TW201306951A - Patterning device and method for producing organic EL panel using the patterning device - Google Patents

Abstract

This invention aims to efficiently remove ink from a substrate so as to restrain contamination of the substrate, and to improve productivity in a patterning device. The patterning device 1 includes a wiping-off mechanism 4 for wiping off ink 30 at prescribed positions on a substrate 20. The wiping-off mechanism 4 includes a tape 41 containing solvent 40, a rotary reel 42 for rewinding the tape 41, a tape head 43 for making the tape 41 come into contact onto the substrate 20. By using the tape head 43, the tape 41 is made to come into contact with the substrate 20 for adhering ink 30 on the substrate 20. By means of this structure, since the wiping face of the tape 41 is always a new one when the tape 41 is wiping off the ink 30, the ink 30 can be efficiently removed and thus the tape 41 scarcely deteriorates. Besides, since the chips etc. are seldom produced even after the patterning device has been used for long time, it is possible to restrain contamination of the substrate 20, and to improve productivity.

Description

Pattern forming device and method of manufacturing organic electroluminescent panel using the same

The present invention relates to a pattern forming apparatus for patterning an organic material on a substrate, and a method of manufacturing an organic electroluminescence panel using the pattern forming apparatus.

An electroluminescence (EL) device is formed by forming an element on a transparent substrate with a light-emitting layer sandwiched between an anode and a cathode, and when a voltage is applied between the electrodes, electrons and positive ions are implanted in the light-emitting layer as carriers. When the holes are recombined, excitons are generated, and the excitons are used to emit light. The electroluminescence element is roughly classified into an organic electroluminescence device in which an organic substance is used as a fluorescent substance in a light-emitting layer, and an inorganic electroluminescent element in which an inorganic substance is used as a fluorescent substance in a light-emitting layer. In particular, the organic electroluminescence device can emit light with high luminance at a low voltage, and can generate various light-emitting colors depending on the type of the fluorescent material, and can be easily fabricated into a planar light-emitting panel, and thus can be used as various display devices or backlights. source. In addition, in recent years, organic EL elements corresponding to high brightness requirements have been developed and applied to lighting fixtures, and have attracted attention from all walks of life.

Figure 10 shows the cross-sectional configuration of a general organic electroluminescent panel. The organic electroluminescence panel 101 is provided with a translucent anode layer 103 on a substrate 102 having light transmissivity, and a positive hole injection layer 141 and a positive hole transport layer 142 are provided on the anode layer 103. The organic layer 104 composed of the light-emitting layer 143. Further, a cathode layer 105 having light reflectivity is provided on the organic layer 104. A voltage is applied between the anode layer 103 and the cathode layer 105, whereby light emitted in the light-emitting layer 143 of the organic layer 104 is transmitted through the anode layer 103 and the substrate 102.

The layers constituting the organic electroluminescence panel 101 are generally formed by a film formation method such as vacuum deposition, but among the above layers, for example, the positive hole transport layer 142 may be used. It is formed by coating a solution (ink) in which a low molecular material is dispersed in a solvent. Compared with vapor deposition or the like, since the coating apparatus does not require a large-scale apparatus, the manufacturing cost of the organic electroluminescence panel can be reduced, and since the processing time is short, the productivity is excellent and mass production is suitable. However, in a device using a general organic electroluminescence panel, an electrode lead portion for electrically connecting to an external driving circuit is formed on a peripheral portion of the substrate 102; and a solution constituting the positive hole transport layer 142 is coated. A good electrical connection may not be obtained in the lead portion.

Therefore, when the positive electrode hole transport layer 142 or the like is formed by coating, in order to prevent the solution from being applied to a predetermined place, the substrate 102 is covered with a mask in advance, thereby forming a coating layer by means of a pattern. It is known (for example, refer to Patent Document 1). In addition, after the application of the solution, a device for removing a solution at a predetermined position by a wiping member made of a porous member such as a sponge member is known (for example, refer to Patent Document 2).

[Practical Technical Literature] [Patent Literature]

Patent Document 1: Japanese Laid-Open Patent Publication No. 2010-240511

Patent Document 2: Japanese Laid-Open Patent Publication No. 2006-216253

However, in the apparatus described in Patent Document 1, if the mask is displaced from the substrate, the coating range is not correct and the desired coating layer cannot be obtained. Further, the substrate is contaminated by adhesion of the adhesive covering the tape to the substrate, and the luminous efficiency or life of the organic material is deteriorated. Further, in the device described in Patent Document 2, when the wiping member is used for a long period of time, the wiping member is deteriorated by friction with the substrate, and the debris of the member adheres to the substrate. The contamination of such substrates or the adhesion of debris is the cause of low luminous efficiency or short circuit, which will reduce the organic production. Reliability of electroluminescent panels.

The present invention has been made to solve the above problems, and an object of the invention is to provide a pattern forming apparatus and a method of manufacturing an organic electroluminescence panel using the pattern forming apparatus, which can effectively form a coating layer of a desired shape, and can achieve less substrate contamination. A highly reliable product with high productivity.

In order to solve the above problems, the present invention is a pattern forming apparatus for patterning an ink containing an organic material on a substrate; the pattern forming apparatus is characterized by comprising: an erasing mechanism for removing a predetermined ink on the substrate The wiping mechanism includes: a tape containing a solvent, a rotating reel that winds the reel, and a reel head that abuts the reel on the substrate; and the reel is abutted by the reel The substrate is simultaneously rotated by the substrate so that the ink on the substrate adheres to the web.

In the above pattern forming apparatus, the reel is preferably rotated in such a manner as to wind up the web in a direction opposite to the direction in which the web head is opposite to the web of the mounting substrate.

In the above pattern forming apparatus, the wiping mechanism preferably includes a suction mechanism that sucks ink adhering to the web.

In the above pattern forming apparatus, the wiping mechanism preferably includes a supply mechanism that supplies a solvent to the web.

Preferably, the pattern forming device further includes: a heating mechanism for heating the substrate.

The pattern forming apparatus further includes a transport mechanism that transports the substrate with the coated surface of the substrate facing downward.

In the pattern forming apparatus described above, the wiping mechanism preferably removes the ink on the substrate having the coated surface facing downward.

Preferably, the pattern forming device further includes: a detecting mechanism that detects ultraviolet light on the substrate from which the ink is removed by the wiping mechanism to detect photoluminescence of the ink.

Preferably, the pattern forming device further includes: a measuring mechanism for measuring a contact resistance of the surface of the substrate from which the ink is removed by the wiping mechanism.

In the above pattern forming apparatus, the take-up reel should have a variable contact area between the web and the substrate.

In the above pattern forming apparatus, the take-up reel should preferably be formed in a crown-like shape in contact with the web.

Preferably, the pattern forming apparatus further includes: a laser heating mechanism that irradiates the laser onto the substrate from which the ink is removed by the wiping mechanism to heat the ink remaining on the substrate.

Preferably, the pattern forming device further includes: a monitoring mechanism for measuring a pressing amount when the winding head abuts against the substrate; and an adjusting mechanism for adjusting a distance between the substrate and the winding head to be monitored by the monitoring The amount of pressure measured by the mechanism is constant.

The pattern forming device described above is preferably used in a method of manufacturing an organic electroluminescence panel comprising the step of forming a positive hole transport layer on a substrate having a transparent electrode.

According to the present invention, when a predetermined portion on a substrate coated with ink is wiped off by a tape containing a solvent, since the wiping surface of the web is often a new surface, the ink can be effectively removed from the substrate. A coating layer of a desired shape can be efficiently formed on the substrate. Further, by sequentially feeding the tape, the deterioration of the tape, such as friction and scraping, is less likely to occur, so that contamination of the substrate can be reduced to improve the reliability of the product. In addition, the ink can be wiped out continuously, so productivity can be improved.

[Best Mode for Carrying Out the Invention]

A pattern forming apparatus according to a first embodiment of the present invention will be described with reference to Figs. 1 and 2 . In the pattern forming apparatus 1 of the present embodiment, the functional layer constituting the organic electroluminescence panel formed of the organic electroluminescence element is patterned into a desired shape on the substrate by using an ink containing an organic material. As shown in FIG. 1, the pattern forming apparatus 1 has a wiping mechanism 4 on which an ink 30 is applied by an application mechanism 3 on the entire surface of a substrate 20 conveyed by the transport mechanism 2, and a substrate 20 to which the ink 30 is applied is applied. The predetermined ink 30 is removed. The erasing mechanism 4 can be used alone, and the wiping mechanism 4 itself corresponds to the pattern forming device 1 at this time. Further, the transport mechanism 2, the application mechanism 3, and various mechanisms described later may be combined in the erasing mechanism 4 to construct the pattern forming apparatus 1 as a system for performing a series of pattern forming steps.

The transport mechanism 2 is such that the transport table 21 for transporting the substrate 20 is arbitrarily slidable along a guide rail (not shown) provided on a pedestal (not shown) of the pattern forming apparatus 1. Further, a drive mechanism (not shown) is provided in the transport table 21. By moving the transport table 21 on which the substrate 20 is placed in three dimensions, the drive mechanism can arbitrarily adjust the distance or relationship between the substrate 20 and the coating mechanism 3 and the wiping member 4.

As the substrate 20, for example, a rigid transparent glass plate such as soda glass or alkali-free glass can be used, but it is not limited thereto. For example, a flexible transparent plastic plate such as polycarbonate or polyethylene terephthalate, or a metal thin film made of Al, copper (Cu), or stainless steel can be used. Meaning. In the present embodiment, the substrate 20 in which the transparent electrode serving as the anode layer 103 (see FIG. 10) and the positive hole injection layer 141 are formed in advance is used.

The coating mechanism 3 includes a slit nozzle 31 that ejects the ink 30, an ink tank 32 that stores the ink 30, a pump 33 that supplies the ink 30 in the ink tank 32 to the slit nozzle 31, and a pipe that serves as a flow path of the ink 30. 34. Further, each of the ink tank 32, the pump 33, and the pipe 34 has a hermetic structure so that the ink 30 is sent from the ink tank 32 to the slit nozzle 31 without coming into contact with the outside air. Further, the coating mechanism 3 may have a variable distance between the slit nozzle 31 and the substrate 20 by a lifting member (not shown) that lifts and lowers the slit nozzle 31.

The erasing mechanism 4 includes a reel 41 containing a solvent 40, a rotary reel 42 that winds the reel 41, and a reel 43 that abuts the reel 41 against the substrate 20. In other words, in the pattern forming apparatus 1 of the present embodiment, the take-up reel 42 rotates the reel 42 while the reel 41 is abutted on the substrate 20 by the take-up head 43, whereby the ink 30 on the substrate 20 is attached to the reel 41. Further, the erasing mechanism 4 includes a reel driving unit 44 that rotationally drives the reel 42, a holding member 45 that holds the reel driving unit 44, and a head unit 46 that locks the reel 41 to the take-up reel 43 and holds the reel head 43. . Further, the erasing mechanism 4 includes a supply mechanism 6 that supplies the solvent 40 to the winding tape 41, and a suction mechanism 5 that sucks dust or the like generated during wiping.

The slit nozzle 31 of the coating mechanism 3 includes a discharge port 31a formed in a slit shape, and a box-shaped nozzle storage portion 31b that stores a predetermined amount of the liquid ink 30 thereon. The width of the ejection opening 31a is set so as to match the width of the substrate 20. An injection port 31c of the ink 30 is provided in a side portion of the nozzle storage portion 31b. On the bottom surface of the nozzle storage portion 31b, an outflow groove 31d through which the ink 30 flows out to the ejection opening 31a is formed in a slit shape having a shape similar to that of the ejection opening 31a. The shape from the nozzle storage portion 31b to the discharge port 31a is formed by an inclined surface in which the tip end of the discharge port 31a is gradually narrowed. According to the slit nozzle 31, if the ink 30 in the ink tank 32 is supplied to the ink 30 from the injection port 31c by the pressure of the pump 33, the nozzle is stored. The inside of the Tibetan part 31b is filled with the ink 30. On the other hand, when the ink 30 is continuously supplied at a constant pressure, the ink 30 is ejected from the ejection opening 31a through the outflow groove 31d. Therefore, the slit nozzle 31 can eject the ink 30 onto the substrate 20 in a uniform amount (thickness) along the slit-like ejection opening 31a.

The ink 30 is produced by mixing a functional material for realizing the function of the formed coating layer with a solvent or the like which disperses the functional material. The coating can be used in comparison with the vapor deposition or the like, regardless of the molecular weight of the material. The functional material used in the ink 30 of the present embodiment can be a low molecular material to a polymer material. The term "polymer" as used herein refers to a molecule having two or more repeating units, and also includes an oligomer or the like. The liquid ink 30 applied to the substrate 20 is partially or completely cured by volatilization or the like of the solvent or the like.

Here, when the coating layer to be produced is a positive hole injection/transport layer which is one of the functional layers constituting the organic electroluminescence panel, the material used in the ink 30 is shown below. As the low molecular material, for example, α-NPD (4,4-bis[N-(2-naphthyl)-N-anilino]biphenyl), spiro-NPB ((N,N'-bis[naphthalene-1]) can be used. -N,N'-bis[phenyl]-9,9-spiroindene) (N,N'-bis[naphthalene-1-yl]-N,N'-bis[phenyl]-9, 9-spirobifluorene)), snail-TAD ((2,2',7,7'-肆[N,N-diphenylamino]-9,9'-spiropyrene) (2,2',7,7 '-tetrakis [N, N-diphenylamino]-9,9'-spirobifluorene)), 2-TNATA (4,4',4"-tris[2-naphthylphenylamino]triphenylamine), etc. HAT-CN6 ((1,4,5,8,9,12-hexazazatriphenylene-hexacarbonylonitrile) described in International Publication No. WO2001/49806 or JP-A-2006-173550 can be used. (1,4,5,8,9,12-Hexaazatriphenylene-hexacarbonitrile)), etc., which are derivatives of a nitrogen-linked tri-phenylene skeleton, etc. Further, a polymer material can be used: P3HT (poly-3-hexylthiophene) ), PEDOT/PSS (poly 3,4-ethylenedioxythiophene/polystyrene sulfonate), MEH-PPV (poly[2-methoxy, 5-(2-ethyl-hexyloxy)-1) , 4-phenylene-extended vinyl]), polyaniline, polypyrrole, PVK (polyvinylcarbazole), etc. Further, in order to enhance the electrical conductivity of the electrode, it is also possible to blend an electron-accepting compound. Accepting compound is not particularly restricted, but may be noted that Japanese Laid-Open Patent Publication No. 2003-272860 disclosed the iron (III) chloride, iron bromide, (III), iron iodide (III), Aluminum chloride, aluminum bromide, aluminum iodide, gallium chloride, gallium bromide, gallium iodide, indium chloride, indium bromide, indium iodide, antimony pentachloride, arsenic pentafluoride, boron trifluoride Or an inorganic compound, or an organic compound such as DDQ (dicyandi-dichloropurine), TNF (trinitrofluorenone), TCNQ (nonyl cyanide dimethane), or F4-TCNQ (tetrafluoro-tetrafluoromethane dimethane). Further, the solvent can be used, for example, water, IPA (isopropyl alcohol), butyl acetate, cyclohexanol, ethylene glycol, propylene glycol, chloroform, chlorobenzene, dichloroethane, DMF (N, N-dimethyl group). Indoleamine, DMSO (dimethyl hydrazine), etc.; or a mixed solvent which is appropriately mixed to change the viscosity and surface energy.

For the tape 41, for example, a low-dusting cloth tape woven with nylon or the like is used, and the thickness thereof is preferably 0.2 to 0.5 mm, and the ruthenium can be impregnated with the solvent 40. The width of the tape 41 depends on the size of the coating film formed on the substrate 20 or the size of the tape winding head 43, but is preferably 5 to 10 mm, for example. If the width of the web 41 is too small, the ink 30 is less likely to adhere; if the width of the web 41 is too large, it is difficult to remove the fine ink 30 on the substrate 20.

The reel 42 is composed of a feed reel 42a wound with a new reel 41 to which the ink 30 is not attached, and a return reel 42b which is used to recover the used reel 41. Further, an auxiliary reel 42c is provided between the feed reel 42a and the take-up reel 43, and between the take-up reel 43 and the return reel 42b. The moving speed of the web 41 is set in accordance with the moving speed of the substrate 20 by the transport mechanism 2 and the amount (thickness) of the ink 30 applied on the substrate 20. Specifically, when the moving speed of the substrate 20 is fast and the amount of coating on the substrate 20 is large, the reel 42 speeds up the moving speed of the web 41. For example, the moving speed of the tape 41 should be 10 to 100 mm/s.

Further, the reel 42 is rotated in such a manner as to wind up the reel 41 in the opposite direction. This reverse direction is opposite to the direction in which the reel head 43 is opposite to the traveling direction of the stage (transport table 21) of the mounting substrate 20. In this way, the shear stress on the ink sheet 30 on the substrate 20 can be increased, and the ink 30 can be effectively wiped off.

The suction mechanism 5 is vacuum pumped and connected to the head unit 46 through a pipe 51. Match The front end portion of the tube 51 is connected to the vicinity of the winding tape 41 (not shown) which is conveyed after passing through the winding head 43. According to this configuration, dust or the like generated during the wiping is sucked by the suction mechanism 5, so that the substrate 20 can be prevented from being contaminated by dust or the like. Further, when the amount of the ink 30 adhering to the web 41 is large, a part of the ink 30 can be sucked from the web 41 to reduce the amount of the ink 30 attached to the web 41 of the return reel 42b. Therefore, the ink 30 can be squeezed out from the take-up reel 41 wound around the return reel 42b to prevent contamination of the substrate 20.

The replenishing mechanism 6 includes a solvent bottle 61 that stores the solvent 40, a pump 62 that supplies the solvent 40 in the solvent bottle 61 to the winding belt 41, and a pipe 63 that serves as a flow path of the solvent 40. The solvent 40 may be a suitable solvent depending on the type or composition of the ink 30. However, when the ink 30 is an aqueous solution, water or ethanol may be used. When the ink 30 is an organic solution, an organic solvent such as methanol or isopropyl alcohol may be used. The front end portion of the pipe 63 is connected to the vicinity of the winding tape 41 before being fed from the feed reel 42a (refer to FIG. 1) to the winding head 43 in the head unit 46, as shown in FIG. The supply amount of the solvent 40 varies depending on the moving speed of the web 41, but is preferably, for example, 0.01 to 0.1 cc/min. According to this configuration, since the solvent 40 contained in the web 41 can be appropriately adjusted, the ink 30 can be effectively attached to the web 41. Further, for example, when the ink 30 coated on the substrate 20 by the coating mechanism 3 is dried, the solvent 40 can also dissolve the ink 30 there and cause the ink 30 to adhere to the web 41. Further, the suction mechanism 5 sucks the solvent 40 contained in the web 41 together, not only by sucking the ink 30.

Next, the operation of the pattern forming apparatus 1 of the present embodiment will be described. First, the substrate 20 on which the transparent electrode is formed is transported to the directly below the slit nozzle 31 of the coating mechanism 3 by the transport mechanism 2. On the other hand, the ink 30 is supplied from the ink tank 32 to the slit nozzle 31 by the driving of the pump 33 to apply the ink 30 onto the substrate 20. At this time, the transport mechanism 2 moves the substrate 20 at a constant speed. Thereby, the ink 30 is uniformly applied to the entire top surface of the substrate 20. Next, the transport mechanism 2 transports the substrate 20 to a position where it comes into contact with the winding tape 41 of the take-up head 43. At this time, the contact pressure between the substrate 20 and the tape 41 is preferably about 10 MPa. Next, the reel drive unit 44 rotates the reel 42. The tape 41 is moved in the opposite direction to the traveling direction of the substrate 20. At this time, a predetermined amount of the solvent 40 is automatically supplied from the pump 62 to the winding belt 41. On the other hand, the transport mechanism 2 moves the substrate 20 in a state where the take-up reel 41 abuts against the substrate 20 by the take-up head 43. Further, the reel driving portion 44 rotates the reel 42 to sequentially supply the new reel 41 to the take-up reel 43. Therefore, the ink 30 can be attached to the web 41, and the ink 30 to be adhered to the substrate 20 can be effectively removed. The ink 30 attached to the web 41 is suctioned and removed by the suction mechanism 5 in the head unit 46. As described above, according to the pattern forming apparatus 1 of the present embodiment, after the ink 30 is entirely coated on the substrate 20 by the coating mechanism 3, the ink 30 at a predetermined position can be removed by the wiping mechanism 4, whereby the coating of a predetermined shape can be effectively formed. Floor.

The patterning device 1 preferably includes a heating mechanism (not shown) that heats the substrate 20. The heating mechanism includes a sheath heater built in the transport table 21 or a heater that emits a hot wire such as infrared rays on the top surface of the substrate 20. Since the substrate 20 from which the ink 30 is removed by the tape 41 is heated by the heating mechanism, even when the solvent 40 contained in the tape 41 is attached to the substrate 20, the solvent 40 can be quickly evaporated. Thus, the solvent 40 does not erode the ink 30 (coating layer) which is not removed, and the boundary between the coating layer and the other portions can be properly controlled.

According to the pattern forming apparatus 1 of the present embodiment, when a predetermined portion of the substrate 20 on which the ink 30 is applied is wiped by the web 41 containing the solvent 40, since the wiping surface of the web 41 is often a new surface, Therefore, the ink 30 can be effectively removed to obtain a coating layer of a desired shape. In addition, the tape 41 is sequentially supplied, and the deterioration of the tape 41 such as friction and scraping is less likely to occur. Therefore, contamination of the substrate 20 caused by such scraping debris and the like can be suppressed, and a highly reliable product can be obtained. The removal of the ink 30 can be continuously performed for a long period of time, which can increase productivity. Further, since the length of the winding tape 41 can be freely designed, for example, it is sufficient to ensure a sufficient length in accordance with the maintenance time interval at the time of mass production, and the degree of freedom in production scheduling can be improved. Further, when the pattern forming apparatus 1 is used for the production of an organic electroluminescence panel, for example, the positive hole transport layer 142 shown in Fig. 10 can be efficiently produced, and in this step, since the contamination of the substrate 20 or the like is reduced, and so An organic electroluminescence panel having few defects such as a short circuit can be obtained.

Next, a pattern forming apparatus according to a second embodiment of the present invention will be described with reference to Fig. 3 . In the pattern forming apparatus 1 of the present embodiment, the transport mechanism 2 for transporting the substrate 20 with the coated surface of the substrate 20 facing downward is provided, and the ink 30 is applied to the substrate 20 having the coated surface downward by the coating mechanism 3. On the other hand, the erasing mechanism 4 is provided opposite to the above-described first embodiment in order to remove the ink 30 on the substrate 20 having the coated surface facing downward. The coating mechanism 3 is provided opposite to the above-described first embodiment so that the slit nozzle 31 faces upward. Further, the transport table 21 is provided with a holding mechanism (not shown) that holds the substrate 20 downward.

According to the present embodiment, since the ink 30 is applied to the substrate 20 with the application surface of the substrate 20 facing downward, it is possible to prevent dust or the like from being mixed into the substrate 20 during coating. Further, since the ink 30 on the substrate 20 having the coated surface facing downward is removed, the erased matter is less likely to fall onto the substrate 20, and the production yield can be improved. Further, even if the roll leader 43 and the take-up tape 41 are separated from the substrate 20 after the erasing, since the solvent 40 for wiping is not easily dropped onto the substrate 20, contamination of the substrate 20 can be more reliably suppressed, and high reliability can be obtained. product.

Next, a pattern forming apparatus according to a third embodiment of the present invention will be described with reference to Fig. 4 . The pattern forming apparatus 1 of the present embodiment further includes a detecting means 71 for detecting the photoluminescence of the ink 30 by irradiating ultraviolet rays on the substrate 20 from which the ink 30 is removed by the erasing mechanism 4. The detecting mechanism 71 used is a combination of the ultraviolet light source 71a and the CCD camera 71b on the surface of the imaging substrate 20. The detecting mechanism 71 is mounted on the head unit 46 of the wiping mechanism 4, and after the erasing of the wiped ink 30, the ultraviolet light is continuously irradiated on the substrate 20 to detect the light of the ink 30 on the substrate 20. Luminescence.

Most of the materials constituting the organic layer of the organic electroluminescence panel have semiconductor properties, and emit light at a specific PL wavelength by irradiating ultraviolet rays. Therefore, in the present embodiment, the ultraviolet light source 71a is irradiated with ultraviolet rays to the substrate 20 after the erasing, and the same The surface of the substrate 20 is taken by the CCD camera 71b, and the captured image is compared with the pattern image of the sample. It is confirmed whether or not the ink 30 remains in the portion where the erasing has been performed, whereby the defective product in which the ink 30 remains remains can be detected, and the defective product can be excluded on the production line. The removal of defective products on the production line can suppress the flow of defective products to the subsequent manufacturing steps, so that waste of materials and the like used in the subsequent steps can be reduced, and productivity can be improved. Further, when the wiping is insufficient, feedback control of the moving speed of the web 41 (wiping speed) or the amount of the solvent 40 supplied to the web 41 can be performed to surely remove the ink 30 on the substrate 20. Alternatively, the operator can visually confirm the photoluminescence to exclude defective products instead of using the CCD camera 71b.

Further, according to the present embodiment, it is possible to detect whether or not the ink 30 remains by the presence or absence of photoluminescence by irradiating ultraviolet rays, so that it is not necessary to directly contact the substrate 20 with a sensor or the like. With the non-contact detection, since it is not necessary to take out the substrate 20 from the manufacturing step, for example, when the above-described ink 30 wiping step and the step under vacuum or nitrogen atmosphere are continuously performed, the ambient atmosphere may not be destroyed. checking. Therefore, it is not necessary to stop a series of steps, so that productivity is better, and contamination by particles or moisture or oxygen during inspection can be suppressed.

A pattern forming apparatus according to a modification of the embodiment will be described with reference to Fig. 5 . The pattern forming apparatus 1 of the present embodiment further includes a measuring mechanism 72 for measuring the contact resistance of the surface of the substrate 20 from which the ink 30 is removed by the wiping mechanism 4. The measuring unit 72 is attached to the head unit 46 of the erasing mechanism 4 in the same manner as the detecting unit 71 described above.

In this modification, as in the above-described embodiment, it is confirmed whether or not the ink 30 remains in the portion where the erasing has been performed, whereby the defective product in which the ink 30 remains can be eliminated on the production line. Moreover, this modification can also be applied to the case where the ink 30 does not contain a material that performs photoluminescence. Moreover, since the electrical resistance of the coating film can also be monitored, it is possible to eliminate defective products having electrical properties.

Next, a pattern forming apparatus according to a fourth embodiment of the present invention will be described with reference to Fig. 6 . In the present embodiment, the erasing mechanism 4 has a winding head 43 having a variable contact area between the winding tape 41 and the substrate 20. Specifically, the head unit 46 in the above-described embodiment is taken out from the winding drive unit 44, and a head unit 46' is provided, in which a take-up head having a long shape in the moving direction of the winding belt 41 is provided. 43'. That is, the head units 46, 46' having different sizes of the take-up heads 43, 43' are appropriately switched, whereby the contact area of the web 41 and the substrate 20 is made variable. Further, for example, a plurality of winding heads (not shown) are provided in the head unit 46, and the intervals thereof are made variable in the moving direction of the winding belt 41, whereby the winding belt 41 and the substrate 20 can be reduced. Contact area.

According to the present embodiment, for example, when the ink 30 applied to the edge of the substrate 20 is linearly removed, the above-described winding head 43' can be used to remove the ink 30 in a wide range in one step, so that the removal can be further improved. effectiveness.

A modification of this embodiment will be described with reference to Fig. 7 . In this modification, as shown in FIG. 7(a), the take-up head 43 is formed in a crown shape on a surface in contact with the winding tape 41. By using the tape leader 43, the tape 41 can be brought into contact with the substrate 20 in a narrow area in the width direction of the tape 41, so that the ink 30 on the substrate 20 can be linearly removed, and a finer coating layer can be formed. machining. Further, since the pressure at which the web 41 is pressed against the substrate 20 is partially concentrated, the boundary between the portion where the ink 30 has been removed and the portion where it is not removed is distinguished, and the final processing of the edge of the coating layer where the ink 30 is not removed can be improved. . Further, as shown in Fig. 7 (b), the tape leader 43 having a large width may be used in accordance with the size of the place where the ink 30 is to be removed.

Next, a pattern forming apparatus according to a fifth embodiment of the present invention will be described with reference to Fig. 8 . The pattern forming apparatus 1 of the present embodiment further includes a laser heating mechanism 8, and irradiates the laser onto the substrate 20 from which the ink 30 is removed by the erasing mechanism 4, thereby heating the ink 30 remaining on the substrate 20. The measuring unit 72 is attached to the head unit 46 of the erasing mechanism 4 in the same manner as the detecting unit 71 or the measuring unit 72 in the third embodiment. The laser heating mechanism 8 is preferably used in combination with the above-described detecting mechanism 71 and the like. When the ink 30 remains on the substrate 20, the laser is selectively irradiated thereto.

According to the present embodiment, even if an ink shoal or a hard block exists on the end portion of the portion from which the ink 30 is removed, it can be heated or removed by laser or heated and melted to smooth the ink end portion, thereby suppressing no The production of good products.

Next, a pattern forming apparatus according to a sixth embodiment of the present invention will be described with reference to Fig. 9 . The pattern forming apparatus 1 of the present embodiment has a monitoring mechanism (not shown) for measuring the amount of pressurization when the take-up head 43 abuts against the substrate 20. Further, the pattern forming apparatus 1 has an adjustment mechanism 22 that adjusts the distance between the substrate 20 and the take-up head 43 so that the amount of pressurization measured by the monitoring means is constant. In the illustrated example, a driving member that elevates and lowers the transport table 21 on which the substrate 20 is placed is shown as the adjustment mechanism 22. Further, the adjustment mechanism 22 can also move the take-up head 43 up and down toward the substrate 20. At this time, the reel driving portion 44 appropriately controls the rotational speeds of the reels 42a, 42b to adjust the moving speed of the reel 41 so as not to loosen or excessively stretch the reel 41 in the take-up reel 43.

According to the present embodiment, the amount of pressurization can be monitored in the removing step, and feedback control between the substrate 20 and the take-up belt 41 can be performed at any time. Therefore, for example, even if the substrate 20 itself or the transparent electrode formed thereon has irregularities or inclinations, the ink 30 can be erased with a certain degree of precision, and the output can be improved.

Further, the present invention is not limited to the above embodiment, and various modifications are possible. Similarly to the wiping mechanism 4, the transport mechanism 2 and the application mechanism 3 are driven and controlled by a control device (not shown) or the like, and operate in accordance with a predetermined software. Moreover, the pattern forming apparatus 1 has an operation unit (not shown) for inputting the type of the ink 30, the size and number of the produced coating film, and the like. The soft system is constructed such that the driving of the wiping mechanism 4, the transport mechanism 2, the coating mechanism 3, and the like is optimized based on the operation information input by the operation unit. Further, in the above embodiment, the step of forming the positive hole transport layer 142 of the organic electroluminescence panel is exemplified, but the layer produced by the coating is not limited to the positive hole transport layer 142, and may be applied. It is produced by the light-emitting layer 143 or an electron transport layer (not shown). Furthermore, it is not limited to the organic electroluminescent panel, and can also be applied to The manufacture of a device having a plurality of functional layers, such as an organic solar cell.

1‧‧‧ pattern forming device

2‧‧‧Transportation agency

3‧‧‧ Coating agency

4‧‧‧Erasing agency

5‧‧‧Attracting institutions

6‧‧‧Supply agency

8‧‧‧Roar heating mechanism

20‧‧‧Substrate

21‧‧‧Transportation Desk

22‧‧‧Adjustment agency

30‧‧‧Ink

31‧‧‧Slit nozzle

31a‧‧‧Spit

31b‧‧‧Nozzle Storage Department

31c‧‧‧Injection

31d‧‧‧Outflow ditch

32‧‧‧Ink cans

33‧‧‧ pump

34‧‧‧Pipe

40‧‧‧Solvent

41‧‧‧Reel

42‧‧‧ reel

42a‧‧‧Feed reel

42b‧‧‧Return to scroll

42c‧‧‧Auxiliary scroll

43, 43’ ‧ ‧ roll lead

44‧‧‧Reel drive department

45‧‧‧Retaining members

46, 46’‧‧‧ head unit

51‧‧‧Pipe

61‧‧‧ solvent bottle

62‧‧‧ pump

63‧‧‧Pipe

71‧‧‧Detection agencies

71a‧‧‧UV light source

71b‧‧‧CCD camera

72‧‧‧Measurement agency

101‧‧‧Organic electroluminescent panel

102‧‧‧Substrate

103‧‧‧ anode layer

104‧‧‧Organic layer

105‧‧‧ cathode layer

141‧‧‧Positive hole injection layer

142‧‧‧Positive hole transport layer

143‧‧‧Lighting layer

Fig. 1 is a perspective view of a pattern forming apparatus according to a first embodiment of the present invention.

Figure 2 is a side cross-sectional view showing the junction of the wiping mechanism and the replenishing mechanism in the same device.

Fig. 3 is a perspective view of the pattern forming apparatus according to the second embodiment of the present invention as seen from below.

Fig. 4 is a perspective view of a pattern forming apparatus according to a third embodiment of the present invention.

Fig. 5 is a perspective view of a pattern forming apparatus according to a modification of the above embodiment.

Fig. 6 is a perspective view showing a wiping mechanism used in the pattern forming apparatus according to the fourth embodiment of the present invention.

7(a) and 7(b) are perspective views of a winding head used in the pattern forming apparatus according to the modification of the embodiment.

Fig. 8 is a perspective view of a pattern forming apparatus according to a fifth embodiment of the present invention.

Fig. 9 is a perspective view showing a pattern forming apparatus according to a sixth embodiment of the present invention.

Fig. 10 is a side sectional view showing the configuration of a general organic electroluminescence element.

1‧‧‧ pattern forming device

2‧‧‧Transportation agency

3‧‧‧ Coating agency

4‧‧‧Erasing agency

5‧‧‧Attracting institutions

6‧‧‧Supply agency

20‧‧‧Substrate

21‧‧‧Transportation Desk

30‧‧‧Ink

31‧‧‧Slit nozzle

31a‧‧‧Spit

31b‧‧‧Nozzle Storage Department

31c‧‧‧Injection

31d‧‧‧Outflow ditch

32‧‧‧Ink cans

33‧‧‧ pump

34‧‧‧Pipe

40‧‧‧Solvent

41‧‧‧Reel

42‧‧‧ reel

42a‧‧‧Feed reel

42b‧‧‧Return to scroll

42c‧‧‧Auxiliary scroll

43‧‧‧Reel head

44‧‧‧Reel drive department

45‧‧‧Retaining members

46‧‧‧ head unit

51‧‧‧Pipe

61‧‧‧ solvent bottle

62‧‧‧ pump

63‧‧‧Pipe

Claims (14)

A pattern forming device for patterning an ink containing an organic material on a substrate; the pattern forming device comprising: a wiping mechanism for removing a predetermined ink on the substrate; the erasing mechanism comprising: a coil of solvent, a rotating reel that winds the web, and a take-up head that abuts the web to the substrate; and the web is brought to the substrate by the take-up head while the reel is made Rotating so that the ink on the substrate adheres to the web. The pattern forming apparatus of claim 1, wherein the reel is rotated in a direction in which a winding tape is wound in a direction opposite to a direction in which the reel head is opposite to a platform of the mounting substrate. A pattern forming apparatus according to claim 1 or 2, wherein the wiping mechanism includes a suction mechanism for sucking dust or the like generated in the wiping. The pattern forming apparatus according to any one of claims 1 to 3, wherein the wiping mechanism comprises: a supply mechanism that supplies a solvent to the web. The pattern forming apparatus according to any one of claims 1 to 4, further comprising: a heating mechanism for heating the substrate. The pattern forming apparatus according to any one of claims 1 to 5, further comprising: a transport mechanism that transports the substrate with the coated surface of the substrate facing downward. The pattern forming device of claim 6, wherein the wiping mechanism removes ink on the substrate having the coated surface facing downward. The pattern forming apparatus according to any one of claims 1 to 7, further comprising: a detecting mechanism for detecting ultraviolet light on the substrate from which the ink is removed by the wiping mechanism to detect the light of the ink Luminescence. A pattern forming apparatus according to any one of claims 1 to 7, wherein Furthermore, the measuring mechanism is configured to measure the contact resistance of the surface of the substrate from which the ink is removed by the wiping mechanism. The pattern forming apparatus according to any one of claims 1 to 9, wherein the take-up head has a variable contact area of the web with the substrate. The pattern forming apparatus according to any one of claims 1 to 10, wherein the take-up head is formed such that a surface in contact with the web is crown-shaped. The pattern forming apparatus according to any one of claims 1 to 11, further comprising: a laser heating mechanism that irradiates the laser on the substrate from which the ink is removed by the wiping mechanism, and remains in the The ink on the substrate is heated. The pattern forming apparatus according to any one of claims 1 to 12, further comprising: a monitoring mechanism for measuring a pressing amount when the winding head abuts against the substrate; and an adjusting mechanism for adjusting the substrate and The distance between the take-up heads is such that the amount of pressurization measured by the monitoring mechanism is constant. A method of manufacturing an organic electroluminescence panel, comprising the steps of: using a pattern forming apparatus according to any one of claims 1 to 14 to form a positive hole transport layer on a substrate having a transparent electrode .