TW201432204A - Combustion type harmful gas treatment device - Google Patents

Abstract

A combustion type hazardous gas treatment device comprises a liquid storage tank for storing water liquid and a combustion unit connected with the liquid storage tank. The combustion unit comprises a main pipe circumferentially delimiting a combustion area, a guide pipe for introducing a hazardous gas into the combustion area of the main pipe, a flame sprayer head for receiving oxy-hydrogen gas and spraying oxy-hydrogen flame toward the combustion area of the main pipe, and an exhaust pipe communicating with the main pipe and extending into the liquid storage tank. During the combustion of oxy-hydrogen gas, the heat value is higher than fuel gas, generating a flame of a higher temperature to provide a higher hazardous gas treatment efficiency. In addition, the oxy-hydrogen gas produces water after combustion, further reducing the generation of carbon dioxide greenhouse gas, making it more eco-friendly than combustion of fuel gas.

Description

Combustion type harmful gas treatment device

The present invention relates to an exhaust gas treatment device, and more particularly to a combustion type harmful gas treatment device.

In the semiconductor industry, the chemical vapor deposition (CVD) technique is used to generate epitaxial crystals. The principle is to deposit a film on the substrate by using a reactive gas. The process requires the use of perfluorinated (PFCs) gas as the cleaning chamber for the reaction chamber. (ChamberClean), and PFCs are also used in the Etch process.

However, perfluorinated compounds (PFCs) used in semiconductor processes, such as CF ₄ , C ₂ F ₆ , NF ₃ , SF ₆ , CHF ₃ and C ₃ F ₈ , have relatively high molecular bonds of FC, FS and FN. Infrared light absorption capacity, which is a high greenhouse effect gas, has a much higher impact on the greenhouse effect than CO ₂ several times. Therefore, more and more international organizations regulate the emission of PFCs and formulate greenhouse gas reduction plans.

At present, the technologies for processing PFCs are relatively mature, such as combustion method (heat treatment method), catalytic thermal cracking, and plasma destruction. The combustion method uses a combustion head to generate a high-temperature flame to remove pollutant gases; the catalyst thermal cracking method uses a catalyst to decompose PFCs; the plasma destruction uses high-energy electrons to PFCs. The chemical bonds of the gas are excited or interrupted to convert the PFCs gas.

The combustion method currently mostly burns gas (natural gas, methane) to generate flame to remove PFCs gas. However, after combustion, carbon dioxide (CO ₂ ) is still produced. Carbon dioxide is also one of the greenhouse gases, and the gas is not stable. Both use and storage need to pay more attention to avoid accidents, so there is still room for improvement in the use of gas combustion.

Accordingly, it is an object of the present invention to provide a combustion-type hazardous gas treatment apparatus that reduces greenhouse gas generation.

Accordingly, the combustion type harmful gas treatment apparatus of the present invention comprises a liquid storage tank for storing the water liquid, and a combustion unit connected to the liquid storage tank.

The combustion unit includes a main pipe surrounding a combustion zone, a guide pipe for introducing harmful gas into the combustion zone of the main pipe, and a fire-breathing device for receiving hydrogen-oxygen gas and ejecting an oxyhydrogen flame toward the combustion zone of the main pipe. a head, and an exhaust pipe that communicates with the main pipe and extends into the liquid water of the liquid storage tank.

The effect of the invention is that when the hydrogen-oxygen gas is burned, the calorific value is higher than that of the gas, and a higher-temperature flame is generated, the treatment efficiency of the harmful gas is good, and the water produced by the combustion of the hydrogen-oxygen gas is water, and the greenhouse gas such as carbon dioxide is further reduced. Produced, it is more environmentally friendly than burning gas.

2‧‧‧ liquid storage tank

3‧‧‧burning unit

31‧‧‧Supervisor

311‧‧‧burning area

32‧‧‧ Guide tube

33‧‧‧fire head

34‧‧‧Igniter

35‧‧‧Exhaust pipe

36‧‧‧Auxiliary exhaust pipe

361‧‧‧ Import section

362‧‧‧Exit section

363‧‧‧ Middle section

37‧‧‧Connecting tube

4‧‧‧Washing unit

41‧‧‧First spray parts

42‧‧‧Second spray parts

5‧‧‧Hydrogen Oxygen Generator

51‧‧‧electrolyzer

52‧‧‧Electrode plate

53‧‧‧Hydrogen tube

54‧‧‧Power supply

Other features and effects of the present invention will be apparent from the embodiments of the drawings, in which: BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic view showing a preferred embodiment of a combustion type harmful gas treating apparatus of the present invention.

1 is a preferred embodiment of a combustion-type hazardous gas treatment device according to the present invention, comprising a liquid storage tank 2, a combustion unit 3 connected to the liquid storage tank 2, and a combustion unit 3 disposed on the combustion unit 3. The washing unit 4, and a hydrogen-oxygen generator 5 for generating a hydrogen-oxygen gas.

The liquid storage tank 2 is for storing water liquid. The combustion unit 3 includes a main pipe 31 surrounding a combustion zone 311, two guiding pipes 32 for introducing harmful gases into the combustion zone 311 of the main pipe 31, and a combustion pipe for receiving hydrogen gas and burning toward the main pipe 31. a firing head 33 for discharging an oxyhydrogen flame in the region 311, an igniter 34 disposed on the main pipe 31 and extending into the end edge of the igniter 33, and a liquid connected to the main pipe 31 and extending into the liquid storage tank 2 The exhaust pipe 35, an auxiliary exhaust pipe 36 extending upward from the liquid storage tank 2, and a connecting pipe 37 connecting the exhaust pipe 35 and the auxiliary exhaust pipe 36.

The auxiliary exhaust pipe 36 has an inlet section 361 communicating with the reservoir 2, an outlet section 362 opposite the inlet section 361, and an intermediate section 363 connecting the inlet section 361 and the outlet section 362, and the outlet The section 362 is tapered toward a direction away from the reservoir 2, wherein both ends of the connecting tube 37 are connected to the exhaust pipe 35 and the inlet section 361 of the auxiliary exhaust pipe 36, respectively.

In the present embodiment, the harmful gas refers specifically to perfluorinated substances (PFCs) used in a semiconductor process, such as CF ₄ , C ₂ F ₆ , NF ₃ , SF ₆ , CHF _{3 ,} and C ₃ F _{8 ,} etc., for a greenhouse. A gas that has a significant effect on the effect.

The washing unit 4 includes a first spray member 41 between the main pipe 31 and the end of the exhaust pipe 35 and ejecting water mist from the exhaust pipe 35 toward the axial direction of the connecting pipe 37, and two intervals are provided at the auxiliary The intermediate portion 363 of the exhaust pipe 36 and the second spray member 42 of the water mist are ejected into the intermediate portion 363 of the auxiliary exhaust pipe 36.

The hydrogen-oxygen generator 5 includes an electrolytic cell 51 containing electrolyzed water, a plurality of electrode plates 52 disposed in the electrolytic cell 51 and immersed in the electrolyzed water, and a hydrogenating device 33 and an electrolytic cell 51. The oxygen gas is guided to the oxyhydrogen tube 53 of the igniter 33, and a power supply 54 electrically connected to the electrode plate 52 for electrolyzing the electrolyzed water to generate hydrogen and oxygen gas, the power supply 54 being capable of externally The power supply (not shown) is electrically connected.

Since the heating value of the hydrogen-oxygen gas is higher than that of gas (natural gas) per unit weight, and the temperature of the hydrogen-oxygen flame generated after the combustion of the hydrogen-oxygen gas is higher than the temperature of the flame of the burning gas, the heating and burning of harmful gases are performed. The treatment efficiency is better, and the main product produced after the combustion of the hydrogen-oxygen gas is water, which can avoid the generation of carbon dioxide and continue to cause a greenhouse effect.

Therefore, the hydrogen-oxygen generator 5 generates hydrogen-oxygen gas by electrolysis, and enters the gas-fired head 33 along the hydrogen-oxygen tube 53, and the igniter 34 triggers the combustion of the hydrogen-oxygen gas at the end of the gas-fired head 33 to make the gas-fired head 33 The end edge forms an oxyhydrogen flame toward the combustion zone 311, and at the same time, harmful gases enter the combustion zone 311 of the main pipe 31 of the combustion unit 3 from the guide tubes 32, and thus are harmful in the combustion zone 311 of the combustion unit 3. The free radical generated by the high temperature reacts with the fluorine (F) species decomposed by the harmful gas to form the final product of hydrogen fluoride (HF), and the hydrogen fluoride forms a hydrofluoric acid after contact with the aqueous liquid, so The harmful fluorine can be left in the water liquid, so when the hydrogen fluoride flows to the drain gas 36 through the connecting pipe 37, the water spray sprayed by the first spray member 41 and the second spray member 42 washes the hydrogen fluoride into hydrofluoric acid and Flowing into the liquid storage tank 2 to store, the remaining exhaust gas is discharged into the auxiliary exhaust pipe 36 to become a cleaner, harmless gas, and the outlet section 362 of the auxiliary exhaust pipe 36 forms a tapered shape, which allows The water vapor condenses on the pipe wall, and has the function of enhancing the removal of water vapor and defogging. In addition, through the design of the connecting pipe 37, the burned gas does not need to directly enter the liquid storage tank 2, and the liquid storage tank is allowed to be 2 There is no need to consider the safety concerns due to the high temperature of the gas after combustion, and the first spray member 41 has a function of washing gas and cooling, and if the gas reacts with high temperature, there is a by-product of crystal powder, the first spray The connecting member 37 can also simultaneously brush the connecting pipe 37 along the axial direction of the connecting pipe 37, thereby reducing the chance of the connecting pipe 37 being blocked by the crystallization by-product, and allowing the flow of the gas to be smooth.

This embodiment is safer than the prior art in addition to being more environmentally friendly and highly efficient in heating (burning) harmful gases.

It is well known that hydrogen is an active gas, and if it is leaked, it is very prone to an explosion accident. Since this embodiment uses a hydrogen oxygen generator 5 to produce a mixed gas of hydrogen and oxygen by electrolyzing water, it is not necessary. A cylinder or the like for storing hydrogen and oxygen, relatively reducing the possibility of gas leakage, and if the equipment is powered off, there is no electrolysis and continuous production of hydrogen and oxygen gas, and there is no problem of gas accumulation. Therefore, the hydrogen-oxygen gas of the present embodiment is produced when necessary, and the safety is improved.

In summary, the combustion-type harmful gas treatment device of the present invention uses the hydrogen-oxygen gas produced by the hydrogen-oxygen generator 5 to be added by the hydrogen-oxygen flame. Heat, burn harmful gases, convert harmful gases into the final products of hydrogen fluoride, and combine with water and liquid to remove fluorine, which can effectively remove harmful elements, regardless of heating efficiency and safety, better than conventional technology, and greatly reduced The emission of carbon dioxide, reducing greenhouse gases and being more environmentally friendly, can indeed achieve the object of the present invention.

The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent.

2‧‧‧ liquid storage tank

3‧‧‧burning unit

31‧‧‧Supervisor

311‧‧‧burning area

32‧‧‧ Guide tube

33‧‧‧fire head

34‧‧‧Igniter

35‧‧‧Exhaust pipe

36‧‧‧Auxiliary exhaust pipe

361‧‧‧ Import section

362‧‧‧Exit section

363‧‧‧ Middle section

37‧‧‧Connecting tube

4‧‧‧Washing unit

41‧‧‧First spray parts

42‧‧‧Second spray parts

5‧‧‧Hydrogen Oxygen Generator

51‧‧‧electrolyzer

52‧‧‧Electrode plate

53‧‧‧Hydrogen tube

54‧‧‧Power supply

Claims (6)

A combustion type harmful gas treatment device comprises: a liquid storage tank for storing water liquid; and a combustion unit connected to the liquid storage tank, and comprising a main pipe surrounding a combustion zone, one for detrimental a gas is introduced into the guiding tube of the combustion zone of the main pipe, a gas-fired head for receiving hydrogen-oxygen gas and discharging the hydrogen-oxygen flame to the combustion zone of the main pipe, and a water flowing into the liquid pipe communicating with the main pipe and extending into the liquid storage tank Exhaust pipe. The combustion-type harmful gas treatment device according to claim 1, further comprising a hydrogen-oxygen generator for generating a hydrogen-oxygen gas, wherein the hydrogen-oxygen generator comprises an electrolytic cell containing electrolyzed water, and a plurality of intervals An electrode plate in the electrolysis tank and immersed in the electrolyzed water, a oxyhydrogen tube connecting the squib and the electrolysis tank and guiding the oxy-hydrogen gas to the lance, and electrically connecting the electrode plate and The electrolysis water is energized to electrolyze a power source for generating hydrogen and oxygen gas. The combustion-type harmful gas treatment device according to claim 2, further comprising a washing unit, wherein the washing unit comprises a discharge between the main pipe and the end of the exhaust pipe and from the exhaust pipe toward the connecting pipe The first spray of water mist. The combustion-type harmful gas treatment device of claim 3, wherein the combustion unit further comprises an auxiliary exhaust pipe connected to the liquid storage tank, and a connecting pipe connecting the exhaust pipe and the auxiliary exhaust pipe, One end of the connecting tube faces the first spray member. A combustion-type harmful gas treatment device according to claim 4, wherein The auxiliary exhaust pipe has an inlet section communicating with the reservoir, an outlet section opposite the inlet section, and an intermediate section connecting the inlet section and the outlet section, and the outlet section is away from the reservoir The direction is tapered, and the two ends of the connecting pipe are respectively connected to the inlet section of the exhaust pipe and the auxiliary exhaust pipe. The combustion-type harmful gas treatment device according to claim 5, wherein the washing unit further comprises at least one second portion disposed in the middle portion of the auxiliary exhaust pipe and ejecting water mist into the intermediate portion of the auxiliary exhaust pipe Spray parts.