[go: up one dir, main page]

TW201634910A - Electronics device - Google Patents

Electronics device Download PDF

Info

Publication number
TW201634910A
TW201634910A TW105105297A TW105105297A TW201634910A TW 201634910 A TW201634910 A TW 201634910A TW 105105297 A TW105105297 A TW 105105297A TW 105105297 A TW105105297 A TW 105105297A TW 201634910 A TW201634910 A TW 201634910A
Authority
TW
Taiwan
Prior art keywords
temperature
circuit
electronic device
value
terminal
Prior art date
Application number
TW105105297A
Other languages
Chinese (zh)
Inventor
Makoto Tsurumaru
Original Assignee
Renesas Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Electronics Corp filed Critical Renesas Electronics Corp
Publication of TW201634910A publication Critical patent/TW201634910A/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/01Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using semiconducting elements having PN junctions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Inverter Devices (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Nonlinear Science (AREA)

Abstract

An electronics device includes a power semiconductor device including a temperature detection diode, a first semiconductor integrated circuit device including a detection circuit for detecting VF from the temperature detection diode and a second semiconductor integrated circuit device. The second semiconductor integrated circuit device includes, an outside air temperature acquisition unit which acquires outside air temperature information, a storage which stores temperature characteristic data of the temperature detection diode and a first value based on a signal from the detection circuit at a first temperature and a temperature arithmetic processing unit which calculates a temperature of the power semiconductor device from a third value based on a signal from the detection circuit, the temperature characteristic data, the first temperature acquired by the outside air temperature acquisition unit and the first value.

Description

電子裝置 Electronic device

本揭示係有關電子裝置,可應用於例如具備內建溫度檢測用二極體的電力用半導體裝置的電子裝置。 The present disclosure relates to an electronic device that can be applied to, for example, an electronic device including a power semiconductor device having a built-in temperature detecting diode.

利用設於半導體晶片內的二極體的順向電壓(VF)的溫度依存性,而進行半導體晶片的溫度測定。 The temperature of the semiconductor wafer is measured by the temperature dependence of the forward voltage (VF) of the diode provided in the semiconductor wafer.

在關聯於本揭示的先前技術文獻方面,係例如存在日本發明專利公開平5-40533號公報。 In the prior art document related to the present disclosure, for example, there is Japanese Laid-Open Patent Publication No. Hei 5-40533.

[先前技術文獻] [Previous Technical Literature]

[專利文獻] [Patent Literature]

[專利文獻1]日本發明專利公開平5-40533號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei 5-40533

溫度檢測用二極體的VF係變異性大,寬溫度範圍下的溫度測定的精度會降低。 The VF system of the temperature detecting diode has a large variability, and the accuracy of temperature measurement in a wide temperature range is lowered.

其他課題與新穎之特徵,應會由本說明書之記述及附圖而明確化。 Other items and novel features should be clarified by the description of the specification and the drawings.

簡單說明本揭示之中具代表性者之概要時,如下。 A brief description of the representative of the present disclosure is as follows.

亦即,電子裝置,係具備:電力用半導體裝置、驅動前述電力用半導體裝置的第1半導體積體電路裝置、及控制前述第1半導體積體電路裝置的第2半導體積體電路裝置。前述電力用半導體裝置,係具備:切換電晶體、及溫度檢測用二極體。前述第1半導體積體電路裝置,係具備:驅動前述切換電晶體的驅動電路、及從前述溫度檢測用二極體檢測出VF的檢測電路。前述第2半導體積體電路裝置,係具備:控制前述驅動電路的控制部;取得戶外溫度資訊的戶外溫度取得部;儲存前述溫度檢測用二極體的溫度特性資料與基於第1溫度下的來自前述檢測電路的信號的第1值的記憶裝置;以及從基於來自前述檢測電路的信號的第3值、前述溫度特性資料、以前述戶外溫度取得部所取得的前述第1溫度、及前述第1值而算出前述電力用半導體裝置的溫度的溫度演算處理部。 In other words, the electronic device includes a power semiconductor device, a first semiconductor integrated circuit device that drives the power semiconductor device, and a second semiconductor integrated circuit device that controls the first semiconductor integrated circuit device. The power semiconductor device includes a switching transistor and a temperature detecting diode. The first semiconductor integrated circuit device includes a drive circuit that drives the switching transistor, and a detection circuit that detects VF from the temperature detecting diode. The second semiconductor integrated circuit device includes: a control unit that controls the drive circuit; an outdoor temperature acquisition unit that acquires outdoor temperature information; and stores temperature characteristic data of the temperature detection diode and the temperature based on the first temperature a memory device having a first value of a signal of the detection circuit; and a third value obtained from the signal from the detection circuit, the temperature characteristic data, the first temperature obtained by the outdoor temperature acquisition unit, and the first A temperature calculation processing unit that calculates the temperature of the power semiconductor device by the value.

依上述電子裝置時,可減低寬溫度範圍的溫度測定的精度降低。 According to the above electronic device, the accuracy of temperature measurement in a wide temperature range can be reduced.

1、1A、1B、1C‧‧‧電子裝置 1, 1A, 1B, 1C‧‧‧ electronic devices

1D、1E、1F、1G、1H‧‧‧電子裝置 1D, 1E, 1F, 1G, 1H‧‧‧ electronic devices

10‧‧‧電力用半導體裝置 10‧‧‧Power semiconductor devices

10A、10B、10C‧‧‧IGBT(電力用半導體裝置) 10A, 10B, 10C‧‧‧ IGBT (semiconductor device for power)

10D、10E、10F、10G、10H‧‧‧IGBT 10D, 10E, 10F, 10G, 10H‧‧‧ IGBT

11‧‧‧切換元件 11‧‧‧Switching components

12‧‧‧溫度檢測用二極體 12‧‧‧Diode for temperature detection

13B、13C‧‧‧ID電路 13B, 13C‧‧‧ID circuit

13E‧‧‧條碼 13E‧‧‧ barcode

13H‧‧‧ID電路 13H‧‧‧ID circuit

14‧‧‧切換電路 14‧‧‧Switching circuit

20‧‧‧第1半導體積體電路裝置 20‧‧‧1st semiconductor integrated circuit device

20A、20B、20C‧‧‧驅動器IC(第1半導體積體電路裝置) 20A, 20B, 20C‧‧‧ Driver IC (1st semiconductor integrated circuit device)

20D、20E、20F、20G、20H‧‧‧驅動器IC 20D, 20E, 20F, 20G, 20H‧‧‧ drive IC

21‧‧‧閘極電路(驅動電路) 21‧‧‧ gate circuit (drive circuit)

22‧‧‧溫度檢測用A/D轉換器(檢測電路) 22‧‧‧A/D converter for temperature detection (detection circuit)

23‧‧‧電流偏壓電路 23‧‧‧ Current bias circuit

24‧‧‧隔離器 24‧‧‧Isolator

25‧‧‧ID讀出電路 25‧‧‧ID readout circuit

25G、25H‧‧‧ID讀出電路 25G, 25H‧‧‧ID readout circuit

30‧‧‧第2半導體積體電路裝置 30‧‧‧Second semiconductor integrated circuit device

30A、30B、30C‧‧‧控制電路(第2半導體積體電路裝置) 30A, 30B, 30C‧‧‧ control circuit (second semiconductor integrated circuit device)

30D、30E、30F、30G、30H‧‧‧控制電路 30D, 30E, 30F, 30G, 30H‧‧‧ control circuits

31‧‧‧CPU 31‧‧‧CPU

32‧‧‧PWM電路 32‧‧‧PWM circuit

33‧‧‧記憶裝置 33‧‧‧ memory device

34、34B、34C‧‧‧I/O介面 34, 34B, 34C‧‧‧I/O interface

34H‧‧‧I/O介面 34H‧‧‧I/O interface

35‧‧‧A/D轉換器 35‧‧‧A/D converter

36‧‧‧PC介面 36‧‧‧PC interface

44‧‧‧戶外溫度檢測器 44‧‧‧Outdoor temperature detector

45‧‧‧PC 45‧‧‧PC

[圖1]供於說明溫度檢測用二極體的VF的變異性用的圖。 Fig. 1 is a view for explaining the variability of VF of a temperature detecting diode.

[圖2]供於說明實施形態相關之電子裝置用的方塊圖。 Fig. 2 is a block diagram for explaining an electronic device according to an embodiment.

[圖3]供於說明實施例1相關之電子裝置用的方塊圖。 Fig. 3 is a block diagram for explaining an electronic device related to the first embodiment.

[圖4]供於說明實施例1相關之控制電路用的方塊圖。 Fig. 4 is a block diagram for explaining a control circuit related to the first embodiment.

[圖5]供於說明實施例1相關之電子裝置的製造方法用的圖。 Fig. 5 is a view for explaining a method of manufacturing an electronic device according to the first embodiment.

[圖6]供於說明實施例1相關之溫度係計算部處理用的圖。 Fig. 6 is a view for explaining the processing of the temperature system calculation unit according to the first embodiment.

[圖7]供於說明實施例1相關之溫度係計算部處理用的流程圖。 Fig. 7 is a flow chart for explaining the processing of the temperature system calculation unit according to the first embodiment.

[圖8]供於說明實施例1相關之控制電路用的方塊圖。 Fig. 8 is a block diagram for explaining a control circuit related to the first embodiment.

[圖9]供於說明實施例1相關之控制電路用的方塊圖。 Fig. 9 is a block diagram for explaining a control circuit related to the first embodiment.

[圖10]供於說明實施例2相關之電子裝置用的方塊圖。 Fig. 10 is a block diagram for explaining an electronic device related to the second embodiment.

[圖11]供於說明實施例2相關之控制電路用的方塊圖。 Fig. 11 is a block diagram for explaining a control circuit related to the second embodiment.

[圖12]供於說明實施例2相關之溫度係計算部處理用的流程圖。 Fig. 12 is a flowchart for explaining processing of the temperature system calculation unit according to the second embodiment.

[圖13]供於說明實施例2相關之溫度係計算部處理用的流程圖。 Fig. 13 is a flow chart for explaining the processing of the temperature system calculation unit according to the second embodiment.

[圖14]供於說明實施例3相關之電子裝置用的方塊圖。 Fig. 14 is a block diagram for explaining an electronic device related to the third embodiment.

[圖15]供於說明實施例3相關之控制電路用的方塊圖。 Fig. 15 is a block diagram for explaining a control circuit related to the third embodiment.

[圖16]供於說明實施例3相關之溫度係計算部處理用的流程圖。 Fig. 16 is a flow chart for explaining the processing of the temperature system calculation unit according to the third embodiment.

[圖17]供於說明實施例1至3相關之電子裝置的應用例用的方塊圖。 Fig. 17 is a block diagram for explaining an application example of the electronic device related to the first to third embodiments.

[圖18]供於說明實施例1至3相關之電子裝置的隔離器用的圖。 Fig. 18 is a view for explaining an isolator of the electronic device according to the first to third embodiments.

[圖19]繪示電力模組的構成的圖。 FIG. 19 is a diagram showing the configuration of a power module.

[圖20]供於說明實施例4相關之電子裝置用的方塊圖。 Fig. 20 is a block diagram for explaining an electronic device related to the fourth embodiment.

[圖21]針對實施例4相關之電力模組的構成作繪示的圖。 Fig. 21 is a diagram showing the configuration of a power module according to a fourth embodiment.

[圖22]供於說明實施例4相關之ID讀取裝置用的圖。 Fig. 22 is a view for explaining the ID reading device of the fourth embodiment.

[圖23]供於說明實施例4相關之ID電路的溫度特性資料的讀取用的流程圖。 Fig. 23 is a flow chart for explaining reading of temperature characteristic data of the ID circuit related to the fourth embodiment.

[圖24]供於說明實施例4相關之溫度係計算部處理 用的流程圖。 [Fig. 24] A temperature system calculation unit for explaining the description of the fourth embodiment Flow chart used.

[圖25]供於說明實施例5相關之電子裝置用的方塊圖。 Fig. 25 is a block diagram for explaining an electronic device related to the fifth embodiment.

[圖26]針對實施例5相關之電力模組的構成作繪示的圖。 Fig. 26 is a diagram showing the configuration of a power module according to a fifth embodiment.

[圖27]針對實施例5相關之ID讀取裝置作繪示的圖。 Fig. 27 is a diagram showing the ID reading device related to the fifth embodiment.

[圖28]供於說明實施例5相關之ID碼的讀取用的流程圖。 Fig. 28 is a flow chart for explaining the reading of the ID code related to the fifth embodiment.

[圖29]供於說明實施例5相關之溫度係計算部處理用的流程圖。 Fig. 29 is a flow chart for explaining the processing of the temperature system calculation unit according to the fifth embodiment.

[圖30]供於說明實施例6相關之電子裝置用的方塊圖。 Fig. 30 is a block diagram for explaining an electronic device related to Embodiment 6.

[圖31]供於說明實施例6相關之ID碼的讀取用的流程圖。 Fig. 31 is a flow chart for explaining the reading of the ID code relating to the sixth embodiment.

[圖32]供於說明實施例7相關之電子裝置用的方塊圖。 Fig. 32 is a block diagram for explaining an electronic device related to Embodiment 7.

[圖33]針對實施例7相關之IGBT的構成作繪示的圖。 Fig. 33 is a view showing the configuration of an IGBT according to the seventh embodiment.

[圖34]供於說明實施例7相關之溫度係計算部處理用的流程圖。 Fig. 34 is a flow chart for explaining the processing of the temperature system calculation unit according to the seventh embodiment.

[圖35]供於說明實施例8相關之電子裝置用的方塊圖。 Fig. 35 is a block diagram for explaining an electronic device related to the eighth embodiment.

[圖36]針對實施例8相關之驅動器IC與IBGT的連 接例作繪示的方塊圖。 [FIG. 36] A connection between the driver IC and the IBGT related to Embodiment 8 The block diagram is shown as an example.

[圖37]圖36的構成下的串列通信的時序圖。 FIG. 37 is a timing chart of serial communication in the configuration of FIG. 36.

[圖38]供於說明實施例8相關之溫度係計算部處理用的流程圖。 Fig. 38 is a flow chart for explaining the processing of the temperature system calculation unit according to the eighth embodiment.

以下,針對實施形態及實施例,利用圖式作說明。其中,於以下之說明,對相同構成要素係附加相同符號並有時省略重複的說明。 Hereinafter, the embodiments and examples will be described with reference to the drawings. In the following description, the same components are denoted by the same reference numerals, and overlapping descriptions may be omitted.

電動機(馬達),係用作為與內燃機關(汽油引擎)組合的混合動力車(HEV)或電動汽車(EV)等的動力源。驅動電動機時,為了獲得既定的轉矩、電源頻率而運用進行直流-交流轉換的電力轉換裝置(逆變器)。因汽車的行走環境使得逆變器的運轉溫度大幅變動,尤其於引擎室搭載了逆變器的HEV方面,係因引擎的發熱的影響使得逆變器變高溫。逆變器內的切換元件(例如電力用半導體裝置),係除如此之周圍溫度以外,因電力用半導體裝置元件本身的電流流動所致的固定損失、導通/關斷所致的切換損失的影響使得溫度上升,超過某溫度時存在造成破壞之虞。 The electric motor (motor) is used as a power source of a hybrid vehicle (HEV) or an electric vehicle (EV) combined with an internal combustion engine (gasoline engine). When the motor is driven, a power conversion device (inverter) that performs DC-AC conversion is used in order to obtain a predetermined torque and power supply frequency. The operating temperature of the inverter greatly changes due to the driving environment of the automobile, and in particular, the HEV in which the inverter is mounted in the engine room causes the inverter to become hot due to the influence of the heat generated by the engine. A switching element (for example, a power semiconductor device) in the inverter is a fixed loss due to a current flow of the power semiconductor device element itself, and a switching loss due to conduction/shutdown in addition to the ambient temperature. The temperature rises, and when it exceeds a certain temperature, there is a flaw.

在逆變器內係除了電力用半導體裝置以外使用驅動電力用半導體裝置的驅動電路及控制驅動電路的控制電路。驅動電路係除驅動電力用半導體裝置的閘極驅動電路以外為了保護電力用半導體裝置免於高溫等所致的破壞而具有 過電流保護及過熱保護功能。例如,在電力用半導體裝置係內建溫度檢測用的二極體,使電流從驅動電路內的電流源流出,利用二極體的電流-溫度特性(溫度變高時,相對於相同的電流值的順向電壓(VF)變低的特性),而以驅動電路內的比較器判斷電力用半導體裝置的晶片的溫度是否為對應於基準電壓的溫度以上。並且,依二極體的檢測溫度成為設定值以上的情況下,係對控制電路輸出警示信號,同時對閘極驅動電路亦輸出信號而強制遮斷電力用半導體裝置。另外,輸出警示信號的情況下,係在控制電路亦進行裝置的強制停止。 A drive circuit for driving a power semiconductor device and a control circuit for controlling the drive circuit are used in addition to the power semiconductor device in the inverter. The drive circuit has a function of protecting the power semiconductor device from damage due to high temperature or the like in addition to the gate drive circuit for driving the power semiconductor device. Over current protection and overheat protection. For example, a diode for temperature detection is built in a power semiconductor device, and a current flows out from a current source in the drive circuit, and the current-temperature characteristic of the diode is used (when the temperature becomes high, the same current value is used) The forward voltage (VF) becomes low, and the comparator in the drive circuit determines whether the temperature of the wafer of the power semiconductor device is equal to or higher than the temperature corresponding to the reference voltage. In addition, when the detection temperature of the diode is equal to or higher than the set value, the control circuit outputs an alarm signal, and also outputs a signal to the gate drive circuit to forcibly interrupt the power semiconductor device. In addition, when the warning signal is output, the control circuit also performs a forced stop of the device.

電力用半導體裝置,係例如絕緣閘雙極電晶體(IGBT),具備切換元件與溫度檢測用二極體於一個半導體基板上。利用圖1說明有關溫度檢測用二極體的VF的變異性。圖1係針對溫度檢測用二極體的VF與溫度的關係(溫度特性)作繪示的圖。在圖1係示出2階串聯連接了溫度檢測用二極體的情況下的溫度特性(使200μA的偏壓電流流過時的溫度(℃)與溫度檢測用二極體的VF(V)的關係)。 The power semiconductor device is, for example, an insulated gate bipolar transistor (IGBT), and includes a switching element and a temperature detecting diode on one semiconductor substrate. The variability of the VF of the temperature detecting diode will be described with reference to Fig. 1 . Fig. 1 is a graph showing the relationship between VF and temperature (temperature characteristics) of a diode for temperature detection. Fig. 1 shows temperature characteristics in the case where the temperature detecting diode is connected in series in the second order (temperature (°C) when a bias current of 200 μA flows and VF (V) of the temperature detecting diode) relationship).

IGBT的溫度檢測用二極體的VF,係例如,如以圖1所示於常溫(25℃)±6%的變異性,亦加上溫度係數時於175℃,係成為±20%以上的變異性。虛線A為典型的值,實線B、C係作為表示25℃下的±6%的變異性的上限及下限的線而為與虛線A平行的(與典型的值使溫度係數相同的)直線。實線D、C係將25℃下的±6%的變異性的上限 及下限、及175℃下的±20%的變異性的上限及下限分別連結的直線。顯示溫度係數的變異性隨著溫度的上升變大。一般而言,溫度異常檢測的設定,係基於此IGBT的變異容許度而計算,故存在縮小IGBT的容許動作溫度範圍的問題。為此,為了在安裝了IGBT、驅動電路、控制電路等之板的出貨檢查時進行IGBT的特性變異修正,產生VF的檢測電路的電路常數變更等之調整工時。 The VF of the diode for temperature detection of the IGBT is, for example, variability of ± 6% at room temperature (25 ° C) as shown in Fig. 1, and ± 5% or more at 175 ° C when the temperature coefficient is added. Variability. The broken line A is a typical value, and the solid lines B and C are straight lines parallel to the broken line A (the same temperature coefficient as a typical value) as a line indicating the upper limit and the lower limit of the variability of ±6% at 25 ° C. . Solid line D and C are the upper limit of ±6% variability at 25 °C The lower limit and the straight line connecting the upper limit and the lower limit of the variability of ±20% at 175 °C. The variability of the temperature coefficient is shown to increase as the temperature rises. In general, since the setting of the temperature abnormality detection is calculated based on the variation tolerance of the IGBT, there is a problem that the allowable operating temperature range of the IGBT is reduced. For this reason, in order to perform the characteristic variation correction of the IGBT at the time of shipment inspection of the board in which the IGBT, the drive circuit, the control circuit, etc. are mounted, the adjustment time of the circuit constant of the detection circuit of the VF is changed.

<實施形態> <Embodiment>

接著,利用圖2說明有關實施形態相關之電子裝置。圖2係實施形態相關之電子裝置的方塊圖。實施形態相關之電子裝置1係具備:電力用半導體裝置10、第1半導體積體電路裝置20、及第2半導體積體電路裝置30。電力用半導體裝置10係具備切換元件11與溫度檢測用二極體12。第1半導體積體電路裝置20係具備驅動切換元件11的驅動電路21與針對溫度檢測用二極體12的VF作檢測的檢測電路22。第2半導體積體電路裝置30,係具備:控制驅動電路21的控制部CC;取得戶外溫度資訊的戶外溫度取得部TA;保存溫度檢測用二極體12的溫度特性(K)與基於第1溫度(A)下的來自檢測電路22的信號的第1值(VF(A))的記憶裝置33;以及從基於來自檢測電路22的信號的第3值(VF(N))、溫度特性(K)、以戶外溫度取得部TA所取得的第1溫度(A)、第1值(VF(A))算出電力用半導體裝置10的溫度(N)的溫度演算處理部TC。 Next, an electronic device according to the embodiment will be described with reference to Fig. 2 . 2 is a block diagram of an electronic device related to an embodiment. The electronic device 1 according to the embodiment includes the power semiconductor device 10, the first semiconductor integrated circuit device 20, and the second semiconductor integrated circuit device 30. The power semiconductor device 10 includes a switching element 11 and a temperature detecting diode 12. The first semiconductor integrated circuit device 20 includes a drive circuit 21 that drives the switching element 11 and a detection circuit 22 that detects the VF of the temperature detecting diode 12. The second semiconductor integrated circuit device 30 includes a control unit CC that controls the drive circuit 21, an outdoor temperature acquisition unit TA that acquires outdoor temperature information, and a temperature characteristic (K) for storing the temperature detection diode 12 and based on the first The memory device 33 of the first value (VF(A)) of the signal from the detection circuit 22 at the temperature (A); and the third value (VF(N)) and the temperature characteristic (based on the signal from the detection circuit 22) K) The temperature calculation processing unit TC that calculates the temperature (N) of the power semiconductor device 10 by the first temperature (A) and the first value (VF (A)) acquired by the outdoor temperature acquisition unit TA.

運用電力用半導體裝置的溫度特性(K)而算出電力用半導體裝置的溫度,故可達成溫度測定精度的提升。藉此,電力用半導體裝置的動作容許範圍的設定時,無須基於VF的變異容許度,而例如將異常檢測溫度設定為低而決定對應於其的基準電壓,可達成動作容許範圍的擴大、熱餘裕的最佳化(晶片尺寸削減)等。 Since the temperature of the power semiconductor device is calculated using the temperature characteristic (K) of the power semiconductor device, the temperature measurement accuracy can be improved. Therefore, when the operation tolerance range of the power semiconductor device is set, it is not necessary to set the abnormality detection temperature to be low, and the reference voltage corresponding thereto can be determined, for example, and the operation tolerance range can be expanded and heat can be achieved. Yu Yu's optimization (wafer size reduction) and so on.

[實施例1] [Example 1]

首先,利用圖3說明有關實施形態的第1實施例相關之電子裝置A的構成。 First, the configuration of the electronic device A according to the first embodiment of the embodiment will be described with reference to Fig. 3 .

圖3係針對實施例1相關之電子裝置的構成作繪示的方塊圖。實施例1相關之電子裝置1A係具備:是電力用半導體裝置的IGBT10A、是第1半導體積體電路裝置的驅動器IC20A、及是第2半導體積體電路裝置的控制電路30A。 3 is a block diagram showing the configuration of an electronic device related to Embodiment 1. The electronic device 1A according to the first embodiment includes an IGBT 10A that is a power semiconductor device, a driver IC 20A that is a first semiconductor integrated circuit device, and a control circuit 30A that is a second semiconductor integrated circuit device.

IGBT10係將切換元件11與溫度檢測用二極體12安裝於1個半導體基板上從而形成。 The IGBT 10 is formed by mounting the switching element 11 and the temperature detecting diode 12 on one semiconductor substrate.

驅動器IC20,係將是切換元件11的驅動電路的閘極電路(GATE CIRCUIT)21、是溫度檢測用二極體12的VF的檢測電路的溫度檢測用A/D轉換器22、及供應往溫度檢測用二極體12的偏壓電流的電流偏壓電路(CURRENT BIAS)23安裝於1個半導體基板上從而形成。閘極電路21係為了基於來自控制電路30的PWM(Pulse Width Modulation)信號將切換元件11導通/關斷而生成將閘極電 極驅動的驅動信號(DRV)。在閘極電路21與切換元件11之間設有電阻41。 The driver IC 20 is a gate circuit (GATE CIRCUIT) 21 that is a drive circuit of the switching element 11, a temperature detecting A/D converter 22 that is a VF detection circuit of the temperature detecting diode 12, and a supply temperature. A current bias circuit (CURRENT BIAS) 23 for detecting a bias current of the diode 12 is formed by being mounted on one semiconductor substrate. The gate circuit 21 generates a gate electrode for turning on/off the switching element 11 based on a PWM (Pulse Width Modulation) signal from the control circuit 30. Polar drive drive signal (DRV). A resistor 41 is provided between the gate circuit 21 and the switching element 11.

溫度檢測用A/D轉換器22係具備比較器221與三角波產生電路222。在三角波產生電路222係外置有電容器42與電阻群43。電阻群43係生成三角波產生用基準電壓。 The temperature detecting A/D converter 22 includes a comparator 221 and a triangular wave generating circuit 222. A capacitor 42 and a resistor group 43 are externally disposed in the triangular wave generating circuit 222. The resistor group 43 generates a reference voltage for generating a triangular wave.

IGBT10A的晶片溫度,係使用IGBT10A內的溫度檢測用二極體12的順向電壓,而進行測定。 The wafer temperature of the IGBT 10A is measured by using the forward voltage of the temperature detecting diode 12 in the IGBT 10A.

使定電流(IF)從驅動器IC20A的電流偏壓電路23流至溫度檢測用二極體12,將以比較器221比較VF與來自三角波產生電路222的三角波信號後的PWM的溫度感測輸出信號(TSP)經由隔離器24發送至控制電路30,使得可從PWM的工作比測定溫度。隔離器24係以將以配線而形成的晶片型變換器以層間膜作絕緣而成的磁耦合傳達信號。 The constant current (IF) is caused to flow from the current bias circuit 23 of the driver IC 20A to the temperature detecting diode 12, and the temperature sensing output of the PWM after comparing the VF with the triangular wave signal from the triangular wave generating circuit 222 by the comparator 221 The signal (TSP) is sent to the control circuit 30 via the isolator 24 so that the temperature can be measured from the duty ratio of the PWM. The isolator 24 transmits a signal by magnetic coupling in which a wafer type transducer formed by wiring is insulated by an interlayer film.

控制電路30A係將CPU31、PWM電路(PWM CIRCUIT)32、記憶裝置(MEMORY)33、是與外部裝置的介面輸出入部的I/O介面(I/OIF)34、A/D轉換器(ADC)35、是與外部PC(Personal Computer)的介面部的PC介面(PCIF)安裝於1個半導體基板上從而形成,以例如微電腦單元(MCU)而構成。記憶裝置33係以快閃記憶體等的可電氣重寫的非揮發性記憶體而構成為優選。此外,CPU31執行的程式係儲存於快閃記憶體等的可電氣重寫的非揮發性記憶體為優選,亦可儲存於記憶裝置33。 The control circuit 30A is a CPU 31, a PWM circuit (PWM CIRCUIT) 32, a memory device (MEMORY) 33, an I/O interface (I/OIF) 34, and an A/D converter (ADC) that are interface with an external device. 35. A PC interface (PCIF) of an external PC (Personal Computer) is mounted on one semiconductor substrate, and is formed, for example, by a microcomputer unit (MCU). The memory device 33 is preferably configured by an electrically rewritable non-volatile memory such as a flash memory. Further, the program executed by the CPU 31 is preferably stored in an electrically rewritable non-volatile memory such as a flash memory or the like, and may be stored in the memory device 33.

利用圖4說明有關控制電路30A。 The related control circuit 30A will be described using FIG.

圖4係針對實施例1相關之控制電路的功能作繪示的方塊圖。控制電路30A係具備:戶外溫度切換部311、溫度演算處理部314及驅動用PWM控制部318。以虛線表示的方塊係軟體的處理(CPU31執行程式的處理),惟並非限定於此者,亦能以例如硬碟而構成。 4 is a block diagram showing the function of the control circuit related to Embodiment 1. The control circuit 30A includes an outdoor temperature switching unit 311, a temperature calculation processing unit 314, and a driving PWM control unit 318. The processing of the block software indicated by the broken line (the CPU 31 executes the processing of the program) is not limited thereto, and can be configured by, for example, a hard disk.

戶外溫度切換部311係由平均化處理部312與選擇部313而構成。將是熱敏電阻等的溫度感測器的戶外溫度檢測器44的輸出以A/D轉換器35轉換,以選擇部313選擇:以平均化處理部312對輸入信號作取樣並將複數分平均化而除去雜訊的信號、或從PC45經由PC介面36而輸入的環境溫度的溫度設定值。如後所述,以PC45進行恆溫槽等的可設定電子裝置1A的環境溫度的空間的溫度設定,或PC45取得溫度設定值,故PC45可將環境溫度的設定值輸入至控制電路30A。環境溫度係能以戶外溫度檢測器44或PC45的任一者作檢測,故亦可無任一方。此情況下,亦可無戶外溫度切換部311的選擇部313,藉PC45檢測環境溫度的情況下,亦可無平均化處理部312。 The outdoor temperature switching unit 311 is configured by the averaging processing unit 312 and the selection unit 313. The output of the outdoor temperature detector 44, which is a temperature sensor of a thermistor or the like, is converted by the A/D converter 35, and is selected by the selecting portion 313 to sample the input signal by the averaging processing portion 312 and average the complex signals. The signal of the noise is removed, or the temperature setting of the ambient temperature input from the PC 45 via the PC interface 36. As will be described later, the PC 45 performs temperature setting of the space in which the temperature of the electronic device 1A of the electronic device 1A can be set, or the PC 45 acquires the temperature setting value. Therefore, the PC 45 can input the set value of the ambient temperature to the control circuit 30A. The ambient temperature can be detected by either the outdoor temperature detector 44 or the PC 45, so that none of them can be used. In this case, the selection unit 313 of the outdoor temperature switching unit 311 may not have the averaging processing unit 312 when the ambient temperature is detected by the PC 45.

溫度演算處理部314,係由溫度係數計算部315、溫度值轉換部316、及溫度修正部317構成。將是選擇部313的輸出的溫度資訊及以溫度值轉換部316轉換了溫度檢測用A/D轉換器22的輸出的溫度檢測用二極體的電壓資訊被輸入溫度係數計算部315。將以溫度係數計算部315計算的溫度係數、是選擇部313的輸出的溫度資訊及 以溫度值轉換部316轉換了溫度檢測用A/D轉換器22的輸出的溫度檢測用二極體的電壓資訊儲存於記憶裝置33。溫度修正部317係基於以溫度值轉換部316而轉換的溫度檢測用二極體的電壓資訊與儲存於記憶裝置33的資訊而修正為在驅動用PWM控制部318所使用的溫度資訊。 The temperature calculation processing unit 314 is composed of a temperature coefficient calculation unit 315, a temperature value conversion unit 316, and a temperature correction unit 317. The temperature information of the output of the selection unit 313 and the voltage information of the temperature detecting diode that has been converted by the temperature value conversion unit 316 by the temperature detecting A/D converter 22 are input to the temperature coefficient calculating unit 315. The temperature coefficient calculated by the temperature coefficient calculation unit 315 is the temperature information of the output of the selection unit 313 and The voltage information of the temperature detecting diode that has been converted by the temperature value converting unit 316 to the output of the temperature detecting A/D converter 22 is stored in the memory device 33. The temperature correction unit 317 corrects the temperature information used by the driving PWM control unit 318 based on the voltage information of the temperature detecting diode converted by the temperature value converting unit 316 and the information stored in the memory device 33.

另外,將CPU31執行的程式往控制電路30A的非揮發性記憶體的儲存係可為以下的任一者。 Further, the storage system executed by the CPU 31 to the nonvolatile memory of the control circuit 30A may be any of the following.

(1)是第2半導體積體電路裝置的控制電路30A的晶圓製造時 (1) When the wafer of the control circuit 30A of the second semiconductor integrated circuit device is manufactured

(2)封入於控制電路30A的封裝體後、安裝於電子裝置1A的印刷基板前 (2) After being enclosed in the package of the control circuit 30A, it is mounted in front of the printed circuit board of the electronic device 1A.

(3)安裝電子裝置1A的印刷基板後(從PC45經由PC介面36而儲存) (3) After the printed circuit board of the electronic device 1A is mounted (stored from the PC 45 via the PC interface 36)

利用圖5~圖7說明有關是電子裝置1A的製造方法的一程序的溫度檢測用二極體12的溫度特性資料的取得方法。 A method of acquiring temperature characteristic data of the temperature detecting diode 12 which is a program of the manufacturing method of the electronic device 1A will be described with reference to FIGS. 5 to 7.

圖5係供於說明實施例1相關之電子裝置的製造方法用的圖。圖6係供於說明實施例1相關之以溫度係數計算部處理而計算溫度係數用的圖。圖7係供於求出實施例1相關之以溫度係數計算部處理而求出溫度係數用的流程圖。 Fig. 5 is a view for explaining a method of manufacturing an electronic device according to the first embodiment. Fig. 6 is a view for explaining the calculation of the temperature coefficient by the temperature coefficient calculation unit in the first embodiment. Fig. 7 is a flowchart for obtaining the temperature coefficient obtained by the temperature coefficient calculation unit in the first embodiment.

將示於圖5的溫度檢測用二極體的溫度特性資料儲存於電子裝置的程序係在電子裝置的製程中的測試程序等進 行。準備具備IGBT10A、驅動器IC20A、及控制電路30A的電子裝置1A(步驟S10)。將電子裝置1A搬入恆溫槽等的可設定環境溫度的空間,將戶外溫度檢測器44、PC45等連接。以後述之方法取得溫度檢測用二極體12的溫度特性(步驟S20)。從電子裝置1A將戶外溫度檢測器44、PC45等卸除,從可設定環境溫度的空間搬出。 The program for storing the temperature characteristic data of the temperature detecting diode shown in FIG. 5 in the electronic device is a test program in the process of the electronic device. Row. The electronic device 1A including the IGBT 10A, the driver IC 20A, and the control circuit 30A is prepared (step S10). The electronic device 1A is carried into a space where the ambient temperature can be set, such as a constant temperature bath, and the outdoor temperature detector 44, the PC 45, and the like are connected. The temperature characteristics of the temperature detecting diode 12 are obtained by the method described later (step S20). The outdoor temperature detector 44, the PC 45, and the like are removed from the electronic device 1A, and are carried out from a space in which the ambient temperature can be set.

如示於圖6,從第1溫度(A)下的VF測定值(VF(A))與第2溫度(H)下的VF測定值(VF(H))計算溫度係數。第1溫度(A)係例如常溫(25℃),第2溫度(H)係高溫(100℃)。 As shown in Fig. 6, the temperature coefficient is calculated from the VF measurement value (VF (A)) at the first temperature (A) and the VF measurement value (VF (H)) at the second temperature (H). The first temperature (A) is, for example, normal temperature (25 ° C), and the second temperature (H) is high temperature (100 ° C).

如示於圖7,首先,使IGBT10A關斷(步驟S21)。使IGBT10關斷,使得IGBT10的晶片溫度係成為與環境溫度同等。接著,將環境溫度設定為是第1溫度(A)的常溫(步驟S22)。環境溫度係從戶外溫度檢測器44或PC45輸入。接著,基於是環境溫度為第1溫度下的IGBT10A(溫度檢測用二極體12)的溫度資訊的來自溫度檢測用A/D轉換器22的信號以溫度值轉換部316計算VF,將此作為第1值(VF(A))而儲存於記憶裝置33(步驟S23)。接著,將環境溫度設定為是第2溫度(H)的高溫(步驟S24)。環境溫度係從戶外溫度檢測器44或PC45輸入。接著,基於是環境溫度為第2溫度下的IGBT10A(溫度檢測用二極體12)的溫度資訊的來自溫度檢測用A/D轉換器22的信號以溫度值轉換部316計算VF,將此作為第2值(VF(H))而儲存於記憶裝置33(步驟S25)。依下述的式(1),算出溫度檢測用二 極體12的溫度係數(K),儲存於記憶裝置33(步驟S26)。 As shown in Fig. 7, first, the IGBT 10A is turned off (step S21). The IGBT 10 is turned off so that the wafer temperature of the IGBT 10 is equal to the ambient temperature. Next, the ambient temperature is set to the normal temperature of the first temperature (A) (step S22). The ambient temperature is input from the outdoor temperature detector 44 or the PC 45. Then, the VF is calculated by the temperature value conversion unit 316 based on the signal from the temperature detecting A/D converter 22, which is the temperature information of the IGBT 10A (the temperature detecting diode 12) at the first temperature. The first value (VF(A)) is stored in the memory device 33 (step S23). Next, the ambient temperature is set to a high temperature of the second temperature (H) (step S24). The ambient temperature is input from the outdoor temperature detector 44 or the PC 45. Then, the VF is calculated by the temperature value conversion unit 316 based on the signal from the temperature detecting A/D converter 22, which is the temperature information of the IGBT 10A (the temperature detecting diode 12) at the second temperature. The second value (VF(H)) is stored in the memory device 33 (step S25). Calculate the temperature detection two according to the following formula (1) The temperature coefficient (K) of the polar body 12 is stored in the memory device 33 (step S26).

K=(VF(H)-VF(A))/(H-A)[mV/℃]...(1) K = (VF (H) - VF (A)) / (H-A) [mV / ° C]. . . (1)

接著,利用圖8及圖9說明有關電子裝置的一般動作時的動作。另外,戶外溫度檢測器44、PC45在算出溫度係數時係需要,惟一般動作時係不需要。 Next, the operation at the time of the general operation of the electronic device will be described with reference to FIGS. 8 and 9. Further, the outdoor temperature detectors 44 and PC45 are required to calculate the temperature coefficient, but are not required for normal operation.

圖8係實施例1相關之控制電路之中主要針對溫度修正部的功能作繪示的方塊圖。圖9係實施例1相關之控制電路之中主要針對PWM控制部的功能作繪示的方塊圖。 Fig. 8 is a block diagram showing the function of the temperature correction unit mainly among the control circuits related to the first embodiment. Fig. 9 is a block diagram showing the functions of the PWM control unit mainly among the control circuits related to the first embodiment.

電子裝置1A的一般動作時的溫度測定方法示於圖8。 The temperature measurement method at the time of normal operation of the electronic device 1A is shown in FIG.

基於是IGBT10A(溫度檢測用二極體12)的溫度資訊的來自溫度檢測用A/D轉換器22的信號以溫度值轉換部316算出VF,將此作為第3值(VF(N))。溫度修正部317,係運用第3值(VF(N))、儲存於記憶裝置33的溫度係數(K)、第1溫度(A)及第1值(VF(A)),而依下述的式(2),算出IGBT10A的測定溫度(N)。 The signal from the temperature detecting A/D converter 22 based on the temperature information of the IGBT 10A (the temperature detecting diode 12) is calculated by the temperature value converting unit 316 as the third value (VF(N)). The temperature correcting unit 317 applies the third value (VF(N)), the temperature coefficient (K) stored in the memory device 33, the first temperature (A), and the first value (VF (A)), and In the equation (2), the measured temperature (N) of the IGBT 10A is calculated.

N=(VF(N)-VF(A))/K+A[℃]...(2) N=(VF(N)-VF(A))/K+A[°C]. . . (2)

如示於圖9,驅動用PWM控制部318係以生成是切換元件11的驅動信號(DRV)的PWM信號的方式控制PWM電路32。此外,驅動用PWM控制部318係具有以下功能:依以溫度演算處理部314而求出的IGBT10A的測定溫度結果,接近既定溫度的情況下係以抑制切換元件11的驅動的方式控制PWM電路32,或者超過既定溫度的 情況下係判斷為異常狀態,以關斷切換元件11的驅動的方式控制PWM電路32,而保護IGBT10A。 As shown in FIG. 9, the driving PWM control unit 318 controls the PWM circuit 32 so as to generate a PWM signal that is a driving signal (DRV) of the switching element 11. Further, the driving PWM control unit 318 has a function of controlling the PWM circuit 32 in such a manner as to suppress the driving of the switching element 11 when the measured temperature of the IGBT 10A obtained by the temperature calculation processing unit 314 is close to a predetermined temperature. Or more than a predetermined temperature In this case, it is determined that the abnormal state is present, and the PWM circuit 32 is controlled to turn off the driving of the switching element 11, and the IGBT 10A is protected.

依實施例1時,可包含溫度檢測用A/D轉換器等的電子裝置整體的特性而取得溫度檢測用二極體的溫度特性,使得精度佳的溫度測定成為可能。藉此,使得能以適切的溫度保護IGBT。 According to the first embodiment, the temperature characteristics of the temperature detecting diode can be obtained by including the characteristics of the entire electronic device such as the temperature detecting A/D converter, and the temperature measurement with high accuracy can be performed. Thereby, the IGBT can be protected at an appropriate temperature.

[實施例2] [Embodiment 2]

利用圖10說明有關實施例2相關之電子裝置1B的構成。 The configuration of the electronic device 1B relating to the second embodiment will be described with reference to FIG.

圖10係供於說明實施例2相關之電子裝置用的方塊圖。 Figure 10 is a block diagram for explaining an electronic device related to Embodiment 2.

實施例2相關之電子裝置1B,係具備:是電力用半導體裝置的IGBT10B、是第1半導體積體電路裝置的驅動器IC20B、及是第2半導體積體電路裝置的控制電路30B。 The electronic device 1B according to the second embodiment includes an IGBT 10B that is a power semiconductor device, a driver IC 20B that is a first semiconductor integrated circuit device, and a control circuit 30B that is a second semiconductor integrated circuit device.

IGBT10B係具備記憶晶片固有的ID碼的ID電路(ID CIRCUIT)13B。其他構成係如同IGBT10A。ID電路13B係以梯形電阻與電熔絲等而構成。 The IGBT 10B is provided with an ID circuit (ID CIRCUIT) 13B that stores an ID code unique to the wafer. The other components are like IGBT 10A. The ID circuit 13B is configured by a ladder resistor, an electric fuse, or the like.

驅動器IC20B係具備讀出ID電路13B的ID碼的ID讀出電路25B。其他構成係如同驅動器IC20A。ID讀出電路25B係將來自ID電路13B的電壓值與溫度檢測用A/D轉換器22同樣地轉換為PWM信號(數位的串列信號)。隔離器24B係如同隔離器24,惟隔離器的個數增加。 The driver IC 20B includes an ID read circuit 25B that reads the ID code of the ID circuit 13B. The other components are like the driver IC 20A. The ID read circuit 25B converts the voltage value from the ID circuit 13B into a PWM signal (digital serial signal) in the same manner as the temperature detecting A/D converter 22. The isolator 24B is like the isolator 24, but the number of isolators is increased.

控制電路30B係具備I/O介面34B與ID識認部 319。其他構成係如同控制電路30A。ID識認部319係基於來自ID讀出電路25B的信號而識認ID碼。 The control circuit 30B includes an I/O interface 34B and an ID identification unit. 319. The other configuration is like the control circuit 30A. The ID recognition unit 319 recognizes the ID code based on the signal from the ID read circuit 25B.

於IGBT10B的晶圓製造時的晶圓測試處理,實施常溫、高溫測試,將該情況下所獲得的IGBT10B的特性資料(VF(A)、VF(H)、K)與ID碼一起作為晶圓測定資料庫而儲存於外部記憶裝置46。另外,晶圓測試處理時切斷IGBT10B的ID電路13B的電熔絲等從而設定ID碼。 In the wafer test processing at the time of wafer fabrication of the IGBT 10B, the normal temperature and high temperature tests are performed, and the characteristic data (VF (A), VF (H), K) of the IGBT 10B obtained in this case is used as a wafer together with the ID code. The database is measured and stored in the external memory device 46. In the wafer test process, the electric fuse of the ID circuit 13B of the IGBT 10B is cut off to set the ID code.

利用圖11說明有關控制電路30B。 The related control circuit 30B will be described using FIG.

圖11係針對實施例2相關之控制電路的功能作繪示的方塊圖。實施例2相關之控制電路30B係除從PC介面36所輸入的溫度特性使用在溫度係數計算部315B、及追加經由I/O介面34B讀取ID碼而識認ID碼的ID識認部319以外,係如同控制電路30A。以虛線表示的方塊係軟體的處理(CPU31執行程式的處理),惟並非限定於此者,例如亦可為硬體。 Figure 11 is a block diagram showing the function of the control circuit associated with Embodiment 2. The control circuit 30B according to the second embodiment is used in the temperature coefficient calculation unit 315B in addition to the temperature characteristic input from the PC interface 36, and the ID identification unit 319 which recognizes the ID code by reading the ID code via the I/O interface 34B. Other than the control circuit 30A. The processing of the block software indicated by the broken line (the CPU 31 executes the processing of the program) is not limited thereto, and may be, for example, a hardware.

溫度演算處理部314B,係由溫度係數計算部315B、溫度值轉換部316、及溫度修正部317構成。是選擇部313的輸出的溫度資訊、將溫度檢測用A/D轉換器22的輸出以溫度值轉換部316所轉換的溫度檢測用二極體12的電壓資訊、及對應於ID識認部319從儲存著PC45的晶圓測定資料庫的外部記憶裝置(STORAGE)46所取得的ID碼的溫度係數(K)被輸入溫度係數計算部315B。將輸入溫度係數計算部315B的溫度係數(K)、是選擇部313的輸出的溫度資訊及以溫度值轉換部316轉換了溫度檢測用 A/D轉換器22的輸出的溫度檢測用二極體12的電壓資訊儲存於記憶裝置33。 The temperature calculation processing unit 314B is composed of a temperature coefficient calculation unit 315B, a temperature value conversion unit 316, and a temperature correction unit 317. The temperature information of the output of the selection unit 313, the voltage information of the temperature detecting diode 12 converted by the temperature value conversion unit 316, and the ID identification unit 319 corresponding to the output of the temperature detecting A/D converter 22 The temperature coefficient (K) of the ID code acquired from the external memory device (STORAGE) 46 storing the wafer measurement database of the PC 45 is input to the temperature coefficient calculation unit 315B. The temperature coefficient (K) of the input temperature coefficient calculation unit 315B, the temperature information of the output of the selection unit 313, and the temperature value conversion unit 316 are converted to the temperature detection unit. The voltage information of the temperature detecting diode 12 of the output of the A/D converter 22 is stored in the memory device 33.

利用圖12及圖13說明有關是實施例2相關之電子裝置1B的製造法的一程序的溫度檢測用二極體12的溫度特性資料的取得方法。 A method of acquiring temperature characteristic data of the temperature detecting diode 12 which is a program of the manufacturing method of the electronic device 1B according to the second embodiment will be described with reference to FIG. 12 and FIG.

圖12係供於說明實施例2相關之溫度係計算部處理用的流程圖。圖13係供於說明實施例2相關之溫度係計算部處理用的流程圖。 Fig. 12 is a flow chart for explaining the processing of the temperature system calculation unit according to the second embodiment. Fig. 13 is a flow chart for explaining the processing of the temperature system calculation unit according to the second embodiment.

電子裝置1B的製造方法,係除步驟S20外,如同實施例1。以下說明有關相當於步驟20的程序。 The manufacturing method of the electronic device 1B is the same as that of the first embodiment except for the step S20. The procedure corresponding to step 20 will be described below.

首先,讀取IGBT10B的ID碼(步驟S27)。接著,依ID碼從儲存著晶圓測定資料庫的外部記憶裝置46取得溫度係數(K),儲存於記憶裝置33(步驟S28)。接著,使IGBT10B關斷(步驟S21)。接著,將環境溫度設定為是第1溫度(A)的常溫(步驟S22)。環境溫度係從戶外溫度檢測器44或PC45輸入。接著,基於是環境溫度為第1溫度下的IGBT10B(溫度檢測用二極體12)的溫度資訊的來自溫度檢測用A/D轉換器22的信號以溫度值轉換部316算出VF,將此作為第1值(VF(A))而儲存於記憶裝置33(步驟S23)。另外,亦可將步驟S27、S28與步驟S21~S23調換。 First, the ID code of the IGBT 10B is read (step S27). Next, the temperature coefficient (K) is obtained from the external memory device 46 storing the wafer measurement database based on the ID code, and stored in the memory device 33 (step S28). Next, the IGBT 10B is turned off (step S21). Next, the ambient temperature is set to the normal temperature of the first temperature (A) (step S22). The ambient temperature is input from the outdoor temperature detector 44 or the PC 45. Then, the temperature value conversion unit 316 calculates VF based on the signal from the temperature detecting A/D converter 22, which is the temperature information of the IGBT 10B (the temperature detecting diode 12) at the first temperature. The first value (VF(A)) is stored in the memory device 33 (step S23). Alternatively, steps S27 and S28 may be exchanged with steps S21 to S23.

利用圖13說明有關包含驅動器IC20B而提高調整精度的情況。 The case where the driver IC 20B is included to improve the adjustment accuracy will be described with reference to FIG.

首先,讀取IGBT10B的ID碼(步驟S27)。接著,依 ID碼從儲存著晶圓測定資料庫的外部記憶裝置46取得第1值(VF(A))、第2值(VF(H))及溫度係數(K),儲存於記憶裝置33(步驟S28B)。接著,使IGBT10B關斷(步驟S21)。接著,將環境溫度設定為是第1溫度(A)的常溫(步驟S22)。環境溫度係從戶外溫度檢測器44或PC45輸入。接著,基於是環境溫度為第1溫度下的IGBT10B(溫度檢測用二極體12)的溫度資訊的來自溫度檢測用A/D轉換器22的信號以溫度值轉換部316算出VF,將此作為第4值(VF(A)’)(步驟S23B)。接著,進行第4值(VF(A)’)與晶圓測定資料庫的第1值(VF(A))的比較(步驟S29)。接著,判定第4值(VF(A)’)與第1值(VF(A))的差分是否為既定值以上(步驟S30)。差分為既定值以上的情況(在步驟S30為Yes的情況)下,係進行常溫A℃的溫度偏移(步驟S31)。以將VF(A)’代入式(2)的VF(N)而獲得的溫度N成為新的常溫A’的方式將常溫偏移。偏移值係A’與A的差分。另外,亦可將步驟S27、S28B與步驟S21~S23B調換。 First, the ID code of the IGBT 10B is read (step S27). Then, according to The ID code acquires the first value (VF (A)), the second value (VF (H)), and the temperature coefficient (K) from the external memory device 46 storing the wafer measurement database, and stores it in the memory device 33 (step S28B). ). Next, the IGBT 10B is turned off (step S21). Next, the ambient temperature is set to the normal temperature of the first temperature (A) (step S22). The ambient temperature is input from the outdoor temperature detector 44 or the PC 45. Then, the temperature value conversion unit 316 calculates VF based on the signal from the temperature detecting A/D converter 22, which is the temperature information of the IGBT 10B (the temperature detecting diode 12) at the first temperature. The fourth value (VF(A)') (step S23B). Next, a comparison is made between the fourth value (VF(A)') and the first value (VF(A)) of the wafer measurement database (step S29). Next, it is determined whether or not the difference between the fourth value (VF(A)') and the first value (VF(A)) is equal to or greater than a predetermined value (step S30). When the difference is equal to or greater than the predetermined value (in the case of Yes in step S30), the temperature shift at normal temperature A °C is performed (step S31). The normal temperature is shifted so that the temperature N obtained by substituting VF(A)' into the VF(N) of the formula (2) becomes the new normal temperature A'. The offset value is the difference between A' and A. Alternatively, steps S27 and S28B may be exchanged with steps S21 to S23B.

此外,在本實施例係於步驟S28或步驟S28B從儲存於外部記憶裝置46的晶圓測定資料庫取得溫度係數(K)等而儲存於記憶裝置33,惟亦可作成在步驟S27前預先將與複數個ID碼對應的溫度係數(K)等儲存於記憶裝置33。 In addition, in the present embodiment, the temperature coefficient (K) or the like is obtained from the wafer measurement database stored in the external memory device 46 in step S28 or step S28B and stored in the memory device 33, but may be prepared in advance before step S27. A temperature coefficient (K) or the like corresponding to a plurality of ID codes is stored in the memory device 33.

電子裝置1B的一般動作時的動作係如同電子裝置1A。 The operation of the electronic device 1B in the normal operation is like the electronic device 1A.

基於是IGBT10B(溫度檢測用二極體12)的溫度資訊的來自溫度檢測用A/D轉換器22的信號以溫度值轉換部316算出VF,將此作為第3值(VF(N))。溫度修正部317,係運用第3值(VF(N))、儲存於記憶裝置33的溫度係數(K)、第1溫度(A)及第1值(VF(A)),而依上述的式(2),算出IGBT10B的測定溫度(N)。 The signal from the temperature detecting A/D converter 22 based on the temperature information of the IGBT 10B (the temperature detecting diode 12) is calculated by the temperature value converting unit 316 as the third value (VF(N)). The temperature correcting unit 317 applies the third value (VF(N)), the temperature coefficient (K) stored in the memory device 33, the first temperature (A), and the first value (VF(A)), as described above. In the formula (2), the measured temperature (N) of the IGBT 10B is calculated.

驅動用PWM控制部318係以生成是切換元件11的驅動信號(DRV)的PWM信號的方式控制PWM電路32。此外,驅動用PWM控制部318係具有以下功能:依以溫度演算處理部314B而求出的IGBT10B的測定溫度結果,接近既定溫度的情況下係以抑制切換元件11的驅動的方式控制PWM電路32,或者超過既定溫度的情況下係判斷為異常狀態,以關斷切換元件11的驅動的方式控制PWM電路32,而保護IGBT10B。 The drive PWM control unit 318 controls the PWM circuit 32 so as to generate a PWM signal that is a drive signal (DRV) of the switching element 11. Further, the driving PWM control unit 318 has a function of controlling the PWM circuit 32 in such a manner as to suppress the driving of the switching element 11 when the measured temperature of the IGBT 10B obtained by the temperature calculation processing unit 314B is close to a predetermined temperature. When it exceeds a predetermined temperature, it is judged to be an abnormal state, and the PWM circuit 32 is controlled to turn off the driving of the switching element 11, and the IGBT 10B is protected.

依實施例2時,無須變化如實施例1的環境溫度而取得溫度特性,故可削減調整工時。此外,一般動作時係獲得與實施例1同樣的效果。 According to the second embodiment, the temperature characteristics can be obtained without changing the ambient temperature of the first embodiment, so that the adjustment man-hour can be reduced. Further, in the normal operation, the same effects as in the first embodiment were obtained.

[實施例3] [Example 3]

利用圖14說明有關實施例3相關之電子裝置1C的構成。 The configuration of the electronic device 1C according to the third embodiment will be described with reference to FIG.

圖14係供於說明實施例3相關之電子裝置用的方塊圖。 Figure 14 is a block diagram for explaining an electronic device related to Embodiment 3.

實施例3相關之電子裝置1C,係具備:是電力用半導 體裝置的IGBT10C、是第1半導體積體電路裝置的驅動器IC20C、及是第2半導體積體電路裝置的控制電路30C。 The electronic device 1C according to the third embodiment is provided with: a semiconductor semi-conductor The IGBT 10C of the bulk device is the driver IC 20C of the first semiconductor integrated circuit device and the control circuit 30C of the second semiconductor integrated circuit device.

IGBT10C係具備針對溫度檢測用二極體12的溫度特性作記憶的ID電路(ID CIRCUIT)13C。其他構成係如同IGBT10B。ID電路13C係以梯形電阻與電熔絲等而構成。 The IGBT 10C includes an ID circuit (ID CIRCUIT) 13C that memorizes the temperature characteristics of the temperature detecting diode 12. The other components are like IGBT 10B. The ID circuit 13C is configured by a ladder resistor, an electric fuse, or the like.

驅動器IC20C係具備讀出ID電路13C的溫度特性資料的ID讀出電路25C。其他構成係如同驅動器IC20B。ID讀出電路25C係讀出資料不同惟構成係如同ID讀出電路25B。 The driver IC 20C includes an ID read circuit 25C that reads temperature characteristic data of the ID circuit 13C. The other components are like the driver IC 20B. The ID readout circuit 25C differs in reading data only like the ID readout circuit 25B.

控制電路30C係具備I/O介面34C與ID識認部319C,不具備PC介面36。其他構成係如同控制電路30B。ID識認部319C係基於來自ID讀出電路25C的信號而取得溫度特性資料。 The control circuit 30C includes an I/O interface 34C and an ID identification unit 319C, and does not include a PC interface 36. The other components are like the control circuit 30B. The ID recognition unit 319C acquires temperature characteristic data based on a signal from the ID read circuit 25C.

於IGBT10C的晶圓製造時的晶圓測試處理,實施常溫、高溫測試,從該情況下所獲得的IGBT10C的溫度檢測用二極體12的溫度特性(第1值(VF(A))、第2值(VF(H))、第1溫度(A)、第2溫度(H))算出溫度係數(K),切斷ID電路13C的電熔絲等從而設定溫度係數(K)。亦可代替溫度係數(K)而作成第1值(VF(A))、第2值(VF(H))係切斷電熔絲等從而設定。此情況下,設定常溫的VF的典型值與第1值(VF(A))的差分資料、高溫的VF的典型值與第2值(VF(H))的差分資料、及參考資料為優選。此情況下,ID讀出電路25C係將來自ID電路13C的3個電壓值 以時分割與溫度檢測用A/D轉換器22同樣地轉換為PWM信號為優選。 In the wafer test process at the time of wafer fabrication of the IGBT 10C, the temperature characteristic (the first value (VF(A))) of the temperature detecting diode 12 of the IGBT 10C obtained in this case is performed. The two values (VF (H)), the first temperature (A), and the second temperature (H) are calculated as temperature coefficients (K), and the electric fuses of the ID circuit 13C are cut off to set the temperature coefficient (K). Instead of the temperature coefficient (K), the first value (VF (A)) and the second value (VF (H)) may be set to cut off the electric fuse or the like. In this case, it is preferable to set the difference between the typical value of the normal temperature VF and the first value (VF(A)), the difference between the typical value of the high-temperature VF and the second value (VF(H)), and the reference material. . In this case, the ID readout circuit 25C is to take three voltage values from the ID circuit 13C. It is preferable to convert the time division into a PWM signal in the same manner as the A/D converter 22 for temperature detection.

利用圖15說明有關控制電路30C。 The related control circuit 30C will be described using FIG.

圖15係針對實施例3相關之控制電路的功能作繪示的方塊圖。 Figure 15 is a block diagram showing the function of the control circuit associated with Embodiment 3.

實施例3相關之控制電路30C係除不具有PC介面36、在戶外溫度切換部311C不具有選擇部313及追加經由I/O介面34C讀出溫度檢測用二極體12的溫度特性資料的ID識認部319C以外,係如同控制電路30A。以虛線表示的方塊係軟體的處理(CPU31執行程式的處理),惟並非限定於此者,例如亦可為硬體。 The control circuit 30C according to the third embodiment has the PC interface 36, the outdoor temperature switching unit 311C does not have the selection unit 313, and the ID of the temperature characteristic data of the temperature detecting diode 12 is read via the I/O interface 34C. The control unit 30A is similar to the recognition unit 319C. The processing of the block software indicated by the broken line (the CPU 31 executes the processing of the program) is not limited thereto, and may be, for example, a hardware.

溫度演算處理部314C,係由溫度係數計算部315C、溫度值轉換部316、及溫度修正部317構成。是平均間處理部312的輸出的溫度資訊、將溫度檢測用A/D轉換器22的輸出以溫度值轉換部316所轉換的溫度檢測用二極體12的電壓資訊、及來自ID識認部319C的溫度係數(K)被輸入溫度係數計算部315C。將輸入溫度係數計算部315C的溫度係數(K)、是平均化處理部312的輸出的溫度資訊及以溫度值轉換部316轉換了溫度檢測用A/D轉換器22的輸出的溫度檢測用二極體12的電壓資訊儲存於記憶裝置33。 The temperature calculation processing unit 314C is composed of a temperature coefficient calculation unit 315C, a temperature value conversion unit 316, and a temperature correction unit 317. The temperature information of the output of the average interval processing unit 312, the voltage information of the temperature detecting diode 12 converted by the temperature value converting unit 316, and the ID identifying unit from the output of the temperature detecting A/D converter 22 The temperature coefficient (K) of 319C is input to the temperature coefficient calculation unit 315C. The temperature coefficient (K) of the input temperature coefficient calculation unit 315C, the temperature information of the output of the averaging processing unit 312, and the temperature detection unit for converting the output of the temperature detecting A/D converter 22 by the temperature value conversion unit 316 The voltage information of the polar body 12 is stored in the memory device 33.

利用圖16說明有關是實施例3相關之電子裝置1C的製造法的一程序的溫度檢測用二極體12的溫度特性資料的取得方法。 A method of obtaining temperature characteristic data of the temperature detecting diode 12 which is a program of the manufacturing method of the electronic device 1C according to the third embodiment will be described with reference to FIG.

圖16係供於說明實施例3相關之溫度係計算部處理用的流程圖。 Fig. 16 is a flow chart for explaining the processing of the temperature system calculation unit according to the third embodiment.

將溫度檢測用二極體12的溫度特性資料儲存於電子裝置1C的程序,係除步驟S20外,如同實施例1。以下說明有關相當於步驟20的程序。 The procedure for storing the temperature characteristic data of the temperature detecting diode 12 in the electronic device 1C is the same as that in the first embodiment except for the step S20. The procedure corresponding to step 20 will be described below.

首先,讀取IGBT10C的ID碼(步驟S27C)。於此,在ID碼係包含溫度係數(K)、相當於第1值(VF(A))之值、及相當於第2值(VF(H))之值等。接著,將含於ID碼的溫度係數(K)、或從含於ID碼的資訊所算出之溫度係數(K)儲存於記憶裝置33(步驟S28C)。接著,使IGBT10C關斷(步驟S21)。接著,將環境溫度設定為是第1溫度(A)的常溫(步驟S22)。環境溫度係從戶外溫度檢測器44輸入。接著,基於是環境溫度為第1溫度下的IGBT10C(溫度檢測用二極體12)的溫度資訊的來自溫度檢測用A/D轉換器22的信號以溫度值轉換部316算出VF,將此作為第1值(VF(A))而儲存於記憶裝置33(步驟S23)。 First, the ID code of the IGBT 10C is read (step S27C). Here, the ID code includes a temperature coefficient (K), a value corresponding to the first value (VF (A)), and a value corresponding to the second value (VF (H)). Next, the temperature coefficient (K) included in the ID code or the temperature coefficient (K) calculated from the information contained in the ID code is stored in the memory device 33 (step S28C). Next, the IGBT 10C is turned off (step S21). Next, the ambient temperature is set to the normal temperature of the first temperature (A) (step S22). The ambient temperature is input from the outdoor temperature detector 44. Then, the temperature value conversion unit 316 calculates the VF based on the signal from the temperature detecting A/D converter 22, which is the temperature information of the IGBT 10C (the temperature detecting diode 12) at the first temperature. The first value (VF(A)) is stored in the memory device 33 (step S23).

電子裝置1C的一般動作時的動作係如同電子裝置1A。 The operation of the electronic device 1C in the normal operation is like the electronic device 1A.

基於是IGBT10C(溫度檢測用二極體12)的溫度資訊的來自溫度檢測用A/D轉換器22的信號以溫度值轉換部316算出VF,將此作為第3值(VF(N))。溫度修正部317,係運用第3值(VF(N))、儲存於記憶裝置33的溫度係數(K)、第1溫度(A)及第1值(VF(A)),而依上述的式(2),算出IGBT10C的測定溫度(N)。 The signal from the temperature detecting A/D converter 22 based on the temperature information of the IGBT 10C (the temperature detecting diode 12) is calculated by the temperature value converting unit 316 as the third value (VF(N)). The temperature correcting unit 317 applies the third value (VF(N)), the temperature coefficient (K) stored in the memory device 33, the first temperature (A), and the first value (VF(A)), as described above. In the formula (2), the measured temperature (N) of the IGBT 10C is calculated.

驅動用PWM控制部318係以生成是切換元件11的驅動信號(DRV)的PWM信號的方式控制PWM電路32。此外,驅動用PWM控制部318係具有以下功能:依以溫度演算處理部314C而求出的IGBT10C的測定溫度結果,接近既定溫度的情況下係以抑制切換元件11的驅動的方式控制PWM電路32,或者超過既定溫度的情況下係判斷為異常狀態,以關斷切換元件11的驅動的方式控制PWM電路32,而保護IGBT10C。 The drive PWM control unit 318 controls the PWM circuit 32 so as to generate a PWM signal that is a drive signal (DRV) of the switching element 11. Further, the driving PWM control unit 318 has a function of controlling the PWM circuit 32 in such a manner as to suppress the driving of the switching element 11 when the measured temperature of the IGBT 10C obtained by the temperature calculation processing unit 314C is close to a predetermined temperature. When it exceeds a predetermined temperature, it is judged to be an abnormal state, and the PWM circuit 32 is controlled to turn off the driving of the switching element 11, and the IGBT 10C is protected.

依實施例3時,不需如實施例1的環境溫度變化、如實施例2的與外部PC的連接等,故可削減調整程序。此外,一般動作時係獲得與實施例1同樣的效果。 According to the third embodiment, the environmental temperature change as in the first embodiment, the connection to the external PC as in the second embodiment, and the like are not required, so that the adjustment procedure can be reduced. Further, in the normal operation, the same effects as in the first embodiment were obtained.

[應用例] [Application example]

利用圖17說明有關實施例1至3的電子裝置的應用例相關之電動機系統。 A motor system relating to an application example of the electronic devices of the first to third embodiments will be described with reference to FIG.

如示於圖17,應用例相關之電動機系統200,係具備:3相馬達40、使用6個實施例1相關之IGBT10A的電力模組100、實施例1相關之6個的驅動器IC20A、實施例1相關之控制電路30A、電源電路(升壓電路)50與電池60。電力模組100,係在車輛等的驅動時係從藉電源電路50)而升壓的電壓,以使電流流於3相馬達40的各相的方式,將電力模組100內部的切換元件11作ON/OFF控制,藉此切換的頻率而使車輛等的速度變化。另外,電池60的電壓充分高時可不使用升壓電路。此外,在車輛等 的制動時,係同步於在3相馬達40的各相產生的電壓而將切換元件11作ON/OFF控制,進行所謂的整流動作,轉換為直流電壓而進行再生。 As shown in FIG. 17, the motor system 200 according to the application example includes a three-phase motor 40, a power module 100 using six IGBTs 10A according to the first embodiment, and six driver ICs 20A according to the first embodiment, and an embodiment. 1 related control circuit 30A, power supply circuit (boost circuit) 50 and battery 60. The power module 100 is a switching element 11 inside the power module 100 such that a voltage boosted by the power supply circuit 50 is driven when a vehicle or the like is driven to cause current to flow to each phase of the three-phase motor 40. The ON/OFF control is performed, and the speed of the vehicle or the like is changed by the frequency of the switching. Further, when the voltage of the battery 60 is sufficiently high, the booster circuit may not be used. In addition, in vehicles, etc. At the time of braking, the switching element 11 is turned ON/OFF in synchronization with the voltage generated in each phase of the three-phase motor 40, and a so-called rectification operation is performed to convert it into a DC voltage for regeneration.

3相馬達40係轉子以永久磁鐵而構成,電樞以線圈而構成,3相(U相、V相、W相)的電樞線圈係配置為120度間隔。線圈係△接線,電流不間斷地流於U相、V相、W相的3個線圈。 The three-phase motor 40 is composed of a permanent magnet, the armature is constituted by a coil, and the three-phase (U-phase, V-phase, and W-phase) armature coils are arranged at intervals of 120 degrees. The coil is Δ wired, and the current flows uninterruptedly to the three coils of the U phase, the V phase, and the W phase.

電力模組100,係以上橋臂的U相用IGBT10UU、上橋臂的V相用電力用IGBT10UV、上橋臂的W相用電力用IGBT10UW、下橋臂的U相用電力用IGBT10LU、下橋臂的V相用電力用IGBT10LV、及下橋臂的W相用電力用IGBT10LW而構成。於此,IGBT10UU、10UV、10UW、10LU、10LV、10LW的構成係如同使用於實施例1地IGBT10A。IGBT10UU、10UV、10UW、10LU、10LV、10LW係分別以具備切換元件11、並聯連接於切換元件11的射極與集極間的回流二極體D1、及溫度檢測用二極體12的半導體晶片而構成。回流二極體D1,係連接為使電流以與流於切換元件11的電流係逆向而流動。回流二極體D1係可不為與形成切換元件11與溫度檢測用二極體12的半導體基板相同的基板,此情況下係封入於與形成切換元件11與溫度檢測用二極體12的半導體基板相同的封裝體為優選。 The power module 100 is an IGBT 10UU for the U-phase of the upper arm, an IGBT 10UV for the V-phase power of the upper arm, an IGBT 10UW for the W-phase power of the upper arm, and an IGBT 10LU for the U-phase power of the lower arm. The V-phase power IGBT 10LV of the arm and the W-phase power IGBT 10LW of the lower arm are configured. Here, the configurations of the IGBTs 10UU, 10UV, 10UW, 10LU, 10LV, and 10LW are the same as those used in the IGBT 10A of the first embodiment. The IGBTs 10UU, 10UV, 10UW, 10LU, 10LV, and 10LW are semiconductor wafers including a switching element 11 and a reflow diode D1 connected in parallel between the emitter and the collector of the switching element 11 and the temperature detecting diode 12, respectively. And constitute. The return diode D1 is connected such that a current flows in a direction opposite to the current flowing through the switching element 11. The reflow diode D1 is not the same substrate as the semiconductor substrate on which the switching element 11 and the temperature detecting diode 12 are formed, and in this case, is sealed in the semiconductor substrate on which the switching element 11 and the temperature detecting diode 12 are formed. The same package is preferred.

可代替實施例1相關之IGBT10A、驅動器IC20A、控制電路30A,而使用實施例2相關之IGBT10B、驅動器 IC20B、控制電路30B,亦可使用實施例3相關之IGBT10C、驅動器IC20C、控制電路30C。 Instead of the IGBT 10A, the driver IC 20A, and the control circuit 30A related to the first embodiment, the IGBT 10B and the driver related to the second embodiment can be used. For the IC 20B and the control circuit 30B, the IGBT 10C, the driver IC 20C, and the control circuit 30C according to the third embodiment can be used.

在上述應用例係針對應用於將直流轉換成交流的逆變器之例作了說明,惟亦可應用於使用在電源電路(升壓電路)50的轉換器等的電力轉換裝置。 The above-described application example has been described with respect to an example of an inverter applied to convert a direct current into an alternating current, but can be applied to a power conversion device such as a converter used in a power supply circuit (boost circuit) 50.

電動機系統200係用作為HEV或EV等的動力源。電子裝置1A、1B、1C係用作為車載用電子裝置。 The motor system 200 is used as a power source for an HEV, an EV, or the like. The electronic devices 1A, 1B, and 1C are used as an in-vehicle electronic device.

[安裝例] [Installation example]

如上所述隔離器24、24B係由晶片型變換器而構成。以下,利用圖18說明有關晶片型變換器。 The separators 24, 24B are constituted by a wafer type converter as described above. Hereinafter, a wafer type converter will be described with reference to FIG.

圖18係供於說明實施例1至3相關之電子裝置的構成隔離器的晶片型變換器用的圖。 Fig. 18 is a view for explaining a wafer type converter constituting an isolator of the electronic device according to the first to third embodiments.

晶片型變換器241,係在具備發送脈衝產生電路242之側的晶片DIE1形成螺旋狀的線圈243,在其上隔著以矽氧化膜等的絕緣膜而形成的層間膜244而形成螺旋狀的線圈245,與具備接收脈衝檢測電路246之側的晶片DIE2以、接合電線247連接。換言之晶片型變換器241係形成於下層的線圈243與形成於上層的線圈245藉層間膜244絕緣,進行經由磁耦合248的信號傳送。例如,驅動器IC20A的晶片DIE1係作成與控制電路30A連接,於晶片DIE2係形成閘極電路21、溫度檢測用A/D轉換器22等。晶片DIE1與晶片DIE2係安裝於一個封裝體249。驅動器IC20B、20C亦可同樣地安裝。如此安裝時,在電動 機系統200,係可將控制電路30A以1封裝體、將驅動器IC20A以6封裝體而構成。以光耦合器構成隔離器的情況下,係進一步需要光耦合器的6封裝體。 In the wafer-type converter 241, a spiral coil 243 is formed on the wafer DIE1 on the side including the transmission pulse generating circuit 242, and an interlayer film 244 formed of an insulating film such as a tantalum oxide film is formed thereon to form a spiral shape. The coil 245 is connected to the wafer DIE2 on the side including the reception pulse detecting circuit 246, and the bonding wire 247. In other words, the wafer-type converter 241 is insulated from the coil 245 formed on the lower layer by the interlayer film 244, and the signal is transmitted via the magnetic coupling 248. For example, the wafer DIE1 of the driver IC 20A is connected to the control circuit 30A, and the gate circuit 21, the temperature detecting A/D converter 22, and the like are formed on the wafer DIE2. The wafer DIE1 and the wafer DIE2 are mounted on a package 249. The driver ICs 20B and 20C can also be mounted in the same manner. When installed like this, in electric In the machine system 200, the control circuit 30A can be configured in a single package and the driver IC 20A in a six package. In the case where the optical coupler constitutes the isolator, a 6-package of the optical coupler is further required.

利用圖19說明有關將使用實施例3的IGBT的電力模組與實施例3的驅動器IC連接之例。圖19係繪示電力模組的構成的圖。示出3相控制的1相位份。電力模組100C,係具備:3組IGBT10UC與回流二極體D1之組、及3組IGBT10LC與回流二極體D1之組。IGBT10UC、10LC的各者係具備切換元件11、溫度檢測用二極體12、及ID電路13C。IGBT10UC、10LC係如同實施例3相關之IGBT10C。 An example in which the power module using the IGBT of the third embodiment is connected to the driver IC of the third embodiment will be described with reference to FIG. Fig. 19 is a view showing the configuration of a power module. One phase share of 3-phase control is shown. The power module 100C includes a group of three sets of the IGBT 10UC and the reflow diode D1, and three sets of the IGBT 10LC and the return diode D1. Each of the IGBTs 10UC and 10LC includes a switching element 11, a temperature detecting diode 12, and an ID circuit 13C. The IGBTs 10UC and 10LC are the IGBT 10C as in the third embodiment.

電力模組100C,係具備:供於對IGBT10UC的切換元件11的閘極端子供應信號(Gate)用的閘極端子T1、供於從感測射極端子輸出感測電流(Isense)用的感測電流端子T2、供於對集極端子供應正電壓(DC+)用的電源端子(D+)、及供於從射極端子輸出驅動電流(Drive)用的驅動端子T6。此外,電力模組100C,係具備供於輸出IGBT10UC的溫度檢測用二極體12順向電壓(Temp)用的溫度檢測用端子T3與供於將接地電壓(GND)連接於陰極端子用的接地端子T4。 The power module 100C includes a gate terminal T1 for supplying a gate terminal signal (Gate) to the switching element 11 of the IGBT 10UC, and a sense of outputting a sense current (Isense) from the sensing emitter terminal. The current measuring terminal T2 is provided for a power supply terminal (D+) for supplying a positive voltage (DC+) to the collector terminal, and a driving terminal T6 for outputting a driving current (Drive) from the emitter terminal. Further, the power module 100C includes a temperature detecting terminal T3 for the forward voltage (Temp) of the temperature detecting diode 12 for outputting the IGBT 10UC, and a ground for connecting the ground voltage (GND) to the cathode terminal. Terminal T4.

電力模組100C,係具備:供於對IGBT10LC的切換元件11的閘極端子供應信號(Gate)用的閘極端子T1、供於從感測射極端子輸出感測電流(Isense)用的感測電流端子T2、及供於對射極端子供應負電壓(DC-)用的電 源端子T7。此外,電力模組100C,係具備供於輸出IGBT10LC的溫度檢測用二極體12順向電壓(Temp)用的溫度檢測用端子T3與供於將接地電壓(GND)連接於陰極端子用的接地端子T4。另外,IGBT10LC的集極端子係連接於驅動端子T6。 The power module 100C includes a gate terminal T1 for supplying a gate terminal signal (Gate) to the switching element 11 of the IGBT 10LC, and a sense of outputting a sense current (Isense) from the sensing emitter terminal. Measuring current terminal T2 and electricity for supplying negative voltage (DC-) to the emitter terminal Source terminal T7. In addition, the power module 100C includes a temperature detecting terminal T3 for the forward voltage (Temp) of the temperature detecting diode 12 for outputting the IGBT 10LC, and a ground for connecting the ground voltage (GND) to the cathode terminal. Terminal T4. Further, the collector terminal of the IGBT 10LC is connected to the drive terminal T6.

ID電路13C係以梯形電阻而構成,具備供於測定基準電阻值(Ref)用的端子、供於測定將電熔絲(e-Fuse)切斷而獲得的梯形電阻的電阻值(ID)用的端子、及供於連接於GND用的端子,分別連接於基準電阻值測定端子T9、電阻值測定端子T8、及接地端子T4。閘極端子T1、感測電流端子T2、溫度檢測用端子T3、接地端子T4、基準電阻值測定端子T9、及電阻值測定端子T8係連接於驅動器IC20C。 The ID circuit 13C is configured by a ladder resistor, and includes a terminal for measuring a reference resistance value (Ref) and a resistance value (ID) for measuring a ladder resistor obtained by cutting an electric fuse (e-Fuse). The terminal and the terminal for connection to GND are connected to the reference resistance value measurement terminal T9, the resistance value measurement terminal T8, and the ground terminal T4, respectively. The gate terminal T1, the sensing current terminal T2, the temperature detecting terminal T3, the ground terminal T4, the reference resistance value measuring terminal T9, and the resistance value measuring terminal T8 are connected to the driver IC 20C.

追加ID電路13C,從而將ID電路13C的GND端子與溫度檢測用二極體12的GND端子共通化,惟每1個驅動器IC需要2個端子及連接配線的追加,整體變成12本的端子及連接配線的追加。另外,使用實施例2的IGBT10B(ID電路13B)的情況下亦同,每1個驅動器IC需要2個端子及連接配線的追加,整體變成12本的端子及連接配線的追加。 When the ID circuit 13C is added, the GND terminal of the ID circuit 13C and the GND terminal of the temperature detecting diode 12 are shared, but two terminals and connection wiring are required for each driver IC, and the whole terminal becomes 12 terminals and Addition of connection wiring. In the case of using the IGBT 10B (ID circuit 13B) of the second embodiment, two terminals and connection wirings are required for each driver IC, and the entire terminal and the connection wiring are added to each other.

[實施例4] [Example 4]

實施例4係不經由驅動器IC而獲得IGBT的ID資訊(溫度特性資料)之例。利用圖20說明有關實施例 4相關之電子裝置1D的構成。 The fourth embodiment is an example of obtaining ID information (temperature characteristic data) of the IGBT without passing through the driver IC. A related embodiment will be described using FIG. 4 The structure of the related electronic device 1D.

圖20係供於說明實施例4相關之電子裝置用的方塊圖。 Figure 20 is a block diagram for explaining an electronic device related to Embodiment 4.

實施例4相關之電子裝置1D,係具備:是電力用半導體裝置的IGBT10D、是第1半導體積體電路裝置的驅動器IC20D、及是第2半導體積體電路裝置的控制電路30D。IGBT10D係如同IGBT10C,惟ID電路13C係不連接於驅動器IC20D。驅動器IC20D係如同驅動器IC20。控制電路30D係代替控制電路30C的I/O介面34C與ID識認部319C而具備PC介面36與ID識認部319D。其他構成係如同控制電路30C。ID識認部319D係基於來自外部記憶裝置46b的ID測定資料庫而取得溫度特性資料。 The electronic device 1D according to the fourth embodiment includes an IGBT 10D which is a power semiconductor device, a driver IC 20D which is a first semiconductor integrated circuit device, and a control circuit 30D which is a second semiconductor integrated circuit device. The IGBT 10D is like the IGBT 10C, but the ID circuit 13C is not connected to the driver IC 20D. The driver IC 20D is like the driver IC 20. The control circuit 30D includes a PC interface 36 and an ID identification unit 319D instead of the I/O interface 34C and the ID identification unit 319C of the control circuit 30C. The other components are like the control circuit 30C. The ID recognition unit 319D acquires temperature characteristic data based on the ID measurement database from the external storage device 46b.

說明有關往ID電路13C的溫度特性資料的寫入。 The writing of the temperature characteristic data to the ID circuit 13C will be described.

於IGBT10D的晶圓製造時的晶圓測試程序,藉未圖示的測試器(探測設備)實施常溫、高溫測試。測試器,係從該情況下所獲得的IGBT10D的溫度檢測用二極體12的溫度特性資料(第1值(VF(A))、第2值(VF(H))、第1溫度(A)、第2溫度(H))算出溫度係數(K),作為晶圓測定資料庫記錄於外部記憶裝置(相當於實施例5的外部記憶裝置46a的記憶裝置)。未圖示的ID寫入裝置係從記錄於外部記憶裝置的晶圓測定資料庫讀出溫度係數(K)而進行將ID電路13C的電熔絲切斷等從而設定溫度係數(K)。另外,亦可代替溫度係數(K)而作成第1值(VF(A))、第2值 (VF(H))係切斷電熔絲等從而設定。此情況下,設定常溫的VF的典型值與第1值(VF(A))的差分資料、高溫的VF的典型值與第2值(VF(H))的差分資料、及參考資料為優選。 The wafer test program at the time of wafer fabrication of the IGBT 10D is subjected to a normal temperature and high temperature test by a tester (detection device) not shown. The tester is the temperature characteristic data (first value (VF (A)), second value (VF (H)), and first temperature (A) of the temperature detecting diode 12 of the IGBT 10D obtained in this case. The second temperature (H) is calculated as a temperature coefficient (K), and is recorded as a wafer measurement database in an external memory device (corresponding to the memory device of the external memory device 46a of the fifth embodiment). The ID writing device (not shown) reads the temperature coefficient (K) from the wafer measurement database recorded in the external memory device, and cuts the electric fuse of the ID circuit 13C to set the temperature coefficient (K). Further, instead of the temperature coefficient (K), the first value (VF (A)) and the second value may be created. (VF(H)) is set by cutting off an electric fuse or the like. In this case, it is preferable to set the difference between the typical value of the normal temperature VF and the first value (VF(A)), the difference between the typical value of the high-temperature VF and the second value (VF(H)), and the reference material. .

接著,利用圖21~23說明有關來自ID電路13C的溫度特性資料的讀取。圖21係針對實施例4相關之電力模組的構成作繪示的圖。圖22係針對實施例4相關之ID讀取裝置的一例作繪示的圖。圖23係供於說明實施例4相關之ID電路的溫度特性資料的讀取用的流程圖。 Next, the reading of the temperature characteristic data from the ID circuit 13C will be described using Figs. 21 is a diagram showing the configuration of a power module related to Embodiment 4. Fig. 22 is a view showing an example of the ID reading device according to the fourth embodiment. Fig. 23 is a flow chart for explaining reading of temperature characteristic data of the ID circuit related to the fourth embodiment.

ID讀取裝置(ID READER)55D係具備供於連接在連接於電力模組100D的ID電路13C的電極墊101用的探測器552D與基於來自探測器552D的信號而檢測溫度特性資料的ID讀取裝置(ID READER)551D。在電極墊101,係包含相當於基準電阻值測定端子T9、電阻值測定端子T8、及接地端子T4的電極墊。於電力模組100D的組裝程序,在將IGBT10D搭載於電力模組的基板後密封前,ID讀取裝置55D係將探測器552D連接於IGBT10D的電極墊101並從ID電路13C讀取溫度特性資料(步驟S271D)。之後,ID讀取裝置55D係將可得知在IGBT10D的電力模組100D的搭載位置的資訊與溫度特性資料作為ID測定資料庫記錄於外部記憶裝置46b(步驟272D)。另外,步驟272D無需為電力模組100D的組裝程序。 The ID reading device (ID READER) 55D includes a detector 552D for the electrode pad 101 connected to the ID circuit 13C connected to the power module 100D and an ID reading for detecting temperature characteristic data based on a signal from the detector 552D. Take the device (ID READER) 551D. The electrode pad 101 includes an electrode pad corresponding to the reference resistance value measurement terminal T9, the resistance value measurement terminal T8, and the ground terminal T4. In the assembly procedure of the power module 100D, the ID reading device 55D connects the probe 552D to the electrode pad 101 of the IGBT 10D and reads the temperature characteristic data from the ID circuit 13C before the IGBT 10D is mounted on the substrate of the power module and sealed. (Step S271D). After that, the ID reading device 55D records the information on the mounting position of the power module 100D of the IGBT 10D and the temperature characteristic data as an ID measurement database in the external memory device 46b (step 272D). In addition, step 272D does not need to be an assembly procedure for power module 100D.

實施例4相關之控制電路30D係除了代替經 由I/O介面34C讀取溫度檢測用二極體12的溫度特性資料的ID識認部319C,而具有經由PC介面36讀出溫度檢測用二極體12的溫度特性資料的ID識認部319D及代替戶外溫度切換部311C而具有戶外溫度切換部311以外,係如同控制電路30C。 The control circuit 30D related to Embodiment 4 is in addition to the The ID identifying unit 319C that reads the temperature characteristic data of the temperature detecting diode 12 from the I/O interface 34C, and the ID identifying unit that reads the temperature characteristic data of the temperature detecting diode 12 via the PC interface 36 The 319D and the outdoor temperature switching unit 311 instead of the outdoor temperature switching unit 311 are similar to the control circuit 30C.

利用圖24說明有關是實施例4相關之電子裝置1D的製造法的一程序的溫度檢測用二極體12的溫度特性資料的取得方法。 A method of acquiring temperature characteristic data of the temperature detecting diode 12 which is a program of the manufacturing method of the electronic device 1D according to the fourth embodiment will be described with reference to FIG.

圖24係供於說明實施例4相關之溫度係計算部處理用的流程圖。將溫度檢測用二極體12的溫度特性資料儲存於電子裝置1D的程序,係除步驟S27C、S28C以外,如同實施例3。相當於步驟S27C的步驟係如前述以電力模組100D的組裝程序進行。以下說明有關相當於步驟28C的程序。 Fig. 24 is a flow chart for explaining the processing of the temperature system calculation unit according to the fourth embodiment. The program for storing the temperature characteristic data of the temperature detecting diode 12 in the electronic device 1D is the same as that in the third embodiment except for steps S27C and S28C. The step corresponding to step S27C is performed as described above in the assembly procedure of the power module 100D. The procedure corresponding to step 28C will be described below.

ID識認部319D,係從記錄於外部記憶裝置46b的ID測定資料庫將在IGBT10C的電力模組100D的位置資訊與溫度特性資料,經由PC介面36而取得。於此,在溫度特性資料係包含溫度係數(K)、相當於第1值(VF(A))之值、及相當於第2值(VF(H))之值等。接著,將含於溫度特性資料的溫度係數(K)、或從含於溫度特性資料的資訊所算出之溫度係數(K)儲存於記憶裝置33(步驟S28D)。 The ID identification unit 319D acquires the position information and the temperature characteristic data of the power module 100D of the IGBT 10C from the ID measurement database recorded in the external memory device 46b via the PC interface 36. Here, the temperature characteristic data includes a temperature coefficient (K), a value corresponding to the first value (VF (A)), and a value corresponding to the second value (VF (H)). Next, the temperature coefficient (K) included in the temperature characteristic data or the temperature coefficient (K) calculated from the information contained in the temperature characteristic data is stored in the memory device 33 (step S28D).

電子裝置1D的一般動作時的動作係如同電子裝置1C。另外,如同實施例3,在電子裝置1D的一般動作時不需戶外溫度檢測器44、PC45、外部記憶裝置46b 及ID讀取裝置55D。 The operation of the electronic device 1D in the normal operation is like the electronic device 1C. In addition, as in the third embodiment, the outdoor temperature detector 44, the PC 45, and the external memory device 46b are not required in the general operation of the electronic device 1D. And an ID reading device 55D.

依實施例4時,不需如實施例3,將ID電路13C與驅動器IC20D連接,故可削減端子及連接配線。 According to the fourth embodiment, the ID circuit 13C and the driver IC 20D are not required to be connected as in the third embodiment, so that the terminal and the connection wiring can be reduced.

[實施例5] [Example 5]

實施例5係不經由驅動器IC而獲得IGBT的ID資訊(晶片固有的ID碼)之例。利用圖25說明有關實施例5相關之電子裝置1E的構成。 In the fifth embodiment, an ID information (an ID code unique to a wafer) of an IGBT is obtained without passing through a driver IC. The configuration of the electronic device 1E related to the fifth embodiment will be described with reference to FIG.

圖25係供於說明實施例5相關之電子裝置用的方塊圖。 Figure 25 is a block diagram for explaining an electronic device related to Embodiment 5.

實施例5相關之電子裝置1E,係具備:是電力用半導體裝置的IGBT10E、是第1半導體積體電路裝置的驅動器IC20E、及是第2半導體積體電路裝置的控制電路30E。IGBT10E係如同IGBT10A,惟貼附有記錄ID碼的條碼13E。驅動器IC20E係如同驅動器IC20。控制電路30E係代替控制電路30B的ID識認部319B而具備ID識認部319E,不具備I/O介面34B。控制電路30E的其他構成係如同控制電路30B。ID識認部319E係基於來自外部記憶裝置46a的晶圓測定資料庫及來自外部記憶裝置46b的ID測定資料庫而取得溫度特性。 The electronic device 1E according to the fifth embodiment includes an IGBT 10E that is a power semiconductor device, a driver IC 20E that is a first semiconductor integrated circuit device, and a control circuit 30E that is a second semiconductor integrated circuit device. The IGBT 10E is like the IGBT 10A, but a bar code 13E for recording an ID code is attached. The driver IC 20E is like the driver IC 20. The control circuit 30E includes the ID identification unit 319E instead of the ID identification unit 319B of the control circuit 30B, and does not include the I/O interface 34B. The other configuration of the control circuit 30E is like the control circuit 30B. The ID identification unit 319E obtains temperature characteristics based on the wafer measurement database from the external memory device 46a and the ID measurement database from the external memory device 46b.

說明有關往條碼13E的ID碼的寫入。 Explain the writing of the ID code to the barcode 13E.

首先,於IGBT10E的晶圓製造時的晶圓測試程序,藉未圖示的測試器(探測設備)實施常溫、高溫測試,將該情況下所獲得的IGBT10E的特性資料(VF(A)、VF(H)、K) 與ID碼一起作為晶圓測定資料庫而儲存於外部記憶裝置46a。另外,在晶圓測試時在IGBT10E形成條碼13E或貼附封條而設定ID碼。 First, the wafer test program at the time of wafer fabrication of the IGBT 10E is subjected to a normal temperature and high temperature test by a tester (detection device) not shown, and the characteristic data of the IGBT 10E obtained in this case (VF (A), VF) (H), K) The ID code is stored in the external memory device 46a as a wafer measurement database. Further, the ID code is set by forming a bar code 13E or attaching a seal to the IGBT 10E at the time of wafer test.

接著,利用圖26~28說明有關來自條碼13E的ID碼的讀取。圖26係針對實施例5相關之電力模組的構成作繪示的圖。圖27係針對實施例5相關之ID讀取裝置作繪示的圖。圖28係供於說明實施例5相關之ID碼的讀取用的流程圖。ID讀取裝置(ID READ DEVICE)55E係具備:供於讀取IGBT10E的條碼13E用的相機552E或條碼讀取器553E、及基於來自相機552E或條碼讀取器553E的信號而檢測ID碼的ID讀取裝置(條碼讀取裝置,BAR-CODE READER)551E。於電力模組100E的組裝程序,ID讀取裝置55E係利用相機552E或條碼讀取器553E而從條碼13E讀取ID碼(步驟S271E),將可得知在IGBT10E的電力模組100E的搭載位置的資訊與ID碼作為ID測定資料庫而記錄於外部記憶裝置46b(步驟272E)。 Next, the reading of the ID code from the barcode 13E will be described using Figs. FIG. 26 is a diagram showing the configuration of the power module related to Embodiment 5. Figure 27 is a diagram for the ID reading device related to Embodiment 5. Figure 28 is a flow chart for explaining the reading of the ID code associated with the fifth embodiment. The ID READ DEVICE 55E includes a camera 552E or a bar code reader 553E for reading the bar code 13E of the IGBT 10E, and an ID code based on a signal from the camera 552E or the bar code reader 553E. ID reading device (bar code reading device, BAR-CODE READER) 551E. In the assembly procedure of the power module 100E, the ID reading device 55E reads the ID code from the barcode 13E by using the camera 552E or the barcode reader 553E (step S271E), and the power module 100E of the IGBT 10E can be found. The position information and the ID code are recorded in the external storage device 46b as the ID measurement database (step 272E).

實施例5相關之控制電路30E係除了代替經由I/O介面34B讀取溫度檢測用二極體12的溫度特性資料的ID識認部319B,而具有經由PC介面36讀出溫度檢測用二極體12的溫度特性資料的ID識認部319E以外,係如同控制電路30B。 In the control circuit 30E according to the fifth embodiment, the ID detecting unit 319B for reading the temperature characteristic data of the temperature detecting diode 12 via the I/O interface 34B is provided, and the temperature detecting diode is read via the PC interface 36. The ID identification unit 319E of the temperature characteristic data of the body 12 is similar to the control circuit 30B.

利用圖29說明有關是實施例5相關之電子裝置1E的製造法的一程序的溫度檢測用二極體12的溫度特 性資料的取得方法。 The temperature of the temperature detecting diode 12 which is a procedure of the manufacturing method of the electronic device 1E according to the fifth embodiment will be described with reference to FIG. How to obtain sexual data.

圖29係供於說明實施例5相關之溫度係計算部處理用的流程圖。 Fig. 29 is a flow chart for explaining the processing of the temperature system calculation unit according to the fifth embodiment.

將溫度檢測用二極體12的溫度特性資料儲存於電子裝置IE的程序,係除步驟S27、S28以外,如同實施例2。相當於步驟S27的步驟係如前述以電力模組100E的組裝程序進行。以下說明有關相當於步驟28的程序。 The program for storing the temperature characteristic data of the temperature detecting diode 12 in the electronic device IE is the same as the second embodiment except for steps S27 and S28. The step corresponding to step S27 is performed as described above in the assembly procedure of the power module 100E. The procedure corresponding to step 28 will be described below.

ID識認部319E,係從記錄於外部記憶裝置46b的ID測定資料庫,將在IGBT10E的電力模組100E的搭載位置資訊與ID碼,經由PC介面36而取得。ID識認部319E係基於ID碼從記錄於外部記憶裝置46a的晶圓測定資料庫取得IGBT10B的溫度特性資料。於此,在溫度特性資料係包含溫度係數(K)、相當於第1值(VF(A))之值、及相當於第2值(VF(H))之值。接著,將含於溫度特性資料的溫度係數(K)、或從含於溫度特性資料的資訊所算出之溫度係數(K)儲存於記憶裝置33(步驟S28E)。 The ID identification unit 319E acquires the mounting position information and the ID code of the power module 100E of the IGBT 10E from the ID measurement database recorded in the external memory device 46b via the PC interface 36. The ID identification unit 319E acquires the temperature characteristic data of the IGBT 10B from the wafer measurement database recorded in the external memory device 46a based on the ID code. Here, the temperature characteristic data includes a temperature coefficient (K), a value corresponding to the first value (VF (A)), and a value corresponding to the second value (VF (H)). Next, the temperature coefficient (K) contained in the temperature characteristic data or the temperature coefficient (K) calculated from the information contained in the temperature characteristic data is stored in the memory device 33 (step S28E).

電子裝置1E的一般動作時的動作係如同電子裝置1B。另外,如同實施例2,在電子裝置1E的一般動作時不需戶外溫度檢測器44、PC45、外部記憶裝置46a、46b及ID讀取裝置55E。 The operation of the electronic device 1E in the normal operation is like the electronic device 1B. Further, as in the second embodiment, the outdoor temperature detector 44, the PC 45, the external memory devices 46a and 46b, and the ID reading device 55E are not required in the normal operation of the electronic device 1E.

依實施例5時,不需如實施例2將ID電路13B與驅動器IC20E連接,故可削減端子及連接配線。此外,不需如實施例4在IGBT10E設置ID電路,故IGBT的製造變容易,亦可減低成本。 According to the fifth embodiment, since the ID circuit 13B and the driver IC 20E are not required to be connected as in the second embodiment, the terminal and the connection wiring can be reduced. Further, since the ID circuit is not required to be provided in the IGBT 10E as in the fourth embodiment, the manufacture of the IGBT is easy, and the cost can be reduced.

[實施例6] [Embodiment 6]

實施例6係不經由驅動器IC而獲得IGBT的ID資訊(晶片固有的ID碼)之他例。利用圖30說明有關實施例6相關之電子裝置1F的構成。 The sixth embodiment is an example in which ID information (an ID code unique to a wafer) of an IGBT is obtained without passing through a driver IC. The configuration of the electronic device 1F according to the sixth embodiment will be described with reference to FIG.

圖30係供於說明實施例6相關之電子裝置用的方塊圖。 Figure 30 is a block diagram for explaining an electronic device related to Embodiment 6.

實施例6相關之電子裝置1F,係具備:是電力用半導體裝置的IGBT10F、是第1半導體積體電路裝置的驅動器IC20F、及是第2半導體積體電路裝置的控制電路30F。IGBT10F係如同IGBT10B,惟ID電路13B係不連接於驅動器IC20F。驅動器IC20F係如同驅動器IC20、20E。控制電路30F係如同控制電路30E。ID識認部319E係基於來自外部記憶裝置46a的晶圓測定資料庫及來自外部記憶裝置46b的ID測定資料庫而取得溫度特性。 The electronic device 1F according to the sixth embodiment includes an IGBT 10F which is a power semiconductor device, a driver IC 20F which is a first semiconductor integrated circuit device, and a control circuit 30F which is a second semiconductor integrated circuit device. The IGBT 10F is like the IGBT 10B, but the ID circuit 13B is not connected to the driver IC 20F. The driver IC 20F is like the driver ICs 20, 20E. The control circuit 30F is like the control circuit 30E. The ID identification unit 319E obtains temperature characteristics based on the wafer measurement database from the external memory device 46a and the ID measurement database from the external memory device 46b.

說明有關往ID電路13B的ID碼的寫入。 The writing of the ID code to the ID circuit 13B will be described.

首先,於IGBT10F的晶圓製造時的晶圓測試程序,藉未圖示的測試器(探測設備)實施常溫、高溫測試,將該情況下所獲得的IGBT10F的特性資料(VF(A)、VF(H)、K)與ID碼一起作為晶圓測定資料庫而儲存於外部記憶裝置46a。另外,晶圓測試處理時進行將IGBT10F的ID電路13B的電熔絲切斷等而設定ID碼。 First, the wafer test program at the time of wafer fabrication of the IGBT 10F is subjected to a normal temperature and high temperature test by a tester (detection device) not shown, and the characteristic data of the IGBT 10F obtained in this case (VF(A), VF) (H) and K) are stored in the external memory device 46a together with the ID code as a wafer measurement database. In the wafer test process, the ID code is set by cutting the electric fuse of the ID circuit 13B of the IGBT 10F or the like.

接著,利用圖31說明有關來自ID電路13B的ID碼的讀取。圖31係供於說明實施例6相關之ID碼的讀取用的流程圖。於電力模組100F的組裝程序,ID讀 取裝置55D係將探測器552D連接於端子而從ID電路13B讀取ID碼(步驟S271F),將可得知在IGBT10F的電力模組100F的搭載位置的資訊與ID碼作為ID測定資料庫而記錄於外部記憶裝置46b(步驟272F)。 Next, the reading of the ID code from the ID circuit 13B will be described using FIG. Figure 31 is a flow chart for explaining the reading of the ID code associated with the sixth embodiment. Assembly procedure for power module 100F, ID reading The pick-up device 55D connects the probe 552D to the terminal and reads the ID code from the ID circuit 13B (step S271F), and knows that the information on the mounting position of the power module 100F of the IGBT 10F and the ID code are used as the ID measurement database. Recorded in the external memory device 46b (step 272F).

是實施例6相關之電子裝置1F的製造法的一程序的溫度檢測用二極體12的溫度特性資料的取得方法係如同實施例5。 The method of obtaining the temperature characteristic data of the temperature detecting diode 12 which is a procedure of the manufacturing method of the electronic device 1F according to the sixth embodiment is as in the fifth embodiment.

電子裝置1F的一般動作時的動作係如同電子裝置1B。另外,如同實施例2,在電子裝置1F的一般動作時不需戶外溫度檢測器44、PC45、外部記憶裝置46a、46b及ID讀取裝置55D。 The operation of the electronic device 1F in the normal operation is like the electronic device 1B. Further, as in the second embodiment, the outdoor temperature detector 44, the PC 45, the external memory devices 46a and 46b, and the ID reading device 55D are not required in the normal operation of the electronic device 1F.

依實施例6時,不需如實施例2將ID電路13B與驅動器IC20F連接,故可削減端子及連接配線。 According to the sixth embodiment, since the ID circuit 13B and the driver IC 20F are not required to be connected as in the second embodiment, the terminal and the connection wiring can be reduced.

[實施例7] [Embodiment 7]

實施例7係共用既存的IGBT的端子與ID電路的端子而獲得ID資訊(晶片固有的ID碼)之例。利用圖32說明有關實施例7相關之電子裝置1G的構成。 In the seventh embodiment, an example in which the terminal of the existing IGBT and the terminal of the ID circuit are shared to obtain ID information (an ID code unique to the wafer) is obtained. The configuration of the electronic device 1G according to the seventh embodiment will be described with reference to FIG.

圖32係供於說明實施例7相關之電子裝置用的方塊圖。 Figure 32 is a block diagram for explaining an electronic device related to Embodiment 7.

實施例7相關之電子裝置1G,係具備:是電力用半導體裝置的IGBT10G、是第1半導體積體電路裝置的驅動器IC20G、及是第2半導體積體電路裝置的控制電路30G。 The electronic device 1G according to the seventh embodiment includes an IGBT 10G that is a power semiconductor device, a driver IC 20G that is a first semiconductor integrated circuit device, and a control circuit 30G that is a second semiconductor integrated circuit device.

圖33係針對實施例7相關之IGBT的構成作繪示的 圖。IGBT10G係在IGBT10B追加切換電路14,閘極端子T1係與供於測定ID電路13B的電阻值(ID)用的端子共用,感測電流端子T2係與供於測定ID電路13B的基準電阻值(Ref)用的端子共用。切換電路14係以從端子T10輸入的信號(Select)而控制。 Figure 33 is a diagram showing the configuration of the IGBT related to Embodiment 7 Figure. In the IGBT 10G, the switching circuit 14 is added to the IGBT 10B, and the gate terminal T1 is shared with the terminal for the resistance value (ID) of the measurement ID circuit 13B, and the current terminal T2 is sensed and the reference resistance value for the measurement ID circuit 13B ( The terminals used for Ref) are shared. The switching circuit 14 is controlled by a signal (Select) input from the terminal T10.

驅動器IC20G係除ID讀出電路25G外,如同驅動器IC20B。ID讀出電路25G係除了輸出控制切換電路14的信號之點、及從輸出驅動信號(DRV)的信號線及使偏壓電流流過之信號線輸入來自ID電路13B的信號之點以外,如同ID讀出電路25B。 The driver IC 20G is the same as the driver IC 20B except for the ID readout circuit 25G. The ID readout circuit 25G is the same as the point of outputting the signal of the control switching circuit 14, and the point of inputting the signal from the output drive signal (DRV) and the signal line through which the bias current flows to the signal from the ID circuit 13B. ID readout circuit 25B.

控制電路30G係代替控制電路30B的ID識認部319而具備ID識認部319G。其他構成係如同控制電路30B。ID識認部319G係基於來自ID讀出電路25G的信號而識認ID碼。 The control circuit 30G includes an ID recognition unit 319G instead of the ID recognition unit 319 of the control circuit 30B. The other components are like the control circuit 30B. The ID recognition unit 319G recognizes the ID code based on the signal from the ID read circuit 25G.

於IGBT10G的晶圓製造時的晶圓測試程序,藉未圖示的測試器(探測設備)實施常溫、高溫測試,將該情況下所獲得的IGBT10G的特性資料(VF(A)、VF(H)、K)與ID碼一起作為晶圓測定資料庫而儲存於外部記憶裝置46。另外,晶圓測試處理時將IGBT10G的ID電路13B的電熔絲切斷等從而設定ID碼。 In the wafer test procedure at the time of wafer fabrication of the IGBT 10G, the normal temperature and high temperature test are performed by a tester (detection device) not shown, and the characteristic data of the IGBT 10G obtained in this case (VF (A), VF (H) And K) are stored in the external memory device 46 together with the ID code as a wafer measurement database. In the wafer test process, the electric fuse of the ID circuit 13B of the IGBT 10G is cut or the like to set the ID code.

利用圖34說明有關是實施例7相關之電子裝置1G的製造法的一程序的溫度檢測用二極體12的溫度特性資料的取得方法。 A method of obtaining temperature characteristic data of the temperature detecting diode 12 which is a program of the manufacturing method of the electronic device 1G according to the seventh embodiment will be described with reference to FIG.

圖34係供於說明實施例7相關之溫度係計算部處理 用的流程圖。 Figure 34 is a diagram for explaining the processing of the temperature system calculation unit related to the seventh embodiment. Flow chart used.

電子裝置1G的製造方法,係除在步驟S27前及步驟28後加入新的處理以外,如同實施例2。以下說明有關步驟27、28及其前後的步驟。 The manufacturing method of the electronic device 1G is the same as that of the second embodiment except that a new process is added before step S27 and after step S28. The steps related to steps 27, 28 and before and after are explained below.

首先,ID識認部319G係將供切換電路14將ID電路13B的輸出連接於閘極端子T1及溫度檢測用端子T3用的信號(Select)輸入端子T10(步驟S31)。ID識認部319G係讀取IGBT10G的ID碼(步驟S27)。接著,ID識認部319G係依ID碼從儲存著晶圓測定資料庫的外部記憶裝置46取得溫度係數(K),儲存於記憶裝置33(步驟S28)。接著,ID識認部319G係將供切換電路14將ID電路13B的輸出從閘極端子T1及溫度檢測用端子T3遮斷用的信號(Select)輸入端子T10(步驟S31)。 First, the ID identifying unit 319G connects the output of the ID circuit 13B to the signal (Select) input terminal T10 for the gate terminal T1 and the temperature detecting terminal T3 (step S31). The ID recognition unit 319G reads the ID code of the IGBT 10G (step S27). Next, the ID identifying unit 319G acquires the temperature coefficient (K) from the external memory device 46 storing the wafer measurement database based on the ID code, and stores it in the memory device 33 (step S28). Next, the ID identifying unit 319G inputs a signal (Select) for the switching circuit 14 to block the output of the ID circuit 13B from the gate terminal T1 and the temperature detecting terminal T3 (step S31).

電子裝置1G的一般動作時的動作係如同電子裝置1B。另外,如同實施例2,在電子裝置1G的一般動作時不需戶外溫度檢測器44、PC45及外部記憶裝置46。 The operation of the electronic device 1G in the normal operation is like the electronic device 1B. Further, as in the second embodiment, the outdoor temperature detector 44, the PC 45, and the external memory device 46 are not required in the normal operation of the electronic device 1G.

依實施例7時,切換電路共用ID讀取的端子與一般動作時的使用的端子,故可削減端子及連接配線。雖依來自CPU的信號(Select)而進行切換電路的控制,惟ID資訊的獲得,係僅在板安裝IGBT,在系統統合測試的初始階段時執行,故信號(Select)係亦可在板上的引腳設定進行。亦可代替儲存IGBT固有的ID碼的ID電路13B而使用儲存IGBT的溫度特性資料的ID電路13C。 According to the seventh embodiment, the switching circuit shares the terminal for ID reading and the terminal for use during normal operation, so that the terminal and the connection wiring can be reduced. Although the switching circuit is controlled according to the signal from the CPU, the ID information is obtained only when the IGBT is mounted on the board, and is executed at the initial stage of the system integration test, so the signal can also be on the board. The pin settings are made. Instead of the ID circuit 13B that stores the ID code unique to the IGBT, the ID circuit 13C that stores the temperature characteristic data of the IGBT may be used.

[實施例8] [Embodiment 8]

實施例8係藉串列介面而獲得ID資訊(晶片固有的ID碼)之例。利用圖35說明有關實施例8相關之電子裝置1H的構成。 The eighth embodiment is an example in which ID information (an ID code unique to a wafer) is obtained by a serial interface. The configuration of the electronic device 1H according to the eighth embodiment will be described with reference to FIG.

圖35係供於說明實施例8相關之電子裝置用的方塊圖。 Figure 35 is a block diagram for explaining an electronic device related to Embodiment 8.

實施例8相關之電子裝置1H,係具備:是電力用半導體裝置的IGBT10H、是第1半導體積體電路裝置的驅動器IC20H、及是第2半導體積體電路裝置的控制電路30H。 The electronic device 1H according to the eighth embodiment includes an IGBT 10H which is a power semiconductor device, a driver IC 20H which is a first semiconductor integrated circuit device, and a control circuit 30H which is a second semiconductor integrated circuit device.

IGBT10H係代替IGBT10B的ID電路13B而具備:將ID碼以數位電路作記憶,具有將ID碼作串列通信的介面功能的ID電路13H。其他構成係如同IGBT10B。 The IGBT 10H is provided with an ID circuit 13H that stores an ID code as a serial interface for serial communication, in place of the ID circuit 13B of the IGBT 10B. The other components are like IGBT 10B.

驅動器IC20H係除ID讀出電路25H外,如同驅動器IC20B。ID讀出電路25H,係並非如ID讀出電路25B將類比的ID碼轉換為數位的串列信號者,具有將數位的ID碼以串列通信從ID電路13H接收並傳遞至控制電路30H的功能。 The driver IC 20H is the same as the driver IC 20B except for the ID readout circuit 25H. The ID readout circuit 25H is not a serial signal in which the ID readout circuit 25B converts the analog ID code into a digital bit, and has the ID code of the digit received in the serial communication from the ID circuit 13H and transmitted to the control circuit 30H. Features.

控制電路30H係代替控制電路30B的ID識認部319而具備ID識認部319H,代替I/O介面34B而具備I/O介面34H。其他構成係如同控制電路30B。ID識認部319H係基於來自ID讀出電路25H的信號而識認ID碼。 The control circuit 30H includes an ID identification unit 319H instead of the ID recognition unit 319 of the control circuit 30B, and includes an I/O interface 34H instead of the I/O interface 34B. The other components are like the control circuit 30B. The ID recognition unit 319H recognizes the ID code based on the signal from the ID read circuit 25H.

於IGBT10H的晶圓製造時的晶圓測試程序,藉未圖示的測試器(探測設備)實施常溫、高溫測試,將該情況下所獲得的IGBT10H的特性資料(VF(A)、VF(H)、K)與ID 碼一起作為晶圓測定資料庫而儲存於外部記憶裝置46。另外,晶圓測試處理時將IGBT10H的ID電路13H的電熔絲切斷等從而設定ID碼。 In the wafer test procedure at the time of wafer fabrication of the IGBT 10H, the normal temperature and high temperature test are performed by a tester (detection device) not shown, and the characteristic data of the IGBT 10H obtained in this case (VF (A), VF (H) ), K) and ID The codes are stored together in the external memory device 46 as a wafer measurement database. In the wafer test process, the ID code is set by cutting the electric fuse of the ID circuit 13H of the IGBT 10H or the like.

利用圖36及圖37說明有關藉串列通信從電力模組內的IGBT的ID電路讀取ID碼的方法。圖36係針對實施例8相關之驅動器IC與IBGT的連接例作繪示的方塊圖。圖37係圖36的構成下的串列通信的時序圖。 A method of reading an ID code from an ID circuit of an IGBT in a power module by serial communication will be described with reference to FIGS. 36 and 37. Figure 36 is a block diagram showing a connection example of a driver IC and an IBGT related to Embodiment 8. Fig. 37 is a timing chart showing the serial communication in the configuration of Fig. 36.

將在3相控制的上橋臂側(高側)的IGBT的ID電路級聯連接,依U相用的驅動器IC20H、U相的ID電路13H、V相的ID電路13H、W相的ID電路13H、及驅動器IC20H之順序連接。下橋臂側(低側)的ID電路亦級聯連接,依U相用的驅動器IC20H、U相的ID電路13H、V相的ID電路13H、W相的ID電路13H、及驅動器IC20H之順序連接。從驅動器IC20H的時鐘端子輸出串列時鐘信號(SCK),輸入於U相的ID電路13H的時鐘端子、V相的ID電路13H的時鐘端子、及W相的ID電路13H的時鐘端子。從驅動器IC20H的資料輸出端子SO輸出串列資料,輸入於U相的ID電路13H的資料輸入端子DI_U。從U相的ID電路13H的資料輸出端子DO_U輸出串列資料,輸入於V相的ID電路13H的資料輸入端子DI_V。從V相的ID電路13H的資料輸出端子DO_V輸出串列資料,輸入於W相的ID電路13H的資料輸入端子DI_W。從W相的ID電路13H的資料輸出端子DO_W輸出串列資料,輸入於驅動器IC20H的資料輸入端子 SI。另外,V相用的驅動器IC20H係與U相的IGBT10H的切換元件11及溫度檢測用二極體12連接,惟不與ID電路13H連接。W相用的驅動器IC20H係與W相的IGBT10H的切換元件11及溫度檢測用二極體12連接,惟不與ID電路13H連接。 The ID circuit of the IGBT of the upper arm side (high side) controlled by the three phases is cascade-connected, the driver IC 20H for the U phase, the ID circuit 13H for the U phase, the ID circuit 13H of the V phase, and the ID circuit of the W phase. 13H, and the driver IC20H are connected in sequence. The ID circuit of the lower arm side (low side) is also cascade-connected, and the order of the driver IC 20H for the U phase, the ID circuit 13H for the U phase, the ID circuit 13H for the V phase, the ID circuit 13H for the W phase, and the driver IC 20H connection. The serial clock signal (SCK) is output from the clock terminal of the driver IC 20H, and is input to the clock terminal of the U-phase ID circuit 13H, the clock terminal of the V-phase ID circuit 13H, and the clock terminal of the W-phase ID circuit 13H. The serial data is output from the data output terminal SO of the driver IC 20H, and is input to the data input terminal DI_U of the U-phase ID circuit 13H. The serial data is output from the data output terminal DO_U of the U-phase ID circuit 13H, and is input to the data input terminal DI_V of the V-phase ID circuit 13H. The serial data is output from the data output terminal DO_V of the V-phase ID circuit 13H, and is input to the data input terminal DI_W of the W-phase ID circuit 13H. The serial data is output from the data output terminal DO_W of the W-phase ID circuit 13H, and is input to the data input terminal of the driver IC 20H. SI. Further, the driver IC 20H for the V phase is connected to the switching element 11 of the IGBT 10H of the U phase and the diode 12 for temperature detection, but is not connected to the ID circuit 13H. The driver IC 20H for the W phase is connected to the switching element 11 of the W phase IGBT 10H and the temperature detecting diode 12, but is not connected to the ID circuit 13H.

例如,在ID電路13H係構成為設定7位元長的ID碼,從驅動器IC20H依TX(0)、TX(1)、...、TX(6)的順序發送串列資料至U相的ID電路13H。在U相的ID電路13H,係設定ID_U(0)、ID_U(1)、...、ID_U(6)的ID碼,依此順序發送至V相的ID電路13H。在V相的ID電路13H,係設定ID_V(0)、ID_V(1)、...、ID_V(6)的ID碼,依此順序發送至W相的ID電路13H。在W相的ID電路13H,係設定ID_W(0)、ID_W(1)、...、ID_W(6)的ID碼,依此順序發送至驅動器IC20H。藉此,同步於來自CPU31的串列信號輸出,而從資料輸出端子DO_W輸入於CPU31,使得可依W相的IGBT的ID碼、V相的IGBT的ID碼、U相的IGBT的ID碼、CPU31的輸出資訊的順序而獲得。 For example, the ID circuit 13H is configured to set an ID code of 7 bits long, and the driver IC 20H is based on TX(0), TX(1), . . . The TX (6) sequentially transmits the serial data to the U-phase ID circuit 13H. In the U phase ID circuit 13H, ID_U(0), ID_U(1), . . . The ID code of ID_U(6) is sent to the ID circuit 13H of the V phase in this order. In the V-phase ID circuit 13H, ID_V(0), ID_V(1), . . . The ID code of ID_V(6) is transmitted to the ID circuit 13H of the W phase in this order. In the W phase ID circuit 13H, ID_W(0), ID_W(1), . . . The ID code of ID_W(6) is sent to the driver IC 20H in this order. Thereby, the serial signal output from the CPU 31 is synchronized, and the data output terminal DO_W is input to the CPU 31 so that the ID code of the IGBT according to the W phase, the ID code of the IGBT of the V phase, the ID code of the IGBT of the U phase, The order of the output information of the CPU 31 is obtained.

此外,將來自CPU31的輸出資訊以特定模式作輸出、菊鍊構成,從而確認IGBT晶片搭載,或從CPU31發送既知的特定模式,使得可設定信號同步(ID碼從何處開始)。此外,亦可依最後所輸入的來自CPU31的TX(n)信號確認是否無資料讀取的時偏差。 Further, the output information from the CPU 31 is outputted in a specific mode and daisy-chained to confirm the IGBT wafer mounting, or to transmit a known specific pattern from the CPU 31 so that signal synchronization can be set (where the ID code starts). In addition, it is also possible to confirm whether there is no time deviation of data reading based on the last input TX(n) signal from the CPU 31.

利用圖38說明有關是實施例8相關之電子裝 置1H的製造法的一程序的溫度檢測用二極體12的溫度特性資料的取得方法。 The electronic device related to the embodiment 8 will be described with reference to FIG. A method of obtaining temperature characteristic data of the temperature detecting diode 12 of a program of the manufacturing method of 1H.

圖38係供於說明實施例8相關之溫度係計算部處理用的流程圖。 Fig. 38 is a flow chart for explaining the processing of the temperature system calculation unit according to the eighth embodiment.

電子裝置1H的製造方法,係除步驟S27及步驟28的處理不同以外,如同實施例2。以下說明有關相當於步驟27、28的程序。 The manufacturing method of the electronic device 1H is the same as that of the second embodiment except that the processes of steps S27 and 28 are different. The procedure corresponding to steps 27 and 28 will be described below.

首先,ID識認部319H係經由驅動器IC20H而將串列時鐘信號(SK)輸出至各相的IGBT10H,將串列資料輸出至U相的IGBT10H的資料輸入端子DI_U(步驟S271H)。ID識認部319H係從W相的IGBT10H的資料輸出端子DO_W讀取各相的IGBT10H的ID碼(步驟S27)。接著,ID識認部319H係依各相的IGBT10H的ID碼而從儲存著晶圓測定資料庫的外部記憶裝置46取得溫度係數(K),儲存於記憶裝置33(步驟S28)。 First, the ID identifying unit 319H outputs the serial clock signal (SK) to the IGBT 10H of each phase via the driver IC 20H, and outputs the serial data to the data input terminal DI_U of the U-phase IGBT 10H (step S271H). The ID identifying unit 319H reads the ID code of the IGBT 10H of each phase from the data output terminal DO_W of the W-phase IGBT 10H (step S27). Next, the ID identifying unit 319H acquires the temperature coefficient (K) from the external memory device 46 storing the wafer measurement database based on the ID code of the IGBT 10H of each phase, and stores it in the memory device 33 (step S28).

電子裝置1H的一般動作時的動作係如同電子裝置1B。另外,如同實施例2,在電子裝置1H的一般動作時不需戶外溫度檢測器44、PC45及外部記憶裝置46。 The operation of the electronic device 1H in the normal operation is like the electronic device 1B. Further, as in the second embodiment, the outdoor temperature detector 44, the PC 45, and the external memory device 46 are not required in the normal operation of the electronic device 1H.

依實施例8時,僅1相的驅動器IC連接於IGBT的ID電路,故可削減端子及連接配線。亦可在ID電路13H係作成代替儲存IGBT固有的ID碼而儲存IGBT的溫度特性資料。 According to the eighth embodiment, since only one phase of the driver IC is connected to the ID circuit of the IGBT, the terminal and the connection wiring can be reduced. It is also possible to store the temperature characteristic data of the IGBT in the ID circuit 13H instead of storing the ID code unique to the IGBT.

以上,根據實施形態具體說明了由本發明人所創作之發明,惟本發明係非限定於上述實施形態者,可 作各種變更不言而喻。 The invention created by the inventors of the present invention has been specifically described above based on the embodiments, but the present invention is not limited to the above embodiments. It is self-evident that all kinds of changes are made.

在以下,以附記記載實施態樣。 In the following, the embodiment will be described in the attached note.

(附記1) (Note 1)

內建切換元件與溫度檢測用二極體的電力用半導體裝置的驅動方法,係包含:(a)準備儲存著前述溫度檢測用二極體的溫度特性資料的電子裝置的步驟;(b)驅動前述切換元件的步驟;(c)從前述溫度檢測用二極體檢測出溫度資訊的步驟;(d)基於前述溫度資訊與前述溫度特性資料而檢測出前述電力用半導體裝置的溫度的步驟;以及(e)於前述(d)步驟所檢測出的溫度超過既定溫度的情況下,將前述切換元件的驅動停止或抑制的步驟;前述溫度特性資料係溫度係數、第1溫度環境的溫度、及前述第1溫度環境下的前述溫度檢測用二極體的電壓資訊。 The driving method of the power semiconductor device with the built-in switching element and the temperature detecting diode includes: (a) a step of preparing an electronic device storing the temperature characteristic data of the temperature detecting diode; (b) driving a step of switching the element; (c) a step of detecting temperature information from the temperature detecting diode; (d) a step of detecting a temperature of the power semiconductor device based on the temperature information and the temperature characteristic data; (e) a step of stopping or suppressing driving of the switching element when the temperature detected in the step (d) exceeds a predetermined temperature; the temperature characteristic data is a temperature coefficient, a temperature of the first temperature environment, and the foregoing The voltage information of the temperature detecting diode in the first temperature environment.

(附記2) (Note 2)

於附記1的電力用半導體裝置的驅動方法,前述溫度特性資料,係(a1)檢測出前述第1溫度環境的溫度,(a2)在前述第1溫度環境下檢測出前述溫度檢測用二極體的電壓資訊, (a3)檢測出第2溫度環境的溫度,(a4)在前述第2溫度環境下檢測出前述溫度檢測用二極體的電壓資訊,(a5)基於以前述(a1)至(a4)而獲得的前述溫度及前述電壓資訊而算出。 In the method of driving a power semiconductor device according to the first aspect, the temperature characteristic data is: (a1) detecting a temperature of the first temperature environment, and (a2) detecting the temperature detecting diode in the first temperature environment. Voltage information, (a3) detecting the temperature of the second temperature environment, (a4) detecting the voltage information of the temperature detecting diode in the second temperature environment, (a5) being obtained based on the above (a1) to (a4) The temperature and the voltage information are calculated.

(附記3) (Note 3)

於附記1的電力用半導體裝置的驅動方法,前述溫度特性資料,係(a1)檢測出第1溫度環境的溫度,(a2)在前述第1溫度環境下檢測出前述溫度檢測用二極體的電壓資訊,(a3)從前述電力用半導體裝置識認該電力用半導體裝置的識別資訊,(a4)將對應於前述識別資訊的溫度特性資料從外部記憶裝置取得而獲得。 In the method of driving a power semiconductor device according to the first aspect, the temperature characteristic data is: (a1) detecting a temperature of the first temperature environment, and (a2) detecting the temperature detecting diode in the first temperature environment. The voltage information (a3) identifies the identification information of the power semiconductor device from the power semiconductor device, and (a4) obtains the temperature characteristic data corresponding to the identification information from the external memory device.

(附記4) (Note 4)

於附記3的電力用半導體裝置的驅動方法,前述溫度特性資料係藉該電力用半導體裝置的製造時的晶圓測試的第1溫度環境及第2溫度環境下的測試而獲得的溫度係數。 In the method of driving a power semiconductor device according to the third aspect, the temperature characteristic data is a temperature coefficient obtained by a test in a first temperature environment and a second temperature environment of a wafer test at the time of manufacture of the power semiconductor device.

(附記5) (Note 5)

於附記3的電力用半導體裝置的驅動方法,前述溫度特性資料係藉該電力用半導體裝置的製造時的晶圓測試的第1溫度環境及第2溫度環境下的測試而獲得的溫度係數、第1溫度環境下前述溫度檢測用二極體的電壓資訊、及第2溫度環境下前述溫度檢測用二極體的電壓資訊。 In the method of driving a power semiconductor device according to the third aspect, the temperature characteristic data is a temperature coefficient obtained by a test in a first temperature environment and a second temperature environment of a wafer test at the time of manufacture of the power semiconductor device. (1) voltage information of the temperature detecting diode in the temperature environment and voltage information of the temperature detecting diode in the second temperature environment.

(附記6) (Note 6)

於附記3的電力用半導體裝置的驅動方法,前述溫度特性資料,係(a5)以前述(a2)而獲得的電壓資訊與晶圓測試時的第1溫度環境下的前述溫度檢測用二極體的電壓資訊的差分為既定值以上的情況下,修正溫度偏移而獲得。 In the method of driving a power semiconductor device according to the third aspect, the temperature characteristic data is (a5) the voltage information obtained by the above (a2) and the temperature detecting diode in the first temperature environment during wafer testing. When the difference of the voltage information is equal to or greater than a predetermined value, the temperature offset is corrected.

(附記7) (Note 7)

於附記1的電力用半導體裝置的驅動方法,前述溫度特性資料,係(a1)檢測出第1溫度環境的溫度,(a2)在前述第1溫度環境下檢測出前述溫度檢測用二極體的電壓資訊,(a3)從前述電力用半導體裝置取得前述溫度檢測用的溫度特性資料而獲得。 In the method of driving a power semiconductor device according to the first aspect, the temperature characteristic data is: (a1) detecting a temperature of the first temperature environment, and (a2) detecting the temperature detecting diode in the first temperature environment. The voltage information (a3) is obtained by acquiring the temperature characteristic data for temperature detection from the power semiconductor device.

(附記8) (Note 8)

於附記7的電力用半導體裝置的驅動方法,前述溫度特性資料係藉該電力用半導體裝置的製造時的晶圓測試的第1溫度環境及第2溫度環境下的測試而獲得的溫度係數、或第1溫度環境下前述溫度檢測用二極體的電壓資訊及第2溫度環境下前述溫度檢測用二極體的電壓資訊。 In the method of driving a power semiconductor device according to the seventh aspect, the temperature characteristic data is a temperature coefficient obtained by a test in a first temperature environment and a second temperature environment of a wafer test at the time of manufacture of the power semiconductor device, or The voltage information of the temperature detecting diode in the first temperature environment and the voltage information of the temperature detecting diode in the second temperature environment.

(附記9) (Note 9)

電子裝置的製造方法,係包含:(a)準備內建切換元件與溫度檢測用二極體的電力用半導體裝置、具有驅動前述切換元件的閘極電路的第1半導體積體電路裝置、及具有與控制前述閘極電路的控制部可電氣重寫的非揮發性記憶體的第2半導體積體電路裝置之程序;以及(b)取得前述溫度檢測用二極體的溫度特性資料之程序。 The method for manufacturing an electronic device includes: (a) a power semiconductor device in which a switching element and a temperature detecting diode are built in, a first semiconductor integrated circuit device including a gate circuit that drives the switching element, and And a program of the second semiconductor integrated circuit device that controls the non-volatile memory that can be electrically rewritten by the control unit of the gate circuit; and (b) a program for obtaining the temperature characteristic data of the temperature detecting diode.

(附記10) (Note 10)

於附記9的電子裝置的製造方法,前述(b)程序,係包含:(b1)檢測出第1溫度環境的溫度,儲存於非揮發性記憶體之步驟;(b2)在前述第1溫度環境下檢測出前述溫度檢測用二極體的電壓資訊,儲存於前述非揮發性記憶體之步驟; (b3)檢測出第2溫度環境的溫度之步驟;(b4)在前述第2溫度環境下檢測出前述溫度檢測用二極體的電壓資訊之步驟;以及(b5)基於以前述(b1)至(b4)的步驟而獲得的前述溫度及前述電壓資訊而取得溫度特性資料,儲存於前述非揮發性記憶體之步驟。 In the method of manufacturing an electronic device according to the ninth aspect, the (b) program includes: (b1) detecting a temperature of the first temperature environment and storing the temperature in the non-volatile memory; and (b2) operating at the first temperature environment. And detecting the voltage information of the temperature detecting diode and storing the voltage information in the non-volatile memory; (b3) a step of detecting a temperature of the second temperature environment; (b4) a step of detecting voltage information of the temperature detecting diode in the second temperature environment; and (b5) based on (b1) to (b1) The temperature characteristic data obtained by the step (b4) and the voltage information obtained are stored in the non-volatile memory.

(附記11) (Note 11)

於附記9的電子裝置的製造方法,前述(b)程序,係包含:(b1)檢測出第1溫度環境的溫度,儲存於非揮發性記憶體之步驟;(b2)在前述第1溫度環境下檢測出前述溫度檢測用二極體的電壓資訊,儲存於前述非揮發性記憶體之步驟;(b3)從前述電力用半導體裝置識認該電力用半導體裝置的識別資訊之步驟;以及(b4)將對應於前述識別資訊的溫度特性資料從外部資料庫取得,儲存於前述非揮發性記憶體之步驟。 In the method of manufacturing an electronic device according to the ninth aspect, the (b) program includes: (b1) detecting a temperature of the first temperature environment and storing the temperature in the non-volatile memory; and (b2) operating at the first temperature environment. a step of detecting the voltage information of the temperature detecting diode and storing the voltage information in the non-volatile memory; (b3) a step of recognizing the identification information of the power semiconductor device from the power semiconductor device; and (b4) The temperature characteristic data corresponding to the identification information is obtained from an external database and stored in the non-volatile memory.

(附記12) (Note 12)

於附記10的電子裝置的製造方法,前述溫度特性資料係該電力用半導體裝置的製造時的晶圓測試的第1溫度環境及第2溫度環境下藉測試而獲得的溫度係數。 In the method of manufacturing an electronic device according to the tenth aspect, the temperature characteristic data is a temperature coefficient obtained by a test in a first temperature environment and a second temperature environment of the wafer test at the time of manufacture of the power semiconductor device.

(附記13) (Note 13)

於附記11的電子裝置的製造方法,前述溫度特性資料係該電力用半導體裝置的製造時的晶圓測試的第1溫度環境及第2溫度環境下藉測試而獲得的溫度係數、第1溫度環境下前述溫度檢測用二極體的電壓資訊、及第2溫度環境下前述溫度檢測用二極體的電壓資訊。 In the method of manufacturing an electronic device according to the eleventh aspect, the temperature characteristic data is a temperature coefficient obtained by a test in a first temperature environment and a second temperature environment during manufacture of the power semiconductor device, and a first temperature environment. The voltage information of the temperature detecting diode and the voltage information of the temperature detecting diode in the second temperature environment.

(附記14) (Note 14)

於附記13的電子裝置的製造方法,前述(b)程序,係進一步包含:(b5)以前述(b2)步驟而獲得的電壓資訊與晶圓測試時的第1溫度環境下的前述溫度檢測用二極體的電壓資訊的差分為既定值以上的情況下,修正溫度偏移之步驟。 In the method of manufacturing an electronic device according to the supplementary note 13, the (b) program further includes: (b5) the voltage information obtained by the step (b2) and the temperature detection in the first temperature environment during the wafer test. The step of correcting the temperature offset when the difference of the voltage information of the diode is equal to or greater than a predetermined value.

(附記15) (Note 15)

於附記9的電子裝置的製造方法,前述(b)程序,係包含:(b1)檢測出第1溫度環境的溫度,儲存於非揮發性記憶體之步驟;(b2)在前述第1溫度環境下檢測出前述溫度檢測用二極體的電壓資訊,儲存於前述非揮發性記憶體之步驟;以及(b3)從前述電力用半導體裝置取得前述溫度檢測用二 極體的溫度特性資料,儲存於前述非揮發性記憶體之步驟。 In the method of manufacturing an electronic device according to the ninth aspect, the (b) program includes: (b1) detecting a temperature of the first temperature environment and storing the temperature in the non-volatile memory; and (b2) operating at the first temperature environment. And detecting the voltage information of the temperature detecting diode and storing the voltage information in the non-volatile memory; and (b3) acquiring the temperature detecting device from the power semiconductor device The temperature characteristic data of the polar body is stored in the step of the aforementioned non-volatile memory.

(附記16) (Note 16)

於附記15的電子裝置的製造方法,前述溫度特性資料係藉該電力用半導體裝置的製造時的晶圓測試的常溫及高溫測試而獲得的溫度係數、或第1溫度環境下前述溫度檢測用二極體的電壓資訊及第2溫度環境下前述溫度檢測用二極體的電壓資訊。 In the method of manufacturing an electronic device according to supplementary note 15, the temperature characteristic data is a temperature coefficient obtained by a normal temperature and a high temperature test of a wafer test at the time of manufacture of the power semiconductor device, or the temperature detecting second in a first temperature environment. The voltage information of the polar body and the voltage information of the temperature detecting diode in the second temperature environment.

10‧‧‧半導體裝置 10‧‧‧Semiconductor device

11‧‧‧切換元件 11‧‧‧Switching components

12‧‧‧溫度檢測用二極體 12‧‧‧Diode for temperature detection

20‧‧‧第1半導體積體電路裝置 20‧‧‧1st semiconductor integrated circuit device

21‧‧‧閘極電路(驅動電路) 21‧‧‧ gate circuit (drive circuit)

22‧‧‧溫度檢測用A/D轉換器(檢測電路) 22‧‧‧A/D converter for temperature detection (detection circuit)

30‧‧‧第2半導體積體電路裝置 30‧‧‧Second semiconductor integrated circuit device

33‧‧‧記憶裝置 33‧‧‧ memory device

Claims (20)

一種電子裝置,係具備:電力用半導體裝置;驅動前述電力用半導體裝置的第1半導體積體電路裝置;以及控制前述第1半導體積體電路裝置的第2半導體積體電路裝置;前述電力用半導體裝置,係具備:切換電晶體;以及溫度檢測用二極體;前述第1半導體積體電路裝置,係具備:驅動前述切換電晶體的驅動電路;以及從前述溫度檢測用二極體檢測出VF的檢測電路;前述第2半導體積體電路裝置,係具備:控制前述驅動電路的控制部;取得戶外溫度資訊的戶外溫度取得部;儲存前述溫度檢測用二極體的溫度特性資料與基於第1溫度下的來自前述檢測電路的信號的第1值的記憶裝置;以及從基於來自前述檢測電路的信號的第3值、前述溫度特性資料、以前述戶外溫度取得部所取得的前述第1溫度、及前述第1值而算出前述電力用半導體裝置的溫度的溫度演算處理部。 An electronic device comprising: a power semiconductor device; a first semiconductor integrated circuit device that drives the power semiconductor device; and a second semiconductor integrated circuit device that controls the first semiconductor integrated circuit device; and the power semiconductor The device includes: a switching transistor; and a temperature detecting diode; the first semiconductor integrated circuit device includes: a driving circuit that drives the switching transistor; and a VF detected from the temperature detecting diode The second semiconductor integrated circuit device includes: a control unit that controls the drive circuit; an outdoor temperature acquisition unit that acquires outdoor temperature information; and stores temperature characteristic data of the temperature detection diode and is based on the first a memory device having a first value of a signal from the detection circuit at a temperature; and a third value obtained from the signal from the detection circuit, the temperature characteristic data, and the first temperature acquired by the outdoor temperature acquisition unit, Temperature calculation processing for calculating the temperature of the power semiconductor device by the first value . 如申請專利範圍第1項的電子裝置,其中, 前述第2半導體積體電路裝置,係具備從前述第1值、及於以前述戶外溫度取得部所取得的第2溫度基於來自前述檢測電路的信號的第2值而算出前述溫度特性資料的溫度係數計算部。 An electronic device as claimed in claim 1, wherein The second semiconductor integrated circuit device includes a temperature at which the temperature characteristic data is calculated from the first value and the second value obtained by the outdoor temperature acquiring unit based on a second value of a signal from the detection circuit. Coefficient calculation unit. 如申請專利範圍第2項的電子裝置,其中,前述戶外溫度取得部係基於將戶外溫度檢測器的輸出作了A/D轉換之值或PC溫度設定值而取得。 The electronic device according to claim 2, wherein the outdoor temperature acquisition unit is obtained by setting an A/D conversion value or a PC temperature setting value to an output of the outdoor temperature detector. 如申請專利範圍第1項的電子裝置,其中,前述電力用半導體裝置係具備具有該電力用半導體裝置的ID資訊的ID電路,前述第1半導體積體電路裝置係具備將前述ID資訊從前述ID電路讀出的ID讀出電路,前述第2半導體積體電路裝置係具備識認來自前述ID讀出電路的前述ID資訊的ID識認部,將基於前述ID資訊藉前述電力用半導體裝置的製造時的晶圓測試而獲得的前述溫度特性資料儲存於前述記憶裝置。 The electronic device according to claim 1, wherein the power semiconductor device includes an ID circuit including ID information of the power semiconductor device, and the first semiconductor integrated circuit device includes the ID information from the ID. In the ID readout circuit for reading the circuit, the second semiconductor integrated circuit device includes an ID identifying unit that recognizes the ID information from the ID reading circuit, and manufactures the power semiconductor device based on the ID information. The aforementioned temperature characteristic data obtained by the wafer test is stored in the aforementioned memory device. 如申請專利範圍第4項的電子裝置,其中,前述第2半導體積體電路裝置係具備供於將儲存於外部記憶裝置的前述溫度特性資料儲存於前述記憶裝置用的PC介面。 The electronic device according to claim 4, wherein the second semiconductor integrated circuit device includes a PC interface for storing the temperature characteristic data stored in the external memory device in the memory device. 如申請專利範圍第5項的電子裝置,其中,前述溫度特性資料係藉前述晶圓測試的第1溫度及第2溫度下的測試而獲得。 The electronic device of claim 5, wherein the temperature characteristic data is obtained by a test at the first temperature and the second temperature of the wafer test. 如申請專利範圍第4項的電子裝置,其中,在前述ID資訊係包含前述溫度特性資料。 The electronic device of claim 4, wherein the ID information includes the temperature characteristic data. 如申請專利範圍第7項的電子裝置,其中,前述溫度特性係藉前述晶圓測試的第1溫度及第2溫度下的測試而獲得。 The electronic device of claim 7, wherein the temperature characteristic is obtained by a test at the first temperature and the second temperature of the wafer test. 如申請專利範圍第1項的電子裝置,其中,前述第2半導體積體電路裝置係具備CPU與儲存程式的記憶體。 The electronic device according to claim 1, wherein the second semiconductor integrated circuit device includes a memory of a CPU and a storage program. 如申請專利範圍第2項的電子裝置,其中,前述記憶裝置及記憶體係快閃記憶體。 The electronic device of claim 2, wherein the memory device and the memory system flash memory. 如申請專利範圍第1項的電子裝置,其中,前述控制部,係基於來自前述檢測電路的溫度資訊與儲存於前述記憶裝置的前述溫度特性資料而檢測出的溫度超過既定溫度的情況下,將前述驅動電路停止或抑制。 The electronic device according to claim 1, wherein the control unit is based on a temperature information from the detection circuit and a temperature detected by the temperature characteristic data stored in the memory device exceeding a predetermined temperature. The aforementioned drive circuit is stopped or suppressed. 一種電子裝置,係具備:電力用半導體裝置;驅動前述電力用半導體裝置的第1半導體積體電路裝置;以及控制前述第1半導體積體電路裝置的第2半導體積體電路裝置;前述電力用半導體裝置,係具備:切換電晶體;溫度檢測用二極體;以及記錄該電力用半導體裝置的ID資訊的ID記憶部; 前述第1半導體積體電路裝置,係具備:驅動前述切換電晶體的驅動電路;以及從前述溫度檢測用二極體檢測出VF的檢測電路;前述第2半導體積體電路裝置,係具備:控制前述驅動電路的控制部;取得戶外溫度資訊的戶外溫度取得部;儲存前述溫度檢測用二極體的溫度特性與基於第1溫度下的來自前述檢測電路的信號的第1值的記憶裝置;從基於來自前述檢測電路的信號的第3值、前述溫度特性資料、以前述戶外溫度取得部所取得的前述第1溫度、及前述第1值而算出前述電力用半導體裝置的溫度的溫度演算處理部;以及識認來自前述ID記憶部的前述ID資訊的ID識認部;將基於前述ID資訊藉前述電力用半導體裝置的製造時的晶圓測試而獲得的前述溫度特性儲存於前述記憶裝置。 An electronic device comprising: a power semiconductor device; a first semiconductor integrated circuit device that drives the power semiconductor device; and a second semiconductor integrated circuit device that controls the first semiconductor integrated circuit device; and the power semiconductor The device includes: a switching transistor; a temperature detecting diode; and an ID memory unit that records ID information of the power semiconductor device; The first semiconductor integrated circuit device includes: a drive circuit that drives the switching transistor; and a detection circuit that detects VF from the temperature detecting diode; and the second semiconductor integrated circuit device includes: control a control unit of the drive circuit; an outdoor temperature acquisition unit that acquires outdoor temperature information; and a memory device that stores a temperature characteristic of the temperature detecting diode and a first value of a signal from the detection circuit at a first temperature; a temperature calculation processing unit that calculates the temperature of the power semiconductor device based on the third value of the signal from the detection circuit, the temperature characteristic data, the first temperature obtained by the outdoor temperature acquisition unit, and the first value And an ID identification unit that recognizes the ID information from the ID memory unit; and stores the temperature characteristic obtained by the wafer test at the time of manufacture of the power semiconductor device based on the ID information on the memory device. 如申請專利範圍第12項的電子裝置,其中,前述ID記憶部係設於前述電力用半導體裝置內的ID電路,前述ID電路係具備第1端子與第2端子。 The electronic device according to claim 12, wherein the ID memory unit is an ID circuit provided in the power semiconductor device, and the ID circuit includes a first terminal and a second terminal. 如申請專利範圍第13項的電子裝置,其中,前述第1半導體積體電路裝置係具備ID讀出電路,與前述第1端子及前述第2端子連接, 前述ID資訊係經由前述ID讀出電路而讀出。 The electronic device according to claim 13, wherein the first semiconductor integrated circuit device includes an ID read circuit, and is connected to the first terminal and the second terminal. The ID information is read out via the ID readout circuit. 如申請專利範圍第13項的電子裝置,其中,前述ID資訊,係藉該電子裝置的外部的ID讀取裝置而讀出,儲存於外部的記憶裝置。 The electronic device of claim 13, wherein the ID information is read by an external ID reading device of the electronic device and stored in an external memory device. 如申請專利範圍第14項的電子裝置,其中,前述ID電路,係進一步具備:梯形電阻;以及電熔絲;前述第1端子係供於測定將前述梯形電阻以前述電熔絲切斷下的電阻值用的端子,前述第2端子係供於測定基準電阻值用的端子。 The electronic device according to claim 14, wherein the ID circuit further includes: a ladder resistor; and an electric fuse; wherein the first terminal is configured to measure and cut the ladder resistor by the electric fuse The terminal for the resistance value, and the second terminal is for the terminal for measuring the reference resistance value. 如申請專利範圍第14項的電子裝置,其中,前述電力用半導體裝置,係進一步具備切換電路,前述切換電路係進行前述切換電晶體的閘極端子與前述第1端子的連接及遮斷、及前述溫度檢測用二極體的陽極端子與前述第2端子的連接及遮斷。 The electronic device according to claim 14, wherein the power semiconductor device further includes a switching circuit that performs connection and blocking of the gate terminal of the switching transistor and the first terminal, and The anode terminal of the temperature detecting diode is connected and blocked to the second terminal. 如申請專利範圍第14項的電子裝置,其中,前述第1半導體積體電路裝置,係同步於串列時鐘信號而將串列資料供應至前述ID電路,前述ID電路係將前述ID資訊同步於前述串列時鐘信號而輸出至外部。 The electronic device according to claim 14, wherein the first semiconductor integrated circuit device supplies the serial data to the ID circuit in synchronization with the serial clock signal, and the ID circuit synchronizes the ID information with The aforementioned serial clock signal is output to the outside. 如申請專利範圍第12項的電子裝置,其中,在前述ID資訊係包含前述溫度特性資料。 The electronic device of claim 12, wherein the ID information includes the temperature characteristic data. 如申請專利範圍第12項的電子裝置,其中,前述ID記憶部係設於前述電力用半導體裝置的條 碼。 The electronic device of claim 12, wherein the ID memory unit is provided in a strip of the power semiconductor device code.
TW105105297A 2015-03-05 2016-02-23 Electronics device TW201634910A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015043381 2015-03-05
JP2015253349A JP6557136B2 (en) 2015-03-05 2015-12-25 Electronic equipment

Publications (1)

Publication Number Publication Date
TW201634910A true TW201634910A (en) 2016-10-01

Family

ID=56897613

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105105297A TW201634910A (en) 2015-03-05 2016-02-23 Electronics device

Country Status (4)

Country Link
JP (1) JP6557136B2 (en)
KR (1) KR20160108214A (en)
CN (1) CN105938022A (en)
TW (1) TW201634910A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI620407B (en) 2016-12-23 2018-04-01 Actron Technology Corporation Method for detecting connection state of temperature sensor in vehicle rectifier package module and module
CN110044510B (en) * 2019-05-17 2024-12-31 上海希形科技有限公司 IGBT module temperature measurement circuit, temperature measurement method and computer readable storage medium
KR102219434B1 (en) * 2019-08-14 2021-02-24 현대모비스 주식회사 Power device driving control apparatus
JP2021089981A (en) * 2019-12-04 2021-06-10 株式会社デンソー Semiconductor device
CN111288009B (en) * 2020-03-06 2022-01-18 上海申矽凌微电子科技有限公司 Method and system for integrating temperature voltage monitoring and fan control
JP7639583B2 (en) * 2021-06-29 2025-03-05 富士電機株式会社 Semiconductor module and method for manufacturing semiconductor module

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0540533A (en) 1991-08-06 1993-02-19 Fujitsu Ltd Electronic device temperature detection system
JP2003125588A (en) * 2001-10-12 2003-04-25 Mitsubishi Electric Corp Power converter
JP2006105870A (en) * 2004-10-07 2006-04-20 Yamaha Corp Temperature sensor and method of compensating temperature sensor
JP5226248B2 (en) * 2006-08-02 2013-07-03 ルネサスエレクトロニクス株式会社 Temperature detection circuit and semiconductor device
CN101452044B (en) * 2007-12-07 2011-01-26 财团法人工业技术研究院 Light-emitting diode life test device and method
JP2010014445A (en) * 2008-07-01 2010-01-21 Seiko Instruments Inc Semiconductor temperature sensor
DE112011102926B4 (en) * 2010-09-03 2018-10-11 Mitsubishi Electric Corp. Semiconductor device
JP5786571B2 (en) * 2011-09-07 2015-09-30 富士電機株式会社 Power semiconductor device temperature measurement device
JP5861590B2 (en) * 2012-07-30 2016-02-16 株式会社デンソー Temperature detection device

Also Published As

Publication number Publication date
KR20160108214A (en) 2016-09-19
CN105938022A (en) 2016-09-14
JP2016166860A (en) 2016-09-15
JP6557136B2 (en) 2019-08-07

Similar Documents

Publication Publication Date Title
US11175189B2 (en) Electronics device
TW201634910A (en) Electronics device
US10116296B2 (en) Semiconductor integrated circuit device and electronic device
KR102649093B1 (en) Power conversion device and semiconductor device
US10859624B2 (en) Semiconductor device, electronic control unit and vehicle apparatus
CN107444481B (en) Rotation detection apparatus and electric power steering apparatus using the same
US6888729B2 (en) Single module electric power conversion apparatus
CN101983322B (en) Temperature detecting circuit
KR101856335B1 (en) IGBT Temperature Sense Circuit for Calibrating Automatically Diode Temperature
US9995636B2 (en) Temperature sensing system for switching device
CN106487264B (en) Semiconductor integrated circuit device for driving power semiconductor device and electronic device
US9960739B2 (en) Semiconductor integrated circuit
JP2016200570A (en) Semiconductor device current detection method and semiconductor device
JP5776636B2 (en) Temperature detection device
JP5861590B2 (en) Temperature detection device
JP6698388B2 (en) Semiconductor device
JP6942781B2 (en) Temperature measurement method
JP2011200035A (en) Vehicle overcurrent detector
JP2000039461A (en) Measuring method for junction temperature of semiconductor integrated circuit and dut board using the measuring method
JP2017120250A (en) Semiconductor device, electronic control unit and vehicle device
CN119030414A (en) Temperature estimation device for power devices of inverters
CN116457949A (en) Power conversion device and control method for power conversion device