TW201601206A - Sapwood separating method for brittle material substrate and sapwood separating device - Google Patents

Abstract

An object of the present invention is to reliably separate a sapwood in which a functional region is formed in a line in the longitudinal direction and the lateral direction and a periphery of a substrate on which a scribe line is formed. In the present invention, the substrate 20 is held on the sapwood separating table 15. The sapwood separating table 15 has a bottom plate 53 and an elastic plate 54 of the chamber 52 and its upper portion, and a plurality of openings are provided in the elastic plate 54 and the bottom plate 53. Further, the substrate 20 on the upper surface thereof is held by sucking air from the opening of the elastic plate 54. The sapwood around the substrate 20 is separated by lowering the frame-shaped push plate 47 having the heights of the opposite sides in parallel with the surface of the substrate 20.

Description

Sapwood separating method for brittle material substrate and sapwood separating device

The present invention relates to a sapwood separating method and a sapwood separating device for separating a sapwood around a substrate such as a semiconductor substrate or a ceramic substrate.

Patent Document 1 proposes a substrate cutting device which is formed by pressing a substrate on which a scribe line is formed from a back surface of a surface on which a scribe line is formed by a cutting bar perpendicularly pressing a scribe line and a surface. When the substrate to be cut is a semiconductor wafer and a plurality of functional regions are formed in a line, the scribing is first formed in the longitudinal direction and the lateral direction at equal intervals between the functional regions on the substrate. Then, it is necessary to cut along the scribe line by means of a cutting device. Then, since the sapwood is generated around the substrate, it is necessary to cut and separate the sap material by the scribe line by the cutting device.

[Background literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2004-39931

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2013-177309

If the substrate is cut by a manufacturing step on a brittle material substrate, for example, a ceramic substrate, a plurality of functional regions are formed at a fixed pitch along the x-axis and the y-axis, the substrate must be broken into a lattice. After the shape, the sapwood outside the area where the functional area is formed is removed, but since the function area and the sap material part are not distinguished in the past Since the substrate is diced (cut), after the substrate is diced (cut) into functional regions, it is necessary to remove only the singulated sapwood portion, which causes problems such as complicated work steps, especially on the substrate. In the case of a small size after singulation, it is an operation that relies on labor and labor.

The present invention has been made in view of the above problems, and an object thereof is to make a sapwood around a functional region of a substrate on which a brittle material substrate has been scribed in a short time before singulation (cutting) of a brittle material substrate. Internally mechanically separated from the functional area of the substrate.

In order to solve the problem, the sapwood separating method of the brittle material substrate of the present invention is a sapwood separating method for separating the sapwood around the functional region of the brittle material substrate, and the brittle material substrate is provided on one side thereof in the longitudinal direction and the lateral direction. a functional region formed by a specific distance, and a substrate having a scribe line formed in a lattice shape so that the functional region is located at a center, and the sapwood separating method of the brittle material substrate is to hold the brittle material substrate on the sapwood separating table. The sapwood separating table has an elastic plate having a shape corresponding to the entire functional region of the brittle material substrate on the upper surface, and a region corresponding to the entire functional region of the brittle material substrate is held from the upper portion, and the brittle material substrate is The frame-shaped push plate corresponding to the position of the sapwood is lowered while the upper portion of the sapwood separation table is kept parallel to the brittle material substrate, and the sapwood is separated.

In order to solve the problem, the sapwood separating device of the brittle material substrate of the present invention is a sapwood separating device for separating the sapwood around the brittle material substrate, and the brittle material substrate has a specific distance along one side in the longitudinal direction and the lateral direction. a functional region formed, wherein the sapwood separating device is formed in a lattice shape in a manner that the functional region is located at a center, and the sapphire separating device of the brittle material substrate comprises: a sapwood separating table that holds the brittle material substrate on the upper surface a frame-shaped push plate having a side corresponding to a portion of the sapwood that is the periphery of the brittle material substrate, and a lifting mechanism that raises and lowers the push plate in a state parallel to the surface of the brittle material substrate.

Here, the sapwood separating table may further include: a chamber having a recess; a bottom plate disposed on the chamber and having a plurality of openings; and an elastic plate disposed on the upper surface of the bottom plate .

Here, the elastic plate may be a flat plate which is narrower than the effective area on the inner side of the sapwood to be separated from the substrate and which bends the edge of the upper surface.

Here, the push plate may be a plate that is different from the two sides and the heights of the other two sides perpendicular to the two sides. In this case, the sapwood portions on both sides of the substrate that are first touched on both sides of the push plate are first cut (separated), and then the other side edges of the substrate that are touched by the other two sides are cut off after the sapwood portions of the remaining two sides of the substrate are touched. (separation). Since the sapwood portions of the adjacent sides of the substrate are cut with a time difference, the boundary portion between the adjacent two sides (the portion of the corner of the functional region) is not subjected to the pressing force from the adjacent sides, and therefore, the functional region The corners become less susceptible to damage.

Here, the push plate may be attached to the sapwood separation head having the function of transporting the brittle material substrate up and down.

According to the present invention having such a feature, the excess portion around the brittle material substrate can be mechanically entirely used as a sap material by the operation of lowering the push plate with respect to the substrate on which the scribe line is formed. Separation. Therefore, the working time can be shortened, and the structure of the sapwood separating device can be simplified. In particular, when the size of the brittle material substrate (each functional region) after singulation is small, each functional region that is singulated after singulation (cutting) is singulated as a redundant portion. Partial removal of sapwood is a cumbersome task and is therefore particularly effective.

10‧‧‧ Pedestal

11‧‧‧ beams

12‧‧‧Linear slider

13‧‧‧Sapwood separation head

14‧‧‧Drawing station

15‧‧‧Sapwood separation table

16‧‧‧ cut-off station

17‧‧‧cutting mechanism

20‧‧‧Substrate

21‧‧‧Ceramic substrate

22‧‧‧ functional area

23‧‧‧ Surface layer of ceramic substrate

24‧‧‧Linear protrusion

31‧‧‧ hanger base

32‧‧‧ hanger

33, 34‧‧‧ hanger bracket

35‧‧‧Linear slider

40‧‧‧ head

41‧‧‧floor

42‧‧‧elastic sheet

43‧‧‧ catheter

44‧‧‧Blowers

46‧‧‧Latch mechanism

47‧‧‧ push board

47a‧‧‧

47b‧‧‧ side

47c‧‧‧

47d‧‧‧ side

48‧‧‧ cylinder

48a‧‧‧ Main body

48b‧‧‧flat joint members

48c‧‧‧Frame connection members

51‧‧‧ Arm

51a‧‧‧ catheter

52‧‧‧ chamber

53‧‧‧floor

54‧‧‧ elastic board

55‧‧‧Rotary axis

A‧‧‧ line

S _x1 ‧‧‧

S _xm ‧‧‧

S _y1 ‧‧‧

S _yn ‧ ‧ scribe

X‧‧‧axis

Y‧‧‧Axis

Fig. 1 is a perspective view showing an overall configuration of a substrate cutting mechanism (line, sap separation, and cutting) for realizing an embodiment of the present invention.

Fig. 2 is a front view showing a substrate cutting mechanism for realizing an embodiment of the present invention.

Figs. 3(a) and 3(b) are a front view and a partial cross-sectional view taken along line A-A, showing a substrate on which the sapwood is separated by the sapwood separating apparatus of the embodiment.

Fig. 4 is a perspective view showing a sapwood separating head of the sapwood separating device according to the embodiment of the present invention.

Fig. 5 is a front view of the sapwood separating head of the sapwood separating device of the embodiment.

Fig. 6 is a bottom view of the sapwood separating head of the sapwood separating apparatus of the embodiment.

Fig. 7 is a perspective view showing a portion of the sapwood separating head of the sapwood separating apparatus of the embodiment, which is partially cut away.

Fig. 8 is a perspective view showing an example of a vacuum cleaner used in the sapwood separating device of the embodiment.

Fig. 9 is a perspective view showing an example of a push plate used in the side material separating device of the embodiment.

Fig. 10 is a side view showing a sapwood separating head, a sapwood separating table, and a cutting table of the sapwood separating device according to the embodiment of the present invention.

Fig. 11 is a cross-sectional view showing the sapwood separating table and the cutting table of the embodiment.

Fig. 12 is a cross-sectional view showing a portion of a sapwood separating head and a sapwood separating table of the sapwood separating apparatus of the embodiment.

The sapwood separating table according to the embodiment of the present invention will be described. Fig. 1 is a perspective view showing an overall configuration of a substrate cutting mechanism of the embodiment, and Fig. 2 is a front view showing an overall configuration of a substrate cutting mechanism of the embodiment. As shown in the figures, the beam 11 is held on the base 10 parallel to the upper surface of the base 10 by a bracket, and a linear slider 12 is disposed laterally of the beam 11. The linear slider 12 allows the sapwood separating head 13 to freely move along the beam 11. As shown in FIG. 2, the susceptor 10 is provided with a scribing table 14 for scribing a brittle material substrate (hereinafter simply referred to as a substrate), a sapwood separating table 15 for separating the sapwood described below, and a cutting table. 16. The sapwood separating head 13 attracts the substrate from the scribe line 14 and transports the substrate The sapwood separation is performed after the sapwood separating table 15 on the right side of the drawing.

In the embodiment of the present invention, a substrate to be transported and separated by a side material will be described. The substrate 20 is a substrate having a plurality of functional regions 22 formed at a fixed pitch along the x-axis and the y-axis on the ceramic substrate 21 by a manufacturing process as shown in a front view and a partial cross-sectional view thereof in FIG. The functional area 22 is, for example, a region having a function as an LED (Light Emitting Diode), and a circular lens for an LED is formed on each surface of each functional region.

Further, in order to cut each of the functional regions to form an LED wafer, before the substrate 20 is cut, the respective functional regions are centered by the scribing device, and the longitudinal lines S _y1 to S _{The yn} is scribed in a manner orthogonal to the horizontal scribe lines S _x1 to S _xm .

The carried-in substrate 20 is placed on the scribe line 14 shown in FIG. 2, and the surface on which the lens is formed is used as the upper surface, and the scribe lines S _x1 to S _xm and the scribe lines S _{y1 are} formed by a scribing device (not shown). S _yn . Although the substrate 20 which has just been scribed is formed with a scribe line, it is not completely cut. That is, the substrate 20 is in a connected state, and has a portion of a plurality of functional regions arranged along the x-axis and the y-axis and an excess portion of the sapwood which is the outer periphery.

Next, the sapwood separation head 13 for sucking and transporting the substrate 20 and separating the sapstock from the substrate 20 will be described. 4 is a perspective view showing the sapwood separating head 13, FIG. 5 is a side view showing the sapwood separating head, FIG. 6 is a bottom view showing the sapwood separating head, and FIG. 7 is a partial cut of the sapwood separating head. Stereo picture.

As shown in Fig. 4, in the sapwood separating head 13, the substantially L-shaped hanger 32 is vertically connected to the hanger base 31 in the horizontal direction of a substantially square shape. The rectangular hanger bracket 33 is connected to the side of the hanger 32. Further, the rectangular hanger bracket 34 is attached to the hanger bracket 33 so as to overlap the surface of the hanger bracket 33, and is linearly movable up and down. The slider 35 is disposed on the hanger bracket 34. The head 40 is disposed below the linear slider 35. The linear slider 35 is a lifting mechanism that has an inflow of an inflowing air flow in both the upper direction and the lower direction, and The head 40 is moved up and down by switching the inflow. Further, the linear slider 35 is only required to be able to move the head 40 up and down, and is not only a mechanism for moving the head up and down by the inflow of the air flow, but also the head can be moved up and down by a motor or the like.

The head 40 is a rectangular parallelepiped casing, the inside of which is a cavity, and the lower surface is open. Further, as shown in Fig. 7, a bottom plate 41 is provided on the lower surface. The bottom plate 41 is a flat metal member whose lower surface is made of, for example, aluminum. On the bottom plate 41, a plurality of openings arranged in the xy direction are provided at equal intervals so as to correspond to the functional regions 22 of the scribed substrate 20. The openings are each set to be larger than the diameter of the lens. Further, an opening along the outer circumference is also provided in a portion corresponding to the sapwood outside the functional region 22 of the substrate 20.

A thin elastic sheet 42 is mounted on the lower surface of the bottom plate 41. The elastic sheet 42 is a flat rubber flat plate. Further, as shown in FIG. 6, the elastic sheet 42 has openings at equal intervals in the x direction and the y direction corresponding to the respective functional regions 22 of the substrate 20 to be transported. Further, an opening is provided in a portion corresponding to the sapwood on the outer periphery of the functional region 22 of the substrate 20. These openings are at the same position when the bottom plate 41 and the elastic sheet 42 are overlapped. Here, the opening of the bottom plate 41 and the opening of the elastic sheet 42 are configured to have a diameter slightly larger than the diameter of the lens of the LED formed in the functional region 22, and to attract the scribed substrate 20, the functional region 22 The lens does not directly contact the elastic sheet 42.

Next, a duct 43 is attached to one side of the head 40, and a blower 44 of the cleaner shown in Fig. 8 is connected to the front end of the duct 43. Further, a vacuum cleaner is used here, but the blower 44 may be used alone. When the blower 44 is driven while the substrate 20 is brought into contact with the elastic sheet 42, and air is sucked through the duct 43, the air can be sucked from the openings of the bottom plate 41 and the elastic sheet 42, and the substrate 20 can be attracted. Moreover, by switching the air flow from the inflow to the outflow by the switching unit (not shown), it is possible to switch to a state in which air is ejected from the opening of the elastic sheet 42.

Further, a plurality of latch mechanisms 46 are provided on the four side walls of the head portion 40. The latch mechanism 46 is for detachably holding the bottom plate 41 and the elastic sheet 42 in the head 40 The lower surface, and the mechanism that can be easily replaced when the rubber of the elastic sheet 42 is deteriorated. In addition, the latch mechanism 46 can also be disposed on at least one of the parallel side walls of the head 40.

The frame-shaped push plate 47 shown in FIG. 9 is vertically movably provided on the outer periphery of the lower portion of the head portion 40. The push plate 47 separates the excess portion around the substrate 20 as a sap material by lowering the push plate 47 in a state where the substrate 20 is held between the head portion 40 and the sapwood separating table 15. The push plate 47 is a frame-shaped member corresponding to the size of the sapwood portion around the substrate 20. Further, as shown in the figure, the upper surface is fixed in height, and the thickness of the pair of opposing sides 47a, 47b is thick, and the thickness of the opposite sides 47c, 47d at the right angles is thin.

Next, the lifting mechanism of the push plate 47 will be described. A cylinder 48 is provided as a lifting mechanism in the side walls of the head 40 which are parallel to each other except one side wall of the connecting duct 43. As shown in Fig. 5, the air cylinder 48 has a main body portion 48a fixed to the side wall of the head portion 40 by screwing, a flat connecting member 48b that is vertically movable, and a frame-shaped connecting member 48c connected to the connecting member 48b. Further, the push plate 47 is movably connected to the lower side of the connecting member 48c.

Next, the sapwood separating table 15 for separating the sapwood will be described. As shown in FIGS. 10 to 12, the sapwood separating table 15 has a rectangular chamber 52 and an upper bottom plate 53 on the arm 51, and an elastic plate 54 having substantially the same shape as the bottom plate 53. A large recess is formed in the central portion of the chamber 52 to communicate with the conduit 51a formed inside the arm 51. The bottom plate 53 is a rectangular flat plate corresponding to the entire functional area of the cut substrate, but is preferably set to be slightly smaller than the entire functional area in advance. The bottom plate 53 is made of, for example, aluminum. A plurality of openings aligned in the xy direction are provided on the bottom plate 53 so as to correspond to the respective functional regions 22.

An elastic plate 54 is attached to the upper surface of the bottom plate 41. The elastic plate 54 is a flat plate made of rubber or the like corresponding to the shape of a rectangular region, and the rectangular region corresponds to the entire functional region of the substrate 20, but is preferably set to be slightly smaller than the entire functional region in advance. In addition to the peripheral portions of the four sides, the elastic plate 54 is provided with a plurality of openings aligned in the xy direction so as to correspond to the openings of the outer bottom plate 53, that is, the functional regions of the substrate to be scribed. Elastic plate 54 The edge portion of the upper surface is preferably a slightly curved (chamfered) configuration.

Moreover, since the openings of the elastic plate 54 and the bottom plate 53 are provided corresponding to the respective functional regions 22, when the elastic plate 54 and the bottom plate 53 are overlapped, the external air can be circulated to the cavity through the openings. The recess of chamber 52. The vacuum suction device is connected to the duct 51a inside the arm 51 via a pipe (not shown), and the air suction device can be driven to suck or suck air from the opening of the elastic plate 54.

Further, the arm 51 is configured to be rotatable 180 degrees in the hour hand direction from the state of FIG. 10 around the rotation shaft 55. A rotating mechanism is provided on the shaft, and the rotating mechanism rotates the arm 51 and the upper chamber 52, the bottom plate 53, and the elastic plate 54 together. The rotating mechanism may be a rotating cylinder as long as it can rotate the arm 51 by 180 degrees, and may include a motor and a reduction gear.

Next, a case where the substrate 20 is transferred from the scribing stage 14 to the sapwood separating table 15 by the sapwood separating device will be described. First, the sapwood separating head 13 of the sapwood separating device is moved to directly above the substrate 20 on the scribe line 14, and the head 40 is aligned with the substrate 20 to be lowered. Then, the opening of the elastic sheet 42 at the lowermost portion of the head 40 is positioned in correspondence with the lens of the LED. When the blower 44 is driven to suck air through the duct 43, air is sucked from the openings of the bottom plate 41 and the elastic sheet 42, and the substrate 20 that is in contact with the elastic sheet 42 can be sucked. Here, even if air leaks when air is sucked from the opening of the elastic sheet 42, the air always flows into the inside from the opening, so that the substrate 20 can be attracted. Then, the substrate 20 that has been scribed can be directly lifted by lifting the sap separation head 13.

By moving the sap separation head 13 as a whole by the linear slider 12 in this state, the substrate 20 can be transported to a desired position. As a result, after the sapwood separating head 13 is moved right above the sapwood separating table 15, the head 40 is lowered by the linear slider 35. Then, the substrate 20 held on the lower surface of the head portion 40 is in contact with the upper portion of the sapwood separating table 15, and is positioned such that the functional regions 22 are respectively positioned corresponding to the openings of the elastic sheets 54. And stop falling. Then, in a state where the lower surface of the substrate 20 is in contact with the elastic plate 54, the substrate 20 can be held on the sapwood separating table 15 by sucking air through the arm 51. At this time, the blower 44 can be kept in operation, and the blower 44 can be stopped.

Next, the operation of the sapwood separating device when the sapwood is separated will be described. First, the air pushing plate 47 at the lower portion of the head portion 15 can be lowered by blowing air from the lifting mechanism cylinder 48 of the push plate 47. When the push plate 47 is lowered in parallel with the substrate 20, first, the thick peripheral portions 47a, 47b are separated from the elongated peripheral portion on the outer side of the functional region of the substrate 20 by the downward pressure to be separated into a sapwood. Further, when the lowering continues, the elongated peripheral portions on the outer side of the functional region of the substrate 20 are separated by the lower thickness 47c, 47d into a sapwood. In this way, the sapwood around the substrate 20 can be completely separated by one lowering operation of the push plate 47. At this time, the adjacent sides of the periphery of the substrate 20 are not separated as the sapwood at the same time. Further, the elastic plate 54 is slightly smaller than the push plate 47, and the edge portion of the upper surface thereof is chamfered and bent. Therefore, the functional area of the substrate 20 is not damaged, and the surrounding sapwood can be completely separated in a short time.

Thereafter, in a state where air is sucked from the arm 51, air is blown from the air blower 44 to raise the head 40. Thereby, the head 40 is separated from the substrate 20. In a state where the head 40 is raised, the sapwood separating head 13 is moved to the left side of FIG. 2 by the linear slider 12 to return to the original state.

In this embodiment, an example is described in which a sapwood having an LED chip having an LED substrate having a functional area on the upper surface is separated. However, the present invention can be applied not only to a wafer having a lens on its surface, but also to a system. It can be applied to a wafer having a functional region without any protrusions, and also to a brittle material substrate including a functional region having protrusions other than the lens.

Further, in the embodiment, the ceramic substrate has been described, but a substrate of a layer of another type of material may be used. For example, it may be a glass substrate or a semiconductor substrate.

In this embodiment, the side having the separation function of the sapwood and the conveying function of the substrate The material separation head has been described. Of course, the sapwood separation head can be separated even if it is a sapwood separation head that does not have a substrate transfer function. In the above-described sapwood separating table, the cylinder is described as a lifting mechanism of the push plate. Of course, the lifting mechanism may be a lifting mechanism of another shape such as a linear slider.

[Industrial availability]

According to the present invention, it is possible to separate the sapwood from the substrate which has been scribed by the brittle material substrate (ceramic substrate or the like), and it can be effectively applied to the sapwood separating apparatus at the time of substrate production.

10‧‧‧ Pedestal

13‧‧‧Sapwood separation head

15‧‧‧Sapwood separation table

40‧‧‧ head

51‧‧‧ Arm

52‧‧‧ chamber

53‧‧‧floor

54‧‧‧ elastic board

55‧‧‧Rotary axis

Claims (6)

A sapwood separating method for a brittle material substrate, which is a sapwood separating method for separating sapwood around a functional region of a brittle material substrate, and the brittle material substrate is formed on one side thereof at a specific interval in the longitudinal direction and the lateral direction. a functional area, wherein the sapwood is formed in a lattice shape in a manner that the functional area is located at the center; and the sapwood separation method of the brittle material substrate is: holding the brittle material substrate on the sapwood separation table, the sap separation An elastic plate having a shape corresponding to the entire functional region of the brittle material substrate on the upper surface, and a region corresponding to the entire functional region of the brittle material substrate is held from the upper portion, and the position of the sapwood with the brittle material substrate is obtained The corresponding frame-shaped push plate is lowered while the upper portion of the sapwood separating table is kept parallel to the brittle material substrate, and the sapwood is separated. A sapwood separating device for a brittle material substrate, which is a sapwood separating device for separating sapwood around a brittle material substrate, and the brittle material substrate has a functional region formed on one side thereof at a specific interval in the longitudinal direction and the lateral direction. And the sapwood separating device of the brittle material substrate comprises: a sapwood separating table that holds the brittle material substrate on the upper surface; the frame push plate And having a side corresponding to a portion of the sapwood that is the periphery of the brittle material substrate; and a lifting mechanism that causes the push plate to be parallel to the surface of the brittle material substrate Lifting. The sapwood separating device of the brittle material substrate of claim 2, wherein the sapwood separating table comprises: a chamber having a recess; a bottom plate disposed on the chamber and having a plurality of openings; and an elastic plate, It is disposed on the upper surface of the above-mentioned bottom plate. The sapwood separating device of the brittle material substrate according to claim 3, wherein the elastic plate is a plate of a flat plate which is narrower than an effective area on the inner side of the sapwood to be separated from the substrate, and the edge of the upper surface is curved. The sapwood separating device of the brittle material substrate of claim 2, wherein the push plate is a plate having opposite sides and a height perpendicular to the other two sides of the two sides. The sapwood separating device for a brittle material substrate according to claim 2, wherein the push-plate is movably attached to the sapwood separating head that transports the brittle material substrate and separates the sapwood.