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TW201701299A - Cu paste composition for forming thick film conductor, and thick film conductor - Google Patents

Cu paste composition for forming thick film conductor, and thick film conductor Download PDF

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Publication number
TW201701299A
TW201701299A TW105115645A TW105115645A TW201701299A TW 201701299 A TW201701299 A TW 201701299A TW 105115645 A TW105115645 A TW 105115645A TW 105115645 A TW105115645 A TW 105115645A TW 201701299 A TW201701299 A TW 201701299A
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Taiwan
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powder
thick film
film conductor
mass
paste composition
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TW105115645A
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Chinese (zh)
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Katsuhiro Kawakubo
Masaaki Hasemi
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Sumitomo Metal Mining Co
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Publication of TW201701299A publication Critical patent/TW201701299A/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20Conductive material dispersed in non-conductive organic material
    • H01B1/22Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • H05K1/092Dispersed materials, e.g. conductive pastes or inks

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  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Conductive Materials (AREA)
  • Powder Metallurgy (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

Provided is a Cu paste composition capable of improving the sulfidation resistance of a thick film conductor such as a thick film electrode or a thick film wire that is formed by being applied on a substrate of a substrate and fired, and capable of improving the reliability of electronic components or electronic circuits. A Cu powder, an Ni powder, and an organic vehicle are mixed so that the Ni powder is present in an amount of 0.7-20 mass parts and the organic vehicle is present in an amount of 5-40 mass parts with respect to a total of 100 mass parts of the Cu powder and Ni powder, to obtain a Cu paste composition. Alternatively, a Cu2O powder is admixed with the above composition in an amount of 1-15 mass parts to obtain a Cu paste composition.

Description

厚膜導體形成用銅糊組成物及厚膜導體Copper paste composition for thick film conductor formation and thick film conductor

本發明是有關於一種用以形成厚膜電極或厚膜配線等厚膜導體的銅(Cu)糊組成物。另外,本發明是有關於一種藉由該銅糊組成物而形成的厚膜導體。The present invention relates to a copper (Cu) paste composition for forming a thick film conductor such as a thick film electrode or a thick film wiring. Further, the present invention relates to a thick film conductor formed by the copper paste composition.

於晶片電阻器(chip resistor)、併合積體電路(Integrated Circuit,IC)、電阻網路(resistance network)、以觸控面板(touch panel)為代表的顯示裝置、太陽電池等電子零件、以及使用該些電子零件的電子電路的領域中,通常進行以下操作:將使導電性粉末均勻地分散於有機溶劑等中所得的糊(導電性糊)塗佈於玻璃基板、氧化鋁基板或矽基板等的表面上,進行煅燒或熱硬化,藉此形成厚膜電極或厚膜配線等厚膜導體。An electronic component such as a chip resistor, an integrated circuit (IC), a resistance network, a display device represented by a touch panel, a solar cell, and the like In the field of the electronic circuit of the electronic component, the paste (conductive paste) obtained by uniformly dispersing the conductive powder in an organic solvent or the like is applied to a glass substrate, an alumina substrate, a tantalum substrate, or the like. On the surface, calcination or thermal hardening is performed, thereby forming a thick film conductor such as a thick film electrode or a thick film wiring.

此時,導電性糊的塗佈是藉由網版印刷、凹版印刷或使用分配器(dispensor)的描畫等來進行。關於該些導電性糊中使用的導電性粉末,廣泛地使用具有低電阻值及優異的耐氧化性的銀(Ag)粉末。然而,使用含有Ag粉末的導電性糊而於其表面上形成厚膜電極或厚膜配線的基板存在以下問題:若於水分多的環境下施加電壓,則產生經離子化的銀(Ag+ )於電極間移動而發生短路的現象(離子遷移)。另外,亦存在Ag粉末單價高、難以實現製造成本的降低的問題。因此近年來,作為厚膜電極或厚膜配線等厚膜導體形成用的導電性糊,正在研究使用如下導電性糊並逐漸加以實用,所述導電性糊使用電阻值低、耐遷移性優異的銅(Cu)粉末或以Cu作為主成分的粉末代替Ag粉末。At this time, the application of the conductive paste is performed by screen printing, gravure printing, or drawing using a dispenser. Silver (Ag) powder having a low electrical resistance value and excellent oxidation resistance is widely used as the conductive powder used in the conductive paste. However, the use of a conductive paste containing Ag powder to form a thick film electrode or a thick film wiring on the surface thereof has a problem that if a voltage is applied in a high moisture environment, ionized silver (Ag + ) is generated. A phenomenon in which a short circuit occurs between the electrodes (ion migration). Further, there is also a problem that the Ag powder has a high unit price and it is difficult to achieve a reduction in manufacturing cost. Therefore, in recent years, as a conductive paste for forming a thick film conductor such as a thick film electrode or a thick film wiring, it has been studied to use a conductive paste which has a low resistance value and excellent migration resistance. A copper (Cu) powder or a powder containing Cu as a main component replaces the Ag powder.

例如於日本專利特開2004-039355號公報中提出有一種導電性糊,其含有Cu粉末、及包含結晶玻璃且軟化點與結晶起始溫度之差為100℃以上的玻璃粉末。此種導電性糊可形成密封性優異、鍍敷附著性良好的導電膜。然而,該導電性糊主要是以與積層陶瓷電容器的外部電極的連接性為對象,故關於煅燒時的收縮性、耐氧化性及耐硫化性,難以稱之為已進行了充分的評價。For example, Japanese Laid-Open Patent Publication No. 2004-039355 proposes a conductive paste containing Cu powder and a glass powder containing crystal glass and having a difference between a softening point and a crystallization onset temperature of 100 ° C or higher. Such a conductive paste can form a conductive film which is excellent in sealing property and excellent in plating adhesion. However, since this electrically conductive paste is mainly aimed at the connection with the external electrode of the laminated ceramic capacitor, it is difficult to say that it has been sufficiently evaluated about the shrinkability, oxidation resistance, and sulfurization resistance at the time of baking.

相對於此,於日本專利3237497號公報中提出有一種導電性糊,其為陶瓷基板的通孔導通用的導電性糊,包含平均粒徑為1 μm~5 μm左右的Cu粉末、平均粒徑為3 μm左右的鎳(Ni)粉末、玻璃介質(glass frit)及有機載劑(organic vehicle),相對於Cu粉末及Ni粉末的總量的Ni粉末量為1質量%~20質量%,且相對於Cu粉末、Ni粉末及玻璃介質的總量的玻璃介質量為1質量%~40質量%。一般認為藉由使用該導電性糊,可藉由在Cu粉末中添加一定量的Ni粉末而抑制煅燒時的收縮,防止導體與通孔側壁間的剝離。On the other hand, Japanese Laid-Open Patent Publication No. 3237497 proposes a conductive paste which is a conductive paste for conducting a through-hole of a ceramic substrate, and includes Cu powder having an average particle diameter of about 1 μm to 5 μm and an average particle diameter. a nickel (Ni) powder, a glass frit, and an organic vehicle of about 3 μm, and the amount of Ni powder relative to the total amount of the Cu powder and the Ni powder is 1% by mass to 20% by mass, and The amount of the glass medium relative to the total amount of the Cu powder, the Ni powder, and the glass medium is 1% by mass to 40% by mass. It is considered that by using the conductive paste, it is possible to suppress shrinkage during firing by adding a certain amount of Ni powder to the Cu powder, and to prevent peeling between the conductor and the side wall of the through hole.

另外,於日本專利4646362號公報中記載有以下技術:藉由相對於100質量份的Cu粉末而以1質量份~10質量份的比例含有Ni粉末或氧化鎳(NiO)粉末(以NiO換算計)、且以0.1質量份~3質量份的比例含有氧化銅(CuO)粉末的導體性糊,來形成包含玻璃陶瓷的絕緣基板的表面及/或內部的金屬化(metallization)配線層。對於該導電性糊而言,為了抑制煅燒過程中的Cu與Ni的合金化、確保所得的金屬化配線層的導電性,而添加CuO粉末。In addition, Japanese Patent No. 4,464,362 discloses a technique of containing Ni powder or nickel oxide (NiO) powder in a ratio of 1 part by mass to 10 parts by mass based on 100 parts by mass of Cu powder (in terms of NiO) And a conductive paste containing copper oxide (CuO) powder in a ratio of 0.1 part by mass to 3 parts by mass to form a metallization wiring layer on the surface and/or inside of the insulating substrate including the glass ceramic. The conductive paste is added with CuO powder in order to suppress alloying of Cu and Ni in the firing process and to ensure conductivity of the obtained metallized wiring layer.

再者,近年來由於對電子零件或電子電路等的小型化的期望,對該厚膜電極或厚膜配線的微細化的要求不斷提高,換言之,對可形成寬度更窄、且間隔更窄的厚膜電極或厚膜配線等厚膜導體的導電性糊的要求不斷提高。具體而言,需求寬度為50 μm~200 μm左右、且厚度為5 μm~20 μm左右的厚膜導體。另一方面,伴隨著此種厚膜電極或厚膜配線等厚膜導體的微細化,產生以下問題:由現有技術中不成問題的大氣中的硫化氫(H2 S)氣體或亞硫酸(H2 SO3 )氣體等所引起的硫化導致厚膜導體的電阻值逐漸增加,最終導致斷線,這一情況成為使電子零件或電子電路的可靠性降低的一個原因。 [現有技術文獻] [專利文獻]In addition, in recent years, demands for miniaturization of electronic components, electronic circuits, and the like have increased the demand for miniaturization of thick film electrodes or thick film wirings, in other words, narrower widths and narrower intervals have been formed. The demand for conductive pastes for thick film conductors such as thick film electrodes or thick film wiring is increasing. Specifically, a thick film conductor having a required width of about 50 μm to 200 μm and a thickness of about 5 μm to 20 μm is required. On the other hand, with the miniaturization of a thick film conductor such as such a thick film electrode or a thick film wiring, there is a problem that hydrogen sulfide (H 2 S) gas or sulfurous acid (H) in the atmosphere which is not problematic in the prior art arises. 2 SO 3 ) Vulcanization caused by gas or the like causes a gradual increase in the resistance value of the thick film conductor, which eventually leads to disconnection, which is a cause of lowering the reliability of the electronic component or electronic circuit. [Prior Art Document] [Patent Literature]

[專利文獻1]日本專利特開2004-039355號公報 [專利文獻2]日本專利3237497號公報 [專利文獻3]日本專利4646362號公報[Patent Document 1] Japanese Patent Publication No. 2004-039355 (Patent Document 2) Japanese Patent No. 3237497 (Patent Document 3) Japanese Patent No. 4,464,362

[發明所欲解決之課題] 本發明的目的在於提供一種厚膜導體形成用銅糊組成物及厚膜導體,所述厚膜導體形成用銅糊組成物可提高藉由塗佈於基板的表面上並進行煅燒而形成的厚膜電極或厚膜配線等厚膜導體的耐硫化性,從而提高電子零件或電子電路的可靠性。 [解決課題之手段][Problem to be Solved by the Invention] An object of the present invention is to provide a copper paste composition for forming a thick film conductor and a thick film conductor, which can be coated on a surface of a substrate by a copper paste composition for forming a thick film conductor. The thick film conductor formed by the calcination and the thick film conductor formed by the thick film wiring are resistant to vulcanization, thereby improving the reliability of the electronic component or the electronic circuit. [Means for solving the problem]

本發明的厚膜導體形成用銅糊組成物的特徵在於:包含Cu粉末、Ni粉末及有機載劑,且相對於Cu粉末與Ni粉末的合計100質量份,含有0.7質量份~20質量份的Ni粉末及5質量份~40質量份的有機載劑。The copper paste composition for forming a thick film conductor of the present invention contains Cu powder, Ni powder, and an organic carrier, and contains 0.7 parts by mass to 20 parts by mass based on 100 parts by mass of the total of Cu powder and Ni powder. Ni powder and 5 parts by mass to 40 parts by mass of an organic vehicle.

所述厚膜導體形成用銅糊組成物於在非氧化性環境下、於550℃~750℃下煅燒而形成厚度10 μm的厚膜導體的情形時,可將該厚膜導體的面積電阻值設定為50 mΩ/□以下。When the thick-film conductor-forming copper paste composition is fired at 550 ° C to 750 ° C in a non-oxidizing atmosphere to form a thick film conductor having a thickness of 10 μm, the area resistance of the thick film conductor can be obtained. Set to 50 mΩ/□ or less.

所述厚膜導體形成用銅糊組成物較佳為相對於所述Cu粉末與Ni粉末的合計100質量份,更含有1質量份~15質量份的Cu2 O粉末。The copper paste composition for forming a thick film conductor preferably contains 1 part by mass to 15 parts by mass of Cu 2 O powder based on 100 parts by mass of the total of the Cu powder and the Ni powder.

藉由添加所述Cu2 O粉末,可使所述厚膜導體形成用銅糊組成物的煅燒溫度低溫化。即,含有所述Cu2 O粉末的厚膜導體形成用銅糊組成物於在非氧化性環境下、於500℃~750℃下煅燒而形成厚度10 μm的厚膜導體的情形時,可將該厚膜導體的面積電阻值設定為50 mΩ/□以下。By adding the Cu 2 O powder, the calcination temperature of the thick film conductor-forming copper paste composition can be lowered. In other words, when the copper paste composition for forming a thick film conductor containing the Cu 2 O powder is fired at 500 to 750 ° C in a non-oxidizing atmosphere to form a thick film conductor having a thickness of 10 μm, The area resistance of the thick film conductor is set to 50 mΩ/□ or less.

所述Cu2 O粉末的平均粒徑較佳為0.5 μm~5 μm。The Cu 2 O powder preferably has an average particle diameter of 0.5 μm to 5 μm.

另外,本發明的厚膜導體形成用銅糊組成物相對於所述Cu粉末與Ni粉末的合計100質量份,亦可更含有0.5質量份~5質量份的玻璃粉末。In addition, the copper paste composition for forming a thick film conductor of the present invention may further contain 0.5 parts by mass to 5 parts by mass of the glass powder based on 100 parts by mass of the total of the Cu powder and the Ni powder.

所述Cu粉末及Ni粉末的平均粒徑較佳為0.2 μm~0.7 μm。The average particle diameter of the Cu powder and the Ni powder is preferably 0.2 μm to 0.7 μm.

再者,關於本發明的厚膜導體形成用銅糊組成物,於在一對金(Au)電極間形成厚膜導體(厚膜配線)並將該厚膜導體的初期狀態的面積電阻值設為Rs0 、將該厚膜導體於保持為80℃的含有0.3質量%的硫的切削油中浸漬6小時後的面積電阻值設為Rs6 的情形時,可將由Rs6 相對於Rs0 之比Rs6 /Rs0 所定義的電阻變化率設定為20以下。Further, in the copper paste composition for forming a thick film conductor of the present invention, a thick film conductor (thick film wiring) is formed between a pair of gold (Au) electrodes, and an area resistance value of the initial state of the thick film conductor is set. When R s0 and the thick film conductor are immersed in cutting oil containing 0.3% by mass of sulfur at 80 ° C for 6 hours, the area resistance value is R s6 , and R s6 can be relative to R s0 . The resistance change rate defined by R s6 /R s0 is set to 20 or less.

本發明的厚膜導體可藉由上文所述的厚膜導體形成用銅糊組成物而形成。 [發明的效果]The thick film conductor of the present invention can be formed by the copper paste composition for forming a thick film conductor as described above. [Effects of the Invention]

根據本發明的厚膜導體形成用銅糊組成物及厚膜導體,可長期間抑制形成於基板的表面上的厚膜電極或厚膜配線等厚膜導體的由硫化所致的電阻值的上升,故可提高電子零件或電子電路等的可靠性。而且,本發明的厚膜導體形成用銅糊組成物於工業上可容易地量產。因此,本發明的工業上的意義極大。According to the copper paste composition for forming a thick film conductor and the thick film conductor of the present invention, it is possible to suppress an increase in resistance value due to vulcanization of a thick film conductor such as a thick film electrode or a thick film wiring formed on the surface of the substrate for a long period of time. Therefore, the reliability of electronic parts or electronic circuits can be improved. Further, the copper paste composition for forming a thick film conductor of the present invention can be easily mass-produced industrially. Therefore, the industrial significance of the present invention is enormous.

鑒於所述問題,本發明者等人反覆進行了以下試驗:於用以形成厚膜電極或厚膜配線等厚膜導體的銅糊組成物中添加各種元素,並對其面積電阻值及耐硫化性進行評價。結果獲得了以下見解:若於銅糊組成物中添加既定量的Ni粉末,則於對該銅糊組成物進行煅燒時,Cu與Ni合金化,可飛躍性地提高使用該銅糊組成物所形成的厚膜導體的耐硫化性。本發明是根據該見解而完成。In view of the above problems, the inventors of the present invention repeatedly conducted the following tests: adding various elements to a copper paste composition for forming a thick film conductor such as a thick film electrode or a thick film wiring, and having an area resistance value and resistance to vulcanization Sexual evaluation. As a result, it was found that when a predetermined amount of Ni powder was added to the copper paste composition, when the copper paste composition was fired, Cu and Ni were alloyed, and the use of the copper paste composition was drastically improved. The sulphide resistance of the formed thick film conductor. The present invention has been completed based on this finding.

1.構成成分1. Composition

以下,對本發明的厚膜導體形成用銅糊組成物(以下記作「銅糊組成物」)依其構成成分逐一區分並加以詳細說明。再者,本發明中,使用較Ag粉末更為廉價的Cu粉末及Ni粉末作為導電性粉末,故可大幅度地降低其生產成本。另外,關於本發明的銅糊組成物,只要可將以下的構成成分均勻地混合,則其製造方法並無限制。例如可藉由利用三輥磨機或混合機(mixer)等公知的機構進行混合及攪拌而製造。In the following, the copper paste composition for forming a thick film conductor of the present invention (hereinafter referred to as "copper paste composition") is divided into individual components and described in detail. Further, in the present invention, Cu powder and Ni powder which are more inexpensive than Ag powder are used as the conductive powder, so that the production cost can be greatly reduced. Further, the copper paste composition of the present invention is not limited as long as it can uniformly mix the following constituent components. For example, it can be produced by mixing and stirring by a known mechanism such as a three-roll mill or a mixer.

(1)Cu粉末及Ni粉末(1) Cu powder and Ni powder

本發明的銅糊組成物的特徵在於:於Cu粉末中添加一定量的Ni粉末。藉此,可提高藉由將銅糊組成物塗佈於基板上並進行煅燒所得的厚膜導體的耐硫化性。The copper paste composition of the present invention is characterized in that a certain amount of Ni powder is added to the Cu powder. Thereby, the sulfidation resistance of the thick film conductor obtained by apply|coating the copper paste composition on the board|substrate, and baking, can be improved.

[Ni粉末的含量][Content of Ni powder]

相對於Cu粉末與Ni粉末的合計100質量份,Ni粉末的含量是設定為0.7質量份~20質量份,較佳為設定為0.7質量份~12質量份,更佳為設定為1質量份~3質量份。若Ni的含量小於0.7質量份,則無法充分提高厚膜導體的耐硫化性。另一方面,若Ni的含量超過20質量份,則厚膜導體的面積電阻值變高,無法用作電極材料或配線材料。The content of the Ni powder is set to 0.7 parts by mass to 20 parts by mass, preferably 0.7 parts by mass to 12 parts by mass, more preferably 1 part by mass, based on 100 parts by mass of the total of the Cu powder and the Ni powder. 3 parts by mass. When the content of Ni is less than 0.7 parts by mass, the sulfurization resistance of the thick film conductor cannot be sufficiently improved. On the other hand, when the content of Ni exceeds 20 parts by mass, the area resistance value of the thick film conductor becomes high, and it cannot be used as an electrode material or a wiring material.

[Cu粉末及Ni粉末的平均粒徑][Average particle diameter of Cu powder and Ni powder]

與Cu相比,Ni的熔點更高、擴散速度更慢,故因添加Ni粉末而妨礙銅糊組成物的燒結,若不於550℃以上的高溫下進行煅燒,則無法使Cu與Ni適當地合金化。另一方面,通常已知藉由使燒結材料微細可促進燒結。因此,本發明的銅糊組成物中,較佳為將Cu粉末及Ni粉末的平均粒徑設定為0.2 μm~0.7 μm,更佳為設定為0.2 μm~0.5 μm,進而佳為設定為0.3 μm~0.5 μm。若Cu粉末及Ni粉末的平均粒徑在此種範圍內,則可促進Cu粉末與Ni粉末的燒結,即便於將煅燒溫度設定為550℃~750℃左右的相對較低的溫度的情形時,亦可使Cu與Ni適當地合金化。Ni has a higher melting point and a slower diffusion rate than Cu. Therefore, the addition of Ni powder hinders the sintering of the copper paste composition. If it is not calcined at a high temperature of 550 ° C or higher, Cu and Ni cannot be appropriately formed. Alloying. On the other hand, it is generally known that sintering can be promoted by making the sintered material fine. Therefore, in the copper paste composition of the present invention, the average particle diameter of the Cu powder and the Ni powder is preferably 0.2 μm to 0.7 μm, more preferably 0.2 μm to 0.5 μm, and even more preferably 0.3 μm. ~0.5 μm. When the average particle diameter of the Cu powder and the Ni powder is within such a range, sintering of the Cu powder and the Ni powder can be promoted, even when the baking temperature is set to a relatively low temperature of about 550 ° C to 750 ° C. It is also possible to appropriately alloy Cu and Ni.

相對於此,若Cu粉末及Ni粉末的平均粒徑小於0.2 μm,則可於更低的溫度下煅燒,但銅糊組成物中的氧含量增加,妨礙Cu粉末與Ni粉末的合金化。另一方面,若Cu粉末及Ni粉末的平均粒徑超過0.7 μm,則有時妨礙燒結,無法獲得上文所述的燒結促進效果。On the other hand, when the Cu powder and the Ni powder have an average particle diameter of less than 0.2 μm, they can be calcined at a lower temperature, but the oxygen content in the copper paste composition increases, which hinders the alloying of the Cu powder and the Ni powder. On the other hand, when the average particle diameter of the Cu powder and the Ni powder exceeds 0.7 μm, sintering may be inhibited, and the sintering promotion effect described above may not be obtained.

再者,本發明中,所謂平均粒徑是指利用雷射繞射散射法所求出的體積基準平均粒徑(Mv),可藉由雷射繞射散射式粒度分佈測定裝置來測定。關於該方面,後述氧化亞銅(Cu2 O)粉末及玻璃粉末亦相同。In the present invention, the average particle diameter refers to a volume-based average particle diameter (Mv) obtained by a laser diffraction scattering method, and can be measured by a laser diffraction scattering type particle size distribution measuring apparatus. In this respect, the cuprous oxide (Cu 2 O) powder and the glass powder described later are also the same.

(2)有機載劑(2) Organic carrier

有機載劑是於銅糊組成物的塗佈時所必需,但於煅燒時燒失,對於提高厚膜導體的耐硫化性並無幫助。因此,本發明的銅糊組成物中,有機載劑的種類並無限制,可使用公知的有機載劑。具代表性的有機載劑可列舉:將乙基纖維素、丙烯酸樹脂或甲基丙烯酸樹脂溶解於松油醇或高級醇等溶劑中所得的有機載劑。The organic carrier is necessary for the coating of the copper paste composition, but it is lost during calcination and does not contribute to the improvement of the sulfidation resistance of the thick film conductor. Therefore, in the copper paste composition of the present invention, the type of the organic vehicle is not limited, and a known organic carrier can be used. A typical organic carrier is an organic carrier obtained by dissolving ethyl cellulose, an acrylic resin, or a methacrylic resin in a solvent such as terpineol or a higher alcohol.

相對於Cu粉末與Ni粉末的合計100質量份,有機載劑的含量是設定為5質量份~40質量份,較佳為設定為10質量份~35質量份,更佳為設定為20質量份~30質量份。若有機載劑的含量小於5質量份,則銅糊組成物的黏度變高,無法形成均勻的塗膜。另一方面,若有機載劑的含量超過40質量份,則有時不僅煅燒後的厚膜電極或厚膜配線變得過薄,而且於煅燒時有機載劑無法完全燒失,妨礙Cu粉末或Ni粉末的燒結。The content of the organic carrier is set to 5 parts by mass to 40 parts by mass, preferably 10 parts by mass to 35 parts by mass, more preferably 20 parts by mass, based on 100 parts by mass of the total of the Cu powder and the Ni powder. ~ 30 parts by mass. When the content of the organic vehicle is less than 5 parts by mass, the viscosity of the copper paste composition becomes high, and a uniform coating film cannot be formed. On the other hand, when the content of the organic carrier exceeds 40 parts by mass, not only the thick film electrode or the thick film wiring after the baking is too thin, but also the organic carrier cannot be completely burned off during the calcination, which hinders the Cu powder or Sintering of Ni powder.

(3)玻璃粉末(3) Glass powder

於使用本發明的銅糊組成物直接於基板上形成厚膜導體的情形時,就提高銅糊組成物與基板的密接性的觀點而言,亦可於上文所述的構成成分中進一步添加玻璃粉末。然而,於進行打線接合或焊接的情形時,亦有時以不添加玻璃粉末為宜。因此,玻璃粉末的添加必須根據銅糊組成物的用途或目的而適當選擇。When the copper paste composition of the present invention is used to form a thick film conductor directly on a substrate, it is also possible to further add the above-described constituent components from the viewpoint of improving the adhesion between the copper paste composition and the substrate. Glass powder. However, in the case of wire bonding or welding, it is also preferred to add no glass powder. Therefore, the addition of the glass powder must be appropriately selected depending on the use or purpose of the copper paste composition.

添加至銅糊組成物中的玻璃粉末只要軟化點為低於銅糊組成物的煅燒溫度的溫度,則並無特別限制,就保護環境等觀點而言,較佳為不含鉛(Pb)或鎘(Cd)等有害物質。The glass powder to be added to the copper paste composition is not particularly limited as long as the softening point is lower than the calcination temperature of the copper paste composition, and is preferably free of lead (Pb) or the like from the viewpoint of environmental protection and the like. Hazardous substances such as cadmium (Cd).

於在銅糊組成物中添加玻璃粉末的情形時,相對於Cu粉末與Ni粉末的合計100質量份,所述玻璃粉末的含量較佳為設定為0.5質量份~5質量份,更佳為設定為2質量份~3質量份。若玻璃粉末的含量小於0.5質量份,則有時於煅燒後無法充分提高厚膜導體與基板的密接性。另一方面,若玻璃粉末的含量超過5質量份,則有不僅厚膜導體的電阻值變高,而且厚膜導體的焊料潤濕性或鍍敷附著性降低之虞。When the glass powder is added to the copper paste composition, the content of the glass powder is preferably set to 0.5 parts by mass to 5 parts by mass, more preferably set to 100 parts by mass of the total of the Cu powder and the Ni powder. It is 2 parts by mass to 3 parts by mass. When the content of the glass powder is less than 0.5 part by mass, the adhesion between the thick film conductor and the substrate may not be sufficiently improved after the firing. On the other hand, when the content of the glass powder exceeds 5 parts by mass, not only the resistance value of the thick film conductor is increased, but also the solder wettability or the plating adhesion of the thick film conductor is lowered.

再者,玻璃粉末的平均粒徑並無特別限制,就與Cu粉末或Ni粉末等均勻混合的觀點而言,較佳為設定為1 μm~10 μm,更佳為設定為3 μm~5 μm。In addition, the average particle diameter of the glass powder is not particularly limited, and is preferably 1 μm to 10 μm, more preferably 3 μm to 5 μm from the viewpoint of uniform mixing with Cu powder or Ni powder. .

(4)Cu2 O粉末(4) Cu 2 O powder

如上所述,若於銅糊組成物中添加Ni粉末,則有時妨礙其燒結。另外,於使用如乙基纖維素般的不易在非氧化性環境下的煅燒中燒失的樹脂作為有機載劑的情形時,視其添加量,有時妨礙銅糊組成物的燒結。As described above, when Ni powder is added to the copper paste composition, sintering may be prevented. Further, when a resin which is hard to be burned off during calcination in a non-oxidizing environment such as ethyl cellulose is used as the organic carrier, the sintering of the copper paste composition may be hindered depending on the amount of addition.

本發明者等人針對該方面進行了反覆研究,結果發現,藉由在上文所述的添加有Cu粉末、Ni粉末及有機載劑或除了該些成分以外添加有玻璃粉末的銅糊組成物中進一步添加一定量的氧化亞銅(Cu2 O)粉末,而改善燒結性,即便於在500℃~750℃左右的更低溫度下進行煅燒的情形時,亦可使Cu與Ni適當地合金化。The inventors of the present invention conducted a repetitive study on this aspect, and as a result, found that a copper paste composition in which a glass powder, a Ni powder, an organic vehicle, or a glass powder are added in addition to the above components is added. Further, a certain amount of cuprous oxide (Cu 2 O) powder is added to improve the sinterability, and the Cu and Ni may be appropriately alloyed even when calcined at a lower temperature of about 500 ° C to 750 ° C. Chemical.

藉由添加Cu2 O粉末可獲得此種燒結性改善效果的原因雖現階段不明確,但本發明者等人反覆進行了除了添加氧化銅(CuO)粉末代替Cu2 O粉末以外同樣地製作銅糊組成物,並對其煅燒溫度進行測定的實驗,結果確認到,該銅糊組成物無法獲得充分的燒結性改善效果。即,於上文所述的日本專利第464362號公報中記載有於銅糊組成物中添加氧化銅粉末的主旨,但該文獻中的氧化銅粉末為CuO粉末,故可認為該銅糊組成物幾乎無法獲得燒結性改善效果。另外,該文獻中為了抑制Cu與Ni的合金化而添加CuO粉末。因此,本發明與日本專利第464362號公報中記載的銅糊組成物於該些方面而言可謂大不相同的技術。Although the reason why such a sinterability improving effect can be obtained by adding a Cu 2 O powder is not clear at this stage, the inventors of the present invention repeatedly performed copper in the same manner except that copper oxide (CuO) powder was added instead of Cu 2 O powder. As a result of the measurement of the calcination temperature of the paste composition, it was confirmed that the copper paste composition could not obtain a sufficient sinterability improving effect. In the above-mentioned Japanese Patent No. 464362, the copper oxide powder is added to the copper paste composition. However, the copper oxide powder in this document is CuO powder, so the copper paste composition can be considered as a copper paste composition. The sinterability improvement effect is hardly obtained. Further, in this document, CuO powder is added in order to suppress alloying of Cu and Ni. Therefore, the copper paste composition described in the present invention and Japanese Patent No. 464362 can be said to be quite different in these respects.

再者,本發明的銅糊組成物的Cu2 O粉末於煅燒中分解,故可認為,其於煅燒後以與Cu粉末或Ni粉末一起合金化的狀態而存在於厚膜導體中。Further, since the Cu 2 O powder of the copper paste composition of the present invention is decomposed by calcination, it is considered that it is present in the thick film conductor in a state of being alloyed with Cu powder or Ni powder after calcination.

[Cu2 O粉末的含量][Content of Cu 2 O powder]

於添加Cu2 O粉末的情形時,相對於Cu粉末與Ni粉末的合計100質量份,所述Cu2 O粉末的含量是設定為1質量份~15質量份,較佳為設定為5質量份~10質量份。若Cu2 O粉末的含量在此種範圍內,則可充分獲得銅糊組成物的燒結性改善效果。具體而言,即便於在500℃以上的更低的溫度下對銅糊組成物進行煅燒的情形時,亦可使Cu粉末與Ni粉末充分地燒結,使Cu與Ni適當地合金化。When the case where Cu 2 O is added to the powder, relative to the total 100 parts by mass of Cu powder and Ni powder, Cu 2 O content of the powder is set to 1 parts by mass to 15 parts by mass, preferably set to 5 parts by mass ~10 parts by mass. When the content of the Cu 2 O powder is within such a range, the effect of improving the sinterability of the copper paste composition can be sufficiently obtained. Specifically, even when the copper paste composition is fired at a lower temperature of 500 ° C or higher, the Cu powder and the Ni powder can be sufficiently sintered to appropriately alloy Cu and Ni.

相對於此,若Cu2 O粉末的含量小於1質量份,則無法充分獲得燒結性改善效果。另一方面,若Cu2 O粉末的含量超過15質量份,則有未反應的Cu2 O粉末殘留,由此妨礙燒結、或者焊料或鍍敷的附著性降低之虞。On the other hand, when the content of the Cu 2 O powder is less than 1 part by mass, the effect of improving the sinterability cannot be sufficiently obtained. On the other hand, when the content of the Cu 2 O powder exceeds 15 parts by mass, unreacted Cu 2 O powder remains, thereby hindering the sintering or the deterioration of adhesion of solder or plating.

[Cu2 O粉末的平均粒徑][Average particle diameter of Cu 2 O powder]

就與Cu粉末或Ni粉末等均勻地混合、有效率地獲得燒結性改善效果的觀點而言,Cu2 O粉末的平均粒徑較佳為設定為0.5 μm~5 μm,更佳為設定為1 μm~2 μm。The average particle diameter of the Cu 2 O powder is preferably set to 0.5 μm to 5 μm, and more preferably set to 1 from the viewpoint of uniformly mixing Cu powder or Ni powder or the like and efficiently obtaining a sinterability improving effect. Mm ~ 2 μm.

(5)其他添加成分(5) Other added ingredients

關於本發明的銅糊組成物,就使煅燒溫度低溫化的觀點而言,除了上文所述的構成成分以外亦可添加In、Sn及Zn等。另外,亦可添加分散劑或黏度調整劑。然而,該些其他添加成分的添加量必須限制於不妨礙由添加上文所述的Ni粉末或Cu2 O粉末而得的效果的範圍內。In the copper paste composition of the present invention, in view of lowering the calcination temperature, In, Sn, Zn, or the like may be added in addition to the above-described constituent components. In addition, a dispersing agent or a viscosity adjusting agent may also be added. However, the amount of addition of these other additional components must be limited to a range that does not hinder the effect obtained by adding the Ni powder or the Cu 2 O powder described above.

2.銅糊組成物的特性2. Characteristics of copper paste composition

(1)煅燒溫度(1) Calcination temperature

關於將本發明的銅糊組成物塗佈於基板的表面上並進行煅燒時的溫度(煅燒溫度),於不含Cu2 O粉末的情形時,設定為550℃~750℃。另一方面,於含有Cu2 O粉末的情形時,設定為500℃~750℃。藉由將銅糊組成物的煅燒溫度設定於此種範圍內,對高溫耐久性低的基板亦可形成厚膜導體。另外,亦可形成多層配線,故可擴大銅糊組成物的應用範圍。The temperature (baking temperature) when the copper paste composition of the present invention is applied onto the surface of the substrate and fired is set to be 550 ° C to 750 ° C when the Cu 2 O powder is not contained. On the other hand, in the case of containing a Cu 2 O powder, it is set to 500 to 750 °C. By setting the calcination temperature of the copper paste composition within such a range, a thick film conductor can be formed also on a substrate having low temperature durability. Further, since multilayer wiring can be formed, the application range of the copper paste composition can be expanded.

相對於此,於不含Cu2 O粉末的銅糊組成物的煅燒溫度低於550℃的情形、或含有Cu2 O粉末的銅糊組成物的煅燒溫度低於500℃的情形時,無法使Cu與Ni適當地合金化。另一方面,無論是哪一銅糊組成物,即便煅燒溫度超過750℃,亦不僅無法獲得更高的效果,而且會導致生產成本的增加。On the other hand, when the baking temperature of the copper paste composition containing no Cu 2 O powder is less than 550 ° C, or the baking temperature of the copper paste composition containing Cu 2 O powder is less than 500 ° C, it cannot be made. Cu and Ni are suitably alloyed. On the other hand, no matter which copper paste composition, even if the calcination temperature exceeds 750 ° C, not only a higher effect cannot be obtained, but also an increase in production cost is caused.

(2)面積電阻值(2) Area resistance value

本發明的銅糊組成物於塗佈於基板上並於上文所述的煅燒溫度下進行煅燒,藉此形成寬度0.5 mm、長度50 mm及厚度10 μm的厚膜導體的情形時,較佳為可將其面積電阻值Rs 設定為50 mΩ/□以下,更佳為設定為20 mΩ/□以下,進而佳為設定為10 mΩ/□以下。此處,面積電阻值Rs 亦被稱為薄片電阻,已知與電阻值R存在以下關係。 R=ρ×L/A=ρ×L/(W×t)=ρ/t×L/W=Rs ×L/W ρ:電阻率 A:試樣的截面積 L:試樣的長度 W:試樣的寬度 t:試樣的厚度The copper paste composition of the present invention is preferably coated on a substrate and calcined at the calcination temperature described above to form a thick film conductor having a width of 0.5 mm, a length of 50 mm, and a thickness of 10 μm. In order to set the area resistance value R s to 50 mΩ/□ or less, it is more preferable to set it to 20 mΩ/□ or less, and it is preferable to set it to 10 mΩ/□ or less. Here, the area resistance value R s is also referred to as a sheet resistance, and it is known that the resistance value R has the following relationship. R=ρ×L/A=ρ×L/(W×t)=ρ/t×L/W=R s ×L/W ρ: Resistivity A: cross-sectional area of the sample L: length of the sample W : width of sample t: thickness of sample

再者,上文所述的厚膜導體的面積電阻值越小越佳,其下限並無限制。另外,面積電阻值可利用公知的方法測定。Furthermore, the smaller the area resistance value of the thick film conductor described above, the better, and the lower limit is not limited. Further, the area resistance value can be measured by a known method.

(3)耐硫化性(3) Sulfur resistance

藉由本發明的銅糊組成物所得的厚膜導體由於耐硫化性優異,故可長期間將其面積電阻值維持於上文所述的範圍內。此種厚膜導體的耐硫化性可藉由下述硫化試驗來評價。Since the thick film conductor obtained by the copper paste composition of the present invention is excellent in sulfur resistance, the area resistance value can be maintained within the above range for a long period of time. The sulfidation resistance of such a thick film conductor can be evaluated by the following vulcanization test.

首先,於基板上以電極間距離成為50 mm的方式印刷Au糊組成物並進行煅燒,由此形成一對Au電極。繼而,於該Au電極間塗佈銅糊組成物,於惰性環境下於上文所述的煅燒溫度下煅燒,藉此形成寬度0.5 mm、厚度10 μm~13 μm的厚膜導體。於該狀態(初期狀態)下於Au電極間的五處以上的位置測定電阻值,根據厚膜導體的電阻值的平均值及厚度來算出厚膜導體的面積電阻值Rs0First, an Au paste composition was printed on a substrate so that the distance between electrodes became 50 mm, and calcination was performed, thereby forming a pair of Au electrodes. Then, a copper paste composition was applied between the Au electrodes, and calcined in an inert atmosphere at the calcination temperature described above, thereby forming a thick film conductor having a width of 0.5 mm and a thickness of 10 μm to 13 μm. In this state (initial state), the resistance value was measured at five or more positions between the Au electrodes, and the area resistance value R s0 of the thick film conductor was calculated from the average value and the thickness of the resistance value of the thick film conductor.

繼而,將厚膜導體與基板一起浸漬於保持為80℃的含有0.3質量%的硫(S)的切削油中。經過t小時後,將厚膜導體提起,同樣地算出厚膜導體的面積電阻值Rst 。根據如此所得的面積電阻值Rs0 及Rst 來算出由Rst 相對於Rs0 之比Rst /Rs0 所定義的電阻變化率,由此可評價厚膜導體的耐硫化性。Then, the thick film conductor was immersed in the cutting oil containing 0.3% by mass of sulfur (S) maintained at 80 ° C together with the substrate. After t elapsed, the thick film conductor was lifted up, and the area resistance value R st of the thick film conductor was calculated in the same manner. The area thus obtained, and the resistance value R s0 is calculated by the R st R st with respect to the resistance change ratio of R s0 R st / R s0 defined, whereby the evaluation of the thick film conductor sulfidation resistance.

再者,於該硫化試驗中使用Au電極作為電極的原因在於:Au不會受到硫(S)的腐蝕,故於硫化試驗後的厚膜導體的面積電阻值的測定時,可忽視電極的影響。Further, the reason why the Au electrode is used as the electrode in the vulcanization test is that Au is not corroded by sulfur (S), so that the influence of the electrode can be ignored in the measurement of the area resistance value of the thick film conductor after the vulcanization test. .

尤其於使用本發明的銅糊組成物來形成厚膜導體的情形時,較佳為可將電阻變化率設定為20以下,更佳為設定為10以下,進而佳為設定為1.5以下,所述電阻變化率是由在保持為80℃的含有0.3質量%的硫的切削油中浸漬6小時後的面積電阻值Rs6 相對於初期狀態的面積電阻值Rs0 之比Rs6 /Rs0 來定義。In particular, when a thick film conductor is formed using the copper paste composition of the present invention, it is preferable to set the resistance change rate to 20 or less, more preferably 10 or less, and still more preferably 1.5 or less. The rate of change in resistance is defined by the ratio R s6 /R s0 of the area resistance value R s6 after immersion in the cutting oil containing 0.3% by mass of sulfur at 80 ° C for 6 hours with respect to the area resistance value R s0 of the initial state. .

3.厚膜導體3. Thick film conductor

本發明的厚膜導體可藉由上文所述的銅糊組成物而形成。如上文所述,該厚膜導體具備優異的耐硫化性,不會因大氣中的硫化氫氣體或亞硫酸氣體等而腐蝕。因此,即便於應對電子零件或電子電路的小型化而將包含該厚膜導體的厚膜電極或厚膜配線等微細化至寬度50 μm~200 μm左右及厚度5 μm~20 μm左右的情形時,亦可有效地抑制斷線或電阻值的增加等。因此,藉由使用本發明的厚膜導體,可飛躍性地提高電子零件或電子電路的可靠性。 [實施例]The thick film conductor of the present invention can be formed by the copper paste composition described above. As described above, the thick film conductor has excellent sulfur resistance and is not corroded by hydrogen sulfide gas or sulfurous acid gas in the atmosphere. Therefore, even when the thickness of the thick film electrode or the thick film wiring including the thick film conductor is reduced to a size of about 50 μm to 200 μm and a thickness of about 5 μm to 20 μm, the electronic component or the electronic circuit can be miniaturized. It can also effectively suppress the disconnection or increase in resistance value. Therefore, by using the thick film conductor of the present invention, the reliability of an electronic component or an electronic circuit can be dramatically improved. [Examples]

以下,對應用本發明的具體實施例加以說明,但本發明不限定於該些實施例。Hereinafter, specific embodiments to which the present invention is applied will be described, but the present invention is not limited to the embodiments.

(實施例1-1~實施例1-9及比較例1-1~比較例1-3)(Examples 1-1 to 1-9 and Comparative Examples 1-1 to 1-3)

[銅糊組成物的製作][Production of copper paste composition]

作為銅糊組成物的成分,準備平均粒徑為0.2 μm及0.5 μm的Cu粉末及Ni粉末、平均粒徑為3 μm且軟化點為450℃的SiO2 -B2 O3 -ZnO系玻璃粉末、以及將丙烯酸樹脂溶解於松油醇中而成的有機載劑。再者,該些粉末的平均粒徑是藉由雷射繞射散射式粒度分佈測定裝置(日機裝股份有限公司,麥克奇(Microtrac))來測定。將該些成分以成為表1所示的組成比的方式調配,使用三輥磨機進行混練,使各構成成分充分地分散,藉此獲得實施例1-1~實施例1-9及比較例1-1~比較例1-3的銅糊組成物。As a component of the copper paste composition, Cu powder and Ni powder having an average particle diameter of 0.2 μm and 0.5 μm, and SiO 2 -B 2 O 3 -ZnO-based glass powder having an average particle diameter of 3 μm and a softening point of 450 ° C were prepared. And an organic carrier obtained by dissolving an acrylic resin in terpineol. Further, the average particle diameter of the powders was measured by a laser diffraction scattering type particle size distribution measuring apparatus (Nikkiso Co., Ltd., Microtrac). These components were blended so as to have a composition ratio shown in Table 1, and kneaded by a three-roll mill to sufficiently disperse the respective constituent components, thereby obtaining Examples 1-1 to 1-9 and Comparative Examples. The copper paste composition of 1-1 to Comparative Example 1-3.

[面積電阻值及耐硫化性的評價][Evaluation of area resistance value and sulfur resistance]

於預先印刷及煅燒Au糊組成物而形成有Au電極的96%氧化鋁基板的表面上,使用寬度W為0.5 mm、電極間隔L為50 mm的圖案,以煅燒後的膜厚t成為10 μm~13 μm的方式印刷實施例1-1~實施例1-9及比較例1-1~比較例1-3的銅糊組成物,於N2 環境下、於750℃或550℃下煅燒1小時,藉此分別製作硫化試驗用的樣本。A pattern having a width W of 0.5 mm and an electrode spacing L of 50 mm was used on the surface of a 96% alumina substrate on which an Au paste was previously printed and calcined to form an Au electrode, and the film thickness t after calcination was 10 μm. The copper paste compositions of Examples 1-1 to 1-9 and Comparative Examples 1-1 to 1-3 were printed in a manner of ~13 μm, and calcined at 750 ° C or 550 ° C in an N 2 atmosphere. In this case, samples for the vulcanization test were prepared separately.

使數位萬用電表(digital multimeter)(愛德萬測試(Advantest)股份有限公司製造)的電阻值測定用探針與該些樣本的Au電極間的五個部位接觸,測定厚膜導體的電阻值R[t]。繼而,將該電阻值R[t]換算成面積電阻值Rs [t](=R(t)×W/L),求出其平均值Rs0 [t],由此分別算出厚膜導體的厚度為10 μm的情形時的面積電阻值Rs0 (=Rs [t]×t/10)。The resistance measuring probe for a digital multimeter (manufactured by Advantest Co., Ltd.) was brought into contact with five points between the Au electrodes of the samples to measure the resistance of the thick film conductor. The value R[t]. Then, the resistance value R[t] is converted into the area resistance value R s [t] (=R(t)×W/L), and the average value R s0 [t] is obtained, thereby calculating the thick film conductor separately. The area resistance value R s0 (=R s [t] × t/10) when the thickness is 10 μm.

繼而,將該些樣本浸漬於耐硫化性評價用的保持為80℃的含有0.3質量%的S的切削油中,同樣地算出經過1小時後、經過2小時後、經過3小時後及經過6小時後的面積電阻值Rs1 、面積電阻值Rs2 、面積電阻值RS3 及面積電阻值Rs6 。將該些結果示於表2及圖1中。Then, the samples were immersed in a cutting oil containing 0.3% by mass of S which was maintained at 80° C. for evaluation of sulfidability, and similarly, after 1 hour, 2 hours, 3 hours, and 6 The area resistance value R s1 , the area resistance value R s2 , the area resistance value R S3 , and the area resistance value R s6 after the hour. These results are shown in Table 2 and Figure 1.

[表1] [Table 1]

[表2] [Table 2]

(實施例2-1~實施例2-13及比較例2-1~比較例2-3)(Example 2-1 to Example 2-13 and Comparative Example 2-1 to Comparative Example 2-3)

[銅糊組成物的製作][Production of copper paste composition]

作為銅糊組成物的成分,準備平均粒徑為0.2 μm及0.3 μm的Cu粉末及Ni粉末、平均粒徑為3 μm且軟化點為450℃的SiO2 -B2 O3 -ZnO系玻璃粉末、平均粒徑為0.5 μm及1.0 μm及1.5 μm的Cu2 O粉末、以及將乙基纖維素溶解於松油醇中所得的有機載劑。將該些成分以成為表3所示的組成比的方式調配,使用三輥磨機進行混練,使各構成成分充分地分散,由此獲得實施例2-1~實施例2-13及比較例2-1~比較例2-3的銅糊組成物。As a component of the copper paste composition, Cu powder and Ni powder having an average particle diameter of 0.2 μm and 0.3 μm, and SiO 2 -B 2 O 3 -ZnO-based glass powder having an average particle diameter of 3 μm and a softening point of 450 ° C were prepared. Cu 2 O powder having an average particle diameter of 0.5 μm, 1.0 μm, and 1.5 μm, and an organic vehicle obtained by dissolving ethyl cellulose in terpineol. These components were blended so as to have a composition ratio shown in Table 3, and kneaded by a three-roll mill to sufficiently disperse the respective constituent components, thereby obtaining Examples 2-1 to 2-13 and Comparative Examples. The copper paste composition of 2-1 to Comparative Example 2-3.

[面積電阻值及耐硫化性的評價][Evaluation of area resistance value and sulfur resistance]

於預先印刷及煅燒Au糊組成物而形成有Au電極的96%氧化鋁基板的表面上,使用寬度成為0.5 mm、電極間隔成為50 mm的圖案,以煅燒後的膜厚成為10 μm~13 μm的方式印刷實施例2-1~實施例2-13及比較例2-1~比較例2-3的銅糊組成物,於N2 環境下、於550℃或500℃下煅燒1小時,藉此分別製作硫化試驗用的樣本。A pattern having a width of 0.5 mm and an electrode spacing of 50 mm was used on the surface of a 96% alumina substrate on which an Au paste was previously printed and fired to form an Au paste, and the film thickness after firing was 10 μm to 13 μm. The copper paste compositions of Examples 2-1 to 2-13 and Comparative Examples 2-1 to 2-3 were printed and calcined at 550 ° C or 500 ° C for 1 hour in an N 2 atmosphere. This was separately prepared for the test for vulcanization test.

與實施例1~實施例9及比較例1~比較例3同樣地算出該些樣本的面積電阻值Rs0 、面積電阻值Rs1 、面積電阻值Rs2 、面積電阻值Rs3 及面積電阻值Rs6 。將該些結果示於表4及圖2中。The area resistance value R s0 , the area resistance value R s1 , the area resistance value R s2 , the area resistance value R s3 , and the area resistance value of the samples were calculated in the same manner as in the first to ninth embodiments and the first to third comparative examples. R s6 . These results are shown in Table 4 and Figure 2.

[表3] [table 3]

[表4] [Table 4]

(評價)(Evaluation)

根據表1~表4、圖1及圖2,確認到藉由塗佈及煅燒實施例1-1~實施例1-9及實施例2-1~實施例2-13的銅糊組成物所得的厚膜導體均是初期狀態下的面積電阻值Rs0 為50 mΩ/□以下,且電阻變化率Rs6 /Rs0 為20以下,具備優異的耐硫化性。According to Tables 1 to 4, FIG. 1 and FIG. 2, it was confirmed that the copper paste compositions of Examples 1-1 to 1-9 and Examples 2-1 to 2-13 were coated and fired. The thick film conductors have an area resistance value R s0 of 50 mΩ/□ or less in the initial state, and the resistance change rate R s6 /R s0 is 20 or less, and have excellent sulfur resistance.

再者,利用X射線繞射對藉由塗佈及印刷實施例2-12的銅糊組成物所得的厚膜導體進行分析,結果與其他實施例同樣地,未觀察到Cu及Ni的繞射波峰,僅觀察到Cu-Ni合金的繞射波峰。因此確認到,於添加有Cu2 O粉末的情形時,即便將煅燒溫度設定為500℃左右,亦可使Cu與Ni適當地合金化,可提高耐硫化性。Further, by analyzing the thick film conductor obtained by coating and printing the copper paste composition of Example 2-12 by X-ray diffraction, as in the other examples, no diffraction of Cu and Ni was observed. At the peak, only the diffraction peak of the Cu-Ni alloy was observed. Therefore, when the Cu 2 O powder is added, even if the baking temperature is set to about 500 ° C, Cu and Ni can be appropriately alloyed, and the sulfurization resistance can be improved.

no

圖1為表示實施例1-1~實施例1-9及比較例1-1~比較例1-3中所得的樣本的耐硫化性的圖。 圖2為表示實施例2-1~實施例2-13及比較例2-1~比較例2-3中所得的樣本的耐硫化性的圖。Fig. 1 is a graph showing the sulfidation resistance of the samples obtained in Examples 1-1 to 1-9 and Comparative Examples 1-1 to 1-3. 2 is a graph showing the sulfidation resistance of the samples obtained in Examples 2-1 to 2-13 and Comparative Examples 2-1 to 2-3.

Claims (10)

一種厚膜導體形成用銅糊組成物,包含Cu粉末、Ni粉末及有機載劑,且相對於Cu粉末與Ni粉末的合計100質量份,含有0.7質量份~20質量份的Ni粉末及5質量份~40質量份的有機載劑。A copper paste composition for forming a thick film conductor, comprising Cu powder, Ni powder, and an organic carrier, and containing 0.7 parts by mass to 20 parts by mass of Ni powder and 5 masses based on 100 parts by mass of the total of Cu powder and Ni powder. Parts to 40 parts by mass of an organic vehicle. 如申請專利範圍第1項所述的厚膜導體形成用銅糊組成物,其中相對於所述Cu粉末與Ni粉末的合計100質量份,更含有1質量份~15質量份的Cu2 O粉末。The copper paste composition for forming a thick film conductor according to the first aspect of the invention, wherein the Cu 2 O powder is further contained in an amount of 1 part by mass to 15 parts by mass based on 100 parts by mass of the total of the Cu powder and the Ni powder. . 如申請專利範圍第1項所述的厚膜導體形成用銅糊組成物,其中相對於所述Cu粉末與Ni粉末的合計100質量份,更含有0.5質量份~5質量份的玻璃粉末。The copper paste composition for forming a thick film conductor according to the first aspect of the invention, wherein the glass powder is further contained in an amount of 0.5 parts by mass to 5 parts by mass based on 100 parts by mass of the total of the Cu powder and the Ni powder. 如申請專利範圍第1項所述的厚膜導體形成用銅糊組成物,其中相對於所述Cu粉末與Ni粉末的合計100質量份,更含有1質量份~15質量份的Cu2 O粉末及0.5質量份~5質量份的玻璃粉末。The copper paste composition for forming a thick film conductor according to the first aspect of the invention, wherein the Cu 2 O powder is further contained in an amount of 1 part by mass to 15 parts by mass based on 100 parts by mass of the total of the Cu powder and the Ni powder. And 0.5 parts by mass to 5 parts by mass of the glass powder. 如申請專利範圍第1項或第3項中任一項所述的厚膜導體形成用銅糊組成物,其中於在非氧化性環境下、於550℃~750℃下煅燒而形成厚度10 μm的厚膜導體的情形時,所述厚膜導體的面積電阻值為50 mΩ/□以下。The copper paste composition for forming a thick film conductor according to any one of claims 1 to 3, which is calcined at a temperature of 550 ° C to 750 ° C in a non-oxidizing atmosphere to form a thickness of 10 μm. In the case of a thick film conductor, the thick film conductor has an area resistance value of 50 mΩ/□ or less. 如申請專利範圍第2項或第4項所述的厚膜導體形成用銅糊組成物,其中於在非氧化性環境下、於500℃~750℃下煅燒而形成厚度10 μm的厚膜導體的情形時,所述厚膜導體的面積電阻值為50 mΩ/□以下。The copper paste composition for forming a thick film conductor according to the second or fourth aspect of the invention, wherein the thick film conductor having a thickness of 10 μm is formed by firing at 500 ° C to 750 ° C in a non-oxidizing atmosphere. In the case of the thick film conductor, the area resistance value is 50 mΩ/□ or less. 如申請專利範圍第2項或第4項所述的厚膜導體形成用銅糊組成物,其中所述Cu2 O粉末的平均粒徑為0.5 μm~5 μm。The copper paste composition for forming a thick film conductor according to the second or fourth aspect of the invention, wherein the Cu 2 O powder has an average particle diameter of 0.5 μm to 5 μm. 如申請專利範圍第1項至第4項中任一項所述的厚膜導體形成用銅糊組成物,其中所述Cu粉末及Ni粉末的平均粒徑為0.2 μm~0.7 μm。The copper paste composition for forming a thick film conductor according to any one of claims 1 to 4, wherein the Cu powder and the Ni powder have an average particle diameter of 0.2 μm to 0.7 μm. 如申請專利範圍第1項至第4項中任一項所述的厚膜導體形成用銅糊組成物,其中於在一對Au電極間形成厚膜導體並將所述厚膜導體的初期狀態的面積電阻值設為Rs0 、將該厚膜導體於保持為80℃的含有0.3質量%的硫的切削油中浸漬6小時後的面積電阻值設為Rs6 的情形時,由Rs6 相對於Rs0 之比Rs6 /Rs0 所定義的電阻變化率為20以下。The copper paste composition for forming a thick film conductor according to any one of claims 1 to 4, wherein a thick film conductor is formed between a pair of Au electrodes and an initial state of the thick film conductor is formed. When the area resistance value is R s0 and the thick film conductor is immersed in the cutting oil containing 0.3% by mass of sulfur at 80 ° C for 6 hours, the area resistance value is R s6 , and R s6 is relatively to R s0 resistance change ratio R s6 / R s0 defined ratio of 20 or less. 一種厚膜導體,其是藉由如申請專利範圍第1項至第4項中任一項所述的厚膜導體形成用銅糊組成物而形成。A thick film conductor formed by the copper paste composition for forming a thick film conductor according to any one of claims 1 to 4.
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