TW201326778A - Optical measurement aid with elliptical curved surface structure and optical measurement system - Google Patents
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本發明是關於一種光學量測系統,尤指該光學量測系統中之具有橢圓曲面構造的光學量測輔助器及包含該光學量測輔助器之光學量測系統。The present invention relates to an optical measurement system, and more particularly to an optical measurement aid having an elliptical curved surface configuration in the optical measurement system and an optical measurement system including the optical measurement aid.
如液晶顯示裝置等物品為了解析其光學特性,必須以適當的光學量測系統進行檢驗,於進行光學量測作業必須利用一特定治具將該液晶顯示裝置固定對應於一光學量測儀器。接著,利用該光學量測儀器在各種不同的預定角度分別進行量測液晶顯示裝置之各種角度的光學特性。為了在各種不同的預定角度分別進行量測,操作者需要將該光學量測儀器或液晶顯示裝置之位置變換至不同的角度位置,方能在各種不同的預定角度可進行量測液晶顯示裝置之光學特性。In order to analyze the optical characteristics of an article such as a liquid crystal display device, it must be inspected by an appropriate optical measuring system. For the optical measuring operation, the liquid crystal display device must be fixed to correspond to an optical measuring instrument by using a specific jig. Next, the optical characteristics of the liquid crystal display device at various angles are measured by the optical measuring instrument at various predetermined angles. In order to perform measurement separately at various predetermined angles, the operator needs to change the position of the optical measuring instrument or the liquid crystal display device to different angular positions, so that the liquid crystal display device can be measured at various predetermined angles. Optical properties.
目前已知的光學量測系統中,傳統的焦錐透鏡式(conoscopy)量測系統廣泛應用在平面顯示器的光學量測領域,其可量測得到亮度、對比、視角等光學特性,此焦錐透鏡式量測系統雖然可以快速以及不需複雜的數學運算就可得到量測資料,但在透鏡設計上要避免像差以及須大角度入射來得到視角的資料,所以在透鏡的設計與加工往往是要花很多人力與材料成本,整組機台並不便宜。Among the currently known optical measuring systems, the conventional conoscope measuring system is widely used in the field of optical measurement of flat panel displays, which can measure optical characteristics such as brightness, contrast, and viewing angle. Although the lenticular measurement system can obtain measurement data quickly and without complicated mathematical operations, it is necessary to avoid aberrations and large angle incidence to obtain the angle of view in the lens design, so the lens design and processing often It takes a lot of manpower and material costs, and the whole set of machines is not cheap.
另一種光學量測方法為機械旋轉式,其方法係利用輝度計量測同一位置,再以機械的方法改變待測物角度,以得到不同視角的資料。如台灣專利公開第200928338號之“可調式光學量測治具及其量測方法”發明專利申請案,以及台灣專利第513339號之“液晶面板之可調式光學量測治具”發明專利案等,其分別揭示可調式光學量測治具用以量測液晶顯示裝置之光學特性。Another optical measurement method is mechanical rotation. The method uses the luminance measurement to measure the same position, and then mechanically changes the angle of the object to be measured to obtain data of different viewing angles. For example, the invention patent application of "Adjustable Optical Measuring and Measuring Tool and Measuring Method" of Taiwan Patent Publication No. 200928338, and the invention patent case of "Adjustable Optical Measuring and Measuring Tool for Liquid Crystal Panel" of Taiwan Patent No. 513339 Each of them discloses an adjustable optical measuring fixture for measuring the optical characteristics of the liquid crystal display device.
前述中,利用輝度計量測同一位置,再以機械的方法改變角度,以得到不同視角的資料,此方法雖然簡單、便宜,但量測一片面板所花費時間過久,對現今產量、產品規格種類眾多的業界來說,已漸漸不符經濟效益。In the foregoing, the same position is measured by luminance, and the angle is changed by mechanical means to obtain data of different viewing angles. Although this method is simple and inexpensive, it takes too long to measure a panel, and the current output and product specifications are For a wide variety of industries, it has gradually become less economical.
然而,台灣專利公開第200928338號之專利申請案及台灣專利第513339號之專利之可調式光學量測治具在單次量測操作時,即在不同角度進行量測時,需要調整光學量測治具或光學量測儀器之角度位置,現行規格於完成操作約為20分鐘,操作時間過長。However, the patent application of Taiwan Patent Publication No. 200928338 and the adjustable optical measurement tool of the patent of Taiwan Patent No. 513339 need to adjust the optical measurement in a single measurement operation, that is, when measuring at different angles. The angular position of the fixture or optical measuring instrument, the current specification is about 20 minutes after the completion of the operation, and the operation time is too long.
本發明之主要目的在於提供一種具有橢圓曲面構造之光學量測輔助器及光學量測系統,希藉此設計改善現有光學量測作業費時的問題。The main object of the present invention is to provide an optical measuring aid and an optical measuring system having an elliptical curved surface structure, and thereby designing and improving the time-consuming problem of the existing optical measuring operation.
為達成前揭目的,本發明所提出之具有橢圓曲面構造之光學量測輔助器係包含:一旋轉反射構件,其包含一內反射橢圓曲面、一第一焦點與一第二焦點,所述內反射橢圓曲面為一橢圓球內曲面中的一部分區塊且具有一基準中心軸線;第一焦點與第二焦點位於該基準中心軸線上,內反射橢圓曲面位於第一焦點與第二焦點之間,內反射橢圓曲面相對於基準中心軸線的兩端分別對應於第一焦點與第二焦點且與基準中心軸線具有一預定的距離;以及一旋轉驅動機構,其包含一旋轉作動端,旋轉作動端連接旋轉反射構件,藉由旋轉驅動機構驅動旋轉反射構件以基準中心軸線為中心旋轉,使旋轉的內反射橢圓曲面形成一虛擬橢圓球形內反射曲面。In order to achieve the foregoing object, an optical measuring aid having an elliptical curved surface structure according to the present invention comprises: a rotating reflecting member comprising an inner reflecting elliptical surface, a first focus and a second focus, wherein the inner focus The reflective elliptical surface is a part of the inner curved surface of the elliptical sphere and has a reference central axis; the first focus and the second focus are located on the reference central axis, and the inner reflective elliptical surface is located between the first focus and the second focus, The two ends of the inner reflection elliptical surface with respect to the reference central axis respectively correspond to the first focus and the second focus and have a predetermined distance from the reference central axis; and a rotary drive mechanism including a rotary actuation end and a rotary actuation end connection The rotating reflection member is driven by the rotation driving mechanism to rotate the rotating reflection member centering on the reference central axis, so that the rotating internal reflection elliptical surface forms a virtual elliptical spherical internal reflection curved surface.
本發明所提出之光學量測系統,包含:一如上所述之光學量測輔助器;一偵測器,設置於該第一焦點與第二焦點之其中一個;一待測物,設於該第一焦點與第二焦點之其中另一個;一雷射光源,用以相對於該基準中心軸線呈一傾斜角度發出雷射光通過該待測物後,投射於旋轉的該內反射橢圓曲面上,經反射再投射至該偵測器;以及一分析裝置,用以量測分析該偵測器所偵測到的資料。The optical measuring system of the present invention comprises: an optical measuring aid as described above; a detector disposed at one of the first focus and the second focus; and an object to be tested disposed at the One of the first focus and the second focus; a laser light source for emitting laser light at an oblique angle with respect to the reference central axis, passing through the object to be tested, and projecting on the inner curved elliptical surface of the rotation And then reflected to the detector; and an analyzing device for measuring and analyzing the data detected by the detector.
本發明所提出之另一具有橢圓曲面構造之光學量測輔助器係包含一第一反射腔體,第一反射腔體包含一橢圓球形內反射曲面、一第一焦點與一第二焦點,橢圓球形內反射曲面位於第一反射腔體內部且位於第一焦點與第二焦點之間,第一反射腔體之橢圓球形內反射曲面具有一第一中心軸線通過其中心,第一焦點與第二焦點位於第一中心軸線上,第一反射腔體之一端對應於第一焦點且與第一中心軸線具有一距離而形成一第一入光口,第一反射腔體之另一端對應於第二焦點且與第一中心軸線具有一距離而形成一第一出光口。Another optical measuring aid having an elliptical curved surface structure according to the present invention comprises a first reflecting cavity, the first reflecting cavity comprising an elliptical spherical inner reflecting surface, a first focus and a second focus, an ellipse The spherical internal reflection curved surface is located inside the first reflective cavity and is located between the first focus and the second focus, and the elliptical spherical internal reflective curved surface of the first reflective cavity has a first central axis passing through the center thereof, the first focus and the second The focus is on the first central axis, one end of the first reflective cavity corresponds to the first focus and has a distance from the first central axis to form a first light entrance, and the other end of the first reflective cavity corresponds to the second The focus and a distance from the first central axis form a first light exit.
本發明所提出之另一種光學量測系統,包含:一如上所述之光學量測輔助器;一偵測器,設置於該第一焦點與第二焦點之其中一個;一待測物,設於該第一焦點與第二焦點之其中另一個;一雷射光源,用以相對於該基準中心軸線呈一傾斜角度發出雷射光通過該待測物後,投射於該橢圓球形內反射曲面上,經反射再投射至該偵測器;以及一分析裝置,用以量測分析該偵測器所偵測到的資料。Another optical measuring system according to the present invention comprises: an optical measuring aid as described above; a detector disposed at one of the first focus and the second focus; And the other one of the first focus and the second focus; a laser light source for emitting laser light at an oblique angle with respect to the reference central axis, passing through the object to be tested, and projecting on the elliptical spherical internal reflection surface And reflecting to the detector after being reflected; and an analyzing device for measuring and analyzing the data detected by the detector.
本發明所述光學量測輔助器尚可進一步包含一串接於第一反射腔體一端的第二反射腔體,第二反射腔體包含一橢圓球形內反射曲面、一第三焦點與一第四焦點,橢圓球形內反射曲面位於第二反射腔體內部且位於第三焦點與第四焦點之間,第二反射腔體之橢圓球形內反射曲面具有一第二中心軸線通過其中心,第三焦點與第四焦點位於第二中心軸線上,第二反射腔體之一端對應於第三焦點且與第二中心軸線具有一距離而形成一第二入光口,第二反射腔體之另一端對應於第四焦點且與第二中心軸線具有一距離而形成一第二出光口,第二反射腔體之第二入光口銜接第一反射腔體的第一出光口,第二反射腔體之第三焦點與第一反射腔體的第二焦點重合,第一中心軸線與第二中心軸線呈一直線。The optical measuring aid of the present invention may further include a second reflecting cavity serially connected to one end of the first reflecting cavity, the second reflecting cavity comprising an elliptical spherical inner reflecting surface, a third focus and a first a four-focus, elliptical spherical inner reflection surface located inside the second reflection cavity and located between the third focus and the fourth focus, the elliptical spherical inner reflection surface of the second reflection cavity having a second central axis passing through the center thereof, the third The focus and the fourth focus are located on the second central axis, and one end of the second reflective cavity corresponds to the third focus and has a distance from the second central axis to form a second light entrance, and the other end of the second reflective cavity Corresponding to the fourth focus and having a distance from the second central axis to form a second light exit port, the second light entrance of the second reflective cavity is connected to the first light exit port of the first reflective cavity, and the second reflective cavity The third focus coincides with the second focus of the first reflective cavity, the first central axis being in line with the second central axis.
本發明所提出之另一光學量測系統,係包含:一如上所述之光學量測輔助器;一偵測器,設置於該第一焦點;一待測物,設於該第四焦點;一雷射光源,用以通過位於該第一焦點之該待測物,再投射於該第一反射腔體之橢圓球形內反射曲面上,經該第一反射腔體之橢圓球形內反射曲面反射,通過重合的該第一反射腔體的第二焦點與該第二反射腔體的第三焦點投射至該第二反射腔體的橢圓球形內反射曲面,經反射後投射位於該第二反射腔體的第四焦點的該偵測器;以及一分析裝置,用以量測分析該偵測器所偵測到的資料。Another optical measuring system according to the present invention comprises: an optical measuring aid as described above; a detector disposed at the first focus; and a test object disposed at the fourth focus; a laser light source for passing through the object to be tested at the first focus, and then projecting on the elliptical spherical inner reflection surface of the first reflection cavity, and reflecting through the elliptical spherical inner reflection surface of the first reflection cavity And projecting the second reflective cavity by the second focus of the first reflective cavity and the third focus of the second reflective cavity onto the elliptical spherical internal reflection surface of the second reflective cavity The detector of the fourth focus of the body; and an analyzing device for measuring and analyzing the data detected by the detector.
本發明所提出之光學量測輔助器與光學量測系統,其主要係利用橢球形反射曲面之架構,使其可直接反射一發光點之全角度光線至一光學量測儀器,具備高量測精準度並兼具快速量測與低成本之特性,其操作時間最快可約10秒即能完成量測,作業效率佳,且符合經濟效益;而且本發明光學量測輔助器利用其橢圓球形內反射曲面之構造,提供量測作業之全反射之光路設計,不會有像差問題,且不論光源入射角度的大小,皆可不需移動偵測,並能對待測物量測所需的光學特性。The optical measuring aid and the optical measuring system proposed by the invention mainly adopt an architecture of an ellipsoidal reflecting surface, so that the full-angle light of a light-emitting point can be directly reflected to an optical measuring instrument, and the measuring instrument has high measurement. Accuracy and fast measurement and low cost, the operation time can be completed in about 10 seconds, the operation efficiency is good, and it is economical; and the optical measuring aid of the present invention utilizes its elliptical spherical shape. The structure of the internal reflection surface provides the optical path design for the total reflection of the measurement operation. There is no aberration problem, and no need for motion detection, regardless of the incident angle of the light source, and the optical required for the measurement of the object to be measured characteristic.
如圖1及2所示,係揭示本發明具有橢圓曲面構造之光學量測輔助器之第一較佳實施例,該具有橢圓曲面構造之光學量測輔助器係包含一旋轉反射構件1與一旋轉驅動機構2,其中:所述旋轉反射構件1,其包含一內反射橢圓曲面10、一第一焦點11與一第二焦點12,所述內反射橢圓曲面10為一橢圓球內曲面的一部分區塊且具有一基準中心軸線13,亦即一橢圓球形內曲面相對於基準中心軸線13分割為N分之一(N為正整數)而構成之區塊,使旋轉反射構件1具備體積小,材料成本低,其內反射橢圓曲面10易做表面處理,以及曲面高精確性等特點;該旋轉反射構件1之第一焦點11與第二焦點12位於該基準中心軸線13上,內反射橢圓曲面10位於第一焦點11與第二焦點12之間,內反射橢圓曲面10相對於基準中心軸線13的兩端分別對應於第一焦點11與第二焦點12且與基準中心軸線13具有一預定的距離。以幾何光學觀點,從橢圓球形內曲面之其中一個焦點所發出來的光反射後將會聚集在此橢圓球形內曲面之其中另一個焦點,亦即從該第一焦點11與第二焦點12之其中一個所發出來的光在該內反射橢圓曲面反射後將會聚集在該第一焦點11與第二焦點12之其中另一個。As shown in FIGS. 1 and 2, a first preferred embodiment of an optical measuring aid having an elliptical curved surface structure according to the present invention is disclosed. The optical measuring aid having an elliptical curved surface structure includes a rotating reflecting member 1 and a a rotary drive mechanism 2, wherein: the rotating reflective member 1 comprises an inner reflection elliptical surface 10, a first focus 11 and a second focus 12, the inner reflection elliptical surface 10 being part of an inner surface of an elliptical sphere The block has a reference central axis 13 , that is, an elliptical spherical inner curved surface is divided into N pieces (N is a positive integer) with respect to the reference central axis 13 , so that the rotating reflective member 1 has a small volume. The material cost is low, the inner reflection elliptical surface 10 is easy to be surface-treated, and the surface is highly accurate; the first focus 11 and the second focus 12 of the rotating reflection member 1 are located on the reference central axis 13 and the inner reflection elliptical surface 10 is located between the first focus 11 and the second focus 12, and the two ends of the internal reflection elliptical curved surface 10 with respect to the reference central axis 13 respectively correspond to the first focus 11 and the second focus 12 and have a reference central axis 13 A predetermined distance. From the geometrical point of view, the light emitted from one of the focal points of the elliptical spherical inner surface will be concentrated on the other focus of the elliptical spherical inner surface, that is, from the first focus 11 and the second focus 12 One of the emitted light will be concentrated on the other of the first focus 11 and the second focus 12 after being reflected by the internally reflecting elliptical surface.
所述旋轉驅動機構2包含一旋轉作動端22,旋轉作動端22連接旋轉反射構件1,旋轉驅動機構2可驅動旋轉反射構件1以基準中心軸線13為中心旋轉,使旋轉的內反射橢圓曲面10形成一虛擬橢圓球形內反射曲面10A。The rotary drive mechanism 2 includes a rotary actuating end 22, and the rotary actuating end 22 is coupled to the rotary reflection member 1. The rotary drive mechanism 2 can drive the rotary reflection member 1 to rotate about the reference central axis 13 to rotate the internally reflected elliptical curved surface 10 A virtual elliptical spherical internal reflection curved surface 10A is formed.
於本較佳實施例中,所述之旋轉驅動機構2為一伺服馬達20與一連接構件21之組合,伺服馬達20具有一可旋轉的心軸,連接構件21具有旋轉作動端22,且以旋轉作動端22連接旋轉反射構件1鄰近第一焦點31的一端。In the preferred embodiment, the rotary drive mechanism 2 is a combination of a servo motor 20 and a connecting member 21, the servo motor 20 has a rotatable spindle, and the connecting member 21 has a rotary actuating end 22, and The rotation actuating end 22 connects one end of the rotating reflection member 1 adjacent to the first focus 31.
在第一較佳實施例中,前述具有橢圓曲面構造之光學量測輔助器應用於光學量測系統時,如圖2所示,該光學量測系統除所述光學量測輔助器外,尚包含將一偵測器6之接收端設置於該光學量測輔助器之第一焦點11,待測物7設於第二焦點12處,偵測器6與待測物7亦可互換位置。如圖2所示,進行量測時,以雷射光源5相對於基準中心軸線13呈一傾斜角度發出雷射光投射於第二焦點12並通過待測物7後,投射於旋轉的內反射橢圓曲面10上,經反射再投射至位於第一焦點11的偵測器6接收端,再由偵測器6將偵測到的資料輸送至系統中的分析裝置中進行量測分析。In the first preferred embodiment, when the optical measuring aid having the elliptical curved surface configuration is applied to the optical measuring system, as shown in FIG. 2, the optical measuring system is not limited to the optical measuring aid. The first end point 11 of the optical measuring aid is disposed on the receiving end of the detector 6. The object to be tested 7 is disposed at the second focus 12, and the detector 6 and the object to be tested 7 are also interchangeable. As shown in FIG. 2, when the measurement is performed, the laser light source 5 is projected at an oblique angle with respect to the reference central axis 13 to project the laser beam onto the second focus 12 and pass through the object to be tested, and then project the rotation inner reflection ellipse. The curved surface 10 is reflected and then projected to the receiving end of the detector 6 at the first focus 11, and the detected data is sent by the detector 6 to the analyzing device in the system for measurement analysis.
如圖3所示,是揭示本發明具有橢圓曲面構造之光學量測輔助器之第二較佳實施例,所述光學量測輔助器係包含一第一反射腔體3,第一反射腔體3包含一橢圓球形內反射曲面30、一第一焦點31與一第二焦點32,橢圓球形內反射曲面30位於第一反射腔體3內部且位於第一焦點31與第二焦點32之間,第一反射腔體3之橢圓球形內反射曲面30具有一第一中心軸線33通過其中心,第一焦點31與第二焦點32位於第一中心軸線33上,第一反射腔體3之一端對應於第一焦點31且與第一中心軸線33具有一距離而形成一第一入光口34,第一反射腔體3之另一端對應於第二焦點32且與第一中心軸線33具有一距離而形成一第一出光口35,使從該第一焦點31與第二焦點32之其中一個所發出來的光在該橢圓球形內反射曲面30反射後將會聚集在該第一焦點31與第二焦點32之其中另一個。As shown in FIG. 3, a second preferred embodiment of the optical measuring aid having an elliptical curved surface structure according to the present invention is disclosed. The optical measuring aid includes a first reflecting cavity 3 and a first reflecting cavity. 3 includes an elliptical spherical internal reflection curved surface 30, a first focus 31 and a second focus 32. The elliptical spherical internal reflection curved surface 30 is located inside the first reflective cavity 3 and located between the first focus 31 and the second focus 32. The ellipsoidal inner reflection surface 30 of the first reflection cavity 3 has a first central axis 33 passing through the center thereof, and the first focus 31 and the second focus 32 are located on the first central axis 33, and one end of the first reflection cavity 3 corresponds to Forming a first light entrance opening 34 at a first focus 31 and having a distance from the first central axis 33. The other end of the first reflective cavity 3 corresponds to the second focus 32 and has a distance from the first central axis 33. Forming a first light exit opening 35 such that light emitted from one of the first focus 31 and the second focus 32 is reflected by the elliptical spherical inner reflective surface 30 and then concentrated on the first focus 31 and the first focus Two of the two focus 32.
在第二較佳實施例中,前述具有橢圓曲面構造之光學量測輔助器應用於光學量測系統時,如圖4所示,該光學量測系統除所述光學量測輔助器外,尚包含將一偵測器6之接收端設置於第一反射腔體3之第二焦點32,待測物7設於第一反射腔體3之第一焦點31處,偵測器6與待測物7亦可互換位置。進行量測時,以雷射光源5相對於第一中心軸線33呈一傾斜角度發出雷射光投射於第二焦點32並通過待測物7後,投射於第一反射腔體3的橢圓球形內反射曲面30上,經反射再投射至位於第二焦點32的偵測器6接收端,再由偵測器6將偵測到的資料輸送至系統中的分析裝置中進行量測分析。In the second preferred embodiment, when the optical measuring aid having the elliptical curved surface configuration is applied to the optical measuring system, as shown in FIG. 4, the optical measuring system is not limited to the optical measuring aid. The second focus 32 of the first reflective cavity 3 is disposed on the receiving end of the detector 6. The object to be tested 7 is disposed at the first focus 31 of the first reflective cavity 3, and the detector 6 is to be tested. The object 7 can also be interchanged. When the measurement is performed, the laser light source 5 is emitted at an oblique angle with respect to the first central axis 33, and the laser light is projected onto the second focus 32 and passes through the object 7 to be tested, and is projected into the elliptical sphere of the first reflection cavity 3 The reflective surface 30 is reflected and then projected to the receiving end of the detector 6 at the second focus 32, and the detected data is sent by the detector 6 to the analyzing device in the system for measurement analysis.
如圖5所示,是揭示本發明具有橢圓曲面構造之光學量測輔助器之第三較佳實施例,所述光學量測輔助器係包含一第一反射腔體3以及一串接於第一反射腔體3一端的第二反射腔體4,所述第一反射腔體3與前述光學量測輔助器第二較佳實施例所述之第一反射腔體3大體上相同。As shown in FIG. 5, a third preferred embodiment of the optical measuring aid having an elliptical curved surface structure according to the present invention is disclosed. The optical measuring aid includes a first reflecting cavity 3 and a series connected to the first A second reflecting cavity 4 at one end of the reflecting cavity 3, the first reflecting cavity 3 being substantially identical to the first reflecting cavity 3 described in the second preferred embodiment of the optical measuring aid.
所述第二反射腔體4包含一橢圓球形內反射曲面40、一第三焦點41與一第四焦點42,橢圓球形內反射曲面40位於第二反射腔體4內部且位於第三焦點41與第四焦點42之間,第二反射腔體4之橢圓球形內反射曲面40具有一第二中心軸線43通過其中心,第三焦點41與第四焦點42位於第二中心軸線43上,第二反射腔體4之一端對應於第三焦點41且與第二中心軸線43具有一距離而形成一第二入光口44,第二反射腔體4之另一端對應於第四焦點42且與第二中心軸線43具有一距離而形成一第二出光口45,第二反射腔體4之第二入光口44銜接第一反射腔體3的第一出光口34,第二反射腔體4之第三焦點41與第一反射腔體3的第二焦點32重合,第一中心軸線33與第二中心軸線43呈一直線。使從該第三焦點41與第四焦點42之其中一個所發出來的光在該橢圓球形內反射曲面40反射後將會聚集在該第三焦點41與第四焦點42之其中另一個。The second reflective cavity 4 includes an elliptical spherical internal reflection curved surface 40, a third focus 41 and a fourth focus 42. The elliptical spherical internal reflection curved surface 40 is located inside the second reflective cavity 4 and located at the third focus 41. Between the fourth focuss 42, the ellipsoidal inner reflection surface 40 of the second reflection cavity 4 has a second central axis 43 passing through the center thereof, and the third focus 41 and the fourth focus 42 are located on the second central axis 43, second One end of the reflective cavity 4 corresponds to the third focus 41 and has a distance from the second central axis 43 to form a second light entrance 44, and the other end of the second reflective cavity 4 corresponds to the fourth focus 42 and The second central axis 43 has a distance to form a second light exit opening 45. The second light entrance opening 44 of the second reflective cavity 4 engages the first light exit opening 34 of the first reflective cavity 3, and the second reflective cavity 4 The third focus 41 coincides with the second focus 32 of the first reflective cavity 3, and the first central axis 33 is in line with the second central axis 43. The light emitted from one of the third focus 41 and the fourth focus 42 is reflected by the elliptical spherical internal reflection curved surface 40 to be concentrated on the other of the third focus 41 and the fourth focus 42.
本發明之第一反射腔體3與第二反射腔體4可為不同型式的橢圓腔體,如圖5所示的第三較佳實施例,其中第一反射腔體3為短胖型的腔體,第二反射腔體4為狹長型的腔體。The first reflective cavity 3 and the second reflective cavity 4 of the present invention may be different types of elliptical cavities, as shown in the third preferred embodiment of FIG. 5, wherein the first reflective cavity 3 is of a short fat type. The cavity, the second reflecting cavity 4 is an elongated cavity.
在第三較佳實施例中,前述具有橢圓曲面構造之光學量測輔助器應用於光學量測系統時,如圖6所示,該光學量測系統除所述光學量測輔助器外,尚包含將一待測物7放置於第一反射腔體3的第一焦點31位置,所述待測物7並可被一外部的驅動機構所帶動位移或旋轉,再以高指向性的雷射光源5輸出雷射光,通過反射鏡組8反射後通過位於第一反射腔體3的第一焦點31之待測物7再投射於橢圓球形內反射曲面30上,經第一反射腔體3的橢圓球形內反射曲面30反射,通過重合的第一反射腔體3的第二焦點32與第二反射腔體4的第三焦點41投射至第二反射腔體4的橢圓球形內反射曲面40,經反射後投射位於第二反射腔體4的第四焦點42處的偵測器6接收端,再由偵測器6將偵測到的資料輸送至系統中的分析裝置9中進行量測分析。In the third preferred embodiment, when the optical measuring aid having the elliptical curved surface configuration is applied to the optical measuring system, as shown in FIG. 6, the optical measuring system is not limited to the optical measuring aid. Including placing a test object 7 at the first focus 31 position of the first reflective cavity 3, the test object 7 can be displaced or rotated by an external drive mechanism, and then with a high directivity laser The light source 5 outputs the laser light, which is reflected by the mirror group 8 and then projected onto the elliptical spherical inner reflection surface 30 through the object 7 at the first focus 31 of the first reflection cavity 3, and passes through the first reflection cavity 3 The elliptical spherical internal reflection curved surface 30 is reflected, and the second focus 32 of the first reflective cavity 3 and the third focus 41 of the second reflective cavity 4 are projected to the elliptical spherical internal reflection curved surface 40 of the second reflective cavity 4, After being reflected, the detector 6 is projected at the fourth focus 42 of the second reflecting cavity 4, and the detected data is sent by the detector 6 to the analyzing device 9 in the system for measurement and analysis. .
本發明利用橢圓球形內反射曲面之構造,如圖7所示,提供量測作業之全反射之光路設計,不會有像差問題,且不論光源入射角度的大小,皆可不需移動偵測,並能對待測物量測所需的光學特性。The invention utilizes the structure of the elliptical spherical internal reflection curved surface, as shown in FIG. 7 , which provides the optical path design of the total reflection of the measurement operation, has no aberration problem, and does not need motion detection regardless of the incident angle of the light source. And can be used to measure the optical properties required for measurement.
1...旋轉反射構件1. . . Rotating reflection member
10...內反射橢圓曲面10. . . Internal reflection elliptical surface
10A...虛擬橢圓球形內反射曲面10A. . . Virtual elliptical spherical internal reflection surface
11...第一焦點11. . . First focus
12...第二焦點12. . . Second focus
13...基準中心軸線13. . . Reference center axis
2...旋轉驅動機構2. . . Rotary drive mechanism
20...伺服馬達20. . . Servo motor
21...連接構件twenty one. . . Connecting member
22...旋轉作動端twenty two. . . Rotating end
3...第一反射腔體3. . . First reflecting cavity
30...橢圓球形內反射曲面30. . . Elliptical spherical internal reflection surface
31...第一焦點31. . . First focus
32...第二焦點32. . . Second focus
33...第一中心軸線33. . . First central axis
34...第一入光口34. . . First light inlet
34...第一出光口34. . . First light exit
4...第二反射腔體4. . . Second reflecting cavity
40...橢圓球形內反射曲面40. . . Elliptical spherical internal reflection surface
41...第三焦點41. . . Third focus
42...第四焦點42. . . Fourth focus
43...第二中心軸線43. . . Second central axis
44...第二入光口44. . . Second entrance
45...第二出光口45. . . Second light exit
5...雷射光源5. . . Laser source
6...偵測器6. . . Detector
7...待測物7. . . Analyte
8...反射鏡組8. . . Mirror group
9...分析裝置9. . . Analytical device
圖1是本發明具有橢圓曲面構造之光學量測輔助器第一較佳實施例的平意圖。BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a plan view of a first preferred embodiment of an optical metrology aid having an elliptical curved configuration of the present invention.
圖2是圖1所示光學量測輔助器第一較佳實施例應用於光學量測系統中的使用狀態參考圖。2 is a view showing a state of use of the first preferred embodiment of the optical measuring aid shown in FIG. 1 applied to an optical measuring system.
圖3是本發明具有橢圓曲面構造之光學量測輔助器第二較佳實施例的平意圖。Figure 3 is a plan view of a second preferred embodiment of the optical metrology aid of the present invention having an elliptical curved configuration.
圖4是圖3所示光學量測輔助器第二較佳實施例應用於光學量測系統中的使用狀態參考圖。4 is a view showing a state of use of the second preferred embodiment of the optical measuring aid shown in FIG. 3 applied to an optical measuring system.
圖5是本發明具有橢圓曲面構造之光學量測輔助器第三較佳實施例的平意圖。Fig. 5 is a plan view showing a third preferred embodiment of the optical measuring aid having an elliptical curved surface structure of the present invention.
圖6是本發明具有橢圓曲面構造之光學量測輔助器第三較佳實施例應用於光學量測系統中的使用狀態參考圖。Fig. 6 is a view showing a state of use of a third preferred embodiment of the optical measuring aid having an elliptical curved surface structure applied to an optical measuring system according to the present invention.
圖7是本發明具有橢圓曲面構造之光學量測輔助器第三較佳實施例應用於光學量測系統於不同光源入射角度的使用狀態參考圖。7 is a reference diagram of a state of use of an optical measuring aid having an elliptical curved surface structure according to a third preferred embodiment of the present invention applied to an optical measuring system at different incident angles of light sources.
3...第一反射腔體3. . . First reflecting cavity
30...橢圓球形內反射曲面30. . . Elliptical spherical internal reflection surface
31...第一焦點31. . . First focus
32...第二焦點32. . . Second focus
33...第一中心軸線33. . . First central axis
34...第一入光口34. . . First light inlet
34...第一出光口34. . . First light exit
4...第二反射腔體4. . . Second reflecting cavity
40...橢圓球形內反射曲面40. . . Elliptical spherical internal reflection surface
41...第三焦點41. . . Third focus
42...第四焦點42. . . Fourth focus
43...第二中心軸線43. . . Second central axis
44...第二入光口44. . . Second entrance
45...第二出光口45. . . Second light exit
5...雷射光源5. . . Laser source
6...偵測器6. . . Detector
7...待測物7. . . Analyte
8...反射鏡組8. . . Mirror group
9...分析裝置9. . . Analytical device
Claims (9)
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| TW100149708A TW201326778A (en) | 2011-12-30 | 2011-12-30 | Optical measurement aid with elliptical curved surface structure and optical measurement system |
| CN2012102988350A CN103185664A (en) | 2011-12-30 | 2012-08-21 | Optical measurement assistor with elliptic curved surface structure and optical measurement system |
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| TW100149708A TW201326778A (en) | 2011-12-30 | 2011-12-30 | Optical measurement aid with elliptical curved surface structure and optical measurement system |
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| US3946239A (en) * | 1975-01-24 | 1976-03-23 | The United States Of America As Represented By The United Energy Research And Development Administration | Ellipsoidal cell flow system |
| US4360275A (en) * | 1980-08-11 | 1982-11-23 | Litton Systems Inc. | Device for measurement of optical scattering |
| US5479009A (en) * | 1992-09-25 | 1995-12-26 | Labsphere, Inc. | Highly efficient collection optical systems for providing light detectors such as photodetectors and the like with hemispherical fields of view |
| TW388788B (en) * | 1997-11-19 | 2000-05-01 | Otsuka Denshi Kk | Apparatus for measuring characteristics of optical angle |
| FR2869686B1 (en) * | 2003-12-11 | 2009-06-05 | Flowgene Sa | ELLIPTICAL BED LIGHT DETECTOR |
| JP4226466B2 (en) * | 2003-12-26 | 2009-02-18 | 株式会社ユニテック | Reflective optical system, reflection optical system of diffused light source measuring apparatus, diffused light source measuring apparatus and measuring method thereof |
| CN101189472B (en) * | 2005-06-30 | 2010-05-26 | 微阳有限公司 | Double-paraboloid and double-ellipsoid reflecting system with optimized magnification |
| CN1983643A (en) * | 2005-12-16 | 2007-06-20 | 联杰光电股份有限公司 | Optical device and optical measurement method |
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| KR101748461B1 (en) * | 2010-02-09 | 2017-06-16 | 에너제틱 테크놀로지 아이엔씨. | Laser-driven light source |
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