TW201514502A - Chip inspection base - Google Patents

Abstract

A chip inspection base includes an inspection table provided with an inspection area thereon, wherein a positioning retaining wall is provided at a side of the inspection area; a first positioning member provided at one side of the inspection table and capable of moving between two positions which are respectively closing to and away from the inspection table, wherein the first positioning member includes at least one top column that can extend to the tabletop of the inspection table and approach to the positioning retaining wall when the first positioning member moves toward the inspection table; and a second positioning member provided at one side of the inspection table and capable of moving between two positions which are respectively closing to and away from the inspection table, wherein the second positioning member includes at least one top column that can extend to the tabletop of the inspection table and approach to the positioning retaining wall when the second positioning member moves toward the inspection table.

Description

Wafer test holder

The present invention relates to a wafer inspection apparatus, and more particularly to a wafer inspection holder.

In order to maintain the quality of the wafer at the factory, each wafer must be tested before it leaves the factory to determine the function of the wafer. At present, the detecting operation of the wafer is to manually place a wafer to be inspected on a testing machine of the detecting machine, and let the detecting machine perform the detection. After the completion, the wafer is removed and placed to the position where the detection is completed, and then taken. A wafer is placed on the inspection station of the inspection machine for inspection of the next wafer, and this is repeated.

Although such a detection method can achieve the basic purpose of detecting a wafer, most wafers are thin and flat, and many wafers are provided with a backing, so that it is not easy to pick and place the wafer in a manually operated manner. Moreover, the detection of the wafer is performed by the probe contacting the detection point of the wafer, so that the positioning of the wafer when it is placed on the detection seat is very important. If the positioning is inaccurate, the detection result is incorrect, so the wafer can be lifted. The accuracy of positioning is also an important issue.

It is an object of the present invention to provide a wafer inspection mount that is accurately positioned.

It is still another object of the present invention to provide a wafer detecting holder which can reduce the contact area between the wafer and the detecting surface.

In order to achieve the foregoing object, a wafer inspection seat according to the present invention includes a detection station having a detection area, and a side of the detection area is provided with a positioning retaining wall. The first positioning member is disposed on one side of the detecting platform and is movable between two positions close to and away from the detecting platform. The first positioning member includes at least one top post, and the top post can extend to the table surface of the detecting table and approach the positioning retaining wall when the first positioning member moves toward the detecting platform. A second positioning member is disposed on one side of the detecting platform and movable between two positions close to and away from the detecting platform. The second positioning member includes at least one top post, and the top post can extend to the table surface of the detecting table and approach the positioning retaining wall when the second positioning member moves toward the detecting platform.

The surface of the detecting seat is provided with a protrusion to reduce the contact area with the bottom surface of the wafer, so that the wafer can be more easily taken.

10‧‧‧Testing station

11‧‧‧ countertop

12‧‧‧Detection area

13‧‧‧ Positioning retaining wall

14‧‧‧ bump

15‧‧‧ Groove

131‧‧‧ first paragraph

132‧‧‧second paragraph

20‧‧‧First positioning piece

21‧‧‧Top column

22‧‧‧ rails

30‧‧‧Second positioning parts

31‧‧‧Top column

32‧‧‧rails

The first figure is a perspective view of the appearance of the present invention.

The second drawing is a top view of the invention.

The third figure is a top view of the present invention showing the state in which the positioning member is clamped to the wafer.

The fourth figure is a top view of the present invention showing the state in which the positioning member is positioned with different sized wafers.

In order to explain the technical features of the present invention in detail, the following preferred embodiments will be described with reference to the following drawings, wherein, as shown in the first to third figures, the wafer detecting pedestal of the present invention is disposed on the wafer. The detecting machine is configured to correspond to the probe base so that the probe provided on the probe holder can be contacted with the wafer placed on the detecting seat to perform wafer inspection. The wafer detecting seat of the present invention comprises: a detecting station 10 having a surface 11 on which a detecting area 12 is disposed, and a side of the detecting area 12 is provided with a positioning retaining wall 13 13 has a first segment 131 and a second segment 132. The first segment 131 and the second segment 132 are disposed at an angle. In the embodiment, the first segment 131 and the second segment 132 are sandwiched. A 90 degree angle is provided and is located on each of the two sides of the detection area 12. The detecting surface 12 is provided with a plurality of protrusions 14 on the mesa, and the protrusions 14 may be rectangular, circular, triangular, polygonal or other shapes. In the embodiment, a rectangle is taken as an example, and the protrusions 14 are used. Arranged in a matrix. The mesa 11 is provided with a plurality of recesses 15 corresponding to the recesses between the projections 14, respectively.

A first positioning member 20 is disposed on one side of the detecting table 10 and is movable between two positions close to and away from the detecting table 10. The first positioning member 20 includes at least one top post 21. When the first positioning member 20 moves toward the detecting table 10, the top post 21 can extend onto the table 11 of the detecting table and face the positioning retaining wall 13 A section of 131 is close. In the embodiment of the test bench Two guide rails 22 are disposed on one side of the second positioning member 20, and the first positioning member 20 is movable along the two guide rails 22. The first positioning member 20 is a movable block, and two top pillars 21 are provided. The top pillars respectively fall on a groove 15 of the test bench surface 11 , and the two top pillars 21 are movable along the groove 15 toward the positioning retaining wall 13 . The diameter of the top pillar 21 is greater than the depth of the groove 15 .

A second positioning member 30 is disposed on one side of the detecting table 10 and is movable between two positions close to and away from the detecting table 10. The second positioning member 30 includes at least one top post 31. When the second positioning member 30 moves toward the detecting table 10, the top post 31 can extend onto the table 11 of the detecting table 10 and face the positioning retaining wall 13 The second segment 132 is close. In the embodiment, the second positioning member 30 is disposed on the two guiding rails 10 and is movable along the two guiding rails 32. The second positioning member 30 is a movable block. The two top posts 31 are respectively disposed on a recess 15 of the test bench surface 11 , and the two top posts 31 are movable along the recess 15 toward the positioning retaining wall 13 . The diameter of the top post 31 It is larger than the depth of the groove 15.

In the structure of the present invention, when the wafer C is placed on the detection region 12 of the inspection table 11 , since the portion in contact with the bottom surface of the wafer C is the top surface of the projections 14 of the detection region 12, compared with the conventional structure In the invention, the area in which the detection area 12 is in contact with the wafer C is reduced, so that the wafer C is more easily picked up. Moreover, after the wafer is placed in the detection area, the first positioning member 20 and the second positioning member 30 are both moved toward the wafer, and the top pillar 21 of the first positioning member 20 is pressed against one side of the wafer C. The wafer C is sandwiched between the first segment 131 of the positioning retaining wall and the top post 21 of the first positioning member. The top post 31 of the second positioning member abuts against one side of the wafer C, so that the wafer C is sandwiched between the second retaining wall portion 132 and the top post 31 of the second positioning member. In this way, each of the wafers can be accurately positioned and detected at the same position, and since the first positioning member 20 and the second positioning member 30 can be moved between the positions close to and away from the detection table, regardless of the wafer Large or small, both the first positioning member and the second positioning member can position each wafer at the same position for detection, as shown in the fourth figure, effectively improving the aforementioned problems and improving the efficiency and correctness of wafer inspection. Sex.

10‧‧‧Testing station

11‧‧‧ countertop

12‧‧‧Detection area

13‧‧‧ Positioning retaining wall

131‧‧‧ first paragraph

132‧‧‧second paragraph

14‧‧‧ bump

15‧‧‧ Groove

20‧‧‧First positioning piece

21‧‧‧Top column

22‧‧‧ rails

30‧‧‧Second positioning parts

31‧‧‧Top column

32‧‧‧rails

Claims (10)

A wafer detecting seat comprises: a detecting station, the detecting station has a surface, the detecting surface is provided on the surface, and a positioning retaining wall is arranged on a side of the detecting area, and a plurality of convex portions are arranged on the surface of the detecting area Forming a recess between the protrusion and the protrusion; a first positioning member disposed on one side of the detecting table, movable between two positions close to and away from the detecting station, the second positioning member including at least a top pillar, the top pillar can extend to the table surface of the inspection table and move toward the positioning retaining wall when the second positioning member moves toward the detecting platform; a second positioning member is disposed on one side of the detecting platform Moving between two positions close to and away from the inspection table, the second positioning member includes at least one top post, and the top post can extend to the table of the inspection table when the second positioning member moves toward the inspection table And approaching the positioning retaining wall. The wafer inspection seat of claim 1, wherein the positioning retaining wall has a first segment and a second segment, and the angle between the first segment and the second segment is 90 degrees. The wafer inspection seat of claim 2, wherein the top post extends toward the table of the inspection table and moves toward the first section of the positioning wall when the first positioning member moves toward the inspection table. According to the wafer detecting seat of the second aspect of the invention, wherein the second positioning member moves toward the detecting table, the top post can extend to the table surface of the detecting table and approach the second portion of the positioning retaining wall. The wafer inspection seat according to the first aspect of the invention, wherein one side of the inspection table is provided with two rails, and the first positioning member is disposed on the two rails to be movable along the two rails. The wafer inspection seat according to the first aspect of the invention, wherein one side of the inspection table is provided with two rails, and the second positioning member is disposed on the two rails to be movable along the two rails. The wafer inspection seat according to claim 1, wherein the protrusions are arranged in a matrix. The wafer inspection seat of claim 7, wherein the mesa is provided with a plurality of grooves corresponding to the recesses between the protrusions. The wafer inspection seat according to claim 8 , wherein the first positioning member and the top post of the second positioning member respectively fall on the groove of the detecting table, and the two top posts can be along the groove The positioning retaining wall moves. The wafer inspection seat of claim 9, wherein the diameter of the top post is greater than the depth of the groove.