TW201330373A - Electric power generating device using exhaust gas discharged from a process chamber - Google Patents

Abstract

A power generating device that uses exhaust gas discharged from a process chamber is provided. The mixer mixes the moisture into the exhaust gas discharged from the process chamber to adjust the oxygen partial pressure of the exhaust gas. The moisture supply supplies moisture to the mixer. The fuel cell includes a fuel electrode, an electrolyte, and an oxygen electrode, and converts chemical energy of the exhaust gas into electric energy based on a difference in oxygen partial pressure between the exhaust gas supplied from the mixer to the fuel electrode and the oxygen supplied to the oxygen electrode.

Description

Electric power generating device using exhaust gas discharged from a process chamber

BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a power generating apparatus using exhaust gas discharged from a process chamber, and more particularly to using exhaust gas discharged from a process chamber for manufacturing semiconductor components, solar cells, flat panels, and the like as a fuel. Fuel cell.

Various chemical compounds are used to fabricate semiconductor components, solar cells, flat panels, and the like. In particular, flammable or pyrophoric gases such as hydrogen, decane gas, methane gas, and the like are discharged as exhaust gases from various devices used to manufacture such products, such as chemical vapor deposition; CVD) equipment, annealing equipment, and the like. For example, after vapor deposition in a CVD apparatus, exhaust gas discharged from the deposition chamber is sent to a gas scrubber. The gas scrubber uses high temperature heat to burn the exhaust gas discharged from the deposition chamber and discharge the gas in a safe state. Korean Patent Publication No. 10-2010-0138906 discloses an architecture of a control reduction unit that performs a function of reducing combustible exhaust gas discharged from a solar cell manufacturing system. However, such an exhaust gas treatment device performs only the function of simply removing the toxicity of the exhaust gas or burning off the combustible gas contained in the exhaust gas without completely utilizing the physical energy and chemical energy contained in the exhaust gas.

Meanwhile, a fuel cell is manufactured using a material having high ionic conductivity as an electrolyte and a material having high mixed conductivity as an electrode, and the fuel cell is a difference in oxygen partial pressure between gases supplied to the two electrodes An element that converts chemical energy into electrical energy. Figure 1 illustrates the principle of power generation of a fuel cell. Since this fuel cell converts the energy of the fuel into electrical energy via a chemical reaction, the fuel cell has much higher efficiency than the existing power generation system and emits almost no pollutants, thereby attracting attention as a next-generation power generation system. . For this reason, various types of fuel cells have been proposed, and some of them have been commercially used. However, only the electrolyte material, the electrode material, the physical structure, and the like of the fuel cell have been studied, and a method of generating electric power using exhaust gas occurring in the manufacture of a semiconductor element, a solar cell, a flat panel, and the like has not been proposed.

An advantage of some aspects of the present invention is to provide a power generating device capable of generating electricity using exhaust gas discharged from a process chamber when manufacturing a semiconductor element, a solar cell, a flat panel, and the like.

According to an aspect of the present invention, there is provided a power generating apparatus comprising: a mixer that mixes exhaust gas discharged from a process chamber with moisture to adjust an oxygen partial pressure of the exhaust gas; and a moisture supplier that supplies moisture to the mixer; And a fuel cell including a fuel electrode, an electrolyte, and an oxygen electrode, and converting chemical energy of the exhaust gas into electric energy based on a difference in oxygen partial pressure between the exhaust gas supplied from the mixer to the fuel electrode and the oxygen supplied to the oxygen electrode.

According to an aspect of the present invention, discarded electricity can be utilized as a new energy source by generating electricity using flammable and toxic exhaust gas discharged from a process chamber in the manufacture of semiconductor elements, solar cells, flat panels, and the like. By using the exhaust gas discharged during the manufacture of the solar cell to generate electricity, the total energy consumed in manufacturing the solar cell can be reduced, and thus Reduce recycling time. In addition, the capacity of the scrubber that treats the exhaust gas can be reduced, and thus the cost of equipment for manufacturing semiconductor components, solar cells, flat panels, and the like can be greatly reduced.

Hereinafter, a power generating device according to an exemplary embodiment of the present invention will be described in detail with reference to the accompanying drawings.

2 is a diagram illustrating a configuration of a power generating device according to an exemplary embodiment of the present invention.

Referring to FIG. 2, a power generating device 200 according to an exemplary embodiment of the present invention includes a mixer 210, a moisture supplier 200, a fuel cell 230, a cleaner 297, and a control unit 240.

The mixer 210 includes a first inlet 212 through which the exhaust gas is discharged from the process chamber 290, a second inlet 220 through which moisture (preferably water vapor or light mist is input from the moisture supply 220), and an outlet 216 (via the exhaust gas output). And the mixer 210 has a space in which the input exhaust gas and the input moisture are mixed. Since the exhaust gas discharged from the process chamber 290 does not contain moisture, it is necessary to adapt the oxygen partial pressure of the exhaust gas to the fuel of the fuel cell 230. In general, the partial pressure of oxygen for the fuel gas used in the fuel cell is ~10 ^-21 atm at 800 ° C, and from the viewpoint of the efficiency of the fuel cell, preferably, hydrogen and moisture (H ₂ O) The molar ratio is adjusted to a range of 95:5 to 99:1, more preferably 97:3. If the process chamber 290 is a deposition chamber, CH ₄ , H ₂ , SiH ₄ , B ₂ H ₆ and the like are used as process gases. Therefore, the exhaust gas discharged from the outlet of the deposition chamber contains such gases. In this case, since the oxygen partial pressure is very low, the exhaust gas input to the mixer 210 is mixed with moisture (preferably water vapor or light mist) to make the oxygen partial pressure suitable for the fuel of the fuel cell 230.

The capacity of the mixer 210 can be adjusted depending on the amount of exhaust gas discharged from the process chamber 290 and the amount of exhaust gas used in the fuel cell 230. A stirrer (not shown) such as a screw may be installed in the mixer 210 to uniformly mix the exhaust gas and the moisture. The space in which the exhaust gas and the moisture are mixed is preferably formed in a spherical shape. A supply adjustment unit 262 that uniformly supplies exhaust gas from the mixer 210 to the fuel cell 230 may be disposed in the second conduit 260 that connects the outlet 216 (from which exhaust gas is exhausted) and fuel that supplies fuel to the fuel cell 230 Supply 埠. The supply adjustment unit 262 is controlled by the control unit 240, and an example thereof may be a control valve driven by a motor.

At the same time, because the exhaust gas is not continuously discharged from the process chamber 290, the first valve 252 is preferably disposed in the first conduit 250 that connects the first inlet 212 to the discharge port of the process chamber 290. The opening and closing of the first valve 252 is preferably interlocked with a valve 292 disposed in the discharge port of the process chamber 290. The opening and closing operations of the first valve 252 are controlled by the control unit 240. The mixer 210 may include a heater (not shown) that raises the temperature of the exhaust gas to an operating temperature of the fuel cell 230 or a temperature close to the operating temperature. The heater may be disposed in the first conduit 250 connecting the discharge port of the process chamber 290 and the first inlet 212 and/or the outlet 216 connecting the mixer 210 and the second conduit 260 supplying fuel to the fuel supply port of the fuel cell 230. in.

The moisture supply 220 vaporizes the water and supplies the water vapor to the mixer 210. The amount of water vapor supplied from the moisture supply 220 is the same as described above, and can be viewed from a process chamber connected to the power generating device according to the present invention. The oxygen partial pressure of the exhaust gas of 290 is adjusted and adaptively adjusted. The oxygen partial pressure of the exhaust gas discharged from the process chamber 290 can be measured in advance. In this case, the amount of water vapor supplied from the moisture supplier 220 to the mixer 210 is set depending on the experimentally measured oxygen partial pressure.

The amount of water vapor supplied from the moisture supplier 220 to the mixer 210 may be adjusted based on the measurement result of the oxygen partial pressure of the exhaust gas supplied to the fuel cell 230 via the outlet 216 of the mixer 210. To this end, the power generating device 200 according to the present invention may further include a monitoring unit 280 that measures the oxygen partial pressure of the exhaust gas supplied to the fuel cell 230. For example, the monitoring unit 280 can measure the oxygen partial pressure of the exhaust gas supplied to the fuel cell 230 based on the voltage between the oxygen electrode and the fuel electrode of the fuel cell 230. In this way, by using the monitoring unit 280, in addition to the oxygen partial pressure of the exhaust gas supplied to the fuel cell 230, the erroneous operation of the fuel cell 230 can be grasped. Alternatively, the oxygen sensor can be placed in the second conduit 260 connecting the outlet 216 of the mixer 210 and the fuel supply to the fuel cell 230 to measure the partial pressure of oxygen of the exhaust gas. The oxygen partial pressure of the exhaust gas measured by the monitoring unit 280 is transmitted to the control unit 240. The control unit 240 controls the amount of water vapor supplied from the moisture supplier 220 to the mixer 210 based on the measured exhaust gas oxygen partial pressure. The moisture supplier 220 can actively adjust the amount of water vapor supplied to the mixer 210 based on the measurement results of the monitoring unit 280.

Meanwhile, since the exhaust gas is not continuously discharged from the process chamber 290, it is necessary to synchronize the operation of supplying the water vapor from the moisture supplier 220 with the discharge time of the exhaust gas. For this purpose, preferably the third valve 272 is disposed in the third conduit 270 that connects the moisture supply 220 to the second inlet 214 of the mixer 210. in. The opening and closing of the third valve 272 is preferably interlocked with the opening and closing operations of the first valve 252. The opening and closing operations of the third valve 272 are also controlled by the control unit 240.

The fuel cell 230 uses the exhaust gas supplied from the mixer 210 as a fuel gas to convert the chemical energy of the exhaust gas into electric energy. The classification of fuel cells is usually dependent on the material of the electrolyte. Examples thereof include a metal hydride fuel cell (MHFC), a molten carbonate fuel cell (MCFC), a direct methanol fuel cell (DMFC), and an alkaline fuel cell (alkaline). Fuel cell; AFC), a phosphorus fuel cell (PFC), a solid oxide fuel cell (SOFC), and a polymer exchange membrane fuel cell (PEMFC). Among these fuel cells, AFC, PAFC, MCFC, SOFC, and PEMFC have commercial applicability.

In AFC, OH- moves in an alkaline solution (eg, KOH) to convert chemical energy into electrical energy. However, AFC is weak to carbon. When a process gas containing carbon (for example, CO or CO ₂ ) is used, K ₂ CO _{3 is} formed in the electrode, degrading the performance, making it difficult to apply. In PAFC, H ⁺ moves in a phosphoric acid solution to convert chemical energy into electrical energy. Since the PAFC utilizes the difference in hydrogen partial pressure, it is difficult to select an appropriate fuel. The PEMFC converts chemical energy into electrical energy by the movement of ions in the solid electrolyte (due to the difference in hydrogen partial pressure between the electrodes). PEMFC has problems similar to PAFC, and the platinum catalyst is contaminated with tens of ppm of CO gas. Therefore, it is difficult to use a PEMFC when using a process gas containing carbon.

The SOFC converts chemical energy into electrical energy by the movement of ions in the ceramic electrolyte (due to the difference in oxygen partial pressure between the electrodes). Figure 4 illustrates the principle of power generation in an SOFC. SOFC operates in the temperature range of 500 ° C to 1100 ° C and can operate with high efficiency and output at relatively low cost. The water produced in the SOFC is suitably controlled to help reform the fuel, thereby enhancing the output of the fuel cell. The operating temperature can be lowered to 500 ° C depending on the thickness and type of the electrolyte, and causes an exothermic reaction in the fuel cell. Therefore, once the reaction begins, the operating temperature can be maintained by itself. When the fuel gas leaks, the fuel gas reacts with oxygen and burns due to its high operating temperature, which is relatively safe. However, since the electrolyte is made of ceramic, the fuel cell is less resistant to mechanical shock, but a metal support can be used to solve this problem.

The MCFC converts chemical energy into electrical energy by the movement of ions in the molten carbonate (due to the difference in oxygen partial pressure between the electrodes). Figure 5 illustrates the principle of power generation of the MCFC. The MCFC typically operates at a temperature equal to or higher than 600 ° C, but preferably operates the MCFC in a temperature range of 600 ° C to 650 ° C. Since many kinds of gases can be used as fuels and are not weak to carbon-containing gases, the MCFC can suitably use exhaust gas as a fuel gas.

As described above, examples of fuel cells suitable for exhaust gas discharged from a process chamber include SOFCs and MCFCs. The SOFC and the MCFC have the advantage that the exhaust gas discharged from the process chamber can be used as a fuel gas without changing the structure of the fuel cell without requiring specific reforming. When the exhaust gas containing toxic gas and combustible gas is used as the fuel gas, the fuel cells are operated at an operating temperature of about 600 ° C, and the operating temperature of about 600 ° C is sufficient to ignite the exhaust gas. The high temperature of burning. In addition, such fuel cells have the advantage of being resistant to elements that are difficult to use as fuel in the exhaust gas, as well as their ability to stabilize the intermittent supply of exhaust gases. Because of its oxygen ion conductivity, a high output can be achieved via the reaction of the exhaust gas with oxygen and the exhaust gas can be purified.

AFC and PEMFC can be applied to carbon-free exhaust gas, and PAFC can be applied to exhaust gas suitable for fuel gas. However, various fuel cells including such fuel cells require high purity hydrogen and oxygen as fuel, and thus it is necessary to refine the exhaust gas. In a fuel cell operated at an operating temperature equal to or lower than 100 ° C, since water reacts on the surface of the electrode, a specific member for controlling moisture is required.

Hereinafter, an SOFC which is suitable as a fuel gas for exhaust gas discharged from the process chamber 290 when manufacturing a semiconductor element, a solar cell, and a flat panel will be described as an example of the fuel cell 230.

Examples of the electrolyte of the SOFC 230 include a zirconia-based material such as YSZ (yttria-stabilized zirconia) and yttria-stabilized zirconia, and a cerium oxide-based material (such as doped with Niobium dioxide and niobium-doped cerium oxide) and lanthanum strontium-based materials (such as LSGM: LaGaO ₃ doped with Sr and Mg). When YSZ is used as the electrolyte, a suitable operating temperature is in the range of 800 ° C to 1000 ° C, but when a ceria-based material is used as the electrolyte, the operating temperature can be lowered to about 600 ° C. When Si is implanted into a material based on cerium oxide, the film is formed at the boundary between molecules to seriously degrade the electrolyte performance. Therefore, the cerium oxide-based material does not allow the Si-containing exhaust gas discharged from the process chamber 290 to be used as the fuel gas. This problem can be solved by bypassing the Si-containing exhaust gas discharged from the process chamber 290 to the scrubber 295. In this case, the second valve 254 for bypassing is disposed in the first conduit 250 connecting the discharge port of the process chamber 290 and the first inlet 212 of the mixer 210, and the end of the bypass tube 256 is connected to the second valve 254, And the other end is connected to the scrubber 295.

However, since the chemical energy of a gas containing Si such as SiH ₄ and Si ₂ H ₆ is not utilized, a method of removing only Si from a gas and using the chemical energy of H can be considered. Referring to FIG. 3, the power generating device 200 according to the present invention may further include a gas refiner 205. The gas refiner 205 is disposed between the process chamber 290 and the mixer 210, and is used to remove helium from the exhaust gas supplied from the process chamber 290 after the process of using the crucible is performed, and then the exhaust gas is supplied to the mixer 210. That is, since the Si contained in the exhaust gas supplied from the process chamber 290 is removed by the gas refiner 205, it is not necessary to specifically provide the bypass pipe 256, and thus the structure of the power generating device 200 can be simplified. The components other than the refiner 205 are the same as described above.

Removal of Si via the use of refiner 205 can be considered using a Si-Si gas phase reaction, a Si-O gas phase reaction, and the like to form a powder. However, the Si-Si gas phase reaction requires high temperature and a high partial pressure of a gas containing Si. Since the Si-containing gas has undergone a process, the partial pressure of the Si-containing gas is low and the Si-Si gas phase reaction hardly occurs. Since O and H react with Si to consume fuel, the Si-O gas phase reaction is not suitable. The surface deposition of Si and the surface deposition of Si-O can be considered, but this requires high temperature and its reaction rate is low, which is not suitable.

Therefore, a method of reacting only unreacted gas (Si or C) by plasma to supply only hydrogen to the fuel cell can be considered. Under this circumstance, the bypass described above is unnecessary, the purity of hydrogen is increased, and the side effects of using exhaust gas are reduced. This method using plasma can be applied to the MCFC mentioned above and the fuel cell other than the SOFC. Regarding the plasma used for decomposition, RF, DC, LF, VHF, and RPS methods can be used. Ar gas can be supplied to aid in decomposition. Ar gas hardly affects the performance of the fuel cell. When Ar gas is supplied without leakage, the partial pressure of oxygen is ~10 ^-6 atm, and thus power generation is possible (which is weak).

It is conceivable that a gas containing Si (such as SiH ₄ and Si ₂ H ₆ ) is used as a fuel, or that a gas containing Si is bypassed by the fuel cell 230 (as shown in FIG. 2) but the Si component remains in the fuel. The condition in the battery. Since Si can be deposited on the fuel cell 230 to degrade the performance of the fuel cell 230, a process of removing the deposited Si is necessary. To this end, the power generating device 200 according to the present invention may further include a cleaner 297 that removes Si deposited on the fuel cell 230. For example, the cleaner 297 may supply a fluorine-containing (F) gas to the fuel cell 230 to remove Si deposited on the fuel cell 230. The gas containing F is decomposed by heat or plasma to smoothly etch Si. However, since the operating temperature of the fuel cell 230 is higher than the CVD temperature, a small amount of F can be decomposed to etch Si without using plasma to be decomposed. When Si deposition and Si etching occur simultaneously, the phenomenon that the gas flow path is clog due to Si deposition can be suppressed. When the performance of the fuel cell is degraded, a gas containing F may be supplied as a Si etching gas to etch Si, and then the fuel cell 230 may be reused. The cleaner 297 is an optional component of the power generating device 200 according to the present invention.

When a cerium oxide-based material is used as the electrolyte of the SOFC 230, it can generate electricity at a high output at a low temperature. However, the cerium oxide-based electrolyte is reduced at a high temperature equal to or higher than 1000 ° C or under a low oxygen partial pressure to generate an oxygen void, and thus the conductivity of the electrolyte may be improved. Therefore, it is necessary to appropriately adjust the oxygen partial pressure first when a ceria-based material is used as an electrolyte. When the exhaust gas is intermittently supplied, the fuel cell 230 is exposed to an oxygen potential cycle. These problems can be solved by using an electrolyte that can reduce the operating temperature of the SOFC 230 to about 600 °C, such as a cerium oxide-based material, and using a metal support for the SOFC 230. The metal support can be disposed in one or both of the fuel electrode and the oxygen electrode of the SOFC 230, and the metal support itself can function as a fuel electrode and an oxygen electrode. By using the metal support in this manner, the fuel cell is stable against changes such as changes in temperature, changes in oxygen partial pressure, and intermittent supply of fuel gas, and is resistant to mechanical stress, chemical stress, and thermal stress. FIG. 6 illustrates an example of the structure of the SOFC 230 using the support.

As described above, when the fuel cell generates electric power using the exhaust gas, problems such as Si deposition occur. In particular, in a ceria-based electrolyte, Si infiltrates the interface between molecules to degrade the performance of the electrolyte. Since the exhaust gas does not contain oxygen and thus has a low partial pressure of oxygen, its volume changes upon reduction of the electrolyte based on cerium oxide, and stress can be applied to the electrolyte to destroy the electrolyte. However, unlike cerium oxide-based materials, zirconia-based materials hardly reduce even at low partial pressures, and there is no problem with rapid changes in reduction. The material based on cerium oxide has a problem that Si is located at the interface between the particles to degrade the performance of the electrolyte. However, in zirconia-based materials, Si is located at the vertex between the interfaces and thus has less influence. Therefore, in order to solve the problem that may occur when the cerium oxide-based material uses exhaust gas to generate electric power, the electrolyte 710 may have a first layer 712 formed of a cerium oxide-based material and a zirconia-based material. The structure of the second layer 714 of material formation is stacked. In this case, an electrolyte 710 having a complicated structure in which the first layer 712 formed of a material based on cerium oxide is in contact with the oxygen electrode 700 of the fuel cell and formed of a material based on zirconia is used. The second layer 714 is in contact with the fuel electrode 720.

By using the electrolyte 710 having this complicated structure, both the problem of reduction of the material based on cerium oxide and the problem concerning the electrolyte can be solved. In addition, by using the electrolyte structure illustrated in FIG. 7, the Si-containing exhaust gas can be directly used as a fuel, and thus the gas refiner 205 and the cleaner 297 are unnecessary. In this case, the gas refiner 205 and the cleaner 297 can be used to remove Si remaining in the exhaust gas and Si deposited on the fuel cell 230. Referring to Fig. 8, it can be seen that as the thickness of the zirconia-based material increases, the electrical resistance of the electrolyte 710 having a complicated structure also increases. That is, from a fuel cell in which the thickness of the cerium oxide-based material is constant and the zirconia-based material between the cerium oxide-based material and the fuel electrode is made As a result of the test of the effectiveness of the thickness variation, it can be seen that when the zirconia-based material (YSZ) has a thickness of 330 nm, the electric resistance is small. It can be seen that in oxygen When the thickness of the zirconium-based material (YSZ) is relatively increased to 440 nm, the resistance is relatively increased, and when the thickness of the zirconia-based material (YSZ) is increased in μm, the electric resistance is further increased. Therefore, it is preferable to set the thickness of the material based on zirconia to be small.

The thickness ratio of the first layer 712 formed of the cerium oxide-based material to the second layer 714 formed of the zirconia-based material may be set to a range of 1:1 to 5:1. The thickness of the second layer 714 formed from the zirconia-based material should be less than the thickness of the first layer 712 formed from the cerium oxide-based material. Therefore, the upper limit of the thickness of the second layer 714 formed of the zirconia-based material is preferably equal to the thickness of the first layer 712 formed of the cerium oxide-based material. Considering the upper limit of the thickness of the entire layer of electrolyte 710 and its efficiency, the thickness of the second layer 714 formed of the zirconia-based material is hardly made smaller than the first layer 712 formed of the cerium oxide-based material. 1/5 of the thickness. On the other hand, in order to achieve chemical stability and high output based on the electrolyte layer formed of the cerium oxide-based material, the thickness of the second layer 714 formed of the zirconia-based material is preferably two One third of the thickness of the first layer 712 formed by the yttria-based material. Therefore, the reduction of the cerium oxide-based material can be prevented and the Si diffusion barrier function can be performed, thereby reducing the influence on the performance of the fuel cell. On the other hand, nickel-based electrodes (such as Ni-YSZ and Ni-GDC) mainly used in SOFCs are weakly resistant to various atmospheres in processes for manufacturing semiconductor components, solar cells, and LCD panels. . For example, carbon contained in methane gas (CH ₄ ) commonly used in a vapor deposition process is deposited on a nickel-based electrode via a catalyst reaction. In the case of SF ₆ , sulfur poisoning occurs in the nickel-based electrode, and the catalyst characteristics disappear. However, these problems can be solved by using a ceramic electrode such as LST (La _0.2 Sr _0.8 TiO _3-δ ).

The SOFC 230 can be formed in two shapes of a flat panel shape and a tube shape. However, when the exhaust gas is used as the fuel gas, the unreacted exhaust gas may remain, and the exhaust gas may contain a toxic gas. Therefore, the exhaust gas passing through the SOFC 230 should be supplied to the scrubber 295. Therefore, the tube shape is more suitable for the present invention.

9 is a diagram illustrating an example of a tubular SOFC 230, and FIG. 10 is a cross-sectional view and a longitudinal cross-sectional view of the tubular SOFC 230 illustrated in FIG. Referring to FIGS. 9 and 10, the tubular SOFC 230 includes a fuel electrode 610, an electrolyte 620, an oxygen electrode 630, a housing 640, and a heating unit 650. The fuel electrode 610 is formed in the shape of a tube having a through hole 615 through which the exhaust gas passes through the through hole 615, and the electrolyte 620 and the oxygen electrode 630 are also formed in a tube shape. Therefore, the end of the through hole 615 formed in the fuel electrode 610 serves as a fuel supply port, and the second pipe 260 connected to the outlet 216 of the mixer 210 is hermetically coupled to the end of the through hole 615. A fourth conduit 617 that supplies exhaust gas to the scrubber 295 is hermetically coupled to the other end of the through hole 615 formed in the fuel electrode 610.

The inner circumferential surface of the electrolyte 620 and the outer circumferential surface are in contact with the outer circumferential surfaces of the fuel electrode 610 and the oxygen electrode 630, respectively. The outer casing 640 forms an air flow passage that is spaced apart from the outer circumferential surface of the oxygen electrode by a predetermined distance and covers the entire SOFC 230 to shield the SOFC 230 from the outside. The outer casing 640 is formed of a material having high thermal conductivity to transfer heat of the heating unit 650 to the SOFC 230 without loss. The outer casing 640 has a gastight structure In order not to leak the exhaust gas supplied to the SOFC 230 to the outside, the supply pipe supplying oxygen or air to the oxygen electrode 630 is disposed on the upper side of the outer casing 640, and the discharge pipe discharging the unreacted air and water is disposed on the lower side thereof. on. A plurality of supply tubes and a plurality of discharge tubes may be disposed on an upper side and a lower side of the outer casing 640. The heating unit 650 is disposed to cover the entire outer casing 640 and uniformly heat the entire SOFC 230. A heating coil can be used as the heating unit 650. The heating unit 650 is covered with a coating formed of an insulating material to prevent heat from leaking to the outside. On the other hand, when the power generating device according to the present invention is installed in the scrubber 295 and the heating temperature of about 600 ° C is maintained in the scrubber 295, the heating unit 650 can be omitted.

FIG. 11 is a diagram illustrating an example in which a plurality of tubular SOFCs illustrated in FIG. 9 are connected in series to obtain a higher voltage.

Referring to FIG. 11, three tubular SOFCs 710, 720, and 730 are connected to each other, and exhaust gas supplied via the first fuel flow passage 712 of the first tubular SOFC 710 is passed from the first tubular SOFC 710 via the second fuel flow passage 714. It is discharged and then immediately flows into the second tubular SOFC 720. Exhaust gas supplied via the second fuel flow passage 714 of the second tubular SOFC 720 is discharged from the second tubular SOFC 720 via the third fuel flow passage 716, and then immediately flows into the third tubular SOFC 730. Power generation is performed using a fuel flow passage that forms a single flow passage before the exhaust gas home process chamber 290 is transferred to the scrubber 295. The air flow passages 722, 724, and 726 are disposed on the upper side of the tubular SOFCs 710, 720, and 730, and the discharge flow passages 732, 734, and 736 are disposed on the lower side thereof. The three tubular SOFCs 710, 720, and 730 can be shielded from the outside with a single housing. Due to this stacked structure, a small installation space can be used to obtain a high voltage. The energy actually produced by SOFC is roughly hundreds of mW per 1 cm ² . When the surface area of the SOFC is 1 m ² , several thousand watts of energy can be generated. This power generation capacity is sufficient for use as an auxiliary power source for the process chamber 290.

In the above description, terms such as "first" and "second" are used to describe various components, but the components should not be limited to the terms. That is, terms such as "first" and "second" are used only to distinguish components from each other. For example, a "first component" may be referred to as a "second component" and a "second component" may be similarly referred to as a "first component" without departing from the scope of the invention. The term "and/or" has the meaning of any one or more of a plurality of combinations.

The components presented in the drawings are independently illustrated to represent different functions in the power generating device according to the present invention, and this does not mean that the individual components are constructed by separate hardware or software components. That is, for ease of explanation, the components are depicted and described as separate components, at least two components may be combined to form a single component or a single component may be divided into multiple components to perform a single function. Embodiments that combine or divide components are within the scope of the invention (as long as they do not depart from the concept of the invention).

Some components may not be essential components for performing basic functions, but may be selective components for merely improving performance. The present invention can also be implemented by means of components necessary for the practice of the present invention, without being implemented by selective components that only improve performance, and includes only basic components other than selective components for improving performance only. The structure of the components is also within the scope of the invention.

When a component is "linked" or "connected" to another component, It means that the component is directly connected or connected to another component, and another component can be inserted therebetween. On the other hand, when a component is referred to as being "directly connected" or "directly connected" to another component, it means that another component is not inserted therebetween.

The terminology used in the description is for the purpose of describing the particular embodiments, and is not intended to limit the invention. The expression singular encompasses the plural as long as the expression can be read clearly. Terms such as "including" and "having" are intended to mean that a feature, a number, a step, an operation, a component, a component, or a combination thereof are used in the description, and it is understood that one or more other features, numbers, The possibility of the presence or addition of steps, operations, components, components or combinations thereof.

While the exemplifying embodiments of the present invention have been shown and described, it is understood that the invention is not to be construed as The concept and scope of the invention are modified in various forms.

200‧‧‧Power generating device

205‧‧‧ gas refiner

210‧‧‧ Mixer

212‧‧‧ first entrance

214‧‧‧second entrance

216‧‧‧Export

220‧‧‧Water supply

230‧‧‧ fuel cell

240‧‧‧Control unit

250‧‧‧First pipeline

252‧‧‧first valve

254‧‧‧Second valve

256‧‧‧ Bypass tube

260‧‧‧Second Pipeline

262‧‧‧Supply adjustment unit

270‧‧‧ third pipeline

272‧‧‧third valve

280‧‧‧Monitoring unit

290‧‧‧Processing room

292‧‧‧ valve

295‧‧‧ scrubber

297‧‧‧cleaner

610‧‧‧ fuel electrode

620‧‧‧ Electrolytes

630‧‧‧Oxygen electrode

640‧‧‧ Shell

650‧‧‧heating unit

700‧‧‧Oxygen electrode

710‧‧‧Electrolyte/First Tubular Oxide Fuel Cell (SOFC)

712‧‧‧First floor/first fuel flow channel

714‧‧‧Second/second fuel flow channel

716‧‧‧ third fuel flow channel

720‧‧‧Fuel Electrode/Second Tube Oxide Fuel Cell (SOFC)

722‧‧‧Air flow channel

724‧‧‧Air flow channel

726‧‧‧Air flow channel

730‧‧‧ Third tubular oxide fuel cell (SOFC)

732‧‧‧Drain flow channel

734‧‧‧Drain flow channel

736‧‧‧Exhaust flow channel

FIG. 1 is a diagram illustrating the principle of power generation in a fuel cell.

2 is a diagram illustrating a configuration of a power generating device according to an exemplary embodiment of the present invention.

FIG. 3 is a diagram illustrating a configuration of a power generating device according to another exemplary embodiment of the present invention.

Figure 4 is a diagram illustrating the principle of power generation by SOFC.

Figure 5 is a diagram illustrating the principle of power generation of a molten carbonate fuel cell (MCFC).

Figure 6 is a diagram illustrating solid oxide fuel using a support A diagram of an example of a battery (SOFC).

Fig. 7 is a view for explaining the structure of a fuel cell according to the present invention.

Figure 8 is a graph illustrating the performance of the fuel cell of Figure 7 relative to the thickness of its electrolyte.

Fig. 9 is a view for explaining an example of a tubular SOFC.

10 is a cross-sectional view and a longitudinal cross-sectional view of the tubular SOFC illustrated in FIG. 9.

Figure 11 is a diagram illustrating an example of a tubular SOFC connected in series to obtain a high voltage.

200‧‧‧Power generating device

210‧‧‧ Mixer

212‧‧‧ first entrance

214‧‧‧second entrance

216‧‧‧Export

220‧‧‧Water supply

230‧‧‧ fuel cell

240‧‧‧Control unit

250‧‧‧First pipeline

252‧‧‧first valve

254‧‧‧Second valve

256‧‧‧ Bypass tube

260‧‧‧Second Pipeline

262‧‧‧Supply adjustment unit

270‧‧‧ third pipeline

272‧‧‧third valve

280‧‧‧Monitoring unit

290‧‧‧Processing room

292‧‧‧ valve

295‧‧‧ scrubber

297‧‧‧cleaner

Claims (21)

An electric power generating device comprising: a mixer that mixes exhaust gas discharged from a process chamber with moisture to adjust an oxygen partial pressure of the exhaust gas; a moisture supplier that supplies the moisture to the mixer; and a fuel cell A fuel electrode, an electrolyte, and an oxygen electrode are included, and the chemistry of the exhaust gas is based on a difference in oxygen partial pressure between the exhaust gas supplied from the mixer to the fuel electrode and oxygen supplied to the oxygen electrode Can be converted into electrical energy. The power generating device of claim 1, further comprising a first valve disposed in a duct connecting the discharge chamber of the process chamber and the mixer, and the first valve Opening and closing by interlocking with the opening and closing operations of the discharge valve disposed in the discharge port of the process chamber. The power generating device according to claim 1 or 2, further comprising: a bypass pipe disposed between the discharge port connecting the process chamber and the pipe and the scrubber of the mixer, and An exhaust gas bypass to the scrubber that refines the exhaust gas; and a second valve disposed in the bypass tube and opened and closed to be from the process after performing a process using a gas containing helium The exhaust gas discharged from the chamber is supplied to the scrubber. The power generating device of claim 1, wherein the moisture supplier adjusts an amount of moisture such that the mixer is The molar ratio of exhaust gas to moisture is in the range of 95:5 to 99:1 and the conditioned moisture is then supplied to the mixer. The power generating device of claim 1, further comprising a monitoring unit that measures an oxygen partial pressure of the exhaust gas supplied from the mixer to the fuel cell, wherein the moisture The supplier adjusts the amount of moisture based on the oxygen partial pressure of the exhaust gas measured by the monitoring unit such that a molar ratio of the exhaust gas to the moisture in the mixer is between 95:5 and 99: In the range of 1, and then the adjusted moisture is supplied to the mixer. The power generating device of claim 1, further comprising a third valve disposed in a pipe connecting the moisture supplier and the mixer, and being disposed in the pipe The opening and closing operations of the discharge valve in the discharge port of the process chamber are opened and closed in a chain. The power generating device of claim 1, further comprising a supply adjusting unit, the supply adjusting unit being disposed to connect the exhaust gas from the mixer to discharge the fuel to the fuel cell via an outlet The fuel is supplied to the conduit of the crucible and it supplies a constant amount of exhaust gas from the mixer to the fuel cell. The power generating device of claim 1, wherein the fuel cell is a solid oxide fuel cell. The power generating device of claim 8, wherein at least one of the fuel electrode and the oxygen electrode of the fuel cell comprises LST (La _0.2 Sr _0.8 TiO _3-δ ). The power generating device of claim 8 or 9, wherein the electrolyte of the fuel cell is formed of CeO ₂ . The power generating device according to any one of claims 1 to 8 wherein the fuel cell comprises a fuel electrode, an electrolyte, an oxygen electrode, and a casing, and wherein the fuel electrode of the fuel cell, The electrolyte and the oxygen electrode are formed in a cylindrical shape having a through hole formed at a center thereof, and the exhaust gas supplied from the mixer passes through the center formed at the fuel electrode The through hole, the inner circumferential surface of the electrolyte and the outer circumferential surface are disposed to be in contact with an outer circumferential surface of the fuel electrode and an inner circumferential surface of the oxygen electrode, respectively, and the outer casing is formed with the oxygen The outer circumferential surface of the electrode separates the air flow passage of a predetermined distance and shields the entire fuel cell from the outside. The power generating device of claim 11, further comprising a heating unit disposed on an outer circumferential surface of the outer casing and raising a temperature of the fuel cell to a predetermined operating temperature. The power generating device of claim 11, wherein the plurality of fuel cells are connected to each other, and the oxygen electrode of the first fuel cell in the adjacent one of the fuel cells is electrically connected to the second fuel cell The fuel electrode, the oxygen electrode of the first fuel cell is electrically insulated from the oxygen electrode of the second fuel cell, and the gas electrode formed in the fuel electrode of the first fuel cell The through hole and the through hole formed in the fuel electrode of the second fuel cell form a single flow passage through which the exhaust gas passes. As described in any one of claims 1, 8, and 9. A power generating device, wherein the fuel cell is disposed in a scrubber that refines the exhaust gas. The power generating device according to any one of claims 1 to 8, wherein the exhaust gas comprises at least one of CH ₄ , H ₂ , SiH _{4 ,} and B ₂ H ₆ . The power generating device of claim 1, wherein the metal support is attached to one of the fuel electrode of the fuel cell and the oxygen electrode. The power generating device of claim 1 or 2, further comprising a gas refiner disposed between the process chamber and the mixer, and freely performing the use of the source containing the crucible After the process of the gas, the exhaust gas supplied from the process chamber is removed, and then the exhaust gas from which the helium gas is removed is supplied to the mixer. The power generating device of claim 17, wherein the gas refiner produces a plasma to separate the ruthenium from the ruthenium-containing compound. A power generating device according to claim 1 or 2, further comprising a cleaner that supplies a fluorine-containing gas to the fuel cell to remove a crucible deposited on the fuel cell. The power generating device of claim 1, wherein the electrolyte comprises a first layer formed of a cerium oxide-based material and a second layer formed of a zirconia-based material, A first layer is in contact with the oxygen electrode of the fuel cell, and the second layer is in contact with the fuel electrode of the fuel cell. The power generating device of claim 20, wherein The thickness ratio of the first layer to the second layer is in the range of 1:1 to 5:1.