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TW201409026A - Potentiometric lactate senor, method for forming thereof and measuring system including thereof - Google Patents

Potentiometric lactate senor, method for forming thereof and measuring system including thereof Download PDF

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TW201409026A
TW201409026A TW101131110A TW101131110A TW201409026A TW 201409026 A TW201409026 A TW 201409026A TW 101131110 A TW101131110 A TW 101131110A TW 101131110 A TW101131110 A TW 101131110A TW 201409026 A TW201409026 A TW 201409026A
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lactic acid
layer
sensing
enzyme
voltage type
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TW101131110A
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Chinese (zh)
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Jung-Chuan Chou
Hung-Yu Wu
Chien-Cheng Chen
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Univ Nat Yunlin Sci & Tech
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Abstract

A potentiometric lactate senor is provided, in which includes a substrate, a lactate sensor array and a conductive layer. The lactate sensor array includes a plurality of lactate sensor arranged on the substrate and isolated to each other by an isolation layer. Each the lactate sensor includes a semiconductor sensing layer on the substrate and an enzyme layer on the semiconductor sensing layer. The enzyme layer includes a catalyzingenzyme and electron transporting substance. The conductive layer includes an electrode array disposed in the lactate sensor array. In addition, a method for forming the potentiomeric lactate senor and a measuring system containing the potentiomeric lactate senor are also provided.

Description

電壓式乳酸感測器、其製造方法及包含其之量測系統 Voltage type lactic acid sensor, manufacturing method thereof and measuring system therewith

本發明係有關於生醫感測器,且特別是有關於一種電壓式乳酸感測器及其製造方法。 The present invention relates to biomedical sensors, and more particularly to a voltage type lactic acid sensor and a method of manufacturing the same.

乳酸為葡萄糖進行醣解作用之產物,廣泛存在於生物體中,且可應用於作為生物感測器之偵測標的。例如,於臨床上常以血液與乳酸與丙酮酸鹽含量表示組織內葡萄糖是進行有氧或無氧酵解之標準,並作為判斷組織氧氣供應情況之依據。一般而言,正常人和病人之血清中的乳酸濃度不同,而運動員經無氧運動後的乳酸濃度亦會大幅增高。於食品業中,亦可藉由偵測乳酸濃度來作為乳製品、酒、蔬果品質判讀之依據。 Lactic acid is a product of glycolytic hydrolysis of glucose, which is widely present in living organisms and can be applied as a detection target for biosensors. For example, in the clinic, blood and lactic acid and pyruvate content are often used to indicate that glucose in tissues is the standard for aerobic or anaerobic glycolysis, and is used as a basis for judging the oxygen supply of tissues. In general, the concentration of lactic acid in the serum of normal people and patients is different, and the concentration of lactic acid after athletes undergo anaerobic exercise will also increase significantly. In the food industry, the lactic acid concentration can also be used as a basis for the interpretation of the quality of dairy products, wine, and fruits and vegetables.

乳酸濃度可由各種感測元件予以偵測。Piet Bergveld首先發展出了以離子感測場效電晶體(ISFET)偵測作為乳酸濃度感測元件之技術。離子感測場效電晶體類似於平常的金氧半場效電晶體(MOSFET),其主要差異在於離子感測場效電晶體是以二氧化矽絕緣層及電解液取代金氧半場效電晶體之金屬閘極。藉由感測膜與緩衝溶液中之待測離子形成吸附鍵結的特性,量測感測膜表面的電位變化,進而檢測溶液中之乳酸濃度。 The concentration of lactic acid can be detected by various sensing elements. Piet Bergveld first developed the technology of ion-sensing field-effect transistor (ISFET) detection as a lactic acid concentration sensing element. The ion-sensing field-effect transistor is similar to the usual gold-oxygen half-field effect transistor (MOSFET). The main difference is that the ion-sensing field-effect transistor is replaced by a cerium oxide insulating layer and an electrolyte to replace the gold-oxygen half-field effect transistor. Metal gate. By sensing the characteristics of the adsorption bond formed by the membrane and the ion to be tested in the buffer solution, the potential change on the surface of the sensing membrane is measured, and then the concentration of lactic acid in the solution is detected.

接著,更有許多技術用以改良離子感測場效電晶體。例如,以氧化銥作為感測膜,以將離子感測膜自待測緩衝 溶液中之場效電晶體分離出來,形成延伸式離子感測場效電晶體(extended gate field effect transistor)改善離子感測場效電晶體易受光影響的問題,並解決離子感測場效電晶體於金氧半場效電晶體標準製程下不易封裝的問題。再者,延伸式離子感測場效電晶體亦被改良為可適用於拋棄式感測元件,不但可避免元件之電性區域與水溶液直接接觸,且可與金氧半場效電晶體之標準製程技術完全相容。 Next, there are many techniques for improving ion sensing field effect transistors. For example, using yttrium oxide as a sensing film to self-test the ion sensing film The field effect transistor in the solution is separated to form an extended gate field effect transistor to improve the ion sensing field effect transistor is susceptible to light, and to solve the ion sensing field effect transistor It is not easy to package under the standard process of gold oxide half field effect transistor. Furthermore, the extended ion sensing field effect transistor has also been modified to be suitable for use in disposable sensing elements, which not only avoids direct contact between the electrical regions of the device and the aqueous solution, but also can be used in standard processes with gold oxide half field effect transistors. The technology is fully compatible.

目前,檢測乳酸濃度的儀器可一般是電流式感測器,其其偵測受質在電極表面進行氧化還原反應的電流,然其缺點為易受到其他離子的干擾。電壓式感測器則是採用另一種機制的感測器,其是以偵測緩衝溶液之因化學反應產生之酸鹼值變化,並可利用酵素及高分子膜對電極進行修飾後而產生對乳酸選擇之特性。然而,即使是電壓式感測器,仍有被其他離子干擾的現象存在,且無論是採用何種機制,目前的檢測乳酸濃度的儀器的價格仍舊非常高昂,雖以被普及使用。 At present, the instrument for detecting the concentration of lactic acid can be generally a current sensor, which detects the current subjected to the redox reaction on the surface of the electrode, but has the disadvantage of being susceptible to interference from other ions. The voltage sensor is a sensor using another mechanism, which is to detect the change of the pH value caused by the chemical reaction of the buffer solution, and can modify the electrode by using the enzyme and the polymer film to generate the pair. The characteristics of lactic acid selection. However, even with voltage sensors, there are still phenomena of interference by other ions, and regardless of the mechanism, the current price of instruments for detecting lactic acid concentration is still very high, although it is widely used.

基於目前生醫產業的發展趨勢,所需的是能夠實現居家檢測中對病患之即時監控的偵測器。因此,微小化、低成本、且具有高選擇性之感測元件是生醫產業的發展目標。 Based on the current development trend of the biomedical industry, what is needed is a detector that enables real-time monitoring of patients in home testing. Therefore, sensing elements that are miniaturized, low-cost, and highly selective are development goals of the biomedical industry.

基於上述,本發明係提供一種以分離式延伸式離子感測場效電晶體結構製備的電壓式乳酸感測元件。 Based on the above, the present invention provides a voltage type lactic acid sensing element prepared in a separate extended ion sensing field effect transistor structure.

在一實施例係中,本發明係提供一種電壓式乳酸感測 器,包含:一基板;一乳酸感測元件陣列,包含複數個乳酸感測元件,排列於此基板上並由一隔離層相互隔離,其中每一乳酸感測元件包含:一半導體感測層於此基板上;及一酵素層於此半導體感測層上,具有一暴露之上表面,其中此酵素層包含一催化酶及一電子傳遞物;以及一導線層,包含一電極陣列位於此乳酸感測元件陣列中。此外,本發明亦提供上述電壓式乳酸感測器之製造方法及包含上述電壓式乳酸感測器之量測系統。 In an embodiment, the present invention provides a voltage lactic acid sensing The device comprises: a substrate; an array of lactic acid sensing elements, comprising a plurality of lactic acid sensing elements arranged on the substrate and isolated from each other by an isolation layer, wherein each lactic acid sensing element comprises: a semiconductor sensing layer On the substrate; and an enzyme layer on the semiconductor sensing layer, having an exposed upper surface, wherein the enzyme layer comprises a catalytic enzyme and an electron transporter; and a wire layer comprising an electrode array at the lactic acid sensation Measure the array of components. Furthermore, the present invention also provides a method of manufacturing the above-described voltage type lactic acid sensor and a measuring system including the above-described voltage type lactic acid sensor.

在另一實施例中,本發明亦提供一種電壓式乳酸感測器之製造方法,包含:提供一基板;形成一半導體感測層於此基板上,其中此半導體感測層包含複數個感測圖案;形成一導線層於此基板上,此導線層包含一電極陣列至少部分覆於這些感測圖案上;形成一隔離層覆蓋此基板,且暴露出這些感測圖案;以及形成一酵素層於這些暴露的感測圖案上,以形成一乳酸感測元件陣列,其中此酵素層包含一催化酶及一電子傳遞物。 In another embodiment, the present invention also provides a method for manufacturing a voltage type lactic acid sensor, comprising: providing a substrate; forming a semiconductor sensing layer on the substrate, wherein the semiconductor sensing layer comprises a plurality of sensing layers Forming a wire layer on the substrate, the wire layer comprising an electrode array at least partially covering the sensing patterns; forming an isolation layer covering the substrate and exposing the sensing patterns; and forming an enzyme layer on the substrate These exposed sensing patterns form an array of lactic acid sensing elements, wherein the enzyme layer comprises a catalytic enzyme and an electron transporter.

在又一實施例中,本發明更提供一種包含乳酸感測器之量測系統,包含:該前述之電壓式乳酸感測器;一參考電極;一量測槽,提供一待測溶液、此電壓式乳酸感測器及此參考電極放置於其中;一計算機裝置,與此電壓式乳酸感測器電性連接。 In still another embodiment, the present invention further provides a measurement system including a lactic acid sensor, comprising: the foregoing voltage type lactic acid sensor; a reference electrode; a measuring tank, providing a solution to be tested, A voltage type lactic acid sensor and the reference electrode are placed therein; and a computer device is electrically connected to the voltage type lactic acid sensor.

為讓本發明之上述和其他目的、特徵、和優點能更明顯易懂,下文特舉出較佳實施例,並配合所附圖式,作詳細說明如下: The above and other objects, features and advantages of the present invention will become more <RTIgt;

以下將配合所舉例之圖示為參考,詳述本發明之各實施例。無論任何可能的地方,說明書及圖示中之相同標號代表相同或相似元件。在圖示中,實施例之形狀及厚度可作放大以使圖示清晰易懂。本說明書將依照本發明描述特定的元件形成,其可能為裝置的一部分或直接與裝置結合使用。在本說明書中,所述之“一實施例”意指與該實施例有關之特定元件、結構或特徵,且可包含於至少一實施例中。因此,在本發明說明書之各處出現“在一實施例中”之措辭時,無需將其指向同一實施例。再者,在一或多個實施例中之特定元件、結構或特徵可以任何形式結合。值得注意的是,以下所示之圖示僅用以舉例說明,而未依原比例顯示。 The embodiments of the present invention are described in detail below with reference to the illustrated drawings. Wherever possible, the same reference numerals are in the In the drawings, the shapes and thicknesses of the embodiments may be exaggerated to make the illustrations clear and understandable. This description will describe the formation of particular components in accordance with the present invention, which may be part of the device or used directly in conjunction with the device. In the present specification, the phrase "an embodiment" means a specific element, structure or feature relating to the embodiment, and may be included in at least one embodiment. Therefore, when the phrase "in an embodiment" is used throughout the specification, it is not necessary to refer to the same embodiment. Furthermore, the particular elements, structures, or characteristics in one or more embodiments can be combined in any form. It should be noted that the illustrations shown below are for illustrative purposes only and are not shown in the original scale.

參見第1及2圖,其各自顯示依照本發明一實施例之電壓式乳酸感測器之剖面圖及分解圖。在一實施例中,本發明實施例所提供之電壓式乳酸感測器係為電壓式陣列型乳酸感測器。 Referring to Figures 1 and 2, each of which shows a cross-sectional view and an exploded view of a voltage type lactic acid sensor in accordance with an embodiment of the present invention. In one embodiment, the voltage type lactic acid sensor provided by the embodiment of the present invention is a voltage array type lactic acid sensor.

電壓式乳酸感測器100包含一基板102,其上可設有乳酸感測元件陣列。基板102可例如為塑膠或玻璃基板,例如聚對苯二甲酸二丁酯(PET)、絕緣玻璃、導電玻璃或前述之組合。乳酸感測元件陣列由複數個乳酸感測元件104組合形成,且這些乳酸感測元件104彼此之間係由隔離層106相互隔開。也就是說,以上視角度觀之時,每一乳酸感測元件104係由隔離層106所環繞。隔離層106可例如由環 氧樹脂、UV膠或防水絕緣膠體所形成。 The voltage type lactic acid sensor 100 includes a substrate 102 on which an array of lactic acid sensing elements can be disposed. The substrate 102 can be, for example, a plastic or glass substrate such as polybutylene terephthalate (PET), insulating glass, conductive glass, or a combination of the foregoing. The lactic acid sensing element array is formed by a combination of a plurality of lactic acid sensing elements 104, and these lactic acid sensing elements 104 are separated from one another by an isolation layer 106. That is to say, each of the lactic acid sensing elements 104 is surrounded by the isolation layer 106 when viewed from above. The isolation layer 106 can be, for example, a ring Oxygen resin, UV glue or waterproof insulating colloid.

在一實施例中,每一乳酸感測元件104可包含半導體感測層108及酵素層110。半導體感測層108可設置於基板102上。半導體感測層108可包含二氧化釕、氧化錫、氧化鋁、氮化鋁、氧化鋅、氧化鈦、石墨、前述之組合、或其他適於感測電位變化之半導體元件。酵素層110可設置於半導體感測層108上,且具有一暴露表面,以與待測溶液接觸。酵素層110可包含催化酶及電子傳遞物。催化酶可例如為乳酸脫氫酶、乳酸氧化酶、或其他可催化乳酸進行氧化還原反應之酵素。電子傳遞物可例如為鐵氰化鉀(potassium ferricyanide)、亞鐵氰化鉀(potassium hexacyanoferrate)、四硫富瓦烯(tetrathiafulvalene)、四氰基對苯二醌二甲烷(tetracyanoquinodimethane)、前述之組合、或其他可增加電子傳遞之材料。在一實施例中,催化酶為約0 mg~5 mg、電子傳遞物為約0 mg~3 mg,最佳重量比為5:2。此外,酵素層110中可視需要更包含輔酶,例如菸鹼胺腺嘌呤二核苷酸(nicotinamide adeine dinuleolite,LAD+)、黃素腺嘌呤二核苷酸(flavin-adenine+dinuoleotide,FAD)、黃素單核苷酸(flavin mononucleotide,FMN)、前述之組合、或其他可幫助酵素進行催化反應之材料。在一實施例中,催化酶為約0 mg~5 mg、輔酶為約0 mg~5 mg,最佳重量比為1:1。 In an embodiment, each lactic acid sensing element 104 can include a semiconductor sensing layer 108 and an enzyme layer 110. The semiconductor sensing layer 108 can be disposed on the substrate 102. The semiconductor sensing layer 108 can comprise germanium dioxide, tin oxide, aluminum oxide, aluminum nitride, zinc oxide, titanium oxide, graphite, combinations of the foregoing, or other semiconductor components suitable for sensing potential changes. The enzyme layer 110 can be disposed on the semiconductor sensing layer 108 and has an exposed surface to be in contact with the solution to be tested. The enzyme layer 110 can comprise a catalytic enzyme and an electron transporter. The catalytic enzyme may be, for example, lactate dehydrogenase, lactate oxidase, or other enzyme that catalyzes the redox reaction of lactic acid. The electron transporter can be, for example, potassium ferricyanide, potassium hexacyanoferrate, tetrathiafulvalene, tetracyanoquinodimethane, combinations of the foregoing. Or other materials that increase electron transport. In one embodiment, the catalytic enzyme is from about 0 mg to 5 mg, the electron transfer material is from about 0 mg to 3 mg, and the optimal weight ratio is 5:2. In addition, the enzyme layer 110 may further include a coenzyme such as nicotinamide adeine dinuleolite (LAD + ), flavin-adenine+dinuoleotide (FAD), yellow. Flavin mononucleotide (FMN), combinations of the foregoing, or other materials that aid in the catalytic reaction of an enzyme. In one embodiment, the catalytic enzyme is from about 0 mg to 5 mg, the coenzyme is from about 0 mg to 5 mg, and the optimal weight ratio is 1:1.

有一實施例中,酵素層110與半導體感測層108之間可包含一固定層112。此固定層可例如為一擔體112,其同時與酵素層110及半導體感測層108形成共價鍵結,以將 酵素層110固定於半導體感測層108上。在一實施例中,擔體112可例如為3-環氧丙醇丙基三甲基矽烷(3-glycidoxypropyltrimmethoxysilane,GPTS)、戊二醛(glutaraldehyde)、全氟磺酸(nafion)、前述之組合、或其他可有效固定酵素之材料。 In one embodiment, a fixed layer 112 may be included between the enzyme layer 110 and the semiconductor sensing layer 108. The pinned layer can be, for example, a carrier 112 that simultaneously forms a covalent bond with the enzyme layer 110 and the semiconductor sensing layer 108 to The enzyme layer 110 is fixed to the semiconductor sensing layer 108. In one embodiment, the support 112 can be, for example, 3-glycidoxypropyltrimmethoxysilane (GPTS), glutaraldehyde, perfluorosulfonic acid (nafion), combinations thereof. Or other materials that can effectively immobilize enzymes.

電壓式乳酸感測器100還可包含一圖案化導線層120設於基板102上,以傳遞由該些乳酸感測元件102偵測得到的訊號至外部電路。圖案化導線層120可包含一電極陣列122、一導線區124及一接點區126。電極陣列122可位於乳酸感測元件之半導體感測層108及酵素層110之間,與酵素層110相接觸。在一實施例中,電極陣列122可包含多個電極單元,每一電極單元對應地設於一乳酸感測元件104中,並可作為乳酸感測元件102之工作電極。接點區124可位於乳酸感測元件陣列的區域外,並包含多個暴露的接觸點,以作為電壓式乳酸感測器之輸出埠,提供其他電路處理裝置處理該乳酸感測元件陣列得到之訊號。在一實施例中,接點區126中的每一接觸點可對應位於一乳酸感測元件中的一電極單元。圖案化導線層120之導線區124係埋設於隔離層104下方,於電極陣列區122及接點區126之間延伸,以將其電性連接。在一實施例中,圖案化導線層120可包含銀膠、碳膠、銅膠、鋁膠、銀墨,或其他合適導電元件。 The voltage lactic acid sensor 100 can also include a patterned conductive layer 120 disposed on the substrate 102 to transmit signals detected by the lactic acid sensing elements 102 to an external circuit. The patterned wire layer 120 can include an electrode array 122, a wire region 124, and a contact region 126. The electrode array 122 can be positioned between the semiconductor sensing layer 108 of the lactic acid sensing element and the enzyme layer 110 in contact with the enzyme layer 110. In an embodiment, the electrode array 122 can include a plurality of electrode units, each of which is correspondingly disposed in a lactic acid sensing element 104 and can serve as a working electrode of the lactic acid sensing element 102. The contact region 124 can be located outside the region of the array of lactic acid sensing elements and includes a plurality of exposed contact points for output as a voltage lactic acid sensor, providing other circuit processing devices to process the array of lactic acid sensing elements. Signal. In one embodiment, each contact point in the contact region 126 can correspond to an electrode unit located in a lactic acid sensing element. The wire region 124 of the patterned wire layer 120 is buried under the isolation layer 104 and extends between the electrode array region 122 and the contact region 126 to electrically connect the wires. In an embodiment, the patterned wire layer 120 may comprise silver paste, carbon glue, copper glue, aluminum glue, silver ink, or other suitable conductive elements.

第3A~3C圖顯示依照本發明實施例之電壓式乳酸感測器之製造方法於各種中間階段之剖面圖。於本實施例中,與前述實施例相同或相似之元件係以相同或相似的參考標 號表示。參見第3A圖,首先提供一基板102。基板102可例如為塑膠或玻璃基板,例如聚對苯二甲酸二丁酯(PET)、絕緣玻璃、導電玻璃或前述之組合。基板102上可形成有一半導體感測層108。此半導體感測層108可由射頻濺鍍法、蒸鍍法、化學水浴沉積法,或前述之組合形成。例如,可於100~120W之功率、10~15 mTtorr下進行射頻濺鍍約3~10分鐘。半導體感測層108可經由圖案化製程形成如第3A圖中所示之複數感測圖案108。 3A to 3C are cross-sectional views showing various methods of manufacturing a voltage type lactic acid sensor according to an embodiment of the present invention. In the present embodiment, the same or similar elements as the foregoing embodiments are given the same or similar reference numerals. No. Referring to Figure 3A, a substrate 102 is first provided. The substrate 102 can be, for example, a plastic or glass substrate such as polybutylene terephthalate (PET), insulating glass, conductive glass, or a combination of the foregoing. A semiconductor sensing layer 108 may be formed on the substrate 102. The semiconductor sensing layer 108 can be formed by a radio frequency sputtering method, an evaporation method, a chemical water bath deposition method, or a combination thereof. For example, RF sputtering can be performed for about 3 to 10 minutes at a power of 100 to 120 W and 10 to 15 mTtorr. The semiconductor sensing layer 108 may form a complex sensing pattern 108 as shown in FIG. 3A via a patterning process.

接著,參見第3B圖,可形成圖案化導線層108於基板上。圖案化導線層120可包含一電極陣列、一導線區及一接點區(參見第2圖),其中電極陣列可包含多個感測電極對應地形成於感測圖案108上,接點區126可包含多個接觸點形成於感測圖案108所在的區域外,導線區包含多個導線連接電極陣列及接點區。圖案化導線層120可由網版印刷或其他合適方法形成。 Next, referring to FIG. 3B, a patterned wiring layer 108 can be formed on the substrate. The patterned conductive layer 120 can include an electrode array, a lead region, and a contact region (see FIG. 2). The electrode array can include a plurality of sensing electrodes correspondingly formed on the sensing pattern 108, and the contact region 126 A plurality of contact points may be formed outside the area where the sensing pattern 108 is located, and the wire area includes a plurality of wire connection electrode arrays and a contact area. The patterned wire layer 120 can be formed by screen printing or other suitable method.

接著,參見第3C圖,形成一隔離層106於基板102上,以將該些感測圖案108彼此隔離。此外,隔離層106可實質上覆蓋圖案化導線層120的導線區,並暴露出該些感測圖案108及圖案化導線層120的接點區。隔離層106可包含可例如由環氧樹脂、UV膠、防水絕緣膠、絕緣保護膠等,並可由網版印刷或其他合適方法形成。在一實施例中,隔離層106之厚度可高於半導體感測層108,以於該些感測圖案108上方形成開口130,以於隨後供酵素層固定於其上。 Next, referring to FIG. 3C, an isolation layer 106 is formed on the substrate 102 to isolate the sensing patterns 108 from each other. In addition, the isolation layer 106 can substantially cover the wire regions of the patterned wire layer 120 and expose the contact regions of the sensing patterns 108 and the patterned wire layers 120. The isolation layer 106 can comprise, for example, an epoxy, UV glue, a waterproof insulating glue, an insulating protective glue, or the like, and can be formed by screen printing or other suitable method. In one embodiment, the isolation layer 106 may have a higher thickness than the semiconductor sensing layer 108 to form an opening 130 over the sensing patterns 108 for subsequent immobilization of the enzyme layer thereon.

最後,形成酵素層110於該些感測圖案108上方形成 開口130,形成如第1及2圖所示之電壓式乳酸感測器100。酵素層110可包含催化酶及電子傳遞物。催化酶可例如為乳酸脫氫酶、乳酸氧化酶、或其他可催化乳酸進行氧化還原反應之酵素。電子傳遞物可例如為鐵氰化鉀(potassium ferricyanide)、亞鐵氰化鉀(potassium hexacyanoferrate)、四硫富瓦烯(tetrathiafulvalene)、四氰基對苯二醌二甲烷(tetracyanoquinodimethane)、前述之組合、或其他可增加電子傳遞之材料。在一實施例中,乳酸酵素為約0 mg~5 mg、電子傳遞物為約0 mg~3 mg,最佳重量比為5:2。此外,酵素層110中可視需要更包含輔酶,例如菸鹼胺腺嘌呤二核苷酸(nicotinamide adeine dinuleolite,LAD+)、黃素腺嘌呤二核苷酸(flavin-adenine dinucleotide,FAD)、黃素單核苷酸(flavin mononucleotide,FMN)、前述之組合、或其他可幫助酵素催化反應之材料。在一實施例中,催化酶為約0 mg~5 mg、輔酶為約0 mg~5 mg,最佳重量比為1:1。 Finally, the formation of the enzyme layer 110 forms an opening 130 above the sensing patterns 108 to form a voltage type lactic acid sensor 100 as shown in FIGS. 1 and 2. The enzyme layer 110 can comprise a catalytic enzyme and an electron transporter. The catalytic enzyme may be, for example, lactate dehydrogenase, lactate oxidase, or other enzyme that catalyzes the redox reaction of lactic acid. The electron transporter can be, for example, potassium ferricyanide, potassium hexacyanoferrate, tetrathiafulvalene, tetracyanoquinodimethane, combinations of the foregoing. Or other materials that increase electron transport. In one embodiment, the lactate is from about 0 mg to 5 mg, the electron transfer material is from about 0 mg to 3 mg, and the optimal weight ratio is 5:2. In addition, the enzyme layer 110 may further comprise a coenzyme, such as nicotinamide adeine dinuleolite (LAD + ), flavin-adenine dinucleotide (FAD), flavin. A flavin mononucleotide (FMN), a combination of the foregoing, or other material that aids in the catalytic reaction of an enzyme. In one embodiment, the catalytic enzyme is from about 0 mg to 5 mg, the coenzyme is from about 0 mg to 5 mg, and the optimal weight ratio is 1:1.

在一實施例中,酵素層110可由共價鍵結法固定於該些感測圖案108上。例如,可藉由一擔體112同時與酵素層110及感測圖案108產生共價鍵結。擔體可例如為3-環氧丙醇丙基三甲基矽烷、戊二醛(Glutaraldehyde)、全氟磺酸(Nafion),或其他可有效固定酵素之材料。在一實施例中,擔體與催化酶之容積比例可為1:2至4:2,最佳容積比為1:1。或者,酵素層可藉由其他方法固定於感測層上,例如交聯法、包埋法。值得注意的是,雖然圖案化導線層120之電極陣列具有部分位於感測圖案上,但其所佔之面 積不足以大到影響酵素層110固定於感測圖案108上。 In one embodiment, the enzyme layer 110 can be attached to the sensing patterns 108 by covalent bonding. For example, a covalent bond can be generated simultaneously with the enzyme layer 110 and the sensing pattern 108 by a carrier 112. The support may, for example, be 3-glycidylpropyltrimethylnonane, glutaraldehyde, perfluorosulfonic acid (Nafion), or other material effective for immobilizing the enzyme. In one embodiment, the volume ratio of the support to the catalytic enzyme may range from 1:2 to 4:2 with an optimum volume ratio of 1:1. Alternatively, the enzyme layer can be immobilized on the sensing layer by other methods, such as cross-linking or embedding. It should be noted that although the electrode array of the patterned wire layer 120 has a portion located on the sensing pattern, the surface occupied by the electrode layer 120 The product is not large enough to affect the enzyme layer 110 to be attached to the sensing pattern 108.

此外,在一可選擇之實施例中,當酵素層110固定於該些感測圖案108上方之後,可將乳酸感測器100置於0℃~6℃(較佳可為4℃)之冰箱中保存24小時以上以使酵素與擔體完全反應,而有效共價鍵結於感測膜上。如此,酵素層110共價鍵結固定於感測圖案108上,並可保持酵素之活性。 In addition, in an alternative embodiment, after the enzyme layer 110 is fixed on the sensing patterns 108, the lactic acid sensor 100 can be placed in a refrigerator at 0 ° C ~ 6 ° C (preferably 4 ° C). It is stored for more than 24 hours to completely react the enzyme with the support, and is effectively covalently bonded to the sensing membrane. Thus, the enzyme layer 110 is covalently bonded to the sensing pattern 108 and maintains the activity of the enzyme.

參見第4圖,其顯示本發明實施例之一種包含電壓式乳酸感測器之量測系統400。此量測系統400包含一乳酸感測器100、一量測槽410、一參考電極420、一讀出電路430及一計算機裝置440。乳酸感測器100可為如第1及2圖所述之電壓式乳酸感測器100。 Referring to Figure 4, there is shown a measurement system 400 including a voltage lactic acid sensor in accordance with an embodiment of the present invention. The measurement system 400 includes a lactic acid sensor 100, a measuring tank 410, a reference electrode 420, a readout circuit 430, and a computer device 440. The lactic acid sensor 100 may be a voltage type lactic acid sensor 100 as described in FIGS. 1 and 2.

在操作量測系統400時,待測溶液405、乳酸感測器100、參考電極420可放置於量測槽410中。待測溶液可包含將乳酸待測物溶於緩衝溶液中,緩衝溶液可為磷酸鹽或其他合適的緩衝液,pH值可介於4.6~8.8之間,且pH值較佳可接近約7。乳酸感測器100及參考電極420可放置於待測溶液405中。當乳酸感測器100中的酵素層與待測溶液405中的乳酸相接觸,可藉由酵素層催化乳酸進行氧化或還原反應。例如,乳酸可分解為丙酮酸及氫離子。當上述氫離子產生時,緩衝溶液中的電位亦會隨之變化,並由乳酸感測元件陣列量測得到。由乳酸感測器100量測得到的訊號及參考電極的訊號可由讀取電路430讀取並交由計算機裝置440進一步分析處理。依照發明實施例所製造之電壓式乳酸感測器,其感測度可介於46.874 mV/mM至 62.682 mV/mM,線性度可介於0.990至0.995。在本發明所提供之乳酸感測器100,由於酵素層中添加了電子傳遞物,且圖案化導線層是直接與酵素層及半導體感測層接觸,相較於傳統的乳酸感測器可進一步有效減少離子干擾的現象。 When the measurement system 400 is operated, the solution to be tested 405, the lactic acid sensor 100, and the reference electrode 420 may be placed in the measurement tank 410. The solution to be tested may comprise dissolving the lactic acid analyte in a buffer solution, which may be phosphate or other suitable buffer, the pH may be between 4.6 and 8.8, and the pH may preferably be close to about 7. The lactic acid sensor 100 and the reference electrode 420 can be placed in the solution 405 to be tested. When the enzyme layer in the lactic acid sensor 100 is in contact with the lactic acid in the solution 405 to be tested, the lactic acid may be used to oxidize or reduce the lactic acid by the enzyme layer. For example, lactic acid can be decomposed into pyruvic acid and hydrogen ions. When the above hydrogen ions are generated, the potential in the buffer solution also changes, and is measured by the lactic acid sensing element array. The signal of the signal and reference electrode measured by the lactic acid sensor 100 can be read by the reading circuit 430 and further processed by the computer device 440 for analysis. A voltage type lactic acid sensor manufactured according to an embodiment of the invention may have a sensitivity of 46.874 mV/mM to 62.682 mV/mM, linearity can range from 0.990 to 0.995. In the lactic acid sensor 100 provided by the present invention, since the electron transfer material is added to the enzyme layer, and the patterned wire layer is directly in contact with the enzyme layer and the semiconductor sensing layer, the lactic acid sensor can further be compared with the conventional lactic acid sensor. Effectively reduce the phenomenon of ion interference.

乳酸感測器之製備 Preparation of lactic acid sensor 【實施例1】 [Example 1]

提供一PET基板,以丙酮、乙醇及去離子水清洗基板上之雜質。接著,以工作功率10W,在氮氣:氧氣為40:20(sccm)之比例下進行濺鍍,將二氧化釕濺鍍至PET基板上。接著,以網版印刷機製備銀導線,並於120℃下烘烤20分鐘。接著,以網版印刷機製備環氧樹脂隔離層,並於120℃下烘烤60分鐘。 A PET substrate is provided to clean impurities on the substrate with acetone, ethanol and deionized water. Next, sputtering was performed at a working power of 10 W at a ratio of nitrogen:oxygen of 40:20 (sccm), and cerium oxide was sputtered onto the PET substrate. Next, a silver wire was prepared by a screen printing machine and baked at 120 ° C for 20 minutes. Next, an epoxy resin release layer was prepared by a screen printing machine and baked at 120 ° C for 60 minutes.

接著,滴定2 mL的GPTS於二氧化釕上,並於120℃下烘烤60分鐘。取2 mg之乳酸脫氫酵素、2 mg之菸鹼胺腺嘌呤二核苷酸及0.8 mg之鐵氰化鉀加入至5 mM、pH 7之磷酸鹽緩衝溶液中,形成酵素溶液。滴定上述調配好的酵素溶液2 μl至GPTS於二氧化釕上方的開口中,置入冰箱1天,即完成乳酸感測器。 Next, 2 mL of GPTS was titrated on cerium oxide and baked at 120 ° C for 60 minutes. 2 mg of lactate dehydrogenase, 2 mg of nicotinic amine adenine dinucleotide and 0.8 mg of potassium ferricyanide were added to a 5 mM phosphate buffer solution of pH 7 to form an enzyme solution. 2 μl of the above prepared enzyme solution was titrated into the opening above the GPTS in the cerium oxide, and placed in the refrigerator for 1 day to complete the lactic acid sensor.

【實施例2】 [Example 2]

與實施例1進行相同的步驟,除了未加入0.8 mg的鐵氰化鉀。 The same procedure as in Example 1 was carried out except that 0.8 mg of potassium ferricyanide was not added.

乳酸濃度之量測 Measurement of lactic acid concentration 【實施例3】 [Example 3]

將實施例1製備的乳酸感測器、參考電極(Ag/AgCl)及0.25~4.0 mM之乳酸待測溶液放入待測槽中,並使乳酸感測器、參考電極(Ag/AgCl)沒入乳酸待測溶液中,以乳酸感測器量測其響應電壓。每次量測時間約5分鐘,並以資料擷取卡(USB 6008與PCI-6010 DAQ)將訊號輸入計算機裝置中作分析,感測度為53.962 mV/mM,線性度為0.991至0.995,如第5圖所示。 The lactic acid sensor, the reference electrode (Ag/AgCl) prepared in Example 1, and the 0.25-4.0 mM lactic acid test solution were placed in the tank to be tested, and the lactic acid sensor and the reference electrode (Ag/AgCl) were not Into the lactic acid test solution, the response voltage was measured with a lactic acid sensor. Each measurement time is about 5 minutes, and the data acquisition card (USB 6008 and PCI-6010 DAQ) is used to input the signal into the computer device for analysis. The sensitivity is 53.962 mV/mM, and the linearity is 0.991 to 0.995. Figure 5 shows.

干擾離子之量測 Interference ion measurement 【實施例4】 [Embodiment 4]

將實施例1製備的乳酸感測器、參考電極(Ag/AgCl)及含1mM鈉離子之1 mM之乳酸待測溶液放入待測槽中,並使乳酸感測器、參考電極(Ag/AgCl)沒入乳酸待測溶液中,量測響應電壓約5分鐘。 The lactic acid sensor prepared in Example 1, the reference electrode (Ag/AgCl), and the 1 mM lactic acid test solution containing 1 mM sodium ion were placed in the tank to be tested, and the lactic acid sensor and the reference electrode (Ag/) were used. AgCl) was immersed in the lactic acid test solution, and the response voltage was measured for about 5 minutes.

【實施例5】 [Embodiment 5]

將實施例1製備的乳酸感測器、參考電極(Ag/AgCl)及含1mM鉀離子之1 mM之乳酸待測溶液放入待測槽中,並使乳酸感測器、參考電極(Ag/AgCl)沒入乳酸待測溶液中,量測響應電壓約5分鐘。 The lactic acid sensor prepared in Example 1, the reference electrode (Ag/AgCl), and the 1 mM lactic acid test solution containing 1 mM potassium ion were placed in the tank to be tested, and the lactic acid sensor and the reference electrode (Ag/) were used. AgCl) was immersed in the lactic acid test solution, and the response voltage was measured for about 5 minutes.

【實施例6】 [Embodiment 6]

將實施例1製備的乳酸感測器、參考電極(Ag/AgCl)及含1Mm鈣離子之1 mM之乳酸待測溶液放入待測槽中,並使乳酸感測器、參考電極(Ag/AgCl)沒入乳酸待測溶液中,量測響應電壓約5分鐘。 The lactic acid sensor, the reference electrode (Ag/AgCl) prepared in Example 1, and the 1 mM lactic acid test solution containing 1 Mm of calcium ions were placed in the tank to be tested, and the lactic acid sensor and the reference electrode (Ag/) were used. AgCl) was immersed in the lactic acid test solution, and the response voltage was measured for about 5 minutes.

【實施例7】 [Embodiment 7]

將實施例2製備的乳酸感測器、參考電極(Ag/AgCl)及含1mM鈉離子之1 mM之乳酸待測溶液放入待測槽中,並使乳酸感測器、參考電極(Ag/AgCl)沒入乳酸待測溶液中,量測響應電壓約5分鐘。 The lactic acid sensor prepared in Example 2, a reference electrode (Ag/AgCl), and a 1 mM lactic acid test solution containing 1 mM sodium ion were placed in a tank to be tested, and a lactic acid sensor and a reference electrode (Ag/) were used. AgCl) was immersed in the lactic acid test solution, and the response voltage was measured for about 5 minutes.

【實施例8】 [Embodiment 8]

將實施例2製備的乳酸感測器、參考電極(Ag/AgCl)及含1mM鉀離子之1 mM之乳酸待測溶液放入待測槽中,並使乳酸感測器、參考電極(Ag/AgCl)沒入乳酸待測溶液中,量測響應電壓約5分鐘。 The lactic acid sensor prepared in Example 2, a reference electrode (Ag/AgCl), and a 1 mM lactic acid test solution containing 1 mM potassium ion were placed in a tank to be tested, and a lactic acid sensor and a reference electrode (Ag/) were used. AgCl) was immersed in the lactic acid test solution, and the response voltage was measured for about 5 minutes.

【實施例9】 [Embodiment 9]

將實施例2製備的乳酸感測器、參考電極(Ag/AgCl)及含1 mM鈣離子之1 mM之乳酸待測溶液放入待測槽中,並使乳酸感測器、參考電極(Ag/AgCl)沒入乳酸待測溶液中,量測響應電壓約5分鐘。 The lactic acid sensor prepared in Example 2, a reference electrode (Ag/AgCl), and a 1 mM lactic acid test solution containing 1 mM calcium ion were placed in a tank to be tested, and a lactic acid sensor and a reference electrode (Ag) were used. /AgCl) immersed in the lactic acid test solution and measures the response voltage for about 5 minutes.

實施例5~9所量測得到的響應電壓及響應電壓差(添加干擾離子後的響應電壓減去未添加干擾離子時的響應電壓)係整理於表1中。此外,利用溶液分離法及式(1),可將上述之響應電壓差換算出電壓選擇性參數值(K)。 The response voltage and response voltage difference measured in Examples 5 to 9 (the response voltage after adding the interfering ions minus the response voltage when no interfering ions were added) are summarized in Table 1. Further, by using the solution separation method and the formula (1), the above-described response voltage difference can be converted into the voltage selectivity parameter value (K).

在式(1)中ZA係為氫離子之電荷量,ZB係為干擾離子之電荷量。Ej-Ei係為響應電壓差,F為法拉第常數、R為 理想氣體常數、T為量測時的溫度,可將上述之響應電壓差換算出電壓選擇性參數值(K)。當電壓選擇性參數值(K)越小時,代表干擾離子對乳酸感測器的影響越小,乳酸感測器對於乳酸的選擇能力越佳。 In the formula (1), Z A is the charge amount of the hydrogen ion, and Z B is the charge amount of the interference ion. Ej-Ei is the response voltage difference, F is the Faraday constant, R is the ideal gas constant, and T is the temperature at the time of measurement. The response voltage difference can be converted into the voltage selectivity parameter value (K). When the voltage selectivity parameter value (K) is smaller, the smaller the influence of the interference ion on the lactic acid sensor, the better the lactic acid sensor's ability to select lactic acid.

由表1可看出的是,當乳酸感測器的酵素層中有加入鐵氰化鉀時(實施例4~6),其電壓選擇性參數值可明顯優於未加鐵氰化鉀的乳酸感測器(實施例7~9),且特別是針對鈉離子。因此,由上述可明確得知,當乳酸感測器的酵素層中有加入電子傳遞物(例如鐵氰化鉀)時,可大幅改善乳酸感測器對乳酸的選擇性,減少乳酸感測器被其他干擾離子干擾的現象。 It can be seen from Table 1 that when potassium ferricyanide is added to the enzyme layer of the lactic acid sensor (Examples 4-6), the voltage selectivity parameter value is significantly better than that of potassium ferricyanide. Lactic acid sensors (Examples 7-9), and especially for sodium ions. Therefore, it is clear from the above that when an electron transfer substance (for example, potassium ferricyanide) is added to the enzyme layer of the lactic acid sensor, the selectivity of the lactic acid sensor to lactic acid can be greatly improved, and the lactic acid sensor can be reduced. A phenomenon that is disturbed by other interfering ions.

如上述之本發明所提供的乳酸感測器,其結構及製造方法均屬簡單,所需的成本低廉。因此,能夠實現生醫產業所需的微小化且低成本感測元件的目標。同時,本發明 如上述所提供的乳酸感測器可減少被其他離子干擾的現象,因而進一步提高乳酸感測器的選擇性。 The lactic acid sensor provided by the present invention as described above is simple in structure and manufacturing method, and requires low cost. Therefore, it is possible to achieve the goal of miniaturization and low-cost sensing elements required by the biomedical industry. At the same time, the invention The lactic acid sensor as provided above can reduce the phenomenon of interference by other ions, thereby further improving the selectivity of the lactic acid sensor.

雖然本發明已以數個較佳實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作任意之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 While the invention has been described above in terms of several preferred embodiments, it is not intended to limit the scope of the present invention, and any one of ordinary skill in the art can make any changes without departing from the spirit and scope of the invention. And the scope of the present invention is defined by the scope of the appended claims.

100‧‧‧乳酸感測器 100‧‧‧Lactic acid sensor

102‧‧‧基板 102‧‧‧Substrate

104‧‧‧乳酸感測元件 104‧‧‧Lactic acid sensing components

106‧‧‧隔離層 106‧‧‧Isolation

108‧‧‧半導體感測層 108‧‧‧Semiconductor sensing layer

110‧‧‧酵素層 110‧‧‧Enzyme layer

112‧‧‧固定層 112‧‧‧Fixed layer

120‧‧‧導線層 120‧‧‧Wire layer

122‧‧‧電極陣例 122‧‧‧Electrical array

124‧‧‧導線區 124‧‧‧Wire area

126‧‧‧接點區 126‧‧‧Contact area

130‧‧‧開口 130‧‧‧ openings

400‧‧‧量測系統 400‧‧‧Measurement system

405‧‧‧待測溶液 405‧‧‧Test solution

410‧‧‧量測槽 410‧‧‧Measurement slot

420‧‧‧參考電極 420‧‧‧ reference electrode

430‧‧‧讀出電路 430‧‧‧Readout circuit

440‧‧‧計算機裝置 440‧‧‧Computer equipment

第1及2圖各自顯示為依照本發明一實施例之電壓式乳酸感測器之剖面圖及分解圖。 1 and 2 are each a cross-sectional view and an exploded view of a voltage type lactic acid sensor according to an embodiment of the present invention.

第3A至3C圖顯示為依照本發明一實施例之電壓式乳酸感測器之製造方法於各種中間步驟之剖面圖。 3A to 3C are cross-sectional views showing various methods of manufacturing a voltage type lactic acid sensor in accordance with an embodiment of the present invention.

第4圖顯示為依照本發明一實施例之包含電壓式乳酸感測器之量測系統之示意圖。 Figure 4 is a schematic illustration of a metrology system including a voltage lactic acid sensor in accordance with an embodiment of the present invention.

第5圖顯示為依照本發明實施例之電壓式乳酸感測器量測各種乳酸濃度時之響應電壓。 Fig. 5 shows the response voltage when various lactic acid concentrations are measured by a voltage type lactic acid sensor according to an embodiment of the present invention.

100‧‧‧乳酸感測器 100‧‧‧Lactic acid sensor

102‧‧‧基板 102‧‧‧Substrate

104‧‧‧乳酸感測元件 104‧‧‧Lactic acid sensing components

106‧‧‧隔離層 106‧‧‧Isolation

108‧‧‧半導體感測層 108‧‧‧Semiconductor sensing layer

110‧‧‧酵素層 110‧‧‧Enzyme layer

112‧‧‧固定層 112‧‧‧Fixed layer

120‧‧‧導線層 120‧‧‧Wire layer

Claims (18)

一種電壓式乳酸感測器,包含:一基板;一乳酸感測元件陣列,包含複數個乳酸感測元件,排列於該基板上並由一隔離層相互隔離,其中每一乳酸感測元件包含:一半導體感測層於該基板上;及一酵素層於該半導體感測層上,其中該酵素層包含一催化酶及一電子傳遞物;以及一導線層,包含一電極陣列位於該乳酸感測元件陣列中。 A voltage type lactic acid sensor comprises: a substrate; an array of lactic acid sensing elements, comprising a plurality of lactic acid sensing elements arranged on the substrate and isolated from each other by an isolation layer, wherein each lactic acid sensing element comprises: a semiconductor sensing layer on the substrate; and an enzyme layer on the semiconductor sensing layer, wherein the enzyme layer comprises a catalytic enzyme and an electron transporter; and a wire layer comprising an electrode array at the lactic acid sensing In the array of components. 如申請專利範圍第1項所述之電壓式乳酸感測器,其中該電極陣列係位於該些乳酸感測元件之該半導體感測層及該酵素層之間,並與該酵素層相接觸。 The voltage type lactic acid sensor according to claim 1, wherein the electrode array is located between the semiconductor sensing layer of the lactic acid sensing element and the enzyme layer, and is in contact with the enzyme layer. 如申請專利範圍第1項所述之電壓式乳酸感測器,其中該導線層更包含一接點區位於該乳酸感測元件陣列外,並與該些乳酸感測元件電性連接,其中該接點區未被該隔離層覆蓋。 The voltage lactic acid sensor of claim 1, wherein the wire layer further comprises a contact region outside the array of lactic acid sensing elements and electrically connected to the lactic acid sensing elements, wherein The contact area is not covered by the isolation layer. 如申請專利範圍第1項所述之電壓式乳酸感測器,其中該半導體感測層包含二氧化釕、氧化錫、氧化鋁、氮化鋁、氧化鋅、氧化鈦或前述之組合。 The voltage type lactic acid sensor according to claim 1, wherein the semiconductor sensing layer comprises cerium oxide, tin oxide, aluminum oxide, aluminum nitride, zinc oxide, titanium oxide or a combination thereof. 如申請專利範圍第1項所述之電壓式乳酸感測器,其中該催化酶包含乳酸氧化酶或乳酸脫氫酶。 The voltage type lactic acid sensor according to claim 1, wherein the catalytic enzyme comprises lactate oxidase or lactate dehydrogenase. 如申請專利範圍第5項所述之電壓式乳酸感測器, 其中該酵素層更包含菸鹼醯胺嘌呤二核苷酸、黃素腺嘌呤二核苷酸、黃素單核苷酸或前述之組合。 A voltage type lactic acid sensor as described in claim 5, Wherein the enzyme layer further comprises nicotine amidoxime dinucleotide, flavin adenine dinucleotide, flavin mononucleotide or a combination thereof. 如申請專利範圍第1項所述之電壓式乳酸感測器,其中該電子傳遞物包含鐵氰化鉀、亞鐵氰化鉀、四硫富瓦烯、四氰基對苯二醌二甲烷或前述之組合。 The voltage type lactic acid sensor according to claim 1, wherein the electron transporting substance comprises potassium ferricyanide, potassium ferrocyanide, tetrathiafulvalene, tetracyanoquinodimethane or Combination of the foregoing. 如申請專利範圍第1項所述之電壓式乳酸感測器,其中該乳酸酵素係以一擔體固定於該半導體感測層上,該擔體包含3-環氧丙醇丙基三甲基矽烷、戊二醛、全氟磺酸或前述之組合。 The voltage type lactic acid sensor according to claim 1, wherein the lactic acid enzyme is immobilized on the semiconductor sensing layer by a carrier comprising 3-glycidylpropyltrimethyl Decane, glutaraldehyde, perfluorosulfonic acid or a combination of the foregoing. 一種電壓式乳酸感測器之製造方法,包含:提供一基板;形成一半導體感測層於該基板上,其中該半導體感測層包含複數個感測圖案;形成一導線層於該基板上,該導線層包含一電極陣列至少部分覆於該些感測圖案上;形成一隔離層覆蓋該基板,且暴露出該些感測圖案;以及形成一酵素層於該些暴露的感測圖案上,以形成一乳酸感測元件陣列,其中該酵素層包含一催化酶及一電子傳遞物。 A method for manufacturing a voltage type lactic acid sensor, comprising: providing a substrate; forming a semiconductor sensing layer on the substrate, wherein the semiconductor sensing layer comprises a plurality of sensing patterns; forming a wire layer on the substrate, The wire layer includes an electrode array at least partially covering the sensing patterns; forming an isolation layer covering the substrate and exposing the sensing patterns; and forming an enzyme layer on the exposed sensing patterns, To form an array of lactic acid sensing elements, wherein the enzyme layer comprises a catalytic enzyme and an electron transporter. 如申請專利範圍第9項所述之電壓式乳酸感測器之製造方法,其中該導線層更包含一接點區位於該乳酸感測元件陣列外,並與該些乳酸感測元件電性連接,其中該接點區未被該隔離層覆蓋。 The method of manufacturing a voltage type lactic acid sensor according to claim 9, wherein the wire layer further comprises a contact region outside the array of the lactic acid sensing element and electrically connected to the lactic acid sensing elements. Where the contact area is not covered by the isolation layer. 如申請專利範圍第9項所述之電壓式乳酸感測器 之製造方法,其中該催化酶包含乳酸氧化酶或乳酸脫氫酶。 A voltage type lactic acid sensor as described in claim 9 The method of producing, wherein the catalytic enzyme comprises lactate oxidase or lactate dehydrogenase. 如申請專利範圍第11項所述之電壓式乳酸感測器之製造方法,其中該酵素層更包含菸鹼醯胺嘌呤二核苷酸、黃素腺嘌呤二核苷酸、黃素單核苷酸或前述之組合。 The method for manufacturing a voltage type lactic acid sensor according to claim 11, wherein the enzyme layer further comprises nicotinic amidoxime dinucleotide, flavin adenine dinucleotide, and flavin mononucleoside. Acid or a combination of the foregoing. 如申請專利範圍第9項所述之電壓式乳酸感測器之製造方法,其中該電子傳遞物包含鐵氰化鉀、亞鐵氰化鉀、四硫富瓦烯、四氰基對苯二醌二甲烷或前述之組合。 The method for manufacturing a voltage type lactic acid sensor according to claim 9, wherein the electron transporting substance comprises potassium ferricyanide, potassium ferrocyanide, tetrathiafulvalene, tetracyanoquinone Dimethane or a combination of the foregoing. 如申請專利範圍第9項所述之電壓式乳酸感測器之製造方法,其中該酵素層係以一擔體固定於該些暴露的感測圖案上,其中該擔體包含3-環氧丙醇丙基三甲基矽烷、戊二醛、全氟磺酸或前述之組合。 The method for manufacturing a voltage type lactic acid sensor according to claim 9, wherein the enzyme layer is fixed on the exposed sensing patterns by a carrier, wherein the carrier comprises 3-epoxy-propyl. Alcohol propyl trimethyl decane, glutaraldehyde, perfluoro sulfonic acid or a combination of the foregoing. 如申請專利範圍第9項所述之電壓式乳酸感測器之製造方法,其中該形成該酵素層於該些暴露的感測圖案上之步驟包含:加入該催化酶、該輔酶及該電子傳遞物至一緩衝溶液中,形成一酵素溶液;及滴定該酵素溶液至該些暴露的感測圖案上。 The method for manufacturing a voltage type lactic acid sensor according to claim 9, wherein the step of forming the enzyme layer on the exposed sensing patterns comprises: adding the catalytic enzyme, the coenzyme, and the electron transfer The solution is formed into a buffer solution to form an enzyme solution; and the enzyme solution is titrated onto the exposed sensing patterns. 如申請專利範圍第13項所述之電壓式乳酸感測器之製造方法,更包含在滴定該酵素溶液至該些暴露的感測圖案上後,放置於低於室溫之環境下保存24小時。 The method for manufacturing a voltage type lactic acid sensor according to claim 13 further comprises: after titrating the enzyme solution onto the exposed sensing patterns, and storing in an environment below room temperature for 24 hours; . 一種包含乳酸感測器之量測系統,包含:該如申請專利範圍第1項所述之電壓式乳酸感測器;一參考電極;一量測槽,提供一待測溶液、該電壓式乳酸感測器及該參考電極放置於其中;以及 一計算機裝置,與該電壓式乳酸感測器電性連接。 A measuring system comprising a lactic acid sensor, comprising: the voltage type lactic acid sensor according to claim 1; a reference electrode; a measuring tank, providing a solution to be tested, the voltage type lactic acid a sensor and the reference electrode are placed therein; A computer device is electrically connected to the voltage type lactic acid sensor. 申請專利範圍第17項所述之包含乳酸感測器之量測系統,其中該電壓式乳酸感測器中之該導線層更包含一接點區,且該計算機裝置係透過該接點區與該電壓式乳酸感測器電性連接。 The measuring system of claim 17, wherein the wire layer of the voltage type lactic acid sensor further comprises a contact area, and the computer device transmits through the contact area The voltage type lactic acid sensor is electrically connected.
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EP3420971A1 (en) * 2017-06-29 2019-01-02 Covidien LP Surgical instruments including sensors
US10687811B2 (en) 2017-03-08 2020-06-23 Covidien Lp Surgical instruments including sensors
CN116840323A (en) * 2022-03-23 2023-10-03 群创光电股份有限公司 Sensing electronic device
US11877833B2 (en) 2019-07-26 2024-01-23 Covidien Lp Systems and methods for monitoring blood pressure with a powered linear drive
TWI860571B (en) * 2022-11-08 2024-11-01 國立雲林科技大學 Biosensor measurement system and method thereof for detecting human lactic acid

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10687811B2 (en) 2017-03-08 2020-06-23 Covidien Lp Surgical instruments including sensors
US11253257B2 (en) 2017-03-08 2022-02-22 Covidien Lp Surgical instruments including sensors
EP3420971A1 (en) * 2017-06-29 2019-01-02 Covidien LP Surgical instruments including sensors
US11877833B2 (en) 2019-07-26 2024-01-23 Covidien Lp Systems and methods for monitoring blood pressure with a powered linear drive
CN116840323A (en) * 2022-03-23 2023-10-03 群创光电股份有限公司 Sensing electronic device
TWI860571B (en) * 2022-11-08 2024-11-01 國立雲林科技大學 Biosensor measurement system and method thereof for detecting human lactic acid

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