group has a second delivery unit that is transferred between the substrate processing apparatus and the carrier transport unit. The carrier; a plurality of processing portions that perform processing on the substrate; and at least one substrate The transport unit transports the substrate between the carrier disposed in the second delivery unit and the plurality of processing units.

A substrate processing system according to a second aspect of the present invention is the substrate processing system according to the first aspect of the present invention, wherein the carrier transport unit includes a rail from the first transfer unit to the substrate processing apparatus group. The section of the substrate processing apparatus on the other side extends along the arrangement direction; and the carrier holding portion is capable of self-propelling along the track and holding the carrier.

A substrate processing system according to a second aspect of the present invention is the substrate processing system according to the second aspect, wherein the rail system is configured by connecting a plurality of unit tracks in the arrangement direction, and the unit rail can be attached or detached. The length of the above-mentioned track in the above arrangement direction is adjusted.

A substrate processing system according to a fourth aspect of the present invention is the substrate processing system according to the third aspect of the present invention, wherein the length of the arrangement direction of the unit track is a reference length, and the length of the arrangement direction of each substrate processing apparatus The substrate processing system can perform an additional adjustment to add a new substrate processing apparatus to the substrate processing apparatus group, and add the above-described new substrate processing apparatus to the length corresponding to the integer multiple of the reference length. And increasing the length of the track in the direction of the arrangement corresponding to the number of the unit tracks in the direction of the arrangement; and removing and adjusting, in the case of removing the existing substrate processing device from the substrate processing device group, The number of the unit tracks corresponding to the length in the arrangement direction of the substrate processing apparatus is reduced to shorten the length of the track in the arrangement direction.

A substrate processing system according to a fifth aspect of the present invention is the substrate processing system according to the first aspect of the present invention, wherein at least one of the substrate processing apparatuses includes a plurality of processing units having different processing contents And at least one In each of the substrate processing apparatuses, each of the substrates is sequentially processed differently in the plurality of processing units.

The substrate processing system according to any one of the first aspect to the fifth aspect of the present invention, wherein at least one substrate processing apparatus of the substrate processing apparatus group has a substrate transporting unit disposed at an intermediate position between the carrier and the plurality of processing units in the second transfer unit, wherein the one substrate transport unit is individually driven by a plurality of substrate holding means The intermediate position is moved, and the substrate is transported between the carrier disposed in the second delivery unit and the plurality of processing units.

In the present invention, the first delivery portion is disposed on one side of the substrate processing system. Therefore, the expansion or reduction of the substrate processing system can be performed without moving the position of the first transfer portion. In the case where the position of the first transfer unit is moved, it is necessary to perform drive control of the external device so as to cancel the influence of the above-described movement based on the viewpoint of the transfer of the carrier between the substrate processing system and the external device. Therefore, in the aspect of the present invention, it is preferable that the above-described drive control is not required as compared with the case where the position of the first transfer portion is moved as the substrate processing system is expanded or reduced as in the case of Japanese Patent No. 5392190.

Further, in the present invention, the carrier transport unit can transport the carrier in both directions along the arrangement direction of the first transfer unit and the substrate processing apparatus group. Therefore, in the aspect of the present invention, it is preferable that the degree of freedom in arrangement of the substrate processing apparatuses is higher than that in which the carrier conveying unit can transport the carrier in only one direction along the arrangement direction.

Moreover, in the present invention, the carrier in which the substrate is housed is transported to the second delivery portion of each substrate processing apparatus by the carrier transfer unit. Therefore, the time during which the substrate is exposed to the ambient gas outside the carrier is short, so that contamination of the substrate can be effectively suppressed.

1‧‧‧Substrate processing system

10‧‧‧Loading

10a‧‧‧Loading surface

11‧‧‧Baffle

20‧‧‧Substrate processing unit

21‧‧‧2nd handover

22‧‧‧Opening and closing department

23‧‧‧Processing Department

24‧‧‧Substrate Transfer Department

25‧‧‧ device wall

30, 30A‧‧‧FOUP Maintenance Department

31‧‧‧ gripping department

32‧‧‧ Track

50‧‧‧Control unit

51‧‧‧ memory

52‧‧‧CPU

80‧‧‧FOUP

81‧‧‧ frame

82‧‧‧Flange

83‧‧‧ Cover

85‧‧‧1st recess

87‧‧‧2nd recess

88‧‧‧ bottom

100‧‧‧Loading and Unloading Department

130, 130a, 130b‧‧‧ transport robot

131‧‧‧ pillar

132‧‧‧rails

134a, 134b, 134c‧‧‧ rotating shaft

136‧‧‧ fixed table

138a, 138b‧‧‧ arms

139‧‧‧ front end

139a‧‧‧Protruding

140‧‧‧ bracket arrangement

141‧‧‧ accommodating space

141a, 141b, 141c‧‧‧ bracket members

142‧‧‧Protruding

143‧‧‧ upper surface

145‧‧‧Frame

146‧‧‧ openings

150, 160‧‧‧Loading Department

200‧‧‧Substrate processing unit group

211‧‧‧Loading board

212‧‧‧ Lifting Department

221‧‧‧Latch

222‧‧‧ Drive Department

241‧‧‧Hand

242‧‧‧Hand drive mechanism

300‧‧‧FOUP Transport Department

301‧‧‧ frame

301A‧‧‧ frame

302‧‧‧Actuator (motor)

303‧‧‧ pinion

304, 307‧‧ ‧ motor

305‧‧‧Slit

306‧‧‧ Nuts

308‧‧‧Ball screw

320‧‧‧ unit track

AR1‧‧‧ arrow

Fig. 1 is a perspective view showing the overall configuration of a substrate processing apparatus.

Fig. 2 is a perspective view showing the configuration of the FOUP.

Fig. 3 is a plan view showing the overall configuration of a substrate processing system.

4 is a cross-sectional view of the FOUP holding portion and the rail.

Fig. 5 is a plan view of the loading and unloading portion.

Figure 6 is a front view of the loading and unloading section.

Figure 7 is a cross-sectional view of the bracket member and the FOUP.

Fig. 8 is a side view of the FOUP transport unit and the substrate processing apparatus.

Fig. 9 is a side view of the FOUP transport unit and the substrate processing apparatus.

Fig. 10 is a side view of the FOUP transport unit and the substrate processing apparatus.

Fig. 11 is a plan view showing the configuration of the FOUP holding portion and its peripheral portion.

Figure 12 is a cross-sectional view of the FOUP holding portion and the rail.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, the same reference numerals are given to the parts having the same components and functions, and the repeated description is omitted. Further, the following embodiments are examples of the present invention and are not intended to limit the scope of the technical scope of the present invention. Further, in the drawings, for the sake of easy understanding, there is a case where the size or number of each part is exaggerated or simplified. Further, in the drawings, in order to explain the direction, there is a case where an XYZ orthogonal coordinate axis is added. The +Z direction in the coordinate axis is in the vertical direction, and the XY plane is the horizontal plane.

<1 Embodiment> <1.1 Outline Configuration of Substrate Processing System>

1 is a perspective view showing the overall configuration of a substrate processing system 1. Fig. 2 is a perspective view showing the configuration of the FOUP 80. 3 is a plan view showing the overall configuration of the substrate processing system 1. 4 is a cross-sectional view showing the FOUP holding portion 30 and the rail 32 cut in a ZX plane. FIG. 5 is a plan view of the loading and unloading unit 100. Fig. 6 is a front view of the loading and unloading unit 100. Fig. 7 is a cross-sectional view showing the bracket member 141a and the FOUP 80.

The substrate processing system 1 is a system that takes out a substrate and processes the plurality of substrates by a front opening unified pod (FOUP) before storing a plurality of substrates in a batch. The substrate processing system 1 mainly includes a loading cassette 10, a loading/unloading unit 100, a substrate processing apparatus group 200, and a FOUP conveying unit 300 (carrier conveying unit).

First, the configuration of the FOUP 80 will be described with reference to Fig. 2 . A plurality of grooves (not shown) for holding one substrate are formed in the frame 81 of the FOUP 80, and a plurality of grooves can be held in a state in which the plurality of grooves are spaced apart from each other in the vertical direction. Further, a flange 82 is attached to the upper portion of the casing 81 of the FOUP 80. The FOUP holding portion 30 (carrier holding portion) described below grips the flange 82, whereby the FOUP 80 is held in a suspended state.

Further, a cover 83 is provided on one surface of the casing 81 (the surface viewed from the direction of the arrow AR1 in Fig. 2). The cover 83 is provided with a locking mechanism with respect to the frame 81. When the lock mechanism is activated in a state where the cover 83 is attached to the casing 81, the cover 83 is fixed to the casing 81, and the inside of the casing 81 is a closed space. Thereby, the cover 83 can be attached to the frame 81, and the lock mechanism can function, and the inside of the frame 81 can be made into a sealed space. Therefore, the FOUP 80 maintains a high degree of cleanliness regardless of the cleanliness of the clean room provided with the substrate processing system 1. On the other hand, if you lift the above In the lock mechanism, the lid 83 can be removed from the casing 81, and the substrate can be taken out from the inside of the casing 81 and the substrate can be housed inside the casing 81. Further, for example, the 25 main substrates are housed in the casing 81 so as to be spaced apart from each other in the horizontal direction in the horizontal direction.

Further, a pair of first recesses 85 are formed in the bottom portion 88 of the casing 81 at positions close to both side faces of the casing 81. Further, three second recesses 87 are formed in the vicinity of the center position of the bottom portion 88. In FIG. 2, the formation positions of the first recessed portion 85 and the second recessed portion 87 are shown by imaginary lines. The three second recesses 87 are formed such that one side of the triangle formed by connecting them is parallel to the plane of the cover 83.

The loading cassette 10 is placed on a transfer unit (for example, overhead lifting conveyor (OHT)) that is external to the substrate processing system 1 or a mounting table of the FOUP 80 that is delivered by an operator of the substrate processing system 1. As shown in FIG. 1, two loading cassettes 10 are provided in the loading/unloading unit 100, and one FOUP 80 is placed on each mounting surface 10a of each loading cassette 10.

The loading and unloading unit 100 functions as a FOUP housing unit (buffer) that temporarily stores the FOUP 80 therein. As shown in FIGS. 1 and 5, two baffles 11 are provided on the side surface of the loading/unloading unit 100 on the side of the loading cassette 10. When the shutter 11 is opened, an opening that communicates with the external space of the substrate processing system 1 and the internal space of the loading and unloading unit 100 is formed.

Therefore, the transport robot 130a of the loading and unloading unit 100 can transfer the FOUP 80 between the loading cassette 10 and the inner space of the loading and unloading unit 100 via the opening. In the present embodiment, as shown in FIG. 1, the loading/unloading unit 100 is disposed at a portion sandwiched between the loading cassette 10 and the substrate processing apparatus group 200. The structure including the loading cassette 10 and the loading and unloading unit 100 is used as the substrate processing system 1 and the outside thereof. The first transfer unit that transfers the FOUP 80 between the functions functions.

As shown in FIG. 1, the substrate processing apparatus group 200 is configured by arranging six substrate processing apparatuses 20 in a row. The loading and unloading unit 100 is adjacent to one side (the −Y direction side) of the plurality of substrate processing apparatuses 20 along the arrangement direction (Y direction) of the plurality of substrate processing apparatuses 20.

In the substrate processing apparatus group 200, different substrate processing may be performed in each substrate processing apparatus 20, or the same substrate processing may be performed in each substrate processing apparatus 20. Hereinafter, an aspect in which the same substrate processing (for example, substrate cleaning processing) is performed in each substrate processing apparatus 20 will be described.

As shown in FIG. 3 and FIG. 5, the FOUP transport unit 300 includes a rail 32 extending in the Y direction from the loading/unloading unit 100 to the substrate processing apparatus 20 on the +Y direction side of the substrate processing apparatus group 200. And the FOUP holding portion 30, which is capable of self-propelling along the track 32 and holding the FOUP 80. Therefore, the FOUP transport unit 300 can transport the FOUP 80 in both directions (±Y direction) of the Y-axis.

The FOUP 80 that houses the unprocessed substrate is first carried into the substrate processing system 1 from the outside of the substrate processing system 1 via the loading cassette 10 . The FOUP 80 is moved from the loading cassette 10 to the loading/unloading unit 100 and temporarily held by any of the plurality of housing spaces 141 (see FIGS. 5 and 6) provided in the loading/unloading unit 100, and then the FOUP conveying unit. 300 is transported to any of the substrate processing apparatuses 200 in the substrate processing apparatus group 200. The substrate processing apparatus 20 performs a cleaning process on each of the substrates taken out from the FOUP 80, and stores the processed substrates in the FOUP 80 again. The FOUP 80 that houses the processed substrate is transported from the substrate processing apparatus 20 to the loading and unloading unit 100 by the FOUP transport unit 300. The FOUP 80 is temporarily held in the loading and unloading unit 100, and then moved to the loading cassette 10. Then, the FOUP80 The FOUP of the processed substrate is carried out from the outside of the substrate processing system 1 from the loading cassette 10.

The control unit 50 shown in FIG. 1 is provided with a memory 51 for storing programs or variables, and the like, and a CPU 52 for executing control according to a program stored in the memory 51. Further, each unit in the substrate processing system 1 is electrically connected to the control unit 50 by a signal line (not shown). Therefore, the CPU 52 operates the respective units (control objects) at a predetermined timing in accordance with the program stored in the memory 51. The program stored in the memory 51 is, for example, a program for transferring the FOUP. By executing the program, the transport robot 130 transports the FOUP 80 or the FOUP holding unit 30 to the inside of the FOUP transport unit 300 in the loading/unloading unit 100 to transport the FOUP 80. Alternatively, the program stored in the memory 51 is a program for transferring the substrate, and by executing the program, the substrate transfer unit 24 (described later) transfers the substrate between the FOUP 80 and the processing unit 24.

<1.2 Detailed composition of each department>

As shown in FIGS. 5 and 6, the loading/unloading unit 100 mainly includes two transport robots 130 (130a and 130b), a rack array unit 140, and mounting units 150 and 160.

As shown in FIG. 5, a rack arranging portion 140 in which a plurality of bracket members 141 are arranged in the XZ plane is disposed in the loading and unloading portion 100. Further, in the loading and unloading unit 100, the transport robot 130a and the placing unit 150 are disposed between the rack arranging unit 140 and the loading cassette 10, and the transport robot 130b and the placing unit 160 are disposed in the rack arranging unit 140 and the substrate processing apparatus group. Between 200.

The rack arranging unit 140 accommodates a plurality of (16 in the present embodiment) accommodating portions of the FOUP 80. In other words, not only the FOUP 80 that accommodates the unprocessed substrate but also the empty FOUP 80 after the substrate is taken out is accommodated in the holder array portion 140. As shown in FIGS. 5 and 6, the bracket arranging portion 140 is such that a plurality of brackets are along the vertical direction (Z The axis direction) and the horizontal direction (X-axis direction) are two-dimensionally arranged.

Each of the plurality of brackets includes a pair of bracket members 141a. As shown in FIG. 7, each of the bracket members 141a has a substantially L-shape and is attached to the corresponding frame 145 such that the longitudinal direction of each of the bracket members 141a is substantially parallel to the Y-axis direction. Further, the holder member 141a is provided with a projection 142 corresponding to the first recess 85 provided in the bottom portion 88 of the FOUP 80 on the side on which the FOUP 80 is placed. Therefore, the FOUP 80 can be stably held by the pair of bracket members 141a by fitting the protrusions 142 of the pair of bracket members 141a to the first recesses 85 of the FOUP 80.

As described above, in the present embodiment, the pair of bracket members 141a are used as the storage brackets for housing the FOUP 80, and the region sandwiched by the pair of bracket members 141a is used as the housing space 141 for housing the FOUP 80.

Further, an opening portion 146 having a larger size than the front end portion 139 of the transport robot 130 (130a, 130b) is formed between the two bracket members 141a constituting the storage bracket. Further, as shown in FIG. 6, each of the openings 146 is arranged along the vertical direction (Z-axis direction).

Therefore, the front end portion 139 of the transfer robot 130 passes through the openings 146 and rises and falls inside the holder arranging portion 140. In other words, the respective opening portions 146 of the plurality of storage holders included in the holder array portion 140 are passage portions through which the distal end portion 139 can pass in the vertical direction.

As shown in FIG. 5, the transport robots 130a and 130b are partially disposed on the side of the loading cassette 10 and the side of the substrate processing apparatus group 200, and are transported from the rack array unit 140. In other words, the transport robot 130a is disposed on the opposite side of the transport robot 130b via the rack array unit 140.

Furthermore, in the present embodiment, the two robots 130a, 130b have Approximately the same hardware composition. Therefore, in the following description, when the transfer robot 130a and the transfer robot 130b are not distinguished, it is simply referred to as "transport robot 130".

The front end portion 139 of the transport robot 130 holds the holding elements of the FOUP 80 from the lower side and has a substantially triangular shape. A protrusion 139a is provided in the vicinity of each vertex on the upper surface side of the distal end portion 139. Further, as described above, three second recesses 87 corresponding to the protrusions 139a are provided on the bottom portion 88 of the FOUP 80 (see FIG. 7: two of the three are described for convenience of illustration). Further, the distal end portion 139 is attached to the arm 138a via a rotating shaft 134b provided substantially parallel to the Z-axis, and is rotatable about the rotating shaft 134b. Therefore, the transport robot 130 stably holds the FOUP 80 by fitting the three protrusions 139a to the corresponding second recesses 87 of the FOUP 80 while rotating the distal end portion 139.

Further, the arm 138a is attached to the arm 138b via a rotating shaft 134c that is provided substantially parallel to the Z-axis, and the arm 138b is attached to the fixing table 136 via the rotating shaft 134a. Further, the fixing table 136 is provided to be lifted and lowered on the pillar 131 extending in the vertical direction (Z-axis direction). Further, the pillar 131 can slide along the guide rail 132 that extends in the horizontal direction (X-axis direction).

Thereby, the transport robot 130 (130a, 130b) moves the FOUP 80 held by the front end portion 139 in the horizontal direction along the rack alignment portion 140 and ascends and descends in the vertical direction. Therefore, the transport robot 130a transports the FOUP 80 between the storage bracket of the rack alignment unit 140, the loading cassette 10, and the placing unit 150. Further, the transport robot 130b transports the FOUP 80 between the storage bracket of the rack alignment unit 140 and the placing unit 160.

The transport robot 130a performs a process of transporting the FOUP 80 placed on the loading cassette 10 to the rack arranging unit 140, and a process of transporting the FOUP 80 placed on the loading cassette 10 to the placing unit 150, and placing it on the mounting unit. 150 FOUP80 The process of transporting to the rack arranging unit 140; the process of transporting the FOUP 80 stored in the rack arranging unit 140 to the loading cassette 10; and the process of transporting the FOUP 80 placed on the mounting unit 150 to the loading cassette 10. In the case where the FOUP 80 is placed on the placing unit 150, the transport robot 130a mounts the FOUP 80 so that the orientation of the lid 83 is in the +X orientation. Further, when the FOUP 80 is placed on the loading cassette 10 and the holder array portion 140, the transfer robot 130a mounts the FOUP 80 so that the orientation of the lid 83 becomes the +Y orientation.

Further, the transport robot 130b performs a process of transporting the FOUP 80 stored in the rack arranging unit 140 to the placing unit 160, and a process of transporting the FOUP 80 placed on the placing unit 160 to the rack arranging unit 140. In the case where the FOUP 80 is placed on the placing unit 160, the transfer robot 130b mounts the FOUP 80 so that the orientation of the lid 83 is in the +X orientation. Further, when the transport robot 130b is placed on the rack arranging unit 140, the FOUP 80 is placed such that the orientation of the lid 83 is in the +Y orientation.

In the present embodiment, the transport robots 130a and 130b are disposed to face each other across the rack alignment unit 140. Therefore, the transfer of the plurality of FOUPs 80 can be performed substantially simultaneously by the transfer robots 130a and 130b, whereby the amount of processing as the entire loading/unloading unit 100 can be improved. Further, when the access to the same storage holder is removed, the transfer robots 130a and 130b can perform the transfer of the FOUP 80 without interfering with each other spatially. Therefore, the operation of each robot can be set regardless of the interference of the transfer robots 130a and 130b.

Further, the transfer of the FOUP 80 between the transfer robot 130 (130a, 130b) and each of the holders of the holder array portion 140 is performed as follows. That is, in the case where the FOUP 80 is transferred from the transfer robot 130 to the storage stand, the first First, the transport robot 130 is placed such that the height position (Z-axis direction position) of the bottom portion 88 of the FOUP 80 housed in the storage bracket is higher than the height position of the upper surface 143 (see FIG. 7) of the bracket members 141a (141b, 141c). The front end 139 moves. Next, the front end portion 139 is lowered, and the protruding portions 142 of the pair of bracket members 141a (141b, 141c) are fitted into the first recessed portion 85 of the FOUP 80.

Then, by lowering the front end portion 139, the FOUP 80 is placed on the upper surface 143 of the pair of bracket members 141a (141b, 141c), and the projection portion 139a of the front end portion 139 is separated from the second recess portion 87 by the projection portion 139a. The process of transferring the FOUP 80 self-transporting robot 130 to the storage rack is completed.

On the other hand, when the FOUP 80 is delivered from the storage stand to the transfer robot 130, first, the front end portion 139 of the transfer robot 130 is moved to the lower side of the FOUP 80 placed on the storage holder. Next, the distal end portion 139 is raised, and the protruding portion 139a of the distal end portion 139 is fitted to the second concave portion 87 of the FOUP 80.

Then, the front end portion 139 is further raised to hold the FOUP 80 at the distal end portion 139, and the projection portion 142 is separated from the first concave portion 85, thereby completing the process of transferring the FOUP 80 from the storage holder to the transfer robot 130.

As described above, during the transfer of the FOUP 80 between the transfer robot 130 and the storage holder, the FOUP 80 moves above the holder members 141a (141b, 141c). Therefore, the height of the accommodating space 141 is set to be larger than the height of the FOUP 80.

The placing unit 160 functions as a placing unit that temporarily holds the FOUP 80 that is transported from the rack arranging unit 140 to the substrate processing apparatus 20 . Further, the placing unit 160 also functions as a placing portion that temporarily holds the FOUP 80 that is transported from the substrate processing apparatus 20 to the rack arranging unit 140.

The mounting portion 160 has a holder member 141b on which the FOUP 80 is placed. The holder member 141b has a pair of substantially L-shaped side members having a side shape as viewed in the -X direction, and has a plurality of (three in the present embodiment) projections on the surface on which the FOUP 80 is placed. As shown in FIGS. 5 and 6, the strip direction of the holder member 141b is disposed substantially parallel to the X-axis direction.

The placing unit 150 functions as a placing unit that temporarily holds the FOUP 80 that is transported from the loading cassette 10 and the holder array unit 140 to the substrate processing apparatus 20 . Moreover, the mounting unit 150 also functions as a mounting portion that temporarily holds the FOUP 80 when the FOUP 80 transported from the substrate processing apparatus 20 is transported to the loading cassette 10 and the holder array unit 140.

The mounting portion 150 has a holder member 141c on which the FOUP 80 is placed. The holder member 141c is a member having a side shape viewed in the -X direction and having a substantially L-shaped one-to-length member, and has a plurality of (three in the present embodiment) projections on the surface on which the FOUP 80 is placed. As shown in FIGS. 5 and 6, the bracket member 141c is disposed such that its longitudinal direction is substantially parallel to the X-axis direction.

As shown in FIG. 3, the FOUP transport unit 300 includes a rail 32 extending in the Y direction from the loading/unloading unit 100 to the section of the substrate processing apparatus 20 on the +Y direction side of the substrate processing apparatus group 200; and FOUP The retaining portion 30, which is capable of self-propelling along the track 32, holds the FOUP 80.

The FOUP holding unit 30 will be described in detail using FIG. The FOUP holding unit 30 includes a frame 301 having a hollow rectangular cross section, an actuator 302 attached to the inner wall of the frame 301, a motor 304 attached to the inner wall of the frame 301 and rotatable in the forward and reverse directions, and mounting. A pinion 303 of the rotating shaft of the motor 304. The rail 32 penetrates in the Y-axis direction in the casing 301. A rack (not shown) that meshes with the pinion 303 is cut into the upper surface of the rail 32. Thereby, if the motor 302 causes the pinion gear 303 to be in the forward and reverse directions When rotated, the FOUP holding portion 30 advances itself in the ±Y direction along the rail 32.

A slit 305 having a slit is cut in the vertical direction on the side of the frame 301 opposite to the side opposite to the FOUP 80. The two grip portions 31 that hold the FOUP 80 are coupled to the actuator 302 via the slit 305. The actuator 302 moves the two grip portions 31 close to each other and moves in the up and down direction.

The rail 32 is configured by connecting a plurality of unit rails 320 in the Y direction. More specifically, the track 32 is a unit track 320 which is disposed on the most -Y direction side and relatively short, and a unit track 320 which is relatively long and has the same Y direction length as each substrate processing apparatus 20. Connected to form. The track 32 can be adjusted in length in the Y direction by the loading and unloading of the unit rail 320.

In the substrate processing system 1, when a new substrate processing apparatus 20 is added to the substrate processing apparatus group 200, the addition of the unit track 320 in accordance with the length of the new substrate processing apparatus 20 in the Y direction is performed to increase the Y of the track 32. Additional adjustments in the length of the direction. When the substrate processing apparatus 1 removes the existing substrate processing apparatus 20 from the substrate processing apparatus group 200, the unit track 320 is removed in accordance with the length in the Y direction of the conventional substrate processing apparatus 20, and the track is shortened. The removal of the length in the Y direction of 32 is adjusted.

In the case where the FOUP transport unit 300 is constituted by the rail 32 capable of adjusting the length and the FOUP holding unit 30 capable of self-propelling as in the present embodiment, as described above, the unit rail 320 can be attached and detached and the substrate processing apparatus 20 can be used. The substrate processing system 1 is expanded or reduced (addition or removal of the substrate processing apparatus 20) by an easy addition or removal operation.

In the present embodiment, the substrate processing system 1 is disposed on one side of the substrate processing system 1 between the external FOUP transfer means such as OHT (-Y direction). The first transfer unit (the load cassette 10 and the loading/unloading unit 100) of the side) performs the transfer of the FOUP 80. That is, it is easy to add or remove the substrate processing apparatus 20 in the substrate processing system 1, and the length of the substrate processing system 1 changes only on the other side (+Y direction side), and the position of the first delivery portion does not change. If the transfer position of the FOUP 80 is changed between the external FOUP transport means and the FOUP transfer means by the addition or removal of the substrate processing apparatus 20, it is necessary to drive the FOUP transport means to compensate for the change. In this case, the control of the FOUP transport means becomes complicated. In the present embodiment, the transfer position of the FOUP 80 does not change regardless of the addition or removal of the substrate processing apparatus 20, and therefore the FOUP transfer means does not become complicated. Such an aspect is preferable, for example, as in the case of the expansion or reduction of the substrate processing system and the movement of the position of the first interface portion as in Patent No. 5392190.

The FOUP holding portion 30 holds two rod-shaped grip portions 31 that extend in the X direction and are spaced apart in the Y direction. The FOUP holding portion 30 can hold the two grip portions 31 and make them equal to the displacement in the near-far direction (Y direction). Therefore, the FOUP holding unit 30 can switch the state in which the flange 82 is gripped by bringing the two grip portions 31 closer together and the state in which the flanges 82 are not gripped by moving the two grip portions 31 away.

Further, as shown in FIG. 6, the FOUP holding unit 30 includes an elevating mechanism (the aforementioned actuator 302) that elevates and lowers the grip portion 31 in the Z direction. Further, the FOUP holding unit 30 is slidable in the Y direction along the rail 32 by the motor 304 (see FIG. 4). Therefore, the FOUP holding unit 30 can move in the Y direction and the Z direction.

Fig. 8 is a side view of the substrate processing apparatus 20 and the FOUP transport unit 300 viewed from the A-A cross section of Fig. 3 . 8 to 10 are side views showing a flow until the FOUP 80 transported by the FOUP transport unit 300 is transferred to the substrate processing apparatus 20 and the processing is performed on each of the substrates in the FOUP 80.

Each of the substrate processing apparatuses 20 constituting the substrate processing apparatus group 200 includes a second delivery unit 21 that transfers the FOUP 80 between the substrate processing apparatus 20 and the FOUP transport unit 300, and an opening and closing unit 22 that is disposed on the second interface 21 The FOUP 80 opens and closes the lid 83. The plurality of processing units 23 perform processing on the substrate, and the substrate transport unit 24 transports the substrate between the FOUP 80 disposed between the second delivery unit 21 and the plurality of processing units 23.

The second delivery unit 21 includes a mounting plate 211 on which the FOUP 80 is placed, and a lifting portion 212 that moves the mounting plate 211 up and down.

The height position (delivery position) of the placing plate 211 when moving to the uppermost position by the lifting portion 212 is the height of the lower surface of the FOUP 80 and the upper surface of the placing plate 211 which are conveyed by the FOUP conveying unit 300. Consistent location. 8 is a view showing that the FOUP 80 placed on the mounting unit 150 or the mounting unit 160 (see FIG. 4) placed in the loading/unloading unit 100 is transported in the Y direction to the substrate processing apparatus group 200 by the FOUP transport mechanism 300. The substrate processing apparatus 20 is a side view of the substrate processing apparatus 20 and the FOUP transport unit 300 in a state in which the FOUP 80 is placed on the mounting unit 211 after the mounting unit 211 of the second delivery unit 21 is placed.

When the FOUP 80 is transferred from the FOUP holding unit 30 to the second delivery unit 21, the two grip portions 31 are separated from each other in the state in which the FOUP 80 is held by the FOUP holding unit 30 directly above the placing plate 211 at the delivery position. Thereby, the state in which the FOUP 80 is gripped by the FOUP holding unit 30 is switched to the state in which the FOUP 80 is placed on the placing board 211. On the other hand, when the FOUP 80 is delivered from the second delivery unit 21 to the FOUP holding unit 30, the FOUP holding unit 30 brings the two gripping portions 31 closer to the front side of the mounting plate 211 on which the FOUP 80 is placed at the delivery position. . Thereby, the state in which the FOUP 80 is placed on the placing plate 211 and the FOUP 80 is gripped by the FOUP holding portion 30 Switch.

In the present embodiment, as shown in FIG. 3, in each of the substrate processing apparatuses 20, the two mounting plates 211 are adjacently disposed in the Y direction, and the elevating portion 212 individually raises and lowers the two mounting plates 211. Thereby, in each of the substrate processing apparatuses 20, the FOUP 80 can be transferred between the FOUP holding unit 30 and the second transfer unit 21 at two adjacent positions in the Y direction.

When the FOUP 80 is transferred to the placing plate 211, as shown in FIG. 8, the placing plate 211 is lowered to the lowest height position (standby position) by the lifting portion 212. The standby position is a position at which the substrate transfer unit 24 can transfer the substrate to the FOUP 80 placed on the mounting plate 211. FIG. 9 is a side view of the substrate processing apparatus 20 and the FOUP transport unit 300 when the placing board 211 is in the standby position.

The substrate transfer unit 24 sequentially transports the substrates placed in the FOUP 80 at the standby position to the respective processing units 23, and sequentially transports the substrates processed by the respective processing units 23 to the FOUPs 80 placed in the standby position. The FOUP 80 waits in the standby position before processing all the substrates (one batch of substrates) originally stored therein and returning the processed substrates to the inside of the FOUP 80. When all of the processed substrates are returned to the FOUP 80, the lifting portion 212 raises the placing plate 211 and the FOUP 80 moves to the delivery position. Then, the FOUP 80 that has stored the processed substrate is transported to the loading/unloading unit 100 by the FOUP transport unit 300, and is transported to the outside of the substrate processing system 1 by the loading cassette 10.

Further, the placing plate 211 is basically maintained at the standby position, and is raised to the delivery position only when the FOUP 80 is transferred to and from the FOUP holding unit 30. Thereby, it is possible to effectively suppress the situation in which the transfer of the FOUP 80 by the FOUP holding unit 30 is hindered by the presence of the other FOUPs 80 located at the delivery position.

The substrate processing apparatus 20 is provided with a device wall 25 that houses the opening and closing unit 22, the processing unit 23, and the substrate conveying unit 24, and the second delivery unit 21 is disposed adjacent to the -X side of the device wall 25. In the side wall on the -X side of the apparatus wall 25, two baffles (not shown) are provided at positions corresponding to the two covers 83 of the two FOUPs 80 disposed on the two mounting plates 211 located at the standby position. When the shutter is opened, an opening portion communicating with the outer space of the device wall 25 and the inner space of the device wall 25 is formed.

The opening and closing portion 22 mainly has a latch portion 221 and a driving portion 222 that moves the latch portion 221 in the Z direction and the X direction. The latch portion 221 is configured to be engageable with the cover 83 of the FOUP 80. Therefore, the latch portion 221 is moved by the driving portion 222, and the latch portion 221 reaches the lid 83 through the opening portion. After the latch portion 221 is moved to reach the cover 83 and fitted, the latch portion 221 holding the cover 83 is returned to a predetermined position in the device wall 25, whereby the cover 83 of the FOUP 80 is opened. FIG. 10 is a side view of the substrate processing apparatus 20 and the FOUP transport unit 300 at this time.

The plurality of substrates in the FOUP 80 are transferred from the substrate transfer unit 24 to the respective processing units 23 to the substrate transfer unit 24, and the cover 83 is maintained while the plurality of substrates processed by the respective processing units 23 are carried back into the FOUP 80. Open state. Then, when all the processed substrates are returned to the FOUP 80, the opening and closing portion 22 is attached to the cover 83 with respect to the FOUP 80, thereby sealing the FOUP 80.

The substrate transfer unit 24 includes two hands 241 (substrate holding means) for supporting the substrate, and a hand drive mechanism 242 that moves the two hands 241 independently. Each of the hands 241 is moved by the hand drive mechanism 242 to move forward and backward and move up and down, and the substrate is transferred to the FOUP 80 on the mounting plate 211 at the standby position via the opening. Further, each hand 241 is moved by the hand drive mechanism 242 to move forward and backward and move up and down, and the substrate is transferred to and from the respective processing units 23.

The processing unit 23 is a part that performs a predetermined process such as a cleaning process on the substrate in the chamber. In the present embodiment, in the substrate processing apparatus 20, a plurality of stages in which four processing units 23 are stacked in the vertical direction are provided adjacent to each other in the Y direction, and a total of eight processing units 23 are provided (FIG. 3 and FIG. 8). Figure 10). Furthermore, the number or arrangement of the processing units 23 can be appropriately set. In the present embodiment, the same processing (substrate cleaning processing) is performed for each processing unit 23, but the processing unit 23 may perform processing different from each other.

In the present embodiment, the unprocessed substrate is transported to the second delivery portion 21 in a state where the unprocessed substrate is stored in the FOUP 80. Since the second delivery unit 21 is in the vicinity of the processing unit 23, the unprocessed substrate can be transported to the vicinity of the processing unit 23 in a state of being separated from the external ambient gas. Therefore, during the period in which the substrate is exposed to the external ambient gas of the FOUP 80, the plurality of substrates in the FOUP 80 are transferred from the substrate transfer unit 24 to the processing units 23 to the substrate transfer unit 24, and the plurality of substrates processed by the respective processing units 23 are processed. Move back to the period of FOUP80. Therefore, in the present embodiment, the substrate is exposed to the environment outside the FOUP 80 as compared with the other aspect in which the FOUP 80 is opened in the loading/unloading unit 100 (for example, in the aspect described in Japanese Laid-Open Patent Publication No. 2006-237559). The short time of the gas can effectively suppress the contamination of the substrate.

In the present embodiment, each of the substrate processing apparatuses 20 of the substrate processing apparatus group 200 has one substrate transport unit 24 disposed at an intermediate position between the FOUP 80 and the plurality of processing units 23 disposed in the second delivery unit 21. In addition, the two substrate transport units 24 are individually driven in the horizontal direction, and the substrate is transported between the FOUP 80 and the plurality of processing units 23 disposed in the second transfer unit 21 without moving from the intermediate position. . In the embodiment of the present embodiment in which the substrate transfer unit 24 does not move from the center position, the substrate is transported through a plurality of substrates. The substrate transporting unit transports the substrate or the substrate transport unit moves in a state in which the substrate is held, and the substrate is exposed to the ambient gas outside the FOUP 80 for a shorter period of time, thereby more effectively suppressing contamination of the substrate. .

<2 Modifications>

The embodiments of the present invention have been described above, but the present invention can be variously modified without departing from the spirit and scope of the invention.

In the above embodiment, the aspect in which the FOUP is used as the carrier for storing the substrate in batches has been described. However, other substrate storage containers may be used as the carrier.

In the above embodiment, the same substrate processing (substrate cleaning processing) is performed in each substrate processing apparatus 20. However, different substrate processing may be performed in each substrate processing apparatus 20. In the case where the same substrate processing is performed in each of the substrate processing apparatuses 20, the FOUP 80 of one of the substrates stored in the substrate processing apparatus 20 to be subjected to the substrate processing is transferred to the loading via the loading/unloading unit 100.埠10 and carried out to the outside of the substrate processing system 1. On the other hand, in the case where different substrate processing is performed in each of the substrate processing apparatuses 20, the FOUP 80 of one of the substrates stored in the substrate processing apparatus 20 to be subjected to the substrate processing can be transferred to another one. The substrate processing apparatus 20 further performs other substrate processing. In this case, in the above-described embodiment, the FOUP transport unit 300 can transport the FOUP 80 in the two directions (±Y direction) along the arrangement direction of the substrate processing apparatus group 200, and can only transport the FOUP 80 in one direction. The aspect is different, and the arrangement of each substrate processing apparatus 20 can be freely performed without being limited to the substrate processing order.

Moreover, in the above embodiment, in each of the substrate processing apparatuses 20 Although the aspect in which a plurality of processing units 23 having the same processing contents are arranged has been described, it is also possible to arrange a plurality of processing units 23 having different processing contents in each substrate processing apparatus 20. In the case where the processing contents are the same in each processing unit 23, the substrate on which the substrate processing is performed by the certain processing unit 23 is returned to the FOUP 80 without passing through the other processing unit 23. On the other hand, in the case where the processing contents of the processing units 23 are different, the substrate on which the first substrate processing is performed by the one processing unit 23 can be transported to the other processing unit 23 to perform the processing different from the first substrate processing. The second substrate is processed. In this manner, in the case where the different processing is sequentially performed in the plurality of processing units, the time interval from the certain processing to the next processing is compared with the manner in which the different processing is sequentially performed in the plurality of processing devices. short. Therefore, the substrate processing apparatus has a plurality of processing sections having different processing contents, for example, a case where the substrate is subjected to a cleaning process after heating the substrate to a predetermined temperature, and the like, in order to shorten the time interval between the processes. Especially effective.

In the above-described embodiment, the configuration in which one substrate transport unit 24 is disposed in each of the substrate processing apparatuses 20 has been described. However, a plurality of substrate transport units 24 may be disposed in each of the substrate processing apparatuses 20.

In the above embodiment, the second delivery portion 21 includes the mounting plate 211 and the elevation portion 212, but the invention is not limited thereto. Alternatively, the second delivery unit 21 may have a buffer portion that temporarily holds the FOUP 80 in addition to the mounting plate 211 and the elevation portion 212.

In the above-described embodiment, the track 32 is a unit track which is disposed on the most -Y side and relatively short, and which is relatively long and has the same Y-direction length as the substrate processing apparatus 20 The configuration in which the 320 is connected is described, but it is not limited thereto. For example, the length of each unit track 320 may also be The same length (reference length), the length of each substrate processing apparatus 20 in the Y direction is a length corresponding to an integral multiple of the reference length. Further, when a new substrate processing apparatus 20 is added to the substrate processing apparatus group 200, the number of unit tracks 320 corresponding to the length of the new substrate processing apparatus 20 in the Y direction is added to increase the Y direction of the track 32. Additional adjustment of the length. Further, when the existing substrate processing apparatus 20 is removed from the substrate processing apparatus group 200, the unit track 320 is removed by the number corresponding to the length of the existing substrate processing apparatus 20 in the Y direction, and the track 32 is shortened. Removal adjustment of the length in the Y direction. In this aspect, since the lengths of the unit tracks 320 are the same, the management of each unit track 320 is relatively easy. Further, since the length of the substrate processing apparatus 20 in the Y direction is a length corresponding to an integral multiple of the reference length, the substrate processing apparatus group can be mounted by loading or unloading a plurality of unit tracks 320 in accordance with the addition or removal of the substrate processing apparatus 20. The length in the Y direction of 200 corresponds to the length in the Y direction of the track 32.

In the above embodiment, the FOUP holding unit 30 that is self-propelled along the rail 32 by the motor 304 disposed inside is described. However, the moving means of the FOUP holding unit 30 is not limited thereto. For example, a pulley may be disposed at both ends of the rail 32 in the ±Y direction, and a driving belt may be placed between the pair of pulleys to connect the driving belt to the FOUP holding portion 30, thereby constituting a moving means of the FOUP holding portion 30.

Further, instead of the FOUP holding unit 30 of the above-described embodiment, the FOUP holding unit 30A shown in FIGS. 11 and 12 may be used. In the present modification, the ball screw 308 is disposed along the rail 32. The ball screw 308 penetrates the frame body 301A of the FOUP holding portion 30A in the Y direction, and is screwed to the nut 306 disposed inside the FOUP holding portion 30A. The end portion of the ball screw 308 on the (-Y direction) side is coupled to the motor 307 disposed in the loading and unloading unit 100. Therefore, by making the rotation axis of the motor 307 positive Rotating in the opposite direction, the ball screw 308 is rotated, so that the FOUP holding portion 30 can be moved in the ±Y direction along the rail 32.

Although the substrate processing system of the embodiment and its modifications has been described above, the examples of the preferred embodiments of the present invention are not limited to the scope of the present invention. The present invention can be combined with any of the free combinations of the embodiments, or any of the constituent elements of the respective embodiments, or any constituent elements omitted in the respective embodiments.

1‧‧‧Substrate processing system

10‧‧‧Loading

20‧‧‧Substrate processing unit

21‧‧‧2nd handover

22‧‧‧Opening and closing department

23‧‧‧Processing Department

24‧‧‧Substrate Transfer Department

30‧‧‧FOUP Maintenance Department

31‧‧‧ gripping department

32‧‧‧ Track

80‧‧‧FOUP

82‧‧‧Flange

100‧‧‧Loading and Unloading Department

200‧‧‧Substrate processing unit group

300‧‧‧FOUP Transport Department

320‧‧‧ unit track

Claims (6)

A substrate processing system for taking out and processing a substrate from a carrier in which a substrate is housed, comprising: a first transfer portion that transfers the carrier between the substrate processing system and an outside thereof; and a substrate processing device a plurality of substrate processing apparatuses arranged in a row, wherein the first delivery unit is adjacent to one side of the plurality of substrate processing apparatuses along the alignment direction, and a carrier transport unit along the first delivery unit and The substrate processing apparatus group is arranged to transport the carrier in both directions; and each of the substrate processing apparatuses constituting the substrate processing apparatus group has a second delivery unit that transfers the carrier between the substrate processing apparatus and the carrier transport unit; The processing unit performs processing on the substrate, and at least one substrate transport unit that transports the substrate between the carrier disposed in the second delivery unit and the plurality of processing units. The substrate processing system according to claim 1, wherein the carrier transport unit includes a track along a section of the substrate processing apparatus from the first transfer unit to the other of the substrate processing apparatus groups, along the arrangement direction And extending; and a carrier holding portion capable of self-propelling along the track and holding the carrier. The substrate processing system according to claim 2, wherein the track system is configured by connecting a plurality of unit tracks in the arrangement direction, and the length of the track in the arrangement direction can be adjusted by attaching and detaching the unit track. The substrate processing system of claim 3, wherein the length of the arrangement direction of the unit track is a reference length, and the length of the arrangement direction of each substrate processing device is a length corresponding to an integral multiple of the reference length, the substrate processing system In addition, when a new substrate processing apparatus is added to the substrate processing apparatus group, the number of the unit tracks corresponding to the length of the new substrate processing apparatus in the array direction is added, and the above-mentioned unit track is added. The length of the track in the direction of the arrangement; and the removal adjustment, in the case of removing the existing substrate processing device from the substrate processing device group, removing the length corresponding to the length of the arrangement direction of the existing substrate processing device The number of the above unit tracks shortens the length of the above-mentioned track in the above-mentioned arrangement direction. The substrate processing system of claim 1, wherein at least one of the substrate processing device groups has a plurality of processing units having different processing contents, and in the at least one substrate processing device, each of the substrates is in the plurality of substrates Different processing is executed sequentially in the processing unit. The substrate processing system according to any one of claims 1 to 5, wherein at least one of the substrate processing apparatus groups has a middle position between the carrier disposed in the second delivery unit and the plurality of processing units In the one substrate transport unit, the one substrate transport unit is driven by the plurality of substrate holding means individually, and is moved from the intermediate position to the carrier and the plurality of the second transfer unit. The substrate is transferred between the processing units.