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Application filed by Seiko Epson CorpfiledCriticalSeiko Epson Corp
Publication of TW201612089ApublicationCriticalpatent/TW201612089A/en
Application grantedgrantedCritical
Publication of TWI598279BpublicationCriticalpatent/TWI598279B/en
Testing Of Individual Semiconductor Devices
(AREA)
Abstract
The electronic parts conveying device of the present invention comprises: a holding part holding an electronic part; a heating part; a cooling part; a fluid jetting part, projecting the fluid to the cooling part and a flow adjusting part, adjusting the flow of the fluid projected from the fluid jetting part; and the flow adjusting part can adjust the average flow of the fluid projected from the fluid jetting part to be a first average flow, and a second average flow larger than the first average flow. Before checking the electronic part, the average flow is set to be the first average flow, and the average flow during the period of checking the electronic part includes the second average flow.
TW104130482A2014-09-182015-09-15
Electronic parts conveying apparatus and electronic parts inspection apparatus
TWI598279B
(en)