TW201508078A - Hybrid magnet support structure - Google Patents

Abstract

A magnet support structure is described which comprises a set of compartments (110a, 110b, 110c, 110d, 110e) and wherein the structure comprises at least one folded plate profile (120a) for forming the compartment (110a) suitable for fitting an elongate magnetic field generator. The folded plate profile (120a) in this case has a flat part (122) adapted for serving as a reference surface for aligning the elongate magnetic field generator.

Description

Hybrid magnet support structure

The present invention generally relates to a sputter magnetic control device. More particularly, the present invention relates to magnet support structures for rotatable targets and corresponding sputter magnetrons, as is typical for systems that provide coverage of substrates having large surfaces.

Sputtering is a technique of applying a coating to a substrate. Sputter deposition has become a common practice in a wide range of technical fields, for example, during the manufacture of hard disks or memory devices for computers, during the application of optical overlays on glass, during the overlaying of flat monitors, etc. .

Such sputtering is performed under a reduced pressure atmosphere in which a sputtering gas or a reactive gas or a mixture of the two is supplied in a controlled manner. Free electrons moving in a magnetically constrained path in this case ionize gas atoms or molecules near the surface of the target. These ions are subsequently accelerated toward the negatively charged target, with the result that the atoms are released from the target upon impact and the atoms gain sufficient kinetic energy to reach the substrate and cover it.

The shape of the path is determined by the magnetic field near the surface of the target. Due to the presence of a magnetic field, this deposition process is generally referred to as "magnetron sputtering."

Although various configurations of the target are known, it has been customary to rotate an axially symmetric target (such as a cylindrical target) about the longitudinal axis during sputtering to evenly use the target and achieve more homogenization at the target surface. The heat distribution. Such a solution is highly advantageous for economic motives to be applied to substrates with low material costs and to achieve good quality applications. Rotating tubular targets are an ideal choice in this case because these targets span a large width and can be used for long periods of time.

With these arrangements, since the magnet element remains stationary while the cylindrical rotating target rotates around it, it is possible to achieve the target deposition (the plasma region is stationary) while the target is relatively evenly removed across the entire tube. . However, when using a cylindrical rotating target in a vacuum environment, there are still technical challenges in providing the correct cooling and power supply.

One technical problem that must be addressed in order to be able to use this type of configuration is that the magnet elements must be placed in a cylindrical rotating target in the correct manner. Since the limited path of free electrons in the plasma is determined by the magnetic field component parallel to the target surface, it is extremely important that this component is fixed along the entire length of the cylindrical rotating target. In any event, the magnetic induction of this component typically varies by at least a square of the distance from the magnet element, with the result that a small change in the distance between the magnet element and the target surface can have a critical effect. The distance between the magnet element and the surface of the target must therefore be checked with particular care, so that local variations in the strength of the plasma and corresponding variations in the thickness of the deposited layer can be avoided.

Another technical difficulty is to provide the right cooling. Most of the power supplied to the target is converted to heat at the target surface. This heat must be efficiently dissipated in order to avoid excessive heating of the target and to avoid the ability of the magnet element to lose its ability at high temperatures. Typically, a water based cooling circuit is configured for this purpose.

U.S. Patent Publication No. 2012/0152738 A1 describes a magnetron configuration of a cylindrical rotating target in which a plurality of refrigerant conduits are disposed in the tube structure. In this case, the magnet element is arranged on the outside of the tube structure close to the sputter surface. By providing refrigerant between the outside of the tube structure and the cylindrical rotating target, the target and magnet are properly cooled. However, in this case, the disadvantage is that the magnet element is in direct contact with the refrigerant, with the result that the magnet element used must be water-resistant in order to continue to ensure its correct operation.

An alternative configuration is provided in International Patent Publication No. 2009/138348. In this configuration, the extruded aluminum tube structure is configured with one or more cooling compartments that extend along the length of the tube structure and have compartments in which the magnet elements can be received. The compartment in which the magnet element can be accommodated is in this case protected from the refrigerant, so that the magnet element does not contact the refrigerant during use. The aluminum tube structure is dimensionally stable and rigid, with the result that the magnetron configuration is not or hardly deformed during its service life. This configuration has the disadvantage that the extruded aluminum tube structure itself is surrounded by the high pressure refrigerant and the aluminum is susceptible to electrical corrosion. Although the effects of electrocorrosion can be reduced by providing a protective coating to the aluminum, these coatings can be damaged by manipulation, for example, which has a negative effect on the service life of the magnetron. Another disadvantage of this configuration is the fact that the alignment of the magnet elements is critical and labor intensive, on the one hand because the typical position of the magnets is away from the sputtered surface (in separate compartments) On the other hand, because additional processing is required to produce a good alignment reference in the extruded aluminum tube structure.

It is an object of embodiments of the present invention to provide a good magnet support structure and corresponding sputter magnetron. An advantage of embodiments according to the invention is that they are not or hardly susceptible to electrical corrosion, and they have the potential to properly position the magnet elements in a simple manner.

The foregoing objects are achieved by the apparatus and apparatus according to the present invention.

The present invention relates to a magnet support structure that is insertable into a cylindrical rotatable sputtering target, the magnet support structure comprising: a tube structure having a plurality of compartments extending substantially along the entire length of the tube structure, wherein the elongated shape A magnetic field generator can be mounted to one of the compartments, and at least one of the compartments can be used as a cooling conduit, characterized in that the tube structure includes at least one folded plate profile to form a compartment suitable for mounting an elongated magnetic field generator Where the folded panel profile has a flat portion that is adapted to act as a reference surface to align the elongated magnetic field generator.

An advantage of embodiments of the present invention is that the system is configured to include the correct reference surface to reference and adjust the magnet system relative to the target tube. The particular construction of the reference surface formed by the contour of the folded panel and the particular form of the panel profile result in a particularly flat reference surface that is less or less prone to deformation when the particular shape of the panel profile is made. This is not like this for example. The extruded profile used may itself be less fixed relative to tolerance, and incidentally, the reference surface therein is typically formed by internal ribs that are less accessible during extrusion. Cooling, thus developing a greater degree of deformation.

An advantage of embodiments of the present invention is that a flat reference surface can be achieved without further specific processing, such as turning or trimming.

The wall adapted to mount the elongated magnetic field generator in the longitudinal direction of the compartment may be closed and may be formed from a folded panel profile. In some embodiments of the invention, the folded panel profile is so closed at the longitudinal end so that it has seams there, i.e., in this position, the ends are connected to each other. An advantage in accordance with embodiments of the present invention is that the number of seams in the device is limited. Not only is this advantageous during manufacturing, but it also promotes the strength and reliability of the system, since seams can develop cracks or other deleterious effects faster than other portions of the folded sheet. Incidentally, if less welding is required, the deformation caused by the welding is reduced. In some embodiments, it is more likely to be welded at a particular location, such as in a symmetrical position, with the result that it is highly likely to correct for possible deformation. In some embodiments, the surface can also be straightened after welding at certain locations.

The tubular structure may include several (for example at least two or at least three) folded panel profiles that are secured to each other to form a wall in the longitudinal direction of a set of compartments. In some embodiments, this can be just three folded panel profiles. An advantage of embodiments of the present invention is that the system is configured to have the same outer diameter as the conventional system, but with a larger internal opening, resulting in a magnetic system There is more room for the refrigerant, because the stainless steel is used to fold the outline instead of the fact that the outline is so thin that the wall is thin. This makes it possible to use more complex magnetic fields and stronger magnetic fields. Incidentally, the cooling efficiency of the sputter target can be maintained at at least the same level as the conventional system. Incidentally, it should be noted that the system combines these properties with sufficient rigidity. An advantage of embodiments of the present invention is that the correct positioning of the magnetic field generator can be achieved, not only because the reference surface has been configured, it has a very narrow tolerance and can serve as a reference for adjusting the position of the magnetic field generator, but also because of the specificity of the tube structure It is possible to construct a slightly thicker piece of metal for the folded sheet which forms the compartment in which the elongated magnetic field generator is mounted. If desired, other panel profiles can be made from thinner sheet metal because the tolerance of other regions, for example as a cooling conduit, is less critical.

Several (for example, at least two or at least three) folded panel profiles may themselves form the walls in the longitudinal direction of the compartment and may be additionally secured to one another in a manner that secures the contours of the folded panels that are secured to each other. The space between the rooms also forms a separate compartment.

An advantage of embodiments of the present invention is that the wall of the compartment suitable for mounting the magnetic field generator can be comprised of a single folded panel profile in the longitudinal direction. This implies that leakage at the joint between the different plate profiles (typically where the seal is configured) does not cause an impact on whether the compartment suitable for mounting the magnetic field generator is dry.

At least one of the folded sheet profiles may be a stainless steel profile. An advantage of an embodiment according to the invention is that a non-corrosive material can be used, which makes it possible to construct the device with a relatively thin wall structure while ensuring the device Strength of. For example, a larger wall thickness is required in order to achieve an equal and sufficient degree of device strength compared to systems that use other non-corrosive materials such as plastic.

An advantage of embodiments of the present invention is that the folded panel profile can be composed of materials that are compatible with the magnetron configuration, with the result that electrical corrosion or chemical reactivity can be minimized. For example, as compared to systems using other metals such as aluminum (optionally extruded), the result is in the environment and immersed in a liquid that may undergo (ionic) conduction. Other metals have potential work function differences that can cause electrical corrosion.

The tubular structure may further comprise an extruded profile anchored to the folded panel profile forming a compartment suitable for mounting the elongated magnetic field generator. An advantage of embodiments of the present invention is that in addition to the contour of the folded panel, there is also an extruded contour that is located in the contour of the folded panel to ensure additional stability during use to resist deformation, thus achieving a narrower tolerance. limit. Alternatively, by modifying the system, the combination of the folded plate profile and the extruded profile ensures a stable reference to mount the elongated magnetic field generator.

The shape of the extruded profile and the folded panel profile can be modified such that they are tangentially contacted on at least one side over a portion of their length, preferably on two sides, preferably on three sides. An advantage of an embodiment according to the invention is that additional stabilization can prevent the side walls of the central profile in the device from being folded inward under the effect of water pressure on one side of the profile, for example for cooling.

The extruded profile can be folded substantially along its entire length Surrounded by the outline of the board.

The extruded profile can be an aluminum profile.

The tube structure can be modified such that the compartment suitable for mounting the elongated magnetic field generator is a dry compartment separate from the refrigerant.

The magnet support structure may further include an elongated magnetic field generator.

The magnet support structure can further include a modification system to modify the magnet configuration during use of the magnet support structure. An advantage of an embodiment according to the invention is that the modification of the line of the magnet configuration (i.e. during use) can be performed correctly, since the fact that a reference surface with a very narrow tolerance has been configured.

The modification system can be modified to align the magnet configuration by reference to the reference surface. An advantage of an embodiment in accordance with the invention is that the reference surface has a narrow tolerance.

The tube structure can include at least one compartment that acts as a cooling conduit and is positioned on the outer wall of the tube structure.

The combination of compartments can be configured to result in the creation of a set of cooling conduits that are constructed to result in a substantially homogeneous distribution of refrigerant along the length of the tubular structure.

The invention also relates to a sputter magnetron apparatus comprising a magnet support structure as described above.

Particular and preferred aspects of the invention are included in the accompanying independent items and dependent items. The features of the sub-items can be combined with the features of the individual items and can be combined with the features of the other sub-items indicated in the request item, and Not only in combination with those explicitly stated in the request.

These and other aspects of the invention will be apparent from and construed in the description.

100‧‧‧Magnet support structure

110a, 110b, 110c, 110d, 110e‧‧ ‧ compartment

120a, 120b, 120c‧‧‧ folding board outline

122a‧‧‧flat part (reference surface)

130‧‧‧Seal

140‧‧‧Guide elements

150‧‧‧Extrusion of aluminum profiles

160‧‧‧Magnetic components

170‧‧‧Control system

1 and 2 respectively illustrate a cross-sectional view and a perspective view of a magnet support structure according to an embodiment of the present invention, which is composed of three folded plate profiles.

Figure 3 shows a perspective view of a magnet support structure in accordance with an embodiment of the present invention consisting of three folded panel profiles and extruded profiles positioned in the contour of a folded panel.

4 and 5 respectively illustrate cross-sectional and perspective views of a magnet support structure in accordance with an embodiment of the present invention, which is configured with an extruded profile and a magnet element.

6 and 7 respectively illustrate cross-sectional and perspective views of a magnet support structure in accordance with an embodiment of the present invention, which is configured with an extruded profile, a magnet element, and a control system for positioning the magnet element.

The drawings are merely illustrative and not limiting. For the sake of example, the dimensions of some of the components in the figures may have been exaggerated and not to scale.

Reference numerals in the scope of patent application should not be construed in a way that limits the scope of protection. In the various figures, the same reference numerals refer to the same or similar elements.

Although the present invention will be described by way of specific embodiments and with reference to the specific drawings, the invention is not limited thereto, but is only limited by the scope of the claims. The drawings are to be regarded as illustrative rather than restrictive. For the sake of example, the dimensions of some of the elements may have been increased in the drawings and not drawn to scale. Sometimes, the dimensions and relative dimensions do not correspond to the actual embodiment of the invention.

In addition, the first, second, and similar words in the specification and claims are intended to identify the like elements, and do not necessarily indicate the order, which is not in time, space, order, or any other manner. It is to be understood that the terms used in this manner are interchangeable, as appropriate, and the embodiments described herein are adapted to operate in a different order than described or illustrated herein.

It should be understood that the particular embodiment directed to the system is also suitable to operate according to a different orientation than that described or exemplified herein.

It should be noted that the term "comprising", as used in the claims, is not to be construed as limited It is therefore to be understood that the features, <RTI ID=0.0> </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; Therefore, the expression range of "means including means A and B" should not be limited to a device composed only of members A and B. For the purposes of the present invention, it is meant that A and B are only relevant components of the device.

The reference to "an embodiment" or "an embodiment" in this specification means that a particular feature, structure, or feature described in connection with the embodiment is incorporated herein. At least one embodiment of the invention. Therefore, the expression "in one embodiment" or "in the embodiment" used in various places throughout the specification does not necessarily have to refer to the same embodiment in each case, although it may be. In addition, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments, as will be apparent to those skilled in the art in light of this disclosure.

In the following, the description of the exemplary embodiments of the present invention should be understood that the various features of the present invention may be grouped together in a single embodiment, figure or description in order to facilitate the disclosure of the disclosure More different inventions. This method of disclosure is therefore not to be interpreted as reflecting the intent of the invention as claimed. As indicated by the following claims, the invention is directed to all features less than the single embodiments disclosed herein. Therefore, the scope of the patent application after the [embodiment] is explicitly incorporated into this [embodiment] in this case, and each individual item is a separate embodiment of the present invention.

In addition, while some of the embodiments described herein include certain features and not other features from other embodiments, combinations of features from different embodiments are intended to be within the scope of the invention, and these form different embodiments. As will be appreciated by those skilled in the art. For example, any of the described embodiments can be used in any desired combination within the scope of the following claims.

Many specific details are mentioned in the narratives provided herein. However, it should be understood that embodiments of the invention may be constructed without these specific details. In other cases, for the sake of clarity, the details have not been shown in detail. Method, structure and technology.

In a first aspect, the invention includes a magnet support structure that is insertable into a cylindrical rotatable sputter target. Such a magnet support structure can typically form part of a sputtered magnetron configuration. The magnet support structure is adapted in this case to position an elongate magnetic field generator, for example a magnet element, in a cylindrical rotatable sputter target. For example, embodiments of the invention are not limited thereto, and the standard and optional features and properties of the magnet support structure will be described with reference to Figures 1 through 2, which respectively show sections of an exemplary magnet support structure 100. Figure and perspective view.

The magnet support structure 100 includes a tube structure having a set of compartments 110a, 110b, 110c, 110d, 110e extending substantially the entire length of the tube structure. Because of the fact that the compartment extends substantially along the entire length of the tube structure, the correct magnetic field can be generated along the entire length of the cylindrical target and the correct cooling can be configured. At least one of these compartments (typically the compartment 110a closest to the center) is suitable for mounting/positioning an elongated magnetic field generator, such as a magnet element 160 (exemplified by Figure 7). According to an embodiment of the invention, the compartment 110a is formed by at least one folded panel profile 120a. More specifically, the wall suitable for mounting/positioning in the longitudinal direction of the compartment 110a is formed by at least one folded panel profile 120a, preferably formed by a folded panel profile 120a. In this case, the folded sheet profile 120a is preferably made of a material that is not susceptible to electrical corrosion, such as, for example, stainless steel or titanium. The folded panel profile 120a can have a thickness ranging from 0.6 mm to 5 mm. The folded plate profile 120a can be folded in such a way as to have a closed form, in which case For example, the ends in the longitudinal direction of the panels are welded together. Welding can be produced, for example, by laser welding. The fact that the wall in the longitudinal direction of the compartment is formed by the contour of a folded sheet has the advantage that the seam or seal is small, as a result of which the partition is kept when the compartment is surrounded by a refrigerant such as water. It is relatively simple to do it in between.

According to an embodiment of the invention, the folded panel profile 120a also has a flat portion 122a. Such a flat portion 122a is highly suitable as a reference surface to align the positioning of the elongated magnetic field generator 160. This reference surface 122a can be used during initial alignment of the magnetic field generator 160, during realignment of the alignment of the magnetic field generator 160, during on-line adjustment of the position of the magnetic field generator in the magnetron sputtering system, the magnetron sputtering system A control system is provided to facilitate adjustment of the position of the magnetic field generator 160 (e.g., a magnet element) during use. Since the flat portion 122a forms a partial plate profile 120a by folding, and for example does not form a partial extruded profile, the reference surface 122a is typically extremely flat and is not or hardly affected by the plate profile during manufacture. The adverse effects of induced deformation.

The exemplary embodiment exemplified in Figures 1 and 2 is a tube structure consisting of three folded sheet profiles 120a, 120b, 120c which together form five compartments 110a, 110b, 110c, 110d, 110e in the tube structure The wall in the longitudinal direction. The wall in the longitudinal direction of the three compartments 110a, 110d, 110e is in this case formed by an interior space formed by three closure panel profiles 120a, 120b, 120c, and in the longitudinal direction of the two compartments 110b, 110c. The wall is formed by a pocket created when the three profiles 120a, 120b, 120c are mechanically coupled to one another. With these mechanical connections, you can also configure Seal 130. The central compartment 110a formed by a folded panel profile is used in this case to be placed into the elongated magnetic field generator 160 as described above. According to an embodiment of the present embodiment, at least one of the compartments 110b, 110c, 110d, 110e is suitable as a cooling duct. In an exemplary embodiment, four other compartments may be used to provide cooling. By providing a passage for the refrigerant between the compartments 110b, 110c, 110d, 110e for providing cooling, it is possible to generate a flow of water between the compartments. In some embodiments, perforated bolts can be used to make it possible for the refrigerant to flow between the compartments of the tubular structure. In other embodiments, the perforations may be configured, for example, at 120b or 120c, respectively, with the result that the refrigerant may flow between compartments 110b and 110d or between 110c and 110e, respectively. If desired, the seal can be attached to either end or end of the magnet support structure having such an opening, with the result that a refrigerant connection can be achieved between the compartments. In certain embodiments, one or more compartments are provided with drain holes or nozzles along the length of the compartment to blow the refrigerant to the other compartment.

The magnet support structure may also include a guiding element 140 to guide the magnet support structure when the magnet support structure is pushed into the cylindrical rotating target and/or positioned relative to the cylindrical rotating support structure to position the magnet supporting structure.

In a particular embodiment, as illustrated in Figures 3 through 5, in addition to the folded panel profiles 110a, 110b, 110c, the magnet support structure 100 also includes an extruded aluminum profile 150. The extruded aluminum profile 150 can be anchored to the folded panel profile 120a, which forms the compartment 110a and is adapted to mount the elongated magnetic field generator 160. The shape of the extruded profile 150 and the folded plate profile 120a can be They are modified such that they are tangentially contacted on at least two sides along their partial length, preferably on three sides. This profile thus provides additional rigidity to the magnet support structure 100 within the desired range. The contour 150 can, for example, remedy the fact that the central folded sheet profile 120a is deformed due to the pressure of the refrigerant in the compartments 110b and 110c, within the required range. In view of the fact that the extruded aluminum profile 150 is a dry compartment 110a in the present support structure 100, this aluminum profile 150 may not be susceptible to electrical corrosion.

In a further particular embodiment, as exemplified in Figures 4 and 5, the magnet support structure 100 can include an elongated magnetic field generator 160 mounted in the compartment 110a. The elongated magnetic field generator 160 can be, for example, a permanent magnet that is optionally positioned on the magnet support structure. An advantage of embodiments in accordance with the present invention is that the alignment of the elongated magnetic field generator 160 can be performed relative to a particular reference surface 122a (for example, upon initial installation) such that alignment can be performed in extremely narrow tolerances.

The particular shape, strength and/or configuration of the magnetic field generator 160 or the magnetic field generated thereby can be selected by those skilled in the art depending on the application.

In yet another particular embodiment, as exemplified in Figures 6 and 7, the magnet support structure 100 includes a control system 170 that controls the position of the magnetic field generator 160 relative to the tube structure and the position of the rotation relative to the rotating cylindrical target. Such a control system may be based, for example, on a pneumatic, mechanical or other actuator to modify the position of the magnetic field generator 160. Control system 170 can be constructed to provide initial alignment or recalibration alignment. In an advantageous embodiment, the control system can also be constructed to modify the position of the elongated magnetic field generator on the line in order to modify the magnetic field on the line. Such modifications can be controlled by The signal is implemented and can be initiated, for example, by detecting a change or offset in the physical parameters of the sputtering process. Control system 170 is adapted in this case to perform alignment by reference to reference surface 122a. Since this refers to the flatness of the surface 122a, it is possible to achieve proper alignment in an extremely narrow tolerance.

In a second aspect, the invention also relates to a magnetron configuration comprising the magnet support structure of the first aspect and the elongated magnetic field generator mounted thereon. Further features and advantages of such a magnetron configuration are similar to those described in the magnet support structure of the first aspect.

Different embodiments may be easily combined with one another, and such combinations therefore also correspond to embodiments in accordance with the invention.

100‧‧‧Magnet support structure

110a, 110b, 110c, 110d, 110e‧‧ ‧ compartment

120a, 120b, 120c‧‧‧ folding board outline

122a‧‧‧flat part (reference surface)

130‧‧‧Seal

140‧‧‧Guide elements

Claims (16)

A magnet support structure (100) is insertable into a cylindrical rotatable sputter target, the magnet support structure comprising: a tube structure having a set of compartments (110a) extending substantially along the entire length of the tube structure , 110b, 110c, 110d, 110e), wherein the elongated magnetic field generator can be mounted to one of the compartments (110a), and wherein at least one of the compartments (110b, 110c, 110d, 110e) can Use as a cooling conduit, characterized in that the tube structure comprises at least one folded plate profile (120a) to form the compartment (110a) adapted to mount an elongated magnetic field generator, wherein the folded plate profile (120a) has a flat portion ( 122) adapted to act as a reference surface to align the elongated magnetic field generator. A magnet supporting structure (100) according to claim 1 wherein the wall of the compartment (110a) longitudinally adapted to mount the elongated magnetic field generator is closed and is made by a folded plate profile (120a) to make. A magnet support structure (100) according to claim 1 or 2, wherein the tube structure comprises three folded plate profiles (120a, 120b, 120c) that are secured to each other to form the set of compartments (110a, 110b, 110c, 110d, 110e). A magnet support structure (100) according to claim 3, wherein the three folded plate profiles (120a, 120b, 120c) themselves form the longitudinal direction of the compartments (110a, 110d, 110e) The walls, and wherein the three folded panel profiles (120a, 120b, 120c) are additionally secured to one another such that the space between the mutually secured folded panel profiles (120a, 120b, 120c) is also formed Separate compartment (110b, 110c). A magnet support structure (100) according to claim 3, wherein the at least one folded plate profile (120a, 120b, 120c) is a stainless steel profile. The magnet support structure (100) of claim 1 or 2, wherein the tube structure further comprises an extruded profile (150) anchored to the folded plate profile (120a) to form a suitable elongated magnetic field generator The compartment (110a). A magnet support structure (100) according to claim 6 wherein the extruded profile (150) and the folded plate profile (120a) are adapted such that they are on at least two sides of their length ( Preferably, the three sides are tangent contacts. A magnet support structure (100) according to claim 6 wherein the extruded profile (150) is an aluminum profile. The magnet support structure (100) of claim 6 wherein the extruded profile (150) is surrounded by the folded panel profile along substantially its entire length. A magnet support structure (100) according to claim 1 or 2, wherein the tube structure is modified such that the compartment (110a) suitable for mounting the elongated magnetic field generator is a dry compartment separate from the refrigerant. Magnet support structure according to item 1 or 2 of the patent application scope (100), wherein the magnet support structure (100) further comprises an elongated magnetic field generator (160). The magnet support structure (100) of claim 11 wherein the magnet support structure (100) further comprises a modification system (170) to modify the magnet configuration during use of the magnet support structure. The magnet support structure (100) of claim 12, wherein the modification system (170) is modified to align the magnet configuration by reference to the reference surface (122a). A magnet supporting structure (100) according to claim 1 or 2, wherein the at least one compartment (110d, 110e) is positioned on an outer wall of the tube structure to serve as a cooling duct. A magnet support structure (100) according to claim 1 or 2, wherein the combination of the compartments (110b, 110c, 110d, 110e) is configured to cause a set of cooling ducts to be constructed, such that the formation of the refrigerant is achieved This length of the tube structure has a substantially homogeneous distribution. A sputter magnetic control apparatus comprising the magnet support structure (100) according to any one of claims 1 to 15.