TW201427805A - Adsorption reversal device - Google Patents

Abstract

The present invention provides an adsorption reversal device that can be moved up and down on an adsorption plate in an extremely simple configuration. The adsorption reversing device that adsorbs and inverts the substrate W includes a rotating shaft 15 supported by the left and right side frames 14 and a supporting member 16 horizontally attached to the rotating shaft 15 and rotated together with the rotating shaft 15 The pressing member 17 is held by the suction plate 18 at a level at which the supporting member 16 can move up and down, and a rebound spring 19 that elastically presses the suction plate 18 upward; and is configured as follows: The pressing member 17 operates to move the suction plate 18 downward, and the suction plate 18 is raised and returned to the original position by releasing the pressing force of the pressing member 17 and by the elastic pressure of the rebound spring 19.

Description

Adsorption reversal device

The present invention relates to a substrate processing apparatus for cutting a substrate made of a brittle material such as glass, tantalum, ceramics, or a compound semiconductor, and cutting the substrate along the scribe line. The adsorption reversal device used.

Conventionally, for example, Patent Document 1 discloses a method of rotating a cutter wheel (also referred to as a scoring wheel) in a state where a predetermined moment is pressed, or using a mine, on a substrate placed on a platform. a thermal gradient generated by the irradiation of the beam of light, etc., forming a plurality of mutually orthogonal scribe lines in parallel, and then inverting the front and back sides of the substrate, and breaking the rod from the side opposite to the surface on which the scribe line is provided The substrate is deflected by pressing to thereby break the substrate, and the unit product is taken out.

Further, a method of dividing a substrate in which two glass substrates are bonded to each other is disclosed, for example, in Patent Document 2 (FIG. 45 and the like), and a method of dividing by the steps shown below. That is, the substrate placed on the platform of the scoring apparatus is formed by scribing the cutter wheel to form a score line on one side of the substrate, that is, the a surface. Then, after the substrate is adsorbed by the adsorption inversion device and inverted, the substrate is placed on the platform of the cracking device, and the substrate b surface which is the back surface of the substrate a surface is pressed by a cracking rod or the like to break the substrate a. surface. Then, in the same manner as described above, a scribe line is formed on the surface of the substrate b, and after the substrate is reversed, the surface of the substrate a is pressed by a rupture rod or the like to break the surface of the substrate b. Thereafter, the broken substrate is removed from the breaking device and moved to the next step.

Patent Document 1: International Publication WO2005/053925

Patent Document 2: International Publication WO2002/057192

In the method for processing a substrate as described above, the adsorption inversion device for reversing the substrate is provided with an adsorption plate for adsorbing a substrate placed on a stage such as a stage and raised, and adsorbing by the adsorption plate The raised substrate is reversed. As a mechanism for raising and lowering the adsorption plate relative to the surface of the substrate, for example, a vertical pillar is extended from a support portion such as a frame located above the platform, and the vertical pillar supports the adsorption plate to be reversible The lifting member is mounted to be lifted and lowered. The elevating member is formed in such a manner that the fluid cylinder having a long moving stroke or the elevating mechanism having a complicated structure such as a rack and a pinion is lifted and lowered in order to raise and lower the necessary distance for reversing.

In the above-described adsorption reversal device, there is a problem in that the lifting device becomes a large person by a vertical pillar, an elevating member that is lifted and lowered along the same, and a complicated lifting mechanism incorporated therein. And the organization is complicated and the cost is high.

Accordingly, the present invention has been made in view of the above-described conventional problems, and an object thereof is to provide an adsorption reversal device in which a suction mechanism can be moved downward by a novel mechanism and a more extremely simple structure.

In order to achieve the above object, the following technical means are proposed in the present invention. That is, the present invention is an adsorption reversal device that adsorbs and inverts a substrate, and includes a rotating shaft supported by the left and right side frames, a supporting member horizontally attached to the rotating shaft and rotated together with the rotating shaft, and transmitted through a pressing plate that is held by the pressing member at a level at which the supporting member can move up and down, and a rebound spring that elastically presses the suction plate so as to face upward; and is configured to be formed by: The pressing member moves to move the suction plate downward, and the force of pressing the pressing member is released, and the suction plate is raised by the elastic pressure of the rebound spring. Return to the original location.

In the adsorption reversal apparatus of the present invention, since the pressure of the rebound spring is restored to the original position by the elastic pressure (recovery force) of the rebound spring, the suction plate is naturally returned to the original position, and thus has the following effects: By omitting the mechanical mechanism for raising the suction plate, the lifting mechanism of the suction plate can be formed in a simple configuration and at low cost.

In the above invention, it is preferable that the pressing member is constituted by a cylinder including a piston, and the piston is formed to be moved downward in an opening operation (ON operation) and to be released in a closing operation (OFF operation). And can adjust the amount of pressure when the opening action (ON action). Thereby, the amount of drop of the adsorption plate can be appropriately adjusted in accordance with the working conditions such as the thickness of the substrate.

Further, in the above invention, it is preferable that an air flow path for supplying air to the cylinder is provided inside the rotating shaft, and a pipe common to the air flow from the air flow path to the cylinder is connected.

Thereby, when the suction plate is reversely rotated, the pipe connected to the cylinder is not kinked, and the piping device connected to the cylinder can be simplified.

A‧‧‧Substrate processing equipment

B‧‧‧ scoring device

C‧‧‧Adsorption reversal device

D‧‧‧Adsorption lifting device

W‧‧‧Substrate (brittle substrate)

14‧‧‧Side frame

15‧‧‧Rotary axis

15a‧‧‧Air flow path

16‧‧‧Support components

17‧‧‧Compressed members

18‧‧‧Adsorption plate

19‧‧‧Rebound spring

Fig. 1 is a perspective view showing the overall configuration of a substrate processing apparatus incorporating the adsorption reversal apparatus of the present invention.

Figure 2 is a schematic front elevational view of the scoring apparatus in the substrate processing apparatus of Figure 1.

Fig. 3 is a perspective view showing the overall configuration of an adsorption reversal device in the substrate processing apparatus of Fig. 1.

Figure 4 is a partially enlarged cross-sectional view showing the adsorption reversal device of Figure 3.

Figure 5 is a view showing the downward movement state of the adsorption plate in the adsorption reversal device of Figure 3, which is the same as Figure 4 A profile view.

Fig. 6 is a side view showing a portion of the reverse rotation mechanism of the adsorption reversing device of Fig. 3.

Fig. 7 is a perspective view showing the adsorption lifting device in the substrate processing apparatus of Fig. 1.

Fig. 8 is an explanatory view showing a first stage of a substrate processing step by a substrate processing apparatus.

Fig. 9 is an explanatory view showing a second stage of the substrate processing step.

Fig. 10 is an explanatory view showing a third stage of the substrate processing step.

Fig. 11 is an explanatory view showing a fourth stage of the substrate processing step.

Fig. 12 is an explanatory view showing a fifth stage of the substrate processing step.

Fig. 13 is an explanatory view showing a sixth stage of the substrate processing step.

Fig. 14 is an explanatory view showing a seventh stage of the substrate processing step.

Fig. 15 is an explanatory view showing an eighth stage of the substrate processing step.

Fig. 16 is an explanatory view showing a ninth stage of the substrate processing step.

Fig. 17 is an explanatory view showing a tenth stage of the substrate processing step.

Fig. 18 is an explanatory view showing an eleventh stage of the substrate processing step.

Fig. 19 is a view showing an operation panel mounted on a substrate processing apparatus.

Fig. 20 is a front elevational view showing the breaking device incorporated in the substrate processing apparatus.

Fig. 21 is a view showing an air circuit in which the adsorption reversing device and the adsorption lifting device are connected to the respective adsorption plates and the air suction device.

Hereinafter, details of the adsorption inversion apparatus of the present invention will be described based on the drawings. In addition, an example of an adsorption reversal apparatus incorporated in a substrate processing apparatus that performs scribe scribing on a substrate and then reverses the substrate will be described.

As shown in FIG. 1, the substrate processing apparatus A incorporating the adsorption inversion apparatus of the present invention includes a scribing apparatus B for processing a scribe line on the surface of the substrate W, and an adsorption reversal apparatus C for reversing the substrate W. And an adsorption lifting device D disposed above the platform of the scoring device B and adsorbing and lifting the substrate W. The scribing device B, the adsorption reversing device C, and the adsorption lifting device D are incorporated in the frame 1 of the substrate processing apparatus A. The frame 1 is assembled in a rectangular parallelepiped shape from a metal frame material, and the line along the longitudinal direction in the plan view of FIG. 1 is set to the X direction, and the direction orthogonal to the X direction is set to the Y direction. This is explained below.

The scribing device B, as shown in FIGS. 1 and 2, is mounted on the one end side of the frame 1 in the X direction (in the present embodiment, the right side of FIG. 1), and is provided on the platen 2 along The rail 4 that extends in the Y direction moves the platform 4. The platen 2 is formed in a rectangular shape extending in the Y direction in a plan view, and one end portion thereof extends from the frame 1. The stage 4 is provided with an adsorption surface 4a having a plurality of adsorption holes on the upper surface thereof, and is rotatable in a horizontal plane by a rotation driving unit 5 of the built-in motor. Further, the stage 4 and the rotation drive unit 5 are attached to the movement stage 6 that moves along the rail 3, and are formed to move in the Y direction by the screw shaft 9 that is rotated by the motor 8. Further, a beam (cross frame) 11 having the guide member 10 is disposed on the frame 1 in the X direction, and the scribing head 13 having the liftable and lowering of the cutter wheel 12 is attached to the guide in a movable manner in the X direction. Item 10.

As shown in FIGS. 1 and 3 to 5, the adsorption reversing device C includes a horizontal rotating shaft 15 supported by the left and right side frames 14 and 14 and horizontally attached to the rotating shaft 15 and The support member 16 that rotates the rotary shaft 15 together, and the support member 16 pass through a plurality of adsorption plates 18 that support the horizontally movable members 17 in the present embodiment. The adsorption plate 18 is provided with an adsorption surface 18a having a plurality of adsorption holes below, and by means of a rebound bomb The spring 19 is pressed upwards at any time. In the present embodiment, the lower pressure member 17 is formed by a cylinder including a piston that moves downward in an opening operation (ON operation) and a lower pressing force in a closing operation (OFF operation). When the cylinder 17 is opened (ON operation), as shown in FIG. 5, the suction plate 18 is moved downward against the rebound spring 19, and the cylinder 17 is closed (OFF operation) to be formed. The suction plate 18 is returned to the original position of Fig. 4 by the restoring force of the rebound spring 19. Further, the pressing member 17, that is, the piston 17a of the cylinder, is formed to be adjustable in its protruding stroke. Thereby, the amount of drop of the adsorption plate 18 can be appropriately adjusted in accordance with the working conditions such as the thickness of the substrate W. Further, the rotating shaft 15 is formed of a hollow pipe material inside, and an air flow path 15a for supplying air to the cylinder 17 from an air supply source (not shown) is formed inside. The air flow path 15a is connected to each of the air cylinders 17 through the pipe 47. Thereby, the pipe 47 connected to the cylinder 17 when the suction plate 18 is reversely rotated is not kinked.

The rotating shaft 15 of the adsorption reversing device C is formed to be rotated by 180 degrees by the reverse rotation mechanism 42. As shown in FIG. 6, the reverse rotation mechanism 42 is provided with a gear 20 at one end thereof, and is driven by the cylinder 22 to mesh the rack 21 meshed with the gear 20 so as to be rotatable by 180 degrees. Thereby, the suction surface 18a of the suction plate 18 can be reversed from the downward posture to the upward posture, and conversely, it can be reversed from the upward posture to the downward posture. Further, as shown in FIG. 1, rails 23, 23 are provided on the upper surface of the frame members 1a, 1a extending in the X direction of the frame 1, and are disposed at the upper ends of the side frames 14, 14 of the adsorption reversing device C. There are guides 24, 24 that slide along the rails 23, 23. Further, the handle 25 for moving the adsorption reversing device C by hand is provided to be connected to one of the guide portions 24 and to extend to the outside of the frame 1. Thereby, it is formed that the suction plate 18 can be manually moved from the left side of the frame 1 in FIG. 1 in which the reversible space is secured, that is, the substrate reversal position, to the top of the platform 4 of the scoring device B. Substrate Delivery location.

Further, the connecting plates 26 at the upper ends of the side frames 14 and 14 on the left and right sides of the bridge are provided with engaging holes 27 that are inserted into the frame 1 and into which the positioning pins 28 and 28 are inserted. The positioning pins 28 are respectively disposed at the substrate inversion position and the substrate delivery position, and are formed to be detected by the position detecting member 29 when the adsorption inversion position C reaches the substrate inversion position and the substrate delivery position. It is automatically snapped into the engaging hole 27. As the positioning pin 28, for example, a solenoid which is opened and closed by ON/OFF of the electromagnet can be formed. Further, as the position detecting member 29, a photo sensor or a limit switch or the like can be utilized.

As shown in FIG. 7, the adsorption lifting device D includes a fixing plate 30 fixed to the horizontal direction of the frame 1, a fluid cylinder 31 having a piston 31a attached to the fixing plate 30 and reciprocating vertically downward, and a fluid cylinder 31 fixed to the fluid. The adsorption plate 32 at the lower end of the piston 31a of the cylinder 31. The adsorption plate 32 is disposed above the platform 4 of the above-described scoring device B, and has an adsorption surface 32a having a plurality of adsorption holes on the lower surface. Further, the suction plate 32 is provided with a plurality of guide members 33 extending from the upper surface thereof vertically upward and slidably penetrating the fixing plate 30. In the present embodiment, the guide member 33 is formed of a round bar material, and four of them are arranged in a total of two at a symmetrical position centered on the fluid cylinder 31. Thereby, the free rotation can be prevented when the adsorption plate 32 is lifted and lowered, and the horizontal posture of the adsorption plate 32 can be more stably maintained. Further, the upper ends of the guide members 33 are mutually coupled and held by the joint members 33a, whereby the guide members 33 can be reinforced and held in a vertical standing position, and the suction plate 32 can be smoothly raised and lowered.

In the present embodiment, the adsorption reversing device C and the lifting operation and vacuum operation of the adsorption plates 18, 32 in the adsorption lifting mechanism D, and the reverse rotation mechanism 42 for reversing the adsorption plate 18 of the adsorption reversing device C are reversed. Driven by a switch operation using a push button switch Manually. Specifically, as shown in FIG. 19, the right side lock release button 34 and the left lock release button 35 for releasing the lock of the positioning pins 28, 28 of the suction reversing device C are provided for the suction plate at the substrate delivery position. The up/down button 36 that performs the ON/OFF operation of the lower pressing member (cylinder) 17 to move downward, the operation button 37 for actuating the fluid cylinder 31 of the adsorption lifting device D, and the reverse of the driving adsorption inversion device C The reverse operation button 43 of the turning mechanism 42 is provided on the operation panel 38 (omitted in FIG. 1) mounted on the front surface of the substrate processing apparatus A. Further, the vacuum button 39 of the adsorption plate 18 of the adsorption reversing device C and the vacuum button 40 of the adsorption plate 32 of the adsorption lifting device D are provided on the operation panel 38.

The adsorption hole of each of the adsorption surfaces 4a, 18a, and 32a of the platform 4 of the scoring device B, the adsorption plate 18 of the adsorption reversal device C, and the adsorption plate 32 of the adsorption lifting device D passes through the suction pipe and the vacuum pump. The air suction means (outside the figure) are connected to form a substrate W which can be held by suction air suction. In Figs. 1 to 7, the piping for suction for connecting the adsorption plates and the accompanying equipment are omitted in order to avoid complication of the drawings. As shown in FIG. 21, the adsorption plate 18 of the adsorption reversing device C and the adsorption plate 32 of the adsorption lifting device D are formed such that the suction air is supplied from the same air suction device 48 via the pipe 49, and once the vacuum button 40 of the adsorption plate 32 is pressed, Then, switching is performed by a switching valve 50. Thereby, labor saving of the air suction device, simplification of piping to the adsorption plates, and cost reduction of the substrate processing apparatus can be achieved, and the air can be sucked by only one-touch operation of pressing the vacuum button 40. Switching.

Next, the step of inverting the substrate W on the upper surface of the substrate W of the single substrate by the substrate processing apparatus A described above will be sequentially described with reference to FIGS. 1 and 8 to 19 . In Fig. 1, the substrate W placed on the stage 4 of the scribing device B is in a state in which the scribing wheel 12 has been machined with a score line. Using the knives of the cutter wheel 12, After the platform 4 is moved to the extended end of the platen 2 and the substrate W to be processed is placed, the platform 4 is moved to the position of the scribing head 13 to lower the cutter wheel 12 and the cutter wheel 12 or the platform 4 is oppositely Move and proceed. Further, the table 4 is rotated by 90 degrees by the rotation driving portion 5, whereby the scribe line in the X-Y direction can be processed.

The substrate W which is scribed in the scribe line and placed on the stage 4 is reversed by the following steps. First, the lock of the positioning pin 28 on the left side of the adsorption reversing device C is released by operating the left lock release button 35. Then, the handle 25 is gripped and the suction plate 18 is moved manually above the platform 4 of the scoring device B, that is, the substrate delivery position, as shown in Figs. At the substrate delivery position, the position sensing member 29 senses and automatically engages the right positioning pin 28 in the engagement hole 27 to lock the position of the adsorption reversing device C.

Next, the lift button 36 is pressed to actuate the pressing member 17 (see FIG. 5), and the suction plate 18 is moved downward to a position in contact with the substrate W of the stage 4 as shown in FIG. At this position, the vacuum button 39 is pressed to adsorb the substrate W to the adsorption plate 18. At this time, the suction force generated by the suction air of the stage 4 is released by the suction button (not shown) for the additional platform, and is released before the vacuum button 39 is pressed or pressed. Released in conjunction. Next, the lift button 36 is pressed again to release the pressure under the pressing member 17. By this release, the suction plate 18 returns to the original position as shown in FIG. 11 by the restoring force of the rebound spring 19.

Next, after the right lock release button 34 is pressed to unlock the lock pin 28 on the right side, as shown in FIG. 12, the suction reversing device C is manually moved to the substrate inversion position. At the substrate inversion position, the position sensing member 29 senses, and the left positioning pin 28 is engaged with the engaging hole 27 to lock the position of the adsorption reversing device C. At this position, as shown in FIG. 13, the reverse operation button 43 is pressed to invert the suction plate 18.

After the suction plate 18 is reversed, the left lock release button 35 is pressed to release the lock, and the adsorption reversal device C is manually moved to the substrate delivery position of FIG. Thereafter, the operation button 37 of the adsorption lifting device D is pressed, and as shown in FIG. 15, the adsorption plate 32 is lowered onto the substrate W adsorbed to the adsorption plate 18 of the adsorption reversal device C. In this state, the vacuum button 40 is pressed to switch the adsorbed air from the adsorption plate 18 of the adsorption reversing device C to the adsorption plate 32 of the adsorption lifting device D, and after the substrate W is adsorbed to the adsorption plate 32, the operation button 37 is pressed. As shown in Fig. 16, the adsorption plate 32 of the adsorption lifting device D is raised, and the lock of the adsorption inversion device C is released by the above operation, and the adsorption inversion device C (adsorption plate 18) is returned to the substrate inversion position.

Next, by pressing the operation button 37, as shown in Fig. 17, the suction plate 32 of the adsorption lifting device D is lowered onto the stage 4 of the scoring device B, and the vacuum button 40 is pressed to close the adsorption air of the adsorption plate 32. Thereby, the substrate W is delivered on the platform 4. Thereafter, the operation button 37 is pressed, and as shown in FIG. 18, the suction plate 32 of the adsorption lifting device D is raised to the original position. In addition, the suction plate 18 of the adsorption reversing device C that has returned to the reverse position is reversed so that the suction surface 18a faces downward, and the substrate reverses the operation for the next substrate inversion operation. The substrate W thus inverted is removed from the stage 4 for the next breaking step.

In the above-described step, the adsorption plate 18 of the adsorption reversing device C is locked by the positioning pin 28 when it comes to the substrate inversion position and the substrate delivery position, so that the adsorption plate 18 can be surely held at the determined position. . Further, during the delivery operation or the reverse operation of the substrate W, the adsorption plate 18 does not shake left and right, and the stable posture can be smoothly performed. Further, the adsorption plate 18 of the adsorption reversing device C receives the substrate W from the stage 4 of the scribing device B, and then moves it to the substrate inversion position and reverses it. Therefore, when the substrate W is received from the stage 4, It can be lifted only to the extent that it does not come into contact with the platform 4. Therefore, as shown in FIGS. 3 to 5, as a mechanism for lifting and lowering the suction plate 18, The pressing member 17 having a small vertical movement stroke and a simple mechanism for returning the suction spring 18 to the original position when the pressure under the pressing member 17 is released can be formed in a small size.

In the above embodiment, in order to reverse the substrate W on the platform 4 of the scribing device B, first, the substrate W on the stage 4 is picked up by the adsorption reversal device C and inverted, and then the substrate W is moved toward the adsorption lifting device. D is delivered and placed on the platform 4, but in addition to this sequence, the substrate W can be picked up from the platform 4 by the adsorption lifting device D and delivered to the adsorption reversal device C, and after the substrate W is inverted, the adsorption is reversed. The transfer device C mounts the substrate W on the stage 4.

Further, in addition to the scribing device B incorporated in the substrate processing apparatus A, as shown in FIG. 20, a breaking device E including a plate-shaped splitting bar 45 that is lifted and lowered by the cylinder 44 may be incorporated. In this case, the substrate W on which the score line is previously processed is placed on the stage 4 having the same moving mechanism as the stage 4 of the above-described scoring device B, by the adsorption reversal device C and the adsorption lifting device. D, in the same order as the above-described steps, inverts the substrate W and returns it to the stage 4 so that the scribe line becomes the back side. Then, the stage 4 is moved below the rupture rod 45, the rupture rod 45 is pressed against the substrate W, and the substrate W is deflected, and is broken along the scribe line. Thereafter, the divided substrate W is removed from the stage 4.

Although the representative embodiments of the present invention have been described above, the present invention is not particularly limited to the above-described embodiments. For example, in the above embodiment, the lifting operation and the vacuum operation of the adsorption plates 18, 32 in the adsorption reversal device C and the adsorption lifting device D, and the reverse rotation of the adsorption plate 18 of the adsorption reversal device C are reversed. The driving of the mechanism 42 is manually performed by a button operation, but may be configured to be controlled by a computer in an automatic manner. Further, in the present invention, it is possible to carry out the appropriate range within the scope of achieving the purpose without departing from the scope of the request. When correcting or changing.

The present invention is applied to a substrate processing apparatus for scribing or cracking a brittle material substrate such as glass, and is used in an adsorption inversion apparatus for reversing a substrate.

C‧‧‧Adsorption reversal device

14‧‧‧Side frame

15‧‧‧Rotary axis

16‧‧‧Support components

17‧‧‧Compressed members

18‧‧‧Adsorption plate

18a‧‧‧Adsorption surface

19‧‧‧Rebound spring

24‧‧‧ Guidance Department

25‧‧‧Hands

26‧‧‧Link board

27‧‧‧Snap hole

42‧‧‧Reverse rotation mechanism

Claims (3)

An adsorption reversal device for adsorbing and reversing a substrate, comprising: a rotating shaft supported by left and right side frames; and a supporting member horizontally attached to the rotating shaft and rotating together with the rotating shaft And a rebounding plate held by the pressing member at a level at which the supporting member can move up and down, and a rebound spring that elastically presses the suction plate upward; and is formed by: The pressing member operates to move the suction plate downward, and the suction plate is raised and returned to the original position by releasing the pressing force of the pressing member and by the elastic pressure of the rebound spring. The adsorption reversal device according to claim 1, wherein the pressing member is constituted by a cylinder provided with a piston, and the piston is formed to be moved downward and closed during an opening operation (ON operation) Under the OFF action), the downforce is released, and the amount of pressure at the time of the opening action (ON action) can be adjusted. The adsorption reversal device according to claim 2, wherein an air flow path for supplying air to the cylinder is provided inside the rotating shaft, and a pipe common to the air flow from the air flow path to the cylinder is connected .