TW201404733A - Splitting apparatus for brittle material substrate - Google Patents

Abstract

The present invention provides a splitting apparatus, which can shorten the time required to split a brittle material substrate and consists of a platform 2 to bear a substrate W, a beam 7 arranged on the top of the platform 2 and being parallel to the bearing face, a guiding axis 8 installed at the beam 7 along the extension direction of the beam 7, and a plurality of splitting rods 10 formed to move along the guiding axis 8. In addition, the splitting apparatus is formed by the following manner: each splitting rod 10 being formed to be liftable via a lift axis 12 and being formed to be rotatable by the axis of being perpendicular to the bearing face of the platform 2 as a center. Thereby, a plurality of splitting rods 10 are formed in a serial configuration being serially arranged along the extension direction of the beam 7 and a separation configuration being parallel to each other along the direction orthogonal to the extension direction of the beam 7.

Description

Cracking device for brittle material substrate

The present invention relates to a cracking device for a substrate composed of a brittle material such as glass, ceramic, sapphire or a semiconductor wafer. More particularly, the present invention relates to a cracking device in which a substrate of a brittle material which is scribed (grooved) is formed in a preceding step, and a unit substrate is cut along the scribe line.

It is known that the surface of a brittle material substrate (hereinafter referred to as "substrate") is formed by a scribing wheel (also referred to as a scoring wheel) or a fixed blade or a laser beam to form mutually orthogonal X directions and In the case of the scribe line in the Y direction, a method of breaking the substrate into a unit substrate by performing an external force along the scribe line is disclosed, for example, in Patent Document 1 or Patent Document 2.

Fig. 5 is a perspective view showing a general cracking device of a substrate. The breaking device 21 is provided with a stage 22 on which the level of the substrate W to be processed is placed and held. The platform 22 is rotatable in a horizontal plane by a rotary drive unit 23 of the built-in motor, and is configured to be movable in the Y direction along the horizontal rails 24. A beam (cross frame) 25 extending horizontally in the X direction is disposed above the platform 22, and a plate-shaped cracking rod 26 extending parallel to the beam and extending in the X direction is attached to the beam 25, and is permeable. The lifting shaft 28 driven by the cylinder 27 is raised and lowered.

Fig. 8 is a view showing a substrate W having a rectangular shape in which the vertical and horizontal scribe lines S1 and S2 are orthogonal to each other by a scribing means in the scribing step of the preceding stage, and the W1 is formed into a product after being broken. The unit substrate, W2 is the end material area that is disposed after the crack. When in the split In the case of 21, the substrate W is broken, and either one of the scribe lines S1 and S2 is formed, for example, as shown in FIG. 5, the scribe line S1 in the longitudinal direction of the substrate is along the X direction, and is sandwiched on the stage 22. A buffer sheet 13 made of an elastic material is placed and placed. In this case, as shown in FIG. 7(a), the score lines S1 and S2 are set to the lower side in advance. Thereafter, as shown in FIG. 7(b), the split rod 26 is lowered from the upper side of the substrate W toward the scribe line S1 and the substrate W is pressed, and the substrate W is bent only in a V shape on the buffer sheet 13. The crack of the scribe line S1 is extended to break the substrate W. After the scribe line S1 is cut in the longitudinal direction of all the cracks as described above, as shown in FIG. 6, the stage 22 is rotated by 90 degrees so that the scribe line S2 in the short-side direction of the substrate faces the X direction. Further, in the same manner as described above, the split rod 26 is lowered and the scribe line S2 is cut, and the unit substrate W1 shown in Fig. 8 is taken out, and the end portion W2 of the end portion is discarded.

Patent Document 1: Japanese Patent No. 3787489

Patent Document 2: Japanese Laid-Open Patent Publication No. 2002-187098

In the above-mentioned conventional breaking device 21, the crack is broken by a split rod 26 extending parallel to the beam 25 and extending in the X direction. Therefore, it is necessary to raise and lower the number of times the split rod is lifted and scored. That is, the number of times of the scribe line S1 in the long-side direction and the scribe line S2 in the short-side direction is totaled. Usually, a large number of large-scale substrates are formed with a plurality of scribe lines, so that the number of scribe lines increases, the time required for the rupture becomes longer, and the wear or life of the rupture rod or its lifting mechanism is also affected.

Accordingly, it is an object of the present invention to provide a breaking device which can solve the above problems and shorten the time required for cracking.

In order to solve the above problems, the following technical means are proposed in the present invention. In other words, the cracking device of the present invention is disposed on the platform having the mounting surface on which the brittle material substrate is placed, and is disposed above the platform so as to be parallel to the mounting surface, and is disposed along the extending direction of the beam. a guiding shaft of the beam and a plurality of splitting bars formed to be movable along the guiding axis; and being formed in such a manner that each of the plurality of cracking bars is formed to be lifted and lowered through the lifting shaft And being formed so as to be rotatable about an axis perpendicular to the mounting surface, whereby the plurality of crack bars are arranged in series in a row along the extending direction of the beam, and extending along the beam The directions in which the directions are orthogonal are mutually separated postures.

Since the present invention is as described above, it has the effect that the length of the scribe line is shorter than the length of each cleavage rod when the rupture is to be made, so that the plurality of rupture rods become along the beam The directions in which the extending directions are orthogonal to each other are separated from each other, and the scribe lines toward the substrate are simultaneously lowered, whereby the plurality of scribe lines can be simultaneously broken, and the time required for the rupture can be shortened. Further, in the case where the scribe line to be broken is longer than the length of each of the rupture bars, the two rupture bars can be broken by being arranged in series in the extending direction of the beam. .

In the present invention, it is preferable that the plurality of split bars are simultaneously moved along the guide axis while maintaining the interval between the split bars in the separated postures which are parallel to each other, and It can also be moved individually and individually. Thereby, in the case where the plurality of split bars are broken in such a manner that they are parallel to each other, the splitting of the plurality of split bars can be continuously performed at the same distance, and the work can be performed. Efficiency. Further, since the movement can be performed individually and individually, even if the distance between the scribe lines is changed in the case where the substrate to be broken is changed, the plurality of scribe lines can be simultaneously broken.

W‧‧‧Battery material substrate

S1‧‧‧ long-term direction marking

S2‧‧‧Drawing in the direction of the short side

1‧‧‧breaking device

2‧‧‧ platform

7‧‧ ‧ beams

8‧‧‧Guidance axis

9‧‧‧Holding

10‧‧‧crack

11‧‧‧ fluid cylinder

12‧‧‧ Lifting shaft

13‧‧‧buffer

Fig. 1 is a perspective view showing an example of a case where a scribe line in a short side direction of a substrate is broken in the cracking device of the present invention.

Fig. 2 is a perspective view similar to Fig. 1 showing a state in which the scribe line in the longitudinal direction of the substrate is broken.

Fig. 3 is a cross-sectional view showing a state in which the substrate is broken.

Figure 4 is a partial perspective view showing another embodiment of a split rod.

Fig. 5 is a perspective view showing an example of a case where a scribe line in the longitudinal direction of the substrate is broken in the conventional rupturing device.

Fig. 6 is a perspective view similar to Fig. 5 showing a state in which the scribe line in the short side direction of the substrate is broken.

Fig. 7 is a cross-sectional view showing a state in which a substrate of a conventional cracking device is broken.

Fig. 8 is a plan view showing an example of a substrate on which a score line is formed.

Hereinafter, the breaking device of the present invention will be described in detail based on the drawings. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing an example of a cracking device of the present invention, showing a case where a scribe line in a short side direction of a substrate is broken; and Fig. 2 is a line showing a direction of a long side of a substrate. The same perspective view as in Fig. 1 is performed in the case of cracking; Fig. 3 is an enlarged cross-sectional view of the substrate when it is broken.

The breaking device 1 is provided with a stage 2 on which a substrate W to be broken is placed. The platform 2 is movable along the horizontal rails 3, 3 in the Y direction and is driven by a screw shaft 4 that is rotated by a motor M1. Further, the platform 2 is rotatable in the horizontal plane by the drive unit 5 of the built-in motor.

The platform 2 is provided with a holding means for holding the substrate W placed thereon at a fixed position. As the holding means, for example, the substrate W can be adsorbed and held by suction from a plurality of small adsorption holes (not shown) through which the platform 2 is opened.

The support columns 6, 6 erected on the clamping platform 2 are erected so that the horizontal beam (cross frame) 7 extending in the X direction straddles the platform 2. In the beam 7, a guide shaft 8 driven by a motor M2 is provided along the direction in which the beam 7 extends, that is, in the X direction. Two movable holders 9, 9 are attached along the guide shaft 8, and a pair of left and right long plate-shaped split bars 10, 10 are attached to the holders 9, 9.

The left and right split bars 10, 10 are arranged on the straight line along the extending direction of the beam 7, and are formed to be movable up and down by the fluid cylinder 11 and the lifting shaft 12 driven by the fluid cylinder 11. Further, the lower end of the split rod 10, as shown in Fig. 3, is formed by an inverted triangle having a ridge line 10a in the longitudinal direction. Further, each of the split bars 10, 10 is formed to be rotatable about an axis perpendicular to the face of the platform 2 (the lift shaft 12 in this embodiment), whereby the two split bars 10, 10, in a series arrangement in which the direction of the beam 7 is extended in the X direction as shown in FIG. 1, and the direction orthogonal to the direction in which the beam 7 extends is as shown in FIG. That is, the Y direction is formed in such a manner that they are separated from each other. In the present embodiment, the split shaft 10 is fixed to the lifting shaft 12, and the lifting shaft 12 is screwed by a turning mechanism (not shown) inserted into the holder 9 to thereby split the lifting shaft 12. The broken rod 10 is rotated.

The two retaining members 9, 9 are respectively held by the splitting bars 10, 10, and are formed to be movable simultaneously along the guiding shaft 8 while being kept at a mutual interval by the driving motor M2, and may be individually Move separately. By this separate movement, the split bars 10, 10 can be adjusted to each other. This configuration can be, for example, at the meshing portion of the holder 9 and the guide shaft 8, by making the clutch When a transmission blocking mechanism (not shown) is interposed therebetween, the disengagement can be achieved and the transmission between the two can be temporarily interrupted. In the case of adjusting the interval between the split bars 10, 10, the drive breaking mechanism of either of the holders 9 is opened, and the motor M2 is driven to move only the other holder 9. Further, in the case where the split bars 10, 10 are moved at the holding interval, the drive cut-off mechanism can be released and the transmission state can be achieved.

Next, with respect to the cracking apparatus 1 described above, the substrate W shown in FIG. 8 is cut, that is, the rectangular substrate W having the scribe lines S1, S2 orthogonal to each other at a predetermined interval is formed. The action is explained. First, when the scribe line S1 is cut in the longitudinal direction of the substrate W, as shown in FIG. 1, the two rupture bars 10, 10 are arranged in series along the X direction. In the present embodiment, they are connected to each other. Further, as shown in FIG. 3(a), the substrate W is placed on the upper surface of the buffer sheet 13 on the stage 2 with the scribe lines S1 and S2 facing downward. In this case, the direction in which the substrate W is placed in the direction of the growth direction and the direction in which the crack bars 10 and 10 are connected to each other, that is, the X direction. Further, the length at which the two split bars 10 and 10 are connected is set to be longer than the length of the score line S1 in the longitudinal direction corresponding to the break. In this state, the joined splitting bars 10, 10 are lowered from directly above the score line S1, and the first line S1 is cut, and then only the distance between the platforms 2 and the score line S1 is made. Move in the Y direction and break the next score line S1. In the substrate W shown, since there are two scribe lines S1 in the longitudinal direction, by cutting the rupture rod 10 twice, all the scribe lines S1 in the longitudinal direction can be broken.

Once the crack of the scribe line S1 in the longitudinal direction is completed, as shown in FIG. 2, the two rupture bars 10, 10 are separated and become in the Y direction which is orthogonal to the direction in which the beam 7 extends. The separation postures are parallel to each other, and the interval between the split bars 10, 10 is adjusted to coincide with the distance between the score lines S2. In addition, the length of each of the splitting bars 10 is preset to be more likely to be broken. The length of the line S2 in the short side direction is long. In this state, the two split bars 10, 10 are simultaneously lowered from directly above the score lines S2, S2, thereby simultaneously breaking the two score lines S2, S2 (see Fig. 3). Next, the split bars 10, 10 are moved along the guide shaft 8 to the right side of the score lines S2, S2 which are to be broken next, and are lowered and carried out in the same manner as described above while maintaining the interval therebetween. Broken. This action is repeated until all the short-side direction marks S2 are broken. In the substrate W shown, since there are five score lines S2 in the short-side direction, the cracks of the score line S2 in the short-side direction are completed by lowering the split bars 10, 10 three times. If there are 10 lines S2 in the short side direction, all 10 lines S2 can be broken by 5 times of lowering.

In this way, by simultaneously lowering the two split bars 10, 10 in the separated posture, the two score lines can be simultaneously broken and the time required for the break can be shortened, and the mutual retention can be maintained. The movement is carried out along the guide shaft 8 at intervals, whereby the breakage can be continuously performed at the same interval.

Further, the length of the scribe line S1 in the longitudinal direction of the substrate W is shorter than the length of each of the rupture bars 10, 10, and is the same as when the scribe line S2 in the short-side direction is broken. The rods 10, 10 are in a mutually parallel separation posture, and the stage 2 is rotated to arrange the substrate W so that the scribe lines S1 and the Y direction coincide with each other, whereby the two long-side scribe lines S1 can be simultaneously split. Broken. Thereby, the shortening of the time required for the cracking can be further contributed.

Further, as shown in Fig. 4, when the two split bars 10, 10 are connected in a straight line, the mutually adjacent concave end portions 10c and the convex portions 10b may be provided at the side end portions adjacent to the split bars 10, 10. Thereby, the state in which the two split bars 10 and 10 are connected in a straight line can be surely maintained.

The representative embodiments of the present invention have been described above, but the present invention is not necessarily limited to the above embodiments. For example, in the above embodiment, although it is disclosed that there are 2 One broken rod 10, but three or more may be provided. Further, it is possible to appropriately modify and change the scope of the present invention without departing from the scope of the claims.

The present invention is applicable to a cracking device for a substrate composed of a brittle material such as glass, ceramic, sapphire, or a semiconductor wafer.

W‧‧‧Battery material substrate

S1‧‧‧ long-term direction marking

S2‧‧‧Drawing in the direction of the short side

M1, M2‧‧‧ motor

1‧‧‧breaking device

2‧‧‧ platform

3‧‧‧ rails

4‧‧‧ Screw shaft

5‧‧‧ Drive Department

6‧‧‧Support column

7‧‧ ‧ beams

8‧‧‧Guidance axis

9‧‧‧Holding

10‧‧‧crack

11‧‧‧ fluid cylinder

12‧‧‧ Lifting shaft

13‧‧‧buffer

Claims (2)

A cracking device for a brittle material substrate is provided on a platform having a mounting surface on which a substrate of a brittle material is placed, a beam disposed parallel to the mounting surface above the platform, and disposed along a direction in which the beam extends The guide shaft of the beam and the plurality of split rods formed to be movable along the guide shaft are formed in such a manner that each of the plurality of split rods is formed to be movable up and down through the lifting shaft. And being formed so as to be rotatable about a shaft perpendicular to the mounting surface, whereby the plurality of split bars are arranged in series in a row along the extending direction of the beam, and along the direction in which the beam extends The direction of intersection becomes a separate posture that is parallel to each other. The rupture device of claim 1, wherein the plurality of rupture bars are simultaneously movable along the guiding axis while maintaining the spacing between the rupture bars in the separating posture, and It can be moved individually and individually.