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TW201604528A - Microfluidic bio-sensing device - Google Patents

Microfluidic bio-sensing device Download PDF

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TW201604528A
TW201604528A TW103125645A TW103125645A TW201604528A TW 201604528 A TW201604528 A TW 201604528A TW 103125645 A TW103125645 A TW 103125645A TW 103125645 A TW103125645 A TW 103125645A TW 201604528 A TW201604528 A TW 201604528A
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Taiwan
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electrode layer
microfluidic
sensing device
biomedical sensing
layer
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TW103125645A
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Chinese (zh)
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周榮泉
廖義宏
蔡亞歷
程聰義
葉冠辰
林俊文
林欽益
張瓊云
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國立雲林科技大學
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Priority to TW103125645A priority Critical patent/TW201604528A/en
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Abstract

A microfluidic bio-sensing device is provided, including a microfluidic unit and a bio-sensing unit. The microfluidic unit includes a detection area. The bio-sensing unit is joined with the microfluidic unit band includes a substrate, a ruthenium oxide (RuO2) electrode layer, an insulating layer, a glucose sensing membrane, and a conductor layer. The RuO2 electrode layer is formed on the substrate. The insulating layer is formed on the RuO2 electrode layer and exposes a portion of the RuO2 electrode layer. The glucose sensing membrane is fixed on the portion of the RuO2 electrode layer, wherein the position of the glucose sensing membrane corresponds to the detection area. The conductor layer is formed on the RuO2 electrode layer and electrically connected to the glucose sensing membrane. When a liquid sample flows through the detection area, the glucose sensing membrane is configured to detect the glucose concentration of the liquid sample in dynamical condition.

Description

微流體生醫感測裝置 Microfluid biomedical sensing device

本發明係關於一種生醫感測裝置(Bio-sensing device),特別係有關於一種整合微流體(microfluidics)技術之葡萄糖(glucose)生醫感測裝置。 The present invention relates to a bio-sensing device, and more particularly to a glucose biomedical sensing device incorporating microfluidics technology.

生醫感測器係由Clark與Lyons二人於1962年提出了酵素電極之觀念,並利用酵素電極測試血糖濃度,始開創了第一代生醫感測器。葡萄糖(glucose)感測器則係以葡萄糖氧化(Glucose Oxidase,GOD)酵素與葡萄糖發生反應並進行電子傳遞,其中酵素帶有電化學活性中心,藉由電化學反應過程中之氧消耗量或過氧化氫濃度,而可得知葡萄糖濃度。Updike與Hicks二人於1967年提出了使用聚丙烯酰胺(Polyacrylamide)包埋及固定葡萄糖氧化酵素於電極上,透過氧氣作為電子之接受體,可偵測氧消耗量,進而得知葡萄糖濃度。另外,Shuang Zhao於2006年以金奈米微粒修飾玻璃碳電極,增加電極間之電子交換速率,且可縮短葡萄糖氧化酵素反應時間。 The biomedical sensor was developed by Clark and Lyons in 1962 with the concept of an enzyme electrode, and the enzyme electrode was used to test the blood glucose concentration, and the first generation of biomedical sensors was created. The glucose sensor reacts with glucose and reacts with glucose by Glucose Oxidase (GOD) enzyme, which has an electrochemically active center, and the oxygen consumption during the electrochemical reaction process The concentration of hydrogen peroxide is known as the glucose concentration. In 1967, Updike and Hicks proposed the use of polyacrylamide to embed and immobilize glucose oxidase on the electrode, and oxygen as an electron acceptor to detect oxygen consumption and thus the glucose concentration. In addition, Shuang Zhao modified the glassy carbon electrode with gold nanoparticles in 2006 to increase the electron exchange rate between the electrodes and shorten the reaction time of glucose oxidase.

與傳統生物分析技術相較,微流體(microfluidics)技術可幫助響應速度之提升、減少待測量及可靠性之提升。 於1990年Manz等人提出了一種微型全分析系统架構,可將分析步驟整合於一個小空間進行分析,如樣品預置、反應、分離及檢測等,且反應時間非常快速。基於上述之優點,微流體技術被應用於許多領域,如生物醫學及生醫工程。 Compared to traditional bioanalytical techniques, microfluidics technology can help improve response speed, reduce the need to measure and improve reliability. In 1990, Manz et al. proposed a micro-full analysis system architecture that integrates analysis steps into a small space for analysis, such as sample setup, reaction, separation, and detection, with very fast reaction times. Based on the above advantages, microfluidic technology is used in many fields, such as biomedical and biomedical engineering.

目前而言,微流體裝置大多利用準分子雷射加工或微機電製程等方式備製,其中準分子雷射加工可直接對加工件進行刻畫,具有快速成型之優點,但加工面略顯粗糙;至於利用微機電製程備製微流體裝置,雖然可克服上述之缺點,但耗費時間則較長且成本較高。國內目前有關微流體裝置之專利文獻可參考中華民國專利之證書號第I 393627、I 383138、M 445196、I 310786以及I 294965號。 At present, microfluidic devices are mostly prepared by means of excimer laser processing or microelectromechanical processing. Excimer laser processing can directly describe the processed parts, which has the advantages of rapid prototyping, but the processing surface is slightly rough; As for the microfluidic device prepared by the microelectromechanical process, although the above disadvantages can be overcome, it takes a long time and is costly. The current patent documents relating to microfluidic devices in the country can be referred to the Republic of China Patent Nos. I 393627, I 383138, M 445196, I 310786 and I 294965.

有鑑於此,本發明實施例提出一種整合微流體技術之生醫感測裝置,可於動態情況下量測待測溶液的複數個特性值(例如輸出電壓),進而能夠得知待測溶液的葡萄糖濃度。 In view of this, the embodiments of the present invention provide a biomedical sensing device integrated with a microfluidic technology, which can measure a plurality of characteristic values (such as an output voltage) of a solution to be tested under dynamic conditions, thereby being able to know the solution to be tested. Glucose concentration.

此外,本發明實施例透過網版印刷技術備製微流體單元,並將微流體單元與可撓式生醫感測單元結合以完成微流體生醫感測裝置之備製,藉此亦可有效降低製造成本並具有大量化生產之優勢。 In addition, the embodiment of the present invention prepares the microfluidic unit through the screen printing technology, and combines the microfluidic unit with the flexible biomedical sensing unit to complete the preparation of the microfluid biomedical sensing device, thereby effectively Reduce manufacturing costs and have the advantage of mass production.

1‧‧‧微流體生醫感測系統 1‧‧‧Microfluid biomedical sensing system

10‧‧‧微流體生醫感測裝置 10‧‧‧Microfluid biomedical sensing device

22‧‧‧注射幫浦 22‧‧‧Injection pump

23‧‧‧待測溶液 23‧‧‧Test solution

24‧‧‧連接管 24‧‧‧Connecting tube

26‧‧‧廢液儲存器 26‧‧‧ Waste storage

102‧‧‧第一結合件 102‧‧‧First joint

104‧‧‧第二結合件 104‧‧‧Second joint

106‧‧‧固定板 106‧‧‧Fixed plate

200‧‧‧微流體單元 200‧‧‧Microfluidic unit

205‧‧‧待測溶液注入口 205‧‧‧Test solution injection port

207‧‧‧待測溶液流出口 207‧‧‧Measure solution outlet

209‧‧‧檢測區域 209‧‧‧Detection area

300‧‧‧生醫感測單元 300‧‧‧ Biomedical Sensing Unit

301‧‧‧基板 301‧‧‧Substrate

303‧‧‧二氧化釕電極層 303‧‧‧ cerium oxide electrode layer

304‧‧‧葡萄糖酵素薄膜 304‧‧‧Glucosamine film

305‧‧‧參考電極層 305‧‧‧reference electrode layer

306‧‧‧導線層 306‧‧‧Wire layer

307‧‧‧絕緣層 307‧‧‧Insulation

第1圖表示本發明一實施例之微流體生醫感測系統之示意圖。 Fig. 1 is a schematic view showing a microfluid biomedical sensing system according to an embodiment of the present invention.

第2圖表示第1圖中之微流體生醫感測裝置之爆炸圖。 Figure 2 is an exploded view of the microfluidic biosensor sensing device of Figure 1.

第3A圖表示第2圖中之微流體單元之俯視圖。 Fig. 3A is a plan view showing the microfluidic unit in Fig. 2.

第3B圖表示沿第3A圖中X1-X2方向之剖視圖。 Fig. 3B is a cross-sectional view taken along the line X1-X2 in Fig. 3A.

第4圖表示藉由薄膜測厚儀量測本發明一實施例之微流體單元之平整性分析圖。 Fig. 4 is a view showing the analysis of the flatness of the microfluidic unit of an embodiment of the present invention by a film thickness gauge.

第5圖表示第2圖中之生醫感測單元之示意圖。 Fig. 5 is a view showing the biomedical sensing unit in Fig. 2.

第6圖表示本發明一實施例之微流體生醫感測系統量測葡萄糖溶液濃度100mg/dL至500mg/dL之量測圖。 Fig. 6 is a graph showing the measurement of the glucose solution concentration of 100 mg/dL to 500 mg/dL by the microfluidic biosensor sensing system according to an embodiment of the present invention.

請先參閱第1圖,本發明一實施例之微流體生醫感測系統1主要包括一微流體生醫感測裝置10、一注射幫浦22、兩連接管24以及一廢液儲存器26,前述注射幫浦22與廢液儲存器26各別透過一連接管24與微流體生醫感測裝置10相連接。其中,注射幫浦22可將一待測溶液23注入微流體生醫感測裝置10,並由微流體生醫感測裝置10中的生醫感測單元300(請參閱第2及5圖)量測待測溶液23且得到至少一感測訊號,另外生醫感測單元300可電性連接至一外部的訊號分析系統(圖未示),並由該訊號分析系統對該感測訊號執行儲存、分析、顯示等功能。此外,廢液儲存器26係用以提供量測完之廢液有足夠之儲存空間。 Please refer to FIG. 1 . The microfluid biomedical sensing system 1 of the embodiment of the present invention mainly includes a microfluid biomedical sensing device 10 , an injection pump 22 , two connecting tubes 24 , and a waste liquid storage device 26 . The injection pump 22 and the waste liquid reservoir 26 are respectively connected to the microfluid biomedical sensing device 10 through a connecting tube 24. The injection pump 22 can inject a solution to be tested 23 into the microfluid biomedical sensing device 10, and the biomedical sensing unit 300 in the microfluid biomedical sensing device 10 (see Figures 2 and 5). The test solution 23 is measured and at least one sensing signal is obtained. The biomedical sensing unit 300 can be electrically connected to an external signal analysis system (not shown), and the signal analysis system executes the sensing signal. Store, analyze, display and other functions. In addition, the waste reservoir 26 is used to provide sufficient storage space for the measured waste liquid.

接著請參閱第2圖,本發明一實施例之微流體生 醫感測裝置10主要包括複數個第一結合件102、複數個第二結合件104、兩固定板106、一微流體單元200以及一生醫感測單元300,其中微流體單元200組裝於生醫感測單元300上方,兩固定板106分別作為一上蓋及一下蓋,並透過三明治結構之方式將微流體單元200及生醫感測單元300夾持於中央,且該些第一結合件102及第二結合件104可將相互疊放的微流體單元200、生醫感測單元300及兩個固定板106等元件進行鎖固,以完成微流體生醫感測裝置10之組裝。於本實施例中,固定板106例如為壓克力板,且第一結合件102及第二結合件104則例如為不銹鋼螺絲及不銹鋼螺帽。 Next, referring to FIG. 2, a microfluidic body according to an embodiment of the present invention The medical sensing device 10 mainly includes a plurality of first bonding members 102, a plurality of second bonding members 104, two fixing plates 106, a microfluidic unit 200, and a biomedical sensing unit 300, wherein the microfluidic unit 200 is assembled into a medical doctor. Above the sensing unit 300, the two fixing plates 106 are respectively used as an upper cover and a lower cover, and the microfluidic unit 200 and the biomedical sensing unit 300 are clamped in the center through the sandwich structure, and the first bonding members 102 and The second bonding member 104 can lock components such as the microfluidic unit 200, the biomedical sensing unit 300, and the two fixing plates 106 stacked on each other to complete assembly of the microfluid biomedical sensing device 10. In this embodiment, the fixing plate 106 is, for example, an acrylic plate, and the first coupling member 102 and the second coupling member 104 are, for example, stainless steel screws and stainless steel nuts.

第3A圖表示第2圖中之微流體單元200之俯視 圖,且第3B圖表示沿第3A圖中X1-X2方向之剖視圖。由第3A及3B圖可得知,本實施例之微流體單元200包括一待測溶液注入口205、一待測溶液流出口207以及一檢測區域209,其中檢測區域209連通待測溶液注入口205與待測溶液流出口207。 Figure 3A shows the top view of the microfluidic unit 200 in Figure 2 Fig. 3B is a cross-sectional view taken along the line X1-X2 in Fig. 3A. As can be seen from the figures 3A and 3B, the microfluidic unit 200 of the present embodiment includes a solution injection port 205 to be tested, a solution solution outlet port 207, and a detection region 209, wherein the detection region 209 is connected to the solution injection port to be tested. 205 and the solution outlet outlet 207.

另外,請一併參閱第1至3B圖,本實施例之微 流體生醫感測裝置10中作為上蓋之固定板106更形成有複數個開孔,分別對應於微流體單元200之待測溶液注入口205及待測溶液流出口207。如此一來,待測溶液23可經由固定板106上之開孔及微流體單元200之待測溶液注入口205進 入檢測區域209,之後再經由微流體單元200之待測溶液流出口207及固定板106上之開孔流出微流體生醫感測裝置10,並進入廢液儲存器26以進行收集。 In addition, please refer to the figures 1 to 3B together, the micro of this embodiment The fixed plate 106 as the upper cover of the fluid biomedical sensing device 10 is further formed with a plurality of openings corresponding to the solution injection port 205 of the microfluidic unit 200 and the solution flow outlet 207 to be tested. In this way, the solution 23 to be tested can pass through the opening on the fixing plate 106 and the solution injection port 205 of the microfluidic unit 200. After entering the detection area 209, the microfluidic biosensor sensing device 10 is discharged through the opening of the solution outlet 207 and the fixing plate 106 of the microfluidic unit 200, and enters the waste reservoir 26 for collection.

需特別說明的是,本實施例是藉由網版印刷機 (screen printer),將設計完成之網版塗佈環氧樹脂(epoxy resin),並於不銹鋼基板上進行網版印刷後,置入烘箱內以130℃烘烤30分鐘,而完成第一層母模之備製。根據微流體單元200之不同高度需求,可再利用疊合之方式,於不銹鋼基板上重複進行網版印刷以增加母模之高度,進而滿足微流體單元200之實際高度需求。 It should be specially noted that this embodiment is by screen printing machine. (screen printer), the designed screen is coated with epoxy resin, and screen-printed on a stainless steel substrate, and then placed in an oven and baked at 130 ° C for 30 minutes to complete the first layer of mother Model preparation. According to the different height requirements of the microfluidic unit 200, the screen printing can be repeated on the stainless steel substrate to increase the height of the master mold, thereby satisfying the actual height requirement of the microfluidic unit 200.

微流體單元200之材料較佳係採用二甲基矽氧 烷(poly-dimethylsiloxane,PDMS)。透過將PDMS與固化劑以10:1之體積比例混合,並靜置在前述母模上,經過溫度70℃以及90分鐘之固化處理,最後脫膜即可得到微流體單元200。 The material of the microfluidic unit 200 is preferably dimethyloxane Poly-dimethylsiloxane (PDMS). The microfluidic unit 200 is obtained by mixing PDMS and a curing agent in a volume ratio of 10:1 and resting on the above-mentioned master mold, and curing at a temperature of 70 ° C and 90 minutes, and finally releasing the film.

第4圖表示藉由薄膜測厚儀(Thin film measurement)量測本發明一實施例之微流體單元之平整性分析圖,由量測結果可得知利用多次網版印刷之方式係能夠有效提升微流體單元之平整性及降低毛邊現象。此外,透過網版印刷製程備製微流體單元之母模,亦具有方便、快速且不需使用光罩等優點,據此可大幅降低製造成本,並能夠改善傳統準分子雷射加工或微機電製程方法備製微流體裝置之缺點。 Figure 4 shows the film thickness gauge (Thin film) The measurement results of the flatness of the microfluidic unit according to an embodiment of the present invention are measured. The measurement results show that the method of using multiple screen printing can effectively improve the flatness of the microfluidic unit and reduce the burr phenomenon. In addition, the master mold of the microfluidic unit is prepared by the screen printing process, which is convenient, fast and does not require the use of a mask, thereby greatly reducing the manufacturing cost and improving the conventional excimer laser processing or MEMS. The process method prepares the shortcomings of the microfluidic device.

接著請參閱第5圖,本發明一實施例之生醫感測 單元300主要包括一基板301、一二氧化釕(RuO2)電極層303、複數個葡萄糖酵素薄膜304、一圖形化之參考電極層305、一圖形化之導線層306以及一圖形化之絕緣層307。 Referring to FIG. 5, the biomedical sensing unit 300 of the embodiment of the present invention mainly includes a substrate 301, a ruthenium dioxide (RuO 2 ) electrode layer 303, a plurality of glucose enzyme films 304, and a patterned reference electrode. Layer 305, a patterned wire layer 306, and a patterned insulating layer 307.

需特別說明的是,本實施例之基板301採用可撓 式基板(例如塑膠(PET)基板),且二氧化釕(RuO2)電極層303可透過射頻濺鍍(RF sputtering)製程方法沉積於基板301上方。此外,導線層306形成於二氧化釕電極層303上方並包括複數條導線,且參考電極層305亦形成於二氧化釕電極層303上方並包括複數個矩形電極,其中該些矩形電極與導線相互電性連接。於本實施例中,導線層306與參考電極層305之材料包括銀膠或其他導電膠體,且導線層306與參考電極層305可透過網版印刷(Screen printing)技術同時形成於二氧化釕電極層303上方。絕緣層307則覆蓋於二氧化釕電極層303上之導線層306與參考電極層305以外的位置,並暴露出二氧化釕電極層303之複數個區域(如第5圖中與導線層306連接之複數個方形圖案)。於本實施例中,絕緣層307之材料包括環氧樹脂或其他絕緣膠體,並可透過網版印刷技術形成於二氧化釕電極層303上方。 It should be noted that the substrate 301 of the present embodiment is a flexible substrate (for example, a plastic (PET) substrate), and the ruthenium dioxide (RuO 2 ) electrode layer 303 can be deposited by a radio frequency sputtering (RF sputtering) process. Above the substrate 301. In addition, the wire layer 306 is formed over the ceria electrode layer 303 and includes a plurality of wires, and the reference electrode layer 305 is also formed over the ceria electrode layer 303 and includes a plurality of rectangular electrodes, wherein the rectangular electrodes and the wires are mutually Electrical connection. In this embodiment, the material of the wire layer 306 and the reference electrode layer 305 includes silver paste or other conductive colloid, and the wire layer 306 and the reference electrode layer 305 can be simultaneously formed on the ceria electrode by screen printing technology. Above layer 303. The insulating layer 307 covers the position other than the wiring layer 306 on the ceria electrode layer 303 and the reference electrode layer 305, and exposes a plurality of regions of the ceria electrode layer 303 (as shown in FIG. 5 to the wire layer 306). a plurality of square patterns). In the present embodiment, the material of the insulating layer 307 includes an epoxy resin or other insulating colloid, and can be formed over the cerium oxide electrode layer 303 by a screen printing technique.

此外,前述二氧化釕電極層303之複數個暴露區 域上方更設置有複數個圓形葡萄糖酵素薄膜304(如第5中所示之複數個圓形圖案),電性連接導線層306之複數條導線。 於本實施例中,葡萄糖酵素薄膜304採用全氟磺酸聚合物(Nafion)微粒包埋法固定於二氧化釕電極層303上方,藉此葡萄糖酵素薄膜304可作為感測電極,並用以偵測待測溶液中之葡萄糖濃度,且導線層306可將葡萄糖酵素薄膜304產生之複數個感測訊號傳送至外部的訊號分析系統(圖未示)以進行儲存、分析或顯示等功能。另外,參考電極層305則可用以提供接地電壓位準,而絕緣層307能夠避免感測功能區(對應於該些感測電極及參考電極層之位置)以外之部分受到溶液中離子之干擾。應了解的是,生醫感測單元300之感測功能區係對應於微流體單元200之檢測區域209(第3A及3B圖)。 In addition, the plurality of exposed regions of the foregoing cerium oxide electrode layer 303 Above the domain, a plurality of circular glucose enzyme films 304 (such as the plurality of circular patterns shown in FIG. 5) are disposed, and a plurality of wires of the wire layer 306 are electrically connected. In the present embodiment, the glucose enzyme film 304 is fixed on the cerium oxide electrode layer 303 by using a perfluorosulfonic acid polymer (Nafion) particle embedding method, whereby the glucose enzyme film 304 can be used as a sensing electrode and used for detecting The glucose concentration in the solution to be tested, and the wire layer 306 can transmit a plurality of sensing signals generated by the glucose enzyme film 304 to an external signal analysis system (not shown) for storage, analysis or display. In addition, the reference electrode layer 305 can be used to provide a ground voltage level, and the insulating layer 307 can avoid interference of ions in the solution other than the sensing functional region (corresponding to the positions of the sensing electrodes and the reference electrode layer). It should be understood that the sensing functional area of the biomedical sensing unit 300 corresponds to the detection area 209 of the microfluidic unit 200 (Figs. 3A and 3B).

綜上所述,本發明提出一種微流體生醫感測裝 置,可於動態情況下量測待測溶液的複數個特性值(例如輸出電壓),進而能夠得知待測溶液的葡萄糖濃度。第6圖表示本發明一實施例之微流體生醫感測系統量測葡萄糖溶液濃度100mg/dL至500mg/dL之量測圖,其中注射幫浦之流量為每分鐘15μl。由結果可得知本實施例之微流體生醫感測系統的感測度(Sensitivity)及線性度(Linearity)分別為0.256mV/(mg/dL)及0.998。 In summary, the present invention provides a microfluidic medical sensory device The plurality of characteristic values (for example, output voltage) of the solution to be tested can be measured under dynamic conditions, thereby further knowing the glucose concentration of the solution to be tested. Fig. 6 is a graph showing the measurement of the glucose solution concentration of 100 mg/dL to 500 mg/dL by the microfluidic biosensor sensing system according to an embodiment of the present invention, wherein the flow rate of the injection pump is 15 μl per minute. It can be seen from the results that the sensitivity (Sensitivity) and linearity of the microfluidic biosensor sensing system of the present embodiment are 0.256 mV/(mg/dL) and 0.998, respectively.

此外,本發明實施例透過網版印刷技術備製微流 體單元,並將該微流體單元與可撓式生醫感測單元結合以完成微流體生醫感測系統中之微流體生醫感測裝置備製,藉此亦可有效降低製造成本並具有大量化生產之優勢。 In addition, the embodiment of the present invention prepares a microflow through screen printing technology. And the microfluidic unit is combined with the flexible biomedical sensing unit to complete the preparation of the microfluid biomedical sensing device in the microfluid biomedical sensing system, thereby effectively reducing the manufacturing cost and having The advantage of large quantitative production.

雖然本發明以前述之實施例揭露如上,然其並非用以限定本發明。本發明所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可做些許之更動與潤飾。因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 Although the present invention has been disclosed above in the foregoing embodiments, it is not intended to limit the invention. Those skilled in the art having the ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

10‧‧‧微流體生醫感測裝置 10‧‧‧Microfluid biomedical sensing device

102‧‧‧第一結合件 102‧‧‧First joint

104‧‧‧第二結合件 104‧‧‧Second joint

106‧‧‧固定板 106‧‧‧Fixed plate

200‧‧‧微流體單元 200‧‧‧Microfluidic unit

300‧‧‧生醫感測單元 300‧‧‧ Biomedical Sensing Unit

Claims (10)

一種微流體生醫感測裝置,包括:一微流體單元,具有一檢測區域;以及一生醫感測單元,與該微流體單元結合,其中該生醫感測單元包括:一基板;一二氧化釕電極層,形成於該基板上;一絕緣層,形成於該二氧化釕電極層上,並曝露出該二氧化釕電極層之一區域;一葡萄糖酵素薄膜,固定於該二氧化釕電極層之該區域上,且葡萄糖酵素薄膜之位置對應於該檢測區域;以及一導線層,形成於該二氧化釕電極層上並電性連接該葡萄糖酵素薄膜;其中,當一待測溶液流經該檢測區域時,該葡萄糖酵素薄膜用以於動態情況下量測該待測溶液的葡萄糖濃度。 A microfluid biomedical sensing device comprising: a microfluidic unit having a detection area; and a biomedical sensing unit coupled with the microfluidic unit, wherein the biomedical sensing unit comprises: a substrate; a dioxide a germanium electrode layer is formed on the substrate; an insulating layer is formed on the germanium dioxide electrode layer and exposes a region of the germanium dioxide electrode layer; a glucose enzyme film is fixed on the germanium dioxide electrode layer In the region, the position of the glucose enzyme film corresponds to the detection region; and a wire layer is formed on the cerium oxide electrode layer and electrically connected to the glucose saccharide film; wherein, when the solution to be tested flows through the When the region is detected, the glucose enzyme film is used to measure the glucose concentration of the solution to be tested under dynamic conditions. 如申請專利範圍第1項所述之微流體生醫感測裝置,其中該基板為可撓式基板。 The microfluidic biomedical sensing device of claim 1, wherein the substrate is a flexible substrate. 如申請專利範圍第1或2項所述之微流體生醫感測裝置,其中該二氧化釕電極層透過射頻濺鍍製程沉積於該基板上。 The microfluidic biomedical sensing device of claim 1 or 2, wherein the ceria electrode layer is deposited on the substrate by a radio frequency sputtering process. 如申請專利範圍第1項所述之微流體生醫感測裝置,其中該絕緣層之材料包括環氧樹脂,且該絕緣層透過網版印刷技術形成於該二氧化釕電極層上。 The microfluidic biomedical sensing device of claim 1, wherein the material of the insulating layer comprises an epoxy resin, and the insulating layer is formed on the ceria electrode layer by a screen printing technique. 如申請專利範圍第1項所述之微流體生醫感測裝置,其中該葡萄糖酵素薄膜採用全氟磺酸聚合物微粒包埋法固定於該二氧化釕電極層上。 The microfluidic biomedical sensing device according to claim 1, wherein the glucose enzyme film is fixed on the ceria electrode layer by perfluorosulfonic acid polymer microparticle embedding. 如申請專利範圍第1項所述之微流體生醫感測裝置,其中該導線層之材料包括銀膠,且該導線層透過網版印刷技術形成於該二氧化釕電極層上。 The microfluidic biomedical sensing device of claim 1, wherein the material of the wire layer comprises silver paste, and the wire layer is formed on the ceria electrode layer by a screen printing technique. 如申請專利範圍第1項所述之微流體生醫感測裝置,其中該微流體單元之一母模採用網版印刷技術備製。 The microfluidic biomedical sensing device of claim 1, wherein the master mold of the microfluidic unit is prepared by screen printing technology. 如申請專利範圍第1項所述之微流體生醫感測裝置,其中該微流體單元之材料包括二甲基矽氧烷。 The microfluidic biomedical sensing device of claim 1, wherein the material of the microfluidic unit comprises dimethyloxane. 如申請專利範圍第1項所述之微流體生醫感測裝置,其中該生醫感測單元更包括一參考電極層,形成於該二氧化釕電極層上並電性連接該導線層,該參考電極層用以提供一接地電壓位準。 The microfluidic biomedical sensing device of claim 1, wherein the biomedical sensing unit further comprises a reference electrode layer formed on the ceria electrode layer and electrically connected to the wire layer, The reference electrode layer is used to provide a ground voltage level. 如申請專利範圍第9項所述之微流體生醫感測裝置,其中該參考電極層之材料包括銀膠,且該參考電極層透過網版印刷技術形成於該二氧化釕電極層上。 The microfluidic biomedical sensing device of claim 9, wherein the material of the reference electrode layer comprises silver paste, and the reference electrode layer is formed on the ceria electrode layer by a screen printing technique.
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TWI728225B (en) * 2017-01-25 2021-05-21 英屬開曼群島商鴻騰精密科技股份有限公司 Microfluidic cartridge and stacked testing assembly thereof

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI728225B (en) * 2017-01-25 2021-05-21 英屬開曼群島商鴻騰精密科技股份有限公司 Microfluidic cartridge and stacked testing assembly thereof
US11027274B2 (en) 2017-01-25 2021-06-08 Foxconn Interconnect Technology Limited Microfluidic cartridge and stacked testing assembly with microfluidic cartridge thereof

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