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TW201332138A - Semiconductor lighting module and manufacturing method thereof - Google Patents

Semiconductor lighting module and manufacturing method thereof Download PDF

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Publication number
TW201332138A
TW201332138A TW101101835A TW101101835A TW201332138A TW 201332138 A TW201332138 A TW 201332138A TW 101101835 A TW101101835 A TW 101101835A TW 101101835 A TW101101835 A TW 101101835A TW 201332138 A TW201332138 A TW 201332138A
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Taiwan
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source module
light source
semiconductor light
emitting diode
substrate
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TW101101835A
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Chinese (zh)
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Yen-Liang Huang
Sheng-Yang Peng
Tsung-Yueh Tsai
Yi-Shao Lai
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Advanced Semiconductor Eng
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Priority to TW101101835A priority Critical patent/TW201332138A/en
Publication of TW201332138A publication Critical patent/TW201332138A/en

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Abstract

A semiconductor lighting module and a manufacturing method thereof are provided. The semiconductor lighting module includes a substrate, a zener diode and a light emitting diode (LED). The substrate has a concave. The zener diode is disposed in the concave. The LED is disposed on the substrate and electronically connected to the zener diode. A projection range of the LED overlaps the concave.

Description

半導體光源模組及其製造方法Semiconductor light source module and manufacturing method thereof

本發明是有關於一種半導體光源模組及其製造方法,且特別是有關於一種結合發光二極體及稽納二極體之半導體光源模組及其製造方法。The present invention relates to a semiconductor light source module and a method of fabricating the same, and more particularly to a semiconductor light source module incorporating a light emitting diode and a semiconductor diode and a method of fabricating the same.

隨著半導體技術的發展,各種半導體光源不斷推陳出新。舉例來說,發光二極體透過電子與電洞在其內結合而產生電致發光效應。發光二極體之光線的波長與其所採用的半導體材料種類與摻雜物有關。發光二極體具有效率高、壽命長、不易破損、開關速度高、高可靠性等優點,使得發光二極體已經廣泛應用於各式電子產品。With the development of semiconductor technology, various semiconductor light sources continue to evolve. For example, a light-emitting diode generates an electroluminescence effect by combining electrons and holes therein. The wavelength of the light of the light-emitting diode is related to the type of semiconductor material used and the dopant. The light-emitting diode has the advantages of high efficiency, long life, not easy to break, high switching speed, high reliability, etc., so that the light-emitting diode has been widely used in various electronic products.

發光二極體係採用半導體設備來製作成一顆顆的晶粒。在某些設計中,為了增加發光二極體的穩定性,也會透過半導體設備來一併製作一些被動元件,使發光二極體與被動元件作結合,提升發光二極體的穩定性。The light-emitting diode system uses semiconductor devices to make individual crystal grains. In some designs, in order to increase the stability of the light-emitting diode, some passive components are also fabricated through the semiconductor device, so that the light-emitting diode and the passive component are combined to improve the stability of the light-emitting diode.

本發明係有關於一種半導體光源模組及其製造方法,其利用凹槽之設計,使得稽納二極體(zener diode)等被動元件可以內埋於基板之內,而不增加基板的厚度。此外,在製造過程中,可以直接採用封裝設備即可完成內埋稽納二極體之步驟,而不需要昂貴的半導體設備,大幅降低製造成本。The present invention relates to a semiconductor light source module and a method of fabricating the same, which utilizes a groove design such that a passive component such as a Zener diode can be buried within the substrate without increasing the thickness of the substrate. In addition, in the manufacturing process, the step of burying the diode can be completed directly by using the packaging device, without expensive semiconductor equipment, and the manufacturing cost is greatly reduced.

根據本發明之一方面,提出一種半導體光源模組。半導體光源模組包括一基板、一稽納二極體及一發光二極體(light emitting diode,LED)。基板具有一凹槽。稽納二極體設置於凹槽內。發光二極體設置於基板上,並電性連接稽納二極體。發光二極體之投影範圍涵蓋凹槽。According to an aspect of the invention, a semiconductor light source module is provided. The semiconductor light source module comprises a substrate, a semiconductor diode and a light emitting diode (LED). The substrate has a recess. The Jenus diode is placed in the groove. The light emitting diode is disposed on the substrate and electrically connected to the Zener diode. The projection range of the light-emitting diode covers the groove.

根據本發明之另一方面,提出一種半導體光源模組之製造方法。半導體光源模組之製造方法包括以下步驟。提供一基板。基板具有一凹槽。設置一稽納二極體於凹槽內。設置一發光二極體於基板上。發光二極體電性連接稽納二極體。發光二極體之投影範圍涵蓋凹槽。According to another aspect of the present invention, a method of fabricating a semiconductor light source module is provided. The manufacturing method of the semiconductor light source module includes the following steps. A substrate is provided. The substrate has a recess. Set a register of diodes in the recess. A light emitting diode is disposed on the substrate. The light-emitting diode is electrically connected to the arrester diode. The projection range of the light-emitting diode covers the groove.

為讓本發明之上述內容能更明顯易懂,下文特舉實施例,並配合所附圖式,作詳細說明如下:In order to make the above-mentioned contents of the present invention more comprehensible, the following specific embodiments, together with the drawings, are described in detail below:

以下係提出實施例進行詳細說明,實施例僅用以作為範例說明,並不會限縮本發明欲保護之範圍。此外,實施例中之圖式係省略不必要之元件,以清楚顯示本發明之技術特點。The following is a detailed description of the embodiments, which are intended to be illustrative only and not to limit the scope of the invention. In addition, the drawings in the embodiments omit unnecessary elements to clearly show the technical features of the present invention.

請參照第1圖,其繪示半導體光源模組100之示意圖。半導體光源模組100包括一基板110、一稽納二極體(zener diode)120及一發光二極體(light emitting diode,LED)130。基板110用以承載元件並鋪設線路,例如是一矽基板或一層壓基板。稽納二極體120具有電路穩壓功能,可以調整工作電壓及作為靜電放電(electrostatic discharge,ESD)保護線路。發光二極體130用以發出光線,其材質例如是鋁砷化鎵(AlGaAs)、鋁磷化鎵(AlGaP)、磷化銦鎵鋁(AlGaInP)、磷砷化鎵(GaAsP)、磷化鎵(GaP)、氮化鎵(GaN)、銦氮化鎵(InGaN)或鋁氮化鎵(AlGaN)。Please refer to FIG. 1 , which illustrates a schematic diagram of a semiconductor light source module 100 . The semiconductor light source module 100 includes a substrate 110, a Zener diode 120, and a light emitting diode (LED) 130. The substrate 110 is used to carry components and lay a line, such as a germanium substrate or a laminated substrate. The Jenus diode 120 has a circuit voltage regulation function that can adjust the operating voltage and serve as an electrostatic discharge (ESD) protection circuit. The light emitting diode 130 is used to emit light, and the material thereof is, for example, aluminum gallium arsenide (AlGaAs), aluminum gallium phosphide (AlGaP), indium gallium phosphide (AlGaInP), gallium arsenide (GaAsP), gallium phosphide. (GaP), gallium nitride (GaN), indium gallium nitride (InGaN) or aluminum gallium nitride (AlGaN).

如第1圖所示,基板110具有一凹槽111。稽納二極體120設置於凹槽111內。發光二極體130設置於基板110上,並電性連接稽納二極體120,發光二極體130之投影範圍涵蓋凹槽111。稽納二極體120只需採用置晶、封膠、迴銲等封裝設備的即可設置於基板110內,而無須採用複雜且昂貴的半導體設備。採用封裝設備的製程不僅具有成本低的優點,更具有良率高及速度快的優點。As shown in FIG. 1, the substrate 110 has a recess 111. The gate electrode 120 is disposed in the recess 111. The light emitting diode 130 is disposed on the substrate 110 and electrically connected to the gate diode 120. The projection range of the light emitting diode 130 covers the groove 111. The semiconductor diode 120 can be disposed in the substrate 110 by using a packaging device such as a crystal, a seal, or a reflow, without using complicated and expensive semiconductor devices. The process using the packaged device not only has the advantages of low cost, but also has the advantages of high yield and high speed.

就凹槽111之設計而言,凹槽111可以是一平底錐狀結構、一尖底錐狀結構或一柱狀結構。在本實施例中,凹槽111係為平底錐狀結構。也就說,凹槽111具有一底面111a及一側壁111b,底面111a實質上為平坦狀,側壁111b實質上傾斜於底面111a,且凹槽111之寬度W111由底面111a逐漸向開口111c增加。In terms of the design of the groove 111, the groove 111 may be a flat bottom tapered structure, a pointed bottom tapered structure or a columnar structure. In the present embodiment, the groove 111 is a flat bottom tapered structure. That is, the groove 111 has a bottom surface 111a and a side wall 111b. The bottom surface 111a is substantially flat, the side wall 111b is substantially inclined to the bottom surface 111a, and the width W111 of the groove 111 is gradually increased from the bottom surface 111a toward the opening 111c.

此外,凹槽111之深度D111大於稽納二極體120之厚度D120,使得稽納二極體120可以完全容置於凹槽111內。如此一來,稽納二極體120可以內埋於基板110內,而不會增加半導體光源模組100之體積。In addition, the depth D111 of the groove 111 is greater than the thickness D120 of the arrester diode 120, so that the gate diode 120 can be completely accommodated in the groove 111. In this way, the semiconductor diode 120 can be buried in the substrate 110 without increasing the volume of the semiconductor light source module 100.

此外,半導體光源模組100更包括一第一填充材料140、一第二填充材料150、一透明封膠160、一第一導線170及一第二導線180。第一填充材料140、第二填充材料150及透明封膠160之材質可以是環氧樹脂、聚氨酯、有機矽、丙烯酸樹脂或聚酯。第一填充材料140、第二填充材料150及透明封膠160之材質可以相同、其中兩種相同、或者三者皆不相同。設計者可依據製程上的需求來作選擇。In addition, the semiconductor light source module 100 further includes a first filling material 140 , a second filling material 150 , a transparent encapsulant 160 , a first wire 170 , and a second wire 180 . The material of the first filling material 140, the second filling material 150 and the transparent encapsulant 160 may be epoxy resin, polyurethane, organic germanium, acrylic resin or polyester. The materials of the first filling material 140, the second filling material 150 and the transparent encapsulant 160 may be the same, two of them are the same, or all three are different. Designers can make choices based on the needs of the process.

第一填充材料140填充於凹槽111內,並覆蓋稽納二極體120,以保護稽納二極體120不會受潮或者受到微粒子的污染。在本實施例中,第一填充材料140完整填滿凹槽111。The first filling material 140 is filled in the recess 111 and covers the gate diode 120 to protect the gate diode 120 from moisture or contamination by the particles. In the present embodiment, the first filling material 140 completely fills the groove 111.

第二填充材料150設置於第一填充材料140上,而填滿第一填充材料140及發光二極體130之間的空隙,以使發光二極體130能夠得到良好的支撐。The second filling material 150 is disposed on the first filling material 140 to fill the gap between the first filling material 140 and the light emitting diode 130 to enable the light emitting diode 130 to be well supported.

透明封膠160則覆蓋發光二極體130,以保護發光二極體130不會受潮或者受到微粒子的污染。透明封膠160係為透明狀,以使發光二極體130之光線能夠穿透透明封膠160。透明封膠160之表面呈現圓弧狀,以使光線折射後能夠以較大的角度範圍射出。The transparent encapsulant 160 covers the light emitting diode 130 to protect the light emitting diode 130 from moisture or contamination by the particles. The transparent encapsulant 160 is transparent so that the light of the LED 230 can penetrate the transparent encapsulant 160. The surface of the transparent sealant 160 has an arc shape so that the light can be refracted and can be emitted in a large angular range.

就發光二極體130之設置方式而言,發光二極體130可以採用覆晶接合(flip chip)之方式或者採用打線接合(wire bond)之方式與基板110連接。在本實施例中,發光二極體130係以覆晶接合之方式與基板110連接。In terms of the arrangement of the light-emitting diodes 130, the light-emitting diodes 130 may be connected to the substrate 110 by means of a flip chip or by wire bonding. In the present embodiment, the light emitting diode 130 is connected to the substrate 110 in a flip chip bonding manner.

基板110具有相對之一第一表面110a及一第二表面110b。凹槽111之開口111c位於第一表面110a。稽納二極體120具有相對之一第三表面120a及一第四表面120b。第三表面120a鄰近於凹槽111之開口111c。第四表面120b鄰近於凹槽111之底面111a。The substrate 110 has a first surface 110a and a second surface 110b. The opening 111c of the groove 111 is located on the first surface 110a. The semiconductor diode 120 has a third surface 120a and a fourth surface 120b. The third surface 120a is adjacent to the opening 111c of the groove 111. The fourth surface 120b is adjacent to the bottom surface 111a of the groove 111.

就第一導線170及第二導線180而言,第一導線170及第二導線180用以電性連接稽納二極體120及發光二極體130。第一導線170及第二導線180可以從稽納二極體120相同的表面開始延伸,或者從稽納二極體120不同的表面開始延伸。第一導線170及第二導線180的路徑也有不侷限於一種方式。在本實施例中,第一導線170及第二導線180皆自第四表面120b連接至發光二極體130。For the first wire 170 and the second wire 180, the first wire 170 and the second wire 180 are electrically connected to the Zener diode 120 and the light emitting diode 130. The first wire 170 and the second wire 180 may extend from the same surface of the gate diode 120 or may extend from different surfaces of the gate electrode 120. The paths of the first wire 170 and the second wire 180 are also not limited to one mode. In this embodiment, the first wire 170 and the second wire 180 are all connected to the light emitting diode 130 from the fourth surface 120b.

如第1圖所示,第一導線170自稽納二極體120之第四表面120b開始延伸,貫穿凹槽111之底面111a及第二表面110b後,沿第二表面110b鋪設,並貫穿第二表面110b及第一表面110a後,電性連接發光二極體130。同樣地,第二導線180自稽納二極體120之第四表面120b開始延伸,貫穿凹槽111之底面111a及第二表面110b後,沿第二表面110b鋪設,並貫穿第二表面110b及第一表面110a後,電性連接發光二極體130。As shown in FIG. 1 , the first wire 170 extends from the fourth surface 120 b of the gate electrode 120 , penetrates the bottom surface 111 a and the second surface 110 b of the groove 111 , and is laid along the second surface 110 b . After the two surfaces 110b and the first surface 110a, the light emitting diodes 130 are electrically connected. Similarly, the second wire 180 extends from the fourth surface 120b of the gate electrode 120, penetrates the bottom surface 111a and the second surface 110b of the groove 111, and is laid along the second surface 110b and penetrates the second surface 110b. After the first surface 110a, the light emitting diode 130 is electrically connected.

位於第一表面110a之部份第一導線170及部份第二導線180具有一定的厚度D170、D180,因此發光二極體130並未平貼於第一表面110a。第二封裝材料150之厚度D150實質上等於第一導線170及第二導線180位於第一表面110a之厚度D170、D180時,第二封裝材料150實質上填滿發光二極體130與第一表面110a之間空隙,而給予發光二極體130足夠的支撐力量。A portion of the first conductive line 170 and a portion of the second conductive line 180 on the first surface 110a have a certain thickness D170, D180, and thus the light emitting diode 130 is not flat on the first surface 110a. When the thickness D150 of the second encapsulation material 150 is substantially equal to the thickness D170, D180 of the first surface 170 and the second wire 180, the second encapsulation material 150 substantially fills the LED and the first surface. A gap between 110a provides sufficient support for the light-emitting diode 130.

就半導體光源模組100之製造方法而言,請參照第2~10圖,其繪示本實施例半導體光源模組100之製造方法的示意圖。首先,如第2圖所示,提供基板110。基板110之材質例如是矽。基板110進行高溫爐管製程,而使基板110被氧化矽層112所包覆。For the manufacturing method of the semiconductor light source module 100, please refer to FIGS. 2-10, which illustrate a schematic diagram of a method of fabricating the semiconductor light source module 100 of the present embodiment. First, as shown in Fig. 2, a substrate 110 is provided. The material of the substrate 110 is, for example, tantalum. The substrate 110 is subjected to a high temperature furnace control process, and the substrate 110 is covered by the ruthenium oxide layer 112.

接著,如第3圖所示,形成一光阻層113。光阻層113經過曝光、顯影製程後,以圖案化之光阻層113為遮罩蝕刻氧化矽層112。Next, as shown in FIG. 3, a photoresist layer 113 is formed. After the photoresist layer 113 is exposed and developed, the patterned photoresist layer 113 is used as a mask to etch the ruthenium oxide layer 112.

然後,如第3~4圖所示,去除光阻層113,並以圖案化之氧化矽層112為遮罩蝕刻基板110之第一表面110a。在此步驟中,基板110被蝕刻出凹槽111、第一凹孔114及第二凹孔115。凹槽111、第一凹孔114及第二凹孔115之深度D111、D114、D115實質上相同。此時,第一凹孔114及第二凹孔115並未貫穿。Then, as shown in FIGS. 3 to 4, the photoresist layer 113 is removed, and the first surface 110a of the substrate 110 is etched using the patterned ruthenium oxide layer 112 as a mask. In this step, the substrate 110 is etched out of the groove 111, the first recessed hole 114, and the second recessed hole 115. The depths D111, D114, and D115 of the groove 111, the first recessed hole 114, and the second recessed hole 115 are substantially the same. At this time, the first recessed hole 114 and the second recessed hole 115 are not penetrated.

接著,如第4~5圖所示,由基板110之第二表面110b對應於第一凹孔114及第二凹孔115之處蝕刻出第一貫穿孔116及一第二貫穿孔117,並由基板110之第二表面110b對應於凹槽111之處蝕刻出第三貫穿孔118及第四貫穿孔119。Then, as shown in FIGS. 4 to 5, the first through hole 116 and the second through hole 117 are etched from the second surface 110b of the substrate 110 corresponding to the first recessed hole 114 and the second recessed hole 115, and The third through hole 118 and the fourth through hole 119 are etched from the second surface 110b of the substrate 110 corresponding to the groove 111.

然後,如第6圖所示,基板110再次進行高溫爐管製程,而使第一貫穿孔116、第二貫穿孔117、第三貫穿孔118及第四貫穿孔119之孔壁被氧化矽層112所包覆。Then, as shown in FIG. 6, the substrate 110 is again subjected to the high temperature furnace control process, and the first through hole 116, the second through hole 117, the third through hole 118, and the fourth through hole 119 are made of a ruthenium oxide layer. Covered by 112.

接著,如第7圖所示,於第三貫穿孔118、部份之第二表面110b及第一貫穿孔116進行電鍍製程,以形成第一導線170;並於第四貫穿孔119、部份之第二表面110b及第二貫穿孔117進行電鍍製程,以形成第二導線180。Then, as shown in FIG. 7, the third through hole 118, the second surface 110b and the first through hole 116 are subjected to an electroplating process to form the first wire 170; and the fourth through hole 119 and the portion The second surface 110b and the second through hole 117 are subjected to an electroplating process to form the second wire 180.

然後,如第8圖所示,設置稽納二極體120於凹槽111內,並填充第一填充材料140於凹槽111內,以覆蓋稽納二極體120。Then, as shown in FIG. 8, the semiconductor diode 120 is disposed in the recess 111 and filled with the first filling material 140 in the recess 111 to cover the gate diode 120.

接著,如第9圖所示,填充第二填充材料150於第一填充材料140上,並設置發光二極體130於基板110上,以使第二填充材料150設置於第一填充材料140及發光二極體130之間。Next, as shown in FIG. 9 , the second filling material 150 is filled on the first filling material 140 , and the light emitting diode 130 is disposed on the substrate 110 , so that the second filling material 150 is disposed on the first filling material 140 and Between the light emitting diodes 130.

然後,如第10圖所示,設置透明封膠160於發光二極體130上。至此,即順利將稽納二極體120內埋於基板110內,並且稽納二極體120與發光二極體130也電性連接且封裝完畢。透過本實施例之製造方法,稽納二極體120可以在封裝製程的設備來完成內埋的步驟,不需要昂貴的半導體設備即可完成。Then, as shown in Fig. 10, a transparent encapsulant 160 is disposed on the light emitting diode 130. At this point, the semiconductor diode 120 is buried in the substrate 110, and the semiconductor diode 120 and the light-emitting diode 130 are also electrically connected and packaged. Through the manufacturing method of the embodiment, the semiconductor diode 120 can be buried in the packaging process equipment, and can be completed without expensive semiconductor equipment.

此外,請參照第11圖,其繪示另一半導體光源模組200之示意圖。在一實施例中,半導體光源模組200之第二導線280可以自稽納二極體220之第三表面220a開始延伸,並實質上垂直延伸至第一填充材料240之表面後舖設於基板210之部份第一表面210a,以電性連接發光二極體230。In addition, please refer to FIG. 11 , which illustrates a schematic diagram of another semiconductor light source module 200 . In one embodiment, the second wire 280 of the semiconductor light source module 200 can extend from the third surface 220a of the semiconductor diode 220 and extend substantially perpendicularly to the surface of the first filling material 240 and then be laid on the substrate 210. A portion of the first surface 210a is electrically connected to the light emitting diode 230.

再者,請參照第12圖,其繪示另一半導體光源模組300之示意圖。在一實施例中,半導體光源模組300之第一導線370及第二導線380可以自稽納二極體320之第四表面320b開始延伸,並鋪設於凹槽311之側壁311b及部份之第一表面310a,以電性連接發光二極體330。Furthermore, please refer to FIG. 12 , which illustrates a schematic diagram of another semiconductor light source module 300 . In one embodiment, the first wire 370 and the second wire 380 of the semiconductor light source module 300 may extend from the fourth surface 320b of the semiconductor diode 320 and be laid on the sidewall 311b of the groove 311 and a portion thereof. The first surface 310a is electrically connected to the light emitting diode 330.

此外,請參照第13圖,其繪示另一半導體光源模組400之示意圖。在一實施例中,半導體光源模組400之第一導線470可以自稽納二極體420之第四表面420b開始延伸,並鋪設於凹槽411之側壁411b及基板410之部份第一表面410a,以電性連接發光二極體430。半導體光源模組400之第二導線480可以自稽納二極體420之第三表面420a開始延伸,並實質上垂直延伸至第一填充材料440之表面後,舖設於部份第一表面410a,以電性連接發光二極體130。In addition, please refer to FIG. 13 , which illustrates a schematic diagram of another semiconductor light source module 400 . In one embodiment, the first wire 470 of the semiconductor light source module 400 can extend from the fourth surface 420b of the semiconductor diode 420 and be laid on the sidewall 411b of the recess 411 and a portion of the first surface of the substrate 410. 410a is electrically connected to the light emitting diode 430. The second wire 480 of the semiconductor light source module 400 may extend from the third surface 420a of the semiconductor diode 420 and extend substantially perpendicularly to the surface of the first filling material 440 to be disposed on a portion of the first surface 410a. The light emitting diode 130 is electrically connected.

再者,請參照第14圖,其繪示另一半導體光源模組500之示意圖。在一實施例中,半導體光源模組500之基板510可以顛倒設置。第一導線570及第二導線580可以自稽納二極體520之第四表面520b開始延伸,貫穿凹槽511之底面510a及基板510之第二表面510b後,沿第二表面510b鋪設,以電性連接發光二極體530。Furthermore, please refer to FIG. 14 , which illustrates a schematic diagram of another semiconductor light source module 500 . In an embodiment, the substrate 510 of the semiconductor light source module 500 can be placed upside down. The first wire 570 and the second wire 580 may extend from the fourth surface 520b of the sigma diode 520, penetrate the bottom surface 510a of the groove 511 and the second surface 510b of the substrate 510, and then lay along the second surface 510b to The light emitting diode 530 is electrically connected.

再者,請參照第15圖,其繪示另一半導體光源模組600之示意圖。在一實施例中,半導體光源模組600之基板610可以顛倒設置。第一導線670自稽納二極體620之第四表面620b開始延伸,貫穿凹槽611之底面611a及基板610之第二表面610b後沿第二表面610b鋪設,以電性連接發光二極體630。第二導線680可以自稽納二極體620之第三表面620a開始延伸,並實質上垂直延伸至第一填充材料640之表面後,沿基板610之部份第一表面610a舖設後,貫穿第一表面610a及第二表面610b,以電性連接發光二極體630。Furthermore, please refer to FIG. 15 , which illustrates a schematic diagram of another semiconductor light source module 600 . In an embodiment, the substrate 610 of the semiconductor light source module 600 can be placed upside down. The first wire 670 extends from the fourth surface 620b of the sigma diode 620, and extends through the bottom surface 611a of the groove 611 and the second surface 610b of the substrate 610 along the second surface 610b to electrically connect the light-emitting diodes. 630. The second wire 680 may extend from the third surface 620a of the semiconductor diode 620 and extend substantially perpendicularly to the surface of the first filling material 640, after being laid along a portion of the first surface 610a of the substrate 610, A surface 610a and a second surface 610b are electrically connected to the light emitting diode 630.

再者,請參照第16圖,其繪示另一半導體光源模組700之示意圖。在一實施例中,半導體光源模組700之基板710可以顛倒設置。第一導線770及第二導線780可以自稽納二極體720之第四表面720b開始延伸,並鋪設於凹槽711之側壁711b及基板710之部份第一表面710a後,貫穿第一表面710a及第二表面710b,以電性連接發光二極體730。Furthermore, please refer to FIG. 16 , which illustrates a schematic diagram of another semiconductor light source module 700 . In an embodiment, the substrate 710 of the semiconductor light source module 700 can be placed upside down. The first wire 770 and the second wire 780 may extend from the fourth surface 720b of the gate 720 and are disposed on the sidewall 711b of the groove 711 and a portion of the first surface 710a of the substrate 710, and penetrate the first surface. The 710a and the second surface 710b are electrically connected to the light emitting diode 730.

此外,請參照第17圖,其繪示另一半導體光源模組800之示意圖。在一實施例中,半導體光源模組800之基板810可以顛倒設置。第一導線870可以自稽納二極體820之第四表面820b開始延伸,並鋪設於凹槽811之側壁811b及基板810之部份第一表面810a後,貫穿第一表面810a及第二表面810b,以電性連接發光二極體830。第二導線880可以自稽納二極體820之第三表面820a開始延伸,並實質上垂直延伸至第一填充材料840之表面後,舖設於基板810之部份第一表面810a後,貫穿第一表面810a及第二表面810b,以電性連接發光二極體830。In addition, please refer to FIG. 17 , which illustrates a schematic diagram of another semiconductor light source module 800 . In an embodiment, the substrate 810 of the semiconductor light source module 800 can be placed upside down. The first wire 870 can extend from the fourth surface 820b of the gate 820 and is disposed on the sidewall 811b of the recess 811 and a portion of the first surface 810a of the substrate 810, and penetrates the first surface 810a and the second surface. 810b is electrically connected to the light emitting diode 830. The second wire 880 can extend from the third surface 820a of the semiconductor diode 820 and extend substantially perpendicularly to the surface of the first filling material 840, and then lays over a portion of the first surface 810a of the substrate 810. A surface 810a and a second surface 810b are electrically connected to the LED 830.

此外,請參照第18圖,其繪示另一半導體光源模組900之示意圖。在一實施例中,半導體光源模組900之發光二極體930可以採用打線接合之方式與基板910連接。In addition, please refer to FIG. 18 , which illustrates a schematic diagram of another semiconductor light source module 900 . In one embodiment, the LED 930 of the semiconductor light source module 900 can be connected to the substrate 910 by wire bonding.

透過上述實施例之設計,稽納二極體120~920可以內埋於基板110~920之內,而不增加基板110~910的厚度。此外,在製造過程中,可以直接採用封裝設備即可完成內埋稽納二極體120~920之步驟,而不需要昂貴的半導體設備,大幅降低製造成本。Through the design of the above embodiment, the semiconductor diodes 120 to 920 can be buried in the substrates 110 to 920 without increasing the thickness of the substrates 110 to 910. In addition, in the manufacturing process, the steps of embedding the dipoles 120-920 can be completed directly by using the packaging equipment, without expensive semiconductor equipment, and the manufacturing cost is greatly reduced.

綜上所述,雖然本發明已以實施例揭露如上,然其並非用以限定本發明。本發明所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾。因此,本發明之保護範圍當視後附之申請專利範圍所界定者為準。In conclusion, the present invention has been disclosed in the above embodiments, but it is not intended to limit the present invention. A person skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

100、200、300、400、500、600、700、800、900...半導體光源模組100, 200, 300, 400, 500, 600, 700, 800, 900. . . Semiconductor light source module

110、210、310、410、510、610、710、810、910...基板110, 210, 310, 410, 510, 610, 710, 810, 910. . . Substrate

110a、210a、310a、410a、610a、710a、810a...第一表面110a, 210a, 310a, 410a, 610a, 710a, 810a. . . First surface

110b、510b、610b、710b、810b...第二表面110b, 510b, 610b, 710b, 810b. . . Second surface

111、311、411、511、611、711、811...凹槽111, 311, 411, 511, 611, 711, 811. . . Groove

111a、511a、611a...底面111a, 511a, 611a. . . Bottom

111b、311b、411b、711b、811b...側壁111b, 311b, 411b, 711b, 811b. . . Side wall

111c...開口111c. . . Opening

112...氧化矽層112. . . Cerium oxide layer

113...光阻層113. . . Photoresist layer

114...第一凹孔114. . . First recess

115...第二凹孔115. . . Second recess

116...第一貫穿孔116. . . First through hole

117...第二貫穿孔117. . . Second through hole

118...第三貫穿孔118. . . Third through hole

119...第四貫穿孔119. . . Fourth through hole

120、220、320、420、520、620、720、820、920...稽納二極體120, 220, 320, 420, 520, 620, 720, 820, 920. . . Jenus diode

120a、220a、420a、620a、820a...第三表面120a, 220a, 420a, 620a, 820a. . . Third surface

120b、320b、420b、520b、620b、720b、820b...第四表面120b, 320b, 420b, 520b, 620b, 720b, 820b. . . Fourth surface

130、230、330、430、530、630、730、830、930...發光二極體130, 230, 330, 430, 530, 630, 730, 830, 930. . . Light-emitting diode

140、240、440、640、840...第一填充材料140, 240, 440, 640, 840. . . First filling material

150...第二填充材料150. . . Second filling material

160...透明封膠160. . . Transparent sealant

170、370、470、570、670、770、870...第一導線170, 370, 470, 570, 670, 770, 870. . . First wire

180、280、380、480、580、680、780、880...第二導線180, 280, 380, 480, 580, 680, 780, 880. . . Second wire

D111、D114、D115、D120、D150、D170、D180...厚度D111, D114, D115, D120, D150, D170, D180. . . thickness

W111...寬度W111. . . width

第1圖繪示半導體光源模組之示意圖。FIG. 1 is a schematic view showing a semiconductor light source module.

第2~10圖繪示本實施例半導體光源模組之製造方法的示意圖。2 to 10 are schematic views showing a method of manufacturing the semiconductor light source module of the embodiment.

第11圖繪示另一半導體光源模組之示意圖。FIG. 11 is a schematic view showing another semiconductor light source module.

第12圖繪示另一半導體光源模組之示意圖。FIG. 12 is a schematic view showing another semiconductor light source module.

第13圖繪示另一半導體光源模組之示意圖。FIG. 13 is a schematic view showing another semiconductor light source module.

第14圖繪示另一半導體光源模組之示意圖。FIG. 14 is a schematic view showing another semiconductor light source module.

第15圖繪示另一半導體光源模組之示意圖。FIG. 15 is a schematic view showing another semiconductor light source module.

第16圖繪示另一半導體光源模組之示意圖。FIG. 16 is a schematic view showing another semiconductor light source module.

第17圖繪示另一半導體光源模組之示意圖。FIG. 17 is a schematic view showing another semiconductor light source module.

第18圖繪示另一半導體光源模組之示意圖。FIG. 18 is a schematic view showing another semiconductor light source module.

100...半導體光源模組100. . . Semiconductor light source module

110...基板110. . . Substrate

110a...第一表面110a. . . First surface

110b...第二表面110b. . . Second surface

111...凹槽111. . . Groove

111a...底面111a. . . Bottom

111b...側壁111b. . . Side wall

111c...開口111c. . . Opening

120...稽納二極體120. . . Jenus diode

120a...第三表面120a. . . Third surface

120b...第四表面120b. . . Fourth surface

130...發光二極體130. . . Light-emitting diode

140...第一填充材料140. . . First filling material

150...第二填充材料150. . . Second filling material

160...透明封膠160. . . Transparent sealant

170...第一導線170. . . First wire

180...第二導線180. . . Second wire

D111、D120、D150、D170、D180...厚度D111, D120, D150, D170, D180. . . thickness

W111...寬度W111. . . width

Claims (17)

一種半導體光源模組,包括:一基板,具有一凹槽;一稽納二極體(zener diode),設置於該凹槽內;以及一發光二極體(light emitting diode,LED),設置於該基板上,並電性連接該稽納二極體,該發光二極體之投影範圍涵蓋該凹槽。A semiconductor light source module includes: a substrate having a recess; a zener diode disposed in the recess; and a light emitting diode (LED) disposed on the substrate The substrate is electrically connected to the gate electrode, and a projection range of the light emitting diode covers the groove. 如申請專利範圍第1項所述之半導體光源模組,其中該凹槽之深度大於該稽納二極體之厚度。The semiconductor light source module of claim 1, wherein the depth of the groove is greater than the thickness of the arrester diode. 如申請專利範圍第1項所述之半導體光源模組,更包括:一第一填充材料,填充於該凹槽內,並覆蓋該稽納二極體。The semiconductor light source module of claim 1, further comprising: a first filling material filled in the recess and covering the arrester diode. 如申請專利範圍第3項所述之半導體光源模組,更包括:一第二填充材料,設置於該第一填充材料及該發光二極體之間。The semiconductor light source module of claim 3, further comprising: a second filling material disposed between the first filling material and the light emitting diode. 如申請專利範圍第4項所述之半導體光源模組,其中該第一填充材料之材質與該第二填充材料之材質相同。The semiconductor light source module of claim 4, wherein the material of the first filling material is the same as the material of the second filling material. 如申請專利範圍第4項所述之半導體光源模組,其中該第一填充材料之材質與該第二填充材料之材質不同。The semiconductor light source module of claim 4, wherein the material of the first filling material is different from the material of the second filling material. 如申請專利範圍第1項所述之半導體光源模組,其中該發光二極體係以覆晶接合(flip chip)之方式與該基板連接。The semiconductor light source module of claim 1, wherein the light emitting diode system is connected to the substrate by a flip chip. 如申請專利範圍第1項所述之半導體光源模組,其中該發光二極體係以打線接合(wire bond)之方式與該基板連接。The semiconductor light source module of claim 1, wherein the light emitting diode system is connected to the substrate by wire bonding. 如申請專利範圍第1項所述之半導體光源模組,其中該基板具有一第一表面及一第二表面,該凹槽之開口位於該第一表面,該發光二極體設置於該第一表面。The semiconductor light source module of claim 1, wherein the substrate has a first surface and a second surface, the opening of the recess is located on the first surface, and the light emitting diode is disposed on the first surface. 如申請專利範圍第1項所述之半導體光源模組,其中該基板具有一第一表面及一第二表面,該凹槽之開口位於該第一表面,該發光二極體設置於該第二表面。The semiconductor light source module of claim 1, wherein the substrate has a first surface and a second surface, the opening of the groove is located on the first surface, and the light emitting diode is disposed on the second surface. 如申請專利範圍第1項所述之半導體光源模組,其中該稽納二極體具有相對之一第三表面及一第四表面,該第三表面鄰近於該凹槽之開口,該第四表面鄰近於該凹槽之底面,該半導體光源模組更包括:一第一導線,自該第四表面連接至該發光二極體,以電性連接該稽納二極體及該發光二極體;以及一第二導線,自該第四表面或該第三表面連接至該發光二極體,以電性連接該稽納二極體及該發光二極體。The semiconductor light source module of claim 1, wherein the semiconductor diode has a third surface and a fourth surface, the third surface being adjacent to the opening of the recess, the fourth The surface of the semiconductor light source module further includes: a first wire connected to the light emitting diode from the fourth surface to electrically connect the gate electrode and the light emitting diode And a second wire connected to the light emitting diode from the fourth surface or the third surface to electrically connect the gate electrode and the light emitting diode. 如申請專利範圍第11項所述之半導體光源模組,其中部份之該第一導線貫穿該凹槽之底面及該第二表面,部份之該第一導線鋪設於該第二表面,且部份之該第一導線貫穿該第一表面及該第二表面。The semiconductor light source module of claim 11, wherein a portion of the first wire extends through the bottom surface of the groove and the second surface, and a portion of the first wire is laid on the second surface, and A portion of the first wire extends through the first surface and the second surface. 如申請專利範圍第11項所述之半導體光源模組,其中部份之該第一導線鋪設於該凹槽之側壁,且部份之該第一導線鋪設於該第一表面。The semiconductor light source module of claim 11, wherein a portion of the first wire is laid on a sidewall of the groove, and a portion of the first wire is laid on the first surface. 如申請專利範圍第1項所述之半導體光源模組,其中該凹槽係為一平底錐狀結構、一尖底錐狀結構或一柱狀結構。The semiconductor light source module of claim 1, wherein the groove is a flat bottom tapered structure, a pointed bottom tapered structure or a columnar structure. 一種半導體光源模組之製造方法,包括:提供一基板,該基板具有一凹槽;設置一稽納二極體(zener diode)於該凹槽內;以及設置一發光二極體(light emitting diode,LED)於該基板上,該發光二極體電性連接該稽納二極體,該發光二極體之投影範圍涵蓋該凹槽。A method of fabricating a semiconductor light source module, comprising: providing a substrate having a recess; providing a zener diode in the recess; and providing a light emitting diode The LED is electrically connected to the semiconductor diode, and the projection range of the LED covers the recess. 如申請專利範圍第15項所述之半導體光源模組之製造方法,更包括:填充一第一填充材料於該凹槽內,並覆蓋該稽納二極體。The method for manufacturing a semiconductor light source module according to claim 15, further comprising: filling a first filling material in the recess and covering the gate electrode. 如申請專利範圍第16項所述之半導體光源模組之製造方法,更包括:填充一第二填充材料於該第一填充材料上,以使該第二填充材料設置於該第一填充材料及該發光二極體之間。The method for manufacturing a semiconductor light source module according to claim 16, further comprising: filling a second filling material on the first filling material, so that the second filling material is disposed on the first filling material and Between the light-emitting diodes.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105789409A (en) * 2015-01-14 2016-07-20 亿光电子工业股份有限公司 Light-emitting diode packaging structure
CN105990499A (en) * 2015-03-18 2016-10-05 新世纪光电股份有限公司 Light emitting diode package structure and manufacturing method thereof
TWI623080B (en) * 2016-11-07 2018-05-01 Tong Hsing Electronic Industries Ltd Electronic package module

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105789409A (en) * 2015-01-14 2016-07-20 亿光电子工业股份有限公司 Light-emitting diode packaging structure
US9646957B2 (en) 2015-01-14 2017-05-09 Everlight Electronics Co., Ltd. LED packaging structure having stacked arrangement of protection element and LED chip
CN105990499A (en) * 2015-03-18 2016-10-05 新世纪光电股份有限公司 Light emitting diode package structure and manufacturing method thereof
TWI623080B (en) * 2016-11-07 2018-05-01 Tong Hsing Electronic Industries Ltd Electronic package module

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